1298647 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於，在生物科技用途的機器、醫療機器、 基因用途的機器、噴墨印表機用途的機器、藥品、黏接劑 用途的機器、試藥調和用及液晶排出用、及其他工業用途 的機器所使用的精細噴嘴，尤其是關於將噴嘴前端部分作 成超精細的超精細噴嘴及其製.造方法。 【先前技術】 現今在醫療用或工業用的機器所使用的精細噴嘴，雖 然是很細的構造，而前端內徑爲50〜60 // m的程度爲其極 限，並且外徑厚度較粗。 而且在噴嘴內徑無法進行電鍍。 針對習知的精細噴嘴，例如在平成1 6 ( 2004 )年5月 13日公開的日本特開2004 — 1 3665 1號公報「液體排出裝 • 置」（專利文獻1 )。 〔專利文獻1〕 日本特開2004 — 136651號公報 【發明內容】 〔發明欲解決的課題〕 可是，爲了要適用於多樣的裝置、機器，且排出少量 的液量，要求外徑要比習知的噴嘴更細，並且前端內徑爲 20 // m以下的細噴嘴。尤其是爲了要讓液體順暢地排出， • 4 - (2) 1298647 減少一次液體的排出量，而希望前端外徑更細，且將噴嘴 的厚度作薄至5 // m程度。 而在對於適用於生化科技用途或基因用途方面，爲了 保持細胞等將其分類，而要求要使微弱電流流動到噴嘴的 前端。 本發明鑒於上述情形，其目的要提供一種超精細噴嘴 及其製造方法，藉由將噴嘴前端內徑作細至30 // m以下， • 且將噴嘴的厚度作薄，能順暢地排出液體，且減少一次液 體的排出量，能適用於醫療用或工業用的多樣的機器。 本發明其目的要提供一種超精細噴嘴及其製造方法， 能使電流流動到噴嘴前端。 〔用以解決課題的手段〕 用來解決上述習知例的問題的本發明，是超精細噴嘴 的製造方法，以電鑄方式形成爲讓芯線的一部分露出，在 # 安裝著該芯線的第一電鑄管，實施第二次電鑄處理，形成 第二電鑄管，從第二電鑄管抽拉出芯線及第一電鑄管。 本發明，在上述超精細噴嘴的製造方法，在第一電鑄 管，芯線的一部分露出的前端部，是形成爲30度以下的 錐狀。 本發明，在上述超精細噴嘴的製造方法，在抽拉第一 電鑄管之前，將噴嘴的前端部分加工成錐狀。 本發明，在上述超精細噴嘴的製造方法，在抽拉出芯 線及第一電鑄管之後，將噴嘴前端部的直線部分切斷成所 -5 - (4) 1298647 本發明，是超精細噴嘴的製造方法，在其中一方的前 端部爲錐狀之以電鑄方式形成的第一電鑄管的中空部，在 保持安裝著具有與第一電鑄管的中空部近似値的外徑之以 電鑄方式形成的芯線的狀態下，***前端部爲錐狀的第二 電鑄管的直線部分的一部分進行接合，然後實施二次電鑄 處理，在二次電鑄處理後，抽拉出芯線或芯線及第二電鑄 管。 φ 本發明，在上述超精細噴嘴的製造方法，在抽拉芯線 之目U ’將％ 一電纟尋管之與接合部相反側的端部進行錐狀加 工。 本發明，在上述超精細噴嘴的製造方法，在抽拉芯線 之前，以耐藥品性、耐腐蝕性、傳導性優異的金、銀、钯 等的金屬，將外面進行電鍍。 本發明，在上述超精細噴嘴的製造方法，在第一電鑄 管及第二電鑄管的內面，是預先以耐藥品性、耐腐餓性、 φ 傳導性優異的金、銀、鈀等的金屬予以電鍍處理。 本發明，在上述超精細噴嘴的製造方法，在100〜200 // m粗細之直徑的前端部之以30度以下的錐狀而具有50 // m的粗細差異的直線部分的形狀的芯線，於該芯線實施 電鑄處理後再抽拉出該芯線。 本發明，在上述超精細噴嘴的製造方法，在抽拉出芯 線之前，將前端部分進行錐狀加工。 本發明，在上述超精細噴嘴的製造方法，在抽拉芯線 之前’以耐藥品性、耐腐触性、傳導性優異的金、銀、鈀 (5) 1298647 等的金屬，將外面進行電鍍。 本發明，是超精細噴嘴的製造方法，是在以電鑄方式 形成的第一電鑄管的中空部，***接合：以電鑄方式所形 成而具有與第一電鑄管的中空部近似値的外徑的第二電鑄 管的一部分，以接著劑或電鍍方式，使接合部分接著在一 起。 本發明，是超精細噴嘴的製造方法，是在以電鑄方式 φ 形成，經過鍍銲處理的第一電鑄管的中空部，***接合： 以電鑄方式所形成，經過鍍銲處理，具有與第一電鑄管的 中空部近似値的外徑的第二電鑄管的一部分，並藉由高溫 融化，來使第一電鑄管與第二電鑄管接著在一起。 本發明，在上述超精細噴嘴的製造方法，在接著之後 ，將第二電鑄管之與接合部相反側的端部進行錐狀加工。 本發明，在上述超精細噴嘴的製造方法，在接著之後 ，以耐藥品性、耐腐蝕性、傳導性優異的金、銀、鈀等的 春金屬，將外面進行電鍍。 本發明，在上述超精細噴嘴的製造方法，在第一電鑄 管及第二電鑄管的內面，是預先以耐藥品性、耐腐蝕性、 傳導性優異的金、銀、鈀等的金屬予以電鍍處理。 〔發明效果〕 藉由本發明，以電鑄方式形成爲讓芯線的一部分露出 ，在安裝著該芯線的第一電鑄管，實施第二次電鑄處理， 形成第二電鑄管，從第二電鑄管抽拉出芯線及第一電鑄管 -8 - (6) 1298647 的超精細噴嘴的製造方法，其效果爲，能容 內、外徑不同的噴嘴，藉由前端部分的直線 地滴下到較小的部位、狹溝、或具有深度的彳 藉由本發明，在抽拉第一電鑄管之前， 部分加工成錐狀的上述超精細噴嘴的製造方 ，能將噴嘴的前端部分的厚度作薄，讓液體 很少量，而容易控制排出量。 隹藉由本發明，在第一電鑄管，芯線的一 端部，是形成爲30度以下的錐狀的上述超 造方法，其效果爲，成爲第二電鑄管的電極 地附著。 藉由本發明，在二次電鑄處理之前，在 鑄管，實施耐藥品性、耐腐蝕性、傳導性優 鍍處理，在二次電鑄處理之後，在第二電鑄 電鍍處理的上述超精細噴嘴的製造方法，所 • 噴嘴的耐藥品性、耐腐飩性、傳導性很優異 藉由本發明，是將外徑、內徑較大的電 內徑較小的電鑄管，接合成：讓各中空部的 同一軸上的超精細噴嘴，所以其效果爲，可 前端部分的厚度，讓液體一滴的量成爲少量 排出量。 藉由本發明，較小的電鑄管的前端部分 狀的上述超精細噴嘴，所以其效果爲，能容 小的部位、狹溝、或具有深度的部位。 易地一體形成 部，則能容易 部位。 將噴嘴的前端 法，其效果爲 的一^滴量成爲 部分露出的前 精細噴嘴的製 沉積物能良好 芯線及第一電 異的金屬的電 管實施金屬的 以其效果爲， 〇 鑄管與外徑、 中心軸爲大致 以作薄噴嘴的 ，而容易控制 ，具有直線形 易地滴下到較 -9 - (7) 1298647 藉由本發明，較大的電鑄管與較小的電鑄管的 分，是形成爲：外徑及內徑皆爲徐緩的的錐狀的上 細噴嘴，所以其效果爲，能控制減少液量，且即使 分較細，也能容易排出液體。 藉由本發明，所實施的電鍍處理，是耐藥品性 蝕性、傳導性優異的金、銀、鈀等的金屬的上述超 嘴，所以其效果爲，噴嘴的耐藥品性、耐腐蝕性、 # 很優異。 藉由本發明，在以電鑄方式形成，其中一方的 爲錐狀的第一電鑄管的中空部，安裝著：以電鑄方 ，具有與第一電鑄管的中空部近似値的外徑的芯線 前端部爲錐狀的第二電鑄管的直線部分的一部分進 ，然後實施二次電鑄處理，在二次電鑄處理後，抽 線或芯線及第二電鑄管的超精細噴嘴的製造方法， 效果爲，能容易地形成內、外徑不同的噴嘴，藉由 9 分的直線部與錐狀部，能容易地滴下到較小的部位 、或具有深度的部位，能控制減少液量，且即使前 較細，也能容易排出液體。 藉由本發明，在抽拉芯線之前，將第二電鑄管 合部相反側的端部進行錐狀加工的上述超精細噴嘴 方法，所以其效果爲，能將前端部的厚度作薄，液 量成爲少量，而容易控制排出量。 藉由本發明，在抽拉芯線之前，以耐藥品性、 性、傳導性優異的金、銀、鈀等的金屬’將外面進 接合部 述超精 前端部 、耐腐 精細噴 傳導性 前端部 式形成 ，*** 行接合 拉出芯 所以其 前端部 、狹溝 端部分 的與接 的製造 體一滴 耐腐蝕 行電鍍 -10· (8) 1298647 ，在第一電鑄管及第二電鑄管的內面，是預先以耐藥品性 、耐腐蝕性、傳導性優異的金、銀、鈀等的金屬予以電鍍 處理的上述超精細噴嘴的製造方法，所以其效果爲，噴嘴 的耐藥品性、耐腐蝕性、傳導性很優異。 藉由本發明，在100〜200 μ m的粗度的直徑的前端部 ’以30度以下的錐狀，而具有50从m的差異的粗度的直 線部分的形狀的芯線，實施電鑄處理，抽拉出該芯線的上 φ 述超精細噴嘴的製造方法，所以其效果爲，能容易地一體 形成內、外徑不同的噴嘴，藉由前端部分的直線部與錐狀 部，能容易地滴下到較小的部位、狹溝、或具有深度的部 位，能控制減少液量，且即使前端部分較細，也能容易排 出液體。 藉由本發明，在抽拉出芯線之前，將前端部分進行錐 狀加工的上述超精細噴嘴的製造方法，所以其效果爲，能 將前端部的厚度作薄，液體一滴量成爲少量，而容易控制 • 排出量。 藉由本發明，是在以電鑄方式形成的第一電鑄管的中 空部，***接合：以電鑄方式所形成，具有與第一電鑄管 的中空部近似値的外徑的第二電鑄管的一部分，將接合部 分以接著劑或電鑛方式接著在一起的超精細噴嘴的製造方 法，所以其效果爲，能容易地形成內、外徑不同的噴嘴， 藉由第二電鑄管的前端部分的直線部，能容易地滴下到較 小的部位、狹溝、或具有深度的部位。 藉由本發明，是在以電鑄方式形成，經過鍍銲處理的 -11 - (9) 1298647 第一電鑄管的中空部，***接合：以電 過鍍銲處理，具有與第一電鑄管的中空 第二電鑄管的一部分，藉由高溫融化， 第二電鑄管接著在一起的超精細噴嘴的 效果爲，能容易地形成內、外徑不同的 鑄管的前端部分的直線部，能容易地滴 狹溝、或具有深度的部位。 φ 藉由本發明，在接著之後，將第二 相反側的端部進行錐狀加工的上述超精 ，所以其效果爲，能將噴嘴的前端部的 滴量成爲少量，而容易控制排出量。 藉由本發明，在接著之後，以耐藥 傳導性優異的金、銀、鈀等的金屬，將 第一電鑄管及第二電鑄管的內面，是預 腐蝕性、傳導性優異的金、銀、鈀等的 •'的上述超精細噴嘴的製造方法，所以其 藥品性、耐腐蝕性、傳導性很優異。 【實施方式】 針對本發明的實施方式參照圖面來: 〔寳施方式槪要〕 本發明的實施方式的超精細噴嘴， 作細至30 // m以下且將厚度作薄，將該 鑄方式所形成，經 部近似値的外徑的 來使第一電鑄管與 製造方法，所以其 噴嘴，藉由第二電 下到較小的部位、 電鑄管的與接合部 細噴嘴的製造方法 厚度作薄，液體一 品性、耐腐蝕性、 外面進行電鍍，在 先以耐藥品性、耐 金屬予以電鍍處理 效果爲，噴嘴的耐 以說明。 是將噴嘴前端內徑 前端形狀設定爲特 •12- (10) 1298647 定的長度，在產業界需要但是還未製造出來的超精細噴_ ，容易控制排出液量’且容易滴出到狹溝等處。 藉由可在噴嘴的前端形狀的內面及外面，進行金屬電 鍍，則能讓電流流到噴嘴前端，具有能在噴嘴前端部進行 電性控制的效果。 〔第一實施方式〕 Φ 針對本發明的第一實施方式的超精細噴嘴的製造方法 ，參照第1圖〜第8圖來加以說明。 第1圖是第一實施方式的超精細噴嘴的較粗的電鑄管 的剖面圖，第2圖是第1圖的較粗的電鑄管的外觀圖’第 3圖是第一實施方式的超精細噴嘴的較細的電鑄管的剖面 圖，第4圖是第3圖的較細的電鑄管的外觀圖’第5圖是 將較細的電鑄管***到較粗的電鑄管予以接合的剖面圖’ 第6圖是第5圖所接合的兩個電鑄管的外觀圖，第7圖是 修使第5圖的接合部分予以接著的剖面圖’第8圖是第7圖 的所接著的兩個電鑄管的外觀圖。 如第1圖、第2圖所示，例如製造外徑300//m、內 徑100/z m的較粗的電鑄管（第一電鑄管）11。針對電鑄 管的具體製造方法後面會加以敘述。 如第3圖、第4圖所示，例如製造外徑1 〇0 # m、內 徑20 // m的較細的電鑄管（第二電鑄管）1 2。 針對電鑄管1 1、12，內面是以金、銀、鈀（Pd )予 以電鍍。 -13- (11) 1298647 而如第5圖、第6圖所示，將較細電鑄管12的一部 分，從較粗電鑄管1 1的其中一方的端面1 1 a側***到其 中空部予以接合。 而爲了要將較細電鑄管1 2***到較粗電鑄管1 1的中 空部’較細電鑄管1 2的外徑是稍小於較粗電鑄管1 1的內 如第7圖、第8圖所示，雖然是在較粗電鑄管的端面 φ 1 1 a的附近邊部塗敷接著劑1 3，而也能以無電解電鍍、電 解電鍍；鍍銲處理等方式予以接著。 針對噴嘴前端，也可更將較細電鑄管12的端面12a 進行錐狀加工，讓前端成爲大致圓錐形狀而將其作尖也可 以。而也能以金將外面進行電鍍。 而也可預先在電鑄管1 1、1 2的外面進行鍍銲處理， 在將電鑄管1 2***於電鑄管1 1予以連接的狀態，藉由以 高溫將其融化，使兩者接著也可以。 • 針對第一實施方式的超精細噴嘴，藉由將較細電鑄管 1 2***到較粗電鑄管1 1的中空部予以接合，且以接著劑 或電鍍方式將接合部分予以接著所構成，具有能容易地作 出前端的較細噴嘴的效果。 〔第二實施方式〕 針對本發明的第二實施方式的超精細噴嘴的製造方法 ，參照第9圖〜第1 6圖來加以說明。 第9圖是第二實施方式的超精細噴嘴的較粗電鑄管的 -14- (12) 1298647 剖面圖，第1 〇圖是第9圖的較粗電鑄管的外觀圖，第1 1 圖是第二實施方式的超精細噴嘴的較細電鑄管的剖面圖， 第12圖是第1 1圖的較細電鑄管的外觀圖，第13圖是將 較細電鑄管***到較粗電鑄管予以接合的剖面圖，第14 圖是在第1 3圖的被接合的兩個電鑄管再實施電鑄處理的 剖面圖，第1 5圖是從第1 4圖抽出芯線的狀態的剖面圖， 第16圖是第15圖的外觀圖。 如第9圖、第10圖所示，例如製造外徑300 // m、內 徑100 // m的較粗電鑄管（第一電鑄管）21。而且將較粗 電鑄管2 1的端面加工成錐狀，形成了錐狀2 1 a。 如第1 1圖、第1 2圖所示，例如製造外徑100 // m、 內徑20 // m的較細電鑄管（第二電鑄管）22。在較細電鑄 管22安裝直徑爲20 // m的芯線23。 針對電鑄管21、22，內面是以金、銀、鈀（Pd )進 行電鍍處理。 如第1 3圖所示，將較細電鑄管22的一部分從較粗電 |壽管21的錐狀2 1 a側***到其中空部予以接合。在該情 況，芯線23 ’爲穿過較粗電鑄管2 1的中空部的形狀。 而爲了將較細電鑄管22***到較粗電鑄管2 1的中空 部，較細電鑄管22的外徑是稍小於較粗電鑄管2 1的內徑 〇 接著，在第13圖的形狀的構造，實施電鑄處理。藉 此，如第14圖所示，在全體形成2〇 // m的程度的鎳的電 冗積物24。在錐狀21a的上部也形成有電極沉積物24 -15- (13) 1298647 ’而成爲錐狀部分24a。也可再將外面以金等來電鍍處理 〇 之後，從第14圖的狀態，抽出芯線23，如第15圖、 第1 6圖所示，完成了超精細噴嘴。 再抽出芯線23之前，將噴嘴前端部分進行錐狀加工 ’然後抽出芯線23，將噴嘴前端部分作成大致呈圓錐狀也 可以。 φ 第二實施方式的超精細噴嘴’將較粗電鑄管2 1的端 部2 1 a進行錐狀加工，在其錐狀加工部***了沒有抽出芯 線23的較細電鑄管22，將全體進行電鑄處理，形成了電 極沉積物24，將芯線23抽出，所以其效果是能容易形成 前端較細的噴嘴。 〔第三實施方式〕 針對本發明的第三實施方式的超精細噴嘴的製造方法 • ，參照第1 7圖〜第25圖來加以說明。 第1 7圖是第三實施方式的超精細噴嘴的較細電鑄管 的剖面圖，第1 8圖是將第1 7圖的較細電鑄管進行錐狀加 工的剖面圖，第19圖是第18圖的外觀圖，第20圖是從 第1 9圖的電鑄管抽出芯線的狀態的剖面圖，第21圖是是 將芯線***到第20圖的電鑄管的狀態的剖面圖，第22圖 是第21圖的外觀圖，第23圖是在第22圖實施電鑄處理 的狀態的剖面圖，第24圖是從第23圖抽出芯線及較細電 鑄管的狀態的剖面圖，第25圖是第24圖的外觀圖。 -16- (14) 1298647 如第1 7圖所示，例如在直徑20 μ m的芯線3 2實施電 鑄處理，在全體形成鎳的電極沉積物，例如，形成外徑 100 // m的電鑄管31。芯線32則殘留下來。 如第18圖、第19圖所示，將電鑄管31的端部31a 進行錐狀加工而作成圓錐形狀。在這種情況，芯線32也 被進行錐狀加工，而形成了 ：芯線3 2的錐狀部分3 2a與 電鑄管31的錐狀部分31b。 φ 接著，如第2〇圖所示，將芯線32朝向錐狀部分32a 的相反側抽出。 如第21圖、第22圖所示，對於抽出了芯線32的電 鑄管3 1，從抽出方向***較芯線32更細的芯線33。芯線 3 3，是使用較電鑄管3 1的內徑20 // m更細的構造，例如 ，外徑爲1 8 // m程度也可以。 在該狀態，以金、銀、鈀等將電鑄管3 1的外面進行 電鍍處理。該電鍍處理，是之後的噴嘴的內面的金屬電鍍 • 處理。 如第23圖所示，實施電鑄處理成所需要的厚度（例 如20 // m )，芯線3 3的前端部例如形成外徑60 μ m的鎳 的電極沉積物3 4，電鑄管3 1部分，例如形成外徑140 // m 的鎳的電極沉積物34。 藉由電鑄處理所形成的電極沉積物34的錐狀角度0 爲3 0度以下時，附著上鎳即可。也可以再以金等將外側 進行電鍍處理。 之後，如第24圖、第25圖所示，朝向與噴嘴前端部 -17- (15) 1298647 3 4b的方向相反的方向將芯線33與電鑄管31抽出。例如 ，噴嘴前端的外徑爲1〇〇以m，內徑爲20 /z m ’噴嘴後方 的外徑爲180/zm，內徑爲100// m。 當抽出芯線3 3時，在電鑄管3 1的外面所形成的金等 的電鍍處理，是殘留於電極沉積物34的內面。藉此’在 噴嘴內面實施金等的電鍍處理。 在抽出芯線33之前，也可以將噴嘴前端部34b進行 φ 錐狀加工而作成大致圓錐形狀。 藉由第三實施方式，將較細電鑄管31的端部進行錐 狀加工，將芯線3 3再度***，以覆蓋全體的方式進行電 鑄處理作成特定厚度，藉由將芯線3 3與較細電鑄管3 1抽 出，而能將噴嘴的較粗部分與前端部分形成爲一體，並且 ，在超精細噴嘴內部，從內側朝向前端形成爲變細的錐狀 ，所以具有容易排出液滴的效果。 •〔第四實施方式〕 針對本發明的第四實施方式的超精細噴嘴的製造方法 ，參照第26圖〜第28圖來加以說明。 第26圖是在第四實施方式的芯線所形成的第一電鑄 管的剖面圖，第27圖是在第26圖實施第二電鑄處理的狀 態的剖面圖，第28圖是從第27圖抽出芯線及第一電鑄管 的狀態的剖面圖。 如第26圖所示，例如在直徑20 μ m的芯線4 3實施第 一電鑄處理，在全體形成鎳的電極沉積物’例如，形成外 -18· (16) 1298647 徑100//m的第一電鑄管41。而殘留下芯線43。 第一電鑄管41，以如後述的第38圖、第39圖所示的 製造方法’弟一電纟#管41是形成爲具有錐狀部分41a。 如第27圖所示，在第26圖的電鑄管，實施了成爲所 需要的厚度的第二電鑄處理（第二次的電鑄處理），形成 第二電鑄管44。所需要的厚度，例如是i〇//m的話，芯 線43的前端部，例如形成外徑40 // m的鎳的電極沉積物 φ (第二電極沉積物），電鑄管41部分，例如形成外徑140 // m的鎳的電極沉積物（第二電極沉積物）。 因此，如第27圖所示，在第二電鑄管44，形成了錐 狀部分44a與噴嘴前端44b。 藉由第二電鑄處理所形成的第二電極沉積物的錐狀角 度，爲30度以下時，鎳附著良好。而也能再以金等將外 側進行電鍍處理。 如第28圖所示，將與噴嘴前端部44b的方向相反的 # 方向抽出芯線43與第一電鑄管41。例如，噴嘴前端的外 徑爲40 // m，內徑爲20 // m，噴嘴後方的外徑爲12〇 // m ，內徑爲1 0 0 // m。 當抽出芯線43時，在第一電鑄管4 i的外面所形成的 金等的電鍍處理，會殘留於第二電極沉積物的內面。藉此 ，在噴嘴內面實施金等的電鍍處理也可以。 當要增厚第二次的電鑄處理的厚度時，在將芯線43 抽出之前’將噴嘴前端部44b進行錐狀加工作成大致圓錐 形狀也可以。 -19- (17) 1298647 藉由第四實施方式，在芯線43形成錐狀形狀的第一 電鑄管41，在其上面實施第二電鑄處理而形成第二電鑄管 4 4，然後抽出芯線4 3與第一電鑄管4 1，所以能容易地且 一體地製造超精細的噴嘴，並且，能作成在超精細噴嘴內 部從內部朝向前端變細成錐狀，而具有能容易排出液滴的 效果。 φ 〔第五實施方式〕 針對本發明的第五實施方式的超精細噴嘴的製造方法 ，參照第29圖〜第3 1圖來加以說明。 第29圖是在第五實施方式的芯線所形成的第一及第 二電鑄管的剖面圖，第30圖是在第29圖實施第三電鑄處 理的狀態的剖面圖，第3 1圖是從第30圖抽出芯線及第一 及第二電鑄管的狀態的剖面圖。 如第29圖所不，第五實施方式的超精細噴嘴’在第 • 26圖的芯線及第一電鑄管4 1再實施第二電鑄處理，形成 了第二電鑄管45。電極沉積物，是使用鎳等，厚度是形成 爲4 0 // m程度。 第一電鑄管41及第二電鑄管45，在後述的第38圖、 第39圖所示的製造方法，是形成爲：第一電鑄管41具有 錐狀部分41a，第二電鑄管45具有錐狀部分45a。 如第30圖所示，在第29圖的電鑄管，再實施成爲所 需要的厚度的第三電鑄處理（第三次的電鑄處理），形成 了第三電鑄管46。所需要的厚度，例如爲20 μ m時，而 -20· (18) 1298647 將鎳的電極沉積物（第三電極沉積物）形成爲：芯線4 3 的即端部爲例如外徑6 0 // m，第一電鑄管4 1部分爲例如 外徑140// m，第二電鑄管45部分爲例如外徑220 # m。 而將所需要的厚度作成1 0 // m的話，芯線43的前端 部爲例如4 0 // m，第一電鑄管4 1部分爲例如外徑〖2 〇 # m ，第二電鑄管45部分例如爲外徑200 // m。 在第三電鑄管46，形成了錐狀部分46a與噴嘴前端部 分 4 6 b。 藉由第二、第三電鑄處理所形成的第二、第三電極沉 積物的錐狀角度爲3 0度以下，鎳附著良好。而也能再以 金等將外側進行電鍍處理。 並且如第31圖所示，在朝向與噴嘴前端部46b的方 向相反的方向抽出芯線43與第一電鑄管4 1及第二電鑄管 45。例如，噴嘴前端的外徑爲60 // m，內徑爲20 μ m，噴 嘴中段的外徑爲1 40 // m，內徑爲1 00 // m，噴嘴後段的外 _ 徑爲220/zm，內徑爲180/zm。 當抽出芯線43時，在第一電鑄管41及第二電鑄管45 的外面所形成的金等的電鍍處理，會殘留於第三電極沉積 物的內面。藉此，在噴嘴內面實施金等的電鍍處理。 當增厚第三次的電鑄處理的厚度時，也可以在抽出芯 線43之前，將噴嘴前端部46b進行錐狀加工作成大致圓 錐形狀。 藉由第五實施方式，在芯線43形成第一段的錐狀形 狀的第一電鑄管4 1，在上面實施第二電鑄處理，形成了第 -21 · (19) 12986471298647 (1) EMBODIMENT OF THE INVENTION [Technical Field of the Invention] The present invention relates to a machine for use in biotechnology, a medical device, a device for genetic use, a device for use in an inkjet printer, a drug, and a binder. Fine nozzles for use in machines, reagents, liquid crystal discharges, and other industrial applications, especially for superfine nozzles that make the tip end portion of the nozzle ultrafine. [Prior Art] Although the fine nozzle used in medical or industrial machines today has a very fine structure, the inner diameter of the front end is 50 to 60 // m, and the outer diameter is thick. Moreover, plating cannot be performed on the inner diameter of the nozzle. For example, Japanese Patent Laid-Open No. 2004-136665, "Liquid Discharge Device" (Patent Document 1), which is disclosed in Japanese Laid-Open Patent Publication No. 2004-136. [Patent Document 1] JP-A-2004-136651 SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] However, in order to be applied to various devices and apparatuses, and to discharge a small amount of liquid, it is required to have an outer diameter than conventional ones. The nozzle has a finer nozzle and a fine nozzle with a front end inner diameter of 20 // m or less. Especially in order to allow the liquid to drain smoothly, • 4 - (2) 1298647 Reduce the discharge of the liquid once, and hope that the outer diameter of the front end is finer and the thickness of the nozzle is as thin as 5 // m. In order to keep cells and the like classified for biochemical use or genetic use, it is required to cause a weak current to flow to the front end of the nozzle. The present invention has been made in view of the above circumstances, and an object thereof is to provide an ultrafine nozzle and a method of manufacturing the same, which can smoothly discharge a liquid by making the inner diameter of the tip end of the nozzle fine to 30 // m or less, and thinning the thickness of the nozzle. Moreover, the amount of liquid discharged can be reduced, and it can be applied to various machines for medical use or industrial use. SUMMARY OF THE INVENTION It is an object of the present invention to provide an ultrafine nozzle and method of manufacturing the same that enables current to flow to the front end of the nozzle. [Means for Solving the Problem] The present invention for solving the problems of the above-described conventional examples is a method for manufacturing an ultrafine nozzle, which is formed by electroforming such that a part of a core wire is exposed, and the first wire is mounted at # The electroforming tube is subjected to a second electroforming process to form a second electroforming tube, and the core wire and the first electroforming tube are drawn from the second electroforming tube. According to the present invention, in the method of manufacturing the ultrafine nozzle, in the first electroforming tube, a tip end portion of a part of the core wire exposed is formed in a tapered shape of 30 degrees or less. According to the invention, in the above method for manufacturing an ultrafine nozzle, the tip end portion of the nozzle is processed into a tapered shape before the first electroforming tube is drawn. According to the present invention, in the method for manufacturing the ultrafine nozzle, after the core wire and the first electroforming tube are pulled out, the straight portion of the tip end portion of the nozzle is cut into a -5 - (4) 1298647. The present invention is an ultrafine nozzle. In the manufacturing method, the hollow portion of the first electroforming tube formed by electroforming at a tip end portion of one of the tips is formed to have an outer diameter that is approximately the same as that of the hollow portion of the first electroforming tube. In a state in which the core wire is formed by electroforming, a part of the straight portion of the second electroforming tube whose tip end portion is tapered is inserted, and then a secondary electroforming process is performed, and after the secondary electroforming process, the core wire is drawn. Or a core wire and a second electroformed tube. φ In the method of manufacturing the above-described ultrafine nozzle, in the Uu' of the drawn core wire, the end portion on the side opposite to the joint portion of the %-electrode tube is subjected to taper processing. According to the present invention, in the method for producing a superfine nozzle, the outer surface is plated with a metal such as gold, silver or palladium which is excellent in chemical resistance, corrosion resistance and conductivity before the core wire is drawn. According to the present invention, in the method for producing the ultrafine nozzle, the inner surface of the first electroforming tube and the second electroforming tube are gold, silver, and palladium which are excellent in chemical resistance, rot resistance, and φ conductivity in advance. The metal is electroplated. According to the present invention, in the method for producing a superfine nozzle, a core wire having a shape of a linear portion having a thickness of 50 // m in a tapered shape of 30 degrees or less at a tip end portion of a diameter of 100 to 200 // m is used. After the electroforming process is performed on the core wire, the core wire is pulled out. According to the invention, in the method of manufacturing the ultrafine nozzle described above, the tip end portion is subjected to taper processing before the core wire is drawn. According to the present invention, in the method for producing a superfine nozzle, the outer surface is plated with a metal such as gold, silver or palladium (5) 1298647 which is excellent in chemical resistance, corrosion resistance, and conductivity before the core wire is drawn. The present invention is a method for producing an ultrafine nozzle, which is formed by electroforming in a hollow portion of a first electroformed tube formed by electroforming, and having a hollow portion similar to that of the first electroformed tube. A portion of the second electroformed tube of the outer diameter is bonded to the joint portion by an adhesive or electroplating. The present invention relates to a method for producing an ultrafine nozzle, which is formed by electroforming φ, and is subjected to a plating process to form a hollow portion of a first electroforming tube, which is formed by electroforming, and is subjected to a plating process. A portion of the second electroforming tube having an outer diameter of the crucible adjacent to the hollow portion of the first electroformed tube and being melted at a high temperature causes the first electrocavitating tube to be joined to the second electroforming tube. According to still another aspect of the invention, in the method of manufacturing the ultrafine nozzle, after that, the end portion of the second electroforming tube opposite to the joint portion is tapered. According to the present invention, in the method for producing the ultrafine nozzle, the outer surface is plated with a spring metal such as gold, silver or palladium which is excellent in chemical resistance, corrosion resistance and conductivity. According to the present invention, in the method for producing the ultrafine nozzle, the inner surface of the first electroforming tube and the second electroforming tube are gold, silver, palladium or the like which is excellent in chemical resistance, corrosion resistance, and conductivity in advance. The metal is plated. [Effect of the Invention] According to the present invention, a part of the core wire is formed by electroforming, and the first electroforming tube to which the core wire is attached is subjected to a second electroforming process to form a second electroforming tube, from the second Electroforming tube draws the core wire and the first electroforming tube -8 - (6) 1298647 The method of manufacturing the ultrafine nozzle has the effect of allowing the nozzles having different inner and outer diameters to be dripped linearly by the front end portion To a smaller portion, a narrow groove, or a depth having a depth, by the present invention, before the first electroforming tube is drawn, a portion of the above-described ultrafine nozzle which is partially processed into a tapered shape can be used to measure the thickness of the front end portion of the nozzle Thin, let the liquid be small, and easy to control the discharge. According to the present invention, in the first electroforming tube, the one end portion of the core wire is formed into a taper shape of 30 degrees or less, and the effect is that the electrode of the second electroforming tube adheres. According to the present invention, before the secondary electroforming treatment, the casting tube is subjected to chemical resistance, corrosion resistance, and conductivity plating treatment, and after the secondary electroforming treatment, the above-described superfine processing in the second electroforming plating treatment is performed. The method for producing a nozzle is excellent in chemical resistance, corrosion resistance, and conductivity of the nozzle. According to the present invention, an electroformed tube having a small outer diameter and an inner diameter having a small inner diameter is joined to each other: The ultrafine nozzle on the same axis of each hollow portion has an effect that the thickness of the front end portion can be made such that the amount of one drop of the liquid becomes a small amount of discharge. According to the present invention, the above-mentioned ultrafine nozzle having a small end portion of the electroforming tube is used, so that the effect is such that a small portion, a narrow groove, or a portion having a depth can be accommodated. Easy to form an integral part, it can be easily used. The front end method of the nozzle has the effect that the amount of the drop is a part of the exposed front fine nozzle, and the deposited material of the front core fine electrode and the first electric metal can be made of metal, and the effect is The outer diameter and the central axis are generally used as thin nozzles, and are easy to control, and have a straight shape to easily drop to -9 - (7) 1298647. By the present invention, a larger electroformed tube and a smaller electroformed tube are used. The taper is a tapered upper nozzle which is formed so that both the outer diameter and the inner diameter are gentle. Therefore, the effect is that the amount of liquid can be controlled to be reduced, and even if the fraction is fine, the liquid can be easily discharged. According to the present invention, the plating treatment is a super-nozzle of a metal such as gold, silver or palladium which is excellent in chemical resistance and conductivity, and therefore has an effect of chemical resistance and corrosion resistance of the nozzle. Very good. According to the invention, in the hollow portion of the first electroformed tube which is formed by electroforming, one of which is tapered, is mounted on the side of the electroforming, and has an outer diameter which is approximately the same as the hollow portion of the first electroformed tube. The front end portion of the core wire is a part of the straight portion of the tapered second electroforming tube, and then subjected to secondary electroforming treatment, after the secondary electroforming process, the ultrafine nozzle of the wire drawing or the core wire and the second electroforming tube The manufacturing method has the effect that the nozzles having different inner and outer diameters can be easily formed, and the straight portion and the tapered portion of 9 points can be easily dropped to a small portion or a portion having a depth, and the control can be reduced. The amount of liquid, and even if it is fine before, can easily discharge the liquid. According to the present invention, the ultrafine nozzle method in which the end portion on the opposite side of the second electroforming tube portion is tapered is processed before the core wire is drawn, so that the thickness of the tip end portion can be made thin and the amount of liquid It becomes a small amount and it is easy to control the discharge amount. According to the present invention, before the core wire is pulled, the outer surface of the joint portion is made of a metal such as gold, silver or palladium which is excellent in chemical resistance, properties and conductivity, and the fine front end portion and the corrosion-resistant fine spray conductive front end portion are described. Forming, inserting the row to join the core, so that the front end portion, the narrow end portion of the joint body is connected with a drop of corrosion resistance plating -10 (8) 1298647 , on the inner surface of the first electroforming tube and the second electroforming tube It is a method for producing the above-described ultrafine nozzle which is plated with a metal such as gold, silver or palladium which is excellent in chemical resistance, corrosion resistance and conductivity. Therefore, the effect is the chemical resistance and corrosion resistance of the nozzle. Excellent conductivity. According to the present invention, the core wire having a shape of a straight portion having a thickness of 50 m from the tip end portion of the diameter of 100 to 200 μm is formed into a taper shape of 30 degrees or less, and electroforming is performed. Since the upper φ superfine nozzle manufacturing method of the core wire is drawn out, the effect is that the nozzles having different inner and outer diameters can be easily integrally formed, and the straight portion and the tapered portion of the tip end portion can be easily dropped. It is possible to control the reduction of the amount of liquid to a small portion, a narrow groove, or a portion having a depth, and it is easy to discharge the liquid even if the front end portion is thin. According to the present invention, in the method of manufacturing the above-described ultrafine nozzle in which the tip end portion is subjected to taper processing before the core wire is drawn, the effect is that the thickness of the tip end portion can be made thin, and the amount of liquid droplets becomes small, which is easy to control. • Discharge. According to the present invention, in the hollow portion of the first electroformed tube formed by electroforming, insert-joining is formed by electroforming, and has a second electric power which is approximately the outer diameter of the hollow portion of the first electroforming tube. a part of the cast pipe, a method of manufacturing the superfine nozzle in which the joint portion is joined together by an adhesive or an electric ore, so that the effect is that the nozzle having different inner and outer diameters can be easily formed by the second electroformed tube The straight portion of the front end portion can be easily dropped to a small portion, a narrow groove, or a portion having a depth. According to the present invention, the hollow portion of the first electroformed tube of -11 - (9) 1298647 which is formed by electroforming, is subjected to electroplating, and is inserted and joined: by electroplating, having the first electroforming tube A part of the hollow second electroforming tube is melted by high temperature, and the effect of the ultrafine nozzle which is joined together by the second electroforming tube is that the straight portion of the front end portion of the cast tube having different inner and outer diameters can be easily formed. It is possible to easily drop a narrow groove or a portion having a depth. φ According to the present invention, after the second opposite side end portion is subjected to the above-described superfinishing of the tapered processing, the effect is that the amount of dripping of the tip end portion of the nozzle can be made small, and the discharge amount can be easily controlled. According to the present invention, the inner surfaces of the first electrocast tube and the second electroforming tube are made of gold having excellent corrosion resistance and conductivity, such as gold, silver, or palladium, which are excellent in drug resistance and conductivity. The method for producing the above-described ultrafine nozzle, such as silver or palladium, is excellent in chemical properties, corrosion resistance, and conductivity. [Embodiment] The embodiment of the present invention is described with reference to the drawings: [The method of the present invention] The ultrafine nozzle of the embodiment of the present invention is made thinner than 30 // m and thinner, and the casting method is used. The first electroforming tube and the manufacturing method are formed by the outer diameter of the meandering portion, so that the nozzle is manufactured by the second electric down to a small portion, the electroforming tube and the joint portion fine nozzle The thickness is thin, the liquid is one-piece, the corrosion resistance, and the plating is performed on the outside. The plating treatment effect is first treated with chemical resistance and metal resistance, and the nozzle is resistant. It is a superfine spray that is required by the industry but has not yet been manufactured, and it is easy to control the amount of discharged liquid, and it is easy to drip into the narrow groove. Wait. By performing metal plating on the inner surface and the outer surface of the tip end shape of the nozzle, current can flow to the tip end of the nozzle, and the effect can be electrically controlled at the tip end portion of the nozzle. [First Embodiment] Φ A method of manufacturing the ultrafine nozzle according to the first embodiment of the present invention will be described with reference to Figs. 1 to 8 . 1 is a cross-sectional view of a thick electroformed tube of the ultrafine nozzle of the first embodiment, and FIG. 2 is an external view of a thick electroformed tube of FIG. 1 . FIG. 3 is a view of the first embodiment. A cross-sectional view of a thin electroformed tube of a superfine nozzle, Fig. 4 is an external view of a thin electroformed tube of Fig. 3, and Fig. 5 is a view of inserting a thin electroformed tube into a thicker electroforming FIG. 6 is an external view of the two electroformed tubes joined in FIG. 5, and FIG. 7 is a cross-sectional view of the joint portion of the fifth drawing. FIG. 8 is the seventh drawing. The appearance of the two electroformed tubes that follow. As shown in Fig. 1 and Fig. 2, for example, a relatively thick electroformed tube (first electroformed tube) 11 having an outer diameter of 300 / / m and an inner diameter of 100 / z m is produced. The specific manufacturing method for the electroformed tube will be described later. As shown in Fig. 3 and Fig. 4, for example, a thin electroformed tube (second electroformed tube) 12 having an outer diameter of 1 〇0 #m and an inner diameter of 20 // m is produced. For the electroformed tubes 1 1 and 12, the inner surface is plated with gold, silver or palladium (Pd). -13- (11) 1298647 As shown in Fig. 5 and Fig. 6, a part of the fine electroformed tube 12 is inserted into the hollow portion from the end face 1 1 a side of one of the coarse electroformed tubes 1 1 The department is joined. In order to insert the finer electroforming tube 12 into the hollow portion of the coarser electroforming tube 1 1 , the outer diameter of the thinner electroformed tube 1 2 is slightly smaller than that of the thicker electroformed tube 1 1 as shown in Fig. 7. As shown in Fig. 8, the adhesive agent 13 is applied to the vicinity of the end surface φ 1 1 a of the relatively thick electroformed tube, and can be further electrolessly plated, electrolytically plated, or plated. . For the tip end of the nozzle, the end surface 12a of the fine electroformed tube 12 may be tapered, and the tip end may have a substantially conical shape and may be pointed. It is also possible to plate the outside with gold. Alternatively, the plating process may be performed on the outer surfaces of the electroforming tubes 1 1 and 1 2 in advance, and the electroformed tube 12 may be inserted into the electroformed tube 1 1 to be connected, and melted at a high temperature to cause the two to be melted at a high temperature. Then you can. • For the ultrafine nozzle of the first embodiment, the fine electroformed tube 12 is inserted into the hollow portion of the coarse electroformed tube 1 1 and joined, and the joint portion is formed by an adhesive or electroplating. It has the effect of being able to easily make a fine nozzle of the front end. [Second Embodiment] A method of manufacturing an ultrafine nozzle according to a second embodiment of the present invention will be described with reference to Figs. 9 to 16. Figure 9 is a cross-sectional view of the thicker electroformed tube of the ultrafine nozzle of the second embodiment, -14-(12) 1298647, and the first drawing is an external view of the thicker electroformed tube of the ninth embodiment, the first one Fig. 12 is a cross-sectional view showing a fine electroformed tube of the ultrafine nozzle of the second embodiment, Fig. 12 is an external view of the thinner electroformed tube of Fig. 1, and Fig. 13 is a view of inserting a fine electroformed tube into A cross-sectional view of a relatively thick electroformed pipe joined, and Fig. 14 is a cross-sectional view showing the electroforming process of the two electroformed pipes joined in Fig. 3, and Fig. 15 is a drawing of the core wire from Fig. 14. The cross-sectional view of the state, Fig. 16 is the external view of Fig. 15. As shown in Fig. 9 and Fig. 10, for example, a coarse electroformed tube (first electroformed tube) 21 having an outer diameter of 300 // m and an inner diameter of 100 // m is produced. Further, the end surface of the coarse electroformed tube 2 1 is processed into a tapered shape to form a tapered shape 2 1 a. As shown in Figs. 1 and 2, for example, a fine electroformed tube (second electroformed tube) 22 having an outer diameter of 100 // m and an inner diameter of 20 // m is produced. A core wire 23 having a diameter of 20 // m is attached to the fine electric cast tube 22. For the electroformed tubes 21 and 22, the inner surface is plated with gold, silver, and palladium (Pd). As shown in Fig. 3, a part of the fine electroformed tube 22 is inserted from the tapered 2 1 a side of the thicker electric power tube 21 into the hollow portion thereof to be joined. In this case, the core wire 23' is in the shape of a hollow portion that passes through the thicker electroforming tube 21. In order to insert the fine electroformed tube 22 into the hollow portion of the coarse electroformed tube 21, the outer diameter of the fine electroformed tube 22 is slightly smaller than the inner diameter of the thicker electroformed tube 2, and then, at the 13th The structure of the shape of the figure is subjected to electroforming treatment. As a result, as shown in Fig. 14, the electric redundant material 24 of nickel is formed to the extent of 2 〇 / m. An electrode deposit 24-15-(13) 1298647' is also formed on the upper portion of the tapered portion 21a to form a tapered portion 24a. Further, the outer surface may be plated with gold or the like. Then, the core wire 23 is taken out from the state of Fig. 14, and as shown in Fig. 15 and Fig. 16, the ultrafine nozzle is completed. Before the core wire 23 is pulled out, the tip end portion of the nozzle is subjected to taper processing. Then, the core wire 23 is taken out, and the tip end portion of the nozzle may be formed into a substantially conical shape. φ The ultrafine nozzle 2 of the second embodiment performs a taper process on the end portion 2 1 a of the thick electroformed tube 2 1 , and a thin electroformed tube 22 in which the core wire 23 is not extracted is inserted into the tapered processed portion. The entire electroforming process is performed to form the electrode deposit 24, and the core wire 23 is taken out. Therefore, the effect is that the nozzle having a fine tip can be easily formed. [Third Embodiment] A method of manufacturing an ultrafine nozzle according to a third embodiment of the present invention will be described with reference to Figs. 7 to 25. Fig. 17 is a cross-sectional view showing a fine electroformed tube of the ultrafine nozzle of the third embodiment, and Fig. 18 is a cross-sectional view showing a tapered machining of the fine electroformed tube of Fig. 7, Fig. 19 Fig. 20 is a cross-sectional view showing a state in which a core wire is drawn from the electroforming tube of Fig. 19. Fig. 21 is a cross-sectional view showing a state in which the core wire is inserted into the electroforming tube of Fig. 20. Fig. 22 is an external view of Fig. 21, Fig. 23 is a cross-sectional view showing a state in which electroforming is performed in Fig. 22, and Fig. 24 is a cross-sectional view showing a state in which a core wire and a fine electroformed pipe are taken out from Fig. 23. Fig. 25 is an external view of Fig. 24. -16- (14) 1298647 As shown in Fig. 17, for example, an electroforming process is performed on a core wire 32 having a diameter of 20 μm, and an electrode deposit of nickel is formed in the entirety, for example, an electric wire having an outer diameter of 100 // m is formed. Cast tube 31. The core wire 32 remains. As shown in Figs. 18 and 19, the end portion 31a of the electroformed tube 31 is tapered to have a conical shape. In this case, the core wire 32 is also subjected to taper processing to form a tapered portion 3 2a of the core wire 32 and a tapered portion 31b of the electroformed tube 31. φ Next, as shown in Fig. 2, the core wire 32 is drawn toward the opposite side of the tapered portion 32a. As shown in Figs. 21 and 22, the electroformed tube 3 1 from which the core wire 32 is taken out is inserted into the core wire 33 which is thinner than the core wire 32 from the drawing direction. The core wire 3 3 is a structure which is thinner than the inner diameter of the electroformed pipe 3 1 and has an outer diameter of 20 // m, for example, an outer diameter of about 1 8 // m. In this state, the outer surface of the electroformed tube 3 1 is plated with gold, silver, palladium or the like. This plating treatment is metal plating on the inner surface of the nozzle after the treatment. As shown in Fig. 23, electroforming is performed to a desired thickness (e.g., 20 // m), and the front end portion of the core wire 3 is, for example, an electrode deposit 34 of nickel having an outer diameter of 60 μm, and the electroformed tube 3 is formed. Part 1, for example, an electrode deposit 34 of nickel forming an outer diameter of 140 // m. When the taper angle 0 of the electrode deposit 34 formed by the electroforming treatment is 30 degrees or less, nickel may be attached thereto. It is also possible to electroplate the outside with gold or the like. Thereafter, as shown in Fig. 24 and Fig. 25, the core wire 33 and the electroformed tube 31 are taken out in a direction opposite to the direction of the nozzle tip end portion -17-(15) 1298647 34b. For example, the front end of the nozzle has an outer diameter of 1 〇〇m and an inner diameter of 20 /z m '. The outer diameter behind the nozzle is 180/zm and the inner diameter is 100//m. When the core wire 3 3 is taken out, the plating treatment of gold or the like formed on the outer surface of the electroforming tube 31 is left on the inner surface of the electrode deposit 34. Thereby, a plating treatment of gold or the like is performed on the inner surface of the nozzle. Before the core wire 33 is taken out, the nozzle tip end portion 34b may be tapered by φ to have a substantially conical shape. According to the third embodiment, the end portion of the fine electroformed tube 31 is tapered, the core wire 3 3 is inserted again, and the electroforming process is performed to cover the entire thickness to a specific thickness by the core wire 3 3 . The fine electroformed tube 3 1 is taken out, and the thick portion of the nozzle can be integrally formed with the front end portion, and the inside of the ultrafine nozzle is formed into a tapered shape from the inner side toward the front end, so that it is easy to discharge the liquid droplets. effect. [Fourth embodiment] A method of manufacturing an ultrafine nozzle according to a fourth embodiment of the present invention will be described with reference to Figs. 26 to 28. Fig. 26 is a cross-sectional view showing a first electroformed tube formed by the core wire of the fourth embodiment, and Fig. 27 is a cross-sectional view showing a state of performing a second electroforming process in Fig. 26, and Fig. 28 is from the 27th A cross-sectional view showing the state of the core wire and the first electroformed tube. As shown in Fig. 26, for example, a first electroforming process is performed on a core wire 43 having a diameter of 20 μm, and an electrode deposit of nickel is formed in the whole, for example, an outer -18·(16) 1298647 diameter 100//m is formed. The first electroformed tube 41. The lower core wire 43 remains. The first electroforming tube 41 is formed to have a tapered portion 41a by a manufacturing method as shown in Figs. 38 and 39, which will be described later. As shown in Fig. 27, in the electroformed tube of Fig. 26, a second electroforming process (second electroforming process) having a desired thickness is performed to form a second electroformed tube 44. The required thickness is, for example, i 〇 / / m, the front end portion of the core wire 43, for example, an electrode deposit φ (second electrode deposit) of nickel having an outer diameter of 40 // m, and an electroforming tube 41 portion, for example An electrode deposit (second electrode deposit) of nickel having an outer diameter of 140 // m was formed. Therefore, as shown in Fig. 27, in the second electroformed tube 44, the tapered portion 44a and the nozzle front end 44b are formed. When the taper angle of the second electrode deposit formed by the second electroforming treatment is 30 degrees or less, nickel adhesion is good. In addition, the outer side can be plated with gold or the like. As shown in Fig. 28, the core wire 43 and the first electroforming tube 41 are taken out in the # direction opposite to the direction of the nozzle tip end portion 44b. For example, the front end of the nozzle has an outer diameter of 40 // m, an inner diameter of 20 // m, an outer diameter behind the nozzle of 12 〇 // m and an inner diameter of 1 0 0 // m. When the core wire 43 is taken out, plating treatment of gold or the like formed on the outer surface of the first electroforming tube 4 i remains on the inner surface of the second electrode deposit. Thereby, plating treatment of gold or the like may be performed on the inner surface of the nozzle. When the thickness of the second electroforming process is to be thickened, the nozzle tip end portion 44b may be tapered to work in a substantially conical shape before the core wire 43 is withdrawn. -19- (17) 1298647 According to the fourth embodiment, a first electroformed tube 41 having a tapered shape is formed on the core wire 43, a second electroforming process is performed thereon to form a second electroforming tube 4 4, and then extracted Since the core wire 43 and the first electroforming tube 4 1 can easily and integrally manufacture an ultra-fine nozzle, it can be made tapered inside the ultra-fine nozzle from the inside toward the front end, and has an easy discharge liquid. The effect of the drop. φ [Fifth Embodiment] A method of manufacturing the ultrafine nozzle according to the fifth embodiment of the present invention will be described with reference to Figs. 29 to 31. Fig. 29 is a cross-sectional view showing first and second electroformed tubes formed in the core wire of the fifth embodiment, and Fig. 30 is a cross-sectional view showing a state in which the third electroforming process is performed in Fig. 29, and Fig. 31 This is a cross-sectional view showing a state in which the core wire and the first and second electroforming tubes are taken out from Fig. 30. As shown in Fig. 29, the ultrafine nozzle 'of the fifth embodiment is further subjected to the second electroforming process in the core wire of the Fig. 26 and the first electroforming tube 41 to form the second electroforming tube 45. The electrode deposit is made of nickel or the like and has a thickness of about 40 // m. The first electroforming tube 41 and the second electroforming tube 45 are formed in a manufacturing method shown in Figs. 38 and 39 to be described later, in which the first electroforming tube 41 has a tapered portion 41a and a second electroforming The tube 45 has a tapered portion 45a. As shown in Fig. 30, in the electroformed tube of Fig. 29, a third electroforming process (third electroforming process) having a desired thickness is carried out to form a third electroformed tube 46. The required thickness is, for example, 20 μm, and -20·(18) 1298647 forms an electrode deposit of nickel (third electrode deposit) such that the end portion of the core wire 4 3 is, for example, an outer diameter of 6 0 / / m, the first electroforming tube 4 1 portion is, for example, an outer diameter of 140 / / m, and the second electroforming tube portion 45 is, for example, an outer diameter of 220 # m. When the required thickness is made to be 10 // m, the front end portion of the core wire 43 is, for example, 4 0 // m, and the portion of the first electroforming tube 4 1 is, for example, an outer diameter 〖2 〇# m , the second electroforming tube The 45 part is, for example, an outer diameter of 200 // m. In the third electroformed tube 46, a tapered portion 46a and a nozzle front end portion 4 6 b are formed. The tapered angles of the second and third electrode deposits formed by the second and third electroforming processes are 30 degrees or less, and the nickel adhesion is good. In addition, the outer side can be plated with gold or the like. Further, as shown in Fig. 31, the core wire 43 and the first electroforming tube 4 1 and the second electroforming tube 45 are taken out in a direction opposite to the direction of the nozzle tip end portion 46b. For example, the front end of the nozzle has an outer diameter of 60 // m and an inner diameter of 20 μm. The outer diameter of the nozzle is 1 40 // m, the inner diameter is 1 00 // m, and the outer diameter of the nozzle is 220/. Zm, inner diameter is 180/zm. When the core wire 43 is taken out, plating treatment of gold or the like formed on the outer surfaces of the first electroforming tube 41 and the second electroforming tube 45 remains on the inner surface of the third electrode deposit. Thereby, a plating process of gold or the like is performed on the inner surface of the nozzle. When the thickness of the third electroforming process is increased, the nozzle tip end portion 46b may be tapered to work in a substantially conical shape before the core wire 43 is withdrawn. According to the fifth embodiment, the first electroformed tube 4 1 having a tapered shape of the first stage is formed on the core wire 43, and the second electroforming process is performed thereon to form the -21 · (19) 1298647
二段的錐狀形狀的第二電鑄管45，再對全 處理形成第三電鑄管，然後抽出芯線43 | 及第二電鑄管45，所以能容易且一體地製 細噴嘴，並且能作成在超精細噴嘴內部從 細成多段的錐狀，而具有能容易排出液滴I 〔第六實施方式〕 φ 針對本發明的第六實施方式的超精細 ，參照第32圖〜第34圖來加以說明。 第32圖是第六實施方式的錐狀形狀 ，第33圖是在第31圖實施電鑄處理的狀 34圖是從第33圖抽出芯線的狀態的剖面田 第六實施方式的超精細噴嘴，首先， ，形成了錐狀形狀的芯線5 1。芯線5 1，^ 的構造作成左右對稱的構造連續形成複數 # 斷形成了第32圖形狀的構造。這裡也可ΰ 側以金等進行電鍍處理。 芯線5 1，例如具備有：前端部分5 1 b 部分爲100// m的錐狀部分51a。 如第3 3圖所示，在第3 2圖的電鑄管 要的厚度的電鑄處理，形成電鑄管5 4。所 爲20 // m時，相當於芯線5 1的前端部分 徑60 // m的鎳的電極沉積物，芯線5 1的 成外徑1 4 0 // m的鎳的電極沉積物。 體實施第三電鑄 I第一電鑄管41 造出多段的超精 內部朝向前端變 I勺效果。 噴嘴的製造方法 的芯線的剖面圖 態的剖面圖，第 卜 如第3 2圖所示 :將第32圖形狀 個，將其適當切 L將芯線5 1的外 爲2 0 // m，後方 ’貫施成爲所需 需要的厚度例如 54b例如形成外 後方部分例如形 -22- (20) 1298647 所需要的厚度爲10// m時，芯線51的前端部51a例 如爲外徑40 // m，芯線5 1的後方部分例如爲外徑1 20 " m ο 如第33圖所示，在電鑄管54，形成了錐狀部分54a 與噴嘴前端部分54b。 藉由電鑄處理所形成的電極沉積物的錐狀角度爲3 0 度以下，鎳附著良好。而也能再以金等將外側進行電鍍處 鲁理。 並且如第3 4圖所示，在朝向與噴嘴前端部5413的方 向相反的方向抽出芯線5 1。例如，噴嘴前端的外徑爲60 // m，內徑爲20 // m，噴嘴後方的外徑爲140 /z m，內徑爲 1 00 // m 〇 當抽出芯線43時，在芯線5 1的外面所形成的金等的 電鍍處理，會殘留於電極沉積物的內面。藉此，在噴嘴內 面實施金等的電鍍處理。 • 當增厚電鑄處理的厚度時，也可以在抽出芯線5 1之 前，將噴嘴前端部54b進行錐狀加工作成大致圓錐形狀。 藉由第六實施方式，形成錐狀形狀的芯線5 1，在上面 實施電鑄處理，形成了電鑄管54，然後抽出芯線5 1，所 以能容易且一體地製造出超精細噴嘴，並且能作成在超精 細噴嘴內部從內部朝向前端變細的錐狀，而具有能容易排 出液滴的效果。 〔電鑄裝置〕 -23- (21) 1298647 接著，針對進行電鑄處理的電鑄裝置，參照第3 5圖 、第36圖、第37圖來加以說明。第35圖是本發明的實 施方式的電鑄裝置的剖面圖，第3 6圖是本發明的第一實 施方式的電鑄裝置的構造圖，第37圖是顯示第一實施方 式的電纟毒處理的順序的槪略圖。 電鑄裝置，如第3 5圖、第3 6圖所示，具備有：電鑄 槽1、及在內側收容該電鑄槽1的外槽部2。 φ 電鑄槽1，是在上部具有開口部的槽部，在該電鑄槽 1內充塡著電解液（電鑄液）3。藉此，從電鑄槽1溢出的 電解液3，會流入到外槽部2內。作爲電解液，例如，在 氨基磺酸鎳液添加光澤劑及凹點防止劑的液體。 在電鑄槽1，連接著供給配管4。通過該供給配管4 ’ 藉由循環泵浦6，將來自於管理槽5的供給室5A的電解 液3供給到電鑄槽1。 另一方面，在外槽部2，連接著排出配管7，外槽部2 • 內的電解液3，是通過該排出配管7，而被回收到管理槽5 的回收室5B。 管理槽5的供給室5A與回收室5B，是藉由液隔離板 5C所隔開，被回收到回收室5B的包含雜質的電解液3 ’ 在經過過濾器9過濾之後，被供給到供給室5 A ° 供給室5A內的電解液3，是適當地調整其液溫、氫 離子濃度、硬度等。例如，調整液溫爲50±1°C ’氫離子濃 度爲4 . 2±0 . 2PH。藉由調節光澤劑的添加量’來適當地 調整電解液3的硬度。 -24- (22) 1298647 來自於供給室5A，經過適當調整而完成過濾的電解 液3，持續地被供給到電鑄槽1。結果，成爲電解液3隨 時從電鑄槽1的上部開口部1 A溢出的狀態。 電鑄槽1的開口部1A上方的電解液3 (從電鑄槽1 溢出的電解液3 )，形成了溢流部1 10。如後述，在本電 鑄裝置，在該溢流部1 1 0進行電鑄處理，藉此則能提高電 鑄處理的精度。在電鑄處理所使用的包含雜質的電解液3 φ ，流出到外槽部2內，被回收到管理槽5的回收室5B進 行過濾。 在電鑄槽1的下部，具備有水平校準裝置111。該水 平校準裝置1 1 1，將電鑄槽1維持成略水平，藉此，在電 鑄槽1的上部全區域形成了略水平的溢流部110，讓電解 液均勻地分布在溢流部1 1 0內的各部分。 在電鑄槽1的上方，具備有如第3 6圖所示的夾具搬 運裝置120。該夾具搬運裝置120，具備有：一對滾子121 • 、122、及繞掛於該滾子121、122的皮帶123。皮帶123 ，是沿著電鑄槽1的長軸方向（第3 6圖的左右方向）循 環。 在皮帶123的外周，是固定著複數的保持夾具130。 在各保持夾具130，安裝著母線125。母線125，是成爲電 鑄用的模具構件的線構件。在第27圖，皮帶123是朝逆 時鐘方向循環，母線125對於保持夾具13 0的安裝，是在 安裝位置X進行。 如第35圖所示，保持夾具130，是具備有：朝向與電 -25 - (23) 1298647 鑄槽1的長軸方向垂直的方向（第3 5圖的左右方向）延 伸的板狀的基部1 3 1、及在該基部1 3 1的兩端附近所安裝 的一對側板部132A、132B。側板部132A、132B，當保持 夾具1 3 0是配置在電鑄槽1的上方時，是剛好配置在電鑄 槽1的左右兩側。 在側板132A、132B，是分別可繞著軸旋轉地支承著 母線保持軸134A、134B。在母線保持軸134A、134B，是 φ 保持著母線1 25的兩端部。藉此，將母線1 25配置在電鑄 槽1上方的溢流部1 1 〇。 詳細說明的話，在母線保持軸1 34A的朝向電鑄槽1 側的端部，設置有電極136。在該電極136，固定著母線 125的其中一端。另一方面，在母線保持軸134B的朝向 電鑄槽1側的端部，設置有張力裝置137。該張力裝置 13 7，具備有：固定著母線125的端部的電極138、及彈簧 139。彈簧 139，是中介安裝在電極138與母線保持軸 φ 134B的前端部之間，在被保持於電極136與電極138之 間的母線1 2 5施加預定的張力。 如第35圖所示，在側板132A、132B，是可繞著軸部 自由旋轉地支承著旋轉軸1 4 1。旋轉軸1 4 1是藉由驅動馬 達142所旋轉驅動。在該旋轉軸141的外周，固定著齒輪 143A、143B。齒輪143A，是與在母線保持軸134A的外 周所固定的齒輪135A嚙合，齒輪143B，是與在母線保持 軸134B的外周所固定的齒輪135B嚙合。 藉此，旋轉軸14 1的旋轉會被傳達到母線保持軸 -26- (24) 1298647 13 4A、134B，在母線保持軸134A、134B所保持的母線 125，能繞著軸部旋轉。母線125的旋轉，在電鑄處理期 間，被控制成例如15rpm以下的適當的値。藉由該母線 125的旋轉，能提高在母線125周圍所附著的電極沉積物 的均勻性。 在母線保持軸134A、134B，分別固定著導電性的電 極滾子1 5 1 A、1 5 1 B。該電極滾子1 5 1 A、1 5 1 B，當將保持 φ 夾具130配置於電鑄槽1的上方時，會與跨越於內槽部1 的左右兩側的導電性的電極纜線15 2 A、15 2B接觸。電極 纜線152A、152B，都連接到程式控制電源153的負極連 接，藉此，電極滾子151A、151B也與程式控制電源153 的負極電氣性連接。 在母線保持軸134A、134B，分別具備有：將電極滾 子151A電氣性連接到電極136的導電性構件（例如電線 )、及將電極滾子151B電氣性連接到彈簧139及電極 • 1 3 8的導電性構件（例如電線）（沒有圖示）。 在母線保持軸134A、134B的各導電性構件，分別具 備有開關手段（沒有圖示），能夠藉由該開關手段，來斷 開/連接（οη/off)，導電性構件所造成的電極滾子15 1A 與電極136的電氣性連接、以及導電性構件所造成的電極 滾子1 5 1 B與彈簧1 3 9及電極1 3 8的電氣性連接。 藉由該構造，電極136、138，是與程式控制電源153 的負極電氣性連接，成爲陰極電源。該電氣性連接，是藉 由開關手段對每個保持夾具130進行啓動/關閉。也就是 -27- (25) 1298647 說，對於母線1 25的電壓施加，能夠對於每個溢流部-1 1 〇 內的一個個母線1 25進行啓動/關閉，結果，能個別地控 制對於各母線1 25的電鑄處理。 另一方面，如第3 5圖所示，在程式控制電源15 3的 正極所連接的陽極電極1 54，是配設在電鑄槽1的底部。 陽極電極1 54，例如在由鈦鋼所構成的網眼狀或開設孔部 的箱體內，收容有電鑄用的金屬顆粒（例如鎳顆粒）。 程式控制電源153，以讓在溢流部110所產生的電流 密度被保持爲適當的値（例如，3〜12A/dm2，在重視電鑄 體的真圓度的情況爲3〜4A/dm2 )的方式，將電壓施加於 陽極電極154與陰極電極136、138之間，藉此，在母線 125周圍附著電極沉積物，形成了電鑄體。 如第3 7圖所示，在電鑄裝置，具備有：夾緊裝置、 母線125的切斷加工機構、及母線125的抽取機構。第37 圖，是顯示第一實施方式的電鑄處理的順序的槪略圖。 夾緊裝置是用來在溢流部11〇內夾緊電鑄體，藉由該 夾緊裝置夾緊電鑄體，藉由切斷加工機構可切斷地加工母 線1 2 5，藉由抽取機構從電體抽取母線1 2 5。 也就是說，在本電鑄裝置’是在電鑄液3內將母線 1 2 5與電鑄體分離。藉此，藉由從電鑄液3取出母線1 2 5 及電鑄體所導致的母線1 25及電鑄體的體積變化、或藉由 在母線1 25及電鑄體所附著的藥劑的乾燥凝固’不會妨礙 母線1 2 5與電鑄體的分離，而能順暢地進行母線1 2 5的抽 取作業。 -28 - (26) 1298647 〔電鑄方法〕 接著，根據第37圖，針對本電鑄裝置 加以說明。在第37圖，是以110A〜110G 1 1 0內的不同位置。 首先，在夾具搬運位置120的安裝位 125安裝於保持夾具130。在保持夾具130 φ 125，藉由皮帶123的循環，而被搬入到溢淸 被搬入到溢流部11 〇的母線1 25，一邊 速度旋轉，一邊於溢流部110內，從110A 序移動。在陰極電極136、138與陽極電極 被施加適當的電壓，以在溢流部110產生適 。藉此，在位置 1 10A、1 10B、1 10C，在母; ，藉由電鑄方式，附著上電極沉積物161。 電極沉積物161的外徑對於母線125的 • 直徑，形成了電鑄體1 62的話，停止對該母 壓，停止該母線125的自轉。如位置1 10D 裝置（沒有圖示）夾緊電鑄體162，在母線 切斷位置125B，藉由切斷機構所進行的加 加工或沖壓加工）實施兩錐狀加工。並且， 以黑色三角箭頭顯示了藉由夾緊裝置來握持 接著，在位置110E，藉由沒有圖示的 向與切斷母線125的位置125B相反側拉伸 125，會在切斷位置125B被切斷，從電鑄體 的電鑄方法來 來表75溢流部 置X，將母線 所安裝的母線 ΐ部11 0內。 以預定的旋轉 朝向110G依 1 5 4之間，是 當的電流密度 線125的周圍 周圍到達目標 線125施加電 所示，以夾緊 125的端部的 工（例如磨削 在第3 7圖， 電鑄體1 6 2。 抽取機構，朝 |。藉此，母線 162抽出。在 -29 - (27) 1298647 位置UOF、110G，顯示了將母線125從電鑄體162抽出 的情形。 形成了同狀構件也就是電纟尋體1 6 2的話，從溢流部 1 1 〇取出，進行清洗及乾燥處理。 如上述，藉由本電鑄裝置及電鑄方法，在溢流部} J 〇 進行電鑄處理，所以在母線1 25的周圍的電流密度很穩定 ’而能得到高精度的電鑄體1 62。 修 於疋’目t夠將電纟毒處理的結果所得到的筒狀構件的外 型剖面及中空部剖面的真圓度、筒狀構件的外型與中空部 的同軸度等，顯著地提高。而能夠盡量減少筒狀構件的外 徑及中空部內徑的尺寸誤差（例如，0 . 1 # m以下）。 以電鑄裝置所得到的複數的電鑄體，是沿著溢流部 110移動而在母線125的周圍所形成，所以能以同一條件 形成複數的電鑄體，能得到一定的品質的電鑄體。 對於複數的母線1 2 5的電壓施加，能夠對每個母線 φ 125進行啓動/關閉，所以能對於每個母線125適當地進行 電鑄處理的控制，而能顯著地提高電鑄處理的精度。 母線1 2 5的保持部並沒有浸在電鑄液3，所以能減低 電解液3內的雜質的產生，而能防止保持部本身惡化。 而附著於保持構件的電解液3並沒有從電解槽1帶走 ，所以不會無謂地損失電解液3。 陰極電極136、138也沒有浸在電解液3內，而容易 進行電極的維修。從電解液1溢出的電解液3是回收到外 槽部2而經過過濾，所以能合理且低成本地進行電解液3 -30- (28) 1298647 的過濾。 電鑄體162與母線125的分離，是在電解液3內進行 ’所以能順暢地執行。 以下，針對本發明的第二實施方式的電鑄裝置，參照 第3 8圖來加以說明。在第3 8圖，是本發明的第二實施方 式的電鑄處理的構造圖。 如第38圖所示，電鑄裝置，是具備有在上部具有開 • 口部的電鑄槽1，在該電鑄槽1，充塡著電解液（電鑄液 )3。作爲電解液，例如，使用在氨基磺酸鎳液添加光澤 劑及凹點防止劑的液體。 電鑄槽1，經由供給配管4及排出配管7，而與管理 槽5連接。管理槽5，是具備有：與供給配管4連通的供 給室5A、及與排出配管7連通的回收室5B。供給室5A 與回收室5 B，是藉由液隔離板5 C所隔開。 藉由該構造，電鑄槽1內的電解液3,通過排出配管 φ 7，被回收到管理槽5的回收室5 B。被回收到回收室5 B 的包含雜質的電解液3 ’在經過過濾器9加以過濾之後’ 被送入到供給室5 A。在該供給室5 A ’電解液3 ’是適當 地調整其液溫、氫離子濃度、硬度等。例如，液溫爲45〜 H°C，氫離子濃度爲4· 〇〜4· 5Ph。 藉由調節光澤劑的添加量’來適當地調整電鑄體的硬 度。在供給室5 A內的經過適當調整且完成過濾的電解液 3，是藉由循環泵浦6，通過供給配管4 ’而被供給到電鏡 槽1，電鑄液2的供給’是被控制成’讓電鑄槽1內的電 -31 - (29) 1298647 解液3的液面3 a保持一定的水位。 在電鑄槽1的上方，具備有夾具搬運裝置120。該夾 具搬運裝置120，是將保持夾具130配設於電鑄槽1上方 ，來進行搬運的裝置，是具備有：小直徑的滾子1 21、大 直徑的滾子1 2 2、及繞掛於該滾子1 2 1、1 2 2的皮帶1 2 3。 滾子1 2 1、22，是藉由沒有圖示的驅動手段所旋轉驅動， 藉此，讓皮帶1 23朝向圖的逆時鐘方向循環。 # 複數的保持夾具130，是被固定在皮帶123的外周。 各保持夾具130，是用來保持電鑄處理的模具構件也就是 母線1 7 0。保持夾具1 3 0，是與皮帶1 2 3的循環一起，被 沿著皮帶1 2 3的外周搬運。在皮帶丨2 3的循環於滾子1 2 1 、1 2 2的下側的部分所固定的保持夾具i 3 〇，在其一部分 浸於電鑄液3內的狀態，從滾子1 21側朝向滾子122側移 動。而母線170，在滾子121附近的安裝位置X，被安裝 於保持夾具130。 Φ 皮帶123，在滾子121、122的上側，是被跨設成略水 平’另一方面，在滾子121、122的下側，在預定的位置 ，被導引滾子126、127所導引，形成了階段部124。該階 段部1 24的高度，相當於滾子1 21與122的直徑的差。藉 由夾具搬運裝置120所搬運的保持夾具130，越過該階段 部1 24時，會下降階段部丨24的高度部分。 電鑄槽1，在階段部124的前後，是被分成一次電鑄 部1A與二次電鑄部1B。在電鑄槽1，較階段部1 24更前 側（滾子1 2 1側）是一次電，鑄部1 A，階段部1 24的內側 -32- (30) 1298647 (滾子12 2側）是二次電鑄部1B。如後述，在一次電鑄 部1 A，是進行使用氣泡的一次電鑄處理，在二次電鑄部 1 B，是在以一次電鑄部1 A所形成的一次電鑄體上，進行 二次電鑄處理。 在電鑄槽1的一次電鑄部1 A下部，具備有空氣供給 裝置1 1 2。該空氣供給裝置1 1 2，在一次電鑄部1 A的電鑄 液3內，產生多數的空氣氣泡。這些空氣氣泡，在電解液 φ 3的液面3a上形成了多數的空氣氣泡層113。來自於空氣 供給裝置1 1 2的空氣供給量，可藉由沒有圖示的控制手段 所控制，藉此能調整空氣氣泡層1 13的厚度（從液面3 a 起算的高度）。 在一次電鑄處理，在該空氣氣泡層113，將一次電鑄 體的上端部調整成所需要的形狀（例如錐狀形狀）。保持 夾具1 3 0，當越過階段部1 24而被搬入到二次電鑄部1 B 內時，保持夾具130的高度會下降階段部124的高度部分 φ ，直到較一次電鑄體的上端部（在一次電鑄處理配置於空 氣氣泡層1 1 3的部分）更上側，將母線1 70浸於電解液3 內。結果，二次電鑄處理，是在一次電鑄體的外周及較一 次電鑄體的上端部更上側的母線170的外周進行。 在電鑄槽1的電鑄液3內，具備有一對陽極電極1 1 6 (在第1圖僅顯示一個）。該陽極電極116，是從一次電 鑄部1A涵蓋二次電鑄部1B而朝向保持夾具130的搬運方 向（圖的左右方向）延伸，是被配置成從兩側夾住保持夾 具1 30。各陽極電極1 1 6，例如在由鈦鋼所構成的網眼狀 -33- (31) 1298647 或閧設孔部的箱體內，收容有電鑄用的金屬顆粒（例如鎳 顆粒）。陽極電極1 1 6的箱體，是連接到程式控制電源 1 1 8的正極。 在電鑄槽1與夾具搬運裝置1 20之間，是沿著複數的 保持夾具1 30的上端部，跨設有由導電性的線構件所構成 的電極纜線1 1 7。電極纜線1 1 7 ’是連接到程式控制電源 U 8的負極。 % 接著，在第3 9圖，針對本實施方式的電鑄裝置的電 鑄方法來加以說明。在第39圖，是以110A〜110F來表示 電鑄槽1內的不同位置。位置110A〜110C，是顯示一次 電鑄部1 A內的位置，位置1 1 〇D〜1 1 0F，是顯示二次電鑄 部1 B內的位置。 在夾具搬運裝置120的搬運位置X，安裝著保持夾具 1 3 0的母線1 7 0，藉由皮帶1 2 3的循環，而被搬入電鑄槽1 的一次電鑄部1A內。該母線170，會一邊以預定的旋轉 # 速度自轉，一邊於一次電鑄部1A內，從位置110A朝向 位置1 10C依序移動。 在期間，在陽極電極1 1 6與陰極電極（上側母線固定 部14 5 )之間，會被施加適當的電壓，以讓電鑄液3內產 生適度的電流密度。藉此，在母線170的周圍，因爲電鑄 處理導致附著電極沉積物，逐漸形成一次電鑄體1 7 1。此 時，母線170，是以預定的旋轉速度（例如15rpm以下的 適當的値）繞著軸部被旋轉驅動。藉此，能提高在母線 1 70的周圍所形成的一次電鑄體1 7 1的圓周方向的均勻性 -34- (32) 1298647 如圖示，在位置110A、110B，藉由從空氣供給 1 1 2所產生的空氣氣泡，在電鑄液2的液面3上形成 氣氣泡層113。在該空氣氣泡層113，將一次電鑄體 的上端的錐狀部172調整形狀。也就是說，空氣氣 1 1 3的電流密度，是較下方的電鑄液3內的電流密度 薄，所以在空氣氣泡層1 1 3，電鑄體的附著量，相較 • 鑄液3內是相對地減少。利用這一點，形成了較一次 體171的主體側更細直徑的錐狀部172。 詳細說明的話，是藉由以致動器使母線1 70與母 容部一起上下動作，調整：一次電鑄體1 7 1的上端側 部分浸於空氣氣泡層1 1 3的時間、與浸於電鑄液3的 的比率。藉此，一次電鑄體171的越上端側，則相對 蓋較長時間，浸於空氣氣泡層1 1 3，結果，在一次電 171的上端部，形成了前端較細形狀的錐狀部172。 φ 在本實施方式，藉由使母線170上下移動，來調 狀部172的形狀，而本發明並不限定於這種方式。例 制來自於空氣供給裝置1 1 2的空氣氣泡供給量，藉由 空氣氣泡層113的高度，來調整錐狀部172的形狀也 。並且，也可以組合，將母線170上下移動、與調整 氣泡層1 1 3的高度的方式，來調整錐狀部1 7 2的形狀 如果形成了預定尺寸的一次電鑄體1 7 1的話，貝！J 對於母線170施加電壓。之後，母線170，如位置 所示，被搬運於一次電鑄部1A內，期間，在一次電 裝置 了空 17 1 泡層 更稀 於電 電鑄 線收 的各 時間 地涵 f#體 整錐 如控 變更 可以 空氣 〇 停止 1 10C 鑄體 -35- (33) 1298647 1 7 1的周圍形成氧化膜。藉由該氧化膜的形成，則能容易 進行之後所進行的一次電鑄體171與二次電鑄體173的分 離作業。爲了在一次電鑄體1 7 1的周圍有效地形成氧化膜 ，也可以將一次電鑄體17 1暫時取出到電鑄液3外。 接著，母線170，超過階段部124而下降，被搬入到 第二電鑄部1B內。在二次電鑄部1A，再於陽極電極116 與陰極電極（上側母線固定部1 45 )之間施加適當的電壓 φ 。藉此，在將母線17〇依序搬運到位置110D〜110F的期 間，在母線1 70及一次電鑄體1 7 1的周圍，逐漸形成二次 電鑄體1 7 3。所形成的二次電鑄體1 7 3，具有仿照一次電 鑄體171及母線170的中空部174，在該中空部174內具 有錐狀形狀的前端部175。 一旦形成了筒狀構件也就是二次電鑄體1 73，則從電 鑄槽1取出母線170、一次電鑄體171及二次電鑄體173 ，將母線170及一次電鑄體171從二次電鑄體173分離。 • 並且，將該二次電鑄體173清洗、乾燥，因應需要實施形 狀調整加工。 藉由如以上的本實施方式，在空氣氣泡層113形成有 一次電鑄體171的錐狀部172，在二次電鑄體173的中空 部174，形成了仿照錐狀部172的前端部175，所以能容 易且高精度地將二次電鑄體173的中空部174形成爲所需 要的形狀。於是，不需要麻煩的二次加工等，而能減少製 造成本。 空氣氣泡層1 1 3的錐狀部1 72的形狀調整，是控制母 -36- (34) 1298647 線1 7 〇的上下移動，或藉由調整空氣氣泡層1 1 3的厚度所 進行的，能簡單的構造達成。而二次電鑄體17 3，在電鑄 液3中，是從一次電鑄體17 1及母線170所抽出，所以能 順暢地進行抽取作業。 在本實施方式，在電鑄槽1具備有一次電鑄部1Α及 二次電鑄部1 Β，是進行二階段的電鑄處理，而本發明並 不限於這種方式，也可以進行三次以上的複數次（Ν次） 鲁 電鑄處理，而得到具有Ν — 1段的錐狀形狀的前端部的Ν 次電鑄體。也就是說，在電鑄槽具備有Ν次電鑄部，在前 段的電鑄部（η次電鑄部）所形成的電鑄體（η次電鑄體 )上，依序形成高次的電鑄體（η + 1次電鑄體），而得到 具有Ν — 1段的錐狀部的Ν - 1次電鑄體，在該Ν — 1次電 鑄體上，形成了具有Ν - 1段的錐狀形狀的前端部的Ν次 電鑄體也可以。例如，在電鑄槽具備有一次〜三次電鑄部 、 ，藉由在二次電鑄體上形成三次電鑄體，如第3 1圖所示 • ，得到在中空部內具有二段的錐狀形狀的前端部的噴嘴。 〔實施形態上之效果〕 藉由本發明的實施方式，其效果能提供，產業界極需 要的超精細噴嘴。 藉由本發明的實施方式，其效果爲，藉由使用內、外 徑不同的兩種種類的電鑄管，雖然前端部極細，而可漸漸 調整液量，容易排出液滴，噴嘴前端內徑爲以上且 30 # m，最好作細至20 // m程度，並且將噴嘴的厚度作爲 -37- (35) 1298647 5//m以上，容易排出液體，具有能適用於醫療或工業用 的各種機器的效果。 噴嘴內面藉由使用0 · 27 // m以下的面粗度與平滑的 電鑄管，則容易進行液體的排出。 由於前端的厚度是作成5 /Z m以上的超薄厚度’而能 減少液滴，且讓液滴不易附著殘留。 藉由本發明的實施方式，藉由在噴嘴前端的外面及內 φ 面，形成鍍金等的導電層，能讓電流流到噴嘴前端，具有 能適用於生化科技或基因方面的機器。 藉由本發明的實施方式，藉由在噴嘴的最前端部分’ 設置細直徑且厚度較薄的直線部分，其效果’第一容易形 成少量的液滴，第二容易控制排出液滴量，第三容易以針 點滴出到有深度且具有狹溝的容器。 藉由本發明的實施方式，是以電鑄方式所製造，具有 能廉價地量產的效果。 〔產業上的可利用性〕 本發明，適合用於超精細噴嘴及其製造方法’藉由將 噴嘴前端內徑作細至3 0 # m以下’且將噴嘴的厚度作薄’ 能順暢地排出液體，能適用於醫療用或工業用的多樣的機 器。 【圖式簡單說明】 第1圖是第一實施方式的超精細噴嘴的較粗電鑄管的 -38- (36) 1298647 剖面圖。 第2圖是第1圖的較粗電鑄管的外觀圖。 第3圖是第一實施方式的超精細噴嘴的較細的電鑄管 的剖面圖。 第4圖是第3圖的較細的電鑄管的外觀圖。 第5圖是將較細的電鑄管***到較粗的電鑄管予以接 合的剖面圖。 第6圖是第5圖所接合的兩個電鑄管的外觀圖。 第7圖是使第5圖的接合部分予以接著的剖面圖。 第8圖是第7圖的所接著的兩個電鑄管的外觀圖。 第9圖是第二實施方式的超精細噴嘴的較粗電鑄管的 剖面圖。 第1 0圖是第9圖的較粗電鑄管的外觀圖。 第1 1圖是第二實施方式的超精細噴嘴的較細電鑄管 的剖面圖。 第1 2圖是第1 1圖的較細電鑄管的外觀圖。 第1 3圖是將較細電鑄管***到較粗電鑄管予以接合 的剖面圖。 第14圖是在第13圖的被接合的兩個電鑄管再實施電 鑄處理的剖面圖。 第1 5圖是從第1 4圖抽出芯線的狀態的剖面圖。 第16圖是第15圖的外觀圖。 第1 7圖是第三實施方式的超精細噴嘴的較細電鑄管 的剖面圖。 -39- (37) 1298647 第1 8圖是將第1 7圖的較細電鑄管進行錐狀加工的剖 面圖。 第19圖是第18圖的外觀圖。 第20圖是從第1 9圖的電鑄管抽出芯線的狀態的剖面 圖。 第21圖是是將芯線***到第20圖的電鑄管的狀態的 剖面圖。 φ 第22圖是第21圖的外觀圖。 第23圖是在第22圖實施電鑄處理的狀態的剖面圖。 第24圖是從第23圖抽出芯線及較細電鑄管的狀態的 剖面圖。 第25圖是第24圖的外觀圖。 第26圖是在第四實施方式的芯線所形成的第一電鑄 管的剖面圖。 第27圖是在第26圖實施第二電鑄處理的狀態的剖面 φ 圖。 第28圖是從第27圖抽出芯線及第一電鑄管的狀態的 剖面圖。 第29圖是在第五實施方式的芯線所形成的第一及第 二電鑄管的剖面圖。 第30圖是在第29圖實施第三電鑄處理的狀態的剖面 圖。 第31圖是從第30圖抽出芯線及第一及第二電鑄管的 狀態的剖面圖 -40- (38) 1298647 第32圖是第六實施方式的錐狀形狀的芯線的剖面圖 〇 第3 3圖是在第3 1圖實施電鑄處理的狀態的剖面圖。 第34圖是從第33圖抽出芯線的狀態的剖面圖。 第35圖是本發明的實施方式的電鑄裝置的剖面圖。 第36圖是本發明的第一實施方式的電鑄裝置的構造 圖。 第37圖是顯示第一實施方式的電鑄處理的順序的槪 略圖。 第3 8圖，是本發明的第二實施方式的電鑄處理的構 造圈。 第3 9圖是顯示第二實施方式的電鑄處理的順序的槪 略圖。 【主要元件符號說明】 1 :電鑄槽 2 _·外槽部 3 :電解液 4 :供給配管 5 :管理槽 6 :循環泵浦 7 :排出配管 9 :過濾器 1 1 :較粗電鑄管 -41 - (39) (39)1298647 1 2 :較細電鑄管 13 :接著劑 2 1 :較粗電鑄管 22 :較細電鑄管 23 :芯線 24 :電極沉積物 31 :電鑄管 3 2 :芯線 34 :電極沉積物 41 :第一電鑄管 43 :芯線 44 :第二電鑄管 45 :第二電鑄管 46 :第三電鑄管 5 1 :芯線 54 :電鑄管 -42The second electroforming tube 45 having a tapered shape of two stages is formed into a third electroforming tube by full processing, and then the core wire 43 | and the second electroforming tube 45 are taken out, so that the nozzle can be easily and integrally formed, and The inside of the ultrafine nozzle is formed into a plurality of tapered shapes, and the droplets I can be easily discharged. [Sixth embodiment] φ The superfineness of the sixth embodiment of the present invention is referred to FIGS. 32 to 34. Explain. 32 is a tapered shape of the sixth embodiment, and FIG. 33 is a superfine nozzle of the sixth embodiment of the cross-sectional field in a state in which the electroforming process is performed in FIG. 31 and the core wire is drawn from the 33rd drawing. First, a core wire 51 having a tapered shape is formed. The structure of the core wire 5 1,^ is formed into a bilaterally symmetrical structure to form a complex number. The structure in which the shape of the 32nd figure is formed is broken. Here, the plating may be performed by gold or the like. The core wire 5 1 is provided, for example, with a tapered portion 51a in which the front end portion 5 1 b portion is 100 / / m. As shown in Fig. 3, in the electroforming process of the thickness of the electroformed tube of Fig. 3, an electroformed tube 54 is formed. When it is 20 // m, it corresponds to an electrode deposit of nickel having a front end portion of the core wire 5 1 and a diameter of 60 // m, and an electrode deposit of nickel having an outer diameter of 1 4 0 // m of the core wire 5 1 . The third electroforming is performed on the body. The first electroformed tube 41 produces a multi-stage ultra-fine interior. A cross-sectional view of a cross-sectional view of a core wire in a method of manufacturing a nozzle, as shown in FIG. 3: a shape of the 32nd figure, which is appropriately cut L, and the outer side of the core wire 5 1 is 2 0 // m, rearward The thickness of the front end portion 51a of the core wire 51 is, for example, an outer diameter of 40 // m when the thickness required, for example, 54b, for example, forming the outer rear portion such as the shape -22-(20) 1298647 is 10/m. The rear portion of the core wire 5 1 is, for example, an outer diameter 1 20 " m ο As shown in Fig. 33, in the electroformed pipe 54, a tapered portion 54a and a nozzle tip end portion 54b are formed. The electrode deposit formed by the electroforming treatment has a taper angle of 30 degrees or less, and the nickel adheres well. However, it is also possible to plate the outside with gold or the like. Further, as shown in Fig. 34, the core wire 51 is drawn in a direction opposite to the direction of the nozzle tip end portion 5413. For example, the front end of the nozzle has an outer diameter of 60 // m, an inner diameter of 20 // m, an outer diameter of the rear of the nozzle of 140 / zm, and an inner diameter of 100 / m / m. When the core wire 43 is drawn, the core wire 5 1 The plating treatment of gold or the like formed on the outside remains on the inner surface of the electrode deposit. Thereby, a plating treatment of gold or the like is performed on the inside of the nozzle. • When the thickness of the electroforming process is increased, the nozzle tip end portion 54b may be tapered to work in a substantially conical shape before the core wire 5 1 is drawn. According to the sixth embodiment, the core wire 51 having a tapered shape is formed thereon, the electroforming process is performed thereon, the electroforming tube 54 is formed, and then the core wire 5 is taken out, so that the ultrafine nozzle can be easily and integrally manufactured, and It is formed into a tapered shape which is tapered from the inside toward the front end inside the ultrafine nozzle, and has an effect that droplets can be easily discharged. [Electroforming Apparatus] -23- (21) 1298647 Next, an electroforming apparatus for performing electroforming treatment will be described with reference to Figs. 3, 36, and 37. 35 is a cross-sectional view of an electroforming apparatus according to an embodiment of the present invention, FIG. 36 is a structural view of an electroforming apparatus according to a first embodiment of the present invention, and FIG. 37 is a diagram showing electroacupuncture of the first embodiment. A sketch of the order of processing. As shown in Figs. 3 and 3, the electroforming apparatus includes an electroforming groove 1 and an outer groove portion 2 for accommodating the electroforming groove 1 inside. The φ electroforming tank 1 is a groove portion having an opening at the upper portion, and the electroforming bath 1 is filled with an electrolytic solution (electroforming solution) 3. Thereby, the electrolytic solution 3 overflowing from the electroforming tank 1 flows into the outer tank portion 2. As the electrolytic solution, for example, a liquid in which a glossing agent and a pit preventive agent are added to a nickel sulfamate solution is used. In the electroforming tank 1, the supply pipe 4 is connected. The electrolytic solution 3 from the supply chamber 5A of the management tank 5 is supplied to the electroforming tank 1 by the circulation pump 6 through the supply pipe 4'. On the other hand, the discharge pipe 7 is connected to the outer tank portion 2, and the electrolytic solution 3 in the outer groove portion 2 is recovered in the recovery chamber 5B of the management tank 5 through the discharge pipe 7. The supply chamber 5A and the recovery chamber 5B of the management tank 5 are separated by the liquid separation plate 5C, and the electrolyte 3' containing impurities recovered in the recovery chamber 5B is filtered through the filter 9, and then supplied to the supply chamber. 5 A The electrolyte solution 3 in the supply chamber 5A is appropriately adjusted in liquid temperature, hydrogen ion concentration, hardness, and the like. For example, the adjustment liquid temperature is 50 ± 1 ° C ' hydrogen ion concentration is 4. 2 ± 0. 2PH. The hardness of the electrolytic solution 3 is appropriately adjusted by adjusting the amount of addition of the brightener. -24- (22) 1298647 Electrolyte 3 from the supply chamber 5A, which has been appropriately adjusted to be filtered, is continuously supplied to the electroforming tank 1. As a result, the electrolytic solution 3 overflows from the upper opening portion 1 A of the electroforming tank 1 at any time. The electrolytic solution 3 (the electrolytic solution 3 overflowing from the electroforming tank 1) above the opening 1A of the electroforming tank 1 forms the overflow portion 110. As will be described later, in the present electroforming apparatus, electroforming is performed in the overflow portion 1 10, whereby the precision of the electroforming process can be improved. The electrolyte containing the impurities 3 φ used in the electroforming treatment flows out into the outer tank portion 2, and is recovered in the recovery chamber 5B of the management tank 5 for filtration. A horizontal alignment device 111 is provided at a lower portion of the electroforming tank 1. The horizontal aligning device 1 1 1 maintains the electroforming tank 1 at a level, whereby a slightly horizontal overflow portion 110 is formed in the entire upper portion of the electroforming tank 1 to uniformly distribute the electrolyte in the overflow portion. Parts within 1 1 0. Above the electroforming tank 1, there is provided a jig transporting device 120 as shown in Fig. 3 . The jig transport device 120 includes a pair of rollers 121, 122, and a belt 123 wound around the rollers 121 and 122. The belt 123 is circulated along the long axis direction of the electroforming groove 1 (the left and right direction of Fig. 3). On the outer circumference of the belt 123, a plurality of holding jigs 130 are fixed. A bus bar 125 is attached to each of the holding jigs 130. The bus bar 125 is a wire member that serves as a mold member for electroforming. In Fig. 27, the belt 123 is circulated in the counterclockwise direction, and the mounting of the bus bar 125 to the holding jig 130 is performed at the mounting position X. As shown in Fig. 35, the holding jig 130 is provided with a plate-like base that extends in a direction perpendicular to the long axis direction of the casting chamber 1 (the left-right direction of Fig. 5). 1 3 1 and a pair of side plate portions 132A and 132B attached to the vicinity of both ends of the base portion 136. The side plate portions 132A and 132B are disposed just on the left and right sides of the electroforming groove 1 when the holding jigs 130 are disposed above the electroforming grooves 1. In the side plates 132A and 132B, the busbar holding shafts 134A and 134B are rotatably supported around the shaft, respectively. At the busbar holding shafts 134A, 134B, φ holds both end portions of the bus bar 125. Thereby, the bus bar 1 25 is disposed in the overflow portion 1 1 上方 above the electroforming tank 1. In detail, the electrode 136 is provided at the end of the busbar holding shaft 134A facing the electroforming groove 1 side. At the electrode 136, one end of the bus bar 125 is fixed. On the other hand, a tension device 137 is provided at an end of the busbar holding shaft 134B facing the electroforming groove 1 side. The tension device 13 7 includes an electrode 138 to which an end portion of the bus bar 125 is fixed, and a spring 139. The spring 139 is interposed between the electrode 138 and the front end portion of the bus bar holding shaft φ 134B, and applies a predetermined tension to the bus bar 1 25 held between the electrode 136 and the electrode 138. As shown in Fig. 35, the side plates 132A and 132B are rotatably supported around the shaft portion by the rotating shaft 14 1 . The rotary shaft 1 4 1 is rotationally driven by the drive motor 142. Gears 143A and 143B are fixed to the outer circumference of the rotating shaft 141. The gear 143A is meshed with a gear 135A fixed to the outer periphery of the busbar holding shaft 134A, and the gear 143B is meshed with a gear 135B fixed to the outer circumference of the busbar holding shaft 134B. Thereby, the rotation of the rotary shaft 14 1 is transmitted to the busbar holding shaft -26-(24) 1298647 13 4A, 134B, and the bus bar 125 held by the busbar holding shafts 134A, 134B is rotatable around the shaft portion. The rotation of the bus bar 125 is controlled to an appropriate enthalpy of, for example, 15 rpm or less during the electroforming process. By the rotation of the bus bar 125, the uniformity of the electrode deposits attached around the bus bar 125 can be improved. Conductive electrode rollers 1 5 1 A and 1 5 1 B are fixed to the busbar holding shafts 134A and 134B, respectively. The electrode roller 1 5 1 A, 1 5 1 B, when the φ clamp 130 is placed above the electroforming groove 1, and the conductive electrode cable 15 spanning the left and right sides of the inner groove portion 1 2 A, 15 2B contact. The electrode cables 152A, 152B are both connected to the negative connection of the program control power supply 153, whereby the electrode rollers 151A, 151B are also electrically connected to the negative electrode of the program control power supply 153. The busbar holding shafts 134A and 134B are respectively provided with a conductive member (for example, an electric wire) electrically connecting the electrode roller 151A to the electrode 136, and electrically connecting the electrode roller 151B to the spring 139 and the electrode. Conductive members (such as wires) (not shown). Each of the conductive members of the busbar holding shafts 134A and 134B is provided with a switching means (not shown), and can be disconnected/connected (οη/off) by the switching means, and the electrode roller is formed by the conductive member. The electrical connection between the sub-pole 15 1A and the electrode 136 and the electrode roller 1 5 1 B caused by the conductive member are electrically connected to the spring 1 3 9 and the electrode 1 38. With this configuration, the electrodes 136, 138 are electrically connected to the cathode of the program control power source 153 to become a cathode power source. This electrical connection is to turn on/off each holding jig 130 by means of a switching means. That is, -27-(25) 1298647 says that for the voltage application of the bus bar 125, it is possible to start/turn off one of the bus bars 125 in each overflow portion -1 1 ,, and as a result, it is possible to individually control each Electroforming treatment of busbar 1 25. On the other hand, as shown in Fig. 5, the anode electrode 1 54, which is connected to the positive electrode of the program control power source 153, is disposed at the bottom of the electroforming tank 1. The anode electrode 1 54, for example, accommodates metal particles (e.g., nickel particles) for electroforming in a cell shape made of titanium steel or a hole having a hole. The program controls the power source 153 so that the current density generated in the overflow portion 110 is maintained at an appropriate level (for example, 3 to 12 A/dm 2 , and 3 to 4 A/dm 2 in the case of paying attention to the roundness of the electroformed body) In a manner, a voltage is applied between the anode electrode 154 and the cathode electrodes 136, 138, whereby electrode deposits are attached around the bus bar 125 to form an electroformed body. As shown in Fig. 3, the electroforming apparatus includes a clamping device, a cutting processing mechanism for the bus bar 125, and an extraction mechanism for the bus bar 125. Fig. 37 is a schematic diagram showing the sequence of the electroforming process of the first embodiment. The clamping device is for clamping the electroformed body in the overflow portion 11〇, and the electroforming body is clamped by the clamping device, and the bus bar 1 2 5 can be cut and cut by the cutting processing mechanism, by extracting The mechanism extracts the busbar 1 2 5 from the electric body. That is, in the present electroforming apparatus ', the bus bar 1 2 5 is separated from the electroformed body in the electroforming liquid 3. Thereby, the volume of the bus bar 125 and the electroformed body caused by the removal of the bus bar 1 2 5 and the electroformed body from the electroforming liquid 3, or the drying of the agent attached to the bus bar 15 and the electroformed body The solidification 'does not interfere with the separation of the bus bar 1 2 5 from the electroformed body, and the bus bar 1 25 can be smoothly extracted. -28 - (26) 1298647 [Electronic casting method] Next, the electroforming apparatus will be described based on Fig. 37. In Fig. 37, it is a different position within 110A~110G 1 1 0. First, the mounting position 125 at the jig transport position 120 is attached to the holding jig 130. The holding jig 130 φ 125 is carried into the bus bar 15 which is carried into the overflow portion 11 by the circulation of the belt 123, and is moved in the 110A order in the overflow portion 110 while rotating at a speed. Appropriate voltage is applied to the cathode electrodes 136, 138 and the anode electrode to produce appropriate conditions in the overflow portion 110. Thereby, the electrode deposit 161 is attached by electroforming at positions 1 10A, 1 10B, and 1 10C. When the outer diameter of the electrode deposit 161 forms the electroformed body 1 62 with respect to the diameter of the bus bar 125, the home pressure is stopped, and the rotation of the bus bar 125 is stopped. The two-cone processing is performed by clamping the electroformed body 162 at the position 1 10D device (not shown) and performing the machining or press working by the cutting mechanism at the bus bar cutting position 125B. Further, the black triangle arrow indicates that the grip is held by the clamp device. Then, at the position 110E, the film 125 is stretched toward the side opposite to the position 125B of the cut bus bar 125, which is not shown, and is turned off at the cut position 125B. The cutting is performed from the electroforming method of the electroformed body, and the overflow portion of the table 75 is set to X, and the bus bar portion 11 0 to which the bus bar is attached is placed. Between the predetermined rotation direction 110G and 1 5 4 is the current around the current density line 125 reaching the target line 125 to apply electricity to clamp the end of the 125 (for example, grinding in Figure 37) , electroformed body 1 6 2 . Extraction mechanism, toward |. Thereby, the bus bar 162 is withdrawn. At the -29 - (27) 1298647 position UOF, 110G, the case where the bus bar 125 is taken out from the electroformed body 162 is shown. When the same member is the electric oscillating body 162, it is taken out from the overflow portion 1 1 and cleaned and dried. As described above, the present electroforming device and the electroforming method are performed in the overflow portion J 〇 The electroforming process is so stable that the current density around the bus bar 125 is stable, and the electroformed body 1 62 can be obtained with high precision. The cylindrical member obtained by the result of the electric scorpion treatment is repaired. The roundness of the outer section and the hollow section, the coaxiality of the outer shape of the tubular member, and the concentricity of the hollow portion are remarkably improved, and the outer diameter of the tubular member and the inner diameter of the hollow portion can be minimized (for example, 0 . 1 # m以下). The plural obtained by electroforming device Since the cast body is formed along the overflow portion 110 and formed around the bus bar 125, it is possible to form a plurality of electroformed bodies under the same conditions, and it is possible to obtain an electroformed body of a certain quality. For a plurality of bus bars 1 2 5 With the application of voltage, each bus bar φ 125 can be turned on/off, so that the electroforming process can be appropriately controlled for each bus bar 125, and the precision of the electroforming process can be remarkably improved. The holding portion of the bus bar 1 2 5 Since it is not immersed in the electroforming liquid 3, the generation of impurities in the electrolytic solution 3 can be reduced, and the holding portion itself can be prevented from being deteriorated. The electrolytic solution 3 adhering to the holding member is not taken away from the electrolytic cell 1, so that it is not unnecessary. The electrolytic solution 3 is lost. The cathode electrodes 136 and 138 are also not immersed in the electrolytic solution 3, and the electrode can be easily repaired. The electrolytic solution 3 overflowing from the electrolytic solution 1 is recovered in the outer tank portion 2 and filtered, so that it is reasonable The filtration of the electrolytic solution 3 -30-(28) 1298647 is performed at a low cost. The separation between the electroformed body 162 and the bus bar 125 is performed in the electrolytic solution 3, so that it can be smoothly performed. Hereinafter, the second embodiment of the present invention Implementation The electroforming apparatus is described with reference to Fig. 38. Fig. 3 is a structural view of the electroforming process according to the second embodiment of the present invention. As shown in Fig. 38, the electroforming device is provided with An electroforming tank 1 having an opening and a mouth portion in the upper portion, and an electrolytic solution (electroforming solution) 3 is filled in the electroforming tank 1. As an electrolytic solution, for example, a brightening agent and a concave agent are used in a nickel sulfamate solution. A liquid for preventing the agent. The electroforming tank 1 is connected to the management tank 5 via the supply pipe 4 and the discharge pipe 7. The management tank 5 includes a supply chamber 5A that communicates with the supply pipe 4, and a discharge pipe 7 Connected recovery chamber 5B. The supply chamber 5A and the recovery chamber 5B are separated by a liquid separation plate 5 C. With this configuration, the electrolytic solution 3 in the electroforming tank 1 is recovered into the recovery chamber 5 B of the management tank 5 through the discharge pipe φ7. The electrolyte 3' containing impurities recovered in the recovery chamber 5B is sent to the supply chamber 5A after being filtered by the filter 9. In the supply chamber 5 A 'electrolyte 3 ', the liquid temperature, hydrogen ion concentration, hardness, and the like are appropriately adjusted. For example, the liquid temperature is 45 to H ° C, and the hydrogen ion concentration is 4·〇~4·5Ph. The hardness of the electroformed body is appropriately adjusted by adjusting the amount of addition of the brightener. The electrolytic solution 3 appropriately adjusted and filtered in the supply chamber 5A is supplied to the electron microscope cell 1 through the supply pipe 4' by the circulation pump 6, and the supply of the electroforming liquid 2 is controlled to 'Let the electricity level in the electroforming tank 1 -31 - (29) 1298647 The liquid level 3 a of the liquid 3 is maintained at a certain water level. A jig transport device 120 is provided above the electroforming tank 1. The jig transporting device 120 is a device that transports the holding jig 130 above the electroforming tank 1 and is provided with a small diameter roller 21, a large diameter roller 1 2 2, and a winding. The belt 1 2 3 of the roller 1 2 1 , 1 2 2 . The rollers 1 2 1 and 22 are rotationally driven by a driving means (not shown), whereby the belt 1 23 is circulated in the counterclockwise direction of the drawing. # plural holding jigs 130 are fixed to the outer circumference of the belt 123. Each of the holding jigs 130 is a mold member for maintaining the electroforming process, that is, the bus bar 170. The holding jig 1 300 is carried along the outer circumference of the belt 1 2 3 together with the circulation of the belt 1 2 3 . The holding jig 3 固定 fixed to the lower portion of the belt 丨 2 3 which is circulated on the lower side of the rollers 1 2 1 and 1 2 2 is in a state where a part thereof is immersed in the electroforming liquid 3, from the side of the roller 1 21 Moves toward the side of the roller 122. The bus bar 170 is attached to the holding jig 130 at a mounting position X near the roller 121. Φ belt 123, on the upper side of the rollers 121, 122, is spanned slightly horizontally. On the other hand, on the underside of the rollers 121, 122, at a predetermined position, guided by the rollers 126, 127 The stage portion 124 is formed. The height of the step portion 14 is equivalent to the difference between the diameters of the rollers 1 21 and 122. When the holding jig 130 conveyed by the jig transporting device 120 passes over the stage portion 14 24, the height portion of the stage portion 24 is lowered. The electroforming tank 1 is divided into a primary electroformed portion 1A and a secondary electroformed portion 1B before and after the stage portion 124. In the electroforming tank 1, the front side (roller 1 2 1 side) is the primary electric power, the casting part 1 A, and the inner side of the stage part 1 24 - 32 - (30) 1298647 (roller 12 2 side) It is the secondary electroforming part 1B. As will be described later, in the primary electroformed portion 1A, primary electroforming is performed using air bubbles, and in the secondary electroforming portion 1B, the primary electroformed portion 1B is formed on the primary electroformed body formed by the primary electroformed portion 1A. Sub-electroforming treatment. In the lower portion of the primary electroforming portion 1 A of the electroforming tank 1, an air supply device 1 1 2 is provided. In the air supply device 1 1 2, a large number of air bubbles are generated in the electroforming liquid 3 of the primary electroforming portion 1A. These air bubbles form a plurality of air bubble layers 113 on the liquid surface 3a of the electrolytic solution φ 3 . The amount of air supplied from the air supply device 1 12 can be controlled by a control means (not shown), whereby the thickness of the air bubble layer 136 (the height from the liquid surface 3 a) can be adjusted. In the primary electroforming process, the upper end portion of the primary electroformed body is adjusted to a desired shape (e.g., a tapered shape) in the air bubble layer 113. When the holding jig 1 30 is carried into the secondary electroforming portion 1 B beyond the stage portion 14 24, the height of the holding jig 130 is lowered to the height portion φ of the stage portion 124 until the upper end portion of the primary electroformed body is lowered. The bus bar 1 70 is immersed in the electrolytic solution 3 on the upper side of the portion where the air bubble layer 141 is disposed in one electroforming process. As a result, the secondary electroforming treatment is performed on the outer circumference of the primary casting of the primary electroformed body and the upper side of the upper end portion of the primary electroformed body. In the electroforming solution 3 of the electroforming tank 1, a pair of anode electrodes 1 16 (only one shown in Fig. 1) is provided. The anode electrode 116 extends from the primary electroforming portion 1A to the secondary electroforming portion 1B toward the conveyance direction of the holding jig 130 (the horizontal direction in the drawing), and is disposed so as to sandwich the holding jig 1 30 from both sides. Each of the anode electrodes 1 16 is housed with metal particles (for example, nickel particles) for electroforming, for example, in a mesh-like shape of 33- (31) 1298647 or a hole-shaped portion made of titanium steel. The anode of the anode electrode 1 16 is connected to the positive pole of the program control power source 1 18 . Between the electroforming tank 1 and the jig transporting device 120, along the upper end portions of the plurality of holding jigs 130, electrode cables 117 composed of conductive wire members are placed across. The electrode cable 1 1 7 ' is the negative terminal connected to the program control power supply U 8 . % Next, the electroforming method of the electroforming apparatus of the present embodiment will be described with reference to Fig. 39. In Fig. 39, different positions in the electroforming tank 1 are indicated by 110A to 110F. The positions 110A to 110C indicate the position in the electroforming portion 1 A at a time, and the position 1 1 〇D to 1 1 0F indicates the position in the secondary electroforming portion 1 B. At the conveyance position X of the jig transporting device 120, the bus bar 170 that holds the jig 1130 is attached, and the belt 1 2 3 is circulated, and is carried into the primary electroforming portion 1A of the electroforming tank 1. The bus bar 170 is sequentially moved from the position 110A toward the position 1 10C in the primary electroforming portion 1A while rotating at a predetermined rotation # speed. During this period, between the anode electrode 1 16 and the cathode electrode (the upper bus bar fixing portion 14 5 ), an appropriate voltage is applied to cause a moderate current density in the electroforming solution 3. Thereby, around the bus bar 170, since the electrode deposit is adhered by the electroforming process, the electroformed body 71 is gradually formed. At this time, the bus bar 170 is rotationally driven around the shaft portion at a predetermined rotational speed (e.g., an appropriate enthalpy of 15 rpm or less). Thereby, the uniformity of the circumferential direction of the primary electroformed body 171 formed around the bus bar 1 70 can be improved - 34 - (32) 1298647 As shown, at positions 110A, 110B, by supplying air from the air 1 The air bubbles generated by the air bubbles 3 are formed on the liquid level 3 of the electroforming solution 2. In the air bubble layer 113, the tapered portion 172 of the upper end of the primary electroformed body is adjusted in shape. That is to say, the current density of the air gas 1 13 is thinner than the current density in the lower electroforming liquid 3, so in the air bubble layer 1 1 3, the amount of the electroformed body adhered to the inside of the casting liquid 3 It is relatively reduced. With this, a tapered portion 172 having a smaller diameter than the main body side of the primary body 171 is formed. In detail, the bus bar 1 70 is moved up and down together with the mother container portion by an actuator, and the time during which the upper end side portion of the primary electroformed body 177 is immersed in the air bubble layer 1 1 3 is immersed in electricity. The ratio of the casting liquid 3. As a result, the upper end side of the primary electroformed body 171 is immersed in the air bubble layer 1 13 for a long time with respect to the cover, and as a result, a tapered portion 172 having a narrow tip end is formed at the upper end portion of the primary electric 171. . φ In the present embodiment, the shape of the shape portion 172 is adjusted by moving the bus bar 170 up and down, and the present invention is not limited to this embodiment. The air bubble supply amount from the air supply device 1 12 is exemplified, and the shape of the tapered portion 172 is also adjusted by the height of the air bubble layer 113. Further, in combination, the bus bar 170 may be moved up and down, and the height of the bubble layer 1 1 3 may be adjusted to adjust the shape of the tapered portion 172. If a primary electroformed body 1 7 1 having a predetermined size is formed, ! J applies a voltage to the bus bar 170. After that, the bus bar 170 is transported in the primary electroforming part 1A as shown in the position. During the period, the primary electric device is empty and the bubble layer is thinner than the electroforming wire. The change can be made by air 〇 stop 1 10C cast body -35- (33) 1298647 1 7 1 around the formation of an oxide film. By the formation of the oxide film, the separation operation of the primary electroformed body 171 and the secondary electroformed body 173 which are performed later can be easily performed. In order to effectively form an oxide film around the primary electroformed body 171, the primary electroformed body 17 1 may be temporarily taken out of the electroforming solution 3. Then, the bus bar 170 is lowered beyond the step portion 124 and carried into the second electroforming portion 1B. In the secondary electroforming portion 1A, an appropriate voltage φ is applied between the anode electrode 116 and the cathode electrode (the upper bus bar fixing portion 1 45). Thereby, during the period in which the bus bars 17 are sequentially transported to the positions 110D to 110F, the secondary electroformed body 173 is gradually formed around the bus bar 1 70 and the primary electroformed body 171. The formed secondary electroformed body 173 has a hollow portion 174 which is similar to the primary electroformed body 171 and the bus bar 170, and has a tapered front end portion 175 in the hollow portion 174. Once the cylindrical member, that is, the secondary electroformed body 173, is formed, the bus bar 170, the primary electroformed body 171, and the secondary electroformed body 173 are taken out from the electroforming tank 1, and the bus bar 170 and the primary electroformed body 171 are taken from the second. The secondary electroformed body 173 is separated. • The secondary electroformed body 173 is cleaned and dried, and shape adjustment processing is performed as needed. According to the present embodiment as described above, the tapered portion 172 of the primary electroformed body 171 is formed in the air bubble layer 113, and the front end portion 175 of the tapered portion 172 is formed in the hollow portion 174 of the secondary electroformed body 173. Therefore, the hollow portion 174 of the secondary electroformed body 173 can be formed into a desired shape easily and with high precision. Therefore, no troublesome secondary processing or the like is required, and the manufacturing cost can be reduced. The shape adjustment of the tapered portion 1 72 of the air bubble layer 1 1 3 is performed by controlling the vertical movement of the female -36- (34) 1298647 line 1 7 , or by adjusting the thickness of the air bubble layer 1 1 3 , It can be achieved with simple construction. Further, in the electroforming solution 3, the secondary electroformed body 17 is extracted from the primary electroformed body 17 1 and the bus bar 170, so that the extraction operation can be smoothly performed. In the present embodiment, the electroforming tank 1 is provided with the primary electroforming portion 1 and the secondary electroforming portion 1 , and the electroforming process is performed in two stages. However, the present invention is not limited to this embodiment, and may be performed three times or more. The plurality of times (Ν times) were subjected to electroforming, and a tantalum electroformed body having a tapered front end portion of a Ν -1 segment was obtained. In other words, the electroforming groove is provided with a defective electroforming portion, and the electroformed body (n-th electroformed body) formed in the electroforming portion (n-th electroforming portion) in the preceding stage is sequentially formed in a high order. An electroformed body (η + 1st electroformed body) to obtain a Ν - 1st electroformed body having a tapered portion of Ν -1 segment, on which the Ν - 1 electroformed body is formed with Ν - 1 The tantalum electroformed body of the tip end portion of the tapered shape of the segment may be used. For example, in the electroforming tank, there are one to three electroforming portions, and by forming three electroformed bodies on the secondary electroformed body, as shown in FIG. 3, a tapered portion having two stages in the hollow portion is obtained. The nozzle at the front end of the shape. [Effects of the Invention] According to the embodiment of the present invention, the effect can provide an ultrafine nozzle which is extremely required in the industry. According to the embodiment of the present invention, the effect is that by using two types of electroformed tubes having different inner and outer diameters, the tip end portion is extremely thin, and the amount of liquid can be gradually adjusted, and the liquid droplets are easily discharged, and the inner diameter of the nozzle tip is The above and 30 # m, preferably as small as 20 // m, and the thickness of the nozzle is -37-(35) 1298647 5//m or more, which is easy to discharge liquid, and has various properties suitable for medical or industrial use. The effect of the machine. The inner surface of the nozzle is easily discharged by using a surface roughness of 0 · 27 // m or less and a smooth electroformed tube. Since the thickness of the tip is made to be an ultrathin thickness of 5 / Z m or more, the droplets can be reduced, and the droplets are less likely to adhere. According to the embodiment of the present invention, a conductive layer such as gold plating is formed on the outer surface of the nozzle tip and the inner φ surface, so that current can flow to the tip end of the nozzle, and the device can be applied to biochemical technology or genetics. According to the embodiment of the present invention, by providing a straight portion having a thin diameter and a thin thickness at the foremost end portion of the nozzle, the effect is 'first easy to form a small amount of droplets, and secondly, it is easy to control the amount of discharged droplets, third It is easy to drop by needle to a container with a deep and narrow groove. According to the embodiment of the present invention, it is produced by electroforming, and has an effect of being mass-produced at low cost. [Industrial Applicability] The present invention is suitable for use in an ultrafine nozzle and a method for producing the same, which can be smoothly discharged by making the inner diameter of the tip end of the nozzle fine to 3 0 #m or less and making the thickness of the nozzle thin. Liquid, suitable for a wide range of machines for medical or industrial use. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view of -38-(36) 1298647 of a relatively thick electroformed tube of the ultrafine nozzle of the first embodiment. Fig. 2 is an external view of the thicker electroformed tube of Fig. 1. Fig. 3 is a cross-sectional view showing a thin electroformed tube of the ultrafine nozzle of the first embodiment. Fig. 4 is an external view of the thinner electroformed tube of Fig. 3. Figure 5 is a cross-sectional view showing the insertion of a thinner electroformed tube into a thicker electroformed tube. Fig. 6 is an external view of two electroformed tubes joined in Fig. 5. Fig. 7 is a cross-sectional view showing the joint portion of Fig. 5 continued. Fig. 8 is an external view of the next two electroformed tubes of Fig. 7. Fig. 9 is a cross-sectional view showing a relatively thick electroformed tube of the ultrafine nozzle of the second embodiment. Figure 10 is an external view of the coarser electroformed tube of Figure 9. Fig. 1 is a cross-sectional view showing a fine electroformed tube of the ultrafine nozzle of the second embodiment. Fig. 1 is an external view of the finer electroformed tube of Fig. 11. Figure 13 is a cross-sectional view showing the joining of a finer electroformed tube into a thicker electroformed tube. Figure 14 is a cross-sectional view showing the electroforming process of the two electroformed tubes joined in Fig. 13 . Fig. 15 is a cross-sectional view showing a state in which the core wire is taken out from Fig. 14. Fig. 16 is an external view of Fig. 15. Fig. 17 is a cross-sectional view showing a fine electroformed tube of the ultrafine nozzle of the third embodiment. -39- (37) 1298647 Fig. 18 is a cross-sectional view showing the taper processing of the fine electroformed tube of Fig. 17. Fig. 19 is an external view of Fig. 18. Fig. 20 is a cross-sectional view showing a state in which a core wire is taken out from the electroforming tube of Fig. 19. Fig. 21 is a cross-sectional view showing a state in which a core wire is inserted into the electroforming tube of Fig. 20. φ Fig. 22 is an external view of Fig. 21. Fig. 23 is a cross-sectional view showing a state in which the electroforming process is carried out in Fig. 22. Fig. 24 is a cross-sectional view showing a state in which a core wire and a fine electroformed pipe are taken out from Fig. 23. Fig. 25 is an external view of Fig. 24. Fig. 26 is a cross-sectional view showing the first electroformed tube formed by the core wire of the fourth embodiment. Fig. 27 is a cross-sectional view φ showing a state in which the second electroforming process is carried out in Fig. 26. Fig. 28 is a cross-sectional view showing a state in which the core wire and the first electroformed pipe are taken out from Fig. 27. Fig. 29 is a cross-sectional view showing the first and second electroformed tubes formed in the core wire of the fifth embodiment. Fig. 30 is a cross-sectional view showing a state in which the third electroforming process is carried out in Fig. 29. Figure 31 is a cross-sectional view showing a state in which the core wire and the first and second electroforming tubes are taken out from Fig. 30 - 40 - (38) 1298647. Figure 32 is a cross-sectional view of the tapered core wire of the sixth embodiment. 3 is a cross-sectional view showing a state in which electroforming treatment is performed in Fig. 31. Fig. 34 is a cross-sectional view showing a state in which the core wire is taken out from Fig. 33. Figure 35 is a cross-sectional view showing an electroforming apparatus according to an embodiment of the present invention. Figure 36 is a configuration diagram of an electroforming apparatus according to a first embodiment of the present invention. Fig. 37 is a schematic view showing the sequence of the electroforming process of the first embodiment. Fig. 3 is a configuration of the electroforming process of the second embodiment of the present invention. Fig. 39 is a schematic view showing the sequence of the electroforming process of the second embodiment. [Explanation of main component symbols] 1 : Electroforming tank 2 _· Outer groove part 3 : Electrolyte solution 4 : Supply piping 5 : Management tank 6 : Circulating pump 7 : Discharge piping 9 : Filter 1 1 : Coarse electroforming tube -41 - (39) (39)1298647 1 2 : Finer electroformed pipe 13 : Adhesive 2 1 : Coarse electroformed pipe 22 : Finer electroformed pipe 23 : Core wire 24 : Electrode deposit 31 : Electroformed pipe 3 2 : core wire 34 : electrode deposit 41 : first electroforming pipe 43 : core wire 44 : second electroforming pipe 45 : second electroforming pipe 46 : third electroforming pipe 5 1 : core wire 54 : electroforming pipe - 42