1307573 九、發明說明: 【發明所屬之技術領域】 本發明係有關於一種驅動技術,尤指一種運用壓電元 件之超音波驅動裝置。 -【先前技術】 • 精密定位技術是製造產品、測量、運轉各種機器的重 ,技術之,卩这著精松工程的不斷進步,不論是半導體產 業、精密機械工業、生物細胞領域、光電系統、顯微機構、 表面工程、STM、SPM等方面,皆朝向微小化、精密化的方 向前進,因此對於微米或次微米級的定位系統需求 劇增。 具有機電轉換力的壓電材料(Plez〇electric 以其質輕、體積小、反應快、解析度高等特性, =世紀開始’即被應用作為感測器(Sen·)或少數的致 ,^(Ultraso„ic _ nSCIUCer;>4。過去由於遲滯現象 ysteresis)及輸出位移的限制, 健在感測器上,只有少„4用之材科的應用大部分 由於麗電材料在材料性質 4一近年來 發,使得麼電材料能在低輪人究的開 輸出,因而更適於各翻動場合的應用。有^的位移 在I 970年至I 972年間,由西門子 直線㈣電超音波馬達之後,開啟了超音波^司發表出 應用,特別是曰本工業更是積極投入這個領=與 J8622 5 1307573 f ’例如SHi腿、C卿、卿、咖〇、齡·等公司, = = 波馬達的專利與應用。簡單地說,即利 人電屢會1生變形的特性,使其產生超音波 ·=的:械振動,再透過摩擦驅動的機構設計,讓超音波 =:Γ馬達一般可提供旋轉運動的驅動力,或再搭 ..配轉換機構的設計而形成線性運動的驅動裝置。 卜告第589777號發明專利中提出一種多層薄盤 :二!: 馬達,係㈣電材質的蜂鳴片通以高電 生交㈣縮的型變,連動彈性振動板產 生饤駐波而供給外部動能, 成驅動模^由於此專利前稱的方式組 才能提供雙向的旋轉運動,因:==動模: 4:土祕、, 、取馬運結構稷雜,且體 知難以微型化而造成應用範圍之限制。 田F·、^國第4’ 857, 791號專利中揭示一種線性馬達,係利 差電材料之逆壓電效應產生交替伸縮 :::振頻率的兩支腳對-表面進行交替d =性馬達對應於該表面產生線性運動。“此專利前= 二〜知以南電壓驅動兩支腳的形變,造成應用產品的限 制’特別是無法運用於可攜式的產品中。 腳的交替形蠻i隹耔蚪.^ , 逆用兩支 等缺點動,亦存在高磨耗與高溫 雖然現有的超音波馬達可提供旋轉運動與線性運動 用’但均需搭配額外的摩擦機構或轉換機構進行 s式的驅動應用,不可避免的造成動力損範與降低驅動 6 18622 靈敏度, 數量過多 同時也因為間接驅 '體積難以縮小等 動的因素造成多重磨損、元件 缺點。 如何開發-種超音波驅動裝置,以克服先前技 ::驅:皿敏度不良、多重磨損、元件數量過多、體積難以 &小寺缺點’實為目心欲解決的課題。 -【發明内容】 #於以上所述_技術之缺點,本發明之—目的係提</ RTI> </ RTI> </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; - [Prior Art] • Precision positioning technology is the basis for manufacturing products, measuring and operating various machines, and technology. This is the continuous advancement of precision engineering, whether it is semiconductor industry, precision machinery industry, biological cell field, photoelectric system, Micro-mechanisms, surface engineering, STM, SPM, etc. are all moving toward miniaturization and precision, so the demand for micro- or sub-micron positioning systems has soared. Piezoelectric materials with electromechanical conversion (Plez〇electric is characterized by its light weight, small size, fast response, high resolution, etc. = the beginning of the century) is applied as a sensor (Sen·) or a small number of Ultraso„ic _ nSCIUCer;>4. In the past due to hysteresis ysteresis) and output displacement limitation, the sensor is on the sensor, and only the application of the material is mostly due to the material properties of the material in the recent years. The hair is made, so that the electrical material can be turned on in the low-round, so it is more suitable for the application of the flipping occasion. The displacement of ^ is between 970 and I 972, after the Siemens linear (four) electric ultrasonic motor, Opened the application of Ultrasonic Division, especially in the industry, it is actively investing in this collar = and J8622 5 1307573 f 'such as SHi leg, C Qing, Qing, curry, age, etc., = = wave motor Patent and application. Simply put, the characteristics of the person's electricity will be deformed once, so that it produces ultrasonic vibrations: mechanical vibration, and then through friction-driven mechanism design, so that the supersonic =: Γ motor can generally provide The driving force of the rotary motion, Then, the design of the conversion mechanism is used to form a linear motion driving device. In the invention patent No. 589777, a multi-layer thin disk is proposed: two!: The motor, the (four) electric material of the buzzer is passed through a high electrician. (4) The shrinking type change, the interlocking elastic vibrating plate generates the 饤 standing wave and supplies the external kinetic energy, and the driving mode ^ can provide the two-way rotating motion because of the method group formerly referred to in this patent, because: ==moving mode: 4: earth secret, , and the structure of the horse is noisy, and it is difficult to miniaturize and the scope of application is limited. A linear motor is disclosed in the patent No. 4,857,791, which is the reverse pressure of the differential electrical material. The electrical effect produces alternating stretching::: the two feet of the vibration frequency are alternated with the surface d = the sex motor corresponds to the surface to produce linear motion. "This patent before = two ~ know the south voltage to drive the deformation of the two feet, resulting in The limitations of the application products are particularly unsuitable for use in portable products. The alternating shape of the feet is i隹耔蚪.^, and the two are used in reverse. There are also high wear and high temperatures, although the existing ultrasonic motors can be used. Provide rotary motion and linear transport Use 'but all need to be combined with additional friction mechanism or conversion mechanism for s-type drive application, inevitably causing power loss and lowering the sensitivity of driving 6 18622, too much quantity and also because of the indirect drive's difficulty in reducing the volume and other dynamic factors. Multiple wear and component defects. How to develop a kind of ultrasonic drive device to overcome the previous technology: drive: poor sensitivity, multiple wear, excessive number of components, difficult volume & small temple defects 'actually solved problems - [Summary] In the above-mentioned shortcomings of the technology, the object of the present invention is
i、-種採取直接㈣設計的超音波驅㈣置,讀昇驅動 靈敏度。 本毛月之-人目的係提供一種採取直接驅動設計的 超音波驅動裝置,以避免多重磨損。 本毛月之;^目的係提供—種採取直接驅動設計的 超音波驅動裝置,以減少元件數量、便於組裝及縮小體積。 為達上揭目的以及其他目的,本發明提供—種超音波 驅動裝置,係包括:_轉子;—基座;以及一壓電元件, 結:於該基座上並接觸該轉子之圓周面,可供外加電場而 進行圓周運動,藉以驅轉該轉子。 . 胃壓電元件係以其外壁接觸該轉子之圓周面。較佳 ,地,於該壓電元件外壁與該轉子之接觸區域復可包括一例 如為氧化㉟層之耐磨層,以防止磨損、延長使用壽命。 〃為達相同之目的,本發明提供一種超音波驅動裝置, 係包括:-滑動元件;一基座;以及—壓電元件,結合於 該基f上並接觸該滑動元件,可供外加電場而進行圓周運 動’籍以驅動該滑動元件進行線性運動。 18622 7 1307573 該壓電元件係以其外壁接觸該滑動元件。較佳地,於 該壓電元件外壁與該滑動元件之接觸區域復可包括一例如 為氧化鋁層之耐磨層,以防止磨損、延長使用壽命。 - 前述兩種實現本發明之技術中,該基座上係具有例如 .呈v子形斷面之炎持元件,用以爽持結合該壓電元件。較 佳地,該基座上係具有二夹持元件,二夾持元件係可分別 夾持結合於該壓電元件之外壁鄰近兩端之節點。節點位置 係可為壓電元件兩端距離其長度乘以0. 224的乘積處。 _ 該壓電元件係包括一壓電陶瓷體、以及設置於該壓電 陶瓷體外壁且相互間隔之第一、第二電極。較佳地,該壓 電陶竞體係呈例如為圓形斷面、多邊形斷面之管狀或柱狀 結構。該第一及第二電極分別可供對應接設外加電場之負 極、正極。該第一電極涵蓋於該壓電陶瓷體外壁之範圍不 大於1 80度,該第二電極涵蓋於該壓電陶瓷體外壁之範圍 不大於90度。此外,復可包括一設置於該壓電陶瓷體外壁 A之第三電極,且該第三電極係分別與該第一電極、第二電 極相互間隔排列;該第一電極係可供接設外加電場之負 .極,而該第二、第三電極分別可供接設兩組外加電場之正 極。 該壓電元件亦可係包括一具有偏心軸孔之金屬管、以 及分別貼設於該金屬管外壁兩側且互呈90度夾角之二壓 電片。較佳地,該金屬管係例如一銅管,可供接設外加電 場之負極,而該二壓電片分別可供接設兩組外加電場之正 極。 8 18622 1307573 由方;本發明所提供之超音波驅動裝置,主要係利用— »又於基座上之壓電元件直接接觸並驅動轉子或滑動元件。 亦即,例如轉子或滑動元件等被驅動物件係利用壓電元件 直接驅動而可避免動力損耗,因此可提昇其驅動靈敏度。 -同時,由於直接驅動之設計,也可避免多重磨損而延長使 -用哥命’並且減少元件數量以便於組I及縮小體積。由此 可知,本發明可克服先前技術驅動靈敏度不良、多重磨損、 鲁元件數量過多、體積難以縮小等缺點。 、 、以下係藉由特定的具體實施例說明本發明之實施方 j ’熟習此技蟄之人士可由本說明書所揭示之内容輕易地 瞭解本發明之其他優點與功效。本發明亦可藉由其他不同 的具體實施例加以施行或應用,本說明書中的各項細節亦 可基於不同觀點與應用,在不恃離本發明之精神下進 種修飾與變更。 【實施方式】 ⑩^卩下之實施例係進―步詳細說明本發明之技術手 f ’但並非用以限制本發明之料。同時,應注意的是, 本發明之超音波驅動裝置係可提供旋轉運動或線性運動, :,驅動旋轉或線性運動之被驅動物件的附加物體可視實 长而又化且此等變化均屬熟悉該項技術者所得了解 者’故圖式中僅繪製例如轉子或滑動元件等被驅動物件, =再為文贅述其附加物體之變化。因此,於下列實施例中 1不相關結構與形狀之圖式,僅為例示性說明’並非用 以限定本發明,合先敘明。 18622 9 1307573 第一實施例 請參閱第1至第3B圖,其中第i圖係顯示本發明超 音波驅動裝置之第—實施例示意圖,%第2圖係顯示第一 實施例的局部構造示意圖,第3A及第3B圖則顯示本發明 ,音波驅動裝置所運用之兩種壓電元件之構造示意圖。如 第1圖及第2圖所示,本實施例之超音波驅動裝置係包括 -基座卜二夾持元件2、一轉子3、以及一壓電元件4。 該基座1係用以結合該壓電元# 4,⑨本實施例中, 該基座1係呈-框型結構,以供該壓電元件4之兩端跨置。 由於本發明所提供之超音波驅動裝置可視應用 座1之形狀與結構,甚至該基座工亦可為其他之設置面, 中僅例示性的表現用以結合壓電元件4所需之基 座…,並非用以限制該基座k結構或形狀。 一夹持兀件2分別設置於該基座1声 夾持固定該壓電元件4於該基座二:二::二 夾持元件2呈V字形斷而 g 、 Ά 中 " 於該壓電元:夾持元件2分別夾持結合 為麼電::! 鄰近兩端之節點,所稱節點位置係 實施例中2=離其長度乘以0.224的乘積處。雖^ =惟任何熟習該項技術者均可理解藉由單=: 夹持元件2,亦即圖式中僅例示性的表現用以 “寸“壓電兀件4節點所需之夾持元件2型能:, 限制該央持元件2之結構、形狀或數量Λ。,亚非用以 该轉子3係例如-結合於轉轴上之轉盤,惟熟習該項 18622 1307573 ί術者均可理解轉子3亦可替換為例如轉轴、轉輪等刑 悲,端視應用之被驅動物件而定 土 盤為限。 口式中所不之轉 電元件4係透過夹持元们結合於該基座 -亚錯其外壁與該轉子3之圓周 ’ .觸,可供外加電場而進行圓二運:轉盤)直接接 旋轉運動,且該μ電元件4外壁之接觸區域=料進行 為氧化鋁層之耐磨声,茲、& 次係預狄一例如 W丄 層2錯以降低磨耗而延長使用畚入 另外,本實施朗提供之超音波驅料置巾^γ。 ::側向驅動之塵電元件4,以供外加電場於該塵: 圓周運動傳達到其外壁’使其外 :: 轉子3進行旋轉運動。 手h力▼動 為施加電場於_電元件4,復可利 之内側分別設有供接执Λ+ 人符兀件2 23,以拉-# , 外加電場正極之二接點2卜 曰一接點2卜23對應接觸壓電元件4之其中 •用例如為導電材質且接觸於壓電元件4另—兒其, 座1充當接設外加電場之查么 电極之基 場接線通路…,:此可提供簡易的外加電 吐 田然该夾持元件必須為絕緣材質。另外 二接點2卜23除可設置於夾持元件2之外,亦可 = 片之形式分別接線導引至壓 /蛉電 2、基座]夕η从 極與失持元件 r1. 並不以圖式之設計形式為限,如此,兮美 座1亦可採用絕緣材質。 此δ亥基 姑孔i°::A圖所示’該壓電元件4係可包括-具有偏心 轴孔之金屬管4] β 八’艰^ π 18622 1307573 昇其驅動靈敏度。同時,由於本發明採取直接驅動 ,十,也可避免多重磨損而延長使用壽命,並且益須間 ㈣區動之動力傳遞或轉換機構,相對可減少元件數量、、 -於组裝及縮小體積。 從 —實祐.例 •第4圖為依照本發明之超音波 戶斤繪製之圖式。其中,盘第“彻丄置的第…例 以相同或近似之元件符;^一同或近似之元件係 |太安 虎表不,亚省略詳細之敘述,以使 本水之說明更清楚易懂。 元件t實施例之,音波驅動裝置同樣包括有基座卜夾持 以及壓電元件4等設計,夾持 置接點2卜23。盘第一门兀件2内側亦可設 替換铺 “列不同的是,於本實施例中係 供巧轉子為一滑動元件5。 心動兀件5係例如—可供設置於滑執上 所屬技術領域中具有通常知識者均可理解滑動元:5二 ,替換為例如滑執與滑塊之組合、 ’、β 祯雁々、士 ° 或他直線移動元件,端 視C'用之被驅動物件而定, 該㈣元件4係透過夹持=::t之滑塊為限。 並藉其外壁與該滑動元件5直接接觸”於絲座1上, 行圓周運動,藉·該二=:卜加電場而進 壓電元件4外壁之接觸區域二二運動’且该 耐磨層42,藉以降低磨耗而延手:;::如為⑽層之 4之驅動原理及έ士構 、使用哥°”由於壓電元件 再費述。u聽與第-實施例相同,於此不 18622 13 1307573 综合前述本發明所提供之超音波驅動裝置實施例,主 =係利用-設於基座上之廢電元件直接接觸並驅動轉子或 滑動元件。”,例如轉子或滑動元件等被驅動物件係利 用壓電元件直接驅動而可避免動力損耗,因此可提昇其驅 動靈敏度。同時,由於直接驅動之設計,也可避免多重磨 -損而延長使用壽命,並且減少元件數量以便於組裝及縮小 體積。是以’本發明可克服先前技術驅動靈敏度不良、多 重磨損、s件數量過多、體積難以縮小等缺點。 ”、不$敘述可知,本發明之超音波驅動裝置,已可利於 筚、先如技術之種種缺失,並兼具前述之多種實質功效增 進與高度產業利用價值。 以上所述之具體實施例,僅係用以例釋本發明之特點 及功效,而非用以限定本發明之可實施料,在未脫離本 二月^揭之精神與技術範_下’任何運用本發明所揭示内 4而九成之等效改變及修飾,均仍應為下述之 圍所涵蓋。 β寸』祀 【圖式簡單說明】 第1圖係顯示本發明超音波驅動裝置之第一 意圖; τ細•例不 .乐2圖係顯示本發明超音波驅動裝置之局部構造示意 圖, 〜 第3Α及3Β圖係顯示本發明超音波驅動裝 兩種壓:電元件之構造示意圖;以1 所運用之 弟4圖係顯示本發明超音波驅動裝置之第二實施例示 18622 14 1307573 意圖。 【主要元件符號說明】 1 基座 -2 夾持元件 .21 接點 23 接點 3 轉子 4 壓電元件 >41 金屬管 41, 壓電陶瓷體 42 对磨層 43 壓電片 43, 第一電極 45 壓電片 45, 第二電極 • 47, 第三電極 5 滑動元件i, - adopts the direct (four) design of the ultrasonic drive (four) set, read the drive sensitivity. This Maoyue-People aims to provide an ultrasonic drive with a direct drive design to avoid multiple wear. The purpose of this is to provide an ultrasonic drive that uses a direct drive design to reduce component count, ease of assembly, and volume reduction. In order to achieve the above and other objects, the present invention provides an ultrasonic driving device comprising: a rotor; a base; and a piezoelectric element, the base being on the base and contacting the circumferential surface of the rotor, A circular motion is applied to the applied electric field to drive the rotor. The gastric piezoelectric element contacts the circumferential surface of the rotor with its outer wall. Preferably, the contact area between the outer wall of the piezoelectric element and the rotor may include, for example, a wear layer of 35 layers of oxidation to prevent wear and prolong service life. For the same purpose, the present invention provides an ultrasonic driving device comprising: a sliding member; a base; and a piezoelectric element coupled to the base f and contacting the sliding member for applying an electric field. Performing a circular motion 'drives the sliding element for linear motion. 18622 7 1307573 The piezoelectric element contacts the sliding element with its outer wall. Preferably, the contact area between the outer wall of the piezoelectric element and the sliding element may include a wear layer such as an aluminum oxide layer to prevent wear and prolong the service life. - In the two techniques for carrying out the invention, the susceptor has, for example, a vascular holding member having a v-shaped cross section for holding the piezoelectric element. Preferably, the base has two clamping members, and the two clamping members are respectively clamped to the nodes adjacent to the outer ends of the outer wall of the piezoelectric member. The position of the node can be the product of the length of the piezoelectric element from its length multiplied by 0.224. The piezoelectric element comprises a piezoelectric ceramic body and first and second electrodes disposed on the outer wall of the piezoelectric ceramic and spaced apart from each other. Preferably, the electrothermal pottery system has a tubular or columnar structure such as a circular cross section and a polygonal cross section. The first and second electrodes are respectively connected to the negative pole and the positive pole of the applied electric field. The first electrode covers the outer wall of the piezoelectric ceramic to be no more than 180 degrees, and the second electrode covers the outer wall of the piezoelectric ceramic to be no more than 90 degrees. In addition, the composite electrode includes a third electrode disposed on the outer wall A of the piezoelectric ceramic, and the third electrode is respectively spaced apart from the first electrode and the second electrode; the first electrode is available for connection The second and third electrodes are respectively connected to the positive electrodes of the two sets of applied electric fields. The piezoelectric element may also include a metal tube having an eccentric shaft hole, and two piezoelectric sheets respectively attached to both sides of the outer wall of the metal tube and at an angle of 90 degrees to each other. Preferably, the metal tube is, for example, a copper tube for connecting the negative electrode of the applied electric field, and the two piezoelectric sheets are respectively connected to the positive poles of the two sets of applied electric fields. 8 18622 1307573 by the invention; the ultrasonic drive device provided by the invention mainly uses - - and the piezoelectric element on the base to directly contact and drive the rotor or the sliding element. That is, the driven object such as the rotor or the sliding member is directly driven by the piezoelectric element to avoid power loss, so that the driving sensitivity can be improved. - At the same time, due to the design of the direct drive, it is also possible to avoid multiple wear and extend the use of the gods and reduce the number of components to facilitate the group I and reduce the volume. It can be seen that the present invention overcomes the disadvantages of prior art driving sensitivity, multiple wear, excessive number of components, and difficulty in shrinking the volume. The following is a description of the embodiments of the present invention by way of specific examples. Those skilled in the art can readily appreciate the other advantages and advantages of the present invention from the disclosure herein. The present invention may be embodied or applied in various other specific embodiments. The details of the present invention can be modified and changed without departing from the spirit and scope of the invention. [Embodiment] The embodiment of the present invention is described in detail with reference to the technical hand of the present invention, but is not intended to limit the material of the present invention. At the same time, it should be noted that the ultrasonic drive device of the present invention can provide a rotary motion or a linear motion: the additional object of the driven object that drives the rotational or linear motion can be visually long and reproducible and all of these changes are familiar. The learner obtains the understanding that only the driven object such as the rotor or the sliding element is drawn in the drawing, and the change of the additional object is further described. Therefore, the drawings of the unrelated structures and shapes in the following embodiments are merely illustrative and are not intended to limit the invention. 18622 9 1307573 First Embodiment Please refer to FIG. 1 to FIG. 3B, wherein FIG. 1 is a schematic view showing a first embodiment of the ultrasonic driving device of the present invention, and FIG. 2 is a partial structural view showing the first embodiment. Figs. 3A and 3B are views showing the construction of two kinds of piezoelectric elements used in the sound wave driving device of the present invention. As shown in Figs. 1 and 2, the ultrasonic driving device of the present embodiment includes a susceptor 2 clamping member 2, a rotor 3, and a piezoelectric element 4. The susceptor 1 is used to bond the piezoelectric element #4, 9. In this embodiment, the susceptor 1 has a frame-like structure for the two ends of the piezoelectric element 4 to straddle. Since the ultrasonic driving device provided by the present invention can visualize the shape and structure of the application base 1, even the pedestal can be other mounting surfaces, and only the exemplary performance is used to combine the pedestal required for the piezoelectric element 4. ..., not to limit the structure or shape of the base k. A clamping member 2 is respectively disposed on the base 1 to acoustically clamp the piezoelectric element 4 to the base 2: two: the two clamping members 2 are V-shaped and g, Ά in the pressure The electric element: the clamping element 2 is respectively clamped and combined for electricity::! Near the nodes at both ends, the so-called node position is in the embodiment 2 = the product of its length multiplied by 0.224. ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ Type 2 energy:, limits the structure, shape or number of the holding element 2. The Asian-African is used for the rotor 3 system, for example, to be coupled to the rotating shaft of the rotating shaft, but those skilled in the art can understand that the rotor 3 can also be replaced with, for example, a rotating shaft, a rotating wheel, etc. The driven object is limited to the soil plate. The electric component 4 that is not in the mouth is connected to the pedestal of the pedestal by the clamping element, and the outer wall of the yoke is connected to the circumference of the rotor 3. The contact can be applied to the electric field for direct operation: the turntable) Rotational motion, and the contact area of the outer wall of the μ electrical component 4 = material is made to be the wear-resistant sound of the aluminum oxide layer, and the sub-system of the second layer, such as the W layer 2, is used to reduce the wear and prolong the use of the intrusion. The ultrasonic wave drive towel provided by the present embodiment provides a gamma. :: The dust-driven element 4 is driven laterally for the application of an electric field to the dust: a circular motion is transmitted to its outer wall 'to make it outer :: The rotor 3 performs a rotational motion. The hand h force ▼ moves to apply an electric field to the _ electrical component 4, and the inner side of the re-profit can be respectively provided with a connection Λ+人符兀2 23, to pull-#, plus the electric field positive electrode 2 contact 2 曰 曰The point 2b 23 corresponds to the contact piezoelectric element 4, for example, is made of a conductive material and is in contact with the piezoelectric element 4, and the seat 1 serves as a base field wiring path for the electrode of the applied electric field... This provides a simple external electric charge. The clamping element must be made of insulating material. In addition, the two contacts 2 and 23 can be disposed outside the clamping member 2, and can also be connected to the pressure/clamping power 2, the base, and the η slave pole and the missing component r1. It is limited to the design of the drawing. In this way, the beauty seat 1 can also be made of insulating material. The Δ 亥 基 i i : : : 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该At the same time, due to the direct drive of the present invention, it is also possible to avoid multiple wear and prolong the service life, and the power transmission or conversion mechanism of the (4) zone can reduce the number of components, and assemble and reduce the volume. From - for example. Figure 4 is a diagram of the ultrasonic drawing according to the present invention. Among them, the first part of the disk is the same or similar component; ^ the same or similar component system|Tai Anhu does not, the detailed description is omitted, so that the description of the water is clearer and easier to understand. In the embodiment of the component t, the sound wave driving device also includes a design of the base pad and the piezoelectric element 4, and the clamping contact point 2 is 23. The inner side of the first door member 2 can also be provided with a replacement column. The difference is that in the present embodiment, the rotor is a sliding element 5. The heartbeat 5 is, for example, available for use in the technical field of the slider. The general knowledge can understand the sliding element: 5, replaced by, for example, a combination of a slipper and a slider, ', β 祯 々, 士° or he moves the component linearly, depending on the driven object used for C', and the component 4 is limited by the slider of clamping =::t. And the outer wall thereof is in direct contact with the sliding element 5" on the wire base 1, and moves in a circular motion, and the second contact area of the outer wall of the piezoelectric element 4 is moved by the second electric field and the wear layer is 42, to reduce the wear and delay: ;:: If the (10) layer of the 4 drive principle and gentleman structure, use brother °" due to piezoelectric components. u listening to the same as the first embodiment, here no. 18622 13 1307573. In combination with the above-described embodiment of the ultrasonic driving device provided by the present invention, the main body is directly contacted and driven by the waste electrical component provided on the base. element. The driven object such as the rotor or the sliding element is directly driven by the piezoelectric element to avoid power loss, thereby improving the driving sensitivity. At the same time, due to the direct drive design, multiple wear-and-loss can be avoided to prolong the service life. And reducing the number of components to facilitate assembly and downsizing. It is a drawback of the present invention that overcomes the disadvantages of prior art driving sensitivity, multiple wear, excessive number of pieces, and difficulty in shrinking the volume. The sound wave driving device can be used to facilitate the lack of various technologies, such as the above-mentioned various physical effects and high industrial utilization value. The specific embodiments described above are only used to illustrate the features and functions of the present invention, and are not intended to limit the implementation of the present invention, without departing from the spirit and technical scope of the present invention. Equivalent changes and modifications within the scope of the invention disclosed herein are still to be covered by the following.寸 祀 祀 图 图 图 图 图 第 第 第 第 第 第 第 第 τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ The 3 Α and 3 Β diagrams show the two types of voltages of the ultrasonic drive of the present invention: a schematic diagram of the electrical components; the second embodiment of the ultrasonic drive of the present invention shows the first embodiment of the ultrasonic drive of the invention 18622 14 1307573. [Description of main component symbols] 1 pedestal-2 clamping element.21 contact 23 contact 3 rotor 4 piezoelectric element>41 metal tube 41, piezoelectric ceramic body 42 pair of grinding layer 43 piezoelectric sheet 43, first Electrode 45 piezoelectric sheet 45, second electrode • 47, third electrode 5 sliding element