TWI306600B - Fabrication method of stamper for optical information recording medium, master disk of stamper for optical information recording medium, and optical information recording medium - Google Patents
Fabrication method of stamper for optical information recording medium, master disk of stamper for optical information recording medium, and optical information recording medium Download PDFInfo
- Publication number
- TWI306600B TWI306600B TW093126209A TW93126209A TWI306600B TW I306600 B TWI306600 B TW I306600B TW 093126209 A TW093126209 A TW 093126209A TW 93126209 A TW93126209 A TW 93126209A TW I306600 B TWI306600 B TW I306600B
- Authority
- TW
- Taiwan
- Prior art keywords
- recording medium
- information recording
- optical information
- stamper
- layer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/263—Preparing and using a stamper, e.g. pressing or injection molding substrates
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Description
1306600 形成第INi薄膜的步驟;以02或Ar氣體之電漿來處理前 述第INi薄膜的步驟;及於前述處理後之前述第INi薄膜 上以濺鍍Ni材料而形成第2Ni薄膜的步驟; 且,從前述導電膜剝離前述#刻層與前述#刻阻止 5 層的步驟係一將已形成前述第INi薄膜之層與已形成前 述第2Ni薄膜之層剝離的步驟。 13.如申請專利範圍第1項之光資訊記錄媒體用壓模之製造 方法.,其中對於前述光阻層之前述蚀刻層的選擇比為 1.0以上。 10 14. 一種光資訊記錄媒體用壓模,其係以如申請專利範圍第 1項之光資訊記錄媒體用壓模之製造方法所製造者。 15. 如申請專利範圍第14項之光資訊記錄媒體用壓模,其係 一於資訊記錄面上形成信號凹點之高密度光資訊記錄 媒體用壓模;且分別對應前述信號凹點之深度與凹點寬 15 之凸部的高度與寬之比實質上為1.0以上。 16. 如申請專利範圍第15項之光資訊記錄媒體用壓模,其中 前述信號凹點寬之大小為0.18//m以下。 17. —種光資訊記錄媒體用壓模之母盤,係於基板上具有蝕 刻層及形成在前述姓刻層上之可姓刻的光阻層者; 20 前述光阻層之特定部分的結晶狀態係藉曝光而改 變,且前述特定部分或前述特定部分以外的部分係藉蝕 刻而選擇性地被去除; 而前述Ί虫刻層中因去除前述光阻層而產生之露出 於外部之一部份前述蝕刻層係藉蝕刻來選擇性地被去 30 1306600 除而形成凹部; 且該蝕刻層係以具有耐酸性之材料為主成分,該光 阻層係以與前述具有耐酸性之材料在材料或組成上相 異的無機氧化物作為主成分者。 5 18.如申請專利範圍第17項之光資訊記錄媒體用壓模之母 盤,其中該光資訊記錄媒體為高密度光資訊記錄媒體; 且分別對應於形成在前述高密度光資訊記錄媒體之 資訊記錄面上之信號凹點之深度與凹點寬的前述凹部 之深度與寬之比實質上為1.0以上。 10 19.如申請專利範圍第18項之光資訊記錄媒體用壓模之母 盤,其中前述凹部之寬為0.18//m以下。 20. —種光資訊記錄媒體,其係使用以如申請專利範圍第1 項之光資訊記錄媒體用壓模之製造方法所製作之光資 訊記錄媒體用壓模,並藉射出壓縮成形而製作者。 15 21.如申請專利範圍第20項之光資訊記錄媒體,其中該光資 訊記錄媒體為高密度光資訊記錄媒體,且於資訊記錄面 上形成信號凹點之深度與凹點寬之比為1.0以上。 22.如申請專利範圍第21項之光資訊記錄媒體,其中前述信 號凹點寬之大小為0.18 μ m以下。 20 31
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003308416 | 2003-09-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200518087A TW200518087A (en) | 2005-06-01 |
TWI306600B true TWI306600B (en) | 2009-02-21 |
Family
ID=34101276
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093126209A TWI306600B (en) | 2003-09-01 | 2004-08-31 | Fabrication method of stamper for optical information recording medium, master disk of stamper for optical information recording medium, and optical information recording medium |
Country Status (7)
Country | Link |
---|---|
US (1) | US20050063289A1 (zh) |
EP (1) | EP1511027B1 (zh) |
KR (1) | KR20050024195A (zh) |
CN (1) | CN100390886C (zh) |
AT (1) | ATE435487T1 (zh) |
DE (1) | DE602004021755D1 (zh) |
TW (1) | TWI306600B (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080265449A1 (en) | 2004-04-15 | 2008-10-30 | Koninklijke Philips Electronics, N.V. | Optical Master Substrate with Mask Layer and Method to Manufacture High-Density Relief Structure |
EP1732071A1 (en) * | 2005-06-09 | 2006-12-13 | Sony Corporation | Lens positioning method, cutting method, positioning method and cutting apparatus |
FR2909797B1 (fr) * | 2006-12-08 | 2009-02-13 | Commissariat Energie Atomique | Formation de zones en creux profondes et son utilisation lors de la fabrication d'un support d'enregistrement optique |
JP2008269720A (ja) * | 2007-04-23 | 2008-11-06 | Canon Inc | 透光性スタンパ、透光性スタンパの製造方法及び多層光記録媒体の製造方法 |
CN103151053B (zh) | 2008-10-14 | 2015-12-09 | 旭化成电子材料株式会社 | 热反应型抗蚀剂材料、使用它的热光刻用层压体以及使用它们的模具的制造方法 |
JP4768848B2 (ja) * | 2009-12-07 | 2011-09-07 | 株式会社東芝 | 電鋳用原盤及びその製造方法 |
KR101065707B1 (ko) * | 2010-09-16 | 2011-09-19 | 엘지전자 주식회사 | 사출금형용 스탬퍼 제작방법 |
US9856319B2 (en) | 2012-12-28 | 2018-01-02 | Abbvie Inc. | Monovalent binding proteins |
CN108249390A (zh) * | 2018-01-17 | 2018-07-06 | 高世雄 | 一种在聚酰亚胺薄膜表面制作微纳结构的方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4724043A (en) * | 1984-09-04 | 1988-02-09 | International Business Machines Corporation | Process for forming a master mold for optical storage disks |
JPS6168296A (ja) * | 1984-09-13 | 1986-04-08 | Matsushita Electric Ind Co Ltd | 光学情報記緑部材 |
US5051340A (en) * | 1989-06-23 | 1991-09-24 | Eastman Kodak Company | Master for optical element replication |
US5043251A (en) * | 1989-11-29 | 1991-08-27 | The United States Of America As Represented By The Secretary Of The Navy | Process of three dimensional lithography in amorphous polymers |
FR2716563B1 (fr) * | 1994-02-21 | 1996-06-07 | Digipress Sa | Substrat préformaté, substrat préformaté comportant des informations à dupliquer, leurs procédés de fabrication et procédé de fabrication d'un disque maître et/ou d'un disque optique. |
JP3058062B2 (ja) * | 1995-10-13 | 2000-07-04 | 日本電気株式会社 | 光ディスク用記録原盤の製造方 |
TW525159B (en) * | 1998-05-14 | 2003-03-21 | Matsushita Electric Ind Co Ltd | Formation method for metallic stamper and metallic stamper and, manufacture method for optical disk substrate with the use of the stamper and optical disk fabricated by the manufacture method |
WO2000007182A1 (fr) * | 1998-07-28 | 2000-02-10 | Matsushita Electric Industrial Co., Ltd. | Disque optique et lecteur de disque optique |
US6872511B2 (en) * | 2001-02-16 | 2005-03-29 | Sharp Kabushiki Kaisha | Method for forming micropatterns |
JP4610770B2 (ja) * | 2001-03-30 | 2011-01-12 | キヤノン株式会社 | 光ディスク原盤の製造方法 |
TWI292910B (zh) * | 2001-06-11 | 2008-01-21 | Sony Corp | |
JP3592285B2 (ja) * | 2001-06-28 | 2004-11-24 | 住友電気工業株式会社 | ポリイミド層を含む積層体のエッチング方法 |
US20030064293A1 (en) * | 2001-09-07 | 2003-04-03 | Polight Technologies Ltd. | Holographic recording medium |
US7887711B2 (en) * | 2002-06-13 | 2011-02-15 | International Business Machines Corporation | Method for etching chemically inert metal oxides |
EP1482494A3 (en) * | 2003-05-28 | 2007-08-29 | Matsushita Electric Industrial Co., Ltd. | Method for producing master for optical information recording media |
-
2004
- 2004-08-31 TW TW093126209A patent/TWI306600B/zh not_active IP Right Cessation
- 2004-08-31 EP EP04020654A patent/EP1511027B1/en not_active Not-in-force
- 2004-08-31 KR KR1020040068964A patent/KR20050024195A/ko not_active Application Discontinuation
- 2004-08-31 DE DE602004021755T patent/DE602004021755D1/de active Active
- 2004-08-31 US US10/930,600 patent/US20050063289A1/en not_active Abandoned
- 2004-08-31 AT AT04020654T patent/ATE435487T1/de not_active IP Right Cessation
- 2004-08-31 CN CNB2004100683404A patent/CN100390886C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20050063289A1 (en) | 2005-03-24 |
DE602004021755D1 (de) | 2009-08-13 |
EP1511027A2 (en) | 2005-03-02 |
TW200518087A (en) | 2005-06-01 |
EP1511027A3 (en) | 2007-03-21 |
CN1591633A (zh) | 2005-03-09 |
EP1511027B1 (en) | 2009-07-01 |
CN100390886C (zh) | 2008-05-28 |
KR20050024195A (ko) | 2005-03-10 |
ATE435487T1 (de) | 2009-07-15 |
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Legal Events
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MM4A | Annulment or lapse of patent due to non-payment of fees |