TWI259117B - Method of joining members, method of joining metallic members, radiation member, process for manufacturing the same, jig for the manufacturing and heat sink - Google Patents

Method of joining members, method of joining metallic members, radiation member, process for manufacturing the same, jig for the manufacturing and heat sink Download PDF

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Publication number
TWI259117B
TWI259117B TW92121608A TW92121608A TWI259117B TW I259117 B TWI259117 B TW I259117B TW 92121608 A TW92121608 A TW 92121608A TW 92121608 A TW92121608 A TW 92121608A TW I259117 B TWI259117 B TW I259117B
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Taiwan
Prior art keywords
substrate
copper
metal
jig
component
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TW92121608A
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Chinese (zh)
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TW200405840A (en
Inventor
Hisashi Hori
Motoshi Hotta
Yoshimasa Kasezawa
Hisao Saito
Tsuyoshi Minamida
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Nippon Light Metal Co
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Priority claimed from JP2002249983A external-priority patent/JP2004088014A/en
Priority claimed from JP2003150205A external-priority patent/JP4222108B2/en
Priority claimed from JP2003162488A external-priority patent/JP4211499B2/en
Priority claimed from JP2003203752A external-priority patent/JP4337441B2/en
Application filed by Nippon Light Metal Co filed Critical Nippon Light Metal Co
Publication of TW200405840A publication Critical patent/TW200405840A/en
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Publication of TWI259117B publication Critical patent/TWI259117B/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • B23K20/103—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding using a roller

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)

Abstract

A method of joining two metallic members of different melting points piled on each other, which enables obtaining stable joined part quality and enables junction of large metallic members of complex configuration. Two or more metallic members (aluminum member (101) and copper member (102)) are joined to each other through a process comprising arranging two or more metallic members (aluminum member (101) and copper member (102)) so that these are piled on each other in the order of highness of melting point and moving the circumferential face of tool main body (103a) of disk-shaped junction tool (103) capable of rotating in the circumferential direction, while in the piling portion pressing the same in the surface (102a) of metallic member (copper member (102)) with the highest melting point among those of the metallic members, along the surface (102a) of metallic member (copper member (102)).

Description

1259117 五、發明說明1 —— 發明所屬之技術領域 本發明的第一群組，係關於一種將具有相異熔點的金 屬疋件相互重合並接合的方法，又關於具有優良的接合強 度的放熱元件、以及具有優良的接合效率的散熱元件的萝 造方法。 t 本發明的第二群組，係關於一種將相互之間具有一定 間隔的複數個板材相互重合並接合於一基板的一表面的= 法，又關於使用上述的接合方法製造使用於丨c用散熱元 ，、皮蒂爾致冷器（pel tier device)用散熱元件、馬達用 =熱元件:電子控制零件用散熱元件等的散熱元件及其製 造方法’還有使用於上述製造方法的散熱元件製造用 本發明的第三群組，係關於冷卻半導體元件等的各種 電子零件的散熱器（heat sink)。 本t明的第四群組，係關於金屬元件相互重合並接合 的方法，又關於將複數個金屬製板材接合於一基板的一表 ，的方法，更關於應用上述接合方法的1(：用散熱元件、皮 蒂爾致冷器（pel tier device)用散熱元件、馬達用散熱元 件電子控制零件用散熱元件等的散熱元件製造方法。 本發明的第五群組，係關於金屬元件相互重合並接合 的方法’更關於應用上述接合方法的Ic用散熱元件、皮蒂 爾致冷器（Peltier device)用散熱元件、馬達用散熱元 件、電子控制零件用散熱元件等的散熱元件及其製造方 法0 /1259117 V. INSTRUCTION DESCRIPTION 1 - TECHNICAL FIELD OF THE INVENTION The first group of the present invention relates to a method of recombining and joining metal bismuth members having different melting points, and an exothermic element having excellent joint strength. And a method of making a heat dissipating component having excellent bonding efficiency. The second group of the present invention relates to a method in which a plurality of sheets which are spaced apart from each other are joined to each other on a surface of a substrate, and a method for manufacturing the 丨c by using the above-described joining method. Heat dissipating element, heat dissipating element for pel tier device, motor = heat element: heat dissipating element such as heat dissipating element for electronically controlled component, and manufacturing method thereof, and heat dissipating component used in the above manufacturing method The third group of the present invention for manufacturing is a heat sink for cooling various electronic components such as semiconductor elements. The fourth group of the present invention relates to a method for re-engaging and joining metal members, and a method for joining a plurality of metal plates to a table of a substrate, and more to the application of the above bonding method (: A heat dissipating component manufacturing method for a heat dissipating component, a heat sink element for a pel tier device, a heat dissipating component for a motor, and a heat dissipating component for a component. The fifth group of the present invention relates to recombining metal components with each other. The method of bonding is a heat dissipating element for a heat sink, a heat dissipating component for a Peltier device, a heat dissipating component for a motor, a heat dissipating component for an electronic control component, and the like, and a method for manufacturing the same. /

1259117 五、發明說明（2) 本發明 器（pe11 i er 零件用散熱 述散熱元件 先前技術 將具有 法，通常係 所謂的 與母材的^ 反應擴散的 久後，經由 就完成了接 又，所 時間内的高 件之間設置 而在火藥的 擊，藉由在 j e t )，排除 然而， 可用於接合 另外， 金屬元件與 有鑑於 將熔點互異 的第六群組，係 devi ce)用散熱 器等的散熱元件 的散熱器。 關於1C用散熱器、皮蒂爾致冷 器、馬達用散熱器、電子控制 及其製造方法，更關於使用上 相異熔點 使用銲接 鲜接’係 潤濕」與 液相銲接 上述炼融 合。 謂的*** 能量而將 適當的間 一端用雷 撞擊點發 金屬表面 使用銲接 的金屬種 使用*** 具複雜形 此，本發 的二金屬 的二個 或*** 使炫融 「流動 材之毛 的銲接 金屬元件相互重合並接合的方 壓接。 的銲接材流入接合部，而利用 」的接合方法，藉由可熔融或 細現象，將界面間隙埋覆，不 材冷卻伴隨著凝固的過程中， 壓接， 金屬接 隔，在 管引爆 生顯著 之污染 時，有 類受到 壓接時 狀的金 明的第 元件相 係使用在 合的方法 邊的金 而使兩 的流動現 層，並同 著接合部 限制等缺 ’有著成 屬元件等 一群組係 互重合併 發生火藥*** ，其中係將各 屬元件上承載 金屬元件以高 象（金屬嘴流； 時在高壓下密 的品質不安定，以即 點。 本高、無法接合大型 缺點。 提供一種接合 接合時，可以 方法， 得到安 2036-5808-PF(Nl).ptd 第8頁 麵 1259117 --—--- 五、發明說明（3) ' ------------—- 定的接合部品暂 ^ 間的接人。買’亦可以達成在大型且形狀複雜的金屬之 杜》* Γ, °又’本發明亦提供以上述方法所製造的散熱元 件及其製造方法。 又，將相 π M ^ 互之間具有一定間隔的複數個鰭片立設於一 丞板的一 f ^ 令蝴ΛΑ i ^ 上之散熱元件的製造方法，已揭示有例如將 王肢的散教分乂冰 考 =、、凡件以鋁擠型（extrude)的步驟一體成形（請參1259117 V. INSTRUCTION DESCRIPTION OF THE INVENTION (2) The device of the present invention (the heat dissipation element of the pe11 i er part) has a method of the prior art, and is usually a so-called reaction with the base material for a long time, and then the connection is completed. The setting between the high pieces of time and the shot of the gunpowder, by the jet), however, can be used to join the other, the metal element and the sixth group in view of the melting point is different, the system uses a radiator A heat sink for the heat dissipating component. Regarding the radiator for 1C, the Pittier refrigerator, the radiator for the motor, the electronic control, and the method of manufacturing the same, it is more suitable to use the above-mentioned different melting point, using welding, fresh soldering, and liquid phase welding. The explosive energy is used to strike the metal surface with a lightning strike at the appropriate end. The use of a welded metal species uses a complex explosion. The two metals of the present invention or the explosion cause the welding of the metal components of the flowing material. The welding material that is joined to each other is joined to the joint portion, and the interface gap is buried by the joining method, and the interface gap is buried by the melting or fine phenomenon, and the material is not cooled during the solidification process, and is crimped. When the metal is separated, when the tube is detonated and the pollution is significant, the first element phase of the gold-like type that is subjected to the pressure-bonding state uses the gold at the side of the combined method to make the two layers flow, and the joint portion is restricted. There is a group of components such as a component that is combined with each other to cause a gunpowder explosion. Among them, the metal components are carried on the elements of each member to a high image (the metal nozzle flow; when the density is high under high pressure, the quality is unstable, that is, the point. This is high and cannot be combined with large defects. When a joint is provided, it is possible to obtain an 2036-5808-PF(Nl).ptd page 8 1259117 ------ (3) ' ------------------------ The joints of the joints are temporarily connected. Buying 'can also be achieved in large and complex shapes of metal Du** Γ, ° Further, the present invention also provides a heat dissipating member manufactured by the above method and a method of manufacturing the same. Further, a plurality of fins having a certain interval between π M ^ and each other are erected on a rafter. The manufacturing method of the heat dissipating component on i ^ has been disclosed, for example, that the dispersal teaching of the king limb is divided into ice test, and the workpiece is integrally formed by the step of extrude (please refer to

部盥本Ϊ許特開2〇0 1 —384 1 6號公報）。又，將複數個棒狀 ^立°又於上述棒狀部的鰭片以並列的方式排列，再將各 1奉狀部以銲接的方式製造鋁製的散熱元件；其中上述棒狀 4與韓片係以擠型製成，具有斷面為L字型或凹字型的鋁 製散熱元件之構成元件（請參考日本特許特開6 _丨7 7 2 8 9號 公報）。更者，亦有為了提高散熱性能而使用具高熱傳導 性的銅，而將複數個鋁製鰭片以銲接的方式接合於一銅製 的基板的一表面上。The Ministry of Foreign Affairs and the Ministry of Foreign Affairs opened 2〇0 1 —384 1 6 bulletin). Further, a plurality of rod-shaped fins are arranged in parallel with the fins of the rod-shaped portion, and each of the fin-shaped portions is welded to manufacture a heat-dissipating member made of aluminum; wherein the rod-shaped 4 and Han The sheet is made of an extruded type, and has a constituent element of an aluminum heat dissipating member having an L-shaped or concave-shaped cross section (refer to Japanese Laid-Open Patent Publication No. Hei 6 _ 7 7 2 8 9). Further, in order to improve heat dissipation performance, copper having high thermal conductivity is used, and a plurality of aluminum fins are joined to one surface of a copper substrate by soldering.

然而，將全體的散熱元件以鋁擠型的步驟一體成形 時，鰭片之高度/間隔比（tong rat io)存在有製程上的限 制。而鰭片之高度/間隔比愈高，散熱元件的散熱性能愈 高，且銘擠型的步驟所能得到的鰭片之高度/間隔比無法 超過2 0的情況下，亦造成所製造的散熱元件的散熱性能受 到限制。 又，使用銲接時，在真空爐等加熱装置中加熱、恆溫 一段時間是必要的步驟，而有高製造成本的問題。 而上述習知技術的問題’不僅僅是發生在散熱元件的 製造方法上，將相互之間具有一定間隔的複數個板材立設However, when the entire heat dissipating member is integrally formed by the aluminum extrusion process, there is a process limitation in the fin height/space ratio (tong rat io). The higher the height/space ratio of the fins, the higher the heat dissipation performance of the heat dissipating components, and the height/interval ratio of the fins that can be obtained by the step of the extrusion process cannot exceed 20, which also causes the heat dissipation to be produced. The thermal performance of the components is limited. Further, when welding is used, heating in a heating device such as a vacuum furnace and constant temperature for a certain period of time are necessary steps, and there is a problem of high manufacturing cost. The problem of the above-mentioned prior art is not only that the manufacturing method of the heat dissipating component occurs, but also a plurality of panels which are spaced apart from each other.

2036-5808-PF(Nl).ptd 第9頁2036-5808-PF(Nl).ptd Page 9

器與電動、電子機器辜 ’需要避免在實用時養 冷卻上，伴隨著近年身 成為極為重要的技術萄 有將電子元件的發熱告丨 而將上述電子元件的潑 的鰭片上，並使用風扇 散熱器（heat sink)。 熱排到發熱部位之附近 使用排熱管（h e a t 而將散熱元件與風扇 位，而配置於空間較有 1259117 五、發明說明（4) 於一基板的一表面上時 有鑑於此，本發明的ί 地面臨著相同的問題。 方法，可以將又薄又高的先二供-元件接合 並接合於-基板的一表面彳m短間距簡單地立設 本製造具高高度/間隔比 發明係提供可以低成 ^ X ^ Λν/Λ"/ ^ ^ ^ ^ ^ 能的散熱元件，以及在i二/所製造的具有高散熱性 治具。 在上述方法中所使用的散熱元件製造 又，搭載於個人電腦等各種機 電子設備之半導體元件等電子元件 熱到某種程度，在上述電子元件的 電子元件的高功率化與高集積化， 題。現在，上述的冷卻手段，例如 位與一散熱元件做導熱性的接觸， 熱部位所產生的熱輸送到散熱元件 做強制性地冷卻而將熱排到外界的 又如薄型的筆記型電腦，要製作將 的構造有空間上的困難時，係開始 p i pe)來連接發熱部位與散熱元件 遠離位於箱型容器本體側的發熱部 餘裕的面板側之散熱器。And electric and electronic machines 需要 'need to avoid cooling in practical use, along with the technology that has become an extremely important technology in recent years, the fins of the above-mentioned electronic components are slammed on the fins of the electronic components, and the fan is used for heat dissipation. Heat sink. The heat is discharged to the vicinity of the heat generating portion, and the heat dissipating tube (heat is used to dispose the heat dissipating component and the fan position, and is disposed in a space of 1259117. The invention description (4) is on a surface of a substrate. The same problem is faced by the method. The method can be used to join and bond the thin and high first two-components to a surface of the substrate 彳m shortly. A heat-dissipating component that is low in ^ X ^ Λν/Λ"/ ^ ^ ^ ^ ^, and a fixture with high heat dissipation manufactured by i.2. The heat-dissipating component used in the above method is manufactured by itself. Electronic components such as semiconductor elements of various electronic devices such as computers are heated to some extent, and the electronic components of the electronic components are increased in power and high in integration. Now, the above-described cooling means, such as a bit and a heat dissipating component are made. The contact of the thermal conductivity, the heat generated by the hot part is transported to the heat dissipating component to be forcedly cooled, and the heat is discharged to the outside as a thin notebook computer, and the structure to be constructed has space. When difficulties, based start p i pe) is connected to the heating element away from the heat radiating portion of the radiator panel side margin of the heat generating portion of the box-shaped container main body side.

_ 使用於上述散熱器的散熱元件，係將複數個銅製或鋁 製的鱗片直接立設並接合於銅製的基板上，而亦有使用鋁 擠型將基板與立設於其上的複數個_片一體成形後，重合_ The heat dissipating component used in the above heat sink is a plurality of copper or aluminum scales which are directly erected and joined to a copper substrate, and a plurality of substrates extruded on the substrate are also used. After the sheet is integrally formed, it is overlapped

2036-5808-PF(N1).ptd 第10頁 1259117 五、發明說明（5) ϋ接合於銅製的基板上。豆中， 個銅製或銘製的韓片之接^ 銅製的基板與複數 鋁基板之接合係使用鮮接或***壓接。傻I到丞板” 而銲接，係使熔融的銲接材流入接合 材的「潤濕」與「流動」的接合方 ^ 擴散::液相焊接材之毛細現象1界面 Ϊ成、述熔融的銲接材冷卻伴隨著凝固的過程中，就 的丄，係使用在發生火藥***的及短時間内 的方法，*中係將各金屬元件之間 =置t田的間隔，在一邊的金屬元件上承載火藥，而 藥的:端用***引爆’而使兩金屬元件以高速度撞擊，藉 由在撞擊點發生顯著的流動現象（金屬喷流；曰 jet)，排除金屬表面之污染層，並同時在高壓下密接。 然而，使用銲接時，在真空爐等加熱裝置中加埶、恆 溫一段時間是必要的步驟，而有高製造成本的問題，且 有接合部品質不安定的問題。 一又，使用***壓接時，有著成本高、無法接合大型金 屬元件與具複雜形狀的金屬元件等缺點。 有鑑於此，本發明的第三群組的目的係提供一高性能 的散熱器’具有在低成本下，其銅基板與銅鰭片、鋁鰭 片、或紹基板能確實地接合的散熱元件。 又’揭示於日本特許特開2 〇 〇 3 —丨4 2 6 3 9號公報之段落 0 0 1 5至0 0 1 8與圖2、3、5的習知的散熱元件的製造方法，2036-5808-PF(N1).ptd Page 10 1259117 V. INSTRUCTIONS (5) ϋ is bonded to a copper substrate. In the beans, a copper or inlaid Korean piece of copper is bonded to a plurality of aluminum substrates using a fresh or explosive crimp. "Silver I to the slab" and welding, the molten solder material flows into the joint of the "wet" and "flow" of the joint material. Diffusion: The capillary phenomenon of the liquid phase solder material 1 interface Ϊ 、 、 、 In the process of solidification, the enthalpy is used in the case of a gunpowder explosion and in a short time. * The middle part of the metal element is placed between the metal elements and placed on one side of the metal element. Gunpowder, and the drug: the end is detonated with a detonator' and the two metal components are struck at a high speed, and by causing a significant flow phenomenon at the impact point (metal jet; 曰jet), the contaminated layer on the metal surface is excluded, and at the same time Closely connected under high pressure. However, when welding is used, it is a necessary step to apply enthalpy and constant temperature for a period of time in a heating device such as a vacuum furnace, and there is a problem of high manufacturing cost and a problem that the quality of the joint is unstable. Further, when explosive pressure bonding is used, there are disadvantages such as high cost and inability to join large metal components and metal components having complicated shapes. In view of this, the third group of the present invention aims to provide a high-performance heat sink having a heat dissipating component that can reliably bond a copper substrate to a copper fin, an aluminum fin, or a substrate at a low cost. . Further, a method of manufacturing a conventional heat dissipating member disclosed in Japanese Laid-Open Patent Publication No. 2 丨 〇 3 - 丨 4 2 6 3 9 0 0 1 5 to 0 0 1 8 and Figs. 2, 3 and 5,

2036-5808-PF(Nl).ptd 第11頁 1259117 五、發明說明（6) — 如第66A圖所不’由銅合金組成的基板462的表面462a上， 配置有··將鋁合金組成的薄板予以彎折，而形成具有基端 部464a、散熱面464b、前端部464c之連續凹凸斷面形狀的 錯片464 ’其中各基端部464a係與表面462a形成面接觸； 再如第66B、66C圖所示，將一沿圓周轉動的圓板狀接合治 具463的治具本體463a的圓周面壓入鰭片464的基端部464a 的表面’並沿著基端部464a的表面移動，而使鰭片464接 合於基板4 62。上述的接合方法稱為摩擦震動接合 (friction acoustic bonding)。 如下所示的摩擦震動接合所使用的接合治具皆可以使 用·具有平坦的治具本體463a的圓周面之接合治具463(請 參考第67A圖）；在治具本體463a的圓周面上，形成有平行 於治具本體463a圓周面厚度方向的複數個細條4631)的接合 治具463B(請參考第67B圖）；在治具本體463a的圓周面 上，具有突出於治具本體4 6 3a的徑向，成島狀排列的複數 個四角錘形狀的突起463c的接合治具463C(請參考第67C 圖）；以及在治具本體4 6 3a的圓周面上，具有突出於治具 本體463a的徑向，成島狀排列的複數個圓弧形狀的突起 463d的接合治具463D(請參考第67D圖）。其中，與第67A圖 之接合治具463相比，第67B〜67D圖之接合治具463b、 463c、463d，因為與鰭片464的基端部464a有較大的接觸 面積’在摩擦震動接合鰭片464與基板462時有較好的效 率。 然而，上述習知的散入元件的製造方法，存在著以下2036-5808-PF(Nl).ptd Page 11 1259117 V. INSTRUCTION DESCRIPTION (6) - As shown in Fig. 66A, the surface 462a of the substrate 462 composed of a copper alloy is provided with an aluminum alloy. The thin plate is bent to form a stagger 464 having a continuous concave-convex cross-sectional shape of the base end portion 464a, the heat dissipating surface 464b, and the front end portion 464c, wherein each of the base end portions 464a is in surface contact with the surface 462a; As shown in Fig. 66C, the circumferential surface of the jig body 463a of the disk-shaped joint jig 463 which is rotated circumferentially is pressed into the surface ' of the base end portion 464a of the fin 464 and moves along the surface of the base end portion 464a. The fins 464 are bonded to the substrate 4 62. The above bonding method is called friction acoustic bonding. The joint jig used for the frictional vibration joining as shown below can be used. The joint jig 463 having a flat circumferential surface of the jig body 463a (please refer to FIG. 67A); on the circumferential surface of the jig body 463a, a bonding jig 463B (see FIG. 67B) having a plurality of thin strips 4631) parallel to the thickness direction of the circumferential surface of the jig body 463a (refer to FIG. 67B); and a protruding surface of the jig body 46 3 3a on the circumferential surface of the jig body 463a a radial joint, a joint fixture 463C of a plurality of quadrangular hammer-shaped projections 463c arranged in an island shape (refer to FIG. 67C); and a circumferential surface of the fixture body 463a protruding from the fixture body 463a The jig 463D of a plurality of arc-shaped projections 463d arranged in an island shape in the radial direction (refer to Fig. 67D). Here, the joint jigs 463b, 463c, and 463d of the 67B to 67D have a larger contact area with the base end portion 464a of the fin 464 than the joint jig 463 of Fig. 67A. The fins 464 and the substrate 462 have better efficiency. However, the above-described conventional method for manufacturing a diffusing element has the following

1259117 五、發明說明（7) ---- 的問題。 (1) 因為接合治具463是壓入鋁合金所構成的鰭片464 之側，而為摩擦震動接合，而鋁合金的熔點係低於構成基 板462之銅合金，因此在基板462與鰭片464的交界面達到 接合所必要的溫度（ 548 t的共晶溫度）之前，鰭片4以的基 端部464a就因高溫化而降低其抗形變強度。因此，來自二 合治具4 6 3的壓應力便無法充分地傳達至基板4 6 2與鰭片 464的基端部464a的交界面，而發生接合不良或盔法^人 的問題。更者，鰭片464的基端部464a的厚度較薄（例如1259117 V. Inventions (7) ---- The problem. (1) Since the joining jig 463 is pressed into the side of the fin 464 formed of the aluminum alloy and is frictional vibration bonding, and the melting point of the aluminum alloy is lower than that of the copper alloy constituting the substrate 462, the substrate 462 and the fin are Before the interface of 464 reaches the temperature necessary for bonding (the eutectic temperature of 548 t), the base end portion 464a of the fin 4 is lowered in its deformation resistance due to the high temperature. Therefore, the compressive stress from the tie tool 463 cannot be sufficiently transmitted to the interface between the substrate 436 and the base end portion 464a of the fin 464, causing a problem of poor joint or helmet. Moreover, the thickness of the base end portion 464a of the fin 464 is thin (for example

5 mm以下日守，會有鰭片464的基端部464a炼斷的缺點。 (2) 因為接合治具463是壓入鰭片464之側，鰭片464的 組成中之基端部464a就無法省略，散熱元件的 就因而受限。 〃 m仏 (3) 因為接合治具463是壓入鰭片464之側，位於散熱 = 464b正下方之基端部464a與基板4以殘留有未接合的^ 分’而導致散熱元件的散熱性能與接合強度不足。 (4) 必須注意高速轉動的接合治具463，在各個小鮮. 464的散熱面464b之間壓入的深度，否則會使接合治星^ 再為接觸各個散熱面464b的情形下移動，而 作章Below 5 mm, there is a disadvantage that the base end portion 464a of the fin 464 is broken. (2) Since the joint jig 463 is pressed into the side of the fin 464, the base end portion 464a of the composition of the fin 464 cannot be omitted, and the heat dissipating member is thus limited. 〃 m仏(3) Since the bonding jig 463 is pressed into the side of the fin 464, the base end portion 464a directly under the heat dissipation = 464b and the substrate 4 remain unjoined, resulting in heat dissipation of the heat dissipating member. Insufficient joint strength. (4) Attention must be paid to the high-speed rotation of the joint jig 463, the depth of the press-fitting between the heat-dissipating surfaces 464b of each of the small 464, otherwise the joint ruler ^ will move in contact with the respective heat-dissipating surface 464b, and Stamp

1寻繁雜f困難。上述的情況，特別在為了提升散 :=旎而將鰭片之高度/間隔比提高時(將散熱面464b . ^3隔縮小、且/或提升散熱面4 64b之高度），特別顯 上述的問題，不僅僅是發生在散熱元件的製造方法1 looking for complicated f difficult. In the above case, especially when the height/space ratio of the fin is increased in order to increase the dispersion: = (the heat dissipation surface 464b. ^3 is narrowed and/or the height of the heat dissipation surface 4 64b is raised), particularly the above Problem, not only in the manufacturing method of the heat dissipating component

1259117 五、發明說明（8) 上，一般將複數個金屬製板材立設於一金屬製基板的一表 面上時，亦廣泛地面臨著相同的問題。更者，一般金屬元 件之間相互重合並接合時，亦面臨著上述（丨）〜（3 )項的問 題。 有鑑於此，本發明之第四群組首先提供一接合方法， 可以簡易並確實地將各金屬元件相互重合並接合。本發明 係又提供一接合方法，可以簡易並確實地將複數個金屬製 板材接合至一金屬製基板；且更應用上述方法，提供簡易1259117 V. Inventive Note (8) Generally, when a plurality of metal plates are erected on one surface of a metal substrate, the same problem is widely faced. Moreover, when the metal elements are generally rejoined and joined to each other, the above problems (丨) to (3) are also faced. In view of this, the fourth group of the present invention first provides a bonding method for easily and surely rejoining and bonding the metal members to each other. The present invention further provides a joining method for easily and surely joining a plurality of metal sheets to a metal substrate; and applying the above method to provide simplicity

的散熱元件的製造方法，將複數個鰭片強固地立設、接合 至一基板。In the method of manufacturing a heat dissipating component, a plurality of fins are strongly erected and joined to a substrate.

又’將銅合金所構成的基板與鋁合金所構成的薄板重 合’並將一旋轉的圓板狀接合治具壓在熔點低於銅合金之 銘合金薄板上之習知的金屬元件接合方法已經為世人所瞭 解（請參考例如日本特許特開2〇〇3_ 1 42639號公報之段落 0015至〇〇18及其第69圖_3)。上述的接合方法中，係將上 述旋轉的圓板狀接合治具與上述鋁合金薄板接觸而產生摩 ^熱，並利用上述摩擦熱使上述薄板與基板的交界面成為 可塑化（流動化）的固相。因此，將上述可塑化（流動化）的 j合金與銅合金冷卻後，上述薄板與上述基板就已接合在 一起了。藉由上述的接合方法，可以較少的步驟並在短時 間内接合各金屬元件。 β 然而，上述的金屬元件接合方法中，由於接合治具是 f入紹合金薄板之一側，基板與薄板的重合部（交界面）的 Μ度達到|g合金與銅合金之接合必要的共晶溫度（5 4 8艽）Further, a method of bonding a substrate made of a copper alloy to a thin plate made of an aluminum alloy and pressing a rotating disk-shaped bonding jig to a metal alloy plate having a melting point lower than that of a copper alloy has been known. It is known to the world (please refer to, for example, paragraphs 0015 to 〇〇18 of the Japanese Patent Laid-Open No. 2_1 42639 and its Fig. 69 _3). In the above bonding method, the rotating disk-shaped bonding jig is brought into contact with the aluminum alloy thin plate to generate heat, and the interface between the thin plate and the substrate is plasticized (fluidized) by the frictional heat. Solid Phase. Therefore, after the above-mentioned plasticized (fluidized) j alloy and the copper alloy are cooled, the above-mentioned thin plate and the above substrate are joined together. With the above bonding method, the metal members can be joined in a small number of steps and in a short time. β However, in the above-described metal element bonding method, since the bonding jig is one side of the frit alloy thin plate, the degree of overlap of the substrate and the thin plate (interface) reaches the joint of the |g alloy and the copper alloy. Crystal temperature (5 4 8艽)

1259117 ----—-_ 五、發明說明（9) 以上時，鋁合金亦即薄板的抗 此’上述的金屬元件接合方法中，來變得較小。因 便無法充分地傳達到基板與 ：3治：的^ j力 之間的接合就無法形成高強度接合。…P，而基板與薄板 有於此，本發明係提供一 可以較少的步驟甘—^ * a 禋鱼屬70件的接合方法， 述金屬元件1有：=% f曰内接合各金屬元件，並可使上 熱元件的製造=合強度；以及提供應用上述方法之散 件。…法，並提供使用上述方法所製造之散熱元 0 01 6 i第二本二：特開平9-203595號公報(段落_至 Wnt)接著，中，、揭示使用填隙接合(⑽ing 件的焦點是在；旦：接接合的散熱元件。上述的散熱元 埶傳導盎獻，重里1父大而熱傳導率極高的銅的特性、以及 盥鳍片ώ夂、於銅，而重量比銅還輕的鋁的特性，將基板 散；金屬構成，可以雙方面滿足提升 基板：：度力=提=散熱元件的性能時’必須考量將 量），如此一來將/Λ 片的間隔（增加韓片的數 寻θ加散熱元件全體的重量，就與輕量化 ϊϊίΐ道而馳。換言之，在不降低散熱性能的情況下， 要將政:7L件做更輕量化的處理有其極限。 有鑑於此，本發明的第六群組係達成不降低散熱 的前提下，又能達到輕量化之課題。在達成上述之前提 下，本發明係提供一散熱元件的製造方法、與使用上述散1259117 ------_ V. Inventive Note (9) In the above, the aluminum alloy, that is, the thin plate, is resistant to the metal element joining method described above. Therefore, it is not possible to sufficiently convey the bonding between the substrate and the force of the metallurgical force to form a high-strength joint. ...P, and the substrate and the thin plate are here, the present invention provides a joining method of 70 pieces which can be less steps, and the metal element 1 has: =% f曰 joining the metal elements And can make the manufacturing of the upper heat element = combined strength; and provide the parts using the above method. The method and the heat dissipating element manufactured by the above method are provided. 0 01 6 i. Second, Japanese Laid-Open Patent Publication No. Hei 9-203595 (paragraph _ to Wnt). Next, the use of the gap-filling joint (the focus of the (10) ing piece is revealed. It is: Dan: the heat-dissipating component of the joint. The above-mentioned heat-dissipating element is conductive, the characteristics of copper with a large heat and high thermal conductivity, and the fin fins, copper, and lighter than copper. The characteristics of aluminum, the substrate is scattered; the metal is composed, which can meet the lifting of the substrate in two aspects:: degree = mention = the performance of the heat dissipating component 'must consider the amount", so that the spacing of the / Λ film (increased Korean film The number of θ and the weight of the heat dissipating component are all in line with the weight reduction. In other words, without lowering the heat dissipation performance, there is a limit to the more lightweight processing of the 7L piece. The sixth group of the present invention achieves the problem of light weight without reducing heat dissipation. Before the above is achieved, the present invention provides a method for manufacturing a heat dissipating component and using the above dispersing

第15頁 1259117 五、發明說明（m) 熱元件的散熱器。 發明内容 本發明的第一群組係提供一種金屬元件接合方法，包 含·提供複數個金屬元件，依照炼點的高低順序相互重合 排列；以及將一沿圓周轉動的圓板狀接合治具的圓周面置 於上述金屬元件的重合部，使上述接合治具的圓周面壓入 上述金屬元件中熔點最高的金屬元件的表面，並使上述圓 周面沿著上述熔點最高的金屬元件的表面移動，而使上述 金屬元件相互接合。Page 15 1259117 V. INSTRUCTIONS (m) Heat sink for thermal components. SUMMARY OF THE INVENTION A first group of the present invention provides a metal component bonding method comprising: providing a plurality of metal components arranged in line with each other in accordance with a height of a refining point; and a circumference of a circular plate-shaped jig for rotating the circumference The surface is placed on the overlapping portion of the metal element, and the circumferential surface of the bonding fixture is pressed into the surface of the metal element having the highest melting point among the metal elements, and the circumferential surface is moved along the surface of the metal element having the highest melting point. The above metal members are joined to each other.

本發明係又提供一種金屬元件接合方法，包含：提供 二個熔點相異的金屬元件相互重合排列；以及將一沿圓周 轉動的圓板狀接合治具的圓周面置於上述金屬元件的重合 部’使上述接合治具的圓周面壓入上述金屬元件中熔點較 同的金屬元件的表面，並使上述圓周面沿著上述炼點較高 的金屬元件的表面移動，而使上述金屬元件相互接合。 上述的金屬元件接合方法，係藉由接合治具的壓應 力’使金屬元件重合部的缝隙消失，並藉由轉動的接合治 二與金屬元件之接觸而產生的震動，使存在於金屬元件重 a面之氧化物皮膜***、破壞，再加上所產生的摩擦熱使The present invention further provides a metal component bonding method comprising: providing two metal elements having different melting points to be aligned with each other; and placing a circumferential surface of a circumferentially rotating disk-shaped bonding fixture on the overlapping portion of the metal component 'pressing the circumferential surface of the bonding fixture into the surface of the metal element having the same melting point in the metal element, and moving the circumferential surface along the surface of the metal element having the higher melting point to bond the metal elements to each other . In the above metal element bonding method, the gap of the metal element overlapping portion is eliminated by the compressive stress of the bonding jig, and the vibration generated by the contact of the rotating bonding element with the metal element causes the metal element to be heavy. The oxide film on the a side is split and destroyed, and the frictional heat generated is

重& 一兩/jnL化並發生塑性變形，而增加各金屬元件間的接 觸面積與擴散速率，而使重合部接合。上述的方法稱為摩 擦震動接合。 $別是，將複數個金屬元件依照其熔點的高低順序相 互重合配置，而將接合治具壓入熔點最高的金屬之側而接The weight & one or two is jnL and plastically deformed, and the contact area and the diffusion rate between the metal elements are increased, and the overlapping portions are joined. The above method is called a frictional vibration joint. In other words, a plurality of metal components are arranged in a mutually overlapping manner according to the order of their melting points, and the bonding jig is pressed into the side of the metal having the highest melting point.

1259117 五、發明說明（11) 合時，在各金屬元件的重合部的溫度提升到接合所必要的 溫度時，鄰近接合治具之一側的金屬元件仍然能保持高t 形變強度，而使接合治具的壓應力能夠有效率地傳達=^ 而能夠在金屬元件間形成無縫隙且具高接合強度之 本發明係又提供一種金屬元件接合方法，包含·· 一銅元件與一鋁元件相互重合排列；以及將一沿圓周轎= 的圓板狀接合治具的圓周面置於上述銅元件盥 的重合部’使上述接合治具的圓周面壓入上述銅 面，並使上述圓周面沿著上述銅金屬元件的表面移 使上述銅元件與上述鋁元件相互接合。 動接合後，貫現上述的接合時， 手^震 熔點低於銅元件之鋁元件_側 a接口治具是壓入 6 70仵側而為摩捧靈舍7 ；&人# 兩元件的重合面達到共晶溫度以:寺’因為 度就會變小，來自接合^ & 、呂疋件的抗形變強 重合面上’而容易發生接合不 U刀地傳達到 治具是壓入熔點高於鋁元件喊而如果上述接合 合時’因為兩元件的重合面達：：：：：而為摩擦震動接 的抗形變強度較大，壓岸六Ba〉里度以上時，銅元件 能夠確實地接合。 力就能充分地傳達至重合面，而 上述的金屬元件接合方法 圓周速率R (m/min.)較好由下二=合時接合治具轉動的 '印卜式C A)求出：1259117 V. INSTRUCTION DESCRIPTION (11) At the same time, when the temperature of the overlapping portion of each metal member is raised to the temperature necessary for the joining, the metal member adjacent to one side of the joining jig can still maintain a high t-deformation strength, and the joining is performed. The present invention provides a metal element bonding method, and includes a metal element bonding method, and a copper element and an aluminum element are overlapped with each other. And arranging a circumferential surface of the disc-shaped joint jig along the circumference of the steel plate to the overlapping portion of the copper element ', pressing the circumferential surface of the joint jig into the copper surface, and causing the circumferential surface to follow The surface of the copper metal member is moved such that the copper member and the aluminum member are joined to each other. After the joint, when the above-mentioned joint is completed, the aluminum element whose melting point is lower than that of the copper element is _ side a. The jig is pressed into the side of 6 70 而 and is the holding of the armor 7; & The coincident surface reaches the eutectic temperature: the temple 'because the degree will become smaller, from the joints of the ^ & 疋 疋 的 的 的 强 强 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易 容易It is higher than the aluminum component and if the above-mentioned bonding is combined, 'because the overlapping surface of the two components reaches ::::: and the anti-deformation strength of the frictional vibration is large, when the pressure is more than six degrees, the copper component can be sure. Ground joint. The force can be sufficiently transmitted to the coincident surface, and the above-described metal element joining method is preferably obtained by the 'secondary type R', which is rotated by the lower two = combined joint jig:

2036-5808-PF(Nl).ptd 1259117 ΗΜΜΧΜΗΜΜΜΜΜΜΜΜΜΜΗΜΜΜΝΜϋΜ 五、發明說明（12) 250 $ 2000 ........................ 接合時接合治且棘動沾m ·田·.............................. 接a # jl ϋη > ί動的0周速率小於25〇 時， 元件與铭元件的重合面的ίί卢r f生的熱量便會過小，銅 題。另一方®垃I， 低，而發生接合不良的問 m/min時，#a β ^ 具轉動的圓周速率大於2〇〇〇 m/nun·日守，接合治具與鋼元 會大於所必要的埶量，除了 _ ^接觸所產生的熱量便 指生夕从★ 2 ”、、 了會增加驅動接合治具時的能量 扣失之外，亦會使與接合治具接觸的銅 性地過大而使該部分發生塑性變形，因】’:f =局π 治具的壓應力便無法充分地傳達到 "接合 之間有產生縫隙的可能。因此，接而在兩元件 周速率在25G m/inin.~ 2_ 動㈣ 件之來擦接觸所產生的熱量便是 口 /σ八，、銅疋 的接合。 、田的值，而能夠行良好 又，上述的金屬元件接合方法中， 銅元件的表面壓入量α (m)係較好為由^ :=接合治具在 〇.〇3x t^a^〇.3x t.................巧由下式(B)求出： • · · _ * 奉 其中t為該重合部中的該銅元件的厚度（瓜） （B) 接合時接合治具在銅元件的表面壓入量小於 時，銅元件與鋁元件的重合面會殘留絲 、· 良；另-方面，壓入量大於〇.3t時，造成接合不 的重合面不會殘留縫隙，但是在銅元件、=凡件與鋁70件 過大而殘留顯著的凹痕，而發生元件的損^面會因壓入量 時接合治具在銅元件的表面壓入量在〇 因此’接合 •Udt〜〇·3ΐ時，接合 第18頁 2036-5808-PF(Nl).Ptd 12591172036-5808-PF(Nl).ptd 1259117 ΗΜΜΧΜΗΜΜΜΜΜΜΜΜΜΜΗΜΜΜΝΜϋΜ V. Description of invention (12) 250 $ 2000 ........................ And the thorny touch m · Tian ·.............................. Connect a # jl ϋ η > When the speed is less than 25 ,, the heat of the surface of the coincident surface of the component and the Ming component will be too small, copper. The other side, ■I, is low, and when the joint is poor, m/min, #a β ^ has a circumferential speed greater than 2〇〇〇m/nun·day, the joint fixture and steel element will be greater than necessary The amount of heat, except for the heat generated by the contact, means that the energy is deducted from the ★ 2 ”, and the energy loss in the driving of the jig is increased, and the copper contact with the jig is too large. And this part is plastically deformed, because ':f = the compressive stress of the π fixture can not be fully conveyed to the possibility of a gap between the joints. Therefore, the rate of the two components is 25G /inin.~ 2_ The heat generated by the contact (4) is the mouth/σ8, the joint of the copper cymbal, the value of the field, and the ability to perform well. In the above metal component bonding method, the copper component The surface indentation amount α (m) is preferably from ^ := joint jig in 〇.〇3x t^a^〇.3x t................. It is determined by the following formula (B): • · · _ * where t is the thickness of the copper component in the overlap (melon) (B) when the joint jig is pressed less than the surface of the copper component at the time of bonding The overlapping surface of the copper component and the aluminum component may leave the wire and the good; in other respects, when the pressing amount is greater than 〇.3t, the overlapping surface of the bonding does not leave a gap, but in the copper component, the component and the aluminum 70 If the part is too large and there are significant dents remaining, the damage of the component will be caused by the amount of pressing of the bonding fixture on the surface of the copper component when the amount is pressed. Therefore, when the bonding is performed, Udt~〇·3ΐ, the bonding page 18 2036-5808-PF(Nl).Ptd 1259117

治具的壓應力便是適當的值，而能夠在銅元件與銘元 、 重合面不會殘留縫隙的情況下，亦能縮小銅元件件的 丁衣面的凹 五、發明說明（13) 又，上述的金屬元件接合方法中，接合時接合、么且、八 著銅元件的表面移動的行進速率V (m/min·)係由 二/σ 求出： 下式（C) 〇. 1 ^R/(5. 0 x 107 X ............................. 其中R為接合時該接合治具的圓周速率（πι/min·); t為該重合部中的該銅元件的厚度（m)。 因為隨著接合時接合治具圓周速率的增大，接人、、a具 與銅元件之摩擦接觸所產生的熱量亦會增大，接合户具^ 行進速度V亦增大時，便能使重合部的溫度保持在一/D定的 數值以上。但是，因為當銅元件的厚度增加時，要將重合 面達到一定溫度以上就較為費時’若是接合治具的行進速 度V過大時，在接合面達到一定溫度以上之前，接合治具 便已通過’而發生接合不良的問題。因此，欲執行良好的 摩擦震動接合，接合治具的行進速度V、圓周速率R、與銅 元件的厚度t相互之間的調節是必要的；而發明人們的實 驗結果’係確認了滿足V $R/(5· 〇 X i〇7 x t2)時，可以有良 好的接合。 又’接合治具的行進速度V過小時，就會有接合效率 不佳+的觀點之緣故，發明人們經由實驗係確認了滿足〇 · 1 $v時’可以有良好的接合效率。 本發明係又提供一種散熱元件，包含：/鋁質散熱器The compressive stress of the jig is an appropriate value, and the recess of the surface of the copper component can be reduced in the case where the copper component and the unidentified surface and the overlapping surface do not have a gap, and the invention description (13) In the above-described metal element bonding method, the traveling rate V (m/min·) at the time of bonding and the movement of the surface of the copper element is determined by two / σ: (C) 〇. 1 ^ R/(5. 0 x 107 X ....................... where R is the peripheral velocity of the joining fixture (πι/min·); t is the thickness (m) of the copper element in the overlapping portion. Because the circumferential rate of the joining fixture increases as the joining progresses, the frictional contact between the abutting member and the copper member is The amount of heat generated will also increase, and the temperature of the overlapping portion will be maintained at a value above a certain value when the traveling speed V of the joining device is increased. However, since the thickness of the copper member is increased, It takes more time for the coincident surface to reach a certain temperature or higher. If the travel speed V of the joint jig is too large, the joint jig has passed through before the joint surface reaches a certain temperature or higher. Poor problem. Therefore, in order to perform good frictional vibration engagement, it is necessary to adjust the traveling speed V of the joining jig, the circumferential rate R, and the thickness t of the copper member; and the inventors' experimental results are confirmed. When V $R/(5· 〇X i〇7 x t2) is satisfied, it is possible to have a good joint. Also, when the traveling speed V of the joining jig is too small, there is a view that the joining efficiency is not good, The inventors have confirmed through experiments that it is possible to have good bonding efficiency when satisfying 〇·1 $v. The present invention further provides a heat dissipating component comprising: /aluminum heat sink

第19頁 1259117 五、發明說明（14) (_Γ二= )H，具有一基板、與立設於上述基板之-表面 上的U片，以及-銅質導熱板，在上述基板的另 面上，與上述基板相互重合而接合於上述基板， 2板與上述基板的接合方法係使用上述的金屬元: 合治i::二;::;因為將-沿圓周轉動的圓板狀接 二:述銅質導熱板之側，並施行摩捧ΐ 動接& ’成為上述基板與上述導熱板之 ：‘震 具較高接合強度的散熱元件。 —一&隙、且 又’上述的散熱元件中，者 型而成形。 政”、、益材料較好為使用鋁擠 上述的散熱元件中，因為散熱器 型而成形’散熱器材料具有高力H4軚好為使用鋁擠 本發明係又提供一插與# - ,A X 供-銘質散熱器材料的製造f法，包含：提 一表面上的散熱鰭片，並配置二，立设於上述基板之 基板的另-表面上；以及使用上熱板，重合於上述 接合上述基板與上述銅質導埶板 屬70件接合方法， 上述的散熱元件的製造;;、本由 的圓板狀接合治具的圓周面壓1上=為將一沿圓周轉動 質導熱板之側，並施行摩擦震 ^熔點南於鋁元件的銅 銅元件不易溶融且在高溫時^與接合治具接觸的 此’接合條件（接合治具的 谢持向的抗形變強度。因 圍大，具有良好的接合效率。丁進速率等）的容許範 ’容許在重合面局部的高 2036-5808-PF(Nl).ptd 第20頁 1259117Page 19 1259117 V. Description of the Invention (14) (_Γ二=)H, having a substrate, a U-piece on the surface of the substrate, and a copper heat-conducting plate on the other side of the substrate And the above-mentioned substrate is overlapped with each other and bonded to the substrate, and the method of joining the two plates to the substrate is to use the above-mentioned metal element: 治治 i::二;::; because the disk is rotated in a circular shape: The side of the copper heat-conducting plate is described, and the heat-transmitting element of the high-strength joint strength of the above-mentioned substrate and the above-mentioned heat-conducting plate is formed. - One & gap, and the above-mentioned heat dissipating elements are formed in a shape. It is better to use aluminum to squeeze the above-mentioned heat-dissipating components, because the heat sink type is formed. The heat sink material has high force H4. It is good to use aluminum extrusion. The invention also provides a plug and #-, AX. The method for manufacturing a heat supply material for a heat source includes: providing a heat sink fin on a surface, and arranging two on the other surface of the substrate of the substrate; and using the upper heat plate to overlap the joint The method for bonding the substrate to the copper guide plate is 70, and the heat dissipating element is manufactured; the circumferential surface pressure of the disc-shaped joint jig is 1 = the circumferential heat transfer plate is rotated Side, and the frictional vibration is achieved. The copper-copper element whose melting point is south of the aluminum element is not easily melted and is in contact with the bonding fixture at high temperature (the joint deformation resistance of the bonding fixture. Because of the large circumference, Allowable vane with good joint efficiency, Ding rate, etc.) Allows local high on the coincident surface 2036-5808-PF(Nl).ptd Page 20 1259117

五、發明說明（15) 溫化，散熱元件不會如***壓接時一般受到過度的負荷 的 因此可防止散熱鰭片的變形，並提供具有良好散熱效$ 散熱元件。 又，本發明的第 用於將相 組係 互之間具有一定間隔 基板之一表面 一定間 之間具有 (spacer) 振動接合 面壓入上 移動，而 步驟，將 上述 板材、基 質並沒有 隔物之間 成。間隔 間有相互 ，並將 步驟， 述基板 使上述 上述間 的元件 板、與 特別的 ’可以 物的形 連結。 ，包含 隔的複 上述板 將一沿 之另一 板材接 隔物移 接合方 間隔物 限制， 是同種 狀並沒 :一元 數個板 材立設 圓周轉 表面， 合於上 除。 法中， 設定至 各板材 材料組 有特別 的複數個板材立設並接合灰 件配置步驟，在排列成相名 材之間，各置入一間隔物 於一基板之一表面；一摩揞 動的圓板狀接合治具的圓局 並沿著上述基板之另一表度 述基板；以及一間隔物脫難 首先在元件配置步驟時，綱 一既定位置。上述元件的相 、各間隔物、以及板材與間 成亦可以是數種不同材料知 的限制，較好是各間隔物之V. INSTRUCTIONS (15) Warming, the heat dissipating components are not subjected to excessive load as in the case of explosive crimping, thus preventing deformation of the fins and providing a heat dissipating component with a good heat dissipation effect. In addition, the first method of the present invention is for pressing a vibration joint surface between a surface of a substrate having a certain interval between the phase groups, and the step, the substrate and the substrate are not separated. Between. There are mutual intervals, and the steps of the substrate are such that the element plates described above are connected to a special 'object'. The above-mentioned board containing the partitions is separated from the other sheet material by the joint spacer, which is the same species: the unitary number of sheets are erected on the circumference of the surface to be removed. In the method, the setting of each of the sheet material groups has a special plurality of sheets erected and joined to the ash member arranging step, and a spacer is placed on one surface of the substrate between the aligning materials; The circular plate is joined to the circle of the jig and the substrate is described along another surface of the substrate; and a spacer is removed first in the component arrangement step, at a predetermined position. The phase, spacers, and sheets and inter-layers of the above elements may also be limited by several different materials, preferably spacers.

此時， 確地保持板 可藉由間隔 又，僅需要 置間隔；更 將薄板厚、 在各板材相 材相互之間 物將板材補 變更間隔物 者’亦可以 高板高的複 互之間分別 隔，並簡單 強’板材的 的厚度，就 一併變更板 婁欠個板材以 置入一間隔 地決定其位 厚度可以變 可以任意變 材的南度， 短間隔立設 物，可以正 置；再加上 得非常薄。 更板材的酉己 而使得特另!J 並接合於基At this time, it is only necessary to set the spacing of the plates by spacing, and the thickness of the thin plates can be changed between the plates and the materials of the plates to change the spacers. Separately, and simply strong 'the thickness of the plate, change the plate 娄 个 a plate to set a space to determine the thickness of the bit can be changed to the south of the arbitrary material, short interval erect, can be placed upright ; plus very thin. It’s even more special!

1259117 五、發明說明（16) 板的一表面變得可行。而在此步驟令，各板材立ρ 於基板的一表面的狀態下，雖然各f «又，-置 該表：直接接觸；而如果考慮到下」 具的壓應力使板材受到彎曲應力的作用，接合治 對板材的補強效果，較好為使各間技棱回間隔物 表面。 汉合間隔物直接接觸基板的該 又，在接下來的摩擦震動接合步驟中，將接人 至基板的另一表面使各板材與基 ^⑺i 合。如此一來，魷^ν &攸口厚擦震動接合而接 中加熱並維持一段既定日專M 又在真玉爐 亞m 時間，可以削減接合成本。而為了 要提南基板與板材之接合強度， +而為了 另-表面上的移動能夠遍ίΐ板=具在基板的 板材能完全與基板接合；而在 ^ ^面，而使各 時，亦可以移動接合治具：；；=的；較為重要 份。又，將基板與各板材摩捭震二=材J端面的-部 各間隔物與基板接合；而雖然亦可以使 步驟，較好為使接合治具依昭：=隔物的下-個 執跡移動。 “、、不使基板/、各間隔物接合的1259117 V. INSTRUCTIONS (16) A surface of the board becomes feasible. In this step, the plates are placed in a state of a surface of the substrate, although each f «re, - is placed in the table: direct contact; and if the compressive stress of the lower part is taken into account, the plate is subjected to bending stress. The reinforcing effect of the bonding treatment on the sheet is preferably such that the respective surfaces are ribbed back to the surface of the spacer. In the subsequent frictional vibration bonding step, the Hanhe spacer is brought into contact with the other surface of the substrate so that the respective sheets are combined with the base. In this way, 鱿^ν & 攸 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚 厚In order to improve the bonding strength between the substrate and the plate, + for the other - the movement on the surface can be repeated over the plate = the plate with the substrate can be completely joined to the substrate; and in the surface, Mobile joint fixture: ;; =; more important. Further, the substrate and each of the plates are joined to each other by the spacers of the end face of the material J; and the steps may be made, and it is preferable to make the bonding jigs according to the following: = the next one of the spacers Trace movement. ",, do not make the substrate /, each spacer is joined

又，上述的元件接合方、、土 A _ 為溶點高於板材與基板的：；中，間隔物的構成材料較好 及美i 5 3 70件接合方法中，因為間隔物的熔點高於板好 ;;;=點，將接合治具的轉動數與行進速度設定= 二就不會使間隔物接合於基板與板材上，ΐί 與板材的接合也變得較簡單。 卷板Further, in the joining method of the above-mentioned components, the soil A_ is a melting point higher than the plate material and the substrate: in the bonding method of the spacer, and the bonding method of the spacer is higher than the melting point of the spacer The plate is good;;; = point, the number of rotations of the jig and the travel speed are set = two, the spacer is not bonded to the substrate and the plate, and the bonding with the plate is also relatively simple. Coil

1259117 五、發明說明（17) 又此時，在完成摩擦震動接合的階段，因為 不接合於基板與板材上，在最後的間隔物脫離步驟 可以不費事地移除間隔物。例如將板材及間隔物朝下而= 基板朝上而向上移動時，僅留下間隔物而僅有板材鱼你 一體地向上移動，而可以簡單地移除間隔物，而^二 個板材立設並接合於基板一表面的狀態。 # I数 又，上述的元件接合方法中，基板的構成材 熔點高於板材的材料。 α π两 上述的元件接合方法中，因為在將板材與基板交界面 的溫度上升至接合所必要的溫度時，基板能夠保持高抗形 變強度，接合治具的壓應力能夠有效率地傳達至交界面， 並可以形成板材與基板之間無縫隙的高強度接合。 本發明係又提供一種散熱元件的製造方法，適用於將 相互之間具有一定間隔的複數個金屬製鰭片立設並接合於 —表面’包含：—元件配置步驟，在排列 成相互之間具有—定間隔的複數個鰭片之間，各置入一間 =物（spacer)，並使上述轉片立設於一基板之一表面；一 _ ΐίΪΪ接Ϊ步驟，將一沿圓周轉動的圓板狀接合治具的 ，周：入上述基板之另一表面，並沿著上述基板之另一 胺：I w ’ ：使上述鰭片接合於上述基板；以及-間隔物 脫離步驟，將上述間隔物移除。 中蔣i ί的ΐ f元件的製造方法中’ f先在元件配置步驟 的材質並沒有特別：：物至：既定位置。上述元件 另J的限制。此日守，在各板材相互之間分別1259117 V. INSTRUCTION DESCRIPTION (17) At this time, at the stage of completion of the frictional vibration joint, since the substrate and the plate are not joined, the spacer can be removed without any trouble in the final spacer detachment step. For example, when the plate and the spacer are facing downward and the substrate is moved upwards, only the spacer is left and only the plate fish is moved upwards integrally, and the spacer can be simply removed, and the two plates are erected. And bonded to a state of a surface of the substrate. # I数 Further, in the above-described component bonding method, the constituent material of the substrate has a higher melting point than the material of the sheet material. In the above-described element bonding method, since the temperature at the interface between the plate material and the substrate is raised to the temperature necessary for bonding, the substrate can maintain high deformation strength, and the compressive stress of the bonding jig can be efficiently transmitted to the interface. And can form a high-strength joint without gap between the plate and the substrate. The invention further provides a method for manufacturing a heat dissipating component, which is suitable for erecting and joining a plurality of metal fins having a certain interval from each other to a surface comprising: - component arrangement steps, arranged in mutual Between each of the plurality of fins, a spacer is placed, and the rotor is erected on a surface of a substrate; a _ ΪΪ ΪΪ ΪΪ step, a circle rotating along the circumference a plate-shaped jig, the other surface of the substrate, and another amine: I w ' along the substrate: the fin is bonded to the substrate; and the spacer separation step, the interval Object removal. In the manufacturing method of the Chinese component, the material in the component placement step is not special: the object to: the predetermined position. The above components are limited by J. This day, the plates are separated from each other.

1259117 五、發明說明(18) 置入一間隔物，可以正確地保持板材相互之間隔，並簡單 地決定其位置；再加上可藉由間隔物將板材補強，板材的 厚度可以變得非常薄。又，僅需要變更間隔物的厚度，就 可以任意變更板材的配置間隔；更者，亦可以一併變更板 材的高度’而使得特別在簡單地製造具有高高度/間隔比 的散熱元件變得可行。而在此步驟中，各板材立設並配置 於基板的一表面的狀態下，雖然各間隔物可以不與板材的 遠表面直接接觸；而如果考慮到下一個步驟中來自接合治 具的壓應力使板材受到彎曲應力的作用，為了提高間隔物 對板材的補強效果，較好為使各間隔物直接接觸基板的該 表面。 又，在接下來的厚擦震 至基板的另一表面使各板材 合。如此一來，就沒有必要 中加熱並維持一段既定時間 要提高基板與板材之接合強 另一表面上的移動能夠遍及 板材能完全與基板接合；而 時，亦可以移動接合治具， 份。又，將基板與各板材摩 各間隔物與基板接合；而如 步驟，較好為使接合治具依 軌跡移動。 動接合步驟中，將接合治具壓 與基板因摩擦震動接合而接 如使用銲接時一般，在直空擔 ’可以削減接合成本。而為^ 度’較好為接合治具在基板的 各板材基端面的全面，而使各 在接合成本的削減較為重要 而僅遍及各板材基端面的一部 擦震動接合時，雖然亦可以使 果考慮到移除間隔物的下一個 照不使基板與各間隔物接合的1259117 V. INSTRUCTIONS (18) Inserting a spacer can correctly maintain the spacing of the plates and simply determine their position; plus the reinforcement of the plates by spacers, the thickness of the plates can be very thin . Further, it is only necessary to change the thickness of the spacer, and the arrangement interval of the sheets can be arbitrarily changed. Further, the height of the sheet can be changed together, making it particularly feasible to easily manufacture a heat dissipating member having a high height/space ratio. . In this step, each of the sheets is erected and disposed on a surface of the substrate, although the spacers may not directly contact the far surface of the sheet; and if the compressive stress from the joint jig in the next step is considered The plate is subjected to bending stress, and in order to improve the reinforcing effect of the spacer on the plate, it is preferred that each spacer directly contacts the surface of the substrate. Further, the next thick rub is applied to the other surface of the substrate to bond the respective sheets. In this way, it is not necessary to heat and maintain a predetermined period of time to increase the bonding strength between the substrate and the sheet. The movement on the other surface can completely engage the substrate throughout the sheet; at the same time, the joint can be moved. Further, the substrate and the respective spacers are bonded to the substrate, and in the step, it is preferable to move the bonding fixture in accordance with the track. In the dynamic joining step, when the bonding jig pressure is bonded to the substrate by frictional vibration and the welding is used, the bonding cost can be reduced in the straight space. In addition, it is preferable that the joint of the jig is integrated on the base end faces of the respective base plates of the substrate, so that the reduction of the joint cost is important, and only one rubbing joint of the end faces of the respective plate bases can be used. Considering that the next shot of removing the spacer does not bond the substrate to each spacer

本發明係又提供一種散熱元件的製造方法 適用於將The invention further provides a method for manufacturing a heat dissipating component, which is suitable for

五、發明說明（19) 相互之間具有一定間隔的複數個 一金屬製基板之一表面，包含： 成相互之間具有一定間隔的複數 隔物（spacer)，其中上述間隔物 片的基端面之下，而使上述間隔 鰭片的基端面的高度差不大於上 配置步驟，將上述結片中，凸出 基端部彎折’而使上述I耆片立設 擦振動接合步驟，將一沿圓周轉 周面壓入上述基板之另一表面， 面移動’而使上述鰭片的基端部 間隔物脫離步驟，將上述間隔物 上述的散熱元件的製造方法 造方法約略相同，其間的分別在 配置步驟與基板的配置步驟分開 中’使各間隔物的基端面分別沒 側之端面）之下（鰭片的基端面較 接下來的基板配置步驟中，將基 的基端部（較間隔物突出的部分） 部算起，鰭片的基端部突出的長 因此將各鱗片的基端部幫折後， 此，鰭片的厚度相當薄時，鰭片 的狀態下與其接觸，因而擴大_ 兩者能夠確實地接合。 金屬製鰭片立設並接合於 一鰭片配置步驟，在排列 個韓片之間，各置入一間 的基端面分別沒入上述鰭 物的基端面分別低於上述 述間隔物的厚度；一基板 於上述間隔物的基端面的 於 基板之一表面；一摩 動的圓板狀接合治具的圓 並沿著上述基板之另一表 接合於上述基板；以及一 移除。 與前一項之散熱元件的製 於將鰭片（以及間隔物）的 。首先在鰭片配置步驟 入各籍片的基端面（基板 間隔物的基端面突出）； 板壓在鰭片上，而將鰭片 彎折。而由間隔物的基端 度在間隔物的厚度以内， 彼此不會相互重疊。因 的基端部是在與基板重合 片與基板的接觸面積而使V. Description of the Invention (19) A surface of a plurality of metal substrates having a certain interval from each other, comprising: a plurality of spacers spaced apart from each other, wherein the base end faces of the spacer sheets And the height difference between the base end faces of the spacer fins is not greater than the upper disposing step, and the protruding base end portions are bent in the above-mentioned segments, so that the I crucible sheets are erected by the rubbing vibration bonding step, and an edge is formed The circumference of the circumferential surface is pressed into the other surface of the substrate, and the surface is moved to remove the spacer at the base end portion of the fin, and the method for manufacturing the heat dissipating member of the spacer is approximately the same. The configuration step is separated from the substrate configuration step by 'underside the end faces of the spacers, respectively. (The base end faces of the fins are the base end portions of the bases in the subsequent substrate arrangement step (more spacers) The protruding portion), the base end portion of the fin protrudes so that the base end portion of each scale is folded, and when the thickness of the fin is relatively thin, the fin is in contact with it due to the state of the fin. And the expansion _ the two can be surely joined. The metal fins are erected and joined to a fin arrangement step, and between the arranged Korean sheets, the base end faces of each of them are respectively immersed in the base end faces of the fins Respectively lower than the thickness of the spacer; a substrate on a surface of the substrate at one end surface of the spacer; a circular disc-shaped bonding fixture circle and joined to the other surface of the substrate a substrate; and a removal. The heat dissipating component of the preceding item is formed by the fins (and the spacers). First, in the fin arrangement step, the base end faces of the respective sheets are protruded (the base end faces of the substrate spacers protrude); The plate is pressed against the fins and the fins are bent, and the base end of the spacers is not within the thickness of the spacers, and the base end portion is the contact area of the substrate and the substrate. Make

1259117 五、發明說明（20) 又，上述的散熱元件的製造方法中 料係為熔點高於鰭片及基板的材料。 上述的散熱元件的製造方法中，因 於韓片及基板的炫點，將接合治且的轉 定在既定的範圍時，就不會使間隔物接 上，基板與鰭片的接合也變得較簡單。 又此時，在完成摩擦震動接合的階 不接合於韓片與基板上，在最後的間隔 可以不費事地移除間隔物。例如將籍片 基板朝上而向上移動時，僅留下間隔物 一體地向上移動，而可以簡單地移除間 元件的製作。 又，上述的散熱元件的製造方法中 較好為熔點高於鰭片的材料。 上述的散熱元件的製造方法中，因 交界面的溫度上升至接合所必要的溫度 高抗形變強度’接合治具的壓應力能多^ 界面’並可以形成鰭片與基板之間無縫 又，上述的散熱元件的製造方法中 較好為紹合金’而基板的構成材料較好 藉由上述的散熱元件的製造方法， 性而可以製造出局散熱性能的散埶 本發明係又提供-種散熱元;ί = 相互之間具有一定間隔的複數個金屬製 ，間隔物的構成材 為間隔物的熔點高 動數與行進速度設 合於鰭片與基板 段，因為間隔物並 物脫離步驟時，就 及間隔物朝下而將 而僅有鰭片與基板 隔物，而完成散熱 ，基板的構成材料 為在將鰭片與基板 時，基板能夠保持 有效率地傳達至交 隙的南強度接合。 ，鰭片的構成材料 為銅。 利用銅的高熱傳導 0 造方法，適用於將 鰭片構成材，立設 _1259117 V. Inventive Note (20) Further, in the above method for manufacturing a heat dissipating member, the material is a material having a melting point higher than that of the fin and the substrate. In the method for manufacturing a heat dissipating element described above, when the bonding of the Korean film and the substrate is performed within a predetermined range, the spacer is not connected, and the bonding between the substrate and the fin is also caused. It's simpler. At this time, the step of completing the frictional vibration bonding is not bonded to the Korean film and the substrate, and the spacer can be removed at the last interval without any trouble. For example, when the substrate is moved upward and upward, only the spacer is left to move upward integrally, and the fabrication of the inter-element can be simply removed. Further, in the above method for producing a heat dissipating member, a material having a higher melting point than the fin is preferable. In the above method for manufacturing a heat dissipating member, since the temperature of the interface rises to a temperature necessary for bonding, the deformation strength is high, and the compressive stress of the bonding jig can be more than the interface, and the fins and the substrate can be formed seamlessly. In the above method for manufacturing a heat dissipating member, the material of the substrate is preferably a material of the heat dissipating member, and the method for manufacturing the heat dissipating member can be used to produce a heat dissipating property. ; ί = a plurality of metals with a certain interval between each other, the spacer material is the melting point of the spacer, the high number of movements and the traveling speed are set in the fin and the substrate segment, because the spacers are separated from the step, And the spacers face down and only the fins and the substrate are separated, and the heat dissipation is completed. The constituent material of the substrate is a south strength joint that can effectively convey the substrate to the intersection when the fins and the substrate are used. The constituent material of the fin is copper. The use of copper high heat conduction 0 manufacturing method, suitable for the fin material, set up _

2036-5808.PF(Nl).ptd 第26頁 1259117 I 丨 ·ι_ 五、發明說明（21) 3接二於一金屬製基板之-表面，包含·· -元件配置步 材，間具有-定間隔的複數個鰭片構成 •片=材包含左右排列的一對鰭片，該對 面凹字型的…基端部，而形成呈現斷 與該對*…ϊ ί 材，並在上述鰭片構成材之間、 Ζ M , 3 置入一間隔物（spacer)，並使上述鲑 片構成材的基端部接觸一 儿1定上玟…、曰 成材立設於上述基板使上述藉片構 -沿圓周轉動的圓板狀接二、台且接合步驟，將 另-表面，並沿著上述的因周面壓入上述基板之 片構成材的基端部接一表面移動’而使上述韓 驟，將上述間隔物移^。、〜板’以及一間隔物脫離步 上述的散熱元件的製造乂 造方法約略相同，而使二一項之散熱元件的製 片。當然，在各鰭片構 子尘的鰭片構成材取代鰭 左右鰭片之間，可=材相互之間、以及韓片構成材之 -來，在鰭片構成材之：：n。種類的間隔物。如此 鰭片構成材的基端部係在盘；板重ί 2常薄的情況下， 而能夠將鰭片確實地板重合的情形下與其接觸， 所述簡單地製作而 =」土板:而鰭片構成材可如以下 央部，並彎折上述薄金一間隔物置於一薄金屬板的中 形成斷面凹字型的鰭片構成材而將上述間隔物夾在中間， 又上述的散熱元件的制、止士、+ 料係為熔點高於鰭片 .^ 2 ,中，間隔物的構成材 偁成材及基板的材料。 2036-5808-PF(Nl).Ptd 第27頁 1259117 五、發明說明(22) 上述的散熱元件的製造大、1山 於錯片構成材及基板心=人因為間隔物的炫點高 速度設定在既定的範圍時 台具的轉動數與行進 成材與基板上，基板盥韓片^會使間隔物接合於錯片構 又此時，在完成摩摻ίϊ材的接合也變得較簡單。 不接合於鰭片構成材盥美接$的階段’因為間隔物並 時，就可以不費事地移；間为在最後的間隔物脫離步驟 隔物朝下而將基板朝上而例如將鰭片構成材及間 有趙片構成材；= =時’僅留下間隔物而僅 間隔物：而完成散熱元動’而可以簡單地移除 較好i炫製造方法中，基板的構成材料 、门％，片構成材的材料。 上述的散熱元件的掣 與基板交界面的溫度上因為在將韓片構成材 夠保持高抗形變強戶，5所必要的溫度日寺，基板能 達至交界面，i可：j〇…具的壓應力能夠有效率地傳 高強度接合。 鰭片構成材與基板之間無縫隙的 忐& ^ ±，上述的散熱元件的製造方法中，鍺片椹&# 成材料較好為鋁合今， τ ^片構成材的構 μ ^ 而基板的構成材料較好為銅。 性“以製件的製造方法，利用銅的高熱傳導 本發明性能的散熱元件： 造的散熱元件。、種由上述的散熱兀件製造方法所製 由於上述的散熱元件係以上述的散熱元件製造方法所 2〇36-58〇8-PF(Nl).Ptd 第28頁 1259117 韓片構 上 敘述過 或鰭片 又 熱元件與一風 銅基板與複數 性連接於 >-發 成材的 述的散 的方法 構成材 ，本發 導率極高的銅 於銅的鋁所構 法所接合。這 合法中的^一種2036-5808.PF(Nl).ptd Page 26 1259117 I 丨·ι_ V. Invention description (21) 3 connected to a metal substrate - surface, including · · - component configuration step, with - A plurality of fins are formed at intervals. The sheet material comprises a pair of fins arranged side by side, and the opposite end of the concave type is formed at the base end portion to form a break and the pair of *...ϊ 395 materials, and the fins are formed Between the materials, Ζ M , 3 is placed in a spacer, and the base end portion of the above-mentioned cymbal sheet material is brought into contact with one of the 1 定 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 曰 - - - a circular plate-shaped rotating plate that rotates along the circumference and a joining step, and the other surface is moved along a surface of the substrate end portion of the sheet material that is pressed into the substrate by the circumferential surface to make the above-mentioned Korean , the above spacers are moved ^. , ~ plate ' and a spacer disengagement step The above-described heat dissipating elements are manufactured in the same manner, and the heat dissipating elements of the two are produced. Of course, the fin constituents of the fin structure dust are substituted for the left and right fins of the fins, and the materials of the fins and the components of the Korean sheet can be made of::n. Kind of spacer. The base end portion of the fin constituent material is attached to the disk; when the plate weight ί 2 is thin, the fins can be brought into contact with the floor in a case where the fins are surely overlapped, and the simple fabrication is made: The sheet constituent material may be as follows, and the thin gold-a spacer is bent in a thin metal plate to form a fin-shaped fin constituent material to sandwich the spacer, and the heat dissipating member The system, the stopper, and the material of the substrate are materials having a melting point higher than that of the fins. 2036-5808-PF(Nl).Ptd Page 27 1259117 V. Description of the Invention (22) The above-mentioned heat-dissipating element is manufactured in a large size, and the structure of the substrate and the substrate are replaced by the high speed of the spacer. When the number of rotations of the table is in a predetermined range and the traveling material and the substrate, the substrate is bonded to the wrong piece structure, and at this time, the joining of the finished material is also relatively simple. It does not engage in the stage of the fin constituent material. Since the spacer is in time, it can be moved without any trouble; in the end, the spacer is separated from the step, and the substrate is facing upward, for example, the fin. The composition of the sheet and the material of the Zhao sheet are formed; when == 'only spacers are left and only the spacers are: and the heat-dissipating element is completed', and the constituent materials of the substrate can be simply removed. Door %, the material of the sheet material. The temperature of the interface between the crucible and the substrate of the above-mentioned heat dissipating component is because the temperature of the Korean sheet is high enough to resist deformation, and the necessary temperature is 5, the substrate can reach the interface, i can be: The compressive stress can efficiently transmit high strength joints.无 amp amp ^ , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The constituent material of the substrate is preferably copper. "The heat-dissipating element of the performance of the present invention by the high-heat conduction of copper: the heat-dissipating element produced by the above-mentioned heat-dissipating element manufacturing method. The above-mentioned heat-dissipating element is manufactured by the above-mentioned heat-dissipating element. Method 2〇36-58〇8-PF(Nl).Ptd Page 28 1259117 The description of the Korean film or the fin and the thermal element and the wind copper substrate and the complex connection to the > The method of dispersing the material, the copper with high conductivity is joined by the method of aluminum of copper.

五、發明說明（23) 製造’具有高 本發明係 一錄片固定部 互重合的狀態 物；以及一基 散熱性能並可 又提供一種散 一定間 動的圓 面，並 接合法 上 散熱器 隔且立 板狀接 沿著上 ，接合 述的散 。上述 ’在一 下，固 板固定 基端部 熱元件 ’可以 Λ間隔 明的第 扇，並 個銅鰭 熱體， 設於上 合治具 述銅基 上述銅 熱器， 散熱元 間具有 所構成 成。而 裡所謂 ’係藉 鰭片或 定上述 部5使 接觸， 之製造 在摩擦 物、以 三群組 具有下 片或I呂 上述銅 述基板 的圓周 板之另 基板與 係為具 件係在 一定間 ’散熱 上述的 的摩擦 由接合 並固定 用治具 震動接 及基板 係提供 列特徵 韓片， 韓片或 之一表 面壓入 一表面 上述銅 有散熱 基板的 隔的鰭 韓片係 基板與 震動接 治具的 本地製造。 之製造用治 以低成 熱元件 一鰭片構成材與一 具，包含： 間隔物呈交 鰭片或鰭片構成材與上述間隔 一基板之一表面與上述鰭片或 上述基板。 係特別適用 合時，確實 〇 一種散熱器 :上述散熱 其中上述銅 鋁鰭片係相 面；以及將 上述銅基板 移動，而藉 鱗片或雀呂鱗 元件與風扇 一表面上立 片，其中基 由銅或由熱 _片係由摩 合法是金屬 壓應力，使 於目前為止 地固定ϋ片 ’包含一散 元件具有一 基板係導熱 互之間具有 一沿圓周轉 之另一表 由摩擦振動 之高性能的 設並接合有 板係由熱傳 傳導率略小 擦震動接合 元件間之接 各金屬元件V. Description of the Invention (23) Manufacture of a state in which a fixed portion of a recording sheet of the present invention overlaps each other; and a heat dissipation property of the base and a circular surface which is separated by a certain amount, and a heat sink partition And the vertical plate is connected along the upper side, and the joint is described. The above-mentioned 'in the following, the solid-plate fixed base end heat element' can be separated from the first fan, and a copper fin hot body is provided in the above-mentioned copper-based copper heat exchanger, and the heat-dissipating elements are formed. . In addition, the so-called "by the fins or the above-mentioned portion 5 to make contact, the manufacture of the friction material, the three groups have the lower sheet or the other substrate of the copper substrate of the above-mentioned copper substrate, and the other parts of the substrate are fixed. The above-mentioned friction is provided by the bonding and fixing jig vibration connection and the substrate system, and the Korean film or one surface is pressed into the surface of the copper-heated substrate. The local manufacture of the fixture. The manufacturing process is a low heat forming component, a fin constituent material and a device comprising: a spacer formed by a fin or a fin constituent material and a surface of one of the substrates and the fin or the substrate. In particular, it is suitable for a heat sink in which the above-mentioned copper-aluminum fins are in contact with each other; and the copper substrate is moved, and the scale or the scaly element and the fan are superposed on the surface, wherein From the copper or by the heat_film system, the metal is pressed by the metal, so that the fixed slabs of the present invention comprise a scatter element having a substrate heat conduction with each other having a circumferential rotation and another surface by frictional vibration. High-performance design and bonding of the plate system by the heat transfer rate is slightly small, rubbing the joint between the metal components

2036-5808.PF(Nl).ptd 第29頁 12591172036-5808.PF(Nl).ptd Page 29 1259117

五、發明說明(24) 間的接合部的縫隙消失，並藉由轉動的接合治具與金 件之接觸而產生的震動，使存在於金屬元件重合面 物皮膜***、破壞，再加上所產生的摩擦熱使接合部古溫 化並發生塑性變形，而增加接合部的接觸面積與擴=脈 率，而使各金屬元件接合在一起的方法。 ....... 而上述散熱器的散熱元件，係藉由接合治具的壓靡 力’使基板與鰭片的對接部（butt )的縫隙消失，並藉Z =妾合治具與基板之接觸而產生的震動，使存在‘上述 =ί f之氧化物皮膜***、破壞’再加上所產生的摩捧執 ϋ Ϊ!: t溫化並發生塑性變形，而增加對接部的接觸面 積與擴政速率，而使基板與鰭片接合在一起。如此，將基 板與鰭片以摩擦震動接合而接合，與習知的銲接接合比 ^:Γ低成本地製造出具有較高的基板與韓片的接合強 度的散熱元件。 特 有鋁或 時，可 備、電 鋁所構 用接合 與鋁鰭 溫度： 南抗形 對接部5. Inventive Note (24) The gap between the joints disappears, and the vibration generated by the contact of the rotating joint jig with the gold member causes the film of the overlapping surface of the metal component to split and break, plus The generated frictional heat causes the joint portion to be warmed and plastically deformed, and the contact area of the joint portion and the expansion ratio are increased, and the metal members are joined together. . . . and the heat dissipating component of the heat sink is such that the gap between the substrate and the fin butt is eliminated by the pressing force of the bonding fixture, and the Z=妾合 fixture is The vibration generated by the contact of the substrate causes the presence of the above-mentioned oxide film splitting and breaking, and the resulting friction is Ϊ!: t is warmed and plastically deformed, and the contact of the butt joint is increased. The area and the rate of expansion, and the substrate and the fins are joined together. In this manner, the substrate and the fin are joined by frictional vibration bonding, and a heat dissipating element having a high bonding strength between the substrate and the Korean sheet is manufactured at a low cost with a conventional solder bonding ratio. When it is made of aluminum or aluminum, it can be used as a joint of aluminum and aluminum fins. Temperature: South-resistant butt joint

別疋，鰭片為銅時，雖然可以直接與基板接合；而 鋁合金等熔點低於銅的金屬介於基板與銅鰭片之間 以，較低的接合溫度之下完成摩擦震動接合，對設 力等而s較為經濟。又，當鰭片係由熔點低於銅的 $時’在銅基板的一表面立設並配置鋁鰭片，並使 壓入銅基板的另一表面為接合時，在將銅基板 對接部的溫度上升至接合所必要的溫度（共晶 鐵& ☆在對接部形成CUA“層時，銅基板依然保有 ^ 广’因為接合治具的壓應力可以有效地傳達至 月匕夠开/成對接部無縫隙、兩者以更高強度接合Don't worry, when the fin is copper, it can be directly bonded to the substrate; and the metal such as aluminum alloy with a lower melting point than copper is interposed between the substrate and the copper fin, and the frictional vibration bonding is completed under a lower bonding temperature. It is more economical to set up power and so on. Moreover, when the fins are erected and disposed on one surface of the copper substrate with a melting point lower than that of copper, and the other surface pressed into the copper substrate is joined, the butting portion of the copper substrate is bonded. The temperature rises to the temperature necessary for bonding (eutectic iron & ☆ when the CUA layer is formed in the butt joint, the copper substrate still retains the width) because the compressive stress of the bonding fixture can be effectively transmitted to the moonlight to open/dock No gaps, the two are joined at a higher strength

1259117 五、發明說明（25) 的散熱元件。1259117 V. The heat sink element of the invention (25).

本發明係又提供一種散熱器，包含一散熱元件與一風 扇’並具有下列特徵：上述散熱元件具有一銅基板、一銘 基板、與複數個鋁鰭片，其中上述銅基板係導熱性連接於 一發熱體’上述鋁基板係重疊配置於該銅基板之一表面， 上述紹鰭片係相互之間具有一定間隔且立設於上述鋁基板 中j與上述銅基板之相對側之面；上述鋁基板與上述鋁韓 片係藉由擠型（extrusion)而一體成形；以及將一沿圓周 轉動的圓板狀接合治具的圓周面壓入上述銅基板之另一表 面，並沿著上述銅基板之另一表面移動，而藉由摩擦振動 接合法’接合上述銅基板與上述鋁基板。 高性能 設並接 件一鰭 合並接 合治具 並藉由 在於上 的摩擦 的接觸 。如此 知的銲 出具有 亦與前 散熱器 合於銅 片立設 合於銅 的壓應 轉動的 述重合 熱使重 面積與 ，將銅 接與爆 較高的 ;惟相異 基板上， 於基板上 基板上。 力使銅基 接合治具 部之氧化 合部南溫 擴散速率 基板與鋁 炸壓接來 銅基板與 項之散熱器同樣是具有散熱元 元件並非將 件與風扇的 韓片直接立 成形之鋁元 的基板是重 件係藉由接 縫隙消失， 震動，使存 加上所產生 增加重合部 接合在一起 接合，與習 成本地製造 點是在散熱 而是事先已 的紹元件， 而上述散熱 板與鋁基板 與基板之接 物皮膜*** 化並發生塑 ，而使銅基 基板以摩擦 作接合時比 鋁基板的接 以擠型一體 上述鋁元件 器的散熱元 的重合部的 觸而產生的 、破壞，再 性變形，而 板與鋁基板 震動接合而 較，可以低 I強度的散The present invention further provides a heat sink comprising a heat dissipating component and a fan and having the following features: the heat dissipating component has a copper substrate, a substrate, and a plurality of aluminum fins, wherein the copper substrate is thermally coupled to a heating element of the aluminum substrate is disposed on one surface of the copper substrate, and the fins are spaced apart from each other and are erected on a surface of the aluminum substrate opposite to the copper substrate; the aluminum The substrate and the aluminum-aluminum film are integrally formed by extrusion; and a circumferential surface of a circumferentially rotating disk-shaped bonding fixture is pressed into the other surface of the copper substrate, and along the copper substrate The other surface is moved, and the copper substrate and the aluminum substrate are joined by frictional vibration bonding. The high-performance splicing of a fin is combined with the jig and by the frictional contact on it. The so-called welding has a recombination heat which is also combined with the front heat sink and the copper plate is erected to the copper, and the weight is increased, and the copper is connected and exploded. On the different substrate, the substrate is On the upper substrate. The copper-based bonding fixture is oxidized to the south temperature diffusion rate substrate and the aluminum is crimped to the copper substrate and the heat sink of the item is also an aluminum element having a heat dissipating element and not directly forming the Korean piece of the piece and the fan. The substrate is a component that is lost by the gap, vibrates, and the added overlap is joined and joined together, and the manufacturing point is heat-dissipating but the component has been previously prepared, and the heat sink is The film of the aluminum substrate and the substrate is split and plasticized, and the copper-based substrate is broken by the contact of the aluminum substrate with the overlapping portion of the heat dissipating member of the aluminum component. , re-deformation, and the plate and the aluminum substrate vibrate and join, can be low I-strength

1259117 五、發明說明（26) 熱元件。 當然，在銅基板的一表面重合並配置鋁基板，並使用 接合治具壓入銅基板的另一表面為接合時，在將重合部的 溫度上升至接合所必要的溫度（共晶溫度：548 °C )而在重 合部形成CuA 12層時，銅基板依然保有高抗形變強度，因為 接合治具的壓應力可以有效地傳達至重合部，而能夠形成 重合部無縫隙、兩者以更高強度接合的散熱元件。 又’上述的散熱器中，發熱體與銅基板較好為以排熱 管（heat pipe)連接。 上述的散熱器中，由於發熱體與銅基板係以排熱管連 接，可將政熱元件與風扇配置在離發熱體較遠的位置，如 薄型的筆纪型電腦，要製作將熱排到發熱部位之附近的構 造有空間上的困難時，可以使用上述的散熱器。 又，本發明的第四群組係提供一種金屬元件接合方 法，包含：提供複數個金屬元件，依照熔點的高低順序相 互重合排列；以及在上述金屬元件中熔點最高的金屬元件 之表面側，對上述金屬元件之重合部加熱及加壓，而使上 述金屬元件相互接合。 上述的金屬元件接合方法中，係將複數個金屬元件相 互重合配置，而由重合部最外側的金屬元件之一側加熱及 · 加壓，使重合部的縫隙消失，並使存在於重合部之氧化物 皮膜***、破壞，再加上藉由加熱使重合部高溫化並發生 塑性變形，而增加重合部的接觸面積與擴散速而 金屬元件接合在一起。1259117 V. Description of invention (26) Thermal components. Of course, when the aluminum substrate is placed on one surface of the copper substrate and the other surface of the copper substrate is bonded using the bonding jig, the temperature of the overlapping portion is raised to the temperature necessary for the bonding (eutectic temperature: 548). °C) When the CuA 12 layer is formed in the overlapping portion, the copper substrate still retains high deformation strength because the compressive stress of the bonding jig can be effectively transmitted to the overlapping portion, and the overlapping portion can be formed without gaps, and both are higher. A thermally bonded heat sink element. Further, in the above heat sink, the heat generating body and the copper substrate are preferably connected by a heat pipe. In the above heat sink, since the heating element and the copper substrate are connected by a heat exhaust pipe, the heating element and the fan can be disposed at a position far from the heating element, such as a thin pen-type computer, and the heat is discharged to the heat. When there is a spatial difficulty in the structure in the vicinity of the portion, the above-described heat sink can be used. Moreover, the fourth group of the present invention provides a metal component bonding method comprising: providing a plurality of metal components, which are arranged in line with each other in accordance with a level of melting point; and a surface side of the metal component having the highest melting point among the metal components, The overlapping portions of the metal elements are heated and pressurized to bond the metal elements to each other. In the above-described metal element bonding method, a plurality of metal elements are placed one on another, and one side of the metal element on the outermost side of the overlapping portion is heated and pressurized to remove the gap of the overlapping portion and to be present in the overlapping portion. The oxide film is split and destroyed, and the overlapping portion is heated and plastically deformed by heating, and the contact area of the overlapping portion and the diffusion speed are increased to bond the metal member.

1259117 複數個金屬 在溶點最高 重合部的溫 側的金屬元 可以有效地 與高強度的 元件之側對 及加熱的方 元件的表面 由上述治具 亦可以使用 提供一種金 含：一元件配置 之間，各置 述基板之一 對上述基板 材接合於上 物移除。 元件接合方 板、與間隔 屬製，基板 特別的限制1259117 A plurality of metals on the temperature side of the highest overlap of the melting point can be effectively paired with the side of the high-strength element and the surface of the heated square element. The jig can also be used to provide a gold content: a component arrangement One of the substrates is attached to the substrate for bonding to the substrate. Component bonding plates, spacers, substrates, special restrictions

五、發明說明（27) 由於上述的 互重合排列，並 將各金屬元件的 時，加熱及加壓 合治具的壓應力 屬元件間無縫隙 重合時，係在銅 而上述加壓 熔點最高的金屬 可使用任何可藉 部的接觸方式， 本發明係又 互之間具有一定間隔的複數 熔點高於該些板材之熔點的 步驟，在排 上述金屬製板材 述板材立設於上 板之另一表面， 壓，而使上述板 驟，將上述間隔 上述的金屬 時，將板材、基 材與基板係為金 物的材質並沒有 疋件係依照熔點的高低順序相 的金屬元件之側加熱及加壓， 度上升至接合所必要的溫度 $依然保有高抗形變強度，接 =至交界面，而能夠形成金 妾口 。例如將銅元件與鋁元件 重合部加壓及加熱。 法並沒有特別的限制，可以在 使用任何的治具與其接觸，而 將摩擦熱與壓應力傳達至重合 如電磁誘導等非接觸方式。 屬疋件接合方法，適用於將相 個金屬製板材，立設並接合於 一金屬製基板之一表面，包 列成相互之間具有一定間隔的 入一間隔物（spacer)，並將上 表面；一接合步驟，由上述基 及上述板材的交界面加熱及加 述基板；以及一間隔物脫離步 法中，首先在元件配置步驟 物設定至一既定位置。上述板 的熔點高於板材的熔點。間隔 。間隔物的形狀亦沒有特別的V. INSTRUCTION OF THE INVENTION (27) The above-mentioned mutual overlapping arrangement, and the pressure stress of the heating and pressing fixtures of each metal element are the same as the gap between the elements, and the copper has the highest pressure melting point. The metal may use any contact method of the borrowable portion, and the present invention has a certain interval of a plurality of melting points higher than the melting point of the plates, and the metal plate is arranged to be erected on the upper plate. When the surface is pressed and the metal is spaced apart from the above-mentioned plate, the material of the plate, the substrate and the substrate is made of gold, and there is no element heating and pressurization of the metal element in accordance with the order of the melting point. The degree rises to the temperature necessary for joining. It still retains high deformation strength, and is connected to the interface to form a gold crepe. For example, the copper element and the aluminum element overlapping portion are pressurized and heated. The method is not particularly limited, and it can be brought into contact with any jig, and the frictional heat and compressive stress are transmitted to coincidence such as electromagnetic induction. The invention relates to a method for joining pieces, which is suitable for erecting and joining a metal plate to a surface of a metal substrate, and arranging into a space with a certain interval between each other, and placing the upper surface a bonding step of heating and intercalating the substrate from the interface between the substrate and the sheet; and a spacer detachment step, first setting the component to a predetermined position. The melting point of the above plate is higher than the melting point of the plate. Interval. The shape of the spacer is also not special.

1259117 五、發明說明（28) 限制’較好是各間隔物之間有相互連結。 確地：二i f板材相互之間分別置入-間隔物’可以正 之間隔，並簡單地決定其位置；再加上 曰β °將板材補強，板材的厚度可以變得非常薄。 二’=需=更間隔物的厚度，就可以任意變更板材的配 ^ ^ ^ 併受更板材的面度’而使得特別 :溥反旱问板阿的複數個板材以短間隔立設並接合於美 ，可行：而在此步驟中，各板材立設並配i ‘二®亩拔二Ξ的狀悲了，雖然各間隔物可以不與板材的 r表： 而如果考慮到下-個步驟中來自接合治 對板材的補強效；？二=r=吉；/提高間隔物 平紆為使各間隔物直接接觸基板的該 表面。 又，在接下來的接合步驟中， 一 基板與各板材的交界面加熱及加M，而使反=與 合盔此處”接合原理與前一項的金屬元件接合方法相同。 而為了要提南基板與板材之接合強度，較好為各 端面能完全與基板接纟；而在接合成I的削減土 時’亦可以僅使各板材基端面的一部份與基板接：。J， 將基板與各板材接合時，_然亦可以使各間隔物盘美板接 合，而如果考慮到移除間隔物的下一個步驟好； 基板與各間隔物接合。 乂+為不使 本發明更提供一種散熱元件的製造方法’適用 互之間具有-定間隔的複數個金屬製韓片構成材，立設並1259117 V. INSTRUCTIONS (28) Limitation ‘It is preferable that the spacers are interconnected. Indeed: the two i f plates are placed with each other - spacers ' can be spaced at regular intervals and simply determine their position; plus 曰β ° to reinforce the sheet, the thickness of the sheet can be made very thin. Two '= need = the thickness of the spacer, you can arbitrarily change the plate ^ ^ ^ and subject to the face of the plate' to make a special: 溥 溥 问 问 的 的 的 的 的 的 的 的 的 的 的 的 的 的 的 的Yumei, feasible: and in this step, the plates are erected and equipped with i 'two-acre and two squats, although the spacers may not be in the r-table of the plate: and if the next step is taken into account In the reinforcement of the board from the joint treatment; Two = r = 吉; / raise the spacer The flat 纡 is such that each spacer directly contacts the surface of the substrate. Further, in the subsequent bonding step, the interface between a substrate and each of the boards is heated and M is added, and the bonding principle of the opposite side and the helmet is the same as that of the metal element of the previous item. The bonding strength between the south substrate and the sheet material is preferably such that each end surface can completely contact the substrate; and when the soil is cut into I, it is also possible to connect only a part of the base end surface of each sheet to the substrate: J, When the substrate is bonded to each of the sheets, it is also possible to join the spacer plates, and if the next step of removing the spacers is considered to be good; the substrate is bonded to the spacers. 乂+ does not provide the present invention. A method for manufacturing a heat dissipating component is applied to a plurality of metal Korean components having a predetermined interval therebetween.

1259117 五、發明說明（29) 接合於熔點高於該牡 -表面，包含：—；f片構成材之熔點的-金属製基板之 有一定間隔的該些轉步驟’其中排列成相互之間具 右排列的一對鰭片7 材中每個鰭片構成材包含左 為基端部，而形成呈齡=片以其端部相互連接之部分成 在上述趙月構成材it ΓΓ字型的上述韓片構成材，並 物（spacer)，並使上老H、j對％片之間，各置入一間隔 之一表面，而使上、+、j，、曰片構成材的基端部接觸上述基板 面；-接合步： 成材立設於上述基板之-表 述鰭片構成材的交之另一表面，對上述基板及上 接合於上述基板；；;=:壓，而使上述鰭片構成材 移除。 ^及一間隔物脫離步驟，將上述間隔物 件接造方法中，係應用上述的金屬元 然，在各韓片構成凹子型的錯片構成材作為板材。當 片之間，彳置入2 之間、以及錯片構成材之左右歸 左右韓片的厚度非常薄的情況下，丄 將鲈片二^ °卩係在與基板重合的情形下與其接觸，而能夠 、:貫地接合於基板。鰭片構成材與基板的接合原理 、、、一兒月了。而鰭片構成材可如以下所述簡單地製作而 ^使用一間隔物置於一薄金屬板的中央部，並彎折上述 金屬板，而將上述間隔物失在中間，形成斷面凹字型的 鰭片構成材。 而上述的金屬元件接合方法中，上述的加熱及加壓， 第35頁 2036-5808-PF(Nl).ptd 1259117 五、發明說明（30) 係將一沿圓周 板之另一表面 移動， 轉動方 又 壓，係 述基板 表面移 對於轉 而 壓，係 述基板 表面移 對於轉 上 狀接合 使上述 熱及加 此 接合治 產生摩 合。 更 向輕微 且上述 向輕微 ，上述 將一沿 之另一 動，且 動方向 上述的 將一沿 之另一 動，且 動方向 述的金 治具的 圓周面 壓，因 處…因 具的圓 擦熱， 者，接 傾斜、 轉動的 ，並使 接合治 傾斜、 的金屬 圓周轉 表面， 上述接 輕微傾 散熱元 圓周轉 表面， 上述接 輕微傾 屬元件 圓周面 沿著該 而可以 為接合 周面與 並可以 圓板狀 上述圓 具的圓 且連續 元件接 動的圓 並使上 合治具 斜、且 件的製 動的圓 並使上 合治具 斜、且 接合方 壓入熔 金屬元 期待確 治具的 金屬元 有效率 合治具的圓周 且連續的凹槽 面上的凹槽，係相對於轉動方 ，即是在接合治具轉動軸的周 接合治具的 周面沿著上 周面上，較 的凹槽。 合方法中， 板狀接合治 述圓周面沿 的圓周面上 連續的凹槽 造方法中， 板狀接合治 述圓周面沿 的圓周面上 連續的凹槽 法，係將一 點最南的金 件的表面移 實的接合勝 圓周面上形 件的接觸面 地將複數個 圓周面壓至卜 、+、蚊1 述基 迷基板的另—表面 好為形成有相對於 上述的加熱及加 具的圓周面壓至上 著上述基板的另一 ，較好為形成有相 〇 上述的加熱及力Π 具的圓周面壓至上 著上述基板的另— ，較好為形成有相 Ο 沿圓周轉動的圓板 屬元件的表面，並 動，而對重合部加 過簡易的裝置。 成有凹槽，而増大 積，可以有效率地 金屬元件相互接1259117 V. INSTRUCTION DESCRIPTION (29) Joining the transfer steps of the metal substrate having a melting point higher than the surface of the slab, including: - the melting point of the f-sheet, the metal substrate is spaced apart from each other Each of the pair of fins 7 arranged in the right direction comprises a left base end portion, and the portion formed at the age = sheet with its ends connected to each other is formed in the above-mentioned Zhao Yue composition material. The Korean film is composed of a spacer, and the upper H, j, and % sheets are placed on one surface of each of the spacers, and the base ends of the upper, +, j, and cymbal members are placed. Contacting the substrate surface; - bonding step: the material is erected on the other surface of the substrate - the surface of the fin structure, and the substrate and the substrate are bonded to the substrate; The component is removed. And a spacer separation step in which the above-described metal element is applied, and a concave-shaped framing material is formed as a plate material in each of the Korean sheets. When the thickness of the left and right Korean sheets is very thin between the sheets, and between the sheets, and the thickness of the left and right sheets is very thin, the cymbals are brought into contact with the substrate. It can be bonded to the substrate in a continuous manner. The principle of bonding the fin constituent material to the substrate is one month. The fin constituent material can be simply fabricated as described below, and a spacer is placed at a central portion of a thin metal plate, and the metal plate is bent, and the spacer is lost in the middle to form a cross-sectional concave type. The fins are made of materials. In the above metal element bonding method, the above heating and pressurization, page 35, 2036-5808-PF (Nl).ptd 1259117 5. The invention description (30) moves a surface along the circumferential plate, rotating The square is pressed again, and the surface of the substrate is transferred to the pressure, and the surface of the substrate is transferred to the upper joint to cause the heat and the bonding to be combined. More slight and the above direction is slight, the above will move along one another, and the moving direction will be the other side of the movement, and the circumferential direction of the gold fixture will be pressed, because of the round heat , the tilting, rotating, and tilting of the metal circumferential surface, the slight tilting heat sinking the circumferential surface, the circumferential surface of the slightly inclined element may be the joint circumferential surface and The round shape of the round shape and the circle of the continuous element can be rounded, and the upper fixture is inclined, and the braking circle of the member is inclined, and the upper fixture is inclined, and the joint is pressed into the molten metal element. The metal element of the yoke has a circumferential groove on the continuous groove surface of the jig, and is opposite to the rotation side, that is, the circumferential surface of the circumferential jig that joins the rotation axis of the jig along the upper circumferential surface , the smaller groove. In the method of forming a continuous groove on the circumferential surface along the circumferential surface of the plate-shaped joint, the continuous groove method on the circumferential surface along the circumferential surface of the plate-shaped joint is a southernmost gold piece The surface of the surface is bonded to the contact surface of the circumferential surface member to press a plurality of circumferential surfaces to the surface of the substrate, and the other surface of the substrate is formed to have a heating and addition relative to the above. The circumferential surface is pressed to the other of the above-mentioned substrates, preferably, the circumferential surface of the heating and force tool is formed to be pressed against the substrate, and preferably the circular disk is formed to rotate around the circumference. It belongs to the surface of the component and moves, and a simple device is added to the overlapping portion. Grooves are formed, and the volume is increased, and the metal components can be connected to each other efficiently.

2036-5808-PF(Nl).ptd 第36頁 1259117_ 五、發明說明（31) 邊，沿著接合治具的圓周面描繪出螺旋狀執跡而形成。因 此，伴隨著接合治具的轉動與移動，凹槽内部所蓄積的可 塑化的金屬會沿著接合治具的寬度方向依序送出，因此可 以將接合後金屬元件表面殘留的凹入量抑制到最小限度。 而前面所述及的内容，在上述金屬元件接合方法與上 述散熱元件的製造方法中也是一樣。 又，上述的金屬元件接合方法中，上述凹槽之間的平 面部的寬度為w! ( m m)、上述凹槽的寬度為w2 (m m)，並較 好為符合以下條件：1 SS 5、且1 S w2 S 3、且Ο · 6 7 S w! / w2 S 5 · Ο Ο 〇 又，上述的金屬元件接合方法中，上述凹槽之間的平 面部的寬度為w! (mm)、上述凹槽的寬度為w2 (mm)，並較 好為符合以下條件：1 S Wi S 5、且1 S w2 S 3、且0. 6 7 $ w! / w2 S 5 . 0 0 〇2036-5808-PF(Nl).ptd Page 36 1259117_ V. INSTRUCTION DESCRIPTION (31) A side is formed by drawing a spiral trace along the circumferential surface of the joint jig. Therefore, with the rotation and movement of the joining jig, the plasticized metal accumulated inside the groove is sequentially sent out along the width direction of the joining jig, so that the amount of recess remaining on the surface of the joined metal member can be suppressed to Minimal. The above-mentioned contents are the same in the above-described metal element bonding method and the above-described method of manufacturing the heat dissipating element. Further, in the above metal element bonding method, the width of the flat portion between the grooves is w! (mm), and the width of the groove is w2 (mm), and preferably the following conditions are satisfied: 1 SS 5, And 1 S w2 S 3 and Ο · 6 7 S w ! / w2 S 5 · Ο Ο 〇 Further, in the above-described metal element bonding method, the width of the plane portion between the grooves is w! (mm), The width of the groove is w2 (mm), and preferably meets the following conditions: 1 S Wi S 5, and 1 S w2 S 3, and 0. 6 7 $ w! / w2 S 5 . 0 0 〇

又，上述的散熱元件的製造方法中，上述凹槽之間的 平面部的寬度為％ (mm)、上述凹槽的寬度為w2 (mm)，並 較好為符合以下條件：1 $ Wi $ 5、且1 $ w2 $ 3、且0. 6 7 S w! / w2 $ 5 · 0 0 〇 關於上述的金屬元件接合方法，接合治具之凹槽之間 的平面部的寬度％ (mm)、凹槽的寬度w2 (mm)、以及平面 部的寬度％ 與凹槽的寬度w2的的比值係發明人們重複實驗 時：當w: /w2過小時，因為金屬元件的表面狀況會類似於受 到接合治具的切削，接合治具所產生摩擦熱的產生量就會 較大，接合後殘留於金屬元件表面的凹陷量就會變得較Further, in the above method for manufacturing a heat dissipating member, the width of the flat portion between the grooves is % (mm), and the width of the groove is w2 (mm), and preferably satisfies the following condition: 1 $ Wi $ 5, and 1 $ w2 $ 3, and 0. 6 7 S w! / w2 $ 5 · 0 0 〇 Regarding the metal element joining method described above, the width % (mm) of the plane portion between the grooves of the joining jig The width of the groove w2 (mm), and the ratio of the width % of the flat portion to the width w2 of the groove are the repeated experiments of the inventors: when w: /w2 is too small, because the surface condition of the metal component is similar to In the cutting of the jig, the amount of frictional heat generated by the jig is large, and the amount of depression remaining on the surface of the metal member after joining becomes more

2036-5808-PF(Nl).ptd 第37頁 1259117 五、發明說明（32) 一 ~" ^ ’另一方面，當Wi/W2過大時，因為會類似於使用具表面 平坦的圓周面的接合治具來作接合時的狀況接合治具所 產生摩擦熱的產生量就會較小，接合治具壓入金屬元件表 面的壓入量就必須增加，機械負荷亦會增大；而在1 $ % $ 5、、且1 $w2 $3、且〇· 67 g5· 〇〇時，很明顯地不但可 以抑制接合治具壓入金屬元件表面的壓入量，接合治具所 產生摩擦熱的產生量就亦會較大，而能夠行有效率的接 合。 ,又、，上述的金屬元件接合方法中，較好為上述凹槽相 對於上述接合治具的轉動方向傾斜的角度為〇 5〜2 0。， ^述接合治具的整個圓周面中，至少形成有二條上述凹 又’上述的金屬元件接合方 對於上述接合&且的轉動& / ，較好為上述凹槽相 且上述接上=方向傾斜的角度為0.5〜2.0。， 儿工逆接合治具的整個圓周 槽。 至夕形成有二條上述凹 又，上述的散熱元件的 相對於上述接合治具的衣仏万法中，較好為上述凹槽 。，且上述接合治具 的角度為〇.5〜2.〇 述凹槽。 ®周面中，至少形成有二條上 關於上述的金屬元件 角度小於0. ，凹槽的傾斜角度係發明=二二，二接合治具圓周面上之 法沿著接合治且Μ办& °所蓄積frS 1 « 百牧口 /口具的見度方向依序償的可塑化的金屬就無 時，凹槽内邮^複實驗時··當凹槽的傾斜 ^ ，冲所蓄- ___ 送出’接合治具通過後就2036-5808-PF(Nl).ptd Page 37 1259117 V. Description of invention (32) One~" ^ 'On the other hand, when Wi/W2 is too large, it will be similar to the use of a flat surface with a flat surface. When the jig is joined for bonding, the amount of frictional heat generated by the jig is small, and the amount of pressing of the jig into the surface of the metal member must be increased, and the mechanical load is also increased; When $ % $ 5, and 1 $w2 $3, and 〇 · 67 g5· 〇〇, it is obvious that not only the amount of pressing of the bonding jig into the surface of the metal member but also the generation of frictional heat generated by the jig can be suppressed. The amount will also be larger, and the ability to engage efficiently. Further, in the above metal element bonding method, it is preferable that the angle at which the groove is inclined with respect to the rotation direction of the bonding jig is 〇 5 to 2 0. In the entire circumferential surface of the joint jig, at least two of the above-mentioned concave and the above-mentioned metal element joints are formed for the above-mentioned joint & and the rotation & / is preferably the above-mentioned groove phase and the above is connected = The angle of inclination is 0.5 to 2.0. The child works to reverse the entire circumferential groove of the jig. In the case of the above-mentioned heat-dissipating element, it is preferable that the above-mentioned groove is formed in the above-described method of the heat-dissipating element. And the angle of the above joint jig is 〇.5~2. In the circumferential surface, at least two of the metal elements are formed with an angle of less than 0. The inclination angle of the groove is the invention = 22, and the method of the circumferential surface of the joint fixture is along the joint and the & The accumulation of frS 1 « The direction of the visibility of the mouth of the Baimukou/mouthware is in the form of timeless, and the plastic in the groove is in the absence of time. When the groove is in the experiment, when the groove is tilted ^, the impulse is saved - ___ is sent out' After the jig is passed,

2036-5808-PF(Nl).ptd I、發明說明（33) 會在金屬元件表面殘留毛邊（burr);另一方面，當凹槽的 傾斜角度大於2· 0。時，切粉的排出量就會變大，不但曰會 使殘留於金屬元件表面的凹痕變大，亦會加大機械負荷· 而在凹槽的傾斜角度為〇· 5〜2. 〇。時，很明顯地就不'會^有’ 上述的弊害。而考慮到接合治具的寬度，上述接合治曰具的 整個圓周面中，較好為至少形成有二條上述凹槽。〜八' 而前面所述及的内容，在上述金屬元件接合方法與上 述散熱元件的製造方法中也是一樣。 /、 又’上述的金屬元件接合方法中，上述凹槽的 好為〇·30〜1. 2 mm 。 又’上述的金屬元件接合方法中，上述凹槽的深产 好為0.30〜1·2ιηπι〇 又早 又上述的散熱元件的製造方法中，上述凹槽的深产 較好為0·30〜1.2 _。 曰幻冰度 關於上述的金屬元件接合方法，接合治具圓周面 凹槽的」罙度係發明人們重複實驗時：#凹槽的深度 30襲時，可塑化的金屬會蓄積於凹 、. 所產生的摩擦熱的發生量使接5治具 一方面，各〇〇描λλΙ 無仃充分的接合；另 田 q的珠度大於1·2 mm時，因為令厘—冰 面狀況會類似於a糾枝人 u马金屬兀件的表 蝴1w於叉到接合治具切 擦熱的產生量就合# 妾σ ^具所產生摩 里桃㈢季乂大，接合後殘留於今展— 陷量就會變得軔女·二 ^ 、 屬凡件表面的凹 明顯地就不會ίΐ述的深度為°.3(M.2mm時，很 而前面所述及的内容，在上述金屬元件接合方法與上2036-5808-PF(Nl).ptd I, invention description (33) will leave a burr on the surface of the metal component; on the other hand, when the inclination angle of the groove is greater than 2.0. When the amount of cut powder is increased, not only will the dents remaining on the surface of the metal member become large, but also the mechanical load will be increased. The inclination angle of the groove is 〇·5~2. At the time, it is obvious that the above-mentioned drawbacks will not be met. In view of the width of the joint jig, it is preferable that at least two of the grooves are formed in the entire circumferential surface of the joint curing cooker. The above-mentioned contents are the same in the above-described metal element bonding method and the above-described heat-emitting element manufacturing method. 2毫米。 The above-mentioned metal element bonding method, the groove is preferably 〇 30~1. 2 mm. Further, in the above-described metal element bonding method, in the manufacturing method of the heat dissipating element described above, the deep groove of the groove is preferably 0.30 to 1·2 ηηπι 〇, and the deep groove of the groove is preferably 0·30 to 1.2. _.曰 冰 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于The amount of frictional heat generated is such that on the one hand, each of the λλΙ has no sufficient joint; when the thickness of the other field is greater than 1.2 mm, the condition of the ice-ice is similar to a. The stalker u horse metal 的 表 蝴 w w 叉 叉 叉 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ Become a prostitute · two ^, the concave surface of the surface of the piece is obviously not the depth of the description is °.3 (M.2mm, very, the content mentioned above, in the above metal component bonding method and

1259117 五、發明說明（34) 述散熱元件的 又，本發 法，包含：一 述第一金屬元 由上 使上 二步驟， 加熱，而 合。 上述的金 件相互重合配 使重合部的縫 裂、破壞，再 形，而增加重 件接合在一起 而特別是 的二金屬元件 熔點的第二金 屬元件之側朝 這樣的金屬元 元件的重合部 高的第二金屬 元件的壓應力 的金屬元件接 縫隙與高強度 強度地接合。 製造方法中也是一樣。 明的第五群組，係提供一種金屬元件接合方 第一步驟，將一第一金屬元件與熔點高於上 件的熔點的一第二金屬元件重合；以及一第 述第二金屬元件向上述第一金屬元件加壓並 述第一金屬元件與上述第二金屬元件相互接 屬元件接合方法中，係將第一及第二金屬元 置、，而由第二金屬元件之一側加熱及加壓， 隙/肖^，並使存在於重合部之氧化物皮膜分 力上藉由加熱使重合部高溫化並發生塑性 合部的接觸面積與擴散 ,。 ，、欣逯旱，而使各金屬元 ，上述的 一第一金 屬元件一 第一金屬 件接合方 的溫度上 元件依然 可以有效 合方法， 的接合， 金屬元件 屬元件與 重合排列 元件的方 法中，將 升至接合 保有南抗 地傳達至 不會在第 而能夠將 接合方法 熔點高於 ，並在熔 向加壓並 第一金屬 所必要的 形變強度 交界面。 一及第二 ，係第一 點較 加熱 元件 溫度 ，來 因此 金屬 由熔點互異 金屬元件的 高的第二金 而構成。在 與第二金屬 時，熔點較 自第二金屬 ，藉由上述 元件間形成 屬元件做高 第一及第二金1259117 V. INSTRUCTION DESCRIPTION (34) Further, the present invention includes: the first metal element is heated by the upper two steps. The gold pieces are overlapped with each other to cause cracking, breaking, and reshaping of the overlapping portions, and the overlapping of the second metal members of the melting points of the two metal members, especially the overlapping portions of the metal elements, is increased. The compressively stressed metal element of the high second metal component is joined to the gap with high strength. The same is true in the manufacturing method. The fifth group of the present invention provides a first step of joining a metal component, wherein a first metal component is overlapped with a second metal component having a melting point higher than a melting point of the upper component; and a second metal component is The first metal element is pressed and the first metal element and the second metal element are mutually coupled to each other, and the first and second metal elements are placed, and one side of the second metal element is heated and added. The pressure, the gap, and the surface of the oxide film present in the overlapping portion are heated to increase the temperature of the overlapping portion and the contact area and diffusion of the plastic portion. , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , will rise to the joint retaining the south resistance to convey the interface to the deformation strength that will not be able to melt the bonding method above and the necessary deformation strength at the first metal. First and second, the first point is the temperature of the heating element, so that the metal is composed of a high second gold whose melting point is different from that of the metal element. In the case of the second metal, the melting point is higher than that of the second metal, and the first element and the second gold are formed by forming the element between the elements.

1259117 五、發明說明（35) 而上述加壓及加熱的方法並 第二金屬元件的表面使用任何的；限制，可以在 =何可藉由上述治具將摩擦熱與』應力重：二吏】 觸方式:亦可以使用如電磁誘導等非接^=重口部的接 較好：使ίίίΐ屬7°件接合方法中’上述的第二步驟， 心= :治具的…在上述第二 動蜀〖n亥板面沿者上述第二金屬元件的表面移 具的iir的Λ屬元件接合方法，係將轉動的圓板狀接合治 .„ /、接合治具的轉動軸交叉的平面）壓在上述第二 2屬兀件’並使該板面沿著上述第二金屬元件的表面移 、對重α邛行加熱及加壓。因此，藉由此金屬元件接合 f法’可以期待使用簡易的裝置作確實的接合。又在此金 屬兀件接合方法中’因為接合治具的板面與第二金屬元件 的表面接觸’接合治具的徑愈大加熱及加壓的範圍就 以擴大。 —本發明係又提供一種散熱元件的製造方法，包含：一 第一步驟，將一第一金屬元件與熔點高於上述第一金 件的熔點的一第二金屬元件重合；一第二步驟，由上述 二金屬元件向上述第一金屬元件加壓並加熱，而使上迷 一金屬兀件與上述第二金屬元件相互接合；以及一第三沭 驟，對上述第一金屬元件施以鍛造加工，而在上述第二二 屬元件上立設複數個散熱鰭片。 ’ 本發明係又提供一種散熱元件的製造方法，包含：—1259117 V. Inventive Note (35) The above method of pressurizing and heating and using any of the surfaces of the second metal member; the limitation can be made by the frictional heat and the stress of the above-mentioned jig: Touch mode: It is also possible to use a non-connecting ^= heavy mouth such as electromagnetic induction: to make the ίίίΐ 7° piece joining method 'the second step mentioned above, the heart=: the jig...the second movement i n 亥 n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n In the second and second element members, the plate surface is moved along the surface of the second metal member, and the counterweight α is heated and pressurized. Therefore, the metal element can be expected to be easy to use by the f element method. In the metal joining method, the contact surface of the joining jig is in contact with the surface of the second metal member. The larger the diameter of the joining jig, the larger the range of heating and pressurization. - the invention further provides a system for dissipating components The method comprises: a first step of superposing a first metal component with a second metal component having a melting point higher than a melting point of the first gold component; and a second step of: transferring the second metal component to the first metal The component is pressurized and heated to bond the upper metal member to the second metal component; and a third step is performed by forging the first metal component and the second component A plurality of heat dissipating fins are erected. The present invention further provides a method of manufacturing a heat dissipating component, comprising:

第41頁 2056-5808-PF(Nl).ptd 1259117 五、發明說明（36) 第一步驟，將一第一金屬元件與嫁點咼於上述第一金屬元 件的熔點的一第二金屬元件重合；一第二步驟，由上述第 二金屬元件向上述第一金屬元件加壓並加熱，而使上述第 一金屬元件與上述第二金屬元件相互接合；以及一第三步 驟’對上述第一金屬元件施以切削加工，形成複數個狹縫 (slit)於上述第一金屬元件，而在上述第二金屬元件上立 設複數個散熱鰭片。 前:項的散熱元件的製造方法中的第一步驟與第二步 驟’與前一項的金屬元件接合方法的第一步驟與第二步驟 相同而上述的散熱元件的製造方法中，經由分別之第一 步驟與第二步驟接合的第一及第二金屬元件中，對該第_ 金屬元件k以佐^加工或切削加工，從而形成散熱鰭片。 因此，藉由這樣的散熱元件的製造方法，與前 明一樣，不作可以莊Λ鸽的 k的發 ^ Μ 』以错由間早的裝置確實地接合第一及第一 金屬元件，並可以佶用㉛、生丄 t ,, 米一 法形成散熱鰭片。…與切削加工等簡單的加工 山齡又本毛明之放熱元件，係包含：複數個散熱鰭片， 及ΐ i現】字形的板材所構成，其材質為第-金屬'以 於上述第-金屬的炼點；其中上:熔點高 合，係使用上述的金屬元件接合^ ^ 曰，、以土板之接 又’本發明之散熱元件， ·、— 由斷面呈現L字形的板材所構成、匕3 .後個散熱鰭片， 且上述弟一金屬的炫點gPage 41 2056-5808-PF(Nl).ptd 1259117 V. Description of Invention (36) In a first step, a first metal component is overlapped with a second metal component having a melting point at a melting point of the first metal component a second step of pressurizing and heating the first metal member by the second metal member to bond the first metal member and the second metal member to each other; and a third step 'to the first metal The component is subjected to a cutting process to form a plurality of slits on the first metal component, and a plurality of heat dissipation fins are erected on the second metal component. The first step and the second step in the method of manufacturing the heat dissipation element of the first item are the same as the first step and the second step of the metal element bonding method of the preceding item, and in the method of manufacturing the heat dissipation element described above, In the first and second metal members joined in the first step and the second step, the first metal element k is processed or cut to form heat dissipation fins. Therefore, with such a method of manufacturing a heat dissipating element, as in the prior art, the first and first metal components can be surely joined by the device which is early in the wrong manner, and the first and first metal components can be surely joined. Use 31, raw t, and m to form heat sink fins. ...and the simple processing of the mountain age and the heat-removing element of the mammoth, including the plurality of heat-dissipating fins, and the ΐi-shaped plate-shaped plate, the material of which is the first metal to the above-mentioned metal a refining point; wherein: the melting point is high, and the metal element is joined by the above-mentioned metal element, and the heat dissipating component of the invention is connected by the earth plate, and the plate is formed of an L-shaped plate.匕3. The last cooling fin, and the above-mentioned younger metal's dazzling point g

2036-5808-PF(Nl).ptd2036-5808-PF(Nl).ptd

苐42頁 1259117 * 五、發明說明（37) 於上述第一金屬的& 合，係使用上述的’· ΐ中上述散熱轉片與該基板之接 的金屬元件接合方法。 又，本發明夕 (corrugate)續片散熱元件，係包含：複數個波形 材質為第二金屬/其材質為第一金屬；以及一基板，其 的炫點·並由U、、且該第二金屬的熔點高於上述第一金屬 述的金屬：件接鰭片與上述基板之接合，係使用上 體，：材元:及係=:;數個散熱柱狀 M R L ^ 金屬，以及一基板，其材質為第二金 中上料2二金屬的炼點高於上述第一金屬的炼點；其 件接ΪΪΐ了片與上述基板之接合，係使用上述的金屬元 上述的散熱元件，係分別由散熱韓片、波形結片、散 熱柱狀體作4第一金^牛，且分別由基板作為第二金屬 兀件，以上述的金屬元件接合方法來作接合。而由基板側 施以加熱及加壓，將基板與.讀片等接合。因此，上述的散 熱元件，與與前述的發明一樣，可以藉由簡單的裝置確實 地接合鰭片等與基板。又，這些散熱元件中，由基板側施 以加熱及加壓將鰭片等與基板接合之緣故，即使是具有複 雜的形狀及構造的散熱縫片等，均是可以用簡易的裝置來 製造的。因此，藉由這些散熱元件，散熱面積較大而具有 複雜的形狀及構造的散熱結片等’均可以配製在基板上。 本發明第六群組的散熱兀件’係包含：一基板，其一 表面係連接於一發熱體’另一表面係立設並接合有複數個苐 pp. 42 1259117 * V. INSTRUCTION OF THE INVENTION (37) In the above-mentioned first metal combination, a metal element bonding method in which the above-mentioned heat-dissipating fins are connected to the substrate is used. Moreover, the corrugate splicing heat dissipating component comprises: a plurality of corrugated materials being a second metal/the material of which is a first metal; and a substrate having a bright point and being U, and the second The melting point of the metal is higher than that of the metal described in the first metal: the joining of the fins to the substrate, using the upper body, the material: and the system =:; a plurality of heat-dissipating columnar MRL^ metal, and a substrate, The material is a second gold material, and the second metal is higher than the first metal; the piece is connected to the substrate, and the heat dissipating component of the metal element is used. The heat-dissipating Korean film, the wave-shaped film, and the heat-dissipating column are used as the first metal, and the substrate is used as the second metal member, and the metal element bonding method is used for bonding. On the other hand, the substrate is heated and pressurized to bond the substrate to the reading sheet or the like. Therefore, in the heat dissipating element described above, as in the above-described invention, the fins and the like can be surely joined to the substrate by a simple device. Further, in these heat dissipating elements, the fins and the like are bonded to the substrate by heating and pressurization on the substrate side, and even a heat dissipating slit having a complicated shape and structure can be manufactured by a simple device. . Therefore, by these heat dissipating members, heat dissipating sheets having a large heat dissipating area and having a complicated shape and structure can be prepared on the substrate. The heat dissipating member of the sixth group of the present invention comprises: a substrate, one surface of which is connected to a heat generating body, and the other surface is erected and joined with a plurality of

2036-5808-PF(Nl).ptd 第43頁 1259117 五、發明說明（38) 面上，連結上述鰭 韓片，以及^一凸條’於上述基板另 與發熱體連接的基板，為了 |# 至各韓片的功能，-般來說將熱艘的熱量傳 將發熱體的熱量傳至各基板的。===，僅僅對於 分基板的厚度；對於貢獻度小二二2加遠部 基板全體的重量不變的情況下字厚度；而使 傳至各韓片4體而言，藉由連的熱量有效率地 板上，可以在不增加重量的 ;t二片的凸條形成於基 能。 /下k南散熱元件的散熱性 在此’凸條雖然可以以數個鍵 片’而將全部的韓片特別地而連結各韓 體的熱量確實地傳遠太姑形成連結時，可以將發熱 提昇，凸條的形成也比較容易12，可使散熱性能更向上 又，雖然凸片=能夠抑制製造成本。 較容易，凸條與的方向形成時，凸條的形成 純，因而能夠抑i :的接合部的形狀與構造較單 交的…，dr又’凸條錯片與各鰭片呈直 大化又係π以提昇散熱=全長，…條的斷面積最 於基板的本體:、如：面：來况’車乂好為使凸條的寬度遠小 _ &此一纟’特別與風扇-併使用時，可以 2036-5808-PF(Nl).ptd Μ 第44頁 減小壓力損失。 又，凸條的斷面形較好為沿 以容易地將凸條形成於基板，=長又方向保持一定。可 狀與構造也較單·純，因❿能夠抑制、的接合部的形 在此情況下，凸條的斷面 (寬度/厚度之比值）較好為5~之輪廓比（asPeci rat1〇) 的全高之比值較好為0】〜〇 3 u而凸條的厚度/散熱元件 解，凸條的厚度相對過大時，合可以由/述的實施例令瞭 散熱性能；凸條的厚度相對;σ大：力抽失，反而降低 全體性地增加時的情況。 •，就相近於基板的厚度 位置，向以由基板與發熱體接觸的相對 是隨著距離縮減：由於傳至基板的熱量 件積疋適虽的’可以形成散熱效率更高的散熱元 r勺Λ’Λ板較好為銅（包含銅合金）’而縛片較好為鋁 ^贴5 因為銅的熱傳導率極大，可以極有效率地 將發”、、體的熱量傳達至各轄片，而紹的熱傳導率雖然相 較小，其具有輕量且加工容易的優點。 ^ 又二鰭片較好為兩兩—對，而各對中的二鰭片較好為 藉由平行於為基板的基端部而連結。上述兩兩一對的鰭^ 和將其連結的基端部構成約略為凹字型的斷面時，可Ζ >接ό基板與鰭片時所費的工夫，而在薄鰭片的情況下， 旱取也比較容易，而可以容易地製造具高高度/間隔比的 1^· 2036-5808-PF(Nl).ptd 第45頁 12591172036-5808-PF(Nl).ptd Page 43 1259117 V. Inventive Note (38) On the surface, the above-mentioned fin-shaped Korean film and the ridge are connected to the substrate of the above-mentioned substrate and the heating element, for |# To the function of each Korean film, the heat of the hot boat is generally transmitted to the heat of the substrate. ===, only for the thickness of the sub-substrate; for the contribution of the small 22 2 plus the weight of the entire substrate, the thickness of the word is unchanged; and for the transfer to each of the 4 pieces of the body, by the heat On the efficient floor, it can be added without weight; t two ribs are formed in the base energy. / The heat dissipation of the heat-dissipating element in the lower part of the heat-dissipating element can be used to heat the heat of each of the Koreans in a large number of key pieces. Lifting, the formation of the ribs is also relatively easy 12, so that the heat dissipation performance can be made higher, although the tab = can suppress the manufacturing cost. It is easier, when the direction of the ridges is formed, the formation of the ridges is pure, so that the shape and structure of the joints can be suppressed... the dr and the ribs are straightened and the fins are straightened. Also π to improve heat dissipation = full length, ... the sectional area of the strip is the most on the body of the substrate:, such as: surface: the condition of the car is so good that the width of the ridge is much smaller _ & this one 'special with the fan - When used, the pressure loss can be reduced by 2036-5808-PF(Nl).ptd Μ page 44. Further, it is preferable that the cross-sectional shape of the ridge is such that the ridge is easily formed on the substrate, and the length and the direction are kept constant. The shape and structure are also simple and pure, because the shape of the joint can be suppressed, in this case, the cross section (width/thickness ratio) of the ridge is preferably a contour ratio of 5~ (asPeci rat1〇) The ratio of the full height is preferably 0]~〇3 u and the thickness of the ridges/heat dissipation element solution, when the thickness of the ridges is relatively large, the heat dissipation performance can be achieved by the embodiment described; the thickness of the ridges is relatively; σ large: force loss, but reduce the situation when the overall increase. • The position of the substrate is close to the thickness of the substrate, and the relative contact between the substrate and the heating element is reduced with distance: because the heat piece transferred to the substrate is properly formed, it can form a heat dissipation element with a higher heat dissipation efficiency. Λ 'Λ 较好 较好 较好 较好 较好 较好 较好 较好 较好 较好 较好 较好 较好 较好 较好 较好 较好 较好 较好 较好 较好 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为 因为Although the thermal conductivity of Shao is relatively small, it has the advantages of being lightweight and easy to process. ^ The second fins are preferably two-two pairs, and the two fins in each pair are preferably parallel to the substrate. When the pair of fins and the base end portion connecting the two ends form a substantially concave cross section, the time required for joining the substrate and the fin can be met. In the case of thin fins, dry extraction is also easier, and it is easy to manufacture 1^· 2036-5808-PF(Nl).ptd with high height/space ratio. Page 45 1259117

散熱元件。而將一鰭片的基端部sμHeat sink component. And the base end of a fin is sμ

略ϊ &并J 鰭片與基端部以蛇腹狀連續地連結而、、子^ ’而可以將 更者，如此的散熱鰭片，雖^ 7成為波形鳍片。 的散熱器，而使用在強制空冷式散熱之用任自然空冷式 此風扇帶走各鰭片的熱量）時，可〇、二器（附设風屬並藉由 能。 传到更高的散熱性 上述的散熱器中，雖然可 相對於散熱元件的角度，而若 來源係為相對於鰭片的側面時 能，亦可以調整其高度、大小 制。 以任思決定安裝風扇時風扇 將風扇配置為送風時，風的 可以得到特別高的散熱性 而不會受到設置空間的限 另外，上述散熱元件的製造方法可以任意決定，較好 為包含：提供一銅基板，上述銅基板一表面上形成有一凸 條，在形成有上述凸條的表面上’以橫跨上述凸條的方 式，立设、配置複數個鋁鰭片；以及由上述銅基板之另一 表面，對上述銅基板及上述鋁鰭片的交界面加熱及加壓， 而使上述紹鰭片接合於上述銅基板。Slightly & and the J fins and the base end portion are continuously connected in a bellows shape, and the sub-threshold can be further improved. Such a heat dissipating fin is a corrugated fin. The heat sink, when used in forced air cooling, the natural air-cooled type of fan to take away the heat of each fin), can be smashed, two devices (with wind and with energy. Pass to higher heat dissipation) The above-mentioned heat sink can be adjusted with respect to the angle of the heat dissipating element, and if the source is relative to the side surface of the fin, the height and size can be adjusted. When the fan is installed, the fan configures the fan as When the air is blown, the wind can obtain a particularly high heat dissipation without being limited by the installation space. The method for manufacturing the heat dissipating component can be arbitrarily determined, and preferably includes providing a copper substrate, and the copper substrate is formed on one surface thereof. a plurality of aluminum fins erected and disposed on the surface on which the ridges are formed to straddle the ridges; and the other surface of the copper substrate, the copper substrate and the aluminum fins The interface of the sheet is heated and pressurized, and the above-mentioned fin is bonded to the copper substrate.

藉由上述的製造方法，在加熱及加壓時，鰭片與凸條 不會造成麻須’籍片的間隔與高度/間隔比可以自由地設 定。又’基板與鰭片係分別為銅與鋁所構成，在由熔點高 於紹的銅基板之側施行加熱及加壓，而使所施加的壓應力 能夠有效率地傳達至基板與鰭片的交界面，可使兩者確實 地接合。 此處’可以任意地決定加熱及加壓的方法，亦可以使According to the above manufacturing method, the fins and the ridges can be freely set without causing the interval and the height/space ratio of the burrs. In addition, the substrate and the fin are made of copper and aluminum, respectively, and heating and pressurization are performed on the side of the copper substrate having a higher melting point, so that the applied compressive stress can be efficiently transmitted to the substrate and the fin. The interface allows the two to be joined. Here, the method of heating and pressurizing can be arbitrarily determined, and

1259117 五、發明說明（41) 用例如電磁誘導等非接觸方式；在接觸方式方面，較好為 使用沿圓周方向轉動的圓板狀接合治具壓至銅基板的另一 表面，並沿著銅基板的另一表面移動。 上述的方法稱為摩擦震動接合，可以使用簡單的裝置 將基板與鰭片確實地接合。 實施方式 >、以下’請參考所附圖面，對本發明之實施型態作詳細 地況明。而說明之中，同一要素係使用同一符號，便省略 重複的說明。1259117 V. INSTRUCTION DESCRIPTION (41) Non-contact method such as electromagnetic induction; in terms of contact method, it is preferable to use a disk-shaped bonding jig rotated in the circumferential direction to press to the other surface of the copper substrate, and along the copper The other surface of the substrate moves. The above method is called frictional vibration bonding, and the substrate can be surely joined to the fins using a simple device. BEST MODE FOR CARRYING OUT THE INVENTION The following description of the embodiments of the present invention will be made in detail with reference to the accompanying drawings. In the description, the same elements are denoted by the same reference numerals, and the repeated description will be omitted.

首先說明本發明第一群組之實施型態。 第1 A、1 B係顯示本發明金屬元件接合方法之一實施型 態各步驟的正面剖面圖，第1C圖係第1β圖之側視圖。本金 屬兀件接合方法中，首先如第1A圖所示，鋁元件101與銅 兀件102係以面接觸的方式互相重合配置，並使用未繪示 於圖面的治具固定。 軸1 0 3 b為中心、朝圓 動的接合治具1 0 3之 元件1 0 2的表面 具1 〇 3沿著銅元件1 〇 2 ’使鋁元件1 0 1與銅 在轉動軸103b的前端 治具本體103a係由 壓入銅元件102的表 係以送至後方的方First, the implementation of the first group of the present invention will be described. Figs. 1A and 1B are front cross-sectional views showing respective steps of an embodiment of the metal element joining method of the present invention, and Fig. 1C is a side view of the first ? figure. In the present metal joining method, first, as shown in Fig. 1A, the aluminum member 101 and the copper member 102 are placed in surface contact with each other, and are fixed by a jig not shown in the drawing. The axis 1 0 3 b is the center, the circular engagement fixture 1 0 3 element 1 0 2 surface has 1 〇 3 along the copper element 1 〇 2 ' with the aluminum element 1 0 1 and copper on the rotating shaft 103b The front end jig body 103a is fed to the rear by the surface of the copper element 102.

接下來，如第1B圖所示，以轉動 周方向、以圓周速率R(m/min)高速轉 接合本體103a之圓周面，垂直壓入銅 1 0 2 a ;如第1 c圖所示，藉由將接合治 的表面102a以行進速率v(m/min)移動 元件1 0 2重合並接合。接合治具丨〇 3係 部將圓板狀的治具本體丨〇 3 a固定，而 JIS : SKD61等工具鋼所構成。相對於 面102a時的行進方向，治具本體1〇3aNext, as shown in Fig. 1B, the circumferential surface of the main body 103a is joined at a high speed in the circumferential direction at a peripheral speed R (m/min), and the copper 1 0 2 a is vertically pressed; as shown in Fig. 1c The bonding is performed by moving the bonded surface 102a at the traveling rate v (m/min) at the traveling rate v (m/min). The joint fixture 丨〇 3 system is a fixed-plate fixture body 丨〇 3 a fixed, and JIS: SKD61 and other tool steel. The jig body 1〇3a with respect to the traveling direction with respect to the face 102a

1259117 五、發明說明（42) 向’沿著轉動軸l〇3b的周邊轉動。 如第2A_圖所示，治具本體1〇3a的圓周面係以一定量“ (m)壓入銅π件1〇2的表面1〇2a的狀態高速轉動，並沿著銅 元件102的表面102a移動。而藉著上述治具本體1〇心在銅 兀件102的表面丨〇2a之壓入，使鋁元件1〇1與銅元件1〇2之 重合面的縫隙消失；並藉著高速轉動的治具本體l〇3a與銅 7G件1 0 2的接觸所產生的震動，將鋁元件丨〇 i與銅元件丨〇 2 之重合面的氧化物皮膜***破壞；並如第2β圖所示，與治 具本體103a接觸的銅元件102的既定區域與其鄰近區域、 還有與上述區域鄰接的銘元件1Q1的既定區域，因治具本 體103a與銅元件1〇2的摩擦接觸所產生的熱量而高溫化， 呈現可塑化（流動化）的固相狀態。上述的結果，使得銅元 件1 0 2與銘元件1 〇 1在相互的交界面上流動擴散，並由當初 的表面開始塑性變形。 接合治具103之治具本體i〇3a的通過執跡，如第2C圖 所示’藉由治具本體l〇3a之壓應力而在銅元件1〇2的表面 10 2a形成一對淺的段部i〇2b。又，鋁元件1〇1與銅元件1〇2 的重合面中，已塑性變形的鋁元件丨〇 1及銅元件丨〇 2相互咬 合，而固化成斷面凹凸型的接合面S，上述的接合面s介於 銅元件1 0 2與鋁元件1 〇 1之間而將二者確實地接合。 此處，考慮到接合治具丨〇3由鋁元件ιοί之側壓入時， 鋁元件的炫點低於銅元件的熔點，鋁元件1 0 1與銅元件丨〇 2 的重合面達到接合所必要的共晶溫度（ 548 °c )以上時，鋁 元件1 0 1的抗形變強度就會變得較小，而使來自接合治具1259117 V. Description of the Invention (42) Rotate toward the periphery of the rotating shaft 10b. As shown in FIG. 2A, the circumferential surface of the jig body 1〇3a is rotated at a high speed in a state in which a certain amount “(m) is pressed into the surface 1〇2a of the copper π piece 1〇2, and along the copper element 102. The surface 102a is moved, and the gap between the surface of the copper element 102 and the surface of the copper element 102 is eliminated by the pressing of the surface of the upper surface of the copper element 102, and the gap between the overlapping surface of the aluminum element 1〇1 and the copper element 1〇2 disappears; The vibration generated by the contact between the high-speed rotating jig body l〇3a and the copper 7G piece 102 causes the oxide film of the overlapping surface of the aluminum element 丨〇i and the copper element 丨〇2 to be split and broken; and as the second β-graph As shown, the predetermined area of the copper element 102 in contact with the jig body 103a and its adjacent area, and the predetermined area of the inscribed element 1Q1 adjacent to the above-mentioned area, are generated by the frictional contact between the jig body 103a and the copper element 1〇2. The heat is elevated and the plasticized (fluidized) solid phase state is exhibited. As a result, the copper element 1 0 2 and the inscription element 1 〇1 flow and diffuse at the mutual interface, and the plasticity starts from the original surface. Deformation. The passing of the fixture body i〇3a of the jig 103 is as shown in Figure 2C. It is shown that a pair of shallow segments i 〇 2b are formed on the surface 10 2a of the copper member 1 2 by the compressive stress of the jig body 3 〇 3a. Further, the aluminum member 1 〇 1 coincides with the copper member 1 〇 2 In the surface, the plastically deformed aluminum member 丨〇1 and the copper member 丨〇2 are engaged with each other to be solidified into a joint surface S having a concave-convex shape, and the joint surface s is interposed between the copper member 10 2 and the aluminum member 1 Between the two, the two are surely joined. Here, considering that the bonding fixture 丨〇3 is pressed by the side of the aluminum member ιοί, the glare of the aluminum component is lower than the melting point of the copper component, and the aluminum component 10 1 When the overlapping surface of the copper component 丨〇2 reaches the eutectic temperature (548 °c) or more necessary for bonding, the deformation resistance of the aluminum component 10 1 becomes smaller, and the bonding fixture is obtained from the bonding fixture.

I1M 2036-5808-PF(Nl).ptd 第48頁 1259117 五、發明說明（43) 103的壓力無法充分地傳達至鋁元件丨〇1與銅元件1〇2的重 合面。另一方面，將接合治具1〇3壓入熔點高於鋁元件1〇1 的銅元件102之側時，在紹元件1〇1與銅元件丨〇2的重人面 達到接合所必要的共晶溫度以上時’鋼元件1〇2可以^持 比較大的抗形變強度，可使來自接合治具1〇3的壓力充分 地傳達至鋁元件1 0 1與銅元件丨02的重合面，而使兩元件間 的縫隙消失，而能夠行高強度的接合。 而此金屬元件接合方法並不限於將鋁元件與銅元件重 合並接合的情況，可以廣泛地適用於各金屬元件間的重合 f接合。而上述金屬元件的形狀，只要在相互重合之後能 J使接合治具愿入就可以。更者，重合的金屬元件的數量 也不限於二個，三個以上亦可。 例如，如第3圖所示金屬元件接合方法的另一實施型 悲/糸將三個金屬元件（5000系的紹元件1〇ι、ι〇〇 2Ϊ1 二二件1〇2)相互重合配置，將接合治具⑽的 …具本肚l〇3a Μ入三個金屬元件中熔點 J側’而為摩擦震動接合。在此’考慮到接 二°2 度對來自接合治具的丄元件的抗形變強 傳達效率的影響，較好；金屬70件的接合面之 序(此處的順序為銅元=二=屬元件依熔點的高低順 系的紹元件1〇1)重二件晋 1〇2 :1〇〇°糸的紹元件1〇1，、5〇。〇 10% - A - w A π。 置，並將接合治具103的治具本體 103a壓入二個金屬元 个篮 元件1〇2)之側，而為：：最局的金屬元件（此處為銅 、、摩“震動接合。其他，三個金屬元件 2036-5808>PF(Nl).ptd 第49頁 1259117 五、發明說明（44) '--— 為銅、鋁、鎂時，較好為以銅元件、鋁元件、鎂元件的順 序重合，將接合治具壓入銅元件之側而行摩擦震動接合。 第4圖為一斜視圖，係顯示本發明之散熱元件之一實 ，型態。圖中所示的散熱元件1〇4係由鋁元件構成的散^ 态材料1 0 5與銅元件構成的傳熱板丨〇 6所構成。散熱器材料 105係由基板i〇5a、立設於基板1〇5a之一表面（圖中的下 面）的複數個散熱鰭片l〇5b所構成。而傳熱板1〇6係重合於 基板105a之另一表面（圖中的上面），以上述的摩擦震動接 合法，將散熱器材料105與傳熱板1〇6接合。而散熱元件 1 〇4，係將接合治具壓入由熔點高於鋁元件的銅元件所構 成的傳熱板1 06之側而行摩擦震動接合而成，因此基板 1 0 5 a與傳熱板1 〇 6的重合部無縫隙，成為高強度的接合。 更好為將基板1 05a與傳熱板1 06的重合面作全面性的摩擦 震動接合，雖然僅有一部份作摩擦震動接合亦可，作全"面 性的摩擦震動接合時可提高接合強度與散熱性能。 而本發明之散熱元件並不限定於此，只要包含具有基 板105a與立設於其一表面的散熱鰭片1〇5的鋁元件所構成 的散熱器材料105、與藉由上述金屬元件接合方法之摩擦 震動接σ重合並接合於基板l〇5a之另一表面的銅元件所構 成的傳熱板106，其他的方面可以自由變更。 玉例如，第5A〜5C圖所示的散熱元件1〇4，係為了盡量提 升散熱性能，而增加散熱鰭片105b的表面積。在第5A圖 中 政熱韓片l〇5b係為向長度方向延伸的波狀；第Μ圖 中 政熱鰭片1 〇 5 b係立設為向傳熱板1 q 6傾斜；第& [圖I1M 2036-5808-PF(Nl).ptd Page 48 1259117 V. Description of the Invention (43) The pressure of 103 is not sufficiently transmitted to the overlapping faces of the aluminum member 丨〇1 and the copper member 〇2. On the other hand, when the bonding jig 1〇3 is pressed into the side of the copper element 102 whose melting point is higher than the aluminum element 1〇1, it is necessary to achieve the bonding of the element 1〇1 and the heavy face of the copper element 丨〇2. When the eutectic temperature is higher than the above, the steel element 1〇2 can hold a relatively large deformation strength, and the pressure from the bonding jig 1〇3 can be sufficiently transmitted to the overlapping surface of the aluminum element 1 0 1 and the copper element 丨02. The gap between the two elements disappears, and a high-strength joint can be performed. Further, the metal element bonding method is not limited to the case where the aluminum element and the copper element are rejoined and joined, and can be widely applied to the coincidence f joint between the metal elements. Further, the shape of the above-mentioned metal member can be made possible by joining the jigs after being superposed on each other. Furthermore, the number of overlapping metal components is not limited to two, and three or more may be used. For example, another embodiment of the metal component bonding method shown in FIG. 3 is configured by arranging three metal components (a component of the 5000 system, 1 〇 ι, ι 〇〇 2 Ϊ 1 22, 1 〇 2), The bonding tool (10) is folded into the melting point J side of the three metal elements to be a frictional vibration joint. Here, it is preferable to consider the influence of the second-degree 2 degree on the transmission efficiency of the 丄 element from the joint fixture, and the order of the joint surface of the metal 70 (the order here is the copper element = two = genus) The components according to the melting point of the element are 1〇1). The weight of the two pieces is 1〇2:1〇〇°糸 The components are 1〇1, 5〇. 〇 10% - A - w A π. And the jig body 103a of the joining jig 103 is pressed into the side of the two metal element basket elements 1〇2), and is: the most local metal element (here, copper, and friction). Others, three metal components 2036-5808>PF(Nl).ptd Page 49 1259117 V. Description of the invention (44) '--- For copper, aluminum, magnesium, preferably copper, aluminum, magnesium The order of the components is coincident, and the bonding jig is pressed into the side of the copper component to perform frictional vibration bonding. Fig. 4 is a perspective view showing one of the heat dissipating components of the present invention. The 1〇4 is composed of a bulk material 10.5 composed of an aluminum element and a heat transfer plate 丨〇6 made of a copper element. The heat sink material 105 is one of the substrates i〇5a and one of the substrates 1〇5a. The surface (the lower side in the figure) is composed of a plurality of heat radiating fins l〇5b, and the heat transfer plate 1〇6 is superposed on the other surface (the upper surface in the drawing) of the substrate 105a by the above-described frictional vibration bonding method. The heat sink material 105 is joined to the heat transfer plate 1〇6, and the heat dissipating member 1 〇4 is pressed into the bonding tool by a melting point higher than aluminum Since the side of the heat transfer plate 610 formed of the copper element of the piece is friction-vibrating and joined, the overlap between the substrate 1 0 5 a and the heat transfer plate 1 〇 6 is seamless, and the joint is high-strength. The composite surface of the substrate 105a and the heat transfer plate 106 is subjected to a comprehensive frictional vibration joint. Although only a part of the frictional vibration joint can be used, the joint strength and heat dissipation can be improved when the full-face frictional vibration joint is used. The heat dissipating member of the present invention is not limited thereto, and the heat dissipating material 105 including the aluminum member having the substrate 105a and the heat dissipating fins 1〇5 standing on one surface thereof, and the above-described metal element are included. The frictional vibration of the bonding method is combined with the heat transfer plate 106 formed of the copper element bonded to the other surface of the substrate 10a, and other aspects can be freely changed. Jade, for example, the heat dissipating components shown in Figs. 5A to 5C 1〇4, in order to maximize the heat dissipation performance, increase the surface area of the heat dissipating fins 105b. In Fig. 5A, the political hot Korean film l〇5b is a wave extending in the longitudinal direction; 1 〇5 b is set to pass Inclined plate 1 q 6; a first & [FIG.

2〇36-5808.PF(Nl).ptd2〇36-5808.PF(Nl).ptd

五、發明說明（45) 中’散熱鰭片105b係向高度方向曲折（相對於傳熱板1〇6的 寬度方向左右對稱的斷面形狀或是左右未對稱的斷面形狀 皆可）。 第6A、6B圖為一系列之正面剖面圖，係顯示本發明之 月欠熱元件的製造方法之一實施型態之第4圖所示之散熱元 件104的製造方法之的各步驟，而第6C圖為第6β圖之剖面 圖。 首先，如第6A圖所示，使散熱鰭片105b向下，將鋁元 件所構成的散熱器1 〇 5固定在接合工作桌丨〇 7上。接下來， 將銅7C件構成的傳熱板丨〇 6以相互面接觸的方式重合配置 於散熱器1 05的基板1 〇5a的上面，並以未繪示於圖面的治 具固定。 。接下來，如第6 B圖所示，以轉動軸1 0 3 b為中心，將沿 圓周方向高速轉動的接合治具丨〇3的治具本體1〇3的圓周= 垂直壓入傳熱板1〇6的表面1〇6a ;並如第6C圖所示，藉由 將接Β /σ具1 〇 3沿著傳熱板1 〇 6的表面1 〇 6 a移動敎哭 材料105的基板1〇4與傳熱板1〇6重合並接合。相對於 2=106的表面i〇6a時的行進方向，治具本體1〇3&係以 二的方向’沿著轉動軸1〇3b的周邊轉動。接合治具 =3的移動區域雖然可及於傳熱板丨〇6之全面或一部份之面 白可而在傳熱板1 0 6的全面區域移動時，可以製造出 合強度與散熱性能較高的散熱元件104。又，=▲ ，1〇3的壓應力在傳熱板1〇6的表面106a殘留較g大的α凹痕 ^可將傳熱板1 0 6的表面1 〇 6 a切削掉一既定厚度，而得V. In the description of the invention (45), the heat radiating fins 105b are bent in the height direction (the cross-sectional shape which is symmetrical with respect to the width direction of the heat transfer plates 1〇6 or the cross-sectional shape which is not symmetric left and right). 6A and 6B are a series of front cross-sectional views showing the steps of the method for manufacturing the heat dissipating member 104 shown in Fig. 4, which is one embodiment of the manufacturing method of the monthly heat-reducing element of the present invention, and The 6C figure is a cross-sectional view of the 6th figure. First, as shown in Fig. 6A, the heat radiating fins 105b are downwardly fixed, and the heat sink 1 〇 5 composed of the aluminum members is fixed to the joint table 7 . Next, the heat transfer plates 构成 6 made of copper 7C members are placed on the upper surface of the substrate 1 〇 5a of the heat sink 105 so as to be in surface contact with each other, and fixed by a jig not shown in the drawing. . Next, as shown in Fig. 6B, the circumference of the jig body 1〇3 of the jig 丨〇3 which is rotated at a high speed in the circumferential direction, centering on the rotating shaft 1 0 3 b, is vertically pressed into the heat transfer plate. 1表面6a of the surface 1〇6a; and as shown in Fig. 6C, the substrate 1 of the crying material 105 is moved along the surface 1 〇 6 a of the heat transfer plate 1 〇 6 by the interface / σ 1 〇 3 The crucible 4 is joined and joined to the heat transfer plates 1〇6. The jig body 1〇3& is rotated in the direction of the second axis along the periphery of the rotation axis 1〇3b with respect to the traveling direction at the surface i〇6a of 2=106. The moving area of the jig=3 can be made to have a full or a part of the surface of the heat transfer plate 丨〇6 and can be moved in the overall area of the heat transfer plate 106 to produce a high joint strength and heat dissipation performance. Heat sink element 104. Further, the compressive stress of =▲, 1〇3 remains on the surface 106a of the heat transfer plate 1〇6 with a larger α indentation, and the surface 1 〇6 a of the heat transfer plate 106 can be cut to a predetermined thickness. And got

1259117 ----—---- 五、發明說明（46) 到具美麗外觀的散熱元件1 〇4。 又，放熱鰭片1 0 5 b的寬度較小時，如第7A圖所示，將 =散熱韓w〇5b之間所嵌入的斷面形狀的散熱韓片支持 :108固定於接合治具桌107上，接下來如第7β圖所示將各 J…省片105嵌人散熱片支持具1 而行摩擦震動接人 實地防止來自接合治侧的…使咖 邊以更Ϊ丄如第7C圖所示，亦可以使用在轉動軸1G6b的周 丄：間隔固定有複數個治具本體103a的接合治具 以摩柝具103。此時，可以同時對複數個區域施 加提^效率。5 ’可以縮斷接合時所需要的時間’因而更 以上係說明本發明之較佳實施例，但不應 發明，任何孰習此姑蔽本 » 心 限疋本 内，當可作些許之更動與潤飾。 之精神和粑圍 實驗一： 如第1A〜1C圖與第2A〜2C圖所示，將鈕分处^ 一 重合並於銅元件之側作摩擦震、$ /、銅tl件 丨ν《枝a 辰勁接合日守’ ％以以下的眚綸 接合本體的圓周速率R的適當範圍 使用尽度0.001 m的銅元件盥 ( 1 0 50 - 〇)作為實驗姑粗v干:、与度0.001 m的鋁元件 乍為貝驗材抖。又，使用治具本體 '、板“ 0.005 m的接合治具。接合治具的接合2。在〇8 兀件表面的壓入量設定為0.0 0 0 3 m。 本體在銅 結果如表一所示。 第52頁 2036-5808-PF(Nl).ptd 1259117_ 五、發明說明（47) 此處所謂的材料剝離係指在重合面發生兩元件之剝 離，即表示不完全的接合與未接合。又，材料接合部破斷 係指接合部的重合面以外的元件發生破斷，表示其接合是 完全的。 表一 材料：1 050-0、Cu 厚度：A卜0· 001 m 、 Cu-0. 001 m 治具形狀：00.08 m、0.005 m厚 治具壓入量α=0.0003 m 試片 編號 幃動 數 圓周速 雖） 行進速 _ 圓周速率/ 行進速牟 _ Ob 接合 寬度 接合強度 參考 rpm m/min m/min N m (χΐ〇·3) Wm (χΐ〇6) Μ 1000 251.32 1.0 251 1764 22.05 80.00 材料剝離 1-2 1000 251.32 3.0 84 1754 22.04 79.58 材料剝離 1-3 2000 502.64 2.0 251 2056 20.18 101.88 材料接合部破斷 1-4 2000 502.64 3.0 168 2356 24.13 97.64 材料接合部破斷 1-5 3000 753.96 0.50 1508 2071 22.22 93.20 材料接合部破斷 1-6 3000 753.96 1.0 754 2076 20.65 100.53 材料接合邾破斷 1-7 3000 753.96 2.0 377 2171 19.84 109.43 材料楱合部破斷 1-8 3000 753.96 3.0 251 2246 20.75 108.24 材料接合部破斷 1-9 3000 753.96 4.0 188 2310 21.00 110.00 材料接合部破斷 1-10 6000 1507.92 3.0 503 2302 22.17 103.83 材料棲合部破斷 如表一所示，可以瞭解接合時接合治具以2 5 0〜2 0 0 0 m / m i η的圓周速率轉動時，接合治具與銅元件之摩擦接觸 所產生的熱量為恰好適當，而能夠行良好的接合。又，可 以瞭解接合時接合治具以5 0 0〜2 0 0 0 m/min的圓周速率轉動 時，而能夠行較良好的接合。1259117 --------- V. Description of invention (46) To the heat-dissipating component with a beautiful appearance 1 〇 4. Moreover, when the width of the heat radiating fins 1 0 5 b is small, as shown in FIG. 7A, the heat sink of the cross-sectional shape embedded between the heat sinks and the heat sinks Han 〇 5b is supported: 108 is fixed to the joint fixture table. On the 107, next, as shown in the 7th figure, each of the J...slabs 105 is embedded with a heat sink support 1 and the friction vibration is taken to prevent the side from the joint side. As shown in the figure, it is also possible to use a jig with a plurality of jig bodies 103a fixed to the circumference of the rotating shaft 1G6b. At this time, it is possible to apply efficiency to a plurality of regions at the same time. 5 'The time required for the joint can be shortened'. Therefore, the preferred embodiment of the present invention is described above, but should not be invented, and any of the ambiguity of this book can be made. With retouching. Spirit and Circumference Experiment 1: As shown in Figures 1A to 1C and 2A to 2C, the button is divided into a part of the copper component for friction shock, $ /, copper tl 丨 ν a 辰劲接日守'% The appropriate range of the circumferential rate R of the following conjugated body is used. The copper element 盥 (1 0 50 - 〇) with a fullness of 0.001 m is used as the experimental nucleus: dry and dry: 0.001 m The aluminum component is shaken for the shell. In addition, the jig of the jig and the joint of the plate of 0.005 m were used. The joint of the jig was joined. The amount of press-fitting on the surface of the crucible 8 was set to 0.00 0 3 m. The results of the body in copper were as shown in Table 1. Page 52 2036-5808-PF(Nl).ptd 1259117_ V. INSTRUCTION DESCRIPTION (47) The term "material peeling" as used herein refers to the peeling of two elements on the coincident surface, that is, the incomplete joint and the unjoined joint. Further, the breaking of the material joint portion means that the element other than the overlapping surface of the joint portion is broken, indicating that the joint is complete. Table 1 material: 1 050-0, Cu thickness: A Bu 0· 001 m , Cu-0 001 m Fixture shape: 00.08 m, 0.005 m thick jig pressing amount α=0.0003 m Test piece number 帏 moving number peripheral speed although) Traveling speed _ circumferential speed / travel speed 牟 Ob Joint joint width joint strength reference rpm m/ Min m/min N m (χΐ〇·3) Wm (χΐ〇6) Μ 1000 251.32 1.0 251 1764 22.05 80.00 Material stripping 1-2 1000 251.32 3.0 84 1754 22.04 79.58 Material stripping 1-3 2000 502.64 2.0 251 2056 20.18 101.88 Material joint break 1-4 2000 502.64 3.0 168 2356 24.13 97.64 Material Broken joint 1-5 3000 753.96 0.50 1508 2071 22.22 93.20 Material joint break 1-6 3000 753.96 1.0 754 2076 20.65 100.53 Material joint 邾 breaking 1-7 3000 753.96 2.0 377 2171 19.84 109.43 Material joint break 1-8 3000 753.96 3.0 251 2246 20.75 108.24 Material joint break 1-9 3000 753.96 4.0 188 2310 21.00 110.00 Material joint break 1-10 6000 1507.92 3.0 503 2302 22.17 103.83 Material habitat is broken as shown in Table 1. It can be seen that when the joint jig is rotated at a peripheral speed of 2500 to 20,000 m / mi η at the time of joining, the heat generated by the frictional contact between the jig and the copper member is just right, and can be performed well. Further, it can be understood that when the joining jig is rotated at a peripheral speed of 500 to 200 m/min, a good joining can be performed.

第53頁 2036-5808-PF(Nl).ptd 1259117 五、發明說明(4S) 實驗二： 將實驗一之銅元件的厚度t ( m )與接合治具之治具本 體在銅元件的壓入量a (m)作變化，而進行與實驗一相同 的實驗。 結果如表二所不。 表二 材料：1050-0 、 Cu A1 厚度：0. 001 m 接合治具形狀：0 0. 0 8 m、0. 0 0 5 m厚 _ 2036-5808-PF(Nl).ptd 第54頁 1259117 五、發明說岈（4θ) 試片 編號 轉動 數 S周速 _ 行進·速 _ Cu厚度 (t) 壓入曼 (α) 接合強度 評價 參考 rpm mJnrn m/min m(xl0'3) m (χ10°) Wm (χΐ〇6) 比-1 700 175.924 1.00 1.0 0.30 0 X 比-2 700 175.924 1.00 3.0 0.30 0 X 比-3 850 213.622 1.00 1.0 0.30 0 X 比-4 850 213.622 1.00 3.0 0.30 0 X 2-1 1000 251.320 0.25 5.0 0.50 65 Δ 材料剝離 2-2 1000 251.320 0.50 5.0 0.50 65 Δ 材料剝離 2-3 1000 251.320 1.00 1.0 0.30 80 Δ 材料剝離 2-4 1000 251.320 1.00 3.0 0.30 65 Δ 材料剝離 2-5 1000 251.320 3.00 1.0 0.30 80 Δ 材料剝離 2-6 1000 251.320 3.00 3.0 0.30 78 Δ 材料剥離 2-7 2000 502.640 2.00 1.0 0.30 102 0 材料接合部破斷 2-8 2000 502.640 3.00 1.0 0.30 98 Ο 材料接合部破斷 2-9 3000 753.960 5.00 1.0 0.30 95 Ο 材料接合部破斷 2-10 3000 753.960 1.00 1.0 0.30 100 Ο 材料接合部破斷 2-11 3000 753.960 2.00 1.0 0.30 109 0 材料接合部破斷 2-12 3000 753.960 3.00 1.0 0.30 108 0 材料接合部破斷 2-13 3000 753.960 4.00 1.0 0.30 110 Ο 材料接合部破斷 2-14 3000 753.960 3.00 1.0 0.10 90 Ο 材料接合部破斷 2-15 3000 753.960 0.50 1.0 0.20 95 Ο 材料接合部破斷 2-16 3000 753.960 0.50 3.0 0.20 91 Ο 材料接合部破斷 2-17 6000 1307.920 3.00 1.0 0.30 104 〇 材料接合部破斷 如表二所示，接合時接合治具的圓周速率小於2 5 0 m / m i η時，接合治具與銅元件之摩擦接觸所產生的熱量就 過小，而使銅元件與鋁元件的重合面的溫度過低，而導致 接合不良（比-1〜比-4)。另一方面，雖然表二未顯示，接 合時接合治具的圓周速率大於2 0 0 0 m/mi η時，接合治具與 銅元件之摩擦接觸所產生的熱量就會大過所必要的，使與 接合治具接觸的銅元件的溫度會局部過高，導致該部分發Page 53 2036-5808-PF(Nl).ptd 1259117 V. INSTRUCTIONS (4S) Experiment 2: The thickness t ( m ) of the copper component of Experiment 1 and the pressing of the fixture body of the bonding fixture on the copper component The amount a (m) was changed, and the same experiment as in Experiment 1 was carried out. The results are as shown in Table 2. Table 2 Materials: 1050-0, Cu A1 Thickness: 0. 001 m Joint fixture shape: 0 0. 0 8 m, 0. 0 0 5 m thick _ 2036-5808-PF(Nl).ptd Page 54 1259117 V. Invention 岈 (4θ) Test piece No. of rotation number S Weekly speed _ Traveling speed _ Cu thickness (t) Pressing in Man (α) Joint strength evaluation reference rpm mJnrn m/min m(xl0'3) m (χ10 °) Wm (χΐ〇6) Ratio -1 700 175.924 1.00 1.0 0.30 0 X Ratio -2 700 175.924 1.00 3.0 0.30 0 X Ratio -3 850 213.622 1.00 1.0 0.30 0 X Ratio -4 850 213.622 1.00 3.0 0.30 0 X 2- 1 1000 251.320 0.25 5.0 0.50 65 Δ Material stripping 2-2 1000 251.320 0.50 5.0 0.50 65 Δ Material stripping 2-3 1000 251.320 1.00 1.0 0.30 80 Δ Material stripping 2-4 1000 251.320 1.00 3.0 0.30 65 Δ Material stripping 2-5 1000 251.320 3.00 1.0 0.30 80 Δ Material peeling 2-6 1000 251.320 3.00 3.0 0.30 78 Δ Material peeling 2-7 2000 502.640 2.00 1.0 0.30 102 0 Material joint break 2-8 2000 502.640 3.00 1.0 0.30 98 Ο Material joint breakage 2-9 3000 753.960 5.00 1.0 0.30 95 Ο Material joint break 2-10 3000 753.960 1.00 1.0 0.30 100 Ο Material joint break 2-11 3000 753.960 2.00 1.0 0.30 109 0 Material joint break 2-12 3000 753.960 3.00 1.0 0.30 108 0 Material joint break 2-13 3000 753.960 4.00 1.0 0.30 110 Ο Material joint break 2-14 3000 753.960 3.00 1.0 0.10 90 Ο Material joint break 2-15 3000 753.960 0.50 1.0 0.20 95 Ο Material joint break 2-16 3000 753.960 0.50 3.0 0.20 91 Ο Material joint break 2-17 6000 1307.920 3.00 1.0 0.30 104 破 The joint of the 〇 material is broken as shown in Table 2. When the circumferential speed of the joint fixture is less than 2 50 m / mi η when joining, the heat generated by the frictional contact between the joint fixture and the copper component is too small. On the other hand, the temperature of the overlapping surface of the copper element and the aluminum element is too low, resulting in poor bonding (-1 to 4). On the other hand, although not shown in Table 2, when the circumferential speed of the joining jig at the time of joining is greater than 2,000 m/mi η, the heat generated by the frictional contact between the joining jig and the copper member is greater than necessary. The temperature of the copper component in contact with the bonding fixture is locally too high, causing the portion to be

2036-5808-PF(Nl).ptd 第55頁 1259117 五、發明說明(50) 生塑性變形，而使接合治具的壓應力無法充分地傳達至重 合面導致在兩元件間產生縫隙。又，此時接合治具的驅動 能量損失會變大，而使接合效率惡化。因此，可以瞭解接 合時接合治具以250〜2000 m/min的圓周速率轉動時，接合 治具與銅元件之摩擦接觸所產生的熱量為恰好適當，而能 夠行良好的接合。（2-1〜2-17) 實驗三：2036-5808-PF(Nl).ptd Page 55 1259117 V. INSTRUCTIONS (50) Plastic deformation occurs, and the compressive stress of the joint jig is not sufficiently transmitted to the coincident surface, resulting in a gap between the two elements. Further, at this time, the driving energy loss of the joining jig is increased, and the joining efficiency is deteriorated. Therefore, it can be understood that when the joint jig is rotated at a peripheral speed of 250 to 2000 m/min at the time of joining, the heat generated by the frictional contact between the jig and the copper member is just right, and a good joint can be performed. (2-1~2-17) Experiment 3:

進行與實驗二相同的實驗，驗證接合治具之治具本體 在銅元件的壓入量a (m)與銅元件的厚度t (m)的關係。 結果如表三所示。 表三 材料：1 050-0、Cu A1 厚度：0. 001 m 接合治具形狀：0 〇. 〇 8 m、0 . 0 0 5 m厚The same experiment as in Experiment 2 was carried out to verify the relationship between the pressing amount a (m) of the copper member and the thickness t (m) of the copper member. The results are shown in Table 3. Table 3 Material: 1 050-0, Cu A1 Thickness: 0. 001 m Joint fixture shape: 0 〇. 〇 8 m, 0 . 0 0 5 m thick

2036-5S08-PF(Nl).ptd 第56頁 1259117 五、發明說稱（51) 試片 編號 蛘動 數 ®周速 李(R) 行進速 李(V) Cu厚度 (t) 壓入董 (α) 接合強度 評價 參考 rpm m/min m/min m(xl0*3) m (χΐ〇°) Wm (χΙΟ6 ) 比-5 3000 753.96 2.0 1.0 0.05 0 X 比-6 3000 753.96 2.0 3.0 0.10 0 X 比-7 3000 753.96 3.0 3.0 0.15 0 X 比-S 3000 753.96 0.5 5.0 0.30 0 X 3-1 2000 502.64 2.0 3.0 0.30 101 0 材料接合部破斷 3-2 2000 502.64 3.0 3.0 0.30 92 0 材料接合部破斷 3-3 3000 753 96 0.5 3.0 0.30 94 ο 材料接合部破斷 3-4 3000 753.96 1.0 3.0 0.30 98 0 材料接合部破斷 3-5 3000 753.96 2.0 3.0 0.30 110 ο 材料接合部破斷 3-6 3000 753.96 3.0 3.0 0.30 103 ο 材料接合部破斷 3-7 3000 753.96 4.0 3.0 0.30 105 ο 材料接合部破斷 3-8 6000 1507.92 3.0 3.0 0.30 100 0 材料接合部破斷 3-9 2000 502.64 0.5 5.0 0.50 89 ο 材料接合部破斷 3-10 2000 502.64 0.5 5.0 0.50 188 ο 材料接合部破斷 如表三所示，接合時接合治具之治具本體在銅元件的 壓入量α小於0. 11時，銅元件與铭元件的重合面中會殘留 縫隙而導致接合不良（比-5〜比-8)。另一方面，雖然表三 未顯示，接合時接合治具之治具本體在銅元件的壓入量α 大於0 · 3 t時，雖然銅元件與鋁元件的重合面中不會殘留縫 隙，而過大的接合治具壓入量會在銅元件的表面殘留顯著 的凹痕，導致元件的損失。因此，接合時接合治具之治具 本體在銅元件的壓入量α在0. It以上、0.3t以下時，接合 治具的壓應力為正好適當的值，可以瞭解就可以在銅元件 與鋁元件的重合部不產生縫隙的情況下完成接合，亦可以 縮小銅元件表面的凹痕。2036-5S08-PF(Nl).ptd Page 56 1259117 V. Invention Theory (51) Test piece number 蛘 movement number ® weekly speed Li (R) speed of movement Li (V) Cu thickness (t) Pressed into Dong ( α) joint strength evaluation reference rpm m/min m/min m(xl0*3) m (χΐ〇°) Wm (χΙΟ6) ratio -5 3000 753.96 2.0 1.0 0.05 0 X ratio -6 3000 753.96 2.0 3.0 0.10 0 X ratio -7 3000 753.96 3.0 3.0 0.15 0 X Ratio-S 3000 753.96 0.5 5.0 0.30 0 X 3-1 2000 502.64 2.0 3.0 0.30 101 0 Material joint break 3-2 2000 502.64 3.0 3.0 0.30 92 0 Material joint break 3 -3 3000 753 96 0.5 3.0 0.30 94 ο Material joint break 3-4 3000 753.96 1.0 3.0 0.30 98 0 Material joint break 3-5 3000 753.96 2.0 3.0 0.30 110 ο Material joint break 3-6 3000 753.96 3.0 3.0 0.30 103 ο Material joint break 3-7 3000 753.96 4.0 3.0 0.30 105 ο Material joint break 3-8 6000 1507.92 3.0 3.0 0.30 100 0 Material joint break 3-9 2000 502.64 0.5 5.0 0.50 89 ο Broken joint of material 3-10 2000 502.64 0.5 5.0 0.50 188 ο The joint of the material is broken as shown in Table 3. With the jig body in press-α is less than the amount of the copper element 0.11, the copper surface element coincides with the inscription element may remain and cause poor engagement slot (-5~ ratio than -8). On the other hand, although not shown in Table 3, when the pressing amount α of the copper member is greater than 0 · 3 t when the jig body of the joining jig is joined, the gap does not remain in the overlapping surface of the copper member and the aluminum member. An excessively large amount of the bonding jig will leave significant dents on the surface of the copper component, resulting in loss of components. Therefore, when the pressing amount α of the jig of the joining jig at the joining of the jig is 0. It or more and 0.3 t or less, the compressive stress of the joining jig is just an appropriate value, and it can be understood that the copper component can be When the overlapping portion of the aluminum member is joined without a gap, the dent of the surface of the copper member can be reduced.

2036-5808-PF(Nl).ptd 第57頁 1259117 五、發明說明（52) 但是，此實驗中，接合治具的治具本體的圓周面是平 面的。在接合本體的圓周面形成有凹槽時，就會因為增加 接合本體的原周面與銅元件的接觸面積，而可能可以減少 接合時治具本體在銅元件表面的壓入量。藉由發明人的實 驗，在接合本體的圓周面形成有凹槽時，接合時接合治具 之治具本體在銅元件的壓入量α在0.03t以上、0.3t以下 時是適當的。 貫驗四· 實驗四係進行與實驗二相同的實驗，驗證接合治具之 治具本體的行進速率V (m/mi η)的適當範圍。而將銅元件 的厚度設定為0. 0 0 5 m、接合治具之治具本體的板厚設定 為0· 01 m 。 結果如表四所示。 表四 材料：1050-0 、 Cu 厚度：A卜0· 001 m 、 Cu-0·005 m (二t) 接合治具形狀：0 0 . 0 8 m、0 · 0 0 5 m厚 /5=R/(5.0x 107x t2)2036-5808-PF(Nl).ptd Page 57 1259117 V. INSTRUCTIONS (52) However, in this experiment, the circumferential surface of the jig body of the jig is flat. When the groove is formed on the circumferential surface of the joint body, it is possible to reduce the amount of pressing of the jig body on the surface of the copper member at the time of joining because the contact area of the original peripheral surface of the joint body with the copper member is increased. According to the experiment of the inventors, when the groove is formed on the circumferential surface of the joint body, the jig body for joining the jig at the time of joining is suitable when the amount of pressing α of the copper member is 0.03 t or more and 0.3 t or less. The fourth experiment was carried out in the same experiment as in Experiment 2, and the appropriate range of the traveling velocity V (m/mi η) of the jig body of the jig was verified. The thickness of the copper component is set to 0. 0 0 5 m, and the thickness of the fixture body of the bonding fixture is set to 0·01 m. The results are shown in Table 4. Table 4 Materials: 1050-0, Cu Thickness: A Bu 0· 001 m, Cu-0·005 m (two t) Joint fixture shape: 0 0 . 0 8 m, 0 · 0 0 5 m thick/5= R/(5.0x 107x t2)

2036-5808-PF(Nl).ptd 第58頁 1259117 五 '發明說明（53) 試片 編號 轉動 數 圓周速季 (R) 行進速 _ β 壓入董 (α) 接合強度 評價 參考 rpm m/min m/min m/min m (χΙΟ·3) Wm (χ10‘） 比-9 700 175.924 0.25 0.140 0.50 0 X 比-10 850 213.622 0.25 0.170 0.50 0 X 比-11 3000 753.960 0.75 0.603 0.50 0 X 比-12 3000 753.960 1.00 0.603 0.50 0 X 比-13 3000 753.960 2.00 0.603 0.10 0 X 比-14 6000 1507.920 2.00 1.206 0.50 0 X 比-15 3000 753.960 3.00 0.603 0.20 0 X 4-1 3000 753.960 0.25 0.603 0.50 86 ο 材料接合部破斷 4-2 2000 502.640 0.25 0.402 0.50 71 0 材料楱合部破斷 4-3 3000 753.960 0.50 0.603 0.50 83 0 材料接合部破斷 4-4 6000 1507.920 1.00 1.206 0.50 80 0 材料接合部破斷 由表四可以瞭解，接合時接合治具之治具本體的行進速 率V，在接合時接合治具之圓周速率為R (m/min)、重合部 的銅元件的厚度為t (m)時，較好為VSR/(5.0x 107x t2) 之範圍。 其理由，舉例來說，接合時接合治具的圓周速率變大 時，因接合治具與銅元件的摩擦接觸所產生的熱量亦會變 大，而使接合治具以高速行進時，重合部仍能保持一定的 溫度；而銅元件的厚度變大時，重合部要達到一定的溫度 以上就比較費時，若此時接合治具的行進速率過大時，在 重合部的溫度達到一定溫度以上之前，接合治具就已通 過，就會導致接合不良的問題。而實行良好的摩擦震動接 合時，接合治具的行進速率V、圓周速率R、銅元件的厚度 t必須要相互調節。而發明人們的實驗結果，係確認了滿2036-5808-PF(Nl).ptd Page 58 1259117 V'Invention Description (53) Test piece number rotation number circumferential speed season (R) travel speed _ β press-in Dong (α) joint strength evaluation reference rpm m/min m/min m/min m (χΙΟ·3) Wm (χ10') is -9 700 175.924 0.25 0.140 0.50 0 X than -10 850 213.622 0.25 0.170 0.50 0 X Ratio -11 3000 753.960 0.75 0.603 0.50 0 X -12 3000 753.960 1.00 0.603 0.50 0 X Ratio -13 3000 753.960 2.00 0.603 0.10 0 X Ratio -14 6000 1507.920 2.00 1.206 0.50 0 X Ratio -15 3000 753.960 3.00 0.603 0.20 0 X 4-1 3000 753.960 0.25 0.603 0.50 86 ο Material joint Broken 4-2 2000 502.640 0.25 0.402 0.50 71 0 Material joint break 4-3 3000 753.960 0.50 0.603 0.50 83 0 Material joint break 4-4 6000 1507.920 1.00 1.206 0.50 80 0 Material joint breakage 4. It can be understood that the traveling rate V of the jig body of the jig when joining is the R (m/min) of the joining jig at the time of joining, and the thickness of the copper component of the overlapping portion is t (m). Good range for VSR/(5.0x 107x t2). For this reason, for example, when the circumferential rate of the joining jig at the time of joining becomes large, the heat generated by the frictional contact between the joining jig and the copper member is also increased, and the joining portion is moved at a high speed, and the overlapping portion is made. When the thickness of the copper component is increased, it takes time to reach the temperature of the overlapping portion. If the traveling speed of the bonding fixture is too large, the temperature of the overlapping portion reaches a certain temperature or higher. If the jig is passed, it will cause a problem of poor joint. When a good frictional vibration engagement is performed, the traveling speed V of the joining jig, the peripheral speed R, and the thickness t of the copper member must be adjusted to each other. And the experimental results of the inventors confirmed that

2036-5808-PF(M).ptd 第59頁 1259117 、發明說明（54) 足^/二^“”時’能夠有良好的接合。 出的行進速率V („/„&)，沿著該銅金屬=二= f(C)求 時，能夠有良好的摩擦震動接合。 、表面移動 0.1 ^V^R/(5.〇x ι〇7χ ............. ί L合時該接合治具的圓周速率(m/min.;. :. ^ ^(〇 為5亥重θ ^中的該銅元件的厚度（m)。 實驗五·· 利用第6Α〜6C圖所示的方法，實際地製作如 形狀的散熱元件。④中，散 ：所： =厚”0.005 寬度為〇.〇“、長度 韓片的寬度為0.0005 m、配置間隔為〇〇〇2 m、高;，政熱 0=5 m。傳熱板的厚度為〇 〇〇5 m，寬度及長度：散埶时 材料的基板相151。摩擦震動接合所使用的接合治罝中 =的直徑為U“、厚度為。〇1 m，接合條；：定= 具體的轉動數為3000 RpM、行進速率為0 25 在傳熱板的壓人量為G.咖5m。又，摩擦震動接 熱板的表面會以機械加工切削掉〇· 〇〇ι田的深度。 鲁 性的的條件，可以有效率地製造具有優良熱傳導 接下來說明本發明第二群組的實施槊態。 L在切入主題之前，以金屬元件的摩擦震動接合 的基本架構為前提作說明。 所謂的金屬元件的摩擦震動接合，是藉由接合治具的2036-5808-PF(M).ptd Page 59 1259117, invention description (54) When the foot ^ / 2 ^ "" can have a good joint. The traveling rate V („/„&) is obtained along the copper metal = two = f (C), and a good frictional vibration joint can be obtained. The surface movement is 0.1 ^V^R/(5.〇x ι〇7χ ............. ί L is the circumferential speed of the joint fixture (m/min.;. :. ^ ^(〇 is the thickness (m) of the copper element in 5 重 θ ^. Experiment 5· Using the method shown in Fig. 6 to 6C, a heat dissipating element such as a shape is actually fabricated. The thickness of the heat transfer plate is =. 5 m, width and length: the substrate phase 151 of the material during dilation. The diameter of the joint used in the friction and vibration joint is U", the thickness is 〇1 m, the joint strip;: fixed = the specific number of rotations 3000 RpM, the travel rate is 0 25. The pressure on the heat transfer plate is G. 5 m. In addition, the surface of the friction and vibration heat plate will be machined to cut the depth of the 〇· 〇〇ι field. Conditions that can be efficiently produced with excellent heat conduction. Next, the implementation of the second group of the present invention will be explained. L is based on the basic structure of the frictional vibration joint of metal components before cutting into the theme. Out. The so-called friction engagement shock metal member is bonded by a jig

1259117 五、發明說明（55) it; : 2 ί ί :件重合部的縫隙消失，並藉由轉動的接合 元# ^人而沾"的接觸所產生的震動***破壞存在於金屬 而發4 _ w：綠虱化物皮膜，並藉由摩擦熱將重合部高溫化 散速率的闾眭Μ 4在增各金屬兀件的接觸面積與增大擴 政速革的同時將重合部接合的方法。 相互^ Ϊ : Ϊ ’將複數個金屬元件，依照熔點的高低順序 而為ΐ:二二將接合治具壓至炫點最高的金屬元件之側 為接5 %，在各金屬元件的重合部上升至接合所必要的 ϊ 合治具之側的金屬元件仍能保持高抗形變強 2而-ϊ ϊ Γ冶具的壓應力能夠有效率地傳達至重合面， 因而此夠元成金屬元件間無縫隙之高強度的接合。 -例m銘元件與熔點較高的銅元件作為：屬元件之 二序=地說明。_〜8c圖係顯示摩擦震動接合 =，；ί 、8B為正面剖面圖’第8C圖為第8B圖之 :】視圖。在摩擦震動接合中，首先如第“圖所示 件2二與銅元件2〇2以面接觸的方式相互重合配[ 不於圖面的治具固定。 禾、曰 心、=古1°第8B、8C圖所示’將以轉動軸2咖為中 以囫周方向以圓周速度!^高速轉動的 的圓周面垂直壓至銅元件2。2的表面;。2:〇 = J 口 -具203沿著銅元件202的表面2〇2a以行進速 動，而使鋁元件201與銅元件202重合並接合。 、λ ^ ^ ^ ^ ® ^ ^ ^ ^20〇3a @ 疋而治具本體203a係由JIS:SKD61等工具鋼所構成。相1259117 V. Description of invention (55) it; : 2 ί ί : The gap of the coincident portion disappears, and the vibration caused by the contact of the rotating joint element #^^'s contact is broken and exists in the metal. _ w: a green bismuth film, and a method of joining the symmetry portion by increasing the contact area of each metal element by friction heat and increasing the contact area of each metal piece by friction heat. Mutual ^ Ϊ : Ϊ 'Multiple metal components, according to the order of the melting point of the ΐ: 22, the joint fixture is pressed to the side of the highest metal component is 5%, rising in the overlap of the metal components The metal component on the side of the jig that is necessary for the joint can still maintain high deformation resistance 2 and the compressive stress of the tool can be efficiently transmitted to the coincident surface, so that the metal element is seamless. High strength bonding. - An example of a member element and a copper element having a higher melting point are as follows: _~8c shows the frictional vibration joint =,; ί, 8B is the front sectional view' Fig. 8C is the 8B figure:] view. In the friction and vibration joint, first, as shown in the figure, the two pieces of the copper element 2〇2 are in surface contact with each other as shown in the figure. [The fixture is not fixed on the drawing surface. Wo, 曰心, =古1° 8B, 8C shows the surface of the copper element 2. 2 which is rotated at a high speed in the circumferential direction at a circumferential speed in the direction of the rotation axis 2; 2: 〇 = J mouth - 203 is accelerated along the surface 2〇2a of the copper member 202, and the aluminum member 201 is re-engaged with the copper member 202. λ ^ ^ ^ ^ ® ^ ^ ^ ^ 20 〇 3a @ 疋 and the fixture body 203a It is made of tool steel such as JIS: SKD61.

2036-5808-PP(Nl).ptd 第61頁 1259117 五、發明說明（56) —-- 對於麼入銅元件2〇2的表面2〇2a時的行進方向，治具本體 203a係以送至後方的方向，沿著轉動軸2〇儿的周邊轉動。 如第9A圖所示，治具本體2〇3a的圓周面係以一定量α (m)壓入銅元件2〇2的表面2〇2a的狀態下以圓周方向高速轉 動，並沿著銅元件202的表面202a移動。而藉著上述治具 本體203a在鋼元件202的表面202a之壓入，使叙元件2〇1與 銅元件2 0 2之重合面的縫隙消失；並藉著高速轉動的治具 本體M3a與銅元件202的接觸所產生的震動，將鋁元件^〇1 與銅兀件202之重合面的氧化物皮膜***破壞；並如第9β 圖所示’與治具本體203a接觸的銅元件2〇2的既定區域與 其鄰近區域、還有與上述區域鄰接的鋁元件2〇1的既定區 域’因治具本體2〇3a與銅元件202的摩擦接觸所產生的熱 量而高溫化，呈現可塑化（流動化）的固相狀態。上述的結 果’使得銅元件202與鋁元件201在相互的交界面上流動擴 散，並由當初的表面開始塑性變形。 接合治具203之治具本體203a的通過軌跡，如第9C圖 所示，藉由治具本體203a之壓應力而在銅元件2〇2的表面 2 0 2 a形成一對淺的段部2 0 2 b。又，紹元件2 〇 1與銅元件2 〇 2 的重合面中，已塑性變形的鋁元件2 0 1及銅元件2 〇 2相互咬 合，而固化成斷面凹凸型的接合面S，上述的接合面s介於 銅元件202與鋁元件201之間而將二者確實地接合。 此處，考慮到接合治具2 0 3由鋁元件2 0 1之側壓入時， I呂元件2 0 1的熔點低於銅元件2 0 2的炫點，銘元件2 〇 1與銅 元件2 0 2的重合面達到接合所必要的共晶溫度（5 4 8 °C )以上2036-5808-PP(Nl).ptd Page 61 1259117 V. Description of the Invention (56) —-- For the direction of travel when the surface 2〇2a of the copper element 2〇2 is inserted, the fixture body 203a is sent to The rear direction rotates along the periphery of the rotating shaft 2 . As shown in Fig. 9A, the circumferential surface of the jig body 2〇3a is rotated at a high speed in the circumferential direction with a certain amount α (m) pressed into the surface 2〇2a of the copper member 2〇2, and along the copper member. The surface 202a of 202 moves. By the pressing of the jig body 203a on the surface 202a of the steel element 202, the gap of the overlapping surface of the element 2〇1 and the copper element 2 0 2 disappears; and the fixture body M3a and copper are rotated by high speed. The vibration generated by the contact of the element 202 splits and breaks the oxide film of the overlapping surface of the aluminum element ^1 and the copper element 202; and as shown in the ninth figure, the copper element 2〇2 in contact with the fixture body 203a The predetermined region of the predetermined region and the adjacent region, and the predetermined region of the aluminum member 2〇1 adjacent to the region, is heated by the heat generated by the frictional contact between the jig body 2〇3a and the copper member 202, and is plasticized (flowing) Solid state. The above result is such that the copper member 202 and the aluminum member 201 flow and spread at the mutual interface and are plastically deformed from the original surface. The passage path of the jig body 203a of the jig 203, as shown in FIG. 9C, forms a pair of shallow segments 2 on the surface 2 0 2 a of the copper member 2〇2 by the compressive stress of the jig body 203a. 0 2 b. Further, in the overlapping surface of the element 2 〇 1 and the copper element 2 〇 2, the plastically deformed aluminum element 20 1 and the copper element 2 〇 2 are engaged with each other, and are solidified into a joint surface S having a concave-convex shape, the above-mentioned The joint surface s is interposed between the copper element 202 and the aluminum element 201 to positively bond the two. Here, considering that the joining jig 200 is pressed by the side of the aluminum member 2 0 1 , the melting point of the Ilu element 20 1 is lower than the bright point of the copper element 2 0 2 , the inscribed element 2 〇 1 and the copper element The coincident surface of 2 0 2 reaches the eutectic temperature (5 4 8 °C) or more necessary for bonding

2036-5808-PF(Nl).ptd 第62頁 12591172036-5808-PF(Nl).ptd Page 62 1259117

時，鋁元件20 1的抗形變強度就會變得較小，而使來自接 合治具203的壓力無法充分地傳達至鋁元件2〇1與銅元件 202的重合面，而容易發生接合不良。另一方面，將接合 治具203壓入熔點高於鋁元件2〇1的銅元件2〇2之側時，在 鋁元件201與銅元件202的重合面達到接合所必要的共晶溫 度以上時，銅元件202可以保持比較大的抗形變強度，可 使來自接合治具203的壓力充分地傳達至鋁元件2〇1與銅元 件202的重合面，而使兩元件間的縫隙消《，而 強度的接合。At this time, the deformation resistance of the aluminum member 20 1 becomes small, and the pressure from the bonding jig 203 is not sufficiently transmitted to the overlapping faces of the aluminum member 2〇1 and the copper member 202, and joint failure is likely to occur. On the other hand, when the bonding jig 203 is pressed into the side of the copper element 2〇2 whose melting point is higher than the aluminum element 2〇1, when the overlapping surface of the aluminum element 201 and the copper element 202 reaches the eutectic temperature necessary for bonding, The copper member 202 can maintain a relatively large deformation strength, and the pressure from the bonding fixture 203 can be sufficiently transmitted to the overlapping surface of the aluminum member 2〇1 and the copper member 202, and the gap between the two members can be eliminated. Bonding of strength.

以上述的方法將鋁元件2〇1與銅元件2〇2重合而摩捧震 動接合時，較好為由下式（A)求出接合時接合治具2〇3(治 具本體203a)轉動的圓周速率1^ (m/min ): 25 0 $ 20 0 0 .................. * ..................j 接合時接合治具203的圓周速率小於25〇 m/min時，4 合治具203與銅元件202之摩擦接觸所產生的熱量就過小 2銅：件202與紹元件2〇1的重合面的溫度過低，而導】 〇 ^义。另一方面，接合時接合治具203的圓周速率大 吝在的埶旦丄 與銅元件202之摩擦接觸戶 產生的熱里就會大過所必要的 ΛΑ ^ Ab 〇 , 受幻不僅僅疋使接合治具2 0 3When the aluminum element 2〇1 and the copper element 2〇2 are overlapped by the above-described method and the vibration is joined by the vibration, it is preferable to obtain the rotation of the joint jig 2〇3 (the jig body 203a) at the time of joining by the following formula (A). The circumferential rate of 1^ (m/min): 25 0 $ 20 0 0 .................. * .............. ....j When the circumferential speed of the joint jig 203 is less than 25〇m/min, the heat generated by the frictional contact between the 4-clamp 203 and the copper element 202 is too small. 2 Copper: Pieces 202 and elements 2〇 The temperature of the coincident surface of 1 is too low, and the guide is 〇^. On the other hand, at the time of joining, the circumferential speed of the joining jig 203 is greater than the friction generated by the frictional contact between the copper element 202 and the copper element 202, which is greater than the necessary ΛΑ ^ Ab 〇, and the illusion is not only caused by Joint fixture 2 0 3

的驅動此1知失會變大，並使盥人二 9 η 9 αα ώ： ^ α /、接口 /口 /、203 接觸的銅元 件202的>皿度會局部過高，導致 使接合治具203的壓岸力盔、$古ν : I形而 雨开杜η Η技 無充分地傳達至重合面導致在 ,Χ 250 20 0Π m/ 因此，可以瞭解接合時接合治具203 MZbU 〜ZUUU m/min 的圓届 #、玄，± 幻圓周速率轉動時，接合治具203與銅The drive will become larger, and the thickness of the copper component 202 in contact with the 二人2 9 η 9 αα ώ: ^ α /, interface / port /, 203 will be too high, resulting in the bonding With a 203 pressure shore helmet, $古ν: I-shaped and rain-opening η Η 无 无 无 无 无 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 203 203 203 203 203 203 203 203 203 203 203 203 203 203 203 m/min round #, 玄, ± phantom circular speed rotation, joint fixture 203 and copper

1259117 五、發魏明（58) '---- 元件202之摩擦接觸所產生的熱量為恰好適當，而能夠行 良好的接合。 又，將銘元件201與銅元件202重合而摩擦震動接合 ，合^，接合治具2〇3(治具本體2〇3〇在銅元件2〇2的 .03x a ^0. 3χ 表面壓入ϊα (m)較好為由下式（6)求出·· (Β) • · · · · · · · · · · ·,., 其中t為重合部中的銅元件的厚度（m)。 接/時接合治具203在銅元件2 02表面的壓入量α小於 • 0 31牯銅元件2 0 2與鋁元件2 0 1的重合面中會殘留縫隙 而導致接合不良。另一方面，厭Λ胃i 曰汊㈤縫I永 _ 为 万面壓入1 α大於〇· 3t時，雖麸 銅元件202與銘元件2〇1的曹人而由丁 a …、 汁乙in的垔口面中不會殘留縫隙， 的接合治具203的壓入量合在銦开彼9Λ〇 μ * ^ S八里曰在銅兀件2〇2的表面殘留顯著的1259117 V. Wei Ming (58) '---- The heat generated by the frictional contact of component 202 is just right, and can be well joined. Moreover, the inscription element 201 and the copper element 202 are overlapped and frictionally vibrated, and the bonding fixture 2〇3 (the fixture body 2〇3〇 is pressed into the .03x a ^0. 3χ surface of the copper element 2〇2) Ϊα (m) is preferably obtained from the following formula (6): (Β) • · · · · · · · · · · ·, where t is the thickness (m) of the copper element in the overlapping portion. On the other hand, the pressing amount α of the joining/fixing jig 203 on the surface of the copper member 902 is smaller than • 0 31, and a gap remains in the overlapping surface of the copper member 2 0 2 and the aluminum member 2 0 1 . Λ Λ stomach i 曰汊 (five) seam I _ _ for the surface pressing 1 α greater than 〇 · 3t, although the bran copper component 202 and the Ming component 2 〇 1 Cao people by Ding a ..., juice B in the mouth There is no gap left in the surface, and the pressing amount of the bonding jig 203 is in the range of 9 Λ〇μ * ^ S 曰 曰 曰 on the surface of the copper 〇 2 〇 2

凹痕，導致元件的指生。屮 社人士 t ^ J 一 相失因此，接合時接合治具203在銅 兀件202表面的壓入晋“An m+i、/ L η 。 1八里α在以上、〇·3ΐ以下時，接人 治具203的壓應力為正将镝合沾你 _ 备 按口 一从ΟΛΟ t 為正好適s的值，可以瞭解就可以在銅 兀件202與鋁元件2〇1的番人却丁立L 你 ^ ^ 1的重合部不產生縫隙的情況下完成接 合，亦可以縮小銅元件2〇2表面的凹痕。 凡成接 ^ ί抹將^ 2件201與銅元件2 〇2重合而摩擦震動接合 時’接a時，接合治具2〇3(治具本體⑼ 的表面移動的行進速率乂 , ^ L /耆扪疋件202 出· ％迷半V Cm/min·)較好為由下式（C)求 〇. 1 ^R/(5. Οχ ι〇7χ t2)......... 其"為接合時接合治具的圓周速率.:..........(C) t為重合部中的銅凡件的厚度（m)。 五、發明說明（59) 其中接合時接合治具203的圓周速率變大時，因接 合治具203與鋼元件2〇2的摩擦接觸所產生的熱量亦會變 合治具203的行進速率V較高時，重合部二能保 捋疋的溫度，而銅元件202的厚度變大時，重八部要達 以上就比較費時，若此時接合治具：的行 進速率過大犄，在重合部的溫度達到一定溫度以上之前， 接合治具203就已通過，京尤會導致接合不良的問題。而者 订良好的摩擦震動接合時，接合治具2〇3的行進速率v、只 元件的厚度Μ須要相互調節。而實驗結果係 :滿足V$R/(5.0x 1〇7χ t2)時，能夠有良好的接合。 另一方面，由當接合治具203的行進速率v過小時，合 低接合效率的觀點，實驗結果係確認了滿足〇.丨二， 以得到較好的接合效率。 、 ΊΓ 2金屬元件的摩擦震動接合並不限於將 =合並接合的情況，可以廣泛地適用於各金屬以 :ΐ二ϊ ΐ合。而上述金屬元件的形狀’尸'要在相互重2 之後此夠使接合治具壓入就可以。更者，4合的 ： 的數量也不限於二個，三個以上亦可。 、’屬凡件 例如，在第10圖中，係將三個金屬元件（5〇〇〇系的 兀件201、1〇〇〇系的鋁元件2〇1，、銅元件2〇2)相互重人 置，將接合治具203的治具本體2，壓入三個金屬元;中 熔點最高的銅元件202之側，而為摩擦震動接合。/ 考慮到接合時各金屬元件的要達到一既定溫度以上， 時各金屬元件的抗形變強度對來自接合治具的壓應力傳^A dent that leads to the fingering of the component.屮 人士 t ^ ^ t 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合The compressive stress of the person's jig 203 is the same as the value of the 按 备 备 一 一 为 为 为 为 为 为 为 为 为 为 为 为 为 为 为 为 为 为 为 为 为 为 为 为 为 为 , , , , , 202 202 202 202 202 202 If the overlap of the ^ ^ 1 is completed without seams, the dents on the surface of the copper element 2〇2 can be reduced. Wherever the connection is made, the 2 pieces 201 and the copper element 2 〇2 are overlapped and rubbed and vibrated. When joining, when joining a, the joining jig 2〇3 (the traveling speed of the surface movement of the jig body (9) 乂, ^ L / 202 202 · · % 迷 半 V Cm / min ·) is better Formula (C) seeking 〇. 1 ^R/(5. Οχ ι〇7χ t2)......... Its " is the circumferential velocity of the jig when joining........ (C) t is the thickness (m) of the copper member in the overlapping portion. V. Description of the Invention (59) In the case where the circumferential rate of the joining jig 203 at the time of joining becomes large, the jig 203 and the steel member are joined The heat generated by the friction contact of 2〇2 will also be combined When the traveling speed V of the member 203 is high, the temperature of the overlapping portion 2 can be maintained, and when the thickness of the copper member 202 is increased, it takes a relatively long time to reach the upper portion of the weight of the copper member 202. If the temperature of the overlapping portion reaches a certain temperature or higher, the joining jig 203 has passed, and the Kyobe will cause a problem of poor joint. When the frictional vibration is engaged, the running speed of the jig 2〇3 is set. v. The thickness of only the components need not be adjusted to each other. The experimental result is that when V$R/(5.0x 1〇7χ t2) is satisfied, good bonding can be achieved. On the other hand, the traveling speed of the bonding jig 203 is obtained. v is too small, and the joint efficiency is low. The experimental results confirm that the 接合.丨2 is satisfied to obtain better joint efficiency. 摩擦 2 The frictional vibration joint of the metal component is not limited to the case of = merged joint, It is widely applicable to each metal: ΐ ϊ 。 。 。 。 。 。 。 。 。 。 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述 上述Not limited to two, three or more For example, in Fig. 10, three metal components (5 〇〇〇 兀 201, 1 铝 aluminum element 2 〇 1, copper element 2 〇 2) The two bodies are joined together, and the jig body 2 of the jig 203 is pressed into three metal elements; the side of the copper element 202 having the highest melting point is joined by friction and vibration. / Considering the metal elements of the joint When the temperature is above a predetermined temperature, the deformation strength of each metal component is transmitted to the compressive stress from the bonding fixture.

12591171259117

五、發明說明（60) 至各金屬元件的接合面之傳達效率的影響，較好 一 金屬元件依熔點的高低順序（此處的順序為鋼元件·、2 1 了個 1 〇 0 0系的鋁元件2 0 1 ’、 5 0 0 〇系的鋁元件2 〇 i)重人 、 並將接合治具203壓至三個金屬元件中炫點最高二二 件（此處為銅元件2 〇 2 )之側，而為摩擦震動接合。其7° 三個金屬元件為銅、鋁、鎂時，較好為以銅元件/、銘^元， 件、鎮元件的順序重合，將接合治具壓入銅元件之側Z /一 摩擦震動接合。 仃 以上，係已說明金屬元件的摩擦震動接合的基本架 構’接下來說明應用上述摩擦震動接合之散熱元件的製造 方法。 第11 A〜11 B圖及第1 2 A〜1 2 B圖係用以說明本發明散熱元 件的製造方法之第一實施型態的圖式。第11A〜11β圖係''顯 示元件配置步驟的正面剖面圖、第丨2 a圖係顯示摩擦震動 接合步驟的正面剖面圖、第丨2B圖係顯示間隔物脫離步驟 之正面剖面圖。又，第1 3圖為一分解斜視圖，係顯示本發 明之散熱元件製造用治具之一實施型態。 在本實施型態中，首先如第11 A圖所示，將鋁製的板 狀元件之鰭片204與鐵製的板狀元件之間隔物205交互並 列’並立設配置於散熱元件製造用治具2 1 〇之元件設定部 212。 散熱元件製造用治具2 1 〇，如第1 3圖所示，係由上面 是開放的箱型治具本體2 π、置放於元件設定部2 1 2且可以 滑動的壓板213、緊閉螺栓214、基板固定板21 5、與緊閉V. INSTRUCTION OF THE INVENTION (60) The influence of the communication efficiency on the joint surface of each metal element is preferably in the order of the melting point of the metal element (the order in this case is steel element, 2 1 1 〇 0 0 system) Aluminum component 2 0 1 ', 5 0 0 〇 aluminum component 2 〇i) Heavy, and the bonding fixture 203 is pressed into three metal components, the highest point is two or two (here, copper component 2 〇 2 ) on the side, but for frictional vibration engagement. When the three metal components of 7° are copper, aluminum or magnesium, it is preferable to overlap the copper component/, the element, the component, and the town component, and press the bonding fixture into the side of the copper component. Engage.仃 Above, the basic structure of the frictional vibration joint of the metal member has been described. Next, a method of manufacturing the heat dissipating member to which the above frictional vibration engagement is applied will be described. Figs. 11A to 11B and Figs. 1 2A to 1 2B are diagrams for explaining the first embodiment of the method of manufacturing the heat dissipating member of the present invention. The front cross-sectional view of the 11A to 11β-picture display ''display element arrangement step, the second side view showing the frictional vibration bonding step, and the second side view showing the spacer disengagement step. Further, Fig. 13 is an exploded perspective view showing an embodiment of the jig for manufacturing a heat dissipating member of the present invention. In the present embodiment, first, as shown in FIG. 11A, the fins 204 of the plate-like element made of aluminum are alternately arranged with the spacers 205 of the plate-like elements made of iron, and are vertically disposed and disposed in the manufacturing process of the heat-dissipating elements. The component setting unit 212 has 2 1 〇. The jig for manufacturing the heat dissipating member 2 1 〇, as shown in Fig. 3, is a box-shaped jig body 2 π which is open from the top, and is placed on the element setting portion 2 1 2 and is slidable by a pressure plate 213 and tightly closed. Bolt 214, substrate fixing plate 21 5, and tightly closed

2036-5808-PF(Nl).ptd 第66頁 1259117 五、發明說明（61) 螺栓2 1 6所構成。其中元件設定部2 i 2係形成於治具本體 2 1 1内部之凹部；緊閉螺栓2丨4係以與壓板2丨3直交的方向 貫穿治具本體21 1的壁體，且其前端部係固著於壓板21 3的 背面’頭部則位於治具本體2 1 1的壁體的外側；基板固定 板2 1 5係以與壓板2 1 3平行的方向，架設於、並橫跨治具本 體2 1 1的壁體的上部；緊閉螺栓2丨6係用以將基板固定板 215的兩端固定於治具本體211的壁體的上部。 而在此處’各鰭片2〇4與各間隔物205以交互立設的方 式並排於元件設定部2 1 2，將緊閉螺栓2 1 4鎖緊而藉由壓板 213的固定，使上述各鰭片2〇4與各間隔物2〇5彼此之間在 相互緊密接觸之下固定。此時，因為鰭片2〇4與間隔物2〇5 疋全體等南的’各鰭片2〇4的上面（基端面）與各間隔物2〇5 的上面（基端面）係形成一水平面。 接下來’如第11 β圖所示，在配置於元件設定部2 1 2的 各鰭片204及各間隔物2〇5的上面，搭載銅製的板狀元件之 基板206及其上方的基板固定板215，並將各鰭片204及各 間隔物2 0 5的上部（基端部）嵌入形成於基板固定板2丨5的下 面之凹槽215a，而固定各鰭片2〇4及各間隔物2〇5，使其無 $朝其長度方向（與紙面垂直的方向）移動。更者，在此狀 態下’由基板固定板2 1 5兩端的螺絲孔2 1 5b，朝向治具本 體211的壁體上面的螺絲孔2Ua，將緊閉螺拴216旋緊，而 將基板20 6固定於鰭片2〇4及間隔物205的上部。又，雖然 圖式中未繪不，將基板2 〇 6固定而使其無法朝其寬度方向 (紙面的左右方向）移動是必要的。此處，藉由鰭片2〇4及 第67頁 !259117 明說明（62) -------1 間隔物205的基端面與基板206的下面（—表面）直接接觸， 而完成將籍片204與間隔物205立設配置於基板2〇6 驟。 少 而如第1 1 A、1 1 B圖所示的元件配置步驟，並非必要的 限制，只要在最後將各鰭片204與各間隔物2〇5如第ιΐβ圖 所示配置於既定的位置，並不限制其順序。因此，亦可 以是例如將相互之間具有間隔的各鰭片2〇4(或各間隔物 05)配置好，在將基板2〇 6固定於其基端面之後，最後在 鰭片2 0 4 (或間隔物2 0 5 )之間分別***間隔物2 〇 5 (或鰭片 2 0 4 )。 接下來，如第12A圖所示，將以轉動軸2〇3b為中心以⑩ 圓周方向高速轉動的接合治具2〇3之治具本體2〇3a的圓周 ，垂直壓至基板20 6之另一表面20 6 a，並使接合治具2〇3沿 著基板206之另一表面2 〇6a移動，使鰭片2〇4接合於基板 206。 此時，因為構成基板2〇6的銅的熔點高於構成鰭片2〇4 的鋁，鰭片204與基板20 6之交界面的溫度上升到接合時所 必要的溫度（共晶溫度：548°C)時，基板2〇6仍能保持高的 抗，變強度、，使接合治具20 3的壓應力能夠有效率地傳達 至交界面，並且能行鰭片2〇4與基板2〇6之間無縫隙的高強 度接合。 又’由於構成間隔物2 〇 5的鐵的炼點高於構成鰭片2 〇 4 的鋁及構成基板206的銅，接合治具2〇3的圓周速率與行進 速率設定在既定的範圍時，間隔物2〇5不會與鰭片2〇4及基2036-5808-PF(Nl).ptd Page 66 1259117 V. INSTRUCTIONS (61) Bolts 2 1 6 constitutes. The component setting portion 2 i 2 is formed in a concave portion inside the jig body 21 1 ; the closing bolt 2丨4 penetrates the wall of the jig body 21 1 in a direction orthogonal to the pressure plate 2丨3, and the front end portion thereof The head portion of the pressure plate 21 3 is fixed to the outside of the wall of the fixture body 21 1 ; the substrate fixing plate 2 15 is erected in a direction parallel to the pressure plate 2 1 3 The upper portion of the wall body having the body 2 1 1; the closing bolts 2丨6 are used to fix both ends of the substrate fixing plate 215 to the upper portion of the wall of the jig body 211. Here, the respective fins 2〇4 and the spacers 205 are arranged side by side in the element setting portion 2 1 2, and the closing bolts 2 1 4 are locked and fixed by the pressure plate 213. Each fin 2〇4 and each spacer 2〇5 are fixed to each other in close contact with each other. At this time, the upper surface (base end surface) of the fins 2〇4 and the upper surface (base end surface) of each of the spacers 2〇5 in the south of the fins 2〇4 and the spacers 2〇5疋 are formed into a horizontal plane. . Next, as shown in the eleventh graph, the substrate 206 on which the copper plate-shaped device is mounted and the substrate on the upper surface are placed on the upper surface of each of the fins 204 and the spacers 2〇5 disposed on the element setting unit 2 1 2 The plate 215 has the upper portions (base end portions) of the fins 204 and the spacers 205 embedded in the recesses 215a formed on the lower surface of the substrate fixing plate 2丨5, and the fins 2〇4 and the spacers are fixed. The object 2〇5 is such that it does not move toward its length (direction perpendicular to the plane of the paper). Furthermore, in this state, the screw holes 2 1 5b at both ends of the substrate fixing plate 2 1 5 are screwed toward the screw holes 2Ua on the wall surface of the jig body 211, and the closing screw 216 is screwed, and the substrate 20 is screwed. 6 is fixed to the upper portion of the fin 2〇4 and the spacer 205. Further, although not shown in the drawings, it is necessary to fix the substrate 2 〇 6 so as not to move in the width direction (the horizontal direction of the paper surface). Here, the base end faces of the spacers 205 are directly in contact with the lower surface (the surface of the substrate 206) by the fins 2〇4 and 67, 259117, and the completion is completed. The piece 204 and the spacer 205 are erected on the substrate 2〇6. The component arrangement steps as shown in FIGS. 1 1 A and 1 1 B are not necessarily limited, as long as the fins 204 and the spacers 2〇5 are disposed at a predetermined position as shown in the ιΐβ diagram. , does not limit its order. Therefore, for example, the fins 2〇4 (or the spacers 05) having a space therebetween may be disposed, after the substrate 2〇6 is fixed to the base end surface thereof, and finally at the fins 2 0 4 ( Or spacers 2 〇 5 (or fins 2 0 4 ) are inserted between spacers 2 0 5 ), respectively. Next, as shown in Fig. 12A, the circumference of the jig body 2〇3a of the joining jig 2〇3 which is rotated at a high speed in the circumferential direction around the rotating shaft 2〇3b is vertically pressed to the other of the substrate 20 6 A surface 20 6 a moves the bonding fixture 2〇3 along the other surface 2 〇 6a of the substrate 206 to bond the fins 2〇4 to the substrate 206. At this time, since the melting point of the copper constituting the substrate 2〇6 is higher than that of the aluminum constituting the fin 2〇4, the temperature at the interface between the fin 204 and the substrate 206 rises to the temperature necessary for bonding (eutectic temperature: 548). At °C), the substrate 2〇6 can maintain high resistance and strength, so that the compressive stress of the bonding fixture 203 can be efficiently transmitted to the interface, and the fins 2〇4 and the substrate 2〇6 can be performed. High-strength joints without gaps. Further, since the refining point of the iron constituting the spacer 2 〇 5 is higher than the aluminum constituting the fin 2 〇 4 and the copper constituting the substrate 206, the circumferential rate and the traveling rate of the bonding jig 2 〇 3 are set within a predetermined range. Spacer 2〇5 will not be with fins 2〇4 and base

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板206接合’而能夠容易地僅接合基板206與鰭片204。 最後’將散熱元件製造用治具21 〇的緊閉螺栓2 1 6放 鬆’而將基板固定板2 1 5從治具本體2 11取下，並將緊閉螺 栓214放鬆，解除壓板213對鰭片2〇4及間隔物2〇5的固定， 如第12B圖所示，將基板206向上移動。如此一來，僅有接 合於基板20 6的各鰭片204 —起向上移動，而將各間隔物 205留在散熱元件製造用治具21〇之元件設定部212。如此 可以以間隔物脫離步驟簡單地移除各間隔物2 〇 5，而可以 製造出如第14圖所示之散熱元件25 0，其中散熱元件25〇係 由相互間隔的複數個鋁製鰭片204立設接合於銅製基板2〇6 之一表面。 藉由上述的散熱元件的製造方法，由於各鰭片2〇4之 間分別置入各間隔物2 0 5 ’可以正確地保持鰭片2 〇 4相互之 間隔’並可以決定相互以既定間隔隔開狀態的各鰭片2〇4 之並列位置。又，間隔物205係補強了鰭片2〇4，摩捧震動 接合步驟時就不會有彎曲應力作用在鰭片2〇4，鰭片1〇4的 厚度亦可以變得非常薄。又，只要變更間隔物2 〇 5的厚 度’就能夠任意地變更鰭片204之配置間隔，更加上一併 變更縛片204的高度的情況下’特別是將薄板厚、高板高 的各結片204以短間隔立設接合於基板2〇6之一表面，就可 以製造具有高高度/間隔比（例如高度/間隔比超過2〇)的散 熱元件250。當然，間隔物205並不限定為金屬製，考量到 強度、加工性等因素時，亦可以使用陶瓷或是其他任意材 質；又亦可以適宜地決定間隔物2〇5的形狀。而在元件配The board 206 is joined' to enable easy bonding of only the substrate 206 and the fins 204. Finally, 'the loosening bolt 2 1 6 of the jig 21 for heat dissipation element manufacturing is loosened', the substrate fixing plate 2 1 5 is removed from the jig body 2 11 , and the closing bolt 214 is loosened, and the pressing plate 213 is released from the fin. The sheet 2〇4 and the spacer 2〇5 are fixed, and as shown in Fig. 12B, the substrate 206 is moved upward. As a result, only the fins 204 that are bonded to the substrate 205 are moved upward, and the spacers 205 are left in the component setting portion 212 of the jig 21 for heat dissipation element manufacturing. Thus, the spacers 2 〇 5 can be simply removed in the spacer detachment step, and the heat dissipating member 25 0 as shown in FIG. 14 can be manufactured, wherein the heat dissipating member 25 is composed of a plurality of aluminum fins spaced apart from each other. 204 is erected to one surface of the copper substrate 2〇6. According to the above-described method for manufacturing a heat dissipating member, since the spacers 2 0 5 ' are respectively placed between the fins 2 to 4, the fins 2 and 4 can be accurately kept at the same time and can be determined to be spaced apart from each other by a predetermined interval. The parallel position of each fin 2〇4 in the open state. Further, the spacer 205 reinforces the fins 2〇4, and no bending stress acts on the fins 2〇4 when the vibration bonding step is performed, and the thickness of the fins 1〇4 can be made very thin. Moreover, if the thickness of the spacers 2 〇 5 is changed, the arrangement interval of the fins 204 can be arbitrarily changed, and when the height of the splicing sheets 204 is changed, the thickness of each of the thin plates and the high slabs is particularly high. The sheet 204 is erected to the surface of one of the substrates 2 to 6 at a short interval, so that the heat dissipating member 250 having a high height/space ratio (for example, a height/space ratio exceeding 2 Å) can be manufactured. Of course, the spacer 205 is not limited to a metal. When considering factors such as strength and workability, ceramics or any other material may be used; and the shape of the spacer 2〇5 may be appropriately determined. And in the component

1259117 五、發明說明（§4) 置步驟中將各鰭片204立設配置於基板2〇6的一表面時，各 間隔物205的基端面雖然亦可以不與基板2〇6的該表面接 觸’而考慮到摩擦震動接合步驟時來自接合治具2Q3的壓 應力作用為對雜片2 0 4的彎曲應力時，為了提高間隔物2 〇 5 對鰭片2 0 4的補強效果，較好為如上述實施型態一般，準 備同高的各間隔物205與各鰭片204，而使各間隔物2〇5的 基知面與基板2 0 6的該表面接觸。 藉由以上之散熱元件的製造方法 又 Ώ马不需要女1259117 V. INSTRUCTION DESCRIPTION (§4) When the fins 204 are erected on one surface of the substrate 2〇6 in the step, the base end faces of the spacers 205 may not be in contact with the surface of the substrate 2〇6. When the compressive stress from the bonding jig 2Q3 is applied to the bending stress of the chip 2 0 4 in consideration of the frictional vibration bonding step, in order to improve the reinforcing effect of the spacer 2 〇 5 on the fin 204, it is preferably As in the above-described embodiment, each of the spacers 205 and the fins 204 having the same height is prepared, and the pedestal surface of each spacer 2〇5 is brought into contact with the surface of the substrate 206. With the above manufacturing method of the heat dissipating component,

銲接時一般在真空爐中加熱並維持一既定時間，而能夠來 各鱗片2 0 4與基板接合，可以削減製造成本。而，在提升 基板206與各鰭片204之接合強度的同時，亦提升散熱元利 250的散熱性能的情況，就如第15A圖所示，較好為&接名 治具203在基板206的裏面（基板2〇6的另一表面）的移動能° 夠遍及各鰭片204的基端面的全面，使得各鰭片2〇4能夠^ 全地接合於基板206。（第15A〜15C圖中以斜線標示的區域 係表不接合治具203的移動轨跡）另一方面，在重視接人 本的削減時，例如如第丨5B圖所示，亦可以移動接人'口具 203，而未遍及各鰭片204的基端面的全面，僅遍及口各y、 204基端面的一部份。又，將基板2〇6與各鰭片2〇4擗 動接合時，同時也將基板2〇6與各間隔物2〇5接合時， 隔物脫離步驟中，雖然可以使用任何的方法將各間隔物曰 205從基板206與各鰭片204移除；在接合治具2 體203a的寬度小於歸請4的厚度時，如第况圖所 好為以基板206與各間隔物2〇5不會接合的&跡（在圖式中 1259117 五、發明說明（65) 為各錄片204正上方的區域），來移動接合治具203 ;又， 僅僅使各鰭片204與基板206接觸，而使各間隔物2〇5不與 基板206接觸的配置亦可；或是，如上述的實施型態一 般’使用熔點高於鰭片2 0 4及基板2 0 6之熔點的間隔物2 0 5 時’就與接合治具2 0 3的移動執跡無關，各間隔物2 〇 5不會 接合於基板206與鰭片204時，即使摩擦震動接合後，各間 隔物2 0 5亦不會接合於基板2 〇 6與鰭片2 〇 4，而使間隔物脫 離步驟的程序可以省略，而能夠削減製造成本。又，因接 合治具203的壓應力而在基板2〇6之另一表面2〇仏殘留較大 凹痕日可’可將基板2 〇 6的表面2 0 6 a切削掉一既定厚度，而 能夠得到具美麗外觀的散熱元件2 5 〇。 又，為了簡化摩擦震動接合步驟，如第丨6圖所示，才 可以使用在轉動軸2 〇 3 b的周邊以一既定間隔固定有複數$ 治具本體203a的接合治具2〇3,取代接合治具2〇3。此時， 可以同時對複數個區域施以摩擦震動接合，可以縮斷接< 呀所需要的時間，因而更加提昇效率。 嫂而述方法所製造的散熱元件2 50的各鰭片204的1 知面更與另-基板2〇6’接合時，如第 造出將相互間陪沾女# U n d \ )] J Λ % 韓片分別摩擦震動接合於基板 206、206的散熱元件。 第1 8A第』7所圖-所不趾之散熱元件25 0、製造順序$第一樣態女 :物205 :於：相互間隔的各.鰭片2°4之間分別置入“ 置某板206、Mfi片2〇4的兩端（圖式中的上下端）分別Si " 6 ，分別將接合治具2〇3、203壓至基板2〇|In the case of welding, it is generally heated and maintained in a vacuum furnace for a predetermined period of time, and the scales can be joined to the substrate by the respective scales, thereby reducing the manufacturing cost. However, while the bonding strength between the substrate 206 and the fins 204 is improved, the heat dissipation performance of the heat dissipation element 250 is also improved. As shown in FIG. 15A, it is preferable that the fixture 203 is on the substrate 206. The movement of the inside (the other surface of the substrate 2〇6) can be spread over the entire end faces of the fins 204 so that the fins 2〇4 can be fully bonded to the substrate 206. (The area indicated by the slanted lines in the 15th to 15th drawings indicates that the movement trajectory of the jig 203 is not attached.) On the other hand, when the reduction of the access is emphasized, for example, as shown in FIG. 5B, it is also possible to move the connection. The person's mouthpiece 203 does not extend over the entire base end face of each of the fins 204, but only over a portion of the base end faces of the y, 204 bases. Further, when the substrate 2〇6 is slidably joined to each of the fins 2〇4, and the substrate 2〇6 is also joined to each of the spacers 2〇5, the spacer is detached from the step, and any method can be used. The spacers 205 are removed from the substrate 206 and the fins 204; when the width of the bonding fixture 2 body 203a is smaller than the thickness of the application 4, as shown in the conditional diagram, the substrate 206 and the spacers 2〇5 are not The joints & traces (in the figure 1259117, the invention description (65) is the area directly above each of the sheets 204), move the joint jig 203; again, only the fins 204 are in contact with the substrate 206, The arrangement in which the spacers 2〇5 are not in contact with the substrate 206 may be used; or, as in the above-described embodiment, generally, a spacer 20 having a melting point higher than the melting point of the fins 404 and the substrate 205 is used. At 5 o'clock, regardless of the movement of the bonding fixture 203, when the spacers 2 〇 5 are not bonded to the substrate 206 and the fins 204, even after the frictional vibration is joined, the spacers 2 0 5 will not The process of bonding the substrate 2 〇6 and the fins 2 to 4 and removing the spacers can be omitted, and the manufacturing cost can be reduced. Further, due to the compressive stress of the bonding jig 203, a large indentation remains on the other surface 2 of the substrate 2〇6, and the surface 2 0 6 a of the substrate 2 6 can be cut by a predetermined thickness. It is possible to obtain a heat-dissipating component with a beautiful appearance of 2 5 〇. Further, in order to simplify the frictional vibration joining step, as shown in Fig. 6, it is possible to use the joining jig 2〇3 in which the plurality of jig bodies 203a are fixed at a predetermined interval around the periphery of the rotating shaft 2 〇3 b. Joint fixture 2〇3. At this time, the frictional vibration joint can be applied to a plurality of regions at the same time, and the time required for the connection can be shortened, thereby improving the efficiency. When the one surface of each of the fins 204 of the heat dissipating component 2 50 manufactured by the method described above is further joined to the other substrate 2〇6', the first pair will be intertwined with each other. # U nd \ )] J Λ The % Korean sheets are frictionally joined to the heat dissipating elements of the substrates 206, 206, respectively. The first heat dissipation element 25 0, the manufacturing order $ the same state female: object 205: in: each of the fins 2 ° 4 between each other placed Both ends of the plate 206 and the Mfi piece 2〇4 (the upper and lower ends in the drawing) are respectively Si " 6 , and the bonding jigs 2〇3, 203 are respectively pressed to the substrate 2〇|

2036-5808-PF(Nl).ptd 第71頁 1259117 五、發明說明（邸） 的背面（圖式中的上面）以及基板2 〇6，的背面（圖式中的下 面），同時作摩擦震動接合。而在最後，將各間隔物 側面（垂直紙面的方向）取出。 散熱元件250’的製造順序的第二樣態如第18B圖所 示，將相互間隔的各鰭片204之間分別置入各間隔物2〇5， 再於各鰭片204的兩端（圖式中的上下端）分別配置基板 206、206’ ，在一側將接合治具203向下壓至基板2〇6的背 面（圖式中的上面）而作摩擦震動接合。之後保持各元件的 配置關係，將鰭片204、間隔物205、基板206、與基板 2 0 6上下反轉，如第1 8 C圖所示，在另一側將接合治具2 〇 3 向下壓至基板206,的背面（圖式中的上面）而作摩擦震動接 合。而在最後，將各間隔物205由側面（垂直紙面的方向） 取出。 政熱元件2 5 0的製造順序的第三樣態如第1 g A圖所 示，將相互間隔的各鰭片204之間分別置入各間隔物2〇5， 在僅僅於各鰭片204的一端（圖式中的上端）配置基板2〇6， 在一側將接合治具203向下壓至基板206的背面（圖式中的 上面）而作摩擦震動接合。之後保持各元件的配置關係， 將鰭片204、間隔物205、與基板2〇6上下反轉，如第i9B 所示’於各鰭片204的另一端（圖式中的上端）配置基板° 206’ ’更如第i9C圖所示’在另一側將接合治具2〇3向 至基板20 6’的背面（圖式中的上面）而作摩擦震動接合。 在最後，將各間隔物205由側面（垂直紙面的方向）取出。 散熱元件250,的製造順序的第四樣態如第19D圖所 1259117 五、發明說明（67) 不’將相互間隔的各鰭片2〇4之間分別置入各間隔物2〇5， 在僅僅於各鰭片204的一端（圖式中的上端）配置基板2〇6， 在一側將接合治具203向下壓至基板206的背面（圖式中的 上面）而作摩擦震動接合。接下來，如第19E圖所示，將基 板206與鰭片204向上移動，將基板2〇5取出，而先完成散 熱兀件250。之後，將散熱元件25〇上下反轉，如第ΐ9ρ圖 所示，在各鰭片204之間分別置入各間隔物2〇5，於各鰭片 204的另一端（圖式中的上端）配置基板2〇6，。更如第19〇圖 所示，在另一側將接合治具2〇3向下壓至基板2〇6，的背面 (圖式中的上面）而作摩擦震動接合。而在最後，將各間隔 物2 0 5由側面（垂直紙面的方向）取出。 接下來說明本發明散熱元件的製造方法之第二實施型 態。本實施型態與上述第一實施型態約略相同，而不同點 在於不使用散熱元件21 〇，而使用間隔物治具2 2 〇以 。 間隔物治具220，士口第20A圖所示，係為將各間隔物 205的則端部（圖式甲的下端部）相互連結的斷面為梳子形 狀的治具。而在元件配置步驟中，將間隔物治具^ 丄 間隔物205向上放置並固定後，如第2〇B圖所示 韓片204***各間隔物2〇5之間，更如第2〇c圖所示 鰭片204的上面（基端面）與基板2〇6的下面（一表面、 將基板206固定”亦可將第_、m圖 )接觸’ ;2二固間隔物治具220的上面之後，再由側面(= 面垂直方向）將各間隔物2〇5***。 ^、、、、氏 如第_圖所示，在接下來的摩擦震動接合步驟中， 第73頁 2036.5808-PF(Nl).ptd 1259117 發明說明（储） 將接合治具203壓至基板206的上面（另一表面），將基板 206摩擦震動接合於各鰭片204。 如第20E圖所示，在最後的間隔物脫離步驟中，將基 板206及接合於其上的各鰭片204向上移動，而移除間隔物 治具220。 如本實施型態使用間隔物治具220時，就不需要使用 散熱元件製造用治具2 1 〇，其優點在於可以省略配置間隔 物2 0 5的程序。 接下來說明本發明散熱元件的製造方法之第三實施裂 態。本實施型態與上述第一實施型態約略相同，而不同點 在於元件配置步驟中的鰭片配置步驟以及其後的基板配置 步驟。 而最初的鰭片配置步驟中，如第2 1 A圖所示，各籍片 2 0 4與各間隔物2 0 5交互並列，並立設配置於散熱元件製造 用治具2 1 0之元件設定部2 1 2，此時各間隔物2 〇 5的基端面 分別沒入各鰭片204的基端面之下，而使各間隔物2〇5的基 端面分別低於各結片204的基端面的高度差不大於各間隔 物205的厚度。換言之，各鰭片204的高度係分別高於各間 隔物2 0 5的尚度，且其範圍係在間隔物2 〇 5的厚度範圍内； 各鰭片204的基端面分別較各間隔物2〇5的基端面突出，反 其範圍係在間隔物2 0 5的厚度範圍内。 接下來的基板配置步驟中，如第21B圖所示，在立設 配置於元件設定部2 1 2的各鰭片2 〇 4上，承載基板2 〇 6。然 後如第21C、21D圖所示，藉由朝向鰭片204之向下的壓應2036-5808-PF(Nl).ptd Page 71 1259117 V. The back of the invention (邸) (the top of the figure) and the back of the substrate 2 〇6 (the lower part of the figure), and the friction vibration at the same time Engage. At the end, the sides of each spacer (the direction of the vertical paper) are taken out. In the second aspect of the manufacturing sequence of the heat dissipating component 250', as shown in FIG. 18B, the fins 204 spaced apart from each other are placed between the spacers 2〇5 and the ends of the fins 204 (Fig. In the upper and lower ends of the formula, the substrates 206 and 206' are disposed, and the bonding jig 203 is pressed down to the back surface (the upper surface in the drawing) of the substrate 2〇6 on one side to perform frictional vibration bonding. Thereafter, the arrangement relationship of the respective elements is maintained, and the fins 204, the spacers 205, the substrate 206, and the substrate 206 are vertically inverted, as shown in FIG. 18C, and the bonding jigs 2 〇 3 directions are provided on the other side. The back surface (the upper surface in the drawing) of the substrate 206 is pressed down to perform a frictional vibration joint. At the end, each spacer 205 is taken out from the side (the direction of the vertical paper). The third mode of the manufacturing order of the thermal element 250 is as shown in FIG. 1 g A, and the fins 204 spaced apart from each other are placed in the spacers 2〇5, respectively, in only the fins 204. One end (the upper end in the drawing) is provided with the substrate 2〇6, and the bonding jig 203 is pressed down to the back surface (the upper surface in the drawing) of the substrate 206 on one side to perform frictional vibration bonding. After that, the arrangement relationship of the components is maintained, and the fins 204, the spacers 205, and the substrate 2〇6 are vertically inverted, and the substrate is disposed at the other end of each of the fins 204 (the upper end in the drawing) as shown in the i9th portion. 206'' is as shown in the figure i9C' on the other side of the joining fixture 2〇3 to the back surface of the substrate 20 6' (the upper side in the drawing) for frictional vibration engagement. Finally, each spacer 205 is taken out from the side (the direction of the vertical paper). The fourth aspect of the manufacturing sequence of the heat dissipating component 250 is as shown in FIG. 19D. 1259117. 5. The invention (67) does not place the spacers 2〇4 spaced apart from each other into the spacers 2〇5, respectively. The substrate 2〇6 is disposed only at one end (the upper end in the drawing) of each of the fins 204, and the bonding jig 203 is pressed down to the back surface (the upper surface in the drawing) of the substrate 206 on one side to perform frictional vibration bonding. Next, as shown in Fig. 19E, the substrate 206 and the fins 204 are moved upward, and the substrate 2〇5 is taken out, and the heat radiating element 250 is completed first. Thereafter, the heat dissipating elements 25 are reversed up and down. As shown in FIG. 9p, spacers 2〇5 are placed between the fins 204, respectively, at the other end of each fin 204 (upper end in the drawing). Configure the substrate 2〇6,. Further, as shown in Fig. 19, on the other side, the joining jig 2〇3 is pressed down to the back surface of the substrate 2〇6 (the upper surface in the drawing) to perform frictional vibration joining. At the end, each spacer 250 is taken out from the side (the direction of the vertical paper). Next, a second embodiment of the method of manufacturing the heat dissipating member of the present invention will be described. This embodiment is approximately the same as the first embodiment described above, except that the heat dissipating member 21 is not used, and the spacer jig 2 2 is used. The spacer jig 220 is a jig having a comb shape in which the end portions of the spacers 205 (the lower end portions of the figure A) are connected to each other as shown in Fig. 20A. In the component disposing step, after the spacer jig spacer 205 is placed upward and fixed, as shown in FIG. 2B, the Korean film 204 is inserted between the spacers 2〇5, more like the second 〇c. The upper surface (base end surface) of the fin 204 shown in the figure and the lower surface of the substrate 2〇6 (one surface, the substrate 206 is fixed) may also be in contact with the _, m diagram); 2 the upper surface of the two-solid spacer fixture 220 Then, each spacer 2〇5 is inserted by the side surface (= face vertical direction). ^, , , , , as shown in the figure _, in the next friction and vibration bonding step, page 73, 2036.5808-PF ( Nl).ptd 1259117 DESCRIPTION OF THE INVENTION (Reservoir) The bonding jig 203 is pressed onto the upper surface (the other surface) of the substrate 206, and the substrate 206 is frictionally and vibrationally bonded to each of the fins 204. As shown in Fig. 20E, at the last interval In the object detaching step, the substrate 206 and the fins 204 bonded thereto are moved upward to remove the spacer jig 220. When the spacer jig 220 is used in the embodiment, the heat dissipating component is not required to be manufactured. The jig 2 1 〇 has the advantage that the procedure for configuring the spacer 2 0 5 can be omitted. The third embodiment of the method for manufacturing a heat dissipating component is in the same state as the first embodiment described above, but differs in the fin disposing step in the component disposing step and the subsequent substrate disposing step. In the fin arrangement step, as shown in FIG. 2A, each of the pieces 204 is alternately arranged with each of the spacers 205, and the element setting unit 2 disposed on the jig for manufacturing the heat dissipating element 2 1 0 is erected. 1 2, at this time, the base end faces of the spacers 2 〇 5 are respectively below the base end faces of the fins 204, and the base end faces of the spacers 2〇5 are respectively lower than the heights of the base end faces of the respective tabs 204. The difference is not greater than the thickness of each spacer 205. In other words, the height of each fin 204 is higher than the thickness of each spacer 2 0 5 , and the range is within the thickness range of the spacer 2 〇 5; The base end faces of the spacers 204 are respectively protruded from the base end faces of the spacers 2〇5, and the range thereof is within the thickness range of the spacers 205. In the subsequent substrate arrangement step, as shown in FIG. 21B, the stand is set up. Arranged on each of the fins 2 〇 4 of the component setting portion 2 1 2 to carry the substrate 2 〇 6. Then, as shown in Figs. 21C and 21D, the pressure is directed downward toward the fin 204.

2036-5808-PF(Nl).ptd 第74頁 1259117 五、發明說明（69) -------| 力之作用將各鰭片204的基端部2〇4a(較各間隔物2〇5突出 的部分）彎折並固定在呈斷面L字型的狀態。此時，由於鰭 片204的基端部20 4a的高度在間隔物2〇5的厚度範圍内，被 f折的鰭片204的基端部204a不會相互重疊，而形成平行 於並靠著基板2 06的一表面（圖式中的下表面）的表面。 。接下來’如第22Α圖所示，將以轉動軸2〇3b為中心以 圓周f向高速轉動的接合治具2〇3的治具本體2〇3的圓周面 重直C入基板206的另一表面2〇6a，並使接合治具2〇3 •菩 基板206的表面2〇6a移動，而將各鰭片2〇4的基端部2〇“接 合於基板206。 此時’因為被彎折成直角的鰭片2 0 4的基端部2 〇 4 a形 成沿著基板2 0 6之一表面的面，與第一實施型態比較，係 均加基板2 0 6與鰭片2 〇 4之接觸面積，可使兩者確實地接 合。而藉由本發明，即使鰭片2〇4的厚度非常薄，可以製 造出基板206與各鰭片204已確實地立設接合的散埶元件 250。 最後，如第22B圖所示，將基板2〇6向上移動，僅有已 接合於基板206的各鰭片204 —起向上移動，而將各間隔物 205留在散熱元件製造用治具21〇的元件設定部212，可以 製造出具有彎折的基端部204立設接合於基板206之一表面 _ 的散熱元件2 5 0。 接下來說明本發明散熱元件的製造方法之第四實施型 知°本貝施型態與上述第一實施型態約略相同，而不同點 在於使用斷面凹字型的鰭片構成材23〇取代鰭片2〇4。2036-5808-PF(Nl).ptd Page 74 1259117 V. INSTRUCTIONS (69) -------| The effect of force is to make the base end portion of each fin 204 2〇4a (more than each spacer 2) The protruding portion of the 〇5 is bent and fixed in a state of an L-shaped cross section. At this time, since the height of the base end portion 20 4a of the fin 204 is within the thickness range of the spacer 2〇5, the base end portions 204a of the fins 204 folded by f do not overlap each other, but are formed parallel to and against each other. The surface of a surface (lower surface in the drawing) of the substrate 206. . Next, as shown in Fig. 22, the circumferential surface of the jig body 2〇3 of the joining jig 2〇3 which is rotated at a high speed by the circumference f around the rotating shaft 2〇3b is straightened into the substrate 206. A surface 2〇6a is caused to move the surface 2〇6a of the bonding fixture 2〇3 • the substrate 102, and the base end portion 2 of each fin 2〇4 is “joined to the substrate 206. At this time” The base end portion 2 〇 4 a of the fin 204 bent at right angles forms a surface along one surface of the substrate 206, and the substrate 2 0 6 and the fin 2 are added in comparison with the first embodiment. The contact area of the crucible 4 allows the two to be surely joined. With the present invention, even if the thickness of the fins 2〇4 is very thin, a diverging element in which the substrate 206 and the fins 204 have been reliably erected can be manufactured. 250. Finally, as shown in Fig. 22B, the substrate 2〇6 is moved upward, and only the fins 204 bonded to the substrate 206 are moved upward, and the spacers 205 are left in the fixture for manufacturing the heat dissipating component. The 21 〇 element setting unit 212 can manufacture the heat dissipating element 250 that has the bent base end portion 204 erected on one surface of the substrate 206. Next, the fourth embodiment of the method for manufacturing a heat dissipating member of the present invention will be described as being substantially the same as the first embodiment described above, except that the fin structure 23 of the cross-sectional concave type is used instead. Fins 2〇4.

2036-580S-阡(Nl).ptd 第75頁 1259117 五、發明說明(70) 而最初的元件配置步驟中，首先如第23A圖所示，將 一鋁合金製的薄板材231的中央部與一間隔物20 5直交配 置，使二者成為倒T字型，如第23B圖所示，在斷面凹字型 鰭片構成材製造治具240的中央部的溝槽内，將板材231彎 折，並將其中央部壓入的同時***間隔物205，而如第23C 圖所示，於中央部的溝槽内形成將間隔物2 0 5夾在中間的 斷面凹字型的鰭片構成材230。鰭片構成材230係以左右一 對的鰭片與連結上述左右一對的鰭片204的基端部204a而 形成其斷面凹字型。 而準備複數個如上所述之在左右一對的鰭片2 0 4之間 置入間隔物205的鰭片構成材230，將上述各鰭片構成材 2 3 0與各間隔物2 0 5 ’交互並列，而如第2 3 D圖所示，立設配 置於散熱元件製造用治具2 1 0的元件設定部2 1 2。此時的鰭 片構成材2 3 0係為在左右一對的鰭片2 0 4之間置入有間隔物 2 〇 5的狀態、且為基端部2 〇 4 a向上的狀態。又，置入於各 轄片構成材230相互之間的各間隔物205，的高度係高於置 入於左右一對的鰭片2 0 4之間的間隔物，且較好為二者的 问度差僅僅是基端部204a的厚度，而使鰭片構成材230的 基端部204a與間隔物205,的基端部形成水平的上表面。 之後’如第2 3 E圖所示，於立設配置於元件設定部2 1 2 的各鰭片構成材230與各間隔物2〇5’的上面搭載基板206並 將其固疋。此處將鰭片構成材2 3 〇的基端部2 〇 4 a及間隔物 5形成與基板206的一表面（圖式中的下表面）接觸的狀 態時’即完成了元件配置步驟。2036-580S-阡(Nl).ptd Page 75 1259117 V. Description of Invention (70) In the initial component arrangement step, first, as shown in Fig. 23A, the central portion of a thin plate 231 made of an aluminum alloy is A spacer 20 5 is disposed in an orthogonal manner so that the two are inverted T-shaped. As shown in FIG. 23B, the plate 231 is bent in the groove at the central portion of the cross-sectional concave fin constituent material manufacturing jig 240. Folding, and inserting the spacer 205 while pressing the central portion thereof, and as shown in Fig. 23C, a fin having a cross-section of the cross-section sandwiching the spacer 200 is formed in the groove at the center portion. The constituent material 230. The fin constituent member 230 is formed by a pair of left and right fins and a base end portion 204a that connects the pair of right and left fins 204 to form a cross-sectional concave shape. Further, a plurality of fin constituent members 230 in which the spacers 205 are placed between the pair of right and left fins 504 are prepared, and the fin constituents 203 and the spacers 2 0 5 ' The elements are arranged in parallel, and as shown in FIG. 2 3 D, the element setting unit 2 1 2 disposed in the jig for manufacturing the heat dissipating element 2 1 0 is erected. At this time, the fin constituent material 203 is in a state in which the spacer 2 〇 5 is placed between the pair of left and right fins 504, and the base end portion 2 〇 4 a is upward. Further, the spacers 205 placed between the respective constituting members 230 are higher in height than the spacers placed between the pair of right and left fins 404, and are preferably both. The difference in degree is only the thickness of the base end portion 204a, and the base end portion 204a of the fin constituent member 230 and the base end portion of the spacer 205 form a horizontal upper surface. Then, as shown in Fig. 2 3 E, the substrate 206 is mounted on the upper surface of each of the fin constituent members 230 and the spacers 2〇5' disposed on the element setting unit 2 1 2 and fixed. Here, when the base end portion 2 〇 4 a of the fin constituent member 2 3 及 and the spacer 5 are in contact with one surface (the lower surface in the drawing) of the substrate 206, the component disposing step is completed.

第76頁 IH1 2036-5808-PF(Nl).ptd 五、發明說明（71) 而第23A〜23B圖所示的元件配置步驟並非一必要之限 制，只要各基板構成材230、各間隔物2〇5、各間隔物2〇5, 在最後配置於如第23E圖所示之既定位置時，並不限定其 順序。因此，例如將已預先形成斷面凹字型的鰭片構成材 2 3 0相互間隔排列；分別將各間隔物2 〇 5***各鰭片構成材 2 3 0之左右一對的鰭片2 〇 4之間，同時並分別將各間隔物 2 〇 5***各鰭片構成材2 3 〇相互之間；最後配置基板2 〇 6之 步驟亦可。或是將已預先形成斷面凹字型的鰭片構成材 230相互間隔排列；接下來配置基板2〇6 ;而最後分別將各 間隔物205***各鱗片構成材230之左右一對的錯片204之 間’同時並分別將各間隔物2〇5,***各鰭片構成材23()相 互之間之步驟亦可。 接下來的摩擦震動接合步驟中，如第24a圖所示，將 以轉動軸203b為中心以圓周方向高速轉動的接合治具203 的治具本體203a的圓周面垂直壓至基板2〇6之另一表面之 表面206a，並使接合治具203沿著基板2〇6之表面2〇仏移 動’而使各鰭片構成材230的基端部204a接合於基板206。 此時’因為ϋ片構成材2 3 〇的基端部2 〇 4 a形成沿著基 板206之一表面的面，與第一實施型態比較，係增加基板 206與鰭片204之接觸面積，可使兩者確實地接合。而藉由 本實施型態，即使鰭片204的厚度非常薄，可以製造出基 板206與各鰭片204已確實地立設接合的散熱元件25〇。 最後’如第24B圖所示，將基板206向上移動時，僅有 已接合於基板2 06的各鰭片構成材230 —起向上移動，而將Page 76 IH1 2036-5808-PF(Nl).ptd V. Inventive Note (71) The component arrangement steps shown in FIGS. 23A to 23B are not necessarily limited as long as each substrate constituent material 230 and each spacer 2 〇5. Each spacer 2〇5 is not limited in its order when it is finally disposed at a predetermined position as shown in Fig. 23E. Therefore, for example, the fin constituent members 2 3 0 having the cross-sectional concave shape formed in advance are arranged at intervals; and the spacers 2 〇 5 are respectively inserted into the pair of fins 2 of the respective fin constituent members 2 3 0 〇 At the same time, each spacer 2 〇 5 is inserted into each of the fin constituent members 2 3 〇 at the same time; the step of finally arranging the substrate 2 〇 6 is also possible. Alternatively, the fin members 230 having the pre-formed cross-sections are arranged at intervals; then the substrate 2〇6 is disposed; and finally, the spacers 205 are respectively inserted into the left and right pairs of the respective scale members 230. The step of inserting each of the spacers 2〇5 into the respective fin constituent members 23() at the same time between 204 is also possible. In the subsequent frictional vibration joining step, as shown in Fig. 24a, the circumferential surface of the jig body 203a of the joining jig 203 which is rotated at a high speed in the circumferential direction around the rotating shaft 203b is vertically pressed to the other side of the substrate 2〇6. The surface 206a of one surface and the bonding jig 203 are moved along the surface 2 of the substrate 2〇6 to bond the base end portion 204a of each fin constituent 230 to the substrate 206. At this time, because the base end portion 2 〇 4 a of the cymbal member 2 3 形成 forms a surface along one surface of the substrate 206, the contact area between the substrate 206 and the fin 204 is increased as compared with the first embodiment. The two can be joined together. With this embodiment, even if the thickness of the fin 204 is extremely thin, the heat dissipating member 25A in which the substrate 206 and the respective fins 204 are surely erected can be manufactured. Finally, as shown in Fig. 24B, when the substrate 206 is moved upward, only the fin constituents 230 that have been bonded to the substrate 206 move up, but will

1259117 五、發明說明(72) ----- ^間隔物205、205’留在散熱元件製造用治具2 1〇的元件設 定部212 ’可以製造出具有鰭片構成材23〇的基端部2〇4立 設接合於基板2 〇6之一表面的散熱元件25〇。 友以上係以說明散熱元件的製造方法、以該方法所製造 熱^件、以及該方法所使用的散熱元件製造用治具的 貫施型態，但非用以限定本發明，任何熟習此技藝者，在 不脫離本發明之精神和範圍内，當可作些許之更動與潤1259117 V. INSTRUCTION OF THE INVENTION (72) ----- The spacers 205, 205' are left in the element setting portion 212' of the jig for manufacturing the heat dissipating member 2', and the base end having the fin constituent material 23'' can be manufactured. The portion 2〇4 is erected with a heat dissipating member 25〇 bonded to one surface of the substrate 2〇6. In order to explain the manufacturing method of the heat dissipating component, the manufacturing method of the thermal component, and the jig for manufacturing the heat dissipating component used in the method, the present invention is not limited to the present invention, and any skilled artisan is known. Those who can make some changes and changes without departing from the spirit and scope of the present invention

例如關於散熱元件，亦可以如第2 5 A圖所示，具有在 長度方向的中央部高度縮減的複數個鰭片204，、和無上述 情況的複數個鰭片204 —起相互間隔排列並立設接合於基 板206的散熱元件251 ;亦可以如第25B圖所示，具有複數 個在其高度沿著長度方向成凹凸形狀的梳子狀鰭片2〇4,， 相f間隔排列並立設接合於基板20 6的散熱元件252。而特 別是與第14圖所示的散熱元件25〇比較，散熱元件252鰭片 的表面積特別大，而提升其散熱性能。For example, as for the heat dissipating member, as shown in FIG. 25A, a plurality of fins 204 having a height reduction in the central portion in the longitudinal direction may be arranged and arranged at intervals with the plurality of fins 204 without the above-described case. The heat dissipating member 251 bonded to the substrate 206 may have a plurality of comb fins 2〇4 having a concavo-convex shape along the length thereof as shown in FIG. 25B, and the phases f are arranged at intervals and erected to the substrate. 20 6 heat dissipating component 252. In particular, compared with the heat dissipating component 25A shown in Fig. 14, the surface area of the fin of the heat dissipating member 252 is particularly large, and the heat dissipating property is improved.

又’散熱元件的鰭片並不限定為平板狀，亦可以是例 如第26A圖中，具有複數個不同直徑的薄的圓筒形狀的鰭 片204A ’相互間隔排列成同心圓狀並立設接合於基板2〇6A 的一表面的散熱元件253 ;亦可以是如第26B圖所示，具有 複數個平面波形的鰭片2〇4B相互間隔並列、且立設接合於 基板206之一表面的散熱元件254。 更者’散熱元件的基板亦不限定為平板狀，亦可以是 如第26C圖所示，於縱斷面呈圓弧狀的半圓筒基板2〇6β的Further, the fin of the heat dissipating element is not limited to a flat plate shape, and may be, for example, a thin cylindrical fin 204A having a plurality of different diameters arranged in a concentric shape and erected to each other in FIG. 26A. a heat dissipating member 253 on one surface of the substrate 2A6A; or a heat dissipating member having a plurality of planar waveform fins 2〇4B juxtaposed to each other and erected to one surface of the substrate 206 as shown in FIG. 26B 254. Further, the substrate of the heat dissipating member is not limited to a flat plate shape, and may be a semi-cylindrical substrate 2〇6β having an arc shape in a longitudinal section as shown in Fig. 26C.

2036-5808-PF(Nl).ptd2036-5808-PF(Nl).ptd

1259117 五、發明說明（73) 外周面立設接合有複數個相互間隔的鰭片2〇4的散埶元件 255。 、 當然，上述的散熱元件25卜255均是以目前已述及的 散熱元件的製造方法所製造。 以上所說明的散熱元件製造方法，雖然係應用金屬元 件的摩擦震動接合，亦可以是接合對象物並不限定於金屬 元件的元件接合方法。例如散熱元件中的鰭片2〇4與基板 2 0 6中其中之一或二者為非金屬例如陶瓷等所製的元件 時，本發明就成為將相互間隔的複數個板材立設接合於一 基板的一表面的元件接合方法。 實施例 觀察實際應用第21A〜21C圖與第22A〜22B圖所示之散熱 元件的製造方法後的鰭片2 0 4與基板2 0 6的接合部的組織。 此處所使用的鱗片2 04係為板厚1 mm ( = 1. 〇 X 1 〇-3 mm)、高度26 mm ( = 2·6χ 10-2 mm)、長度60 mm ( = 6·0χ 10·2 mm)之Α1 0 50鋁合金；間隔物205係為板厚1 mm ( = ι· 〇 x 10~3 mm)、高度25 mm ( = 2·5χ 10_2 mm)、長度57 mm ( = 5·7χ 10_2 mm)之軟鋼；以及基板20 6係為板厚2 mm 〇2·1259117 V. INSTRUCTION DESCRIPTION (73) The outer peripheral surface is provided with a plurality of diverging elements 255 joined by a plurality of mutually spaced fins 2〇4. Of course, the heat dissipating elements 25 and 255 described above are all manufactured by the method of manufacturing the heat dissipating element which has been described so far. In the method of manufacturing a heat dissipating member described above, the friction welding of the metal member is applied, and the bonding object is not limited to the element bonding method of the metal element. For example, when one or both of the fins 2〇4 and the substrate 206 in the heat dissipating component are elements made of non-metal such as ceramics, the present invention is to vertically bond a plurality of sheets spaced apart from each other. A method of component bonding of a surface of a substrate. [Embodiment] The structure of the joint portion of the fins 404 and the substrate 205 after the manufacturing method of the heat dissipating members shown in Figs. 21A to 21C and Figs. 22A to 22B was actually observed. The scale 2 04 used here is 1 mm (= 1. 〇X 1 〇-3 mm), 26 mm (= 2·6 χ 10-2 mm), and 60 mm long (= 6·0 χ 10·). 2 mm) Α1 0 50 aluminum alloy; spacer 205 is 1 mm (= ι· 〇x 10~3 mm), height 25 mm (= 2·5 χ 10_2 mm), length 57 mm (= 5·) 7χ 10_2 mm) of mild steel; and the substrate 20 6 is a plate thickness of 2 mm 〇2·

Ox 10_3 mm)、寬度57 mm (二5.7x 10-2 mm)、長度60 mm ( = 6· Ο χ ΙΟ-2 mm)之無氧銅。此時鰭片204的高度/間隔比為 2 6。又，摩擦震動接合時係設定為：接合治具2 〇 3的治具 本體203a的直徑為80 mm (=8·0χ 1〇-2 mm)、寬度為5 mm ( = 5·0χ ΙΟ-3 mm)、轉動數為3 000 RPM、行進速率V為40 0 0 mm/min (二4.0 m/min)、在基板206的表面206a的壓入量αOxide copper of Ox 10_3 mm), width 57 mm (two 5.7 x 10-2 mm), length 60 mm (= 6· Ο ΙΟ ΙΟ - 2 mm). At this time, the height/space ratio of the fins 204 is 26. Further, the frictional vibration engagement is set such that the jig body 203a of the jig 2 〇3 has a diameter of 80 mm (=8·0χ 1〇-2 mm) and a width of 5 mm (= 5·0χ ΙΟ-3) Mm), the number of rotations is 3 000 RPM, the traveling rate V is 40 0 0 mm/min (two 4.0 m/min), and the amount of pressing on the surface 206a of the substrate 206 is α

國country

2036-5808-PF(Nl).ptd 第79頁 1259117 五、發明說明（74) 為〇· 3 mm ( = 3. ο X 1 〇-4 mm)。 摩擦震動接合後將間隔物205移除，觀察鰭片204與基 板206的接合部的組織。如第27A圖所示，可以見到基板 206有若干的變形、鰭片204有折與彎等變形。鰭片204與 基板206之間係藉由CuA 12所構成的反應層207所接合。將第 27A圖放大而如第27B圖所示，反應層2〇7的大部分係受到 摩擦震動接合時接合治具的壓應力的作用被掃出而置於外 側鰭片204的基端部區域的反應層2 07的厚度為30 //m (-3· 0 X 1〇 5 m)以下，並未見到龜裂與縫隙等。而反應層 207係會妨礙從基板2〇6到鰭片2〇4的熱傳導具有極薄的 反應層2 0 7時’係成為具高散熱性能的散熱元件。 接下來 摩檫震動接 首先， 的基本架構 所謂的 壓應力使金 治具與金屬 元件重合面 而發生塑性 散速率的同 而特別 相互重合配 說明本發明之第三群組的實施形態2036-5808-PF(Nl).ptd Page 79 1259117 V. Description of invention (74) is 〇·3 mm (= 3. ο X 1 〇-4 mm). The spacers 205 are removed after the frictional vibration bonding, and the structure of the joint of the fins 204 and the substrate 206 is observed. As shown in Fig. 27A, it can be seen that the substrate 206 has a plurality of deformations, and the fins 204 have deformations such as folding and bending. The fin 204 and the substrate 206 are bonded by a reaction layer 207 composed of CuA 12. Magnification of Fig. 27A and as shown in Fig. 27B, most of the reaction layer 2〇7 is swept out by the action of the compressive stress of the bonding jig while being subjected to frictional vibration bonding and placed at the base end region of the outer fin 204. The thickness of the reaction layer 2 07 is 30 //m (-3·0 X 1〇5 m) or less, and no cracks or cracks are observed. On the other hand, the reaction layer 207 prevents the heat conduction from the substrate 2〇6 to the fins 2〇4 from having a very thin reaction layer 207, which becomes a heat dissipating member having high heat dissipation performance. Next, the vibration of the friction is first. The basic structure of the so-called compressive stress causes the metal fixture to coincide with the metal component to cause the plastic dispersion rate to coincide with each other.

Jr 在切入主題 為前提作說 金屬元件的 屬元件重合 元件的接觸 的氧化物皮 變形，在增 時將重合部 是，將複數 置’將接合 是藉由 並藉由 裂破壞 熱將重 接觸面 之前，以金屬元 明。 摩擦震動接合， 部的縫隙消失， 所產生的震動分 膜’並藉由摩擦 加各金屬元件的 接合的方法。 個金屬元件，依 治具熔點壓至最 件的摩擦震動接合 接合治具的 轉動的接合 存在於金屬 合部高溫化 積與增大擴 的高低順序 屬元件之側Jr changes the oxide skin of the contact of the component overlap element of the metal component on the premise of cutting into the theme, and the overlap is when the time is increased, and the plural is set to "join the joint by the heat of the crack and the heavy contact surface Before, with the metal yuan Ming. The frictional vibration is engaged, the gap of the portion disappears, and the generated vibration is divided into a film' by a method of joining the metal elements by friction. a metal component, the frictional vibration of the bonding tool is pressed to the maximum frictional joint of the bonding fixture, and the rotating joint of the bonding fixture exists in the high temperature of the metal joint and the order of increasing the height of the component

照炫點 南的金Shining the South

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五、發明說明(75) 、:ΐΪίΪ技ί各金屬元件的重合部上升至接合所必要的 ^又而栋斑入5治具之側的金屬元件仍能保持高抗形變強 度\而使，合治具的壓應力能夠有效率地傳達至重合面 因而能夠完成金屬元件間無縫隙之高強度的接合。0 此處舉出鋁元件與熔點較高的銅元件作為金屬元件之 一例，而較具體地說明。第28Α〜28(：圖係顯示摩捧震 合的順序’其中第28A、8B為正面剖面圖，第咖圖為第 28B圖之側視圖。在摩擦震動接合中，首先如第28八圖所 不，將鋁元件301與銅元件302以面接觸的方式相互重合配 置’以未繪示於圖面的治具固定。 、接下來，如第28B、28C圖所示，將以轉動軸3〇3b為中 心、以圓周方向以圓周速度R高速轉動的接合治具3〇3之治 具本體303的圓周面垂直壓至銅元件3〇2的表面3〇2a，並將 接合治具3 03沿著銅元件302的表面302a以行進速率v移、 動，而使鋁元件301與銅元件302重合並接合。接合治具 303係在轉動軸3〇3b的前端部將圓板狀的治具本體3〇3^固 定’而治具本體303a係由JIS :SKD61等工具鋼所構成。相 對於壓入銅元件302的表面302a時的行進方向，治具本體 3 0 3a係以送至後方的方向，沿著轉動軸3〇3b的周邊轉動。 如第29A圖所示’治具本體303a的圓周面係以一定量 a (m)壓入銅元件302的表面302a的狀態下以圓周方向高 速轉動，並沿著銅元件302的表面302a移動。而藉著上述 治具本體303a在銅元件302的表面302a之壓入，使|呂元件 301與銅元件3 02之重合面的縫隙消失；並藉著高速轉動的V. INSTRUCTIONS (75),: ΐΪίΪ ί ί ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ The compressive stress of the jig can be efficiently transmitted to the coincident surface and thus the high-strength joint without gaps between the metal members can be completed. 0 Here, an aluminum element and a copper element having a relatively high melting point are exemplified as a metal element. 28th~28(:The figure shows the order of the vibrations of the handbuckling', the 28th and 8th are the front cross-sectional view, and the second is the side view of the 28B. In the friction and vibration joint, firstly, as shown in Figure 28 No, the aluminum member 301 and the copper member 302 are placed in surface contact with each other so as to be fixed to each other by a jig not shown in the drawing. Next, as shown in Figs. 28B and 28C, the rotating shaft 3 will be used. The circumferential surface of the jig body 303 of the joining jig 3〇3 which is centered at a high speed in the circumferential direction at the circumferential speed R is vertically pressed to the surface 3〇2a of the copper member 3〇2, and the joining jig 3 03 is The surface 302a of the copper member 302 is moved and moved at a traveling rate v, and the aluminum member 301 and the copper member 302 are rejoined and joined. The joint jig 303 is a disc-shaped jig body at the front end portion of the rotating shaft 3〇3b. 3〇3^fixed' and the jig body 303a is made of tool steel such as JIS: SKD61. The jig body 3 0 3a is sent to the rear direction with respect to the traveling direction when the surface 302a of the copper element 302 is pressed. Rotating along the periphery of the rotating shaft 3〇3b. As shown in Fig. 29A, the circumferential surface of the jig body 303a In a state where a certain amount a (m) is pressed into the surface 302a of the copper member 302, it is rotated at a high speed in the circumferential direction and moved along the surface 302a of the copper member 302. By the above-described jig body 303a on the surface 302a of the copper member 302 Pressing in, so that the gap between the surface of the lumping element 301 and the copper element 322 disappears; and by high speed rotation

2036-5808-PF(Nl).ptd 苐81頁 1259117 五、發明說明（76) 治具本體3 03a與銅元件30 2的接觸所產生的震動，將鋁元 件301與銅元件3〇2之重合面的氧化物皮膜***破壞；並如 第2 9B圖所示，與治具本體3〇3a接觸的銅元件3〇2的既定區 域與其鄰近區域、還有與上述區域鄰接的鋁元件3〇1的既 定區域，因治具本體3〇3a與銅元件302的摩擦接觸所產生 的熱量而高溫化，呈現可塑化（流動化）的固相狀態。上述 的結果’使得銅元件302與鋁元件301在相互的交界面上流 動擴散，並由當初的表面開始塑性變形。 接合治具303之治具本體3〇3a的通過執跡，如第29C圖 所示’藉由治具本體303a之壓應力而在銅元件302的表面 3 0 2 a形成一對淺的段部3 〇 2 b。又，鋁元件3 〇 1與銅元件3 〇 2 的重合面中，已塑性變形的鋁元件3〇1及銅元件3〇2相互咬 合，而固化成斷面凹凸型的接合面s，上述的接合面S介於 銅元件302與鋁元件301之間而將二者確實地接合。 一此處，考慮到接合治具3〇3由鋁元件3〇1之側壓入時， 鋁元件301的熔點低於銅元件3〇2的熔點，鋁元件3〇1與銅 π件30 2#的重合面達到接合所必要的共晶溫度（548以上 時，鋁元件301的抗形變強度就會變得較小，而使來自接 合治具303的壓力無法充分地傳達至鋁元件3〇1與銅元件 302的重合面，而容易發生接合不良。另一方面，將接合 治具303壓入熔點高於鋁元件3〇1的銅元件3〇2之側時，在 2元件3(Π與銅元件302的重合面達到接合所必要的共晶溫 度以上時，_元件302可以保持比較大的抗形變強度，可 使來自接合治具303的壓力充分地傳達至紹元件3〇1與銅元2036-5808-PF(Nl).ptd 苐81page 1259117 V. Description of the invention (76) The vibration generated by the contact between the fixture body 3 03a and the copper component 30 2 overlaps the aluminum component 301 and the copper component 3〇2 The oxide film of the surface is split and destroyed; and as shown in Fig. 29B, the predetermined region of the copper member 3〇2 in contact with the fixture body 3〇3a and its adjacent region, and the aluminum member adjacent to the above region 3〇1 The predetermined region is heated by the heat generated by the frictional contact between the jig body 3〇3a and the copper member 302, and exhibits a plasticized (fluidized) solid phase state. The above result 'is caused the copper element 302 and the aluminum element 301 to flow and diffuse at the mutual interface and plastically deform from the original surface. The passing of the jig body 3〇3a of the jig 303, as shown in Fig. 29C, forms a pair of shallow segments on the surface 3 0 2 a of the copper member 302 by the compressive stress of the jig body 303a. 3 〇 2 b. Further, in the overlapping surface of the aluminum element 3 〇1 and the copper element 3 〇2, the plastic element 3〇1 and the copper element 3〇2 which have been plastically deformed are engaged with each other, and are solidified into a joint surface s having a concave-convex shape, the above-mentioned The joint surface S is interposed between the copper element 302 and the aluminum element 301 to positively bond the two. Here, in consideration of the fact that the joining jig 3〇3 is pressed by the side of the aluminum member 3〇1, the melting point of the aluminum member 301 is lower than the melting point of the copper member 3〇2, and the aluminum member 3〇1 and the copper π member 30 2 When the overlapping surface of # reaches the eutectic temperature necessary for bonding (when 548 or more, the deformation resistance of the aluminum member 301 becomes small, and the pressure from the bonding jig 303 is not sufficiently transmitted to the aluminum member 3〇1 The bonding surface with the copper member 302 is prone to joint failure. On the other hand, when the bonding jig 303 is pressed into the side of the copper element 3〇2 whose melting point is higher than that of the aluminum element 3〇1, the element 3 is When the overlapping surface of the copper element 302 reaches the eutectic temperature necessary for bonding, the element 302 can maintain a relatively large deformation strength, and the pressure from the bonding fixture 303 can be sufficiently transmitted to the element 3〇1 and the copper element.

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五、發明說明（77) 件302的重合面，而你a - 強度的接合。而使兩疋件間的·縫隙消失’而能夠行高 入ni述的方法將鋁元件301與銅元件302重合而摩捧震 且太姊1 μ β為由下式（A)求出接合時接合治具303(治 八本肢303a)轉動的圓周速率R (m/min 250 $ 2 0 0 0 ............... ....................................A >V. INSTRUCTIONS (77) The coincident faces of piece 302, and your a-strength joint. In the method of making the gap between the two pieces disappear, the aluminum element 301 and the copper element 302 are superposed on each other, and the vibration is too large and 1 μβ is obtained by the following formula (A). The circumferential speed R of the joint fixture 303 (the eight limbs 303a) is rotated (m/min 250 $ 2 0 0 0 ..................... ...........................A >

接σ日守接合治具303的圓周速率小於250 m/min時，接 合=錢3與銅幻指2之摩擦接觸所產生的熱量就過小接 而使銅元件302與銘元件3〇1的重合面的溫度過低，而導欵 接合不良。另一方面，接合時接合治具3〇3的圓周速率大 於2000 πι/曰min時，接合治具3〇3與銅元件3〇2之摩擦接觸所 產生的熱置就會大過所必要的，不僅僅是使接合治具3〇 3 的驅動能量損失會變大，並使與接合治具3〇3接觸的銅元 件302的溫度會局部過高，導致該部分發生塑性變形，而 使接合治具3 0 3的壓應力無法充分地傳達至重合面導致在 兩元件間有可能會產生縫隙。因此，可以瞭解接合時接合 治具303以250〜2000 m/min的圓周速率轉動時，接合户具 303與銅元件302之摩擦接觸所產生的熱量為恰好適^當°/'而 能夠行良好的接合。 W 又，將鋁元件301與銅元件302重合而摩擦震動接人 時，接合時，接合治具3〇3(治具本體303a)在銅元件2〇"2的 表面壓入量a (m)較好為由下式（B)求出： 〇· 03 X t ‘ α ‘0· 3 X .............................................. 其中t為重合部中的銅元件的厚度（m)。When the circumferential velocity of the igma bonding fixture 303 is less than 250 m/min, the heat generated by the frictional contact between the bonding = money 3 and the copper finger 2 is too small to make the copper component 302 coincide with the inscribed component 3〇1. The temperature of the face is too low and the guide is not properly joined. On the other hand, when the circumferential speed of the joining jig 3〇3 at the time of joining is more than 2000 πι/曰min, the heat generated by the frictional contact between the joining jig 3〇3 and the copper member 3〇2 is greater than necessary. In addition, not only the driving energy loss of the joining jig 3〇3 is increased, but also the temperature of the copper member 302 in contact with the joining jig 3〇3 is locally too high, causing plastic deformation of the portion, and the joining is performed. The compressive stress of the jig 300 is not sufficiently transmitted to the coincident surface, which may cause a gap between the two elements. Therefore, it can be understood that when the joining jig 303 is rotated at a peripheral speed of 250 to 2000 m/min, the heat generated by the frictional contact between the bonding tool 303 and the copper member 302 is just right. Engagement. W, when the aluminum member 301 and the copper member 302 are overlapped and the frictional vibration is engaged, the surface of the bonding member 3〇3 (the jig body 303a) is pressed at the surface of the copper member 2〇2. It is better to obtain the following formula (B): 〇· 03 X t ' α '0· 3 X ......................... ..................... where t is the thickness (m) of the copper element in the overlap.

2036-5808-PF(Nl).ptd 第83頁 1259117 五、發明說明(78) 接合時接合治具303在銅元件2 02表面的壓入量α小於 〇.03t時，銅元件302與銘元件201的重合面中會殘留縫ji争 而導致接合不良。另一方面，壓入量α大於〇3t時，雖然 銅元件302與鋁元件301的重合面中不會殘留縫隙，而過大 的接合治具303的壓入量會在銅元件302的表面殘留顯著的 凹痕，導致元件的損失。因此，接合時接合治具3〇3在銅 元件302表面的壓入量（2在〇.〇31：以上、〇.3t以下時，接合 治具3 0 3的壓應力為正好適當的值，可以瞭解就可以在銅 元件302與鋁元件301的重合部不產生縫隙的情況下完成接 合，亦可以縮小銅元件302表面的凹痕。 更者，將鋁元件301與銅元件302重合而摩擦震動接合 時，接合時，接合治具3〇3(治具本體303a)沿著銅元件3〇2 的表面移動的行進速率V (m/min.)較好為由下式（〇求 出： ο. 1 ^ V ^R/(5. 0 X 1〇7 X t2)..................... 其中R為接合時接合治具的圓周速率 t為重合部中的銅元件的厚度（m)。2036-5808-PF(Nl).ptd Page 83 1259117 V. INSTRUCTION DESCRIPTION (78) When the bonding amount 303 of the bonding jig 303 on the surface of the copper element 202 is less than 〇.03t, the copper element 302 and the inscription element In the overlapping faces of 201, the seams may be left to cause a poor joint. On the other hand, when the press-in amount α is larger than 〇3t, the gap does not remain in the overlapping surface of the copper element 302 and the aluminum element 301, and the excessively large amount of the bonding jig 303 remains on the surface of the copper element 302. The dents cause loss of components. Therefore, when the joining jig 3〇3 is pressed at the surface of the copper member 302 at the time of joining (2: 〇. 31: or more, 〇.3t or less, the compressive stress of the joining jig 303 is just an appropriate value, It can be understood that the bonding can be completed without a gap between the copper component 302 and the aluminum component 301, and the dent of the surface of the copper component 302 can be reduced. Further, the aluminum component 301 and the copper component 302 are overlapped and rubbed and vibrated. At the time of joining, at the time of joining, the traveling speed V (m/min.) of the joining jig 3〇3 (the jig body 303a) moving along the surface of the copper member 3〇2 is preferably determined by the following formula: . 1 ^ V ^R/(5. 0 X 1〇7 X t2)........................ where R is the peripheral velocity of the jig when engaged t is the thickness (m) of the copper component in the overlap.

其中，接合時接合治具303的圓周速率變大時，因接 :治具303與銅元件302的摩擦接觸所產生的熱量亦會變 1二：：接：治具303的行進速率v較高日寺重合部仍能 ==溫度，而銅元件3Q2的厚度變大時，重合部要達 到一疋的溫度以上絲、慈α士 、隹、Φ、玄…Α I 士 尤比車乂費呤’右此時接合治具303的行 重合部的溫度達到-定溫度以上之前 口 303就已通過，就會導致接合不良的問題。而實 1259117 -丨-丨 --- 五、發明說明（79) 行良好的摩擦震動接合時，接合治具3〇3的行進速率v、圓 周速率R、銅元件的厚度t必須要相互調節。而實驗結果係 確認了滿足^^^…^^^了 X t2 )時，能夠有 良好的接合。另一方面，由當接合治具3〇3的行進速率乂過 小時，會有降低接合效率的觀點，實驗結果係確認了滿 〇 · 1 S V時，可以得到較好的接合效率。 :2屬元件的摩擦震動接合並不限於將鋁元件與銅 合的情況，可以廣泛地適用於各金屬元件間 的重：並接合。而上述金屬元件的形狀，只要在相互重人 之後flb夠使接合治具壓入就可以。 5 的數量也不限於二個，三個以上亦^ 4合的金屬元件 例如，在第30圖中，係將三個金屬元 元件301、300 0系的紹元件3()1，、銅元屬5000 2的雀呂 置’將接合治具303的治具本體3〇3 : J :配 考慮到接合時各金屬元件的要達到震動在此， 時各金屬元件的抗形變強度對來自 =:又以上，且此 至各金屬元件的接合面之傳達效率心具的壓應力傳達 金屬7G件依熔點的高低順序（此處的θ心好為將三個 i〇〇〇系的銘元件30Γ、5(^系的銅元件302、 將接合治具303壓至三個金屬元件中熔ζ301^重合配置，並 (此處為銅元件302)之側，而為摩捧動f阿的金屬元件 個金屬元件為銅、鋁、鎂時，較好接合。其他，三 鎂元件的順序重合，將接合治且壓二、;5兀件、鋁元件、 則凡件之側而行摩擦 2036-5808-PF(Nl).ptd 第85頁 1259117 五、發明說明（80) 震動接合。 散熱元件 拔二上:係’ 6說明金屬元件的摩擦震動接合的基本架 構下來說明應用上述摩擦震動接合之散熱元件。 > μ 3 1圖為一斜視圖’係顯示本發明之散熱元件之一實 =型悲。圖中所示的散熱元件35G係、在銅製的基板的— 表面上，立設並接合複數個相互間隔之鋁製的鰭片304。 間隔！治具306，如第32A圖所示，係為將各間隔物 札q L的下？部相互連結的斷面為梳子形狀的治具。各間隔 a的间度係與散熱元件35〇的各散熱鰭片3〇4相等。 首先如第32B圖所示，分別將各鰭片3〇4***各間隔物 306a之間。此時，各鰭片3〇4的上面與各間隔物3〇6a的上 面形成一水平面。 接下來，如第32C圖所示，將各.鰭片3()4的上面盘 3〇5的一表面（圖式中的下面）接觸，將基板3〇5固定。亦可 將第32B、3 2C圖的順序逆轉，將基板3〇5固定於間隔物治 =06的上面之後，再由側面（與紙面垂直方向 3 0 4***。 门 接下來如第32D圖所示，將接合治具3〇3壓 的另-表面（圖式中的上面），將各縛片3〇4摩擦震土動板^ 於基板30 5。此時，因為構成基板3〇5的銅的熔點高於構成 鰭片304的鋁，鰭片3〇4與基板305之交界面的溫度上升到 兩f接合時所必要的溫度（共晶溫度：548。〇時，基板3 〇5 仍能保持高的抗形變強度，使接合治具3 〇 3的壓應力能夠 Μ 2036-5808-PF(Nl).Ptd 第86頁 1259117 五、發明說明（81) 有效率地傳達至交界面，並且能行鰭片304與基板305之間 無縫隙的高強度接合。 又’由於構成間隔物3 0 6 a的鐵的炼點高於構成鰭片 304的紹及構成基板305的銅，接合治具303的圓周速率與 行進速率設定在既定的範圍時，間隔物3〇6a不會與鰭片 3 0 4及基板3 0 5接合’而能夠容易地僅接合基板3 〇 5與鰭片 304 ° 最後如第32E圖所示，將基板3 05及接合於其上的各鰭 片3 0 4向上移動，而移除間隔物治具3 〇 6，而完成散熱元件 350的製造。Wherein, when the circumferential speed of the joining jig 303 is increased, the heat generated by the frictional contact between the jig 303 and the copper member 302 is also changed to two:: the jig: the traveling speed v of the jig 303 is high. The Japanese temple overlap can still == temperature, and when the thickness of the copper component 3Q2 becomes larger, the coincidence portion must reach a temperature above the silk, the ci, the 士, Φ, 玄, 玄... Α I 士尤比车乂费呤' At this time, when the temperature of the line overlapping portion of the joining jig 303 reaches the constant temperature or higher, the port 303 passes, and the problem of poor joining is caused. Actually, 1259117 - 丨 - 丨 - - 5. Description of the invention (79) When a good frictional vibration engagement is performed, the traveling speed v of the joining jig 3, the circumferential rate R, and the thickness t of the copper member must be adjusted to each other. The experimental results confirmed that a good joint was obtained when ^^^...^^^ X t2 ) was satisfied. On the other hand, when the traveling speed of the joining jig 3〇3 is too small, the joining efficiency is lowered, and as a result of the experiment, it is confirmed that a good joining efficiency can be obtained when the flow rate is full. The frictional vibration bonding of the two-component element is not limited to the case where the aluminum element is combined with copper, and can be widely applied to the weight between the metal elements: and joined. Further, the shape of the above-mentioned metal member may be such that the bonding tool is pressed in by flb after being heavy. The number of 5 is not limited to two, and three or more metal components are, for example, in Fig. 30, three metal element elements 301, 300 0 are used for the component 3 () 1, copper element The fixture body of the 5000 2 is set to the fixture body of the jig 303. 3:3: With the consideration of the vibration of each metal component at the time of joining, the deformation strength of each metal component comes from =: Furthermore, the above-mentioned stress-transfer efficiency of the joint surface of each metal element conveys the order of the melting point of the metal 7G according to the melting point (the θ heart here is preferably 30 Γ of the three elements) 5 (^) copper element 302, the bonding jig 303 is pressed to the three metal elements, the melting ζ 301 ^ overlapping configuration, and (here, the copper element 302) side, and the metal component of the armor When the metal component is copper, aluminum or magnesium, it is better to join. Others, the order of the three magnesium components overlaps, and the bonding process is carried out and the pressure is two; 5 兀, aluminum component, and the side of the component is rubbed 2036-5808- PF(Nl).ptd Page 85 1259117 V. Description of invention (80) Vibration joint. Heat dissipating element on two: "6" metal element The basic structure of the frictional vibration joint will be described with the above-mentioned frictional vibration bonding heat dissipating component. > μ 3 1 is a perspective view showing one of the heat dissipating components of the present invention. The heat dissipating component 35G shown in the drawing A plurality of fins 304 made of aluminum are arranged and joined to each other on the surface of the copper substrate. The spacers 306, as shown in Fig. 32A, are for the spacers. The cross-section of the lower portion is a comb-shaped jig. The interval between the intervals a is equal to the fins 3〇4 of the heat dissipating member 35〇. First, as shown in Fig. 32B, the fins are respectively shown. 3〇4 is inserted between each of the spacers 306a. At this time, the upper surface of each of the fins 3〇4 forms a horizontal plane with the upper surface of each of the spacers 3〇6a. Next, as shown in Fig. 32C, each fin is formed. The surface of the upper disc 3〇5 of 3() 4 is in contact with the surface (the lower surface in the drawing), and the substrate 3〇5 is fixed. The order of the 32B and 32C can also be reversed, and the substrate 3〇5 can be fixed at intervals. After the top of the physical treatment = 06, the side is inserted (3 0 4 perpendicular to the paper surface. The door is next as the 32D As shown in the figure, the other surface (the upper surface in the drawing) of the bonding tool 3〇3 is pressed, and each of the bonding pieces 3〇4 is rubbed against the earth moving plate to the substrate 30 5. At this time, since the substrate 3 is formed, The copper of 5 has a higher melting point than the aluminum constituting the fin 304, and the temperature at the interface between the fins 3〇4 and the substrate 305 rises to the temperature necessary for the bonding of the two f (eutectic temperature: 548. When the substrate 3 is 〇) 5 can still maintain high deformation strength, so that the compressive stress of the joint fixture 3 〇 3 can be Μ 2036-5808-PF (Nl). Ptd page 86 1259117 5. Invention description (81) Effectively communicated to the interface, Moreover, a high-strength joint with no gap between the fins 304 and the substrate 305 can be performed. Further, since the refining point of the iron constituting the spacer 3 0 6 a is higher than the copper constituting the fin 304 and constituting the substrate 305, the circumferential rate and the traveling rate of the bonding jig 303 are set within a predetermined range, and the spacer 3 The crucible 6a does not bond with the fins 340 and the substrate 305, and can easily bond only the substrate 3 〇5 and the fins 304°. Finally, as shown in Fig. 32E, the substrate 305 and the substrate 305 are bonded thereto. Each fin 306 moves upward, and the spacer jig 3 〇 6 is removed, and the manufacture of the heat dissipating member 350 is completed.

藉由上述的步驟，由於間隔物治具3 〇 6的各間隔物 3 0 6 a之間分別***各.籍片3 〇 4，可以正確地保持縛片3 〇 4相 互之間隔，並可以決定相互以既定間隔隔開狀態的各鰭片 3 04之並列位置。又，對於摩擦震動接合步驟時作用在鰭 片304的彎曲應力，藉由間隔物3〇6a係補強了鰭片3〇4，因 此鱗片3 0 4的厚度亦可以變得非常薄。又，只要變更間隔 物治具30 6的各間隔物306a的厚度與配置間隔，就能夠任 思地调節ϋ片3 0 4之配置間隔與厚度，更加上一併變更鰭 片3 04的高度的情況下，特別是將薄板厚、高板高的各鰭 片304以短間隔立設接合於基板3〇5之一表面，就可以製造 具有咼高度/間隔比（例如高度/間隔比超過2〇)的散熱元件 350。當然，間隔物治具3〇6(間隔物3〇6a)並不限定為金屬 製，考量到強度、加工性等因素時，亦可以使用陶瓷或是 其他任意材質。而雖然可以使間隔物治具3〇6的各間隔物By the above steps, since the spacers 3 6 4 are inserted between the spacers 3 0 6 a of the spacer jigs 3, respectively, the spacers 3 〇 4 can be correctly maintained and can be determined. The juxtaposed positions of the fins 404 in a state of being spaced apart from each other at a predetermined interval. Further, with respect to the bending stress acting on the fin 304 in the frictional vibration joining step, the fins 3〇4a are reinforced by the spacers 3〇6a, so that the thickness of the scales 104 can also be made very thin. Further, by changing the thickness and the arrangement interval of the spacers 306a of the spacer jigs 306, the arrangement interval and thickness of the cymbals 306 can be adjusted in an infinite manner, and the height of the fins 304 can be further changed. In particular, in particular, each of the fins 304 having a thin plate thickness and a high plate height can be vertically joined to one surface of the substrate 3〇5 at a short interval, thereby producing a 咼 height/space ratio (for example, a height/interval ratio exceeding 2).散热) heat sink element 350. Of course, the spacer jig 3〇6 (spacer 3〇6a) is not limited to metal, and ceramics or any other material may be used in consideration of factors such as strength and workability. And although it is possible to make the spacers have a spacer of 3〇6

12591171259117

30 6a的高度較鰭片3〇4的高度小，而使摩擦震動接合時各 間隔物306a就不會接觸基板305的一表面；考慮到摩擦震 動接合時，因接合治具3〇3的壓應力使鰭片3〇4受到彎曲應 力的作用時，為了提高間隔物3〇6a對鰭片3〇4的補強效 果，較好為如上述實施型態一般，準備同高的各間隔物 306a與各鰭片304。 又’藉由以上的製造方法，因為不需要如銲接時一般 在真空爐中加熱並維持一既定時間，而能夠將各鰭片3〇4 與基板3 0 5接合，可以削減製造成本。The height of the 30 6a is smaller than the height of the fins 3〇4, and the spacers 306a do not contact a surface of the substrate 305 when the frictional vibration is engaged; the pressure of the bonding fixture 3〇3 is considered in consideration of the frictional vibration engagement. When the stress causes the fins 3〇4 to be subjected to the bending stress, in order to improve the reinforcing effect of the spacers 3〇6a on the fins 3〇4, it is preferable to prepare the spacers 306a of the same height as in the above-described embodiment. Each fin 304. Further, by the above manufacturing method, since it is not necessary to heat and maintain a predetermined time in the vacuum furnace as in the case of welding, the fins 3〇4 can be joined to the substrate 305, and the manufacturing cost can be reduced.

s而’在提升基板3〇5與各鰭片3 04之接合強度的同時， 亦提升政熱元件3 5 〇的散熱性能的情況，就如第3 3 a圖所 示，較好為使接合治具303在基板3〇5的裏面（基板3〇5的》 表面）的移動能夠遍及各鰭片3〇4的基端部（圖式中的上 王面，使知各鰭片304能夠完全地接合於基板305。 H /〜33C圖中以斜線標示的區域係表示接合治具3〇3的 μ^九另方面，在重視接合成本的削減時，例如如 第=示，亦可以移動接合治具303，而未遍及各射 的面的全面，僅遍及各鰭片304基端面的一部份。s and 'when the bonding strength between the substrate 3〇5 and each of the fins 404 is increased, and the heat dissipation performance of the thermal element 35 〇 is also improved, as shown in Fig. 3 a, preferably The movement of the jig 303 on the inside of the substrate 3〇5 (the surface of the substrate 3〇5) can extend over the base end portion of each of the fins 3〇4 (the upper king face in the drawing, so that each fin 304 can be completely completed The ground is bonded to the substrate 305. The area indicated by oblique lines in the figure of H / ～33C indicates the other side of the jig 3〇3, and when the reduction of the joint cost is emphasized, for example, as shown in the following, the joint can also be moved. The fixture 303 does not extend over the entire surface of each shot, only over a portion of the base end face of each fin 304.

=306a接合時，在間隔物脫離步驟中，雖 片/(Η移卜任=的方法將各間隔物3G6a從基板305與各鱗 片3〇4 = ί 具303的治具本體3〇3a的寬度小於南 乃的7子度時，如篦. 間隔物3〇6a不會接合的動;「所产不較好為以基板305與各 口 、軌跡（在圖式中為各鰭片正上；5When the bonding is 306a, in the spacer detaching step, the width of the spacer body 3 〇 3a of the spacers 3G6a from the substrate 305 and the respective scales 3 〇 4 = ε 303 is the same as the method of 片 任 = When it is less than the 7th degree of Nan Nai, such as 篦. The spacer 3〇6a does not move; "It is not good to produce the substrate 305 and each port, the trajectory (in the figure, the fins are directly above; 5

1259117 五、發明說明（83) 的區域）’來移動接合治具3〇3 ;又，僅僅使各鰭片3(U與 基板305接觸，而使各間隔物3〇6a不與基板3〇5接觸的配置 亦可；或是，如上述的實施型態一般，使用熔點高於鰭片 3 0 4及基板3 0 5之熔點的間隔物3 〇 6 a時，就與接合治具μ 3 的移動執跡無關，各間隔物3〇6a不會接合於基板3〇5/與鰭 片3 04時，即使摩擦震動接合後，各間隔物3〇6a亦不會接 合於基板305與鰭片304，而使間隔物脫離步驟的程序曰可以 省略’而旎夠削減製造成本。又，因接合治具3〇3的壓應 之另一表面殘留較大凹痕時，可將基板3;51259117 V. Area of the invention (83)) 'to move the bonding fixture 3〇3; again, only the fins 3 (U are in contact with the substrate 305, so that the spacers 3〇6a are not associated with the substrate 3〇5 The arrangement of the contacts may also be; or, as in the above embodiment, when the spacers having a melting point higher than the melting point of the fins 340 and the substrate 305 are used for 3 〇 6 a, the bonding fixtures μ 3 are used. Regardless of the movement, the spacers 3〇6a are not bonded to the substrate 3〇5/and the fins 304, and even after the frictional vibration bonding, the spacers 3〇6a are not bonded to the substrate 305 and the fins 304. The procedure for removing the spacer from the step can be omitted, and the manufacturing cost can be reduced. Further, when the other surface of the bonding fixture 3〇3 is left with a large indentation, the substrate 3;

Lt: 定厚度’而能夠得到具美麗外觀的散熱 ㈣二簡化摩擦震動接合步驟，亦可以使用在轉動 轴3 0 3 b的周邊以一既定問陪if]中亡、—本， 接合产且Γ图切喊間^固疋有硬數個治具本體3〇3a的 摩捧震i τ。此時’可以同時對複數個區域施以 提昇效率。 了尸汀而要的恰間，因而更加 第34圖為一斜視圖，係顯示本發明 實施型態。圖中所示的散埶元件 放…π件之另一 擦震動接合於銅製的基板3G5的—表面=將\散熱部3〇7摩 將重合配置於基板3〇5的一表面上其，散熱部3〇7係 相互間隔並立設於基板3〇5的相對=2=7&、以及 307b，以擠型一體成形而成。于側之面上的各韓片 散熱元件360的製造方法盥埤為_ · 略相同。將m ^ ，、政…、兀件35〇的製造方法約 將讓圖所不斷面形狀的間隔物治具3〇6固定於Lt: constant thickness 'can be obtained with beautiful appearance of heat dissipation (4) two simplified friction and vibration bonding steps, can also be used in the periphery of the rotating shaft 3 0 3 b with a predetermined question to accompany the death, - this, joint production and Γ Figure cuts the shouting room ^ solid 疋 has a hard fixture body 3 〇 3a 摩 震 i i τ. At this time, multiple areas can be boosted at the same time. The continuation of the cadaver is, and thus, Fig. 34 is a perspective view showing the embodiment of the present invention. The other part of the 埶 件 擦 π 接合 接合 接合 接合 接合 π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π The portions 3〇7 are spaced apart from each other and are erected on the opposite sides of the substrate 3〇5=2=7& and 307b, and are integrally formed by extrusion. The manufacturing method of each of the Korean heat dissipating elements 360 on the side of the side is slightly the same. The manufacturing method of m ^ , 政 ..., 兀 〇 35 约 约 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定

1259117 五、發明說明（84) 接合工作桌上；如第35B圖所示，於間隔物治具306之各間 隔物3 0 6 a之間分別嵌入個鰭片3 0 7 b而置放鋁散熱部3 0 7。 又在鋁散熱部307之基板307a之各鰭片307b之相對側之面 (圖式中的上面）上，重合並固定基板3〇5的一表面（圖式中 的下面）。而如第35C圖所示，由基板305的另一表面（圖式 中的上面）以接合治具3 〇 3行摩擦震動接合。最後，如第 3 5 E圖所示’移除間隔物治具3 0 6後，完成了散熱元件3 6 〇 的製造。而其他部分皆與散熱元件3 5 0的製造方法相同。 散熱器 接下來說明本發明散熱器之實施型態。 第36 A〜36B圖係顯示本發明散熱器之第一實施型態， 其中第36A圖為分解斜視圖，第36B圖為組裝後的斜視圖。 又’第37A圖為第36A〜36B圖之散熱器之俯視圖；第3^^、 37C圖分別為第36A〜36B圖之散熱器之X方向側視圖與γ方向 側視圖。 散熱is 3 1 0 A係為具有散熱元件3 5 0與風扇3 2 〇之高性能 的散熱器。散熱元件3 5 0係與CPU 3 40等發熱體以導$管心 (heat pipe)作導熱性的連接。 … 散熱元件350，如以上所說明，係為將複數個銘製的 鰭片304相互間隔並立設在銅製的基板3〇5的一表面上的狀 悲下，摩擦震動接合而成。此處，在基板3 〇 5的兩' 成有突起305a。又，在基板305的下面，形成有與管 330的端部嵌合的嵌合溝3〇5b。 、 … 風扇320係將散熱元件35〇強制冷卻，經由風扇裝嗖元1259117 V. INSTRUCTIONS (84) Joining the work table; as shown in Fig. 35B, inserting fins 3 0 7 b between the spacers of the spacer jig 306, respectively, and placing aluminum heat dissipation Department 3 0 7. Further, on the opposite side (the upper surface in the drawing) of the fins 307b of the substrate 307a of the aluminum heat dissipating portion 307, a surface (the lower surface in the drawing) of the fixed substrate 3〇5 is overlapped. Further, as shown in Fig. 35C, the other surface (the upper surface in the drawing) of the substrate 305 is frictionally vibrated by the bonding jig 3 〇 3 lines. Finally, the manufacturing of the heat dissipating member 3 6 完成 is completed after removing the spacer jig 306 as shown in Fig. 35E. The other parts are the same as the manufacturing method of the heat dissipating component 350. Heat Sink Next, an embodiment of the heat sink of the present invention will be described. 36A to 36B are views showing a first embodiment of the heat sink of the present invention, wherein Fig. 36A is an exploded perspective view, and Fig. 36B is a perspective view after assembly. Further, Fig. 37A is a plan view of the heat sink of Figs. 36A to 36B; and Figs. 3^^ and 37C are the X-direction side view and the γ-direction side view of the heat sink of Figs. 36A to 36B, respectively. The heat dissipation is 3 1 0 A is a heat sink having a high performance of the heat dissipating component 350 and the fan 3 2 . The heat dissipating element 305 is thermally connected to a heat generating body such as the CPU 3 40 by a heat pipe. The heat dissipating member 350, as described above, is formed by frictionally and vibrating the plurality of inlaid fins 304 while being spaced apart from each other and standing on a surface of the copper substrate 3〇5. Here, protrusions 305a are formed in the two sides of the substrate 3 〇 5 . Further, on the lower surface of the substrate 305, a fitting groove 3〇5b fitted to the end of the tube 330 is formed. , Fan 320 is forcibly cooling the heat dissipating component 35〇, and is installed via a fan.

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件321裝設於散熱元件35〇，而將散熱元件35〇的熱量散出 至上方。風扇320係連接有未繪示於圖中的馬達。 風扇裝設元件321係由上板部3 21a與側板部321b、 321b所構成，並形成有可包含散熱元件35〇之個鰭片3〇4之 斷面門形。上板部321a的中央部係穿設有因應風扇32()的 位f及大小所設計的空氣孔321c，並在上板部321a的四個 角落形成有小型螺絲孔3 2 1 d。側板部3 2 1 b的係在基板3 0 5 的突起305a的對應位置穿設有裝設孔32ie。The member 321 is mounted on the heat dissipating member 35, and the heat of the heat dissipating member 35 is dissipated to the upper side. The fan 320 is connected to a motor not shown in the drawing. The fan mounting member 321 is composed of an upper plate portion 3 21a and side plate portions 321b and 321b, and is formed with a sectional gate shape which can include the fins 3〇4 of the heat dissipating member 35〇. The central portion of the upper plate portion 321a is provided with an air hole 321c designed to correspond to the position and size of the fan 32 (), and small screw holes 3 2 1 d are formed at four corners of the upper plate portion 321a. The side plate portion 3 2 1 b is provided with a mounting hole 32ie at a corresponding position of the protrusion 305a of the substrate 300.

將犬起305a***裝設孔321e後，藉由將突起3〇5a彎曲 加工之固定，將風扇裝設元件321裝設於散熱元件350。 又，由風扇320的上方將小型螺絲3 2丨f鎖入小型螺絲孔 321d ’而使風扇320裝設於風扇裝設元件κι。After the dog 305a is inserted into the mounting hole 321e, the fan mounting member 321 is attached to the heat dissipating member 350 by bending the projection 3〇5a. Further, the small screw 3 2丨f is locked into the small screw hole 321d' by the upper side of the fan 320, and the fan 320 is attached to the fan mounting member κι.

導熱管330係將發熱體之CPU 3 40所產生的熱量輸送至 散熱元件350 ’其一端於散熱元件，另一端於Cpu 340，&將二者作導熱性的連接。導熱管33〇的一端係以壓合 的狀態嵌合於散熱元件350之基板3 〇5的嵌合溝305b，並以 金屬裝设元件33 1及小型螺絲固定。又，在配置於Cpu 340 上的受熱元件341之上面，與散熱元件35〇之基板3 〇5的下 面相同’亦形成有嵌合溝341a，而使導熱管330的另一端 係以壓合的狀態嵌合於嵌合溝341a，並以金屬裝設元件 342及小型螺絲固定於受熱元件34ι。受熱元件341係為熱 傳導率南的金屬材料（例如銅）。 CPU 340的下方係配置有電路基板的插槽（s〇cket) 343。插槽343的側面形成有突起34 3a。插槽343之上係與The heat pipe 330 conveys the heat generated by the CPU 3 40 of the heat generating body to the heat dissipating member 350', one end of which is disposed on the heat dissipating component, and the other end of which is thermally connected to the CPU 340, & One end of the heat transfer pipe 33 is fitted to the fitting groove 305b of the substrate 3 〇 5 of the heat dissipating member 350 in a pressed state, and is fixed by a metal mounting member 33 1 and a small screw. Further, on the upper surface of the heat receiving element 341 disposed on the CPU 340, the fitting groove 341a is formed in the same manner as the lower surface of the substrate 3 〇5 of the heat radiating element 35, and the other end of the heat transfer pipe 330 is press-fitted. The state is fitted to the fitting groove 341a, and is fixed to the heat receiving element 34ι by a metal mounting member 342 and a small screw. The heat receiving element 341 is a metal material (e.g., copper) having a thermal conductivity south. Below the CPU 340, a slot 343 of a circuit board is disposed. A projection 334a is formed on a side surface of the slot 343. Above slot 343

2036-5808-PF(Nl).ptd 第91頁 1259117 五、發辨親明（86) CPU 340重合，更與CPU 340上的受熱元件341重合。在兩 端部穿設有裝設孔344a的門形裝設夾（clip)344彼覆於插 槽343、CPU 340、與受熱元件341的上方，而將突起34 3a ***裝設孔344a，藉由將突起343a彎曲加工之固定，而將 插槽343、CPU 340、與受熱元件341 —體固定於彼此受壓 接觸的狀態。 以上的散熱器31 0A係具有散熱元件350與風扇320，將 發熱體之CPU 340所產生的熱量依序經由受熱元件341與導 熱管330輸送至散熱元件350，並由風扇320強制性地排出 至外界，而具有高散熱性能。又，由於cpu 34〇與散熱元 件350係為導熱管330所連接，散熱元件350與風扇320可以 配置在退離C P U 3 4 0的位置，使得例如薄型的筆記型電腦 等要在CPU340的附近裝設散熱構造有空間上的困難之情 況，有了可供對應的方案。 又’因為散熱器3 1 〇 A的散熱元件3 5 0係為將複數個籍 片3 04相互間隔並立設在基板305的一表面上的狀態下，摩 擦震動接合而成，與習知以銲接接合的情況相比，基板與 鰭片可以得到較高強度的接合、與較低的製造成本:特別 是因為鰭片304是由熔點低於銅的鋁所構成，摩擦震動 合時銅製的基板305可將接合治具3〇3的壓應力有效率地 達至接合部，而使接合部中無縫隙，使兩者成 的接合。 战文同強度 第3 8圖為一組裝後的斜視圖，係顯示本發明散熱器 第二實施型態。此處的散熱元件3丨〇B除了散熱元件的構成2036-5808-PF(Nl).ptd Page 91 1259117 V. The identification of the parent (86) CPU 340 coincides with the heating element 341 on the CPU 340. A gate-shaped clip 344 having a mounting hole 344a at both ends thereof is overlaid on the slot 343, the CPU 340, and the heat receiving element 341, and the protrusion 34 3a is inserted into the mounting hole 344a. The socket 343, the CPU 340, and the heat receiving element 341 are fixed to each other in a state of being pressed into contact with each other by bending the projection 343a. The heat sink 31 0A has a heat dissipating component 350 and a fan 320, and the heat generated by the CPU 340 of the heating element is sequentially sent to the heat dissipating component 350 via the heat receiving element 341 and the heat pipe 330, and is forcibly discharged by the fan 320 to The outside world has high heat dissipation performance. Moreover, since the CPU 34 is connected to the heat dissipating component 350 as the heat pipe 330, the heat dissipating component 350 and the fan 320 can be disposed at a position away from the CPU 340, so that, for example, a thin notebook computer or the like is to be installed in the vicinity of the CPU 340. If there is a spatial difficulty in the heat dissipation structure, there is a corresponding solution. Further, since the heat dissipating member 350 of the heat sink 3 1 〇A is in a state in which a plurality of pieces of the film 34 are spaced apart from each other and are erected on one surface of the substrate 305, friction and vibration are joined, and conventional welding is performed. In the case of bonding, the substrate and the fin can be joined with higher strength and lower manufacturing cost: in particular, since the fin 304 is made of aluminum having a lower melting point than copper, the substrate 305 made of copper when frictional vibration is combined. The compressive stress of the joining jig 3〇3 can be efficiently reached to the joint portion, and the joint portion can be joined without gaps. War text strength Figure 8 is an assembled perspective view showing the second embodiment of the heat sink of the present invention. Here, the heat dissipating component 3丨〇B is composed of the heat dissipating component

1259117 五 '發明說明（87) 之外，均與第一實施型態之散熱器3 1 ΟA相同。散熱器31 0B 的散熱元件360，如以上所說明，係將鋁散熱部307摩擦震 動接合於銅製的基板305的一表面。鋁散熱部307係將重合 配置於基板305的一表面上的鋁製基板307a、以及相互間 隔並立設於基板3 0 5的相對側之面上的各鱗片3 0 7 b，以擠 型一體成形而成。 因為散熱器31 0B的散熱元件36 0係將銅製的基板3〇5與 銘製的基板3 0 7 a摩擦震動接合而成，與習知以銲接與*** 壓接接合的情況相比，基板3 0 5與3 0 7 a可以得到較高強度 的接合、與較低的製造成本。又，摩擦震動接合部位係為 基板205與基板307a之重合部，因為有大的接合面積，比 第一實施型態之散熱器31 0A的散熱元件350容易製造。 第3 9 A〜3 9 B圖係顯示本發明散熱器之第三實施型態， 其中第39A圖為分解斜視圖，第39B圖為組裝後的斜視圖。 又’第40A圖為第39A〜39B圖之散熱器之俯視圖；第、 4 0C圖分別為第39A〜39B圖之散熱器之X方向側視圖與γ方向 側視圖。 均與 此處的散熱元件31 0C除了鰭片的構造等等之外 第一實施型態之散熱器3 1 0 A相同。 散熱元件31〇(：的風扇322係以配置於散熱元件35 側：狀態下直接裝設於散熱元件35 0。風扇322係面朝散埶 凡件350的各鰭片3〇4的側端面配置於各鰭片3〇4的一，、、 元件250的熱量排出至上方。風扇322 包3各韓片304的斷面門形的風扇箱型物3%。在1259117 5 'Inventive Note (87) is the same as the heat sink 3 1 ΟA of the first embodiment. As described above, the heat dissipating member 360 of the heat sink 31 0B frictionally and oscillates the aluminum heat dissipating portion 307 to one surface of the copper substrate 305. The aluminum heat dissipating portion 307 is formed by superposing an aluminum substrate 307a disposed on one surface of the substrate 305 and scallops 3 0 7 b which are spaced apart from each other and disposed on the opposite side of the substrate 305, and are integrally formed by extrusion. Made. Because the heat dissipating component 36 0 of the heat sink 31 0B is formed by frictionally and vibrating the substrate 3〇5 made of copper and the substrate 30.7a of the original, the substrate 3 is compared with the conventional case of bonding by welding and explosion bonding. 0 5 and 3 0 7 a can achieve higher strength bonding and lower manufacturing costs. Further, the frictional vibration joint portion is a portion where the substrate 205 and the substrate 307a overlap each other, and because of the large joint area, it is easier to manufacture than the heat sink element 350 of the heat sink 31 0A of the first embodiment. The third embodiment of the heat sink of the present invention is shown in Fig. 39A to Fig. 3B, wherein Fig. 39A is an exploded perspective view, and Fig. 39B is a perspective view after assembly. Further, Fig. 40A is a plan view of the heat sink of Figs. 39A to 39B; and Fig. 40C is a side view of the X direction and a side view of the γ direction of the heat sink of Figs. 39A to 39B, respectively. The heat sink element 31 0C herein is the same as the heat sink 3 1 0 A of the first embodiment except for the configuration of the fins and the like. The heat dissipating member 31 is disposed on the side of the heat dissipating member 35 in a state in which the fan 322 is directly disposed on the heat dissipating member 35 0. The fan 322 is disposed on the side end surface of each fin 3〇4 of the dissipating member 350. The heat of the element 250 is discharged to the upper side of each of the fins 3〇4, and the fan 322 packs 3 of the fan-box type of the section-shaped gate of each of the Korean sheets 304.

1259117 五、發研說明（88) 型物322a的下部與基板305的突起305a的對應位置係穿設 有裝設孔322b。將突起305a***裝設孔322b之後，藉由將 突起305a彎曲加工之固定，而將風扇322裝設於散熱元件 350 〇 以上的散熱器3 1 0 C係具有散熱元件3 5 0與風扇3 2 0，將 發熱體之CPU 340所產生的熱量依序經由受熱元件μ；[與導 熱管330輸送至散熱元件350，並由風扇322強制性地排出 至外界’而具有高散熱性能。又，由於cpu 340與散熱元1259117 V. Research Description (88) The lower portion of the pattern 322a and the corresponding position of the projection 305a of the substrate 305 are provided with mounting holes 322b. After the protrusion 305a is inserted into the mounting hole 322b, the fan 322 is mounted on the heat sink element 350 〇 or more by the bending of the protrusion 305a. The heat sink element 3 50 and the fan 3 2 are provided. 0, the heat generated by the CPU 340 of the heating element is sequentially passed through the heat receiving element μ; [the heat transfer tube 330 is sent to the heat radiating element 350, and is forcibly discharged to the outside by the fan 322" to have high heat dissipation performance. Also, due to the cpu 340 and the heat sink

件350係為導熱管330所連接，散熱元件350與風扇322可以 配置在遠離CPU 340的位置，並且因為風扇322係配置於散 熱元件350之一側，而使散熱元件3 1〇c的全體高度可小於 第一實施型態的散熱器310A，而更適合於例如薄型的筆記 型電腦等要在CPU340的附近裝設散熱構造有空間上的困難 之情況。 而在其他的構成及作用方面，則與第一實施型態的散 熱器31 0A相同。 第4 1圖為一組裝後的斜視圖 係顯示本發明散熱器 第四實施型態。此處的散熱元件310D除了散熱元件的構 之外，均與第三實施型態之散熱器31〇The member 350 is connected to the heat pipe 330, and the heat dissipating member 350 and the fan 322 can be disposed at a position away from the CPU 340, and since the fan 322 is disposed on one side of the heat dissipating member 350, the overall height of the heat dissipating member 3 1〇c is made. It can be smaller than the heat sink 310A of the first embodiment, and is more suitable for, for example, a thin notebook computer or the like in which a heat dissipation structure is installed in the vicinity of the CPU 340. Other configurations and operations are the same as those of the heat radiator 31 0A of the first embodiment. Fig. 4 is a perspective view of the assembled body showing the fourth embodiment of the heat sink of the present invention. The heat dissipating component 310D herein is identical to the heat sink 31 of the third embodiment except for the structure of the heat dissipating component.

的散熱元件36。，如以上所說明，係將紹散熱部：摩^ 動接合於銅製的基板305的—表面。紹散熱部3〇7係將重 配置於基板305的-表面上的鋁製基板⑽。、以及相互間 隔並立設於基板3G5的相對側之面上的各_片動，以摘 型一體成形而成。Heat sink element 36. As described above, the heat dissipating portion is frictionally bonded to the surface of the substrate 305 made of copper. The heat dissipating portion 3〇7 is placed on the aluminum substrate (10) on the surface of the substrate 305. And each of the sheets moving apart from each other and standing on the opposite side of the substrate 3G5 is integrally formed by picking.

1259117 五、發明說明（89) 第4 2 A〜4 2 β圖係顯示本發明散熱器之第五實施型態， 其中第42Α圖為分解斜視圖，第42Β圖為組裝後的斜視圖。 又’第43Α圖為第42Α〜42Β圖之散熱器之俯視圖；第43Β、 43C圖分別為第42Α〜42Β圖之散熱器之X方向側視圖與γ方向 側視圖。 此處的散熱器3 1 Ο Ε大略與第一實施型態之散熱器3 1 〇 a 相同，係具有散熱元件350,與風扇320之高性能的散熱 裔。散熱元件3 5 0 ’係在不經由導熱管3 3 〇的狀態下，直接 與CPU 340作導熱性的連接。 ^ 散熱元件350’大略與第一實施型態之散熱器31〇A之 散熱元件3 5 0的構成相同，而以橫切各鰭片β 〇 4的方式，形 成有可供裝設夾344***的夾溝304a。而散熱元件350，係 在銅製的基板305的一表面，立設有二列的鋁製鰭片3〇4而 分隔出夾溝304a，再以摩擦震動接合而成。 又 在政熱元件350的基板305的下面並未形成有嵌 合溝。 政熱器3 1 0 E的風扇裝設元件3 2 1 ’的側板部3 2 1 b的下部 中央部係形成有可供裝設夾344嵌合的夾溝321g。 關於散熱器3 1 0E的組裝順序，首先以Cpu 340、散熱 疋件350’的基板3〇5的順序重合於插槽343上；將裝設夾 344***散熱元件35〇’的夾溝3〇“ ；更將插槽343的突起 343a***裝設夾344的裝設孔34乜，而藉由將突起^仏彎 曲加工之固定，而將插槽343、CPU 340、散熱元件350，以 相互叉壓接觸的狀態下一體固定，使發熱體之CPU 340與1259117 V. DESCRIPTION OF THE INVENTION (89) The fourth embodiment shows a fifth embodiment of the heat sink of the present invention, wherein the 42nd drawing is an exploded perspective view, and the 42nd drawing is an assembled oblique view. Further, the '43' is a plan view of the heat sink of the 42nd to 42th drawings; the 43rd and 43rd are the X-direction side view and the γ-direction side view of the heat sink of the 42nd to 42th, respectively. Here, the heat sink 3 1 Ο is substantially the same as the heat sink 3 1 〇 a of the first embodiment, and has a heat dissipating member 350 and a high-performance heat sink of the fan 320. The heat dissipating member 3 5 0 ' is directly connected to the CPU 340 in a thermally conductive state without passing through the heat transfer tube 3 3 . ^ The heat dissipating component 350' is substantially the same as the heat dissipating component 350 of the first embodiment of the heat sink 31A, and is formed with a mounting clip 344 inserted transversely to each fin β?4. The groove 304a. On the other hand, the heat dissipating member 350 is provided with two rows of aluminum fins 3〇4 on one surface of the copper substrate 305 to separate the grooves 304a, and then joined by friction and vibration. Further, no underlay is formed in the lower surface of the substrate 305 of the thermal element 350. The lower portion of the side plate portion 3 2 1 b of the fan mounting member 3 2 1 ' of the heat exchanger 3 1 0 E is formed with a groove 321g into which the mounting clip 344 can be fitted. The assembly sequence of the heat sink 310E is first superposed on the slot 343 in the order of the substrate 340 of the CPU 340 and the heat sink 350'; the clip 344 is inserted into the grooving groove of the heat dissipating member 35'. Further, the protrusion 343a of the slot 343 is inserted into the mounting hole 34 of the mounting clip 344, and the socket 343, the CPU 340, and the heat dissipating member 350 are mutually crossed by fixing the protrusions. Integrated in the state of pressure contact, so that the CPU 340 of the heating element

2C36-5808-PF(Nl).Ptd2C36-5808-PF(Nl).Ptd

第95頁 1259117 五、發明說明(％) 散熱元件3 50’形成導熱性的連接。 接下來，一面將裝設夾344***夾溝321g，一面將風 扇裝設元件321’被覆於散熱元件3 5 0’之上，將突起3〇 5a插 入裝設孔321e後，而藉由將突起30 5a彎曲加工之固定，將 風扇裝設元件321’裝設於散熱元件350，。最後，由風扇 3 2 0的上方將小型螺絲321 f鎖入小型螺絲孔321d，而將風 扇3 2 0裝設於風扇裝設元件3 2 1，，而完成了散熱器3 2 1 E的 組裝。 以上的散熱器3 2 1 E，係具有散熱元件3 5 0，與風扇 320，在不經由導熱管33〇的狀態下，直接將cpu 340所產 生的熱直接傳達至散熱元件3 5 〇 ’，而由風扇強制性地排出 至外界’具有特別高的散熱性能。 而其他的構成及作用，係與第一實施型態之散熱器 310A 相同。 ^ 第44圖為一組裝後的斜視圖，係顯示本發明散熱器之 第六實施型態。此處的散熱元件3 1〇F除了散熱元件的構成 之外’均與第五實施型態之散熱器3丨〇E相同。散熱器3丨〇{? 的散熱兀件360，係與第二實施型態之散熱器31〇β相同， 係將鋁散熱部30 7摩擦震動接合於銅製的基板3〇5的一表 =。鋁散熱部30 7係將重合配置於基板3〇5的一表面上的鋁 製基板30 7a、以及相互間隔並立設於基板3〇5的相對側之 面上的各韓片30 7b，以擠型一體成形而成。又，各鰭片 307b，係形成有與第五實施型態相同而圖式未繪示的夾 溝。Page 95 1259117 V. Description of the Invention (%) The heat dissipating member 3 50' forms a thermally conductive connection. Next, the mounting clip 344 is inserted into the grooving 321g, and the fan mounting member 321' is overlaid on the heat dissipating member 305', and the projection 3〇5a is inserted into the mounting hole 321e, and the projection is raised by the projection 321e. 30 5a is fixed by bending, and the fan mounting member 321' is mounted on the heat dissipating member 350. Finally, the small screw 321 f is locked into the small screw hole 321d from above the fan 320, and the fan 320 is installed in the fan mounting member 3 2 1, and the assembly of the heat sink 3 2 1 E is completed. . The above heat sink 3 2 1 E has a heat dissipating component 350, and the heat generated by the cpu 340 is directly transmitted to the heat dissipating component 3 5 〇 ' without the heat transfer tube 33 不. The forced discharge of the fan to the outside world has a particularly high heat dissipation performance. The other configurations and functions are the same as those of the heat sink 310A of the first embodiment. Figure 44 is a perspective view showing the assembled sixth embodiment of the heat sink of the present invention. Here, the heat dissipating elements 3 1〇F are identical to the heat sink 3丨〇E of the fifth embodiment except for the configuration of the heat dissipating elements. The heat sink member 360 of the heat sink 3 is the same as the heat sink 31〇β of the second embodiment, and the aluminum heat sink portion 30 7 is frictionally vibrated to a table of the copper substrate 3〇5. The aluminum heat dissipating portion 30 7 is formed by superposing an aluminum substrate 30 7a disposed on one surface of the substrate 3〇5 and each of the Korean sheets 30 7b which are spaced apart from each other and standing on the opposite side of the substrate 3〇5 to be squeezed The shape is formed in one piece. Further, each of the fins 307b is formed with a groove which is the same as that of the fifth embodiment and is not shown in the drawings.

1259117 五、發明說明（tl) 第4 5A〜4 5B圖係顯示本發明散熱器之第七實施型態， 其中第45A圖為分解斜視圖，第45B圖為組裝後的斜視圖。 又’第46A圖為第45A〜45B圖之散熱器之俯視圖；第46B、 46C圖分別為第45A〜45B圖之散熱器之X方向側視圖與γ方向 側視圖。 此處的散熱器3 1 0 G大略與第五實施型態之散熱器3 1 〇 E 相同，係具有散熱元件350,與風扇320之高性能的散熱 器。散熱元件3 5 0 ’係在不經由導熱管3 3 0的狀態下，直接 與CPU 340作導熱性的連接。 散熱器310G中，風扇320係裝設於散熱元件350，的一 側’將散熱元件3 5 0 ’的熱排出於一側。因此，散熱器3 1 〇 G 的風扇裝設元件3 2 1 ’’的空氣孔3 2 1 c、小型螺絲孔3 21 d係 形成於一側。 以上的散熱器321G，係具有散熱元件350,與風扇 320，在不經由導熱管330的狀態下，直接將cpu 340所產 生的熱直接傳達至散熱元件3 5 0 ’，而由風扇強制性地排出 至外界，具有特別高的散熱性能。並且因為風扇32〇係配 置於散熱元件3 5 0 ’之一側，而可以縮小散熱元件3 1 〇 g的全 體尚度’而特別適合於例如薄型的筆記型電腦等要在 CPU340的附近裝設散熱構造有空間上的困難之情況。 而其他的構成及作用，係與第五實施型態之散熱器 3 1 0 E相同。 第4 7圖為一組裝後的斜視圖，係顯示本發明散熱器之 第八實施型態。此處的散熱元件3 1 〇H除了散熱元件的構成1259117 V. DESCRIPTION OF THE INVENTION (tl) The fourth embodiment of the heat sink of the present invention is shown in Figs. 45A to 4B, wherein Fig. 45A is an exploded perspective view, and Fig. 45B is a perspective view after assembly. Further, Fig. 46A is a plan view of the heat sink of Figs. 45A to 45B; and Figs. 46B and 46C are respectively a side view of the heat sink of the 45A to 45B and a side view of the γ direction. Here, the heat sink 3 1 0 G is substantially the same as the heat sink 3 1 〇 E of the fifth embodiment, and has a heat dissipating member 350 and a high-performance heat dissipator of the fan 320. The heat dissipating member 3 5 0 ' is directly connected to the CPU 340 in a thermally conductive state without passing through the heat transfer pipe 340. In the heat sink 310G, the fan 320 is mounted on one side of the heat dissipating member 350, and discharges the heat of the heat dissipating member 3 5 0 ' to one side. Therefore, the air holes 3 2 1 c and the small screw holes 3 21 d of the fan mounting member 3 2 1 '' of the heat sink 3 1 〇 G are formed on one side. The heat sink 321G has a heat dissipating component 350, and the heat generated by the cpu 340 is directly transmitted to the heat dissipating component 350' in a state where the fan 320 is not passed through the heat pipe 330, and is forced by the fan. It is discharged to the outside and has a particularly high heat dissipation performance. Further, since the fan 32 is disposed on one side of the heat dissipating member 350', it is possible to reduce the overall degree of the heat dissipating member 3 1 〇g, and is particularly suitable for, for example, a thin notebook computer or the like to be installed in the vicinity of the CPU 340. The heat dissipation structure has a spatial difficulty. The other configurations and functions are the same as those of the heat sink 3 1 0 E of the fifth embodiment. Fig. 47 is an oblique perspective view showing the eighth embodiment of the heat sink of the present invention. Here, the heat dissipating component 3 1 〇H is composed of a heat dissipating component

20-，，58〇8·ρρ(Ν1 > .ptd 第97頁 之散熱器31 0G相同。散熱元件 與第六實施型態之散熱器31 0F的 :2mm X 72mm X 5 5mm :0.3mmx 58mmx 12.5mm 125911720-,,58〇8·ρρ(Ν1 > .ptd The heat sink 31 0G on page 97 is the same. The heat sink and the sixth embodiment of the heat sink 31 0F: 2mm X 72mm X 5 5mm : 0.3mmx 58mmx 12.5mm 1259117

之外，均與第七實施型態 3 1 Ο Η的散熱元件3 6 0，係與 散熱元件360’相同。 ” 而具體的尺寸之一例，如下所示。 (1 )銅基板的厚度x寬度X深度：2mm X 72mm X 55隱 # ^厚度X〆罙度χ高度：0.3mmx54mmxl0mni 絲片間隔：1. 5mm~h 6mmThe heat dissipating elements 306 of the seventh embodiment are the same as the heat dissipating elements 360'. An example of a specific size is as follows: (1) Thickness of copper substrate x width X depth: 2 mm X 72 mm X 55 hidden # ^ Thickness X 〆罙 degree χ height: 0.3 mm x 54 mm x l0 mni Wire interval: 1. 5 mm~ h 6mm

鰭片數量：4 2 最大散熱能力：42〜43W 2)銅基板的厚度X寬度X深度 鋁鰭片的厚度x深度χ古 鰭片間隔：I 〜1. 6mm又 韓片數量：4 2 最大散熱能力：58〜59w 接下來說明本發明楚 令M ^ n 个知月第四群組的實施型態。 金屬兀件接Number of fins: 4 2 Maximum heat dissipation capacity: 42~43W 2) Thickness of copper substrate X width X depth Thickness of aluminum fins x depth Old fin spacing: I ~ 1. 6mm and number of Korean films: 4 2 Maximum heat dissipation Capability: 58 to 59w Next, an implementation form of the fourth group of the present invention will be described. Metal fitting

本發明金屬元株J* A 金屬元件重合而摩二Ϊ:方法的第-實施型態’係為將 摩捧震動接人el震動接合的方法。所謂的金屬元件 立 、妾0 ’疋稭由接合治具的壓應力使金屬元件重 部的縫隙消失，並藉由轉動的接合治具與金屬元件的接 所產生的震動***破壞存在於金屬元件重合面的氧化物 膜’並藉由摩擦熱將重合部高溫化而發生塑性變形，在增 加各金屬元件的接觸面積與增大擴散速率的同時將重合部The metal element J* A metal element of the present invention is superposed and the second embodiment: the first embodiment of the method is a method of vibrating the vibration by joining the vibration. The so-called metal component stands, 妾0 '疋 straw is broken by the compressive stress of the joint fixture, and the crack of the heavy part of the metal component disappears, and the vibration splitting damage caused by the joint of the rotating joint jig and the metal component is present in the metal component. The oxide film of the coincident surface is plastically deformed by raising the temperature of the overlapping portion by friction heat, and the overlapping portion is increased while increasing the contact area of each metal member and increasing the diffusion rate.

1259117 五、發明說明（93) 接合的方法。 而特別是，將複數個金屬元件，依照熔點的高低順序 相互重合配置，將接合治具壓至熔點最高的金屬元件之側 而為接合時，在各金屬元件的重合部上升至接合所必要的 溫度時鄰近接合治具之側的金屬元件仍能保持高抗形變強 度，而使接合治具的壓應力能夠有效率地傳達至重合面， 因而能夠完成金屬元件間無縫隙之高強度的接合。1259117 V. INSTRUCTIONS (93) Method of joining. In particular, a plurality of metal elements are arranged one above another in accordance with the order of the melting point, and when the bonding jig is pressed to the side of the metal element having the highest melting point and joined, the overlapping portion of each metal element is raised to the position necessary for bonding. At the time of temperature, the metal member adjacent to the side of the jig can maintain high deformation strength, and the compressive stress of the bonding jig can be efficiently transmitted to the coincident surface, thereby enabling high-strength bonding without gaps between the metal members.

此處舉出銘元件與熔點較高的銅元件作為金屬元件之 一例，而較具體地說明。第48A〜4 8C：圖係顯示摩擦震動接 合的順序，其中第48八、48B為正面剖面圖，第48C圖為第 48B^之側視圖。在本實施型態中，首先如第48八圖所示， 將IS元件401與銅元件402以面接觸的方式相互重合配置， 以未繪示於圖面的治具固定。Here, a copper element having a higher melting point and a higher melting point is exemplified as a metal element. 48A to 4C: The figure shows the order of frictional vibration engagement, wherein 48th, 48B are front cross-sectional views, and Fig. 48C is a side view of 48B. In the present embodiment, first, as shown in Fig. 48, the IS element 401 and the copper element 402 are placed in surface contact with each other, and are fixed by a jig not shown in the drawing.

接下來，如第48B、48C圖所示，將以轉動軸4〇3b為中 心、以圓周方向以圓周速度R高速轉動的接合治具4〇3之治 具本體40 3的圓周面垂直壓至銅元件4 〇2的表面4〇2a，並^ 接合治具403沿著銅元件402的表面402a以行進速率v移、 動’而使銘元件4 〇 1與銅元件4 0 2重合並接合。接合治具 403係在轉動轴403b的前端部將圓板狀的治具本體固 定，而治具本體403a係由JIS :SKD61等工具鋼所構成。相 對於壓入銅元件4〇2的表面4〇2a時的行進方向，治具本體 4 0 3 a係以送至後方的方向，沿著轉動軸4 〇 3 b的周邊轉動_。 如第49A圖所示，治具本體4〇3a的圓周面係以一定量 « (πι)壓入銅元件4〇2的表面402a的狀態丁以圓周方向=Next, as shown in Figs. 48B and 48C, the circumferential surface of the jig body 40 3 of the joining jig 4〇3 which is rotated at a high speed in the circumferential direction at the peripheral speed R centering on the rotating shaft 4〇3b is vertically pressed to The surface 4 〇 2a of the copper member 4 〇 2, and the bonding jig 403 is moved and moved at a traveling rate v along the surface 402a of the copper member 402 to re-engage the bonding member 4 〇1 and the copper member 420. The jig 403 is fixed to the disk-shaped jig body at the front end portion of the rotating shaft 403b, and the jig body 403a is made of tool steel such as JIS: SKD61. The jig body 4 0 3 a is rotated in the direction of the rear direction and is rotated along the periphery of the rotating shaft 4 〇 3 b with respect to the traveling direction when the surface 4〇2a of the copper member 4〇2 is pressed. As shown in Fig. 49A, the circumferential surface of the jig body 4〇3a is pressed into the surface 402a of the copper member 4〇2 by a certain amount « (πι) in the circumferential direction =

!259117!259117

五、發明說明（94) 2轉動’並沿著銅元件402的表面402a移動。而藉著上 ^具本體403a在銅元件402的表面4 〇2a之壓入，使鋁元^ 4〇1與銅元件4G2之重合面（交界面）的縫隙消失；並 古 速轉動的治具本體403a與銅元件4〇2的接觸所產生的9震问 動二將鋁元件401與銅元件402之重合面的氧化物皮膜*** 皮壞，並如第4 9 B圖所示，與治具本體4 〇 3 a接觸的銅元件 402的既定區域與其鄰近區域、還有與上述區域鄰接的鋁 元件401的既定區域，因治具本體4〇仏與銅元件4〇2的摩捧 接觸所產生的熱量而高溫化，呈現可塑化（流動化）的固； 2態。上述的結果，使得銅元件4〇2與鋁元件4 〇1在相互的 父界面上流動擴散，並由當初的表面開始塑性變形。 接合治具403之治具本體403a的通過軌跡，如第49C圖 所示’藉由治具本體4〇3a之壓應力而在銅元件402的表面 4 0 2a形成一對淺的段部4〇2b。又，鋁元件401與銅元件402 的重合面（交界面）中，已塑性變形的鋁元件4〇1及銅元件 402相互咬合，而固化成斷面凹凸型的接合面s，上述的接 合面S介於銅元件402與鋁元件401之間而將二者確實地接 合。 此處，考慮到接合治具403由鋁元件401之側壓入時， 紹元件4 0 1的熔點低於銅元件4 〇 2的熔點，鋁元件4 0 1與銅 元件4 0 2的重合面（交界面）達到接合所必要的溫度（共晶溫 度5 4 8 °C )以上時，鋁元件4 〇 1的抗形變強度就會變得較 小，而使來自接合治具4 〇3的壓力無法充分地傳達至鋁元 件401與銅元件402的重合面（交界面），而容易發生接合不V. INSTRUCTION DESCRIPTION (94) 2 Rotate 'and move along surface 402a of copper element 402. By pressing the surface of the copper element 402 4 〇 2a by the upper body 403a, the gap of the overlapping surface (interface) of the aluminum element 4〇1 and the copper element 4G2 disappears; and the ancient speed turning fixture The ninth vibration generated by the contact between the body 403a and the copper element 4〇2 ruptures the oxide film of the overlapping surface of the aluminum element 401 and the copper element 402, and as shown in FIG. The predetermined area of the copper element 402 contacted by the body 4 〇3 a and its adjacent area, and the predetermined area of the aluminum element 401 adjacent to the above area, are generated by the contact of the jig body 4 〇仏 with the copper element 4 〇 2 The heat is elevated and appears to be plasticized (fluidized) solid; As a result of the above, the copper member 4〇2 and the aluminum member 4〇1 flow and diffuse on the mutual parent interface, and plastic deformation starts from the original surface. The passage path of the jig body 403a of the jig 403 is formed as a pair of shallow segments 4 on the surface 4 0 2a of the copper member 402 by the compressive stress of the jig body 4〇3a as shown in Fig. 49C. 2b. Further, in the overlapping surface (interface) between the aluminum element 401 and the copper element 402, the plastic element 4001 and the copper element 402 which have been plastically deformed are engaged with each other, and are solidified into a joint surface s having a cross-sectional uneven shape, and the above-mentioned joint surface S is interposed between the copper element 402 and the aluminum element 401 to positively bond the two. Here, considering that the bonding jig 403 is pressed by the side of the aluminum member 401, the melting point of the element 401 is lower than the melting point of the copper element 4 〇2, and the overlapping surface of the aluminum element 406 and the copper element 404 When the interface (over the interface) reaches the temperature necessary for the bonding (eutectic temperature of 5 4 8 ° C) or more, the deformation resistance of the aluminum member 4 〇 1 becomes small, and the pressure from the bonding fixture 4 〇 3 is made. It cannot be sufficiently conveyed to the overlapping surface (interface) of the aluminum member 401 and the copper member 402, and the bonding is not easy to occur.

2036-5808-PF(Nl).ptd 第100頁 1259117 五、發—說研（胳) 一 ---- 良 另 方面，將接合治具403壓入炼點南於結元件mi的 銅元件402之側時，在鋁元件401與銅元件402的重合面（交 界面）達到接合所必要的溫度（共晶溫度）以上時，銅元件 402可以保持比較大的抗形變強度，可使來自接合治具4〇3 的壓力充分地傳達至鋁元件4〇1與銅元件4〇2的重合面i交 界面），而使兩元件間的縫隙消失，而能夠行高強度的接 合。 如第50A圖所示，接合治具4〇3之治具本體4〇3a的圓周 面上’係形成有約略沿著轉動方向的凹槽4〇3c。因此，增 大了接合治具403的圓周面與銅元件4〇2的接觸面積，可以 有效率地產生摩擦熱，並可以有效率地接合銅元件4〇2盥 鋁元件401。 又凹槽403c，係相對於轉動方向輕微傾斜、且連續的 凹槽，即是在接合治具403的轉動軸4〇3b的周邊，沿著治 具本體403a的圓周面描繪出螺旋狀軌跡而形成。因此，伴 隨著治具本體403a的轉動與移動，凹槽4〇3c内部所蓄積的 可塑化的金屬會沿著治具本體4〇仏的寬度方向依序送出， 因此可以將接合後銅元件402表面殘留的凹入量（段部 的高度）抑制到最小限度。 在此處，接合治具403的治具本體403a的圓周面之凹 槽403c之間的平面部4〇3d的寬度％ (mm)及凹槽4〇3c的寬度 w2 (mm)，係設定為符合以下條件··丨$ % $ 5、且} $ % $ 3、且。將平面部403d及凹槽403c如此 設定時，不但可以抑制接合治具4〇3的治具本體4〇3a壓入2036-5808-PF(Nl).ptd Page 100 1259117 V. Hair-speaking (g) One---- In another aspect, the bonding fixture 403 is pressed into the copper element 402 of the junction element south. On the side, when the overlapping surface (intersection) of the aluminum element 401 and the copper element 402 reaches a temperature (eutectic temperature) necessary for bonding, the copper element 402 can maintain a relatively large deformation strength, and can be obtained from the bonding treatment. The pressure of 4〇3 is sufficiently transmitted to the interface of the overlapping surface i of the aluminum element 4〇1 and the copper element 4〇2, and the gap between the two elements disappears, so that high-strength bonding can be performed. As shown in Fig. 50A, the circumferential surface of the jig body 4〇3a of the jig 4〇3 is formed with a groove 4〇3c approximately in the rotational direction. Therefore, the contact area between the circumferential surface of the joint jig 403 and the copper member 4A2 is increased, friction heat can be efficiently generated, and the copper member 4〇2盥 aluminum member 401 can be efficiently joined. Further, the groove 403c is a slightly inclined and continuous groove with respect to the rotation direction, that is, a spiral track is drawn along the circumferential surface of the jig body 403a around the rotation axis 4〇3b of the jig 403. form. Therefore, with the rotation and movement of the jig body 403a, the plasticized metal accumulated inside the recesses 4〇3c is sequentially sent out along the width direction of the jig body 4〇仏, so that the post-joined copper member 402 can be The amount of recessed surface (the height of the segment) is suppressed to a minimum. Here, the width % (mm) of the flat portion 4〇3d between the groove 403c of the circumferential surface of the jig body 403a of the jig 403, and the width w2 (mm) of the groove 4〇3c are set to The following conditions are met: · $ % $ 5, and } $ % $ 3, and. When the flat portion 403d and the recess 403c are set in this way, it is possible to suppress the pressing of the jig body 4〇3a of the joining jig 4〇3.

2036oS0S-?F(ND.ptd2036oS0S-?F (ND.ptd

第101頁 1259117 五、發明說明(9θ) 鋼元件402表面的壓入量，接合治具4〇3的治具本體4〇^所 產生摩擦熱的產生量就亦會較大，@能夠行有效率的接 合。 又1接合治具403之治具本體4 〇3a的圓周面的凹槽 40 3 c，係形成為傾斜於治具本體4〇3a的轉動方向，傾斜角 <9係設定為〇· 5〜2· 0。。而第5〇A圖中，M係顯示盥轉動方 向平行5線。、而治具本體4,的整個圓周面的寬度方向 :二至少形成有二條凹槽4〇3〇：。將凹槽4〇;^的傾斜角Θ及 2: :疋日”伴隨著接合治具403的治具本體40 3a的 凹槽403c内部所蓄積的可塑化的金屬會相當 403'甬；徬:;Ϊ本體4〇3a的寬度方向依序送出，治具本體 ?成乎不會有毛邊（burr)與凹痕殘留在銅元件 402的表面，亦減低了機械負荷。 ί ί 接合治具4〇3之治具本體4’的圓周面的凹槽 士—士 、'疋為〇.30〜1.2111111。將凹槽403(：的深度(1 二肉二疋il i可塑化的銅元件402就不會蓄積於凹槽403c : σ後殘留於鋼元件402表面的凹陷量就會變得 車父小，就可以施行有效率的接合。 以上述的方沐腺^ 動接合時，較好i f 件401與銅元件402重合而摩擦震 具本體403a)轉動的W^U)求出接合時接合治具403(治 25〇心2_動的:周， 接合時接合、、Λ目j Λ 〇 .................................( Α ) 合治具403與鋼元°件4 3的圓周速率小於250 m/nun時’接 凡件402之摩擦接觸所產生的熱量就過小，Page 101 1259117 V. Description of the invention (9θ) The amount of friction generated on the surface of the steel element 402, the amount of friction heat generated by the fixture body 4〇3 of the bonding fixture 4〇3 is also large, @能有有The bonding of efficiency. Further, the groove 40 3 c of the circumferential surface of the jig body 4 〇3a of the jig 403 is formed to be inclined to the rotation direction of the jig body 4〇3a, and the inclination angle <9 is set to 〇·5~ 2· 0. . In the fifth picture A, the M system shows that the direction of rotation of the 盥 is parallel to the 5 lines. And the width direction of the entire circumferential surface of the fixture body 4: two at least two grooves 4〇3〇:. The plasticized metal accumulated inside the groove 403c of the jig body 40 3a of the jig 403 is 403' 倾斜 when the groove 4 〇; The width direction of the body 4〇3a is sequentially sent out, and the fixture body is formed so that no burr and dent remain on the surface of the copper member 402, and the mechanical load is also reduced. ί ί 接 fixture 4〇 3 The girth of the body 4' has a groove on the circumference of the body, 'Shi, '疋 is 〇. 30~1.2111111. The groove 403 (: the depth (1 two meat 疋 i i plasticized copper element 402 is not The amount of depression remaining in the surface of the steel member 402 after accumulating in the groove 403c: σ becomes a small amount of the driver, and efficient joining can be performed. When the above-mentioned square body is joined, the best piece 401 is preferably used. When the copper element 402 is overlapped and the frictional vibrator body 403a) is rotated, the joint jig 403 is obtained (the 25th core is moved, the circumference is joined, the joint is joined, and the eye j j Λ 〇.. ...............................( Α ) The circumstance of the fixture 403 and the steel element 4 3 is less than 250 When m/nun, the heat generated by the frictional contact of the piece 402 is passed. ,

第102頁 1259117Page 102 1259117

而使銅元件402與鋁元件401的重入品，六田 σ 、父界面）的！碎；晶And the copper component 402 and the aluminum component 401 re-entry, Liutian σ, parent interface)! Broken

低’而導致接合不良。另-方面，接合時接合产具二的 圓周速率大於2000 m/min時’接合治具4〇3與銅元具件4〇2之 摩擦接觸所產生的熱量就會大過所必要的，不僅僅+是使接 :治具403的驅動能量損失會變大，並使與接合治具—接 觸的銅元件402的溫度會局部過高，導致該部分發生塑性 變形，而使接合治具403的壓應力無法充分地傳達至重合 面（交界面）導致在兩元件間有可能會產生縫隙。因此，可 以瞭解接合時接合治具4〇3以25〇〜2〇〇〇 m/min的圓周速率 ，動時，接合治具403與銅元件402之摩擦接觸所產生的熱 里為恰好適當’而能夠行良好的接合。 又’將鋁元件401與銅元件402重合而摩擦震動接合 時’接合時，接合治具4 〇 3 (治具本體4 〇 3 a)在銅元件4 0 2的 表面壓入量a (m)較好為由下式（B)求出： 0. 03 X t ^ a ^0. 3 X t..........................................(B) 其中t為重合部中的銅元件的厚度（m)。 接合時接合治具403在銅元件4 02表面的壓入量a小於 0.03t時，銅元件4〇2與鋁元件401的重合面（交界面）中會 殘留縫隙而導致接合不良。另一方面，壓入量a大於〇.3t 時，雖然銅元件402與鋁元件401的重合面（交界面）中不會鲁 殘留縫隙，而過大的接合治具403的壓入量會在銅元件402 的表面殘留顯著的凹痕，導致元件的損失。因此，接合時 接合治具403在銅元件402表面的壓入量a在0.03t以上、 0 · 31以下時，接合治具4 0 3的壓應力為正好適當的值，可Low' causes poor joint. On the other hand, when the circumferential velocity of the joint fixture 2 is greater than 2000 m/min, the heat generated by the frictional contact between the joint fixture 4〇3 and the copper component 4〇2 is greater than necessary, not only Only + is the connection: the driving energy loss of the jig 403 becomes large, and the temperature of the copper element 402 in contact with the bonding jig is locally too high, causing plastic deformation of the portion, and the bonding jig 403 is The compressive stress is not sufficiently transmitted to the coincident surface (interface), which may cause a gap between the two components. Therefore, it can be understood that the joint jig 4〇3 at the time of joining has a peripheral speed of 25 〇 2 2 m/min, and the heat generated by the frictional contact between the jig 403 and the copper member 402 is just right when moving. And can do a good joint. Further, when the aluminum element 401 and the copper element 402 are overlapped and the frictional vibration is joined, the bonding fixture 4 〇3 (the fixture body 4 〇3 a) is pressed against the surface of the copper element 420 (a). Preferably, it is obtained by the following formula (B): 0. 03 X t ^ a ^0. 3 X t......................... ........... (B) where t is the thickness (m) of the copper element in the overlap. When the pressing amount a of the bonding jig 403 on the surface of the copper member 012 is less than 0.03t, a gap remains in the overlapping surface (interface) between the copper element 4〇2 and the aluminum element 401, resulting in poor bonding. On the other hand, when the press-in amount a is larger than 〇.3t, although the gap is not left in the overlapping surface (interface) between the copper element 402 and the aluminum element 401, the excessively large bonding jig 403 is pressed in the copper. Significant dents remain on the surface of element 402, resulting in loss of components. Therefore, when the amount of press-a of the bonding jig 403 on the surface of the copper element 402 is 0.03 t or more and 0 · 31 or less, the compressive stress of the bonding jig 404 is just an appropriate value.

2036-5808-^(Nl).ptd 第103頁 1259117 五、發科說明（98) 以瞭解就可以在銅元件402與鋁元件401的重合部（六 不產生縫隙的情況下完成接合，亦可以縮小銅元 面的凹痕。 干4U2表 更者，將鋁元件401與銅元件4 02重合而摩擦震動 ^ 二接合時，接合治具403 ( 台具本體403a)沿著鋼元 出： 二）求 0. 1 ^R/(5. 0 x 107 X ........................... ............... “中R為接合時接合治具的圓周速率（m/min); t為重合部中的銅元件的厚度（m)。 其中，接合時接合治具403的圓周速率變大時， 合治具403與銅元件402的摩擦接觸所產生的熱量亦會微 大，而使接合治具403的行進速率v較高時，重合部二二 持一定的溫度；而銅元件4〇2的厚度變大時，重合面: 面）要達到-定的溫度以上就比較費肖，若此時‘父界 403的行進速率過大時，在重合部的溫度達到一定溫。 上之前，接合治具403就已通過，就會導致接合不良^ =而實行良好的摩擦震動接合時，接合治具4〇3的行進 速率V、圓周速率R、銅元件的厚度t必須要 實驗結果係確認了滿足VsR/(5 0x 1〇7χ't2)時，能y有而 :的接合。另-方面’由當接合治具4〇 广 時’會有降低接合效率的觀點，實丁進：年V過小 1 S V時，可以得到較好的接合效率。、’Ό '、 a"滿足0· 而治具本體43〇a係被固定於轉動軸403b的前端部時’2036-5808-^(Nl).ptd Page 103 1259117 V. Facts (98) It can be understood that the copper element 402 and the aluminum element 401 can be overlapped. The dent of the copper element surface is reduced. The dry 4U2 table is more like, the aluminum element 401 is overlapped with the copper element 420 and the frictional vibration is combined. When the second joint is joined, the joint fixture 403 (the table body 403a) is along the steel element: b) Find 0. 1 ^R/(5. 0 x 107 X ....................................... "The middle R is the circumferential speed (m/min) of the joining jig when engaged; t is the thickness (m) of the copper member in the overlapping portion. Among them, the circumferential speed of the joining jig 403 at the time of joining is changed. When the time is large, the heat generated by the frictional contact between the jig 403 and the copper member 402 is also large, and when the traveling speed v of the bonding jig 403 is high, the overlapping portion 22 holds a certain temperature; and the copper member 4 When the thickness of 〇2 becomes large, the overlapping surface: surface) is more difficult to reach a predetermined temperature. If the rate of travel of the parent boundary 403 is too large, the temperature at the overlapping portion reaches a certain temperature. The joint fixture 403 has passed, which will result in When the joint failure is good, and the good friction and vibration engagement is performed, the traveling rate V of the joining jig 4, the circumferential rate R, and the thickness t of the copper member must be confirmed by the experimental results to satisfy the VsR/(5 0x 1〇7χ' In the case of t2), it is possible to have a joint of y. In another aspect, 'when the joint fixture is 4 〇 wide', there is a view that the joint efficiency is lowered, and it is better to obtain a good result when the annual V is too small 1 SV. The joining efficiency., 'Ό ', a" satisfies 0· and the jig body 43〇a is fixed to the front end portion of the rotating shaft 403b'

2036-5808-PF(Nl).ptd 第104頁 1259117 五、發研說明（&9) 是為懸臂式（Cantilever type)的接合治具4〇3，治具本體 430a的寬度係設定為5〜25 _ ;而治具本體“心的寬度大 於25 mm時較好為使治具本體430a被固定於轉動轴4〇3b 的中間部，是為兩邊固定式的接合治具4〇3。當增加治具 本體430a的寬度時，作用於接合治具4〇3的麼力會使轉動 轴403b受到損壞，而造成難以將治具本體的圓周面垂 直壓入銅元件402的表面402a的問題。 -金屬元件的摩擦震動接合並不限於將紹元件與銅 合的情況，可以廣泛地適用於各金屬元件間 ° σ。而上述金屬元件的形狀，只要在相互重合 j =使接合治具壓入就可以。更者，重合Κΐί; 的數置也不限於二個，三個以上亦可。 -林如:πΪΛ51圖中，係將三個金屬元件（5000系的銘 Ϊ將拉乂糸的鋁元件4〇1’、銅元件4〇2)相互重合配 的治具本體4°3a壓入三個金屬元；中 銅元件402之側，而為摩擦震動接 ：， 砗各今J1 ; f 要達到一既定溫度以上，且此 時各金屬兀件的抗形變強唐對 至各金屬元件的重二六=自=治具的壓應力傳達 在蔣-伽AM - ΰ面（又界面）之傳達效率的影響，較好 為將二個金屬7C件依炼點的高低順序（此 件402、1〇〇〇系的鋁元件4 的1員序為銅义 ^ ^ _ 1T4U 1 5 0 0 0糸的銘元件4〇η亩合 配，’亚將接合治具403壓至三個金屬元 金屬元件(此處為銅元件402 )之側， =二的 其他，二個全®分此炎如 ①震動接合 金屬70件為銅、銘、錢時’較好為以銅元件、 2036-580S-PF(Nl).ptd 第105頁 1259117 五、發明說蝌（ίθθ )2036-5808-PF(Nl).ptd Page 104 1259117 V. Research Instructions (&9) is a Cantilever type joint fixture 4〇3, and the width of the fixture body 430a is set to 5 ~25 _ ;; and the fixture body "the width of the heart is greater than 25 mm, preferably the fixture body 430a is fixed to the middle portion of the rotating shaft 4 〇 3b, is a fixed joint jig 4 〇 3 on both sides. When the width of the jig body 430a is increased, the force acting on the jig 4〇3 causes damage to the rotating shaft 403b, which causes a problem that it is difficult to press the circumferential surface of the jig body vertically into the surface 402a of the copper member 402. - the frictional vibration bonding of the metal component is not limited to the case where the component is combined with copper, and can be widely applied to the respective components σ. The shape of the above-mentioned metal component is as long as they overlap each other j = the bonding jig is pressed in In addition, the number of coincidences is not limited to two, three or more. - Lin Ru: π ΪΛ 51 in the figure, the system will be three metal components (5000 series of Ming Hao will pull the aluminum The element 4〇1' and the copper element 4〇2) are mutually coincident with the fixture body 4°3a pressed into three Metal element; the side of the medium copper element 402, but for the friction and vibration connection: 砗 砗 J J J; f to reach a predetermined temperature or more, and at this time the resistance of each metal element is stronger than the weight of each metal element The influence of the compressive stress of the self-correcting fixture on the transmission efficiency of the Jiang-Gam-AM-face (and the interface) is better than the order of the two metal 7C parts according to the refining point (this piece 402, 1〇) The order of the member of the aluminum component 4 of the lanthanide series is the copper element ^ ^ _ 1T4U 1 5 0 0 0 糸 铭 铭 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 Here is the side of the copper component 402), = the other of the two, the two full ® points this inflammation as a vibration joint metal 70 pieces of copper, Ming, money when 'better with copper components, 2036-580S-PF ( Nl).ptd Page 105 1259117 V. Inventions 蝌 (ί θθ )

銘元件、鎂元件的順序重合，將接合治具壓 而行摩擦震動接合。 I W 金屬元件接合方法 本發明金屬元件接合方法的第二實施型態，係將複數 個金屬製板材立設接合於一金屬製的基板而為摩擦震動接 合而製造一散熱元件。 第52Α〜52Β圖及第53Α〜53Β圖為一系列之正面剖面圖， 係顯不本發明之金屬元件接合方法之第二實施型態之製造 方法，其中第52Α〜52Β圖係顯示元件配置步驟，其中第53Α 圖係顯示摩擦震動接合步驟，第53β圖係顯示間隔物脫離 步驟。又，第54圖為一分解斜視圖，係顯示本發明之散熱 元件製造用治具之一實施型態。 、一在本實施型態中，首先如第52 Α圖所示，將鋁製的板 狀兀件之鰭片404與鐵製的板狀元件之間隔物4〇5交互並 列’並立設配置於散熱元件製造用治具4丨〇之元件設定部 412 ° s 散熱元件製造用治具4 1 0，如第5 4圖所示，係由上面 疋開放的箱型治具本體4 1 1、置放於元件設定部4 1 2且可以 滑動的壓板413、緊閉螺栓414、基板固定板415、與緊閉 螺栓416所構成。其中元件設定部412係形成於治具本體 t丨&内部之凹部；緊閉螺检4 1 4係以與壓板4 1 3直交的方向 二牙治具本體4 11的壁體，且其前端部係固著於壓板4丨3的 月面頭#則位於治具本體4 1 1的壁體的外側；基板固定 板4 1 5係以與壓板4 1 3平行的方向，架設於、並橫跨治具本The order of the inscription element and the magnesium element coincides, and the jig is pressed to perform friction and vibration engagement. I W Metal Element Bonding Method In the second embodiment of the metal element joining method of the present invention, a plurality of metal plates are vertically joined to a metal substrate to form a heat dissipating member for frictional vibration bonding. The 52nd to 52th drawings and the 53rd to 53th drawings are a series of front cross-sectional views showing a manufacturing method of the second embodiment of the metal component bonding method of the present invention, wherein the 52nd to 52th frame display component arrangement steps , wherein the 53th image shows the frictional vibration bonding step, and the 53th image shows the spacer separation step. Further, Fig. 54 is an exploded perspective view showing an embodiment of the jig for manufacturing a heat dissipating member of the present invention. In the present embodiment, first, as shown in Fig. 52, the fins 404 of the aluminum plate-shaped element are alternately arranged with the spacers 4〇5 of the plate elements of the iron. The component setting unit 412 ° s of the jig for manufacturing the heat dissipating component is formed as a jig body 4 1 1 which is opened from the upper side as shown in FIG. The platen 413, the closing bolt 414, the substrate fixing plate 415, and the closing bolt 416 which are slidable by the component setting portion 4 1 2 are formed. The component setting portion 412 is formed in the recess of the fixture body t丨& the closed screw inspection 4 1 4 is a wall body of the second fixture body 4 11 in a direction orthogonal to the pressure plate 4 1 3 , and the front end thereof The lunar head # fixed to the pressure plate 4丨3 is located outside the wall of the jig body 41 1; the substrate fixing plate 4 1 5 is erected in the direction parallel to the platen 4 1 3 Cross-drug

第106頁 2036-5808-PF(Nl).ptd 1259117 五、發明說明（1Θ1) 體4 1 1的壁體的上部；緊閉螺栓4 1 6係用以將基板固定板 415的兩端固定於治具本體411的壁體的上部。 而在此處’各鰭片404與各間隔物4〇5以交互立設的方 式並排於兀件設定部4 1 2，將緊閉螺栓4 1 4鎖緊而藉由壓板 413的固定，使上述各鰭片4〇4與各間隔物4〇5彼此之間在 相互緊密接觸之下固定。此時，因為鰭片4 〇 4與間隔物4 〇 5 是全體等高的’各鰭片404的上面（基端面）與各間隔物405 的上面（基端面）係形成一水平面。 接下來’如第5 2 B圖所示，在配置於元件設定部4 1 2的 各鰭片404及各間隔物4 05的上面，搭載銅製的板狀元件之 基板406及其上方的基板固定板415，並將各鰭片404及各 間隔物405的上部（基端部）嵌入形成於基板固定板415的下 面之凹槽415a ’而固定各鰭片404及各間隔物405，使其無 法朝其長度方向（與紙面垂直的方向）移動。更者，在此狀 怨下’由基板固定板4 1 5兩端的螺絲孔4 1 5 b，朝向治具本 體4 11的壁體上面的螺絲孔4 11 a，將緊閉螺栓4丨6旋緊，而 將基板40 6固定於鰭片404及間隔物405的上部。又，雖然 圖式中未繪示，將基板4〇 6固定而使其無法朝其寬度方向 (紙面的左右方向）移動是必要的。此處，藉由鰭片4 0 4及 間隔物4 05的基端面與基板406的下面（一表面）直接接觸， 而完成將韓片404與間隔物405立設配置於基板406的步 驟。 而如第52A、52B圖所示的元件配置步驟，並非必要的 限制’只要在最後將各鰭片404與各間隔物4〇5如第52B圖Page 106 2036-5808-PF(Nl).ptd 1259117 V. Description of the Invention (1Θ1) The upper portion of the wall of the body 4 1 1; the closing bolt 4 16 is used to fix both ends of the substrate fixing plate 415 to The upper portion of the wall of the jig body 411. Here, each of the fins 404 and the spacers 4〇5 are arranged side by side in the manner of standing up to the element setting unit 4 1 2, and the closing bolts 4 1 4 are locked and fixed by the pressure plate 413. Each of the fins 4〇4 and the spacers 4〇5 are fixed to each other in close contact with each other. At this time, the upper surface (base end surface) of each fin 404 and the upper surface (base end surface) of each spacer 405 are formed in a horizontal plane because the fins 4 〇 4 and the spacers 4 〇 5 are all equal in height. Next, as shown in FIG. 5 2B, the substrate 406 on which the copper plate-shaped element is mounted and the substrate on which the substrate is placed are placed on the upper surface of each of the fins 404 and the spacers 405 disposed in the element setting portion 412. The plate 415 and the upper portion (base end portion) of each of the fins 404 and the spacers 405 are fitted into the recesses 415a' formed on the lower surface of the substrate fixing plate 415 to fix the fins 404 and the spacers 405, thereby making it impossible to Moves in the direction of its length (the direction perpendicular to the paper surface). Furthermore, in this case, the screw holes 4 1 5 b at both ends of the substrate fixing plate 4 1 5 are turned toward the screw holes 4 11 a above the wall of the fixture body 4 11 , and the closing bolts 4 6 6 are rotated. Tightly, the substrate 40 6 is fixed to the upper portion of the fin 404 and the spacer 405. Further, although not shown in the drawings, it is necessary to fix the substrate 4 to 6 so as not to be movable in the width direction (left-right direction of the paper surface). Here, the step of arranging the Korean wafer 404 and the spacer 405 on the substrate 406 is completed by directly contacting the base end faces of the fins 404 and the spacers 490 with the lower surface (one surface) of the substrate 406. However, the component arrangement steps as shown in Figs. 52A and 52B are not necessarily limited as long as the fins 404 and the spacers 4〇5 are finally shown in Fig. 52B.

第107頁 1259117 五、發明說稱（1G2) 所示配置於既定的位置，並不限制其順序。因此，亦可以 是例如將相互之間具有間隔的各鰭片4 0 4 (或各間隔物4 0 5 ) 配置好，在將基板4 06固定於其基端面之後，最後在鰭片 404(或間隔物405 )之間分別***間隔物405(或鰭片404 )。 接下來，如第53A圖所示，將以轉動軸403b為中心以 圓周方向高速轉動的接合治具403之治具本體403a的圓周 面垂直壓至基板4 0 6之另一表面2 0 6 a，並使接合治具4 0 3沿 著基板406之另一表面406a移動，使鰭片404接合於基板 406。治具本體403a的圓周面’係形成有與第一實施型態 相同的凹槽403c。 此時，因為構成基板4 0 6的銅的熔點高於構成鰭片4 0 4 的鋁，鰭片4 0 4與基板4 0 6之交界面的溫度上升到接合時所 必要的溫度（共晶溫度：5 4 8 °C )時，基板4 0 6仍能保持高的 抗形變強度，使接合治具4 0 3的壓應力能夠有效率地傳達 至交界面，並且能行鰭片404與基板406之間無縫隙的高強 度接合。 又，由於構成間隔物405的鐵的熔點高於構成鰭片404 的鋁及構成基板406的銅，接合治具403的圓周速率與行進 速率設定在既定的範圍時，間隔物405不會與鰭片404及基 板4 06接合，而能夠容易地僅接合基板406與鰭片404。 最後，將散熱元件製造用治具4 1 〇的緊閉螺栓2 1 6放 鬆，而將基板固定板4 1 5從治具本體4 11取下，並將緊閉螺 栓414放鬆，解除壓板413對鰭片40 4及間隔物40 5的固定， 如第53B圖所示，將基板40 6向上移動。如此一來，僅有接Page 107 1259117 V. The invention says that (1G2) is placed at a given location and does not limit its order. Therefore, it is also possible to arrange, for example, the fins 4 0 4 (or the spacers 4 0 5 ) having a space therebetween, after fixing the substrate 206 to the base end surface thereof, and finally at the fins 404 (or A spacer 405 (or fin 404) is inserted between the spacers 405), respectively. Next, as shown in Fig. 53A, the circumferential surface of the jig body 403a of the joining jig 403 which is rotated at a high speed in the circumferential direction around the rotating shaft 403b is vertically pressed to the other surface of the substrate 406. The bonding fixture 403 is moved along the other surface 406a of the substrate 406 to bond the fins 404 to the substrate 406. The circumferential surface of the jig body 403a is formed with the same groove 403c as the first embodiment. At this time, since the melting point of the copper constituting the substrate 406 is higher than the aluminum constituting the fin 404, the temperature at the interface between the fin 404 and the substrate 406 rises to the temperature necessary for bonding (eutectic). At a temperature of 5 4 8 ° C), the substrate 406 can maintain high deformation strength, so that the compressive stress of the bonding fixture 404 can be efficiently transmitted to the interface, and the fins 404 and the substrate 406 can be performed. High-strength joints without gaps. Further, since the melting point of the iron constituting the spacer 405 is higher than the aluminum constituting the fin 404 and the copper constituting the substrate 406, when the circumferential rate and the traveling rate of the bonding jig 403 are set within a predetermined range, the spacer 405 does not overlap the fin. The sheet 404 and the substrate 064 are joined, and the substrate 406 and the fin 404 can be easily joined only. Finally, the fixing bolts 2 1 〇 of the heat dissipating component manufacturing fixture 4 1 放松 are loosened, and the substrate fixing plate 4 1 5 is removed from the jig main body 4 11 , and the closing bolts 414 are loosened, and the pressing plate 413 is released. The fins 40 4 and the spacers 40 5 are fixed, and as shown in Fig. 53B, the substrate 40 6 is moved upward. In this way, only the connection

2036-5808-PF(Nl).ptd 第108頁 1259117 五、發明說明（i〇3) " "" 合於基板406的各鰭片404 —起向上移動，而將各間隔物 405留在散熱元件製造用治具41〇之元件設定部412。如此 可以以間隔物脫離步驟簡單地移除各間隔物4〇5，而可以 製造出如第55圖所示之散熱元件45〇，其中散熱元件45〇係 由相互間隔的複數個鋁製鰭片4〇4立設接合於銅製基板4〇6 之一表面。 藉由上述的方法，由於各鰭片4 〇 4之間分別置入各間 隔物405，可以正確地保持鰭片4〇4相互之間隔，並可以決 定相互以既定間隔隔開狀態的各鰭片4〇4之並列位置。 又，間隔物405係補強了鰭片4〇4，摩擦震動接合步驟時就 不會有彎曲應力作用在鰭片4〇4，鰭片4〇4的厚度亦可以變 得非常薄。又，只要變更間隔物4〇 5的厚度，就能夠任意 地變更鰭片4 0 4之配置間隔，更加上一併變更鰭片4 〇 4的高 度的情況下，特別是將薄板厚、高板高的各鰭片4〇4以短 間隔立設接合於基板406之一表面，就可以製造具有高高 度/間隔比（例如高度/間隔比超過2〇)的散熱元件45〇。當 然’間隔物4 0 5並不限定為金屬製，考量到強度、加工性 等因素時，亦可以使用陶瓷或是其他任意材質；又亦可以 適宜地決定間隔物405的形狀。而在元件配置步驟中將各 鰭片404立設配置於基板40 6的一表面時，各間隔物4〇5的 基端面雖然亦可以不與基板4 〇 6的該表面接觸，而考慮到 摩擦震動接合步驟時來自接合治具4〇3的壓應力作用為對 鰭片404的彎曲應力時，為了提高間隔物4〇5對鰭片4〇4的 補強效果，較好為如本實施型態一般，準備同高的各間隔2036-5808-PF(Nl).ptd Page 108 1259117 V. Description of the Invention (i〇3) """ The fins 404 of the substrate 406 are moved upwards, leaving the spacers 405 The component setting unit 412 of the jig 41 for heat dissipation element manufacturing. Thus, the spacers 4〇5 can be simply removed in the spacer removing step, and the heat dissipating member 45A as shown in FIG. 55 can be manufactured, wherein the heat dissipating member 45 is composed of a plurality of aluminum fins spaced apart from each other. 4〇4 is erected to one surface of the copper substrate 4〇6. According to the above method, since the spacers 405 are respectively disposed between the fins 4 to 4, the fins 4 and 4 can be accurately spaced from each other, and the fins can be determined to be spaced apart from each other at a predetermined interval. 4并4 of the juxtaposition. Further, the spacers 405 reinforce the fins 4〇4, and the frictional stress bonding step does not cause bending stress to act on the fins 4〇4, and the thickness of the fins 4〇4 can be made very thin. Moreover, if the thickness of the spacers 4〇5 is changed, the arrangement interval of the fins 404 can be arbitrarily changed, and when the height of the fins 4 to 4 is changed more than once, the thickness of the fins and the slabs are particularly high. The high fins 4〇4 are erected to the surface of one of the substrates 406 at short intervals, so that the heat dissipating elements 45A having a high height/space ratio (for example, a height/space ratio exceeding 2 〇) can be manufactured. Of course, the spacer 4 0 5 is not limited to a metal, and ceramics or any other material may be used in consideration of factors such as strength and workability; and the shape of the spacer 405 may be appropriately determined. When the fins 404 are erected on one surface of the substrate 40 6 in the component disposing step, the base end faces of the spacers 4 〇 5 may not be in contact with the surface of the substrate 4 〇 6 , and the friction is considered. In the vibration bonding step, when the compressive stress from the bonding jig 4〇3 acts as a bending stress on the fin 404, in order to improve the reinforcing effect of the spacer 4〇5 on the fin 4〇4, it is preferably as in the present embodiment. Generally, prepare the intervals of the same height

第109頁 1259117 五、發明說明（1G4) 物405與各鰭片404，而使各間隔物405的基端面與基板4 06 的該表面接觸。 而，在提升基板406與各鰭片404之接合強度的同時， 亦提升散熱元件450的散熱性能的情況，就如第56A圖所 示，較好為使接合治具4〇3(治具本體403a)在基板406的裏 面（基板40 6的另一表面）的移動能夠遍及各鰭片4〇4的基端 面的全面，使得各趙片404能夠完全地接合於基板4〇6。 (第56A〜56C圖中以斜線標示的區域係表示接合治具4〇3的 移動轨跡）另一方面，在重視接合成本的削減時，例如如 第5 6 B圖所示，亦可以移動接合治具4 〇 3，而未遍及各鰭片 4 04的基端面的全面，僅遍及各鰭片4〇4基端面的一部份。 又，將基板406與各鰭片4〇4摩擦震動接合時，同時也將基 板4 0 6與各間隔物4 〇 5接合時，在間隔物脫離步驟中，雖然 2/1 吏用任何的方法將各間隔物40 5從基板406與各鰭片 404的Ϊ ί接合治具4〇3的治具本體4〇3a的寬度小於鰭片 隔物L ’如第5吒圖所示，較好為以基板406與各間 區域）來二=合的執跡（在圖式中為各鰭片404正上方的 接合治具403 ;又，僅僅使各縛片404與基 ^406接曰觸’而使各間隔物4〇5不與基板4〇6接觸的配置亦 丄及二 =的實施型態-般，使用炫點高於鰭片 土板406之熔點的間隔物4 ， ^ 移動軌跡無關，各时就與接。，口具403的 4〇4時，即使在接人$物〇5不會接合於基板4〇6與鰭片 406盥妹片404 。後，各間隔物405亦不會接合於基板 …、^4〇4 ’而使間隔物脫離步驟的程序可以省略，而Page 109 1259117 V. Inventive Description (1G4) The object 405 and the fins 404 are brought into contact with the surface of the substrate 060 by the base end faces of the spacers 405. However, while the bonding strength between the substrate 406 and the fins 404 is improved, the heat dissipation performance of the heat dissipating member 450 is also improved. As shown in FIG. 56A, it is preferable to make the bonding fixture 4〇3 (the fixture body). 403a) The movement of the inside of the substrate 406 (the other surface of the substrate 406) can be spread over the entire base end faces of the fins 4〇4 so that the respective pieces 404 can be completely bonded to the substrate 4〇6. (The area indicated by oblique lines in the 56A to 56C shows the movement trajectory of the joining jig 4〇3.) On the other hand, when the reduction of the joining cost is emphasized, for example, as shown in FIG. The jig 4 〇 3 is not spread over the entire end surface of each of the fins 404, only over a portion of the base end faces of the fins 4〇4. Further, when the substrate 406 is frictionally and frictionally bonded to the respective fins 4〇4, and the substrate 406 is also joined to each of the spacers 4 to 5, in the spacer detachment step, 2/1 is used in any method. The width of the jig body 4〇3a of each of the spacers 40 5 from the substrate 406 and the fins 404 is less than the fin spacer L′ as shown in FIG. 5 , preferably The substrate 406 and the respective regions are both aligned (in the drawing, the bonding jig 403 directly above each fin 404; again, only the tabs 404 are in contact with the base 406) The arrangement in which the spacers 4〇5 are not in contact with the substrate 4〇6 is also the same as the embodiment in which the spacers 4〇5 are used, and the spacers 4 having a bright point higher than the melting point of the fin soil plate 406 are used, and the movement trajectory is irrelevant. At the same time, when the mouthpiece 403 is 4〇4, even if the pick-up object 5 does not join the substrate 4〇6 and the fin 406 sister piece 404, the spacers 405 will not The procedure of joining the substrate ..., ^4〇4' to separate the spacer from the step can be omitted, and

2036-5808-PF(N1).ptd 第110頁 12591172036-5808-PF(N1).ptd Page 110 1259117

=削減製造成本。又’因接合治具4〇3的壓應力而在基 =之另-表面4G6a殘留較大凹痕時，可將基板4〇6 面=切削掉一既定厚度，㈣夠得到具美麗外 又，為了簡化摩擦震動接合步驟，如第5 7圖所示，亦 可以使用在轉動軸403b的周邊以一既定間隔固定有複數個 治具本體403a的接合治具403,取代接合治具4〇3。此時， 可X同時對複數個區域施以摩擦震動接合，可以縮斷接合 時所需要的時間，因而更加提昇效率。 而以上述方法所製造的散熱元件45〇的各鰭片4〇4的前 端面更與另一基板406,接合時，如第58圖所示，亦可以製 造出將相互間隔的各鰭片4〇4分別摩擦震動接合於基板 406、406’的散熱元件45〇，。 第58圖所示之散熱元件45〇，的製造順序的第一樣態如 第59A圖所示，將相互間隔的各鰭片4〇4之間分別置入各間 隔物405，再於各鰭片4〇4的兩端（圖式中的上下端）分別配 置f板406、406 ，分別將接合治具403、403壓至基板406 的煮面（圖式中的上面）以及基板，的背面（圖式中的下 面），同時作摩擦震動接合。而在最後，將各間隔物4 〇 5由 側面（垂直紙面的方向）取出。 一散熱元件450,的製造順序的第二樣態如第59B圖所 不，將相互間隔的各鰭片4 0 4之間分別置入各間隔物4 〇 5， 再於各縛片404的兩端（圖式中的上下端）分別配置基板 406、406’ ’在一側將接合治具40 3向下壓至基板40 6的背= Cut manufacturing costs. Further, when the large indentation remains on the surface 4G6a due to the compressive stress of the bonding fixture 4〇3, the substrate 4〇6 surface=cutting off a predetermined thickness, and (4) being able to obtain a beautiful appearance, In order to simplify the frictional vibration joining step, as shown in Fig. 5, a joining jig 403 in which a plurality of jig bodies 403a are fixed at a predetermined interval around the rotating shaft 403b may be used instead of the jig 4〇3. At this time, the frictional vibration engagement can be applied to a plurality of regions at the same time, and the time required for the engagement can be reduced, thereby further improving the efficiency. When the front end faces of the fins 4〇4 of the heat dissipating member 45A manufactured by the above method are further joined to the other substrate 406, as shown in FIG. 58, the fins 4 which are spaced apart from each other can also be manufactured. The crucible 4 is frictionally coupled to the heat dissipating elements 45' of the substrates 406, 406', respectively. The heat dissipating element 45A shown in Fig. 58 has the same manufacturing sequence as shown in Fig. 59A, and the fins 4〇4 which are spaced apart from each other are placed in the respective spacers 405 and then on the fins. The both ends of the sheet 4〇4 (the upper and lower ends in the drawing) are respectively disposed with the f-plates 406 and 406, and the bonding jigs 403 and 403 are respectively pressed to the cooking surface of the substrate 406 (the upper surface in the drawing) and the back surface of the substrate. (below in the figure), at the same time as a frictional vibration joint. At the end, each spacer 4 〇 5 is taken out from the side (the direction of the vertical paper). A second aspect of the manufacturing sequence of a heat dissipating component 450 is as shown in FIG. 59B. The fins 104 separated from each other are placed between the spacers 4 and 5, and then the two spacers 404. The ends (upper and lower ends in the drawing) are respectively arranged with the substrates 406, 406'' pressed on the one side of the bonding jig 40 3 to the back of the substrate 40 6

第111頁 1259117 ___________ 五、發明說明（Ιϋ6) 面（圖式中的上面）而作摩擦震動接合。之後保持各元件 -己置關係，將鰭片404、間隔物405、基板406、與笑杯 4〇6’上下反轉，如第59(:圖所示，纟另—側將接^具4〇3 二下壓至基板406的背面（圖式中的上面）而作摩擦震動 a 。而在最後，將各間隔物4〇5由側面（垂直紙面的 取出。 阿； 一散熱元件45〇’的製造順序的第三樣態如第6〇a圖所 不，將相互間隔的各鰭片404之間分別置入各間隔物4〇5， 在僅僅於各鰭片404的一端（圖式中的上端）配置基板4〇6， 在一側將接合治具403向下壓至基板406的背面（圖式中的 上面）而作摩擦震動接合。之後保持各元件的配置關係， 將鰭片404、間隔物405、與基板40 6上下反轉，如第6〇β圖 所示’於各ϋ片404的另一端（圖式中的上端）配置基板 4 0 6 ，更如第6 0 C圖所示，在另一側將接合治具4 〇 3向下壓 至基板406的背面（圖式中的上面）而作摩擦震動接合。而 在最後，將各間隔物40 5由側面（垂直紙面的方向）取出。 散熱元件4 5 0 ’的製造順序的第四樣態如第6 〇 d圖所 示’將相互間隔的各鰭片404之間分別置入各間隔物4〇5， 在僅僅於各鰭片404的一端（圖式中的上端）配置基板4〇6， 在一側將接合治具4〇3向下壓至基板4〇6的背面（圖式中的 上面）而作摩擦震動接合。接下來，如第60Ε圖所示，將基 板406與鰭片4〇4向上移動，將基板405取出，而先完成散 熱元件450。之後，將散熱元件45 0上下反轉，如第6〇F^ 所示在各*讀片4 0 4之間分別置入各間隔物4 〇 5，於各_片Page 111 1259117 ___________ V. Description of the invention (Ιϋ6) The surface (top of the figure) is used for frictional vibration engagement. After that, the components 401 are placed, and the fins 404, the spacers 405, the substrate 406, and the smile cup 4〇6' are reversed up and down, as shown in FIG. 59 (the figure shows that the other side will be connected to the tool 4) 〇3 is pressed down to the back side of the substrate 406 (the upper side in the drawing) to make a frictional vibration a. At the end, each spacer 4〇5 is taken out from the side (the vertical paper surface is taken out. A; a heat dissipating component 45〇' The third state of the manufacturing sequence is as shown in FIG. 6A, and the fins 404 spaced apart from each other are placed in the spacers 4〇5, respectively, at only one end of each fin 404 (in the drawing) The upper end of the substrate 4〇6 is disposed on one side of the bonding fixture 403 to the back surface of the substrate 406 (the upper surface in the drawing) for frictional vibration bonding. Thereafter, the arrangement relationship of the components is maintained, and the fins 404 are held. The spacers 405 and the substrate 40 6 are vertically inverted. As shown in the sixth 〇β diagram, the substrate 4 0 6 is disposed at the other end of each of the dies 404 (the upper end in the drawing), and more like the 60th C-picture. As shown, the joining jig 4 〇 3 is pressed down on the other side to the back surface of the substrate 406 (the upper side in the drawing) for frictional vibration engagement. Thereafter, each of the spacers 40 5 is taken out from the side surface (the direction perpendicular to the paper surface). The fourth state of the manufacturing sequence of the heat dissipating member 4 5 0 ' is as shown in Fig. 6D, and the fins 404 which are spaced apart from each other Each of the spacers 4〇5 is placed in between, and the substrate 4〇6 is disposed at only one end (the upper end in the drawing) of each of the fins 404, and the bonding tool 4〇3 is pressed down to the substrate 4 on one side. The back surface (the upper surface in the drawing) is used for frictional vibration bonding. Next, as shown in Fig. 60, the substrate 406 and the fins 4〇4 are moved upward, and the substrate 405 is taken out, and the heat dissipating member 450 is completed first. After that, the heat dissipating component 45 0 is reversed up and down, and as shown in FIG. 6F, each spacer 4 〇 5 is placed between each * reading 4 0 4 , for each _ slice

2036-5808-PF(Nl).ptd 第112頁 12591172036-5808-PF(Nl).ptd Page 112 1259117

404_的另一端（圖式中的上端）配置基板4〇6，。更如第6〇^圖 所不，在另一側將接合治具403向下壓至基板406，的背面 (圖式中的上面）而作摩擦震動接合。而在最後，將各間隔 物405由側面（垂直紙面的方向）取出。 t屬元件接合 本發明金屬元件接合方法之第三實施型態，與上述第 二實施型態約略相@，而不同點在於不使用散熱元件 410，而使用間隔物治具42〇以代之。The other end of the 404_ (the upper end in the drawing) is configured with the substrate 4〇6. Further, as shown in Fig. 6, the bonding jig 403 is pressed down on the other side to the back surface of the substrate 406 (the upper surface in the drawing) for frictional vibration bonding. At the end, each spacer 405 is taken out from the side (direction of the vertical paper). t-Component Bonding The third embodiment of the metal component joining method of the present invention is approximately the same as the second embodiment described above, except that the heat dissipating member 410 is not used, and the spacer jig 42 is used instead.

間隔物化具4 2 0，如第6 1 a圖所示，係為將各間隔物 405的前端部（圖式中的下端部）相互連結的斷面為梳子形 狀的治具。而在元件配置步驟中，將間隔物治具42〇的各 間隔物405向上放置並固定後，如第61β圖所示分別 鰭片404***各間隔物4〇5之間，更如第61(：圖所示 ϊ Γ二1 基端面)與基板4°6的下面(一表面)接觸， 將基板406固定。亦可將第61β、6Κ圖的順序逆 板406固定於間隔物治具42〇的上面之後，再由側面（盥： 面垂直方向）將各間隔物4〇5***。 ”、 如第61D圖所示，在接下來的摩擦震動接合步 將接合治具403壓至基板406的上面（另一表面），The spacer tool 420 is a jig having a comb shape in which the tip end portions (the lower end portions in the drawings) of the spacers 405 are connected to each other as shown in Fig. 6 1 a. In the component disposing step, after the spacers 405 of the spacer jig 42 are placed upside down and fixed, the fins 404 are inserted between the spacers 4〇5 as shown in FIG. 61β, and more like the 61st ( The ϊ Γ 2 1 base end face shown in the figure is in contact with the lower surface (one surface) of the substrate 4° 6 to fix the substrate 406. Further, the order reverse plate 406 of the 61st and 6th views may be fixed to the upper surface of the spacer jig 42, and then the spacers 4〇5 may be inserted from the side surface (盥: face vertical direction). As shown in Fig. 61D, the bonding jig 403 is pressed to the upper surface (the other surface) of the substrate 406 in the subsequent frictional vibration bonding step,

406摩擦震動接合於各鰭片4〇4。 土 如第6 1 Ε圖所示，在最後的間隔物脫離步驟 板406及接合於其上的各鰭片4〇4向上移動， 、隔土 治具420。 砂降間 如本實施型態使用間隔物治具42〇時，就不需要使用406 frictional vibration is applied to each of the fins 4〇4. As shown in Fig. 61, the last spacer is moved away from the step plate 406 and the fins 4〇4 joined thereto, and the soil barrier 420 is moved. Sand drop room If you use the spacer fixture 42〇 in this embodiment, you do not need to use it.

1259117 五、發明說明（108) 散熱元件製造用治具41 〇，其優點在於可以省略配置間隔 物4 0 5的程序。 金屬元件接合方法一 4 本發明金屬元件接合方法之第四實施型態，與上述第 二實施型態約略相同，而不同點在於元件配置步驟中的鰭 片配置步驟以及其後的基板配置步驟。 Λ 而最初的鰭片配置步驟中，如第62A圖所示，各鰭片 4 0 4與各間隔物4 〇 5交互並列，並立設配置於散熱元件製造 用治具4 1 0之元件設定部4 1 2，此時各間隔物4 0 5的基端面 分別沒入各韓片4 0 4的基端面之下，而使各間隔物4 〇 5的基 &面分別低於各鰭片404的基端面的高度差不大於各間隔 $ 4 0 5的厚度。換言之，各鰭片4 〇 4的高度係分別高於各間 隔物405的高度，且其範圍係在間隔物4〇5的厚度範圍内； 各，片404的基端面分別較各間隔物4〇5的基端面突出，且 其範圍係在間隔物4 〇 5的厚度範圍内。1259117 V. INSTRUCTION DESCRIPTION (108) The jig 41 for heat-dissipating element manufacturing has an advantage in that the procedure of disposing the spacer 405 can be omitted. Metal Element Bonding Method - 4 The fourth embodiment of the metal element bonding method of the present invention is approximately the same as the above-described second embodiment, except for the fin arrangement step in the element arrangement step and the subsequent substrate configuration step. Λ In the first fin arrangement step, as shown in FIG. 62A, each of the fins 404 is alternately arranged with each of the spacers 4 and 5, and is erected in the component setting unit of the jig for manufacturing the heat dissipating component. 4 1 2, at this time, the base end faces of the spacers 4 0 5 are respectively below the base end faces of the respective Korean films 404, and the base & faces of the spacers 4 〇 5 are respectively lower than the respective fins 404 The height difference of the base end faces is not more than the thickness of each interval of $400. In other words, the height of each fin 4 〇 4 is higher than the height of each spacer 405, respectively, and the range is within the thickness range of the spacer 4 〇 5; each of the base end faces of the sheet 404 is smaller than the spacers 〇 The base end face of 5 is protruded, and its range is within the thickness range of the spacer 4 〇5.

接下來的基板配置步驟中，如第62B圖所示，在立設 配置於元件設定部412的各鰭片4〇4上，承載基板4〇6。然 後如第62C、62D圖所示，藉由朝向鰭片4〇4之向下的壓應 2之作用將各鰭片404的基端部4〇4a(較各間隔物405突出 ，部分）彎折並固定在呈斷面L字型的狀態。&時，由於$ ㈣的基端部404a的高度在間隔物4〇5的厚度範圍内，$ 的基端部404a不會相互重疊，而形成平行 、者基板406的一表面（圖式中的下表面）的表面。 下來，如第63A圖所示，將以轉動轴4〇3b為中心以In the subsequent substrate disposing step, as shown in Fig. 62B, the substrate 4 is placed on each of the fins 4 to 4 of the element setting portion 412. Then, as shown in Figs. 62C and 62D, the base end portion 4〇4a of each fin 404 (projected, partially protruded from each spacer 404) is bent by the action of the downward pressure 2 toward the fins 4〇4. It is folded and fixed in a state of an L-shaped cross section. &, since the height of the base end portion 404a of $(4) is within the thickness range of the spacer 4〇5, the base end portions 404a of $ do not overlap each other, and form a parallel surface of the substrate 406 (in the drawing) The surface of the lower surface). Down, as shown in Fig. 63A, will be centered on the axis of rotation 4〇3b

2036.5808-PF(Nl).Ptd 第114頁 1259117 玉、發明說明（109) " ----- 圓周方向高速轉動的接合治具4〇3的治具本體4〇3的圓周面 垂直壓至基板4〇6的另一表面4〇6a，並使接合治具4〇3沿著 基板406的表面4〇6a移動，而將各鰭片404的基端部4〇4a接 合於基板4 0 6。 d匕時，因為被彎折成直角的鰭片404的基端部4〇“形 成沿著基板4 0 6之一表面的面，與第二實施型態比較，係 增加基板406與鰭片404之接觸面積，可使兩者確實地接、 合。而藉由本發明，即使鰭片4〇4的厚度非常薄，可以製 造出基板406與各蹲j^404 a a 分.、、、曰乃4 u 4匕峰貝地立設接合的散熱元件 45 0。 m 最後，如第63B圖所示，將基板4〇6向上移動，僅有亡 接合於基板406的各n片4G4 -起向上㈣’而將各間隔來 405留在散熱元件製造用治具41〇的元件設定部412，可以 製造出具有幫折的基端部404立設接合於基板4〇6之一表茂 的散熱元件4 5 0。 散熱元件的製造方法2036.5808-PF(Nl).Ptd Page 114 1259117 Jade, invention description (109) " ----- The circumferential surface of the fixture body 4〇3 of the joint fixture 4〇3 rotating at a high speed in the circumferential direction is vertically pressed to The other surface 4〇6a of the substrate 4〇6 moves the bonding fixture 4〇3 along the surface 4〇6a of the substrate 406, and the base end portion 4〇4a of each fin 404 is bonded to the substrate 4 0 6 . In the case of d ,, since the base end portion 4 of the fin 404 bent at right angles "forms a surface along one surface of the substrate 406, the substrate 406 and the fin 404 are added as compared with the second embodiment. The contact area allows the two to be reliably joined together. With the present invention, even if the thickness of the fins 4〇4 is very thin, the substrate 406 and each of the 蹲j^404 aa can be manufactured. u 4 匕 贝 立 立 接合 接合 接合 45 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后 最后By leaving the space 405 in the element setting portion 412 of the heat-radiating element manufacturing jig 41, it is possible to manufacture the heat-dissipating element 45 having the base end portion 404 having the folded portion erected and bonded to one of the substrates 4? 0. Method of manufacturing heat dissipating component

接下來說明I發明㈣元件的製造方法之實施型態 本實施型態與上述金屬元件接合方法之第二實施型_ 相同，而不同點在於使用斷面凹字型的鰭片 代鰭片4 0 4。 而最初的元件配置步驟中，首先如第64A圖所示，將 —铭合金製#溥板材431的中央部與—間隔物4〇5直交配 置，使二者成為倒T字型，如第64B圖所示，在斷面凹字与 轄片構成材製造治具440的中央部的溝槽内，將板材43"Next, the embodiment of the method for manufacturing the device of the invention (IV) will be described. This embodiment is the same as the second embodiment of the method for bonding the metal member described above, except that the fin-shaped fin of the cross-sectional concave type is used. 4. In the first component arrangement step, first, as shown in Fig. 64A, the central portion of the 铭 合金 alloy plate 431 is placed orthogonally to the spacer 4 〇 5 so that the two become inverted T-shaped, as in the 64B. As shown in the figure, in the groove of the central portion of the cross-section concave and the constituting member manufacturing fixture 440, the sheet 43"

1259117 五、發明說明（110) 折，並將其中央部壓入的同時***間隔物405，而如第64C 圖所示，於中央部的溝槽内形成將間隔物4 0 5夾在中間的 斷面凹字型的鰭片構成材430。鰭片構成材430係以左右一 對的鰭片404與連結上述左右一對的鰭片404的基端部4〇4a 而形成其斷面凹字型。 而準備複數個如上所述之在左右一對的鰭片4 0 4之間 置入間隔物405的鰭片構成材430，將上述各鰭片構成材 430與各間隔物4〇5’交互並列，而如第64D圖所示，立設配 置於散熱元件製造用治具4 1 0的元件設定部4 1 2。此時的鰭 片構成材430係為在左右一對的鰭片404之間置入有間隔物 4〇5的狀態、且為基端部4〇4a向上的狀態。又，置入於各 鰭片構成材430相互之間的各間隔物405，的高度係高於置 入於左右一對的鰭片404之間的間隔物40 5，且較好為二者 的南度差僅僅是基端部404a的厚度，而使鰭片構成材430 的基端部404a與間隔物40 5，的基端部形成水平的上表面。 之後，如第6 4 E圖所示，於立設配置於元件設定部41 2 的各鰭片構成材430與各間隔物405，的上面搭載基板406並 將其固定。此處將鰭片構成材430的基端部4〇4a及間隔物 405形成與基板406的一表面（圖式中的下表面）接觸的狀 態時，即完成了元件配置步驟。 而第6 4 A〜6 4 B圖所示的元件配置步驟並非一必要之限 制’只要各基板構成材430、各間隔物40 5、各間隔物405, 在最後配置於如第6 4 E圖所示之既定位置時，並不限定其 順序。因此，例如將已預先形成斷面凹字型的鰭片構成材1259117 V. The invention description (110) folds and inserts the spacer 405 while pressing the central portion thereof, and as shown in Fig. 64C, the spacer 104 is sandwiched in the groove at the center portion. The fin-shaped fin structure 430 is formed. The fin constituent material 430 is formed by a pair of right and left fins 404 and a base end portion 4〇4a that connects the pair of left and right fins 404 to form a cross-sectional concave shape. Further, a plurality of fin constituent members 430 in which the spacers 405 are placed between the pair of right and left fins 404 are prepared, and the fin members 430 are alternately arranged with the spacers 4〇5'. On the other hand, as shown in Fig. 64D, the component setting unit 4 1 2 disposed in the fixture for manufacturing the heat dissipating member 4 10 is erected. At this time, the fin constituent material 430 is in a state in which the spacers 4〇5 are placed between the pair of left and right fins 404, and the base end portion 4〇4a is upward. Further, the spacers 405 placed between the respective fin constituent members 430 are higher in height than the spacers 40 5 placed between the pair of right and left fins 404, and preferably both. The south degree difference is only the thickness of the base end portion 404a, and the base end portion 404a of the fin constituent member 430 and the base end portion of the spacer 40 5 form a horizontal upper surface. Then, as shown in Fig. 6 E, the substrate 406 is mounted on the upper surface of each of the fin constituent members 430 and the spacers 405 which are disposed on the element setting portion 41 2 and fixed. Here, when the base end portion 4A4a of the fin constituent material 430 and the spacer 405 are brought into contact with one surface (the lower surface in the drawing) of the substrate 406, the component disposing step is completed. The component arrangement steps shown in FIGS. 4 4 A to 6 4 B are not necessarily limited as long as the respective substrate constituent members 430, the spacers 40 5 , and the spacers 405 are finally disposed as shown in FIG. The order shown is not limited in its order. Therefore, for example, a fin structure in which a cross-sectional concave type has been formed in advance is formed.

2036-5808-PF(Nl).ptc 第116頁 1259117 五、發明說明（111) 430相互間隔排列；分別將各間隔物4〇5***各鰭片構成材 4 3 0之左右一對的鰭片4 〇 4之間，同時並分別將各間隔物 405***各鰭片構成材430相互之間；最後配置基板4〇6之 步驟亦可。或是將已預先形成斷面凹字型的鰭片構成材 4 30相互間隔排列；接下來配置基板4〇6 ;而最後分別將各 間隔物4:5***各鰭片構成材43〇之左右一對的鰭片4〇4之 間，同蚪並分別將各間隔物4〇5，***各鰭片構成材43〇相 互之間之步驟亦可。2036-5808-PF(Nl).ptc Page 116 1259117 V. Description of the Invention (111) 430 are arranged at intervals; each spacer 4〇5 is inserted into a pair of fins of each of the fin constituent members 430 Between the four ,4, each spacer 405 is inserted into each of the fin constituent materials 430 at the same time; the step of finally arranging the substrate 4〇6 is also possible. Or, the fin members 430 having the pre-formed cross-sections are arranged at intervals; then the substrate 4〇6 is disposed; and finally, the spacers 4:5 are respectively inserted into the respective fin constituents 43〇. The step of inserting the spacers 4〇5 into each of the fins 4〇4 and inserting the fins 4〇5 into each other may be performed.

接下來的接合步驟中，如第65A圖所示，將以轉動軸 403b為中心以圓周方向高速轉動的接合治具4〇3的治具本 體403a的圓周面垂直壓至基板4〇6之另一表面之表面 406a ,並使接合治具4〇3沿著基板4〇6之表面4〇6a移動而 使各錯片構成材430的基端部4〇4a接合於基板406。 此日可’因為鰭片構成材4 3 0的基端部4 0 4 a形成沿著基 板406之一表面的面，與第一實施型態比較，係增加基板 406與鰭片404之接觸面積，可使兩者確實地接合。而藉由 本實施型態，即使鰭片404的厚度非常薄，可以製造出基 板406與各鰭片404已確實地立設接合的散熱元件45()。In the subsequent joining step, as shown in Fig. 65A, the circumferential surface of the jig body 403a of the joining jig 4〇3 which is rotated at a high speed in the circumferential direction around the rotating shaft 403b is vertically pressed to the other side of the substrate 4〇6. The surface 406a of one surface moves the bonding jig 4〇3 along the surface 4〇6a of the substrate 4〇6 to bond the base end portion 4〇4a of each of the staggering members 430 to the substrate 406. This is because the base end portion 4 0 4 a of the fin constituent material 430 forms a surface along one surface of the substrate 406, and the contact area between the substrate 406 and the fin 404 is increased as compared with the first embodiment. , so that the two can be surely joined. With this embodiment, even if the thickness of the fin 404 is very thin, the heat dissipating member 45 () on which the substrate 406 and the fins 404 have been reliably erected can be manufactured.

最後，如第65B圖所示，將基板4〇6向上移動時，僅有 已接合於基板406的各鰭片構成材4 30 一起向上移動，而將 各間隔物405、405’留在散熱元件製造用治具41〇的元件設 定部412，可以製造出具有鰭片構成材43〇的基端部4〇4立 設接合於基板406之一表面的散熱元件450。 其他Finally, as shown in Fig. 65B, when the substrate 4〇6 is moved upward, only the fin constituents 430 bonded to the substrate 406 are moved upward together, and the spacers 405, 405' are left in the heat dissipating member. The component setting unit 412 for manufacturing the jig 41 can manufacture the heat dissipating element 450 having the base end portion 4 4 having the fin constituent material 43 立 vertically attached to one surface of the substrate 406 . other

2036-5808-PF(Nl).ptd 第117頁 1259117 五、發明說明（112) 而以上的實施型態中，係以使用接合治具4 〇 3之所謂 的摩擦震動接合為例來做說明，但是本發明並不受限於 此。例如，加熱及加壓的方法，並不限定於將轉動的接合 治具4 0 3壓入炫點較南的金屬元件之側，而將所產生的摩 擦熱與壓應力傳達至金屬元件間的交界面等接觸方式；亦 可以使用如電磁誘導’由炫點較南的金屬元件之側，對金 屬元件間的交界面加熱及加壓等非接觸方式。 以下係顯示實施例。 如第48A〜48C圖與第49A〜49C圖所示，實際地實行摩擦 震動接合’將銅製的板材（銅板）與銘合金（Ai〇50)製的板 材（鋁板）重合，將高速轉動的接合治具的圓周面壓至銅板 的表面並移動。銅板的厚度為4 mm '寬度為7〇 mm、長度 為100 mm，鋁板的厚度為0.5 mm、寬度為70 mm、長度為 100 mm。接合治具的直徑為120 mm、寬度為24 mm、接合 治具的轉動數為2000 RPM (圓周速率約為1 50 7 m/min)、 行進速率為0.75 m/min。 實施例1 設定不同的接合治具的圓周面的平面部的寬度％ (mm)、凹槽寬度％ (mm)、平面部的寬度/凹槽寬度之比 Wi /W2後，接合品質、外觀、機械負荷的實驗結果如表五所 示。2036-5808-PF(Nl).ptd Page 117 1259117 V. Description of Invention (112) In the above embodiment, the so-called frictional vibration joint using the joint jig 4 〇 3 is taken as an example for explanation. However, the invention is not limited thereto. For example, the method of heating and pressurizing is not limited to pressing the rotating joining fixture 403 into the side of the metal element with the south side of the bright point, and transmitting the generated frictional heat and compressive stress between the metal elements. Contact mode such as interface; it is also possible to use a non-contact method such as electromagnetic induction of the side of the metal element which is more south than the bright point, and heating and pressurization of the interface between the metal elements. The examples are shown below. As shown in Figs. 48A to 48C and Figs. 49A to 49C, the frictional vibration bonding is actually carried out. The copper plate (copper plate) and the plate (aluminum plate) made of the alloy (Ai〇50) are superposed, and the high-speed rotation is joined. The circumferential surface of the jig is pressed against the surface of the copper plate and moved. The thickness of the copper plate is 4 mm 'width is 7 mm mm, length is 100 mm, the thickness of the aluminum plate is 0.5 mm, the width is 70 mm, and the length is 100 mm. The jig has a diameter of 120 mm, a width of 24 mm, a joint rotation of 2000 RPM (circumferential rate of approximately 1 50 7 m/min), and a travel rate of 0.75 m/min. Example 1 After setting the width % (mm), the groove width % (mm), the width of the flat portion / the groove width Wi / W2 of the flat portion of the circumferential surface of the different joining jig, the joint quality, appearance, The experimental results of the mechanical load are shown in Table 5.

2036-580S-H:(Nl).ptd 第118頁 1259117 Φ 五、發明說明（丨13) 乎面部 宽度％ (mm) 凹槽寬 度W7 (mm) Wi/Wi 凹槽 傾斜 角（9 (°) 凹槽 深度 (mm) 接合品 質 外覲 機械負 荷 實絶例Μ 1 1 1 0.5 1 ◎ △ ◎ 實施例1-2 2 1 2 ◎ ◎ ◎ 實砲例1-3 3 1 3 ◎ ◎ 0 實施例U4 5 1 5 ◎ ◎ 「△ 實施例1-5 2 3 0,67 ◎ ◎ ◎ 實施例1-6 3 3 1 ◎ ◎ 0 實施例1-7 4 3 1.33 ◎ ◎ 〇 比較例Μ 7 1 7 ◎ X X 比較例1-2 1 3 0.33 X X ◎ :外銳: 〜◎:良妤/ △:切粉多/ X:毛邊多 <接合品質> ◎:負荷小/ 〇 :馬達的指定條#以下 △:馬達的指定條伴以上 X ·因連讀使用導致馬達停止 由^可知’當Wl/W2過小時（比較例^)，因為銅板 的表面狀況會類似於受到接合治具的切削， 心 生摩擦熱的產生量就會較大、機械負荷變,卜：：後= : = = :的凹”就會變得較大而外觀不•，接二。 貝，、，另一方面，當wi/w2過大時（比較例卜！）， 口 類似於使用具表面平坦的圓周面的接合治且因為a 狀況’接合治具所產生摩擦熱的產：接j時的 具壓？銅板表面的壓入量就必須增加，：：=、’接合治 械負荷亦會過大。 使外硯不佳，機 而在1$〜丨$5、且、且〇 fi7 (實施例1 - 1〜1 _ 7 )，很明頻· = wi w2 ^ 5 · 〇 〇時 顯地不但可以抑制接合治具壓入2036-580S-H: (Nl).ptd Page 118 1259117 Φ V. Invention description (丨13) Face width % (mm) Groove width W7 (mm) Wi/Wi groove inclination angle (9 (°) Groove depth (mm) Joint quality External mechanical load Μ 1 1 1 0.5 1 ◎ △ ◎ Example 1-2 2 1 2 ◎ ◎ ◎ Real shot 1-3 3 1 3 ◎ ◎ 0 Example U4 5 1 5 ◎ ◎ "△ Example 1-5 2 3 0, 67 ◎ ◎ ◎ Example 1-6 3 3 1 ◎ ◎ 0 Example 1-7 4 3 1.33 ◎ ◎ 〇 Comparative Example 1 7 1 7 ◎ XX Comparative Example 1-2 1 3 0.33 XX ◎ : Outer sharp: ~ ◎: Good 妤 / △: Multi-cut powder / X: Raw burrs < Joint quality > ◎: Small load / 〇: Designated strip of motor #以下△ : The specified strip of the motor is above X. · The motor is stopped due to continuous use. ^When Wl/W2 is too small (Comparative example ^), because the surface condition of the copper plate is similar to that of the joint fixture, the heart friction The amount of heat generated will be larger, the mechanical load will change, and the following: Bu =: = = = : The concave will become larger and the appearance will not be. 2. Then, Bei, and, on the other hand, when wi/ When w2 is too large (comparative example!) The mouth is similar to the joint treatment with a flat surface with a flat surface and the friction heat generated by the joint fixture due to the a condition: the pressure at the time of the j-loading of the copper plate surface must be increased, ::=, 'The joint load will also be too large. The outer casing is not good, and the machine is at 1$~丨$5, and 〇fi7 (Example 1 -1~1 _ 7), very clear frequency = = wi w2 ^ 5 · When the time is obvious, not only can the joint fixture be suppressed

2036-5808-PF(Nl).ptd 第119頁 1259117 發明說明（114) 銅板表面的壓入量，接合治具所產生摩擦熱的產生量就亦 會較大機械負荷就會較小，而能夠行有效率的接合。 實施例2 a 又疋不同的接合治具的圓周面的凹槽相對於轉動方向 2傾斜角度、凹槽數量後，接合品質、外觀、機械負荷的 貫驗結果如表六所示。而僅在比較例2 — 2的條件中，將接 合治具的寬度設定為1〇 mD1。 表六2036-5808-PF(Nl).ptd Page 119 1259117 Description of invention (114) The amount of friction generated on the surface of the copper plate, the amount of frictional heat generated by the bonding fixture will also be larger, and the mechanical load will be smaller. Efficient bonding. [Embodiment 2] The results of the joint quality, appearance, and mechanical load of the grooves of the circumferential surface of the different joining jigs with respect to the rotational direction 2 are shown in Table 6. Only in the condition of Comparative Example 2-2, the width of the joint jig was set to 1 〇 mD1. Table 6

<接合品貿> ◎:負荷小/ 〇 :馬達的指定條件以下 △:馬達的指定條#以上 X:因連續使用導致馬達停止<Joining trade> ◎: Small load/〇: The specified condition of the motor is below △: The specified number of the motor is ## or more X: The motor is stopped due to continuous use

由表六可知，當凹槽的傾斜角度小於〇 · 5。時（比較例 ^一2 )，機械負荷小，凹槽内部所蓄積的可塑化的金屬就無 法/σ著接合治具的寬度方向依序送出，接合治具通過後就 會在銅板表面殘留毛邊（burr)，而使外觀不良；另一方 面，g凹槽的傾斜角度大於2 · 〇。時（比較例2 — 1 )，不但切 粉的排出量就會變大而使外觀不良，亦使殘留於金屬元件 表面的凹痕變大，並加大機械負荷。It can be seen from Table 6 that the inclination angle of the groove is smaller than 〇 · 5. At the time (Comparative Example ^2), the mechanical load is small, and the plasticized metal accumulated inside the groove cannot be sequentially sent out in the width direction of the joint jig, and the jig is left on the surface of the copper plate after the jig is passed. (burr), which makes the appearance poor; on the other hand, the inclination angle of the g groove is greater than 2 · 〇. At the time (Comparative Example 2 - 1), not only the discharge amount of the cut powder was increased, but also the appearance was poor, and the pits remaining on the surface of the metal member were increased, and the mechanical load was increased.

1259117 五、發明說瞒（115) 而在凹槽的傾斜角度為0. 5〜2. 0 °時（實施例 2-1〜2-3)，很明顯地就不會有上述的弊害，可以得到良好 的接合。 而考慮到接合治具的寬度，接合治具的整個圓周面 中，係至少形成有二條的凹槽。在比較例2 - 2中，凹槽的 數量為0，係顯示沒有向接合治具的轉動方向傾斜的凹 槽。 實施例3 設定不同的接合治具的圓周面的凹槽的深度後，接合 品質、外觀、機械負荷的實驗結果如表七所示。 表七 凹槽深度 (mm) 手面部 寬度Wi (mm) 凹槽寬度 m (mm) 凹槽傾 斜角<9 (°) 治具壓入曼 (mm) 接合 品質 外觀 機械 負荷 實施例3-1 0.3 ◎ Δ ◎ 實施例3-2 0.4 ◎ ◎ ◎ 實施例3-3 0.8 2 1 0.5 0.1-0.2 ◎ ◎ 0 實施例3-4 1.2 ◎ ◎ Δ 比較例3-1 0.2 ◎ X X 比較例3-2 2 0_3 〜0.5 比較例3-3 無凹槽 X X ◎ <接合品質> @•良好/ X.不良 <外觀> ◎:良好/ △:切粉多/ χ:ι邊多 <接合品質> ◎:負荷小/ 0:馬達的指定條件以下 △:馬達的指定條伴以上 X:因達續使用導致馬達停止 由表七可知，當凹槽的深度小於0. 30 mm時（比較例 3 -1 )，可塑化的金屬會蓄積於凹槽内部，使接合治具所產1259117 V. The invention says 瞒(115) and the inclination angle of the groove is 0. 5~2. 0 ° (Example 2-1~2-3), it is obvious that there is no such disadvantage, Get a good bond. In consideration of the width of the jig, at least two grooves are formed in the entire circumferential surface of the jig. In Comparative Example 2-2, the number of grooves was 0, which showed a groove which was not inclined toward the rotation direction of the joining jig. Example 3 After setting the depths of the grooves of the circumferential faces of the different jigs, the experimental results of the joint quality, appearance, and mechanical load are shown in Table 7. Table 7 Groove Depth (mm) Hand and Face Width Wi (mm) Groove Width m (mm) Groove Tilt Angle <9 (°) Fixture Pressing Man (mm) Joint Quality Appearance Mechanical Load Example 3-1 0.3 ◎ Δ ◎ Example 3-2 0.4 ◎ ◎ ◎ Example 3-3 0.8 2 1 0.5 0.1-0.2 ◎ ◎ 0 Example 3-4 1.2 ◎ ◎ Δ Comparative Example 3-1 0.2 ◎ XX Comparative Example 3-2 2 0_3 ～0.5 Comparative Example 3-3 No groove XX ◎ <Joint quality> @•Good/X. Poor <Appearance> ◎: Good / △: Multi-cut powder / χ: ι 边 多 < Qualification > ◎: Small load / 0: The specified condition of the motor is below △: The specified line of the motor is accompanied by X: The motor is stopped due to continuous use. As shown in Table 7, when the depth of the groove is less than 0.30 mm (comparison In Example 3-1), the plasticized metal accumulates inside the groove and is produced by the joint fixture.

2036-5808-PF(Nl).ptd 第121頁 1259117 五、發明說明（Π6) 生的摩擦熱的發生量減少，而無 面，當凹槽的深度大於i•“上法二充刀的接合；另-方 表面狀況會類似於受到接合仏具卜乂例3 — 2)，因為銅板 摩擦熱的產生量就會較大肖1j，接合治具所產生 壓入量就變得較大，其結果=負7就較小，接合治具的 有凹槽時（比較例3-3) ’因為接”人夕觀不良。更者，完全沒 生量較小，而必須加大接合具Λ產生摩擦熱的產 使外觀不#，機械負荷亦過：：在銅板表面的壓入量，而 而凹槽的深度為〇 3〇〜1 上述的弊害，可以y · mm時，很明顯地就不會有 Φ j W件到良好的接合。 接下來’說明本發 金屬元彳^月第五群組的實施型態。 首先說明本發明金屬、 此處係以作為第—舍展\ 口方法的第一貫施型態。 的銅元件之接入A f兀件的鋁元件與作為第二金屬元件 °為例來作說明。 此處舉出作為笛 第二金屬A件的jf —金屬力件的一例的紹^牛、與作為 接合方法的第的銅7"件，首先說明本發明金屬元件 型態之金屬元件i义型態。第68A〜68C圖係顯示第一實施 68A、68B圖為正方法之摩擦接合的順序，其中第 第69Α〜69C圖為面圖，第68C圖為第68B圖之側視圖。 鋁元件與銅元件夕^列之剖面圖，係顯示第68A〜68C圖之 示第_與68(：圖夕ΐ合部之塑性變形的過程。㈣圖係顯 Ρ之接合治具之部分放大圖。 12591172036-5808-PF(Nl).ptd Page 121 1259117 V. INSTRUCTIONS (Π6) The amount of frictional heat generated is reduced, and there is no surface, when the depth of the groove is greater than i•“the joint of the upper two filling knife The surface condition of the other side will be similar to that of the joint cookware example 3-2), because the amount of frictional heat generated by the copper plate will be larger, and the amount of press-in which the joint fixture produces will become larger. = Negative 7 is small, and there is a groove in the jig (Comparative Example 3-3) 'Because the connection is bad. Moreover, there is no small amount of production at all, and it is necessary to increase the production of friction heat by the joints, so that the appearance is not #, the mechanical load is too:: the amount of pressing on the surface of the copper plate, and the depth of the groove is 〇3 〇~1 The above disadvantages, when y · mm, obviously do not have a good joint of Φ j W pieces. Next, the implementation of the fifth group of the present invention will be described. First, the metal of the present invention will be described here as a first embodiment of the method of the first embodiment. The copper element is connected to the aluminum element of the Af element and the second metal element is taken as an example. Here, as an example of the jf-metal force member of the second metal A piece, and the first copper 7" as the joining method, first, the metal element type of the metal element type of the present invention will be described. state. Figs. 68A to 68C show the first embodiment. Figs. 68A and 68B show the order of the frictional engagement of the positive method, wherein the 69th to 69thth views are plan views, and the 68Cth is the side view of Fig. 68B. The cross-sectional view of the aluminum component and the copper component is shown in Fig. 68A to 68C, and the process of plastic deformation is shown in Fig. 68A to 68C. (4) Partial magnification of the bonding fixture of the figure Fig. 1259117

在此金屬元件接合方法中，首先如第68A圖所示，將 鋁元件5〇1與銅元件502以面接觸的方式相互重合配置，以 未繪示於圖面的治具固定。 接了來，如第68B、68C圖所示，將以轉動轴5〇3b為中 〜、以圓周方向以圓周速度r高速轉動的接合治具5〇3之治 具本體50 3a的圓周面垂直壓至銅元件5〇2的表面5〇2a，並 將接合治具503沿著銅元件502的表面5〇2a以行進速率v移 動’而使銘元件501與銅元件502重合並接合。接合治具 503係在轉動軸503b的前端部將圓板狀的治具本體5〇仏固 疋，而治具本體503&係由113:8〇61等工具鋼所構成。相 對於壓入銅元件502的表面502a時的行進方向，治具本體 5 0 3a係以送至後方的方向，沿著轉動軸5〇3b的周邊轉動。 如第69A圖所示，治具本體5〇3a的圓周面係以一定量 a (m)壓入銅元件5〇2的表面502a的狀態下以圓周方向高 速轉動，並沿著銅元件502的表面5 02a移動。而藉著上$ 治具本體503a在銅元件502的表面5 02a之壓入，使銘元件 501與銅元件502之重合部的縫隙消失；並藉著高速轉動的 治具本體503a與銅元件502的接觸所產生的震動，將銘元 件501與銅元件5〇2之重合面的氧化物皮膜***破壞；並&如 第69B圖所示，與治具本體5〇3a接觸的銅元件5〇2的既定區 域與其鄰近區域、還有與上述區域鄰接的鋁元件5〇1的既° 定區域，因治具本體5〇3a與銅元件502的摩擦接觸所產生 的熱量而高溫化，呈現可塑化（流動化）的固相狀態。上述 的結果’使得銅元件5 0 2與鋁元件501在相互的交界面上流In the metal element bonding method, first, as shown in Fig. 68A, the aluminum element 5〇1 and the copper element 502 are placed in surface contact with each other so as to be overlapped with each other, and the jig which is not shown in the drawing is fixed. Then, as shown in Figs. 68B and 68C, the circumferential surface of the jig body 50 3a of the joining jig 5 3 which is rotated at a high speed in the circumferential direction at a peripheral speed r is rotated vertically. The surface 5〇2a of the copper member 5〇2 is pressed, and the bonding jig 503 is moved along the surface 5〇2a of the copper member 502 at a traveling rate v to re-engage the bonding member 501 and the copper member 502. The jig 503 is configured to fix the disc-shaped jig body 5 at the front end portion of the rotating shaft 503b, and the jig body 503 & is composed of tool steel such as 113:8〇61. The jig body 5 0 3a is rotated in the direction of the rearward direction along the periphery of the rotating shaft 5〇3b with respect to the traveling direction when the surface 502a of the copper member 502 is pressed. As shown in Fig. 69A, the circumferential surface of the jig body 5〇3a is rotated at a high speed in the circumferential direction with a certain amount a (m) pressed into the surface 502a of the copper member 5〇2, and along the copper member 502. Surface 5 02a moves. By pressing the surface of the copper member 503 on the surface of the copper member 502, the gap between the overlapping portion 501 and the copper member 502 disappears; and the fixture body 503a and the copper member 502 are rotated at a high speed. The vibration generated by the contact breaks and breaks the oxide film of the overlapping surface of the element 501 and the copper element 5〇2; and & as shown in Fig. 69B, the copper element 5接触 in contact with the jig body 5〇3a The predetermined region of 2 is adjacent to the adjacent region, and the predetermined region of the aluminum member 5〇1 adjacent to the region is heated by the heat generated by the frictional contact between the fixture body 5〇3a and the copper member 502, and is plasticized. Solid state (fluidized). The above result 'cause the copper element 502 and the aluminum element 501 to flow at the mutual interface

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動擴散，並由當初的表面開始塑性變形。而在接合治具 503之治具本體503a通過之後即冷卻，如第69C圖所示，紹 元件501與銅元件502相互接合而製造出接合體j。 上述接合體J的銅元件502的表面502a上，如第69C圖 所示，治具本體503a使表面502a負荷壓應力的同時並在通 過表面5 0 2 a的通過執跡上，出現一對淺的段部5 〇 2 b。又， 在此接合體J中，鋁元件501與銅元件502的重合面中，已 塑性變形的鋁元件501及銅元件502成波浪形起伏而相互咬 合’而固化成斷面凹凸型的接合面S。上述的接合體j中， 藉由此接合面S而將銅元件502與鋁元件501確實地接合。 而藉由接合治具503的壓應力而在銅元件5〇2的表面50 2a所 形成的段部502b，較好為在鋁元件501及銅元件5〇2接合之 後’將銅元件5 0 2的表面5 0 2 a切削掉一定厚度，而將其平 滑化。 此處，考慮到接合治具5 0 3由鋁元件5 0 1之側壓入時， 鋁元件5 0 1的熔點低於銅元件5 0 2的熔點，鋁元件5 0 1與銅 元件502的重合面達到接合所必要的溫度（共晶溫度548 °C ) 以上時，鋁元件5 0 1的抗形變強度就會變得較小，而使來 自接合治具503的壓力無法充分地傳達至鋁元件5〇1與銅元 件502的重合面’而容易發生接合不良。另一方面，本實 施型態之金屬元件接合方法中，將接合治具5〇3壓入熔點 高於鋁元件5 0 1的銅元件5 0 2之側時，在鋁元件5 〇 1與銅元 件5 0 2的重合部達到接合所必要的溫度（共晶溫度）以上 時’銅元件5 0 2可以保持比較大的抗形變強度，可使來自Dynamic diffusion, and plastic deformation begins from the original surface. On the other hand, after the jig body 503a of the joining jig 503 passes, it is cooled, and as shown in Fig. 69C, the element 501 and the copper member 502 are joined to each other to manufacture the joined body j. On the surface 502a of the copper member 502 of the above-mentioned joint body J, as shown in Fig. 69C, the jig body 503a causes the surface 502a to be subjected to compressive stress and a pair of shallow appears on the passage through the surface 50 2 a. Segment 5 〇 2 b. Further, in the bonded body J, among the overlapping faces of the aluminum member 501 and the copper member 502, the plastically deformed aluminum member 501 and the copper member 502 are undulated and occluded to each other and solidified into a joint surface having a concave-convex shape. S. In the above-described joined body j, the copper member 502 and the aluminum member 501 are surely joined by the joint surface S. The segment portion 502b formed on the surface 50 2a of the copper member 5〇2 by the compressive stress of the bonding jig 503 is preferably the copper member 5 0 2 after the bonding of the aluminum member 501 and the copper member 5〇2. The surface of the surface is cut off by a certain thickness and smoothed. Here, considering that the bonding jig 503 is pressed in from the side of the aluminum member 510, the melting point of the aluminum member 510 is lower than the melting point of the copper member 502, and the aluminum member 501 and the copper member 502 When the overlapping surface reaches a temperature (eutectic temperature of 548 ° C) or more necessary for bonding, the deformation resistance of the aluminum member 510 becomes small, and the pressure from the bonding jig 503 cannot be sufficiently transmitted to the aluminum. The bonding surface ' of the element 5〇1 and the copper element 502 is prone to poor bonding. On the other hand, in the metal element bonding method of the present embodiment, when the bonding jig 5〇3 is pressed into the side of the copper element 520 which has a higher melting point than the aluminum element 510, the aluminum element 5 〇1 and copper When the overlapping portion of the element 520 reaches the temperature (eutectic temperature) necessary for bonding, the copper element 502 can maintain a relatively large deformation strength, which can be derived from

2036-5808-PF(Nl).ptd 第124頁 1259117 五、發明說明（119) 接合治具503的壓力充分地傳達至鋁元件5〇1與銅元件5〇2 的重合面。因此，藉由本實施型態之金屬元件接合方法， 可以使兩元件501、502間的縫隙消失，而能夠行高強度的 接合。2036-5808-PF(Nl).ptd Page 124 1259117 V. INSTRUCTION DESCRIPTION (119) The pressure of the joining jig 503 is sufficiently transmitted to the overlapping faces of the aluminum member 5〇1 and the copper member 5〇2. Therefore, according to the metal element bonding method of the present embodiment, the gap between the two elements 501 and 502 can be eliminated, and high-strength bonding can be performed.

本實施型態的金屬元件接合方法中所使用的接合治具 5〇3，如第70圖所示，治具本體50 3 a的圓周面上，係形成 有約略沿著轉動方向的凹槽5〇3c。藉由使用此接合治具之 金屬元件接合方法，係增大了接合治具5 〇 3的圓周面與銅 元件5 02的表面502a的接觸面積，可以有效率地產生摩擦 熱，並可以有效率地接合銅元件5〇2與鋁元件5〇1。 又接合治具5 0 3中，凹槽5 〇 3 c係相對於轉動方向輕微 傾斜、且連續的凹槽，即是在接合治具5〇3的轉動軸5〇3b 的周邊，沿著接合治具50 3的圓周面描繪出螺旋狀執跡而 形成。藉由使用此接合治具之金屬元件接合方法，伴隨著 接合治具503的轉動與移動，凹槽5〇3(：内部蓄 化的金屬會沿著接合治具503的寬度方向二=的= 可以將接合後銅元件502的表面50 2a殘留的凹入量（段部 4 0 2 b的高度）抑制到最小限度。In the joint jig 5〇3 used in the metal element joining method of the present embodiment, as shown in Fig. 70, the circumferential surface of the jig body 50 3 a is formed with a groove 5 approximately in the rotational direction. 〇 3c. By using the metal member bonding method of the bonding jig, the contact area of the circumferential surface of the bonding jig 5 〇 3 with the surface 502a of the copper member 502 is increased, friction heat can be efficiently generated, and efficiency can be achieved. The copper element 5〇2 and the aluminum element 5〇1 are joined. In the joint jig 503, the groove 5 〇3 c is a slightly inclined and continuous groove with respect to the direction of rotation, that is, at the periphery of the rotating shaft 5〇3b of the jig 5〇3, along the joint The circumferential surface of the jig 50 3 is formed by drawing a spiral shape. By using the metal element joining method of the joining jig, along with the rotation and movement of the joining jig 503, the groove 5〇3 (the metal accumulating inside is along the width direction of the joining jig 503 == The amount of recess (the height of the segment portion 4 0 2 b) remaining on the surface 50 2a of the joined copper member 502 can be minimized.

在此處，接合治具503的治具本體503a的圓周面之凹 槽5〇3c中，凹槽503c之間的平面部5〇3d的寬度％ (mm)及凹 槽5 0 3c的寬度W2 (mm)，係較好設定為符合以下條件：丨^ w! S5、且1 Sw2 S3、且〇· 67 $Wi/w2 $5· 〇〇。將平面部5〇3d 及凹槽503c如此設定時，不但可以抑制接合治具5〇3的治 具本體50 3a壓入銅元件502的表面5 02a的壓入量，接合治Here, in the groove 5〇3c of the circumferential surface of the jig body 503a of the jig 503, the width % (mm) of the flat portion 5〇3d between the grooves 503c and the width W2 of the groove 5 0 3c (mm) is preferably set to meet the following conditions: 丨^ w! S5, and 1 Sw2 S3, and 〇· 67 $Wi/w2 $5· 〇〇. When the flat portion 5〇3d and the recess 503c are set as such, it is possible to suppress the press-fitting amount of the surface 50a of the copper member 502 by the tool main body 50 3a of the joining jig 5〇3, and the joint treatment can be suppressed.

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具503的治具本體5〇3a所產生摩擦熱的產生量就亦會 大’而能夠行有效率的接合。 又接 5 0 3 c ’ 係 0係較好 503a的整 凹槽5 0 3 c 隨著接合 5 0 3c内部 體503a的 不會有毛 低了機械 ^、503 其治具本體503a的圓周面的凹押 形成為傾斜於治具本體5〇3a的轉動方向，傾"斜角 設定為0·5〜2.0。。又接合治具503中，治具本 個圓周面的寬度方向中，較好為至少形成^二條 :將凹槽503c的傾斜角θ及數量如此設定時，伴 八503的具本體5〇3a的轉動與移動，凹槽 =蓄積的可塑化的金屬會相當連續地沿著治具本 寬度方向依序送出，治具本體5 03a通過後就幾乎 邊(jurr)與凹痕殘留在銅元件502的表面，亦減 負荷。 更者，接合治具503之治具本體503a的圓周面的凹槽 503c=，度d係設定為〇3〇〜12關。將凹槽5〇3c的深度^ 如此，又疋時，可塑化的銅元件5〇2就不會蓄積於凹槽5〇仏 的内部，接合後殘留於銅元件5〇2的表面5〇2a的凹陷量就 會變得較小，就可以施行有效率的接合。 以上述的方法將鋁元件5 〇 i與銅元件5 〇 2重合而摩擦震 動接口時，較好為由下式（A)求出接合時接合治具5〇3(治 具本體503a)轉動的圓周速率r (m/min): 250 SR $ 20 00 ........................ … ...........................(A) 接5時接合治具5〇3的圓周速率小於250，接 合治具503與銅元件5〇2之摩擦接觸所產生的熱量就過小， 而使銅元件502與鋁元件501的重合部的溫度過低，而導致The amount of frictional heat generated by the fixture body 5〇3a having the 503 is also large, and the joint can be efficiently performed. Also connected to the 5 0 3 c 'system 0 is better 503a of the entire groove 5 0 3 c. With the joining of the 5 0 3c inner body 503a, there is no hairiness lower than the mechanical surface 503, the circumferential surface of the jig body 503a The depression is formed to be inclined to the rotation direction of the jig body 5〇3a, and the inclination angle is set to be 0.5 to 2.0. . Further, in the joint jig 503, in the width direction of the circumferential surface of the jig, it is preferable to form at least two strips: when the inclination angle θ and the number of the grooves 503c are set as described above, the body having the body 5〇3a of the eighth 503 Rotating and moving, the groove=accumulated plasticized metal will be sent out in a continuous manner along the width direction of the jig. After the jig body 105a passes, almost the jurr and the dent remain in the copper element 502. The surface also reduces the load. Further, the groove 503c = the degree d of the circumference of the jig body 503a of the jig 503 is set to be 〇3 〇 12 12 OFF. When the depth of the groove 5〇3c is such that the plasticized copper member 5〇2 does not accumulate inside the groove 5〇仏, it remains on the surface 5〇2a of the copper member 5〇2 after bonding. The amount of depression becomes smaller and an efficient joint can be performed. When the aluminum element 5 〇i and the copper element 5 〇 2 are superposed on each other to rub the vibration interface by the above method, it is preferable to determine the rotation of the joint jig 5〇3 (the jig body 503a) at the time of joining by the following formula (A). Circumferential rate r (m/min): 250 SR $ 20 00 ........................ ........... ...........(A) The circumferential speed of the joint jig 5〇3 at 5 o'clock is less than 250, and the frictional contact between the joint jig 503 and the copper member 5〇2 is generated. The heat is too small, and the temperature of the overlapping portion of the copper member 502 and the aluminum member 501 is too low, resulting in

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接合不良。另一方面，接合時接合治具503的圓周 於2000 m/min時，接合治具403與銅元件402之摩 產生的熱量就會大過所必要的，不僅僅是使接合所 的驅動能量損失會變大，並使與接合治具503接觸的銅元 件5 0 2的溫度會局部過高，導致該部分發生塑性變护，Poor joint. On the other hand, when the circumference of the joining jig 503 is 2,000 m/min, the heat generated by the joining jig 403 and the copper member 402 is greater than necessary, not only the driving energy loss of the joining. Will become larger, and the temperature of the copper component 502 in contact with the bonding fixture 503 will be locally too high, resulting in plastic deformation of the portion.

使接合治具503的壓應力無法充分地傳達至重合部導致2 兩元件間有可能會產生縫隙。因此，可以瞭解接合時 治具503以250〜2000 m/min的圓周速率轉動時，接合治具口 503與銅元件502之摩擦接觸所產生的熱量為恰好適^當"，/而 能夠行良好的接合。 WThe insufficiency of the compressive stress of the joining jig 503 to the overlapping portion causes a gap between the two members. Therefore, it can be understood that when the jig 503 is rotated at a peripheral speed of 250 to 2000 m/min, the heat generated by the frictional contact between the jig 503 and the copper member 502 is just as appropriate. Good joint. W

又’將銘元件501與銅元件5〇2重合而摩擦震動接合 時，接合時，接合治具503(治具本體5〇3a)在銅元件5〇2的 表面50 2a的壓入量a (m)較好為由下式（B)求出： 0.03x a ^0.3x ............................ ..........) 八中t為重合部中的銅元件的厚度（m)。Further, when the bonding element 501 and the copper element 5〇2 are overlapped and frictionally vibrated, the pressing amount a of the bonding jig 503 (the jig main body 5〇3a) on the surface 50 2a of the copper element 5〇2 is ( m) is preferably determined by the following formula (B): 0.03xa ^0.3x ............................ .......) 八中t is the thickness (m) of the copper component in the overlap.

接合時接合治具50 3在鋼元件502的表面502a的壓入量 α小於0.03t時，銅元件502與鋁元件5〇1的重合部中會殘 留縫隙而導致接合不良。另一方面，壓入量^大於〇3t 時，雖然銅元件5 0 2與紹元件5 〇 1的重合部中不會殘留缝 隙，而過大的接合治具503的壓入量會在銅元件5〇2的表面 殘留顯著的凹痕，導致元件的損失。因此，接合時接合治 具503在銅元件502的表面502a的壓入量（^在0.031:以上、 0.3t以下時’接合治具503的壓應力為正好適當的值，可 以瞭解就可以在銅元件502與鋁元件5〇1的重合部不產生縫When the pressing amount α of the joining jig 50 3 on the surface 502a of the steel member 502 is less than 0.03 t, a gap remains in the overlapping portion of the copper member 502 and the aluminum member 5〇1, resulting in poor joining. On the other hand, when the press-in amount ^ is larger than 〇3t, although the gap does not remain in the overlapping portion of the copper member 502 and the 元件1, the excessively large bonding jig 503 is pressed in the copper member 5. Significant dents remain on the surface of 〇2, resulting in loss of components. Therefore, when the joining jig 503 is pressed in the surface 502a of the copper member 502 at the time of bonding (^ is 0.031: or more and 0.3 t or less, the pressing stress of the joining jig 503 is just an appropriate value, and it can be understood that it can be in copper. The overlap of the element 502 and the aluminum element 5〇1 does not create a seam

2036-5808-PF(N1).ptd 第127頁 1259117 五、發明說明（122) 況下完成接合，亦可以縮小鋼元件502的表面502a 瞎，f ί 1將μ件501與銅元件502重合而摩擦震動接合 的 σ %，，合治具5〇3(治具本體503a)沿著銅元件5〇 出面移動的行進速率v (m/min)較好為由下式（c)求 〇·! = V^R/(5.〇x ΐ〇7χ ....................... 其中R為接合時接合治具的圓周速率（m/min. ) ; (C) t為重合部中的銅元件的厚度（m)。 人接合時接合治具503的圓周速率變大時，因接 具503與銅元件5〇2的摩擦接觸所產生的二接 接合治具503的行進速率V較高時，重合部；J伴 2二：的溫度；而銅元件5〇2的厚度變大時，重合 呆 進以上就比較費時，若此時接合治具503的行 進速率過大時，在重合部的溫度達到 接合治具503就已通過’就會導致接合不良的^上。之γ 行良好的摩擦震動接合時，接: 只 闽、击安d ^ 牧σ，口具5 〇 3的行進速率v、圓 ^速率R、銅疋件的厚度七必須回 :認：，_5·0χ1…)時，心有係 另一方面，由當接合治具5〇3的行 口 。 低接合效率的觀點，實驗α & 進迓羊V過小時，會有降 以得到較好的=效;驗、，，°果係確認了滿足時，可 接下來說明本發明金屬元件 態。㈣A〜71C圖係顯示第二實W法的第：實施型 只她型悲之金屬元件接合方 2036-5808-PF(Nl).ptd 第128頁 1259117 五、發明說明（123) 法所使用的接合治具’其中第71A圖為斜視圖，第71B、 71 C為第二實施型態之金屬元件接合方法所使用的其他例 子的底面視圖。第72 A〜72B圖為一系列之斜視圖，係顯示 第二實施型態之金屬元件接合方法所使用的接合治具之其 他例子。第73A〜73B圖為一系列之剖面圖，係顯示第二實 施型態之金屬元件接合方法之摩擦接合的步驟。 此金屬7C件接合方法，首先與第一實施型態之金屬元 件接合方法相同，將鋁元件5〇1與板狀的銅元件5〇2以面接 觸的方式相互重合配置（請參考第68A圖）。而在此金屬元 件接合方法中，係使用以下的接合治具來取代第一實施型 態之金屬元件接合方法中所使用的接合治具5〇3 68B 、 68C 圖）。 月 / T 弟 如第71A圖所示，本金屬元件接合方法中所使用的接 a治具504係具有圓板狀的治具本體5〇乜、與轉動軸 5 0413，轉動軸5〇413係固定於治具本體5〇“的上表面1^。 在治具本體504a的下表面DS係形成有複數個突起b。 起b係可以由固著於該下表面的類鑽碳㈠“的以—丨u carbon ; DLC)等研磨粒子所構成。 又，此接合治具504的治具本體504a，亦可以且 ^突起b的細溝。此細溝G，可以是如第7ΐβ圖ς示之 第71C圖所不之在下表面DS上以格子狀延伸者。 又，此細溝G亦可以是彎曲的，例如可以是 所示之在下表面形成為渦卷形(scro⑴者、亦可以是如 1 第129頁 2036-5808-PF(Nl).ptd 1259117 五、發明說明（124) 7 2 B圖所# 狀配置之複數個直徑㈣的環狀細 溝G 〇 又，雖然未繪示於圖面，此接合治具504的治具 504a，’亦可以在下表面DS具有取代上述突起b的彎曲凸條 (rain。此凸條可以是在下表面⑽（請參考第7ia圖）形成 為渦卷形（scrol 1 )者、亦可以是形成為同心圓狀者。 此第二實施型態之金屬元件接合方法中，如第DA與 73B圖所示，將以轉動軸504b為中心而高速轉動的接合^ 具504之治具本體504a的下表面⑽壓至銅元件5〇2的表面° 50 2a，並將接合治具503沿著銅元件5〇2的表面5〇2a以前述 的行進速率v移動，而使鋁元件501與銅元件5〇2重合並接 合。2036-5808-PF(N1).ptd Page 127 1259117 V. INSTRUCTION DESCRIPTION (122) In the case where the joining is completed, the surface 502a of the steel member 502 can be reduced, and the μ member 501 and the copper member 502 can be overlapped. The σ% of the frictional vibration engagement, the traveling speed v (m/min) of the splicing tool 5〇3 (the jig body 503a) moving along the exit surface of the copper member 5 is preferably obtained by the following formula (c)! = V^R/(5.〇x ΐ〇7χ ....................... where R is the circumferential velocity of the jig when engaged (m/ (C) t is the thickness (m) of the copper member in the overlapping portion. When the circumferential speed of the joining jig 503 is increased when the person is engaged, the frictional contact between the bonding member 503 and the copper member 5〇2 is generated. When the traveling rate V of the second joining jig 503 is high, the overlap portion; the temperature of the J 2 2:; and when the thickness of the copper member 5〇2 becomes large, it is time consuming to overlap, and if it is joined at this time When the traveling speed of the jig 503 is too large, when the temperature of the overlapping portion reaches the joining jig 503 and has passed the 'coupling failure', the γ-line is good in friction and vibration engagement, and the connection is made only: ^ 牧σ, the march of 5 〇 3 The rate v, the circle rate R, and the thickness of the copper piece must be back: when: _5·0χ1...), the heart is on the other hand, by the way of joining the jig 5〇3. From the viewpoint of low joint efficiency, the experiment α & When the sheep V is too small, there will be a drop to obtain a better effect; when the test is confirmed, the metal element state of the present invention can be explained next. (4) The A~71C system shows the second real W method: the implementation type is only her type of sad metal component joint 2036-5808-PF(Nl).ptd Page 128 1259117 V. Invention Description (123) The jig of the joint jig is shown in Fig. 71A as a perspective view, and the 71B and 71 C are bottom views of other examples used in the metal element joining method of the second embodiment. Figs. 72A to 72B are a series of oblique views showing other examples of the joint jig used in the metal element joining method of the second embodiment. Figs. 73A to 73B are a series of sectional views showing the steps of the frictional engagement of the metal member joining method of the second embodiment. This metal 7C bonding method is firstly arranged in the same manner as the metal element bonding method of the first embodiment, and the aluminum element 5〇1 and the plate-shaped copper element 5〇2 are placed in surface contact with each other (refer to FIG. 68A). ). In the metal element bonding method, the following bonding jigs are used in place of the bonding jigs 5〇3 68B and 68C used in the metal element bonding method of the first embodiment. As shown in Fig. 71A, the jig 504 used in the metal element joining method has a disc-shaped jig body 5〇乜, a rotating shaft 5 0413, and a rotating shaft 5〇413. Fixed on the upper surface of the jig body 5". The lower surface DS of the jig body 504a is formed with a plurality of protrusions b. The b-series can be made of diamond-like carbon (a) fixed to the lower surface. - 丨u carbon ; DLC) and other abrasive particles. Further, the jig body 504a of the jig 504 may be a narrow groove of the protrusion b. The fine groove G may be a lattice-like extension on the lower surface DS as shown in Fig. 71C of the seventh ΐβ diagram. Moreover, the narrow groove G may also be curved, for example, it may be formed in a spiral shape on the lower surface (scro (1), or may be, for example, 1 page 129, 2036-5808-PF (Nl). ptd 1259117. OBJECTS OF THE INVENTION (124) 7 2 B-shaped arrangement of a plurality of diameter (four) annular fine grooves G 〇 Further, although not shown in the drawing, the jig 504a of the joining jig 504 can also be on the lower surface. The DS has a curved ridge (rain) instead of the protrusion b. The rib may be formed into a spiral shape on the lower surface (10) (see FIG. 7ia), or may be formed into a concentric shape. In the metal element joining method of the second embodiment, as shown in Figs. DA and 73B, the lower surface (10) of the jig body 504a of the bonding tool 504 which is rotated at a high speed around the rotating shaft 504b is pressed to the copper member 5. The surface of the crucible 2 is 50 2a, and the bonding jig 503 is moved along the surface 5〇2a of the copper member 5〇2 at the aforementioned traveling speed v, and the aluminum member 501 and the copper member 5〇2 are joined and joined.

此時的治具本體504a，如第73A圖所示，此下表面DS 係僅以一定量a (m)壓入銅元件5〇2的表面5〇。的狀態下 高速轉動，並沿著銅元件502的表面5〇2a移動。而藉著上 述治具本體504a在銅元件502的表面502a之壓入，使銘元 件501與銅元件5 02之重合部的縫隙消失；並藉著高速轉動 的治具本體504a與銅元件502的接觸所產生的9震動，將銘 元件501與銅元件502之重合部的氧化物皮膜***破壞；並 如第73B圖所示，與治具本體504a接觸的銅元件5〇2的既定 區域與其鄰近區域、還有與上述區域鄰接的鋁元件5〇1的 既定區域，因治具本體504a與銅元件5〇2的摩擦接觸所產 生的熱里而咼溫化，呈現可塑化（流動化）的固相狀態。上 述的結果，使得銅元件502與鋁元件5〇1在相互的交界面上At this time, the jig body 504a is as shown in Fig. 73A, and the lower surface DS is pressed into the surface 5 of the copper member 5〇2 only by a certain amount a (m). The state is rotated at a high speed and moves along the surface 5〇2a of the copper member 502. By pressing the surface 502a of the copper member 502 on the surface 502a of the copper member 502, the gap between the overlapping portion 501 and the copper member 502 disappears; and the fixture body 504a and the copper member 502 are rotated at a high speed. The 9 vibration generated by the contact splits and breaks the oxide film of the overlapping portion of the member 501 and the copper member 502; and as shown in Fig. 73B, the predetermined region of the copper member 5〇2 in contact with the jig body 504a is adjacent thereto. The region and the predetermined region of the aluminum member 5〇1 adjacent to the above region are heated by the heat generated by the frictional contact between the jig body 504a and the copper member 5〇2, and are plasticized (fluidized). Solid state. As a result of the above, the copper element 502 and the aluminum element 5〇1 are at the mutual interface.

第130頁 1259117 發明說明（125) 塑性流動，並由當初的表面開始塑性變形。 接合治具504的治具本體5〇4a的通過執跡係與第一實 施型態之金屬元件接合方法相同，藉由治具本體5〇“的壓 應力在銅元件502的表面502a上，形成一對淺的段部5〇2b (請參考第69C圖）。又，在鋁元件501與銅元件5〇2的重人 面中’與第一實施型態之金屬元件接合方法相同，已塑生 變形的銘元件501及銅元件5 02相互咬合而固化成斷面凹凸 型的接合面S，而藉由介於銅元件502與紹元件5〇1之間的 此接合面S，而使銅元件5 0 2與鋁元件5 0 1確實地接合（請來 考第69C圖）。 ° ^ ^ 散熱元件及其製造方法 接下來說明由上述金屬元件製造方法所得之銘元件 501(第一金屬元件）及銅元件502(第二金屬元件）所構成的 接合體J (請參考第69C圖）所製造的散熱元件。第74A圖為 一散熱元件的斜視圖；第74B〜74C圖以及第75a〜75b圖係顯 示第74A圖所示之散熱元件的製造步驟。 μ 此散熱元件係使用於例如I C用散熱元件、皮蒂爾致冷 器（peltier device)用散熱元件、馬達用散熱元件、電子 控制零件用散熱元件等等，如第74A圖所示，散熱元件5〇6 除了有基板207與複數個散熱鰭片5 08a之外，亦具有散# 元件508 ;其中散熱元件508係由將散熱鰭片5〇8a相互間”隔 排列並立設於基板507上，並於基板50 7的—表面上接合@ 成。此散熱元件506的基板507，係由相當於上述接合體 J(請參考第69C圖）之銅元件502之部分、與相當於下述順Page 130 1259117 Description of the invention (125) Plastic flow and plastic deformation from the original surface. The passing of the jig body 5〇4a of the jig 504 is the same as that of the metal element of the first embodiment, and the compressive stress of the jig body 5〇 is formed on the surface 502a of the copper member 502. a pair of shallow segments 5〇2b (please refer to Fig. 69C). Also, in the heavy face of the aluminum member 501 and the copper member 5〇2, the same method as the metal member of the first embodiment is used, The deformed element 501 and the copper element 502 are bonded to each other to be solidified into a joint surface S having a concave-convex shape, and the copper element is made by the joint surface S between the copper element 502 and the element 5〇1. 5 0 2 is surely joined to the aluminum component 5 0 1 (please refer to the drawing of Fig. 69C). ° ^ ^ Heat dissipating component and its manufacturing method Next, the inscribed component 501 (first metal component) obtained by the above metal component manufacturing method will be described. And a heat dissipating component manufactured by a bonding body J (see FIG. 69C) formed of a copper component 502 (second metal component). FIG. 74A is a perspective view of a heat dissipating component; FIGS. 74B to 74C and 75a to 75b The figure shows the manufacturing steps of the heat sink shown in Figure 74A. μ This heat dissipation The device is used for, for example, a heat dissipating component for an IC, a heat sink element for a peltier device, a heat dissipating component for a motor, a heat dissipating component for an electronic control component, and the like, as shown in FIG. 74A, the heat dissipating component 5〇6 In addition to the substrate 207 and the plurality of heat dissipation fins 508a, there is also a scatter component 508; wherein the heat dissipation component 508 is arranged by arranging the heat dissipation fins 5 〇 8a on the substrate 507 and on the substrate. 50 7 - surface bonding @成. The substrate 507 of the heat dissipating member 506 is a portion corresponding to the copper member 502 corresponding to the bonded body J (refer to FIG. 69C), and corresponds to the following

1259117 五、發明說明（126) 序中的前述接合體J之鋁元件5〇1之部分所形成者。 接下來說明此散熱元件5〇6的製造方法。在此製造方 法中，藉由將上述接合體j的鋁元件5〇1鍛造加工，而在銅 元件502上立設複數個散熱鰭片5〇83。 此鍛造加工中所使用的鍛造模具，例如如第74B圖所 示’舉出由下部鍛造模具5 〇 9與上部鍛造模具5 1 0所構成 者。其中下部鍛造模具5 〇 9係具有一内部空間5 0 9 b，内部 空間50 9b的開口形狀係與接合體j的平面形狀相同，並將 此形狀延伸至平坦的底部50 9a ;而上部鍛造模具51〇係具 有與下部鍛造模具509的内部空間5 09b約略相同的形狀，錢· 而在與下部鍛造模具5 〇 9的底部5 0 9 a合模之側，形成有依 據散熱錯片5 0 8 a的外型所作成的形狀之凹部& 1 q a。 在此散熱元件的製造方法中，首先如第74B圖所示， 在下部鍛造模具50 9的底部509a中配置接合體j。此時的接 合體J係將鋁元件501配置為面對上部鍛造模具51〇的方 向。接下來’由下部鍛造模具5 0 9的開口 50 9c，將上部鍛 造模具510向内部空間509b壓下，如第74C圖所示，使得鋁 元件50 1發生塑性變形而進入形成於上部鍛造模具的四部 510a内。然後將上部鍛造模具510向上移動，使1部锻造 模具510的凹部510a由接合體J離開，而製造出如第μα圖 所示的散熱元件5 0 6。 又’此散熱元件506的製造方法並不限定於如上所述 之鍛造加工，亦可以使用接下來所述的切削加工。其製造 方法係將上述的接合體J切削加工而形成複數個狹縫' <1259117 V. INSTRUCTION OF THE INVENTION (126) The portion of the aluminum member 5〇1 of the joint body J in the sequence is formed. Next, a method of manufacturing the heat dissipating member 5〇6 will be described. In this manufacturing method, a plurality of heat radiating fins 5 〇 83 are erected on the copper member 502 by forging the aluminum member 5〇1 of the bonded body j. The forging die used in this forging process, for example, as shown in Fig. 74B, is composed of a lower forging die 5 〇 9 and an upper forging die 510. Wherein the lower forging die 5 〇 9 has an inner space 5 0 9 b, the opening shape of the inner space 50 9b is the same as the planar shape of the joined body j, and extends the shape to the flat bottom 50 9a; and the upper forging die The 〇 具有 has a shape which is approximately the same as the inner space 5 09b of the lower forging die 509, and is formed on the side of the lower part of the lower forging die 5 〇 9 at the bottom of the mold 5 909, and is formed with a heat-dissipating piece 5 0 8 The shape of the a is made into a concave portion & 1 qa. In the method of manufacturing the heat dissipating member, first, as shown in Fig. 74B, the joint body j is disposed in the bottom portion 509a of the lower forging die 50 9 . At this time, the joint J is disposed such that the aluminum member 501 faces the upper forging die 51''. Next, the upper forging die 510 is pressed down to the inner space 509b by the opening 50 9c of the lower forging die 509, as shown in Fig. 74C, so that the aluminum component 50 1 is plastically deformed into the upper forging die. Within the four sections 510a. Then, the upper forging die 510 is moved upward to separate the concave portion 510a of the one forging die 510 from the joined body J, and the heat dissipating member 506 as shown in Fig. α is produced. Further, the method of manufacturing the heat dissipating member 506 is not limited to the above-described forging processing, and the cutting processing described below can also be used. The manufacturing method is that the above-mentioned joint body J is cut to form a plurality of slits' <

1259117 五、發明說明（127) (SUU ’而在銅元件502上立設複數個散熱趙片5〇8a。 於^切削加工中所使用的切削器具，如第？ 示i係舉出由支持軸5Ub與以等間隔配置於其上二數個 刀具（cutter)5 11a所構成者。其中 复數個 之疮貼，日兗園闲而尨八 Τ谷刀具5 1 1 a係為圓板狀 之开/狀m周面係分別开)成有複數個圖式 鋸齒；而支持軸5 11 b係用以支持久„ ^1不的 轉動者。 支持各刀具5Ua ’且沿其軸向 此散熱兀件506的製造方法中，首先如第75a圖所示， 在圖式中未繪示的支持台上水平地承載著紹元件朝上 的接合體J ’而在接合體J的上方配置支持轴5Ub呈水平狀 態的切削器具511。接下來，將切削器具511向接合體】的 方向壓下’而如第75B圖所示，使各刀具5Ua在接合體的 鋁凡件501形成複數個間隔配置的複數個狹縫5〇2c。藉由 上述複數個狹縫502c將鋁元件5〇1分割而形成以既定間隔 並列的散熱鰭片505a，而製造出如第74八圖所示的散埶元 件506。 ·、、 而如上所述的散熱元件506的製造方法中，將鋁元件 5 0 1作锻造處理、或是作切削處理，而在銅元件5 〇 2上立設 複數個散熱鰭片508a的上述步驟中，係相當於申請專利範 圍中的「第三步驟」。 雖然以上係說明將接合體的鋁元件5〇1鍛造加工或是 切削加工而形成具有散熱鰭片508a的散熱元件5〇6及其製 造方法，但是本發明之散熱元件並不限定於此，而亦可以 是如接下來所說明’將作為第一金屬元件的散熱鰭片、與1259117 V. INSTRUCTION DESCRIPTION (127) (SUU 'and a plurality of heat-dissipating radii 5 〇 8a are erected on the copper element 502. The cutting tool used in the cutting process, as shown in the first embodiment, is supported by the support shaft. 5Ub is composed of two cutters 5 11a arranged at equal intervals. Among them, a plurality of sores are attached, and the Japanese 兖 兖 闲 尨 尨 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 The /m-shaped peripheral surface is separately opened to have a plurality of pattern sawtooth; and the support shaft 5 11 b is used to support the long-term φ ^1 rotator. Support each tool 5Ua 'and the heat-dissipating element along its axial direction In the manufacturing method of the 506, first, as shown in FIG. 75a, the support body J' with the component facing upward is horizontally carried on the support table not shown in the drawing, and the support shaft 5Ub is disposed above the joint body J. The cutting tool 511 in the horizontal state. Next, the cutting tool 511 is pressed in the direction of the joined body.] As shown in Fig. 75B, each of the cutters 5Ua is formed in a plurality of spaced positions in the aluminum member 501 of the joined body. a slit 5〇2c. The aluminum element 5〇1 is divided by the plurality of slits 502c to form a predetermined The heat dissipating fins 505a are arranged in parallel to form the heat dissipating component 506 as shown in Fig. 74. In the manufacturing method of the heat dissipating component 506 as described above, the aluminum component 510 is forged, Alternatively, in the above-described step of arranging a plurality of heat radiating fins 508a on the copper member 5 〇 2, it is equivalent to the "third step" in the patent application. Although the above description explains that the heat dissipating member 5 〇 6 having the heat dissipating fins 508 a and the manufacturing method thereof are formed by forging or cutting the aluminum member 5 〇 1 of the bonded body, the heat dissipating member of the present invention is not limited thereto. It can also be as described below, 'will be used as the first metal component of the heat sink fin, and

2036-5808-PF(N1).ptd 第133頁2036-5808-PF(N1).ptd第133页

1259117 五、發明說明（128) 作為第二金屬元件的基板，以摩擦接合方法（前述第一級 第二實施型態之金屬元件接合方法）相互接合的其他 熱元件。 其他的散熱元_件及其製诰太沐 以下係說明其他的散熱元件及其製造方法，此處係以 上述第-實施型態之金屬元件接合方法所接合的散熱元件 及其製造方法為例來作說明。第76圖為一剖面圖係顯示 其他的散熱元件。第77圖為一斜視圖，係顯示第?6圖之散 熱兀件構成中之散熱鰭片。第78圖為—斜視圖，係顯示第 76圖之散熱兀件製造時所使用的支持治具。第79A〜79c圖 為-系列之剖面圖’係顯示第76圖所示之散熱元件的製造 步驟。第8〇A:8〇D圖為一系列之剖面圖與一斜視圖，係顯 示第7 6圖所示之散熱元件的變形例。 « 如第76圖所*，在此處說明的散熱元件512，係具有 鋁板構成的散熱鰭片512a (第一金屬元件）與銅構成的基 板512b (第一金屬το件）。在此散熱元件512中，在基板 51 2b的一表面上立設配置有複數個高度為匕、相互之間具 有一既定間隔排列的複數個散熱鰭片512a。而配置在最外 端的散熱鰭片512a，在基板512b上係具有一既定長度〇s的 偏移量。 而各散熱韓片512a的高度^較好為在8〜22 的範圍内 適宜地設定。又，偏移量的長度〇s則大體為i mm的程度。 各散熱鰭片512a，可一併參考第口圖會更加清楚，係 為將鋁材作擠型而成型，而構成為斷面L字型的板材。此1259117 V. INSTRUCTION OF THE INVENTION (128) As the substrate of the second metal element, other heat elements joined to each other by a friction bonding method (the metal element bonding method of the first-stage second embodiment) are bonded to each other. Other heat dissipating elements and their manufacturing methods are described below. Other heat dissipating elements and manufacturing methods thereof will be described. Here, the heat dissipating elements joined by the metal element joining method of the first embodiment described above and a manufacturing method thereof are taken as an example. To illustrate. Figure 76 is a cross-sectional view showing other heat dissipating components. Fig. 77 is a perspective view showing the heat radiating fins in the heat radiating element of Fig. 6. Fig. 78 is a perspective view showing the support jig used in the manufacture of the heat sink element of Fig. 76. Figs. 79A to 79c are sectional views of the series, showing the steps of manufacturing the heat dissipating member shown in Fig. 76. Fig. 8A: Fig. 8 is a series of sectional views and oblique views showing a modification of the heat dissipating member shown in Fig. 76. « As shown in Fig. 76, the heat dissipating member 512 described herein has a heat sink fin 512a (first metal member) composed of an aluminum plate and a substrate 512b (first metal member) made of copper. In the heat dissipating member 512, a plurality of heat dissipating fins 512a having a height of 匕 and having a predetermined interval therebetween are erected on one surface of the substrate 51 2b. The fins 512a disposed at the outermost end have an offset of a predetermined length 〇s on the substrate 512b. The height ^ of each of the heat-dissipating fins 512a is preferably set to be suitably within the range of 8 to 22. Moreover, the length 〇s of the offset is approximately i mm. Each of the heat dissipating fins 512a can be more clearly seen with reference to the first port diagram, and is formed by extruding the aluminum material to form a sheet having an L-shaped cross section. this

1259117 .......一~— I、發明說明（129) 散熱鰭片512a亦可以為將平板材作L字型的 而散熱錄片512a的厚度（板厚）較好為〇 2、〇 8關的程度。 =’與基板512b接觸的散熱縛片512b部分的寬度％ (請參 考第76圖）愈寬則愈能提升與基板5 12b的接合力而相反 地則減少立設於基板512a的各散熱轄片5l2b的數量，而減 少散熱το件512的散熱面積。因此，為了確保基fe5i2b上 的散熱鰭片512a的接合力、與散熱面積雙方面都能夠滿足 上述寬度ws較好係設定在1.2〜2.0 min的範圍内。 接下來說明散熱元件512的製造方法。首先，支持複 數個散熱鐘片51 2a以將其分別以一既定的間隔並列而。支 持各散熱鰭片512a的方法並沒有特別的限制，可以列舉出 將複數個散熱元件維持在既定間隔的支持器具的使用方 ^。上述的支持器具，係列舉出例如為如第78圖所示，由 ，數個接受各散熱鰭片512a***的狹縫（sUt)5i3a以一既 定間隔並列於一方向所形成的塊狀物體（bl〇ck) 支持器具513。 分別在上述支持器具513的狹縫513a置入各散埶鰭片 512a後，將此支持器具513以既定的散熱元件製造用治1 固定。 八 如第79A圖所示，散熱元件製造用治具514，係具有由 上面是開放的箱型治具本體514a、與緊閉螺栓51化了其中 ^閉螺栓51 4b係用以固定收納於箱型治具本體5Ua的^持 器具513，並將其以螺絲結合於構成箱型治具本體““的 壁上。此散熱元件製造用治具514中，係將散熱鰭片“。1259117 . . . 1 - I, invention description (129) The heat sink fin 512a may also be an L-shaped flat plate material and the thickness (thickness) of the heat-dissipating recording sheet 512a is preferably 2 The degree of 〇8 off. = '% of the width of the portion of the heat-dissipating tab 512b that is in contact with the substrate 512b (refer to Fig. 76). The wider the width, the more the bonding force with the substrate 5 12b is increased, and conversely, the heat dissipation of the substrate 512a is reduced. The number of 5l2b, while reducing the heat dissipation area of the piece 512. Therefore, in order to ensure that the joining force of the heat radiating fins 512a on the base fe5i2b and the heat radiating area are both satisfied, the width ws is preferably set in the range of 1.2 to 2.0 min. Next, a method of manufacturing the heat dissipation element 512 will be described. First, a plurality of heat dissipation fins 51 2a are supported to be juxtaposed at a predetermined interval. The method of supporting each of the heat radiation fins 512a is not particularly limited, and a method of supporting a plurality of heat dissipating elements at a predetermined interval can be cited. The above-mentioned supporting device is, for example, a block-like object formed by a plurality of slits (sUt) 5i3a inserted into the respective heat radiating fins 512a and juxtaposed in one direction at a predetermined interval, as shown in Fig. 78. Bl〇ck) Supports the instrument 513. After the respective fins 512a are placed in the slits 513a of the support device 513, the support device 513 is fixed by the predetermined heat-dissipating element manufacturing process 1. As shown in Fig. 79A, the jig 514 for heat-dissipating element manufacturing has a box-type jig body 514a which is open from the upper surface, and a closing bolt 51 is formed therein, and the closing bolts 51 4b are fixed for storage in the box. The fixture 5 of the type fixture 5Ua is screwed to the wall constituting the body of the box type fixture. In the jig 514 for manufacturing a heat dissipating member, the heat dissipating fins are ".

1259117 一丨丨 五、發明說明（130) 之被變曲的緣部512c的一側朝向治具本雜51粍所 面，而將支持器具513收納於治具本體514 門 螺栓5141)鎖入，而將治具太#8^1>|&/^4| 並將緊閉 512a固定。@將⑺具本體内的複數個散熱韓片 接下來，如第79B圖所示，將基板5121)重合於 具本體5143所開放的上面的散熱鰭片5123的緣部512^。~ 時基板5 1 2b係以圖式中未繪示的固定治具固 512a的緣部512c。 ….、θ片 如上所述將基板5 12b重合餘個散熱鰭片512a後，將各 散熱鰭片512a與基板5 12b以上述第一實施型態之金屬元件 接。方法接合。而如第79C圖所示，將以轉動軸5〇3b為中 心以圓周方向高速轉動的治具本體5〇3a的圓周面垂直壓至 基板512b之表面，並使治具本體5〇3&沿著基板51礼之表面 移動’使各鰭片512a與基板5 12b接合。 此時’因為構成基板5丨2b的銅的熔點高於構成散熱鰭 片512a的銘，各散熱鰭片512a與基板512b之重合面的溫度 上升到兩者接合時所必要的溫度（共晶溫度：5 4 8 °C )時， 基板5 1 2b仍能保持高的抗形變強度。此結果，在此散熱元 件512的製造方法中，接合治具5〇3的壓應力能夠有效率地 傳達至各散熱鰭片512a與基板512b之重合部，而使各散熱 錯片512a與基板5 12b之間無縫隙形成，亦使各散熱鰭片 512a與基板5 12b行高強度的接合。而此處，係使用第一實 施型態之金屬元件接合方法，而當然亦可以使用上述的第 二貫施型態之金屬元件接合方法。1259117, the side of the curved edge portion 512c of the invention description (130) faces the jig 51, and the support tool 513 is housed in the jig body 514, the door bolt 5141) is locked. And the fixture is too #8^1>|&/^4| and the closed 512a is fixed. @(7) A plurality of heat-dissipating Korean films having a body. Next, as shown in Fig. 79B, the substrate 5121) is superposed on the edge portion 512 of the heat-dissipating fins 5123 having the upper surface of the body 5143. When the substrate 5 1 2b is the edge portion 512c of the fixing fixture 512a which is not shown in the drawings. ...., θ sheet After the substrate 5 12b is overlapped with the remaining heat dissipation fins 512a as described above, the heat dissipation fins 512a and the substrate 5 12b are connected to the metal element of the first embodiment described above. Method of joining. As shown in Fig. 79C, the circumferential surface of the jig body 5〇3a which is rotated at a high speed in the circumferential direction around the rotating shaft 5〇3b is vertically pressed to the surface of the substrate 512b, and the jig body 5〇3& The surface movement of the substrate 51 is performed to engage the fins 512a with the substrate 5 12b. At this time, since the melting point of the copper constituting the substrate 5丨2b is higher than that of the heat radiating fins 512a, the temperature of the overlapping surface of each of the heat radiating fins 512a and 512b rises to the temperature necessary for the bonding (the eutectic temperature). At 5 4 8 ° C, the substrate 5 1 2b still maintains high deformation strength. As a result, in the method of manufacturing the heat dissipating component 512, the compressive stress of the bonding jig 5〇3 can be efficiently transmitted to the overlapping portion of each of the heat dissipating fins 512a and 512b, and the heat dissipating stipples 512a and the substrate 5 are respectively disposed. There is no gap formation between 12b, and each of the heat dissipation fins 512a and the substrate 5 12b are joined with high strength. Here, the metal element bonding method of the first embodiment is used, and of course, the metal element bonding method of the above-described second embodiment can be used.

2036-5808-PF(Nl).ptd 第136頁 1259117 五、發明說明（131) 如上所述將各散熱鰭片512a與基板512b接合後，將支 持器具513由散熱元件製造用治具514取出，並將已接合的 各散熱鰭片512a與基板512b由支持治具513中拔出，而完 成了散熱元件512的製造步驟。 針對以上作詳述，上述本實施型態的金屬元件接合方 法中，由熔點較高的板狀銅元件，以接合治具5 〇 3、5 0 4、2036-5808-PF(Nl).ptd Page 136 1259117 V. Inventive Description (131) After the heat dissipation fins 512a and the substrate 512b are joined as described above, the support tool 513 is taken out by the heat sink element manufacturing jig 514. The bonded heat sink fins 512a and 512b are pulled out from the support jig 513, and the manufacturing steps of the heat dissipating member 512 are completed. In view of the above, in the metal element joining method of the present embodiment, the plate-shaped copper member having a high melting point is bonded to the jig 5 〇 3, 504.

505 (請參考第68B〜68C圖、第71A〜71C圖、與第72A〜72B 圖）施以加熱及加壓，而在鋁元件5〇1與銅元件502之重合 部的溫度上升到接合時所必要的溫度（共晶溫度：5 4 8 °c ) 時’銅元件5 0 2仍能保持其南的抗形變強度，而使壓應力 能夠有效率地傳達至重合部。因此，藉由此金屬元彳牛接合 方法，可以簡單地裝置，而能夠成為鋁元件5〇1與銅元件 5 0 2之間無縫隙的高強度接合。 又，本實施型態之散熱元件的製造方法中，係形^ 銘元件5〇1與銅元件502(基板）以上述金 合的接合體J (請參考第69C圖）； 及1 接合體…件5〇1的部分加I而=父=目當於該 是將鋁構成的散熱鰭片512a與#月,H 08a，或 金屬元件接合方法接合而製造成，板512b以上述έ 此散熱元件512的製造方法，可以、' 兀^ 512。因此，藉由 法-樣簡單地裝置，而能夠成為：上二屬元件接合方 之間無縫隙的高強度接合。 …、，1片512a與基板512 又，藉由此散熱元件的製造 時一般在真空爐中加熱並維持—二，因為不需要如銲4505 (please refer to pages 68B to 68C, 71A to 71C, and 72A to 72B) for heating and pressurization, and when the temperature of the overlapping portion of the aluminum member 5〇1 and the copper member 502 rises to the junction When the necessary temperature (eutectic temperature: 5 4 8 °c), the copper element 502 can maintain its south deformation resistance strength, and the compressive stress can be efficiently transmitted to the overlapping portion. Therefore, by the metal element yak bonding method, it is possible to easily form a high-strength joint without gaps between the aluminum member 5〇1 and the copper member 502. Further, in the method for manufacturing a heat dissipating member of the present embodiment, the bonding element J 〇1 and the copper element 502 (substrate) are bonded to each other by the above-described gold bonding (refer to Fig. 69C); and 1 bonding body... The portion of the piece 5〇1 is added with I and the parent is made by bonding the heat-dissipating fin 512a made of aluminum to the #月, H 08a, or metal element bonding method, and the plate 512b is made of the above-mentioned heat-dissipating element. The manufacturing method of 512 can be ' 兀 ^ 512. Therefore, it is possible to achieve a high-strength joint without gaps between the joining elements of the upper two elements by simply using the same method. ..., a piece of 512a and a substrate 512, by which the heat dissipating component is generally heated and maintained in a vacuum furnace - because it does not need to be soldered 4

、 无疋時間，而能夠將鰭J, innocent time, and able to put fins J

1259117 五、發明說明（132) 508a、512a與基板507、512b (請參考第74A圖與第76圖） 接合，可以削減製造成本。 又’將散熱縛片512a與基板512b以上述的金屬元件接 合方法接合的散熱元件51 2的製造方法中，將散熱籍片 512a與基板512b相互重合之際，以支持治具513 (請參考 第7 8圖）支持複數個散熱鰭片5 1 2 a。因此，藉由此散熱元 件5 1 2的製造方法，不但可以正確地保持各散熱鰭片5 1 2 a 相互的間隔，亦可以決定相互之間以一既定間隔分開之狀 態的位置。 又’此散熱元件5 1 2的製造方法中，將散熱鰭片5丨2a 與基板5 1 2 b以上述金屬元件接合方法接合之際，散熱鰭片 5 1 2a係受到彎曲應力的作用，而散熱鰭片5丨2a係受到支持 器具5 1 3的補強。因此，藉由此散熱元件5丨2的製造方法， 散熱鰭片5 1 2a的厚度可予以相當地薄化。 又’此散熱元件512的製造方法中，將散熱鰭片512a 與基板5 12b以上述金屬元件接合方法接合之際，因為散熱 •铸片51 2a係受到支持器具513的補強，散熱鰭片512a的高 度h可以作得較大。因此，藉由此散熱元件5丨2的製造方 法’可以製造出具有高高度/間隔比（例如高度/間隔比超 過20)的散熱元件512。 本實施型態的散熱元件512，係由基板51 2b之側施以 加熱及加壓而將散熱鰭片51 2a與基板5 12b接合而成者。而 並不是如習知的物件一般，由散熱鰭片5丨2a之側施以加熱1259117 V. INSTRUCTION OF THE INVENTION (132) 508a, 512a and the substrates 507, 512b (please refer to the 74A and 76th drawings) are joined to reduce the manufacturing cost. Further, in the method of manufacturing the heat dissipating element 51 2 in which the heat dissipating cleat 512a and the substrate 512b are joined by the above-described metal element bonding method, the heat dissipating film 512a and the substrate 512b are overlapped with each other to support the jig 513 (please refer to 7 8) Support multiple heat sink fins 5 1 2 a. Therefore, by the method of manufacturing the heat dissipating member 51, the distance between the fins 5 1 2 a can be accurately maintained, and the positions separated from each other by a predetermined interval can be determined. Further, in the method of manufacturing the heat dissipating element 516, when the heat dissipating fins 5丨2a and the substrate 5 1 2b are joined by the above-described metal element bonding method, the heat dissipating fins 51 2a are subjected to bending stress, and The heat sink fins 5丨2a are reinforced by the support device 5 1 3 . Therefore, by the manufacturing method of the heat dissipating member 5丨2, the thickness of the heat dissipating fins 51 2a can be considerably thinned. Further, in the method of manufacturing the heat dissipating element 512, when the heat dissipating fin 512a and the substrate 512b are joined by the above-described metal element bonding method, since the heat dissipating/casting piece 51 2a is reinforced by the supporting tool 513, the heat dissipating fin 512a The height h can be made larger. Therefore, the heat dissipating member 512 having a high height/space ratio (e.g., height/space ratio exceeding 20) can be manufactured by the manufacturing method of the heat dissipating member 5?. The heat dissipating element 512 of the present embodiment is formed by bonding heat radiating and pressing to the side of the substrate 51 2b to bond the heat radiating fins 51 2a and the substrate 5 12b. It is not heated by the side of the fins 5丨2a as is conventional.

及加壓而為接合。因此，藉由此散熱元件512，即使是具And pressurization to join. Therefore, by means of the heat dissipating component 512, even

2036o808-PF(Nl).ptd 第138頁 1259117 五、發明說明（133) 有複雜的形狀及構造的散熱鰭片5 1 2 a，亦可以簡易地將其 裝置而製造而成為散熱元件512的構成。由此結果，此散 熱元件512中，可以在基板5 12b上配設具有較大散熱面積 之具有複雜的形狀及構造的散熱鰭片5 1 2 a。 係已說明本發明的實施型態 叩桊發明並不限2036o808-PF(Nl).ptd Page 138 1259117 V. Description of the Invention (133) A heat dissipating fin 5 1 2 a having a complicated shape and structure can also be easily fabricated and formed into a heat dissipating component 512. . As a result, in the heat radiating element 512, the heat dissipating fins 51 1 a having a complicated shape and structure having a large heat dissipating area can be disposed on the substrate 5 12b. The embodiment of the present invention has been described.

以上 定於上述的實施型態，而能以各式各樣的型態實施 例如，在本實施型態中，在銅元件5〇2 (第二金屬元 件）施以加熱及加壓之際，係採用以接合治具5〇3、5〇4、 50^ (請參考第68B〜68C圖、第71A〜71C圖、與第72a72b Π至銅元件502的接觸方式；而本發明的金屬元件接名 =並不限定於上述的接觸方式，亦可以使用電磁办 …'等非接觸方式來取代上述的接觸方式。 ° 又，在本實施型態中’係以鋁元件作為第一金屬元科 本發明的金屬元件接合方法、\弟執一金杜屬二件之一例；而 散熱元件，並不限定於上述：用、：：：-造方法、以及 使用熔點互異的金屬元件。斤使用的材料，而可以廣泛址 在治i本2之金屬元件接合方法中，係以使用The above embodiment is set in the above-described embodiment, and can be implemented in various types. For example, in the present embodiment, when the copper element 5〇2 (the second metal element) is heated and pressurized, The method is to use a bonding fixture 5〇3, 5〇4, 50^ (please refer to the drawings 68B to 68C, 71A to 71C, and 72a72b to the copper member 502; and the metal component of the present invention is connected Name = is not limited to the above-mentioned contact method, and it is also possible to use the non-contact method such as electromagnetic operation to replace the above-mentioned contact method. ° Also, in the present embodiment, the aluminum element is used as the first metal element. The metal component bonding method of the invention is an example of the two components of the genus, and the heat dissipating component is not limited to the above: the method of using::::-, and the use of metal components having different melting points. Material, which can be widely used in the method of joining metal components of i.

方法為例.而太袼。面具有凹槽503c的接合治具503的 万法為例，而本發明之金屬 在圓周面上有突起的治具本法亦可以使用具有 面為平滑構成的治具本體之拯接〇 /〇具、或疋具有圓周 治具50 3a。 之接合治具，來取代上述的接合 又 第一貫施型態之金屬The method is an example. It is too embarrassing. The method of the joint jig 503 having the groove 503c is taken as an example, and the metal of the present invention has a protrusion on the circumferential surface. The method can also use the jig of the jig having a smooth surface. The tool or the crucible has a circumferential fixture 50 3a. a joint fixture to replace the above-mentioned joint and the third consistent metal

2036-5808-PF(Nl).ptd 元件接合方法中，係以使用2036-5808-PF(Nl).ptd component bonding method, used

第139頁 1259117Page 139 1259117

五、發研說研（134) 在治具本體504a的下表面ds形成有突起b與細溝G的接合治 具504的方法為例；而本發明之金屬元件接合方法亦可"以° 使用具有下表面DS為平滑面構成之治具本體的接合治具， 來取代在此金屬元件接合方法中所使用的接合治具5〇4'。 又本貫施型態之散熱元件，係以具有斷面形狀為乙 字型的散熱鰭片者為例，而本發明並不限定於此，亦可以 是例如第80A圖所示之具有斷面形狀為匸字型的散熱鰭片5. The method of the joint jig 504 in which the protrusion b and the narrow groove G are formed on the lower surface ds of the jig main body 504a is taken as an example; and the metal component joining method of the present invention can also be < The joining jig 5〇4' used in the joining method of the metal member is replaced with a joining jig having a jig body having a lower surface DS as a smooth surface. Further, the heat dissipating member of the present embodiment is exemplified by a heat dissipating fin having a cross-sectional shape of a B-shaped shape, and the present invention is not limited thereto, and may have a cross-sectional shape as shown in, for example, FIG. 80A. Y-shaped heat sink fin

一又，本發明的散熱元件，如第8〇β與80C圖所示，散熱 7〇件5123亦可以是波浪狀板材所構成的波形(^〇1^叫&忱） 鰭片。又，該板材的波形並無特別的限制，可以如第8β圖 所示之三角形狀的波，亦可以是如第80C圖所示之矩形的 波又，政熱鰭片5 1 2 a與基板5 1 2 b的接合部位，可以是散 $鰭片51 2a與基板512b接觸的全體部位，又波形鰭片的兩 端部為例，亦可以是接觸部位的一部分。又在第8〇β與8〇c ^所不的散熱鰭片5 1 2a中，係以由一個板材所構成的散熱 鰭=51 2a為例，而使用於本發明的散熱元件之散熱鰭片並 不受限於此，而在形成第80B與80C圖所示的波形時，亦可 以將複數個被彎曲的板材在基板上並列配置，並將各板材 分別與基_板結合之圖式未繪示的散熱鰭片亦可。而如第 8〇\圖所不的散熱鰭片512a中，寬度^較好為在1.2〜2.0 mm 的範圍内適宜地設定，散熱鰭片512a的高度h5較好為在 8〜16 mm的範圍内適宜地設定。又，如第8〇β所示的散熱鰭 片51 2a中’鱗片寬度P較好係設定為在1· 5〜2.0 mm的範Further, in the heat dissipating member of the present invention, as shown in Figs. 8 and 80C, the heat dissipating member 5123 may be a waveform (?) and a fin formed by a corrugated sheet. Further, the waveform of the plate material is not particularly limited, and may be a triangular wave as shown in Fig. 8β, or a rectangular wave as shown in Fig. 80C, and a heat fin 5 1 2 a and a substrate. The joint portion of the 5 1 2 b may be the entire portion where the loose fins 51 2a are in contact with the substrate 512b, and the both ends of the corrugated fins may be an example, or may be a part of the contact portion. Further, in the heat dissipation fins 5 1 2a of the 8th 〇β and 8〇c ^, the heat dissipation fins of the heat dissipation element of the present invention are used as an example of the heat dissipation fins = 51 2a composed of one sheet material. It is not limited thereto, and when forming the waveforms shown in FIGS. 80B and 80C, a plurality of bent plate materials may be arranged side by side on the substrate, and the respective plates are combined with the base plate. The fins shown can also be used. For example, in the heat dissipation fin 512a of the eighth embodiment, the width ^ is preferably set in the range of 1.2 to 2.0 mm, and the height h5 of the heat dissipation fin 512a is preferably in the range of 8 to 16 mm. Set it appropriately. Further, the 'scalar width P' of the heat radiating fins 51 2a as shown in the eighth 〇β is preferably set to be in the range of 1·5 to 2.0 mm.

1259117 五、發明說明U35) 圍。又，如第80C所示的散熱鰭片512a中，鰭片寬度P較好 係設定為在1·5〜1.8 mm的範圍。又，散熱鰭片512a的高度 h5較好為在8〜16 mm的範圍内適宜地設定。 又，本實施型態之散熱元件中，係以具有鰭片5〇8a、 512a (請參考第74A圖與第76圖）者為例，而本發明之散熱 元件並不限定於此，亦可以是如第8 1 D圖所示之，在作為 第二金屬元件的基板5 1 2 b上接續有作為第一金屬元件之複 數個散熱柱狀體5 1 2d。此散熱柱狀體的斷面形狀並沒有限 制’圓柱、角柱皆可。此散熱柱狀體5 1 2 d的高度較好為 20〜40 mm的範圍，散熱柱狀體51 2d在基板5 12b上的配置間 隔P車父好為1.8〜2·0 mm的範圍。又，散熱柱狀體5i2d為圓 柱體時，其直徑較好大體為2 mm。 接下來，說明本發明第六群組的實施型態。 第8 1 A〜8 1 B圖係顯示本發明之散熱元件之第一實施型 態，其中第81A圖為斜視圖，第81B圖為分解斜視圖。又， 第82A圖為第81A圖沿AA線之剖面圖、第82β圖為第81A圖沿 BB線之剖面圖、第82c圖為第8U圖之底部視圖。如以上: 圖式所不，散熱元件6〇1 a係由基板6〇2與各鰭片603所構 成0 基板602係為銅製，其寬度、長度、厚度分別為w 、 L、t。基板602的一表面6〇23係間隔著散熱片（heat、、6 spreader) 604，與作為發熱體的cpu 6〇5作導熱性接觸。 又，基板602的另一表面60 2b上係形成有厚度。、寬度 Ws、長度Ls的凸條602c。凸條6〇2c的寬度^的寬度大X致與1259117 V. Invention description U35) Wai. Further, in the heat radiating fin 512a shown in Fig. 80C, the fin width P is preferably set to be in the range of 1. 5 to 1.8 mm. Further, the height h5 of the heat radiating fin 512a is preferably set to be suitably set within the range of 8 to 16 mm. Further, in the heat dissipating component of the present embodiment, the fins 5A, 8a, and 512a (see FIGS. 74A and 76) are taken as an example, and the heat dissipating component of the present invention is not limited thereto. As shown in Fig. 8 1 D, a plurality of heat dissipating columnar bodies 5 1 2d as the first metal elements are connected to the substrate 5 1 2 b as the second metal element. The cross-sectional shape of the heat-dissipating column is not limited to either a cylinder or a corner column. The height of the heat dissipating columnar body 5 1 2 d is preferably in the range of 20 to 40 mm, and the arrangement interval of the heat dissipating columnar body 51 2d on the substrate 5 12b is preferably in the range of 1.8 to 2.0 mm. Further, when the heat radiating columnar body 5i2d is a cylindrical body, the diameter thereof is preferably substantially 2 mm. Next, an implementation form of the sixth group of the present invention will be described. Figs. 8 1 A to 8 1 B show a first embodiment of the heat dissipating member of the present invention, wherein Fig. 81A is a perspective view, and Fig. 81B is an exploded perspective view. Further, Fig. 82A is a cross-sectional view taken along line AA of Fig. 81A, Fig. 82 is a cross-sectional view taken along line BB of Fig. 81A, and Fig. 82c is a bottom view of Fig. 8U. As described above, the heat dissipating element 6〇1 a is composed of the substrate 6〇2 and each of the fins 603. The substrate 602 is made of copper, and its width, length, and thickness are w, L, and t, respectively. One surface 6〇23 of the substrate 602 is thermally contacted with a heat sink (heat, 6 spreader) 604, and is thermally contacted with a cpu 6〇5 as a heat generating body. Further, the other surface 60 2b of the substrate 602 is formed with a thickness. a rib 602c having a width Ws and a length Ls. The width of the width of the ridges 6〇2c is large.

1259117 五、發明說明（13«) 散熱片604的寬度相同。又，凸條6〇2c的長度^在此處係 與基板602的長度L相等，Ls<L亦可。 各鰭片603係為鋁製，以相互平行的方式立設接合於 基板602的表面602b上。而二個一對的鰭片6〇3，於基端部 6 0 3 a相互連結而形成鰭片構成材6 〇 6。鰭片構成材6 〇 6的底 部的寬度方向的略中央部係形成有與基板6〇2之凸條6〇2c 對應形狀的凹部606a，而將各鰭片立設接合於基板6〇2的 表面602b時’凸條602c較好為完全與各鰭片603連接。1259117 V. Description of the Invention (13«) The fins 604 have the same width. Further, the length ^ of the ridges 6 〇 2c is equal to the length L of the substrate 602 here, and Ls < L may be used. Each of the fins 603 is made of aluminum and is erected to be bonded to the surface 602b of the substrate 602 in parallel with each other. The two pair of fins 6〇3 are connected to each other at the base end portion 6 0 3 a to form the fin constituent material 6 〇 6 . A concave portion 606a having a shape corresponding to the ridges 6〇2c of the substrate 6〇2 is formed at a substantially central portion in the width direction of the bottom portion of the fin constituent material 6 ,6, and the fins are erected and bonded to the substrate 6〇2. The surface 602b's ridge 602c is preferably completely connected to each of the fins 603.

散熱元件601A中，CPU 60 5所產生的熱量，首先介由 熱分散器散熱片604傳至基板6〇2，接下來以第82C圖的箭 號所不的全部方向流動而傳至各散熱鰭片6 〇 3，最後係以 自然冷卻或藉由風扇等強制冷卻而發散至空氣中。因此， 一般來說，雖然基板6 02的厚度愈大，愈容易將cpu 6〇5的 熱量傳至各鰭片603，而在此情況下，基板6〇2的重量也會 增加。因此，在此散熱元件6〇1A中，基板6〇2的厚度並非 全體性地增加’而一方面僅僅對於將(^1] 605的熱量傳至 各鰭片603的貢獻度大的部分，增加該部分的基板6〇2的厚 度；而對T貢獻度小的部分，則減少其厚度；使基板6〇2 的全體重量不變，而有效率地將cpu 6〇5的熱量傳至各鰭 。而藉由在基板602上形成凸條6〇2c，第82(：圖中沿 著箭號X方向的熱流係遠大於沿著箭號¥方向的熱流，而將 CPU 60 5所產生的熱量有效率地傳至各鰭片6〇3。而基板 60 2的全體重置不變而能夠提高散熱性能，意味著能夠在 不使散熱性此降低的情況下而達成輕量化。In the heat dissipating component 601A, the heat generated by the CPU 60 5 is first transmitted to the substrate 6〇2 via the heat dissipator fin 604, and then flows to all the fins in the same direction as the arrow of the 82C chart. The sheet 6 〇 3 is finally diffused into the air by natural cooling or forced cooling by a fan or the like. Therefore, in general, although the thickness of the substrate 602 is larger, it is easier to transfer the heat of the cpu 6 〇 5 to the fins 603, and in this case, the weight of the substrate 6 〇 2 is also increased. Therefore, in the heat dissipating member 6〇1A, the thickness of the substrate 6〇2 is not increased in all”, and on the other hand, only the portion where the contribution of the heat of the (^1] 605 to the fins 603 is increased is increased. The thickness of the substrate 6〇2 in this portion is reduced; while the portion with a small contribution to T is reduced in thickness; the total weight of the substrate 6〇2 is unchanged, and the heat of the cpu 6〇5 is efficiently transmitted to the fins. By forming the ridges 6〇2c on the substrate 602, the heat flow in the direction of the arrow X in the 82nd (the figure is much larger than the heat flow in the direction of the arrow ¥), and the heat generated by the CPU 60 5 It is efficiently transmitted to the fins 6〇3. The entire substrate 60 2 is reset and the heat dissipation performance can be improved, which means that the weight reduction can be achieved without reducing the heat dissipation.

1259117 五、發明說明（137) 由上述的觀點，以凸條6 0 2 C的斷面形狀來說，其1259117 V. Description of Invention (137) From the above viewpoint, in terms of the sectional shape of the rib 6 2 2 C,

Ws /厚度ts之比（輪麻比；aspect ratio)較好為&寬度 是凸條602c的厚度ts/其所在的散熱元件的全高h之 為〇 · 1〜0 · 3。而由其後所述的實施例中可以瞭解，凸匕幸又好 6 0 2 c的厚度相對過大時，會加大壓力損失， 條 性能；凸條602c的厚度相對過小時，就相近於脾| /狀…、 <村暴板的厚 度全體地增加時的情況，而形成6〇 2c的意義就變小了 接下來說明散熱元件6 0 1 A的製造方法之一例。 首先，準備由熔點高於銅及鋁的鐵等物質所構成的門 隔物治具607。如第83A圖所示，此間隔物治具6〇7中，係曰 立設形成有複數個等高的間隔部6 0 7a，以等間隔並列/各 間隔部607a的間隙607b的寬度約略等於鰭片6〇3的板厚。 各間隔部6 0 7 a分別形成有與基板6 0 2的凸條6 〇 2 c的形狀大 體相同的凹部607c。 ^ 一方面’將中央部形成有長方形開口的平版狀的鋁板 彎曲呈斷面凹字型，而製作鰭片構成材6〇6。The ratio of Ws / thickness ts (the aspect ratio) is preferably & width is the thickness ts of the rib 602c / the full height h of the heat dissipating component where it is 〇 · 1~0 · 3. It can be understood from the embodiments described later that when the thickness of the lumps is too large, the thickness of the 602c is relatively large, the pressure loss is increased, and the strip performance; the thickness of the ribs 602c is relatively small, which is similar to the spleen. / /..., <In the case where the thickness of the village board is increased as a whole, the meaning of forming 6〇2c becomes small. Next, an example of a method of manufacturing the heat dissipating element 6 0 1 A will be described. First, a spacer jig 607 made of a substance having a melting point higher than that of copper and aluminum is prepared. As shown in Fig. 83A, in the spacer jig 6〇7, a plurality of spacer portions 607a are formed in a plurality of equal heights, and the width of the gap 607b juxtaposed at equal intervals/each of the spacer portions 607a is approximately equal to The thickness of the fins 6〇3. Each of the spacers 60 7a is formed with a recess 607c substantially the same as the shape of the ridges 6 〇 2 c of the substrate 602. ^ On the one hand, a flat plate-shaped aluminum plate having a rectangular opening formed in the center portion is bent in a concave shape to form a fin constituent material 6〇6.

接下來，以圍繞間隔物治具60 7的間隔部6〇7a的方 式，由相對於間隔物治具60 7的側邊將鰭片構成材6〇6插 入。亦即，分別將鰭片603、603朝向間隔部6〇7a兩側的間 隙607b、607b ’並使基端部603a位於該間隔部的上面 的位置，由間隔物治具607的側邊將鰭片構成材6〇6***。 同樣地’依次將各鰭片構成材6 0 6***間隔物治具6 〇 7，使 其他的間隙60 7b分別為鰭片603所嵌入。如此一來，藉由 鰭片構成材60 6的凹部606a與間隔物治具6〇7的凹部6 0 7c，Next, the fin constituents 6〇6 are inserted with respect to the side edges of the spacer jig 60 7 so as to surround the spacers 6〇7a of the spacer jig 60 7 . That is, the fins 603, 603 are respectively directed to the gaps 607b, 607b' on both sides of the spacer portion 6A7a and the base end portion 603a is located above the spacer portion, and the fins are provided by the side edges of the spacer jig 607. The sheet constituent material 6〇6 is inserted. Similarly, the fin members 606 are sequentially inserted into the spacer jigs 6 to 7, so that the other gaps 60 7b are respectively embedded in the fins 603. In this way, by the concave portion 606a of the fin constituent member 60 6 and the recess portion 60 7c of the spacer jig 6〇7,

2036-580S-PF(Nl).ptd 第 143 頁 1259117 五 '發明說明（138) 而形成可供基板602的凸條602c嵌入的凹溝。2036-580S-PF(Nl).ptd page 143 1259117 V 'Invention Description (138) A groove is formed in which the rib 602c of the substrate 602 can be inserted.

之後，由固定各鰭片構成材606的間隔物治具607的上 方被覆基板602。在此狀態下，基板602的表面602b (圖式 中的下表面）係與鰭片構成材606的基端部603a接觸，而未 與間隔物治具60 7的間隔部607a接觸。同樣地，基板602的 凸條602c的下表面係與位於鰭片構成材6〇6的凹部6〇6a的 各鰭片603接觸，而未與間隔物治具60 7的間隔部607a接 觸。但是，基板602的凸條602 c的寬度、鰭片構成材606的 凹部606a的寬度、與間隔物治具60 7的凹部6〇7c的寬度相 互之間大體相等，因此基板6 〇 2的凸條6 0 2 c係具有正確地 決疋基板602與鰭片構成材606的寬度方向的相對位置、甚 至鰭片構成材6 0 6兩兩相互之間寬度方向的位置之位置決 定部的機能。 ' 接下來，如第83B圖所示，以轉動軸6〇8b為中心、初 圓周方向、以高速轉動的接合治具6〇8之接合本體6〇8a$ 圓周面，垂直壓至基板602的表面6〇2a，並藉由將接合^ 具603沿著基板602的表面6〇2a以一既定的行進速率移動 使鰭片構成材606與基板602摩擦震動接合。接合治具6〇丨 係在轉動軸608b的前端部將圓板狀的治具本體ϋ固Thereafter, the substrate 602 is coated on the upper side of the spacer jig 607 in which the fin members 606 are fixed. In this state, the surface 602b (the lower surface in the drawing) of the substrate 602 is in contact with the base end portion 603a of the fin constituent member 606, and is not in contact with the spacer portion 607a of the spacer jig 60 7 . Similarly, the lower surface of the rib 602c of the substrate 602 is in contact with the fins 603 of the recesses 6〇6a of the fin constituents 6〇6, and is not in contact with the spacers 607a of the spacer jig 60 7 . However, the width of the ridge 602c of the substrate 602, the width of the concave portion 606a of the fin constituent material 606, and the width of the concave portion 〇7c of the spacer jig 60 7 are substantially equal to each other, and thus the convexity of the substrate 6 〇 2 The strip 6 0 2 c has a function of accurately determining the relative position of the substrate 602 and the fin constituent material 606 in the width direction, and even the position determining portion of the position in the width direction of the fin constituents 60 6 . Next, as shown in Fig. 83B, the joint body 6〇8a$ circumferential surface of the joint jig 6〇8, which is rotated at a high speed in the initial circumferential direction and centered on the rotating shaft 6〇8b, is vertically pressed to the substrate 602. The surface 6〇2a is frictionally bonded to the substrate 602 by moving the bonding tool 603 along the surface 6〇2a of the substrate 602 at a predetermined rate of travel. The jig 6 is sturdy at the front end portion of the rotating shaft 608b to fix the disk-shaped jig body

而治具本體608a係由JIS :SKD61等工具鋼所 壓入基板602的表面60 2a時的行6，、Λ s +成。相對 ία δ ^ ^ ^ ^ ^ 妁仃進方向，治具本體608a令 仫至後方的方向，沁者轉動軸6〇8b的周邊 如第84B圖所示，治具本體6〇8a的 。 α (m)壓人基板602的表面Wa的狀態高速轉‘广並;^The jig body 608a is a row 6 when the surface of the substrate 602 is pressed into the surface 60 2a of the substrate 602 by a tool steel such as JIS: SKD61, and Λ s + . Relative to ία δ ^ ^ ^ ^ ^ in the direction of advancement, the fixture body 608a is arranged to the rear direction, and the periphery of the rotation axis 6〇8b of the latter is as shown in Fig. 84B, and the fixture body 6〇8a. The state of the surface Wa of the α (m) pressing substrate 602 is turned "highly";

1259117 五 '發研說明（139) -- 基板602的表面602a移動》而藉著上述治具本體6〇8a在基 板602之壓入，使鰭片構成材6〇6的基端部“仏與基板6〇2 之交界面的縫隙消失；並藉著高速轉動的治具本體“心與 基板602的接觸所產生的震動，將鰭片構成材6〇6的基端部 603a與基板602之交界面的氧化物皮膜***破壞；並與治 具本體60 8a接觸的基板6 02的既定區域與其鄰近區域、還 有與上述區域鄰接的基端部60 3a的既定區域，因治具本體 608a與基板602的摩擦接觸所產生的熱量而高溫化，而使 基板602(銅）和與其連接的基端部6〇3a (鋁）的一部分發生 共晶熔融。上述的結果造成在基板6 〇 2與基端部6 〇 3 a之間 形成共晶層6 0 9。而後，接合治具6 〇 8之接合本體6 〇 8 a通過 後而冷卻，而使鰭片構成材606的基端部6〇3a與基板602之 間介由共晶層609而接合。 基板602的表面602a中，治具本體6〇3a對該表面602a 施以壓應力之負何並通過所留下的執跡，較好為經由後製 程的切削而形成平滑的表面。 如此一來，基板6 02與鰭片構成材6〇6分別為銅與鋁所 構成’因為接合治具6 0 8係壓至炫點高於铭的銅基板6 〇 2之 側’縛片構成材6 0 6的基端部6 0 3 a與基板6 0 2的重合部達到 接合所必要的溫度（銅與鋁的共晶溫度：5 4 8 °C )以上時， 基板6 0 2可以保持比較大的抗形變強度，可使來自接合治 具608的壓力充分地傳達至交界面，而將兩者確實地接 合。又，接合治具608壓至基板602之際，凸條6〇2c並不會 造成麻煩，而使鰭片6 0 3的高度/間隔比、以及凸條6 〇 2 c的1259117 Five 'Research Instructions (139) - The surface 602a of the substrate 602 is moved", and the base end portion of the fin constituent material 6〇6 is pressed by the above-mentioned jig body 6〇8a. The gap at the interface of the substrate 6〇2 disappears; and the base end portion 603a of the fin constituent material 6〇6 and the substrate 602 are intersected by the vibration generated by the contact of the core body with the substrate 602 at a high speed. The oxide film of the interface is split and destroyed; and a predetermined region of the substrate 602 in contact with the fixture body 60 8a and its adjacent region, and a predetermined region of the base end portion 60 3a adjacent to the region, due to the fixture body 608a and the substrate The heat generated by the frictional contact of 602 is increased, and the substrate 602 (copper) and a portion of the base end portion 6〇3a (aluminum) connected thereto are eutectic-melted. The above result results in the formation of a eutectic layer 690 between the substrate 6 〇 2 and the base end portion 6 〇 3 a . Then, the bonding body 6 〇 8 a of the bonding jig 6 通过 8 is cooled by the rear, and the base end portion 6 〇 3 a of the fin constituent member 606 and the substrate 602 are joined by the eutectic layer 609. In the surface 602a of the substrate 602, the jig body 6〇3a applies a compressive stress to the surface 602a and passes through the remaining traces, preferably through the cutting of the post-process to form a smooth surface. In this way, the substrate 602 and the fin constituent material 6〇6 are respectively composed of copper and aluminum. “Because the bonding fixture is pressed to the side of the copper substrate 6 〇2 which is higher than the Ming” When the overlapping portion of the base end portion 6 0 3 a of the material 6 0 6 and the substrate 60 2 is at a temperature necessary for bonding (copper-aluminum eutectic temperature: 5 4 8 ° C) or more, the substrate 60 2 can be maintained. The relatively large deformation strength allows the pressure from the joint fixture 608 to be sufficiently communicated to the interface while the two are positively joined. Further, when the bonding jig 608 is pressed to the substrate 602, the ridges 6〇2c do not cause trouble, and the height/space ratio of the fins 60 3 and the ridges 6 〇 2 c

2036-580S-PF(Nl).ptd 第145頁 1259117 五、發明說明（140) 形狀等可以自由地設定。 最後，如第85圖所示，僅僅將基板602由間隔物治具 向上移動，就可以將已經在基板602上立設接合各鰭片構 成材60 6的散熱元件601A取出。 接下來說明散熱元件6 0 1 A的製造方法的其他例子。2036-580S-PF(Nl).ptd Page 145 1259117 V. Description of invention (140) Shapes and the like can be freely set. Finally, as shown in Fig. 85, only the substrate 602 is moved upward by the spacer jig, and the heat dissipating member 601A on which the fin members 60 6 have been erected on the substrate 602 can be taken out. Next, another example of the method of manufacturing the heat dissipating member 610 A will be described.

首先如第86A圖所示，將一鋁合金製的薄板材6〇3，的 中央部與一間隔物6 1 〇直交配置，使二者成為倒T字型，如 第86B圖所示，在斷面凹字型鰭片構成材製造治具611的中 央部的溝槽内，將板材6 〇 3 ’彎折，並將其中央部壓入的同 時***間隔物6 1 0，而如第8 6 C圖所示，於中央部的溝槽内 形成將間隔物6 1 0夾在中間的斷面凹字型的鰭片構成材 6〇6。鰭片構成材606係以一對的鰭片603與連結上述鰭片 603的基端部603a而形成其斷面凹字型。First, as shown in Fig. 86A, the central portion of a thin plate 6?3 made of aluminum alloy is placed orthogonally to a spacer 6 1 , so that the two are inverted T-shaped, as shown in Fig. 86B, In the groove of the central portion of the cross-sectional concave fin constituent material manufacturing jig 611, the sheet material 6 〇 3 ' is bent, and the center portion is pressed in while the spacer 6 1 0 is inserted, as in the eighth As shown in FIG. 6C, a fin-shaped fin constituent material 6〇6 having a cross-sectional shape sandwiched by the spacers 61 is formed in the groove in the center portion. The fin constituent material 606 is formed by a pair of fins 603 and a base end portion 603a that connects the fins 603 to form a cross-sectional concave shape.

而準備複數個如上所述之在一對的鰭片6 〇 3之間置入 間隔物6 1 0的鰭片構成材6 〇 6，將上述各鰭片構成材6 0 6與 各間隔物6 1 0 ’交互並列，並如第8 6 D圖所示，立設配置於 散熱元件製造用治具6 1 2的元件設定部6 1 2a。此時的鰭片 構成材6 0 6係為在一對的鰭片6 〇 3之間置入有間隔物6 1 〇的 狀態、且為基端部6 0 3 a向上的狀態。又，置入於各鰭片構 成材6 0 6相互之間的各間隔物6丨〇，的高度係高於置入於一 對的縛片6 0 3之間的間隔物6 1 〇，且較好為二者的高度差僅 僅是基端部603a的厚度，而使鰭片構成材6〇6的基端部 603a與間隔物610’的基端部形成水平的上表面。 之後’如第8 6 E圖所示，於立設配置於元件設定部Further, a plurality of fin constituents 6 〇 6 in which the spacers 61 1 are placed between the pair of fins 6 〇 3 as described above are prepared, and the fin constituents 6 0 6 and the spacers 6 are formed. 1 0 'interacting in parallel, and as shown in Fig. 8 6 D, the element setting unit 6 1 2a disposed in the jig for heat dissipation element manufacturing 6 1 2 is erected. At this time, the fin constituents 6 0 6 are in a state in which the spacers 6 1 〇 are placed between the pair of fins 6 〇 3 and the base end portion 6 0 3 a is upward. Moreover, the spacers 6丨〇 placed between the fin constituent members 60 6 are higher than the spacers 6 1 置 placed between the pair of tabs 603, and It is preferable that the height difference between the two is only the thickness of the base end portion 603a, and the base end portion 603a of the fin constituent member 6〇6 and the base end portion of the spacer 610' form a horizontal upper surface. After that, as shown in Fig. 8 6 E, it is placed in the component setting unit.

2036-5808-PF(Nl).ptd 第146頁 1259117 五、發明說明（HI) 612a的各鰭片構成材606與各間隔物61〇，的上面搭載基板 602並以固定工具613將其固定。此處將鰭片構成材6〇6的 基端部603a及間隔物6 10,形成與基板6〇2的表面6〇2b接觸 的狀態。 接下來如第87A圖所示，將以轉動軸6〇8b為中心以圓 周方向高速轉動的接合治具6〇8的治具本體6〇8a的圓周面 垂直壓至基板60 2之表面602a，並使接合治具6〇8沿著基板 602之表面6〇2a移動，而使各鰭片構成材6〇6的基端部“仏 摩擦震動接合於基板4〇6。2036-5808-PF(Nl).ptd Page 146 1259117 V. In the description of the invention (HI) 612a, each of the fin members 606 and the spacers 61 are mounted on the upper surface of the substrate 602, and fixed by a fixing tool 613. Here, the base end portion 603a and the spacer 6 10 of the fin constituent member 6〇6 are brought into contact with the surface 6〇2b of the substrate 6〇2. Next, as shown in Fig. 87A, the circumferential surface of the jig body 6〇8a of the joining jig 6〇8 which is rotated at a high speed in the circumferential direction around the rotating shaft 6〇8b is vertically pressed to the surface 602a of the substrate 60 2 , The bonding jigs 6〇8 are moved along the surface 6〇2a of the substrate 602, and the base end portions of the respective fin constituent members 6〇6 are “joined and frictionally bonded to the substrate 4〇6.

最後，如第87B圖所示，將基板602向上移動時，僅有 已接合於基板60 2的各鰭片構成材6 〇6 —起向上移動，而將 f間隔物6 1 0、6 1 0 ’留在散熱元件製造用治具6丨2的元件設 定部6/123，可以將散熱元件61〇八取出，其中散熱元件61〇八 中係將複數個鰭片6 0 3介由鰭片構成材6 0 6的基端部6 0 3 而立設接合於基板6〇2的表面602b。 接下來說明本發明散熱元件的其他實施型態。 如第88A圖所示，第二實施型態的散熱元件6〇1β，其 f板602的凸條602c受到長度方向的分割，其他均和第一Finally, as shown in FIG. 87B, when the substrate 602 is moved upward, only the fin constituents 6 〇6 that have been bonded to the substrate 60 2 move upward, and the f spacers 6 1 0, 6 1 0 'The component setting portion 6/123 remaining in the jig for manufacturing the heat dissipating member 6丨2 can take out the heat dissipating component 61, wherein the heat dissipating component 61 has a plurality of fins 6 0 3 formed by fins. The base end portion 602b of the material 6 0 6 is erected to the surface 602b of the substrate 6〇2. Next, other embodiments of the heat dissipating member of the present invention will be described. As shown in Fig. 88A, the heat dissipating member 6〇1β of the second embodiment has a rib 602c of the f plate 602 divided by the length direction, and the others are first and

κ ^型恕相同。凸條6 〇 2 c如此受到長度方向的分割時，由 CPU 605傳達熱量的路徑在到達末端的鰭片6〇3之前就被分 $ ’雖然其散熱性能比起凸條6 〇 2 c在長度方向連續的第一 實施型態差，其散熱性能仍比無凸條602c的習知的散埶元 件高。 ”' 如第88β圖所示，第三實施型態的散熱元件6〇lc，其The κ ^ type is the same. When the ridges 6 〇 2 c are thus divided in the longitudinal direction, the path of heat transfer by the CPU 605 is divided into $ before reaching the fins 6 〇 3 at the end, although the heat dissipation performance is longer than the ridges 6 〇 2 c The first embodiment in which the direction is continuous is inferior, and its heat dissipation performance is still higher than that of the conventional diverging element without the rib 602c. As shown in Fig. 88β, the third embodiment of the heat dissipating component 6〇lc,

2036-5808-PF(Nl).ptd 1259117 五、發明說明（142) 基板602的凸條602c係形成為與各鰭片603呈斜交的方向， 其他均和第一實施型態相同。凸條6〇2c的方向如此與各鰭 片6 03呈斜交時，在維持基板6〇2原重量的情況下凸條6〇2c 的斷面面積會變小，而使其散熱性能比凸條6〇2c與各鰭片 6 0 3成直交的第一實施型態差，但是其散熱性能仍比無凸 條602c的習知的散熱元件高。 第89A圖所示的第四實施型態的散熱元件6〇id、第89B 圖所示的第五實施型態的散熱元件6〇1E、第89C圖所示的 第六實施型態的散熱元件6〇1F中，其凸條6〇2(3的斷面形狀 分別為梯形、三角形、與圓頂形（d〇me)，三者的凸條6〇2 都是距離基板602的本體愈遠則其寬度愈小，與凸條602c 的斷面形狀為長方形的情況，特別是如箭號的方向由側邊 以風扇作強制冷卻時，其壓力損失較小。 第90A圖所示的第七實施型態的散熱元件6〇1G，其基 板602的凸條602c的厚度維持一定，而凸條602c的寬度係 成為由與CPU 605接觸的相對位置開始，向凸條6〇2c 的長度方向，距離愈遠則凸條6〇2c的寬度逐漸縮減；其他 均和第_實施型態相同。 第9〇β圖所示的第八實施型態的散熱元件6〇1H，其基 板602的凸條6〇2(：的寬度維持一定，而凸條6〇2^的厚度係 形成為：由與CPU 605接觸的相對位置開始，向凸條6〇仏 =，度方向，距離愈遠則凸條6〇2c的厚度逐漸縮 均和第一實施型態相同。 第90C圖所示的第九實施型態的散熱元件6〇11，其基2036-5808-PF(Nl).ptd 1259117 V. Inventive Description (142) The rib 602c of the substrate 602 is formed in a direction oblique to each fin 603, and the others are the same as in the first embodiment. When the direction of the ribs 6〇2c is oblique to each of the fins 603, the cross-sectional area of the ridges 6〇2c is reduced while maintaining the original weight of the substrate 〇2, and the heat dissipation performance is convex. The strip 6〇2c is inferior to the first embodiment in which the fins 60 3 are orthogonal, but the heat dissipation performance is still higher than the conventional heat dissipating component without the rib 602c. The heat dissipating element 6〇id of the fourth embodiment shown in FIG. 89A, the heat dissipating element 6〇1E of the fifth embodiment shown in FIG. 89B, and the heat dissipating element of the sixth embodiment shown in FIG. 89C In 6〇1F, the ridges 6〇2 (3 have a trapezoidal shape, a triangular shape, and a dome shape, respectively, and the ridges 6〇2 of the three are farther from the body of the substrate 602. The smaller the width, the smaller the cross-sectional shape of the rib 602c, especially when the direction of the arrow is forcedly cooled by the fan from the side, the pressure loss is small. The seventh shown in Fig. 90A In the embodiment of the heat dissipating member 6〇1G, the thickness of the rib 602c of the substrate 602 is maintained constant, and the width of the rib 602c is started by the relative position with the CPU 605, and the length of the rib 6〇2c is The farther the distance is, the wider the width of the ridges 6〇2c is gradually reduced; the other is the same as the first embodiment. The heat dissipation element 6〇1H of the eighth embodiment shown in Fig. 9〇, the ridge of the substrate 602 The width of 6〇2(: is maintained constant, and the thickness of the ridges 6〇2^ is formed such that the relative position in contact with the CPU 605 is opened. The ridges 6〇仏=, the direction of the ribs, the further the distance, the thickness of the ribs 6〇2c is gradually reduced and the same as in the first embodiment. The ninth embodiment of the heat dissipating component 6 第 shown in FIG. 90C〇 11, its base

2036-5808-PF(Nl).ptd 第148頁 1259117 五、發明說明（143) 板602的凸條602c的寬度及厚度係形成為··由與cpu 605接 觸的相對位置開始，向凸條6 〇 2 c的長度方向，距離愈遠則 凸條60 2c的寬度及厚度均逐漸縮減，且凸條6〇2(：全體係形 成為圓頂形狀，其他均和第一實施型態相同。 由於傳至基板602的熱量是隨著距離cpu 6 05愈遠而愈 小’依據此熱量分佈情形縮減凸條6 0 2 c的斷面積在學理上 是適當的，因此上述的散熱元件601G〜601U可以實行效率 更南的散熱。 又’第91A圖所示的第十實施型態的散熱元件6〇1 j， 不使用II片構成材6 0 6，而將各鰭片6 〇 3直接立設接合於基 板6 0 2，其他均和第一實施型態相同。 更者，第9 1 B圖所示的第十一實施型態的散熱元件 601K ’各鰭片603分別在其寬度方向分割為三而立設接合 於基板6 0 2，其他均和第一實施型態相同。當然將各鰭片 構成材6 0 6分別在其寬度方向分割而構成者亦可。 而本發明之散熱元件及其製造方法並不限定於以上所 述者，當然可以作適宜地變更而為實施。例如，凸條6〇2c 不僅僅致有一列，亦可以有複數列。又，凸條6 〇 2並不一 定要與基板6 0 2的本體一體成形，亦可以另外形成之後再 固定於基板602的本體。基板602與鰭片603的材質亦可以 分別變更為銅與鋁以外的材質。散熱片的有無及其尺寸、 形狀亦可以任意變更，亦可以使用導熱管等介於作為發熱 體的CPU 605與基板602之間而將二者接續。 更者’基板6 0 2與ϋ片6 0 3的接合方法如所舉例的摩擦2036-5808-PF(Nl).ptd Page 148 1259117 V. Description of the Invention (143) The width and thickness of the rib 602c of the plate 602 are formed by the relative position of the contact with the cpu 605, toward the ridge 6 The length direction of 〇2 c, the further the distance, the width and thickness of the rib 60 2c are gradually reduced, and the rib 6 〇 2 (: the whole system is formed into a dome shape, and the others are the same as the first embodiment. The heat transferred to the substrate 602 is smaller as the distance is larger than the distance cpu 6 05. According to the heat distribution, it is reasonable to reduce the sectional area of the ridges 6 0 2 c, so the above-mentioned heat dissipating elements 601G to 601U can be The heat dissipation element 6〇1 j of the tenth embodiment shown in Fig. 91A is used, and the fins 6 〇 3 are directly erected without using the II sheet constituting material 6 0 1 . In the substrate 602, the other is the same as the first embodiment. Further, the fins 603 of the eleventh embodiment of the eleventh embodiment shown in Fig. 9 1 B are respectively divided into three in the width direction thereof. And erected to the substrate 602, the others are the same as the first embodiment. Of course, each fin structure The material 606 may be divided into the width direction, and the heat dissipating element and the method for manufacturing the same according to the present invention are not limited to those described above, and may of course be appropriately modified and implemented. For example, the ridge 6 The 〇2c may have not only one column but also a plurality of columns. Further, the ribs 6 〇2 do not have to be integrally formed with the body of the substrate 602, or may be separately formed and then fixed to the body of the substrate 602. The substrate 602 The material of the fin 603 may be changed to a material other than copper or aluminum. The presence or absence of the heat sink, its size, and shape may be arbitrarily changed, and a heat transfer tube or the like may be used between the CPU 605 and the substrate 602 as a heat generating body. In the meantime, the two are connected. Further, the joining method of the substrate 60 2 and the cymbal 630 is as exemplified as the friction.

2036-5808-PF(Nl).ptd 第149頁 1259117 五、發明說明（144) 震動接合中，接合汐且 條件可則壬意決定:^ 丁進範圍與料方向等接合 接合治具壓入熔點較汽：方法’並不限定於將轉動的 亦可以是使用電磁J導由;間的交界面之接觸方式， 元件間的交界面加孰及力ί j較高的金屬元件之側對金屬 -_片_為：： = : =觸=;二，例如基 入紹猪。更者，亦可以#λ為在—者交界面置 接著劑、或銲接接合等U:接合(caulking J0int)、 合。 ^知方法’將基板6〇2與鰭片6〇3接 構成將鳍t I3 t M上所說明的散熱元件上裝設風扇，而 構成將鰭片強制冷卻的散熱器。 〜叨 例如如第9 2 A圖所示的散孰5| 6 2 〇 a，風戶β 1 4私 熱元件601A的上方蔣涵、、，石々/、、 風扇614係由散 ^92B m βίτ - ^ μ 迗至各政熱鰭片603 ;亦可以是如 側邊將·風、不政”、'器62〇B，風扇6 14係由散熱元件601 A的 側邊將風迗至各散熱鰭片6 0 3。 的穿：2 4的“方法與風的方向並無限定，散熱器 ^二車又好為依照裝設空間等因素作適宜的設定。 貫施例1 &古=杈，的方式測試散熱元件的散熱性能，如何因凸條 格的：：隻化。具體而t ’準備無凸條的散熱元件與有凸 U 、. 1 ”，、兀件，分別求出在自然對流下的熱抵抗（heat 。而個別的基板之斷面積是相等的。有凸條 、政"、、元件中，凸條係沿基板的長度方向呈連續的狀態，2036-5808-PF(Nl).ptd Page 149 1259117 V. INSTRUCTIONS (144) In the vibration joint, the joint enthalpy and the condition can be determined arbitrarily: ^ the entanglement range and the material direction, etc. Comparing the steam: the method 'is not limited to the one that will be rotated, or the electromagnetic J can be used; the interface between the interfaces, the interface between the components is increased, and the side of the metal element with a higher force is the metal- _ slice _ is:: = : = touch =; second, for example, into the Shao pig. In addition, it is also possible to use #λ as a bonding agent or a solder joint or the like: U: bonding (caulking J0int). The method of forming the substrate 6〇2 and the fins 6〇3 is such that a fan is mounted on the heat dissipating element described in the fin t I3 t M to form a heat sink for forcibly cooling the fin. ~ 叨 For example, as shown in Fig. 9 2 A, the divergence 5| 6 2 〇a, above the wind hull β 1 4 private heat element 601A, Jiang Han, ,, Ishigaki /,, fan 614 is separated by ^92B m Ίίτ - ^ μ 迗 to each of the political fins 603; or as the side will be wind, not political, "62 〇 B, fan 6 14 by the side of the heat dissipating component 601 A will wind to each Heat sink fins 6 0 3. Wear: 2 4 "The method and the direction of the wind are not limited, and the radiator ^ 2 cars are better set according to factors such as the installation space. Through the example 1 & ancient = 杈, the way to test the heat dissipation performance of the heat dissipating component, how to use the convex strip:: only. Specifically, t 'prepare the heat-dissipating element without the ridges and the convex U, . 1 ”, and the 兀 ,, respectively, to determine the thermal resistance under natural convection (heat. The individual substrates have the same cross-sectional area. In the strip, the government, and the component, the ribs are continuous along the length of the substrate.

1259117 五、發明說明（145) 凸條的斷面積沿著其長度方向維持一定。基板為銅製、韓 片為銘製。鰭片依照第9 j A圖所示的樣態逐一立設接合於 基板。各樣品（sample)的斷面形狀繪示於第93A、93B圖， 顯示模擬結果的長條圖顯示於第93C圖。又，實驗數據列 於表八。 因&條的有無所導致熱抵抗的不同（自然對流） 11 - 無凸條 0^3 有凸條 ¾1259117 V. INSTRUCTIONS (145) The broken area of the ridges is maintained constant along its length. The substrate is made of copper or Korean. The fins are erected to the substrate one by one in accordance with the pattern shown in Fig. 9 j A . The cross-sectional shape of each sample is shown in Figs. 93A and 93B, and the bar graph showing the simulation results is shown in Fig. 93C. Also, the experimental data is shown in Table 8. The difference in thermal resistance due to the presence or absence of a strip (natural convection) 11 - no ridges 0^3 ribs 3⁄4

W 本《 厚度t (mm) 2.00 基·板 3條 宽度 Ws (mm) 凸條 長度 Ls (mm) β條 厚度ts (mm) 蟖面積 (mm ) «片 (mm) 數 董 全高 (mm 最高 CC) 449 抗 CC /W) 5.90 ο 5 Φ 100 1.3 11.5 1.10 15 420 5.49 由弟93C圖的長條圖可以瞭解，在自然對流下，有凸條 = 甘’與無凸條的樣品Η比較’雖然有相同的基板 熱抵抗大幅地降低。'亦即’散熱元件的重量不 能降低的^下而達m解在不使散熱性 實施例2 -性：實=目:二？擬的方式測試有散熱元件的散 …〖生月b 如何因凸條的有無而變化。作曰 ^ 方(由趙片至基板的方向)吹送3 m/s的風糸 部。散熱凡件的散熱性能的指標，不僅僅是熱減，亦^W "thickness t (mm) 2.00 base · plate 3 width Ws (mm) ridge length Ls (mm) β strip thickness ts (mm) 蟖 area (mm) «piece (mm) number Dong Quangao (mm highest CC ) 449 anti-CC /W) 5.90 ο 5 Φ 100 1.3 11.5 1.10 15 420 5.49 It can be understood from the long bar graph of the 93C chart that under natural convection, there are ridges = Gan 'Compared with samples without ridges' though The same substrate thermal resistance is greatly reduced. 'That's the weight of the heat-dissipating component can not be reduced, and the solution is not to dissipate heat. Example 2 - Sex: Real = Objective: Two? The proposed method tests how the dispersion of the heat dissipating component changes depending on the presence or absence of the ridge. The 糸 ^ square (from the direction of the Zhao film to the substrate) blows the wind part of 3 m / s. The index of heat dissipation performance of the heat-dissipating parts is not only heat reduction, but also ^

2036-5808-PF(Nl).ptd 第151頁 1259117 五、發明說明（146) 出壓力損失。其他則與實施例1相同。顯示模擬結果的長 條圖繪示於第94A、94B圖中。又，實驗數據列於表九。 表九 因凸條的有無所導致散熱性能的不同（由上方強制冷卻） 基板 ΗΆ 全高 (mm) 最高 溫度 CC) 熱抵抗 Cc/w) 壓力損失(Pa) 本艚 寬度 W (mm) 本琥 長度 L (mm) 本« 厚度 t (mm) 凸條 寬度 Ws (mm) &條 長度 Ls (mm) &條 厚度 ts (mm) 斷面種 (mm7 ) 間隔 (mm) 數i 無 2-1 ώ 2.00 — 一 一 52.0 0.38 31 條 50 107 100 1.3 on 1 1 r 有 /〇 11. j 2-2 a 1.10 15 107 3 50.1 0.35 33 條 由第9 4 A圖的長條圖可以瞭解，在風扇由上方作強制冷 卻的情況下’有凸條的樣品2-2，與無凸條的樣品2_1比 較’雖然有相同的基板斷面積，其熱抵抗較低。又，由第 94B圖的長條圖可以瞭解，有凸條的樣品2-2的壓力損失， 與無凸條的樣品2 —i的壓力損失約略相同。因此，藉由凸 $的形成：散熱元件的重量不變而能夠提高散熱性能"奐 吕之’可以瞭解在不使散熱性能降低的情況下而達成輕量 實施例3 與^例2相同’卩模擬的方式 性能，如何因凸倏沾士 A ^ 狀…、凡仵的狀…、 係使用風扇由上方（'由有；、而k化。但是’在實施例2中， 強制冷卻；而在實施二：至基板的方向)吹送風’將錄片 知例3中，係使用風扇由側方（由鰭片的2036-5808-PF(Nl).ptd Page 151 1259117 V. INSTRUCTIONS (146) Pressure loss. Others are the same as in the first embodiment. A bar graph showing the simulation results is shown in Figures 94A and 94B. Also, the experimental data is listed in Table 9. Table 9: Difference in heat dissipation performance due to presence or absence of ridges (forced cooling from above) Substrate ΗΆ Full height (mm) Maximum temperature CC) Thermal resistance Cc/w) Pressure loss (Pa) 艚 width W (mm) L (mm) this « thickness t (mm) ridge width Ws (mm) & strip length Ls (mm) & strip thickness ts (mm) section species (mm7) interval (mm) number i no 2-1 ώ 2.00 — 1 52.0 0.38 31 Article 50 107 100 1.3 on 1 1 r With /〇11. j 2-2 a 1.10 15 107 3 50.1 0.35 33 By the bar graph of Figure 9 4 A, you can understand that the fan In the case of forced cooling from the upper side, the sample 2-2 having the ridges was compared with the sample 2_1 having no ridges. Although the same substrate sectional area was obtained, the heat resistance was low. Further, it can be understood from the bar graph of Fig. 94B that the pressure loss of the sample 2-2 having the ridges is approximately the same as the pressure loss of the sample 2 - i without the ridges. Therefore, by the formation of the convex $: the weight of the heat dissipating component can be kept constant, the heat dissipation performance can be improved, and the "lightweight embodiment 3 is the same as the example 2" without knowing that the heat dissipation performance is lowered.卩The performance of the simulation method, how to use the convexity of the A ^ shape ..., the shape of the ... ..., the use of the fan from the top ('Yes; and k. But 'in Example 2, forced cooling; and In the implementation of two: to the direction of the substrate) blowing the wind 'to record the film in the example 3, using the fan from the side (by the fin

2036-5808-PF(Nl).ptd 第152頁 1259117 五 '發明說明（14Ό 寬度方向）吹送3 m / s的風’將錄片強制冷卻。其他則與實 施例2相同。各樣品（sample)的斷面形狀繪示於第95A〜95C 圖，顯示模擬結果的長條圖繪示於第95D、95E圖中。又， 實驗數據列於表十。 A_±. 因凸條的有無所導致散熱性能的不同（由側方強制冷卻） 基板 «片 本體 宽度 W (mm) 本饉 長度 L (nun) 本尨 厚度 t (mm) 凸條寬 度Ws (mm) 凸條 長度 Ls (mm) (rW ) (mm) 數 量 J-l 3-2 _無凸條ΤώΙΓ (長方形) 50 107 2.00 15 3-3 有凸條 (梯形） 1.10 上邊12 下邊18 107 100 1.3 全高 (mm) 78 11,5 最高 度 CC) 熱柢杭 CC/W) 壓力損失 (Pa) 54.8 0.41 67 53.6 0.40 91 53.1 0.39 84 、由第95D圖的長條圖可以瞭解，在風扇由側方作強制冷 部的清/兄下’有凸條的樣品3-2、3-3，與無凸條的樣品 比較，雖然有相同的基板斷面積，其熱抵抗較低。 佟的^條的斷面形狀為梯形的樣品3 —3的熱抵抗’小於凸 條的斷面形狀為長方形的樣品3一2。 Μ ^ ^ ’由第95E圖的長條圖可以瞭解，有凸條的樣品 ύ一 z、3-3的壓六招生 土上 大。而几 7相失’較無凸條的樣品3-1的壓力損失 於凸條的f的斷面形狀為梯形的樣品3 — 3的壓力損失’小 :::面：狀為長方形的樣品3-2。 方以is巨a的結果’可以瞭解在形成凸條的情形下，由側 宜地調敕η 度刀知失變大而熱抵抗變小。因此’適 ι ^扇的性能等’使壓力損失對散熱元件的散熱性2036-5808-PF(Nl).ptd Page 152 1259117 V 'Inventive description (14Ό width direction) blowing 3 m / s of wind 'forced cooling of the recorded film. Others are the same as in the second embodiment. The cross-sectional shape of each sample is shown in Figs. 95A to 95C, and the bar graph showing the simulation results is shown in Figs. 95D and 95E. Also, the experimental data is listed in Table 10. A_±. Difference in heat dissipation due to presence or absence of ribs (forced cooling by side) Substrate «Sheet body width W (mm) 馑 length L (nun) 尨 thickness t (mm) ridge width Ws (mm ) Bar length Ls (mm) (rW ) (mm) Number Jl 3-2 _ No ridges 长方形 (Rectangular) 50 107 2.00 15 3-3 With ribs (trapezoid) 1.10 Upper side 12 Lower side 18 107 100 1.3 Full height ( Mm) 78 11,5 Maximum height CC) Heat 柢 Hang CC/W) Pressure loss (Pa) 54.8 0.41 67 53.6 0.40 91 53.1 0.39 84 . It can be understood from the long bar diagram of Figure 95D that the fan is forced by the side In the cold part, the clear/brother's sample with the ribs 3-2, 3-3, compared with the sample without the rib, has the same thermal resistance against the same substrate cross-sectional area. The cross-sectional shape of the tantalum strip was a trapezoidal sample 3-3 with a thermal resistance 'less than the sample 3-2 having a rectangular cross-sectional shape of the strip. Μ ^ ^ ' It can be seen from the bar graph of Fig. 95E that the samples with ridges are larger than those of the three-dimensional enrollment. And the pressure loss of the sample 7 of the sample without the ridge is 3-1. The pressure loss of the sample of the rib of the rib is trapezoidal. The pressure loss of the sample 3-4 is small::: face: sample 3 in the shape of a rectangle -2. In the case where the ridges are formed, it can be understood that in the case where the ridges are formed, the y-degree knives are adjusted to be large and the heat resistance is small. Therefore, 'the performance of the fan, etc.' causes the pressure loss to dissipate heat to the heat dissipating component.

2036-5808- 第153頁2036-5808-第153页

1259117 五、發明說明（148) 能的影響小於熱抵抗的影響時，藉由凸條的形成，散熱元 件的重量不變而能夠提高散熱性能；換言之，可以瞭解在 不使散熱性能降低的情況下而達成輕量化。又，在此情況 下’可以瞭解到較好為使凸條的斷面形狀，離基板愈遠則 其寬度愈小（請參考第89A〜89C圖）。 實施例4 以模擬的方式測試有凸條的情況下，散熱元件的散熱 性能如何因凸條的形狀與尺寸而變化。分別使用如第9 5、 95B圖所示形狀的散熱元件作為實驗樣品。其他則與實施 例3相同。顯示模擬結果的折線圖繪示於第9 6、9 7圖中。 又，實驗數據列於表十一。 表十一 函Λ條的形狀·尺寸所導致散熱性能的不同（由側方強制冷卻） 基板 «片 全高 (mm) 最高 温度 CC) 熱把抗 Cc/w) «力損失 (Pa) 本艘 宽度 W (mm) 本體 長度 L (mm) 本艘 厚度 t (mm) 凸條 宽度 Ws (mm) 凸條 長度 Ls (mm) 凸條 厚度 ts (mm) 凸條輪 廓比 斯面積 (rW ) (mm) 數量 4-1 9.00 5.0 1.8 53.93 0.402 125 4-2 11.25 4.0 2.8 53.46 0.395 105 4-3 50 107 1.10 15.00 1Π7 3.0 5.0 100 78 11.5 53.64 0.394 91 4-4 22.50 IU / 2.0 11.3 1.3 53.62 0.397 79 4-5 37.50 1.2 31.3 54.16 0.405 77 4-6 45.00 1.0 45.0 55.02 0.417 79 由第9 6、9 7圖的折線圖可以瞭解，凸條的輪廓比設定 在5〜30時、或是凸條厚度為丨.15 _〜3. 45 mm時，熱抵抗 小、壓力損失亦未明顯變大。亦即，可以得知凸條的輪靡 設定為5〜3 0時、或是凸條厚度/散熱元件的全高之比設定1259117 V. INSTRUCTIONS (148) When the influence of energy is less than the influence of thermal resistance, the heat dissipation performance can be improved by the formation of the ridges, and the heat dissipation performance can be improved; in other words, it can be understood that the heat dissipation performance is not lowered. And to achieve lightweight. Further, in this case, it can be understood that the cross-sectional shape of the ridge is preferably smaller as the distance from the substrate is smaller (refer to Figs. 89A to 89C). Embodiment 4 In the case where the ribs are tested in a simulated manner, how the heat dissipation performance of the heat dissipating member changes depending on the shape and size of the ribs. A heat dissipating member having a shape as shown in Figs. 95, 95B was used as an experimental sample, respectively. Others are the same as in the third embodiment. A line graph showing the simulation results is shown in Figures 96 and 97. Also, the experimental data is listed in Table XI. Table 11 The shape and size of the rafter are different depending on the heat dissipation performance (forced cooling by the side). The substrate «sheet full height (mm) maximum temperature CC) heat resistance Cc/w) «force loss (Pa) width of the ship W (mm) body length L (mm) thickness of the ship t (mm) rib width Ws (mm) rib length Ls (mm) rib thickness ts (mm) rib profile area (rW) (mm) Quantity 4-1 9.00 5.0 1.8 53.93 0.402 125 4-2 11.25 4.0 2.8 53.46 0.395 105 4-3 50 107 1.10 15.00 1Π7 3.0 5.0 100 78 11.5 53.64 0.394 91 4-4 22.50 IU / 2.0 11.3 1.3 53.62 0.397 79 4-5 37.50 1.2 31.3 54.16 0.405 77 4-6 45.00 1.0 45.0 55.02 0.417 79 It can be seen from the line drawing of Figure 9 6 and 9 7 that the contour ratio of the rib is set at 5~30 or the thickness of the ridge is 丨.15. _~3. 45 mm, the heat resistance is small, and the pressure loss is not significantly increased. That is, it can be known that the rim of the ridge is set to 5 to 30, or the ratio of the thickness of the rib/the total height of the heat dissipating component is set.

2036-5808-PF(Nl).ptd 第154頁 1259117 五、發明說明（H§) 為0 · 1〜0 · 3時，可以得到較佳平衡的散熱性能。 在最後，說明以上所述摩擦震動接合方法的應用例。 而以下的應用中所謂的「銅」、「鋁」係分別指「銅或銅 合金」、「鋁或鋁合金」；「鋁箔」係指「由鋁或鋁合金 構成的『猪』或薄板」。 第98圖所示的第一應用例，係將鋁箔70 3夾在二銅板 701、702之間並全面地重合，將接合治具704壓至銅板701 的外側面。亦即，將以轉動軸704b為中心以圓周方向高速 轉動的治具本體704a的圓周面垂直壓至銅板701之表面， 並使治具本體7 0 4 a沿著銅板7 0 1之表面以一既定的行進速 率移動。如此一來，藉由與治具本體7 0 4 a的摩擦接觸熱將 銅板701高溫化，使與銅版701接觸的鋁箔703共晶熔融， 將其冷卻後得到共晶層介於銅板7 〇 1與銅板7 0 2之間而將二 者接合。 第99圖所示的第二應用例，係將第二銅板702相對於 第一銅板7 0 1呈現約略τ字型而直交配置，將接合治具7 0 4 壓至銅板701的外側面。此時因為銅板701與銅板702之間 亦夾有鋁箔703，可以將銅板701與銅板702接合。 第1 0 0圖所示的第三應用例，係將銅板7 0 1的一部分與 鋁板705的一部分重合配置，藉由接合治具704由熔點較高 的銅板7 0 1之側作用至二者的重合部，而在重合部形成共 晶層，將銅板701與鋁板705接合。 第1 0 1圖所示的第四應用例，係將鋁板7 0 5直交配置於 銅板7 0 1，其他的情況皆與第三應用例相同。2036-5808-PF(Nl).ptd Page 154 1259117 V. Inventive Note (H§) When 0 · 1~0 · 3, better balanced heat dissipation performance can be obtained. Finally, an application example of the above-described frictional vibration joining method will be described. In the following applications, the terms "copper" and "aluminum" refer to "copper or copper alloy" and "aluminum or aluminum alloy" respectively; "aluminum foil" means "pig" or sheet made of aluminum or aluminum alloy. . In the first application example shown in Fig. 98, the aluminum foil 70 3 is sandwiched between the two copper plates 701 and 702 and completely overlapped, and the bonding jig 704 is pressed to the outer side surface of the copper plate 701. That is, the circumferential surface of the jig body 704a which is rotated at a high speed in the circumferential direction around the rotating shaft 704b is vertically pressed to the surface of the copper plate 701, and the jig body 7 0 a is along the surface of the copper plate 701. The established travel rate moves. In this way, the copper plate 701 is heated by the frictional contact heat with the fixture body 70 a, and the aluminum foil 703 in contact with the copper plate 701 is eutectic melted, and then cooled to obtain a eutectic layer between the copper plates 7 〇1. The two are joined to each other with the copper plate 702. In the second application example shown in Fig. 99, the second copper plate 702 is disposed approximately orthogonally with respect to the first copper plate 701, and the bonding jig 704 is pressed to the outer side surface of the copper plate 701. At this time, since the aluminum foil 703 is interposed between the copper plate 701 and the copper plate 702, the copper plate 701 and the copper plate 702 can be joined. In the third application example shown in FIG. 10, a part of the copper plate 701 is placed on a portion of the aluminum plate 705, and the bonding tool 704 is applied to the side of the copper plate 701 having a higher melting point to the both. The overlapping portion forms a eutectic layer at the overlapping portion, and the copper plate 701 is bonded to the aluminum plate 705. In the fourth application example shown in Fig. 1, the aluminum plate 7005 is placed orthogonally on the copper plate 70, and the other cases are the same as in the third application example.

2036-5808-PF(Nl).ptd 第155頁 1259117 五、發明說明（1&0 ) 係將銅板701與 在銅板701的端 在鋁板705的端 將嵌合凸部7 0 1 a 第102A、l〇2B圖所示的第五應用例 紹板705形成為一片板材。在第102A圖中 部形成有嵌合凸部7〇la與嵌合凹部701b 部形成有嵌合凸部705a與嵌合凹部705b 甘欠入欲合凹部705b、將嵌合凸部705a嵌入嵌合凹部701b。 亦即，銅板701與鋁板705係以槽口相接（Shi pi ap joint) 的形式相互肷合，而構成一片板材。而後，藉由接合治具 7 0 4由熔點較高的銅板7 〇 1之嵌合凸部7 〇 1 a之側作用至二者 的嵌合部，而接合銅板7〇1與鋁板705。另外，在第ι〇2Β圖 中，在銅板701的端面及鋁板705的端面分別成為相互逆向 的斜面。亦即，在此處銅板7 〇1的端面為向下的斜面、而 I呂板705的端面為向上的斜面。之後，將使斜面接觸配置 後’藉由接合治具7 0 4由炫點較高的銅板7 0 1之側作用至斜 面部’而接合銅板701與鋁板705，構成一片板材。2036-5808-PF(Nl).ptd Page 155 1259117 V. Description of the Invention (1&0) The copper plate 701 and the end of the copper plate 701 are fitted with a convex portion 7 0 1 a at the end of the aluminum plate 705. The fifth application example shown in Fig. 2B is formed as a sheet of material. In the middle of the 102A, the fitting convex portion 7〇1a and the fitting concave portion 701b are formed with the fitting convex portion 705a and the fitting concave portion 705b, and the fitting convex portion 705a is fitted into the fitting concave portion. 701b. That is, the copper plate 701 and the aluminum plate 705 are mutually coupled in the form of a slot joint to form a single sheet. Then, the copper plate 7〇1 and the aluminum plate 705 are joined by the joining fixture 704 from the side of the fitting convex portion 7 〇 1 a of the copper plate 7 〇 1 having a higher melting point to the fitting portion of the bonding plate 7 〇 1 a. Further, in the first embodiment, the end faces of the copper plate 701 and the end faces of the aluminum plate 705 are inclined surfaces which are opposite to each other. That is, the end face of the copper plate 7 〇 1 is a downward slope, and the end face of the I-plate 705 is an upward slope. Thereafter, the inclined surface is placed in contact with each other, and the copper plate 701 and the aluminum plate 705 are bonded to each other by the bonding jig 704 from the side of the copper plate 70 1 having a high glare point to form a single plate.

第1 0 3 A、1 0 3 B圖所示的第六應用例，係將銅板7 〇 1與 銅板702，以與第五應用例同樣的形狀接合。基於與第一 及第二應用例同樣的考量，係將鋁箔703分別夾入第1 〇3A 圖中的嵌合部與第103B圖的斜面部，而接合銅板7〇1與銅 板702。 ’、 第1 04圖所示的第七應用例，係將鋁板7〇5與鋁板7〇6 鄰接配置’二者鄰接部的上下夾於銅板7〇1與銅板7〇2之 間’而形成銅板701與鋁板705、706的重合部以及銅板702 與銘板70 5、706的重合部，藉由接合治具7〇4由熔點較高 的銅板701、702之側作用至重合部，而接合銅板7〇ι、7〇2In the sixth application example shown in Figs. 1 0 3 A and 1 0 3 B, the copper plate 7 〇 1 and the copper plate 702 are joined in the same shape as in the fifth application example. For the same considerations as in the first and second application examples, the aluminum foil 703 is sandwiched between the fitting portion in the first 〇3A drawing and the inclined surface portion in Fig. 103B, and the copper plate 7〇1 and the copper plate 702 are joined. The seventh application example shown in Fig. 1 04 is formed by arranging the aluminum plate 7〇5 and the aluminum plate 7〇6 adjacent to each other, and the upper and lower portions of the adjacent portions are sandwiched between the copper plate 7〇1 and the copper plate 7〇2. The overlapping portion of the copper plate 701 and the aluminum plates 705 and 706 and the overlapping portion of the copper plate 702 and the name plates 70 5 and 706 are bonded to the overlapping portion by the bonding jigs 7 to 4 from the sides of the copper plates 701 and 702 having a high melting point, thereby joining the copper plates. 7〇ι, 7〇2

Ml 1^· 2036-5808-PF(Nl).ptd 第156頁 1259117 五、發明說明（151) 與鋁板705、706。Ml 1^· 2036-5808-PF(Nl).ptd Page 156 1259117 V. Description of invention (151) with aluminum plates 705, 706.

第105A、105B圖所示的第八應用例，亦將鋁板7〇5與 鋁板706鄰接配置。在第105A圖中，鋁板7〇5的端部片面側 係形成有嵌合凹部7 0 5 b ’鋁板7 〇 6的端部片面側係形成有 嵌合凹部706b。而嵌合凹部7〇5b、706b係形成一嵌合凹 溝，將合於此欲合凹溝的銅板7〇 1嵌入此嵌合凹溝，藉由 接合治具704於銅板701上的作用，而接合銅板7〇1與鋁板 705、706。第105B圖所示與第1〇5A圖所示大體相同，將銅 板7 0 1、7 0 2分別嵌入鋁板7 〇 5、7 0 6之端部兩面側。而將接 合治具704於銅板701、702上時，依序施行亦可、同時施 行亦可。 第106A、106B圖所示的第九應用例，係將銅板7〇ι與 銅板702以與第八應用例同樣的形狀接合。在第1〇6A圖 中’銅板701的端部片面側係形成有嵌合凹部7〇lb，銅板 7 0 2的端部片面側係形成有嵌合凹部7 〇 2 b。而嵌合凹部 701b、70 2b係形成一嵌合凹溝，因此將鋁箔7〇3順應性地 形成於此後合凹溝上，將合於此嵌合凹溝的銅板7〇7嵌入 此欲合凹溝’藉由接合治具7〇4於銅板7〇7上的作用，而接 合銅板707與銅板701、702。第106B圖所示與第l〇6A圖所 示大體相同，將銅板70 7、708分別嵌入銅板701、70 2之端 部兩面側。 第1 0 7圖所示的第十應用例，係將圓柱形或圓筒形的 紹棒709、710的端部，分別合入並***銅環71 1的内部而 相互鄰接後’藉由接合治具704於銅環71 1的外周面上的作In the eighth application example shown in Figs. 105A and 105B, the aluminum plate 7〇5 is also disposed adjacent to the aluminum plate 706. In Fig. 105A, the end surface side of the aluminum plate 7〇5 is formed with a fitting recess 7 0 5 b '. The end surface side of the aluminum plate 7 〇 6 is formed with a fitting recess 706b. The fitting recesses 7〇5b and 706b form a fitting recess, and the copper plate 7〇1 corresponding to the groove is inserted into the fitting groove, and the joint fixture 704 acts on the copper plate 701. The copper plate 7〇1 and the aluminum plates 705 and 706 are joined. As shown in Fig. 105B, substantially the same as shown in Fig. 1A, the copper plates 701 and 702 are respectively fitted to the end faces of the aluminum plates 7 〇 5 and 760. When the jig 704 is attached to the copper plates 701 and 702, it may be carried out in sequence or simultaneously. In the ninth application example shown in Figs. 106A and 106B, the copper plate 7〇 and the copper plate 702 are joined in the same shape as the eighth application example. In the first sheet 6A, the end surface side of the copper plate 701 is formed with a fitting recess 7b, and the end surface side of the copper plate 702 is formed with a fitting recess 7b 2b. The fitting recesses 701b, 70 2b form a fitting recess, so that the aluminum foil 7〇3 is conformally formed on the rear recessed groove, and the copper plate 7〇7 of the fitting recess is embedded in the recessed recess. The groove 'bonds the copper plate 707 and the copper plates 701 and 702 by the action of joining the jigs 7 to 4 on the copper plate 7〇7. The Fig. 106B is substantially the same as that shown in Fig. 6A, and the copper plates 70, 708 are respectively embedded in the both end sides of the copper plates 701 and 70 2 . The tenth application example shown in Fig. 107 shows that the ends of the cylindrical or cylindrical rods 709, 710 are respectively joined and inserted into the interior of the copper ring 71 1 to be adjacent to each other. The fixture 704 is made on the outer peripheral surface of the copper ring 71 1

2036-5808-PF(Nl).ptd 第157頁 12591172036-5808-PF(Nl).ptd Page 157 1259117

用，而使銅環711與鋁棒709、710接合。 第1 08圖所示的第十一應用例，與第十應用例大體相 同，鋁棒709、710的端部，分別突出形成有圓柱形或圓筒 形的嵌合凸部709a、710a，並分別合入並***銅環711的 内σ卩而相互鄰接。此狀態下’銅環7 1 1的外周面與銘棒 7 0 9、7 1 0的外周面是一致的。其他則與第十應用例相同。 第109圖所示的第十二應用例，係將銅板7〇2與鋁網體 71 2重合，藉由接合治具7〇4由熔點較高的銅板7〇1之側作 用至重合部’而將銅板7 〇 1與銘網體71 2接合。 第1 1 0圖所示的第十三應用例，係將空心或實心的鋁 棒709以立設狀態配置於銅板7〇1，藉由接合治具7〇4由炫 點較高的銅板701之側作用至兩者的接觸部，而將銅板7〇1 與鋁棒70 9接合。 第1 1 1圖所示的第十四應用例，係將空心或實心的銅 棒71 3以立設狀態配置於銅板701，而兩者之間更炎入配置 有鋁箔703 ,藉由接合治具704於銅板701之側的作用，使 與銅版70 1接觸的鋁箔703共晶熔融，將其冷卻後得到共晶 層介於銅板701與銅棒713之間而將二者接合。 ’、 第11 2圖所示的第十五應用例，係將圓筒形的銅棒7 i 4 與圓筒形的鋁棒715形成單一的棒體。銅棒714 形成有環狀的嵌合凸部714a、及位於嵌合凸部7=周： 嵌合凹部7Ub。又，銘棒715的端部，係形成有環狀的欲 合凸部715a、及位於嵌合凸部7 15a外周的嵌合凹部71讣。 嵌合凸部7 14a係欲入後合凹部715b、嵌合凸部715&係嵌入The copper ring 711 is joined to the aluminum rods 709, 710. The eleventh application example shown in FIG. 1 08 is substantially the same as the tenth application example, and the end portions of the aluminum rods 709 and 710 are respectively formed with cylindrical or cylindrical fitting convex portions 709a and 710a, and The inner σ 铜 of the copper ring 711 is joined and inserted adjacent to each other. In this state, the outer peripheral surface of the copper ring 7 1 1 coincides with the outer peripheral surface of the ingots 79, 7 1 0. Others are the same as the tenth application example. In the twelfth application example shown in FIG. 109, the copper plate 7〇2 is overlapped with the aluminum mesh body 71 2, and the bonding tool 7〇4 is applied to the overlapping portion from the side of the copper plate 7〇1 having a higher melting point. The copper plate 7 〇 1 is joined to the Ming net body 71 2 . In the thirteenth application example shown in the first embodiment, the hollow or solid aluminum rod 709 is disposed in the standing state on the copper plate 7〇1, and the copper plate 701 having a higher height is formed by the bonding jig 7〇4. The side acts on the contact portions of the two, and the copper plate 7〇1 is joined to the aluminum rod 70 9 . In the fourteenth application example shown in FIG. 1 1 , the hollow or solid copper rods 713 are disposed in the standing state on the copper plate 701, and the aluminum foil 703 is further disposed between the two. The 704 is applied to the side of the copper plate 701, and the aluminum foil 703 which is in contact with the copper plate 70 1 is eutectic melted, and after cooling, a eutectic layer is obtained between the copper plate 701 and the copper rod 713 to bond the two. The fifteenth application example shown in Fig. 11 shows that the cylindrical copper rod 7 i 4 and the cylindrical aluminum rod 715 form a single rod. The copper rod 714 is formed with an annular fitting convex portion 714a and a fitting convex portion 7 = circumference: a fitting concave portion 7Ub. Further, the end portion of the Ming rod 715 is formed with an annular convex portion 715a and a fitting concave portion 71b located on the outer circumference of the fitting convex portion 715a. The fitting convex portion 7 14a is intended to be inserted into the rear recess portion 715b, and the fitting convex portion 715 &

1259117 五、發明說明（丨53) ，合凹部714b。之後，藉由接合治具7〇4由熔點較鋁棒71 5 高的銅棒714的嵌合凸部714a之側作用至嵌合部，而將銅 棒714與鋁棒715接合。 第1 1 3圖所示的第十六應用例，係將圓筒形的銅棒7 j 4 與圓筒形的銅棒71 6，以與第十五應用例相同的形狀接 合。而在嵌合部夾入鋁箔7〇3而將銅棒714、716接合。 第11 4圖所示的第十七應用例，與第十五應用例大體 相同，銅棒714的端面及鋁棒715的端面係分別成為相互逆 向=斜面。亦即，在此處銅棒714的端面是由外側朝中空 部沬入之所謂的缽狀的斜面，而鋁棒7丨5的端面是由外側 朝中空部伸出的斜面。而將各斜面接觸配置後，藉由接合 冶具704由熔點較高的銅棒714之側作用至斜面部，而接合 銅棒714與銘棒715，構成單一的棒體。 第115圖所示的第十八應用例，係將圓筒形的銅棒714 與圓筒形的銅棒71 6，卩與第十七應用例相同的形狀接 合。而在斜面間夾入鋁箔7〇3而將銅棒714、？16接合。 第11 6圖所示的第十九應用例，係關於半導體的散熱 板（packing plate)的製造方法。亦即在鋁製的散熱板71 7 的片側面形成有複數條凹溝717a，將銅製的蓋板718重合 於散熱板717之各凹溝7l7a之側的表面上，藉由接合治具 由炫點較高的銅製的蓋板71 8之側作用至散熱板71 7與 、、s二的盍板718之重合部，而接合散熱板與蓋板7丨8， 以蓋板718所密閉的各凹溝7173就成為水冷孔。藉由上述 的方法，因為並未使用熔接等方法將接合材熔融，由所產 1259117 五、發明說明（154) 生的熱應變較少，而能夠以低成本製造高精度的製品。 第1 1 7圖所示的第二十應用例，係與第十九應用例大 體相同，不同處係將散熱板與蓋板的材質互換。亦即在鋼 製的散熱板719的片側面形成有複數條凹溝7 19a，將鋁製 的蓋板720重合於散熱板719之各凹溝719a之側的表面上， 藉由接合治具704由熔點較高的銅製的散熱板719之側作用 至散熱板719與蓋板720之重合部，而接合散熱板719與蓋 板720 ’以蓋板720所密閉的各凹溝719&就成為水冷孔。其 他的部分均與第十九應用例相同。 第1 1 8圖所不的第二十一應用例，係與第十九、二十 應用例大體相同，不同之處在於散熱板與蓋板的材質都』 銅亦即在銅製的散熱板7 1 9的片側面形成有複數條凹溝 U9a，將銅製的蓋板718重合於散熱板719之各凹溝了丨“々 T的表面上。此時，散熱板Π 9與蓋板7 1 8之間的重合部 且7’ηΛΛ入有链箱7〇3失於二者之間。而後，藉由接合治 ^ 盍板7 1 8或散熱板7 1 9之側作用至重合部，而接合 1 I 與蓋板718，以蓋板718所密閉的各凹溝71 9a就 其他的部分均與第十九、二十應用例相同。 面盥尤轉4 4所不的第二十二應用例，係將鋁容器721的力 可=使用之义722接合而成為電磁調理器。接合治具723 4 心敘述過者，而此處係將以轉動轴723… 艿鋼板722之表面以一既定的行進速率1259117 V. Description of the invention (丨53), the concave portion 714b. Thereafter, the bonding rod 7 is applied to the fitting portion by the side of the fitting convex portion 714a of the copper rod 714 having a higher melting point than the aluminum rod 71 5 , and the copper rod 714 is joined to the aluminum rod 715. The sixteenth application example shown in Fig. 1 1 3 is such that the cylindrical copper rod 7 j 4 and the cylindrical copper rod 71 6 are joined in the same shape as the fifteenth application example. On the other hand, the aluminum foil 7〇3 is sandwiched in the fitting portion to join the copper bars 714 and 716. The seventeenth application example shown in Fig. 11 is substantially the same as the fifteenth application example, and the end faces of the copper rods 714 and the end faces of the aluminum rods 715 are mutually reversed = inclined surfaces. That is, the end face of the copper rod 714 is a so-called beak-shaped inclined surface which is inserted into the hollow portion from the outside, and the end face of the aluminum rod 7丨5 is a slope which protrudes from the outer side toward the hollow portion. After the respective inclined surfaces are placed in contact with each other, the bonding tool 704 is applied to the inclined surface portion from the side of the copper rod 714 having a relatively high melting point, and the copper rod 714 and the Ming rod 715 are joined to form a single rod. The eighteenth application example shown in Fig. 115 is a combination of a cylindrical copper rod 714 and a cylindrical copper rod 71, 卩 in the same shape as the seventeenth application example. And the aluminum foil 7〇3 is sandwiched between the inclined surfaces, and the copper rod 714 is used. 16 joints. The nineteenth application example shown in Fig. 16 is a method of manufacturing a semiconductor heat sink. That is, a plurality of concave grooves 717a are formed on the side surface of the heat dissipation plate 71 7 made of aluminum, and the cover plate 718 made of copper is superposed on the surface of the side of each of the concave grooves 711a of the heat dissipation plate 717. The side of the higher copper cover 71 8 acts on the overlapping portion of the heat sink 7 7 and the slab 718 of the second plate, and the heat sink and the cover 7 8 are joined to each other by the cover 718. The groove 7173 becomes a water-cooled hole. According to the above method, since the bonding material is not melted by a method such as welding, the thermal strain generated by the production of 1259117 5 and the invention (154) is small, and a highly precise product can be manufactured at low cost. The twentieth application example shown in Fig. 1 17 is substantially the same as the nineteenth application example, and the difference between the heat sink and the cover material is interchanged. That is, a plurality of grooves 7 19a are formed on the side surface of the heat dissipation plate 719 of the steel, and the cover plate 720 made of aluminum is superposed on the surface of the side of each of the grooves 719a of the heat dissipation plate 719 by the bonding jig 704. The side of the heat dissipation plate 719 made of copper having a higher melting point acts on the overlapping portion of the heat dissipation plate 719 and the cover plate 720, and the grooves 719 & which are sealed by the cover plate 720 ′ and the cover plate 720 are water-cooled. hole. The other parts are the same as the nineteenth application. The twenty-first application example of the first and second figures is substantially the same as the nineteenth and twentyth application examples, except that the material of the heat dissipation plate and the cover plate is copper, that is, the heat dissipation plate 7 made of copper. A plurality of grooves U9a are formed on the side surface of the sheet of 19, and the cover plate 718 made of copper is superposed on the surface of each of the grooves 719 of the heat sink 719. At this time, the heat sink Π 9 and the cover 7 1 8 The overlap between the 7'n and the chain case 7〇3 is lost between the two, and then the side is joined to the overlap by the side of the bonding plate 7 1 8 or the heat sink 7 1 9 1 I and the cover plate 718, the respective recesses 71 9a sealed by the cover plate 718 are the same as those of the nineteenth and twentyth application examples. The twenty-second application example of the surface switch is not the case. The force of the aluminum container 721 can be used as an electromagnetic conditioner by the use of the meaning 722. The joint fixture 723 4 is described in the following, and here the surface of the rotating shaft 723 ... 艿 steel plate 722 is a predetermined Travel rate

««

1259117 一 1 „_- 五、發明說明（155) 移動。如此一來，藉由與治具本體723a的摩擦接觸熱將不 銹鋼板722高溫化，使與不銹鋼板7 22接觸的鋁容器7”21部 分地共晶熔融，將其冷卻後得到共晶層介於不銹鋼板722 與銘谷器7 2 1之間而將二者接合。 第1 2 0圖所示的第二十三應用例，係將大體為匚字型 斷面的鋁型材724、725以左右一對的狀態下組合並接合而 製造筒狀的儲存桶單S(basket cell)。儲存桶單元其内 部係貯藏使用完畢的核燃料棒，而集合各儲存桶單元而構 成儲存桶（basket)，而儲存桶係為輸送容器（cask)的一部 ^。鋁型材724、725皆含有二十個重量百分比（2()紂％)的 碳化硼（boron carbide)。鋁型材724的端部係形成有嵌合 =部724a與嵌合凹部724b，銘型材725的端部係形成有嵌 a凸部725a與嵌合凹部725b。嵌合凸部72“係嵌入嵌合凹 部725b，嵌合凸部725a係嵌入嵌合凹部”处。嵌合凸部 7^4a係在嵌合凸部725a的外側。又，鋁型材724、725的嵌 :部中係夾入有_03。而後，從欲合凸部724a的外側 提供接合治具704的作用，將鋁型材724、725接合。此 時:接合治具7G4向下的壓應力，將使叙合部往下方彎 曲’為了防止接合時金屬由下方漏出而造成接合不良，在 7於筒狀體内中空部配置台車式内部元件7 2 6及内槽板 m。内槽板727係沿著接合部的 台車式内部元件726係以上下方向伸縮自如的千斤頂 (jaCk) 72 6b由下將内構板727頂至接合部的下面，並以滾 子（r〇ller) 726a使筒狀體内中空部與接合治具7〇4同步移1259117 - 1 _ _ - V, invention description (155) movement. Thus, the stainless steel plate 722 is heated by frictional contact with the fixture body 723a to make the aluminum container 7" 21 in contact with the stainless steel plate 7 22 Part of the eutectic melting is carried out, and after cooling, a eutectic layer is obtained between the stainless steel plate 722 and the Ming Guji 7 2 1 to join the two. In the twenty-third application example shown in the first aspect, the aluminum profiles 724 and 725 having a substantially U-shaped cross section are combined and joined in a pair of right and left to produce a cylindrical storage bucket S ( Basket cell). The inside of the storage tank unit stores the used nuclear fuel rods, and collects the respective storage tank units to form a storage basket, which is a part of the transport container (cask). The aluminum profiles 724, 725 all contain twenty percent by weight (2%) of boron carbide. The end portion of the aluminum profile 724 is formed with a fitting portion 724a and a fitting recess portion 724b, and the end portion of the inscription profile 725 is formed with a fitting portion 725a and a fitting recess portion 725b. The fitting convex portion 72 "embeds into the fitting concave portion 725b, and the fitting convex portion 725a is fitted into the fitting concave portion". The fitting convex portion 7^4a is outside the fitting convex portion 725a. Further, _03 is interposed in the portion of the aluminum profiles 724 and 725. Then, the joint jig 704 is provided from the outer side of the convex portion 724a to be joined, and the aluminum profiles 724 and 725 are joined. At this time, the downward pressing stress of the jig 7G4 is bent, and the merging portion is bent downward. In order to prevent the metal from leaking from the bottom during the joining, the joining failure is caused, and the trolley internal component 7 is disposed in the hollow portion of the cylindrical body. 2 6 and the inner slot plate m. The inner groove plate 727 is a jack (jack) 72 6b which is stretchable in the up-and-down direction along the trolley-type inner member 726 of the joint portion. The inner plate 727 is pushed down to the lower side of the joint portion, and the roller is used (r〇ller) 726a synchronizes the hollow portion of the cylindrical body with the joint fixture 7〇4

12591171259117

動。因此，，到接合治具704之來自上方的壓力的接 的下面’總：為内檔板727所佔據而受到内檔板727的。支 持，因此接5部幾乎不會贊曲，亦不會有金屬漏出。 第1 2 1圖所不的第二十四應用例，係與第二十三應 例：體相同’相異處在於嵌合部的形狀。亦即鋁型材;“ 的端面係向下的斜面，㉟型材m的端面係向上的斜面。 而將鋁箱703夾在以而使銘型材m㈣面與紹型材⑵ 的斜面接觸，由外側使接合治具7〇4作用於斜面，而 銘型材724與銘型材725。其他的部分全部與口 例相同。 一應片move. Therefore, the lower side of the joint of the pressure from the upper side of the jig 704 is "total": it is occupied by the inner baffle 727 and is received by the inner baffle 727. Support, so the 5 parts will hardly be praised, and there will be no metal leakage. The twenty-fourth application example which is not shown in Fig. 1 2 1 is the same as the twenty-third example: the body is different in the shape of the fitting portion. That is, the aluminum profile; "the end face is a downward slope, and the end face of the 35 profile m is an upward slope. The aluminum case 703 is sandwiched so that the m (four) face of the profile is in contact with the slope of the profile (2), and the joint is joined by the outside. The fixture 7〇4 acts on the inclined surface, while the inscription profile 724 and the inscription profile 725. The other parts are all the same as the mouthpiece.

第122圖所示的第二十五應用仅J，係將大體為L字型斷 面的鋁型材728、729組合並接合而製造筒狀的儲存桶單 兀。大體為L字型斷面的嵌合部可位於任一角落部，因為 接合治具704的正下方係配置有鉛直壁，就不需要第二十 二應用例之台車式内部元件。其他的部分全部與第二十三 應用例相同。 一 第1 23圖所示的第二十六應用例，係與第二十五應用 例大體相同，相異處在於嵌合部的形狀。亦即紹型材Μ 8 的端面係向下的斜面，鋁型材729的端面係向上的斜面。 而將銘箱703夾在中間而使鋁型材728的斜面與鋁型材729 · 的斜面接觸’由外側使接合治具70 4作用於斜面，而接合 鋁型材728與鋁型材729。其他的部分全部與第二十五應用 例相同。 第124Α〜124Β圖所示的第二十七應用例，係將四個链The twenty-fifth application shown in Fig. 122 is only J, in which aluminum profiles 728 and 729 which are substantially L-shaped cross-sections are combined and joined to manufacture a cylindrical storage tank. The fitting portion having a substantially L-shaped cross section can be located at any corner portion, and since the vertical wall is disposed directly below the joining jig 704, the trolley-type internal member of the twenty-second application example is not required. The other parts are all the same as the twenty-third application. A twenty-sixth application example shown in Fig. 1 23 is substantially the same as the twenty-fifth application example, and differs in the shape of the fitting portion. That is, the end face of the profile Μ 8 is a downward slope, and the end face of the aluminum profile 729 is an upward slope. On the other hand, the bezel 703 is sandwiched between the inclined surface of the aluminum profile 728 and the inclined surface of the aluminum profile 729 ·, and the bonding jig 70 4 acts on the inclined surface from the outside to bond the aluminum profile 728 and the aluminum profile 729. The other parts are all the same as the twenty-fifth application example. The twenty-seventh application example shown in Figure 124Α~124Β, will be four chains

1259117 五、發明說明（157) 型材730、731、732、733組合並接合而製造筒狀的 (basket cell)。大體為L字型斷面的嵌合部可位於任—角 落部。如第1 2 4 B圖所示，鋁型材7 3 0的端部的外側係形成 有嵌合凸部730a，鋁型材733的端部的上面係形成有支持 面7 3 3 a。又’嵌合部中係夾入有銘箔7 〇 3。之後，藉由從 铭型材7 3 0的肷合凸部7 3 0 a的外側’提供接合治且7 〇 4的、、二 具本體7 0 4 a的作用，對鋁箔7 0 3加熱及加壓，而將銘型材 730、733接合。因為來自接合治具704之向下的壓應力， 係傳至鋁型材7 3 0、7 3 3，流向兩側斜下方，最後由展開制 約治具734所吸收；嵌合部就不會散開，亦不會向下彎汗 曲。四個部位的嵌合部均是相對於筒狀體的中心軸呈對稱 的形狀。其他的部分全部與第二十五應用例相同。 第125A〜125B圖所示的第二十八應用例，係與第二十 七應用例大體相同，相異處在於嵌合部的形狀/亦一， 眼至紹型材730、733 ’紹型材73〇的端面係向下的斜面， 鋁型材733的端面係向上的斜面。而將鋁箔7〇3夾在而 =紹型材730的斜面與銘型材733的斜面接觸，由外側使接 δ治具7G4作用於斜面，而接合紹型材73〇與紹型材。 =同樣的方式，將铭型材依序迴轉 ;觸部全部接合。㊣他的部分全部與第二十七應；= 露如上，然其並非用以 在不脫離本發明之精神 飾，因此本發明之保護 雖然本發明已以較佳實施例揭 限疋本發明，任何熟習此技藝者， 和範圍内，當可作些許之更動與潤1259117 V. DESCRIPTION OF THE INVENTION (157) The profiles 730, 731, 732, and 733 are combined and joined to manufacture a basket cell. The fitting portion of the generally L-shaped cross section may be located at any of the corners. As shown in Fig. 1 2 B, the outer side of the end portion of the aluminum profile 730 is formed with a fitting convex portion 730a, and the upper surface of the end portion of the aluminum profile 733 is formed with a support surface 733b. Further, in the fitting portion, the name foil 7 〇 3 is sandwiched. Thereafter, the aluminum foil 7 0 3 is heated and added by providing the bonding process from the outer side of the kneading convex portion 7 3 0 a of the stencil 7 3 0 and the action of the two bodies 7 0 4 a. Pressing, the inscription profiles 730, 733 are joined. Because the downward compressive stress from the joining fixture 704 is transmitted to the aluminum profiles 703, 733, the flow direction is obliquely downward to the sides, and finally absorbed by the expansion control fixture 734; the fitting portion does not spread, It will not bend down. The fitting portions of the four portions are each symmetrical with respect to the central axis of the cylindrical body. The other parts are all the same as the twenty-fifth application example. The twenty-eighth application example shown in FIGS. 125A to 125B is substantially the same as the twenty-seventh application example, and the difference is in the shape of the fitting portion/one, and the eye-to-saw profile 730, 733 'south profile 73 The end face of the crucible is a downward slope, and the end face of the aluminum profile 733 is an upward slope. On the other hand, the aluminum foil 7〇3 is sandwiched and the inclined surface of the stencil 730 is in contact with the inclined surface of the inscription 733, and the outer jig 7G4 is applied to the inclined surface by the outer side, and the slats 73 and the slab are joined. = In the same way, the inscriptions are rotated in sequence; the contacts are all joined. </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; Anyone who is familiar with this skill, and within the scope, can make some changes and run

12591171259117

範圍所界定者為準 五、發明說明（15&amp;) 範圍當視後附之申請專利 如上所述，藉由第一 5 W上升至接合所必要的 金屬元件仍然能保持高抗 力能夠有效率地傳達到重 無縫隙且具高接合強度之 又’因為將接合治具 側而作摩擦震動接合，即 度以上時，鋼元件的抗形 充分地傳達至重合面，並 又’因接合治具與銅 恰好合適的值時，可以行 又’接合治具的壓應 鋁元件的重合面就不會產 的凹痕亦可以較小。 又’接合治具的行進 關係為恰好適當時，就可 震動接合。 又’基板與傳熱板的 強度接合的散熱元件。 又’因為散熱器材料 的加工精度高。 又’因為與接合治具 群組的發 溫度時， 形變強度 合面，而 接合。 壓入溶點 使在兩7C 變強度相 能夠行確 元件的摩 良好的接 力為恰好 生縫隙而 明，將 鄰近接 ’而使 能夠在 局於I呂 件的重 對較大 實地接 擦接觸 合。 適當的 能夠接 各金屬元件的重 合治具之一側的 接合治具的壓應 金屬元件間形成 元件的銅元件之 合面達到共晶溫 ’可使來自壓力 合0 所產生的熱量為 值時，銅元件與 合，銅元件表面 速率、圓周速率、銅元件厚度的 以有效率地行高接合強度的摩擦 重合面沒有縫隙可以形成以更高 係由銘擠型所成形，散熱器材 接觸的銅元件不易熔融而在高 料 、、wThe scope defined by the scope is the fifth, the invention description (15 &amp;) range, as described in the attached patent application, as described above, the metal element necessary for the first 5 W rise to the joint can still maintain high resistance and can effectively communicate To the case of a seamless joint with high joint strength, the frictional vibration joint is joined by the joint side, and the resistance of the steel element is sufficiently transmitted to the coincident surface, and the joint fixture and copper are At just the right value, the dents that can be produced without the coincident surface of the pressure-bonding aluminum component of the jig can be made smaller. Further, when the traveling relationship of the jig is just right, the joint can be vibrated. Further, a heat dissipating member in which the substrate is joined to the strength of the heat transfer plate. Also, because the heat sink material has high processing precision. Further, because the deformation strength is combined with the bonding temperature of the jig group, the bonding is performed. Pressing into the melting point enables the two 7C variable strength phase to be able to determine the good friction of the component. It is just a gap, and it will be adjacent to the '', so that it can be used in the large-scale ground contact of the I-L. . Appropriately capable of connecting the metal fittings on the side of the bonding fixture on one side of the bonding fixture, the bonding surface of the copper component forming the component between the metal components and the eutectic temperature can be used to make the heat generated by the pressure combination 0 , the copper element and the joint, the copper element surface rate, the peripheral speed, the thickness of the copper element, the frictional coincident surface with the high effective bonding strength without gaps can form a copper formed by the higher extrusion type, the contact of the radiator material The component is not easy to melt and is in high material, w

12591171259117

下能保持高抗形變強度，接合條件（接合治具的轉動數、 行進速率等）的容許範圍大，接合效率好。 又’藉由第二群組的發明，無論元件的材質為何，可 以容易地將複數個相互間隔的板材立設接合於基板的一表 面’特別可以將厚度薄、高度高的板材，以短間隔強固地 立設接合於基板上。 又I藉由本發明散熱元件的製造方法，可以容易地以 低成本製造具有相互間隔的複數個鰭片立設接合於基板之 一表面的散熱兀件；特別是可以以低成本製造具有高高度 /間隔比_的高散熱性能的散熱元件。此時如果使用本發明 _ 之散熱凡件製造用治具，於摩擦震動接合時能夠確實地固 定鰭片或鰭片構成材、間隔物、與基板。 更者’本發明之散熱元件係散熱性能高、製造成本便 盘精二群組的發明，@為散熱元件是由銅基板 與岫以梦羽▲私 次鋁基板摩擦震動接合而成，可以確 貝地以較智知物品為低的成本製造。 的構：二in:風扇將散熱元件的熱作強制性地冷卻 的構仏，而有向散熱性能。 更者’將發熱體金 與風扇可以配置在遠^二二=以導熱管連接時，散熱元件 記型電腦等要在發熱邱二…、的位置，使得例如薄型的筆 難之情況，有了可=對庙附近裝设散熱構造有空間上的困 /、丁 的方宰。 又，藉由第四群組的 ^ 的毛月，可以簡易且確實地將各金The deformation strength can be maintained high, and the allowable range of the joining conditions (the number of rotations of the joining jig, the traveling speed, etc.) is large, and the joining efficiency is good. Moreover, by the invention of the second group, regardless of the material of the component, a plurality of mutually spaced sheets can be easily erected to one surface of the substrate. In particular, the sheet having a thin thickness and a high height can be shortly spaced. Firmly erected and bonded to the substrate. Further, by the manufacturing method of the heat dissipating member of the present invention, it is possible to easily manufacture a heat dissipating member having a plurality of fins which are spaced apart from each other and erectably bonded to one surface of the substrate at a low cost; in particular, it is possible to manufacture a high height at a low cost/ A heat dissipation element with a high heat dissipation performance with a spacing ratio of _. At this time, if the jig for manufacturing a heat-dissipating member of the present invention is used, the fin or fin constituent material, the spacer, and the substrate can be surely fixed at the time of frictional vibration bonding. Moreover, the heat dissipating component of the present invention is a invention in which the heat dissipating performance is high and the manufacturing cost is fine. The heat dissipating component is formed by the frictional vibration of the copper substrate and the 羽 梦 梦 梦 ▲ 私 私 private aluminum substrate, which can be confirmed. Betsey is manufactured at a lower cost than smarter items. The structure: two in: the fan will force the heat of the heat dissipating component to be forced to cool, while the directional heat dissipation performance. In addition, the heating element gold and the fan can be arranged at a distance of two or two. When the heat pipe is connected, the heat-dissipating component is required to be in a position such as a thin heat, so that, for example, a thin pen is difficult. Can = install a heat dissipation structure near the temple, there is a space on the sleep / Ding's square slaughter. Also, with the Mao of the fourth group, the gold can be easily and surely

2036-5808-PF(Nl).ptd 第165頁 1259117 五、發明說明（160) 屬元件相互重合並接合；又，可以簡易且確實地將複數個 金屬製板材立設並接合於金屬製基板。更者，藉由本發明 散熱元件的製造方法’可以簡易地製造複數個鰭片強固地 立設接合於基板的散熱元件。 又，藉由第五群組的發明，可以以少步驟、短時間接 合各金屬元件，亦可以將各金屬元件作高強度地接合。 又，以應用此金屬元件接合方法之散熱元件的製造方法所 得的散熱元件，係以少步驟、短時間，更確實地以高強度 將散熱鰭片等接合於基板上，其成本較習知物品為低，且 強度較高。 又，藉由第六群組的發明，因為在基板上係形成有連 結各鰭片的凸條，基板可以更有效率地將發熱體的熱量傳 至各鰭片，而提升散熱性能。因此，可以在不降低散熱性 能的情形下，將散熱元件輕量化。又，藉由本發明之&amp;埶 器，係可以更上一層地提升散熱性能。 … 又，藉由本發明之散熱元件的製造方法，凸條與鰭片 不會造成麻煩，可以簡單且硌實地接合基板與鰭片，亦可 以自由地設定韓片的間隔與高度/間隔比。2036-5808-PF(Nl).ptd p. 165 1259117 V. Description of the Invention (160) The components are rejoined and joined to each other; and a plurality of metal plates can be easily and surely erected and joined to the metal substrate. Further, by the method for manufacturing a heat dissipating member of the present invention, it is possible to easily manufacture a plurality of fins to strongly erect the heat dissipating elements bonded to the substrate. Further, according to the invention of the fifth group, the metal elements can be joined in a small number of steps and in a short time, and the metal elements can be joined with high strength. Further, the heat dissipating element obtained by the method for manufacturing a heat dissipating member to which the metal element bonding method is applied is capable of bonding heat radiating fins or the like to the substrate with high strength in a small step and in a short time, which is more expensive than conventional articles. It is low and has a high strength. Further, according to the invention of the sixth group, since the ridges connecting the fins are formed on the substrate, the substrate can more efficiently transfer the heat of the heat generating body to the fins, thereby improving the heat dissipation performance. Therefore, the heat dissipating component can be made lighter without lowering the heat dissipation performance. Further, with the &amp;amp; of the present invention, it is possible to improve the heat dissipation performance in a higher layer. Further, according to the method for manufacturing a heat dissipating member of the present invention, the ridges and the fins are not troublesome, and the substrate and the fins can be simply and sturdyly bonded, and the interval and height/space ratio of the slabs can be freely set.

1259117 圖式簡單說明 第1 A〜1 C圖係顯示本發明之金屬元件接合方法之一實 施型態各步驟，其中第ΙΑ、1B為正面剖面圖，第1C圖為第 1 B圖之側視圖。 第2A〜2C圖為一系列之剖面圖，係顯示第1A〜1C圖之 鋁元件與銅元件之重合部之塑性變形的過程。 第3圖為一正面剖面圖，係顯示本發明之金屬元件接 合方法之另一實施型態。 第4圖為一斜視圖，係顯示本發明之散熱元件之一實 施型態。 第5A〜5C圖為一系歹U之底面視圖與剖面圖，係顯示本 發明之散熱元件之另一實施型態，其中第5A圖為底面視 圖，第5B、5C圖為剖面圖。 第6 A〜6C圖為一系列之剖面圖，係顯示本發明之散熱 元件的製造方法之一實施型態的各步驟，其中第6A、6B圖 為正面剖面圖，第6C圖為第6B圖之剖面圖。 第7 A〜7C圖為一系列之剖面圖，係顯示本發明之散熱 元件的製造方法之另一實施型態。 第8A〜8C圖係顯示摩擦震動接合的順序，其中第8A、 8B為正面剖面圖，第8C圖為第8B圖之側視圖。 第9A〜9C圖為一系列之剖面圖，係顯示第8A〜8C圖之 鋁元件與銅元件之重合部之塑性變形的過程。 第1 0圖為一正面剖面圖，係顯示金屬元件之摩擦震動 接合之另一例子。 第11 A〜11 B圖為一系列之正面剖面圖，係顯示本發明BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A to FIG. 1C show the steps of one embodiment of the metal element joining method of the present invention, wherein the first and second sides are the front sectional view, and the first one is the side view of the first one. . Figs. 2A to 2C are a series of sectional views showing the process of plastic deformation of the overlapping portion of the aluminum member and the copper member in Figs. 1A to 1C. Fig. 3 is a front sectional view showing another embodiment of the metal member joining method of the present invention. Fig. 4 is a perspective view showing an embodiment of the heat dissipating member of the present invention. 5A to 5C are a bottom view and a cross-sectional view of a series of U, showing another embodiment of the heat dissipating member of the present invention, wherein Fig. 5A is a bottom view, and Figs. 5B and 5C are cross-sectional views. 6A to 6C are a series of sectional views showing the steps of an embodiment of the method for manufacturing the heat dissipating member of the present invention, wherein the 6A and 6B are front cross-sectional views, and the 6C is 6B. Sectional view. 7A to 7C are a series of sectional views showing another embodiment of the method of manufacturing the heat dissipating member of the present invention. Figs. 8A to 8C show the order of frictional vibration engagement, in which 8A, 8B are front cross-sectional views, and Fig. 8C is a side view of Fig. 8B. Figs. 9A to 9C are a series of sectional views showing the process of plastic deformation of the overlapping portion of the aluminum member and the copper member in Figs. 8A to 8C. Fig. 10 is a front cross-sectional view showing another example of frictional vibration engagement of a metal member. 11A to 11B are a series of front cross-sectional views showing the present invention

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散熱元件的製造方法之第一實施型態。 第12A〜12B圖為一系列之正 止面剖面圖，总航_ 第11A〜11B圖的步驟，其中第12A 固-係顯不接續於 第13圖為一分解斜視 造用治具之一實施型態。 第14圖為一斜視圖， 施型態。 驟，第1 2B圖係顯示間隔物脫離步驟’、。.4不摩擦震動接合步 圖’係顯示本發明之散熱元件製 係顯示本發明之散熱元件之一實 第15A〜15C圖為一系列之斜視圖，係 之摩擦震動接合步驟之接合治呈 、；' 不弟1 2A圖所六A first embodiment of a method of manufacturing a heat dissipating component. Figures 12A to 12B are a series of positive stop profiles, the total flight _ 11A-11B steps, wherein the 12A solid-line is not connected to Figure 13 is an implementation of an exploded strabismus fixture Type. Figure 14 is a perspective view of the configuration. The 12B chart shows the spacer detachment step '. .4 non-friction vibration joint step diagram' shows that the heat-dissipating component system of the present invention shows that one of the heat-dissipating components of the present invention is a series of oblique views, and the frictional vibration bonding step is performed. ;' No brother 1 2A map six

/、的移動執跡的彳丨 第1 6圖為一正面剖面圖’係 震動接合步驟之另一例子。 弟12八圖所不之摩擦 第17圖為-正面剖面圖，係顯示本發 另一實施型態。 狀…凡件之 第18A〜18C圖為一系列之正面剖面圖，係顯示第丨了圖 所示之散熱元件的製造順序，其中第丨8 A圖為第一樣鮮， 第18B、18C圖為第二樣態。 第1 9 A〜1 9 G圖為一糸列之正面剖面圖，係顯示第1 γ圖 所示之散熱元件的製造順序，其中第19Α〜19C圖為第三樣 態，第19D〜19G圖為第四樣態。 第2 Ο Α〜2 Ο Ε圖為一系列之正面剖面圖，係顯示本發明 之散熱元件的製造方法之第二實施型態，其中第20A〜20C 圖係顯示元件接合步驟，第2 0 D圖係顯示摩擦震動接合步 驟，第2 Ο E圖係顯示間隔物脫離步驟。/, The movement of the 执 彳丨 Figure 16 is a front cross-sectional view of another example of the vibration joint step. Brother 12, Figure 8 is not rubbing Figure 17 is a front cross-sectional view showing another embodiment of the present invention. Figures 18A to 18C are a series of front cross-sectional views showing the manufacturing sequence of the heat dissipating components shown in the figure, wherein Figure 8A is the same as the first, 18B, 18C For the second form. The 19th to the 19th G is a front cross-sectional view of the array, showing the manufacturing sequence of the heat dissipating component shown in the first gamma diagram, wherein the 19th to 19thth views are the third state, and the 19th to 19thth views are The fourth form. 2nd Α 2 2 Ο Ε Ε 为 为 2 2 一系列 一系列 一系列 一系列 一系列 一系列 一系列 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第 第 第 第 第The figure shows the frictional vibration bonding step, and the second figure shows the spacer separation step.

2036-5808-PF(Nl).ptd 第168頁 12591172036-5808-PF(Nl).ptd Page 168 1259117

圖式簡單說明 第2 1 A〜2 1 D圖係顯示本發明之散熱元件的製造方、去 第三實施型態，其中第2 1 A圖係顯示鰭片配置步驟之正面 剖面圖，第2 1 B、2 1 C圖係顯示基板配置步驟之正面剖面 圖，第20D圖係顯示第21C圖之部分放大圖。 第2 2 A〜2 2 B圖為一系列之正面剖面圖，係顯示接續於 第21A〜21D圖的步驟，其中第22A圖係顯示摩擦震動接 驟，第2 2 B圖係顯示間隔物脫離步驟。 ° 第2 3 A〜2 3 E圖為一系列之正面剖面圖，係顯示本發明 之散熱元件的製造方法之第四實施型態之元件接合步驟。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 2 1 A to 2 1 D shows a manufacturing method of a heat dissipating member of the present invention, and a third embodiment, wherein a 2 1 A drawing shows a front cross-sectional view of a fin disposing step, and a second 1 B, 2 1 C shows a front cross-sectional view of the substrate arrangement step, and FIG. 20D shows a partial enlarged view of FIG. 21C. 2 2 A 2 2 2 B is a series of front cross-sectional views showing the steps following the 21A to 21D drawings, wherein the 22A image shows the frictional vibration contact, and the 2 2 B image shows the spacer separation. step. ° 2 3 A to 2 3 E is a series of front cross-sectional views showing the element bonding step of the fourth embodiment of the method of manufacturing the heat dissipating member of the present invention.

第24A〜24B圖為一系列之正面剖面圖，係顯示接續於 第23A〜23E圖的步驟，其中第24a圖係顯示摩擦震動接合步 驟，第24B圖係顯示間隔物脫離步驟。 夕 第25A〜25B圖為一系列之斜視圖，係顯示本發明之 熱元件其他的實施型態。 係顯示本發明之散 第2 6 A〜2 6 C圖為一系列之斜視圖 熱元件其他的實施型態。 第27A〜27B圖係顯示實際製造的散熱元件之鰭片與基 板的接合部’“第27A圖為部分放大剖面圖，第27β圖 第27A圖之部分放大圖。Figs. 24A to 24B are a series of front cross-sectional views showing the steps following Fig. 23A to Fig. 23E, wherein Fig. 24a shows the frictional vibration joining step, and Fig. 24B shows the spacer separating step. Further, Figs. 25A to 25B are a series of oblique views showing other embodiments of the heat element of the present invention. The figure shows that the second embodiment of the present invention is a series of oblique views of other embodiments of the thermal element. Figs. 27A to 27B are views showing a joint portion of the fin and the substrate of the actually manufactured heat dissipating member. Fig. 27A is a partially enlarged cross-sectional view, and a partially enlarged view of Fig. 27A, Fig. 27A.

28A 〜% 一面圖，苐28C圖為第28B圖之側視圖28A ~% One side view, 苐28C picture is the side view of Figure 28B

圖之鋁元件盥钔:為一系列之剖面圖，係顯示第28A〜28C 第30圖為一丄,^之塑性變形的過程。 面“面圖，係顯示金屬元件之摩擦震：The aluminum component of the figure is a series of sectional views showing that the 28th drawing of Figs. 28A to 28C is a process of plastic deformation. The face image shows the friction of the metal components:

2036-5808.PF(Nl).ptd 第169頁 1259117 圖式簡單說明 接合之另一例子。 第3 1圖為一斜視圖，係顯示本發明之散熱元件之一實 施型態。 第3 2 A〜3 2 E圖為一系列之正面剖面圖，係顯示第3 1圖 之散熱元件之製造方法。 第33 A〜33C圖為一系列之斜視圖，係顯示第32D圖所示 之接合治具的移動執跡的例子。 第3 4圖為一斜視圖，係顯示本發明之散熱元件之另一 實施型態。 第35A〜35D圖為一系列之正面剖面圖，係顯示第34圖 之散熱元件之製造方法。 第3 6 A〜3 6 B圖係顯示本發明散熱器之第一實施型態， 其中第36A圖為分解斜視圖，第36B圖為組裝後的斜視圖。 第37A圖為第36A〜36B圖之散熱器之俯視圖。 第3 7B、37C圖分別為第36A〜36B圖之散熱器之X方向側 視圖與Y方向側視圖。 第3 8圖為一組裝後的斜視圖，係顯示本發明散熱器之 第二實施型態。 第3 9 A〜3 9 B圖係顯示本發明散熱器之第三實施型態， 其中第39A圖為分解斜視圖，第39B圖為組裝後的斜視圖。 第40A圖為第39A〜39B圖之散熱器之俯視圖。 第40B、40C圖分別為第39A〜39B圖之散熱器之X方向側 視圖與Y方向側視圖。 第4 1圖為一組裝後的斜視圖，係顯示本發明散熱器之2036-5808.PF(Nl).ptd Page 169 1259117 Schematic description of the diagram Another example of bonding. Fig. 3 is a perspective view showing an embodiment of the heat dissipating member of the present invention. 3 3 A to 3 2 E is a series of front cross-sectional views showing the method of manufacturing the heat dissipating member of Fig. 31. Figs. 33A to 33C are a series of oblique views showing an example of the movement of the jig of the jig shown in Fig. 32D. Fig. 34 is a perspective view showing another embodiment of the heat dissipating member of the present invention. Figs. 35A to 35D are a series of front cross-sectional views showing the method of manufacturing the heat dissipating member of Fig. 34. The third embodiment shows the first embodiment of the heat sink of the present invention, wherein the 36A is an exploded perspective view, and the 36B is a perspective view after assembly. Figure 37A is a plan view of the heat sink of Figures 36A to 36B. Figs. 3B and 37C are respectively an X-direction side view and a Y-direction side view of the heat sink of Figs. 36A to 36B. Fig. 3 is a perspective view of the assembly, showing a second embodiment of the heat sink of the present invention. The third embodiment of the heat sink of the present invention is shown in Fig. 39A to Fig. 3B, wherein Fig. 39A is an exploded perspective view, and Fig. 39B is a perspective view after assembly. Fig. 40A is a plan view of the heat sink of Figs. 39A to 39B. Figs. 40B and 40C are respectively an X-direction side view and a Y-direction side view of the heat sink of Figs. 39A to 39B. Figure 41 is an assembled perspective view showing the heat sink of the present invention.

2036-5808-PF(Nl).ptd 第170頁 1259117 «式簡單說明 第四實施型態。 第42 A〜42B圖係顯示本發明散熱器之第五實施型態， 其中第42A圖為分解斜視圖，第42B圖為組裝後的斜視圖。 第43A圖為第42A〜42B圖之散熱器之俯視圖。 第43B、43C圖分別為第42A〜42B圖之散熱器之X方向側 視圖與Y方向側視圖。 第44圖為一組裝後的斜視圖，係顯示本發明散熱器之 第六實施型態。 第45A〜45B圖係顯示本發明散熱器之第七實施型態， 其中第45A圖為分解斜視圖，第45B圖為組裝後的斜視圖。 第46A圖為第45A〜45B圖之散熱器之俯視圖。 第46B、46C圖分別為第45A〜45B圖之散熱器之X方向側 視圖與Y方向側視圖。 第4 7圖為一組裝後的斜視圖，係顯示本發明散熱器之 第八實施型態。 第48A〜48C圖係顯示本發明金屬元件接合方法之第一 實施型態之順序，其中第48A、48B圖為正面剖面圖，第 48C圖為第48B圖之側視圖。 第4 9 A〜4 9 C圖為一系列之剖面圖，係顯示第4 8 A〜4 8 C 圖之鋁元件與銅元件之重合部之塑性變形的過程。 第50A圖係顯示第48A〜48C圖之接合治具之部分放大 圖。 第50B〜50D圖係顯示第48A〜48C圖之接合治具之圓周面 的凹槽的其他例子。2036-5808-PF(Nl).ptd Page 170 1259117 «Simple description of the fourth embodiment. The 42A to 42B drawings show a fifth embodiment of the heat sink of the present invention, wherein the 42A is an exploded perspective view, and the 42B is a perspective view after assembly. Fig. 43A is a plan view of the heat sink of Figs. 42A to 42B. Figs. 43B and 43C are respectively a side view of the X direction and a side view of the Y direction of the heat sink of Figs. 42A to 42B. Figure 44 is a perspective view showing the assembled sixth embodiment of the heat sink of the present invention. 45A to 45B are views showing a seventh embodiment of the heat sink of the present invention, wherein Fig. 45A is an exploded perspective view, and Fig. 45B is a perspective view after assembly. Fig. 46A is a plan view of the heat sink of Figs. 45A to 45B. Figs. 46B and 46C are respectively an X-direction side view and a Y-direction side view of the heat sink of Figs. 45A to 45B. Fig. 47 is an oblique perspective view showing the eighth embodiment of the heat sink of the present invention. 48A to 48C are views showing the sequence of the first embodiment of the metal element bonding method of the present invention, wherein the 48A, 48B are front cross-sectional views, and the 48Cth is a side view of the 48B. Chapter 4 9 A to 4 9 C is a series of sectional views showing the process of plastic deformation of the overlapping portion of the aluminum member and the copper member in the 4 8 A to 4 8 C drawing. Fig. 50A is a partially enlarged view showing the jig of the 48A to 48C. The 50B to 50D drawings show other examples of the grooves of the circumferential surface of the joint jig of Figs. 48A to 48C.

2036-5808-PF(Nl).ptd 第171頁 1259117 圖式簡單說明 第5 1圖為一正面别面圖，係顯示金屬元件的摩擦震動 接合的其他例子。 ” 第52A〜52B圖為一系列之正面剖面圖，係顯示本發明 之金屬元件接合方法之第二實施型態之元件配置步驟。 第53A〜53B圖為一系列之正面剖面圖，係顯示接續於 第52A〜52B圖的步驟’其中第53A圖係顯示摩換震 八 驟，第53B圖係顯示間隔物脫離步驟。 接合步 第54圖為一分解斜視圖，係顯示本發 造用治具之一實施型態。 &lt; 政熱7L件製 顯示本發明之散熱元件之—實 第5 5圖為一斜視圖，係 施型態。 第56A〜56C圖為一系列之斜視圖，係顯示 不 之摩擦震動接合步驟之接人^ I# …第53A圖所 楚ς7同炎χ &lt;接。⑺具的移動軌跡的例子。 第57圖為-正面剖面圖，係顯示第53α 震動接合步驟之另一例子。 ’、之摩擦 第58圖為-正面剖面圖，係顯示本發 另一實施型態。 政…、兀件之 第59Α〜59C圖為—系列之正面剖面圖，係 所示之散熱元件的製造順序，其中第59八圖 =圖 第59Β、59C圖為第二樣態。 像怒’ 第60 Α〜60G圖為一系列之正面剖面圖，係顯示第 所示之散熱元件的製造順序，其中第6〇A〜6〇c圖 = 態，第60D〜60G圖為第四樣態。 币一樣 第61 A〜61E圖為一系列之正面剖面圖，係顯示本發明2036-5808-PF(Nl).ptd Page 171 1259117 Brief Description of the Drawings Figure 51 is a front view showing other examples of frictional vibration joints of metal components. 52A to 52B are a series of front cross-sectional views showing the component arrangement steps of the second embodiment of the metal component bonding method of the present invention. Figs. 53A to 53B are a series of front cross-sectional views showing the connection. In the step 52A to 52B, the figure 53A shows the eight-step change, and the 53B shows the spacer detachment step. The 54th step of the joint step is an exploded perspective view showing the fixture of the present invention. The embodiment of the heat-dissipating element of the present invention shows that the heat-dissipating element of the present invention is a perspective view of the embodiment. The 56A-56C is a series of oblique views showing The contact of the friction and vibration joint step is not the same as that of the frictional vibration jointing step. I# ... Fig. 53A, Fig. 7 is the same as Yan Yan. (7) An example of the movement trajectory of Fig. 57. Fig. 57 is a front sectional view showing the 53α vibration joining step. Another example: ', the friction of Fig. 58 is a front cross-sectional view showing another embodiment of the present invention. The 59th to 59th drawings of the government and the components are the front sectional view of the series. The manufacturing sequence of the heat dissipating component, wherein the 59th figure = Fig. 59 Β, 59C picture is the second form. Like the anger '60th Α ~ 60G picture is a series of front cross-sectional view, showing the manufacturing order of the heat-dissipating components shown in the first, where the sixth 〇A~6〇c picture = The state of the 60th to 60th is the fourth state. The same as the coin 61A to 61E is a series of front cross-sectional views showing the present invention.

2036-5808-PF(Nl).ptd 第172頁 1259117 圖式簡單說明 之金屬元件接合方法夕笛二眘始〗％ ^ ^ 技舶- 士彼拉人止第一貫施型態，其中第61 A〜61 c圖 係顯不兀件接合步驟，第61D圖係顯示接合步驟第6 係顯示間隔物脫離步驟。 圖 一第6:A:62D圖係顯示本發明之金屬元件接合方法之第 四貫施聖其中第62A圖係顯示鰭片配置步驟之正 面圖，第62B、6K圖係顯示基板配置步驟之正面剖面圖， 第62D圖係顯示第62C圖之部分放大圖。 第63Α〜63Β圖為—系列之正面剖面圖，係顯示接續於 第62A~62D圖的步驟，其中第63Α圖係顯示摩擦震動接合步 驟，第63Β圖係顯示間隔物脫離步驟。 ’ 第64 Α〜64Ε圖為一系列之正面剖面圖，係顯示本發明 之散熱兀件的製造方法之第一實施型態之元件接合步 第65A〜65B圖為一系列之正面剖面圖，係顯示接續於 第64A〜64E圖的步驟，其中第65A圖係顯示摩擦震動接合' 驟，第65B圖係顯示間隔物脫離步驟。 σ / 第66Α〜66C圖係顯示特許文獻一所揭示的摩擦震動接 合的順序，其中第66Α、66Β圖為正面剖面圖，第66c 第6 6B圖之側視圖。 σ 4 第67Α〜67D圖為一系列之部分斜視圖，係顯示特許 獻一所揭示的接合治具。 第68Α〜68C圖係顯示第一實施型態之金屬元件接合方 法之摩擦接合的順序，其中第68人、68Β圖為正面剖面&quot;圖 第68C圖為第68Β圖之側視圖。 &quot; 第69Α〜69C圖為一系列之剖面圖，係顯示第68Α〜68(：2036-5808-PF(Nl).ptd Page 172 1259117 Schematic description of the metal element joining method 夕笛二慎始〗 〖% 】 】 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The A to 61 c picture shows the step of joining the pieces, and the 61st picture shows the step of joining the sixth line showing the spacer separation step. Figure 6: A: 62D shows the fourth embodiment of the metal component bonding method of the present invention. Figure 62A shows a front view of the fin configuration step, and the 62B, 6K shows the front side of the substrate configuration step. The cross-sectional view, Fig. 62D shows a partial enlarged view of Fig. 62C. Sections 63 to 63 are front cross-sectional views of the series, showing the steps following Fig. 62A to 62D, wherein Fig. 63 shows the frictional vibration engagement step, and Fig. 63 shows the spacer separation step. '64th to 64th views are a series of front cross-sectional views showing a series of front cross-sectional views of the first embodiment of the method for manufacturing the heat-dissipating member of the present invention. The steps following Fig. 64A to Fig. 64E are shown, wherein Fig. 65A shows the frictional vibration engagement, and Fig. 65B shows the spacer disengagement step. The σ / 66 。 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66 66. σ 4 The 67th to 67th drawings are a series of oblique views showing the joint fixture disclosed in the franchise. The 68th to 68thth drawings show the order of the frictional engagement of the metal element joining method of the first embodiment, wherein the 68th and 68th views are frontal cross-sections. Fig. 68C is a side view of the 68th drawing. &quot; The 69th ~ 69C picture is a series of sectional views, showing the 68th ~ 68 (:

2036-5808-PF(Nl).ptd 第173頁 1259117 蹰式簡單說明 圖之紹元件與銅元件之重合部之塑性變形的過程。 第70圖係顯示第68圖之接合治具之部分放大圖。 第71 A〜71C圖係顯示第二實施型態之金屬元件接合方 法所使用的接合治具，其中第7 1 A圖為斜視圖，第7 1 B、 7 1 C為其他例子的底面視圖。 第72A〜72B圖為一系列之斜視圖，係顯示第二實施型 態之金屬7C件接合方法所使用的接合治具之其他例子。 &amp;第73A:73B圖為—系列之剖面圖，係顯示第二實施型 態之金屬元件接合方法之摩擦接合的步驟。 第74A圖為一斜視圖，係顯示一 之列之剖面圖，=第劃所示 之散熱7L件的製造步驟。 之件Γ,圖、，一系列之剖面® ’係顯示第74A圖所示 之散熱7L件的製造步驟。 ^ 第76圖為一剖面圖 第77圖為一斜視圖 之散熱鰭片。 第78圖為一斜視圖 所使用的支持治具。 第79A〜79C圖為一系列之剖面 〆 之散熱元件的製造步驟。 你顯不第76圖所不 第80A〜80D圖為一系列之剖面圖盥一 〆 第76圖所示之散熱元件的變形例。”斜現圖，係顯不 第8 1 Α〜8 1 Β圖係顯示本發明之 驮…π件之第一實施逛 ，係顯示散敎；# &amp; 一狀热7〇件之另一例子。 ，係顯示第76圖之散熱元件構成中 係顯示第76圖之散熱元件製造時2036-5808-PF(Nl).ptd Page 173 1259117 Brief description of the process The plastic deformation process of the overlap between the component and the copper component. Figure 70 is a partially enlarged view showing the jig of Figure 68. The 71A to 71C drawings show the jig for use in the joining method of the metal member of the second embodiment, wherein the 7 1 A drawing is a perspective view, and the 7 1 B and 7 1 C are bottom views of other examples. Figs. 72A to 72B are a series of oblique views showing other examples of the joining jig used in the metal 7C joining method of the second embodiment. &amp;73A:73B is a cross-sectional view of the series showing the step of frictional engagement of the metal element joining method of the second embodiment. Figure 74A is a perspective view showing a cross-sectional view of a row, = the manufacturing steps of the heat-dissipating 7L member shown in the first drawing. The figure 、, Fig., a series of profiles®' shows the manufacturing steps of the heat-dissipating 7L piece shown in Figure 74A. ^ Figure 76 is a cross-sectional view. Figure 77 is a perspective view of the heat sink fin. Figure 78 is a perspective view of the support fixture used. Figures 79A to 79C show the manufacturing steps of a series of heat dissipation elements of section 〆. You are not shown in Figure 76. Figures 80A to 80D are a series of sectional views. A modification of the heat dissipating member shown in Fig. 76. "Slanting diagram, showing no 8 1 Α ~ 8 1 Β 系 显示 显示 显示 驮 驮 驮 驮 π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π π The structure of the heat dissipating component shown in Fig. 76 shows that the heat dissipating component of Fig. 76 is manufactured.

2036-5808-PF(Nl).ptd 1259117 圃式簡單說明 態，其中第81A圖為斜視圖，第81B圖為分解斜視圖。 第82A圖為第81 A圖沿AA線之剖面圖。 第82B圖為第81 A圖沿BB線之剖面圖。 第82C圖為第81A圖之底部視圖。 第83A〜83B圖為一系列之剖面圖，係顯示第81 A〜81 B圖 之散熱元件的製造方法之一例。 第84A〜84B圖係顯示接續於第83A〜83B圖的步驟，其中 第8 4 A圖為側視圖，第8 4 B圖為要部放大剖面圖。 第85圖為一斜視圖，係顯示接續於第84A〜84B圖的步 驟。 第86A〜86E圖為一系列之剖面圖，係顯示第81 a〜81B圖 之散熱元件的製造方法之另一例。 第87A〜87B圖為一系列之剖面圖，係顯示接續於第 86A〜86E圖的步驟。 第8 8 A〜8 8 B圖為一系列之斜視圖，係分別顯示本發明 之散熱元件的第二實施型態與第三實施型態。 第8 9 Α〜8 9 C圖為一系列之斜視圖，係分別顯示本發明 之散熱元件的第四實施型態至第六實施型態。 第9 Ο A〜9 0 C圖為一系列之斜視圖，係分別顯示本發明 之散熱元件的第七實施型態至第九實施型態。 第9 1 A〜9 1 B圖為一系列之斜視圖，係分別顯示本發明 之散熱元件的第十實施型態與第十一實施型態。 第9 2 A〜9 2 β圖為一系列之斜視圖，係分別顯示本發明 之散熱器的第一實施型態與第二實施型態。2036-5808-PF(Nl).ptd 1259117 A simple description of the mode, in which the 81A is an oblique view and the 81B is an exploded oblique view. Figure 82A is a cross-sectional view taken along line AA of Figure 81A. Figure 82B is a cross-sectional view taken along line BB of Figure 81A. Figure 82C is a bottom view of Figure 81A. Figs. 83A to 83B are a series of sectional views showing an example of a method of manufacturing the heat dissipating member of Figs. 81A to 81B. The drawings of Figs. 84A to 84B show the steps following the drawings of Figs. 83A to 83B, in which Fig. 8 4A is a side view, and Fig. 8 4 B is an enlarged sectional view of an essential portion. Fig. 85 is a perspective view showing the steps following the Figs. 84A to 84B. Figs. 86A to 86E are a series of sectional views showing another example of the method of manufacturing the heat dissipating member of Figs. 81a to 81B. Figures 87A to 87B are a series of cross-sectional views showing the steps following Fig. 86A to 86E. 8 8 A to 8 8 B are a series of oblique views showing the second embodiment and the third embodiment of the heat dissipating member of the present invention, respectively. The eighth embodiment is a series of oblique views showing the fourth to sixth embodiments of the heat dissipating member of the present invention, respectively. The ninth to eighth ninth views are a series of oblique views showing the seventh to ninth embodiments of the heat dissipating member of the present invention, respectively. Figs. 9 1 A to 9 1 B are a series of oblique views showing the tenth embodiment and the eleventh embodiment of the heat dissipating member of the present invention, respectively. The ninth embodiment is a series of oblique views showing the first embodiment and the second embodiment of the heat sink of the present invention, respectively.

2036-5808-PF(Nl).ptd 第175頁 1259117 第9 3 A〜9 3 B圖為一系列之立丨 q j之剖面圖，係顯示實施例1之各 樣品的斷面形狀與尺寸。 】3I合 第93C圖為一杈狀圖，係顯 第94A〜94B圖為一系列之飪仙园 夂衩擬、，Ό呆 擬結果。 J之柱狀圖，係顯示實施例2之模 弟9 5 A〜9 5 C圖為一系歹丨丨，立丨 樣品的斷面形狀與尺寸。。j面圖，係顯示實施例3之各 第9 5 D〜9 5 E圖為一系列之&gt; 4 么一 擬結果。 柱狀圖，係顯示實施例3之模 H Ξ::Γ ΐ圖，係顯示實施例4之模擬結果。 係顯示實施例4之模擬結果。 應用例 第 應用例 第 三應用例 第98圖為一剖面圖，係顯示摩擦震動接合方法之第一 第9 9圖為一剖面圖，係顯示摩擦震動接合方法之 例0 ^ 一 :1:0。圖為一剖面圖’係顯示摩擦震動接合方法之第 ，係顯示摩擦震動接合方法之第 第1 0 1圖為一剖面圖 四應用例。 係顯示摩擦震 第1 0 2 Α〜1 〇 2 Β圖為一系列之剖面圖 動接合方法之第五應用例。 第1 0 3 A〜1 〇 3 β圖為一系列之剖面圖， 動接合方法之第六應用例。 係”、、員不摩擦震 第104圖為-剖面圖，係顯示摩擦震動接合方法之第2036-5808-PF(Nl).ptd Page 175 1259117 Section 9 3 A~9 3 B is a series of cross-sections showing the cross-sectional shape and size of each sample of Example 1. 】 3I and the 93C picture is a smear diagram, showing that the series of 94A~94B are a series of simulations of the Xianyuan, and the results are mixed. The histogram of J shows that the model of Example 2, 9 5 A to 9 5 C, is a series of 歹丨丨, the cross-sectional shape and size of the sample. . The j-side diagram shows that each of the ninth and fifth-orders of the third embodiment is a series of &gt; The histogram is shown in the model of Example 3, H Ξ::Γ, and the simulation results of Example 4 are shown. The simulation results of Example 4 are shown. Application Example Application Example Third Application Example Fig. 98 is a cross-sectional view showing the first ninth drawing of the frictional vibration joining method as a cross-sectional view showing an example of the frictional vibration joining method 0 ^ 1: 1:0 . The figure is a cross-sectional view showing the method of the frictional vibration joining method, and the first embodiment showing the frictional vibration joining method is a cross-sectional view. The system shows the frictional vibration. The first and second smear diagrams are a series of cross-sectional diagrams. The 1 0 3 A~1 〇 3 β diagram is a series of cross-sectional views, a sixth application example of the dynamic bonding method. "", the member does not rub the vibration. Figure 104 is a cross-sectional view showing the method of friction and vibration bonding.

2036-5808-PF(Nl).ptd 第176頁 1259117 圖式簡單說明 七應用例。 第105A〜105B圖為一系列之剖面圖，，係顯示摩擦震 動接合方法之第八應用例。 第106A〜106B圖為一系歹，J之剖面圖，，係顯示摩擦震 動接合方法之第九應用例。 第1 0 7圖為一剖面圖，係顯示摩擦震動接合方法之第 十應用例。 第1 0 8圖為一剖面圖，係顯示摩擦震動接合方法之第 十一應用例。 第1 0 9圖為一剖面圖，係顯示摩擦震動接合方法之第 ¥ 十二應用例。 第1 1 0圖為一剖面圖，係顯示摩擦震動接合方法之第 十三應用例。 第111圖為一剖面圖，係顯示摩擦震動接合方法之第 十四應用例。 第11 2圖為一剖面圖，係顯示摩擦震動接合方法之第 十五應用例。 第11 3圖為一剖面圖，係顯示摩擦震動接合方法之第 十六應用例。 第11 4圖為一剖面圖，係顯示摩擦震動接合方法之第 十七應用例。 第1 1 5圖為一剖面圖，係顯示摩擦震動接合方法之第 十八應用例。 第11 6圖為一剖面圖，係顯示摩擦震動接合方法之第2036-5808-PF(Nl).ptd Page 176 1259117 Schematic description of the seven applications. Figs. 105A to 105B are a series of sectional views showing an eighth application example of the frictional vibration joining method. Figs. 106A to 106B are a series of 歹, a sectional view of J, showing a ninth application example of the frictional vibration joining method. Fig. 107 is a cross-sectional view showing a tenth application example of the frictional vibration joining method. Fig. 10 is a cross-sectional view showing an eleventh application example of the frictional vibration joining method. Fig. 1 9 is a cross-sectional view showing the application example of the friction and vibration joining method. Fig. 1 10 is a cross-sectional view showing a thirteenth application example of the frictional vibration joining method. Fig. 111 is a cross-sectional view showing the fourteenth application example of the frictional vibration joining method. Fig. 11 is a cross-sectional view showing a fifteenth application example of the frictional vibration joining method. Fig. 13 is a cross-sectional view showing a sixteenth application example of the frictional vibration joining method. Fig. 11 is a cross-sectional view showing the seventeenth application example of the frictional vibration joining method. Fig. 1 15 is a cross-sectional view showing an eighteenth application example of the frictional vibration joining method. Figure 11 is a cross-sectional view showing the method of friction and vibration bonding

2036-5808-PF(Nl).ptd 第177頁 1259117 «式簡單說明 十九應用例。 第1 1 7圖為一剖面圖，係顯示摩擦震動接合方法之第 二十應用例。 第1 1 8圖為一剖面圖，係顯示摩擦震動接合方法之第 二Η--應用例。 第1 1 9圖為一剖面圖，係顯示摩擦震動接合方法之第 二十二應用例。 第1 2 0圖為一剖面圖，係顯示摩擦震動接合方法之第 二十三應用例。 第1 2 1圖為一剖面圖，係顯示摩擦震動接合方法之第 二十四應用例。 第1 2 2圖為一剖面圖，係顯示摩擦震動接合方法之第 二十五應用例。 第1 2 3圖為一剖面圖，係顯示摩擦震動接合方法之第 二十六應用例。 第124Α〜124Β圖為一剖面圖，係顯示摩擦震動接合方 法之第二十七應用例。 第125A〜125B圖為一剖面圖，係顯示摩擦震動接合方 法之第二十八應用例 符號說明 1 0 Γ〜鋁元件 102a〜表面 1 0 3〜接合治具 103a〜治具本體 1 0 1〜鋁元件 1 0 2〜銅元件 102b〜段部 1 0 3 ’〜接合治具2036-5808-PF(Nl).ptd Page 177 1259117 «Simple description of the nineteen application examples. Fig. 1 17 is a cross-sectional view showing a twenth application example of the frictional vibration joining method. Fig. 1 18 is a cross-sectional view showing the second example of the frictional vibration bonding method--application example. Fig. 1 19 is a cross-sectional view showing the twenty-second application example of the frictional vibration joining method. Fig. 1 20 is a cross-sectional view showing a twenty-third application example of the frictional vibration joining method. Fig. 1 2 1 is a cross-sectional view showing the twenty-fourth application example of the frictional vibration joining method. Fig. 1 2 2 is a cross-sectional view showing a twenty-fifth application example of the frictional vibration joining method. Fig. 1 2 3 is a cross-sectional view showing the twenty-sixth application example of the frictional vibration joining method. The 124th to 124th drawings are a cross-sectional view showing the twenty-seventh application example of the frictional vibration bonding method. FIGS. 125A to 125B are a cross-sectional view showing the twenty-eighth application example of the frictional vibration bonding method. FIG. 10 Γ to aluminum element 102a to surface 1 0 3 to bonding jig 103a to jig body 1 0 1~ Aluminum element 1 0 2 ~ copper element 102b ~ section 1 0 3 '~ joint fixture

2036-5808-PF(Nl).ptd 第178頁 1259117 圖式簡單說明 103b〜轉動轴 104〜散熱元件 1 0 5〜散熱器材料 105a〜基板 105b〜散熱鰭片 1 0 6〜傳熱板 1 0 6 a〜表面 1 0 7〜接合治具桌 1 0 8〜散熱鰭片支持具 2 0 1〜鋁元件 2 0 Γ〜鋁元件 2 0 2〜銅元件 2 0 2 a〜表面 2 0 2 b〜段部 203〜接合治具 20 3a〜治具本體 203b〜轉動軸 204〜鰭片 204’〜鰭片 204’ ’〜梳子狀鰭片 204a〜基端部 204A〜圓筒形狀的鰭片 204B〜平面波形的鰭&gt; ί 2 0 5〜間隔物 2 0 5 ’〜間隔物 2 0 6〜基板 2 0 6 ’〜基板 206Α〜基板 206B〜半圓筒基板 2 0 7〜反應層 2 1 0〜散熱元件製造用 治具211〜箱型治具本體 2 1 1 a〜螺絲孔 2 1 2〜元件設定部 2 1 3〜壓板 2 1 4〜緊閉螺栓 2 1 5〜基板固定板 215a〜凹槽 2 1 5 b〜螺絲孔 2 1 6〜緊閉螺栓 2 2 0〜間隔物治具 2 3 1〜鋁合金製的薄板: 240〜斷面凹字型鰭片 構成材製造治具 2 5 0〜散熱元件 2 5 0 ’〜散熱元件 2 5 1〜散熱元件2036-5808-PF(Nl).ptd Page 178 1259117 Brief description of the drawing 103b~Rotary shaft 104~ Heat dissipating element 1 0 5~ Heat sink material 105a~ Substrate 105b~ Heat sink fin 1 0 6~ Heat transfer plate 1 0 6 a ~ surface 1 0 7 ~ joint fixture table 1 0 8 ~ heat sink fin support 2 0 1 ~ aluminum component 2 0 Γ ~ aluminum component 2 0 2 ~ copper component 2 0 2 a ~ surface 2 0 2 b~ Segment portion 203 to bonding fixture 20 3a to fixture body 203b to rotating shaft 204 to fin 204' to fin 204'' to comb fin 204a to base end portion 204A to cylindrical fin 204B to plane Waveform fins&gt; ί 2 0 5~ spacers 2 0 5 '~ spacers 2 0 6 to substrate 2 0 6 '~substrate 206Α~substrate 206B~semi-cylindrical substrate 2 0 7~reaction layer 2 1 0~heating element Manufacturing jig 211 to box type jig body 2 1 1 a~ screw hole 2 1 2 to element setting portion 2 1 3 to platen 2 1 4 to tight bolt 2 1 5 to substrate fixing plate 215a to groove 2 1 5 b~ Screw hole 2 1 6~ Tightening bolt 2 2 0~ Spacer fixture 2 3 1~ Aluminum alloy sheet: 240~section concave type fin forming material manufacturing fixture 2 5 0~heat dissipating component 2 5 0 '~heat dissipating component 2 5 1~heat dissipating component

2036-5808-PF(Nl).ptd 第179頁 1259117 圖式簡單說明 252〜散熱元件 254〜散熱元件 3 0 1〜鋁元件 3 0 2〜銅元件 302b〜容器 30 3a〜治具本體 3 0 4〜鋁製的鰭片 3 0 5〜銅製的基板 3 0 6〜間隔物治具 3 0 7〜鋁散熱部 307b〜鰭片 310B〜散熱元件 310D〜散熱元件 310F〜散熱器 310H〜散熱元件 3 2 1〜風扇裝設元件 3 21 〜風扇裝設元件 3 2 1 b〜側板部 3 2 1 d〜小型螺絲孔 3 2 1 f〜小型螺絲 3 2 2〜風扇 322b〜裝設孔 33卜基底 341〜受熱元件 2 5 3〜散熱元件 2 5 5〜散熱元件 3 0 Γ〜鋁元件 302a〜表面 3 0 3〜接合治具 303b〜轉動轴 304a〜夾溝 3 0 5 a〜突起 30 6a〜間隔物 3 0 7a〜鋁製基板 310A〜散熱器 310C〜散熱元件 310E〜散熱器 31.0G〜散熱器 3 2 0〜風扇 3 2 Γ〜風扇裝設元件 3 2 1 a〜上板部 321c〜空氣孔 3 2 1 e〜裝設孔 3 2 1 g〜夾溝 3 2 2 a〜風扇箱型物 33 0〜導熱管 340〜CPU 341a〜嵌合溝2036-5808-PF(Nl).ptd Page 179 1259117 Brief description of the drawing 252~ Heat dissipating element 254~ Heat dissipating element 3 0 1~ Aluminum element 3 0 2~ Copper element 302b~ Container 30 3a~ Fixture body 3 0 4 ~ Aluminum fins 3 0 5 ~ Copper substrate 3 0 6 ~ spacer jig 3 0 7 ~ aluminum heat sink 307b ~ fin 310B ~ heat sink element 310D ~ heat sink element 310F ~ heat sink 310H ~ heat sink element 3 2 1 to fan mounting component 3 21 ~ fan mounting component 3 2 1 b ~ side panel 3 2 1 d ~ small screw hole 3 2 1 f ~ small screw 3 2 2 fan 322b ~ mounting hole 33 base 341 ~ Heat receiving element 2 5 3~ heat dissipating element 2 5 5~ heat dissipating element 3 0 Γ~ aluminum element 302a~ surface 3 0 3~ joining jig 303b~ rotating shaft 304a~ grooving 3 0 5 a~ protrusion 30 6a~ spacer 3 0 7a~ aluminum substrate 310A to heat sink 310C to heat dissipating component 310E to heat sink 31.0G to heat sink 3 2 0 to fan 3 2 to fan mounting member 3 2 1 a to upper plate portion 321c to air hole 3 2 1 e ~ mounting hole 3 2 1 g ~ grooving 3 2 2 a ~ fan box type 33 0 ~ heat pipe 340 ~ CPU 341a ~ fitting groove

2036-5808-PF(Nl).ptd 第180頁 1259117 4 1 6〜緊閉螺栓 430〜鰭片構成材 4 4 0〜斷面凹字型鰭片構成材製造治具 4 5 0〜散熱元件 4 5 0 ’〜散熱元件 4 6 2 a〜表面 463a〜治具本體 街式簡單說明 342〜金屬裝設元件 3 4 3 a〜突起 344a〜裝設孔 3 5 0 ’〜散熱元件 3 6 0 ’〜散熱元件 4 0 2〜銅元件 402b〜段部 4 0 3 ’〜接合治具 403b〜轉動軸 4 0 4〜II片 4 0 5〜間隔物 406〜基板 406a〜另一表面 4 1 1〜箱型治具本體 4 1 2〜元件設定部 4 1 4〜緊閉螺栓 4 1 5 a〜凹槽 3 4 3〜插槽 344〜門形裝設夾 3 5 0〜散熱元件 3 6 0〜散熱元件 4 (Π〜鋁元件 4 0 2 a〜表面 4 0 3〜接合治具 40 3a〜治具本體 403c〜凹槽 404a〜基端部 4 0 5 ’〜間隔物 4 0 6 ’〜基板 4 1 0〜散熱元件製造用治具 4 1 1 a〜螺絲孔 41 3〜壓板 4 1 5〜基板固定板 4 1 5 b〜螺絲孔 4 2 0〜間隔物治具 43卜鋁合金製的薄板材 462〜基板 4 6 3〜接合治具 463B〜接合治具2036-5808-PF(Nl).ptd p.180 1259117 4 1 6~tight bolt 430~fin sheet material 4 4 0~section concave type fin forming material manufacturing fixture 4 5 0~heating element 4 5 0 '~heat dissipating component 4 6 2 a~surface 463a~ fixture body street style simple description 342~metal mounting component 3 4 3 a~protrusion 344a~ mounting hole 3 5 0 '~heating element 3 6 0 '~ Heat dissipating element 4 0 2 to copper element 402b to segment 4 0 3 '~ bonding jig 403b to rotating shaft 4 0 4 to II piece 4 0 5 to spacer 406 to substrate 406a to another surface 4 1 1 to box type Fixture body 4 1 2 - component setting part 4 1 4 ~ tight bolt 4 1 5 a ~ recess 3 4 3 ~ slot 344 ~ gate mounting clip 3 5 0 ~ heat sink element 3 6 0 ~ heat sink element 4 (Π~aluminum element 4 0 2 a~surface 4 0 3~joining fixture 40 3a~ fixture body 403c~groove 404a~base end 4 0 5 '~spacer 4 0 6 '~substrate 4 1 0~ Fixing element for heat-dissipating element manufacturing 4 1 1 a~ Screw hole 41 3~ Platen 4 1 5~ Substrate fixing plate 4 1 5 b~ Screw hole 4 2 0~ Spacer jig 43 Aluminum plate 462 to substrate 4 6 3~ joint treatment 463B~ bonding fixture

2036-5808-PF(Nl).ptd 第181頁 1259117 圖式簡單說明 4 6 3 b〜細條 463C〜接合治具 4 6 3 c〜突起 463D〜接合治具 463d〜突起 464〜鰭片 464a〜基端部 464b〜散熱面 464c〜前端部 5 0 1〜鋁元件 5 0 2〜銅元件 5 0 2 a〜表面 50 2b〜段部 5 0 2 c〜狹縫 5 0 3〜接合治具 503a〜治具本體 503b〜轉動軸 503c〜凹槽 5 0 4〜接合治具 504a〜治具本體 504b〜轉動軸 5 0 6〜散熱元件 5 0 7〜基板 508〜散熱元件 508a〜散熱鰭片 5 0 9〜下部鍛造模具 5 0 9 a〜底部 509b〜内部空間 509c〜開口 5 1 0〜上部鍛造模具 5 1 0 a〜凹部 5 1 1〜切削器具 5 1 1 a〜刀具 5 11 b〜支持軸 5 1 2〜散熱元件 512a〜散熱鰭片 512b〜基板 51 2c〜緣部 5 1 3〜支持器具 5 1 3 a〜狹縫 5 1 4〜散熱元件製造用 治具5 14a〜箱型治具本體 514b〜緊閉螺栓 6 0 1 A〜散熱元件 6 0 1 B〜散熱元件 6 0 1 C〜散熱元件 601D〜散熱元件 6 0 1 E〜散熱元件2036-5808-PF(Nl).ptd Page 181 1259117 Brief description of the diagram 4 6 3 b~ Thin strip 463C~ Joint fixture 4 6 3 c~Protrusion 463D~Joint fixture 463d~Protrusion 464~Fin 464a~Base End portion 464b to heat dissipating surface 464c to front end portion 5 0 1 to aluminum element 5 0 2 to copper element 5 0 2 a to surface 50 2b to segment 5 0 2 c to slit 5 0 3 to bonding jig 503a With body 503b~rotation shaft 503c~groove 5 0 4~joining fixture 504a~ fixture body 504b~rotating shaft 5 0 6~heating element 5 0 7~substrate 508~heating element 508a~heating fin 5 0 9~ Lower forging die 5 0 9 a~ bottom 509b~internal space 509c~opening 5 1 0~upper forging die 5 1 0 a~recess 5 1 1~cutting tool 5 1 1 a~tool 5 11 b~supporting shaft 5 1 2 〜 heat dissipation element 512a to heat dissipation fin 512b to substrate 51 2c to edge portion 5 1 3 to support device 5 1 3 a to slit 5 1 4 to heat sink element manufacturing jig 5 14a ~ box type fixture body 514b ~ tight Closed bolt 6 0 1 A~ Heat dissipating component 6 0 1 B~ Heat dissipating component 6 0 1 C~ Heat dissipating component 601D~ Heat dissipating component 6 0 1 E~ Cooling Item

：：36o808-PF(Nl).ptd 第182頁 1259117 圖式簡單說明::36o808-PF(Nl).ptd Page 182 1259117 Schematic description

601F〜散熱元件 601H〜散熱元件 6 0 1 J〜散熱元件 602〜基板 602b〜表面 6 0 3〜鰭片 60 3a〜基端部 605〜CPU 6 0 6 a〜凹部 60 7a〜間隔部 608〜接合治具 608b〜轉動軸 6 1 0〜間隔物 611〜斷面凹字型鰭片 6 1 2〜散熱元件製造用 6 12a〜元件設定部 6 1 4〜風扇 6 2 0B〜散熱器 7 0 1 a〜嵌合凸部 7 0 2〜銅板 704〜接合治具 704b〜轉動軸 705a〜嵌合凸部 7 0 6〜鋁板 601G〜散熱元件 6 0 1 I〜散熱元件 601K〜散熱元件 602a〜表面 602c〜凸條 6 0 3 ’〜鋁合金製的薄板材 6 0 4〜散熱片 6 0 6〜鰭片構成材 6 0 7〜間隔物治具 607b〜間隙 608a〜接合本體 6 0 9〜共晶層 6 1 0 ’〜間隔物 構成材製造治具 治具 613〜固定工具 6 2 0A〜散熱器 7 0 1〜銅板 7 0 1 b〜嵌合凹部 703〜鋁箔 704a〜治具本體 7 0 5〜鋁板 705b〜叙合凹部 706b〜後合凹部601F~ heat dissipating element 601H~ heat dissipating element 6 0 1 J~ heat dissipating element 602~substrate 602b~ surface 6 0 3~ fin 60 3a~ base end part 605~CPU 6 0 6 a~ recessed part 60 7a~ spacer part 608~ Fixture 608b to rotating shaft 6 1 0 to spacer 611 to cross-section concave fin 6 1 2 to heat dissipating element manufacturing 6 12a to element setting unit 6 1 4 to fan 6 2 0B to heat sink 7 0 1 a ~ fitting convex portion 7 0 2 to copper plate 704 to bonding jig 704b to rotating shaft 705a to fitting convex portion 7 0 6 to aluminum plate 601G to heat dissipating member 6 0 1 I to heat dissipating member 601K to heat dissipating member 602a to surface 602c Rib 6 0 3 '~a thin plate made of aluminum alloy 6 0 4~heat sink 6 0 6 fin structure 6 0 7~ spacer jig 607b~gap 608a~joining body 6 0 9~eutectic layer 6 1 0 '~ spacer material manufacturing jig jig 613 - fixing tool 6 2 0A ~ heat sink 7 0 1 ~ copper plate 7 0 1 b ~ fitting recess 703 ~ aluminum foil 704a ~ jig body 7 0 5 ~ aluminum plate 705b ~ 〗 〖Concave recess 706b ~ rear recess

2036-5808-PF(Nl).ptd 第183頁 708〜銅板 709a〜嵌合凸部 710a〜嵌合凸部 7 1 2〜鋁網體 7 1 4〜銅棒 714b〜嵌合凹部 7 1 5 a〜嵌合凸部 7 1 6〜銅棒 7 1 7 a〜凹溝 7 1 9〜銅製的散熱板 720〜鋁製的蓋板 7 2 2〜不銹鋼板 723a〜治具本體 724〜铭型材 724b〜彼合凹部 725a〜嵌合凸部 726〜台車式内部元件 726b〜千斤頂 7 2 8〜紹型材 7 3 0〜鋁型材 7 3 2〜鋁型材 1259117 圖式簡單說明 707〜銅板 709〜鋁棒 7 1 0〜鋁棒 7 1 1〜銅環 7 1 3〜銅棒 714a〜嵌合凸部 7 1 5〜鋁棒 7 1 5 b〜嵌合凹部 7 1 7〜鋁製的散熱板 7 1 8〜銅製的蓋板 7 1 9 a〜凹溝 7 2 1〜鋁容器 723〜接合治具 723b〜轉動軸 724a〜嵌合凸部 7 2 5〜鋁型材 725b〜嵌合凹部 726a〜滾子 7 2 7〜内檔板 7 2 9〜鋁型材 7 3 1〜鋁型材 7 3 3〜鋁型材 734〜展開制約治具Αχ〜轉動中心 b〜突起 DS〜下表面2036-5808-PF(Nl).ptd page 183 708~copper plate 709a~fitting convex portion 710a~fitting convex portion 7 1 2~aluminum mesh body 7 1 4~copper bar 714b~fitting recess 7 1 5 a ~ fitting protrusion 7 1 6 ~ copper rod 7 1 7 a ~ groove 7 1 9 ~ copper heat sink 720 ~ aluminum cover 7 2 2 ~ stainless steel plate 723a ~ fixture body 724 ~ Ming profile 724b ~凹 凹 recess 725 725 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 726 0 to aluminum rod 7 1 1 to copper ring 7 1 3 to copper rod 714a to fitting convex portion 7 1 5 to aluminum rod 7 1 5 b to fitting recess 7 1 7 to aluminum heat sink 7 1 8 to copper Cover plate 7 1 9 a~groove 7 2 1 to aluminum container 723 to joint jig 723b to rotating shaft 724a to fitting convex portion 7 2 5 to aluminum profile 725b to fitting recess 726a to roller 7 2 7~ Inner baffle 7 2 9 ~ aluminum profile 7 3 1 ~ aluminum profile 7 3 3 ~ aluminum profile 734 ~ unfolding control fixture Αχ ~ rotation center b ~ protrusion DS ~ lower surface

203c-580S-PF(Nl).ptd 第184頁 1259117203c-580S-PF(Nl).ptd Page 184 1259117

2036-5808-PF(Nl).ptd 第185頁2036-5808-PF(Nl).ptd第185页

Claims (1)

1259117 _案號 92121608 六、申請專利範圍 k奢丨甩1曰過(更)海_$ ----------wnirmmmm^ _ I 1. 一種金屬元件接合方法，包含： 提供複數個金屬元件，依照熔點的高低順序相互重合 排列；以及 將一沿圓周轉動的圓板狀接合治具的圓周面置於該些 金屬元件的重合部，使該接合治具的圓周面壓入該些金屬 元件中熔點最高的金屬元件的表面，並使該圓周面沿著該 熔點最高的金屬元件的表面移動，而使該些金屬元件相互 接合。 2. —種金屬元件接合方法，包含： 提供二個熔點相異的金屬元件相互重合排列；以及 將一沿圓周轉動的圓板狀接合治具的圓周面置於該些 金屬元件的重合部，使該接合治具的圓周面壓入該些金屬 元件中熔點較高的金屬元件的表面，並使該圓周面沿著該 熔點較高的金屬元件的表面移動，而使該些金屬元件相互 接合。 3. —種金屬元件接合方法，包含： 提供一銅元件與一鋁元件相互重合排列；以及 將一沿圓周轉動的圓板狀接合治具的圓周面置於該銅 元件與該鋁元件的重合部，使該接合治具的圓周面壓入該 銅元件的表面，並使該圓周面沿著該銅金屬元件的表面移 動，而使該銅元件與該铭元件相互接合。 4. 如申請專利範圍第3項所述之金屬元件接合方法， 其中接合時，該接合治具轉動的圓周速率R(m/m in.)係由 下式（A )求出：1259117 _Case No. 92121608 VI. Application for patent scope k extra 曰1曰(more) sea_$ ----------wnirmmmm^ _ I 1. A method of joining metal components, including: providing a plurality of Metal elements are arranged in line with each other in accordance with the order of the melting point; and a circumferential surface of a circumferentially rotating disc-shaped joining jig is placed on the overlapping portions of the metal members, so that the circumferential surface of the bonding jig is pressed into the portions The surface of the metal element having the highest melting point among the metal elements, and moving the circumferential surface along the surface of the metal element having the highest melting point, thereby joining the metal elements to each other. 2. A method of joining metal components, comprising: providing two metal elements having different melting points arranged in a mutually coincident arrangement; and placing a circumferential surface of a circumferentially rotating disk-shaped bonding fixture on a overlapping portion of the metal components, Pressing the circumferential surface of the bonding fixture into the surface of the metal element having a higher melting point, and moving the circumferential surface along the surface of the metal element having a higher melting point, thereby bonding the metal elements to each other . 3. A metal component bonding method comprising: providing a copper component and an aluminum component in a mutually coincident arrangement; and placing a circumferential surface of a circumferentially rotating disk-shaped bonding fixture between the copper component and the aluminum component And pressing the circumferential surface of the bonding fixture into the surface of the copper component and moving the circumferential surface along the surface of the copper metal component to engage the copper component with the inscription component. 4. The metal component joining method according to claim 3, wherein the circumferential rate R (m/m in.) of the joining jig rotation is determined by the following formula (A): 2036-5808-PFl(Nl).ptc 第186頁 1259117 曰 修正 ----案號 92121608 六、申請專利範圍 25 0 ^ 20 0 0 ...............(A)。 5 -如申請專利範圍第3項所 其中接合時，該接合治具在节銅、屬70件接合方法， 係由下式（B)求出： 。銅7°件的表面壓入量α(ιη) 〇.〇3xt^a^0.3x ................ 其：t為該重合部中的該銅元件的厚度⑷。 •如申請專利範圍第4項所述之 豆中接入咗#拉人/ 貝所述之金屬元件接合方法， ，、中接3時，该接合治具在該銅元 係由下式（B)求出： 午的表面壓入ϊα(ιη) _ 〇· 〇3x t ^ a ^0. 3x t............…⑻ 其中t為該重合部中的該銅元件的厚度（m)。 其中7接Π請：：2第3項所述之金屬元件接合方法， 行進速：vr广：广具沿者該銅金屬元件的表面移動的 灯進速率V(m/min·)係由下式（c)求出： 0. 1 ^R/(5. ο X 1 07 X t2) -............... 其中R為接合時該接合治具的圓周速 t為該重合部中的該銅元件的厚度（m) ^如申請專利範圍第4項所述之金屬元件接合方法， 合時’該接合治具沿著該銅金屬元件的表面移動的 灯進速率v(m/m!n·)係由下式（C)求出： 〇. 1 ^R/(5. 〇χ ι〇7χ t2) .................. 其中R為接合時該接合治具的圓周速率（m/min.); t為該重合部中的該銅元件的厚度（m)。 9 ·如申請專利範圍第5項所述之金屬元件接合方法，2036-5808-PFl(Nl).ptc Page 186 1259117 曰Revision----Case No. 92121608 VI. Patent application scope 25 0 ^ 20 0 0 ............... A). 5 - As in the case of the third application of the patent application, the joining fixture is obtained by the following formula (B): The surface indentation amount of copper 7° member α(ιη) 〇.〇3xt^a^0.3x ................: t is the copper component in the overlapping portion Thickness (4). • In the case of the metal component joining method described in item 4 of the patent application, which is described in claim 4, when the middle is connected to 3, the joint fixture is in the copper element system by the following formula (B). Find: The surface of the afternoon is pressed into ϊα(ιη) _ 〇· 〇3x t ^ a ^0. 3x t...............(8) where t is the copper in the overlap The thickness of the component (m). Among them, there are 7 joints: 2, the metal component joining method described in item 3, the traveling speed: vr wide: the lamp feed rate V (m/min·) of the surface movement of the copper metal component is Equation (c) finds: 0. 1 ^R/(5. ο X 1 07 X t2) -............... where R is the circumference of the joint fixture The speed t is the thickness (m) of the copper component in the overlapping portion. The metal component bonding method according to claim 4, wherein the bonding fixture moves along the surface of the copper metal component. The rate v (m/m!n·) is obtained by the following formula (C): 〇. 1 ^R/(5. 〇χ ι〇7χ t2) ............. Where R is the circumferential velocity (m/min.) of the joining fixture at the time of joining; t is the thickness (m) of the copper member in the overlapping portion. 9) The method of joining metal components as described in claim 5, 2036-5808-PFl(Nl).pt 第187頁 1259117 案號 92121608 六、申請專利範圍 其時，該接合治具沿著該鋼金屬元件的表面移動的 灯進連率v(m/min·)係由下式（c)求出： °· 1 ^R/(5. Οχ 1〇7χ t2) .................. 其中/為接合時該接合治具的圓周速率（m/min ); t為邊重合部中的該銅元件的厚度（以）。 I 0 ·如申请專利範圍第6項所述之金屬元件接合方法， 二、&amp; ί合日守，該接合治具沿著該铜金屬元件的表面移動的 行進速率V(m/mi η.)係由下式（C)求出： 〇. 1 ^R/(5. Ox l〇7x ................... 其中R為接合時該接合治具的圓周速率（m/min·); t為該重合部中的該銅元件的厚度（^)。 II · 一種散熱元件，包含： 銘質散熱器（heat sink)材料，具有一基板、與立 設於該基板之一表面上的散熱鰭片；以及 一銅質導熱板，在該基板的另一表面上，與該基板相 互重合而接合於該基板，其中該銅質導熱板與該基板的接 合方法係使用記載於申請專利範圍第3至丨〇項的任一項之 金屬元件接合方法。 1 2 ·如申請專利範圍第丨丨項所述之散熱元件，其中該 散熱器材料係使用紹擠型而成形。 1 3 · —種散熱元件的製造方法，包含： 提供一鋁質散熱器（heat sink)材料，具有一基板、 與立設於該基板之一表面上的散熱鰭片，並配置一銅質導 熱板’重合於該基板的另一表面上；以及2036-5808-PFl(Nl).pt Page 187 1259117 Case No. 92121608 VI. In the patent application scope, the lamp penetration rate v (m/min·) of the joint fixture moving along the surface of the steel metal component It is obtained by the following formula (c): °· 1 ^R/(5. Οχ 1〇7χ t2) .................. where / is the joint at the time of joining The circumferential velocity of the jig (m/min); t is the thickness of the copper component in the edge overlap. I 0 · The metal element bonding method as described in claim 6 of the patent application, 2, &; 日 , ,, the traveling speed of the bonding fixture along the surface of the copper metal element V (m / mi η. ) is obtained by the following formula (C): ^. 1 ^R/(5. Ox l〇7x ................... where R is the joint at the time of joining The circumferential speed of the jig (m/min·); t is the thickness (^) of the copper component in the overlapping portion. II. A heat dissipating component comprising: a heat sink material having a substrate, And a heat dissipating fin erected on a surface of the substrate; and a copper heat conducting plate on the other surface of the substrate, the substrate is overlapped with the substrate and bonded to the substrate, wherein the copper heat conducting plate and the copper heat conductive plate The bonding method of the substrate is the metal element bonding method according to any one of claims 3 to 3. The heat dissipating component according to claim 2, wherein the heat sink material is Formed using a squeeze type. 1 3 · A method of manufacturing a heat dissipating component, comprising: providing an aluminum heat sink material A substrate, and stand on the surface of one of the substrates of the cooling fins, and a copper heat conductive plate disposed 'superposed on the other surface of the substrate; and 2036-5808-PFl(Nl).ptc 第188頁 12591172036-5808-PFl(Nl).ptc Page 188 1259117 修正 一 使用記載於申請專利範圍第3至1 0項的任一項之金屬 元件接合方法，接合該基板與該銅質導熱板。 1 4 · 一種金屬元件接合方法，包含： 提供複數個金屬元件，依照熔點的高低順序相互重合 排列；以及 匕在該些金屬元件中熔點最高的金屬元件之一側，對該 些金屬件之重合部加熱及加壓，而使該些金屬元件相互 接3 ’其中對該些金屬元件之重合部加熱及加壓時，係將 〜圓周轉動的圓板狀接合治具的圓周面壓入該些金屬元 件中^點最高的金屬元件的表面，並使該圓周面沿著該熔 點最同的金屬元件的表面移動，且該接合治具的圓周面 上’形成有相對於轉動方向輕微傾斜、且連續的凹槽。 、1 5 ·如申請專利範圍第1 4項所述之金屬元件接合方 、 中該些凹槽之間的平面部的寬度為wl(min)、該些凹 槽的寬度為w2(mm)，並符合以下條件·· 1 $wl $ 5、且1 $w2$3、且 0 6 7 $wl/w2$5.〇〇。 1 6 ·如申请專利範圍第1 4項所述之金屬元件接合方 炎其中該些凹槽相對於該接合治具的轉動方向傾斜的角 二為〇 · 5〜2 · 〇。，且該接合治具的整個圓周面中，至少形 有二條該些凹槽。 、1 7 ·如申清專利範圍第1 5項所述之金屬元件接合方 ，、，其中該些凹槽相對於該接合治具的轉動方向傾斜的角 度為〇·5〜2·0。，且該接合治具的整個圓周面中，至少形成 有一條該些凹槽。Correction 1 The metal element bonding method according to any one of claims 3 to 10 of the patent application is bonded to the substrate and the copper heat-conducting plate. 1 4 · A metal component bonding method comprising: providing a plurality of metal components, which are arranged one another in accordance with a sequence of melting points; and a side of one of the metal components having the highest melting point among the metal components, and the metal components are overlapped Heating and pressurizing, and connecting the metal elements to each other 3', wherein when the overlapping portions of the metal elements are heated and pressurized, the circumferential surface of the circularly-shaped circular joint jig is pressed into the portions a surface of the metal component having the highest point of the metal component, and moving the circumferential surface along the surface of the metal element having the same melting point, and the circumferential surface of the bonding fixture is formed to be slightly inclined with respect to the rotation direction, and Continuous grooves. The joint of the metal component according to Item 14 of the patent application, wherein the width of the flat portion between the grooves is wl (min), and the width of the grooves is w2 (mm), And meet the following conditions: · 1 $wl $ 5, and 1 $w2$3, and 0 6 7 $wl/w2$5.〇〇. The metal element jointing method according to the invention of claim 14 wherein the angles of the grooves are inclined with respect to the rotation direction of the joint jig are 〇 · 5 〜 2 · 〇. And at least two of the grooves are formed in the entire circumferential surface of the joint jig. The joint of the metal elements according to the fifteenth aspect of the patent application, wherein the angles of the grooves are inclined with respect to the rotation direction of the joint jig is 〇·5~2·0. And at least one of the grooves is formed in the entire circumferential surface of the joint jig. 2036-5808-PFl(Nl).ptc 第189買 12591172036-5808-PFl(Nl).ptc 189 buy 1259117 18.如申請專利範圍第14、15、16或17項所述之金屬 元件接合方法，其中該些凹槽的深度為〇 . H . 2mm。 1 9 · 一種金屬元件接合方法，包含： 一第一步驟，將一第一金屬元件與熔點高於該第一金 屬元件的熔點的一第二金屬元件重合；以及 ^ 一第二步驟’由該第二金屬元件向該第一金屬元件加 壓並加熱，而使該第一金屬元件與該第二金屬元件相互接 合，其中該第二步驟時，係將一會轉動的圓板狀接合治具 的板面壓在該第二金屬元件，並使該板面沿著該第二二^ 元件的表面移動。 20 · —種散熱元件，藉由如申請專利範圍第丨9項所述 之金屬元件接合方法，將上述第一金屬元件構成、斷面呈 現匚字形的板材的複數個散熱鰭片，接合於上述第二金屬 元件構成的基板。 ^ 21. —種散熱元件，藉由如申請專利範圍第19項所述 之金屬元件接合方法’將上述第一金屬元件構成、斷面裏 現L字形的板材的複數個散熱鰭片，接合於上述第二金屬 元件構成的基板。 22 —種散熱元件，藉由如申請專利範圍第19項所述 將上述第一金屬元件構成的複數個 接合於上述第二金屬元件構成的 2 3 . —種散熱元件，藉由如申請專利範 9 述 之金屬元件接合方法， 波形（corrugate)鰭片， 基板。18. The method of joining metal members according to claim 14, wherein the depth of the grooves is 〇. H. 2 mm. A metal component bonding method comprising: a first step of superposing a first metal component with a second metal component having a melting point higher than a melting point of the first metal component; and a second step 'by The second metal component pressurizes and heats the first metal component to engage the first metal component and the second metal component, wherein the second step is to rotate the disk-shaped joint fixture The plate surface is pressed against the second metal component and the plate surface is moved along the surface of the second component. A heat dissipating component, wherein the plurality of heat dissipating fins of the first metal component and having a U-shaped cross section are joined to the above-mentioned metal component by the metal component bonding method according to claim 9 A substrate composed of a second metal component. ^ 21. A heat dissipating component, the plurality of heat dissipating fins of the L-shaped plate material of the first metal component and the cross-section of the L-shaped plate are joined by the metal component joining method as described in claim 19 A substrate composed of the second metal element. A heat dissipating component, wherein a plurality of the first metal components are bonded to the second metal component as described in claim 19, and the heat dissipating component is formed by 9 Metal element bonding method, corrugate fin, substrate. 第19〇頁 1259117 案號 92121608 曰 修正 六、申請專利範圍 屬元件構成的基板。 散熱柱狀體，接合於上述第 ΙΒ1Ϊ 2036-5808-PFl(Nl).ptc 第191頁Page 19 Page 1259117 Case No. 92121608 修正 Amendment VI. Patent Application Scope A substrate consisting of components. The heat-dissipating column is joined to the above-mentioned first Ϊ1Ϊ 2036-5808-PF1(Nl).ptc第191页
TW92121608A 2002-08-29 2003-08-07 Method of joining members, method of joining metallic members, radiation member, process for manufacturing the same, jig for the manufacturing and heat sink TWI259117B (en)

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JP2003162488A JP4211499B2 (en) 2003-06-06 2003-06-06 Metal member joining method
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