TWI291556B - Conveying device for an automatic IC testerabstract - Google Patents

Abstract

A conveying device for an automatic IC tester includes a driving and positioning device, a conveying unit and a testing unit. By means of the driving and positioning unit IC chips are positioned stably and then driven to contact pressingly a rail pushing block of the conveying unit so as to let an IC chip placed in the rail pushing block, which may push the IC chip to have its pins contact with the test unit for testing its function. The conveying unit has a simple structure for positioning IC chips quickly and driving them for testing.

Description

I291556 八、發明說明： 【發明所屬之技術領域】 旬作係關係一種I c自動測試之推送裝置，更 砰而g之，特別係指一種IC可於預備位置自動定位 要凋1杈正、可加快1 c測試之速度及驅動方式 簡單之推送機構者。I291556 VIII. Description of the invention: [Technical field to which the invention pertains] A push device for Ic automatic test is more complicated, especially for an IC that can be automatically positioned at a preparatory position. Speed up the 1 c test speed and the driving method is simple to push the mechanism.

【先前技術】[Prior Art]

凊參閱附件-所示，係為公告第4 9 6 5 3 0 號專利公報影本，其係為me測試處理機之IC 測試處理機之IC遞送裝置，主要 遞迗凌置」’並請參閱附件一之第二圖所示，習知創 作係為一種I c 由一縱軸單元 係凊 See Attachment - is a photocopy of the Patent Gazette No. 4 9 5 5 3 0, which is the IC delivery device for the IC test processor of the me test processor, which is mainly used to refer to the attachment. As shown in the second figure, the conventional creation system is an I c from a vertical axis unit.

，一 k軸單元3及一可將I c晶片8 吸嘴定位置係、間距之吸持單^所組成，並可以由 程式來設定（或變更）並控制各軸之來回移動之距 離，其中 ： 縱軸單π 2:由一足夠延伸至所輸送ic晶片 8之距離的主滑執桿2 1及在該主滑軌桿2 i前後 端之步進馬達組2 2所組成，並在該主滑軌桿2丄 5 Ϊ291556 上套礙一鳩尾槽塊2 3，在該鳩尾槽塊2 3上設一 挟持塊2 4,並於鸠尾槽塊2 3之夾持塊24上固設 一 n型塊3 〇。 橫軸單元3 :在縱軸單元3之门型塊3 〇上 鎖固-懸臂3 1 ’該懸臂3丄設一立板3 2與平板 33，其立板32之垂直面上設有第一步進馬達組 3 2 1與第二部進馬達組3 2 2所帶動之第一吸持 裝置4 1與第二吸持裝置4 2左右移動。 吸持單元4:設有第一吸持裝置41及第二吸 持裝置4 2 ’第一吸持裝置4丄由一底部開設有一 鳩尾槽4 1 1 1之L型滑座4工丄，其滑座4丄丄 垂直部分以於第-步進馬達組321之—條皮帶 上，由該皮帶來帶動整個滑座4丄丄在懸臂3 1上 左右移動，滑座4 1 1上之外側固設一 L型板4工 2及與步進馬達414嚙合之齒條413，在1型 板4 1 2末端則設有一吸真空吸嘴4 i 3來吸附晶 片；第二吸持裝置42由一底部開設有一鳩尾槽4 211之L型滑座421，其滑座421垂直不分 固定於第二步進馬達組3 2 2之一條皮帶上，由該 6 1291556 皮帶來帶動整個滑座421在懸臂 “碎3 1上左右移 動’ 2 1之外侧並固設—步進馬達4 2 4， 又在滑座4 2 1上固設一 l琐蠻λ 又芎角板422及與步 進馬達424嚙合之齒條423， I型彎角板4 2 2末端則設有—吸真空吸嘴4 2 5來吸附晶片者。a k-axis unit 3 and a stacking unit for the position and spacing of the Ic wafer 8 nozzles, and can be set (or changed) by the program and control the distance traveled by each axis, wherein : vertical axis single π 2: consisting of a main sliding rod 2 1 extending enough distance from the delivered ic wafer 8 and a stepping motor group 2 2 at the front and rear ends of the main sliding rail 2 i, and The main rail bar 2丄5 Ϊ 556 556 556 556 556 556 556 Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ N-type block 3 〇. The horizontal axis unit 3: is locked on the door block 3 of the longitudinal axis unit 3 - the cantilever 3 1 'the cantilever 3 is provided with a vertical plate 3 2 and a flat plate 33, and the vertical surface of the vertical plate 32 is provided with a first The first holding device 4 1 and the second holding device 4 2 driven by the stepping motor group 3 2 1 and the second portion entering motor group 3 22 move left and right. The holding unit 4 is provided with a first holding device 41 and a second holding device 4 2 'the first holding device 4 has an L-shaped sliding seat 4 with a dovetail groove 4 1 1 1 at the bottom, which The vertical portion of the slider 4 is on the belt of the first stepping motor group 321 , and the whole slider 4 is driven to move left and right on the cantilever 3 1 by the leather belt, and the outer side of the sliding seat 4 1 1 is fixed. An L-shaped plate 4 and a rack 413 meshing with the stepping motor 414 are disposed, and a vacuum suction nozzle 4 i 3 is disposed at the end of the 1st plate 4 1 2 to adsorb the wafer; the second holding device 42 is provided by a An L-shaped sliding seat 421 having a tail groove 4 211 is formed at the bottom, and the sliding seat 421 is vertically fixed to one of the belts of the second stepping motor group 3 2 2, and the whole sliding seat 421 is driven by the 6 1291556 leather belt. "Crush 3 1 moves left and right" 2 1 outside and fixed - stepping motor 4 2 4, and fixed a l brute λ and gusset plate 422 on the sliding seat 4 2 1 and mesh with the stepping motor 424 The rack 423, the end of the type I angled plate 4 2 2 is provided with a vacuum suction nozzle 4 25 to absorb the wafer.

根據上述，由程式控制縱轴步進馬達以來回 移動於放置晶片承置的八區5與B區6之間；而橫 軸單元3上之第—部進馬達321組與第二部進馬 達組則接受電腦程式控制，將其第一吸持裝置4工 及第二吸持裝置4 2之間距做適當定位調後，由二 組吸持裝置内之步進馬達4丄4、4 2 4與齒條4 13、423的帶動，將八區5内之晶片由吸真空According to the above, the vertical axis stepping motor is controlled by the program to move back and forth between the eight zones 5 and B zones 6 on which the wafer is placed; and the first section of the horizontal axis unit 3 enters the motor 321 group and the second section into the motor. The group is controlled by computer program, and the distance between the first holding device 4 and the second holding device 4 2 is properly adjusted, and the stepping motors in the two groups of holding devices are 4丄4, 4 2 4 Driven by the racks 4 13 and 423, the wafers in the eight zones 5 are vacuumed.

吸嘴4 1 5吸出，並由縱轴單元2至6區6是當位 置放入0 前述習知之1C遞送裝置具有以下之缺點： •其組合構件繁雜且作動繁雜。 •其裝置所佔使用面積龐大。 •在長距離遞送時容易產生定位誤差。 •因使用懸臂故容易產生懸臂撓曲之現 7 4 1291556 象。 5 ·容易產生因快速位移而使機台晃動。 本案創作人長久從事I C測試機之推送構件之 開發與研究，對於相關器具構造上的優缺點有相當 程度的瞭解，由前述分析得知，習知之IC遞送裝置 在實用狀態中，具有不能聯動順暢及構件繁雜等缺 失，而且長期以來，更未曾見諸有任何改善之創作 產生，有鑑於此，本案創作人遂針對以上缺失而進 行研九改良，希望能研發出一種較為實用且可快速 定位並可準確測試之I C推送機構。 【發明内容】 依據上述之目的，本發明所述的Ic自動測試機 之推送機構，其主要特徵在於： 驅動定位部：係包含有一驅動構件及一定位 構件所構成，其中驅動構件係為—組雙動氣屢缸及 連結構件所構成，該雙動汽壓缸係驅動連結構件形 成往復運動之態樣’而連結構件外側係設置有導 桿’且導桿上穿設有彈簣元件；定位構件係設置於 1291556 連結構件之一端略呈门型之態樣，且内側係設置有 一相對稱之定位擋塊。 推送部：係設置於驅動定位部相鄰之前方， 且係由輸送模座及滑執推塊所構成，該輸送模座係 内側係形成有導滑執，而於定位構件相對應處且相 鄰於導滑執係設置有一滑執推塊，且該滑轨推塊係 包含有一相對稱之前、後推板及設置於後推板上係 成組設置之復歸調整組所構成，而於前、後推板相 對應之之内側面係形成與輸送模座上相同態樣之導 滑轨，係包含有一滑塊，該滑塊内側形成有容置空 間，且該容置空間内係置有一彈簧，而滑塊與彈簧 間係由一桿件穿設其中。 測試部：係設置於推送部之前方，係包含一 測試模座及基板所構成，其中，該測試模座上相對 應於推送部之滑執推塊處，係分別形成一相對稱之 測試區，該測試區内側係分別設置有複數個測試用 之針腳；而該基板係與測試模座相連結，且於基板 之一側係設置有一與測試系統相連結之訊號傳送 端0 9 I291556 【實施方式】 為期使對於本創作之目的、功效及構造特徵能 有更詳細明確的瞭解，茲舉出如下述較佳之實施例 並配合圖示說明如后： 請參閱第一、二圖並配合第三圖、第四圖其分 】係為本發明之立體示意圖、本發明之立體分解示 “圖、本發明之驅動定位部局部分解示意圖、本發 月之推送部立體示意圖，如圖所示，本發明所述之 1 c自動測試機之推送機構，其主要係為驅動定位部 1推送部2及測試部3所構成，而該驅動定位部 1係包含有一驅動構件1 〇及一定位構件1 1所構 成’其中該驅動構件10上係設置有一組雙動氣壓 缸1 〇 0 ’且該雙動氣壓缸1 〇 〇係一端係連結有 連結構件1 0 1 ’該雙動氣壓缸1 0 0係驅動連結 構件1 0 1而形成往復運動之態樣，而連結構件1 〇 1外側係設置有導桿1 0 2，且導桿1 0 2上穿 設有彈簧元件1 〇3，而該定位1構件1 1係設置於 連結構件〗〇 1之一端，且略呈门型之態樣，而定位 構件1 1之内側係設置有一相對稱之定位擋塊1 1 1291556 〇，藉使形成可供阻擋定位2之功效。 且該滑推 該推迗部2係設置於與驅動定位部丄相鄰處， 且該推送部2係由輸送模座2〇及滑軌推塊21所 構成，該輸送模座2 〇係内側係形成導滑軌2 〇 0 ’而於定位構件i i相對應處且相對應處且相鄰 於導滑軌2 〇 〇係設置有—滑推塊2 1 塊 板 2 1 〇、2 係包含有一對相對稱呈工型態樣之前、後推 1及設置於後推板2 1 1上係成組 設置之復歸調整组212所構成，而於前、後推板 2 1 〇、2 1 1之内側面係形成與輸送模座2 〇上 相同態樣之導滑執2100、211〇,該復歸調 整组2 1 2係包含有-滑塊2 ! 2 Q該滑塊2 i 2 〇内側係形成有容置空間2 1 2丄，且該容置空間 2 1 2 1内係設置有一彈簧2 i 2 2，而滑塊2工 2 〇與彈2 1 2 2間係由一桿件2 1 2 3穿設其 中’藉由該桿件2 1 2 3可使滑塊2 1 2 0導滑於 寺干件2 1 2 3上，且該彈簧2 1 2 2可適時的壓縮 及舒張，形成具可調整該滑執推塊2 1之位移量及 位移之位置。 I291556 該試部3係設置於推送部2之前方，係包含一 測試模座3〇及基板3ί 土微J I所構成，其中，該測試模 座3 1上相對應於推送部2之滑執推塊”處，係 分別形成—相對稱之測試區300，該測試區3〇 〇内側係分別設置有複數個試用之針腳3〇1而該 基板3 1係與測試模座q 〇 〜供座d 〇相連結，且於基板3工 之側係設置有一盘潘I諸备 /、劂忒系統3 2相連結之訊號傳送 端3 3 〇 請參閱第五圖並配合第六圖 '第六圖A及第 七、八圖’其分別係為本發明之作動示意圖、本發 明之第一施例視示意圖、本發 +赞月第六圖之B部局部 放大示意圖、本發明之第六a — A 4面示意圖、本發 明之執道推塊立體分解示意圖，如圖所示，本發明 所述之推送機構’係將1C晶片4推送部2上之導 滑執200利用本身之重量由上The suction nozzle 4 15 is sucked out, and the vertical axis unit 2 to 6 is 6 when the position is placed at 0. The conventional 1C delivery device has the following disadvantages: • The combined members are complicated and complicated to operate. • The device has a large footprint. • Positioning errors are easy to occur when transporting over long distances. • Due to the use of a cantilever, it is easy to produce a cantilever deflection. 5 · It is easy to cause the machine to shake due to rapid displacement. The creator of this case has been engaged in the development and research of push components of IC test machines for a long time, and has a considerable understanding of the advantages and disadvantages of the construction of related instruments. It is known from the above analysis that the conventional IC delivery device has a smooth linkage in the practical state. And the complexity of the components, and for a long time, have not seen any improvement in the creation of the creation, in view of this, the creator of this case 遂 research on the above-mentioned missing, I hope to develop a more practical and quickly locate and An IC push mechanism that can be accurately tested. SUMMARY OF THE INVENTION According to the above object, the push mechanism of the Ic automatic test machine of the present invention is characterized in that: the drive positioning portion comprises: a drive member and a positioning member, wherein the drive member is a group The double-acting gas cylinder and the connecting member are configured to drive the connecting member to form a reciprocating motion 'the outer side of the connecting member is provided with a guiding rod' and the guiding rod is provided with an elastic element; the positioning member It is set at 1291556. One end of the connecting member is slightly in the shape of a door, and the inner side is provided with a locating stop. The pushing portion is disposed adjacent to the driving positioning portion, and is composed of a conveying die holder and a sliding push block. The conveying die seat is formed with a guide slip on the inner side, and corresponds to the positioning member. The adjacent sliding guide system is provided with a sliding push block, and the sliding rail pushing block comprises a symmetrical front and rear push plate and a resetting adjustment group disposed on the rear push plate, and the front set The inner side of the rear push plate is formed with a guide rail which is the same as that on the transport mold base, and includes a slider. The inner side of the slider is formed with a receiving space, and the receiving space is provided with a guiding space. The spring is interposed between the slider and the spring by a rod. The test unit is disposed in front of the pushing portion and comprises a test mold base and a substrate. The test mold base corresponds to the slide push block of the push portion, and respectively forms a symmetrical test area. a plurality of test pins are respectively disposed on the inner side of the test area; and the substrate is coupled to the test mold base, and a signal transmitting end connected to the test system is disposed on one side of the substrate. 0 9 I291556 Means for a more detailed and clear understanding of the purpose, function and structural features of this creation, the following preferred embodiments are illustrated with the following illustrations: Please refer to the first and second figures and the third FIG. 4 is a perspective view of the present invention, a perspective exploded view of the present invention, a partial exploded view of the drive positioning portion of the present invention, and a perspective view of the push portion of the present month, as shown in the figure. The pushing mechanism of the 1 c automatic testing machine of the present invention is mainly composed of a driving positioning portion 1 pushing portion 2 and a testing portion 3, and the driving positioning portion 1 includes a driving member 1 And a positioning member 1 1 is configured to: wherein the driving member 10 is provided with a set of double-acting pneumatic cylinders 1 〇 0 ' and the double-acting pneumatic cylinder 1 is connected with a connecting member 1 0 1 ' at one end The movable air cylinder 1 0 0 drives the connecting member 1 0 1 to form a reciprocating motion, and the connecting member 1 〇 1 is provided with a guide rod 1 0 2 on the outer side, and the guide rod 1 0 2 is provided with a spring element 1 〇3, and the positioning member 1 1 is disposed at one end of the joint member 〇1, and is slightly in the shape of a door, and the inner side of the positioning member 1 1 is provided with a locating stop 1 1 1291556 〇 Therefore, the effect of blocking the positioning 2 is formed. The sliding push portion 2 is disposed adjacent to the driving positioning portion ,, and the pushing portion 2 is pushed by the conveying mold base 2 and the sliding rail. 21, the transport mold base 2 is formed on the inner side of the guide rail to form a guide rail 2 〇 0 ' and corresponding to the positioning member ii and corresponding to the guide rail 2 2 1 Board 2 1 〇, 2 series include a pair of symmetrical type before and after pushing 1 and set to the rear push plate 2 1 1 It is composed of the reset adjustment group 212 set in the group, and the inner side surfaces of the front and rear push plates 2 1 〇 and 2 1 1 form the guide slips 2100, 211 相同 which are the same as those on the transport mold base 2 〇. The resetting adjustment group 2 1 2 includes a slider 2 ! 2 Q. The slider 2 i 2 is formed with an accommodating space 2 1 2 〇 on the inner side, and a spring is disposed in the accommodating space 2 1 2 1 2 i 2 2, while the slider 2 is 2 〇 and the 2 2 2 2 is made by a rod 2 1 2 3, where the slider 2 1 2 0 can be guided by the rod 2 1 2 3 Sliding on the dry parts of the temple 2 1 2 3, and the spring 2 1 2 2 can be compressed and relaxed in time to form a position with a displacement and a displacement that can adjust the sliding push block 2 1 . I291556 The test unit 3 is disposed in front of the push unit 2, and includes a test mold base 3〇 and a base plate 3 土 soil micro JI, wherein the test mold base 31 corresponds to the slide push of the push unit 2 At the block, the test zone 300 is formed separately, and the inner side of the test zone is respectively provided with a plurality of trial stitches 3〇1 and the substrate 3 1 is connected with the test die holder q 〇 to the seat d The 〇 phase is connected, and a signal transmission terminal 3 3 connected to the side of the substrate 3 is provided on the side of the substrate 3, and the signal transmission terminal 3 is connected to the 3 system 3 2 〇 Please refer to the fifth figure and cooperate with the sixth figure 'Sixth figure A And the seventh and eighth figures are respectively a schematic diagram of the operation of the present invention, a schematic view of the first embodiment of the present invention, a partial enlarged view of the B portion of the sixth figure of the present invention, and a sixth a-A of the present invention. 4 is a schematic exploded view of the obscuring push block of the present invention. As shown in the figure, the push mechanism of the present invention uses the weight of the guide slip 200 on the push portion 2 of the 1C wafer 4 by itself.

1 土下之方式導入1C 晶片4’而此時驅動定位部1 p 上之雙動氣壓缸1〇〇 伸出’將驅動定位部1係停止於 、推送部2之滑軌推 塊21所停止之承接位1置面上鼓 積由推送部2上之 導潸執2 0 0興滑軌推塊2 丄 < 則、後推板2 1 12 1291556 0、21 1内側上導滑執2l〇〇、21 1〇呈同 一平面狀，可使1C快速的導入前、後推板中2 1 0、2 1 1，該滑執推塊2 1内側之導滑執2 1 〇 0、2 1 1 0係可形成可供i C導滑之態樣，且此時 利用驅動定位部1之定位構件1 1上所設置的定位 1播塊1 1 0，可使1C晶片4能準確的定位於滑執 推塊2 1中’藉使待測試1 c晶片4能快速且準嫁 的導入並定位於適當之位置以準備進行測試。 言青參閱第九圖並配合第十圖、第十圖及第十— 圖’其分別係為本發明之第二實施例俯視示意圖、 本發明之第九圖C-C剖面圖府視示意圖、本發明之 第十圖D局部放大示意圖、本發明之第九圖C-C側 剖之不意圖，如圖所示，該滑軌推塊2 1内所導入 之待測1C晶片4，於此時藉由驅動定位部1之雙動 乳壓缸1 〇 〇施以一前推之壓力，而使定位1構件 1 1被推動形成與滑執推塊2 1呈貼合狀，此時雙 動氣壓知：1 〇 〇仍持續推動使得滑軌推塊2 1往前 位移’致使滑執推塊2 1令1C晶片4上之針4 〇與 測試部3上之測試區3 〇 〇内之針腳3 〇 1相互接 13 1291556 觸，而此時測試區3 〇 〇及形成一訊號循環回路， 並藉由與測試模座3 2連結之基板3 1上所設置之1 The method of introducing the 1C wafer 4' into the ground is performed, and at this time, the double-acting pneumatic cylinder 1' on the positioning portion 1p is extended. The drive positioning portion 1 is stopped, and the slide rail block 21 of the push portion 2 is stopped. The receiving position 1 is bulged by the guide on the pushing portion 2, and the sliding block is pushed by the sliding block 2 丄 < Then, the rear push plate 2 1 12 1291556 0, 21 1 The inner upper sliding handle 2l 〇 〇, 21 1〇 is in the same plane shape, which can make 1C quickly introduce the front and rear push plates 2 1 0, 2 1 1 , the sliding guide block 2 1 inside the guide slip 2 1 〇 0, 2 1 1 The 0 series can form a state in which the I C can be guided to slide, and at this time, the positioning 1 block 1 1 0 provided on the positioning member 1 of the driving positioning portion 1 can accurately position the 1C wafer 4 to be slid. In the push block 21, 'the wafer 1 to be tested can be quickly and accurately introduced and positioned in an appropriate position to prepare for testing. FIG. 9 is a top plan view of a second embodiment of the present invention, and FIG. FIG. 10 is a partially enlarged schematic view, and is not intended to be cut along the CC side of the ninth drawing of the present invention. As shown in the figure, the 1C wafer 4 to be tested introduced in the sliding block 2 is driven at this time. The double-acting pressure cylinder 1 of the positioning portion 1 applies a forward pressure, so that the positioning member 1 1 is pushed to form a fit with the sliding push block 2 1 , and the double-acting pressure is known: 1 The crucible continues to push the slide rail block 2 1 forward so that the slider push block 2 1 causes the needle 4 上 on the 1C wafer 4 and the stitch 3 〇 1 in the test zone 3 测试 on the test portion 3 to interact with each other. Connected to 13 1291556, and at this time the test area 3 〇〇 and form a signal loop, and is set on the substrate 3 1 connected to the test mold base 32

訊號傳送端3 3，將測試ic晶片4之訊號傳輸之測 試系統3 3中並進行判別，而於測試完成後，該驅 動定位部1上之雙動氣壓缸1 0 0會將定位構件1 1往所設滑軌推塊2 1之位置相反方向作拉回之作 動’因雙動氣壓缸1 〇 0之所作用於滑執推塊2 1 止之推力逐漸減除，且因復歸調整組2 1 2上所設 置之可壓縮及舒張之彈簧2 1 2 2構件，故此時滑 推塊上21之復歸調整组2會將滑軌推塊21推 動退回始承接位置，藉復歸調整组2 1 2上之彈簧 2122構件所頭有之簧力，而形成頭可自動定位The signal transmitting end 3 3 will test and test the signal of the ic chip 4 in the test system 3 3, and after the test is completed, the double-acting pneumatic cylinder 100 on the driving positioning portion 1 will position the positioning member 1 1 The action of pulling back in the opposite direction to the position of the slide rail push block 2 1 is gradually reduced by the thrust of the double-acting pneumatic cylinder 1 〇 0 for the sliding push block 2 1 , and the adjustment group 2 is reset due to the reset The spring 2 2 2 2 member can be compressed and relaxed on the 1 2, so the reset adjustment group 2 on the sliding push block 21 will push the slide push block 21 back to the original receiving position, and the reset group 2 1 2 The spring 2122 member has a spring force on the head, and the forming head can be automatically positioned.

〇及復歸所需之功效，並且定位構件τ丄上 位：绳"〇會因雙動氣壓紅持續做拉回之作 到疋位擋塊1 1 〇完全離開滑軌推塊2 i上之 :21°，此時受潮完成之1C晶片因無定位擋 :阻擋’故1C晶片則立即藉由自身之動量並 “九〇 〇而排出自動推送機構外或 一 ，而此時雙動氣壓缸100則推出定位構 14 I291556 準備 1而與滑軌推塊2 1貼合使 偬疋位ί擋體1 1 〇 接另一待受測之J C晶 片Ρ疋成該推送機構之循 衣作動，且藉由上逑各構件 &仵動’而使IC晶片4 可於預備位置自動定位不需 而要調整校正，且可加快 IC晶片4測試之速度及驅動方 w 助万式間早之推送機構 者0 耩由上述之結構設計，本發明 之Ϊ c自動測試機 之推機構具有下列之優點：〇 复 复 复 复 复 复 复 复 复 复 复 复 复 复 定位 定位 定位 定位 定位 定位 : 定位 : : : : : : : : : : : : : : : : : : : : : : : 定位 : : 定位 定位 定位 定位 定位21°, at this time, the 1C wafer that has been wetted is not positioned because it blocks: 'The 1C wafer is immediately discharged by the momentum and “nine” and is discharged outside the automatic push mechanism, and the double-acting pneumatic cylinder 100 Introducing the positioning structure 14 I291556 preparation 1 and fitting it with the sliding rail push block 2 1 so that the clamping position 1 1 is connected to another JC wafer to be tested to form a driving action of the pushing mechanism, and by The upper part of the upper part & 'moving' allows the IC chip 4 to be automatically positioned in the preparatory position without adjustment and adjustment, and can speed up the test speed of the IC chip 4 and the driving side耩 Designed by the above structure, the push mechanism of the Ϊ c automatic test machine of the present invention has the following advantages:

1 ·其組合構件簡單且作動簡便。 2·可自動定位1不需要調校正定位位置。 3·利用簡單雙動氣壓缸之驅動方式。 4 ·無須使用大面積之設置。 5 ·在利用簡單之往復運動送且可產生快速定1 · The combined components are simple and easy to operate. 2·Automatic positioning 1 does not require adjustment of the positioning position. 3. Use a simple double-acting pneumatic cylinder to drive. 4 • There is no need to use a large area setting. 5 · It can be sent quickly by using simple reciprocating motion

位1之效果。 6·使用雙氣壓缸做短距離之柱復運動而不產 生撓曲之現象。 7·可快速位移及定位且不使機台產生晃動。 綜合上述可知本發明在同類產品中實具有極佳 之進步實用性同時遍查國内外關於此類結構之技術 15 1291556 資料文獻中未發現有相同近似之構造存在在先應已 符合創作性合於產業利用性以及進步性的專利要件 爰依法之提出申請。The effect of bit 1. 6. Use a double-pneumatic cylinder for short-range column re-motion without the phenomenon of deflection. 7. Quickly displace and position without causing the machine to shake. Based on the above, it can be seen that the present invention has excellent advancement and practicability in the same kind of products, and at the same time, the domestic and foreign techniques for such structures are widely inspected. 15 1291556 The following documents have not been found to have the same approximation. Industrial use and progressive patent requirements are filed in accordance with the law.

16 1291556 【圖式簡單說明】 第一圖係為本發明之立體示意圖。 第二圖係為本發明之立體分解示意圖。 第三圖係為本發明之驅動定位部局部分解示意圖。 第四圖係為本發明之推送部立體示意圖。 第五圖係為本發明之作動示意圖。 第六圖係為本發明之第一實施例俯視示意圖。 第六圖A係為本發明第六圖之B部局部放大示意圖。 第七圖係為本發明之第六圖A-A剖面示意圖。 第八圖係為本發明之執道推塊立體分解示意圖。 第九圖係為本發明之第二實施例俯視示意圖。 第十圖係為本發明之第九圖C-C剖面示意圖。 第十圖A係為本發明第十圖之D部局部放大示意圖。 第十一圖係為本發明之第九圖C-C側剖之示意圖。 1291556 【主要元件符號說明】 (習知） I C晶片遞送裝置1 主滑軌桿2 1 鳩尾槽塊2 3 橫軸單位3 懸臂3 1 第一步進馬達組321 吸持單元4 滑座411 L型板412 步進馬達41 4 縱軸單元2 步進馬達組2 2 挾持塊24 门型塊30 立板32 第二步進馬達組321 第一吸持裝置41 鳩尾槽4111 齒條41 3 吸真空吸嘴41 5 第二吸持裝置42 鳩尾槽4211 齒條423 吸真空吸嘴425 B區6 1C晶片8 滑座421 L型板422 步進馬達424 A區5 1C晶片承置盤716 1291556 [Simple description of the drawings] The first figure is a perspective view of the present invention. The second figure is a perspective exploded view of the present invention. The third figure is a partial exploded view of the drive positioning portion of the present invention. The fourth figure is a perspective view of the push portion of the present invention. The fifth figure is a schematic diagram of the operation of the present invention. The sixth drawing is a top plan view of the first embodiment of the present invention. Figure 6 is a partially enlarged schematic view of a portion B of the sixth drawing of the present invention. Figure 7 is a cross-sectional view of the sixth diagram A-A of the present invention. The eighth figure is a three-dimensional exploded view of the obscuring push block of the present invention. The ninth drawing is a top plan view of a second embodiment of the present invention. The tenth figure is a schematic cross-sectional view of the ninth drawing C-C of the present invention. Fig. 10 is a partially enlarged schematic view showing a portion D of the tenth drawing of the present invention. The eleventh drawing is a schematic cross-sectional view taken along line C-C of the ninth drawing of the present invention. 1291556 [Description of main component symbols] (General) IC wafer delivery device 1 Main rail bar 2 1 Iris groove block 2 3 Horizontal axis unit 3 Cantilever 3 1 First stepping motor group 321 Holding unit 4 Slide 411 L type Plate 412 Stepper motor 41 4 Vertical axis unit 2 Stepper motor set 2 2 Hold block 24 Gantry block 30 Vertical plate 32 Second stepper motor group 321 First holding device 41 Dovetail groove 4111 Rack 41 3 Vacuum suction Mouth 41 5 Second holding device 42 Dovetail 4211 Rack 423 Vacuum suction nozzle 425 B zone 6 1C wafer 8 Slide 421 L-plate 422 Stepper motor 424 A zone 5 1C wafer mounting plate 7

18 1291556 (本發明） 驅動定位部1 雙動氣壓缸100 導桿102 定位構件11 推送部2 導滑執200 前推板210 復歸調整組2 1 2 導滑執2 11 0 容置空間2 1 2 1 桿件2123 測試模座30 測試區300 測試系統32 1C晶片4 驅動構件1 0 連接構件101 彈簧元件1 0 3 定位擋塊11 0 輸送模座20 滑執推塊21 後推板211 導滑執2100 滑塊21 2 0 彈簧2122 測試部3 基板31 針腳3 0 1 訊號傳送端33 針腳418 1291556 (Invention) Drive Positioning Unit 1 Double Action Air Cylinder 100 Guide Rod 102 Positioning Member 11 Push Port 2 Guide Slip 200 Front Push Plate 210 Reset Adjustment Group 2 1 2 Guide Sliding 2 11 0 accommodating space 2 1 2 1 rod 2123 test mold base 30 test area 300 test system 32 1C wafer 4 drive member 1 0 connection member 101 spring element 1 0 3 positioning block 11 0 transport mold base 20 sliding push block 21 rear push plate 211 guide slip 2100 Slider 21 2 0 Spring 2122 Test part 3 Substrate 31 Pin 3 0 1 Signal transmission end 33 Pin 4

1919

Claims (1)

Ϊ291556 中請專利範園： c自動測試機之推送播搂 驢“ 構，其主要特徵包含有: m動定位部：係包含有 成，其Φ .酿 九 動構件及一 定位構件所構 構件係為- I且雙動氣壓缸及連結構件 連接構件之一 相對稱之定位 成該雙動氧壓缸係驅動連結構件形成往復運 動之態樣，而連結構件外側係社至 略呈门型之態樣，且内側係設置有 擋槐； 推迗部:係設置於與驅動定位部相鄰之前方，且係由輪 送模座及滑執推塊所構成，該輸送模座係内側係形 成有導滑執，而於定位構件相對應處且相鄰於導滑 執係設置有一滑軌推塊，且該滑軌推塊係包含有一 對相對稱之前、後推板及設置於後推板上係形成組 設置之復歸調整組所構成，而於前、後推板相對應 之内側面係形成與輸送模座上相同態樣之導滑 執’該復歸調整組係包含有一滑執，該滑執内側係 形成有容置空間，且該容置空間内係形成有一彈 簣，而滑塊與彈簧間係由一桿件穿設其中； 測試部：係設置於推送部之前方，係包含一測試模座 及基板所構成’其中，該測試模座上相對應於推送 1291556 部之滑執推塊處’係分別带 ^开> 成—相對應之測試用之 針腳；而該基板係與測試模 一 座相連接，且於基板之 一側係設置有一與測試系 々目連接之訊號傳送端。 2·依據專利申請範圍第丨項所述之 L自動測試機之推送機 構，其中，該1C晶片係由上往 — 上任下導入推送機構，並藉由 疋位構件I c晶片於滑轨推塊上。 3·依據專利申請範圍第1項Ϊ 291556, please patent Fan Park: c automatic test machine push broadcast 搂驴 ", its main features include: m dynamic positioning: the system contains the formation, its Φ. Stuffed nine moving members and a positioning member structure The position of the double-acting pneumatic cylinder and the connecting member connecting member is symmetrical with respect to the position of the double-acting pneumatic cylinder driving connecting member, and the outer side of the connecting member is slightly gated. The inner side is provided with a damper; the pusher portion is disposed adjacent to the drive positioning portion, and is composed of a wheeled die holder and a sliding push block, and the inner side of the transport die base is formed a sliding guide is provided, and a sliding rail pushing block is disposed adjacent to the positioning member and adjacent to the guiding sliding system, and the sliding rail pushing block comprises a pair of symmetrical front and rear push plates and is disposed on the rear push plate. Forming a set of resetting adjustment groups, and the inner side of the front and rear push plates forms a guide slip with the same aspect on the transport mold base. The reset adjustment set includes a slippery slip, the slip The inside system is formed with an accommodation space. And a magazine is formed in the accommodating space, and the slider and the spring are respectively disposed by a rod; the test portion is disposed in front of the pushing portion, and comprises a test mold base and a substrate. The test die holder corresponds to the push-pull block of the 1291556 portion, and the corresponding test pins are respectively connected to the test die; and the substrate is connected to the test die and is on the substrate. One side of the system is provided with a signal transmitting end connected to the test system. 2. The pushing mechanism of the L automatic testing machine according to the scope of the patent application, wherein the 1C chip is introduced from the top to the top. The pushing mechanism is mounted on the slide rail by the clamping member Ic. 3. According to the first item of the patent application scope 所述之iC自動測試機之推送機 構，其中，該滑轨推塊前、後推板係可呈工型態樣。 所述之1C自動測試機之推送機 匈之導/腎執係可形成可供Ic導 4 ·依據專利申請範圍第1項 構’其中，該滑執推塊内 滑之態樣。In the push mechanism of the iC automatic test machine, the front and rear push plates of the slide rail push block can be in a work form. The 1C automatic test machine pusher Hungarian guide / kidney system can be formed for Ic guide 4 · According to the scope of patent application No. 1 structure, wherein the slide push block slides inside. 21 1291556 七、指定代表圖： (一） 本案指定代表圖為：第（二）圖 (二） 本代表圖之元件符號簡單說明： 驅動定位部1 雙動氣壓缸100 導桿102 定位構件11 推送部2 導滑執200 前推板210 復歸調整組2 1 2 導滑執211 0 容置空間21 2 1 桿件2123 測試模座30 測試區3 0 0 測試系統32 驅動構件1 0 滑執推塊21 後推板211 導滑執2100 滑塊21 2 0 彈簧2122 測試部3 基板31 針腳30 1 訊號傳送端33 針腳4 連接構件101 彈簧元件103 定位擋塊11 021 1291556 VII. Designation of representative drawings: (1) The representative representative of the case is: (2) Figure (2) Brief description of the component symbols of the representative figure: Drive positioning part 1 Double-acting pneumatic cylinder 100 Guide rod 102 Positioning member 11 Push Part 2 Guide slip 200 Front push plate 210 Reset adjustment group 2 1 2 Guide slip 211 0 accommodating space 21 2 1 Rod 2123 Test dies 30 Test area 3 0 0 Test system 32 Drive member 1 0 Sliding push block 21 Rear push plate 211 Guide slide 2100 Slider 21 2 0 Spring 2122 Test part 3 Base plate 31 Pin 30 1 Signal transfer end 33 Pin 4 Connection member 101 Spring element 103 Positioning stop 11 0 1C晶片4 輸送模座2 0 41C wafer 4 transfer mold base 2 0 4