1282869 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種光學膜層厚度均勻性的監測方 法，且特別是有關於一種彩色濾光片厚度均勻性的1測方 法。 【先前技術】 近年來光電相關技術不斷地推陳出新，加上數位化時 代的到來，進而推動了液晶顯示器市場的蓬勃發展。液晶 顯示器具有高晝質、體積小、重量輕、低驅動電壓、與低 消耗功率專優點’因此被廣泛應用於個人數位助理（pda)、 行動電話、攝錄放影機、筆記型電腦、桌上型顯示器、車 用顯示器、及投影電視等消費性通訊或電子產品，並逐漸 取代陰極射線管而成為顯示器的主流。 液晶顯示器（Liquid Crystal Display ; LCD)是一種利用 液晶特性來達到顯示效果的顯示裝置，液晶顯示面板之所 以能夠彩色化，主要是來自於彩色濾光片。透過驅動晶片 (Integrated Circuit ; 1C)來改變液晶面板之上下基板間的壓 差’液晶分子便會排排站立或呈扭轉狀，形成閘門來選擇 背光源光線穿透與否，因而產生畫面。但這樣僅有透光程 度的差別，所產生的顏色只有黑、白兩種顏色，若要形成 彩色的話，需要靠紅（R)、綠（G)、藍（B)三種光源組合，因 此具有紅、綠、藍三色之彩色層的彩色濾光片便成為液晶 顯示面板的關鍵零組件。 苐1圖係繪示一液晶顯示裝置部分剖面示意圖。如第1 1282869 圖所示，上基板1、下基板2以及位於其間的液晶層3構成 液晶顯示裝置。上基板1分別包括透明基板/遮光層/彩色滤 光片/透明電極/上配向層，其中透明基板10可以為玻璃， 而彩色濾光片14、16與18 —般是由紅（R)、綠（G)、藍（B) 三原色來構成。在彩色濾光片14、16與18間有遮光層12， 用以防止光線從彩色濾光片14、16與18之間穿透以及避 免混色，之後再形成透明電極20，例如銦錫氧化膜（IT〇 Film)覆蓋彩色濾光片14、16與18以製作彩色渡光器結 構，而上配向層22則覆蓋透明電極20。下基板2至少包括 一透明基板30及透明電極32及一下配向層34。液晶層3 則位於上配向層22與下配向層34之間所形成的晶盒間隙 (Cell Gap)。晶盒間隙的高度d會直接影響到液晶顯示器 之液晶排列以及免度之品質’因此’晶盒間隙的高度d的 均勻性非常重要。 由於晶盒間隙的南度d的均勻性對於液晶顯示器之液 曰曰排列以及冗度之品質非常重要。然而，影響晶盒間隙的 高度d的均勻性最大的原因在於彩色濾光片中紅濾光片、 綠濾光片和藍濾光片的厚度均勻性，彩色濾光片中紅濾光 片、綠濾光片和藍濾光片的厚度各有一容忍厚度區間，製 程中會將紅濾光片、綠濾光片和藍濾光片的厚度調整到位 於各該容忍厚度區間内，以符合顯示面板規格。習知係使 用破壞性的監測，將液晶顯示單元切片後再以電子顯微鏡 觀察i測，這樣獲得的數據相當準確，但卻無法及時監測， 被切片後之顯示面板便無法被修復，而且監測成本昂貴。 因此，如何能簡單即時監測紅、綠和藍各濾光片和各濾光 7 1282869 片間厚度㈣自性就是—件料重要的工作 【發明内容】 一種光學膜層厚度均 綠和藍各色濾光片間 ’本發明的目的在提供 句性的監測方法’可以即時監測紅、 尽度的均勻性。 本發明的另1282869 IX. Description of the Invention: [Technical Field] The present invention relates to a method for monitoring the uniformity of thickness of an optical film layer, and more particularly to a method for measuring the uniformity of thickness of a color filter. [Prior Art] In recent years, optoelectronic related technologies have been continuously introduced, and the arrival of the digital generation has promoted the vigorous development of the liquid crystal display market. The liquid crystal display has high quality, small size, light weight, low driving voltage, and low power consumption. Therefore, it is widely used in personal digital assistants (PDAs), mobile phones, camcorders, notebook computers, and desks. Consumer communications or electronic products such as display displays, automotive displays, and projection TVs have gradually replaced cathode ray tubes and become the mainstream of displays. A liquid crystal display (LCD) is a display device that uses liquid crystal characteristics to achieve a display effect. The liquid crystal display panel can be colored, mainly from a color filter. The driving circuit (Integrated Circuit; 1C) is used to change the voltage difference between the upper and lower substrates of the liquid crystal panel. The liquid crystal molecules are arranged in a row or twisted shape to form a gate to select whether the backlight light penetrates or not, thereby generating a picture. However, there is only a difference in the degree of light transmission, and the color produced is only black and white. If color is to be formed, it needs to be combined with three kinds of light sources of red (R), green (G), and blue (B). The color filters of the red, green and blue color layers become the key components of the liquid crystal display panel. Figure 1 is a partial cross-sectional view showing a liquid crystal display device. As shown in Fig. 1282829, the upper substrate 1, the lower substrate 2, and the liquid crystal layer 3 interposed therebetween constitute a liquid crystal display device. The upper substrate 1 includes a transparent substrate/light shielding layer/color filter/transparent electrode/upper alignment layer, respectively, wherein the transparent substrate 10 may be glass, and the color filters 14, 16 and 18 are generally made of red (R), Green (G), blue (B) are composed of three primary colors. A light shielding layer 12 is disposed between the color filters 14, 16 and 18 to prevent light from penetrating between the color filters 14, 16 and 18 and to avoid color mixing, and then to form a transparent electrode 20, such as an indium tin oxide film. (IT〇Film) covers the color filters 14, 16 and 18 to make a color irradiator structure, and the upper alignment layer 22 covers the transparent electrode 20. The lower substrate 2 includes at least a transparent substrate 30 and a transparent electrode 32 and a lower alignment layer 34. The liquid crystal layer 3 is located in a cell gap (Cell Gap) formed between the upper alignment layer 22 and the lower alignment layer 34. The height d of the cell gap directly affects the liquid crystal alignment and the quality of the liquid crystal display. Therefore, the uniformity of the height d of the cell gap is very important. The uniformity of the southness d of the cell gap is very important for the liquid crystal display and the quality of the redundancy. However, the reason why the uniformity of the height d which affects the gap of the cell is the largest is the thickness uniformity of the red filter, the green filter and the blue filter in the color filter, the red filter in the color filter, The thickness of the green filter and the blue filter each have a tolerance thickness interval, and the thickness of the red filter, the green filter and the blue filter are adjusted to be within the tolerance thickness range to conform to the display. Panel specifications. The conventional system uses destructive monitoring to slice the liquid crystal display unit and then observe it with an electron microscope. The data obtained is quite accurate, but it cannot be monitored in time. The sliced display panel cannot be repaired, and the monitoring cost. expensive. Therefore, how to monitor the red, green and blue filters and each filter 7 1282869 in a simple and instant manner (4) Self-sufficiency is an important work of the material [Invention] A thickness of the optical film is green and blue The inter-photograph 'the purpose of the present invention is to provide a sentence-based monitoring method' that can instantly monitor the uniformity of red and end. Another aspect of the invention
& 目的在提供一種光學膜層厚度均勻性的 皿測方法，可以即時監測紅、綠和藍各色濾 的均勻性。 + & ^本發明的又一目的在提供一種光學膜層厚度均勻性的 監測方法，可㈣紅、綠和藍各色瀘、光片間厚度的均句性 做非破壞性的監測。 本發明的再一目的在提供一種光學膜層厚度均勻性的 監測方法，可以對紅、綠和藍色濾光片本身厚度的均勻性 做非破壞性的監測。 根據本發明之上述目的，本發明之一較佳實施例提出 一種光學膜層厚度均勻性的監測方法。由於不同顏色的渡 光片對不同波長的可見光的穿透率（吸收度）並不相同， 且偏極化光在不同波長部分對同一角度光柵也會有不同穿 透率（吸收度）。因此，先以分光設備產生一全頻譜的第一 角度偏極化可見光，第一角度例如是上配向膜的配向角度 增減45度偵測接收穿透光，投射穿過一彩色濾光片，偵測 接收器以一第一角度的偏光角度偵測接收穿透光強度和各 對應波長做圖得到一第一曲線。接著，將偵測接收器的第 1282869 一角度偏光角度旋轉π / 4 ’再偵測接收穿透光，以穿透光 強度和各對應波長做圖得到一第二曲線。 第一曲線和第二曲線應為平滑曲線，若第一曲線和第 二曲線在相近波長處產生不連續的現象，例如在波長540 奈米至560奈米處產生不連續的現象，則可判定紅渡光片 的厚度與綠濾光片的厚度具有顯著的差異。 同樣的，亦可以使用分光設備選取單一色光對彩色淚 光片做全域掃瞄，根據彩色濾光片上每一點的位置與該位 置的光吸收度做圖可知道單一色濾光片的厚度均勻度。當 線型出現波峰或波谷時，也就是該線型出現斜率為零或無 限大之部分時，即表示對應位置的膜層厚度太厚（薄）。 因此，運用本發明所揭露之光學膜層厚度均勻性的監 測方法具有下列優點，可用來做線上即時監測，而能針對 彩色濾光片上瑕疵快速的做出反應。另外，檢測的方法非 常簡便，無須製作待測樣品，使整個測試的成本大幅下降。 本發明所提供的光學膜層厚度均勻性的監測方法，不 只可以用在液晶顯示器的製程之上，亦可以用在彩色濾光 片的製程之上及有機電激發光顯示器（〇LED)及聚合物電 激發光顯㈣（PLED)的製程上。另外，藉由量測出彩色 濾光片膜層，更可以計算而得出液晶顯示裝置之晶盒間隙 的大小，而瞭解液晶顯示裝置之晶盒間隙的均勻度。 【實施方式】 請參照第2A圖，第2A圖係為無瑕疯之彩色滤光片部 分剖面示意圖。在-透明基板上具有-紅色濾光片202 1282869 和一綠色濾光片204，在兩者之間可選擇性設置一間隙物 206，以及一藍色濾光片2〇8，一般而言，晶盒間隙的高度 約與間隙物206的高度相當。在無瑕疵之彩色濾光片中， 紅色濾光片202、綠色濾光片204和藍色濾光片208的厚度 均位於各標準厚度容忍區間内。第2B圖係為具有瑕疵之彩 色濾光片部分剖面示意圖。在一透明基板21〇上具有一紅 色濾、光片212和一綠色濾光片214，在兩者之間可選擇性設 置一間隙物216，以及一藍色濾光片218，一般而言，晶盒 間隙的高度約與間隙物216的高度相當。在具有瑕疵之彩 色濾光片中，紅色濾光片212與綠色濾光片214及藍色濾 光片218的厚度不同且位於各標準厚度容忍區間之外，因 此，位於紅色濾光片212處的晶盒間隙與位於綠色濾光片 214和藍色濾光片218處之晶盒間隙的高度也因此而有顯 著的異常差異。在實際的例子中，此一不同色彩色濾光片 厚度間的差異會使不同晝素間晶盒間隙的高度的差異達1〇 〜30%，因而嚴重影響晝素在光學上的表現。 因此’在本實施例中，係運用分光放射輝度色度光度 光源測定器產生一全頻譜之偏極化角為第一角度之可見光 照射第2A圖中無瑕疵之彩色濾光片及第2B圖中具有瑕疵 之彩色濾光片。在彩色濾光片之上另外具有一配向層（未 繪示），配向層上具有一配向角度<9 (未標示），第一角度可 以為例如上配向膜的配向角度0加上45度。分光放射輝度 色度光度光源測定器中的光線接收器以一第一角度债測接 收穿透光，以穿透光強度和各對應波長做圖得到一第一曲 線。接著，將偵測接收器的第一角度旋轉冗/4，再偵測接 1282869 收穿透光’以穿透光強度和各對應波長做圖得到一第二曲 線。第3A圖及第3B圖係分別繪示無瑕疵之彩色濾光片及 具瑕疲之彩色濾光片之第一曲線及第二曲線。 請參見第3A圖，由於第2A圖中之彩色濾光片並無瑕 龜’故所得到的第一曲線300和第二曲線3〇2為一平滑曲 線。反觀第3B圖，第一曲線304和第二曲線306在量測光 線波長約540奈米至560奈米間均出現不連續的現象，因 此可知在紅色濾光片212與位於綠色濾光片214處的晶盒 間隙出現顯著的差異，經由計算可知位於紅光濾光片212 處之晶盒間隙比位於綠光濾光片214處之晶盒間隙多15 %。使用綠光的特徵波長550奈米和紅光特徵波長650奈 米掃過整片彩色濾光板發現，紅光濾光片212的厚度較綠 光濾光片214的厚度薄約〇·6奈米。 另外，第4圖係繪示本發明另一實施例單一色光濾片 上方晶盒間隙的高度量測圖。同樣運用分光放射輝度色度 光度光源測定器，產生一單一色光的特徵波長，例如紅光 650奈米、綠光550奈米及藍光450奈米，之偏極化可見光 掃瞄整片彩色濾光片，根據彩色濾光片上每一點的位置與 該位置的光吸收度做圖可知道單一色濾光片上方晶盒間隙 的高度的均勻度。如第4圖所示，第4圖係繪示以綠光特 徵波長550奈米掃瞄一彩色濾光片的結果，由第4圖中發 現綠光濾光片上方晶盒間隙的高度約在4奈米左右，但在 離原點不遠處則突然產生約4·2奈米的晶盒間隙，可見此處 的綠光濾、光片的厚度均勻性不佳。 由上述本發明較佳實施例可知，應用本發明所揭露的 11 1282869 光學膜層的監測方法確實可用來做線上即時監測，而能針 對彩色濾、光片上瑕㈣速的做出反應，而且檢測的方法非 常商便’無須製作待測樣品，使整個測試的成本大幅下降。 雖然本發明已以較佳實施例揭露如上，然其並非用以 限定本發明，任何熟習此技藝者，在不脫離本發明之精神 和範圍内，當可作各種之更動與潤飾，因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 為讓本發明之上述和其他目的、特徵、優點與實施例 能更明顯易懂，所附圖式之詳細說明如下： 第1圖係繪示一液晶顯示裝置部分剖面示意圖； 第2A圖係為無瑕疵之彩色濾光片部分剖面示意圖； 第2B圖係為具有瑕疵之彩色濾光片部分剖面示意圖； 第3A圖及第3B圖係分別繪示無瑕疵之彩色濾光片及 具瑕疵之彩色濾光片之第一曲線及第二曲線；以及 第4圖係繪示本發明另一實施例單一色光濾片上方晶 盒間隙的高度量測圖。 【主要元件符號說明】 1 :上基板 2 :下基板 3 :液晶層 !〇、30、200、210 ··透明基板 12 1282869 12 :遮光層 14、16、18 :彩色濾光片 20、32 :透明電極 22、34 :上配向層 202、212 ·•紅色濾光片 204、214 :綠色濾光片 206、216 :間隙物 208、218 ··藍色濾光片 300、304 :第一曲線 302、306 :第二曲線& Objective To provide a method for measuring the thickness uniformity of optical films, which can instantly monitor the uniformity of red, green and blue filters. + & ^ Another object of the present invention is to provide a method for monitoring the uniformity of the thickness of an optical film layer, which can perform non-destructive monitoring of the uniformity of the thickness of each of the red, green and blue colors and the thickness of the light sheet. A further object of the present invention is to provide a method of monitoring the uniformity of the thickness of an optical film layer which provides non-destructive monitoring of the uniformity of the thickness of the red, green and blue filters themselves. In accordance with the above objects of the present invention, a preferred embodiment of the present invention provides a method of monitoring the uniformity of thickness of an optical film layer. Since the transmittances (absorbances) of different wavelengths of light for different wavelengths of light are not the same, and the polarized light has different transmittance (absorbance) for the same angle grating at different wavelength portions. Therefore, the first angle is used to generate a full spectrum of the first angle of polarized visible light, and the first angle is, for example, that the alignment angle of the upper alignment film is increased or decreased by 45 degrees to detect and receive the transmitted light, and is projected through a color filter. The detecting receiver detects the received transmitted light intensity and the corresponding wavelengths at a first angle of polarization angle to obtain a first curve. Then, the 1282869 angle polarizing angle of the detecting receiver is rotated by π / 4 ' and the received light is detected, and a second curve is obtained by penetrating the light intensity and each corresponding wavelength. The first curve and the second curve should be smooth curves. If the first curve and the second curve produce discontinuities at similar wavelengths, for example, a discontinuity occurs at a wavelength of 540 nm to 560 nm, it can be determined. The thickness of the red light film is significantly different from the thickness of the green filter. Similarly, it is also possible to use a spectroscopic device to select a single color light to perform a global scan on the color tear film. According to the position of each point on the color filter and the light absorbance at the position, the thickness of the single color filter can be known to be uniform. degree. When a line has a peak or a trough, that is, when the line type has a slope of zero or an infinite maximum, the thickness of the film at the corresponding position is too thick (thin). Therefore, the monitoring method using the thickness uniformity of the optical film layer disclosed in the present invention has the following advantages, and can be used for on-line monitoring on the line, and can quickly respond to the color filter. In addition, the method of detection is very simple, and it is not necessary to produce a sample to be tested, so that the cost of the entire test is greatly reduced. The method for monitoring the thickness uniformity of the optical film layer provided by the invention can be used not only on the process of the liquid crystal display, but also on the process of the color filter and the organic electroluminescent display (〇LED) and polymerization. On the process of electro-optic excitation (4) (PLED). Further, by measuring the color filter film layer, it is possible to calculate the size of the cell gap of the liquid crystal display device, and to understand the uniformity of the cell gap of the liquid crystal display device. [Embodiment] Please refer to Fig. 2A, and Fig. 2A is a schematic cross-sectional view of a color filter without sham. On the transparent substrate, there are a red filter 202 1282869 and a green filter 204, and a spacer 206 and a blue filter 2〇8 are selectively disposed between the two, in general, The height of the cell gap is approximately equal to the height of the spacer 206. In the flawless color filter, the thickness of the red filter 202, the green filter 204, and the blue filter 208 are all within the tolerance range of each standard thickness. Fig. 2B is a partial cross-sectional view of the color filter having enamel. A red filter, a light sheet 212 and a green filter 214 are disposed on a transparent substrate 21, and a spacer 216 and a blue filter 218 are selectively disposed therebetween. Generally, The height of the cell gap is approximately equal to the height of the spacer 216. In the color filter having germanium, the red filter 212 and the green filter 214 and the blue filter 218 have different thicknesses and are outside the tolerance range of each standard thickness, and therefore, are located at the red color filter 212. The height of the cell gap and the cell gap between the green filter 214 and the blue filter 218 are also significantly different. In a practical example, the difference in thickness between the different color filters causes the difference in the height of the interlaminar cell gap to be 1 〜 to 30%, thus seriously affecting the optical performance of the quinone. Therefore, in the present embodiment, the spectroscopic radiance chrominance luminosity light source measuring device is used to generate a full-spectrum polarization angle of the first angle of visible light to illuminate the innocent color filter of FIG. 2A and the second B-picture. There is a color filter in the middle. There is additionally an alignment layer (not shown) on the color filter, and the alignment layer has an alignment angle <9 (not shown), and the first angle may be, for example, an alignment angle of the upper alignment film of 0 plus 45 degrees. . Spectral Radiation Brightness The light receiver in the chromaticity light source measuring device receives the transmitted light at a first angle, and obtains a first curve by penetrating the light intensity and each corresponding wavelength. Then, the first angle of the detection receiver is rotated by 4/4, and then the detected light is transmitted through the light intensity and the corresponding wavelength to obtain a second curve. Figures 3A and 3B show the first curve and the second curve of the flawless color filter and the color filter with fatigue, respectively. Referring to Fig. 3A, since the color filter in Fig. 2A has no turtles, the first curve 300 and the second curve 3〇2 obtained are a smooth curve. In contrast, in FIG. 3B, the first curve 304 and the second curve 306 exhibit discontinuities in the measurement of light wavelengths between about 540 nm and 560 nm, so that it is known that the red filter 212 and the green filter 214 are located. There is a significant difference in the cell gap at the location, and it is calculated that the cell gap at the red filter 212 is 15% larger than the cell gap at the green filter 214. Using a green light characteristic wavelength of 550 nm and a red light characteristic wavelength of 650 nm across the entire color filter, it is found that the thickness of the red light filter 212 is thinner than the thickness of the green light filter 214 by about 6 nm. . In addition, Fig. 4 is a view showing the height measurement of the cell gap above the single color filter according to another embodiment of the present invention. Similarly, the spectroradiometric chromaticity luminosity light source measuring device is used to generate a characteristic wavelength of a single color light, such as 650 nm of red light, 550 nm of green light, and 450 nm of blue light, and the polarized visible light scans the entire color filter. The slice, based on the position of each point on the color filter and the light absorbance at that location, can be used to know the uniformity of the height of the cell gap above the single color filter. As shown in Fig. 4, Fig. 4 shows the result of scanning a color filter with a green light characteristic wavelength of 550 nm. From Fig. 4, it is found that the height of the cell gap above the green light filter is about 4 nm or so, but not far from the origin, it suddenly produces a cell gap of about 4.2 nm, which shows that the green light filter and the thickness uniformity of the film are not good. It can be seen from the above preferred embodiment of the present invention that the monitoring method of the optical film layer of the 11 1282869 disclosed in the present invention can be used for on-line real-time monitoring, and can respond to the color filter, the 瑕 (four) speed of the light film, and the detection. The method is very convenient - no need to make samples to be tested, so that the cost of the entire test is greatly reduced. While the present invention has been described above by way of a preferred embodiment, it is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features, advantages and embodiments of the present invention will become more <RTIgt; 2A is a partial cross-sectional view of a color filter without flaws; FIG. 2B is a partial cross-sectional view of a color filter having a 瑕疵; FIGS. 3A and 3B are colorless filters respectively showing The first curve and the second curve of the color filter of the film and the color filter; and the fourth figure show the height measurement of the cell gap above the single color filter of another embodiment of the present invention. [Description of main component symbols] 1 : Upper substrate 2 : Lower substrate 3 : Liquid crystal layer 〇, 30, 200, 210 · Transparent substrate 12 1282869 12 : Light shielding layers 14, 16, 18: Color filters 20, 32: Transparent electrodes 22, 34: upper alignment layers 202, 212 · red filters 204, 214: green filters 206, 216: spacers 208, 218 · blue filters 300, 304: first curve 302 306: second curve
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