1302359 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種基板定位機構’特別是指一種適用 於顯示基板製程設備，使一顯示基板對準該基板製程設備 上的正確位置之基板定位機構。 【先前技術】 平面顯示器目前已經廣泛地被用來取代陰極射線管， . 應用於電視或電腦的螢幕，而成為新一代的顯示裝置，因 此各類平面顯示器面板的需求，包括液晶顯示器面板、電 裝顯示器面板以及有機電激發先顯示器面板（OLED Panel)等正快速地增加當中，各種相關之基板製程設備亦 不斷被開發與改良，以因應各類製程工序之需求。 首先，請參閱圖一，該圖係為習知技術之基板製程設 備之結構示意圖，此圖顯示一基板製程設備1之機構系 統。如圖一所示，此基板製程設備1包栝了一設備本體10、 ® —基板定位機構11、一傳動機構14以及一取像裝置15。 此處之基板製程設備1係以一基板檢測設備為例，平面顯 示器係由多層顯示基板堆疊而成，顯示基板在組立前、製 程中及各半成品階段，均必須經過檢測以確保產品品質， 其中並以自動化光學檢測為代表性的手法，其具有客觀衡 量標準，並可縮短檢測工時等優點，可符合顯示面板製造 業者對高速與高品質之需求。 在此先藉由簡述此基板製程設備1之檢測程序，以說 明各個_的運侧制。首先，將-制物（即顯示基板 ^02359 16 )以手動或自動進料方式’置於設備本體上。其次， 基板定位機構11分別由第一夾持侧12及第二夾持侧13 , 由顯示基板16的二相對方向（及圖中X方向及反X方向） 包夾住顯示基板16，其目的係使顯示基板16對齊影像擷 取位置17。隨後，顯示基板16下方的真空吸附單元Μ: 自一起始位置升起至貼附於顯示基板16的下方，並以真空 吸力使顯示基板16貼附於傳動機構14。接著，基板定位 機構11釋放顯示基板16。最後，該真空吸附單元142吸 I 附著顯示基板16沿承載輸送面14〇以預定速度朝著γ方 向移動，同時，取像裝置15對通過影像操取位置17的顯 j基板16進行影像動態掃描〆 此基板製程設備1尚包括系統主機、螢幕、瑕疵檢查 主機等處理裝置，以處理取像裝置15所取得的影像資料， 計算出顯示基板16的瑕疵大小、位置及種類等資訊，再將 相關之瑕疵資料輸出，工作人員再依據此瑕疵資料，對顯 示基板16進行後續的分析、量測及重工修復等工作。是 I 以，在檢測程序中，顯示基板16必須對正影像擷取位置 π，以確保瑕疵資料的正確性，而基板定位機構u即是用 以將顯示基板16對正影像擷取位置17的主要機制。 圖中’基板疋位機構11包括第一夾持側12及第-夾持侧13 ’第一夾持側12又具有四個夾持臂12a、12b、 c l2d同日守，第一央持側亦具有四個夾持臂I%、 13b > 13c V13d J 12a vl2bS 12c ；l2d 別正對於夾持臂13a、13b、13c、13d。 ’、 接著，請參閱圖二A及圖二B，該二圖係為圖一之基 1302359 122d之前端面可在位置標線B1及位置標線A1間往復移 動;抵接部132a、132b、132c、132d之前端面在位置標線 01及位置標線〇間往復移動，如此一來，抵接部122a、 122b、122C、i22d 與抵接部 132a、132b、册 對向包失動作，是可使顯示基板16對準影像擷取位置17。 上述習知之基板定位機構11之各個抵接部係以固定 位移進行包夾、釋放動作，然而，顯示基板16的第一側邊 161與第二侧邊162之間距具有一正負公差值，是當前述 之第一侧邊161與第二侧邊162的間距超出公差值時，基 11 ^ 16 16面臨破片之風險，製程中破片的發生，除了造成材料損 失之外’對基板製織備丨_造賴壞之虞。另一方面， 值時，將造成基板定位機構u無法將顯示基板16包爽對 取位置Π ’如此—b 確，從而對後續之製程影響至鉅。 4，是，發明人有上述習知之基板定位機構的缺 ’且Ik細不基油向大面積的第七代 代展 上游顯示基板製成品的公差亦隨之増加，， 構之改善侧不魏，乃獅核，_由本宰之 對相關製造業者有所裨益。本案之&出 【發明内容】 本發明之一目 以防止造成齡基^於提供—崎_構，其可 1302359 本發明之另一目的係在於提供一種基板定位機構，其 可以提升顯示基板之定位準確性。 本發明之再一目的係在於提供一種基板製程設備，其 可以提升顯示基板之對位正確性及降低破片機率。 本發明係揭示一種基板定位機構，該基板定位機構係 設置於-基板製賴備之·捕上，肋使―顯示基板 在解該基板製程設備上的正確位置，該顯示基板具有左 右，對的第一側邊與第二側邊，該基板定位機構包括一第 丨一定位臂以及-第二定位臂。第一定位臂係設置於該設備 本^體之侧邊，其末端具有一第一抵接部，當該顯示基板進 入该基板製程設備時，係可移動該第一抵接部至一基準線 位置。第二定位臂係設置於該第一定位臂的對向位置，其 末端具有一彈性元件以及一第二抵接部，該第二抵接部;系 透過該彈性元件裝設於該第二定位臂上。藉由移動該第二 抵接部來推移賴示基板的第二側邊，可使該顯示基板的 第一側邊緊抵於該第一抵接部，對齊於該基準線位置，且 卜 ^過^性元件所提供哪力’可調節該第二_部與該 第二定位臂兩者的相對距離。 所述之該基板製輕設備係可為一基板檢測設備或一基 板傳送設備。 當該顯示基板進入該基板製程設備時，所述之該第一 定位臂f該第三定位臂_向軸示基板，_對向移 動使4第—抵接部緊抵於該顯示基板的第二侧邊，以防 止造成該顯示基板破片。 9 Ι3Ό2359 本發明更揭示一種基板製程設備，該基板製程設備係 用以對一顯示基板實施一製程工序’該顯示基板具有左右 相對的第一侧邊與第二侧邊。該基板製程設備包括一設備 本體、一基板定位機構以及一傳動機構。該基板定位機構 係設置於該基板製程設備的入口處，用以使該顯示基板對 準該基板製程設備上的正確位置。該傳動機構係設於該設 備本體中，當該顯示基板定位完成後，可藉由該傳動機構 輸送該顯示基板。1302359 IX. Description of the Invention: [Technical Field] The present invention relates to a substrate positioning mechanism, particularly a substrate positioning device suitable for use in a display substrate processing apparatus for aligning a display substrate to a correct position on the substrate processing apparatus. mechanism. [Prior Art] Flat panel displays have been widely used to replace cathode ray tubes. They are used in TV or computer screens and become a new generation of display devices. Therefore, various flat panel display panels, including LCD panels and batteries, are required. The installation of display panels and OLED panels are rapidly increasing, and various related substrate processing equipments have been continuously developed and improved to meet the needs of various process operations. First, referring to FIG. 1, the figure is a schematic structural view of a substrate processing apparatus of the prior art, which shows a mechanism system of a substrate processing apparatus 1. As shown in FIG. 1, the substrate processing apparatus 1 includes a device body 10, a substrate positioning mechanism 11, a transmission mechanism 14, and an image capturing device 15. Here, the substrate processing apparatus 1 is exemplified by a substrate detecting device which is formed by stacking a plurality of display substrates. Before the display substrate is assembled, in the process, and in each semi-finished product stage, it must be tested to ensure product quality. With the method of automated optical inspection as a representative method, it has objective measurement standards and can shorten the inspection man-hours, etc., and can meet the needs of display panel manufacturers for high speed and high quality. Here, the inspection procedure of the substrate processing apparatus 1 will be briefly described to explain the various side systems. First, the product (i.e., display substrate ^02359 16) is placed on the apparatus body in a manual or automatic feeding manner. Next, the substrate positioning mechanism 11 includes the first clamping side 12 and the second clamping side 13 respectively, and the display substrate 16 is sandwiched by the opposite directions of the display substrate 16 (and the X direction and the reverse X direction in the drawing). The display substrate 16 is aligned with the image capturing position 17. Subsequently, the vacuum suction unit 下方 under the display substrate 16 is raised from a starting position to the lower side of the display substrate 16, and the display substrate 16 is attached to the transmission mechanism 14 by vacuum suction. Next, the substrate positioning mechanism 11 releases the display substrate 16. Finally, the vacuum adsorption unit 142 absorbs the I-attached display substrate 16 to move toward the γ direction at a predetermined speed along the carrying transport surface 14 , and at the same time, the image capturing device 15 performs dynamic image scanning on the display substrate 16 passing through the image capturing position 17 . The substrate processing device 1 further includes a processing device such as a system host, a screen, and a check device to process the image data acquired by the image capturing device 15, and calculate information such as the size, position, and type of the display substrate 16, and then correlate After the data is output, the staff performs subsequent analysis, measurement and rework repair on the display substrate 16 based on the data. In the detection procedure, the display substrate 16 must capture the position π of the positive image to ensure the correctness of the data, and the substrate positioning mechanism u is used to capture the position of the display substrate 16 to the positive image 17 The main mechanism. In the figure, the substrate clamping mechanism 11 includes a first clamping side 12 and a first clamping side 13 'The first clamping side 12 has four clamping arms 12a, 12b, c l2d, and the first holding side. There are also four gripping arms I%, 13b > 13c V13d J 12a vl2bS 12c; l2d are for the gripping arms 13a, 13b, 13c, 13d. Referring to FIG. 2A and FIG. 2B, the two figures are the base end of the first base 1302359 122d. The front end surface can reciprocate between the position marking line B1 and the position marking line A1; the abutting portions 132a, 132b, 132c The front end face of 132d reciprocates between the position marking line 01 and the position marking line, so that the abutting portions 122a, 122b, 122C, and i22d and the abutting portions 132a and 132b and the book facing opposite package can be The display substrate 16 is aligned with the image capturing position 17. Each of the abutting portions of the conventional substrate positioning mechanism 11 performs a clamping and releasing operation with a fixed displacement. However, the distance between the first side 161 and the second side 162 of the display substrate 16 has a positive and negative tolerance value. When the distance between the first side edge 161 and the second side edge 162 exceeds the tolerance value, the base 11 ^ 16 16 faces the risk of fragmentation, and the occurrence of fragments in the process, in addition to causing material loss, is prepared for the substrate. _ ruin the bad. On the other hand, when the value is concerned, the substrate positioning mechanism u cannot cause the display substrate 16 to be in a cool position, so that it has a great influence on the subsequent process. 4, is, the inventor has the above-mentioned conventional substrate positioning mechanism lacking and the tolerance of the Ik fine non-base oil to the large-area seventh generation of the display upstream of the substrate is also increased, and the improvement of the side is not Wei , is the Lion's core, _ by Ben Zaizhi to the relevant manufacturers. [Invention] The present invention aims to prevent the age of the substrate from being provided. The other object of the present invention is to provide a substrate positioning mechanism which can improve the positioning of the display substrate. accuracy. Still another object of the present invention is to provide a substrate processing apparatus which can improve the alignment accuracy of a display substrate and reduce the probability of fragmentation. The present invention discloses a substrate positioning mechanism which is disposed on a substrate to be trapped, and the rib causes the display substrate to be in the correct position on the substrate processing apparatus. The display substrate has left and right, right The first side edge and the second side edge, the substrate positioning mechanism includes a first positioning arm and a second positioning arm. The first positioning arm is disposed on a side of the device body, and has a first abutting portion at the end thereof. When the display substrate enters the substrate processing device, the first abutting portion can be moved to a reference line. position. The second positioning arm is disposed at an opposite position of the first positioning arm, and has an elastic member and a second abutting portion at the end thereof, and the second abutting portion is disposed at the second positioning through the elastic member On the arm. The second side of the display substrate is moved by moving the second abutting portion, so that the first side of the display substrate can be pressed against the first abutting portion, aligned with the reference line position, and The force provided by the overmechanical element 'adjusts the relative distance between the second portion and the second positioning arm. The substrate manufacturing light device can be a substrate detecting device or a substrate transfer device. When the display substrate enters the substrate processing device, the first positioning arm f the third positioning arm _ the shaft indicates the substrate, and the _ opposite movement makes the 4th abutting portion abut the display substrate Two sides to prevent the display substrate from being fragmented. 9 Ι 3 Ό 2359 The present invention further discloses a substrate processing apparatus for performing a process on a display substrate. The display substrate has left and right first sides and second sides. The substrate processing apparatus includes a device body, a substrate positioning mechanism, and a transmission mechanism. The substrate positioning mechanism is disposed at an entrance of the substrate processing apparatus for alignment of the display substrate to a correct position on the substrate processing apparatus. The transmission mechanism is disposed in the device body. After the positioning of the display substrate is completed, the display substrate can be transported by the transmission mechanism.
所述之該基板製程設備係可為一基板檢測設備，用以 對該顯示基板進行檢測。所述之該基板製程設備係可為一 一基板傳送設備，用以傳送該顯示基板。 所述之基板定位機構包括一第一定位臂以及一第二定 位臂^第-定位臂係設置於該設備本體之侧邊，其末端具 有第抵接和當該顯示基板進入該基板製程設備時， 係可移動該第一抵接部至一基準線位置。第二定位臂係設The substrate processing device can be a substrate detecting device for detecting the display substrate. The substrate processing device can be a substrate transfer device for transferring the display substrate. The substrate positioning mechanism includes a first positioning arm and a second positioning arm. The first positioning arm is disposed on a side of the device body, and has an end abutting and when the display substrate enters the substrate processing device. , the first abutting portion can be moved to a reference line position. Second positioning arm
兮第一你劈t’該第二抵接部係透職彈性元件裝設於 ㈡由移動該第二抵接部來推移該顯示基兮first, 第二t’, the second abutting portion is attached to the translating elastic element, and (2) moving the second abutting portion to move the display base
板的第—側邊緊抵於該第一 定位;所述之該第- 動，使該第二抵接部緊_上=;= 1302359 止造成該顯示基板破片。 是以，藉由本發明所述之基板定位機構及基板製程設 備’係以第一定位臂及具有彈性元件之第二定位臂進行顯 不基板之包夾定位程序。如此一來，可使顯示基板之第一 側邊對齊基準線位置，進而提升顯示基板在基板製程設備 上對位之準確性，以利各類致成功序之進行，其中尤其可 以提升檢測資料之正確性;且，具有彈性元件之第二定位 臂係抵接於顯示基板之第二侧邊，防止造成該顯示基板破 I 片，以提高相關製程產線及檢測線之產能。 以藉由以下發明詳述及所附圖式，得到進一步的瞭解。 【實施方式】 首先，請參閱圖四，該圖係為本發明所揭示之基板製 程設備之一實施例之結構示意圖，此圖顯示了一基板製程 設備2之機構系統，此基板製程設備2係以一基板檢測設 備為例，此基板檢測設備係用以檢測一顯示基板26。又， 此實施例之基板製程設備20雖以一基板檢測設備為例，然 其並非用以限制本發明之範圍。 如圖四所示，基板製程設備2包括了一設備本體20、 一基板定位機構21、一傳動機構24以及一取像裝置25。 基板定位機構21係設置於基板製程設備2的入口處，且包 括一基準側23及一緩衝侧22，此處所述之入口處，係指 顯示基板26之進料位置。按，此實施例之基板定位機構 21係以設於該基板製程設備20之入口處為例，然其並非 1302359 明之範圍。 〜接著’請參閱圖五A，該圖係為本發明所揭示之第— 巧之一實施例之結構示意圖。如圖五A所示，此 ^德riaf括—第，233a、—第一抵接部 232a、一第一上滑塊纖及一第一下滑塊咖。其中塗 7支架23如係用以固設於設備本體20之側邊上，第一下 滑塊23_固定於第—錢2说上，第—上塊23传 _ 下細la 上，第―_ 232a^ Φ j '月塊23加上，可藉由驅動該第一上滑塊23〇a， 移^該第-抵接部232a的位置。第一上滑塊23〇a係與— ϋ置(圖中未示）相連動，藉由該驅動裝置所提供之 動力而可移動該第-上滑塊瑜的位置。此處之驅動裝置 可為-汽紅或-電動馬達等裝置，因此，依照驅動裝置之 f類’此第-上滑塊23〇a更連結有—氣動桿、一傳動皮帶 或一螺桿，以與驅動裝置相連結。 一再來，請參閱圖五B與圖五c，圖五B係為本發明所 • 揭^之第二定位臂22a之—實施例之結構示意圖The first side of the board is in close contact with the first positioning; the first movement is such that the second abutting portion is tightly _ upper =; = 1302359 to cause the display substrate to be fragmented. Therefore, the substrate positioning mechanism and the substrate processing apparatus of the present invention perform the positioning process of the substrate by the first positioning arm and the second positioning arm having the elastic member. In this way, the first side of the display substrate can be aligned with the position of the reference line, thereby improving the accuracy of the alignment of the display substrate on the substrate processing device, so as to facilitate various successes, in particular, the detection data can be improved. The second positioning arm having the elastic component abuts against the second side of the display substrate to prevent the display substrate from breaking through the chip, so as to improve the production capacity of the related process production line and the detection line. Further understanding will be obtained by the following detailed description of the invention and the accompanying drawings. [First Embodiment] Referring to FIG. 4, which is a schematic structural view of an embodiment of a substrate processing apparatus disclosed in the present invention, the figure shows a mechanism system of a substrate processing apparatus 2, and the substrate processing apparatus 2 is Taking a substrate detecting device as an example, the substrate detecting device is used to detect a display substrate 26. Moreover, the substrate processing apparatus 20 of this embodiment is exemplified by a substrate detecting apparatus, which is not intended to limit the scope of the present invention. As shown in FIG. 4, the substrate processing apparatus 2 includes a device body 20, a substrate positioning mechanism 21, a transmission mechanism 24, and an image capturing device 25. The substrate positioning mechanism 21 is disposed at the entrance of the substrate processing apparatus 2 and includes a reference side 23 and a buffer side 22, and the entrance point herein refers to the feeding position of the display substrate 26. The substrate positioning mechanism 21 of this embodiment is exemplified at the entrance of the substrate processing apparatus 20, but it is not within the scope of 1302359. </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; As shown in FIG. 5A, this diaf includes a 233a, a first abutting portion 232a, a first upper slider fiber and a first lower slider. The coating 7 bracket 23 is fixed on the side of the device body 20, and the first lower slider 23_ is fixed on the first money 2, the first upper block 23 is _ the lower thin, the first _ 232a^ Φ j 'The month block 23 is added, and the position of the first abutting portion 232a can be moved by driving the first upper slider 23a. The first upper slider 23〇a is coupled to a device (not shown), and the position of the first-up slider can be moved by the power provided by the driving device. The driving device here may be a device such as a steam red or an electric motor, and therefore, according to the f-type 'the first-upper slider 23〇a of the driving device, a pneumatic rod, a transmission belt or a screw is connected to Connected to the drive unit. Referring again to FIG. 5B and FIG. 5c, FIG. 5B is a schematic structural view of an embodiment of the second positioning arm 22a according to the present invention.
，圖五C 係為圖五B中A區域結構之***圖4 22a 224a > - 〒3a、-第二上滑塊22Ga、—第二下滑塊遍及一定位 /月塊222a，其中第二支架施係用以固設於設備本體2〇 v 之侧邊上，定位滑塊222a係固定於第二支架22知上，第 二下滑塊221a係滑動配合於定位滑塊222a上，第二上滑 塊島係滑動配合於第二下滑塊咖上，第二抵接部223a 係固接在第二上滑塊220a上。 13 1302359 請同時參閱圖五c，圖五c，一彈性元件225a係連結 第二下滑塊221a與定位滑塊222a兩者，可調節第二下滑 塊221a與定位滑塊222&兩者之間的相對距離，藉此調節 第二抵接部223a與定位滑塊222a兩者的相對距離。圖中， 此彈性元件225a係為一彈簧組，嵌設於第二下滑塊221& 上之一第一抵擋部227a内，末端抵接於定位滑塊222a上 之一第二抵擋部226a。當第二抵接部223a受一外力時， 可推動第二下滑塊221a朝彈力方向之反向沿定位滑塊 222a上之一滑執滑動，壓縮彈性元件225a，藉由彈性元件 225a之彈性恢復力，又可使第二抵接部223&緊抵於施力 元件。 又’第二上滑塊220a係與一驅動裝置（圖中未示〉相 連動’藉由該驅動裝置所提供之動力而可移動該第二上滑 塊220a的位置。此處之驅動裝置可為一汽缸或一電動馬達 專裝置’因此’依照驅動褒置之種類，此第二上滑塊 更連結有一氣動桿、一傳動皮帶或一螺桿，以與驅動裝置 相連結。 按’圖五C中係顯示出圖五b中a區域結構之一實 施例之，基於同樣的原理，吾人亦可將彈性元件225a連結 於第二上滑塊220a與第二下滑塊221 a兩者之間,以調節 第二上滑塊22Ga與第二下滑塊221&兩者之_相對距 離，此時1二下滑塊功^係與一驅動裝置（圖中未示) 相連動’藉由該驅動裝置所提供之動力而可移動該第二下 滑塊221 a的位置。 清參閱圖六A及圖六B，該二圖係為本發明所揭示之 14 1302359 基板定位機構進行定位之作動示意圖，圖六A所示係為顯 示基板26定位前之情形，圖六B所示則為顯示基板26進 行定位之情形。如該二圖所示，顯示基板26具有左右相對 之一第一側邊261及一第二側邊262，且沿第一側邊261 之角落處區域260係設有一定位標示角。 圖六A及圖六B中，第一定位臂23a、23b、23c、23d 分別具有一第一下滑塊231a、231b、231c、231d，及一第 : 一上滑塊230a、230b、230c、230d，且每一第一上滑塊 ⑩ 230a、230b、230c、230d係分別連接有一第一抵接部232a、 232b、232c、232d。按，第一定位臂 23a、23b、23c、23d 之實施實例已詳述於圖五A及其相關圖式說明，在此便不 再作贅述。該第一上滑塊230a、230b、230c v 230d可沿第 一下滑塊231a、231b、231c、23 Id滑動’以帶動第一抵接 部232a、232b、232c、232d之前端面於一第一初始位置 〇1與基準線位置Ο之間移動。 第二定位臂22a、22b、22 c、22d分別具有一定位滑塊 _ 222a、222b、222c、222d、一第二下滑塊 221a、221b、221c、 221d 及一第二上滑塊 220a、220b、220c、220d，且每一第 二上滑塊220a、220b、220c、220d係連接有一第二抵接部 223a、223b、223c、223d。按，第二定位臂 22a、22b、22c、 22d之實施實例已詳述於圖五B與圖五C及其相關圖式說 八 明，在此便不再作贅述。該第二上滑塊220a、220b、220c、 220d可沿第二下滑塊221a、221b、221c、221d滑動，以 帶動第二抵接部223a、223b、223c、223d之前端面於一第 二初始位置B1與另一基準線位置A1之間移動。 15 當顯示基板26進行定位程序時，係朝χ方向移動該 第一抵接部232a v 232b、232c、232d ’使其自第一初始位 置01至基準線位置〇處。同時，並移動該第二抵接部 223a、223b、223c、223d來推移該顯示基板的第二側邊 262，此一包夾動作可使顯示基板26的笫一側邊261緊抵 於該第一抵接部232a、232b、232c、232d，對齊於該基準 線位置Ο。並且，透過該彈性元件所提供的彈力，可調節 該幾部223a、223b、223c、223d與該笔土塞魏置 22a、22b、22c、22d兩者的相對距離，保持該第二抵接部 223a、223b、223c、223d緊抵於該顯示基板26的第二侧 邊262，並防止造成該顯示基板破片。 進一步依照圖六A及圖六B對緩衝侧22進行說明， 圖中第二定位臂22a、22b、22c、22d進行包夾定位時，該 第二上滑塊220a、220b、220c、220d沿第二下滑塊221a、 221b、221c、221d朝X方向之位移距離，係為第二初始位 置B1與一第二位移位置C1之間距，然，因彈性元伴的作 用’當第二抵接部223a、223b、223c、223d抵接到該顯示 基板26的第二侧邊262之後，將壓縮彈性元件，使第二下 滑塊 221a、221b、22ic、221d 沿定位滑塊 222a、222b、 222c、222d朝向反χ方向移動，此時，彈性元件之彈性恢 復力可令第二抵接部223a、223b、223c、223d緊抵於該顯 示基板26的第二侧邊262。 按，此基板定位機構21係用以使顯示基板26在基板 製私s免備2上正確對位，以利各俩製程工序之進行，在本 口兒明書之實施例及相關圖式中，基板製程設備2雖以一基 1302359 板檢測設備為例，然，籍由以上本發明對基板定位機構21 之揭示，熟習本領域相關技術之人士應可知之，此基板定 位機構21並非專用於一基板檢測設備，而基板製程設備2 亦非專指一基板檢測設備。此基板製程設備2可為一基板 輸送δ又備或任一具有顯示基板26精準對位需求之製程設 備。 是以，藉由以上本發明所揭露之基板定位機構21及基 板製程設備2實例，本發明之基板定位機構係以第一定位 > 臂及具有彈性元件之第二定位臂進行顯示基板之包夾定位 程序。如此一來，可使顯示基板之第一侧邊對齊基準線位 置’進而提升顯示基板定位之準確性，以提高各個製程工 f之正確性;且，具有彈性元件之第二定位臂係抵接於顯 示基板之第二侧邊，可防止造成該顯示基板破片，以提高 相關製程之產線及檢測線之產能。 本發明雖以較佳實例闡明如上，然其並非用以限定本 脫離本發明之精神與範圍内所作之修改，均應包括在下 申請專利範圍内。 【圖式簡單說明】 圖—係為習知技術之基板製程設備之結構示意圖; 圖二A、圖二B係為習知技術之基板定位機構進行定 位之作動示意圖； 圖一係為圖一之基板定位機構之一夾持臂之結構示意 17 1302359 圖四係為本發崎鮮之基板製程設備之—實施例之 結構示意圖; 圖五八係為本發明所揭示之第一定位臂之一實施之 結構示意圖； 圖五B係為本發明所揭示之第二定位臂之一實施例之 結構不意圖； 圖五C係為圖五B中A區域結構之***圖；以及 圖六A及圖六B係為本發明所揭示之基板定位機構進 行定位之作動示意圖。 【主要元件符號說明 1、2 :基板製程設備^ 10、20 :設備本體 、21 :基板定位機構 12 :第一夾持侧^ 13 :第二夾持側 12a、12b、12c、12d、13a、13b、13c、13d :夾持臂 120a、120b、120c、120d、130a、130b、130c、13〇d : 上滑塊 121a、121b、121c、121d、131a、131b、131c、131d : 下滑塊 122a、122b、122c、122d、132a、132b、132c、132d : 抵接部 123a :支架 14、24 :傳動機構 140、240 :承載輸送面 42、242 :真空吸附單元 1302359 15、25 :取像裝置 16、26 :顯示基板 160、260 ··區域 161、261 ··第一側邊 162、262 :第二側邊 17、27 :影像擷取位置 22 :援衝侧 22a、22b、22c、22d :第二定位臂 220a、220b、220c、220d :第二上滑塊 221a、221b、221c、221d :第二下滑塊 222a、222b、222c、222d :定位滑塊 223a、223b、223c、223d ··第二抵接部 224a :第二支架 225a ··彈性元件 226a :第二抵擋部 227a :第一抵擋部 228a:滑軌 23 :基準侧 23a、23b、23c、23d :第一定位臂 230a、230b、230c、230d :第一上滑塊 231a、231b、231c、231d :第一下滑塊 232a、232b、232c、232d ··第一抵接部 223a :第一支架 0、A卜B卜a、01 :位置標線 19Figure 5C is an exploded view of the A-area structure in Figure 5B. Figure 4 22a 224a > - 〒3a, - second upper slider 22Ga, - second lower slider throughout a positioning/month block 222a, wherein the second bracket The fixing slider 222a is fixed on the side of the second bracket 22, and the second lower slider 221a is slidably fitted on the positioning slider 222a. The island is slidably fitted to the second lower slider, and the second abutting portion 223a is fixed to the second upper slider 220a. 13 1302359 Please also refer to FIG. 5c and FIG. 5c. An elastic element 225a is coupled between the second lower slider 221a and the positioning slider 222a, and the second lower slider 221a and the positioning slider 222& The relative distance, thereby adjusting the relative distance between the second abutting portion 223a and the positioning slider 222a. In the figure, the elastic member 225a is a spring group embedded in one of the first abutting portions 227a of the second lower slider 221& and the end abuts against one of the second abutting portions 226a of the positioning slider 222a. When the second abutting portion 223a receives an external force, the second lower slider 221a can be pushed to slide along one of the positioning sliders 222a in the opposite direction of the elastic force to compress the elastic member 225a, and the elastic member 225a is elastically restored. The force can also cause the second abutting portion 223 & to abut against the force applying element. Further, the second upper slider 220a is coupled to a driving device (not shown) to move the position of the second upper slider 220a by the power provided by the driving device. For a cylinder or an electric motor device, the second upper slider is further connected with a pneumatic rod, a transmission belt or a screw to connect with the driving device according to the type of the driving device. The middle system shows an embodiment of the a-area structure in FIG. 5b. Based on the same principle, the elastic element 225a can also be coupled between the second upper slider 220a and the second lower slider 221a to Adjusting the relative distance between the second upper slider 22Ga and the second lower slider 221& 221, at this time, the slider function is connected to a driving device (not shown) by the driving device The position of the second lower slider 221 a can be moved by the power. See FIG. 6A and FIG. 6B, which are schematic diagrams of the positioning of the 14 1302359 substrate positioning mechanism disclosed in the present invention, FIG. The display shows the situation before the display substrate 26 is positioned. B shows the positioning of the display substrate 26. As shown in the two figures, the display substrate 26 has a left side opposite one of the first side 261 and a second side 262, and along the corner of the first side 261 The first locating arms 23a, 23b, 23c, 23d respectively have a first lower slider 231a, 231b, 231c, 231d, and a first: An upper slider 230a, 230b, 230c, 230d, and each of the first upper sliders 10 230a, 230b, 230c, 230d is respectively connected with a first abutting portion 232a, 232b, 232c, 232d. The embodiment of the arms 23a, 23b, 23c, 23d has been described in detail in Figure 5A and its associated drawings, and will not be described again. The first upper slider 230a, 230b, 230c v 230d may be along the first The lower sliders 231a, 231b, 231c, 23 Id slide 'to move the front end faces of the first abutting portions 232a, 232b, 232c, 232d between a first initial position 〇1 and a reference line position 。. 22a, 22b, 22c, 22d respectively have a positioning slider _ 222a, 222b, 222c, 222d and a second lower slider 221a, 221b And 221c, 221d and a second upper slider 220a, 220b, 220c, 220d, and each of the second upper sliders 220a, 220b, 220c, 220d is connected with a second abutting portion 223a, 223b, 223c, 223d. The implementation examples of the second positioning arms 22a, 22b, 22c, and 22d have been described in detail in FIG. 5B and FIG. 5C and the related drawings, and will not be described herein. The second upper sliders 220a, 220b, 220c, and 220d are slidable along the second lower sliders 221a, 221b, 221c, and 221d to drive the front end faces of the second abutting portions 223a, 223b, 223c, and 223d to a second initial position. B1 moves between another reference line position A1. When the display substrate 26 is subjected to the positioning process, the first abutting portions 232a, 232b, 232c, and 232d' are moved in the χ direction from the first initial position 01 to the reference line position 。. At the same time, the second abutting portions 223a, 223b, 223c, and 223d are moved to move the second side 262 of the display substrate. The clamping action can make the side 261 of the display substrate 26 abut against the first side 261. The abutting portions 232a, 232b, 232c, and 232d are aligned with the reference line position Ο. And, by the elastic force provided by the elastic member, the relative distance between the portions 223a, 223b, 223c, and 223d and the pen-holding portions 22a, 22b, 22c, and 22d can be adjusted to maintain the second abutting portion. 223a, 223b, 223c, 223d abut against the second side 262 of the display substrate 26 and prevent the display substrate from being fragmented. Further, the buffer side 22 will be described with reference to FIG. 6A and FIG. 6B. When the second positioning arms 22a, 22b, 22c, and 22d are positioned and positioned, the second upper sliders 220a, 220b, 220c, and 220d are along the second stage. The displacement distance between the second lower sliders 221a, 221b, 221c, and 221d in the X direction is the distance between the second initial position B1 and the second displacement position C1. However, due to the action of the elastic element, the second abutting portion 223a After the 223b, 223c, and 223d are abutted against the second side 262 of the display substrate 26, the elastic member is compressed, and the second lower sliders 221a, 221b, 22ic, and 221d are oriented along the positioning sliders 222a, 222b, 222c, and 222d. In the χ direction, the elastic restoring force of the elastic member can make the second abutting portions 223a, 223b, 223c, and 223d abut against the second side 262 of the display substrate 26. According to the substrate positioning mechanism 21, the display substrate 26 is correctly aligned on the substrate manufacturing device 2 to facilitate the process of each process, in the embodiment of the present invention and related drawings. The substrate processing apparatus 2 is exemplified by a substrate 1302359 board detecting device. However, according to the above disclosure of the substrate positioning mechanism 21 of the present invention, those skilled in the art should know that the substrate positioning mechanism 21 is not dedicated to A substrate detecting device, and the substrate processing device 2 is not specifically referred to as a substrate detecting device. The substrate processing apparatus 2 can transport a δ or a process device having a precise alignment requirement of the display substrate 26 for a substrate. Therefore, according to the substrate positioning mechanism 21 and the substrate processing apparatus 2 disclosed in the present invention, the substrate positioning mechanism of the present invention performs the display substrate package by using the first positioning arm and the second positioning arm having the elastic component. Clip positioning program. In this way, the first side of the display substrate can be aligned with the reference line position to further improve the accuracy of the display substrate positioning, so as to improve the accuracy of each process worker f; and the second positioning arm with the elastic element is abutted The second side of the display substrate can prevent the display substrate from being broken, so as to improve the production line and the detection line capacity of the related process. The present invention has been described above by way of a preferred example, and is not intended to limit the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 2 is a schematic view showing the structure of a substrate processing apparatus of the prior art; FIG. 2A and FIG. 2B are schematic diagrams showing the operation of positioning the substrate positioning mechanism of the prior art; FIG. 1 is a diagram of FIG. FIG. 3 is a schematic structural view of an embodiment of the present invention; Figure 5B is a schematic diagram of the structure of one embodiment of the second positioning arm disclosed in the present invention; Figure 5C is an exploded view of the structure of the area A in Figure 5B; and Figure 6A and Figure 6 B is a schematic diagram of the operation of positioning the substrate positioning mechanism disclosed in the present invention. [Main component symbol description 1, 2: substrate processing device ^ 10, 20: device body, 21: substrate positioning mechanism 12: first clamping side ^ 13: second clamping side 12a, 12b, 12c, 12d, 13a, 13b, 13c, 13d: gripping arms 120a, 120b, 120c, 120d, 130a, 130b, 130c, 13〇d: upper sliders 121a, 121b, 121c, 121d, 131a, 131b, 131c, 131d: lower slider 122a, 122b, 122c, 122d, 132a, 132b, 132c, 132d: abutting portion 123a: bracket 14, 24: transmission mechanism 140, 240: carrying conveying surface 42, 242: vacuum suction unit 1302359 15, 25: image capturing device 16, 26: display substrates 160, 260 · · regions 161, 261 · first side 162, 262: second side 17, 27: image capturing position 22: auxiliary side 22a, 22b, 22c, 22d: second Positioning arms 220a, 220b, 220c, 220d: second upper sliders 221a, 221b, 221c, 221d: second lower sliders 222a, 222b, 222c, 222d: positioning sliders 223a, 223b, 223c, 223d · second Joint portion 224a: second bracket 225a · elastic member 226a: second resist portion 227a: first resist portion 228a: slide rail 23: reference side 23a, 23b, 23c, 23 d: first positioning arms 230a, 230b, 230c, 230d: first upper sliders 231a, 231b, 231c, 231d: first lower sliders 232a, 232b, 232c, 232d · first abutting portion 223a: first Bracket 0, A Bu B Bu a, 01: Position Marking 19