1275480 (1) 玖、發明說明 【發明所屬之技術領域】 本發明是關於，藉由加熱及加壓，將薄膜狀材料積疊 埋入到基板上、或使基板上的薄膜材料平坦化的加壓裝置 ，特別是關於真空加壓裝置及加壓方法。 【先前技術】 引刷電路板，有時會因爲形成導電性圖案而在表面產 生凹凸或孔部。在這種基板的表面貼上薄膜狀的絕緣材料 或感光材料等的薄膜狀材料時，使用平常的疊合機的話， 容易讓氣泡殘留在基板表面的凹部或孔部，而經常產生不 良品。 因此，使用在真空中將薄膜狀材料貼到基板表面的真 空加壓裝置。 在使用真空加壓裝置之前，會將薄膜狀材料輕壓在基 板表面將其保持住。這種作業是使用平常的疊合機來進行 的。 以往，一般廣泛使用的真空加壓裝置，是具有由可互 相密封卡合的上下殼體構件所構成的真空室。用來將薄膜 狀材料保持在表面的基板，是在被保持於上下兩片薄膜皮 帶之間的狀態被***到上下一對的加壓塊之間。其中一方 的加壓塊，加壓面是由彈性體所構成，是被固定在其中一 方的殼體構件的內側，具有加熱器。另一方的加壓塊，在 加壓面具有彈性體的膜，是被固定在另一方的殼體構件的 -4- (2) 1275480 內側，同樣具有加熱器。 在將基板***後，上下的殼體構件會互相卡合密封而 構成了真空室。一邊將真空室的內部進行排氣，一邊藉由 設置在上下加壓塊的加熱器來將被保持在薄膜皮帶的基板 進行加熱。藉由加熱器的熱能，來將基板上的薄膜構件軟 化。 在基板被加熱到預定的溫度之後，會藉由氣體來按壓 上述彈性體的膜，將該膜按壓於基板。 將薄膜狀材料保持在表面的基板，會被夾在彈性體的 膜、與加壓面由彈性體所構成的加壓塊之間來進行加壓， 軟化的薄膜狀材料會大致緊貼在基板上的凹凸面。 【發明內容】 (發明欲解決的課題） 作爲真空加壓裝置最重要的機能， 是不要讓氣泡殘留在基板表面的較深的凹部或孔內， 而均勻地將薄膜狀材料埋入， 考慮到對後續製程的影響，以高生產性來實現將埋入 後的薄膜狀材料的表面平坦化。 因此所需要的條件， 第一，在將薄膜狀材料埋入到基板表面上的凹部及孔 內之前，充分地排出該凹部及孔內的空氣， 第二，爲了讓薄膜狀材料具有適當的柔軟性（流動性 )，能夠儘快將基板加熱到預定的溫度， -5- (3) 1275480 第三，近年來爲了對應圖案細微化、孔數增加及孔徑 的小直徑化’要能夠藉由更大的加壓力來進行均勻的埋入 動作’ 第四’考慮到設置裝置的地方是潔淨室，不使用油等 可能污染環境的材料， 第五’要使裝置儘可能地小型化，要讓裝置廉價化。 可是’傳統的真空加壓裝置在上述的第一〜第五點還 有改善的餘地。 也就是說’爲了要將各種種類的基板表面的凹部及孔 內的空氣充分的排出，且儘快加熱薄膜狀材料，在將上下 殼體密封卡合的狀態，需要配合由於基板的種類（大小、 重量）所改變的薄膜皮帶的撓曲，而將具有加熱器的加壓 塊與基板的距離進行適當的調整。 可是傳統的真空加壓裝置’如上述是將加壓塊固定在 殼體構件的構造，兩者是使用相同的驅動裝置同時進行上 升及下降。 因此，在將上下殼體密封卡合的狀態，加壓塊的位置 經常是一定的，並不能因應各種種類的基板來適當調整加 壓塊的位置也就是加熱器的位置。 結果，當基板與加壓塊的距離很近的情況，並不能完 全進行基板表面的凹部或孔部的排氣，將薄膜狀材料加_ 軟化使其緊貼在基板，會有氣泡殘留。 相反的，在基板與加壓塊的距離很遠的情況，需要耗 費將薄膜狀材料加熱軟化的時間，生產性會惡化。 1275480 (4) 而在將上述的基板夾在彈性體的膜與加壓塊之間，藉 由以氣體壓力所按壓的彈性體的膜來加壓基板的方式，也 考慮到之前的加壓塊與基板的距離很遠的情況，彈性體的 膜需要充分地伸長。 因此，由於彈性體的膜的強度，並不能用很大的加壓 力來進行加壓，則很難將薄膜狀材料埋入到基板表面的較 深凹部或孔部。 並且，在以彈性體的膜來進行加壓的情況，在對基板 埋入後的薄膜表面，會隨著基板表面的凹凸而產生凹凸部 ，在後續製程則需要將薄膜平坦化，結果會讓裝置或生產 線的構造大型化。 而爲了產生很大的加壓力，不使用彈性體的膜，而考 慮藉由將上下加壓塊設置在室部內的油壓缸、或使用滾珠 螺桿的馬達驅動來進行加壓的方法，前者，會使用可能會 污染環境的油，且需要油壓泵浦等的設置空間，在組裝裝 置時需要配管、抽氣作業，而需要防止漏油或油噴出的零 件，裝置的大型化及成本方面都有問題。後者，爲了要以 均勻的壓力來將加壓面全體加壓，則要提高加壓塊的剛性 、或者需要設置讓壓力均句化的衝材料，裝置會大型化 且在成本方面也有問題。 因此本發明欲解決的課題’要能小型化且廉價地提供 ，使氣泡不殘留於基板表面的較深的凹部或孔內，而使薄 膜狀材料埋入且緊貼，使薄膜狀材料平坦化的真空加壓裝 置。 1275480 (5) (用以解決課題的手段） 爲了解決上述課題，藉由本發明’ (與申請專利範圍相同） 【實施方式】 第1圖是本發明的一實施例的真空加壓裝置的側面圖 ，是採取局部剖面。 真空加壓裝置的真空加壓部34，是設置有真空室1。 真空室1，是由上側殼體構件2與下側殼體構件3所構成 〇 上側殼體構件2，是被安裝在支承塊4。而在真空加 壓部3 4，是設置有作爲基座的下側支承構件5，支承塊4 與下側支承構件5，是藉由上端固定在支承塊4而下端支 承在下側支承構件5的支柱6而被互相連結。 在形成真空室1的其中一方的構件也就是下側殼體構 件3的下面部，例如是樞支安裝著氣缸裝置的驅動裝置7 。並且在下側殻體構件3，是安裝有用來讓該下側殼體構 件3沿著支柱6穩定上下移動的導引手段8。驅動裝置7 與導引手段8，形成了用來讓上側殼體構件2與下側殼體 構件3互相密封卡合及分離的驅動手段。 在下側殼體構件3的上端周·緣部設置有環狀的密封構 件9。當藉由上述驅動手段讓下側殼體構件3上升時’密 封構件9與上側殼體構件2的下側周緣部會密封卡合在一 -8- 1275480 (6) 起，真空室1內部會成爲密封狀態。在該狀 真空室1的排氣口（沒有圖示）將內部空氣 可以讓真空室1內成爲減壓狀態。 另一方面，當藉由上述驅動手段使下側 降時，密封構件9與上側殼體構件2的下側 分離，形成了基板1 0的出入用的開口部1 1 在圖示實施例中，雖然下側殼體構件3 ，而也可以將上側殻體構件2作成可動的。 在真空室1內，是配置有用來挾持基板 加壓的上側加壓塊1 2與下側加壓塊1 3。上 具有加熱板1 4，是經由隔熱材料1 5而被安 構件2。在上側加壓塊1 2的基板1 〇側的面 側，是安裝有將成爲加壓面的表面平滑化加 體的加壓板1 6。 下側加壓塊1 3，也具有加熱板1 7，在 就是加壓面側，是安裝有加壓面很平滑的 1 8 〇 與上側加壓塊1 2被安裝在上側殼體構 同，下側加壓塊1 3沒有被安裝在下側殼體 加壓塊1 3，是經由隔熱材料2 1及板部2 2 下側殻體構件3而延伸的桿部1 9的上端。 件3與桿部1 9之間是設置有密封手段3 3， 密封狀態貫穿下側殼體構件3而延伸，是可 1的機密性的構造。 態，從設置於 排出的話，就 殼體構件3下 周緣部會互相 〇 是作成可動的 來進行加熱與 側加壓塊1 2， 裝在上側殼體 也就是加壓面 工處理過的剛 基板側的面也 剛體的加壓板 件2的方式不 構件3。下側 被安裝在貫穿 在下側殼體構 桿部19是以 以保持真空室 -9- 1275480 (8) 以了。 驅動裝置26、滾珠螺桿35、曲軸25、連結桿37、導 引板23、導引手段24、以及桿部1 9的各機件，構成了用 來使下側加壓塊1 3接近與遠離上側加壓塊1 2的機械的驅 動手段，將其稱作第一驅動手段。相對地，是將用來使上 側殼體構件2與下側殼體構件3互相密封卡合與分離的藉 由上述的驅動裝置7及導引手段8所形成的驅動手段稱作 第二驅動手段。第一驅動手段與第二驅動手段是可互相個 別作動。 在真空加壓裝置的真空加壓部34的前後，是配置有 薄膜皮帶繞出部29及薄膜皮帶繞回部30。薄膜皮帶繞出 部29及薄膜皮帶繞回部30，是進行用來將基板10保持 在之間的上下一對的薄膜皮帶27及28的繞出與繞回的動 作。薄膜皮帶27及28，是配置成：貫穿處於上側及下側 殻體構件2、3是互相分離開啓狀態的真空室〗而延伸。 將薄膜狀材料保持在表面的基板10，是藉由滾筒輸 送機3 8從前製程被運送到薄膜皮帶繞出部29，將其投入 到薄膜皮帶27與28之間。藉由薄膜皮帶繞出部29與薄 膜皮帶繞回部30的作動一邊給予適當的張力且一邊運行 的薄膜皮帶27及28，可以將保持在之間的基板1〇經由 開口 1 1搬入到真空室1內。同樣地，可以將基板1 0從真 空室1搬出。在薄膜皮帶繞出部29與薄膜皮帶繞回部30 之間，在適當的位置是設置有複數的用來導引薄膜皮帶的 滾筒31。薄膜皮帶27、28、薄膜皮帶繞出部29、滾筒31 -11 - 1275480 Ο) 、及薄膜皮帶繞回部30，形成了用來將把薄膜狀材料保 持在表面的基板10相對於真空室1進行搬出及搬入的基 板搬運機構。 用第2圖〜第5圖來說明本發明的真空加壓裝置的作 用。第2圖〜第5圖，是依序顯示將基板進行加熱及加壓 的過程的狀態，在第2圖〜第5圖中，（a )是顯示真空 加壓部全體的側面圖，（b )是顯示相同過程狀態的將上 側及下側加壓塊部放大的側面圖。（a )及（b )中是採取 局部剖面。 首先如第2圖所示，藉由驅動裝置7使下側殻體構件 3下降，讓真空室1開啓來形成基板1〇的搬出入用的開 口 Π。將薄膜狀材料保持在表面的基板10，是被保持在 兩片薄膜皮帶27及28之間，藉由使薄膜皮帶運行而被搬 入到真空室1內。薄膜皮帶2 7、2 8，在基板1 〇到達上側 及下側加壓塊1 2、1 3間的中央部的時間點會停止。 當基板1 〇被定位在上側及下側加壓塊1 2、1 3間的中 央部時，如第3圖所示，會藉由驅動裝置7使下側殼體構 件3上升，將真空室1關閉。讓真空室1成爲密閉狀態之 後，通過排氣口（沒有圖示）來進行排氣，讓真空室1內 成爲減壓狀態。由於薄膜皮帶2 7及2 8很薄，即使真空室 1是夾著薄膜皮帶27及28而關閉，也可充分保持其氣密 性。 基板1 〇，會被下側的薄膜皮帶2 8所保持著，在真空 室1內是保持爲不接觸於下側加壓塊1 3而是浮起的狀態 -12- (10) 1275480 。具有加熱板1 7的下側加壓塊1 3，是配置成能夠與基板 10具有充分的間隔，在真空室1內被充分排氣之前薄膜 狀材料不會軟化。於是，將氣泡封在基板1 〇的凹部或孔 部的可能性很低。 在將真空室1內減壓的同時，加壓體20內部也會從 供排氣口 32進行排氣，成爲與真空室1內相同的減壓狀 態。 本實施例的加壓體20，是具有區劃內部空間的扁平 的構造，而能夠達成讓來自於下側加壓塊1 3的加熱板1 7 的熱量無法傳達到板部22以下的裝置構成構件的作爲隔 熱構件的效果。於是，也可省略隔熱材料2 1。 在將真空室1內充分進行減壓排氣之後，如第4圖所 示，會使驅動裝置26作動而使下側加壓塊1 3朝向基板 1 〇上升，接近上側加壓塊1 2。在將下側加壓塊1 3定位在 適當的高度的狀態，會藉由分別設置於上側及下側加壓塊 1 2、1 3的加熱板1 4、1 7來將基板1 0加熱，保持在基板 表面的薄膜狀材料會充分地軟化。 用來驅動下側加壓塊1 3的第一驅動手段（驅動裝置 26等），是能夠使用來驅動下側殼體構件3的第二驅動 手段（驅動裝置7等）分別作動的構造。於是，因應大小 或重量不相同的基板10的高度位置，而可使加熱板14、 1 7接近到相對於基板1 0的最適當的距離，而可將基板1 0 上的薄膜狀材料儘可能地加熱到預定的溫度，而可適當地 軟化。 -13- 1275480 (11) 也可使用馬達來作爲驅動裝置2 6。在這種情況，例 如與油壓缸比較，可提升反覆停止精度，可以使加熱時的 下側加壓塊1 3相對於基板1 〇的距離更穩定，且可以減少 溫度的誤差。 在充分將薄膜狀材料軟化之後，如第5圖（a)所示 ，會藉由驅動裝置26再使曲軸25轉動，連結桿37的上 端會至少成爲在上死點或接近上死點的位置。在該狀態， 曲軸2 5的旋轉軸3 9、連結桿3 7的偏心軸3 6、與連結桿 37的上端的對導引板23的安裝軸40，是幾乎並排在垂直 線上。於是，構成第一驅動手段的曲軸2 5、連結桿3 7等 的各構件，形成了在上側及下側加壓塊1 2、1 3加壓基板 10時用來支承從這些塊部所承受的加壓力的反作用力的 剛性構造。 在第一驅動手段形成上述剛性構造的狀態，會從供排 氣口 32將壓縮空氣導入到加壓體20的內部空間。藉此， 加壓體20的上面部會朝上方移動，會抬起加熱板17及加 壓板1 8。結果，將軟化的薄膜狀材料保持在表面的基板 1 0，會夾在上側加壓塊1 2與下側加壓塊1 3之間被進行加 壓。 壓縮空氣的壓力，會在加壓體20的內部空間內涵蓋 所有方向均勻地傳播’與利用油壓缸等其他驅動手段來進 行加壓的方式相比’能夠更容易將均勻的壓力施加在加壓 面全體。 如上述，在加壓體20加壓基板1 0時所產生的加壓力 -14- 1275480 (12) 的反作用力’也就是在基板1 0加壓時從上側及下側加壓 塊12、13所受到的加壓力的反作用力’是藉由形成在第 一驅動手段的剛性構造所支承，所以加壓體20能夠以較 大的力量來加壓基板1 〇。例如也可以使用與用油壓缸裝 置來加壓的情況同等的加壓力。 在基板1 〇上軟化的薄膜狀材料，是與加壓面的平滑 的加壓板1 6、1 8相接來進行加壓，所以在其被埋入基板 10的凹部或孔部內緊貼積疊在基板10的表面的同時，也 會使其表面平坦化。 利用加壓體20對基板1 〇的加壓，也可以只進行一次 ，也可以在將真空室4 1保持爲減壓狀態而反覆進行。 在進行複數次加壓的時候，與只進行一次加壓的情況 相比，即使總計的加壓時間較短，可是仍然能得到在基板 1 〇與薄膜狀材料之間更好的緊貼性。 在將薄膜狀材料緊貼積疊在基板10，且同時將薄膜 狀材料的表面平坦化之後，將加壓體2 0的內部空間內的 壓縮空氣從供排氣口 32排出，使加壓體20朝上下方向收 縮則完成了加壓動作。 然後，藉由第一驅動手段使下側加壓塊1 3下降。 接著’解除真空室i內的減壓狀態，藉由第二驅動手 段（驅動裝置7等）來使下側殼體構件3下降。藉此再形 成基板10的搬出搬入用的開口 U，藉由使兩片薄膜皮帶 27、28運行來將基板1〇從真空室1搬出。 導入到加壓體的加壓流體並不限於壓縮空氣。從供排 -15- 1275480 (13) 氣口 3 2使加壓流體排出，使加壓體2 0收縮而完成加壓的 時機，只要是在解除了真空室1內的減壓狀態之後就可以 進行。 加壓體20，只要是能根據內部空間內的內壓力讓上 下面部可動而產生上下方向的加壓力的構造即可，除了圖 示的袋體的型態之外，也可以採用活塞與缸體的組合型態 〇 加壓體，也可以設置在上側加壓塊1 2，也可以設置 在上側及下側加壓塊1 2、1 3的雙方。也可以在一個加壓 塊設置複數的加壓體。 接下來根據第6圖來說明本發明的真空加壓裝置的其 他實施例。第6圖，是其他實施例的真空加壓裝置的側面 圖，是採取局部剖面。該實施例與上述實施例之不同之處 ，是藉由將上側殻體構件2與上側加壓塊1 2、以及下側 殻體構件3與下側加壓塊1 3分別鎖裝而一體化，而共用 :用來使上側加壓塊1 2與下側加壓塊1 3互相接近與分離 的第一驅動手段、以及使上側殻體構件2與下側殻體構件 3互相密封卡合分離的第二驅動手段。也就是說，上側及 下側殼體構件2、3的密封卡合及分離，都是藉由第一驅 動手段所進行的，是省略了第二驅動手段。 即使這樣，只要加壓體的上下面部是作成在足夠大的 範圍可上下移動的構造，藉由控制導入到加壓體的加壓流 體的壓力或流量而可改變加壓體的上下面部的可動量，則 可適當地調整下側加壓塊1 3與基板1 0的距離，所以可得 -16- (15) 1275480 【圖式簡單說明】 第1圖是本發明的一實施例的真空加壓裝置的側面圖 ，是採取局部剖面。 第2圖的（a)是第1圖的真空加壓裝置的一流程的 側面圖’是顯示：基板是藉由上下的薄膜皮帶而被搬入到 真空室內，且被定位在上下加壓塊之間的狀態。（b )是 以上下加壓塊的放大側面圖來顯示同樣的狀態。 第3圖的（a)是第1圖的真空加壓裝置的一流程的 側面圖，是顯示：將真空室關閉，將真空室內部氣體排出 的狀態。（b )是以上下加壓塊的放大側面圖來顯示同樣 的狀態。 第4圖的（a)是第！圖的真空加壓裝置的一流程的 側面圖，是顯示：藉由驅動裝置使下側加壓塊上升到適當 的位置，將基板加熱來使薄膜狀材料軟化的狀態。（b ) 是以上下加壓塊的放大側面圖來顯示同樣的狀態。 第5圖的（a )是第1圖的真空加壓裝置的一流程的 側面圖’是顯示：使曲軸移動成：讓樞支安裝於下側加壓 塊的連結桿的上端成爲上死點的狀態。（b )是以上下加 壓塊的放大側面圖來顯示同樣的狀態。 第6圖是顯示本發明的其他實施例的側面圖，是採取 局部剖面。 【主要元件對照表】 -18- 1275480 (16) 1 :真空室 2 :上側殼體構件 3 :下側殼體構件 4 :支承塊 5 :下側支承構件 6 :支柱 7 :驅動裝置 8 :導引手段 9 :密封構件 1 0 :基板 1 1 :開口 1 2 :上側加壓塊 1 3 :下側加壓塊 1 4 :加熱板 1 5 :隔熱材料 1 6 :加壓板 1 7 :加熱板 1 8 :加壓板 1 9 :桿部 2 0 :加壓體 2 1 :隔熱材料 22 :板部 2 3 :支承板 24 :導引手段 •19- 1275480 (17) 25 :曲軸 2 6 ·驅動裝置 27 :薄膜皮帶 28 :薄膜皮帶 29 :薄膜皮帶繞出部 30:薄膜皮帶繞回部 3 1 :滾筒 3 2 :供排氣口 3 3 :密封手段 3 4 :真空加壓部 3 5 :滾珠螺桿 3 6 :偏心軸 3 7 :連結桿 3 8 :滾筒輸送機 3 9 :旋轉軸 40 :安裝軸1275480 (1) Field of the Invention The present invention relates to a method in which a film-like material is stacked on a substrate or flattened on a substrate by heating and pressurization. Pressure device, especially for vacuum pressurization and pressurization. [Prior Art] When the circuit board is brushed, irregularities or holes are sometimes formed on the surface due to the formation of the conductive pattern. When a film-like material such as a film-like insulating material or a photosensitive material is attached to the surface of such a substrate, if a conventional laminating machine is used, air bubbles are likely to remain in the concave portion or the hole portion on the surface of the substrate, and defects are often caused. Therefore, a vacuum pressurizing device that applies a film-like material to the surface of the substrate in a vacuum is used. The film-like material is gently pressed against the surface of the substrate to hold it before using the vacuum pressurizing device. This type of work is done using a normal laminating machine. Conventionally, a vacuum pressurizing apparatus which is generally widely used has a vacuum chamber which is constituted by upper and lower case members which are engageable with each other. The substrate for holding the film-like material on the surface is inserted between the upper and lower pair of pressing blocks while being held between the upper and lower film strips. In the one of the pressurizing blocks, the pressurizing surface is made of an elastic body and is fixed inside one of the casing members, and has a heater. The other pressurizing block has a film having an elastic body on the pressurizing surface, and is fixed to the inside of -4- (2) 1275480 of the other case member, and has a heater as well. After the substrate is inserted, the upper and lower housing members are engaged with each other to form a vacuum chamber. While evacuating the inside of the vacuum chamber, the substrate held by the film feed belt is heated by a heater provided on the upper and lower pressurizing blocks. The film member on the substrate is softened by the thermal energy of the heater. After the substrate is heated to a predetermined temperature, the film of the elastomer is pressed by a gas to press the film against the substrate. The substrate holding the film-like material on the surface is pressed between the film of the elastic body and the pressing block formed of the elastic body, and the softened film-like material is substantially adhered to the substrate. Concave surface on the top. SUMMARY OF THE INVENTION (Problems to be Solved by the Invention) The most important function of the vacuum pressurizing device is to prevent the air bubbles from remaining in the deep recesses or holes in the surface of the substrate, and to uniformly embed the film material, considering The effect on the subsequent process is to achieve planarization of the surface of the embedded film-like material with high productivity. Therefore, the required conditions are as follows: first, the concave portion and the air in the hole are sufficiently discharged before the film-like material is buried in the concave portion and the hole on the surface of the substrate, and secondly, in order to make the film-like material have appropriate softness (liquidity), the substrate can be heated to a predetermined temperature as soon as possible, -5- (3) 1275480 Third, in recent years, in order to reduce the number of corresponding patterns, increase the number of holes, and reduce the diameter of the aperture, it is possible to The pressure is applied to perform a uniform burying action. 'Fourth' considers that the place where the device is installed is a clean room, and no oil or other materials that may pollute the environment are used. The fifth 'to make the device as small as possible, to make the device cheap Chemical. However, the conventional vacuum pressurizing apparatus has room for improvement in the first to fifth points described above. In other words, in order to sufficiently discharge the recesses in the surface of the substrate and the air in the holes, and to heat the film-like material as soon as possible, the upper and lower casings are sealed and engaged, and it is necessary to match the type (size, size) of the substrate. The weight of the film belt is changed by the deflection, and the distance between the pressing block having the heater and the substrate is appropriately adjusted. However, the conventional vacuum pressurizing apparatus' is a structure in which the pressurizing block is fixed to the casing member as described above, and both of them are simultaneously raised and lowered using the same driving means. Therefore, in the state in which the upper and lower casings are sealed and engaged, the position of the pressing block is always constant, and the position of the pressing block, that is, the position of the heater, cannot be appropriately adjusted in accordance with various types of substrates. As a result, when the distance between the substrate and the pressing block is very close, the concave portion or the hole portion of the substrate surface cannot be completely exhausted, and the film-like material is softened to be adhered to the substrate, and bubbles may remain. On the contrary, in the case where the distance between the substrate and the pressing block is too long, it takes a long time to heat and soften the film-like material, and the productivity is deteriorated. 1275480 (4) In the case where the above substrate is sandwiched between the film of the elastomer and the pressing block, the substrate is pressed by the film of the elastomer pressed by the gas pressure, and the previous pressing block is also taken into consideration. In the case where the distance from the substrate is very long, the film of the elastomer needs to be sufficiently elongated. Therefore, since the strength of the film of the elastomer cannot be pressurized with a large pressing force, it is difficult to embed the film-like material in the deep recess or the hole portion of the surface of the substrate. Further, when the film is pressed by the film of the elastomer, the surface of the film after the substrate is embedded may have irregularities along the surface of the substrate, and the film needs to be flattened in subsequent processes, and as a result, The structure of the device or the production line is large. Further, in order to generate a large pressing force, a method of pressurizing a hydraulic cylinder provided with a vertical pressure block in a chamber or a motor driven by a ball screw is considered without using an elastic film. Oils that may pollute the environment are used, and installation space such as hydraulic pumping is required. When assembling the device, piping and pumping operations are required, and parts that prevent oil leakage or oil ejection are required, and the size and cost of the device are large. something wrong. In the latter case, in order to pressurize the entire pressurizing surface with a uniform pressure, it is necessary to increase the rigidity of the pressurizing block or to provide a punching material for uniformizing the pressure, and the apparatus is large in size and has a problem in terms of cost. Therefore, the problem to be solved by the present invention is to be able to be miniaturized and inexpensively provided so that bubbles do not remain in deep recesses or holes in the surface of the substrate, and the film-like material is buried and adhered to planarize the film-like material. Vacuum pressurizing device. 1275480 (5) (Means for Solving the Problem) In order to solve the above problems, the present invention is the same as the scope of the patent application. [Embodiment] FIG. 1 is a side view of a vacuum pressurizing apparatus according to an embodiment of the present invention. Is to take a partial section. The vacuum pressurizing unit 34 of the vacuum pressurizing device is provided with a vacuum chamber 1. The vacuum chamber 1 is constituted by the upper casing member 2 and the lower casing member 3, and is attached to the support block 4. On the other hand, the vacuum pressurizing unit 34 is provided with a lower support member 5 as a base, and the support block 4 and the lower support member 5 are supported by the support block 4 at the upper end and supported by the lower support member 5 at the lower end. The pillars 6 are connected to each other. In the lower surface of the lower casing member 3, which is one of the members forming the vacuum chamber 1, for example, a drive unit 7 to which a cylinder device is pivotally mounted is attached. Further, in the lower casing member 3, a guiding means 8 for vertically moving the lower casing member 3 along the pillar 6 is attached. The driving device 7 and the guiding means 8 form a driving means for sealing and engaging the upper casing member 2 and the lower casing member 3 with each other. An annular sealing member 9 is provided at the upper end edge portion of the lower casing member 3. When the lower casing member 3 is raised by the above-described driving means, the sealing member 9 and the lower peripheral edge portion of the upper casing member 2 are sealed and engaged in a -8-1275480 (6), and the vacuum chamber 1 is internally Become sealed. In the exhaust port (not shown) of the vacuum chamber 1, the internal air can be made to be in a reduced pressure state in the inside of the vacuum chamber 1. On the other hand, when the lower side is lowered by the above-described driving means, the sealing member 9 is separated from the lower side of the upper casing member 2, and the opening portion 1 for the entrance and exit of the substrate 10 is formed. In the illustrated embodiment, The upper casing member 2 may be made movable despite the lower casing member 3. In the vacuum chamber 1, an upper pressurizing block 1 2 and a lower pressurizing block 13 for pressurizing the substrate are disposed. The heater plate 14 is provided with the heater 2 via the heat insulating material 15 . On the side of the side of the substrate 1 on the side of the upper pressurizing block 12, a pressurizing plate 16 for smoothing the surface to be a pressurizing surface is attached. The lower pressurizing block 13 also has a heating plate 17 on the side of the pressurizing surface, and is mounted with a smooth surface of 18 〇 and the upper pressurizing block 12 is attached to the upper casing. The lower pressurizing block 13 is not attached to the lower casing pressurizing block 13 and is the upper end of the rod portion 19 that extends through the heat insulating material 21 and the lower casing member 3 of the plate portion 2 2 . Between the member 3 and the rod portion 19, a sealing means 33 is provided, and the sealed state extends through the lower side casing member 3, and is a confidential structure of one. When it is installed in the discharge state, the lower peripheral edge portion of the case member 3 is movably moved to perform heating and the side pressurizing block 1 2, and the upper side case is also a press-faced processed rigid substrate. The side surface is also a rigid body of the pressing plate member 2 in a manner that does not have the member 3. The lower side is mounted through the lower housing member portion 19 to hold the vacuum chamber -9-1275480 (8). The driving device 26, the ball screw 35, the crankshaft 25, the connecting rod 37, the guide plate 23, the guiding means 24, and the respective members of the rod portion 19 are configured to bring the lower pressing block 13 closer to and away from each other. The mechanical driving means of the upper pressing block 12 is referred to as a first driving means. The driving means formed by the above-mentioned driving device 7 and guiding means 8 for sealing and separating the upper casing member 2 and the lower casing member 3 from each other is referred to as a second driving means. . The first driving means and the second driving means are operable independently of each other. The film belt winding portion 29 and the film belt winding portion 30 are disposed before and after the vacuum pressurizing portion 34 of the vacuum pressurizing device. The film belt winding portion 29 and the film belt winding portion 30 perform an operation of winding and retracting the pair of upper and lower film belts 27 and 28 for holding the substrate 10 therebetween. The film belts 27 and 28 are disposed so as to extend through the vacuum chambers in which the upper and lower casing members 2 and 3 are separated from each other. The substrate 10 holding the film-like material on the surface is transported from the preceding process to the film-belt winding portion 29 by the roller conveyor 38, and is introduced between the film belts 27 and 28. The film belts 27 and 28 which are operated while giving the appropriate tension by the operation of the film belt winding portion 29 and the film belt winding portion 30 can carry the substrate 1 保持 held therebetween into the vacuum chamber via the opening 1 1 1 inside. Similarly, the substrate 10 can be carried out from the vacuum chamber 1. Between the film belt winding portion 29 and the film belt winding portion 30, a plurality of rollers 31 for guiding the film belt are provided at appropriate positions. The film belts 27, 28, the film belt winding portion 29, the rollers 31 -11 - 1275480 Ο), and the film belt winding portion 30 form a substrate 10 for holding the film-like material on the surface with respect to the vacuum chamber 1 A substrate transport mechanism that carries out and moves in. The action of the vacuum pressurizing apparatus of the present invention will be described with reference to Figs. 2 to 5 . In the second to fifth figures, the state in which the substrate is heated and pressurized is sequentially displayed. In FIGS. 2 to 5, (a) is a side view showing the entire vacuum pressurizing portion, (b) It is a side view which enlarges the upper side and the lower side press block part which shows the same process state. Partial profiles are used in (a) and (b). First, as shown in Fig. 2, the lower casing member 3 is lowered by the driving device 7, and the vacuum chamber 1 is opened to form an opening Π for carrying in and out of the substrate 1. The substrate 10 holding the film-like material on the surface is held between the two film belts 27 and 28, and is carried into the vacuum chamber 1 by running the film belt. The film belts 2 7 and 2 8 are stopped at the time when the substrate 1 〇 reaches the center portion between the upper and lower pressurizing blocks 1 2 and 1 3 . When the substrate 1 is positioned at the center between the upper and lower pressing blocks 1, 2, and 13, as shown in Fig. 3, the lower casing member 3 is raised by the driving device 7, and the vacuum chamber is opened. 1 closed. After the vacuum chamber 1 is in a sealed state, the exhaust port (not shown) is exhausted, and the inside of the vacuum chamber 1 is decompressed. Since the film belts 2 7 and 28 are thin, even if the vacuum chamber 1 is closed with the film belts 27 and 28 interposed therebetween, the airtightness can be sufficiently maintained. The substrate 1 is held by the lower film belt 28, and is held in the vacuum chamber 1 so as not to come into contact with the lower pressing block 13 but floated -12-(10) 1275480. The lower pressurizing block 13 having the heating plate 17 is disposed so as to be sufficiently spaced from the substrate 10, and the film-like material is not softened until it is sufficiently exhausted in the vacuum chamber 1. Thus, the possibility of enclosing the bubble in the recess or hole of the substrate 1 is low. While the inside of the vacuum chamber 1 is depressurized, the inside of the pressurizing body 20 is also exhausted from the supply and exhaust port 32, and becomes the same decompressed state as in the vacuum chamber 1. The pressurizing body 20 of the present embodiment has a flat structure having a partitioned internal space, and can realize a device constituting member in which the heat of the heating plate 17 from the lower pressurizing block 13 cannot be transmitted below the plate portion 22. The effect as a heat insulating member. Thus, the heat insulating material 21 can also be omitted. After the vacuum chamber 1 is sufficiently decompressed and evacuated, as shown in Fig. 4, the driving device 26 is actuated to raise the lower pressurizing block 13 toward the substrate 1 to approach the upper pressurizing block 12. In a state where the lower pressing block 13 is positioned at an appropriate height, the substrate 10 is heated by the heating plates 14 and 17 provided on the upper and lower pressing blocks 1 2, 1 3, respectively. The film-like material held on the surface of the substrate is sufficiently softened. The first driving means (the driving device 26 or the like) for driving the lower pressing block 13 is a structure that can be used to drive the second driving means (the driving device 7, etc.) of the lower casing member 3, respectively. Therefore, depending on the height position of the substrate 10 having different sizes or weights, the heating plates 14, 17 can be brought close to the most appropriate distance with respect to the substrate 10, and the film-like material on the substrate 10 can be made as much as possible. The ground is heated to a predetermined temperature and softened appropriately. -13- 1275480 (11) A motor can also be used as the drive unit 26. In this case, for example, the reverse stop accuracy can be improved as compared with the hydraulic cylinder, and the distance between the lower pressurizing block 13 and the substrate 1 加热 during heating can be made more stable, and the temperature error can be reduced. After the film-like material is sufficiently softened, as shown in Fig. 5(a), the crankshaft 25 is rotated by the driving device 26, and the upper end of the connecting rod 37 is at least at the top dead center or near the top dead center. . In this state, the rotation shaft 39 of the crankshaft 25, the eccentric shaft 36 of the coupling rod 37, and the attachment shaft 40 of the pair of guide plates 23 at the upper end of the coupling rod 37 are almost parallel to each other on the vertical line. Then, the members of the crankshaft 25, the connecting rod 3, and the like constituting the first driving means are formed to support the bearing portions 10 when the upper and lower pressing blocks 1 2, 13 are pressed against the substrate 10 The rigid structure of the reaction with the pressure. In a state where the first driving means forms the rigid structure described above, compressed air is introduced into the internal space of the pressurizing body 20 from the supply and exhaust port 32. Thereby, the upper surface portion of the pressurizing body 20 moves upward, and the heating plate 17 and the pressing plate 18 are lifted. As a result, the substrate 10 holding the softened film-like material on the surface is pressed between the upper pressing block 1 2 and the lower pressing block 13 to be pressed. The pressure of the compressed air spreads uniformly in all directions in the internal space of the pressurizing body 20 'Compared with the way of pressurizing with other driving means such as a hydraulic cylinder, 'It is easier to apply uniform pressure to the plus. The whole face is pressed. As described above, the reaction force of the pressing force -14 - 1275480 (12) generated when the pressing body 20 presses the substrate 10 is the pressing blocks 12, 13 from the upper and lower sides when the substrate 10 is pressurized. The reaction force of the applied pressing force is supported by the rigid structure formed in the first driving means, so that the pressing body 20 can press the substrate 1 以 with a large force. For example, a pressing force equivalent to the case of pressurizing with a hydraulic cylinder device can be used. The film-like material softened on the substrate 1 is pressed against the smooth pressurizing plates 16 and 18 on the pressurizing surface, so that it is embedded in the concave portion or the hole portion of the substrate 10 When stacked on the surface of the substrate 10, the surface thereof is also flattened. The pressurization of the substrate 1 by the pressurizing body 20 may be performed only once, or may be repeated while maintaining the vacuum chamber 41 in a reduced pressure state. When a plurality of pressurizations are performed, better adhesion between the substrate 1 and the film-like material can be obtained even if the total pressurization time is shorter than in the case where only one press is performed. After the film-like material is adhered to the substrate 10 and the surface of the film-like material is flattened, the compressed air in the internal space of the pressurizing body 20 is discharged from the air supply and exhaust port 32, and the pressurized body is pressed. When the 20 is contracted in the up and down direction, the pressurization operation is completed. Then, the lower pressurizing block 13 is lowered by the first driving means. Then, the decompressed state in the vacuum chamber i is released, and the lower casing member 3 is lowered by the second driving means (the driving device 7 or the like). Thereby, the opening U for carrying in and out of the substrate 10 is formed, and the two sheets of the film belts 27 and 28 are operated to carry out the substrate 1 from the vacuum chamber 1. The pressurized fluid introduced into the pressurized body is not limited to compressed air. The timing of discharging the pressurized fluid from the supply port -15-1275480 (13) port 3 2 and contracting the pressurizing body 20 to complete the pressurization can be performed as long as the decompressed state in the vacuum chamber 1 is released. . The pressurizing body 20 may have a structure in which the upper and lower surfaces can be moved according to the internal pressure in the internal space, and the pressing force in the vertical direction can be generated. In addition to the type of the bag shown in the figure, the piston and the cylinder can be used. The combined type 〇 pressurizing body may be provided on the upper pressurizing block 12, or may be provided on both the upper and lower pressurizing blocks 1 2, 1 3 . It is also possible to provide a plurality of pressurizing bodies in one pressurizing block. Next, other embodiments of the vacuum pressurizing apparatus of the present invention will be described based on Fig. 6. Figure 6 is a side elevational view of the vacuum pressurizing device of another embodiment, taking a partial cross section. This embodiment differs from the above-described embodiment in that the upper casing member 2 and the upper side pressing block 1-2, and the lower side casing member 3 and the lower side pressing block 13 are respectively locked and integrated. And sharing: a first driving means for bringing the upper pressing block 1 2 and the lower pressing block 13 into proximity and separation from each other, and sealing and separating the upper side housing member 2 and the lower side housing member 3 from each other The second driving means. That is, the sealing engagement and separation of the upper and lower casing members 2, 3 are performed by the first driving means, and the second driving means is omitted. Even in this case, as long as the upper and lower surface portions of the pressurizing body are configured to be movable up and down in a sufficiently large range, the upper and lower surface portions of the pressurizing body can be changed by controlling the pressure or flow rate of the pressurized fluid introduced into the pressurizing body. The amount can be appropriately adjusted to the distance between the lower pressing block 13 and the substrate 10, so that -16-(15) 1275480 can be obtained. [Simplified description of the drawing] FIG. 1 is a vacuum addition of an embodiment of the present invention. The side view of the pressure device is taken as a partial section. Fig. 2(a) is a side view of a flow of the vacuum pressurizing apparatus of Fig. 1 showing that the substrate is carried into the vacuum chamber by the upper and lower film belts, and is positioned in the upper and lower pressing blocks. The state between. (b) is an enlarged side view of the lower pressing block to show the same state. Fig. 3(a) is a side elevational view showing a flow of the vacuum pressurizing apparatus of Fig. 1 showing a state in which the vacuum chamber is closed and the inside of the vacuum chamber is exhausted. (b) is an enlarged side view of the upper pressing block to show the same state. (a) of Figure 4 is the first! A side view of a flow of the vacuum pressurizing apparatus of the drawing shows a state in which the lower pressing block is raised to an appropriate position by the driving means to heat the substrate to soften the film-like material. (b) is an enlarged side view of the upper pressing block to show the same state. Fig. 5(a) is a side view of a flow of the vacuum pressurizing apparatus of Fig. 1 showing the crankshaft being moved so that the upper end of the connecting rod for pivotally attaching the lower pressurizing block becomes top dead center. status. (b) is an enlarged side view of the upper pressing block to show the same state. Fig. 6 is a side elevational view showing another embodiment of the present invention, taken in a partial cross section. [Main component comparison table] -18- 1275480 (16) 1 : Vacuum chamber 2: Upper housing member 3: Lower housing member 4: Support block 5: Lower support member 6: Pillar 7: Drive unit 8: Guide Reference means 9: sealing member 10: substrate 1 1 : opening 1 2 : upper pressing block 1 3 : lower pressing block 1 4 : heating plate 1 5 : heat insulating material 1 6 : pressure plate 1 7 : heating Plate 1 8 : Pressurizing plate 1 9 : Rod portion 2 0 : Pressurizing body 2 1 : Insulating material 22 : Plate portion 2 3 : Support plate 24 : Guide means • 19 - 1275480 (17) 25 : Crankshaft 2 6 Driving device 27: film belt 28: film belt 29: film belt winding portion 30: film belt winding portion 3 1 : drum 3 2: air supply port 3 3 : sealing means 3 4 : vacuum pressing portion 3 5 : Ball screw 3 6 : Eccentric shaft 3 7 : Connecting rod 3 8 : Roller conveyor 3 9 : Rotary shaft 40 : Mounting shaft