TWI254790B - Sealed vacuum sampling chamber for organic volatile substance on large surface area object - Google Patents

Abstract

The present invention discloses a sampling chamber that can be attached to a large surface area object by means of action caused by negative pressure and atmosphere pressure to carry out inspection of organic volatile substance on the surface of the object, which comprises, in construction, a housing having a top side in which a carrier gas entrance hole and a carrier gas collection hole are defined and a bottom side defining an opening having an outer circumference along which a circumferential rim is formed and extends outward. The rim defines a vacuum channel and an evacuation hole, wherein the vacuum channel is in communication with the evacuation hole.

Description

1254790 五、發明說明（1) 【發明所屬之技術領域】 本發明係有關於一種有機揮發物真空密封取樣室，特 別是指一種可以使用在大面積物體表面之有機揮發物真空 密封取樣室，也可以應用於不易取得較小樣品的物體。 【先前技術】 隨著摩爾定律（Moor’ s law)所預測，所有的電子元 件的特徵尺寸日趨縮小，因此生產過程中任何微小雜質如 微粒子、有機物與化學污染等，都將有可能造成良率 (y i e 1 d )降低，而且隨著進入深次微米的製程，雜質相對 影響的程度也日益嚴重，所以對雜質的監控係為各加半導 體廠的無塵室之重要課題，但有形的污染物如微塵、資料 文件上的碳粉等皆可以於進入無塵室前係管制或由洗塵室 可去除，或藉由機械手臂等較無污染源之機械自動化處理 ，但，有機揮發物，是一種不易管制之無形污染物，因此 有機揮發物污染成為新半導體工藝中對於無塵室的潔淨度 嚴格控制的物件。 單就半導體製程於生產元件時一些必備的物質而言， 例如，潔淨室建材、製程用材料、晶圓儲存用盒（P 〇 d )和 卡匣（cassette)、傳輸工具等會放出大量的揮發性有機分 子，未反應的單體（monomer)、寡聚合體（oligomer)與微 量的塑膠添加劑，而產生有機分子附著在晶圓表面，將使 製程參數改變，造成元件的良率降低。因此，在對有機揮 發物的監控過程中，如何有效的從被監控物體中取得有效 的樣品，是進行有機揮發物監控分析的第一步，在習知的1254790 V. INSTRUCTION DESCRIPTION OF THE INVENTION (1) Technical Field of the Invention The present invention relates to an organic volatile vacuum sealed sampling chamber, and more particularly to a vacuum sealed sampling chamber for organic volatiles that can be used on a large surface of an object. Can be applied to objects that are difficult to obtain smaller samples. [Prior Art] With the prediction of Moor's law, the feature size of all electronic components is shrinking, so any tiny impurities such as microparticles, organic matter and chemical pollution in the production process will likely cause yield. (yie 1 d ) is reduced, and with the deep micron process, the degree of relative influence of impurities is becoming more and more serious. Therefore, monitoring of impurities is an important issue for clean rooms of semiconductor factories, but tangible pollutants. Such as dust, toner on the data file, etc. can be controlled before entering the clean room or can be removed by the washing room, or by mechanical automation such as mechanical arm and other non-polluting sources, but organic volatiles are not easy. Intangible pollutants are regulated, so organic volatile contamination becomes an object of strict control of the cleanliness of clean rooms in the new semiconductor process. For semiconductor devices, there are some essential substances in the production of components. For example, clean room building materials, process materials, wafer storage boxes (P 〇d ) and cassettes, transfer tools, etc. will release a large amount of volatilization. Organic molecules, unreacted monomers, oligomers and traces of plastic additives, which cause organic molecules to adhere to the surface of the wafer, will change process parameters and cause component yield to decrease. Therefore, in the process of monitoring organic volatiles, how to effectively obtain effective samples from the monitored objects is the first step in the monitoring and analysis of organic volatiles.

1254790 五、發明說明（2) 技藝裡，係針對將欲進入無塵室中之物品，進行切割形成 一特定體積後，置入具一定體積的樣品室中使其釋放揮發 物，然後收集樣品室内的氣體進行分析，來判斷該物品進 入無塵室後是否會有引入有機揮發物污染的潛在危險性。1254790 V. INSTRUCTIONS (2) In the art, the articles to be inserted into the clean room are cut to form a specific volume, placed in a sample chamber of a certain volume to release volatile matter, and then the sample chamber is collected. The gas is analyzed to determine if there is a potential for contamination of the organic volatiles after the item enters the clean room.

但是，這樣的分析方式是屬於破壞性的分析方式，對 如膽體這樣大面積的物體，就無法置入該樣品室内，且對 不易切割或與地面呈角度之物體表面進行揮發物分析，將 造成分析上的困難。因此，本發明係在針對上述問題而提 出一種大面積物體表面有機揮發物真空密封取樣室，來解 決上述之問題。 【發明内容】 本發明之主要目的，在於提供一種大面積物體表面有 機揮發物真空密封取樣室，其能夠對大面積的物體表面進 行揮發物分析。 本發明之另一目的，在於提供一種大面積物體表面有 機揮發物真空密封取樣室，其能避免含有揮發性物質之物 品進入無塵室，所可能造成的製程參數改變。However, such an analysis method is a destructive analysis method, and a large-area object such as a biliary body cannot be placed in the sample chamber, and volatile matter analysis is performed on the surface of an object that is not easily cut or angled from the ground. Caused analytical difficulties. Accordingly, the present invention has been made in view of the above problems to provide a vacuum sealed sampling chamber for organic volatiles on a large area surface to solve the above problems. SUMMARY OF THE INVENTION The main object of the present invention is to provide a vacuum sealed sampling chamber for organic volatile matter on a large area of an object, which is capable of performing volatile analysis on a large surface of an object. Another object of the present invention is to provide a vacuum sealed sampling chamber for organic volatiles on a large area of an object, which can avoid changes in process parameters that may be caused by articles containing volatile substances entering the clean room.

本發明之再一目的，在於提供一種大面積物體表面有 機揮發物真空密封取樣室，其能避免含有揮發性物質之物 品進入無塵室，所可能造成的元件良率降低。 本發明之又一目的，在於提供一種大面積物體表面有 機揮發物真空密封取樣室，其能夠無使用膠帶而在建築物 的天棚或牆壁上安全的使用。 為達上述目的，本發明提供一種大面積物體表面有機Still another object of the present invention is to provide a vacuum sealed sampling chamber for organic volatiles on a large area of an object, which can prevent articles containing volatile substances from entering the clean room, which may result in a decrease in component yield. It is still another object of the present invention to provide a vacuum sealed sampling chamber for organic volatiles on a large area of an object which can be safely used on a ceiling or wall of a building without the use of tape. In order to achieve the above object, the present invention provides an organic surface of a large area.

第6頁 1254790 五、發明說明（3) 揮發物真空密封取樣室，其主要的結構包括一上端具有至 少一載氣進入孔與一載氣收集孔，以及下端具有一於進行 有機揮發物量測時與一待測物接觸之開口的取樣室殼體； 一由該開口之外周緣向外延伸所形成凸緣；一真空槽，其 係設於該凸緣底面上，且其一端為一開放端；以及一設於 該凸緣上，且該真空抽氣孔與該真空槽相連通的真空抽氣 孔。 茲為使 貴審查委員對本發明之結構特徵及所達成之 功效更有進一步之瞭解與認識，謹佐以較佳之實施例圖及 配合詳細之說明，說明如後： 【實施方式】 本發明係為一種大面積物體表面有機揮發物真空密封 取樣室，其無傳統取樣室對較大面積物品取樣不便利之問 題，且能夠無使用膠帶而吸附在與地面間具有角度之平面 上，免除膠帶的損耗與可能帶來的污染。 請參閱第一圖，係為本發明之結構示意圖，如圖所示 本發明大面積物體表面有機揮發物真空密封取樣室構造包 括一取樣室殼體1 0，其下端具有一開口 1 2，該開口 1 2之外 周緣向外延伸形成一凸緣1 4，而取樣室殼體1 0之上端具有 一載氣進入孔1 6與一載氣收集孔1 8 ;凸緣1 4與開口 1 2同側 的面上設有兩個分別環繞凸緣1 4之密封圈2 0、2 2，其中該 兩個密封圈2 0、2 2構成一具開放端之真空槽2 4，且該兩個 密封圈2 0、2 2材質係可為具有彈性之橡膠，凸緣1 4上具有 一連通至真空槽2 4之真空抽氣孔2 6 ;另一方面，為使氣流Page 6 1254790 V. INSTRUCTIONS (3) Volatile vacuum sealed sampling chamber, the main structure includes an upper end having at least one carrier gas inlet hole and a carrier gas collecting hole, and a lower end having a measurement for organic volatile matter a sampling chamber housing having an opening in contact with an object to be tested; a flange extending outwardly from a periphery of the opening; a vacuum chamber attached to the bottom surface of the flange and having an open end And a vacuum suction hole disposed on the flange and the vacuum suction hole communicates with the vacuum groove. For a better understanding and understanding of the structural features and the achievable effects of the present invention, the following description of the preferred embodiments and the detailed description are as follows: [Embodiment] The present invention is A large-volume surface organic volatile vacuum sealed sampling chamber, which has no problem of sampling a large area object without a conventional sampling chamber, and can be adsorbed on a plane having an angle with the ground without using tape, thereby eliminating the loss of the tape. With possible pollution. Please refer to the first drawing, which is a schematic structural view of the present invention. As shown in the figure, the organic volatile volatile vacuum sampling chamber structure of the large-area object surface of the present invention comprises a sampling chamber housing 10 having an opening 12 at the lower end thereof. The outer periphery of the opening 1 2 extends outward to form a flange 14 , and the upper end of the sampling chamber housing 10 has a carrier gas inlet hole 16 and a carrier gas collecting hole 18; the flange 14 and the opening 1 2 The two sides of the same side are provided with two sealing rings 20, 2 2 respectively surrounding the flange 14. The two sealing rings 20, 2 2 form an open end vacuum groove 24, and the two The sealing ring 20, 2 2 material may be an elastic rubber, and the flange 14 has a vacuum suction hole 6 6 connected to the vacuum groove 24; on the other hand, for the air flow

1254790 五、發明說明（4) 能夠接近與待側物之界面邊緣，於取樣室殼體1 0上端内側 壁更可設置有一導流裝置2 8。 請參閱第二圖，係為本發明之實際應用的示意圖，如 圖所示，首先，將取樣室殼體1 0置於待側物3 0之表面上， 並使開口 1 2面向該待測物之欲進行量測區域表面，此時兩 密封圈2 0、2 2與待側物3 0表面接觸，使得真空槽2 4與待側 物3 0之表面形成封閉空間3 2，然後由真空抽氣孔2 6抽器， 使真空室2 4成為負壓狀態，此時，在外界大氣壓力下，將 使取樣室殼體1 0吸附於待側物3 0表面，如此，即可避免習 知取樣室在進行與地面呈角度之物品，如建築物的天棚或 牆壁上之量測時，需利用如膠帶將取樣室黏附於待測物上 之困擾，且如果在無塵室中使用如膠帶類之產品，其所含 揮發物質將可能造成的污染，接著，由載氣進入孔1 6通入 一潔淨空氣，使該潔淨空氣進入取樣室殼體1 〇，並沿著導 流裝置2 8貼近待測物3 0表面，然後，由載氣收集孔1 8將已 含帶有機揮發物之潔淨空氣收集，最後使用相應的分析儀 器如不銹鋼採樣筒/氣相層析質譜儀法進行分析。 以上所述者，僅為本發明一較佳實施例而已，並非用 來限定本發明實施之範圍，故舉凡依本發明申請專利範圍 所述之形狀、構造、特徵及精神所為之均等變化與修飾， 均應包括於本發明之申請專利範圍内。 【圖號對照說明】 1 0取樣室殼體 12開口1254790 V. INSTRUCTION DESCRIPTION (4) The edge of the interface with the object to be side can be accessed, and a flow guiding device 28 can be disposed on the inner wall of the upper end of the sampling chamber housing 10. Please refer to the second figure, which is a schematic diagram of the practical application of the present invention. As shown in the figure, first, the sampling chamber housing 10 is placed on the surface of the object to be side 30, and the opening 12 is faced to the test. The object is intended to measure the surface of the area, at which time the two sealing rings 20, 2 2 are in contact with the surface of the object to be side 30, so that the vacuum groove 24 forms a closed space 3 2 with the surface of the object to be side 30, and then is vacuumed. The suction hole is 6 6 and the vacuum chamber 24 is brought into a negative pressure state. At this time, under the external atmospheric pressure, the sampling chamber housing 10 is adsorbed to the surface of the object to be side 30, so that conventional knowledge can be avoided. When the sampling room is measuring the angle of the ground, such as the ceiling or wall of the building, it is necessary to use the tape to adhere the sampling chamber to the object to be tested, and if used in a clean room, such as tape A product of the type that contains the volatile substances that may cause pollution. Then, a clean air is introduced from the carrier gas inlet hole 16 to allow the clean air to enter the sampling chamber casing 1 and along the flow guiding device 28 Close to the surface of the object to be tested 30, and then, the carrier gas collection hole 18 will contain the organic wave The clean air of the hair is collected and finally analyzed using a corresponding analytical instrument such as a stainless steel sampling cylinder/gas chromatography mass spectrometer. The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, so that the shapes, structures, features, and spirits described in the claims of the present invention are equally varied and modified. All should be included in the scope of the patent application of the present invention. [Figure number comparison description] 1 0 sampling chamber housing 12 opening

1254790 五、發明說明（5) 1 4凸緣 1 6載氣進入孔 1 8載氣收集孔 2 0密封圈 2 2密封圈 2 4真空槽 2 6真空抽氣孔 2 8導流裝置 3 0待側物 3 2封閉空間1254790 V. Invention description (5) 1 4 flange 1 6 carrier gas inlet hole 1 8 carrier gas collection hole 2 0 sealing ring 2 2 sealing ring 2 4 vacuum chamber 2 6 vacuum suction hole 2 8 flow guiding device 3 0 side Object 3 2 enclosed space

第9頁 1254790Page 9 1254790

Claims (1)

1254790 六、申請專利範圍 1 •一種大面積物體表面有機揮發物真空密封取樣室，其 包括有： 一取樣室殼體，其上端包含有至少一載氣進入孔與一 載氣收集孔，下端具有一開口 ，其中該開口係於進 行有機揮發物量測時與該待測物接觸； 一凸緣，其係由該開口之外周緣向外延伸所形成； 一真空槽，其係設於該凸緣底面上，且其一端為一開 放端；以及 一真空抽氣孔，其係設於該凸緣上，且該真空抽氣孔 與該真空槽相連通。 g 2 ·如申請專利範圍第1項所述之大面積物體表面有機揮 發物真空密封取樣室，其中該真空槽係由兩個位於該 凸緣底面之密封圈與該凸緣底面所構成。 3 ·如申請專利範圍第2項所述之大面積物體表面有機揮 發物真空密封取樣室，其中該密封圈之材質係可為具 有彈性之橡膠。 4 ·如申請專利範圍第1項所述之大面積物體表面有機揮 發物真空密封取樣室，其中該取樣室殼體上方内側壁 設有一導流裝置，來使由該載氣進入孔之氣流能更貼 近待測物表面。 · 5 ·如申請專利範圍第1項所述之大面積物體表面有機揮 發物真空密封取樣室，其中該載氣為一潔淨空氣。1254790 VI. Patent Application Range 1 • A vacuum sealed sampling chamber for organic volatiles on a large area surface, comprising: a sampling chamber housing having an upper end containing at least one carrier gas inlet hole and a carrier gas collection hole, and a lower end having An opening, wherein the opening is in contact with the object to be tested when performing organic volatile measurement; a flange formed by extending outwardly from a periphery of the opening; a vacuum groove being attached to the protrusion The bottom surface of the rim has an open end at one end thereof; and a vacuum venting hole is disposed on the flange, and the vacuum venting hole communicates with the vacuum sump. g 2 The vacuum sealed sampling chamber for the large-area surface organic volatile material according to claim 1, wherein the vacuum chamber is composed of two sealing rings on the bottom surface of the flange and the bottom surface of the flange. 3. A vacuum-sealed sampling chamber for a large-area surface organic volatile material as described in claim 2, wherein the material of the sealing ring is a rubber having elasticity. 4. The vacuum-sealing sampling chamber for the organic volatile matter on the surface of the large-area object as described in claim 1, wherein the inner side wall of the upper portion of the sampling chamber is provided with a flow guiding device to enable the airflow from the carrier gas to enter the hole. Closer to the surface of the object to be tested. · 5 · The large-area surface organic volatile vacuum sealed sampling chamber according to item 1 of the patent application, wherein the carrier gas is a clean air. 第11頁Page 11