12490101249010
五、發明說明（1) 【發明所屬之技術領域 本發明係為一種平面物體加工 ，女扑 ^ 4. . ^ ^ 展置輸达軸之驅動結構 尤指一依據申凊專利範圍第1 傅 置可A % -τ rn λα & @ 1項所述之驅動結構。該裝 夏J為一所明LCD的塗覆設備戎县豳m 衣 之雷鈕#供,,^ 復又價次疋應用於印刷電路板等等 電鍍汉備。此加工過程係於作業室中進行。 先前技術 按，關於異物進入和作 密閉性有著極高的要求。有 電解液。因此，該作業室至 軸被驅動時，該輸送軸會穿 電動式的驅動，而這造成必 片’也因而帶來磨損等等問 於作業室内，特別是於一處 而在某些情況下，作業室是 一方面作業室的密閉是很重 得設置電動馬達，因為它會 業材料攜出，作業室中對於其 許夕作業室包含有流體，例如 少大部分應予以密閉。當輸送 過密封裝置引導至外部來進行 需使用提供内部活動組件的墊 題。另，將一電動驅動器裝設 理液中，也同樣不是很方便。 4要有無塵室的條件。因此， 要’另一方面，在作業室内不 在磨損的同時產生異物。V. INSTRUCTION DESCRIPTION OF THE INVENTION (1) Technical Field The present invention relates to a planar object processing, a female fluttering ^ 4. . ^ ^ The driving structure of the display and delivery shaft, especially one according to the scope of the patent application The drive structure described in A % -τ rn λα & @1. The installation of Xia J is a coating device for a bright LCD. The 雷m 衣 雷 钮 button# is supplied, and the remedy is applied to printed circuit boards, etc. This processing is carried out in the working room. Prior Art Press has very high requirements for foreign matter entry and containment. There is electrolyte. Therefore, when the working chamber is driven to the shaft, the conveying shaft will be driven by an electric drive, and this causes the piece to be worn, which causes wear and the like, etc., especially in one place and in some cases. The working room is on the one hand, the sealing of the working room is very heavy to set up the electric motor, because it will carry out the material, and the working room contains fluid for its Xu Xi working room, for example, a small part should be sealed. When transporting through the seal to the outside, it is necessary to use a spacer that provides internal active components. In addition, it is also not very convenient to install an electric drive in the chemistry. 4 There must be conditions for a clean room. Therefore, on the other hand, foreign matter is generated while not being worn in the work chamber.
t發明内容】 本發明的主要目的’即在於發明出―種平面物體加工 裝置2达軸之驅動結構來解決上述習知技術的 是驅動和密閉的問題。 上述本發明目的係藉由一依據申請專利範圍第丄項項 所述之驅動結構的特徵來遠占^盆分由& 、、 π试术運成。於其匕申凊專利範圍的附SUMMARY OF THE INVENTION The main object of the present invention is to invent a drive structure for a planar object processing device 2 to solve the above-described problems of driving and sealing. The above object of the present invention is achieved by a feature of the driving structure according to the item of the scope of the application of the patent application, which is derived from &, π. Attached to the scope of the patent application
第5頁 i |_ 1249010 五、發明說明（2) 屬項係陳述本發明之具有優點 專利範圍中的用詞請參考詳細目的性的額外結構。申請 本發明的輸送軸至少具二月中的内容。 設於輸送轴端上或延伸入輪送軸端。該輸送軸得以 轉驅動器相聯動。此外，嗲.知内。該輸送袖端係與旋 一塾片來與驅動器相隔離二軸蠕係藉由一密封物或是 動器不與遠端力道效應相接觸μ =軸端和驅動器之間的聯 過該密封物。簡言之，驅動 ，經由磁鐵和驅動磁鐵穿 聯動來達成。 、”區動器的連接係經由磁性 本發明设計的最大優點在於， 開口上需用到密封物。在本發明之2像在一般的軸驅動之 封物得以閉合，或是為一簡單：：易實施例中，該密 :的存在，所以也就沒有所謂的密；=它。由於沒有開 在此的理解係為藉由它來將作業室°】j。因此，密封物 封物不被沖破為較佳。於本發明之一封。基本上，密 亦可為氣密性，特別可適用於真处 ％例中’該密封物 口口本發明之至少一輸送軸，特別是每2 :二 裔係設於一密封物或是一墊片内。 輸运軸與一驅動 軸承功能，故亦可視為密封用的軸承二該密封物具有一 沾可以用普通的軸承即可。使用特二2承的選用上冰 的發生，也因此可避免磨損所產生的^承時可避免磨損沖 再者’密封物’特別是連同輸送輛 ^ 室的側壁。藉由該設計得以讓輸送軸 ，係外露於作業 驅動器可經由遠端力道對輸送軸端施以=出作業室外，而 有效的作用。而作 第6頁 1249010 五、發明說明（3) 業室藉由密封物保持密閉狀態。 一於密封物内的輸送軸端係為一驅動輛 動軸外覆於輸送軸上為較佳。 匕復’而驅 為了對聯動器產生一磁性遠端力道，輪 磁性部為較佳。它-方面為可磁化的物質，在=^有一 施例中，例如可以是鐵。在另外的實施例中，^間早的實 鐵’特別是一永久磁鐵。而該輸送軸端二：二J磁 ::而該磁性部設於-於密封物内轉動的輪送;= 產生驅實=場為較佳，來 繞著輸送軸端轉動，因而形成聯動的現象鳊=:場係環 可被轉動。 象而輸送軸端亦 依據本發明之實施例，驅動器係 口由-固設之線圈裝置來產式二= 來藉由電子式或機械式的整=換 。 輸$軸的轉速可經由產生的磁場轉速來進行控制 轉動：一實施例[驅動器的轉動磁場可經由 之轉動。二iii用而該驅動軸至少承載一磁鐵，並且隨 ^ :此可使用一強效的永久磁鐵。 貴的二ΪΪ磁：來旋轉磁場的優點在於，不需要用到昂 裝置。關於此之其它實施例的優點在於，在驅動 第7頁 1249010 五、發明說明（4) 器上也不需要用到 經由遠端力道來、查運作的組件。 部與驅動n的驅 葬動的效果係藉由輪送轴的磁性 是其-繞著另-作；；係呈徑向式上下設置來達成，並者 用或是力量的傳輪作用。因此可達成一最佳的遠端力道作 許多輪送軸的輪。 於可以將平面物體同=軸蠕是可以彼此聯動的。其優點在 或其它中得以直接驅=f均勻地輸送。此外，在電鍍設備 低驅動器的生產 特疋數目的輸送軸，因而得以降 作業室外為最佳。。聯動以機械式運作為較佳，而以於 此外’本發明 有輸送軸端。同揭雨込軸得以上下兩列設置，並分別具 其中一列之每—驅’驅動轴或驅動器得以相對應設置。 它方式的聯冑。躺f轴與另—列之驅㈣互為機械式或其 室就沒有密閉的門es的方式以機械式者為佳。因此，作業 在本發明聯動係於作業室外進行。 桿與-驅動裝置：ί 15中’至少-列驅動軸經由-馬達軸 佳。 連接，而該驅動裝置以電機驅動為較 別獨：ί置輸：輸；軸端，連同驅動轴為較佳，係個 較佳。聯動的方^門與刖述之固定式線圈裝置連同設置為 。在-兩列匕時控制複數個驅動軸或驅動轴組 最佳。的輸送軸上，一上一下的輸送軸端之設置為 第8頁 1249010 五、發明說明（5) 為求進一步瞭解本發明之 ，請參閱以了有關本發明之詳^ 技術内容與功能 *乃供參考與說明用：以附圖，然而所附圖 I非用以對本發明施予限制者。 【實施方式】 圖一和圖二係為之本發明 ^ ^ ^ ^ ^ ^ ^ 1 , 間早實施例圖之無塵室 二’於::f ，其中，水平設有支撐傳輸輪13之輸 送軸12。该輸达軸12係位於兩水平且平行 輪13上下相接轉動’而平面物體’例如⑽，係於其間進給 和活動。 该輸运軸1 2連同輸送轴端〗4係穿過作業室丨丨之一側壁 15向外延伸。該輸送軸端14分別係設於一上軸承板丨心和 一下軸承板16b的軸承17内，而該軸承板16a，丨旰係向外 關閉並封合，因此可避免異物進入作業室丨丨内。同時，在 電鍍設備上’電解液亦可避免外漏。 因為在這樣的設備，磨擦並不扮演一重要角色，所以 ，轴承1 7可以不需特別花費來設計，只需普通軸承1 7即可 。對於無塵·室的要求，則可使用一低磨損的特別軸承。如 圖所示，在上軸承板16a的軸承17係為一所謂的浮動轴承 ，並且向上延伸。因此，碰到較厚的物體時，上輸送 2 得於垂直方向上移動。 上在輸送軸端14上係設有磁鐵19向側壁15外側區域延伸 。該磁鐵1 9係為例如由鈷-釤所製成之永久磁 送軸端14緊固結合。 I/、卿Page 5 i |_ 1249010 V. INSTRUCTIONS (2) Ownership Statement Advantages of the Invention The terminology in the patent range refers to the additional structure of the detailed purpose. The delivery shaft of the present invention is applied for at least two months. It is arranged on the end of the conveying shaft or extends into the end of the conveying shaft. The conveyor shaft is linked to the drive. In addition, 嗲. know inside. The transport sleeve end is rotated and separated from the driver to be separated from the driver. The biaxial creep is not in contact with the distal force effect by a seal or the actuator. μ = the seal is connected between the shaft end and the driver. . In short, the drive is achieved by the linkage of the magnet and the drive magnet. The greatest advantage of the design of the zone actuator via magnetic design is that a seal is required on the opening. In the present invention, the image is closed in a general shaft-driven seal, or is simple: : In the easy embodiment, the secret: exists, so there is no so-called dense; = it. Since there is no understanding here is to use it to work the room °] j. Therefore, the seal is not sealed It is preferred to be broken. It is a card of the present invention. Basically, the denseness may also be airtight, and is particularly applicable to the case where the sealing mouth is at least one conveying shaft of the present invention, especially every 2: The descent system is set in a seal or a gasket. The transport shaft and a drive bearing function can also be regarded as the bearing for sealing. The seal has a dip and can be used with ordinary bearings. The selection of the upper ice of the special 2nd and 2nd bearings can also avoid the wear and tear caused by the wear and tear, and the 'sealings' can be avoided, especially together with the side wall of the conveying room. Exposed to the job drive via a remote force pair The conveying shaft end is applied to the outside of the working room, and it functions effectively. For the sixth page, 1249010 V. The invention description (3) The working chamber is kept sealed by the sealing member. The conveying shaft end in the sealing body is one. It is better to drive the moving shaft to cover the conveying shaft. In order to generate a magnetic distal force force to the coupling, the magnetic part of the wheel is preferred. It is a magnetizable substance, and there is a In the embodiment, for example, it may be iron. In another embodiment, the early solid iron is in particular a permanent magnet, and the conveying shaft end is two: two magnetic: and the magnetic portion is provided in the sealed Rotation in the object; = generation of the compaction = field is preferred to rotate around the end of the conveying shaft, thus forming a linkage phenomenon 鳊 =: the field ring can be rotated. Like the conveying shaft end is also according to the invention In an embodiment, the driver system is controlled by an electronic device or a mechanical system. The speed of the input shaft can be controlled to rotate via the generated magnetic field speed: an embodiment [The rotating magnetic field of the drive can be rotated. The second drive is used for the drive shaft to Carrying a magnet, and with ^: This can use a powerful permanent magnet. Expensive two magnetism: the advantage of rotating the magnetic field is that no need to use the device. The other embodiments of this are advantageous in driving Page 7 1249010 V. INSTRUCTIONS (4) The components that are operated by the remote force are not needed on the device. The effect of the drive and the drive of the drive n is that the magnetic force of the wheel is - Between the other and the other; the system is arranged in a radial up and down direction, and the force is used to transmit the wheel. Therefore, an optimal distal force can be achieved for many wheeled axles. Objects and shaft creeps can be interlocked with each other. The advantages are directly or directly conveyed by f/f. In addition, the production of low-drive machines in electroplating equipment has a special number of conveying shafts, so that it is best to lower the operating room. . . The linkage is preferably mechanically operated, and in addition, the present invention has a conveying shaft end. The same rain cover shaft can be set up in two columns, and each of the columns can be set correspondingly to the drive shaft or the drive. The way it is connected. The way in which the lying f-axis and the other-column drive (4) are mechanical or their chambers have no closed door es is preferably mechanical. Therefore, the work is carried out outside the work room in the linkage of the present invention. Rod and drive: ί 15 'At least - column drive shaft via - motor shaft. Connected, and the drive unit is driven by the motor to be more unique: ί: input; shaft end, together with the drive shaft is preferred, preferably. The linked square door and the fixed coil device described above are set together with . It is best to control a plurality of drive shafts or drive shaft sets at - two trains. On the conveying shaft, the upper and lower conveying shaft ends are set to page 8 1249010. V. Inventive Note (5) For further understanding of the present invention, please refer to the detailed technical contents and functions of the present invention. For reference and explanation: the drawings are used, however, FIG. 1 is not intended to limit the invention. [Embodiment] FIG. 1 and FIG. 2 are the invention of the present invention ^ ^ ^ ^ ^ ^ ^ 1 , the clean room of the early embodiment of the second room is:: f, wherein the horizontal transport is provided with the support transmission wheel 13 Axis 12. The delivery shaft 12 is located at two levels and the parallel wheels 13 are rotated up and down and the planar object ', e.g., (10), is fed and moved therebetween. The transport shaft 12, along with the transport shaft end 4, extends outwardly through one of the side walls 15 of the work chamber. The conveying shaft ends 14 are respectively disposed in the bearing 17 of the upper bearing plate center and the lower bearing plate 16b, and the bearing plate 16a is closed and sealed outward, so that foreign matter can be prevented from entering the working room. Inside. At the same time, the electrolyte can also avoid leakage on the plating equipment. Because friction does not play an important role in such equipment, the bearing 17 can be designed without special cost, and only ordinary bearings can be used. For dust-free room requirements, a special bearing with low wear can be used. As shown, the bearing 17 on the upper bearing plate 16a is a so-called floating bearing and extends upward. Therefore, when a thick object is hit, the upper conveyance 2 is moved in the vertical direction. A magnet 19 is attached to the conveying shaft end 14 to extend to the outer side of the side wall 15. The magnet 19 is fastened, for example, by a permanent magnetic shaft end 14 made of cobalt-rhodium. I/, Qing
第9頁 1249010 五、發明說明（6) 外露於侧壁I 5外的轴承板j β 丨h孫 勤妬9 9辂P荖。吁版紅 16b係為驅動器21的驅 動板22所覆盍。遠驅動器21係提供輸送軸12 得以驅動設備内的物體。 轉動’因而 軸承板16a，16b係固設於側壁15上，相 22係得以轉動。而較佳的設置位置係於軸承 ，\fih66 外側上。在這裡同樣是普通的軸承就足夠了。該3普通軸承 的材質可使用合適的金屬和塑膠。 t^曰 結構類似於軸承板16a，⑽，並呈鋼狀的驅動板22設 f驅動磁鐵23，該驅動磁鐵23可如同磁鐵19為永久磁鐵為 H if固Ϊ於驅動板22上。如圖所示，輸送軸端14的磁 裁19以及驅動态21的驅動磁鐵23係呈徑向式上下設 此可以達到較佳的動力傳導或聯動效果。 9”係支撐上下驅動齒輪…，咖，該上下驅動 齒輪5a，25b係上下相互聯動’而上平面的上驅動齒輪 J丨互古不相連轉動。此外，於下平面之驅動齒輪25b係於 月，J側设有一斜齒輪26並與下驅動齒輪25b配合作用。兮 =輪26 固設於一沿著下平面延伸之馬達轴桿28上;由 ，一可看侍較清楚。該馬達軸桿28又設於一軸承座29上， 並與一未圖示之電動馬達相連接。 缺關於上輸送軸端Η於上軸承板16a上的浮動軸承，雖 =沿著一特定物體作垂直方向的活動會喪失磁鐵19和驅動 :鐵23之間的精準中心，但在浮動軸承上，即使它隨著J 直動作移動，輸送軸仍可繞著一特定轉軸進行轉動。再者 ，亦有一磁場環繞，其可驅動磁鐵丨9和輸送軸端14。所以 第ίο頁 1249010 五、發明說明⑺ ’在f動軸承上亦可達磁性聯動的效果。 磁鐵驅的實施例中，與在輸送軸端“的 達成的。〃 d 21的疑轉永久磁鐵之磁性聯動是可以 新取仲圖所示紅轉式的驅動板22亦可為固定式的驅動；^ m。而驅：磁鐵23亦可為固定式的驅動線圈所取ί板 此為頰似於内轉部-電動馬達上之 囿二取代 圈。經由該固定性的外_動^ "又 疋/疋邛線 式的磁場，而該磁場亦可產生一旋轉 動”輸送軸12進行：：成與輸送軸端的磁鐵達成磁性聯 决心^使用具有固定式驅動線圏的固定式驅動板時，驅動 截輪25a ’ 25b以及斜齒輪26就可以不必使用。 蚀= 的優點。用來產生一旋轉磁場之設於驅動以 固：士線圈的另一優點在於，不需使用到驅動靜音器 外在作業室1 1外亦不需設置從動組件。 °另 • 一 n，户斤$冑由本發明的軸承和驅動器即可達到作 業至11或側壁15的密閉性。側壁15和軸承板163，161)之 Π;:可解：，且設有壓入配合裝置。特別的是： 響又置-輸送軸之驅動器’且它對於作業室"沒有負面的影 惟以上所述者，僅為本發明之較佳實施例而已， 之範圍。即凡依本發明申請專利範圍所作 之均專變化與修飾，皆為本發明專利範圍所涵蓋。Page 9 1249010 V. INSTRUCTIONS (6) Bearing plate exposed outside the side wall I 5 j 丨h Sun Qin Qin 9 9辂P荖. The red version 16b is covered by the drive plate 22 of the driver 21. The remote drive 21 provides the transport shaft 12 to drive objects within the device. The rotation of the bearing plates 16a, 16b is fixed to the side wall 15, and the phase 22 is rotated. The preferred setting is on the outside of the bearing, \fih66. It is also common here that ordinary bearings are sufficient. The materials of the 3 ordinary bearings can be made of suitable metals and plastics. The structure is similar to the bearing plates 16a, (10), and the steel drive plate 22 is provided with a drive magnet 23, which can be fixed to the drive plate 22 as if the magnet 19 is a permanent magnet. As shown, the magnetic cutting 19 of the conveying shaft end 14 and the driving magnet 23 of the driving state 21 are arranged in a radial manner to achieve a better power transmission or linkage effect. The 9" supports the upper and lower drive gears, and the upper and lower drive gears 5a, 25b are interlocked with each other' and the upper drive gears J of the upper plane are not connected to each other. In addition, the drive gear 25b in the lower plane is attached to the moon. The J side is provided with a helical gear 26 and cooperates with the lower driving gear 25b. The 兮=wheel 26 is fixed on a motor shaft 28 extending along the lower plane; the motor shaft can be clearly seen. 28 is further disposed on a bearing housing 29 and is connected to an electric motor (not shown). The floating bearing on the upper bearing plate 16a of the upper conveying shaft end is missing, although it is perpendicular to a specific object. The activity loses the precise center between the magnet 19 and the drive: iron 23, but on the floating bearing, even if it moves with the J straight motion, the transport shaft can rotate around a specific axis of rotation. It can drive the magnet 丨9 and the conveying shaft end 14. Therefore, the ίο page 1249010 V. The invention description (7) 'The effect of magnetic linkage can also be achieved on the f-moving bearing. In the embodiment of the magnet drive, at the end of the conveying shaft" Achieved.磁性 d 21 The magnetic linkage of the suspected permanent magnet is a new type of red-rotating drive plate 22 as shown in the figure. It can also be a fixed drive; ^ m. The drive: the magnet 23 can also be a fixed drive coil. This is a cheek like a two-turn ring on the inner turn-electric motor. Through the fixed external magnetic field, and the magnetic field can also generate a rotating motion, the conveying shaft 12 is: to achieve magnetic coupling with the magnet at the conveying shaft end. When the fixed drive plate of the fixed drive wire is fixed, the drive cutters 25a' 25b and the helical gear 26 can be omitted. The advantage of the eclipse = is used to generate a rotating magnetic field and is set to drive to fix the coil The advantage is that there is no need to use the driving silencer outside the working room 1 1 and there is no need to set the driven component. ° Another one, the household weight can be achieved by the bearing and the driver of the invention to reach the 11 or the side wall 15 The airtightness of the side wall 15 and the bearing plates 163, 161); solvable: and is provided with a press-fit device. In particular: the drive for the sound-receiving-transport shaft and it is not for the workroom" The above is only the preferred embodiment of the present invention, and all variations and modifications of the scope of the present invention are covered by the scope of the present invention.
1249010 圖式簡單說明 a. 圖式說明： 圖一係為本發明無塵室塗覆設備之作業室以及一與驅 動器相連接之聯動裝置剖視圖。 圖二係為本發明依據圖一之斜視圖。 b. 圖號說明： (11)作業室 (1 2 )輸送軸 (1 3 )傳輸輪 (1 4 )輸送軸端 (1 5 )側壁 (16a)、（16b)軸承板 (17)軸承 (1 9 )磁鐵 (2 1)驅動器 (2 2 )驅動板 (2 3 )驅動磁鐵 (25a)、（25b)上下驅動齒輪 (26)斜齒輪 (2 8 )馬達軸桿 (2 9 )軸承座1249010 Brief description of the drawings a. Schematic description: Fig. 1 is a cross-sectional view showing the working chamber of the clean room coating apparatus of the present invention and a linkage device connected to the actuator. Figure 2 is a perspective view of the present invention in accordance with Figure 1. b. Description of the drawing: (11) Working room (1 2 ) conveying shaft (1 3 ) transmission wheel (1 4 ) conveying shaft end (1 5 ) side wall (16a), (16b) bearing plate (17) bearing (1 9) magnet (2 1) driver (2 2 ) drive plate (23) drive magnet (25a), (25b) up and down drive gear (26) helical gear (28) motor shaft (2 9 ) housing
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