1278351 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種具有形成篩孔之篩孔片，由篩孔吐出塗佈液，並塗佈 於被塗佈件之塗佈裝置改良，及於篩孔片上形成有篩孔之塗佈頭之篩孔阻 塞之防止方法改良。 【先别技術】 液晶顯示裝置及半導體裝置，是經由在玻璃基板及半導體晶圓等基板 上形成定向膜及電阻等機能性薄膜等沉積製程所製造而成的。 為了形成機能性薄膜，在沉積製程當中，採用塗佈裝置，以噴墨 (inkjet)方式對著被塗佈件之基板，噴射出塗佈液（範例請參照特許 文獻1)。 圖1中所示的是習知採用喷墨方式將塗佈液噴射到基板面之塗佈裝置構 造圖。圖2為圖1中所示之塗佈裝置側面圖。 習知所使用之塗佈裝置，如圖！及圖2所示，是由長方體形之基台】、此 基台1上所設之-對導執2、由此導軌2來引導移動，以搭載基板w之矩形 台座3、設置於基台丨上之峡體4、設置於此峡體4上之數個塗佈頭5、 控制塗佈頭塗佈液之吐出及㈣台座3移動之控織置、以及統括控制基 板W之一貫塗佈動作之控制器6所構成者。 基台1之下端部分具有腳la，和於上面左右兩端部分，延著橫方向（箭 頭X方向）所設之安裝板lb，藉由安裝板lb固定安裝—對導軌2。 1278351 滑動件3a可自由活動，設置於—對導軌2上，並安裝於台座3㈣動 件上。 台座3已考慮了防止真空及防止靜電等保持基板之裝置構成，可自由地 裝卸玻璃基板及半導體晶圓等基板W。 固疋體4如圖2所不’疋由基台i橫向之中間部分導執2及跨過導轨所 設置門型支駐體4a、與間型域主體成狀喊上分別減向之支持 件4b、4c、以及於兩端部分支持件处、^之臂4d所構成者。 籲在固疋體4之’4d上，以喷墨的方式吐出塗佈液之數個（圖2中為8個） 塗佈頭5，以圖示之箭頭方向排列安裝。 圖3所π的’為圖1中所不之塗佈頭5，平行於紙面之斷面狀態放大斷面 圖圓錐狀之頭主體5a。以封閉式地連接於塗佈頭主體5a之上開口部，並 外接壓電το件5ba之可撓板5b。以封閉式地連接頭主體5之下開口部分， .又置轉孔5ca ’構成板狀篩孔片5e。收納塗佈液之液室％之形成，取決於 ㉔頭本體5a、可撓板5b及篩孔片5e。再者，在篩孔片上，數個篩孔— _沿著橫方向排列，壓電元件5ba對應著各篩孔一侧地排列。 在員體5a之其中側面，設置塗佈液供給油路5紐貫通連接於液室 5d此塗佈液供給路的另一端連接著圖中未表示之塗佈供給液槽。 在此說明由上述各部所構成，習知塗佈裝置之作用。 在上述各部當中，以控制器6之控制，讓載置基板W之台座3朝基台1 之也、方向（圖示^碩χ)以固定速度移動。因此控制器6配合基板w通過塗佈 頭5之下方的時機，驅動控制壓電元件5ba，並讓可撓板5b振動。因此， 1278351 能加壓液室5d内的塗佈液，讓塗佈液以液滴狀態從筛孔-，朝著下方基 板W吐出。 從筛孔5ca吐出之塗佈液，附著於基板w之板面。所附著之塗佈液於板 面上流動，覆蓋基板W板面而將塗佈液塗佈上去。所塗佈之塗佈液乾燥後， 便於基板W面上形成定向膜、光阻、彩色滤光片、有機兩極發光體等機能 性薄膜。 【專利文獻1】特開2003-103207號公報 # 上述習知之塗佈裝置，塗佈液從塗佈頭5之篩孔5ca吐出，塗佈於供給 而來的基板W但疋等待下一個供給基板w來之前所隔的時間相當長，若持 續保持著暫時待機狀態的話，塗佈液在篩孔5ca滞留，並接觸到空氣導致 乾燥硬化，造成篩孔5ca之阻塞。 為防止塗佈液乾燥，避免篩孔5ca形成阻塞，可以考慮例如以板狀的帽 盍直接緊密地蓋住篩孔片5c，塞住篩孔5ca以遮斷塗佈液與空氣的接觸的 方法。 馨爲讓板狀帽蓋與篩孔片5c緊密，徹底防止篩孔上之塗佈液與空氣接觸， 篩孔片5c底面和相對之板狀帽蓋面，兩者各別接觸面之高度及平坦度為其 要件。 因此，不讓空氣侵入板狀帽蓋面與篩孔片5c底面之間已達到完全緊密並 不是一件容易的事。 從而，即使帽蓋與篩孔片可以緊密，也無法完全防止滯留於篩孔之塗佈 液接觸到空氣，因此因應而生塗佈液硬化導致之篩孔阻塞的防止方法被迫 •1278351 v k 切期望著。 【發明内容】 因此本發明之目的，在提供防止於篩孔片篩孔上之塗佈液硬化，因應其 必要而生，綠重新塗佈之塗佈裝置，及避免篩孔阻塞，防止重新塗佈時 塗佈頭阻塞之方法。 本發明之第1方面’是關於塗佈裝置，其具形成有塗佈液篩孔之筛孔形 _成面之塗佈頭’將上述塗佈液從上述筛孔吐出，並塗佈於塗佈件。其特徵 在於：此裝置具有可覆蓋於貼於上述_孔形成面形成之上述筛孔部位之平 板、支持此平板之支持台、在支持台與上述塗胸之間，至何朝上述筛 孔形成面之垂直方向相對移動之移動機構、與控制此移動機構之驅動及控 制從上述篩孔吐出之塗佈液之控繼置構成者，此控繼置構成讓上述塗 佈液從上述篩孔，凸狀地吐出之塗佈滴液，移動上述之支持台者。 本發明之第2方面，是關於塗佈裝置，其形成塗佈液之筛孔，具有筛孔 _形成面之塗佈頭，將上述塗佈液從上述篩孔吐出，並塗佈於塗佈件。其特 徵在於：«置具有可毅漏於上關孔形成面形狀上料孔雜之 平板、支持此平板之支持台、此支持台與上述塗佈頭之間，至少可以上述 篩孔形成面之垂直方向相對移動之移動機構、與控制此移動機構之驅動及 控制從上述篩孔吐出之塗佈液之控制裝置構成者。此控制裝置構成是讓上 述平板向上述塗佈頭接近移動，但起先須從上述筛孔吐出上述塗佈液於上 述平板上’ W此平板上之塗舰，形缝佈賴於上述筛孔形成面與上述 平板間。 1278351 本發明之第3方面，是關於在篩孔形成面形成塗佈液篩孔之塗佈頭阻夷 防止方法。其特徵在讓可覆蓋於上述筛孔形成面形成篩孔之部位之平板: 與由上相孔凸狀吐出之塗佈液滴接觸，並讓上述平板，藉由上述塗驗 滴擴散於上述平板與上述筛孔形成面之間所形成的塗佈液膜，與上 形成面緊密。 本發明之第4方面’是關於在篩孔形成面形成塗佈液篩孔之塗佈頭阻塞 防止方法。其特徵在於：將塗佈液吐出於可覆蓋上述篩孔形成面之形成篩 孔雜之上述平板上’ _其塗有塗佈液之平板與上述塗佈之接近移 動’藉由擴散於上述平板與上述篩孔形成面間之塗佈液膜，讓上述平板與 上述篩孔形成面緊密。 本土月所獻思的，在平板藉由塗佈液與塗佈頭接觸時，塗佈液於平板 與塗佈頭之間形成塗佈液職擴散，平板藉由所形成的塗佈液膜貼附於塗 佈頭側。 、亦即’本發明之塗佈裝置，是藉由塗佈液讓平板與塗佈液接觸，以此方 法來達到㈣，因此平板藉由塗佈液形成之塗佈賴蘭於塗佈頭側。 從而，篩孔及其附近之塗佈液，因為防止了與空氣的接觸，維持其流動 性，所以可以避免塗佈液硬化阻塞了篩孔。 此外，根據本發明之防止塗佈且塞方法，藉由塗佈液膜將朝著塗佈頭 相向配置之平板貼附在塗佈頭側，得以維持_孔及其附近之塗佈液的流動 性’可防止阻塞’同時也級平板塗佈頭取卸下來，得以飾進行塗佈操 1278351 ^ 【實施方式】 、乂下疋H置根據本發明，使用防止阻塞方法之實例說明，請參照圖* 或圖 卜對於圖1或圖3中所示習知所使用的塗佈裝置，凡相同構成 者皆付予相同之符號以省略其詳細說明。 圖4所不為才木用本發明中相關防止阻塞方法之塗佈裝置之實例正面圖。 圖5為圖4所示之塗佈裝置之側面圖。圖6為圖4所示之塗佈裝置之重要 g 部分擴大正面圖。 ’或圖6之中，塗佈裝置是由基台卜在基台工上所設置之斷面成矩 形狀的一對導軌2、搭載基板W移動之台座3、設置於基台！上之固定體4、 ；疋體4 I納塗佈液之塗佈頭5、與塗佈頭之底面形狀（篩孔形 成面)綠她’趟底面稍大之平板7卜持續支持此平板了 1並可以讓此 平板71升降移動之移動機制、以及控制加到基板W之塗佈液，並兼具以 “反防止k佈液更化之械月匕和以擦拭件72掃除塗佈頭5之機能之控制器9 所構成者。 固定體4，如圖5所示，是由門形的支持主體知，和設置於此門形固定 體之支持件4b，4c，與在支持件4b，4c之間被支持之臂切所構成的。在 臂4d上喷墨式之數個（在此實施例中，如圖5所示為㈣塗佈頭5以圖 中箭頭Y之方向排列安裝。 如圖6所示之重要部分擴大，移動機構8安裝於圖4中所示之台座3右 側面壁。此移動機構8搭載有平板71及擦拭件72，平板71及掃除件72可 如圖示之箭頭方向Z(上下）做移動。 1278351 移動機構8具有··固定於台座3之L形托架8卜以直向安裝於此托架8i 之引導軌82、受此5丨導軌82所引導並可上下移紅上端開放之箱狀移動台 座83、和驅動移動台座83上下移動一汽缸抑。此外，汽缸84之構成，作 動桿84a中間夾著彈性件84aa ’在移動台座83上下移動的同時，靠著此彈 性件84aa的變形，可緩和鶴台座83自身的上下移糾的震動。 支持台85及擦拭件72歐設·鶴台座83上，在支持台85上備有 可自由裝卸平台祝。而且’支持台85備有讓平台85a升降的驅動部。在 此如圖6所不，汽缸84之作動桿84a位於下降端位置，支持台之平台 脱位於上升端位置。將汽缸84之作動桿咖從此狀態往上升端位置軸， 如此載置平台85a之平板71可上升到圖8⑻所示接近篩孔片&底面（筛 孔形成面）的位置。此外，圖中未省略，平台脱具有防真空之裝置，控 制器9之驅動控制讓平板71可自由裝卸。 圖7所示的是，靠著控制器9的控制，讓載置於支持台奶上之平台祝1278351 IX. Description of the Invention: [Technical Field] The present invention relates to a coating device having a mesh sheet forming a mesh opening, discharging a coating liquid from a mesh opening, and applying it to a coated device, and The method for preventing the clogging of the sieve hole of the coating head having the mesh hole formed on the mesh sheet is improved. [Previous Technology] A liquid crystal display device and a semiconductor device are manufactured by a deposition process such as forming an alignment film or a functional film such as a resistor on a substrate such as a glass substrate or a semiconductor wafer. In order to form a functional film, a coating device is used in the deposition process to eject the coating liquid against the substrate of the article to be coated by an ink jet method (see franchise document 1 for an example). Fig. 1 is a view showing a configuration of a coating apparatus which is known to eject a coating liquid onto a substrate surface by an ink jet method. Figure 2 is a side elevational view of the coating apparatus shown in Figure 1. The coating device used by the custom, as shown in the figure! As shown in Fig. 2, the base of the rectangular parallelepiped is provided, and the guide 2 is provided on the base 1, and the guide rail 2 is guided to move. The rectangular base 3 on which the substrate w is mounted is disposed on the base. The upper gorge body 4, the plurality of coating heads 5 disposed on the gorge body 4, the control of the coating head coating liquid discharge, and (4) the controlled weaving of the pedestal 3 movement, and the uniform coating of the control substrate W The controller 6 of the action. The lower end portion of the base 1 has a foot la, and the upper and lower end portions, and the mounting plate lb which is disposed in the lateral direction (arrow X direction) is fixedly mounted by the mounting plate 1b to the guide rail 2. 1278351 The slider 3a is freely movable, is disposed on the pair of guide rails 2, and is mounted on the pedestal 3 (four) actuator. In the pedestal 3, a device structure for holding a substrate such as vacuum prevention and static electricity prevention is considered, and a substrate W such as a glass substrate or a semiconductor wafer can be detachably attached. As shown in Fig. 2, the solid body 4 is not supported by the middle portion of the base station i, the guide portion 2, and the door type support body 4a disposed over the guide rail. The members 4b, 4c, and the arm 4d at the both end portions of the support member. On the '4d of the solid body 4, a plurality of (8 in Fig. 2) coating heads 5 are ejected by ink jetting, and are mounted in the direction of the arrow shown. The π of Fig. 3 is the coating head 5 which is not shown in Fig. 1, and the conical head main body 5a is enlarged in parallel with the cross-sectional state of the paper surface. The flexible portion 5b is connected to the opening portion of the coating head main body 5a in a closed manner, and the flexible plate 5b of the piezoelectric member 5b is externally attached. The opening portion below the head main body 5 is connected in a closed manner, and the rotation hole 5ca' is further formed to constitute a plate-shaped mesh sheet 5e. The formation of the liquid chamber % for accommodating the coating liquid depends on the 24-head main body 5a, the flexible plate 5b, and the mesh sheet 5e. Further, on the mesh sheet, a plurality of sieve holes _ are arranged in the lateral direction, and the piezoelectric elements 5ba are arranged side by side with respect to the respective sieve holes. The coating liquid supply oil passage 5 is provided on the side surface of the member body 5a so as to be connected to the liquid chamber 5d. The other end of the coating liquid supply path is connected to a coating supply liquid tank (not shown). Here, the function of the conventional coating device constituted by the above-described respective portions will be described. In each of the above-described units, the pedestal 3 on which the substrate W is placed is moved at a fixed speed toward the base 1 in the direction of the base 1 under the control of the controller 6. Therefore, the controller 6 drives and controls the piezoelectric element 5ba in accordance with the timing when the substrate w passes under the coating head 5, and causes the flexible plate 5b to vibrate. Therefore, 1278351 can pressurize the coating liquid in the liquid chamber 5d, and the coating liquid can be discharged from the screen hole to the lower substrate W in a droplet state. The coating liquid discharged from the mesh opening 5ca adheres to the surface of the substrate w. The adhered coating liquid flows on the surface of the substrate to cover the surface of the substrate W to coat the coating liquid. After the applied coating liquid is dried, a functional film such as an alignment film, a photoresist, a color filter, or an organic two-pole illuminator is formed on the surface of the substrate W. In the above-mentioned conventional coating device, the coating liquid is discharged from the mesh opening 5ca of the coating head 5, and is applied to the supplied substrate W, but waits for the next supply substrate. The time before w is quite long. If the temporary standby state is maintained, the coating liquid stays in the mesh hole 5ca, and comes into contact with the air to cause dry hardening, which causes the mesh hole 5ca to block. In order to prevent the coating liquid from drying and to prevent the screen hole 5ca from forming a blockage, for example, a method of directly covering the screen hole sheet 5c with a plate-like cap and closing the screen hole 5ca to block the contact of the coating liquid with the air may be considered. . Xin makes the plate cap close to the mesh plate 5c, completely preventing the coating liquid on the mesh hole from coming into contact with the air, the bottom surface of the mesh plate 5c and the opposite plate cap surface, and the height of the respective contact faces Flatness is a requirement. Therefore, it is not an easy task to prevent air from intruding between the plate cap surface and the bottom surface of the mesh sheet 5c. Therefore, even if the cap and the mesh sheet can be tight, the coating liquid retained in the mesh hole cannot be completely prevented from coming into contact with the air, and therefore the method for preventing the mesh hole from being blocked due to the hardening of the coating liquid is forced to be forced to 1278351 vk Expected. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a coating device for preventing the hardening of a coating liquid on a mesh opening of a mesh sheet, a green coating device, and a screen for preventing re-coating of the screen. The method of blocking the coating head when cloth is used. A first aspect of the present invention relates to a coating apparatus which has a sieve shape in which a coating liquid mesh hole is formed, and a coating head which is formed into a surface, and discharges the coating liquid from the sieve hole and coats the coating liquid. Cloth pieces. The utility model is characterized in that the device has a flat plate which can be attached to the above-mentioned mesh hole portion formed on the above-mentioned hole forming surface, a support table for supporting the flat plate, between the support table and the chest plate, and the formation of the mesh hole. a moving mechanism for relatively moving the surface in a vertical direction, and a control relay for controlling the driving of the moving mechanism and controlling the coating liquid discharged from the screen hole, the control is configured to allow the coating liquid to pass through the sieve hole. The coating liquid is spouted in a convex shape, and the above-mentioned support table is moved. According to a second aspect of the present invention, in a coating apparatus, a coating hole for forming a coating liquid, a coating head having a meshing-forming surface, and the coating liquid is discharged from the mesh opening and applied to the coating. Pieces. The utility model is characterized in that: a plate having a hole in the shape of the upper opening hole forming surface, a support table supporting the plate, a support plate between the support table and the coating head, and at least the mesh hole forming surface A moving mechanism that moves in the vertical direction, and a control device that controls the driving of the moving mechanism and controls the coating liquid discharged from the mesh. The control device is configured to move the flat plate toward the coating head, but initially, the coating liquid is discharged from the screen hole on the flat plate on the flat plate, and the slit is formed on the sieve hole. Between the face and the above tablet. 1278351 A third aspect of the present invention relates to a coating head preventing method for forming a coating liquid mesh opening on a mesh forming surface. The utility model is characterized in that a flat plate covering a portion which forms a mesh hole on the mesh forming surface is contacted with a coating liquid droplet which is convexly discharged from the upper phase hole, and the flat plate is diffused on the flat plate by the coating test. The coating liquid film formed between the above-mentioned mesh forming surface is tightly bonded to the upper forming surface. According to a fourth aspect of the invention, there is provided a coating head blocking preventing method for forming a coating liquid mesh opening on a mesh forming surface. The method is characterized in that the coating liquid is discharged onto the flat plate which can cover the mesh-forming surface, and the flat plate coated with the coating liquid is moved close to the coating layer by diffusing on the flat plate. A coating liquid film is formed between the surface of the mesh forming surface and the flat plate to form a surface close to the mesh opening. According to the local month, when the coating plate is brought into contact with the coating head by the coating liquid, the coating liquid forms a coating liquid between the flat plate and the coating head, and the flat plate is pasted by the formed coating liquid film. Attached to the coating head side. That is, the coating device of the present invention achieves (4) by contacting the flat plate with the coating liquid by the coating liquid, so that the plate is coated with a coating liquid to form a coating on the coating head side. . Therefore, since the coating liquid in the vicinity of the sieve hole and the contact with the air are prevented from maintaining fluidity, it is possible to prevent the coating liquid from hardening and blocking the sieve opening. Further, according to the method for preventing coating and plugging of the present invention, the flat surface facing the coating head is attached to the coating head side by the coating liquid film, thereby maintaining the flow of the coating liquid in the vicinity of the hole and the vicinity thereof. The property can prevent the blockage, and the flat plate coating head can also be removed and removed, and the coating operation can be performed. 1283751 ^ [Embodiment], the lower jaw H is placed according to the present invention, and an example of the method for preventing the blocking is used, please refer to the figure * Or, the same components as those of the conventional one shown in FIG. 1 or FIG. 3 are given the same reference numerals to omit the detailed description thereof. Fig. 4 is a front elevational view showing an example of a coating apparatus for preventing the clogging method of the present invention. Figure 5 is a side elevational view of the coating apparatus of Figure 4. Fig. 6 is an enlarged front elevational view showing the important part of the coating apparatus shown in Fig. 4. In Fig. 6, the coating device is a pair of guide rails 2 which are formed in a rectangular shape by a base station, and a pedestal 3 on which the substrate W is mounted, and is placed on the base! The upper fixing body 4, the coating head 5 of the coating body of the coating body 4, and the shape of the bottom surface of the coating head (the mesh forming surface) are green, and the flat surface of the bottom surface is slightly larger. 1 and the movement mechanism of the lifting and lowering movement of the flat plate 71, and the coating liquid applied to the substrate W can be controlled, and the coating head 5 can be removed by the "removal of the k-cloth liquid and the wiping member 72". The fixed body 4, as shown in Fig. 5, is known by a gate-shaped support body, and the support members 4b, 4c and the support member 4b provided in the gate-shaped fixed body. 4c is supported by a supported arm. Several ink jets are mounted on the arm 4d (in this embodiment, as shown in Fig. 5, the (4) coating heads 5 are arranged in the direction of the arrow Y in the figure. The important portion shown in Fig. 6 is enlarged, and the moving mechanism 8 is attached to the right side wall of the pedestal 3 shown in Fig. 4. The moving mechanism 8 is provided with a flat plate 71 and a wiper 72, and the flat plate 71 and the sweeping member 72 can be as shown. The arrow direction Z (up and down) is moved. 1278351 The moving mechanism 8 has an L-shaped bracket 8 fixed to the pedestal 3 to be mounted directly on the bracket. The guide rail 82 of the 8i is guided by the 5-turn rail 82 and can move up and down the box-shaped moving pedestal 83 open at the upper end of the red, and the driving mobile pedestal 83 moves up and down a cylinder. Further, the cylinder 84 is constructed in the middle of the actuating lever 84a. When the movable pedestal 83 is moved up and down with the elastic member 84aa', the vibration of the upper and lower movements of the crane pedestal 83 can be alleviated by the deformation of the elastic member 84aa. The support table 85 and the wiping member 72 are provided. In the above, the support table 85 is provided with a freely attachable platform. Moreover, the support table 85 is provided with a drive unit for lifting and lowering the platform 85a. Here, as shown in Fig. 6, the actuating lever 84a of the cylinder 84 is located at the lower end position, and supports The platform of the platform is located at the ascending end position. The actuator of the cylinder 84 is moved from this state to the ascending end position axis, so that the plate 71 of the mounting platform 85a can be raised to the bottom of the mesh plate & the bottom surface shown in Fig. 8 (8). In addition, the position of the surface is not omitted, the platform is provided with a vacuum-proof device, and the driving control of the controller 9 allows the flat plate 71 to be freely loaded and unloaded. As shown in Fig. 7, the control is controlled by the controller 9 Placed on the support desk Wish on the platform
其形狀與塗佈頭5之筛孔片5c之底面形狀相似，大小如 形較篩孔片5c稍微大一點 之平板71位於與塗佈頭5(也就是篩孔㈣底面相向位置之狀態擴大圖。 在此實施例中，平板71是由厚度約為Q· 3〜Q· 7刪之透明薄玻璃所構成， 圖7所示，外側外 在此，實施例如圖7所示，從形成於篩孔片&中央部分的篩孔^之開 口部所吐出之凸狀液滴狀態塗佈液，也就是讓塗佈液滴l，不吸著於平板 85a地貼近被載置的平板η。當平板71與塗佈液滴L接觸時，塗佈液之表 面張力與《度和塗佈液之平板71相近之塗佈朗l將持續擴散於所接觸 12 1278351 的平板71和篩孔片5c之間’並吸引下方平板η，平板7i藉由形成之塗佈 液膜貼附到篩孔片5c底面側。 在平板η藉由塗驗_著於_ 5e 態下，至対避免掉筛孔 ^及其《之塗驗與空氣_，所_防止塗佈液硬化，保持塗佈液的 流動性以防止阻塞。 在平板71藉由塗佈液膜附貼附於篩孔片&的狀態下，平板η和筛孔片 斤夾之土佈液膜，、有外緣與空氣接觸，乾燥硬化的部分相對於平板 覆蓋的部分較少’即使外緣塗佈液硬化，平㈣也可以容織筛孔片 剝下，讓基板的塗佈作業從新開始。 如此’塗佈液與空氣接觸硬化的部分，將受限於所形成大面積的塗佈液 膜外緣，貼附於篩孔片侧之平板，大部分是藉由維持流動性的塗佈液膜與 師孔片相接’所以报容易將平板從篩孔片側剝下。 此外，塗佈液膜與空氣接觸硬化的部分，因為受限於離篩孔-較遠的 外緣’在將平板71之篩孔片5c剝下時，塗佈液膜硬化物觸孔⑹接觸， 可避免師孔5ca之阻塞。 此外，平板71利用塗佈液之表面張力和塗佈液對平板71之濕黏性，貼 附於師孔片5c的底面，所以相對於筛孔片5c，維持平板71處於貼附狀態 的特別機麵不轉。因此，™域縣置之顧，餅安全信賴性 作業可以容易進行。此外，平板71處於貼附於篩孔片&之狀態時，台座3 可容易地對著塗佈頭5移動。也因此，使得台座3與塗佈頭5的安全信賴 性作業更加容易，更有效率。 13 1278351 % 在此’詳細說明此實施例之塗佈装置中，平板71貼附於篩孔片5c側的 過程，請參照圖4及圖7或圖9。 圖7及圖8(a)所示的為，在對基板塗佈處於休止狀態時，塗佈液成 為液滴狀悲，也就是塗佈液滴L從篩孔片5c之筛孔5ca之出口凸狀吐出之 狀悲。此狀怨是在上述休止狀態時，提供較壓電元件5ba在塗佈基板w時 所供給的電壓更小的電壓，也就是靠壓電元件5ba之驅動將塗佈液從筛孔 5ca送出，供給不至於射出程度之電壓。所以在此狀態，塗佈滴液L本身有 _表面張力，從半球狀之篩孔片5之底面筛孔5ca凸狀吐出。 此外’以控制器9控制台座3之移動，將保持吸著並載置於平台咖上 之平板71，配置於師孔片5c底面之相向位置。 其次’以控制器9對汽缸84之驅動控制，如圖8⑹所示，使平台脱上 升，讓所載置的平板71與塗佈液滴l相接近接觸。 在此平台85a上升當中，平板71在與塗佈液滴L接觸前，藉由平台脱 的吸盤，解除平板71之保持。 ❿平板71與塗佈液滴l -接觸，塗佈液滴L於篩孔片^和平板之間形 成塗佈液膜並擴散，所平板71整體朝著圖中箭頭z的方向被拉近，脫料 台85a面。 其結果，如圖8⑹所示，平板71藉由已形成之塗佈液膜貼附於筛孔片 5c的底面。 圖9為圖8(a)巾從Μ線之箭頭方向看去之斷面圖。 如圖9所示’塗佈液置於篩孔5ca中央部分，且擴散於整個篩孔片5c和 14 1278351 平板71之間，只有從篩孔片5c底面溢出於平㈣外緣之少量（μ)塗 佈液La與空氣直接接觸。此外，將平㈣做成篩孔片^底面所溢出少量 (△k)塗佈液之形狀，可防止塗佈賴外側位置塗佈液的溢漏。 如圖8 (c)及圖9所不，玻璃製之薄平板71藉著塗佈液膜與筛孔片緊密 之狀心P使於外、、彖之塗佈液La接觸到空氣而乾燥，隨著時間的、經過硬化， 位於篩孔片5c之中央部分之篩孔5ca附近卻仍可處於與空氣隔絕的狀態， 所以塗佈液的流動性得以維持，也可避免篩孔—由於塗佈液乾燥所引起 _ 的阻塞。 此外，平板71藉由塗佈液膜貼附於篩孔片5。靖，筛孔—附近之塗 佈液膜内不可以有氣泡。在本實施例中，因為平板71是由透明玻璃板所構 成的，作業員可以目視來判斷有無氣泡存在。 因此’藉由貼附於塗佈液膜之平板7卜從下方以照相機拍下塗佈液膜， 若在照片上可以檢測到塗佈賴有氣泡混人時，以控制器9的控制，驅動 £電元件5ba’以加壓的方式將塗佈液擠出，可將氣泡排除於塗佈液膜之外。 _換言之，例如以攝影照片，若檢測出在目9圖示最下面篩孔5ca右側有 氣泡的存在時，驅動對應於最下面的篩孔5ca之壓電元件咖，從最下面筛 孔5ca吐出預先設定量之塗佈液，將氣泡從篩孔^的附近朝平板71外緣 擠出。此夕卜，若檢測出圖9圖示中最下面之筛孔-與其上一個筛孔5ca 之間存有氣泡的話，驅動最下面即其上一個篩孔5ca之對應壓電元件5ba， 從上述兩個篩孔5ca吐出預先設定量之塗佈液，將氣泡從上述兩篩孔5ca 之間朝平板71外緣擠出。 1278351 此外在此時，基祕滅)ί ’若檢測域泡與細近位置㈣孔5⑺之 間的距離，基於此距離可以判定從上述筛孔-是否吐出塗佈液，且若吐 出塗佈液的話，可以用控制器6來敬其吐出量。換言之，氣泡的存在， 代表與氣泡接_塗舰有硬化的可祕。因此，錢輯在的位置，產 生塗佈液硬化物但卻不會導致吐出不良的話，就沒有必要排除此氣泡。在 此情況下，即使氣泡存在，也沒有必要從上述之薛孔^吐出塗佈液。因 此’氣泡與各篩孔-之距離若在触設定距離以上的話，就不用讓塗佈 _液由篩孑L 5ca吐出。 此外，若氣泡存在於上述設定距離之内的話，基於其筛孔⑹與氣泡之 間的距離，決定了將氣泡擠出於上述設定距離以外所需之塗佈液必要量。 此時塗佈液的量’或可以實驗求得，或基於筛孔5ca與氣泡之間的距離、 上述設定距離及塗佈液膜厚度，以幾何計算求出近似值。 為了除去氣泡，以這樣的方法可減少塗佈液的吐出量，防止塗佈液無謂 的浪費。 此外，上述的動作無法等到氣泡周邊之塗佈液硬化後再進行，故必須事 先求出塗佈液硬化所需要的時間，並在此時間内進行。 此外’以上述飾吐岭佈液於咖5晰板71_佈 作，即使形成的平板71較篩孔片5c底面大出 也要考慮塗佈液從平板 在這樣的情況下，可在移動台座83上進行上述動作 托盤代_ W來進行，將托__獅下方並妙可移動。 此外’上述的動作，有時平板71會從篩孔片脫落，有時會移位，故也可 16 1278351 以其他代替平台85a支持平板71或平台85a之支持裝輯成來維持此狀態。 此外，在此雖然以攝影照片為例來說明，但只要是能檢測出氣泡者都可 以，所以4亍傳感應器（Hne sensor)也可採用。 從圖8 (c)及圖9所示之狀態，重新開始進行基板^之塗佈時，控制器 9讓平台85a所具備的吸盤運作。靠此吸盤7之吸力，讓平板？！從筛孔片 分離，保持在平台85a上。接著，驅動控制汽㈣，下降至保持平㈣吸 著的平口 85a的下方，以此操作讓藉由塗佈液膜貼附於筛孔片&側之平板 籲 71剝落。 在此平板71從篩孔片化側剝落時，塗佈液（塗佈液膜）有時會殘留於吐 出口篩孔5ca及其附近。 在此，此實施例之塗佈裝置之構成，可以擦拭件72，在基板㈣新進行 塗佈時’擦拭硬化殘存於篩孔片5c邊緣之塗佈液硬化物，及底面殘留之塗 佈液膜。 ι 換言之，如圖5及圖6所示，在台座3與支持台85之間，設有擦拭件72, 此擦拭件72為彈性件，長度和塗佈頭5橫方向（圖示中箭頭γ之方向）相 同或長-些。因此’從圖6中所示的狀態，首先將支持台奶的平台咖 移動到下降端位置使之退避，再將汽缸84之作動桿施移動到上升端位 置因此攸如圖6所示的狀態，將台座3往圖中箭頭χ的方向移動，擦拭 件72之前端部分持續接觸到筛孔片&的底面，擦拭去殘留於篩孔片5底 面之塗佈液膜及邊緣之塗佈液硬化物。擦拭去之塗佈液硬化物因會掉進箱 W動台座83内’作業員可從移動台座㈣將累積之塗佈液膜及塗佈液 17 1278351 硬化物去除。 如社之說明，本實施例之塗佈裝置，是將透_玻璃板製成較筛孔片 5c底面形狀較大，但形狀相似之平板71，與篩孔片向配置。因為其 構造可與篩孔-之塗佈《細，平板71謂由與塗佈液膜職於筛孔 片5c ’以避免篩孔5ca及其附近之塗佈液硬化，且防止塗佈頭之阻塞。 再者，在上述的實施例說明當中，是將平板71構成於塗佈頭5側附近， 但減地將塗佈頭5構成於平板71的附近也可以。此夕卜，被塗佈件並不止 _ 限於基板W，例如印刷用紙也可以。 此外，藉由塗佈液膜貼附於篩孔片之平板剝卸，雖然是以此平板之支持 台為例· ’但除此支持台外也可以其他糾設置的專略絲剝卸。例 如亦可於篩孔片底面設置可械鶴之吸著墊等吸盤之剝卸裝置。The shape is similar to the shape of the bottom surface of the mesh sheet 5c of the coating head 5, and the flat plate 71 having a size slightly larger than the mesh sheet 5c is located in an enlarged state with respect to the coating head 5 (that is, the bottom surface of the sieve hole (4). In this embodiment, the flat plate 71 is made of a transparent thin glass having a thickness of about Q·3 to Q·7, and as shown in Fig. 7, the outer side is externally formed here, as shown in Fig. 7, for forming from the screen. The convex liquid droplet state coating liquid which is ejected from the opening of the sieve hole of the center portion, that is, the coating liquid droplet l is applied to the flat plate η which is not attached to the flat plate 85a. When the flat plate 71 is in contact with the coating liquid droplet L, the surface tension of the coating liquid and the coating slab which is close to the flat plate 71 of the coating liquid will continue to diffuse to the flat plate 71 and the mesh sheet 5c which are in contact with the 12 1278351. While holding the lower plate η, the plate 7i is attached to the bottom surface side of the mesh plate 5c by the formed coating liquid film. In the state of the plate η by the coating test _ 5e, the mesh hole is avoided. And its "painting and air _, to prevent the coating liquid from hardening, to maintain the fluidity of the coating liquid to prevent clogging. The coating liquid film is attached to the mesh sheet & the platen η and the screen cloth of the sieve hole sheet are in contact with the air, and the outer hardened portion is in contact with the portion covered by the flat plate. Less 'even if the outer coating liquid hardens, the flat (four) can also be used to peel the mesh sheet, so that the coating operation of the substrate is started from the beginning. Thus, the portion where the coating liquid is hardened by contact with air will be limited by the large size formed. The outer edge of the coating liquid film of the area and the flat plate attached to the side of the mesh sheet are mostly connected to the hole plate by the liquid film which maintains the fluidity. Therefore, it is easy to peel off the flat plate from the side of the mesh sheet. In addition, the portion of the coating liquid film that is in contact with the air is hardened, because it is limited to the outer edge of the screen-toward the outer edge of the screen, when the screen sheet 5c of the flat plate 71 is peeled off, the coating liquid film hardened contact hole (6) In addition, the flat plate 71 can be attached to the bottom surface of the hole plate 5c by the surface tension of the coating liquid and the wet adhesion of the coating liquid to the plate 71, so that the plate 71 is opposed to the mesh plate 5c. , the special machine that keeps the flat plate 71 in the attached state does not turn. Therefore, the TM domain county cares The cake safety and reliability work can be easily performed. Further, when the flat plate 71 is attached to the mesh sheet & the pedestal 3 can be easily moved toward the coating head 5. Therefore, the pedestal 3 and the coating head 5 are caused. Safety and reliability work is easier and more efficient. 13 1278351 % Here, the process of attaching the flat plate 71 to the side of the mesh plate 5c in the coating device of this embodiment is described in detail, please refer to FIG. 4 and FIG. 7 or Fig. 9. Fig. 7 and Fig. 8(a) show that when the substrate is applied in a resting state, the coating liquid becomes droplet-shaped, that is, the coating droplet L is sieved from the mesh sheet 5c. The exit of the 5ca is convex and sorrowful. This grievance is to provide a voltage smaller than the voltage supplied by the piezoelectric element 5ba when the substrate w is coated, that is, the piezoelectric element 5ba is driven in the above-described resting state. The coating liquid is sent out from the sieve opening 5ca, and a voltage which is not emitted is supplied. Therefore, in this state, the coating drip L itself has a surface tension, and is ejected convexly from the bottom surface of the hemispherical mesh sheet 5. Further, by the movement of the console 9 of the controller 9, the flat plate 71 which is held by the suction and placed on the platform coffee is placed at the opposite position of the bottom surface of the hole plate 5c. Next, the drive control of the cylinder 84 by the controller 9 is performed, as shown in Fig. 8 (6), the platform is lifted up, and the mounted flat plate 71 is brought into close contact with the coated liquid droplets l. During the rise of the stage 85a, the flat plate 71 releases the holding of the flat plate 71 by the suction cup removed from the plate before the contact with the coating liquid droplet L. The crucible plate 71 is in contact with the coating liquid droplet l-, and the coating liquid droplet L forms a coating liquid film between the mesh sheet and the flat plate and diffuses, and the flat plate 71 is pulled toward the direction of the arrow z in the figure. The discharge table 85a is faceted. As a result, as shown in Fig. 8 (6), the flat plate 71 is attached to the bottom surface of the mesh sheet 5c by the formed coating liquid film. Figure 9 is a cross-sectional view of the towel of Figure 8 (a) as seen from the direction of the arrow of the rifling. As shown in Fig. 9, the coating liquid is placed in the central portion of the screen hole 5ca, and spreads between the entire screen plate 5c and the 14 1278351 plate 71, and only a small amount of the outer edge of the flat (four) is overflowed from the bottom surface of the mesh sheet 5c (μ The coating liquid La is in direct contact with air. Further, the flat (four) is formed into a shape of a small amount of (Δk) coating liquid which is overflowed from the bottom surface of the mesh sheet, and the leakage of the coating liquid on the outer side of the coating can be prevented. As shown in Fig. 8 (c) and Fig. 9, the thin flat plate 71 made of glass is dried by contact with the coating liquid La of the outer and outer coatings by the coating liquid film and the core P of the mesh sheet. With time, hardened, the screen hole 5ca located in the central portion of the mesh sheet 5c is still in a state of being isolated from the air, so that the fluidity of the coating liquid is maintained, and the mesh hole can be avoided - due to coating Blockage caused by liquid drying. Further, the flat plate 71 is attached to the mesh sheet 5 by a coating liquid film. Jing, sieve hole - there should be no air bubbles in the coating liquid film nearby. In the present embodiment, since the flat plate 71 is constituted by a transparent glass plate, the operator can visually judge whether or not there is a bubble. Therefore, the coating liquid film is photographed by the camera from the lower side of the coating liquid film 7 attached to the coating liquid film. If it is detected on the photograph that the coating is mixed with bubbles, it is driven by the controller 9 to drive. The electric element 5ba' presses the coating liquid in a pressurized manner, and the air bubbles can be excluded from the coating liquid film. In other words, for example, in the case of detecting the presence of a bubble on the right side of the lowermost screen opening 5ca in the figure 9, the piezoelectric element corresponding to the lowermost screen opening 5ca is driven to be ejected from the lowermost screen opening 5ca. A predetermined amount of the coating liquid is used to extrude the bubbles from the vicinity of the screen opening toward the outer edge of the flat plate 71. Further, if it is detected that there is a bubble between the lowermost mesh hole in the illustration of FIG. 9 - and the upper one of the mesh holes 5ca, the corresponding piezoelectric element 5ba of the lower one of the upper mesh holes 5ca is driven from the above The two sieve holes 5ca discharge a predetermined amount of the coating liquid, and the bubbles are extruded from the two sieve holes 5ca toward the outer edge of the flat plate 71. 1278351 In addition, at this time, the base is destroyed. ί 'If the distance between the detection domain bubble and the fine near position (4) hole 5 (7) is detected, based on the distance, it can be determined whether or not the coating liquid is discharged from the above-mentioned sieve hole, and if the coating liquid is discharged If you can use the controller 6 to pay attention to the amount of spit. In other words, the presence of air bubbles, which is associated with the bubble, is hard to cure. Therefore, if the position of the money is generated, and the coating liquid hardened material is produced, but the discharge is not caused, it is not necessary to exclude the air bubbles. In this case, even if bubbles are present, it is not necessary to discharge the coating liquid from the above-mentioned Xuekong. Therefore, if the distance between the bubble and each of the sieve holes is greater than the set distance, the coating liquid is not discharged from the sieve L 5ca. Further, if the bubble exists within the set distance, the necessary amount of the coating liquid required to extrude the bubble beyond the set distance is determined based on the distance between the mesh (6) and the bubble. The amount of the coating liquid at this time may be experimentally determined, or an approximate value may be obtained geometrically based on the distance between the mesh 5ca and the bubble, the set distance, and the thickness of the coating liquid film. In order to remove the bubbles, the amount of the coating liquid discharged can be reduced in such a manner, and the waste of the coating liquid can be prevented. Further, since the above operation cannot be performed after the coating liquid around the bubble is cured, it is necessary to determine the time required for the coating liquid to be hardened in advance and to perform the time. In addition, the above-mentioned decorative smear cloth liquid is used for the slabs of the coffee plate 5, and even if the flat plate 71 formed is larger than the bottom surface of the mesh plate 5c, the coating liquid is considered from the flat plate in such a case that the movable pedestal can be moved. On the 83, the above-mentioned action tray is performed on behalf of _W, and the __ lion can be moved underneath. Further, in the above-described operation, the flat plate 71 may be detached from the mesh sheet and may be displaced. Therefore, the support plate of the flat plate 71 or the platform 85a may be supported by the other replacement platform 85a to maintain the state. In addition, although a photograph is taken as an example here, as long as it can detect a bubble, a Hne sensor can also be used. When the application of the substrate is resumed from the state shown in Fig. 8 (c) and Fig. 9, the controller 9 operates the chuck provided on the stage 85a. With the suction of this suction cup 7, let the tablet? ! It is separated from the mesh sheet and held on the platform 85a. Next, the control steam (4) is driven to descend below the flat port 85a which is held flat (4), and the operation is performed by peeling off the flat plate attached to the mesh sheet & side by the coating liquid film. When the flat plate 71 is peeled off from the mesh sheet side, the coating liquid (coating liquid film) may remain in the discharge outlet screen 5ca and its vicinity. Here, the coating device of this embodiment can be configured to wipe the member 72, and wipe the hardened coating liquid remaining on the edge of the mesh sheet 5c and the coating liquid remaining on the bottom surface when the substrate (4) is newly applied. membrane. In other words, as shown in FIGS. 5 and 6, between the pedestal 3 and the support table 85, a wiping member 72 is provided, which is an elastic member, the length and the lateral direction of the coating head 5 (arrow γ in the illustration) The direction is the same or longer - some. Therefore, from the state shown in Fig. 6, the platform coffee supporting the platform milk is first moved to the lower end position to be retracted, and then the actuator of the cylinder 84 is moved to the ascending end position, so that the state shown in Fig. 6 is as shown in Fig. 6. , the pedestal 3 is moved in the direction of the arrow χ in the figure, and the front end portion of the wiping member 72 continuously contacts the bottom surface of the mesh sheet & the wiper layer is applied to the coating liquid film and the edge coating liquid remaining on the bottom surface of the mesh hole sheet 5. Hardened material. The hardened material of the coating liquid that has been wiped off will fall into the box. W. The operator can remove the accumulated coating liquid film and coating liquid 17 1278351 from the moving pedestal (4). As described in the teachings of the present invention, the coating apparatus of the present embodiment is formed by arranging a transparent glass sheet with a larger shape but a similar shape on the bottom surface of the mesh sheet 5c. Because the structure can be combined with the sieve-coating "fine, the flat plate 71 is said to work with the coating liquid film on the mesh sheet 5c' to avoid hardening of the coating liquid in the sieve hole 5ca and its vicinity, and to prevent the coating head Blocked. Further, in the above description of the embodiment, the flat plate 71 is formed in the vicinity of the coating head 5 side, but the coating head 5 may be formed in the vicinity of the flat plate 71 in a reduced manner. Further, the coated article is not limited to the substrate W, and may be, for example, printing paper. Further, the flat film is attached to the mesh sheet by the coating liquid film, and the support plate of the flat plate is taken as an example. However, in addition to the support table, the other conventionally disposed strips can be removed. For example, a stripping device for a suction cup such as a suction pad of a mechanical crane may be provided on the bottom surface of the mesh sheet.
在此情況下，因為只是從上述支持台上將貼附於筛孔片的平板取下，所 以也可將數辦減最上狀平板依_序重4_配置在域台上。如 此’便不需要-直供給平姻支持台，可以減輕賴者的負擔。口 D 從筛孔將剝下之平板，其優點在於可重複清洗附著其上之塗佈液以保持 清潔狀態繼續使用。關於清洗可由作翻取下以手清洗，或者是在裝置上 設置清洗裝置。關於清洗裝置，例如可設置保持平板之保持台座，= 容劑 滲入之擦拭布或海綿等吸水性件’和乾燥狀態之擦拭布或海綿等吸水性 件。其構成首先是轉人之财齡_並_於保持台座上之平板 附著塗佈液之面(被清掃面)將塗佈祕拭掉，録，以鶴㈣之吸水性 件緊貼並滑動於平板上將剩餘的溶劑擦拭掉。 18 1278351 % 此外，於上述的動作當中，在以溶劑滲入之吸水性件擦拭附著於平板上 之塗佈液動作之前，也可於上述說明之實射向下設置與擦拭件相同之元 件，先擦拭掉附著於平板上的塗佈液。 此外上述說明之例子當中，平板是和篩孔片底面的形狀相似，但卻猶微 大一點，但是不—定要較篩孔片底面大，形狀也不-定要與篩孔片底面相 、、口之平板右可以覆盖於師孔片底面之篩孔及其周圍，且平板與篩 孔片之間可形成塗佈液膜，因而可防止篩孔周圍塗佈液硬化及防止硬化物 #造成吐出不良的話就可以了。 此外，在例子的說明當中，平板可覆蓋八個塗佈頭，但事實上並非一定 要如此，平板只要能對應於每個位於篩孔片之塗佈頭之大小，且可貼附於 每個塗佈話就可以了。此外平板也可以—個—個分別地貼附於每個筛 在種情況之下，可依塗佈_數量或篩孔的數量來貼平板貼。也就是說， 於圖4、圖5的例子當中，可將平板貼附於8個塗佈頭當中的兩端塗佈頭， 以其餘的6個塗佈頭來進行塗佈作業。 因此，當數個塗佈頭或數個篩孔當中，只使用部分進行塗佈作業，而其 他處於待機狀態時，可充分地防止滯留於待機中軌上之塗佈液硬化。然 而此時’因為不需要任何特別的機構來維持平板於篩孔片之貼附狀態，因 有此機構所以塗佈動作並不受拘束。 平板以對塗佈液之黏濕性良好的材質，或表面做過特別處理使其與塗佈 液之間的黏濕性良好的材質所製成最為合適。制這些材f的平板，可使 19 1278351 % 筛孔吐出之凸狀塗佈液在平板及篩孔片之間圓滑地擴散，可防止平板於筛 孔片之間所形成的塗佈液膜產生泡氣。 前述例子當中，在篩孔吐出凸狀塗佈液形成塗佈液滴的同時，是以控制 供給壓電元件的電壓，讓塗佈液從篩孔，，但也可以下例子所敛述的方 法。 換言之，在_虹吸原理將塗佈液由塗佈液供給槽供給雜佈頭的情況 下，細孔片的底面高度與塗佈液供給槽之液面高度之高低差，關係到於筛 φ孔之篩孔片底面開口部之塗佈液表面雜。例如，塗佈液供給槽内的液面 高度較所定高度低時，上述於篩孔開口部之塗佈絲面形狀就是凹狀的， 減地’若較所定高度辨縣凸狀。因此，為了讓上述篩關口部之塗 佈液表面雜為凸狀’必醉先進行實驗財得塗佈賴給彻的液面高 度’並以控制塗佈液供給槽内塗佈液的供給排出量，調整上述所求出的液 面高度，讓塗佈液滴形成於篩孔。 此外，在所述例子當中’在_孔塗佈液以凸狀形成塗佈液滴，但事實上 _只要是篩孔片底面與平板之間可形成塗佈液膜即可，所以也可以先移動平 板使其接近篩孔片’從_孔吐出預先設定量的塗佈液於平板上，以平板上 的塗佈液在篩孔片與平板之間形成塗佈液膜。在如此的情況下，與上述實 施例相同’可防止篩孔附近塗佈液硬化物的產生，同時可靠著塗佈液的表 面張力及Μ性之密著力，不需要制的保持機構，就可將平板貼附於 孔片上。 、币 接著，在此說明將貼附於篩孔片之平板剝卸的其他例子。 20 1278351 % 平板藉由塗佈液膜貼附於篩孔片，例子當中，是支持台於圖8⑷所示 的狀1時進仃_卩操作，但實際上也可以在支持台85下降時進行。 以上述實_之圖6、圖8⑷之說明如下，讓支持台上升下降來操作 亦可。 圖8 (c)巾所不的狀態，汽缸84之作動桿_，從上述實施例中所記載 之上升端位置進_步地移到設定距離的上方。此^定距離可由圖8⑷中 所不之支持台85之平台85a和平板71之間的距離，加上讓平台85a與平 籲板71確實接觸的預留值，等設計數據算出。 移動此作動桿84a之设定距離，將平台85a上升至貼附於篩孔片&之平 板71接觸的位置。 此時作動才干84a因為其構造中央有彈性件84aa，平台85a與平板u接 觸所產生的衝擊，被此彈性件84aa所吸收。此外，即使設定距離大於在圖 8 (c)巾所不的狀悲之平台85a與平板71之間的實際距離，也可以防止平 板71與平台85接觸時所產生的破損。 ♦作動桿咖移動到設的麟的動作完成後，換句話說，也就是平台祝 與平板71接觸後的時點，讓平台85a的吸盤作動。因此，平板71因平台 85a而被吸著。此外’也可以在平台85a上升時讓真空功能作動。 之後，讓作動桿84a下降到實施例中所記載之下降端位置。因此，平板 71可從篩孔片5c被剝下來。 又，此例子當中，除了實施例中所記載的下降端位置及上升端位置之外， 也必須將作動桿停止在貼附於與篩孔片5c之平板71相接觸的第3位置。 21 ,1278351In this case, since only the flat plate attached to the mesh sheet is removed from the above-mentioned support table, the number of the uppermost flat plates can be arranged on the domain table. If you don't need it, you can directly supply the marriage support desk, which can reduce the burden on the people. Port D The plate to be peeled off from the screen hole has the advantage that the coating liquid adhered thereto can be repeatedly cleaned to maintain a clean state for continued use. The cleaning can be done by hand-washing or by setting a cleaning device on the device. As the cleaning device, for example, a holding pedestal for holding the flat plate, a water absorbing member such as a wiping cloth or a sponge into which the toner is infiltrated, and a water absorbing member such as a wiping cloth or a sponge in a dry state may be provided. The composition is firstly the age of the person who transferred the person _ and _ the surface of the flat-plate-attached coating liquid on the pedestal (the surface to be cleaned) is wiped off by the coating, and the water-absorbent member of the crane (4) is closely attached and slid Wipe off the remaining solvent on the plate. 18 1278351 % In addition, in the above operation, before the action of the coating liquid adhered to the flat plate by the water-absorbing member infiltrated with the solvent, the same components as the wiper may be disposed downward in the above-described description. Wipe off the coating liquid attached to the plate. In addition, in the above-mentioned example, the flat plate is similar in shape to the bottom surface of the mesh plate, but it is still slightly larger, but it is not necessarily larger than the bottom surface of the mesh plate, and the shape is not determined to be opposite to the bottom surface of the mesh plate. The right side of the plate can cover the sieve hole on the bottom surface of the hole plate and the surrounding area, and a coating liquid film can be formed between the plate and the mesh plate, thereby preventing the coating liquid around the sieve hole from hardening and preventing the hardened material# from being caused. If you spit out badly, you can do it. In addition, in the description of the example, the flat plate can cover eight coating heads, but in fact it is not necessarily the case, as long as the flat plate can correspond to the size of each coating head located in the mesh sheet, and can be attached to each The coating can be done. In addition, the plates can also be attached to each of the sieves separately. In the case of the plates, the plates can be attached according to the number of coatings or the number of sieve holes. That is, in the example of FIGS. 4 and 5, the flat plate can be attached to the both ends of the eight coating heads, and the coating operation can be performed by the remaining six coating heads. Therefore, among a plurality of coating heads or a plurality of sieve holes, only a part of the coating operation is performed, and when it is in a standby state, the coating liquid remaining on the standby middle rail can be sufficiently prevented from being hardened. However, at this time, since no special mechanism is required to maintain the attachment state of the flat plate to the mesh sheet, the coating operation is not restricted by this mechanism. The flat plate is most suitably made of a material having a good viscosity to the coating liquid or a material having a surface treated with a special viscosity to the coating liquid. The flat plate of these materials f can smoothly spread the convex coating liquid discharged from the 19 1278351% sieve hole between the flat plate and the mesh hole sheet, thereby preventing the formation of the coating liquid film formed between the flat plate and the mesh plate. Inflate. In the above example, the coating liquid droplet is discharged from the screen hole to form the coating liquid droplet, and the voltage applied to the piezoelectric element is controlled to allow the coating liquid to pass through the screen hole. However, the method may be as described in the following examples. . In other words, in the case where the coating liquid is supplied from the coating liquid supply tank to the miscellaneous cloth head by the principle of siphoning, the height difference between the bottom surface height of the pore sheet and the liquid level of the coating liquid supply tank is related to the sieve φ hole. The surface of the coating liquid on the bottom surface of the mesh sheet is miscellaneous. For example, when the liquid level in the coating liquid supply tank is lower than a predetermined height, the shape of the coated filament surface in the opening of the screen opening is concave, and the minus ground is convex if it is larger than the predetermined height. Therefore, in order to make the surface of the coating liquid of the screen opening portion convex, it is necessary to carry out the experiment to obtain the liquid level of the coating liquid, and to control the supply and discharge of the coating liquid in the coating liquid supply tank. The amount of the liquid surface obtained above was adjusted to allow the coating liquid droplets to be formed in the sieve holes. Further, in the above example, the coating liquid is formed in a convex shape in the _ hole coating liquid, but in fact _ as long as the coating liquid film can be formed between the bottom surface of the mesh sheet and the flat plate, it is also possible to The flat plate is moved so as to be close to the mesh sheet, and a predetermined amount of the coating liquid is discharged from the hole to the plate, and a coating liquid film is formed between the mesh plate and the plate with the coating liquid on the plate. In such a case, as in the above-described embodiment, it is possible to prevent the occurrence of the hardened material of the coating liquid in the vicinity of the sieve hole, and at the same time, to secure the surface tension of the coating liquid and the adhesion of the crucible, and the maintenance mechanism is not required. Attach the plate to the hole. , Currency Next, another example of peeling off the flat plate attached to the mesh sheet will be described here. 20 1278351 % The plate is attached to the mesh sheet by a coating liquid film. In the example, the support table is operated in the shape shown in Fig. 8 (4), but in practice, the support table 85 can also be lowered. . As described above with reference to Fig. 6 and Fig. 8 (4), the support table can be operated up and down. In the state shown in Fig. 8(c), the actuator lever_ of the cylinder 84 is moved stepwise from the ascending end position described in the above embodiment to the upper side of the set distance. This distance can be calculated from the distance between the platform 85a of the support table 85 and the flat plate 71 which is not shown in Fig. 8 (4), plus the reserved value for causing the platform 85a to contact the panning plate 71, and the like. The set distance of the actuating lever 84a is moved to raise the platform 85a to a position where it is attached to the flat plate 71 of the mesh sheet & At this time, the actuating member 84a is absorbed by the elastic member 84aa because the central elastic member 84aa is formed in the center, and the impact generated by the contact of the platform 85a with the flat plate u is absorbed. Further, even if the set distance is larger than the actual distance between the platform 85a and the flat plate 71 which are not in the case of Fig. 8(c), the damage generated when the flat plate 71 comes into contact with the platform 85 can be prevented. ♦ After the action of moving the lever to move to the set lin, in other words, the time when the platform is in contact with the flat plate 71, the suction cup of the platform 85a is activated. Therefore, the flat plate 71 is sucked by the platform 85a. In addition, the vacuum function can be activated when the platform 85a is raised. Thereafter, the operating lever 84a is lowered to the lower end position described in the embodiment. Therefore, the flat plate 71 can be peeled off from the mesh sheet 5c. Further, in this example, in addition to the lower end position and the rising end position described in the embodiment, the actuating lever must be stopped at the third position which is attached to the flat plate 71 of the mesh sheet 5c. 21,1278351
V 在此，關於汽缸84，作動桿84a之行程較實施例中所記載的汽虹84長，將 此桿的下端置於實施例中所記載的下降端位置，上端置於與平板η些接觸 的位置。因此，在實施例中所記載的上升端位置，可使用定位(伽麟)機 構阻止作動84a的移動。 在此例子當中’因為讓平台85a與平板71相接觸，平板71確實可被吸 著於平台85a，也確實可從篩孔片5c將平板71剝下。 再者，除在此例子和先前所述的實施例當中，平板71可為磁性體，筛孔 Φ片5c之相向面也可是磁性體，平台85中之吸盤也可以磁鐵代替。 本發明並不限於玻璃基板及半導體晶圓等基板，形成定向膜及電阻等機 能性薄膜所使用白勺塗佈液，也可適用於上述基板洗净用之揮發性液體，或 所形成的塗佈液滴與平板接觸前不會完全揮發的液體。 本發明之塗佈裝置因為具有控制平板藉由塗佈液與塗佈頭接觸的裝置構 成，所以平板藉由塗佈液所形成的塗佈液膜貼附到塗佈頭側。 因此，可阻礙篩孔及其附近的塗佈液與空氣的接觸以保持其流動性，所 #以可避免因塗佈液硬化所造成的篩孔阻塞。 此外，根據本發明中防止塗佈頭阻塞的方法，因為與塗佈頭相向配置的 • 平板，藉由塗佈液膜貼能貼附到塗佈頭側，所以篩孔及其附近的塗佈液之 動性得以確保，也可以防止阻塞，同時也可將平板從塗佈頭剝下，重新 開始進行塗佈作業。 22 1278351 【圖式簡單說明】 第1圖為習知使用之塗佈裝置實施例之正面圖。 第2圖為圖1中所示之塗佈裝置之侧面圖。 第3圖為圖1中所示之塗佈頭之擴大斷面圖。 第4圖為本發明之塗佈裝置實施例之正面圖。 第5圖為圖4中所示之塗佈裝置之側面圖。 第6圖為圖4中所示之塗佈頭之擴大斷面圖。 第7圖為圖6中所示之塗佈裝置之部分擴大正面圖。 第8圖為圖4中所示之塗佈裝置製之動作說明圖。 第9圖為圖8(c)中所示之動作說明圖之AA斷面圖。 【主要元件符號說明】 1基台 la腳 lb安裝板 2導執 3台座 3a滑動件 4固定體 4a支持主體 4b、4c支持件 4d臂 5塗佈頭 5a主體 5b可撓板 5c篩孔片 23 1278351 5d液室 5aa供給油路 5ba壓電元件 5ca筛孑L 6、9控制器 8移動機構 71平板 72擦拭件 81 L形拖架 82導軌 83移動台座 84汽缸 84a作動桿 84aa彈性件 85支持台 85a裝卸平台 W基板V Here, with respect to the cylinder 84, the stroke of the actuating lever 84a is longer than that of the steam rainbow 84 described in the embodiment, the lower end of the rod is placed at the lower end position as described in the embodiment, and the upper end is placed in contact with the flat plate n. s position. Therefore, in the ascending end position described in the embodiment, the movement of the actuation 84a can be prevented by using the positioning (Gallin) mechanism. In this example, since the platform 85a is brought into contact with the flat plate 71, the flat plate 71 can be sucked to the platform 85a, and the flat plate 71 can be peeled off from the mesh sheet 5c. Further, in addition to the examples and the previously described embodiments, the flat plate 71 may be a magnetic body, and the opposing faces of the mesh Φ sheets 5c may be magnetic bodies, and the suction cups in the platform 85 may be replaced by magnets. The present invention is not limited to a substrate such as a glass substrate or a semiconductor wafer, and a coating liquid for forming an oriented film or a functional film such as a resistor can be applied to the volatile liquid for cleaning the substrate or the formed coating. A liquid that does not completely evaporate before the cloth droplets come into contact with the plate. Since the coating apparatus of the present invention is constituted by a device for controlling the contact of the flat plate with the coating head by the coating liquid, the coating liquid film formed by the coating liquid is attached to the coating head side. Therefore, the contact of the coating liquid and the coating liquid in the vicinity thereof with the air can be hindered to maintain the fluidity thereof, so that the sieve hole clogging caused by the hardening of the coating liquid can be avoided. Further, according to the method of preventing the clogging of the coating head in the present invention, since the flat plate disposed opposite to the coating head can be attached to the coating head side by the coating liquid film, the coating of the sieve opening and its vicinity The fluidity is ensured and the clogging can be prevented. At the same time, the plate can be peeled off from the coating head and the coating operation can be resumed. 22 1278351 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view of an embodiment of a coating apparatus conventionally used. Fig. 2 is a side view of the coating apparatus shown in Fig. 1. Figure 3 is an enlarged cross-sectional view of the coating head shown in Figure 1. Figure 4 is a front elevational view of an embodiment of a coating apparatus of the present invention. Figure 5 is a side elevational view of the coating apparatus shown in Figure 4. Figure 6 is an enlarged cross-sectional view of the coating head shown in Figure 4. Fig. 7 is a partially enlarged front elevational view of the coating apparatus shown in Fig. 6. Fig. 8 is an explanatory view showing the operation of the coating apparatus shown in Fig. 4. Fig. 9 is a cross-sectional view taken along line AA of the operation explanatory diagram shown in Fig. 8(c). [Main component symbol description] 1 base la foot lb mounting plate 2 guide 3 pedestal 3a slider 4 fixed body 4a support body 4b, 4c support member 4d arm 5 coating head 5a main body 5b flexible plate 5c mesh plate 23 1278351 5d liquid chamber 5aa supply oil passage 5ba piezoelectric element 5ca sieve L6, 9 controller 8 moving mechanism 71 flat plate 72 wiper 81 L-shaped carriage 82 guide rail 83 moving pedestal 84 cylinder 84a actuating rod 84aa elastic member 85 support table 85a loading platform W substrate