TWI294645B - - Google Patents

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Publication number
TWI294645B
TWI294645B TW91114851A TW91114851A TWI294645B TW I294645 B TWI294645 B TW I294645B TW 91114851 A TW91114851 A TW 91114851A TW 91114851 A TW91114851 A TW 91114851A TW I294645 B TWI294645 B TW I294645B
Authority
TW
Taiwan
Prior art keywords
layer
trench
active region
avoiding
substrate
Prior art date
Application number
TW91114851A
Other languages
English (en)
Chinese (zh)
Inventor
Li-Wen Jang
Hung Cheng Sung
Der Shin Shyu
Han-Ping Chen
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW91114851A priority Critical patent/TWI294645B/zh
Application granted granted Critical
Publication of TWI294645B publication Critical patent/TWI294645B/zh

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  • Element Separation (AREA)
  • Semiconductor Memories (AREA)
TW91114851A 2002-07-04 2002-07-04 TWI294645B (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW91114851A TWI294645B (ja) 2002-07-04 2002-07-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW91114851A TWI294645B (ja) 2002-07-04 2002-07-04

Publications (1)

Publication Number Publication Date
TWI294645B true TWI294645B (ja) 2008-03-11

Family

ID=45068212

Family Applications (1)

Application Number Title Priority Date Filing Date
TW91114851A TWI294645B (ja) 2002-07-04 2002-07-04

Country Status (1)

Country Link
TW (1) TWI294645B (ja)

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