TWI304476B - Electrostatic discharge test apparatus and method thereof - Google Patents
Electrostatic discharge test apparatus and method thereof Download PDFInfo
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mm TW3124PA 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種靜電放電測試技術領域，且特別 是有關於一種靜電放電測試裝置及其方法。 【先前技術】 靜電放電（Electrostatic Discharge，ESD)是造成大多 數的電子元件或電子系統受到過度電性應力（ElectricalMm TW3124PA IX. Description of the Invention: [Technical Field] The present invention relates to the field of electrostatic discharge testing technology, and in particular to an electrostatic discharge testing device and method therefor. [Prior Art] Electrostatic discharge (ESD) is caused by excessive electrical stress on most electronic components or electronic systems (Electrical)
Overstress，EOS)破壞的主要因素。這種破壞會導致半導體 元件以及電細糸統等’產生誤動作或形成一種永久性的毁 壞’因而影響積體電路(Integrate(j circuits, ICs)的電路功 能，而使得電子產品工作不正常。因此，目前市面上所周 的電子產品均須通過電磁兼容測試中的靜電放電測試賴 才能販售。目前在進行靜電放電測試時，通常是利用符名 法規規範的靜電模擬器（electr〇static discharge generat〇rOverstress, EOS) is the main factor of destruction. Such damage can cause semiconductor components, such as semiconductor devices, to cause malfunction or form a permanent damage, thus affecting the circuit functions of integrated circuits (integrated circuits), which make the electronic products work abnormally. At present, the electronic products on the market must pass the electrostatic discharge test in the electromagnetic compatibility test before they can be sold. At present, in the electrostatic discharge test, the electrostatic simulator (electr〇static discharge generat) is usually used. 〇r
ESD generator)(又稱為靜電槍）來產生靜電，以放電屋 待測產品，藉此測試產品是否有靜電放電缺陷。 ^ 一般來說，在利用一調整至預設值（例如：4KV)备 2搶進行靜電放電測試時，係將靜電槍碰觸待測產品$ 之—處，以使得靜電電荷能夠分布至整個產品<ESD generators (also known as electrostatic guns) generate static electricity to discharge the product to be tested, thereby testing the product for electrostatic discharge defects. ^ Generally, when using an adjustment to a preset value (for example, 4KV) to perform an electrostatic discharge test, the electrostatic gun is touched at the position of the product to be tested, so that the electrostatic charge can be distributed to the entire product. <
:式=品仍，可以正常操作，則代表待測產品輸 S右待測產品在進行靜電放電測試後，往、、目丨方口 π L 無法操作或產生誤動作之产來，則# 、“' ^ 17 放電缺p ^ Γ 表該待測產品有靜1 、…而，在進行測試時，靜電槍是與待測產^ 5 外部殼體碰觸，因此無、、 地方發生靜電問題。令d仵知在待測產品内部那—個 殼體表面打人靜電μ，=用靜μ對—個電腦主機之 時’測試人員往往無二果該電麟主機馬上當機。此 更無法直接找出是因二:電腦主機當機的原因， 子元件發生問題。自機之主機板上的那一個電 上因此，目前在進行靜 試人員的經驗來推測出發：剛試時’往往需要依靠測 可症導致產品誤動作的:生門蹲之處，然後反覆檢測 及檢測工時。 關凡件。〜此，將非常耗費人力 【發明内容】 有鑑於此，本發明的目的就 从置及其方法，用以尋找待巧供-種靜電放電測 利用數條導線來作為靜電脈衝之 剛試失敗物件。主要 物受靜電影響之區域。如 包路徑，藉以定義待測 失敗物件的精確度外，二&高尋找待測物中測試 声率 亦大幅即省工時及成本並增加產品 、根據本發明的目的，提出—種靜電放電測試裝置，包 =測试平台及數條導線。測試平㈣以放置待測物，數條 ‘線佈叹於測試平台。當靜電脈衝被提供至此些導線之其 中$線且待測物發生誤動作時，則待測物中對應導線之 一區域内具有測試失敗物件。 根據本發明的目的，提出一種靜電玫電測試方法，用 1304476: Type = product still, can be operated normally, it means that the product to be tested is sent to the right product to be tested. After the electrostatic discharge test, the product is not able to operate or produce a malfunction. #," ' ^ 17 Discharge lack p ^ Γ The sample to be tested has static 1 , ..., and when the test is carried out, the electrostatic gun is in contact with the external housing of the product to be tested, so there is no static problem in the place. d know that in the inside of the product to be tested, the surface of the shell is hitting the static μ, = when using the static μ pair - when the computer is hosted, the tester often has no chance that the electric lining host will immediately crash. This is even more difficult to find directly. The second reason is that the computer mainframe is down, the sub-component has a problem. The one on the main board of the self-machine, therefore, the experience of the static test personnel is currently presumed to start: the test often needs to rely on the test. It can cause malfunction of the product: the threshold of the birth, and then repeatedly detect and test the working hours. Guanfan. ~ This will be very labor intensive [invention] In view of this, the object of the present invention and its method Used to find awaiting Measure the use of several wires as the failure test object of the electrostatic pulse. The area where the main object is affected by static electricity. If the package path is used to define the accuracy of the object to be tested, the second & high search for the test sound rate in the test object. In addition, it saves labor and cost and increases the product. According to the object of the present invention, an electrostatic discharge test device is provided, which includes a test platform and a plurality of wires. The test is flat (4) to place the object to be tested, and several 'line cloths Suppressing the test platform. When an electrostatic pulse is supplied to the wire of the wires and the object to be tested malfunctions, there is a test failure object in a region of the corresponding wire in the object to be tested. According to the object of the present invention, an electrostatic solution is proposed. Rose test method, with 1304476
三達編號：TW3124PA β 以尋找待測物中測試失敗物件。首先，放置待測物於佈設 有數條導線之測試平台。接著，提供靜電脈衝至此些導線 之其中一導線。最後，若待測物發生誤動作，則待測物中 對應導線之一區域内具有測試失敗物件。 • 為讓本發明之上述目的、特徵、和優點能更明顯易 ' 懂，下文特舉較佳實施例，並配合所附圖式，作詳細說明 如下： 攀 【實施方式】 第一實施例 請參照第1圖，其繪示乃依照本發明第一實施例之靜 電放電測試裝置之示意圖。靜電放電測試裝置100包括測 試平台110、靜電產生單元120、開關元件130、及接地介 面140，其中測試平台110佈設有複數條導線。 上述測試平台110與接地介面140耦接，以使得測試 平台100接地，亦即測試平台110可透過接地介面140來 ⑩ 將其所累積的靜電電荷導入接地端，以避免測試平台110 因多次輸入靜電脈衝Ρ而累積過多靜電，導致使用者可能 受到危害。 開關元件130分別耦接測試平台110之該些導線與靜 電產生單元120。測試平台110具有一表面S，用以放置 處於正常操作狀態的待測物D(以虛線框表示）。於本實 施例中，測試平台110為一印刷電路板（printed circuit board，PCB)，在其他實施例中，測試平台110亦可為其他 7 -1304476Sanda number: TW3124PA β to find the test failed object in the test object. First, place the object to be tested on a test platform with several wires. Next, an electrostatic pulse is supplied to one of the wires of the wires. Finally, if the object to be tested malfunctions, there is a test failure object in one of the corresponding wires in the object to be tested. The above described objects, features, and advantages of the present invention will become more apparent and appreciated from the following description. Referring to Fig. 1, there is shown a schematic view of an electrostatic discharge test apparatus in accordance with a first embodiment of the present invention. The electrostatic discharge test apparatus 100 includes a test platform 110, an electrostatic generation unit 120, a switching element 130, and a ground plane 140, wherein the test platform 110 is provided with a plurality of wires. The test platform 110 is coupled to the ground interface 140 to ground the test platform 100. That is, the test platform 110 can pass the accumulated electrostatic charge to the ground through the ground interface 140 to prevent the test platform 110 from being input multiple times. Electrostatic pulses smash and accumulate too much static electricity, causing the user to be harmed. The switching elements 130 are coupled to the wires and the static electricity generating unit 120 of the test platform 110, respectively. The test platform 110 has a surface S for placing a D to be tested (indicated by a dashed box) in a normal operating state. In this embodiment, the test platform 110 is a printed circuit board (PCB). In other embodiments, the test platform 110 can also be other 7 - 1304476.
三達編號：TW3124PASanda number: TW3124PA
% 能夠佈設該些導線之等效裝置。於本實施例中，待測物D 為電腦裝置的主機板，在其他實施例中，待測物D可為筆 記型電腦、手機、或個人數位助理裝置（PDA)。 於本實施例中，該些導線包括複數條第一導線L1〜Ln • 及複數條第二導線L1’〜Lm’，其中η及m為正整數。由於 * 本實施例之測試平台110採用印刷電路板來實施，因此該 些第一導線L1〜Ln及該些第二導線L1，〜Lm’可以利用一般 印刷電路板製程來分別形成於不同層。亦即，該些第一導 • 線L1〜Ln與該些第二導線L15〜Lm’分別被佈設在不同平 面。例如：該些第一導線L1〜Ln可以被佈設在測試平台 110之表面S，而該些第二導線L1，〜Lm，可以被佈設在鄰 近表面S之另一表面，其中該些第一導線L1〜Ln所在之表 面可以與該些第二導線L1’〜Lm’所在之表面平行。此外， 該些第一導線L1〜Ln可以彼此相互平行，該些第二導線 L1’〜Lm’亦可彼此相互平行。 另外，以上視圖來看測試平台110,則被佈設於該測 • 試平台110之該些第一導線L1〜Ln與該些第二導線 L1’〜Lm’相互交叉而夾一預設角度，於本實施例中，該預 設角度為90度，也就是說，該些第一導線L1〜Ln與該些 第二導線L1’〜Lm’彼此正交而形成一類似棋盤格子的二維 平面。請注意，雖然該些第一導線L1〜Ln與該些第二導線 L1’〜Lm’以上視圖觀之是形成一個二維平面，但該些第一 導線L1〜Ln與該些第二導線L1’〜Lm’分別位於不同平面， 所以沒有直接接觸。 8 * 1304476% The equivalent of these wires can be routed. In this embodiment, the object to be tested D is a motherboard of a computer device. In other embodiments, the object to be tested D may be a notebook computer, a mobile phone, or a personal digital assistant device (PDA). In this embodiment, the wires include a plurality of first wires L1 to Ln and a plurality of second wires L1' to Lm', wherein n and m are positive integers. Since the test platform 110 of the present embodiment is implemented by using a printed circuit board, the first wires L1 to Ln and the second wires L1, Lm' can be formed in different layers by a general printed circuit board process. That is, the first conductive lines L1 to Ln and the second conductive lines L15 to Lm' are respectively disposed on different planes. For example, the first wires L1 LLn may be disposed on the surface S of the test platform 110, and the second wires L1, LLm may be disposed on the other surface of the adjacent surface S, wherein the first wires The surface on which L1 to Ln are located may be parallel to the surface on which the second wires L1' to Lm' are located. Further, the first wires L1 to Ln may be parallel to each other, and the second wires L1' to Lm' may be parallel to each other. In addition, when the test platform 110 is viewed from the above view, the first wires L1 L Ln disposed on the test platform 110 and the second wires L1 LL to Lm ′ are intersected with each other by a predetermined angle. In this embodiment, the preset angle is 90 degrees, that is, the first wires L1 LLn and the second wires L1 LL LLm are orthogonal to each other to form a two-dimensional plane similar to a checkerboard grid. Please note that although the first wires L1 L Ln and the second wires L1 LL Lm' are viewed from above to form a two-dimensional plane, the first wires L1 L Ln and the second wires L1 are formed. '~Lm' are located in different planes, so there is no direct contact. 8 * 1304476
三達編號：TW3124PA 當然，在其他實施例中，該些第一導線L1〜Ln與該些 弟一導線L· 1〜Lm的炎角可為其他角度5且該些第一導線 L1〜Ln與該些第二導線L1，〜Lm’交叉所形成之圖案、該些 導線寬度、彼此間距、及彼此平行與否皆可視所需之精確 度、待測物尺寸、或測試效果考量作設計。The third wire number: TW3124PA. Of course, in other embodiments, the first wires L1 LLn and the ridges of the wires 1·Lm may be other angles 5 and the first wires L1 LLn and The patterns formed by the intersection of the second wires L1, Lm', the widths of the wires, the spacing between the wires, and the parallelism with each other can be designed according to the required precision, the size of the object to be tested, or the test effect.
上述靜電產生單元120係透過開關元件130來耦接該 些弟一導線L1〜Ln及該些第二導線L1’〜Lm’。於本實施例 中’靜電產生單元120採用靜電模擬器（electr〇static discharge generator，ESD generator )來產生一靜電脈衝 p， 其中靜電脈衝P較佳為2至5千伏（kV)左右。 由於上述開關元件130分別耦接該些第一導線L1〜Ln 及該些第二導線L1’〜Lm’，因此靜電產生單元12〇可透過 開關元件130之操作，來提供靜電脈衝^該些導線之其 中一導線。進—步說，在進行靜電放電測試時，開關元;半 130可以被-單晶片或微控制器來控制，使得靜 π，所提供之靜電_ p可以自動依 右及由上至下)輸出至各第一導線⑹(二^ L1〜Lm 〇因此，測試者無需拿著靜 一 V、、l 進行靜電放電，所以在制上非常便/ —，該些導線 中一二生120輸出靜電脈衝ρ至該些導緣之1 干波用者判斷或透過相關之檢J備: 不波4，來偵測待测物D是否 又備如 待測物D發生誤動作，則待測物Μ對庫動作。若 内具有一測試失敗物件。 、〜5亥導線之一區域 9 mm *以待測物D為手機中之零組件為例，輸出靜電脈衝p 至第一導線U時，可能使用者直接看出螢幕發生嚴重 爍，因此，代表待測物D中對應該第一導線I〗 、 [per 内具有一測試失敗物件，其中該測試失敗物件可能是電 元件或佈線線路。另外，輸出靜電脈衝p至第二導線ip 時，螢幕可能也發生嚴重閃爍或由檢測設備偵測出手機i 收訊訊號發生失真現象。此時，即表示待測物D中對應 一導線L1之區域A1 (以斜線表示之水平範圍）及對應〜 二導線L1，之區域A1，（以斜線表示之垂直範圍）包= 測試失敗物件。 ’ 如此一來，將靜電脈衝P輸出至各導線來一一進行 試後，最後便可得到例如第一導線L1及Ln與第二 L1’及Lm’為待測物D發生誤動作時之四導線。由於該此 第一導線L1〜Ln及該些第二導線L1，〜Lm，形成二維平面二 因此便旎利用該二維平面來找出測試失敗物件的座標。例 如·使用者即可在待測物D中分別對應此四導線之四區域 之父會處Cl、C2、C3及C4當中尋找測試失敗物件，即 針對此四父會處C1〜C4來檢查相關元件，而無須如同習知 檢測方式，需要依靠經驗來對整個待測物D找出測試失敗 物件。 藉此’、利用靜電放電測試裝置100可有效減少尋找待 測物D中測武失敗物件的時間，且精確度較習知方式亦大 幅提高。 1304476The static electricity generating unit 120 is coupled to the plurality of wires L1 to Ln and the second wires L1' to Lm' via the switching element 130. In the present embodiment, the electrostatic generation unit 120 uses an electrostatic discharge generator (ESD generator) to generate an electrostatic pulse p, wherein the electrostatic pulse P is preferably about 2 to 5 kilovolts (kV). Since the switching elements 130 are respectively coupled to the first wires L1 L Ln and the second wires L1 LL L Lm ′, the static electricity generating unit 12 〇 can transmit the electrostatic pulses through the operation of the switching device 130 . One of the wires. In the first step, when performing the electrostatic discharge test, the switching element; the half 130 can be controlled by a single chip or a microcontroller, so that the static π, the provided static electricity _ p can be automatically right and top to bottom) To each of the first wires (6) (two ^ L1 ~ Lm 〇 Therefore, the tester does not need to hold the static one V, l for electrostatic discharge, so it is very convenient in the production /, the wires are one or two 120 output electrostatic pulse ρ to the leading edge of the dry wave user judges or through the relevant test J: No wave 4, to detect whether the object D is prepared as the object D is malfunctioning, the object to be tested Μ Action: If there is a test failure object in it, one area of ~5 Hai wire is 9 mm * Take the object D as the example in the mobile phone as an example, when the electrostatic pulse p is output to the first wire U, the user may directly It can be seen that the screen is severely shimmered. Therefore, it represents the first wire I in the object D, and [there is a test failure object in the per, where the test failure object may be an electrical component or a wiring line. In addition, the output electrostatic pulse When the p is connected to the second wire ip, the screen may also be severely flickered. Or the detecting device detects that the receiving signal of the mobile phone i is distorted. At this time, it indicates that the area A1 of the object D corresponding to a wire L1 (the horizontal range indicated by a diagonal line) and the area corresponding to the second wire L1. A1, (vertical range indicated by diagonal lines) package = test failed object. ' As a result, the electrostatic pulse P is output to the respective wires to be tested one by one, and finally, for example, the first wires L1 and Ln and the second are obtained. L1' and Lm' are the four wires when the object D is malfunctioning. Since the first wires L1 to Ln and the second wires L1, Lm, form a two-dimensional plane, the two-dimensional plane is utilized. To find the coordinates of the failed object, for example, the user can find the test failure object in the D, which corresponds to the four parts of the four wires, respectively, Cl, C2, C3, and C4. The parent clubs C1 to C4 check the relevant components without having to use the experience to find the test failure object for the entire object D. As a result, the electrostatic discharge test device 100 can effectively reduce the search for Measuring object D Wu defeat the object of the time, and more accurate than conventional way also large amplitude increase. 1304476
三達編號：TW3124PA 第二實施例 請參照第2圖，其繪示乃依照本發明第二實施例之靜 電放電測試裝置與靜電產生單元之示意圖。本實施例與上 述第一實施例相類似，唯，本實施例中之靜電放電測試裝 * 置1〇〇’未使用開關元件。在本實施例中，靜電產生單元 120’採用靜電槍來作為靜電放電裝置。藉此，當測試者欲 進行靜電放電測試時，可選擇地將靜電產生單元120’與該 些導線L1〜Ln及L1’〜Lm’之其中一導線接觸，而提供靜電 # 脈衝P至該導線（如第2圖之第一導線L1)。 本實施例與上述第一實施例的不同處在於，第一實施 例中的靜電產生單元120可以藉由開關元件130而自動且 分別提供靜電脈衝P至該些導線L1〜Ln及L1’〜Lm’，而在 本實施例中，測試者係手動地進行靜電放電測試。 第三實施例 請參照第3A及3B圖，第3A圖繪示乃依照本發明第 • 三實施例之靜電放電測試裝置之示意圖，第3B圖繪示乃 第3A圖之待測物D之另一置放角度示意圖。第三實施例 與第一實施例不同之處在於，靜電放電測試裝置200之測 試平台210僅佈設水平之該些第一導線11〜In。 此時，以第3A圖所示之待測物D之置放角度來進行 同第一實施例之測試。以靜電脈衝P測試完各第一導線 11〜In後，例如得到待測物D中對應第一導線11的區域al 包含測試失敗物件。此時，使用者可將待測物D轉動一預 11 13044Sanda Number: TW3124PA Second Embodiment Referring to Figure 2, there is shown a schematic diagram of an electrostatic discharge test apparatus and an electrostatic generation unit in accordance with a second embodiment of the present invention. This embodiment is similar to the above-described first embodiment, except that the electrostatic discharge test device of the present embodiment is provided with a switching element. In the present embodiment, the static electricity generating unit 120' employs an electrostatic gun as the electrostatic discharge device. Thereby, when the tester wants to perform the electrostatic discharge test, the static electricity generating unit 120' is selectively brought into contact with one of the wires L1 L Ln and L1 ' Lm', and the electrostatic # pulse P is supplied to the wire. (as in the first wire L1 of Figure 2). The difference between this embodiment and the first embodiment is that the static electricity generating unit 120 in the first embodiment can automatically and separately provide the electrostatic pulse P to the wires L1 L Ln and L1 ′ Lm by the switching element 130 . ', and in the present embodiment, the tester manually performs an electrostatic discharge test. 3A and 3B, FIG. 3A is a schematic view showing an electrostatic discharge test apparatus according to a third embodiment of the present invention, and FIG. 3B is a view showing another object D of FIG. 3A. A schematic diagram of the placement angle. The third embodiment is different from the first embodiment in that the test platform 210 of the electrostatic discharge test apparatus 200 is only provided with the first wires 11 to In of a horizontal level. At this time, the test of the first embodiment was carried out at the angle of placement of the object D as shown in Fig. 3A. After the first wires 11 to In are tested by the electrostatic pulse P, for example, the region a1 of the object D corresponding to the first wire 11 is included to contain the test failure object. At this point, the user can rotate the object D to a pre- 11 13044
i號：TW3124PA 設角度，例如順時針90度，使得該些第一導線丨丨〜匕與待 測物D之相對位置不同，而得到如第3]8圖所示之置放产 形。於第3B圖中，區域&1係被轉為垂直方向。然後重^ 測試各第-導線11〜In’並得到例如同樣對應第—導線u 之區域al，包含測試失敗物件。如此―來，即可如第一實 施例般，以區域al及al，之交會處“（請參照第35圖只 為待測物D中測試失敗物件來作後續檢測。 二、，至於上述實施例中所利用之測試方法，以下兹再 泮細說明。 ° 、、睛茶照第4圖，其纷示乃依照本發明之抗靜電測試方 法之流程®。如第4圖所示，首先，於步驟術中，放置 待測物於一佈設有複數條導線之測試平台。步驟401之主 ，目的係彻數條導線來定義劃分待測物的受測 =確尋找出有問題的元件部位。如上述實施例中，Γ; 放於第1圖之表㈣或第則之表面S，：，： ;於物台卿丨。中的各導線，即有_ 其中於步驟中，提供—靜電脈衝至該些導線之 且视待=之=:靜電脈衝係r欠輸出η ^ 1 Λ 3Α R * 可以僅Κ部分之導線。例如於 單元m Λ，㈣關元件13G(或謂）控制靜電產生 所涵蓋^ 提供之靜魏衝P輸出至待測物d 產生^之。分；或者如第2时，由賴者钱操作 〇’來提供靜電脈衝P。t靜電脈衝P輪出至其 12i: TW3124PA is set at an angle, for example, 90 degrees clockwise, so that the relative positions of the first wires 丨丨 匕 匕 and the object D are different, and the placement pattern as shown in Fig. 3] is obtained. In Fig. 3B, the area & 1 is rotated to the vertical direction. Then, each of the first-wires 11 to In' is tested and obtained, for example, the area a1 corresponding to the first-conductor u, including the test failure object. In this way, as in the first embodiment, the intersection of the areas a1 and al, "(Please refer to Figure 35 for the subsequent testing of the failed object in the D.) 2. As for the above implementation The test methods used in the examples are described in detail below. °, and the eye tea according to Figure 4, which is the flow of the antistatic test method according to the present invention. As shown in Fig. 4, first, In the step operation, the test object is placed on a test platform with a plurality of wires on a cloth. The main purpose of step 401 is to define a plurality of wires to define the test object for dividing the test object = to find the component part with the problem. In the above embodiment, Γ; placed on the surface of Table (4) of Figure 1 or the surface of S, :,:; in each of the wires in the object platform, that is, in the step, provide - electrostatic pulse to The wires are treated as ==: The electrostatic pulse system r is output η ^ 1 Λ 3Α R * can only be a part of the wire. For example, in the unit m Λ, (4) the closing element 13G (or) controls the electrostatic generation ^ Provided the static Wei Chong P output to the object to be tested d to generate ^. points; or as the second, The electrostatic pulse P is supplied by the user's money operation 。'. The electrostatic pulse P is rotated to the 12
13嘱 ：TW3124PA 中-條導線，且待測物D發生 D中與此條導線最接近的 乍==知待測物 最後，於步驟403中，_主有顧失敗物件。 測物中對應導線之m右相物發生誤動作，則於待 述，因為這些區域内二内， 測物D在對應之鄰近=^^感之物件，才會使待 誤動作。因此可大帽 ^ 脈衝時發生不正常的 圍。此時，如第―實於：、待:則物中發生問題之位置範 直之第二導線後，可^ ’ m水平之第-導線及垂 處來尋找有問題之元φ 剌物D中的對應區域之交會 進一步縮小尋找範固。 n貝】物D全部區域而更 此外’於步驟4〇1中，4 位於-平面且相互η右¥線之設置方式使得導線皆 具有水平方向之導線^ Μ 3Α圖之測試平台21〇即僅 於步驟403之後可U:弟二實施例而言，其測試方法 角度，使得該也導驟:轉動待測物-預設 次分別提供該靜電=相對位置不同’繼而再 因黛m ,:亥些導線之其中-導線。例如， :7 ^ ^ 以轉動待測物D順時針90度為例，即可 達到同弟一實施例之效果。 當然’本發明所屬技術領域中具有通常知識者亦可以 =瞭本發明之技術並不侷限於上述實關。首先，導線的 叹置方式並不限於上述實施例所述。例如，第一及第二實 施?中：賴平台m亦可採用兩塊印刷電路板來分。真 有第^線L1〜Ln及第二導線L1，〜Lm，，且不必然皆位於 13 130447613嘱 : TW3124PA - the wire, and the D to the object D is the closest to the wire in D. = == know the object to be tested Finally, in step 403, the _ master has failed. If the m right phase of the corresponding wire in the test object malfunctions, it will be described, because in these two areas, the object D is in the vicinity of the object corresponding to the sense of ^^^, which will cause the malfunction. Therefore, an abnormal circumference can occur when the big cap ^ pulse. At this time, as in the first "real":, after: the second wire of the position where the problem occurs, the first wire and the vertical of the 'm level can be found to find the problematic element φ in the object D The intersection of the corresponding areas will further narrow down the search for Fan Gu. n 】] all areas of the object D and furthermore 'in step 4 〇 1, 4 is located in the - plane and η right to the line is set so that the wires have horizontal wires ^ Μ 3 Α test platform 21 〇 After step 403, U: the second embodiment, the test method angle, so that the guide: rotating the object to be tested - the preset times respectively provide the static electricity = relative position is different 'and then because of 黛m, : Hai Among these wires - the wires. For example, :7 ^ ^ can be achieved by rotating the object to be tested D clockwise by 90 degrees as an example. Of course, the person having ordinary knowledge in the technical field of the present invention can also = the technology of the present invention is not limited to the above. First, the manner of sighing of the wires is not limited to that described in the above embodiment. For example, in the first and second implementations, the platform m can also be divided by two printed circuit boards. True has the second line L1~Ln and the second wire L1, ~Lm, and not necessarily all located at 13 1304476
三達編號：TW3124PA 待測物D同一侧，可能兩塊印刷電路板分別位於待測物d 之上方及下方。再者5弟一及苐一貫施例中第一導線l 與第二導線L1’〜Lm’所夾之角度，或第三實施例中待測物 D與第一導線11〜In的相對轉動角度，皆可視需要改變。 另，靜電產生單元120 (或220)及開關元件13〇 (或幻 亦可直接設置於印刷電路板上，而與測試平台11〇(或2 結合。當然，於第三實施例中，亦可同第二實施例般 開關元件之使用，而由賴者手動操作靜t搶來測^ : 線。只要利用數條導線來作為靜電脈衝之放電路押 ^ 定義劃分待測物受靜電影響之區域範圍，達到尋 ^ 物中測試失敗物件之目的1不本發明之技術範^則 本發明上述實施例所揭露之靜電放電測試 方法’係利用數條導線來作為靜電脈衝之放電路經，^其 定義待測物受靜電影響之區域。如此一來， ：从 物中^失敗物件的精確度外，亦大㈣省r時及=測 增加產品良率。 成本亚 1廿2所述’軸本發日月已錢佳實施例揭露如上，妙 其並非用以限定太恭日日。^ 二、、 識者，在不脫離本‘明之件：所屬技術領域中具有通常知 本發明之精神和範圍内，當可作夂接 動與潤飾。因此，本發明之 種之更 範圍所界定者為準。保4關倾後附之申請專利 •1304476Sanda number: TW3124PA D is on the same side of the object D. It is possible that two printed circuit boards are located above and below the object to be tested d. Furthermore, the angle between the first wire 1 and the second wire L1'~Lm' in the consistent embodiment, or the relative rotation angle of the object D and the first wire 11~In in the third embodiment , can be changed as needed. In addition, the static electricity generating unit 120 (or 220) and the switching element 13 (or phantom may also be directly disposed on the printed circuit board, and combined with the test platform 11 (or 2). Of course, in the third embodiment, The use of the switching element is the same as that of the second embodiment, and the user manually operates the static t-robbing to measure the ^: line. As long as a plurality of wires are used as the discharge circuit of the electrostatic pulse, the area where the object to be tested is affected by static electricity is defined. The scope of the object to achieve the test failure object 1 is not the technical example of the invention. The electrostatic discharge test method disclosed in the above embodiment of the present invention uses a plurality of wires as a discharge circuit for electrostatic pulses. Define the area of the object to be tested that is affected by static electricity. In this way, the accuracy of the object is not greater than the accuracy of the object, and the product yield is increased by (4) saving time and = measuring. The Japanese and Japanese versions of Qianjia have been disclosed as above, and it is not intended to limit the day. ^II, 知者, without departing from the scope of the present invention: within the spirit and scope of the present invention When it can be used as a joint Retouching. Thus, species of the present invention as defined in the range, whichever is greater. Paul 4 after attachment of the patent was poured off • 1304476
三達編號：TW3124PA 【圖式簡早說明】 第1圖繪示乃依照本發明第一實施例之靜電放電測試 裝置之示意圖。 第2圖繪示乃依照本發明第二實施例之靜電放電測試 • 裝置與靜電產生單元之示意圖。 - 第3A圖繪示乃依照本發明第三實施例之靜電放電測 試裝置之示意圖。 第3B圖繪示乃第3A圖之待測物D之另一置放角度 • 示意圖。 第4圖繪示乃依照本發明之靜電放電測試方法之流程 圖。 【主要元件符號說明】 100、100’、200 ·•靜電放電測試裝置 110、210 :測試平台 120、120’、220 :靜電產生單元 • 130、230 :開關元件 140、240 :接地介面 S、S，：表面 D ·待測物 L1〜Ln、11〜In :第一導線 L1，〜Lm,:第二導線 15Sanda number: TW3124PA [Simplified description of the drawings] Fig. 1 is a schematic view showing an electrostatic discharge test apparatus according to a first embodiment of the present invention. Fig. 2 is a view showing the electrostatic discharge test apparatus and the static electricity generating unit in accordance with the second embodiment of the present invention. - Fig. 3A is a schematic view showing an electrostatic discharge test apparatus according to a third embodiment of the present invention. Fig. 3B is a schematic view showing another placement angle of the object D in Fig. 3A. Figure 4 is a flow chart showing the electrostatic discharge test method in accordance with the present invention. [Description of main component symbols] 100, 100', 200 · Electrostatic discharge test apparatus 110, 210: Test platform 120, 120', 220: Electrostatic generation unit • 130, 230: Switching elements 140, 240: Grounding interface S, S ,: surface D · object to be tested L1 to Ln, 11 to In: first wire L1, ~Lm,: second wire 15
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|---|---|---|---|---|
| TWI417557B (en) * | 2011-11-03 | 2013-12-01 | Global Unichip Corp | Electronic test system and associated method |
| CN103091618B (en) * | 2011-11-03 | 2015-03-11 | 创意电子股份有限公司 | Electronic test system and related method |
| TWI465736B (en) | 2012-10-11 | 2014-12-21 | Ind Tech Res Inst | A testing method and testing system for semiconductor element |
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2006
- 2006-08-04 TW TW95128741A patent/TWI304476B/en active
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| Publication number | Publication date |
|---|---|
| TW200809217A (en) | 2008-02-16 |
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