TWI263293B - Probe card for integrated circuits - Google Patents
Probe card for integrated circuitsInfo
- Publication number
- TWI263293B TWI263293B TW094133675A TW94133675A TWI263293B TW I263293 B TWI263293 B TW I263293B TW 094133675 A TW094133675 A TW 094133675A TW 94133675 A TW94133675 A TW 94133675A TW I263293 B TWI263293 B TW I263293B
- Authority
- TW
- Taiwan
- Prior art keywords
- probe pin
- probe
- pad
- insulating film
- probe card
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06727—Cantilever beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06772—High frequency probes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094133675A TWI263293B (en) | 2005-09-28 | 2005-09-28 | Probe card for integrated circuits |
US11/164,908 US20070069745A1 (en) | 2005-09-28 | 2005-12-09 | Probe card for integrated circuits |
JP2006040662A JP2007093574A (ja) | 2005-09-28 | 2006-02-17 | 集積回路用プローブカード |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094133675A TWI263293B (en) | 2005-09-28 | 2005-09-28 | Probe card for integrated circuits |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI263293B true TWI263293B (en) | 2006-10-01 |
TW200713480A TW200713480A (en) | 2007-04-01 |
Family
ID=37893064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094133675A TWI263293B (en) | 2005-09-28 | 2005-09-28 | Probe card for integrated circuits |
Country Status (3)
Country | Link |
---|---|
US (1) | US20070069745A1 (zh) |
JP (1) | JP2007093574A (zh) |
TW (1) | TWI263293B (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5095253B2 (ja) | 2007-03-30 | 2012-12-12 | 富士通株式会社 | 半導体エピタキシャル基板、化合物半導体装置、およびそれらの製造方法 |
MY144280A (en) * | 2007-11-20 | 2011-08-29 | Mimos Berhad | Mems based probe card and a method of testing semiconductor ion sensor using the same |
JP2010217085A (ja) * | 2009-03-18 | 2010-09-30 | Toppan Printing Co Ltd | 検査装置 |
JP5452088B2 (ja) * | 2009-06-15 | 2014-03-26 | 株式会社日立ハイテクノロジーズ | 微小接触式プローバ |
US9316685B2 (en) * | 2012-11-12 | 2016-04-19 | Mpi Corporation | Probe card of low power loss |
TWI484200B (zh) * | 2013-05-28 | 2015-05-11 | Richtek Technology Corp | 測試操作機與測試載具以及相關測試方法 |
DE102016114145A1 (de) | 2016-08-01 | 2018-02-01 | Endress+Hauser Flowtec Ag | Testsystem zur Überprüfung von elektrischen Verbindungen von elektronischen Bauteilen mit einer Leiterplatte |
IT201800001170A1 (it) * | 2018-01-17 | 2019-07-17 | Technoprobe Spa | Testa di misura di tipo cantilever e relativa sonda di contatto |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2344239B2 (de) * | 1973-09-01 | 1977-11-03 | Luther, Erich, 3050 Wunstorf; Maelzer, Fritz; Maelzer, Martin; 7910 Reutti Post Neu-Ulm; Türkkan, Tamer, 3011 Laatzen | Kontaktvorrichtung zum anschliessen einer gedruckten schaltung an ein pruefgeraet |
US4820976A (en) * | 1987-11-24 | 1989-04-11 | Advanced Micro Devices, Inc. | Test fixture capable of electrically testing an integrated circuit die having a planar array of contacts |
US5103557A (en) * | 1988-05-16 | 1992-04-14 | Leedy Glenn J | Making and testing an integrated circuit using high density probe points |
US5225037A (en) * | 1991-06-04 | 1993-07-06 | Texas Instruments Incorporated | Method for fabrication of probe card for testing of semiconductor devices |
US5598096A (en) * | 1994-12-02 | 1997-01-28 | Ford Motor Company | Method and apparatus for testing an integrated circuit using controlled wirebonding and wirebonding removal |
JP2001153886A (ja) * | 1999-11-26 | 2001-06-08 | Mitsubishi Electric Corp | プローブカード、及びこれを備えたテスト装置 |
-
2005
- 2005-09-28 TW TW094133675A patent/TWI263293B/zh not_active IP Right Cessation
- 2005-12-09 US US11/164,908 patent/US20070069745A1/en not_active Abandoned
-
2006
- 2006-02-17 JP JP2006040662A patent/JP2007093574A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
TW200713480A (en) | 2007-04-01 |
JP2007093574A (ja) | 2007-04-12 |
US20070069745A1 (en) | 2007-03-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |