1270524 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種微型混合器之結構，詳言之’係關於 一種内含至少一檔板之微型混合器之結構。 【先前技術】 目前一般的微型混合器（micromixer)主要分為兩種··主動 式混合器（active micromixer)和被動式混合器（passive micromixer)。主動式混合器的混合原理乃利用外力驅使欲 混合的流體產生相互運動，進而達到混合的效果，如：以 利用邊壁的電極分布，使其在適當距離呈現高、低連續相 間隔的電位能分佈，藉由電位能δ -potention的差異，讓流 體呈現迴流的狀態達到混合效果，如[Η· Y· Wu and C· H· Liu，ΠΑ novel electrokinetic micromixer,ff The 12th International Conference on Solid State Sensors，Actuators and Microsystems，Boston, U.S.A·，pp. 631-634, 2003·]所揭示。 被動式混合器的混合原理則是以混合器上之微流道結構 上的改變使得流體的流場狀態改變，並產生混沌流狀態， 如[A. D. Stroock，S. K. Dertinger，A· Ajdari，I· Mezic，H. A. Stone and G· M.1270524 IX. Description of the Invention: [Technical Field] The present invention relates to a structure of a micro-mixer, and in detail relates to a structure of a micro-mixer containing at least one baffle. [Prior Art] At present, general micromixers are mainly classified into two types: an active micromixer and a passive micromixer. The mixing principle of the active mixer is to use external force to drive the fluids to be mixed to move with each other to achieve the mixing effect, for example, to utilize the electrode distribution of the side wall to make the potential energy of the high and low continuous phase interval at an appropriate distance. Distribution, by the difference in potential energy δ -potention, allows the fluid to return to a state of mixing, such as [Η·Y· Wu and C·H· Liu,ΠΑ novel electrokinetic micromixer, ff The 12th International Conference on Solid State Sensors , Actuators and Microsystems, Boston, USA, pp. 631-634, 2003.]. The mixing principle of the passive mixer is to change the flow field state of the fluid by the change of the microchannel structure on the mixer, and generate chaotic flow state, such as [AD Stroock, SK Dertinger, A·Ajdari, I· Mezic, HA Stone and G· M.
Whitesides, ’’Chaotic Mixer for Microchannels/1 Science，vol. 295, ρρ·647-651，2002·]及[X. Niu and Υ· K. Lee, ’’Efficient spatial-temporal chaotic mixing in microchannels，’’ Journal of Micromechanics and Microengineering，Vol. 13, pp.454-462, 2003·]所揭示，以此增加混合 流體的接觸面積，進而達到混合效率，如：以T型流道為基 本架構當作混合器，並利用改變兩入口與混合流道本體間 98152.doc 1270524 的角度，探討流體進入角度對混合的影響，如[D. Gobby，R Angeli and A. Gavriilidis，"Mixing characteristics of T-type microfluidic mixers/* Journal of Micromechanics and Microengineering, Vol 11, pp. 126-132，2001·]及[M_ Engler，N. Kockmann，T· Kiefer，P· Woias， "Numerical and experimental investigations on liquid mixing in static micromixers’’ Chemical Engineering Journal 101，pp. 315-322, 2004·]所揭 示。 目前做較多研究的微型混合器為T型混合器，此乃將預混 合兩種液體由Τ型流道兩旁注入，因為此型混合器較為簡單 且混合效果也相當不好，故會將其中間混合流道作以變 化，如[G· Τ· dA. Kovacs，’’Micormachined Transducers Sourcebook，’’ McGraw-Hill，New York，ρ·808，1998·]所揭示。甚者將兩注入流道 作角度上的變化，類似Y型和箭頭形狀的流道，此型的混合 器為了達到混合效果需將雷諾數提高使得壓降變大而需要 加入更多的功。其它類型的微型混合器在幾何結構上較為 多元，如[Sung-Jin Park, Jung Kyung Kim，Junha Park，Seok Chung，Chanil Chung and Jun Keun Chang, ,fRapid three-dimensional passive rotation micromixer using the breakup process*1 Journal of Micromechanics and Microengineering，Vol 14, pp. 6-14, 2004.]所揭示，使得製程將更為 複雜，不符合一般實驗室的製作且混合器的尺寸也會變 大，故成本需求也相對地提高。 因此，有必要提供一種創新、簡單且具進步性的微型混 合器，以解決上述問題。 【發明内容】 98152.doc 1270524 „本發明之主要目的係提供-種微型混合器，其係利用簡 單的矩开y播板產生流體的渦流與噴嘴效應即可達到非常好 的此口效果’而不用製作複雜的幾何形狀流道，減少額外 的設計與製程步驟且降低成本。 π本發明之另-目的係提供一種微型混合器，其係利用簡 單的矩形叔板產生流體的渦流與噴嘴效應即可達到非常好 的混合效果’其在較低的雷^數下就有較佳的混合效果， 而且可以依據所需的混合比例，調整流道本體之流體流 速’即可得到所需混合比。 為達上述目的，本發明提出一種微型混合器，包含一流 道本體及複數個次流道。該流道本體具有一混合室，該混 合室係由至少一檔板所組成，該檔板之一端係連接至該流 道本體之内側壁。該等次流道係連接至該流道本體，用以 分別注入複數所欲混合之流體，使其於該混合室内進行混 合0 【實施方式】 參考圖1，顯示根據本發明微型混合器之第一實施例之示 思圖。本貫施例之微型混合器1 ’包含一流道本體1 1及二次 流道12、13。該流道本體11具有一主流道A、一混合室14 及一出口流道B ’該混合室14係由至少一槽板所組成。在本 實施例中，該混合室14係由三檔板15、16、17所組成。然 而可以理解的是，本發明並不限於三個檔板。該等槽板15、 16、17係為平板狀結構，其高度係大於該流道本體丨丨之寬 度之一半以上。該等槽板1 5、16、17之一端係連接至該流 98152.doc 1270524 道本體11之内側壁111，且與該内側壁1丨丨相垂直。此外， 在本實施例中，相鄰之檔板分別連接至該流道本體丨i之相 對内側壁111上，亦即，如圖中所示，該檔板丨5係連接至位 於下方之内側壁111，接著，該檔板16係連接至位於上方之 内側壁’接著’該檔板17係連接至位於下方之内側壁1 η， 如此依序交錯排列。 該等次流道12、13係連接至該流道本體丨丨，用以分別注 入複數所欲混合之流體該流道本體1 1内，使其於該混合室 14内進行混合。在本實施例中該等次流道12、13係連接至 该流道本體11之混合室14之内，亦即，如圖中所示，該等 次流道12、13於該流道本體丨丨之内側壁丨丨丨上之開口係位於 槽板15及檔板16之間。本發明所欲混合之流體係選自由 水、酒精、生物血清、可相溶之化學流體、可相溶之生物 流體、可互溶之化學流體及可互溶之生物流體所組成之群。 參考圖2，顯示本發明中混合室丨4内之混合流體因檔板之 作用而產生之渦流分佈圖。本發明主要是利用該等檔板 15、16、17在該流道本體丨丨上所形成的該混合室14，當流 體流經過該等擋板15、16、17時，會形成類似喷嘴的作用， 如圖中箭頭所示。在本實施例之混合室14中，主流體從圖 中左側向右側流動（亦即從主流道A流向出口流道B)，在每 個播板15、16、17與該流道本體丨丨之内側壁u丨交界處，產 生渦流且因流體經過的方向影響，造成渦流的旋轉方向不 同造成混合，且因為該等次流道12、13注入的流體對流道 本體11内之主流體的衝擊，進而使得該等次流道12、13所 98152.doc 1270524 注入之流體有較佳的混合效率。 本實施例之製法如下，首先採用SIJ_8厚膜光阻以微影製 程在石夕晶圓上製作該微型混合器1之母模；再以聚二甲基矽 氧烷（Polydimethysiloxane，PDMS)為材料翻模製作該微型 混合器1。可以理解的是，製作該微型混合器1之材質也可 以是高分子材料、玻璃、矽或陶瓷等。該微型混合器1之主 要荼數有··該流道本體11上該等擋板15、16、π之數目、 忒等擋板15、16、17之尺寸、所欲混合之流體之注入位置、 該主流道A之入口流速及該混合室丨4的大小。透過數值模擬 與實驗之結果比較各種變數對於該微型混合器1混合效率 之衫響，隨後可經由實驗照片而發現在該流道本體丨丨中沒 有設置擋板到設置三個擋板丨5、16、17，其混合效率可得 到很大的改善，故得知該等播板丨5、丨6、丨7的設置數目對 混合效果產生最大的助益，而其餘變數雖對混合效率產生 影響但仍較擋板數目之影響小。 參考圖3，顯示利用本發明第一實施例之微型混合器混合 時之俯視照片圖。該微型混合器丨之尺寸如下，〇)該主流道 A:寬400 μηι，長6.0mm;⑺該等次流道12、13:寬6〇_， 長1.0 mm ; (3)該出口流道b :寬4〇〇 μηι，長7 mm ; (4)該等 擋板 15、16、17 :高 300 /m，寬 4〇 μηι ; (5)該混合室 14 : 長400 /xm，寬400 Mm。其中黑色液體為墨汁和水的混合， 其比例約為1:99。透明的液體則為酒精。在本實施例中， 該等次流道12、13内所欲混合之流體（透明之酒精）係注入該 檔板15及該檔板16之間，且在擋板與該流道本體u内側壁 98152.doc 1270524 u 1之交界處產生渦流，因此當混合流體流過第三個擋板 (即檔板17)後，可看到黑色水的顏色褪掉成為較灰色的混合 液體，顯見兩種流體混合效果已大大改善，且大约流經該 出口流道B三分之一左右時，混合流體已趨於穩定。 參考圖4，顯示根據本發明微型混合器之第二實施例之示 意圖。本實施例之微型混合器4,包含一流道本體41及二次 流道42、43。該流道本體41具有一主流道c、一混合室44 及一出口流道D,該混合室44係由至少一檔板所組成。在本 實施例中，該混合室44係由三檔板45、46、47所組成。該 等檔板45、46、47係為平板狀結構，其高度係大於該流道 本體41之度之一半以上。該等檔板45、46、47之一端係 連接至該流道本體41之内侧壁411，且與該内側壁411相垂 直。此外’在本實施例中，相鄰之檔板分別連接至該流道 本體41之相對内側壁411上，亦即，如圖中所示，該檔板45 係連接至位於下方之内側壁411，接著，該檔板46係連接至 位於上方之内側壁，接著，該檔板47係連接至位於下方之* 内側壁411，如此依序交錯排列。 本實施例與第一實施例大致相同，不同處僅為該等次流 道42、43之位置。在本實施例中，該等次流道42、43係連 接至該流道本體41之混合室44之外，亦即，如圖4中所示， 该荨次流道4 2、4 3於該流道本體41之内侧壁411上之開口係 位於該流道本體41之主流道C。 參考圖5，顯示利用本發明第二實施例之微型混合器混合 時之俯視照片圖。該微型混合器4之尺寸與第一實施例之微 98152.doc -10- 1270524 型混合器4相同。在本實施例中，次流道“係注入—黑色液 體，次流道43係注入-透明液體。該黑色液體及該透'明^ 體先會合於該主流道c，再流至該混合室44。由圖中可看出 在該主流道C内並不會發生混合情況。而當該黑色液體及今 透明液體流進該混合室44後’該黑色液體及該透明液體會 在擋板與該流道本體41内側壁411之交界處產生渦流，因= 造成該二流體發生混合。 惟上述實施例僅為說明本發明之原理及其功效，而非用 以限制本發明。，習於此技術之人士可在不 明之精神對上述實施例進行修改及變化。本發明之權利範 圍應如後述之申請專利範圍所列。 【圖式簡單說明】 圖1顯示根據本發明微型混合器之第一實施例之示意圖； 囷.、、、員示本每明中混合室内之混合流體因槽板之作用而 產生之渴流分佈圖； 圖3顯不利用本發明第一實施例之微型混合器混合時之 俯視照片圖； 圖4顯不根據本發明微型混合器之第二實施例之示意 圖；及 圖5颂7F利用本發明第二實施例之微型混合器混合時之 俯視照片圖。 【主要元件符號說明】 1 本發明第一實施例之微型混合器 4 本發明第二實施例之微型混合器 98152.doc 1270524 11 流道本體 12、13 次流道 14 混合室 15 、 16 、 17 檔板 41 流道本體 42、43 次流道 44 混合室 45 、 46 、 47 檔板 111 内側壁 411 内側壁 A 主流道 B 出口流道 C 主流道 D 出口流道 98152.doc - 12-Whitesides, ''Chaotic Mixer for Microchannels/1 Science, vol. 295, ρρ·647-651, 2002·] and [X. Niu and Υ·K. Lee, ''Efficient spatial-temporal chaotic mixing in microchannels,'' Journal of Micromechanics and Microengineering, Vol. 13, pp. 454-462, 2003.], to increase the contact area of the mixed fluid, thereby achieving mixing efficiency, such as: using a T-shaped flow channel as a basic structure as a mixer And use the angle of 98152.doc 1270524 between the two inlets and the mixed runner body to explore the effect of fluid entry angle on mixing, such as [D. Gobby, R Angeli and A. Gavriilidis, "Mixing characteristics of T-type microfluidic Mixers/* Journal of Micromechanics and Microengineering, Vol 11, pp. 126-132, 2001·] and [M_ Engler, N. Kockmann, T. Kiefer, P. Woias, "Numerical and experimental investigations on liquid mixing in static micromixers ''Chemical Engineering Journal 101, pp. 315-322, 2004.]. At present, the micro-mixer that has been researched more is a T-type mixer, which is to inject two kinds of pre-mixed liquids from both sides of the 流-type flow channel, because this type of mixer is relatively simple and the mixing effect is also quite bad, so it will be The intermixed flow path is varied as disclosed in [G·Τ·dA. Kovacs, ''Micormachined Transducers Sourcebook,'' McGraw-Hill, New York, ρ.808, 1998. Even if the two injection channels are changed in angle, similar to the Y-shaped and arrow-shaped flow paths, the mixer of this type needs to increase the Reynolds number in order to achieve the mixing effect, so that the pressure drop becomes larger and more work needs to be added. Other types of micromixers are more diverse in geometry, such as [Sung-Jin Park, Jung Kyung Kim, Junha Park, Seok Chung, Chanil Chung and Jun Keun Chang, , fRapid three-dimensional passive rotation micromixer using the breakup process* 1 Journal of Micromechanics and Microengineering, Vol 14, pp. 6-14, 2004.] reveals that the process will be more complicated, not in line with the general laboratory production and the size of the mixer will also become larger, so the cost requirements are also Relatively improved. Therefore, it is necessary to provide an innovative, simple and progressive micro-mixer to solve the above problems. SUMMARY OF THE INVENTION 98152.doc 1270524 The primary object of the present invention is to provide a micro-mixer that achieves a very good effect by using a simple moment-opening y-board to create a fluid vortex and nozzle effect. No need to make complex geometry runners, reduce additional design and process steps and reduce costs. π Another object of the invention is to provide a micro-mixer that uses a simple rectangular plate to create eddy currents and nozzle effects of fluids. A very good mixing effect can be achieved, which has a better mixing effect at lower mines, and the fluid flow rate of the flow channel body can be adjusted according to the desired mixing ratio to obtain the desired mixing ratio. In order to achieve the above object, the present invention provides a micro-mixer comprising a first-stage body and a plurality of secondary runners. The runner body has a mixing chamber, and the mixing chamber is composed of at least one baffle, one end of the baffle Connected to the inner side wall of the flow channel body. The secondary flow channels are connected to the flow channel body for respectively injecting a plurality of fluids to be mixed to make the mixture Mixing in the interior 0 [Embodiment] Referring to Fig. 1, there is shown a schematic diagram of a first embodiment of a micromixer according to the present invention. The micromixer 1' of the present embodiment includes a first-class track body 1 1 and a secondary flow path. 12, 13. The flow channel body 11 has a main flow channel A, a mixing chamber 14 and an outlet flow channel B'. The mixing chamber 14 is composed of at least one groove plate. In this embodiment, the mixing chamber 14 is It is composed of three baffles 15, 16, 17. However, it can be understood that the present invention is not limited to three baffles. The trough plates 15, 16, 17 are flat-shaped structures having a height greater than the flow path. One or more than half of the width of the body 。. One end of the slot plates 15 , 16 , 17 is connected to the inner side wall 111 of the flow body 98152.doc 1270524 and is perpendicular to the inner side wall 1 。. In this embodiment, the adjacent baffles are respectively connected to the opposite inner sidewalls 111 of the runner body 丨i, that is, as shown in the figure, the baffle raft 5 is connected to the inner side wall located below. 111, then, the baffle 16 is connected to the inner side wall of the upper portion, and then the baffle 17 is attached The inner side walls 1 η are connected to the lower side, and are sequentially staggered. The secondary flow paths 12 and 13 are connected to the flow path body 丨丨 for respectively injecting a plurality of fluids to be mixed. Internally, it is mixed in the mixing chamber 14. In this embodiment, the secondary runners 12, 13 are connected to the mixing chamber 14 of the runner body 11, that is, as shown in the figure, The openings of the secondary runners 12, 13 on the inner side wall of the runner body are located between the slot plate 15 and the baffle 16. The flow system to be mixed in the present invention is selected from the group consisting of water, alcohol, A group of biological serum, a compatible chemical fluid, a miscible biological fluid, a miscible chemical fluid, and a miscible biological fluid. Referring to Fig. 2, there is shown a vortex distribution map of the mixed fluid in the mixing chamber 丨4 of the present invention due to the action of the baffle. The present invention mainly utilizes the mixing chamber 14 formed on the runner body raft by the baffles 15, 16, 17 to form a nozzle-like flow when the fluid flows through the baffles 15, 16, 17. Function, as indicated by the arrow in the figure. In the mixing chamber 14 of the present embodiment, the main fluid flows from the left side to the right side in the drawing (i.e., from the main flow path A to the outlet flow path B), and at each of the broadcast plates 15, 16, 17 and the flow path body At the boundary of the inner side wall u丨, eddy current is generated and the direction of rotation of the vortex is caused by the direction in which the fluid passes, causing mixing, and the impact of the fluid injected by the secondary flow passages 12, 13 on the main fluid in the runner body 11 Further, the fluid injected into the secondary flow passages 12, 13 98152.doc 1270524 has better mixing efficiency. The preparation method of the present embodiment is as follows. First, the master mold of the micro-mixer 1 is fabricated on the Shixi wafer by a lithography process using a SIJ_8 thick film photoresist; and polydimethysiloxane (PDMS) is used as a material. The micromixer 1 was molded by overturning. It is to be understood that the material for fabricating the micromixer 1 may be a polymer material, glass, tantalum or ceramics. The main number of the micro-mixer 1 is: the number of the baffles 15, 16, π on the flow path body 11, the size of the baffles 15, 16, 17 and the like, and the injection position of the fluid to be mixed. The inlet flow rate of the main flow channel A and the size of the mixing chamber 丨4. Comparing the results of the numerical simulation and the experiment, the variation of the various variables for the mixing efficiency of the micro-mixer 1 can be found through the experimental photographs, and no baffle is provided in the flow path body 到 to set the three baffles 丨5, 16,17, the mixing efficiency can be greatly improved, so it is known that the number of such slabs 丨5, 丨6, 丨7 has the greatest benefit to the mixing effect, while the other variables have an effect on the mixing efficiency. However, it still has less influence than the number of baffles. Referring to Fig. 3, there is shown a top plan view of a mixture of the micro-mixer of the first embodiment of the present invention. The size of the micromixer is as follows, 〇) the main channel A: width 400 μηι, length 6.0 mm; (7) the secondary runners 12, 13: width 6 〇 _, length 1.0 mm; (3) the outlet flow path b: width 4〇〇μηι, length 7 mm; (4) the baffles 15, 16, 17: height 300 / m, width 4 〇 μηι; (5) the mixing chamber 14: length 400 / xm, width 400 Mm. The black liquid is a mixture of ink and water in a ratio of about 1:99. The transparent liquid is alcohol. In this embodiment, the fluid (transparent alcohol) to be mixed in the secondary flow paths 12, 13 is injected between the baffle 15 and the baffle 16 and inside the baffle and the flow path body u. The vortex is generated at the junction of wall 98152.doc 1270524 u 1 , so when the mixed fluid flows through the third baffle (ie, the baffle 17), it can be seen that the color of the black water fades to become a grayish mixed liquid, which is apparently The fluid mixing effect has been greatly improved, and the mixed fluid has stabilized as it flows about one third of the outlet flow channel B. Referring to Figure 4, there is shown a schematic representation of a second embodiment of a micromixer in accordance with the present invention. The micromixer 4 of the present embodiment includes a main channel body 41 and secondary flow paths 42, 43. The flow path body 41 has a main flow path c, a mixing chamber 44, and an outlet flow path D. The mixing chamber 44 is composed of at least one baffle. In the present embodiment, the mixing chamber 44 is composed of three plates 45, 46, and 47. The baffles 45, 46, and 47 are of a flat plate structure having a height greater than one-half of the degree of the flow path body 41. One end of the baffles 45, 46, 47 is connected to the inner side wall 411 of the flow path body 41 and is perpendicular to the inner side wall 411. In addition, in the present embodiment, adjacent baffles are respectively connected to the opposite inner side walls 411 of the flow path body 41, that is, as shown in the figure, the baffle 45 is connected to the inner side wall 411 located below. Then, the baffle 46 is attached to the inner side wall located above, and then the baffle 47 is attached to the inner side wall 411 located below, so as to be staggered in this order. This embodiment is substantially the same as the first embodiment, and the difference is only the position of the secondary runners 42, 43. In this embodiment, the secondary runners 42, 43 are connected to the mixing chamber 44 of the runner body 41, that is, as shown in FIG. 4, the secondary runners 4, 4 3 are The opening on the inner side wall 411 of the flow path body 41 is located in the main flow path C of the flow path body 41. Referring to Fig. 5, there is shown a top plan view of a micromixer in accordance with a second embodiment of the present invention. The micromixer 4 is the same size as the micro 98152.doc -10- 1270524 type mixer 4 of the first embodiment. In this embodiment, the secondary flow path is "injected into a black liquid, and the secondary flow path 43 is injected into a transparent liquid. The black liquid and the transparent liquid first meet the main flow path c and then flow to the mixing chamber. 44. It can be seen from the figure that mixing does not occur in the main flow channel C. When the black liquid and the transparent liquid flow into the mixing chamber 44, the black liquid and the transparent liquid will be in the baffle plate. The vortex is generated at the boundary of the inner side wall 411 of the flow path body 41, because the mixing of the two fluids is caused by the following. However, the above embodiments are merely illustrative of the principle and function of the present invention, and are not intended to limit the present invention. The above embodiments may be modified and changed by those skilled in the art, and the scope of the present invention should be as described in the scope of the patent application described below. [Simplified Schematic] FIG. 1 shows the first of the micromixer according to the present invention. A schematic diagram of the embodiment; 囷.,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, Overlooking Figure 4 is a schematic view showing a second embodiment of the micro-mixer according to the present invention; and Figure 5颂7F is a top view photograph of the micro-mixer of the second embodiment of the present invention. [Main component symbol description] 1 Micromixer 4 of the first embodiment of the present invention Micromixer 98152.doc 1270524 11 of the second embodiment of the present invention 11 flow path body 12, 13 secondary flow path 14 mixing chamber 15, 16, 17 baffle 41 flow path body 42, 43 times flow channel 44 mixing chamber 45, 46, 47 baffle 111 inner side wall 411 inner side wall A main flow path B outlet flow channel C main flow channel D outlet flow channel 98152.doc - 12-