1276590 ⑴ 九、發明說明 【發明所屬之技術領域】 ^ 本發明是關於在傳送帶和搬運處之間搬運物品的移載 、 裝置及搬運系統，尤其是關於在傳送帶和傳送帶之間，搬 運系統及無塵室等處理裝置或檢查裝置等設備的裝運埠和 傳送帶之間進行移載送出物品。 【先前技術】 · 在無塵室等進行物品的搬運是在擔任工程間搬運等的 長距離搬運或大量搬運的主傳送帶，和擔任工程內搬運等 .的短距離少量搬運的副傳送帶之間，進行物品的送出。曰 本專利文獻1是揭示在主傳送帶和副傳送帶的分支部設置 使副傳送帶進入主傳送帶內，將可自由轉動的昇降台使用 於送出裝置。此時，停止主傳送帶，使送出裝置的昇降台 上昇進行物品的移載，並使得昇降台下降，將物品移載至 停止的副傳送帶上，然後啓動副傳送帶，從分支部搬運出 β 物品。原則上副傳送帶和主傳送帶在搬運面的高度相同’ 因此在物品藉副傳送帶從分支部搬運出爲止之前必須停止 主傳送帶。於是從主傳送帶的停止至再啓動爲止的等待時 間爲昇降台的上昇、昇降台的轉動、昇降台的下降、藉副 _ 傳送帶搬運出的4個步驟，在此期間會增長主傳送帶的停 | 止時間。並且在無塵室內搬運的物品，由於多爲易損耗 品、單純移載的時間短，因此藉推進機等將物品載置於傳 送帶上的狀態朝著和搬運方向不同的方向推壓物品時，會 -4- (2) 1276590 有物品因爲大振動的傳達而破損之虞。 〔特許文獻1〕日本專利特表2003 -5 062 8 9 並且，在無塵室以卡匣等的單位搬運半導體基板或液 晶基板等時，以傳送帶進行卡匣的搬運，可進行以裝載器 從傳送帶拾取卡匣下貨至裝運埠。其中，以裝運埠從卡匣 收送物品時的方向，和以傳送帶搬運卡匣時的方向不同。 .例如以傳送帶搬運卡匣時須有預定的方向，而裝運璋如不 是和此相反的方向時即構成不能關閉卡匣的場合。而以上 的場合，雖然即使將卡匣載置在托盤上搬運，不須進行傳 .送帶和裝運璋間的方向轉換，但是另外設置托盤時仍就不 方便。 .Ί：發明內容】 〔發明所欲解決之課題〕 本發明的課題是在傳送帶和搬運處之間進行物品的@ 出時，可持續抑制物品的振動，縮短傳送帶的停止時間° 申請專利範圍第2項發明的追加課題在於送出時保持物品 的姿態，且縮短調整物品姿態用的時間。申請專利範圍第 3項發明的追加課題爲不停止送出原來的主傳送帶即可進 行物品的送出，並維持著物品的姿態。申請專利範圍第4 項的發明是提供傳送帶傳送物品時縮短運送帶的時間’並 以低成本，具備緩衝器，且可以在傳送帶和裝運埠之間進 行物品轉向的移載裝置。 -5- (3) 1276590 〔解決問題用的手段〕 本發明的搬運系統是在傳送帶和搬運處之間送出物品 的搬運系統’其特徵爲：使具備支撐物品底部用的可自由 昇降台的台車，在傳送帶和搬運處之間行駛，當物品從傳 送帶送出至搬運處時，將物品上升到不干涉傳送帶的高 度，同時使台車移動至以台架所支撐的物品及台車藉著傳 送帶所搬運的物品間互不干涉的位置爲止。 以在上述台車設置轉動上述台架用的轉動手段，和上 述台車的行駛並排轉動台架爲佳。 此外，以上述傳送帶爲主傳送帶，上述搬運處爲副傳 送帶，上述台車的行駛路徑爲平面視圖呈L字型，L字型 的一邊位在主傳送帶內，另一邊位在副傳送帶內，設置使 台車的行駛速度和主傳送帶的搬運速度形成大致相同的時 間’控制上述台架的昇降使物品在主傳送帶和上述台架之 間移載的同步手段。 本發明的移載裝置是在傳送帶和複數個裝運埠成一列 配置的設備之間移載物品用的裝置，其特徵爲：傳送帶和 裝運埠間移載物品的途中設置暫置物品的緩衝器，且爲了 在緩衝器和裝運埠之間移載物品，設置鉛直方向移載物品 的起重裝置，及使得起重裝置至少和裝運埠之列平行移動 用的裝載器，同時設置在傳送帶和緩衝器間移載物品的移 載手段，及上述物品的方向可在傳送帶和裝運埠間的搬運 期間轉換用的轉換手段，將上述緩衝器設置在和上述傳送 帶大致相同高度的位準上，且平面方向爲上述裝運埠之列 -6 - (4) 1276590 的大致延長線上，且和裝運埠不致上下重疊，同時支撐物 品底部用的可自由昇降的台架設置在傳送帶和緩衝器間搬 運物品的台車’當物品從傳送帶朝著緩衝器送出時，使物 品上升到和傳送帶互不干涉的高度爲止，同時使台車移動 至台架所支撐的物品及台車利用傳送帶所搬運物品互不干 涉的位置爲止。 〔發明的效果〕 本發明中，物品從傳送帶送出時，例如，從傳送帶對 於台架開始進行物品的移載時停止傳送帶，使物品上升到 和傳送帶互不千涉的高度位置爲止，使台車移動至台架所 支撐的物品及台車利用該傳送帶所搬運物品互不干涉的位 置爲止時，可以再啓動傳送帶，縮短傳送帶的停止時間。 並且’台架橫越傳送帶時，由於使台架上升至物品和傳送 帶互不干涉的高度位置爲止，因此和藉著推進機等將物品 載置於傳送帶上的狀態下將物品朝著和傳送帶搬運方向不 同的方向推壓時比較，可以抑制傳至物品的振動。並且， 和利用台架支撐物品的底部，藉把持手段把持物品後昇降 的場合比較，由於不需要把持動作而可縮短移載的時間。 在此一邊轉動台架使台車行駛時，較台架的轉動和行 駛另外進行時，可以短時間送出物品。 再者，傳送帶在主傳送帶，搬運處爲副傳送帶，必須 縮短主傳送帶的限制時間時，使台車沿著L字型的路徑行 駿，在主傳送帶和台車形成大致等速的狀態下，物品在主 (5) 1276590 傳送帶和台架之間進行移載，可以不須停止主傳送帶即可 送出物品。 本發明的移載裝置是可自由移載藉裝載器沿著裝運埠 列而起重的裝置，進行緩衝器和裝運埠之間的移載，因此 1台的裝載器可對應複數個裝運埠。並且設有緩衝器，因 此可提高設備的運轉率，並且傳送帶在搬運上的能力增 大。並可以轉換物品的方向，因此以傳送帶搬運時的方向 和裝運璋的方向即使不同，仍可不需要托盤等。 其中，將緩衝器設置在和傳送帶大致相同高度的位 準，使具備支撐物品底部的可自由昇降台架的台車在傳送 帶和緩衝器間行駿搬運物品時，較起重裝置和傳送帶間直 接傳送物品時，更可縮短限制傳送帶的時間，提高傳送帶 的搬運效率。另外將緩衝器設置在平面方向裝運埠列的延 長線上時，裝載器只要在平面內單向移動即可。如上述， 以台車進行傳送帶和緩衝器之間物品的傳送，裝載器則進 行起重裝置的往返運動，及起重裝置的物品昇降，可以台 車和裝載器進行最適合的作業分配。並且，當台架橫越傳 送帶時，台架上升到物品和傳送帶互不千涉高度的位置， 因此和藉著推進機等在物品載置於傳送帶上的狀態將物品 朝著和傳送帶搬運方向不同的方向推壓時比較，可以抑制 傳達物品的振動。此外，藉台架支撐物品的底部，和以把 持手段把持物品後昇降時比較，由於不需要把持動作而可 縮短移載的循環時間。 -8- (6) 1276590 【實施方式】 以下是表示實施本發明的最佳實施例 〔實施例〕 第1圖〜第8圖是表示實施例及其變: 爲主傳送帶，擔任步驟間的大量搬運和長 接複數個副傳送帶6，從主傳送帶2朝著 半導體的卡匣8等物品，相反地從副傳送 卡匣8，搬運到其次的步驟等。實施例中 運對象物品的卡匣8，但是除此之外也可 其托盤、或瓦楞紙等物品和包裹、在機場 行李’但是以半導體的卡匣和液晶基板的 爲佳。主傳送帶2例如以一對輥式傳送费 接近副傳送帶6的輥式傳送帶4在分支部 並且副搬運帶6例如是以一對輥式傳送费 此外一對輥式傳送帶3、4和輥式傳送帶 以一方爲驅動滾子的傳送帶，另一方爲 -we 帯。 卡 8具有方向性，例如蓋1 0始終 的則進方向前面。主傳送帶2和副傳送帶 9內沒有配置副傳送帶6，使主傳送帶2 此互不干涉。20爲送出裝置，22爲其搬 所示’例如在3個位置具有卡合突起2 3， 底面的卡合凹部卡合。並且卡匣底面的卡 形。該等圖中，2 :距離搬運等，連 副傳送帶6送出 帶6接受送出的 ，雖表示作爲搬 以是液晶基板和 暫時保管的手提 托盤等易損耗品 ，3、4所構成， 丨9設有空隙5。 ^ 7、7所構成。 7、7之中，也可 從動滾子的傳送 位在傳送帶2、6 6之間的分支部 和副傳送帶6彼 運台，如第3圖 -25，形成與卡匣 合凹部由於具有 (7) 1276590 半球形的寬開口的凹部，因此只要在容許範圍內的偏位 在卡合的過程中卡合凹部和卡合突起23〜25會自然地 接。並且第3圖是表示去除外罩30狀態的送出裝置20 搬運台22是藉著汽缸等構成的昇降驅動部26自由 降，藉轉盤27例如可在〇。/ 90。等預定的角度之間自由 動。再者昇降驅動部26只要使搬運台22昇降，或者以 盤27以外的手段轉動搬運台22即可。昇降驅動部26 昇降以至少在搬運台22抵接卡匣8時及卡匣8載置於 送帶上時，控制盡可能以不產生振動的速度爲佳。28 行駛台車，沿著送出裝置20的導軌29行駿，30是送 裝置20的外罩，設置開口 32可以使搬運台22從外罩 突出移動。控制手段34是以訊號在主傳送帶2或副傳 帶6，送出裝置20之間傳送，控制送出裝置20配合主 送帶2和副傳送帶6。 如第2圖所示，搬運台22具有高低的兩個位置， 主傳送帶2和副傳送帶6之間，支撐卡匣8進行送出時 於高的位置，使搬運台22的底部通過和輥式傳送帶4 不干涉。如上述，將搬運台22的底部升高到和傳送帶 互不干涉的高度位置爲止，和卡匣8載置於傳送帶4的 態下藉推進機等朝著和傳送帶4的搬運方向不同的方向 出時比較，可以抑制傳達至卡匣8的振動。此外，行駛 車28的車輪以使用可或多或少吸收振動的適當硬度的 亞安樹脂爲佳。並且，卡匣8的底部是藉著搬運台22 高支撐，因此可兼具上昇動作和支撐動作，和利用把持 密 昇 轉 轉 的 傳 爲 出 30 送 傳 在 位 互 4 狀 推 台 聚 提 手 -10 - (8) 1276590 段把持提高卡匣8時比較’不需要把持動作而可縮短移載 的循環時間。且不支撐卡匣8，搬運台22在主傳送帶2 和副傳送帶6之間移動時，例如從主傳送帶2將物品送出 至副傳送帶6之後，恢復到分支部9內的待機位置時，搬 運台22是位在低的位置，潛於輥式傳送帶4的底部復 位。 第4圖是表示變形例。變形例的主傳送帶2’同樣在 輥式傳送帶3 ’側設有空隙5，在主傳送帶2 ’搬運方向的左 右雙方設置副傳送帶6、6’。副傳送帶6、6’的搬運方向 相反，因此將卡匣8從副傳送帶6’側送出時，而送出副 傳送帶6時，必須使其方向逆轉。該變形例中，搬運台 22是從.主傳送帶2’的物品方向，朝著左右各方向分別以 •9 0。合計180。自由轉動。並且送出裝置20’是增長搬運台 2 2的行程，形成可以從分支部9 ’朝著副傳送帶6 ’側’或 從分支部9 ’朝著副傳送帶6側的任一側送出。控制手段 35在主傳送帶2’及副傳送帶6、6’、送出裝置20’之間進 行訊號.的傳送，進行控制。第4圖的訊號S是副傳送帶 6 ’和控制部3 5之間的訊號。 第5圖是表示第2變形例。40是新的送出裝置’除 了特別指出的點外和第1圖〜第3圖的送出裝置2 0相同。 此時，搬運台22和隱藏在其卡匣下的台車是沿著L字型 的開口 42行駛，L字型開口 42的1邊位在主傳送帶2 內，另一邊位在副傳送帶6內’而2邊的交點則是位在主 傳送帶2的分支部9內。同步手段44在主傳送帶2、副 -11 - 1276590 Ο) 傳送帶6和送出裝置40之間傳送訊號，和藉主傳送帶2 對於卡匣8的搬運同步，使搬運台22移動。即，從第5 圖的左邊朝右邊移動卡匣8，一旦接近搬運台22左側的 略前端時，台車開始行駛，當搬運台2 2和卡匣8形成等 速時，搬運台22上昇，使卡匣8從主傳送帶2移載至搬 運台22。隨後’搬運台22 —邊繼續上昇，使行駛減速一 旦減速呈L字型行駛，下降到副傳送帶6內的位置，將卡 匣8移載到副傳送帶6。其結果，不須停止主傳送帶2即 可進行送出，並無須轉動搬運台22及可以使卡匣8以預 定的方向送出至副傳送帶6。 第6圖是表示第1圖〜第3圖實施例的動作模式，第 4圖的變形例與其相同。實線是表示以最高速進行送出時 的模式，一點虛線是表示確認各個步驟停止之後移到下一 步驟的模式。.停止主傳送帶，使卡匣停止在預定的位置 時，搬運台上昇將卡匣從主傳送帶移載到搬運台，例如到 達即使移動卡厘也不會和主傳送帶干涉的高度時，開始搬 運台的轉動和朝著副傳送帶側的水平移動，同時進行轉動 和水平移動。卡匣移動到副傳送帶上的預定位置爲止時， 使搬運台下降，移載到副傳送上。副傳送帶，例如只要在 搬運台的下降以至停止爲止的期間停止即可，其停止時間 極短。將卡匣移載到副傳送帶上時，搬運台維持在低的位 置，例如轉動的同時並行恢復到主傳送帶側。此時，搬運 台通過主傳送帶的下側。 如上述，將物品從主傳送帶移載到搬運台上之後，可 -12- (10) 1276590 以短時間再啓動主傳送帶的動作。例如卡[g間的間隔大 時，對於搬運台的移載完成後可以再啓動。並且即使後續 卡匣的間隔極端地短時，送出的卡匣一旦從主傳送帶離開 時，可以再啓動主傳送帶的動作。因此，可以縮短物品送 出時停止主傳送帶的時間。 實施例雖是表示從主傳送帶對於副傳送帶進行物品的 送出，但是和物品從副傳送帶送出主傳送帶時也相同。此 時，同樣在副傳送帶內將物品移載到搬運台上，在搬運台 上昇之後，搬運台的轉動和主傳送帶內的移動是並行進 行’在主傳送帶內使搬運台下降，將物品移載到主傳送 帶。此時，在主傳送帶內搬運台的下降開始之後，以至停 止爲止的時間（卡匣間的間隔大時），或者卡匣在平面方 向進入和主傳送帶重疊的位置後以至搬運台的下降終止爲 止必須要停止主傳送帶。並且主傳送帶和副傳送帶之間搬 運台的恢復是一旦將搬運台潛入主傳送帶的下側時，使主 傳送帶和副傳送帶進行物品的搬運互不干涉。 第7圖是表示第3變形例。在和主傳送帶2平行的相 同搬運方向上設置副傳送帶7 2，例如以主傳送帶2和副 傳送帶72改變搬運速度，分別以主傳送帶2作爲高速長 距離搬運用，以副傳送帶72作爲低速的短距離搬運用。 或者也可以使用副傳送帶72作爲物品的儲藏用或作爲超 過主傳送帶2之用等。送出裝置70是在傳送帶2、72之 間不轉換卡匣8的方向送出，從第1圖〜第3圖的送出裝 置將轉盤排除。第7圖的變形例是可以簡單地進行在2個 -13- (11) 1276590 並排傳送帶2、72之間物品的送出，並且在送出時可以縮 短限制傳送帶2、7 2的時間，例如停止傳送帶2、7 2的時 間。其中和第5圖的變形例同樣地，一旦搬運台2 2設置 和傳送帶2、72等速平行行駿的區間時，更可以縮短傳送 帶2、72的限制時間。73、74爲搬運台22和傳送帶2、 7 2以专速平行行駿區間的開口。 第8圖是表示第4變形例。副傳送帶8 2是朝著和主 傳送帶2平行且朝著相反方向搬運卡匣8，例如再處理工 程內的不良品時的搬運，或在卡匣8的儲藏等使用副傳送 帶82。送出裝置80是在傳送帶2、82之間將卡匣8的方 向180°轉向後送出，形成可以第i圖〜第3圖的送出裝置 18 0°轉動轉盤。與第7圖的變形例同樣地，縮短送出時傳 送帶2、82的限制時間，設置搬運台22和傳送帶2、82 等速平行行駛的區間，也可以更縮短傳送帶2、8 2的限制 時間。8 3、8 4是搬運台2 2和傳送帶2、8 2等速平行行駛 區間的開口。 第7圖、第8圖的變形例不僅限於主傳送帶和副傳送 帶之間的送出，並可以使用於平行2個輥式傳送帶之間的 卡匣等物品的送出。例如也可以應用在環狀的長距離傳送 帶（相當於實施例的主傳送帶）設置捷徑，使2個長距離 傳送帶在平行區間進行傳送帶間的送出等。如上述，本實 施例是使用在隔開間隔而具備搬運列的一對傳送帶間的物 品送出的搬運系統，具備可自由昇降的台架的台車是配置 在滾子等搬運手段的列之間，在台架下降的狀態，構成使 -14- (12) 1276590 台架位於傳送帶下方的位置，不會妨礙配置有台車的傳送 帶之物品的搬運，在傳送帶間的移動時也不會妨礙到傳送 帶的物品搬運。並且，台架上昇的狀態下，構成使支撐物 品的台架底部位在傳送帶上方的位置，當物品連同台車從 送出處的傳送帶朝著運送處的傳送帶移動時，對送出處的 傳送帶不會妨礙物品的搬運而可以再啓動送出處的傳送 帶。更如上所述，當台車返回時，不須停止傳送帶，可在 任意的時間返回。其結果可以縮短循環時間，只要以上構 成的搬運系統時不限定於上述實施例。 第9圖〜第13圖是表示設置緩衝器時移載裝置的實施 例及其變形，第9圖〜第13圖是表示最初的移載裝置。 1〇2爲移載裝置，在此是於無塵室內將半導體卡匣108等 的物品移載於處理裝置1 1 2或檢查裝置等裝運埠1 1 4和傳 送帶系統1 04之間移載。傳送帶系統1 〇4即是以工程內傳 送帶（場內傳送帶），相對於複數個處理裝置112搬運卡 匣108，例如以一對輥式傳送帶1〇5、丨〇6構成，可以該 等同時作爲動力傳送帶，或者也可以一方爲動力傳送帶， 另一方爲自由滾子的傳送帶。107是設置在輥式傳送帶 106的空隙’是支撐卡匣1〇8的底部運送用的搬運台12〇 通過用的間隙。 卡匣108在其前面設有蓋1〇9，在裝運埠1 14開啓蓋 109’進行半導體基板的取出放入。並且卡匣1〇8的頂部 設置凸緣110，形成可以捲揚裝置132的夾頭部134把 持。並且卡匣108例如爲了方便搬運起見，傳送帶系統 -15- (13) 1276590 104是將蓋109定位在行進方向前面，裝運璋114由於必 須將盡1 〇 9定位在處理裝置1 1 2側，因此在傳送帶系統 104和裝運ί阜114之間進fj方向的90。轉換。另外裝運；j：阜 114是複數1列配置在處理裝置112的前面等，在平面方 向其左右例如兩側設置緩衝器1 1 6，例如一方作爲從傳送 帶系統〗〇4的搬入用’另一方作爲朝著傳送帶系統1〇4的 搬出用。此外如第1 〇圖表示，傳送帶系統1 〇 4和緩衝器 1 1 6是位於高的位置’相對於此裝運埠1 1 4是位在低的位 置。 如第1 1圖表示搬運裝置1 1 8的構造時，i 20爲上述 的搬運台，其上部設有和卡匣108底面的卡合凹部卡合， 例如3個卡合突起123。搬運台120可藉著昇降驅動部 124自由昇降，昇降行程爲搬運台120的底部可以通過輥 式傳送帶106的上部而不干涉的高度（高位置），和突起 123可通過輥式傳送帶106的底部而不干涉的高度（低位 置）的2種類。搬運台1 20的行駛路徑是如第9圖表示， 形成連結傳送帶系統1 04內和緩衝器1 1 6內的直線形，以 傳送帶系統104和緩衝器116支撐卡匣108底面的高度爲 大致同一高度。並且在從傳送帶系統104至搬運台120之 卡匣108的移載開始前停止傳送帶系統104，使得搬運台 120從傳送帶系統104脫離而進入緩衝器1 16內，移動到 和傳送帶系統104上的卡匣108不干涉的位置時，再啓動 傳送帶系統104。其結果，可以縮短停止傳送帶系統104 的時間（限制時間）。 -16- (14) 1276590 轉盤125是例如將昇降驅動部124和搬運台120在傳 送帶系統104內的方向和緩衝器116內的方向之間轉換 9〇°。而且昇降驅動部124或轉盤125等爲任意的構成， 在昇降驅動部的上側設置轉盤，使轉盤和搬運台昇降。 1 26是行駛台車，沿著設置在基座1 27的行駛軌道行駛， 行駿路徑122爲設置在基座127上部的開口。 •回到第9圖 '第10圖，130爲裝載機，使捲揚裝置 1 32朝著傳送帶系統1 04的搬運方向，換言之和裝運埠 1 1 4的排列方向平行往返移動，捲揚裝置1 3 2是利用皮帶 或纜繩等吊掛材135使夾頭部134昇降。以上裝載機130 的動作使得捲揚裝置.132在水平方向往返移運動，使卡匣 1〇8可朝著左右的緩衝器116或裝運埠114移載的位置移 動，及藉捲揚裝置132使卡匣108相對於緩衝器116或裝 運璋114移載的2種。並且，搬運裝置118的作業是在傳 送帶系統1 〇 4和緩衝器1 1 6之間進行卡匣1 〇 8的移載，和 在此之間90°轉換卡匣108方向的2種。140爲移載裝置 102的支柱，M2爲支架，在此移載裝置102包含裝載機 130和緩衝器116、116及搬運裝置118、118，但是不含 傳送帶系統104或裝運i阜114。再者，本實施例中，移載 裝置102雖是形成以支柱140支撐，但是也可以從天井懸 吊在處理裝置的側方形成維修用的空間。 第12圖表示實施例的1卡匣量的移載操作。停止傳 送帶使搬運裝置的搬運台上昇，將卡匣從傳送帶移載到搬 運台’完成搬運台的上昇時，和搬運台轉動的同時使搬運 -17- (15) 1276590 台從傳送帶系統內朝著緩衝器內水平移動。搬運台從傳送 帶系統脫離時可以在啓動傳送帶，和緩衝器間的移載時可 以縮短停止傳送帶的時間。搬運台一旦到達緩衝器上時， 搬運台下降將卡匣移載至緩衝器，此時完成卡匣方向的 9 0 °轉換。其次搬運台位於低位置時，潛入輥式傳送帶的 底部，恢復到傳送帶系統內。等待必須進行從緩衝器至裝 運璋之卡匣的移載’必須移載時，將捲揚裝置水平移動到 緩衝器上’拾取卡匣’接著同時進行捲揚裝置的水平移動 和夾頭部的下降，將卡匣卸下至裝運埠。此時，卡匣是相 對於裝運埠正確的方向卸下。 以下是表示從裝運埠至傳送帶進行卡匣的搬出。此 時，使用的緩衝器是和搬入時使用的緩衝器不同的緩衝 器。一旦卡匣可以從裝運埠搬出時，水平移動捲揚裝置的 同時使夾頭部.下降，時取卡匣，同時進行夾頭部的上昇和 捲揚裝置的水平移動，將卡匣卸下至緩衝器。接著使搬運 台上升支撐卡匣的底部，同時進行朝著傳送帶系統內的水 平移動和搬運台的轉動，將卡匣移載至傳送帶。此時停止 傳送帶可以在卡匣到達和傳送帶干涉位置之後，以至移載 到傳送帶上爲止的時間，較短的時間爲佳。 再者，在第9圖延長搬運台的行駛路徑，設置可在傳 送帶系統1 〇 4的左右兩側搬運的行駛路徑1 5 0時，在傳送 帶系統1 04顯示的方向可以將追加的緩衝器1 5 1增設在緩 衝器1 1 6的相反側。並且，一旦將連接追加的緩衝器 151、151間的傳送帶152，增設在從裝運埠1 14列的傳送 -18- 152 (16) 1276590 帶系統1 04顯示的相反側時，藉著卡厘載置在傳送帶 上，更可以增加緩衝器能力。 並且第9圖爲設置L字型的行駛路徑1 54，使搬 的行駛方向在途中9 0 °變化時，則不需要行駛台車 盤。此時，使用L字型的行駛路徑1 5 4可以實現方向 換手段。而且利用L字型行駛路徑1 54內和傳送帶 104的搬運方向平行的部分，以和傳送帶的搬運速度 相同的速度移動搬運台而移載卡匣時，在卡匣移載時 需要停止傳送帶。 第13圖是表示移載裝置的第2實施例。除了特 摘的點以外是和第9圖〜第1 2圖的實施例相同。該實 中，裝載機160可在Y方向（和傳送帶系統104的 方向呈直角方向）自由移動，相對於裝載機160的捲 置132是在X方向（裝運埠1 14a〜1 14c的排列方向） 行方向自由移動。並且在夾頭部1 3 4 ’上設置使夾取 匣的方向 9 0 °轉換的機構。此外也可以將卡匣的方向 機構設置在捲揚裝置1 3 2上，轉換各個夾頭部的方向 傳送帶系統104的方向顯示，在裝運埠1 14a〜1 14c的 側設置緩衝器162a〜162c，例如使緩衝器和裝運璋以 對應。因此，夾持傳送帶系統1 〇4將緩衝器和裝運埠 在相反側，即使裝運埠形成連續時，仍可確保充分數 緩衝器。尤其是，緩衝器和裝運埠爲1 : 1時，在緩 和裝運埠之間，裝載機1 60不需在X方向移動即可 載卡匣，具有良好的移載效率。 運台 的轉 的轉 系統 大致 可不 別指 施例 搬運 揚裝 的平 後卡 轉換 。從 相反 1 : 1 設置 量的 衝器 以移 -19- (17) 1276590 再者’緩衝器162a〜162c的高度位置可以和裝運埠 114a〜114c相同，或者和傳送帶系統104相同，或者也可 以在該等中間的高度位置。並且也可以在緩衝器 162 a〜162c上設置轉盤164，以緩衝器側轉換卡匣的方 向。在緩衝器162 a〜162c轉換卡匣的方向時，只要在第 1 3圖的姿態A和姿態B之間轉換方向即可。相對於此在 裝運埠上轉換卡匣的方向時，會有蓋的角和處理裝置112 衝突之虞。 第13圖的變形例中，裝運埠1 14a〜1 14c對應1 :1可 以設置緩衝器162a〜162c，即使在裝運t阜114a〜114c的左 右不具有設置緩衝器的空間時仍可對應。並且除了設置轉 盤164時方向的轉換之外，可以將卡匣的搬運作業集中於 裝載機160。 實施例雖是以收容在無塵室的半導體基板等之卡匣的 移載爲例，但是不僅限於此，也可以運用在傳送帶和裝運 埠之間一邊轉換物品的方向一邊移載的一般用途。也可以 處理裝置1 1 2爲設備的例，而檢查裝置則爲其他的裝置。 【圖式簡單說明】 第1圖爲實施例的搬運系統的要部平面圖。 第2圖爲第1圖的搬運系統的II-II方向剖面圖。 第3圖爲實施例使用的移載裝置的要部平面圖。 第4圖爲變形例的搬運系統的要部平面圖。 第5圖爲第2變形例的搬運系統的要部平面圖。 -20- (18) 1276590 第6圖是表示實施例的搬運系統的動作時間圖，1 )爲 表示主傳送帶的開/關，2)爲搬運台的昇降位置，3)爲搬 · 運台的轉動角，4)爲搬運台的水平位置，5)爲副傳送帶的 開/關。 第7圖爲第3變形例的搬運系統的要部平面圖。 第8圖爲第4變形例的搬運系統的要部平面圖。 第9圖爲實施例的移載裝置的要部平面圖。 第1 〇圖爲實施例的移載裝置的要部側面圖。 φ 第11圖爲實施例使用的送出裝置的剖面圖。 第1 2圖是表示實施例1卡匣量的搬運運算的流程 圖。 第13圖爲第2實施例的移載裝置的要部平面圖。 【主要元件符號說明】 3主傳送帶 3、5輥式傳送帶 _ 1 1空隙 1 2 副傳送帶 1 3輥式傳送帶 14 卡匣 . 1 5分支部 16蓋 20、40送出裝置 23搬運台 -21 - (19) 1276590 23〜25 卡合突起 2 6昇降驅動器 27 轉盤 28台車 29 導軌 32、34 開□ 30外罩1276590 (1) IX. INSTRUCTIONS OF THE INVENTION [Technical field to which the invention pertains] ^ The present invention relates to a transfer, device and handling system for transporting articles between a conveyor belt and a transporting station, in particular, between a conveyor belt and a conveyor belt, a handling system and The goods are transported and transported between the shipping magazine and the conveyor belt of a processing device such as a dust chamber or an inspection device. [Prior Art] The transportation of articles in a clean room or the like is carried out between a main conveyor that is used for long-distance transportation or large-scale transportation such as inter-engineering transportation, and a sub-conveyor belt that is used for short-distance transportation with a small amount of transportation. Send the item.曰 Patent Document 1 discloses that a sub-conveyor belt is provided in a branch portion of a main conveyor and a sub-belt to enter a main conveyor, and a freely rotatable elevator is used for the delivery device. At this time, the main conveyor is stopped, the elevating table of the delivery device is raised to carry out the transfer of the articles, the elevating platform is lowered, the articles are transferred to the stopped sub-belt, and the sub-belt is activated to carry out the β-items from the branch portions. In principle, the sub-belt and the main conveyor have the same height on the conveying surface. Therefore, the main conveyor must be stopped before the article is transported from the branch by the sub-belt. Therefore, the waiting time from the stop of the main conveyor to the restart is the four steps of the rise of the lift, the rotation of the lift, the lowering of the lift, and the transfer by the sub-belt, during which the main conveyor will be stopped. Stop time. In addition, since the articles that are transported in the clean room are mostly fragile and have a short time for simple transfer, when the articles are placed on the conveyor by a pusher or the like, the articles are pushed in a direction different from the conveyance direction. -4- (2) 1276590 There are items that are damaged due to the transmission of large vibrations. [Patent Document 1] Japanese Patent Laid-Open No. 2003-5 062 8 9 When a semiconductor substrate, a liquid crystal substrate, or the like is transported in a clean room in a unit such as a cassette, the cassette is transported by a conveyor belt, and the loader can be carried out by the loader. The conveyor picks up the card and delivers it to the shipping container. Among them, the direction in which the goods are shipped from the cassette is different from the direction in which the cassette is transported by the conveyor. For example, when the cassette is transported by the conveyor belt, there must be a predetermined direction, and if the shipment is not in the opposite direction, it constitutes a case where the cassette cannot be closed. On the other hand, even if the cassette is placed on the tray and transported, there is no need to transfer the direction between the transport belt and the transport cassette, but it is still inconvenient when the tray is additionally provided. Ί 发明 发明 发明 发明 发明 发明 发明 课题 课题 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 〕 物品 物品 物品 物品 物品 物品 物品 物品 物品 物品 物品An additional object of the two inventions is to maintain the posture of the article at the time of delivery and to shorten the time for adjusting the posture of the article. The additional problem of the third invention of the patent application is that the delivery of the article can be carried out without stopping the delivery of the original main conveyor, and the posture of the article is maintained. The invention of claim 4 is a transfer device which provides a time for shortening the conveyance belt when the conveyance belt conveys the article, and which has a damper at a low cost and which can steer the article between the conveyor belt and the shipping magazine. -5- (3) 1276590 [Means for Solving the Problem] The conveyance system of the present invention is a conveyance system that delivers articles between a conveyor belt and a conveyance place, and is characterized in that a trolley having a freely movable platform for supporting the bottom of the article is provided Driving between the conveyor belt and the transporting place, when the articles are transported from the conveyor belt to the transporting place, the articles are raised to a height that does not interfere with the conveyor belt, and the trolley is moved to the articles supported by the gantry and the trolleys are transported by the conveyor belt. The position where the items do not interfere with each other. It is preferable to rotate the gantry in parallel with the traveling of the above-described gantry in the above-described trolley. Further, the conveyor belt is a main conveyor belt, and the transporting portion is a sub-belt. The traveling path of the cart is L-shaped in plan view, one side of the L-shape is in the main conveyor, and the other side is in the sub-belt. The traveling speed of the bogie and the conveying speed of the main conveyor form substantially the same time 'synchronous means for controlling the lifting and lowering of the gantry to transfer the articles between the main conveyor and the gantry. The transfer device of the present invention is a device for transferring articles between a conveyor belt and a plurality of devices arranged in a row, and is characterized in that: a conveyor belt and a buffer for temporarily storing articles are disposed on the way of transporting the articles between the conveyors, And in order to transfer the articles between the buffer and the shipping magazine, a lifting device for vertically moving the articles, and a loader for moving the lifting device at least in parallel with the shipping magazine, and at the same time in the conveyor and the buffer The means for transferring the transferred articles, and the means for converting the direction of the articles during the conveyance between the conveyor and the magazine, and the buffers are disposed at a level substantially the same as the height of the conveyor, and the plane direction It is the extension line of the above-mentioned shipping package -6 - (4) 1276590, and does not overlap with the shipping ,, and the freely erecting gantry for supporting the bottom of the article is set between the conveyor belt and the buffer to carry the items between the trolleys' When the article is sent out from the conveyor belt toward the buffer, the article is raised to a height that does not interfere with the conveyor belt, and the trolley is moved at the same time The gantry is supported using the articles and the conveyor belt transporting the carriage until the article mutual non-interference position. [Effects of the Invention] In the present invention, when the article is delivered from the conveyor, for example, when the conveyor starts to transfer the article to the gantry, the conveyor is stopped, and the article is raised to a height position that does not interfere with the conveyor belt, so that the trolley moves. When the articles supported by the gantry and the trolley use the position where the articles carried by the conveyor do not interfere with each other, the conveyor can be restarted to shorten the stop time of the conveyor. In addition, when the gantry traverses the conveyor belt, the gantry is raised to a height position where the article and the conveyor belt do not interfere with each other. Therefore, the article is conveyed toward the conveyor belt while being placed on the conveyor belt by a pusher or the like. When the direction is pressed in different directions, the vibration transmitted to the article can be suppressed. Further, compared with the case where the bottom of the article is supported by the gantry, when the article is lifted and held by the holding means, the time for transferring can be shortened because the holding operation is not required. When the gantry is rotated while the gantry is being driven, the articles can be delivered for a short time when the gantry is rotated and traveled. Furthermore, the conveyor belt is on the main conveyor, and the transporting position is the sub-conveyor belt. When the time limit of the main conveyor belt must be shortened, the trolley is driven along the L-shaped path, and the main conveyor belt and the trolley form a substantially constant speed. Main (5) 1276590 Transfer between the conveyor and the gantry to deliver items without stopping the main conveyor. The transfer device of the present invention is a device that can be freely transferred and loaded by the loader along the shipping queue for transfer between the buffer and the shipping magazine, so that one loader can correspond to a plurality of shipping magazines. Moreover, a damper is provided, so that the operation rate of the apparatus can be improved, and the ability of the conveyor belt to carry it is increased. It is also possible to change the direction of the article, so that even if the direction in which the conveyor is carried and the direction in which the shipping is carried out are different, a tray or the like is not required. Wherein, the buffer is disposed at a level substantially the same height as the conveyor belt, so that the trolley having the freely-lifting platform supporting the bottom of the article is transported directly between the lifting device and the conveyor belt when carrying the articles between the conveyor belt and the buffer. When the article is used, the time for limiting the conveyor belt can be shortened, and the handling efficiency of the conveyor belt can be improved. In addition, when the buffer is placed on the extension line of the transport direction in the plane direction, the loader can move in one direction in the plane. As described above, the transfer of articles between the conveyor belt and the damper is carried out by the trolley, and the loader performs the reciprocating movement of the hoisting device and the lifting and lowering of the lifting device, so that the most suitable work can be distributed by the trolley and the loader. Further, when the gantry traverses the conveyor belt, the gantry rises to a position where the article and the conveyor belt do not have a height between each other, and therefore, the article is oriented differently from the conveyor belt in a state where the article is placed on the conveyor belt by a pusher or the like. When the direction is pushed, the vibration of the conveyed article can be suppressed. Further, by supporting the bottom of the article by the gantry and comparing the lifting and lowering of the article by the holding means, the cycle time of the transfer can be shortened since the holding operation is not required. -8- (6) 1276590 [Embodiment] The following is a preferred embodiment for carrying out the invention. [Embodiment] Figs. 1 to 8 show an embodiment and a variation thereof: a main conveyor belt, which serves as a large number of steps. The plurality of sub-transports 6 are transported and lengthened, and the articles are transported from the main conveyor 2 toward the semiconductor cassette 8 and the like, and vice versa, from the sub-transport cassette 8 to the next step. In the embodiment, the cassette 8 of the object to be transported is used, but in addition to this, it is preferable to use a tray or a corrugated paper or the like, and a baggage at the airport, but it is preferably a semiconductor cassette or a liquid crystal substrate. The main conveyor belt 2 is, for example, a pair of roller-type conveying costs approaching the roller conveyor belt 4 of the sub-belt 6 at the branching portion and the auxiliary conveying belt 6 is, for example, a pair of roller-type conveying fees, a pair of roller conveyor belts 3, 4 and a roller conveyor belt. One side is the conveyor belt that drives the roller, and the other side is -we 帯. The card 8 has a directionality, for example, the cover 10 is always in the forward direction. The sub-conveyor belt 6 is not disposed in the main conveyor belt 2 and the sub-belt belt 9, so that the main conveyor belt 2 does not interfere with each other. Reference numeral 20 denotes a delivery device, and 22 is moved therein. For example, the engagement projections 2 3 are provided at three positions, and the engagement recesses of the bottom surface are engaged. And the card has a bottom shape. In the drawings, 2: distance transport, etc., and the sub-belt 6 is fed out by the belt 6 and is sent out, which is a portable substrate such as a liquid crystal substrate and a temporary storage tray, and is composed of 3 and 4, and 丨9 is provided. There are gaps 5. ^ 7, 7 constitutes. In 7, 7 , the transfer position of the driven roller between the conveyor belts 2 and 6 6 and the sub-transport belt 6 can also be carried out, as shown in Fig. 3 to Fig. 25, and the recessed portion formed with the card has ( 7) 1276590 A semi-spherical wide-opening recess, so that the engagement recess and the engaging projections 23 to 25 are naturally connected during the engagement in the offset within the allowable range. Further, Fig. 3 shows the delivery device 20 in which the state of the outer cover 30 is removed. The transfer table 22 is freely lowered by the elevation drive unit 26 constituted by a cylinder or the like, and the turntable 27 can be, for example, a turntable. / 90. Wait for a predetermined angle to move freely. Further, the elevation drive unit 26 may be configured such that the transfer table 22 is moved up and down or the transfer table 22 is rotated by means other than the disk 27. The elevation drive unit 26 is raised and lowered to control the speed at which vibration is not generated as much as possible, at least when the transfer table 22 abuts the cassette 8 and when the cassette 8 is placed on the feed belt. 28 The traveling carriage travels along the guide rails 29 of the delivery device 20, 30 is the outer cover of the delivery device 20, and the opening 32 is provided to allow the transfer table 22 to protrude from the outer cover. The control means 34 transmits signals between the main conveyor 2 or the sub-passage 6, and the delivery means 20, and the control delivery means 20 cooperates with the main conveyor 2 and the sub-belt 6. As shown in Fig. 2, the transfer table 22 has two positions of high and low, between the main conveyor 2 and the sub-belt 6, and the support cassette 8 is fed at a high position, so that the bottom of the transfer table 22 passes and the roller conveyor 4 Do not interfere. As described above, the bottom of the transfer table 22 is raised to a height position that does not interfere with the conveyor belt, and the cassette 8 is placed in the conveyor belt 4, and the pusher or the like is directed in a direction different from the conveyance direction of the conveyor belt 4. When compared, the vibration transmitted to the cassette 8 can be suppressed. Further, the wheel of the traveling vehicle 28 is preferably a sub-resin using a suitable hardness which can absorb vibration more or less. Moreover, the bottom of the cassette 8 is supported by the transport table 22, so that both the ascending motion and the supporting motion can be used, and the transmission is carried out by using the gripping and lifting, and the transmission is carried out in the same position. -10 - (8) 1276590 When the segment handle is increased, the card is compared with 'no need to hold the action to shorten the cycle time of the transfer. When the transfer table 22 is not supported by the cassette 8 and the transfer table 22 is moved between the main conveyance belt 2 and the sub-belt 6, for example, after the article is fed from the main conveyance belt 2 to the sub-transport 6 and returned to the standby position in the branch portion 9, the conveyance table 22 is in a low position and is submerged at the bottom of the roller conveyor 4 to be reset. Fig. 4 is a view showing a modification. In the main conveyor 2' of the modified example, the gap 5 is provided on the side of the roller conveyor 3', and the sub-belts 6, 6' are provided on both the left and right sides in the conveyance direction of the main conveyor 2'. Since the conveyance directions of the sub-belts 6 and 6' are reversed, when the cassette 8 is fed out from the side of the sub-belt 6', when the sub-belt 6 is fed out, the direction must be reversed. In this modification, the conveyance table 22 is oriented from the article direction of the main conveyor 2' to the right and left directions by 190. Total 180. Free to rotate. Further, the delivery device 20' is a stroke for growing the transport table 22, and can be sent from either the branch portion 9' toward the sub-transport 6' side or from the branch portion 9' toward the side of the sub-transport 6 side. The control means 35 performs transmission of a signal between the main conveyor 2', the sub-belts 6, 6', and the delivery device 20', and performs control. The signal S in Fig. 4 is a signal between the sub-belt 6' and the control unit 35. Fig. 5 is a view showing a second modification. 40 is a new delivery device' which is the same as the delivery device 20 of Figs. 1 to 3 except for the points specifically indicated. At this time, the transfer table 22 and the carriage hidden under the cassette are driven along the L-shaped opening 42, one side of the L-shaped opening 42 is in the main conveyor 2, and the other side is in the sub-belt 6' The intersection of the two sides is located in the branch portion 9 of the main conveyor belt 2. The synchronizing means 44 transmits a signal between the main conveyor 2, the sub--11 - 1276590 Ο) conveyor belt 6 and the delivery device 40, and synchronizes the conveyance of the cassette 8 by the main conveyor 2 to move the conveyance table 22. That is, the cassette 8 is moved from the left side to the right side of the fifth drawing, and when the front end of the left side of the conveyance table 22 is approached, the carriage starts to travel. When the conveyance table 22 and the cassette 8 form a constant speed, the conveyance table 22 rises. The cassette 8 is transferred from the main conveyor 2 to the transfer table 22. Then, the "transport table 22" continues to rise, and the traveling speed is decelerated to be L-shaped, and is lowered to the position in the sub-belt 6, and the cassette 8 is transferred to the sub-belt 6. As a result, the main conveyor 2 can be sent without stopping the conveyance table 22, and the carriage 8 can be conveyed to the sub-belt 6 in a predetermined direction. Fig. 6 is a view showing an operation mode of the first to third embodiments, and a modification of Fig. 4 is the same as the modification. The solid line indicates the mode at the time of the highest speed transmission, and the one-dotted line indicates the mode in which it is confirmed that the respective steps are stopped and then moved to the next step. When the main conveyor is stopped and the cassette is stopped at the predetermined position, the transport table is lifted to transfer the cassette from the main conveyor to the transport table, for example, when the height does not interfere with the main conveyor even if the card is moved, the transport platform is started. The rotation and the horizontal movement toward the side of the sub-belt are simultaneously rotated and horizontally moved. When the cassette moves to a predetermined position on the sub-belt, the transport table is lowered and transferred to the sub-transport. The sub-belt can be stopped, for example, as long as the conveyance table is stopped or stopped, and the stop time is extremely short. When the cassette is transferred to the sub-belt, the carriage is maintained at a low position, for example, while rotating to return to the main conveyor side in parallel. At this time, the transport platform passes through the lower side of the main conveyor. As described above, after the article is transferred from the main conveyor to the transport platform, the operation of the main conveyor can be restarted for a short time of -12-(10) 1276590. For example, when the interval between the cards [g is large, it can be restarted after the transfer of the transfer table is completed. And even if the interval of the subsequent cassette is extremely short, the action of the main conveyor can be restarted once the sent cassette is removed from the main conveyor. Therefore, it is possible to shorten the time for stopping the main conveyor when the article is delivered. In the embodiment, the article is fed from the main conveyor to the sub-belt, but the same is true when the article is fed from the sub-belt to the main conveyor. At this time, the article is transferred to the transfer table in the sub-belt, and after the transfer table is raised, the rotation of the transfer table and the movement in the main conveyor are performed in parallel. 'The transfer table is lowered in the main conveyor, and the articles are transferred. Go to the main conveyor. At this time, after the start of the lowering of the transport table in the main conveyor, the time until the stop (when the interval between the cassettes is large), or the position where the cassette enters the position overlapping the main conveyor in the plane direction, and the lowering of the conveyance table is terminated. The main conveyor must be stopped. Further, the recovery of the transport table between the main conveyor and the sub-belt is such that when the transport platform is submerged into the lower side of the main conveyor, the main conveyor and the sub-belt are transported without interfering with each other. Fig. 7 is a view showing a third modification. The sub-belt 7 is disposed in the same conveyance direction parallel to the main conveyor 2, and the conveyance speed is changed by, for example, the main conveyor 2 and the sub-belt 72, respectively, for the main conveyor 2 as a high-speed long-distance conveyance, and the sub-belt 72 as a low-speed short. For transportation. Alternatively, the sub-belt 72 may be used as a storage for articles or as a use for the main conveyor 2 or the like. The delivery device 70 is fed in a direction in which the cassette 8 is not switched between the conveyors 2, 72, and the rotary table is removed from the delivery devices of Figs. 1 to 3. The modification of Fig. 7 is that the feeding of articles between two 13-(11) 1276590 side-by-side conveyors 2, 72 can be easily performed, and the time for limiting the conveyor belts 2, 7 2 can be shortened when feeding, for example, stopping the conveyor belt 2, 7 2 time. In the same manner as the modification of Fig. 5, when the conveyance table 2 2 is provided with the sections of the conveyors 2, 72 which are parallel-parallel, the restriction time of the conveyors 2, 72 can be shortened. 73 and 74 are openings of the transport table 22 and the conveyor belts 2, 7 2 in parallel with each other at a dedicated speed. Fig. 8 is a view showing a fourth modification. The sub-belt 8 2 is conveyed toward the main conveyor 2 in the opposite direction, and conveys the cassette 8 in the opposite direction, for example, when the defective product in the process is reprocessed, or the sub-belt 82 is used in the storage of the cassette 8 or the like. The delivery device 80 diverts the direction of the cassette 8 by 180° between the conveyors 2, 82, and forms a 90° rotation dial of the delivery device of the first to third figures. Similarly to the modification of Fig. 7, the restriction time of the conveyance belts 2, 82 at the time of delivery is shortened, and the sections in which the conveyance table 22 and the conveyors 2, 82 are driven in parallel at the same speed are provided, and the restriction time of the conveyors 2, 8 2 can be further shortened. 8 3, 8 4 are the openings of the transport table 2 2 and the conveyor belts 2, 8 2 in the constant speed parallel travel section. The modification of Figs. 7 and 8 is not limited to the delivery between the main conveyor and the sub-belt, and can be used for the conveyance of articles such as cassettes between two roller conveyors in parallel. For example, it is also possible to apply a shortcut to an endless long-distance conveyor belt (corresponding to the main conveyor of the embodiment) so that two long-distance conveyor belts can be transported between conveyor belts in parallel sections. As described above, the present embodiment is a transport system in which articles are transported between a pair of conveyor belts having a transport line at intervals, and the trolley including the gantry that can be freely lifted and lowered is disposed between the rows of transport means such as rollers. In the state where the gantry is lowered, the position of the -14-(12) 1276590 gantry is located below the conveyor belt, and the handling of the articles on the conveyor belt equipped with the trolley is not hindered, and the movement between the conveyor belts is not hindered to the conveyor belt. Item handling. Moreover, in the state in which the gantry is raised, the bottom of the gantry supporting the article is positioned above the conveyor belt, and when the article moves together with the trolley from the conveyor belt at the delivery point toward the conveyor belt at the delivery point, the conveyor belt at the delivery station does not hinder the conveyor belt. The conveyor can be re-started at the delivery location. As described above, when the trolley returns, it is not necessary to stop the conveyor belt and it can be returned at any time. As a result, the cycle time can be shortened, and the above-described embodiment is not limited to the above embodiment. Figs. 9 to 13 show an embodiment of a transfer device when a buffer is provided and a modification thereof, and Figs. 9 to 13 show the first transfer device. 1〇2 is a transfer device, in which the articles such as the semiconductor cassette 108 are transferred to the processing device 1 1 2 or the shipping device 1 1 4 such as the inspection device and the conveyor belt system 104 in the clean room. The conveyor system 1 〇4 is an in-engine conveyor (in-field conveyor), and carries the cassette 108 with respect to a plurality of processing units 112, for example, a pair of roller conveyors 1〇5 and 丨〇6, which can be used at the same time. The power transmission belt, or one of the power transmission belts, and the other is a free roller conveyor belt. Reference numeral 107 denotes a space in which the space provided in the roller conveyor 106 is a gap for the conveyance table 12 for transporting the bottom of the support cassette 1〇8. The cassette 108 is provided with a cover 1 〇 9 at its front side, and the cover 109 1 14 is opened to carry out the take-out of the semiconductor substrate. Further, a flange 110 is provided at the top of the cassette 1 to form a grip portion 134 which can be held by the hoisting device 132. And the cassette 108, for example, for ease of handling, the conveyor system -15-(13) 1276590 104 is positioned to position the cover 109 in front of the direction of travel, and the shipping cassette 114 must be positioned at the side of the processing device 1 1 2 since it must be positioned 1 〇 9 Thus, 90 in the fj direction is entered between the conveyor system 104 and the shipment 114. Conversion. In addition, j: 阜 114 is disposed in front of the processing device 112 in a plurality of columns, and the like, and a buffer 1 1 6 is provided on the left and right sides, for example, in the plane direction, for example, one of the two is carried out from the conveyor system 〇4. It is used for carrying out the conveyor system 1〇4. Further, as shown in Fig. 1, the conveyor system 1 〇 4 and the buffer 1 16 are located at a high position 'relative to the position where the shipment 埠 1 1 4 is at a low position. When the structure of the conveying device 1 18 is shown in Fig. 1, i 20 is the above-described conveying table, and the upper portion thereof is provided with an engaging recessed portion of the bottom surface of the cassette 108, for example, three engaging projections 123. The transfer table 120 can be freely moved up and down by the elevation driving portion 124, and the lifting stroke is a height at which the bottom of the conveying table 120 can pass through the upper portion of the roller conveyor 106 without interference (high position), and the projection 123 can pass through the bottom of the roller conveyor 106 2 types of height (low position) without interference. The traveling path of the transport table 1 20 is as shown in Fig. 9, forming a straight line connecting the inside of the conveyor system 104 and the buffer 116, and the heights of the bottom surface of the conveyor system 104 and the buffer 116 supporting the cassette 108 are substantially the same. height. And the conveyor system 104 is stopped before the transfer from the conveyor system 104 to the cassette 108 of the transfer table 120, such that the transfer table 120 is detached from the conveyor system 104 into the buffer 116 and moved to the card on the conveyor system 104. When the 匣 108 does not interfere with the position, the conveyor system 104 is activated. As a result, the time (limit time) at which the conveyor system 104 is stopped can be shortened. -16- (14) 1276590 The turntable 125 is, for example, converted between the direction in which the lift drive unit 124 and the transfer table 120 are in the conveyor belt system 104 and the direction in the buffer 116 by 9 〇. Further, the elevation drive unit 124, the turntable 125, and the like are of an arbitrary configuration, and a turntable is provided on the upper side of the elevation drive unit to raise and lower the turntable and the conveyance table. 1 26 is a traveling trolley that travels along a traveling rail provided on the pedestal 1 27, and the traveling path 122 is an opening provided at an upper portion of the susceptor 127. • Returning to Fig. 9 'Fig. 10, 130 is the loader, causing the hoisting device 1 32 to move in the direction of transport of the conveyor system 104, in other words parallel to the direction of the arrangement of the transport 埠1 1 4, the hoisting device 1 3 2 is to lift and lower the chuck portion 134 by using a hanging material 135 such as a belt or a cable. The action of the above loader 130 causes the hoisting device 132 to move back and forth in the horizontal direction, so that the cassettes 1〇8 can be moved toward the left and right buffers 116 or the position where the loading cassette 114 is moved, and by the hoisting device 132 The cassette 108 is transported in two types with respect to the buffer 116 or the magazine 114. Further, the operation of the transporting device 118 is to perform the transfer of the cassette 1 〇 8 between the conveyor belt system 1 〇 4 and the damper 1 16 , and the two directions of the 90° conversion cassette 108 therebetween. 140 is the struts of the transfer device 102, M2 is the cradle, where the transfer device 102 includes the loader 130 and the dampers 116, 116 and the handling devices 118, 118, but does not include the conveyor system 104 or the shipping container 114. Further, in the present embodiment, the transfer device 102 is formed to be supported by the support 140, but a space for maintenance may be formed by hanging from the side of the processing device on the side of the processing device. Fig. 12 is a view showing the transfer operation of 1 card amount of the embodiment. When the conveyor is stopped, the conveyance table of the conveyance device is raised, and the cassette is transferred from the conveyor to the conveyance table. When the conveyance table is raised, the conveyance table is rotated and the conveyance -17-(15) 1276590 is moved from the conveyor system toward the conveyor. Move horizontally inside the buffer. When the transfer table is detached from the conveyor system, the time to stop the conveyor can be shortened when the conveyor is started and the load is transferred between the dampers. Once the transfer table reaches the buffer, the transfer table is lowered to transfer the cassette to the buffer, at which point the 90° transition in the cassette direction is completed. When the pallet is in the low position, it sneaked into the bottom of the roller conveyor and returned to the conveyor system. Waiting for the transfer from the buffer to the cassette of the shipment ' 'When it is necessary to transfer, move the hoisting device horizontally to the buffer 'Pickup cassette' and then simultaneously move the hoisting device horizontally and the chuck Lower and remove the cassette to the shipping container. At this point, the cassette is removed in the correct orientation relative to the shipping cassette. The following is the removal of the cassette from the shipping cassette to the conveyor. At this time, the buffer used is a buffer different from the buffer used when loading. Once the cassette can be carried out from the shipping cassette, the hoisting device is horizontally moved while the chucking head is lowered, and the cassette is taken while the chucking head is raised and the hoisting device is horizontally moved to remove the cassette to buffer. Next, the transfer table is raised to support the bottom of the cassette, and the horizontal movement toward the conveyor system and the rotation of the transfer table are simultaneously performed to transfer the cassette to the conveyor. At this time, it is preferable to stop the conveyor belt for a short period of time after the cassette arrives at the belt interference position and even after the transfer to the conveyor belt. Further, when the travel route of the transport platform is extended in FIG. 9 and the travel route 150 that can be transported on the left and right sides of the conveyor system 1 〇4 is provided, the additional buffer 1 can be added in the direction indicated by the conveyor system 104. 5 1 is added to the opposite side of the buffer 1 16 . Further, when the conveyor 152 between the buffers 151 and 151 to which the connection is added is added to the opposite side of the transmission -18-152 (16) 1276590 belt system 104 shown in the shipping cassette, the card is loaded by the card. Placed on the conveyor belt, you can increase the buffer capacity. Further, in the ninth figure, when the L-shaped travel path 1 54, is provided so that the traveling direction of the transport changes by 90 ° in the middle, the traveling vehicle disc is not required. At this time, the direction change means can be realized by using the L-shaped travel path 1 5 4 . Further, when the carriage is moved by the same speed as the conveyance speed of the conveyor belt in the portion of the L-shaped travel path 154 which is parallel to the conveyance direction of the conveyor belt 104, it is necessary to stop the conveyance belt during the transfer of the cassette. Fig. 13 is a view showing a second embodiment of the transfer device. The same points as the embodiments of Figs. 9 to 12 are excluding the points selected. In this case, the loader 160 is freely movable in the Y direction (the direction perpendicular to the direction of the conveyor system 104), and the winding 132 with respect to the loader 160 is in the X direction (the arrangement direction of the shipments 141 14a to 14c) The direction of the line moves freely. Further, a mechanism for switching the direction of the gripping jaw 90° is provided on the chuck head 1 3 4 '. In addition, the directional mechanism of the cassette may be disposed on the hoisting device 132, the direction of the directional conveyor system 104 of each of the nipples is changed, and the buffers 162a to 162c are disposed on the side of the shipping cassettes 1414a to 14c, For example, the buffer and the shipping port are corresponding. Therefore, the nip conveyor system 1 〇 4 places the damper and the shipping raft on the opposite side, ensuring a sufficient number of snubbers even when the shipping raft is formed continuously. In particular, when the buffer and shipping cassette are 1:1, the loader 1 60 can be loaded with the cassette without moving in the X direction, and has good transfer efficiency. The transfer system of the transport platform can be roughly referred to as the post-card transfer of the handling of the lift. From the opposite 1: 1 set amount of the punch to shift -19-(17) 1276590 and then the 'buffers 162a to 162c can be the same height position as the shipping cassettes 114a to 114c, or the same as the conveyor system 104, or The middle height position. Further, a turntable 164 may be provided on the buffers 162a to 162c to shift the direction of the cassette by the buffer side. When the buffers 162a to 162c switch the direction of the cassette, the direction may be switched between the posture A and the posture B in Fig. 3 . In contrast to the direction in which the cassette is converted on the shipping cassette, there is a conflict between the corner of the cover and the processing device 112. In the modification of Fig. 13, the buffers 162a to 162c may be provided corresponding to the 1:11a to 14c corresponding to 1:1, and may correspond even when there is no space for setting the buffer around the shipments t阜114a to 114c. Further, in addition to the direction change when the dial 164 is set, the handling work of the cassette can be concentrated on the loader 160. The embodiment is exemplified by the transfer of the cassette of the semiconductor substrate or the like housed in the clean room. However, the present invention is not limited thereto, and a general use in which the direction of the article is transferred between the conveyor and the shipping cassette can be used. It is also possible to treat the device 1 12 as an example of a device, and the inspection device as another device. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view of a main part of a conveyance system of an embodiment. Fig. 2 is a cross-sectional view taken along line II-II of the conveying system of Fig. 1. Fig. 3 is a plan view of the main part of the transfer device used in the embodiment. Fig. 4 is a plan view of a main part of a conveyance system according to a modification. Fig. 5 is a plan view of a main part of a conveyance system according to a second modification. -20- (18) 1276590 Fig. 6 is a timing chart showing the operation of the transport system of the embodiment, 1) showing the opening/closing of the main conveyor, 2) the lifting position of the transport table, and 3) the moving and transporting station. The rotation angle, 4) is the horizontal position of the transfer table, and 5) is the on/off of the sub-belt. Fig. 7 is a plan view of a main part of a conveyance system according to a third modification. Fig. 8 is a plan view of a main part of a conveyance system according to a fourth modification. Fig. 9 is a plan view showing the main part of the transfer device of the embodiment. Fig. 1 is a side elevational view of the main part of the transfer device of the embodiment. φ Fig. 11 is a cross-sectional view showing the delivery device used in the embodiment. Fig. 1 is a flow chart showing the conveyance calculation of the jam amount in the first embodiment. Fig. 13 is a plan view showing the main part of the transfer device of the second embodiment. [Main component symbol description] 3 main conveyor belt 3, 5 roller conveyor belt _ 1 1 clearance 1 2 sub conveyor belt 1 3 roller conveyor belt 14 匣. 1 5 branch portion 16 cover 20, 40 delivery device 23 transport station-21 - ( 19) 1276590 23~25 snap projection 2 6 lift drive 27 turntable 28 trolley 29 guide rail 32, 34 open □ 30 cover
3 4、3 5控制手段 44同步手段 70、80送出裝置 7 2、8 2 副傳送帶 73 、 74 、 83 、 84 開□3 4, 3 5 control means 44 synchronization means 70, 80 delivery device 7 2, 8 2 sub-belt 73, 74, 83, 84 open □
-22--twenty two-