TWI250270B - Optical device testing apparatus - Google Patents

Optical device testing apparatus Download PDF

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Publication number
TWI250270B
TWI250270B TW93127078A TW93127078A TWI250270B TW I250270 B TWI250270 B TW I250270B TW 93127078 A TW93127078 A TW 93127078A TW 93127078 A TW93127078 A TW 93127078A TW I250270 B TWI250270 B TW I250270B
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Taiwan
Prior art keywords
positioning portion
mirror
component
optical
measuring device
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TW93127078A
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Chinese (zh)
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TW200609502A (en
Inventor
Chen-Yuan Hsu
Chin-Hung Huang
Hsi-Kuen Chen
Yu-Hsien Fang
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Prodisc Technology Inc
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Priority to TW93127078A priority Critical patent/TWI250270B/en
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Publication of TW200609502A publication Critical patent/TW200609502A/en

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  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

An optical device testing apparatus comprises a base, a first reflection assembly, a second reflection assembly, a third reflection assembly and a bearing element. The base has first to sixth location parts. The first reflection assembly is fixed on the first location part. The bearing element is for carrying the optical device. When executing the correlation program, the second and the third reflection assemblies are set on the second and the fourth location parts, respectively. The incident light beam is through a V shaped first optical path, which passes the first, the second and the third reflective mirrors in sequence, and then directed to the integrating sphere. However, when executing the measuring program, the second and the third reflection assemblies are set on the third and the fifth location parts, and the bearing element is set on the sixth location part. The incident light beam is through an N shaped second optical path, which passes the first reflective mirror, the optical device, the second and the third reflective mirrors in sequence, and then directed to the integrating sphere.

Description

1250270 九、發明說明: 【發明所屬之技術領域】 本發明係關於一種光學元件量測裝置,特別關於一種 測量反射率的光學元件量測裝置。 【先前技術】 光電產業近年來成為熱門的新興產業之一,不論是工 業上的應用或是學術上的研究都有很大的進展。 在光學元件中,高反射鏡(High Reflection Mirror) 的應用極廣,而大部分的高反射鏡係於一基板上鍵一光學 薄膜所製成。在高反射鏡的製程中,為了檢測其良率,常 需利用光學儀器來檢測其反射率,藉以控制高反射鏡的出 貨品質。 如圖1所示,在量測一光學元件8的反射率時,係由 一光源區5發射一光束進入設置有光學元件8的一量測裝 置6中。接著,經由光學元件8所反射出的光束再射入一 積分球7中,經由訊號處理而得知所需的數據。其中,量 測裝置6係由四個光學元件61、62、63以及64固定於一 基座65上所組成,且該等光學元件61、62、63以及64 之間的相對位置皆需精準對位,以確保所量測之反射角度 的精確度以及再現性。如圖1所示,光束到達光學元件8 的入射角為45 °。 然而,上述的量測裝置只能測量一固定角度的反射 率,並無法隨需要而任意調整。亦即,當測量不同的反射 1250270 角度時,即需更換另一量測裝置,造成使用上的不便,同 時增加製造成本。 因此’有鑑於上述課題,如何提供一種便於®測多種 反射角度、操作簡便且準確度高之光學元件夏測裝置實乃 為當前光電產業製造光學元件的重要課題之一。 【發明内容】 有鑑於上述課題,本發明之目的為提供一種便於量测 任意反射角度、操作簡便且準確度高之光學元件量測裝 置。 緣是,為達上述目的,依本發明之光學元件量測裝置 係藉由反射一入射光束,且導引入射光束最終進入一積分 球中,用以量測一光學元件之反射率,此光學量測裝置係 包含一基座、一第一反射組件、一第二反射組件、一第三 反射組件以及一承載元件。 基座係具有一第一定位部、一第二定位部、一第三定 位部、一第四定位部、一第五定位部以及一第六定位部; 第一反射組件係固設於第一定位部並具有一第一反射鏡 以及一第一站立元件,第一反射鏡係裝設於第一站立元 件;第二反射組件係具有一第二反射鏡以及一第二站立元 件,第二反射鏡係裝設於第二站立元件;第三反射組件係 具有一第三反射鏡以及〆第三站立元件,第三反射鏡係裝 設於第三站立元件;承載元件係用以承載光學元件。 其中,當光學元件量測裝置執行一校正程序時,第二 1250270 反射組件係設置於第二定位部,第三反射組件係設置於第 四定位部,入射光束係經由一依序通過第一反射鏡、第二 反射鏡與第三反射鏡之第一光路徑而導入積分球,且第一 光路徑係呈一 v字型,而當該光學元件量測裝置執行一測 I程序時,第二反射組件係設置於第三定位部,第三反射 組件係設置於第五定位部,且承載元件係設置於第六定位 部,入射光束係經由一依序通過第一反射鏡、光學元件、 第二反射鏡與第三反射鏡之第二光路徑而導入積分球,且 第二光路徑係呈一 N字型。 承上所述,因依本發明之光學元件量測裝置係利用三 組反射組件組設一光學元件量測裝置,藉由第二反射組件 與第三反射組件位置之改變,以分別執行校正程序與測量 程序,又,基座上之定位部係讓反射組件以及承載光學元 件之承載元件能夠精確地定位於基座上,且校正程序與測 量程序執行時之光路徑長是相等的,因此,藉此特點設計 不同的基座’以供不同相對位置之定位部,即可藉由僅 更換基座之步驟將此光學元件量測裝置應用於測量多種 反射角度’同時具有操作簡單且準確度高之效能。 【實施方式】 以下將參照相關圖式,說明依本發明較佳實施例之光 學元件量測裝置。 請參照圖2所示,依本發明較佳實施例之光學元件量 測裝置1,包含一基座11、一第一反射組件12、一第二反 Ϊ250270 射叙件13、一第三反射組件14以及一承載元件15。 如圖2所示,基座11係設置於一光源區2與一積分 王衣3 之間,光源區2係發射一入射光束21,光學元件量測 裝I 1 > ^ 係藉由反射此入射光束21,並導引此入射光束21 ”進入積分球3中’而積分球3則係用以收集反射的光 並偵測其光通量,再經由訊號處理而得可供比較的數 據。當將—光學元件4置於基座11上且位於光源區2至 具刀球3的光路徑上時,得以藉由反射入射光束a而量 侍此光學元件4之反射率。在本實施例中,光學元件4係 為一高反射鏡。 以下為方便說明以了解本發明,在本發明較佳實施例 之光學元件量測裝置1,係以量測45度角的反射率為例說 凊參照圖2與圖3所示,在本實施例中,基座丨丨係 具有一第一定位部111、一第二定位部112、一第三定位部 113、一第四定位部114、一第五定位部115以及一第六定 位部116。其中,第一定位部m、第二定位部112、第三 定位部113、第四定位部114、第五定位部U5與第六定位 部116係分別具有至少一限制元件117(如圖3所示),該等 限制元件117係分別定位第一反射組件12、第二反射組件 13、第三反射組件14及承載元件15。 又,如圖2所示,第一反射組件12係具有一第一反 射鏡121以及一第一站立元件122;第二反射組件13係具 有一第二反射鏡131以及一第二站立元件132;第三反射 10 1250270 組件14係具有一第三反射鏡14ι以及一第三站立元件 142。其中,第一反射組件12係固設於第一定位部U1, 第二反射組件13則係可設置於第二定位部112或是第三 定位部113,而第三反射組件14則係可設置於第四定位部 114或是第五定位部115(如圖3所示)。 如圖4所示,在本實施例中,承載元件ι5係用以承 載光學元件4,且其係具有一夾具15ι,其中,失具151 係具有一凹槽151A,光學元件4之一邊角係卡置於凹槽 151A中而夾設於承載元件15上。 在本實施例中,如圖5A所示,第一站立元件122係 具有一第一支撐部123、一第一抵制部124以及一第一固 定座125,第一支撐部123係具有一第一開口部123八,由 此第一開口部123A卡置第一反射鏡121,第一抵制部124 係與第一支撐部123相對連接而固定第一反射鏡121,第 -固定座125係與第_支撐冑123相連接且第_固定座 125係H]③於第—定位部山(如圖3所示)。 &又,在本貫施例中,第一站立元件122亦可為另一種 態樣,如圖5B所; 吐 所不’弟一反射鏡121卡置於第一開口部 123A。 如圖5A所示,结 立 ^ 弟二站立元件132係具有一第二支撐 Π3第一抵制部134以及一第二固定座135,其中, 弟二支撐部133、第—& ▲ 卜 .t 乐—抵制部134與第二固定座135之形 式與設置方式係分別t、, 却μ 刀別如W述之第一支撐部123、第一抵制 邵124盘繁一 m φ. V. ” 心座125,如前所述,第二支撐部133係 11 125〇27〇 具有一第二開口部133A,第二開口部1;33A係卡置第二反 射鏡131 ;第二抵制部134係與第二支撐部133相對連接 而固定第二反射鏡131 ;第二固定座135係與第二支撐部 133相連接且第二固定座135係設置於第二定位部112或 第三定位部113(如圖3所示)。 同樣地,第二站立元件132亦可為另一種態樣,第二 反射鏡131卡置於第二開口部ι33Α(如圖5B所示)。 如圖5A所示,第三站立元件142係具有一第三支撐 -部143、一第三抵制部144以及一第三固定座145,如上❿ 所述,第三支撐部M3、第三抵制部144以及第三固定座 145之形式以及設置方式係分別如前述之第一支撐部 123、第一抵制部124以及第—固定座ία。 承上所述,第三支撐部143係具有一第三開口部 143A,第三開口部143A係卡置第三反射鏡,第三抵 制部144係與第三支樓部143相對連接而固定第三反射鏡BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to an optical component measuring apparatus, and more particularly to an optical component measuring apparatus for measuring reflectance. [Prior Art] The optoelectronic industry has become one of the hot emerging industries in recent years, and both industrial applications and academic research have made great progress. Among the optical components, the high reflection mirror is widely used, and most of the high mirrors are made by bonding an optical film to a substrate. In the process of high mirrors, in order to detect the yield, it is often necessary to use optical instruments to detect the reflectivity, thereby controlling the quality of the high mirrors. As shown in Fig. 1, when the reflectance of an optical element 8 is measured, a light beam is emitted from a light source region 5 into a measuring device 6 provided with the optical element 8. Then, the light beam reflected by the optical element 8 is again incident on an integrating sphere 7, and the desired data is obtained by signal processing. Wherein, the measuring device 6 is composed of four optical elements 61, 62, 63 and 64 fixed on a base 65, and the relative positions between the optical elements 61, 62, 63 and 64 need to be accurately Bit to ensure the accuracy and reproducibility of the measured reflection angle. As shown in Fig. 1, the incident angle of the light beam reaching the optical element 8 is 45 °. However, the above measuring device can only measure the reflectance at a fixed angle and cannot be arbitrarily adjusted as needed. That is, when measuring different angles of reflection 1250270, it is necessary to replace another measuring device, which causes inconvenience in use and increases manufacturing cost. Therefore, in view of the above-mentioned problems, it is one of the important topics for manufacturing optical components in the photovoltaic industry to provide an optical component summer measuring device that is easy to measure and has a wide range of reflection angles. SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide an optical component measuring apparatus which is easy to measure an arbitrary reflection angle and which is easy to operate and has high accuracy. In order to achieve the above object, the optical component measuring device according to the present invention measures the reflectivity of an optical component by reflecting an incident beam and guiding the incident beam into an integrating sphere. The measuring device comprises a base, a first reflecting component, a second reflecting component, a third reflecting component and a carrying component. The pedestal has a first positioning portion, a second positioning portion, a third positioning portion, a fourth positioning portion, a fifth positioning portion and a sixth positioning portion; the first reflective component is fixed at the first The positioning portion has a first mirror and a first standing element, the first mirror is mounted on the first standing element; the second reflecting unit has a second mirror and a second standing element, the second reflection The mirror system is mounted on the second standing component; the third reflective component has a third mirror and a third standing component, the third mirror is mounted on the third standing component; and the carrier component is used to carry the optical component. Wherein, when the optical component measuring device performs a calibration procedure, the second 1250270 reflective component is disposed in the second positioning portion, and the third reflective component is disposed in the fourth positioning portion, and the incident beam is sequentially passed through the first reflection a first light path of the mirror, the second mirror and the third mirror is introduced into the integrating sphere, and the first light path is in a v shape, and when the optical component measuring device performs an I test procedure, the second The reflective component is disposed on the third positioning portion, the third reflective component is disposed on the fifth positioning portion, and the carrier component is disposed on the sixth positioning portion, and the incident beam is sequentially passed through the first mirror, the optical component, and the first The second light path of the second mirror and the third mirror is introduced into the integrating sphere, and the second light path is in an N shape. As described above, the optical component measuring apparatus according to the present invention uses an optical component measuring device by using three sets of reflecting components, and the position of the second reflecting component and the third reflecting component is changed to perform the calibration procedure separately. And the measuring program, in turn, the positioning portion on the base enables the reflecting component and the carrying member carrying the optical component to be accurately positioned on the base, and the correcting procedure is equal to the optical path length when the measuring program is executed, therefore, By this feature, different pedestals are designed to provide positioning portions with different relative positions, and the optical component measuring device can be applied to measure various reflection angles by replacing only the pedestal' while having simple operation and high accuracy. Performance. [Embodiment] Hereinafter, an optical component measuring apparatus according to a preferred embodiment of the present invention will be described with reference to the related drawings. Referring to FIG. 2, an optical component measuring device 1 according to a preferred embodiment of the present invention includes a susceptor 11, a first reflective component 12, a second reverse tweeze 250270, and a third reflective component. 14 and a carrier element 15. As shown in FIG. 2, the pedestal 11 is disposed between a light source region 2 and an integral king garment 3, and the light source region 2 emits an incident light beam 21, and the optical component measuring device I 1 > The incident beam 21 is directed to the incident beam 21" into the integrating sphere 3" and the integrating sphere 3 is used to collect the reflected light and detect its luminous flux, and then processed by the signal to obtain comparable data. - When the optical element 4 is placed on the susceptor 11 and is located in the light path of the light source region 2 to the spheroidal ball 3, the reflectance of the optical element 4 is measured by reflecting the incident light beam a. In this embodiment, The optical element 4 is a high-reflecting mirror. The following is a convenient description for understanding the present invention. In the optical element measuring apparatus 1 of the preferred embodiment of the present invention, the reflectance of the 45-degree angle is measured as an example. 2 and FIG. 3, in this embodiment, the base raft has a first positioning portion 111, a second positioning portion 112, a third positioning portion 113, a fourth positioning portion 114, and a fifth a positioning portion 115 and a sixth positioning portion 116. The first positioning portion m, the second positioning portion 112, and the first positioning portion The positioning portion 113, the fourth positioning portion 114, the fifth positioning portion U5 and the sixth positioning portion 116 respectively have at least one limiting element 117 (shown in FIG. 3), and the limiting elements 117 respectively position the first reflecting component 12 The second reflective component 13 and the third reflective component 14 and the carrier element 15. Further, as shown in FIG. 2, the first reflective component 12 has a first mirror 121 and a first standing component 122; The 13 series has a second mirror 131 and a second standing element 132; the third reflecting 10 1250270 assembly 14 has a third mirror 14ι and a third standing element 142. The first reflecting assembly 12 is fixed. In the first positioning portion U1, the second reflection component 13 can be disposed on the second positioning portion 112 or the third positioning portion 113, and the third reflection component 14 can be disposed on the fourth positioning portion 114 or the fifth portion. Positioning portion 115 (shown in Figure 3). As shown in Figure 4, in the present embodiment, the carrying member ι5 is used to carry the optical member 4, and has a clamp 15ι, wherein the missing member 151 has a The groove 151A, one of the optical elements 4 is placed in the groove 1 In the present embodiment, the first standing member 122 has a first supporting portion 123, a first resisting portion 124 and a first fixing seat 125. The first support portion 123 has a first opening portion 123, whereby the first opening portion 123A is engaged with the first mirror 121, and the first resist portion 124 is connected to the first support portion 123 to fix the first reflection. The mirror 121 has a first fixing base 125 connected to the first support cymbal 123 and a first fixed base 125 H] 3 in the first positioning portion mountain (as shown in FIG. 3). & Again, in the present embodiment, the first standing member 122 may be in another aspect as shown in Fig. 5B; the spitting portion 121 is stuck in the first opening portion 123A. As shown in FIG. 5A, the standing member 132 has a second supporting member 3 first resisting portion 134 and a second fixing portion 135, wherein the second supporting portion 133, the first & ▲ 卜.t The form and arrangement of the music-resistance portion 134 and the second fixing base 135 are respectively t, but the first support portion 123 is the same as the first support portion 123, and the first resisting the first 124 is a m φ. V. ” heart As described above, the second support portion 133 is 11 125 〇 27 〇 has a second opening portion 133A, the second opening portion 1; 33A is engaged with the second mirror 131; the second resist portion 134 is The second supporting portion 133 is oppositely connected to fix the second mirror 131; the second fixing seat 135 is connected to the second supporting portion 133 and the second fixing seat 135 is disposed on the second positioning portion 112 or the third positioning portion 113 ( Similarly, the second standing member 132 may be in another aspect, and the second mirror 131 is stuck in the second opening portion ι33Α (as shown in FIG. 5B). As shown in FIG. 5A, The third standing element 142 has a third support portion 143, a third resisting portion 144 and a third fixing seat 145, as described above, The support portion M3, the third resisting portion 144, and the third fixing base 145 are in the form and arrangement of the first supporting portion 123, the first resisting portion 124, and the first fixing portion ία, respectively. The support portion 143 has a third opening portion 143A, the third opening portion 143A is engaged with the third mirror, and the third resisting portion 144 is connected to the third branch portion 143 to fix the third mirror.

圖3所示)。Figure 3).

N工予70件量測裝置1來量測 操#步驟’其係利用反射光源區 並最終導引入積分球3中以進行 一光學元件4之反射率的操作步驟, 2所發出之入射光束21,並 12 1250270 訊號之處理而推算出反射率之值。 首先,如圖6 A所示,在量測光學元件4之反射率前, 需先執行一校正程序,於無擺設光學元件4的環境下將一 由光源區2發射的入射光束21以第一反射組件12、第二 反射組件13與第三反射件14進行反射,此時,第二反射 組件13係設置於第二定位部112,第三反射組件14係設 置於第四定位部114,入射光束21由光源區2發射後經由 一依序通過第一反射鏡121、第二反射鏡131與第三反射 鏡141之第一光路徑,最終導入積分球3中,積分球3則 收集反射的光束,並偵測其光通量,再經由訊號處理而得 一基準值以供後續測量時用以比較的數據。其中,第一光 路徑係呈一 V字型。 如圖6B所示,當需對光學元件4進行一測量程序時, 第二反射組件13係由第二定位部112轉換放置於第三定 位部113,第三反射組件14係由第四定位部114轉換放置 於第五定位部115,而承載元件15則設置於第六定位部 116,入射光束21由光源區2發出後經由第一反射鏡121 反射給待測光學元件4,光學元件4再將光束反射給第二 反射鏡131,第二反射鏡131亦依樣將光束反射給第三反 射鏡141,最終由第三反射鏡141將光束導入積分球3中 以進行訊號之處理,而形成一依序通過第一反射鏡121、 光學元件4、第二反射鏡131與第三反射鏡14ι之第二光 路徑,且第二光路徑係呈一 N字型。 承上所述,第一光路徑長係相等於第二光路徑長,也 13 !25〇27〇 j疋呪’當光學元件量測裝置1進行校正以及光學元件測 里私序%,由光源區2發射之入射光束21到積分球3之 S路乜長是相等的,因而可減少量測的誤差值。藉此一特 :二设計不同的基座,以提供不同相對位置之定位部,即 7 ^由更換基座將本發明之光學元件量測裝置應用於量 =夕種入射角度。如圖7A與圖7B所示,可設計入射光束 達光學元件4入射角為5度之基座16(如圖7A所示), 或疋入射角為60度之基座17(如圖7B所示),其定位部相 ^位置之配置係不相同,由此些基座加上反射組件以及待 測光學元件之設置即可進行量測多種入射角度之光學元 件的反射率。 ,‘上所述,依本發明較佳實施例之光學元件量測裝置 =利用三組反射組件以及待測光學元件來反射光源區所 ^ ^入射光束,並且導引入積分球中以進行訊號處理而 :头光學7L件之反射率,其中,當要執行校正或是測量程 序時,口 4 織 /、系藉由第二反射組件與第三反射組件位置之改 :…即可達到校正或是測量的結果,又,藉由基座上之數 =疋位部將三組反射組件以及承載光學元件之承載元件 地定位於基座上,且校正程序與測量程序執行時之光 對j長疋相等的,因此,藉由設計基座上各定位部不同相 、位置之配置,而可將此光學元件量測裝置更彈性地應用 於測I也I_ 元予元件多種反射角度的反射率,由此只需藉由更 同叹叶之基板達到便於量測任意反射角度之目的,且 $日寺具有操作簡單且準確度高之特點。 1250270 以上所=為舉例性’而非為限制性者。任何未脫離 本發明之精神與料,而對其進行之等效修改或變更,均 應包含於後附之申請專利範圍中。 【圖式簡單說明】 圖1為一顯 圖2為 置的示意圖 示習知量測裝置的示意圖; 顯不依本發日倾佳實施例之光學元件量測裝 施例之光學元件量測裝 圖3為一顯示依本發明較佳實 置之基座的示意圖; 圖二為暴頁不依本發明較佳實施例之光學元件量測裝 置之承載元件的示意圖; ^圖^八為一顯不依本發明較佳實施例之光學元件量測 衣置之第一反射纟且件、第二反射組件與第三反射組件的示 為”、員不依本發明較佳實施例之光學元件量測 裝置之另一種第〜厉如^ Μ 才乐反射組件、第二反射組件與第三反射組 件的示意圖; 圖6Α為一顯示依本發明較佳實施例之光學元件量測 裝置=正程序_實施的示意圖; 圖6Β為-顯示依本發明較佳實施例之光學元件量測 裝置^ =程序具體實施的示意圖; " 為一顯示依本發明較佳實施例之光學元件量測 裝置之5度入射角基座的示意圖;以及 15 1250270 圖7B為一顯示依本發明較佳實施例之光學元件量測 裝置之60度入射角基座的示意圖。 元件符號說明: 1 光學元件量測裝置 11 基座 111 第一定位部 112 第二定位部 113 第三定位部 114 第四定位部 115 第五定位部 116 第六定位部 117 限制元件 12 第一反射組件 121 第一反射鏡 122 第一站立元件 123 第一支撐部 123A 第一開口部 124 第一抵制部 125 第一固定座 13 第二反射組件 131 第二反射鏡 132 第二站立元件 133 第二支撐部 16 第二開口部 弟二抵制部 第二固定座 第三反射組件 第三反射鏡 第三站立元件 第三支撐部 第三開口部 第三抵制部 第三固定座 承載元件 夾具 凹槽 基座 基座 光源區 入射光束 積分球 光學元件 光源區 量測裝置 光學元件 光學元件 光學元件 17 1250270 64 光學元件 65 基座 7 積分球 8 光學元件N works to 70 measuring devices 1 to measure the operation #step' which is to use the reflected light source region and finally lead into the integrating sphere 3 to perform the reflectance of an optical element 4, 2 the incident beam emitted 21, and 12 1250270 signal processing to calculate the value of the reflectivity. First, as shown in FIG. 6A, before measuring the reflectivity of the optical element 4, a calibration procedure is first performed, and the incident light beam 21 emitted by the light source region 2 is first in the environment without the arranging optical element 4. The reflective component 12, the second reflective component 13 and the third reflective component 14 are reflected. At this time, the second reflective component 13 is disposed on the second positioning portion 112, and the third reflective component 14 is disposed on the fourth positioning portion 114. After the light beam 21 is emitted by the light source region 2, it passes through the first light path of the first mirror 121, the second mirror 131 and the third mirror 141, and finally is introduced into the integrating sphere 3, and the integrating sphere 3 collects the reflected light. The beam is detected and its luminous flux is processed by a signal to obtain a reference value for subsequent comparison. Wherein, the first optical path is in a V shape. As shown in FIG. 6B, when a measurement procedure is required for the optical component 4, the second reflective component 13 is converted and placed by the second positioning portion 112 to the third positioning portion 113, and the third reflective component 14 is configured by the fourth positioning portion. The conversion is placed on the fifth positioning portion 115, and the carrier member 15 is disposed on the sixth positioning portion 116. The incident light beam 21 is emitted from the light source region 2 and then reflected by the first mirror 121 to the optical element 4 to be tested. The light beam is reflected to the second mirror 131, and the second mirror 131 also reflects the light beam to the third mirror 141, and finally the third mirror 141 introduces the light beam into the integrating sphere 3 for signal processing to form a signal. The second light path of the first mirror 121, the optical element 4, the second mirror 131 and the third mirror 14 is sequentially passed through, and the second light path is in an N-shape. As described above, the first optical path length is equal to the second optical path length, and is also 13 !25 〇 27 〇 j 疋呪 'when the optical component measuring device 1 performs correction and the optical component is measured in the private order %, by the light source The S-channel length of the incident beam 21 emitted from the zone 2 to the integrating sphere 3 is equal, so that the error value of the measurement can be reduced. Therefore, two different bases are designed to provide positioning portions with different relative positions, that is, the optical component measuring device of the present invention is applied to the amount of incident angle by the replacement base. As shown in FIG. 7A and FIG. 7B, the susceptor 16 (as shown in FIG. 7A) having an incident angle of 5 degrees to the optical element 4 or the susceptor 17 having an incident angle of 60 degrees can be designed (as shown in FIG. 7B). The position of the positioning portion is different, and thus the reflectivity of the optical elements of various incident angles can be measured by adding the reflection unit and the optical element to be tested. In the above, the optical component measuring device according to the preferred embodiment of the present invention uses three sets of reflecting components and the optical component to be tested to reflect the incident light beam of the light source region, and introduces the light into the integrating sphere for signal transmission. Processing: the reflectivity of the head optical 7L piece, wherein when the calibration or measurement procedure is to be performed, the position of the second reflective component and the third reflective component is changed by: As a result of the measurement, the three sets of reflective components and the carrying elements carrying the optical components are positioned on the pedestal by the number=clamping portion on the pedestal, and the calibration procedure and the light sequence of the measurement program are long. The 疋 is equal. Therefore, by designing the different phases and positions of the positioning portions on the pedestal, the optical component measuring device can be more flexibly applied to the reflectance of the various reflection angles of the component I. Therefore, it is only necessary to measure the arbitrary reflection angle by using the substrate of the singular leaf, and the Japanese temple has the characteristics of simple operation and high accuracy. 1250270 Above = is an example 'and not a limitation. Any equivalent modifications or alterations to the spirit and composition of the present invention are intended to be included in the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a conventional measuring device of a schematic diagram; FIG. 1 is an optical component measuring device of an optical component measuring embodiment according to the embodiment of the present invention. 3 is a schematic view showing a susceptor according to a preferred embodiment of the present invention; and FIG. 2 is a schematic view showing a carrier member of an optical component measuring device according to a preferred embodiment of the present invention; In the optical component measuring device of the preferred embodiment of the present invention, the first reflecting member, the second reflecting member and the third reflecting member are shown as "the optical component measuring device according to the preferred embodiment of the present invention." FIG. 6 is a schematic view showing an optical component measuring device according to a preferred embodiment of the present invention. FIG. 6 is a schematic view showing an optical component measuring apparatus according to a preferred embodiment of the present invention; FIG. 6 is a schematic view showing a 5 degree incident angle of an optical component measuring apparatus according to a preferred embodiment of the present invention; Pedestal display Figure 15B is a schematic diagram showing a 60 degree incident angle pedestal of an optical component measuring device in accordance with a preferred embodiment of the present invention. Symbol Description: 1 Optical component measuring device 11 pedestal 111 First positioning Portion 112 second positioning portion 113 third positioning portion 114 fourth positioning portion 115 fifth positioning portion 116 sixth positioning portion 117 restriction member 12 first reflection assembly 121 first mirror 122 first standing member 123 first support portion 123A First opening portion 124 first resisting portion 125 first fixing seat 13 second reflecting assembly 131 second reflecting mirror 132 second standing member 133 second supporting portion 16 second opening portion second resisting portion second fixing seat third reflecting Component third mirror third standing element third support portion third opening portion third resisting portion third fixing seat bearing member jig groove base base light source region incident beam integrating sphere optical element light source region measuring device optical element optics Component Optics 17 1250270 64 Optics 65 Base 7 Integrating Sphere 8 Optics

Claims (1)

1250270 十、申請專利範圍: 1、一種光學元件量測裝置,係藉由反射一入射光束,且 導引該入射光束進入一積分球中,以量測一光學元件 之反射率,包含: 一基座,其係具有一第一定位部、一第二定位部、 一第三定位部、一第四定位部、一第五定位部以 及一第六定位部; 一第一反射組件,其係固設於該第一定位部並具有 · 一第一反射鏡以及一第一站立元件,該第一反射 肇 鏡係裝設於該第一站立元件; 一第二反射組件,其係具有一第二反射鏡以及一第 二站立元件,該第二反射鏡係裝設於該第二站立 元件; 一第三反射組件,其係具有一第三反射鏡以及一第 三站立元件,該第三反射鏡係裝設於該第三站立 元件;以及 I 一承載元件,其係用以承載該光學元件,其中,當 , 該光學元件量測裝置執行一校正程序時,該第二 反射組件係設置於該第二定位部,該第三反射組 件係設置於該第四定位部,該入射光束係經由一 依序通過該第一反射鏡、該第二反射鏡與該第三 反射鏡之第一光路徑而導入該積分球,且該第一 光路徑係呈一 V字型,而當該光學元件量測裝置 執行一測量程序時,該第二反射組件係設置於該 19 1250270 第三定位部,該第三反射組件係設置於該第五定 位部,且該承載元件係設置於該第六定位部,該 入射光束係經由一依序通過該第一反射鏡、該光 學元件、該第二反射鏡與該第三反射鏡之第二光 路徑而導入該積分球,且該第二光路徑係呈一 N 字型。 2、如申請專利範圍第i項所述之光學元件量測裝置,其. ★中該第一定位部、該第二定位部、該第三定位部、該· 第四定位部、該第五定位部與該第六定位部係分別具 有至少-限制元件’該等限制元件係分別定位該第一 :射組件、該第二反射組件、該第三反射組件及該 載元株。 3 ^申料利範圍第丨項所述之光學元件量測裝置,直 中該承載元件係具有一夹且, ’ l、 3夾具係具有一凹槽, —邊角係卡置於該凹槽中而夾設於該承 秋1件Γ。 4、如申請專利範圍第〗 貝㈣之7b學7G件量測裝置,其 。亥弟一站立元件係具有一第一支撐部、一 部以及一第一固定座, 古浐 ^ 口邱,^ ” 弟—支撐部係具有一第-開 制部係的笛一二 第一反射鏡,該第-抵 …纟撐部相對連接且固定該第一反射 20 125〇27〇 鏡,該第一固定座係逝哕笛 固定座係固設於該第Γ定^;支撐縣連接且該第— 5、 t申料職㈣i項所述之光學 :該第二站立元件係具有-第二支稽部、一; 相及-第二較座,該第二支撐部係具有一第 第係卡置該第二反射鏡,該第二: 铲該弟一支撐部相對連接且固定該第二反射 二弟:固定座係與該第二支撐部相連接且該第二 疋座係設置於該第二定位部或該第三定位部。 6、 y料職㈣丨賴叙絲科 中該第三站立元件係具有一第三支撐部、一第三1 部Γ及;ϋ固定座’該第三支撐部係具有-第三開 ΓιΓ :該第三開口部係卡置該第三反射鏡,該第三抵 并部係與該第三支撐部相對連接且固定該第三反射 ϋ第三m定座係與該第三支撐部相連接且該第三 固定座係設置於該第四定位部或該第五定位部。— 7、如申請專利範圍第!項所述之光學元件量測裝置,复 ^該第:光路徑之路徑長度係與該第二光路徑之路徑 食度相等。 如申請專利範圍第!項所述之光學元件量測裝置,其 21 1250270 中該光學元件係為一高反射鏡。 221250270 X. Patent Application Range: 1. An optical component measuring device for measuring the reflectivity of an optical component by reflecting an incident beam and guiding the incident beam into an integrating sphere, comprising: a base The seat has a first positioning portion, a second positioning portion, a third positioning portion, a fourth positioning portion, a fifth positioning portion and a sixth positioning portion; a first reflecting component that is fastened Provided in the first positioning portion and having a first mirror and a first standing element, the first reflecting mirror is mounted on the first standing element; and a second reflecting unit having a second a mirror and a second standing element, the second mirror is mounted on the second standing element; a third reflecting component having a third mirror and a third standing element, the third mirror Mounted in the third standing element; and an I-bearing element for carrying the optical element, wherein when the optical element measuring device performs a calibration procedure, the second reflective component is disposed on a second positioning portion, the third reflective component is disposed on the fourth positioning portion, and the incident light beam passes through the first light mirror, the second mirror, and the first light path of the third mirror through a sequence Introducing the integrating sphere, and the first optical path is in a V shape, and when the optical component measuring device performs a measurement procedure, the second reflective component is disposed on the 19 1250270 third positioning portion, The third reflective component is disposed on the fifth positioning portion, and the carrier component is disposed on the sixth positioning portion, and the incident beam passes through the first mirror, the optical component, and the second mirror sequentially And integrating the integrating sphere with the second optical path of the third mirror, and the second optical path is in an N-shape. 2. The optical component measuring device according to claim i, wherein the first positioning portion, the second positioning portion, the third positioning portion, the fourth positioning portion, and the fifth The positioning portion and the sixth positioning portion respectively have at least a limiting element that positions the first: the radiation component, the second reflection component, the third reflection component, and the carrier. 3) The optical component measuring device according to the item of claim 3, wherein the carrying member has a clip, and the 'l, 3 fixture has a groove, and the corner card is placed in the groove It is sandwiched between the ones of the autumn. 4. For example, the application of the patent scope 〗 〖Bei (4) 7b learning 7G piece measuring device, which. Haidi-a standing component has a first support part, a part and a first fixed seat, the ancient 浐^ 口qiu, ^ ” brother-support department has a first-opening system a mirror, the first-but-supporting portion is oppositely connected and fixed to the first reflection 20 125〇27 〇 mirror, the first fixed seat is fixed to the Γ Γ fixed base; The optical body described in item (5), wherein the second standing element has a second branch, a phase, and a second seat, the second support has a first Locating the second mirror, the second: the shovel and the support portion are oppositely connected and fixing the second reflective second brother: the fixed seat is connected to the second support portion and the second squat system is disposed on The second positioning portion or the third positioning portion. 6. The y. (4) The third standing member has a third supporting portion, a third portion, and a third fixing portion. The third support portion has a third opening portion: the third opening portion is configured to chuck the third mirror, and the third abutting portion is coupled to the third portion The third portion of the support portion is connected to the third reflector and the third support portion is connected to the third support portion. The third fixed seat is disposed on the fourth positioning portion or the fifth positioning portion. The optical component measuring device of claim 2, wherein the path length of the optical path is equal to the path of the second optical path. The optical component according to the scope of claim [...] The measuring device, the optical component of the 21 1250270 is a high mirror.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107478554A (en) * 2017-07-27 2017-12-15 中绿环保科技股份有限公司 Dust measurement sensor
TWI749930B (en) * 2020-12-02 2021-12-11 財團法人國家實驗研究院 Measuring device and method for large-area specular reflectance of smooth surface

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107478554A (en) * 2017-07-27 2017-12-15 中绿环保科技股份有限公司 Dust measurement sensor
TWI749930B (en) * 2020-12-02 2021-12-11 財團法人國家實驗研究院 Measuring device and method for large-area specular reflectance of smooth surface

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