1262117 九、發明說明·· ——3¾ 【發明所屬之技術領域】 本發明微動機構是由兩種不同之繞性體及一 ，座構成’結合成一體之後放入於基座之中，然：： 透過一些襄置接至電腦，利用電腦控制 撓性體所構成，因士又合為釗非綠α 又動钱構疋由 Η、Ζ^: 到非線性之摩擦影響，因此在 ζ軸上可準確的以線性方向運動，而0^、 不因摩擦影響而作彎矩運動。 。 【先前技術】 現今精密量測技術以漸漸,屈起，奈米 斷的被開發出來，夺米級的製造 貝】儀為不 式的量具平…：二的穴技術曰漸成熟，-般傳絲 十口已不敷使用，如今的電子產章 定位系統才能符-製程要< ^ 向精密的 <此仃σ I #王要求。然而，時下的作 能夠達到需求。 ” 口甚>、 …，傳統的量測平台或作業平台大多因本身間隙 > :〜喜，無法突破奈米定位的精密控制，因而等級於 尚的加工或量測平台，其價格也呈倍數成長。及愈 :鐘於此，本發明人以先前微動平台〈〈參考專利發明 八九號》的所產生元件間 又 由多年從事相關g I _ 年‘間碭，藉 平從事相關產業之研究與開發經驗，積極 ::過長期努力之研究與發展， /、 之軸向，、了有效克服以往之摩擦問題’並能增加量測 [發明内容】 ?此’本發明主要在於提供-種微動機構，藉以利 兀件與元件間之挂钍古y 積从利用 1之連、、、口方式採用撓性體緊密連結 V月柄 補无 1262117 不是利用以往的鎖緊方式，以解決先前的摩擦問題。 又’本發明另_目的為於蔣M 有乂 v ▽ 的在於^供一種微動機構，使苴呈 1及W等之五軸平移運動，以解決以往; 私運動方向不足所造成的量測問題。 十 為此’本發明主要係透過下列 現前述的目的與效能：其包含有； 又…具體實 一基座； 加：撓性體架構，該撓性體架構設於基座上，且挽性體 ::頂端設有一置物平板，又撓性體架構於基座上設有可 …等置五 1平板之制動器，使置物平板具有χ、γ、ζ、…及 以Ζ等五軸之位移運動； -位移感測組，其可檢知置物平板之[γ、 Θ 2等五軸之位移量 藉^透過前述技術手段的展現，可讓本發明透過一 :到非：ί電Γ利用電腦控制，使本發明微動機構不會 性之摩擦影響，因此在χ、γ、ζ軸上可準確的以 動。 ，㈣卜Θ2也可不因摩擦影響而作彎矩運 及盆:L貴審查委員能進一步了解本發明的構成、特徵 =，目的’以下乃舉本發明之若干較佳實施例，並配合 圖式坪細說明如后，同時讓熟悉該項技術領域者能夠呈體 貫1’惟以下所述者，僅在於說明本發明之較佳實施例， 亚非用以限制本發明之範圍，故凡有以本發明之 :二而為本發明任何形式之修飾或變更，皆仍應屬於本ς 明思圖保護之範傳。 【實施方式】 6 1262117 9抑日|正.， 一—補无 -本發明係、一種冑密量测用之微動機構，請參看圖一所 不’其包含有-基座（10)、一挽性體架構（2〇)及一位 移感測組（30)，其中基座（1〇)相鄰兩側邊分設有一向 上延伸之第一垂直基柱（11)與第二垂直基柱（15)【如 圖三所示】，以供架設撓性體架體（2G)，而位移感測組 (30)則設於撓性體架體（2〇)下方，用以檢知其卜γ、ζ 、θ 1及Θ 2等五軸之位移量； 而關於本發明較佳實施例之詳細構成，則請袁閱圖一 、圖二及圖四所揭示者，其中撓性體架構（20)係於基座 (10)上立設有四根立狀制動器（21)，以操控撓性體架 構（20)之ζ轴、2等平移運動，再者各立狀制動器 (21)頂端分別設有—撓性體基柱（22)，而各撓性體基 柱（22)頂端並串設有—立狀撓性體（23)，且各立狀挽 性體（23)頂端共同跨設有—具對應凸塊（26)之置物平 板（25)，再者前述基座（1〇)之第一垂直基柱（丨丨）盘 置物平板（25)間設有一水平狀之第一制動器（271)，以 操控撓性體架構（20) U軸平移運動，而前述第二垂直其 柱⑴）肖置物平板（25)另側緣間設有一水平狀之第二 制動器（ 272 )，供操控撓性體架構（2〇)之γ轴平移運: ’又基座（10)於各立狀制動器（21)所圍之中央伸設 -支撐柱（29) ’而前述各撓性體基柱（22)下段之: 分設有-相對頂抵支撐柱（29)之水平撓性體（28). 再者位移感測組（30)係於置物平板（3〇)底 ==伸之感測柱（29)，而前述撓性體架構、1262117 IX. INSTRUCTION DESCRIPTION··—————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————— : Through some devices connected to the computer, the computer is used to control the flexible body. Because the people are combined with the non-green α and the money structure, from the 摩擦, Ζ^: to the nonlinear friction, so on the ζ axis It can accurately move in a linear direction, and 0^, does not make a bending moment due to the influence of friction. . [Prior Art] Nowadays, the precision measurement technology is gradually developed, and the nanometer is developed. The meter-making instrument is a non-type gauge.... The second hole technology is gradually matured. The silk ten mouth is no longer enough to use, and today's electronic production chapter positioning system can be used - the process needs to be < ^ to the precise <this 仃σ I #王 requirements. However, the current work can meet the demand. "Our mouth", ..., the traditional measurement platform or work platform mostly due to its own gap > : ~ hi, can not break through the precise control of nano positioning, so the grade is still in the processing or measurement platform, the price is also The multiples grow. Hehe: In this case, the inventors used the previous micro-motion platform (refer to the patent invention No. VIII) to produce the related components, and then engaged in related industries. Research and development experience, positive:: research and development over long-term efforts, /, the axial direction, and effectively overcome the friction problem of the past 'and can increase the measurement [invention content]? This invention is mainly to provide - The micro-motion mechanism, by means of the connection between the component and the component, the y-product is used from the connection of the 1 and the port, and the flexible body is used to tightly connect the V-shaped handle to fill the 1262117 instead of using the previous locking method to solve the previous The problem of friction. Also, the invention is based on the fact that the M is a kind of micro-motion mechanism, so that the 苴 is in a five-axis translational motion of 1 and W, etc., to solve the problem of the past; the amount The problem is that the present invention mainly adopts the following objects and effects as described above: it includes; and... a concrete base; plus: a flexible body structure, the flexible body structure is disposed on the base, and The plucking body: the top is provided with a storage plate, and the flexible body is arranged on the pedestal, and the brake is arranged on the pedestal, so that the storage plate has 五, γ, ζ, ... and 五, etc. Displacement motion; - Displacement sensing group, which can detect the displacement of the five axes of [γ, Θ 2, etc. by the above-mentioned technical means, and allows the present invention to pass through one to: The computer control makes the micro-motion mechanism of the invention have no frictional influence, so it can be accurately moved on the χ, γ, and ζ axes. (4) The Θ 2 can also be used for bending and transporting due to the influence of friction: L expensive review The members can further understand the composition and features of the present invention. The following are some of the preferred embodiments of the present invention, and the drawings are described in detail with reference to the drawings, and at the same time, those skilled in the art can be physically present. However, the following is only to illustrate the preferred embodiment of the present invention. The invention is not intended to limit the scope of the present invention, and any modification or alteration of any form of the present invention, which is a second aspect of the present invention, should still be a form of protection of the present invention. 】 6 1262117 9 suppression of the day | positive., one - complement no - the present invention, a micro-motion mechanism for measuring the density, please refer to Figure 1 does not contain the pedestal (10), a plucking body The structure (2〇) and a displacement sensing group (30), wherein the adjacent two sides of the base (1〇) are respectively provided with an upwardly extending first vertical base column (11) and a second vertical base column (15) [As shown in Figure 3], the flexible body frame (2G) is erected, and the displacement sensing group (30) is disposed under the flexible body frame (2〇) for detecting the γ, The displacement of five axes such as ζ, θ 1 and Θ 2; and the detailed composition of the preferred embodiment of the present invention, please refer to those disclosed in Figure 1, Figure 2 and Figure 4, wherein the flexible body structure (20) Four vertical brakes (21) are arranged on the base (10) to control the translational movement of the shaft, 2, etc. of the flexible body structure (20), and the top ends of the vertical brakes (21) are respectively set. a flexible body base column (22), and a flexible body (23) is arranged in series at the top end of each flexible body base column (22), and the top ends of each of the vertical body pullable bodies (23) are provided in common a storage plate (25) having a corresponding projection (26), and a horizontal first brake is disposed between the first vertical base plate (25) of the base (1) 271), to manipulate the flexible body structure (20) U-axis translational movement, and the second vertical column (1) of the second plate (1) is provided with a horizontal second brake (272) between the other side edges for manipulation The γ-axis translation of the flexible body structure (2〇): 'The base (10) is extended from the center of each vertical brake (21) - the support column (29)' and the aforementioned flexible body columns (22) The lower section: is divided into a horizontal flexible body (28) opposite to the support column (29). The displacement sensing group (30) is attached to the bottom of the storage plate (3〇) == Column (29), while the aforementioned flexible body architecture,
湏I )之ί撐柱（29)於對應第-垂直基柱面J 立設有—第-感測件（32)，該第—感測件（32)、而 1262117 枉（31)之相對側面分設有對應的第一平移感應器 與第:旋角感應器（ 322 )，以供檢知乂軸與之位移量， 另支撐柱（29 )於對應第二垂直基柱（j5 )的側面頂端立 設有^第二感測件（33)，該第_感測件（33)與感測柱 (31)之相對側面分設有對應的第二平移感應器（Μ"盘 第二旋角感應器（332 )，以供檢知¥軸與02之位移量且 感，柱（31 )與支撐柱（29 )相對面分設有對應的昇降感 應為（34 )，供檢知z軸的平移量； 精此，讓微動機構可連接至電腦，利用電腦控制，由 於微動機構係由撓性體所構成，因此不會受 擦影響，因此在χ、Υ、ζ轴上可準確的以線性方向運動，而手 2、可W摩擦影“作f矩運動，而組構成一微 動機構者。 -至於本發明之實際運用，則請配合參看圖一、圖五所 W用電月自【PC】輸人位置指令，經由數位/類比轉換 伽卡)送出訊號至電流放大器，再利用撓性體架構（2〇 之立狀致動器（21)與第_、二制動器（271 ) ( 272 ) )·動：=性體（23)、水平撓性體（28)及支撐柱⑼ 平板（25 )移動，然後利用位移感測組（30 ) 偵測置物平板（25 ) # w 1 μ π ( )位置块差，再利用類比/數位轉換卡 ，：位移感測組（30 )的訊號作轉換傳回 經電腦料算，對數位/類比㈣卡（D/A)卡 經電流放大器用立狀致動器”U afL唬而後 )r 979 , 狀致動為（21)與第一、二制動器（271 提升盆斧準/位置補償’可有效克服摩擦問題，同時大幅 升/、精準度，並能進行多軸之量測。 綜上所述’本發明確實為一新賴進步的創作，在相同 1262117 的技術領域中未見相同或近似的產品公開 已符合發明專利的要件，乃依法提 本案發明專利。 “申…請早曰賜准 【圖式簡單說明】 圖一係本發明微動機構之立體外觀示意圖； 圖一係本發明微動機構之立體分解示意圖； 3一係本發明微動機構之基座組成外觀示意圖； 圖；回四係本發明微動機構之位移組與感測組的組成示意 圖五係本發明之制動系統圖； 附件一係微動機構之零件組合圖，· 附件二係微動機構之系統架構立體圖； 附件三係微動機構之系統架構前視圖； 附件四係微動機構之零件圖； 附件五係微動撼播 r ^ ^ ^ 又勒铖構之感測狀態圖。 L主要元件符號說明】 (10 ) 基座 (15) 第二垂直基柱 (21 ) (23) 立狀制動 立狀撓性 器 體 (11) (20) (22) (25) (26) 凸塊 ( 272 )第二制動 (29) 支撐柱 (31) 感測柱 第一垂直基柱 撓性體架構 撓性體基柱 置物平板 器 (271) 第一制動器 (28) 水平撓性體 (30) 位移感測組 (32) 第一感測件 1262117 95· 4· I2 修正 年月日補充 , 1 ^ 1 # (321 ) 第一平移感應器 (322 ) 第 一旋角感應器 (33) 第二感測件 (331) 第 二平移感應器 (332 ) 第二旋角感應器 (34) 昇降感應器ίI) 撑 struts (29) are provided on the corresponding first-vertical cylinder face J--the first sensing member (32), and the first sensing member (32) and the 1262117 枉 (31) are opposite The side is divided into a corresponding first translation sensor and a: rotation angle sensor (322) for detecting the displacement of the x-axis, and the support column (29) is corresponding to the second vertical base column (j5). a second sensing member (33) is disposed on the side of the side, and the opposite side of the sensing member (33) and the sensing column (31) are respectively provided with corresponding second translation sensors (Μ" The rotation angle sensor (332) is configured to detect the displacement amount of the shaft and the 02, and the opposite side of the column (31) and the support column (29) is provided with a corresponding lifting induction (34) for detecting z. The amount of translation of the axis; this allows the micro-motion mechanism to be connected to the computer and controlled by the computer. Since the micro-motion mechanism is composed of a flexible body, it is not affected by the rubbing, so it can be accurately on the χ, Υ, and ζ axes. Move in a linear direction, while the hand 2, can rub the shadow "for the f-moment movement, and the group constitutes a micro-motion mechanism. - As for the practical application of the present invention, please refer to Figure 1. Figure 5 shows the power consumption month from the [PC] input position command, through the digital / analog conversion gamma) to send the signal to the current amplifier, and then use the flexible body architecture (2 立 vertical actuator (21) and the first _ , two brakes (271 ) ( 272 ) ) · motion: = sexual body (23), horizontal flexible body (28) and support column (9) plate (25) moves, and then use the displacement sensing group (30) to detect the storage plate (25) # w 1 μ π ( ) position block difference, and then use the analog/digital conversion card, the signal of the displacement sensing group (30) is converted back to the computer, and the digital/analog (four) card (D/ A) The card through the current amplifier with the vertical actuator "U afL唬 and then) r 979, the shape is (21) and the first and second brakes (271 lift basin axle / position compensation 'can effectively overcome the friction problem, At the same time, it is greatly improved, accurate, and capable of multi-axis measurement. In summary, the present invention is indeed a new development, and the same or similar product disclosure in the same technical field of 1262117 has been met. The essentials of the invention patent are the invention patents of the case in accordance with the law. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic perspective view of a micro-motion mechanism of the present invention; FIG. 1 is a perspective exploded view of the micro-motion mechanism of the present invention; 3 is a schematic view showing the appearance of a base of the micro-motion mechanism of the present invention; Schematic diagram of the composition of the displacement group and the sensing group. The braking system diagram of the present invention; the accessory part is a combination diagram of the micro-motion mechanism, the second is a perspective view of the system architecture of the micro-motion mechanism; the front view of the system architecture of the accessory micro-motion mechanism; Attachment 4 is a part drawing of the micro-motion mechanism; Annex 5 is a sensing state diagram of the micro-motion broadcast r ^ ^ ^ and the structure. L main component symbol description] (10) Base (15) Second vertical base column (21) (23) Vertical brake vertical flexible body (11) (20) (22) (25) (26) Bump (272) Second brake (29) Support column (31) Sensing column First vertical base column Flexible body structure Flexible body Base column storage plate (271) First brake (28) Horizontal flexible body (30) Displacement sensing group (32) First sensing part 1262117 95· 4· I2 Correction date, 1 ^ 1 # (321 ) First translation sensor (322) First rotation angle sensor (33) Second Sensing member (331) second translation sensor (332) second rotation angle sensor (34) lifting sensor