1293665 t 九、發明說明： 【發明所屬之技術領域】 • 本發明係關於磁鐵型無桿壓缸，詳細為關於活塞位置檢 測裝置，其係檢測在磁鐵型無桿壓缸之壓缸管（cyHnder tube)内往復運動之活塞位置者。 【先前技術】 具備於壓缸管内可移動地配置之活塞，及於壓缸管外部 可沿壓缸管移動地配置之滑件，將該等活塞與滑件磁性結 • 合之磁鐵型無桿壓缸已為周知。 磁鐵型無桿壓缸中，通常於活塞配置磁鐵（内側磁鐵）， 於滑件配置磁鐵（外側磁鐵）或磁性體，藉由該等之吸力使得 活塞與滑件一體地連結，使得滑件跟隨活塞之動作而移動。 通常作為磁鐵型無桿壓缸之活塞位置檢測裝置，於滑件 或活塞配置感測磁鐵，以設置於外部之感測開關來檢測該 感測磁鐵，藉此檢測活塞位置者已為周知。 違種活塞位置檢測裝置之例，已知有以下之文獻A〜e所 揭示者。 文獻A 特公平7-1 1283號公報 文獻B 專利第2568000號公報 文獻C 特開平8-13561 1號公報 文獻D 特開平11-93910號公報 文獻E 特開平11-93909號公報 以下對於各文獻簡單說明。 文獻A與B之磁鐵型無桿壓缸係具備以下構造，為防止設 106856-960430.doc I293665 $在跟隨體（滑件）側之磁性耦合用外側磁鐵之磁力洩漏至 ^件外側，配置與跟隨體為一體移動之磁場遮蔽體，於該 磁場遮蔽體設置開口（磁通量洩漏口）。 " 此外，於壓缸管外側以通過跟隨體外側之方式，沿軸線 方向叹置女裝執道，於該安裝執道安裝位置檢測器。 曰文獻A與B之磁鐵型無桿壓缸中，跟隨體移動而使得磁通 ㈣漏π與位置檢測器之位置—致時，位置檢測器將感應 來自磁通量洩漏口所洩漏之磁通量，檢測活塞之位置。 文獻C之磁鐵型無桿壓缸申，設置在壓缸管兩端之端蓋， 藉由配置於壓缸管外側之連結板而相互連結。 此外，移動子（滑件）成為包圍壓缸管外側之形狀，上述 連結板配置在較移動子為外側。於移動子外周部設置與上 述連結板滑接之滑動構件，藉由滑動構件與連結板之滑動 而防止移動子之旋轉。 此外，於移動子外周除滑動板以外，設置遮蔽移動子與 活塞之磁性耦合用磁鐵之磁通量之磁性遮蔽板。進一步於 滑動板上之自移動子之耦合用磁鐵遠離軸線方向之位置配 置感測用磁鐵，於連結板上之適當位置配置位置檢測感測 器。 藉此，文獻c之磁鐵型無桿壓缸中，不受磁性耦合用磁鐵 之影響，以位置檢測感測器可正確地測出感測用磁鐵位置 (亦即活塞位置）。 文獻D之磁鐵型無桿壓缸中，連結端套間之安裝執道沿壓 缸官軸線而設置在較滑件為外側。活塞位置檢測用之感測 106856-960430.doc 1293665 l 開關配置在上述安裝軌道上之不檢測滑件與活塞間磁性輕 合用磁鐵之磁力之位置。 - 此外’雖於滑件上之上述感測開關與耦合用磁鐵間之適 §位置配置感測磁鐵，惟該感測磁鐵之磁極配置，係以形 成感測磁鐵之磁場藉由耦合磁鐵之磁場而增強之互斥電路 般地配置。1293665 t IX. Description of the Invention: [Technical Field] The present invention relates to a magnet type rodless cylinder, and more particularly to a piston position detecting device which detects a cylinder tube of a magnet type rodless cylinder (cyHnder) Tube) The position of the piston in the reciprocating motion. [Prior Art] A piston that is movably disposed in a cylinder tube, and a slider that is movably disposed along the cylinder tube outside the cylinder tube, and a magnet-type rod that is magnetically coupled to the piston and the slider Pressure cylinders are well known. In the magnet type rodless cylinder, a magnet (inner magnet) is usually disposed in the piston, and a magnet (outer magnet) or a magnetic body is disposed in the slider, and the piston and the slider are integrally coupled by the suction force, so that the slider follows The action of the piston moves. Generally, as a piston position detecting device for a magnet type rodless cylinder, a sensing magnet is disposed on a slider or a piston, and the sensing magnet is detected by an external sensing switch, whereby the position of the piston is known. Examples of the discriminating piston position detecting device are known from the following documents A to e. PCT Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Description. The magnet type rodless cylinders of documents A and B have the following structure, in order to prevent the magnetic force of the outer magnet of the magnetic coupling on the side of the following body (slider) from leaking to the outside of the piece, the arrangement and The following body is a magnetic field shielding body that moves integrally, and an opening (magnetic flux leakage port) is provided in the magnetic field shielding body. " In addition, on the outside of the cylinder tube, by means of following the outside of the body, the woman's obstruction is slanted along the axis, and the position detector is installed in the installation. In the magnet type rodless cylinders of documents A and B, when the following body moves so that the magnetic flux (four) leaks π and the position of the position detector, the position detector will sense the magnetic flux leaking from the magnetic flux leakage port, and the detecting piston The location. In the magnet type rodless cylinder of Document C, the end caps provided at both ends of the cylinder tube are connected to each other by a coupling plate disposed outside the cylinder tube. Further, the moving member (slider) has a shape surrounding the outside of the cylinder tube, and the above-mentioned connecting plate is disposed outside the moving member. A sliding member that is slidably coupled to the connecting plate is provided on the outer peripheral portion of the moving member, and the sliding of the sliding member prevents the movement of the moving member. Further, a magnetic shielding plate that shields the magnetic flux of the magnetic coupling magnet of the moving member and the piston is provided in addition to the sliding plate on the outer periphery of the moving sub-periphery. Further, the sensing magnet is disposed at a position away from the axial direction of the coupling magnet of the moving plate on the sliding plate, and the position detecting sensor is disposed at an appropriate position on the connecting plate. Therefore, in the magnet type rodless cylinder of the document c, the position detecting sensor can accurately detect the position of the sensing magnet (i.e., the piston position) without being affected by the magnet for magnetic coupling. In the magnet type rodless cylinder of Document D, the mounting lane of the joint end sleeve is disposed outside the lower slider along the official axis of the cylinder. Sensing for piston position detection 106856-960430.doc 1293665 l The switch is placed on the mounting rail and does not detect the magnetic force of the magnetic coupling magnet between the slider and the piston. - In addition, although the sensing magnet is disposed at a suitable position between the sensing switch and the coupling magnet on the slider, the magnetic pole of the sensing magnet is configured to form a magnetic field of the sensing magnet by a magnetic field of the coupling magnet The enhanced mutual exclusion circuit is configured like this.
因藉由以上述感測磁鐵之磁極配置所形成之互斥電路而 增強感測磁鐵之磁力，故感測開關中不受磁性耦合用磁鐵 之磁力之影響，可確實檢測感測磁鐵之磁力。 文獻E之磁鐵型無桿壓缸中，與文獻D同樣地於連結端套 間之安裝執道上設置位置檢測感測器。此外，於活塞端部 设置與耦合用磁鐵不同之環狀感測用磁鐵。 於移動子（滑件）設置遮蔽板，其係覆蓋活塞與移動子雙 方之耦合磁鐵，不使磁通量洩漏至外部者。 因遮蔽板成為雖覆蓋耦合磁鐵，但不覆蓋感測用磁鐵之 長度，故位置檢測感測器可不受耦合磁鐵之磁力影響，僅 檢測感測用磁鐵之磁力。 上述文獻A與B之磁鐵型無桿壓紅中，不另外設置感測月 磁鐵’猎由檢測麵合用磁鐵之浪漏磁通量而檢測活塞位置 惟搞合用磁鐵之磁力因原本在滑件與活塞間以產生最6 磁性吸力之方式而設定’故不-定適合位置檢測器之, 作。此外，文獻之磁鐵型無桿壓紅中，來自磁通量# 漏口之汽漏磁力因磁場遮蔽板之製作、安袈誤差等而餐 化’故具有位置檢測器無法進行安定檢測之情形。 106856-960430.doc 1293665 t 並且I禺合用磁鐵係成為將個別之複數甜甜圈圓板上之磁 鐵’夾持軛而在軸線方向層疊之構造。因此，個別磁鐵之 磁力具有在半徑方向作用較強，但在軸線方向較弱之傾向。 因此’例如振簣開關等有接點開關，在由接點（重複部分） 於軸線方向遠離特定距離之位置具有檢測磁力之必要時， 由輕合磁鐵在軸線方向遠離之位置之磁力將成為不充分， 具有位置檢測之安定性或信賴度降低之情形。 此外，文獻C之磁鐵型無桿壓缸中，具有在較移動子之磁 性遮蔽板為軸線方向外側，配置感測用磁鐵之必要。並且 作為感測用磁鐵，必須有可產生充分磁力之較為大型者， 故亦增加上述配置上之限制，具有難以進行移動子或磁鐵 型無桿壓缸全體小型化之問題。 另一方面，文獻D之磁鐵型無桿壓缸中，藉由使得感測磁 鐵之磁極排列，以形成與感測磁鐵之磁場藉由耦合磁鐵之 磁場而增加之互斥電路之方式配置，故不設置遮蔽板，可 以位置檢測感測器而確實檢測活塞位置。 惟文獻D之磁鐵型無桿壓缸中，因使得感測磁鐵之磁力變 強，反而具有位置檢測精度容易受到周圍環境影響之問題。 例如靠近感測磁鐵之移動軌跡而存在有磁性體時，感測 磁鐵之磁場將被該磁性體所影響，產生位置檢測感測器之 檢測精度不安定之問題。 此外’文獻E之磁鐵型無桿壓缸中，感測用磁鐵因具有設 置於遮蔽板之軸線方向外側之必要，故與文獻c之开^ # 同，產生難以進行磁鐵型無桿壓缸全體小型化之問題。此 106856-960430.doc 1293665 t 產生感測用 =2文獻E之裝置中與文獻〇之情形相同 _之磁場容易受到周圍環境影響之問題。 【發明内容】 ^過去技術之問題點，本發明之目的在於提供一Since the magnetic force of the sensing magnet is enhanced by the mutual exclusion circuit formed by the magnetic pole arrangement of the sensing magnet described above, the sensing switch is not affected by the magnetic force of the magnetic coupling magnet, and the magnetic force of the sensing magnet can be surely detected. In the magnet type rodless cylinder of Document E, a position detecting sensor is provided on the mounting path of the connecting end sleeve as in Document D. Further, a ring-shaped sensing magnet different from the coupling magnet is provided at the end of the piston. A shielding plate is disposed on the moving member (slider), which covers the coupling magnets of both the piston and the moving sub-member, so that the magnetic flux is not leaked to the outside. Since the shielding plate covers the coupling magnet but does not cover the length of the sensing magnet, the position detecting sensor can detect the magnetic force of the sensing magnet without being affected by the magnetic force of the coupling magnet. In the magnet-type rodless red of the above documents A and B, there is no additional sensing moon magnet 'hunting the leakage magnetic flux of the magnet for detecting the surface to detect the piston position, but the magnetic force of the combined magnet is originally between the sliding member and the piston In the way of generating the most magnetic attraction, it is set to 'do not fix the position detector. Further, in the magnet type rodless press red of the literature, the magnetic flux leakage from the magnetic flux # leak is caused by the production of the magnetic field shielding plate, the ampoule error, etc., so that the position detector cannot perform the stability test. 106856-960430.doc 1293665 t The magnet for the I-coupling is a structure in which the magnets on the individual doughnut plates are sandwiched by yokes and stacked in the axial direction. Therefore, the magnetic force of the individual magnets tends to act strongly in the radial direction, but tends to be weak in the axial direction. Therefore, for example, a vibrating switch or the like has a contact switch, and when the contact point (repetitive portion) has a position to detect a magnetic force at a position away from the specific distance in the axial direction, the magnetic force at a position away from the axial direction by the light-weighted magnet will become no. Sufficient, with the stability of position detection or the reduction of reliability. Further, in the magnet type rodless cylinder of the document C, it is necessary to arrange the magnet for sensing in the outer side in the axial direction of the magnetic shielding plate of the moving body. Further, as the magnet for sensing, it is necessary to have a large magnetic force which can generate a sufficient magnetic force. Therefore, the above-described arrangement is also limited, and it is difficult to reduce the size of the moving rod or the magnetless rodless cylinder. On the other hand, in the magnet type rodless cylinder of Document D, by arranging the magnetic poles of the sensing magnet to form a mutually exclusive circuit which is increased by the magnetic field of the coupling magnet by the magnetic field of the sensing magnet, Without the shielding plate, the sensor can be detected at the position and the piston position can be detected. However, in the magnet type rodless cylinder of the document D, since the magnetic force of the sensing magnet is made stronger, the position detection accuracy is easily affected by the surrounding environment. For example, when a magnetic body is present near the moving track of the sensing magnet, the magnetic field of the sensing magnet is affected by the magnetic body, causing a problem that the detection accuracy of the position detecting sensor is unstable. In addition, in the magnet type rodless cylinder of the document E, since the magnet for sensing has the necessity of being disposed outside the axial direction of the shielding plate, it is difficult to carry out the magnet-type rodless cylinder as the opening of the document c. The problem of miniaturization. This 106856-960430.doc 1293665 t produces the same problem as the document = in the device of the document E = _ The magnetic field is susceptible to the surrounding environment. SUMMARY OF THE INVENTION The problem of the prior art is that the object of the present invention is to provide a
種磁鐵型盔捍饜缸夕、、去金仏w ^ U 主…缸之活塞位置檢測裝置，其 壓缸之緊緻化，日 旦 八’、妨礙…、才干 塑_/ 易受到周圍鐵製構件等磁性體之影 響’可進行信賴度較高之活塞位置檢測者。 〜A type of magnet-type helmet 捍餍 夕 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The influence of the magnetic body such as the member can be used as a piston position detector with high reliability. ~
徵在於：於前述滑件側面設置遮蔽板，其係遮蔽來自前述 滑件之磁力者；於該遮蔽板外側設置感測磁鐵，其係在前 述壓缸管之軸線方向磁化者，並且於前述滑件之外部，在 無=上述目的，依據請求項1之發明係提供-種磁鐵型 塞位置檢测裝置，該磁鐵型無桿昼缸係包 壓缸官，其係由非磁性體所構成者；活塞，其係於該 壓缸管内以在壓叙管軸線方向可移動地配置者；滑件，盆 係沿前述壓缸f外周面以在壓缸管軸線方向可移動地配置 之由非磁性體所構成者；内側磁鐵，其係配置於前述活塞 者；及外側磁鐵或磁性體’其係配置於前述滑件，在與前 述内側磁鐵之間產生磁性吸力者；該磁鐵型無桿壓缸係藉 由前述磁性吸力使得前述滑件跟隨前述活塞之移動，其^ 雨述滑件位於特定位置時與前述感測磁鐵相對之位置，設 置位置k測感測器，其係感測前述感測磁鐵之磁性者。 此外，依據請求項2之發明係提供一種如請求項1之磁鐵 型無桿壓缸之活塞位置檢測裝置，其中於滑件側面之壓缸 管軸線方向中央部，設置前述遮蔽板與感測磁鐵。 106856-960430.doc -10· 1293665 k. 此外，依據請求項3之發明係提供一種如請求項丨或^之磁 =型無桿壓缸之活塞位置檢測裝置，丨中在前述滑件位於 别述特定位置時與前述位置檢_測器相對之滑件側面形 成凹部，於前述凹部酉己置遮蔽板與感測磁鐵。 此外，依據請求項4之發明係提供一種如請求項丨至3中任 —項之磁鐵型無桿壓缸之活塞位置檢測裝置，丨中使得壓 缸官之剖面外形形成為扁平長圓形，使得滑件之剖面外形 形成為大致矩形。The utility model is characterized in that: a shielding plate is disposed on a side of the sliding member for shielding a magnetic force from the sliding member; and a sensing magnet is disposed outside the shielding plate, which is magnetized in an axial direction of the pressure cylinder tube, and is slidable In addition to the above object, according to the invention of claim 1, there is provided a magnet plug position detecting device which is composed of a non-magnetic body. a piston that is movably disposed in the cylinder tube in the direction of the axis of the cylinder; the sliding member, the basin is movably disposed along the outer circumferential surface of the cylinder f in the axial direction of the cylinder tube, and is non-magnetic a body member; an inner magnet disposed on the piston; and an outer magnet or a magnetic body disposed on the slider and generating magnetic attraction between the inner magnet and the inner magnet; the magnet type rodless cylinder By the magnetic attraction force, the sliding member follows the movement of the piston, and the position of the slider relative to the sensing magnet when the slider is at a specific position is set, and the position sensing sensor is sensed, and the sensing is sensed. magnetic The magnetic of iron. Further, the invention according to claim 2 provides the piston position detecting device of the magnet type rodless cylinder of claim 1, wherein the shielding plate and the sensing magnet are disposed at a central portion of the side of the cylinder tube in the axial direction of the slider . Further, according to the invention of claim 3, there is provided a piston position detecting device of a magnetic type-type rodless cylinder as claimed in the item 丨 or ^, in which the aforementioned sliding member is located When the specific position is described, a concave portion is formed on the side surface of the slider opposite to the position detector, and the shielding plate and the sensing magnet are placed on the concave portion. Further, according to the invention of claim 4, there is provided a piston position detecting device for a magnet type rodless cylinder as claimed in any one of the items 1-3, wherein the profile of the cylinder is formed into a flat oblong shape. The cross-sectional shape of the slider is formed to be substantially rectangular.
亦即，請求項1之發明中，藉由於滑件側面設置遮蔽板， 於該遮蔽板外側設置在軸線方向磁化之感測磁鐵，不改變 滑件長度而不受到滑件之外側磁鐵或周圍磁性體之影響， 可產生安定之磁路，故藉由位置檢測感測器可確實檢測活 塞位置。因此’依據本發明，可一面維持無桿壓缸全體之 緊緻化並一面進行正確且信賴度較高之活塞位置檢測。 此外’請求項2之發明中，容易進行對於感測磁鐵之位置 仏測感測器之調整，容易進行磁鐵型無桿壓缸之設置。 再者’請求項3之發明中，因感測磁鐵不由滑件突出，故 可減小磁鐵型無桿壓缸之設置空間。 請求項4之發明中，藉由使得滑件成為矩形剖面，可得到 更為安定之滑件移動。 【實施方式】 以下基於圖式說明本發明之實施形態。 圖1為表示磁鐵型無桿壓缸之平面圖，圖2、3分別為其左 側面圖與正面圖。 106856-960430.doc 1293665 磁鐵型無桿壓缸（以下稱為「無桿壓紅」W具備在端套2、 2之對向面間配置之由非磁性材料所構成之壓缸管3。 於壓缸管3外周，橫剖面外形為矩形之滑件4,可滑動地 外裝於壓缸管3之軸線方向。 此外，於端套2、2之對向面間除壓缸管3外，與壓缸管3 平行地設置感測器執道5。 &In other words, in the invention of claim 1, the shielding magnet is magnetized in the axial direction outside the shielding plate by the shielding plate on the side of the sliding member, and the length of the sliding member is not changed without being affected by the magnet or the surrounding magnetic body of the outer side of the sliding member. The influence of the body can produce a stable magnetic circuit, so the position of the piston can be reliably detected by the position detecting sensor. Therefore, according to the present invention, it is possible to perform the piston position detection which is correct and highly reliable while maintaining the compactness of the entire rodless cylinder. Further, in the invention of claim 2, it is easy to adjust the position of the sensing magnet to the sensor, and it is easy to set the magnet type rodless cylinder. Further, in the invention of claim 3, since the sensing magnet is not protruded by the slider, the installation space of the magnet type rodless cylinder can be reduced. In the invention of claim 4, by making the slider a rectangular cross section, a more stable slider movement can be obtained. [Embodiment] Hereinafter, embodiments of the present invention will be described based on the drawings. Fig. 1 is a plan view showing a magnet type rodless cylinder, and Figs. 2 and 3 are respectively a left side view and a front side view. 106856-960430.doc 1293665 A magnet type rodless cylinder (hereinafter referred to as "rodless red" W has a cylinder tube 3 made of a non-magnetic material disposed between the opposing faces of the end sleeves 2, 2. The outer circumference of the cylinder tube 3 has a rectangular cross-sectional shape and is slidably externally mounted in the axial direction of the cylinder tube 3. Further, in addition to the pressure cylinder tube 3 between the opposing faces of the end sleeves 2, 2, The sensor is placed in parallel with the cylinder tube 3. 5 &
壓缸管3係外形成為扁平長圓形，藉由 4,滑件4不旋轉地直接以水平姿勢往軸方向導件 平行配置橫剖面為 此外，於壓缸管3内部，如圖4所示 真圓之一對壓缸孔6、6。 活塞7係可在壓缸管3之軸線方向移動地收納於各壓缸孔 6内，藉由各活塞7，各壓缸孔6被劃分為壓缸室8、8。 於各端套2，形成供給排出口 9，及流路1〇，其係由供給 排出口 9連通至分別對應側之兩壓缸室88者。 藉由將壓縮空氣由左右之供給排出口 9、9，經由流路1〇 供給至壓缸室8之一方，活塞7、7在各壓缸孔6内互相同步 移動。 各活塞7成為於中央之活塞軸u，交互嵌入甜甜圈狀之複 數内側磁鐵12，及同樣甜甜圈狀之輛13，藉由活塞端14旋 緊固定兩端之構造。 各内側磁鐵12之磁極在軸線方向，以ns、SN、NS、SN 之同極彼此對應之方式配置，在鄰接之活塞7、7間，成為 内側磁鐵12之同極彼此對應。 於滑件4之壓缸管3貫通部，嵌裝甜甜狀之外側磁鐵。亦 106856-960430.doc -12- 1293665 « · 即，於滑件4内，包圍壓缸管3周圍之長圓形且甜甜圈狀之 複數外側磁鐵15，與相同形狀之複數軛16交互在軸線方向 ， 層豐’透過配置於兩端之外部耐磨體17以端板1 8固定，藉 ， 此使得外側磁鐵1 5安裝於壓缸管3貫通部。 外側磁鐵1 5之磁極，以成為在軸線方向係同極彼此對 向，且與活塞7側之内側磁鐵12之磁極為異極彼此之方式， 配置為SN、NS、SN、NS。因此，藉由兩磁鐵彼此之磁性 吸力使得兩活塞7、7與滑件4磁性結合。 • 此外，於滑件4下方之兩側面，分別形成較上方部分為往 裡側（中心側）後退之凹部19。 在兩個凹部19中與感測器執道5相對側之凹部19以及感 測為執道5，設置其全體以20表示之活塞位置檢測裝置。 該活塞位置檢測裝置20之構造包含··安裝於滑件4側面之 鐵製遮蔽板21、安裝於遮蔽板21外表面之四角塊狀感測磁 鐵22、及设置於感測器軌道5並感測磁性之位置檢測感測器 23 ° ® 遮蔽板21配置於滑件4側面上之壓缸管3軸線方向中央 部。遮蔽板21成為覆蓋凹部19與形成在凹部19上方部分之 傾斜面24的曲折之平板形狀。感測磁鐵22在凹部19部分之 遮蔽板2 1中央’藉由於遮蔽板2 1螺合之平面反〔字狀磁鐵 支持體25而固定。 感測磁鐵22在圖1、3中，以左側成為N極、右側成為S極 之方式水平固定。 另一方面’位置檢測感測器2 3係配置於以下位置，感測 106856-960430.doc -13- 1293665 器軌道5之，在與滑件4側為相反側橫跨長邊方向延伸設置 之收納溝26内之，滑件4在特定位置時之感測磁鐵22為相對 , 之位置。 • 如同以上所構成之無桿壓缸1中，由左右之端套2、2之供 給排出口 9、9交互供給壓縮空氣時，活塞7、7在壓缸管3 内之各壓缸孔6内同步而往復運動。 藉由該活塞7、7之移動，以内側磁鐵12與外側磁鐵15之 磁性結合而與活塞7、7—體地連結之滑件4將跟隨，沿壓缸 I 管3往復運動。 活塞位置檢測裝置20中，藉由滑件4之往復運動，感測磁 鐵22到達與位置檢測感測器23相對之位置時，位置檢測感 測益23感測到感測磁鐵22之磁性而可測出活塞7(滑件4)到 達特定位置。在此，因於感測磁鐵22之滑件4側設置遮蔽板 21，故可防止滑件4之外侧磁鐵15之磁力漏出至位置檢測感 測裔23側。此外，遮蔽板2丨因對於感測磁鐵22係作為軛之 功能，故即使周圍具有鐵製構件等磁性體，感測磁鐵之磁 場亦不易受到影響，可使得感測磁鐵22之磁路安定。因此， 位置檢測感測器23可確實僅感測到感測磁鐵22之磁性。 依據上述之本實施形態之活塞位置檢測裝置2〇，因不受 到外側磁鐵15或周圍鐵製構件之影響，藉由安定之磁路可 確實檢測活塞位置，&可一面維持無桿壓&全體之緊緻 化，一面進行正確且信賴度高之活塞位置檢測。 此外，藉由將遮蔽板21與感測磁鐵22設置於滑件4側面之 壓缸管軸線方向中央部，可交总、隹— 'J谷易進仃對應之位置檢測感测 106856-960430.doc -14- 1293665 n 器23之調整，容易進行往無桿壓缸丨之設置。 進步因在與位置檢測感測器23相對之滑件4側面形成 •凹部19，於凹部19配置遮蔽板21與感測磁鐵22，故感測磁 • 裁2不由π件4犬出，可以節省空間設置活塞位置檢測裝置 2〇，可更為有效地使得無桿壓缸丨小型化。 2外，藉由使得壓缸管3之剖面外形形成為扁+長圓形， 使得滑件4之剖面外形形成為大致矩形，故可得到滑件4之 更為女定之移動。 上述實施形態中，凹部雖於滑件側面沿壓缸管軸線方向 橫跨其全長地設置，惟即使僅使得遮蔽板之安裝部分成為 凹部，亦可得到與上述實施形態相同之效果。 2外，凹部之設置位置不限於滑件側面中央，亦可設置 於罪近壓缸管軸方向之前後任一端部側之位置，亦可省略 凹部。 本實施形態之感測磁鐵，使用異向性磁鐵、等向性磁德 之任-者亦可’形狀亦不限於四角塊狀，可成為圓柱狀另 平板狀等。此外’往遮蔽板之安裝方法亦可不使用上述漬 施形態之磁鐵支持體，於遮蔽板外表面設置磁鐵保持用戈 保持片或保持盤等。總之，如能以適當姿勢保持感測磁錯 時，可採用其他之適當保持方法。 再者，無桿壓缸本身之構造，上述實施形態雖為在長厦 形之一個壓缸管内並列配置一對壓缸孔與活塞之構造^ ^ 壓缸孔或活塞數目亦可設為3以上。此外，亦可成為=於7 個壓缸管内設置複數壓缸孔，複數個並列配置分； 為一 /η 106856-960430.doc 15 1293665 壓缸孔且收納活塞之真圓壓缸管之構造。 此外，相反地本發明中亦可使用僅為具備—個麼缸孔且 , 收納活塞之单一壓缸管。 ， 此外，壓缸孔除真圓以外，亦可採用矩形或多角形等各 種形狀，活塞或滑件，内侧磁鐵或外側磁鐵亦配合壓缸管 之形怨而適當改變其形狀亦可。 進一步滑件中，如為可與内側磁鐵磁性結合之礤性體， 亦可省略外側磁鐵。 • 【圖式簡單說明】 圖1為無桿壓缸之平面圖。 圖2為無桿壓缸之左側面圖。 圖3為無桿壓缸之正面圖。 圖4為表示無桿壓缸之内部機構之說明圖。 【主要元件符號說明】 1 磁鐵型無桿壓缸 2 端套 3 壓缸管 4 滑件 5 感測器軌道 6 壓缸孔 7 活塞 12 内側磁鐵 15 外側磁鐵 18 端板 106856-960430.doc 1293665 19 凹部 20 活塞位置檢測裝置 21 遮蔽板 22 感測磁鐵 23 位置檢測感測器 25 磁體支持體The cylinder tube 3 has a flattened oblong shape, and by 4, the slider 4 is disposed in a horizontal posture in a horizontal posture and is disposed in parallel with the axial direction in a horizontal direction. Further, inside the cylinder tube 3, as shown in FIG. One of the true circles is against the cylinder bores 6, 6. The piston 7 is housed in each of the cylinder bores 6 so as to be movable in the axial direction of the cylinder tube 3. Each of the cylinder bores 6 is divided into the cylinder chambers 8 and 8 by the respective pistons 7. In each of the end sleeves 2, a supply discharge port 9 and a flow path 1A are formed, which are communicated by the supply discharge port 9 to the respective two cylinder chambers 88 on the corresponding sides. The compressed air is supplied from one of the right and left supply discharge ports 9, 9 to one of the cylinder chambers 8 via the flow path 1 , and the pistons 7 and 7 move in synchronization with each other in the respective cylinder bores 6. Each of the pistons 7 has a central piston axis u, and a plurality of doughnut-shaped inner magnets 12, and a donut-like vehicle 13 are alternately inserted, and the piston ends 14 are screwed and fixed at both ends. The magnetic poles of the inner magnets 12 are arranged in the axial direction so that the same poles of ns, SN, NS, and SN correspond to each other, and the same poles of the inner magnets 12 correspond to each other between the adjacent pistons 7 and 7. A sweet-shaped outer magnet is embedded in the through portion of the cylinder tube 3 of the slider 4. Also 106856-960430.doc -12- 1293665 « · That is, in the slider 4, an oblong-shaped and donut-shaped plurality of outer magnets 15 surrounding the cylinder tube 3 interact with the plural yoke 16 of the same shape. In the axial direction, the laminate is fixed to the outer wear member 17 disposed at both ends by the end plate 18, whereby the outer magnet 15 is attached to the through portion of the cylinder tube 3. The magnetic poles of the outer magnets 15 are disposed so as to be opposite to each other in the axial direction, and are disposed so as to be substantially different from each other in the magnetic poles of the inner magnets 12 on the side of the piston 7 so as to be SN, NS, SN, and NS. Therefore, the two pistons 7, 7 are magnetically coupled to the slider 4 by the magnetic attraction of the two magnets. • Further, on both side surfaces below the slider 4, recessed portions 19 which are recessed toward the inner side (center side) are formed. In the recesses 19 on the side opposite to the sensor lane 5 in the two recesses 19 and in the sense of the lane 5, a piston position detecting means, indicated generally at 20, is provided. The structure of the piston position detecting device 20 includes an iron shielding plate 21 attached to the side surface of the slider 4, a square block-shaped sensing magnet 22 attached to the outer surface of the shielding plate 21, and a sensory rail 5 and a sensor. The magnetic position detecting sensor 23 ° ® shielding plate 21 is disposed on the side of the axial direction of the cylinder tube 3 on the side of the slider 4. The shielding plate 21 is formed into a meandering flat plate shape covering the concave portion 19 and the inclined surface 24 formed at the upper portion of the concave portion 19. The sensing magnet 22 is fixed at the center of the shielding plate 2 1 at the portion of the concave portion 19 by the plane of the shield plate 2 1 being screwed back [the magnet holder 25]. In Fig. 1 and Fig. 3, the sensing magnet 22 is horizontally fixed so that the left side becomes the N pole and the right side becomes the S pole. On the other hand, the position detecting sensor 23 is disposed at the following position, and senses the 106856-960430.doc -13 - 1293665 rail 5, extending across the longitudinal direction on the opposite side to the slider 4 side. In the receiving groove 26, when the slider 4 is at a specific position, the sensing magnet 22 is in a relative position. • In the rodless cylinder 1 constructed as described above, when the compressed air is alternately supplied from the supply and discharge ports 9 and 9 of the right and left end sleeves 2, 2, the cylinders 6 and 7 are in the cylinder bores 6 in the cylinder tube 3. Internally synchronized and reciprocating. By the movement of the pistons 7, 7, the slider 4, which is magnetically coupled to the pistons 7, 7 by the magnetic coupling of the inner magnet 12 and the outer magnet 15, will follow and reciprocate along the cylinder I. In the piston position detecting device 20, when the sensing magnet 22 reaches the position opposite to the position detecting sensor 23 by the reciprocating motion of the slider 4, the position detecting feeling 23 senses the magnetism of the sensing magnet 22 It is detected that the piston 7 (slider 4) reaches a specific position. Here, since the shielding plate 21 is provided on the side of the slider 4 of the sensing magnet 22, the magnetic force of the magnet 15 on the outer side of the slider 4 can be prevented from leaking to the position detecting sensed person 23 side. Further, since the shield plate 2 has a function as a yoke for the sensing magnet 22, even if a magnetic body such as an iron member is provided around the periphery, the magnetic field of the sensing magnet is less likely to be affected, and the magnetic path of the sensing magnet 22 can be stabilized. Therefore, the position detecting sensor 23 can surely sense only the magnetic properties of the sensing magnet 22. According to the piston position detecting device 2 of the present embodiment described above, the piston position can be reliably detected by the stable magnetic path without being affected by the outer magnet 15 or the surrounding iron member, and the rodless pressure can be maintained while maintaining the rodless pressure & The entire position is tightened, and the correct and reliable piston position detection is performed. In addition, by arranging the shielding plate 21 and the sensing magnet 22 at the central portion of the axial direction of the cylinder tube on the side of the slider 4, the position detection sensing corresponding to the position of the J ' J ' 谷 106 106 106 106 106866-960430.doc - 14- 1293665 n adjustment of the device 23, easy to set to the rodless cylinder. The improvement is formed by the concave portion 19 on the side of the slider 4 opposite to the position detecting sensor 23, and the shielding plate 21 and the sensing magnet 22 are disposed in the concave portion 19, so that the sensing magnetic cutting 2 is not caused by the π member 4, which can save The space setting piston position detecting device 2 is more effective in miniaturizing the rodless cylinder. Further, by making the cross-sectional shape of the cylinder tube 3 into a flat + oblong shape so that the cross-sectional shape of the slider 4 is formed into a substantially rectangular shape, a more slidable movement of the slider 4 can be obtained. In the above embodiment, the concave portion is provided across the entire length of the slider side in the axial direction of the cylinder tube. However, even if only the attachment portion of the shielding plate is a concave portion, the same effect as that of the above embodiment can be obtained. In addition, the position of the recessed portion is not limited to the center of the side surface of the slider, and may be disposed at the position of either the front end side before the sin near the cylinder axis direction, or the recessed portion may be omitted. In the sensing magnet of the present embodiment, an anisotropic magnet or an isotropic magnetic material may be used. The shape may not be limited to a square block shape, and may be a columnar shape or the like. Further, in the method of mounting the shielding plate, the magnet supporting body of the above-described application form may not be used, and a magnet holding retaining piece or a holding disk may be provided on the outer surface of the shielding plate. In summary, other suitable retention methods can be employed if the sensing magnetic error can be maintained in an appropriate posture. Further, in the structure of the rodless cylinder itself, in the above embodiment, the configuration of the pair of cylinder bores and the pistons is arranged in parallel in one of the cylinder tubes of the Changsha-shaped cylinder. The number of cylinder bores or the number of pistons may be set to 3 or more. . In addition, it is also possible to provide a plurality of cylinder bores in seven cylinders, and a plurality of parallel arrangement points; a /n 106856-960430.doc 15 1293665 cylinder bore and a true circular cylinder tube housing the piston. Further, conversely, in the present invention, a single cylinder tube that accommodates only a cylinder bore and houses a piston can be used. In addition, in addition to the true circle, the cylinder bore may be of various shapes such as a rectangular shape or a polygonal shape, and the piston or the sliding member may be appropriately changed by the inner magnet or the outer magnet together with the shape of the cylinder tube. Further, in the slider, if it is an elastic body that can be magnetically coupled to the inner magnet, the outer magnet can be omitted. • [Simple description of the drawing] Figure 1 is a plan view of the rodless cylinder. Figure 2 is a left side view of the rodless cylinder. Figure 3 is a front view of the rodless cylinder. Fig. 4 is an explanatory view showing an internal mechanism of a rodless cylinder. [Main component symbol description] 1 Magnet type rodless cylinder 2 End sleeve 3 Cylinder tube 4 Slider 5 Sensor rail 6 Cylinder hole 7 Piston 12 Inner magnet 15 Outer magnet 18 End plate 106856-960430.doc 1293665 19 Recess 20 Piston position detecting device 21 Shading plate 22 Sensing magnet 23 Position detecting sensor 25 Magnet support
106856-960430.doc106856-960430.doc