1287472 九、發明說明： 【發明所屬之技術領域】 本發明係有關於對於被除塵對象喷出單純之洗滌空氣、包含 以超音波頻率振動之超音波之空氣、或包含正·負離子之空氣（以下 總稱為洗滌空氣）之塵埃清淨器。 【先前技術】 0 對於在TFT(薄膜電晶體）液晶面板、PDP(電漿顯示面板）、或 LCD(液晶顯示器）等使用之玻璃基板或長的紙或薄膜等薄片等被除 塵對象（以下只稱為被除塵對象），利用除塵裝置除塵。 這種除塵裝置所含之塵埃清淨器具有一種功能，向被除塵對 象喷出洗滌空氣，令塵埃自被除塵對象飛散，和洗滌空氣一起吸入 飛散之塵埃。 以下按照圖說明先前技術之塵埃清淨器。圖10係先前技術之 埃清淨器之立體外觀圖。圖11係先前技術之塵埃清淨器之剖面 圖。 塵埃清淨器10如圖10所示，包括清淨器本體110和缝隙本 體120，在本清淨器本體110之下侧設置縫隙本體120。 清淨器本體110如圖11所示，由空氣吸入室111 (VI)、空氣 喷出室112(P)以及空氣吸入室113(V2)排列而成。空氣吸入室111、 113和圖上未示之吸氣泵連接，而空氣喷出室112和圖上未示之送 風泵連接。 2146-7269-PF 5 •1287472 空氣吸入室111、空氣喷出室112以及空氣吸入室113各自包 括吸入通風孔114、喷出通風孔115以及吸入通風孔116。 縫隙本體120如面向被除塵對象G般形成凹面121、平面122 以及凹面123，在本凹面121形成吸入縫隙124，在平面122形成喷 出缝隙125，在凹面123形成吸入縫隙126。塵埃清淨器10之吸入 通風孔114、喷出通風孔115以及吸入通風孔116各自和缝隙本體 120之吸入缝隙124、喷出缝隙125以及吸入缝隙126連通。 赢 在這種塵埃清淨器10，自喷出缝隙125噴出洗滌空氣，令被 除塵對象G表面之塵埃浮游於塵埃清淨器10和被除塵對象G之間之 空間。同時，用喷出缝隙125之前後之吸入缝隙124、126和洗滌空 氣一起吸入浮游之塵埃而除去。 又，在這種塵埃清淨器之別的先前技術上，例如也已知係曰 本專利公開公報之特開平H-104586號公報等。 近年來，要求除塵性能增大。因此，洗滌空氣之喷出量及吸 t量增大或在包含超音波之洗滌空氣之情況超音波之音壓之增加等 有效，但是在此情況，都有噪音變大之問題，要求在抑制噪音下令 提高除塵性能。又，也要求要確實的除去飛散之塵埃。 因此，為解決上述之問題點，本發明之目的在於提供一種塵 埃清淨器，用簡單之構造可同時抑制噪音及提高除塵性能。 【發明内容】 為解決上述之課題，申請專利範圍第1項之種塵埃清淨器， 2146-7269-PF 6 1287472 包括清淨器本體，具有至少各一個之空氣吸入室及空氣喷出室；缝 隙本體’裝在清淨器本體，包括和空氣喷出室連通之線狀之噴出縫 隙及和空氣吸入室連通之線狀之吸入縫隙；以及蓋，在缝隙本體安 裝成覆盍縫隙本體之外側部；其特徵在於··經由和空氣喷出室連通 之線狀之喷出縫隙向基板表面喷出洗滌空氣，經由和空氣吸入室連 通之線狀之吸入縫隙吸入飛散之塵埃。 又申叫專利範圍第2項之發明之塵埃清淨器係在申請專利 範圍第1項之塵埃清淨器，在該蓋和縫隙本體之間形成緩衝空間。 又，申請專利範圍第3項之發明之塵埃清淨器係在申請專利 範圍第2項之塵埃清淨器，使該空氣吸人室之洗條空氣之吸入量比 來自該空氣喷出室之洗滌空氣之喷出量多，將緩衝空間内保持相對 於外部空間低壓。 又，申請專利範圍第4項之發明之塵埃清淨器係在申請專利 粑圍第1至3項中任-項之塵埃清淨器，該除塵裝置沿著基板搬運 •向排列的配置空氣嘴出室和隔著空氣喷出室之2個空氣吸入室。 又’申請專利範圍第5項之發明之塵埃清淨器係在申請專利 範圍第W項之其中一項之塵埃清淨器，在基板之表背一 個一組配置該除塵裝置。 又’申請專利範圍第6項之發明之塵埃清淨器係奸請專利 範圍第1至5項中任-項之塵埃清淨器，該喷出缝隙傾斜成喷出方 向和基板搬運方向反方向。 右依據以上所示之本發明，可提供用簡單之構造同時抑制噪1287472 IX. OBJECTS OF THE INVENTION: 1. Field of the Invention The present invention relates to air that emits pure washing air to a dust-removing object, includes ultrasonic waves that vibrate at ultrasonic frequencies, or air containing positive and negative ions (below) A dust cleaner commonly referred to as scrubbing air). [Prior Art] 0 For dust-removing objects such as glass substrates used in TFT (thin-film transistor) liquid crystal panels, PDP (plasma display panel), or LCD (liquid crystal display), or sheets such as long paper or film (the following only It is called dust-removing object), and dust is removed by a dust removal device. The dust cleaner included in the dust removing device has a function of ejecting the washing air to the object to be dusted, causing the dust to fly from the object to be dusted, and sucking in the scattered dust together with the washing air. The prior art dust cleaner will be described below in accordance with the drawings. Figure 10 is a perspective view of a prior art eliminator. Figure 11 is a cross-sectional view of a prior art dust cleaner. As shown in Fig. 10, the dust cleaner 10 includes a cleaner body 110 and a slit body 120, and a slit body 120 is provided on the lower side of the cleaner body 110. As shown in Fig. 11, the cleaner body 110 is formed by arranging an air suction chamber 111 (VI), an air ejection chamber 112 (P), and an air suction chamber 113 (V2). The air suction chambers 111, 113 are connected to an air suction pump (not shown), and the air ejection chamber 112 is connected to a blower (not shown). 2146-7269-PF 5 • 1287472 The air suction chamber 111, the air ejection chamber 112, and the air suction chamber 113 each include a suction vent hole 114, a discharge vent hole 115, and a suction vent hole 116. The slit main body 120 forms a concave surface 121, a flat surface 122, and a concave surface 123 as opposed to the dust removing object G. A suction slit 124 is formed in the concave surface 121, a discharge slit 125 is formed in the flat surface 122, and a suction slit 126 is formed in the concave surface 123. The suction vent 114, the discharge vent 115, and the suction vent 116 of the dust cleaner 10 are each in communication with the suction slit 124, the discharge slit 125, and the suction slit 126 of the slit body 120. In the dust cleaner 10, the washing air is ejected from the discharge slit 125, so that the dust on the surface of the dust-removing object G floats in the space between the dust cleaner 10 and the dust-removed object G. At the same time, the suction slits 124, 126 and the washing air before and after the discharge slit 125 are sucked together to remove the floating dust. Further, in the prior art of such a dust cleaner, for example, Japanese Laid-Open Patent Publication No. H-104586, and the like are also known. In recent years, dust removal performance has been required to increase. Therefore, the amount of washing air and the amount of sucking air are increased or the sound pressure of the ultrasonic wave is increased in the case of the ultrasonic air containing the ultrasonic wave, but in this case, there is a problem that the noise becomes large, and the suppression is required. Noise is ordered to improve dust removal performance. Also, it is required to remove the scattered dust. Therefore, in order to solve the above problems, it is an object of the present invention to provide a dust cleaner which can simultaneously suppress noise and improve dust removal performance with a simple structure. SUMMARY OF THE INVENTION In order to solve the above problems, the dust cleaner of the first aspect of the patent application, 2146-7269-PF 6 1287472, includes a cleaner body having at least one air suction chamber and an air ejection chamber; 'Installed in the cleaner body, comprising a linear ejection slit communicating with the air ejection chamber and a linear suction slit communicating with the air suction chamber; and a cover mounted on the outer side of the slit body at the slit body; The feature is that the washing air is sprayed onto the surface of the substrate through a linear discharge slit that communicates with the air ejection chamber, and the scattered dust is sucked through the linear suction slit that communicates with the air suction chamber. Further, the dust cleaner of the invention of claim 2 is the dust cleaner of the first item of the patent application, and a buffer space is formed between the cover and the gap body. Further, the dust cleaner of the invention of claim 3 is the dust cleaner of the second application of the patent scope, so that the suction air of the air suction chamber is higher than the washing air from the air ejection chamber. The amount of discharge is large, and the buffer space is kept low relative to the external space. Further, the dust cleaner of the invention of claim 4 is a dust cleaner according to any one of items 1 to 3 of the patent application, and the dust removing device is disposed along the substrate and arranged to the air nozzle. And two air suction chambers that are ejected from the room through the air. Further, the dust cleaner of the invention of claim 5 is a dust cleaner of one of the W items of the patent application, and the dust removing device is disposed in a group on the back of the substrate. Further, the dust cleaner of the invention of the invention of claim 6 is a dust cleaner according to any one of the items 1 to 5, wherein the discharge slit is inclined so that the discharge direction and the substrate conveyance direction are opposite to each other. According to the invention as shown above, it is possible to provide simultaneous suppression of noise with a simple configuration
2146-7269-PF 1287472 音及提高除塵性能之塵埃清淨器。 【實施方式】 邊參照圖邊說明本發明之最佳實施形態。圖Γ係塵埃清淨器 之立體外觀圖，圖2係塵埃清淨器之底視圖，圖3係塵埃清淨器之 剖面圖。 本圖3之塵埃清淨器之剖面圖係圖2之卜以剖面圖。此外， .有和先前技術部分重複之構造，但是為了純，賦與相同之符號說 明之。 塵埃清淨器100如圖1或圖2所示，包括清淨器本體11〇、縫 隙本體120以及Μ 130。在本清淨器本體11〇之下侧設置缝隙本體 120，又，在清淨器本體110之下侧外侧部安裝蓋13〇。又，如後述 之圖3所示，形成清淨器本體11〇、縫隙本體12〇、蓋13〇以及利用 被除塵對象G表面覆蓋之緩衝空間140。 Φ 清淨器本體110如圖3所示，由空氣吸入室Η〗（VI)、空氣喷 出至112(Ρ)以及空氣吸入室U3(V2)排列而成。空氣吸入室hi、 113和圖上未示之吸氣泵連接，而空氣喷出室112和圖上未示之送 風泵連接。 空氣吸入室111、空氣噴出室112以及空氣吸入室113各自包 括吸入通風孔114、喷出通風孔U5以及吸入通風孔U6。 縫隙本體120如面向被除塵對象g般形成凹面、平面122 以及凹面123,還在本凹面121形成吸入縫隙124,在平面122形成 2146-7269-PF 8 1287472 噴出縫隙125,在凹面123形成吸入縫隙126。為了使噴出之洗滌空 氣之流量變成定值而形成平面122。為了使吸入之洗滌空氣易於流 動而形成凹面121、123。塵埃清淨器1〇〇之吸入通風孔114、喷出 通風孔115以及吸入通風孔116各自和縫隙本體12〇之吸入縫隙 U4、噴出縫隙125以及吸入缝隙ι26連通。 盍130在本形態係具有口狀之開口部之角筒體。此外，關於 盍130有各種形態，但是係至少在縫隙本體12〇和蓋13〇之間可形 •成緩衝空間140的即可。 緩衝空間140係在清淨器本體11 〇、縫隙本體12〇以及蓋13〇 之間形成之口狀之空間。本緩衝空間14〇如圖3所示，在使用塵埃 清淨器100時還成為和被除塵對象G所夹之空間。緩衝空間14〇經 由在被除塵對象G和蓋130之間形成之間隙部141和外界連通。此 外’緩衝空間140只要係至少包覆縫隙本體12〇之周圍之空間即可， 未限定為口狀之空間。 # 接著，說明這種塵埃清淨器100之使用方法。在塵埃清淨器 100’自噴出缝隙125噴出洗滌空氣，令被除塵對象G表面之塵埃浮 游於塵埃清淨器1〇〇和被除塵對象G之間之空間。同時，用噴出縫 隙125之前後之吸入縫隙124、126吸入洗滌空氣，和浮游之塵埃一 起除去。此外，空氣吸入室lu、113之洗滌空氣之總吸入量比來自 空氣喷出室112之洗滌空氣之噴出量多。 在這種塵埃清淨器1〇〇，輸出洗滌空氣（單純之洗滌空氣、包 含以超音波頻率振動之超音波之空氣、或包含正·負離子之空氣）。 2146-7269-PF 9 •1287472 這種洗條空氣在喷出時發生振動而有噪音問題。尤其，在包含超音 波之洗m情況’超音波振動所引起之噪音顯著。可是，這些 振動經由緩触間⑽到達蓋130，也因蓋⑽令超音波所引起之 振動衰減’到達作業員之噪音變少。又，因間隙部i4i係窄的間隙， 其大部分通過蓋13〇，在這一點也到達作業員之噪音變少。 匕卜、、’由間隙部141和外部空間連通，但是因設計成在蓋 13〇内使洗滌工氣之吸人量比喷出量多，緩衝空間⑽内相對於外 #部空間保持低壓，在間隙部141自外部空間向内部之缓衝空間吸 乱。邊參照圖邊說明這一點。圖4、圖5以及圖6係各自說明塵埃 清淨器之洗滌空氣之流程之說明圖。 在基板搬運方向，如圖4所示，利用前後之吸入縫隙124、126 吸入自喷出縫隙125出來之洗膝空氣。又，自緩衝空間14〇或間隙 部141也引入空氣，利用吸入缝隙124、126吸入。因此，空氣不會 自緩衝空間140向外界流動。又，因吸入量多，緩衝空間14〇内保 φ充分之低壓。 其次，在喷出缝隙125之橫方向，如圖5所示，發生自噴出 縫隙125出來之洗滌空氣之一部分向橫方向流動之喷漏，空氣也自 外邛二間經由間隙部141流入低壓之緩衝空間14〇，在緩衝空間14〇 内空氣碰撞，因流入緩衝空間14〇内，洗滌空氣不會流出。 接者在及入縫隙124、126之橫方向，如圖6所示，利用吸 入縫隙124、126吸入。又，自緩衝空間14〇或間隙部141也引入空 氣，利用吸入缝隙124、126吸入。因而，洗滌空氣不會自間隙部 2146-7269-PF 10 • 1287472 141流出。 於是，間隙部141在任何位置空氣都自外部空間流入蓋130 内，因而，利用洗滌空氣飛散之塵埃不會自緩衝空間140内跑出來， 可利用吸入縫隙12 4、12 6吸入塵埃。 於是，因利用蓋130可形成緩衝空間140，用簡單之構造可同 時抑制噪音及提高除塵性能。2146-7269-PF 1287472 Sound and dust cleaner for improving dust removal performance. [Embodiment] A preferred embodiment of the present invention will be described with reference to the drawings. Fig. 2 is a bottom view of the dust cleaner, Fig. 2 is a bottom view of the dust cleaner, and Fig. 3 is a sectional view of the dust cleaner. The cross-sectional view of the dust cleaner of Fig. 3 is a cross-sectional view of Fig. 2. In addition, there are configurations that are repeated with the prior art, but for the sake of purity, the same symbols are used. As shown in Fig. 1 or 2, the dust cleaner 100 includes a cleaner body 11A, a slit body 120, and a weir 130. A slit body 120 is provided on the lower side of the cleaner body 11A, and a cover 13b is attached to the lower outer side portion of the cleaner body 110. Further, as shown in Fig. 3 to be described later, the cleaner body 11A, the slit body 12A, the cover 13A, and the buffer space 140 covered by the surface of the dust-removing object G are formed. Φ The cleaner body 110 is formed by arranging an air suction chamber (VI), air to 112 (Ρ), and an air suction chamber U3 (V2) as shown in Fig. 3 . The air suction chambers hi, 113 are connected to an air suction pump (not shown), and the air ejection chamber 112 is connected to a blower pump (not shown). The air suction chamber 111, the air ejection chamber 112, and the air suction chamber 113 each include a suction vent hole 114, a discharge vent hole U5, and a suction vent hole U6. The slit body 120 forms a concave surface, a flat surface 122, and a concave surface 123 as opposed to the dust removing object g, and also forms a suction slit 124 in the concave surface 121, and forms a 2146-7269-PF 8 1287472 ejection slit 125 in the plane 122 to form a suction slit in the concave surface 123. 126. The plane 122 is formed in order to make the flow rate of the sprayed washing air constant. Concave surfaces 121, 123 are formed in order to facilitate the inhalation of the washing air. The suction vent 114, the discharge vent 115, and the suction vent 116 of the dust cleaner 1 are each in communication with the suction slit U4, the discharge slit 125, and the suction slit ι26 of the slit body 12. In this embodiment, the crucible 130 has a rectangular tubular body having a mouth-shaped opening. Further, the cymbal 130 has various forms, but may be formed into a buffer space 140 at least between the slit body 12A and the cover 13A. The buffer space 140 is a space formed in a mouth shape between the cleaner body 11 〇, the slit body 12 〇, and the cover 13 。. As shown in Fig. 3, the buffer space 14 is also a space sandwiched by the dust removing object G when the dust cleaner 100 is used. The buffer space 14 communicates with the outside through a gap portion 141 formed between the dust-removed object G and the cover 130. Further, the buffer space 140 is not limited to a space of a mouth as long as it covers at least the space around the slit body 12A. # Next, the method of using the dust cleaner 100 will be described. The dust cleaner 100' ejects the washing air from the discharge slit 125, so that the dust on the surface of the dust-removing object G floats in the space between the dust cleaner 1 and the dust-removed object G. At the same time, the washing air is sucked in by the suction slits 124, 126 before and after the discharge slit 125, and is removed together with the floating dust. Further, the total suction amount of the washing air from the air suction chambers lu, 113 is larger than the amount of the washing air from the air ejection chamber 112. In this dust cleaner, the washing air (simple washing air, air containing ultrasonic waves vibrating at a supersonic frequency, or air containing positive and negative ions) is output. 2146-7269-PF 9 •1287472 This kind of strip air vibrates and has noise problems when it is ejected. In particular, in the case of washing with ultrasonic waves, the noise caused by ultrasonic vibration is remarkable. However, these vibrations reach the cover 130 via the slow contact chamber (10), and the vibration caused by the ultrasonic waves by the cover (10) is attenuated. Further, since the gap portion i4i is a narrow gap, most of the gaps pass through the cover 13 and the noise of the worker is also reduced. The buffer portion 141 is connected to the external space. However, since the suction amount of the washing process is larger than the discharge amount in the cover 13 ,, the buffer space (10) is kept low relative to the outer space. The gap portion 141 is occluded from the external space to the internal buffer space. This is illustrated with reference to the figure. 4, 5, and 6 are explanatory views each illustrating a flow of washing air of the dust cleaner. In the substrate conveyance direction, as shown in FIG. 4, the knee-washing air from the discharge slit 125 is sucked by the front and rear suction slits 124, 126. Further, air is also introduced from the buffer space 14A or the gap portion 141, and is sucked by the suction slits 124, 126. Therefore, air does not flow from the buffer space 140 to the outside. Further, due to the large amount of suction, the buffer space 14 〇 is sufficiently low. Next, in the lateral direction of the discharge slit 125, as shown in Fig. 5, a portion of the washing air emerging from the discharge slit 125 flows in the lateral direction, and air flows from the outer space to the low pressure through the gap portion 141. When the buffer space is 14 inches, air collides in the buffer space 14〇, and the washing air does not flow out due to flowing into the buffer space 14〇. The receiver is sucked in the lateral direction of the slits 124 and 126 by the suction slits 124 and 126 as shown in Fig. 6 . Further, air is also introduced from the buffer space 14A or the gap portion 141, and is sucked by the suction slits 124, 126. Therefore, the washing air does not flow out from the gap portion 2146-7269-PF 10 • 1287472 141. Then, the air in the gap portion 141 flows into the cover 130 from the external space at any position. Therefore, the dust scattered by the washing air does not escape from the buffer space 140, and the dust can be sucked in by the suction slits 12 4 and 12 6 . Thus, since the buffer space 140 can be formed by the cover 130, the noise can be suppressed and the dust removing performance can be improved with a simple configuration.
接著，邊參照圖邊說明別的形態。圖7係別的形態之塵埃清 淨器之剖面圖。此外，對於和前面所說明之形態重複之構造賦與相 同之符號，而且省略重複之說明。 在本形態，在被除塵對象G之表背兩面側以兩個一組相向的 配置圖2所示之塵埃清淨器100。在這種構造在被除塵對象G之表 背兩面可除塵，而且由於上述之理由，可同時降低噪音及提高除塵 性能。 接著，邊參照圖邊說明別的形態。圖8係別的形態之塵埃清 f器之剖面圖。此外，對於和前面所說明之形態重複之構造賦與相 同之符號，而且省略重複之說明。在本形態，和圖3所示之形態幾 乎無相異點，但是在圖3所示之形態縫隙本體120之噴出缝隙125 相對於被除塵對象G在大致垂直方向形成，但是在圖8所示之形態， 缝隙本體120之喷出缝隙125’傾斜成喷出方向和基板搬運方向a 反方向。在這種構造，具有被除塵對象G進入塵埃清淨器100時令 洗滌空氣之流動安定之優點。利用本塵埃清淨器100除塵之情況， 自空氣喷出室112(P)往空氣吸入室lll(Vl)之流量增加，部分空氣 2146-7269-PF 11 1287472 ♦自外界叙之空氣碰撞後流往緩衝空間⑽，洗鲦空氣不會自蓋 漏出因而，在被除塵對象G之表面可除塵，*且由於上述之 理由，可同時減少噪音及提高除塵性能。 接著’邊參邊說明別的形態。圖9係別的形態之塵埃清 淨器之剖面圖。' 在本形態，如圖8所示，在被除塵對象G之表背兩面側以兩 •個組相向的配置缝隙本體120之噴出縫隙125，傾斜成噴出方向 和基板搬運方向&反方向之塵埃清淨器1〇〇。在這種構造在被除塵 對象G之表月兩面可除塵，而且由於上述之理由，可同時降低噪音 及提高除塵性能。 此外，本發明也有各種變形形態。例如，在圖7及圖9，在圖 上未示之搬運滾輪等之上搬運被除塵對象G，但是在此情況，利甩 在被除塵對象G之上面（上側之除塵裝置100)流動之空氣產生利用 儀^氏管效應之向上側之吸力，還利用在被除塵對象G之下面（下側之 除塵裝置100)流動之空氣產生利用文氏管效應之向下側之吸力，但 疋藉著調整成變成使向下側之吸力變大之文氏管效應之平衡，安定 的搬運被除塵對象G也可。 在此情況，藉著使下側之對除塵裝置1 〇 〇之吸入壓力（吸入量） 和上側之對除塵裝置100之吸入壓力（吸入量）變成相等，而且使下 % 側之來自除塵裝置100之喷出壓力（喷出量）比上側之對除塵裝置 100之喷出壓力（喷出量）大，將下側之除塵裝置1〇〇利用文氏管效 2146-7269-PF 12 1287472 應之吸力設為比上側之除塵裝置100利用文氏管效應之吸力大，使 得賦與將基板壓在圖上未示之搬運滾輪之力也可。 又，藉著使下側之來自除塵裝置100之喷出壓力（噴出量）和 上侧之來自除塵裝置100之喷出壓力（喷出量）變成相等，而且使下 側之對除塵裝置100之吸入壓力（吸入量）比上側之對除塵裝置100 之吸入壓力（吸入量）大，將下側之除塵裝置100利用文氏管效應之 吸力設為比上側之除塵裝置100利用文氏管效應之吸力大，使得賦 0與將基板壓在搬運滾輪之力也可。 又，藉著將下側之自除塵裝置1〇〇至被除塵對象G之背面為 止之間隔調整成比上側之自除塵裝置1〇〇至被除塵對象G之表面為 止之間隔小，將下側之除塵裝置100利用文氏管效應之吸力設為比 上侧之除塵裝置1〇〇利用文氏管效應之吸力大，使得賦與將基板壓 在搬運滾輪之力也可。 在這種除塵裝置上使得更提高使用方便性也可。 【圖式簡單說明】 圖1係塵埃清淨器之立體外觀圖。 圖2係塵埃清淨器之底視圖。 圖3係塵埃清淨器之剖面圖。 圖4係說明塵埃清淨器之洗滌空氣之流程之說明圖。 圖5係說明塵埃清淨器之洗務空氣之流程之說明圖。 圖6係說明塵埃清淨器之洗滌空氣之流程之說明圖。Next, another form will be described with reference to the drawings. Figure 7 is a cross-sectional view of a dust cleaner of another form. Incidentally, the same reference numerals are given to the configurations overlapping with the above-described configurations, and the overlapping description will be omitted. In the present embodiment, the dust cleaner 100 shown in Fig. 2 is disposed on the front and back sides of the dust-removing object G in two groups. In this configuration, dust can be removed on both sides of the surface of the dust-removed object G, and for the above reasons, noise can be simultaneously reduced and dust removal performance can be improved. Next, another form will be described with reference to the drawings. Figure 8 is a cross-sectional view of a dust eliminator of another form. Incidentally, the same reference numerals are given to the configurations overlapping with the above-described configurations, and the overlapping description will be omitted. In this embodiment, the shape shown in FIG. 3 is almost the same, but the ejection slit 125 of the slit body 120 shown in FIG. 3 is formed in a substantially vertical direction with respect to the dust-removed object G, but is shown in FIG. In the form, the discharge slit 125' of the slit body 120 is inclined so that the discharge direction and the substrate conveyance direction a are opposite directions. In this configuration, there is an advantage that the flow of the washing air is stabilized when the dust removing object G enters the dust cleaner 100. When the dust is removed by the dust cleaner 100, the flow rate from the air ejection chamber 112 (P) to the air suction chamber 111 (Vl) increases, and part of the air 2146-7269-PF 11 1287472 ♦ flows from the outside air collision In the buffer space (10), the washing air does not leak out from the cover, so that the surface of the dust-removing object G can be dusted, and for the above reasons, the noise can be simultaneously reduced and the dust removing performance can be improved. Then, the other side is explained by the side. Figure 9 is a cross-sectional view of a dust cleaner of another form. In this embodiment, as shown in FIG. 8, the discharge slits 125 in which the slit bodies 120 are disposed facing each other on the front and back sides of the dust-removing object G are inclined in the discharge direction and the substrate conveyance direction & Dust cleaner 1 〇〇. In this configuration, dust can be removed on both sides of the surface of the dust-removing object G, and for the above reasons, noise can be simultaneously reduced and dust removal performance can be improved. Further, the present invention also has various modifications. For example, in FIG. 7 and FIG. 9, the dust-removing object G is conveyed on the conveyance roller or the like which is not shown in the figure, but in this case, the air flowing from the top of the dust-removing object G (the upper dust-removing device 100) flows. The suction force on the upper side utilizing the effect of the instrument is generated, and the suction of the lower side of the venturi effect is generated by the air flowing under the dust-removing object G (the dust removing device 100 on the lower side), but It is adjusted to become a balance of the venturi effect which increases the suction force of the lower side, and it is also possible to carry out the stable dust removal object G. In this case, the suction pressure (intake amount) of the dust removing device 1 on the lower side and the suction pressure (intake amount) of the dust removing device 100 on the upper side are made equal, and the dust removing device 100 from the lower side is made The discharge pressure (discharge amount) is larger than the discharge pressure (discharge amount) of the dust collector 100 on the upper side, and the dust removal device 1 on the lower side uses the Venturi tube effect 2146-7269-PF 12 1287472. The suction force is set to be larger than the suction force of the dust removing device 100 on the upper side by the venturi effect, so that the force of the substrate to be pressed against the conveyance roller (not shown) may be applied. In addition, the discharge pressure (discharge amount) from the dust removing device 100 on the lower side and the discharge pressure (discharge amount) from the dust removing device 100 on the upper side are made equal, and the lower side dust removing device 100 is placed on the lower side. The suction pressure (inhalation amount) is larger than the suction pressure (intake amount) of the upper dust removing device 100, and the suction force of the lower dust removing device 100 by the venturi effect is set to be higher than that of the upper dust removing device 100 by the venturi effect. The suction force is large, so that the assignment of 0 and the force of pressing the substrate to the conveyance roller is also possible. In addition, the interval from the lower side of the dust removing device 1 to the back surface of the dust removing target G is adjusted to be smaller than the interval from the dust removing device 1A on the upper side to the surface of the dust removing target G, and the lower side is provided. The suction function of the dust removing device 100 by the venturi effect is set to be larger than the suction force of the upper side dust removing device 1 by the venturi effect, so that the force for pressing the substrate against the conveying roller can be imparted. In such a dust removing device, it is also possible to further improve the usability. [Simple description of the drawing] Figure 1 is a three-dimensional appearance of the dust cleaner. Figure 2 is a bottom view of the dust cleaner. Figure 3 is a cross-sectional view of the dust cleaner. Fig. 4 is an explanatory view showing the flow of washing air of the dust cleaner. Fig. 5 is an explanatory view showing the flow of the cleaning air of the dust cleaner. Fig. 6 is an explanatory view showing the flow of washing air of the dust cleaner.
2146-7269—PF •1287472 圖7係別的形態之塵埃清淨器之剖面圖。 圖8係別的形態之塵埃清淨器之剖面圖。 圖9係別的形態之塵埃清淨器之剖面圖。 圖10係先前技術之塵埃清淨器之立體外觀圖。 圖11係先前技術之塵埃清淨器之剖面圖。 【主要元件符號說明】 100 塵埃清淨器 110 清淨器本體 120 缝隙本體 130 蓋 140 緩衝空間 2146-7269-PF 142146-7269—PF • 1287472 Figure 7 is a cross-sectional view of a dust cleaner of another form. Figure 8 is a cross-sectional view of a dust cleaner of another form. Figure 9 is a cross-sectional view of a dust cleaner of another form. Figure 10 is a perspective view of a prior art dust cleaner. Figure 11 is a cross-sectional view of a prior art dust cleaner. [Main component symbol description] 100 Dust cleaner 110 Cleaner body 120 Slot body 130 Cover 140 Buffer space 2146-7269-PF 14