1244649 , (1) 玖、發明說明 【發明所屬之技術領域】 本發明涉及光資訊記錄媒體，特別是涉及將製造商 (m a k e r )名和著作權保護對策用資訊等的媒體（m e d i a ) 資訊以預刻凹坑（p r e - p i t )的形式寫入的光資訊記錄媒 體。 【先前技術】 近年來，與CD (compact disc)相比具有數倍的記錄 容量的DVD (數位多用途碟片）作爲記錄電影等圖像和 聲音等資訊的資訊記錄媒體而被廣泛使用。而且，對於該 DVD，能夠在用戶側僅進行一次資訊記錄的 DAD-R (追 記型的數位多用途碟片）和能夠進行資訊重寫的DVD-RW (可抹寫型的數位多用途碟片）己經産品化了，作爲今後 的大容量的資訊記錄媒體而日漸普及化。 通常，在DVD-R和DVD-RW中，該光碟的製造商資 訊和著作權保護對策用資訊等的資訊（以下稱爲媒體資 訊）被預先存儲在盤的最內周部和最外周部。這些媒體資 訊這樣進行記錄：在碟片製造工序的最後階段，使用記錄 裝置，藉由光照射等使記錄層改性來記錄。與此相對，也 公開了這樣的方法：即不是把媒體資訊記錄到上述那樣的 記錄層中，而是在碟片基板製造階段中，預先在基板的凹 軌（groove)中以浮雕凹坑（einboss pit)(以下稱爲凹 軌內凹坑（in-gro〇ve pit)的形式進行記錄（例如參照專 1244649 · (2) 利文獻1 )。在圖1中表示了使用該方法製作的光資訊記 錄媒體的一部分。圖1 ( a )是光資訊記錄媒體的部分放大 於面圖，簡要地表示凹軌內凹坑所形成的區域（以下稱爲 凹軌內凹坑區域）。而且，圖1 ( b )和圖1 ( c )分別是 表示圖1 ( a )的沿A-A線剖面和B-B線剖面的圖。在該 光信息記錄媒體中，如圖1 ( b )所示的那樣，當從以形成 有凸軌（land)和凹軌（groove)的基板 101的凸軌表面 1 〇 1 a作爲基準開始，到凹軌內凹坑1 0 7的底面（最下 面）1 〇 7 a形成的深度dp ”比同樣以凸軌表面1 0 1 a作爲基 準的到達凹軌105的底面（最下面）105a形成的深度dg” 更深。由此，當在該基板1 〇 1的圖形形成面上形成記錄層 102和反射層103時，形成了凹軌內凹坑107的部分和沒 有形成凹軌內凹坑1 0 7的凹軌的部分，在所形成的各層的 表面高度上産生差別。因此，藉由利用該凹軌內凹坑部分 與凹軌部分的深度差，能夠把媒體資訊等資料（data )記 錄到凹軌中。 因此，在藉由使用旋塗法（sPin coat )來塗布含有有 機色素的溶液而形成記錄層的光資訊記錄媒體中，媒體的 外側（外周部）形成的記錄層的厚度厚於媒體的內側（內 周部）形成的記錄層的厚度。該厚度差隨使用的有機色素 材料和溶劑的種類而有所不同’這是由在旋塗時的溶劑的 乾燥和有機色素材料的溶液由基板內側向外側展開而引起 的。由此，在形成了媒體的基板表面上的引導槽上形成了 外側比內側厚的記錄層。由於該厚度差，會産生這樣的問 1244649 . (3) 題：在光資訊記錄媒體的內側和外側，反射率變動，推挽 (push-pull )信號和記錄再生信號的調變度等各種特性變 得不均勻。作爲解決其的措施，公開了採用預先使形成記 錄層的基板的溝槽從基板內周向外周逐漸變深並且變寬來 形成的方法（例如，參照專利文獻2 )。 【專利文獻1】日本專利公開公報特開200 1 -6 7 73 3 號（第5-6頁，圖1-3 ) 【專利文獻2】日本專利公開公報特開2 002 -23 7 1 00 號（第5-6欄） 當使用具有上述那樣的凹軌內凹坑的光資訊記錄媒體 來實際進行信息的記錄再生時，在對凹軌內凹坑區域和僅 形成作爲用戶側的記錄區域的溝槽的區域（以下稱爲凹軌 區域）的邊界部進行尋軌（tracking )時，尋軌失敗的錯 無（e r r 〇 r )被再二確認。适是因爲·如圖1 5所不的那 樣，藉由在基板上形成凹軌內凹坑1 5 1，相鄰的凸軌1 5 2 的側壁被切削。由於相鄰的凸軌1 5 2的側壁被切削，處於 凹軌內凹坑1 5 1與凹軌1 5 3之間的凸軌1 5 2上表面的面積 小於通常的凹軌1 5 3間的凸軌1 5 4的上表面的面積。由 此，在凸軌1 5 2和凸軌1 5 4上所形成的記錄層和反射層的 面積産生面積差。 當藉由光點（spot ) SP來對該凸軌152與凸軌154之 間的凹軌153進行尋軌時，即便光點SP位於凹軌153的 中央，在從凸軌1 5 4所得到的反射光RF 1的光量與從凸 軌1 5 2所得到的反射光距2的光量之間也會産生差別，徑 -7- (4) (4)f 1244649 向推挽（radial push-pull)信號發生偏移（offset)。由 此，下能對溝槽進行良好的尋軌，引起抖動（jitter )的 增加和調變度的減少。而且，在此情況下，亦導致尋軌失 敗。 在實際的徑向推挽信號偵測時，使用波長 λ = 6 5 0 n m，數値孔徑N A二0.6的光拾取器（p i c k - u p )時’直 徑ψ = 1 μ m左右的光點在光資訊記錄媒體上沿半徑方向手币 描。此時，由於光資訊記錄媒體高速旋轉，光點不會在與 尋軌方向相垂直的方向進行掃描，而在與尋軌方向成鈍角 的方向上進行掃描。由於徑向推挽信號不具有可分解凹坑 來檢測的頻率特性，因此，在形成的比凹軌深的凹軌內凹 坑部分中，與寬度寬的溝槽的檢測情況相同。因此，在此 情況下，以凹軌內凹坑區域和凹軌區域的邊界爲界，凹軌 的寬度發生極端變化，産生徑向推挽信號的失真。 特別在D V D - R和D V D - R W中是使用徑向推挽信號來 進行尋軌，由於徑向推挽信號的偏移和失真，而引起尋軌 錯誤（tracking error)。因此，在 DVD-R 和 DVD-RW 中，必須防止上述尋軌錯誤。 而且，具有凹軌內凹坑的光資訊記錄媒體的基板使用 以通常RIE裝置進行蝕刻的原盤來製作，但是，在藉由使 用一般的RIE裝置進行蝕刻來在原盤表面上形成溝槽的情 況下’所形成的溝槽的深度大致一定。使用這樣的r〗E裝 置就難於在原盤表面上形成從內側向外側連續變深這樣的 溝槽 1244649 (5) 【發明內容】 因此，本發明的目的是提供光資訊記錄媒體及其製造 方法，使得即使在對上述凹軌內凹坑區域和凹軌區域的邊 界部分進行尋軌的情況下，也能得到穩定的徑向推挽信 號。 本發明的另一個目的是提供光資訊記錄媒體及其製造 方法，對於由色素材料構成的記錄層所形成的具有凹軌內 凹坑的光資訊記錄媒體，藉由在媒體的內側和外側抑制反 射率變動，使各特性變得均一。 根據本發明的第一樣態，提供一種光資訊記錄媒體， 係屬於具有：形成多個凸軌和凹軌的基板、在該基板上含 有有機色素的記錄層、反射層之光記資訊錄媒體，其特徵 在於上述凹軌包括： 第一凹軌； 形成有凹坑的第二凹軌； 形成有寬度比第二凹軌的凹坑窄之凹坑的第三凹軌， 第三凹軌設置在第一凹軌與第二凹軌之間， 第一凹軌、第二凹軌的凹軌和第三凹軌的凹軌，以從 上述光資訊記錄媒體的內側向外側連續變深這樣的槽深度 和連續變寬這樣的槽寬度來形成。 在本發明的光資訊記錄媒體的基板上形成有多個凸軌 和凹軌，在一部分的凹軌中形成凹坑（凹軌內凹坑）。在 該凹軌內凹坑形成的區域（凹軌內凹坑區域）與僅形成凹 冬 (6) 1244649 軌的區域（凹軌區域）的邊界部分上進一步設置有形成了 寬度窄於上述凹軌內凹坑的凹軌內凹坑區域（以下稱爲邊 界凹坑區域）。由此，在基板表面上·得到從凹軌內凹坑 區域向凹軌區域緩慢變化的形狀。這樣，在使用該基板的 光資訊記錄媒體中，即使在跨越凹軌內凹坑所形成區域和 僅形成凹軌的區域的邊界部進行尋軌的情況下，也能夠使 徑向推挽信號的失真變少，可進行穩定的尋軌。而且，在 本發明的光資訊記錄媒體的基板上形成的凹軌以從媒體的 內側向外側連續變深這樣的槽深度和連續變寬這樣的槽寬 度來形成。由此，即使在藉由旋塗而在基板上形成由有機 色素材料構成的記錄層的情況下，也能形成這樣的記錄 層，即凹軌部分的記錄層與反射層的介面的高度隨著從光 資訊記錄媒體的內側向外側，其在整體上大致相同。 在本發明的光資訊記錄媒體中，用 Wgi表示位於上 述光資訊記錄媒體的內側的第一凹軌的半寬値，用 Wgo 表示位於上述光資訊記錄媒體的外側的第一凹軌的半寬 値，用Wp表示第二凹軌的凹坑的半寬値，用Wpb表示第 三凹軌的凹坑的半寬値，理想爲 Wgi<Wgo S Wpb<Wp。而 且，半寬値Wp與半寬値Wpb之比Wp/Wpb理想爲I·05 SWp/WpbS1.15。當 Wp/Wpb<l .05 時，在第一凹軌中的 徑向推挽信號中容易發生偏移和失真，當1.15<Wp/Wpb 時，由於來自形成在第三凹軌的凹軌內凹坑的信號調變度 變低，而非理想。 在本發明的光資訊記錄媒體中，當用dgi表示位於& 1244649 、 (7) 述光資訊記錄媒體的內.的第一凹軌距基板表面的深度， 用d go表示位於上述光資訊記錄媒體的外側的第一凹軌距 基板表面的深度時，深度dgi與深度dgo之比dgo/dgi理 想爲 1.00<dgo/dgiS1.10。當 dgo/dgiSl.〇〇 時，與凹軌 部分相對應的記錄層的凹陷深度從光資訊記錄媒體的內側 向外側逐漸變淺。由此，越在媒體的外側，推挽信號越 低，在媒體的內側和外側，會失去平衡（balance )。而 且，當dgo/dgi>l · 1 0時，與凹軌部分相對應的記錄層的凹 陷深度從光資訊記錄媒體的內側向外側逐漸變深。由此’ 越在媒體的外側，推挽信號越大，在媒體的內側與外側會 失去平衡。而且，當dgo/dgi>1.10時，由於媒體外側的凹 軌部分過深，故凹軌部分的光的反射率會降低。 而且，在本發明中，半寬値Wgi與半寬値Wgo之比 Wgo/Wgi 理想爲 1.03SWgo/WgiD1.10。當 Wgo/Wgi<1.03 時，與凹軌部分相對應的記錄層的凹陷深度從光資訊記錄 媒體的內側向外側逐漸變淺，同時，凹陷的寬度變窄。由 此，越在媒體的外側，推挽信號越低，同時，記錄密度也 降低，在媒體的內側和外側，會失去平衡。而且’當 Wgo/Wgi>1.10時，與凹軌部分相對應的記錄層的凹陷深 度從光資訊記錄媒體的內側向外側逐漸變深，同時’凹陷 的寬度變寬。由此，越在媒體的外側，推挽信號越大’同 時，記錄密度也變大，在媒體的內側和外側，會失去平 衡。在本發明中，能夠形成由色素材料構成的記錄層，以 使凹軌部分的記錄層與反射層的介面的高度在光資訊記錄 -11 - 1244649 * (8) 媒體整體上大致相同。 在本發明中，當用Tgi表示從上述凸軌表面上的記錄 層與反射層的介面到位於上述光資訊記錄媒體的內側的第 一凹軌的記錄層與反射層的介面之間的記錄層的凹陷深 度，用Tgo表示從上述凸軌表面上的記錄層與反射層的介 面到位於上述光資訊記錄媒體的外側的第一凹軌的記錄層 與反射層的介面之間的記錄層的凹陷深度，用Tp表示從 上述凸軌表面上的記錄層與反射層的介面到第二凹軌的凹 坑中的記錄層與反射層的介面之間的記錄層的凹陷深度， 用Tpb表示從上述凸軌表面上的記錄層與反射層的介面到 第三凹軌的凹坑中的記錄層與反射層的介面之間的記錄層 的凹陷深度時，Tgi = Tgo<Tpb<Tp爲理想。由此，能夠降 低徑向推挽信號的失真。 在本發明中，形成在上述凹軌的同一凹軌內的凹坑由 第一凹坑和凹軌方向的長度長於第一凹坑的第二凹坑而構 成，當用 Wi表示第一凹坑中的基板半徑方向的最大寬 度，用 W2表示第二凹坑中的基板半徑方向的最大寬度 時，IS Wi /W2<1.2 爲理想。 在本發明中’上述有機色素材料以偶氮系色素材料爲 理想。 根據本發明的第二樣態，提供屬於本發明第一樣態所 述的光資訊記錄媒體的製造方法，其中包括以下步驟： 從原盤的內側向外側以連續變化的曝光強度來照射形 成在原盤上的感光材料，由此，在該感光材料上曝光出對 -12- (9) 1244649 軌的圖 此，在 凹軌的 刻，由 帶有凹 的第一 先將曝 一曝光 曝光強 坑長度 向的寬 二曝光 的大致 記錄媒 光強度 當上述 使曝光 應於第一凹軌、第二凹軌的凹軌和第三凹軌的凹 形，同時，用兩種不同的曝光強度來進行照射，由 該感光材料上曝光出對應於第二凹軌的凹坑和第三 凹坑的圖形； 在上述曝光後，對原盤進行顯影及使用RIE蝕 此，形成對應於第一凹軌、帶有凹坑的第二凹軌和 坑的第三凹軌的圖形； 使用形成了上述圖形的原盤來形成基板； 在該基板上形成記錄層和反射層。 藉由使用本發明的製造方法，能夠製造本發明 樣態的光資訊記錄媒體。 在本發明的光資訊記錄媒體的製造方法中，首 光出與上述凹坑相對應的圖形時的曝光強度設爲第 強度，接著，將其設爲低於第一曝光強度的第二 度，再變更爲第一曝光強度。由此，即使在形成凹 較長的凹軌內凹坑的情況下，也能抑制基板半徑方 度變寬。這是因爲：在原盤曝光時，藉由降低以第 強度進行曝光期間的累積曝光量，來提供藉由凹坑 恒定的累積曝光量。而且，當用T表示再生光資訊 體時的時脈 （Clock)周期時，理想是將以第一曝 來進行曝光之期間分別設定爲1 T〜1 . 5 T。而且， 原盤曝光時，除了上述曝光強度外，理想是還包含 強度爲零之步驟。 在本發明中，理想爲在上述原盤的內側和外側改變 (10) 1244649 RIE所用的氣體的流量，來進行上述RIE所致之蝕刻。由 此，能夠使用RIE而使對應於形成在原盤上的凹軌部分， 形成爲從原盤的內側向外側逐漸變深。 根據本發明的第三樣態，提供一種光資訊記錄媒體， 係屬於具有：形成多個凸軌和凹軌的基板、在該基板上含 有有機色素的記錄層、反射層之光資訊記錄媒體，其特徵 在於，上述凹軌包括： 第一凹軌； 比第一凹軌的寬度寬的第二凹軌； 形成有凹坑的第三凹軌， 第二凹軌設置在第一凹軌與第三凹軌之間， 第一凹軌和第三凹軌的凹軌以從上述光資訊記錄媒體 的內側向外側連續變深這樣的槽深度和連續變寬這樣的槽 寬度來形成。 在本發明的光資訊記錄媒體的基板上形成多個凸軌和 凹軌，並在一部分的凹軌中形成凹軌內凹坑。而且，在凹 軌內凹坑區域與凹軌區域的邊界部分進一步設置形成寬度 比通常的凹軌寬的凹軌（邊界凹軌）的區域（以下稱爲邊 界凹軌區域）。在使用該基板的光資訊記錄媒體中，與僅 形成凹軌內凹坑和凹軌的光資訊記錄媒體相比，由於從凹 軌內凹坑區域向凹軌區域，相鄰的凹軌間的凹軌寬度的變 化是逐漸變化的，因此，徑向推挽信號的失真變少，而能 夠進行穩定的尋軌。而且，形成在本發明的光資訊記錄媒 體的基板上的凹軌以從媒體的內側向外側連續變深這樣的 -14 - (11) 1244649 槽深度和連續變寬這樣的槽寬度來形成。由此，即使在藉 由旋塗（spin coat )在基板上形成由有機色素材料構成的 記録層的情況下，也能形成這樣的記錄層：即凹軌部分的 記錄層與反射層的介面的高度從光資訊記錄媒體 的內側向外側在整體上大致相同。 在本發明的光資訊記錄媒體中，當用 Wgi表示位於 上述光資訊記錄媒體的內側的第一凹軌的半寬値，用Wgo 表示位於上述光資訊記錄媒體的外側的第一凹軌的半寬 値，用Wp表示第二凹軌的凹坑的半寬値，用Wpb表示第 三凹軌的凹坑的半寬値時，Wgi<Wg〇[] Wpb<Wp爲理想。 在本發明的光資訊記錄媒體中，當用dgi表示位於上 述光資訊記錄媒體的內側的第一凹軌距基板表面的深度， 用dg0表示位於上述光資訊記錄媒體的外側的第一凹軌距 基板表面的深度時，深度dgi與深度dgo之比dgo/dgi理 想爲 1.00<dgo/dgiS1.10。當 dgo/dgi$1.00 時，與凹軌 部分相對應的記錄層的凹陷深度從光資訊記錄媒體的內側 向外側逐漸變淺。由此，越在媒體的外側，推挽信號越 低，在媒體的內側和外側，會失去平衡。而且，當 dgo/dgi>1.10時，與凹軌部分相對應的記錄層的凹陷深度 從光資訊記錄媒體的內側向外側逐漸變深。由此，越在媒 體的外側，推挽信號越大，在媒體的內側和外側，會失去 平衡。而且，當dgo/dgi>1.10時，由於媒體外側的凹軌部 分過深，則凹軌部分的光的反射率降低。 而且，在本發明中，半寬値Wgi與半寬値Wgo之比 (12) 12446491244649, (1) 发明. Description of the invention [Technical field to which the invention belongs] The present invention relates to optical information recording media, and in particular, to pre-groove media information such as a maker's name and information for copyright protection measures. An optical information recording medium written in the form of a pre-pit. [Prior Art] In recent years, a DVD (Digital Versatile Disc) having a recording capacity several times larger than that of a CD (Compact Disc) has been widely used as an information recording medium for recording information such as movies and images and sound. Furthermore, for this DVD, DAD-R (write-once digital versatile disc) capable of information recording only once on the user side and DVD-RW (rewritable digital versatile disc) capable of information rewriting ) Has been commercialized, and will gradually become popular as a large-capacity information recording medium in the future. Generally, in DVD-R and DVD-RW, information such as manufacturer information and copyright protection measures information (hereinafter referred to as media information) of the optical disc are stored in advance in the innermost and outermost portions of the disc. These media information are recorded in such a manner that, at the final stage of the disc manufacturing process, a recording device is used, and the recording layer is modified by light irradiation or the like to record. In contrast, a method is disclosed in which media information is not recorded in the above-mentioned recording layer, but in the disc substrate manufacturing stage, embossed pits (grooves) on the substrate are embossed in advance ( einboss pit) (hereinafter referred to as in-groove pit) (for example, refer to Patent 1244649 · (2) Lee literature 1). Figure 1 shows the light produced by this method. A part of the information recording medium. Fig. 1 (a) is an enlarged view of a part of the optical information recording medium, which briefly shows the area formed by the pits in the concave track (hereinafter referred to as the pit area in the concave track). 1 (b) and FIG. 1 (c) are diagrams showing a section along line AA and a line BB in FIG. 1 (a), respectively. In this optical information recording medium, as shown in FIG. 1 (b), when Starting from the convex track surface 1 〇1 a of the substrate 101 on which the land and grooves are formed as a reference, the bottom surface (lowermost) 1 〇7 a of the pit 1 107 in the concave track is formed. The depth dp ”is lower than the bottom surface of the concave rail 105 (most The depth dg ”formed by the surface 105a is deeper. Therefore, when the recording layer 102 and the reflective layer 103 are formed on the pattern forming surface of the substrate 101, a part of the pit 107 in the recessed track is formed and a recessed track is not formed. The part of the recessed track of the inner pit 1 0 7 has a difference in the surface height of each layer formed. Therefore, by utilizing the depth difference between the recessed part of the recessed track and the recessed track part, media information and other materials can be incorporated. (Data) is recorded in the recessed track. Therefore, in an optical information recording medium in which a recording layer is formed by applying a solution containing an organic pigment using a spin coating method, a recording is formed on the outer side (outer periphery) of the medium. The thickness of the layer is thicker than the thickness of the recording layer formed on the inner side (inner peripheral portion) of the medium. This thickness difference varies with the type of organic pigment material and solvent used. This is caused by the drying of the solvent during spin coating and The solution of the organic pigment material is caused by the inner side of the substrate spreading outward. As a result, a recording layer having a thicker outer side than an inner side is formed on the guide groove on the surface of the substrate on which the medium is formed. (3) Question: On the inside and outside of the optical information recording medium, various characteristics such as the change in reflectance, the push-pull signal, and the modulation degree of the recording / reproducing signal become uneven. As To solve this problem, a method has been disclosed in which grooves of a substrate on which a recording layer is formed are gradually deepened and widened from the inner periphery to the outer periphery of the substrate (for example, refer to Patent Document 2). [Patent Document 1] Japanese Patent Japanese Laid-Open Patent Publication No. 200 1 -6 7 73 3 (page 5-6, Figs. 1-3) [Patent Document 2] Japanese Patent Laid-Open Publication No. 2 002 -23 7 1 00 (columns 5-6) When an optical information recording medium having pits in a groove as described above is used to actually record and reproduce information, the pit area in the groove and an area where only grooves serving as a recording area on the user side are formed (hereinafter referred to as When tracking is performed at the boundary portion of the recessed tracking area, the error of tracking failure (err 0r) is confirmed again. This is because, as shown in FIG. 15, by forming recesses 1 5 1 in the recessed rails on the substrate, the side walls of the adjacent raised rails 15 2 are cut. Since the side walls of the adjacent raised rails 15 2 are cut, the area of the upper surface of the raised rails 1 5 2 between the recesses 1 5 1 and 1 5 3 in the recessed rails is smaller than that of the conventional recessed rails 1 5 3 Area of the upper surface of the convex track 1 5 4. As a result, the area difference between the areas of the recording layer and the reflective layer formed on the bumps 1 2 5 and the bumps 1 5 4 occurs. When the concave track 153 between the convex track 152 and the convex track 154 is tracked by the spot SP, even if the light spot SP is located at the center of the concave track 153, the result is obtained from the convex track 1 5 4 There will also be a difference between the amount of reflected light RF 1 and the amount of reflected light distance 2 obtained from the convex track 1 5 2 with a diameter of -7- (4) (4) f 1244649 radial push-pull ) The signal is offset. As a result, the trench can be tracked well, causing an increase in jitter and a decrease in modulation. Moreover, in this case, tracking failures have also occurred. In the actual radial push-pull signal detection, when using an optical pickup (pick-up) with a wavelength of λ = 6 50 nm and a numerical aperture of NA 0.6, the light spot with a diameter of ψ = 1 μm is in the light. Hand-drawing on the information recording medium along the radial direction. At this time, because the optical information recording medium rotates at a high speed, the light spot is not scanned in a direction perpendicular to the tracking direction, but is scanned in an obtuse angle with the tracking direction. Since the radial push-pull signal does not have a frequency characteristic capable of being detected by decomposable pits, the pit portion formed in the groove deeper than the groove track is detected in the same manner as a wide groove. Therefore, in this case, the boundary between the pit region and the recessed rail region within the recessed rail is taken as a boundary, and the width of the recessed rail is extremely changed, which causes distortion of the radial push-pull signal. Especially in D V D-R and D V D-R W, the radial push-pull signal is used for tracking. Due to the offset and distortion of the radial push-pull signal, a tracking error is caused. Therefore, in DVD-R and DVD-RW, the above-mentioned tracking errors must be prevented. In addition, the substrate of the optical information recording medium having pits in the tracks is produced using a master disk etched by a general RIE device. However, when a groove is formed on the surface of the master disk by etching using a general RIE device. 'The depth of the formed trench is approximately constant. With such a device, it is difficult to form grooves that continuously deepen from the inside to the outside on the surface of the original disk. 1244649 (5) [Summary of the Invention] Therefore, the object of the present invention is to provide an optical information recording medium and a manufacturing method thereof. This makes it possible to obtain a stable radial push-pull signal even in the case where the boundary portion between the pit region and the recessed rail region in the above-mentioned recessed rail is tracked. Another object of the present invention is to provide an optical information recording medium and a method for manufacturing the same. With respect to an optical information recording medium having pits in a groove formed by a recording layer composed of a pigment material, reflection is suppressed on the inside and outside of the medium. The rate change makes each characteristic uniform. According to a first aspect of the present invention, an optical information recording medium is provided, which belongs to a substrate having a plurality of convex tracks and concave tracks, a recording layer containing an organic pigment on the substrate, and a reflective recording medium. , Characterized in that the above-mentioned recessed rail includes: a first recessed rail; a second recessed rail formed with a pit; a third recessed rail formed with a pit having a width narrower than that of the second recessed rail, and the third recessed rail is provided Between the first recessed track and the second recessed track, the first recessed track, the recessed track of the second recessed track, and the recessed track of the third recessed track continuously deepen from the inside to the outside of the optical information recording medium. The groove depth and continuous groove width are formed. A plurality of convex tracks and concave tracks are formed on the substrate of the optical information recording medium of the present invention, and pits (pits in the concave tracks) are formed in a part of the concave tracks. On the boundary between the area where the pits are formed in the recessed rail (the area within the recessed pit) and the area where only the recessed winter (6) 1244649 is formed (the recessed rail area), a narrower width than the above-mentioned recessed rail is formed. The inner pit area (hereinafter referred to as the boundary pit area) of the inner track of the inner pit. As a result, a shape that gradually changes from the pit region in the recessed rail to the recessed rail region is obtained on the substrate surface. In this way, in the optical information recording medium using the substrate, the radial push-pull signal can be made even when tracking is performed across the boundary between the area formed by the pits in the recessed track and the area where only the recessed track is formed. Distortion is reduced, enabling stable tracking. Further, the recessed rail formed on the substrate of the optical information recording medium of the present invention is formed with a groove depth such that it continuously deepens from the inside to the outside of the medium and a groove width such that it continuously widens. Therefore, even when a recording layer made of an organic pigment material is formed on a substrate by spin coating, a recording layer can be formed in which the height of the interface between the recording layer and the reflective layer in the recessed track portion varies with It is substantially the same from the inside to the outside of the optical information recording medium. In the optical information recording medium of the present invention, the half width of the first concave track located inside the optical information recording medium is represented by Wgi, and the half width of the first concave track located outside the optical information recording medium is represented by Wgo.値, Wp represents the half-width 値 of the pits of the second recessed rail, and Wpb represents the half-width 値 of the pits of the third recessed rail, ideally Wgi < Wgo S Wpb < Wp. Moreover, the ratio Wp / Wpb of the half-width 値 Wp to the half-width 値 Wpb is ideally 1.05 SWp / WpbS1.15. When Wp / Wpb < l.05, offset and distortion are prone to occur in the radial push-pull signal in the first concave track, and when 1.15 < Wp / Wpb, due to the concave track formed in the third concave track The signal modulation of the inner pit becomes lower, which is not ideal. In the optical information recording medium of the present invention, when dgi is used to represent the depth of the first concave track from the substrate surface within & 1244649, (7), and dgo is used to indicate the depth of the optical information recording. When the depth of the first concave track on the outer side of the medium from the substrate surface, the ratio dgo / dgi of the depth dgi to the depth dgo is preferably 1.00 < dgo / dgiS1.10. When dgo / dgiSl.〇〇, the depth of the depression of the recording layer corresponding to the concave track portion gradually becomes shallower from the inside to the outside of the optical information recording medium. Therefore, the push-pull signal is lower as it is outside the media, and the balance is lost on the inside and outside of the media. Moreover, when dgo / dgi > l · 10, the pit depth of the recording layer corresponding to the pit track portion gradually becomes deeper from the inside to the outside of the optical information recording medium. Therefore, the more the push-pull signal is on the outside of the media, the more the balance between the inside and the outside of the media is lost. Furthermore, when dgo / dgi > 1.10, since the concave track portion on the outer side of the medium is too deep, the light reflectance of the concave track portion is reduced. Furthermore, in the present invention, the ratio Wgo / Wgi of half-width 値 Wgi to half-width 値 Wgo is preferably 1.03SWgo / WgiD1.10. When Wgo / Wgi < 1.03, the depth of the depression of the recording layer corresponding to the concave track portion gradually becomes shallower from the inside to the outside of the optical information recording medium, and at the same time, the width of the depression becomes narrower. As a result, the push-pull signal is lower as it is outside the media, and at the same time, the recording density is reduced, and the balance is lost on the inside and outside of the media. Further, when 'Wgo / Wgi > 1.10, the recess depth of the recording layer corresponding to the recessed track portion gradually becomes deeper from the inside to the outside of the optical information recording medium, and at the same time, the width of the recess is wider. As a result, the larger the push-pull signal is on the outside of the medium, the higher the recording density becomes, and the balance is lost on the inside and outside of the medium. In the present invention, a recording layer made of a pigment material can be formed so that the height of the interface between the recording layer and the reflective layer in the recessed track portion is substantially the same in the optical information recording -11-1244649 *. In the present invention, when Tgi is used to indicate the recording layer from the interface between the recording layer and the reflective layer on the surface of the convex track to the interface between the recording layer and the reflective layer of the first concave track located inside the optical information recording medium, The depth of the depression is represented by Tgo from the interface of the recording layer and the reflective layer on the surface of the convex track to the depression of the recording layer between the recording layer of the first concave track and the interface of the reflective layer on the outside of the optical information recording medium. Depth, the depth of the depression of the recording layer from the interface of the recording layer and the reflective layer on the surface of the convex track to the interface of the recording layer and the reflective layer in the pits of the second concave track is represented by Tp, and When the depth of the depression of the recording layer on the surface of the convex track from the interface between the recording layer and the reflective layer in the pit of the third concave track and the interface of the reflective layer, Tgi = Tgo < Tpb < Tp is ideal. This can reduce the distortion of the radial push-pull signal. In the present invention, the dimples formed in the same dimple rail are composed of a first dimple and a second dimple whose length in the dimple direction is longer than the first dimple. When the first dimple is represented by Wi When the maximum width of the substrate in the radial direction of the substrate is represented by W2, and the maximum width of the substrate in the radial direction of the second pit is represented by W2, IS Wi / W2 < 1.2 is desirable. In the present invention, the above-mentioned organic pigment material is preferably an azo pigment material. According to a second aspect of the present invention, there is provided a method for manufacturing an optical information recording medium according to the first aspect of the present invention, including the following steps: irradiating the original disc with a continuously changing exposure intensity from the inside to the outside of the original disc to form the original disc On the photosensitive material, thereby exposing the figure of the -12- (9) 1244649 track on the photosensitive material. At the moment of the concave track, the first with the concave will be exposed first to expose the strong pit length. The approximate recording medium light intensity of the wide two-direction exposure is as described above. The exposure should be in the concave shape of the first concave track, the second concave track, and the third concave track. At the same time, the exposure is performed with two different exposure intensities. The patterns corresponding to the pits of the second recessed track and the third pits are exposed from the photosensitive material; after the above exposure, the original disk is developed and etched using RIE to form the first recessed track with the Patterns of the second recessed track of the pit and the third recessed track of the pit; forming a substrate using the original disk on which the above pattern is formed; and forming a recording layer and a reflective layer on the substrate. By using the manufacturing method of the present invention, an optical information recording medium according to the aspect of the present invention can be manufactured. In the method for manufacturing an optical information recording medium according to the present invention, the exposure intensity when the pattern corresponding to the pit is first emitted is set to a second intensity, and then set to a second degree lower than the first exposure intensity, Then change to the first exposure intensity. This makes it possible to prevent the substrate from becoming wider in the radius, even when the pits in the long concave tracks are formed. This is because at the time of the original disc exposure, a constant cumulative exposure amount by pits is provided by reducing the cumulative exposure amount during the exposure at the third intensity. Furthermore, when the clock cycle when the optical information body is reproduced is represented by T, it is desirable to set the periods during which the first exposure is performed to 1 T to 1.5 T, respectively. In addition, when the original disc is exposed, it is desirable to include a step of zero intensity in addition to the above-mentioned exposure intensity. In the present invention, it is desirable to perform the etching by the RIE by changing the flow rate of the gas used in (10) 1244649 RIE on the inside and outside of the original disk. Therefore, the portion corresponding to the recessed rail formed on the original disk can be formed gradually deeper from the inside to the outside of the original disk using RIE. According to a third aspect of the present invention, there is provided an optical information recording medium, which belongs to an optical information recording medium having a substrate formed with a plurality of convex tracks and concave tracks, a recording layer containing an organic pigment on the substrate, and a reflective layer. It is characterized in that the above-mentioned recessed rail includes: a first recessed rail; a second recessed rail wider than the width of the first recessed rail; a third recessed rail formed with a pit, and the second recessed rail is disposed between the first recessed rail and the first recessed rail. Between the three recessed tracks, the recessed tracks of the first recessed track and the third recessed track are formed with a groove depth such as continuously deepening from the inside to the outside of the optical information recording medium and a groove width such as continuously widening. A plurality of convex tracks and concave tracks are formed on the substrate of the optical information recording medium of the present invention, and pits in the concave tracks are formed in a part of the concave tracks. Furthermore, a region (hereinafter referred to as a “boundary recessed rail region”) is formed in a boundary portion between the pit region and the recessed rail region to form a recessed rail (boundary recessed rail) having a width wider than a normal recessed rail. In an optical information recording medium using this substrate, compared with an optical information recording medium in which only pits in the recessed tracks and recessed tracks are formed, the recesses between adjacent recessed tracks are reduced from the pits in the recessed tracks to the recessed track regions. The change of the track width is gradually changed. Therefore, the distortion of the radial push-pull signal is reduced, and stable tracking can be performed. Further, the recessed track formed on the substrate of the optical information recording medium of the present invention is formed with a groove depth such as -14-(11) 1244649 which continuously deepens from the inside to the outside of the medium and a groove width which continuously widens. Thus, even in the case where a recording layer made of an organic pigment material is formed on a substrate by spin coating, a recording layer can be formed, that is, the interface between the recording layer of the recessed track portion and the reflective layer. The height is substantially the same from the inside to the outside of the optical information recording medium. In the optical information recording medium of the present invention, when Wgi is used to represent the half width of the first concave track located inside the optical information recording medium, Wgo is used to represent the half width of the first concave track located outside the optical information recording medium. When the width width is Wp and the half width width of the pits of the second recessed rail is represented by Wp, and Wpb is the half width width of the pits of the third recessed rail, Wgi < Wg0 [] Wpb < In the optical information recording medium of the present invention, when dgi is used to represent the depth of the surface of the first concave gauge on the substrate inside the optical information recording medium, and dg0 is used to represent the first concave gauge on the outside of the optical information recording medium. When the substrate surface is deep, the ratio dgo / dgi of the depth dgi to the depth dgo is preferably 1.00 < dgo / dgiS1.10. When dgo / dgi $ 1.00, the depression depth of the recording layer corresponding to the concave track portion gradually becomes shallower from the inside to the outside of the optical information recording medium. As a result, the push-pull signal is lower as it is outside the media, and the balance is lost on the inside and outside of the media. Furthermore, when dgo / dgi > 1.10, the pit depth of the recording layer corresponding to the concave track portion gradually becomes deeper from the inside to the outside of the optical information recording medium. As a result, the larger the push-pull signal is on the outside of the media, the more it is out of balance on the inside and outside of the media. Furthermore, when dgo / dgi > 1.10, since the concave rail portion on the outer side of the medium is too deep, the light reflectance of the concave rail portion decreases. Moreover, in the present invention, the ratio of half-width 値 Wgi to half-width 値 Wgo (12) 1244649
Wgo/Wgi 理想爲 l.〇3SWgo/Wgigl.l〇。當 Wg/Wgi<1.03 時，與凹軌部分相對應的記錄層的凹陷深度從光資訊記錄 媒體的內側向外側逐漸變淺，同時，凹陷的寬度變窄。由 此，越在媒體的外側，推挽信號越低’同時’記錄密度也 降低，在媒體的內側和外側，會失去平衡。而且，當 Wgo/Wgi>1.03時，與凹軌部分相對應的記錄層的凹陷深 度從光資訊記錄媒體的內側向外側逐漸變深’同時’凹陷 的寬度變寬。由此，越在媒體的外側’推挽信號越大’同 時，記錄密度也變大，在媒體的內側和外側’會失去平 衡。在本發明中，能夠形成由色素材料所構成的記錄層’ 以使凹軌部分的記錄層與反射層的介面的高度在光資訊記 錄媒體整體上大致相同。 在本發明中，當用Tgi表示從上述凸軌表面上的記錄 層與反射層的介面到位於上述光資訊記錄媒體的內側的第 一凹軌的記錄層與反射層的介面之間的記錄層的凹陷深 度，用Tg0表示從上述凸軌表面上的記錄層與反射層的介 面到位於上述光資訊記錄媒體的外側的第一凹軌的記錄層 與反射層的介面之間的記錄層的凹陷深度’用T P表示從 上述凸軌表面上的記錄層與反射層的介面到第二凹軌的凹 坑中的記錄層與反射層的介面之間的記錄層的凹陷深度， 用Tpb表示從上述凸軌表面上的記錄層與反射層的介面到 第三凹軌的凹坑中的記錄層與反射層的介面之間的記錄層 的凹陷深度時，理想爲TSi = Tg〇<TPb<TP。而且’形成在 上述凹軌的同一凹軌內的凹坑由第一凹坑和凹軌方向的長 -16 · (13) 1244649 度長於第一凹坑的第二凹坑而構成，當用wi表示第一凹 坑中的基板半徑方向的最大寬度，用W 2表示第二凹坑中 的基板半徑方向的最大寬度時，理想爲1 f Wi /W2<1 .2。 在本發明中，上述有機色素材料以偶氮系色素材料爲 理想。 根據本發明的第四樣態，提供一種屬於第3樣態光資 訊記錄媒體的製造方法，其中包括以下步驟： 從原盤的內側向外側以連續變化的曝光強度來照射形 成在原盤上的感光材料，由此，在該感光材料上曝光出對 應於第一凹軌、第二凹軌的凹軌和第三凹軌的凹軌的圖 形，同時，用兩種不同的曝光強度來進行照射，由此，在 該感光材料上曝光出對應於第二凹軌的凹坑和第三凹軌的 凹坑的圖形； 在上述曝光後，對原盤進行顯影及使用RIE蝕刻，由 此，形成對應於第一凹軌、帶有凹坑的第二凹軌和帶有凹 坑的第三凹軌的圖形； 使用形成了上述圖形的原盤來形成基板； 在該基板上形成記錄層和反射層。 藉由使用本發明的製造方法，能夠製造本發明的第三 樣態的光資訊記錄媒體。 在本發明中，把曝光出與上述凹坑相對應的圖形時的 曝光強度首先設爲第一曝光強度，接著，將其設爲低於第 一曝光強度的光強的第二曝光強度，再變更爲第一曝光強 度。由此，即使在形成凹坑長度較長的凹軌內凹坑的情況 (14) 1244649 下’也能抑制基板半徑方向的寬度變寬。而且，當用T表 $再生光資訊記錄媒體時的時脈周期時，將以第一曝光強 度來進行曝光之期間分別設定爲1 Τ〜1 . 5 Τ。而且，還包 括這樣的步驟：即當上述原盤曝光時，除了上述曝光強度 外’使曝光強度爲零。並且，在上述原盤的內側和外側改 變用於RIE的氣體的流量，來進行上述RIE所産生的蝕 刻。由此，能夠使用RIE而使對應於形成在原盤上的凹軌 部分，形成爲從原盤的內側向外側逐漸變深。 根據本發明的第五樣態，提供一種光資訊記錄媒體， 其具有：形成多個凸軌和凹軌的基板、在該基板上含有有 機色素的記錄層、反射層之光資訊記錄媒體，其特徵在 於，上述凹軌包括： 第一凹軌； 比第一凹軌的寬度寬的第二凹軌； 形成凹坑的第三凹軌； 形成寬度比第三凹軌的凹坑窄的凹坑的第四凹軌， 第一〜第四凹軌按第一凹軌、第二凹軌、第四凹軌、 第三凹軌的順序設置， 第一凹軌、第三凹軌的凹軌和第三凹軌的凹軌以從上 述光資訊記錄媒體的內側向外側連續變深這樣的槽深度和 連續變寬這樣的槽寬度來形成。 在本發明的光資訊記錄媒體的基板上形成多個凸軌和 凹軌，並在一部分的凹軌中形成凹軌內凹坑；而且，在凹 軌內凹坑區域與凹軌區域之間設置邊界凹坑區域，而且， -18- (15) 1244649 在邊界凹坑區域與凹軌區域之後間設置寬度比通常的凹軌 寬的邊界凹軌。在使用該基板的光資訊記錄媒體中，藉由 設置邊界凹軌區域，由於從凹軌區域向邊界凹軌區域，相 鄰的凹軌寬度的變化是逐漸變化的，因此，與第一樣態的 光資訊記錄媒體相比，能夠進一步抑制徑向推挽信號的失 真。而且，由於在凹軌區域與邊界凹坑區域之間設置邊界 凹軌區域，與不存在邊界凹軌區域的情況相比，能夠使邊 界凹坑區域中的凹軌內凹坑的尺寸變大。由此，能夠從邊 界凹坑區域的凹軌內凹坑得到調變度高的再生信號。而 且，形成在本發明的光資訊記錄媒體的基板上的凹軌以從 媒體的內側向外側連續變深這樣的槽深度和連續變寬這樣 的槽寬度來形成。由此，即便在藉由旋塗而在基板上形成 由有機色素材料構成的記錄層的情況下，也能形成這樣的 記錄層：即凹軌部分的記錄層與反射層的介面的高度從光 資訊記錄媒體的內側向外側在整體上大致相同。 在本發明的光資訊記錄媒體中，當用 Wgi表示位於 上述光資訊記錄媒體的內側的第一凹軌的半寬値，用Wgo 表示位於上述光資訊記錄媒體的外側的第一凹軌的半寬 値，用Wp表示第二凹軌的凹坑的半寬値，用Wpb表示第 三凹軌的凹坑的半寬値時，理想爲 Wgi<Wg〇SWpb<Wp。 而且，半寬値 Wp與半寬値 Wpb之比 Wp/Wpb理想爲 l.〇5SWp/Wpb$1.15。如上述，當 Wp/Wpb<1.05 時，在 第一凹軌中的徑向推挽信號中容易發生偏移和失真，當 1 . 1 5<Wp/Wpb時，由於來自形成在第三凹軌的凹軌內凹坑 ~ 1S ~ (16) 1244649 的信號調變度變低，故非理想。 在本發明的光資訊記錄媒體中，當用當用d gi表示位 於上述光資訊記錄媒體的內側的第一凹軌距基板表面的深 度，用d g 〇表示位於上述光資訊記錄媒體的外側的第一凹 軌距基板表面的深度時，深度dgi與深度dg〇之比 dg0/dgi 爲 1 .00<dgo/dgi $ 1 · 1 〇。當 dgo/dgi S 1 .00 時，與 凹軌部分相對應的記錄層的凹陷深度從光資訊記錄媒體的 內側向外側逐漸變淺。由此，越在媒體的外側，推挽信號 越低，在媒體的內側和外側，平衡被打破。而且’當 d g 〇 / d g i > 1 . 1 0時，與凹軌部分相對應的記錄層的凹陷深度 從光資訊記錄媒體的內側向外側逐漸變深。由此’越在媒 體的外側，推挽信號越大，在媒體的內側和外側，會失去 平衡。而且，當d g 〇 / d g i > 1 . 1 〇時，由於媒體外側的凹軌部 分過深，則凹軌部分的光的反射率降低。 而且，在本發明中，半寬値Wgi與半寬値Wgo之比Wgo / Wgi is ideally 1.03SWgo / Wgigl.l0. When Wg / Wgi < 1.03, the depth of the depression of the recording layer corresponding to the concave track portion gradually becomes shallower from the inside to the outside of the optical information recording medium, and at the same time, the width of the depression becomes narrower. As a result, the lower the push-pull signal is at the same time as the outside of the medium, the lower the recording density is, and the balance is lost on the inside and outside of the medium. Furthermore, when Wgo / Wgi > 1.03, the pit depth of the recording layer corresponding to the concave track portion gradually becomes deeper from the inside to the outside of the optical information recording medium 'while the pit width becomes wider. As a result, the larger the push-pull signal is outside the medium, the higher the recording density is, and the balance is lost between the inside and the outside of the medium. In the present invention, a recording layer 'made of a pigment material can be formed so that the height of the interface between the recording layer and the reflective layer in the recessed track portion is substantially the same in the entire optical information recording medium. In the present invention, when Tgi is used to indicate the recording layer from the interface between the recording layer and the reflective layer on the surface of the convex track to the interface between the recording layer and the reflective layer of the first concave track located inside the optical information recording medium, The depth of the depression is represented by Tg0 from the interface between the recording layer and the reflective layer on the surface of the convex track to the recording layer between the recording layer of the first concave track and the interface of the reflective layer on the outside of the optical information recording medium. Depth 'uses TP to denote the depth of the depression of the recording layer from the interface between the recording layer and the reflective layer on the surface of the convex track to the interface between the recording layer and the reflective layer in the pits of the second concave track, and Tpb represents the distance from the above. The recess depth of the recording layer between the interface of the recording layer and the reflective layer on the surface of the convex track and the interface of the recording layer and the interface of the reflective layer in the pits of the third concave track is ideally TSi = Tg. ≪ TPb < TP . Moreover, the pits formed in the same recessed rail as described above are composed of the first recessed pit and the length of the recessed rail in the direction of -16 · (13) 1244649 degrees longer than the first recessed pit. When the maximum width in the radial direction of the substrate in the first pit is represented, and the maximum width in the radial direction of the substrate in the second pit is represented by W 2, it is ideally 1 f Wi / W2 < 1.2. In the present invention, the organic pigment material is preferably an azo pigment material. According to a fourth aspect of the present invention, there is provided a method for manufacturing an optical information recording medium belonging to the third aspect, including the following steps: irradiating a photosensitive material formed on the original disc with a continuously varying exposure intensity from the inside to the outside of the original disc Therefore, the patterns corresponding to the concave tracks of the first concave track, the second concave track, and the third concave track are exposed on the photosensitive material, and at the same time, irradiation is performed with two different exposure intensities. Then, a pattern corresponding to the pits of the second recessed track and the pits of the third recessed track is exposed on the photosensitive material; after the above exposure, the original disk is developed and etched using RIE, thereby forming a pattern corresponding to the first A pattern of a recessed track, a second recessed track with a pit, and a third recessed track with a pit; a master disk on which the above pattern is formed to form a substrate; and a recording layer and a reflective layer are formed on the substrate. By using the manufacturing method of the present invention, an optical information recording medium in a third aspect of the present invention can be manufactured. In the present invention, the exposure intensity when a pattern corresponding to the pit is exposed is first set to a first exposure intensity, and then set to a second exposure intensity that is lower than the first exposure intensity, and then Change to the first exposure intensity. Therefore, even in the case of forming a pit in a rail with a long pit length (14) 1244649 down ', it is possible to suppress the width in the radial direction of the substrate from becoming wider. In addition, when the clock cycle when the optical information recording medium is reproduced with the T meter $, the periods of exposure at the first exposure intensity are set to 1T to 1.5T, respectively. Furthermore, it includes the step of making the exposure intensity zero when the original disc is exposed, in addition to the exposure intensity. Then, the flow rate of the gas for RIE is changed on the inside and outside of the original disk to perform the etching by the RIE. Thereby, the portion corresponding to the recessed rail formed on the original disk can be formed to gradually deepen from the inside to the outside of the original disk using RIE. According to a fifth aspect of the present invention, there is provided an optical information recording medium including: a substrate on which a plurality of convex tracks and concave tracks are formed; a recording layer containing an organic pigment on the substrate; and a light information recording medium having a reflective layer. It is characterized in that the above-mentioned recessed rail includes: a first recessed rail; a second recessed rail wider than the width of the first recessed rail; a third recessed rail forming a pit; and a recessed pit having a width narrower than that of the third recessed rail The fourth recessed rail, the first to fourth recessed rails are arranged in the order of the first recessed rail, the second recessed rail, the fourth recessed rail, and the third recessed rail, the first recessed rail, the third recessed rail, and the first recessed rail. The concave tracks of the three concave tracks are formed by a groove depth such that they continuously deepen from the inside to the outside of the optical information recording medium and a groove width such that they continuously widen. A plurality of convex tracks and concave tracks are formed on the substrate of the optical information recording medium of the present invention, and in-recess pits are formed in a part of the indented tracks; The boundary pit area is further provided with a boundary pit width wider than a normal pit rail between -18- (15) 1244649 and the rear pit area. In the optical information recording medium using the substrate, the boundary recessed rail region is provided. Since the width of the adjacent recessed rail changes gradually from the recessed rail region to the boundary recessed rail region, it is the same as the first state. Compared with the optical information recording medium, it can further suppress the distortion of the radial push-pull signal. Furthermore, since the boundary recessed rail region is provided between the recessed rail region and the boundary recessed pit region, the size of the pits in the recessed rail in the boundary pit region can be made larger than in the case where there is no boundary recessed rail region. Thereby, a reproduction signal having a high modulation degree can be obtained from the pits in the grooves of the boundary pit area. Further, the recessed rail formed on the substrate of the optical information recording medium of the present invention is formed with a groove depth such as continuously deepening from the inside to the outside of the medium and a groove width such as continuously widening. Accordingly, even when a recording layer made of an organic pigment material is formed on a substrate by spin coating, a recording layer can be formed in which the height of the interface between the recording layer and the reflective layer in the recessed track portion is from the light The information recording medium is substantially the same from the inside to the outside. In the optical information recording medium of the present invention, when Wgi is used to represent the half width of the first concave track located inside the optical information recording medium, Wgo is used to represent the half width of the first concave track located outside the optical information recording medium. When the width width is Wp, the half width width of the pits of the second recessed rail and Wpb is the half width width of the pits of the third recessed rail. Ideally, Wgi < Wg0 SWpb < Wp. Moreover, the ratio Wp / Wpb of half-width 値 Wp to half-width 値 Wpb is desirably 1.05 SWp / Wpb $ 1.15. As described above, when Wp / Wpb < 1.05, offset and distortion easily occur in the radial push-pull signal in the first concave track, and when 1. 15 < Wp / Wpb, due to the formation from the third concave track The pits in the recessed rails ~ 1S ~ (16) 1244649 have low signal modulation, so they are not ideal. In the optical information recording medium of the present invention, d gi is used to indicate the depth of the first concave track located on the inner side of the optical information recording medium from the surface of the substrate, and dg 〇 is used to indicate the first When the depth of a concave track from the substrate surface, the ratio dg0 / dgi of the depth dgi to the depth dg〇 is 1. 00 < dgo / dgi $ 1 · 1 〇. When dgo / dgi S 1.00, the depression depth of the recording layer corresponding to the concave track portion gradually becomes shallower from the inside to the outside of the optical information recording medium. As a result, the push-pull signal is lower as it is outside the media, and the balance is broken on the inside and outside of the media. Furthermore, when d g 0 / d g i > 1. 10, the depth of the depression of the recording layer corresponding to the concave track portion gradually becomes deeper from the inside to the outside of the optical information recording medium. Therefore, the more 'outside of the media, the larger the push-pull signal is, the more the inside and outside of the media will lose balance. Furthermore, when d g 0 / d g i > 1. 10, since the concave rail portion on the outer side of the medium is too deep, the light reflectance of the concave rail portion decreases. Moreover, in the present invention, the ratio of half-width 値 Wgi to half-width 値 Wgo
Wgo/Wgi 理想爲 1.03SWgo/Wgi€l.l〇。當 Wgo/Wgi<1.03 時，與凹軌部分相對應的記錄層的凹陷深度從光資訊記錄 媒體的內側向外側逐漸變淺，同時，凹陷的寬度變窄。由 此，越在媒體的外側，推挽信號越低，同時’記錄密度也 降低，在媒體的內側和外側，會失去平衡。而且’當 Wg〇/Wgi>1.10時，與凹軌部分相對應的記錄層的凹陷深 度從光資訊記錄媒體的內側向外側逐漸變深’同時’凹陷 的寬度變寬。由此，越在媒體的外側，推挽信號越大’同 時，記錄密度也變大，在媒體的內側和外側’會失去平 _ - 1244649 (17) 衡。在本發明中，能夠形成由色素材料所構成的記錄層， 以便凹軌部分的記錄層與反射層的介面的高度在光資訊記 錄媒體整體上大致相同。 在本發明中，當用Tgi表示從上述凸軌表面上的記錄 層與反射層的介面到位於上述光資訊記錄媒體的內側的第 一凹軌的記錄層與反射層的介面之間的記錄層的凹陷深 度，用Tgo表示從上述凸軌表面上的記錄層與反射層的介 面到位於上述光資訊記錄媒體的外側的第一凹軌的記錄層 與反射層的介面的記錄層的凹陷深度，用Tgb表示從上述 凸軌表面上的記錄層與反射層的介面到第二凹軌中的記錄 層與反射層的介面之間的記錄層的凹陷深度，用TP表示 從上述凸軌表面上的記錄層與反射層的介面到第三凹軌的 凹坑中的記錄層與反射層的介面之間的記錄層的凹陷深 度，用Tpb表示從上述凸軌表面上的記錄層與反射層的介 面到第四凹軌的凹坑中的記錄層與反射層的介面之間的記 錄層的凹陷深度時，理想爲 Tgi = Tgo<Tgb<Tpb<Tp。由 此，能夠降低徑向推挽信號的失真。 而且，形成在上述凹軌的同一凹軌內的凹坑由第一凹 坑和凹軌方向的長度長於第一凹坑的第二凹坑而構成，當 用Wi表示第一凹坑中的基板半徑方向的最大寬度，用W2 表示第二凹坑中的基板半徑方向的最大寬度時，理想爲1 $ W】/W2<1 .2。 在本發明中，上述有機色素材料以偶氮系色素材料爲 理想。 (18) 1244649 根據本發明的第六樣態，提供一種第五樣態之光資訊 記錄媒體的製造方法，其中包括以下步驟： 從原盤的內側向外側以連續變化的曝光強度來照射形 成在原盤上的感光材料，由此，在該感光材料上曝光出對 應於第一凹軌、第三凹軌的凹軌和第四凹軌的凹軌的圖 形，同時，用三種不同的曝光強度來進行照射，由此，在 該感光材料上曝光出對應於第二凹軌、第三凹軌的凹坑和 第四凹軌的凹坑的圖形； 在上述曝光後，對原盤進行顯影及使用RIE蝕刻，由 此，形成對應於第一凹坑、第二凹軌、帶有凹坑的第三凹 軌和帶有凹坑的第四凹軌的圖形； 使用形成了上述圖形的原盤來形成基板； 在該基板上形成記錄層和反射層。 藉由使用本發明的製造方法，能夠製造本發明的第五 樣態的光資訊記錄媒體。Wgo / Wgi is ideally 1.03SWgo / Wgi € 1.10. When Wgo / Wgi < 1.03, the depth of the depression of the recording layer corresponding to the concave track portion gradually becomes shallower from the inside to the outside of the optical information recording medium, and at the same time, the width of the depression becomes narrower. As a result, the push-pull signal is lower as it is outside the medium, and at the same time, the recording density is lowered, and the balance is lost on the inside and outside of the medium. Further, when "Wg0 / Wgi > 1.10, the pit depth of the recording layer corresponding to the concave track portion gradually becomes deeper from the inside to the outside of the optical information recording medium" and at the same time, the pit width becomes wider. As a result, the larger the push-pull signal is at the outer side of the medium, the higher the recording density becomes, and the inner and outer sides of the medium will lose the balance. In the present invention, a recording layer made of a pigment material can be formed so that the height of the interface between the recording layer of the recessed track portion and the reflective layer is substantially the same as the entire optical information recording medium. In the present invention, when Tgi is used to indicate the recording layer from the interface between the recording layer and the reflective layer on the surface of the convex track to the interface between the recording layer and the reflective layer of the first concave track located inside the optical information recording medium, The depth of the depression is represented by Tgo from the interface between the recording layer and the reflective layer on the surface of the convex track to the recording layer at the interface between the recording layer and the reflective layer of the first concave track located outside the optical information recording medium. Denotation depth of the recording layer from the interface between the recording layer and the reflective layer on the surface of the convex track to the interface between the recording layer and the reflective layer in the second concave track is represented by Tgb. The depth of the depression of the recording layer between the interface between the recording layer and the reflective layer and the interface between the recording layer and the reflective layer in the pits of the third recessed track is represented by Tpb from the interface between the recording layer and the reflective layer on the surface of the raised track. When the depth of the depression of the recording layer between the recording layer and the interface of the reflective layer in the pits of the fourth groove is ideal, Tgi = Tgo < Tgb < Tpb < Tp. This can reduce the distortion of the radial push-pull signal. Moreover, the pits formed in the same recessed rail are composed of a first recess and a second recess having a length in the direction of the recess longer than the first recess. When the substrate in the first recess is represented by Wi When the maximum width in the radial direction is represented by W2, the maximum width in the radial direction of the substrate in the second pit is preferably 1 $ W] / W2 < 1.2. In the present invention, the organic pigment material is preferably an azo pigment material. (18) 1244649 According to a sixth aspect of the present invention, there is provided a method for manufacturing a light information recording medium in a fifth aspect, which includes the following steps: irradiating the original disc with a continuously changing exposure intensity from the inside to the outside of the original disc to form the original disc Therefore, the patterns corresponding to the concave tracks of the first concave track, the third concave track, and the fourth concave track are exposed on the photosensitive material, and at the same time, three different exposure intensities are used to perform By irradiation, patterns corresponding to the pits of the second concave track, the third concave track, and the fourth concave track are exposed on the photosensitive material; after the above exposure, the original disk is developed and RIE-etched , Thereby forming patterns corresponding to the first pit, the second pit, the third pit with pits, and the fourth pit with pits; using the original disk on which the above patterns are formed to form the substrate; A recording layer and a reflective layer are formed on the substrate. By using the manufacturing method of the present invention, an optical information recording medium in a fifth aspect of the present invention can be manufactured.
在本發明中，把曝光出與上述凹坑相對應的圖形時的 曝光強度首先設爲第一曝光強度，接著，將其設爲低於第 一曝光強度的光強第二曝光強度，再變更爲第一曝光強 度。由此，即使在形成凹坑長度較長的凹軌內凹坑的情況 下，也能抑制基板半徑方向的寬度變寬。這是因爲：在原 盤曝光時，藉由降低以第二曝光強度進行曝光期間的累積 曝光量，來提供藉由凹坑的大致恒定的累積曝光量。而 且，當用T表示再生光資訊記錄媒體時的時脈周期時，理 想是將以第一曝光強度來進行曝光之期間分別設定爲1 T -22- (19) 1244649 〜】·5Τ。而且，還包括這樣的步驟：即當上述原盤曝光 時，除了上述曝光強度外，使曝光強度爲零。 在本發明中’在上述原盤的內側和外側改變RIE所用 的氣體的流量，來進行上述RIE所致之蝕刻。由此，能夠 使用RIE而使對應於形成在原盤上的凹軌部分，形成爲從 原盤的內側向外側逐漸變深。 在本發明中’提供用玻璃形成的原盤來作爲在上述樣 態的光資訊記錄媒體的製造方法使用的原盤。而且，在本 發明中，一種壓模（stamper)，係使用了上述的光資訊記錄 媒體的製造方法中所使用的原盤來製作。 【實施方式】 下面使用附圖來說明本發明的實施例，但是，本發明 並不受其限定。 〔實施例1〕 〔用於基板製作的原盤及壓模的製作方法〕 在本發明的光資訊記錄媒體的基板上，如圖7所示的 那樣，從基板1的內周側開始，依次形成凹軌區域7 1、 邊界凹坑區域72、凹軌內凹坑區域73、邊界凹坑區域74 和凹軌區域7 5。使用圖2〜7來對用於製作該基板！的原 盤及壓模的製作方法進行說明。如圖2 ( a )所示的那 樣，準備直徑 200mmn、厚 6mm的玻璃（giass )原盤 5 0。接著，如圖2 ( b )所示的那樣’在玻璃原盤5 0的一 -23- (20) 1244649 面的表面5 0 a上，使用旋塗法來均勻地塗布厚度2 0 O.m m 的光阻劑（p h 〇 t ο - r e r· i s t ) 5 2。接著，把形成了光阻劑5 2 的玻璃原盤5 0裝到末圖示的切割（cutting )裝置中。切 割裝置主要由發出波長351 nm的雷射（iaser )的Kr氣體 雷射器光源、由音響光調變器件組成的光調變器、聚光透 鏡（lens )和用於使玻璃原盤旋轉的驅動裝 置等所構成。如圖2 ( c )所示的那樣，從上述切割 裝置的雷射光源（末圖示）所射出的雷射L S經過光調變 器和聚光透鏡而照射到玻璃原盤5 0上的光阻劑5 2上。此 時，以玻璃原盤5 0的中心軸A X爲基準，使玻璃原盤5 0 旋轉所定轉數。而且，使玻璃原盤5 0上的雷射L S的照射 位置沿著玻璃原盤 5 0的半徑方向從玻璃原盤5 0的內側 向外側移動（箭頭AR2 )。 如上述那樣，一邊使雷射LS在玻璃原盤5 0上移動， 一邊使用上述光調變器來使照射到玻璃原盤5 0上的雷射 L S的曝光強度變化。在本實施例中，如圖3所示的那 樣，使雷射的曝光強度按低位準、中位準、高位準的3級 變化。以玻璃原盤的中心軸（AX )作爲基準，半徑 1 9.0mm〜24.0mm的區域相當於圖7所示的基板1的凹軌 區域7 1 (以下稱爲第一凹軌形成區域）。而且，半徑 24.0mm〜24.1mm的區域相當於基板1的凹軌內凹坑區域 73 (以下稱爲凹軌內凹坑形成區域）。而且，半徑 24.1mm〜58.9mm的區域是用戶資料區域，相當於基板1 的凹軌區域7 5 (以下稱爲第二凹軌形成區域）。如圖3 -24- (21) 1244649 所示的那樣，第一及第二凹軌形成區域中的曝光 定爲低位準（以下稱爲凹軌位準）。而乱，凹軌 成區域中的形成凹軌內凹坑時的曝光強度被設定 (以下稱爲凹軌內 凹坑位準），除此之外的凹軌部份的曝光強 爲凹軌位準。而且，在第一及第二凹軌形成區域 凹坑形成區域的邊界部分別設置由相當於 (track )的凹軌內凹坑所形成的區域（以下稱 坑形成區域）。該邊界凹坑形成區域相當於圖7 板1的邊界凹坑區域72和74。形成該邊界凹坑 的凹軌內凹坑時的曝光強度被設定爲中位準（以 界凹坑位準），除此之外的凹軌部分的曝光強度 凹軌位準。在本實施例中，當凹軌內凹坑位準 時，邊界凹坑位準爲90%，凹軌位準爲55%。而 界凹坑形成區域所形成的各個凹軌內凹坑在記錄 方向上以3T〜ΠΤ或14T(T:時脈周期）的任 位元（channel-bit )長度所形成。形成在]軌跡 凹坑的圖形可以是隨機圖形（random-patrern) 最短頻道位元長度可以與所使用的再生裝置結 整。而且，在本實施例中，當在曝光中使曝光 時，如圖3所示的那樣，每當切換曝光強度時， 使雷射的曝光強度爲0的期間。由此，提高了玻 凹軌內凹坑形成區域及邊界凹坑形成區域中的凹 部分的加工精度。 強度被設 內凹坑形 爲高位準 度被設定 與凹軌內 1軌跡 爲邊界凹 所示的基 形成區域 下稱爲邊 被設定爲 爲 1 0 0 % 且，在邊 道的接線 一個頻道 內的邊界 。而且， 合進行調 強度變化 設置暫時 璃原盤的 軌內凹坑 -25- (22) 1244649 接著，從切割裝置中取出光阻劑已被感光的玻璃原 盤，來進行顯影處理。由此，如圖4 ( a )及（b )所示的 那樣，在玻璃原盤5 0上形成了凹軌形成部4 0、邊界凹坑 形成部42及凹軌內凹坑形成部44。凹軌形成部40形成 爲剖面爲V字形的溝狀。而且，在邊界凹坑形成部42和 凹軌內凹坑形成部44中，藉由顯影處理來除去玻璃原盤 5 〇上的光阻劑5 2，如圖4 ( b )所示的那樣，玻璃原盤5 0 的表面50a分別作爲露出部42a和露出部44a而現出。露 出部42a的玻璃原盤半徑方向的寬度比凹軌內凹坑形成部 44的露出部44a的寬度窄。 接著，如圖5 ( a )所示的那樣，使用末圖示的R1E (活性離子鈾刻，reactive ion etching)裝置來在C2F6的 氣體氣氛中蝕刻形成在玻璃原盤5 0上的光阻劑5 2的表 面。由此，凹軌內凹坑形成部44和邊界凹坑形成部42分 別被蝕刻出距玻璃原盤50的表面50a有9 Onm的深度。 接著，如圖5 ( b )所示的那樣，爲了使凹軌形成部40中 的玻璃原盤5 0的表面5 0 a露出，使用末圖示的0 2所産生 的抗蝕劑抛光（resist-ashin)裝置來把光阻劑52削去所 定厚度。由此，使凹軌形成部4 0的玻璃原盤表面5 0a露 出。而且，如圖5 ( c )所示的那樣，對於玻璃原盤5 0的 光阻劑52形成表面，再次在C2F6的氣體氣氛中進行 R1E。由此，凹軌形成部40從玻璃原盤表面50a被蝕刻到 1 7 Onm的深度。同時，凹軌內凹坑形成部44和邊界凹坑 形成部42分別從玻璃原盤表面50a被蝕刻至2 60nm的深 •26- (23) 1244649 度。接著，如圖5 ( d )所示的那樣，再次使用抗 光裝置（末圖示）來除去玻璃原盤50上的光阻劑 此’得到在表面上形成有所希望的圖形的玻璃原盤 在該玻璃原盤5 0的圖形形成面上，作爲電鍍 處理而進行非電解電鍍。而且，藉由使用該電鍍膜 電膜，藉由電鑄法而形成厚度〇 . 2 9 m m的N i層。 硏磨玻璃原盤5 0上形成的Ni層的表面，並且，從 盤上剝離上述Ni層，由此，得到壓模。而且，也 用濺射法（s p u 11 e r )和蒸鍍法來進行上述電鍍的前 中的導電膜形成。 〔資訊記錄媒體的製作方法〕 把上述壓模裝入現有的噴射成型裝置，藉由噴 來得到基板1。基板1是直徑120mm、厚0.6 mmn 酸脂（poly-carbonate)製基板，如圖 6所示的那 形成在玻璃原盤上的凹凸圖形形狀相同形狀的圖形 到基板1的一面上。如上述那樣，在基板1上接圖 的那樣形成凹軌區域7 1、邊界凹坑區域72、凹軌 區域73、邊界凹坑區域74和凹軌區域（用戶資料 7 5。在該基板1的圖形形成面上，通過旋塗法塗布 化學式（1 )所表示的含1重量°/。的濃度偶氮系色 液。此時，把上述溶液塗布在凹軌部分，使， 1 0 On m。而且，當塗布上述色素溶液時，使用四 (tetra-fluoro-propanol )作爲偶氮系色素的溶劑， 蝕劑抛 52。由 50。 的前期 作爲導 接著， 玻璃原 可以使 期處理 射成型 的聚碳 樣，與 被轉印 7所示 內凹坑 區域） 由以下 素的溶 享度爲 氟丙醇 用濾網 1244649 (24) (filter )過濾去除雜質。接著，把塗布了上述色素材料 的基板1在70 □下進行1小時乾燥，接著，在室溫下進行 1小時冷卻。如此，使記錄層2形成在基板1上（參照圖 8(b))。 [化學式1]In the present invention, the exposure intensity when a pattern corresponding to the pit is exposed is first set to a first exposure intensity, and then it is set to a light intensity lower than the first exposure intensity and the second exposure intensity is changed. Is the first exposure intensity. This makes it possible to suppress the width in the radial direction of the substrate from being widened even in the case of forming pits in the groove with a long pit length. This is because, at the time of the original disk exposure, the cumulative exposure amount by the pits is provided by reducing the cumulative exposure amount during the exposure at the second exposure intensity. Furthermore, when T is used to represent the clock cycle when the optical information recording medium is reproduced, it is desirable to set the periods of exposure at the first exposure intensity to 1 T -22- (19) 1244649 ~] · 5T, respectively. Furthermore, it includes the step of making the exposure intensity to zero in addition to the exposure intensity when the original disc is exposed. In the present invention, the etching by the RIE is performed by changing the flow rate of the gas used for the RIE on the inside and outside of the original disk. Thereby, the portion corresponding to the recessed rail formed on the original disk can be formed gradually deeper from the inside to the outside of the original disk using RIE. In the present invention, a 'master disk made of glass is used as the master disk used in the manufacturing method of the optical information recording medium in the above aspect. Further, in the present invention, a stamper is produced using a master disc used in the above-mentioned method for manufacturing an optical information recording medium. [Embodiments] Examples of the present invention will be described below with reference to the drawings, but the present invention is not limited thereto. [Example 1] [Making method of a master disk and a stamper for substrate production] On the substrate of the optical information recording medium of the present invention, as shown in FIG. 7, the substrate is sequentially formed from the inner peripheral side of the substrate 1. Indented rail region 71, boundary indented region 72, indented indented region 73, inbounded indented region 74, and indented rail region 75. Use Figures 2 to 7 to make this substrate! The manufacturing method of the master and stamper will be described. As shown in Fig. 2 (a), a glass master (giass) 50 with a diameter of 200 mmn and a thickness of 6 mm is prepared. Next, as shown in FIG. 2 (b), on the surface 5 0a of the surface of the -23- (20) 1244649 surface of the glass master 50, a light coating having a thickness of 20 μm was uniformly applied using a spin coating method. Resistant (ph 〇 t ο-rer · ist) 5 2. Next, the glass master 50 in which the photoresist 5 2 was formed was set in a cutting device (not shown). The cutting device is mainly composed of a Kr gas laser light source that emits a laser with a wavelength of 351 nm, a light modulator composed of acoustic light modulators, a lens, and a drive for rotating the glass master disk. Device, etc. As shown in FIG. 2 (c), the laser LS emitted from the laser light source (not shown) of the cutting device passes through a light modulator and a condenser lens and irradiates the photoresist on the glass original disk 50. Agent 5 2 on. At this time, based on the central axis A X of the glass master 50, the glass master 50 is rotated by a predetermined number of revolutions. Then, the irradiation position of the laser L S on the glass master 50 is moved from the inside of the glass master 50 to the outside along the radial direction of the glass master 50 (arrow AR2). As described above, while the laser LS is moved on the glass master 50, the above-mentioned light modulator is used to change the exposure intensity of the laser LS irradiated on the glass master 50. In this embodiment, as shown in FIG. 3, the exposure intensity of the laser is changed in three steps of a low level, a middle level, and a high level. Using the central axis (AX) of the glass master as a reference, a region with a radius of 19.0 mm to 24.0 mm corresponds to the recessed rail region 7 1 of the substrate 1 shown in FIG. 7 (hereinafter referred to as a first recessed rail formation region). In addition, a region with a radius of 24.0 mm to 24.1 mm corresponds to the pit region 73 in the recessed rail of the substrate 1 (hereinafter referred to as a pit formation region in the recessed rail). The area with a radius of 24.1 mm to 58.9 mm is a user data area, and corresponds to a recessed rail area 7 5 of the substrate 1 (hereinafter referred to as a second recessed rail formation area). As shown in Figure 3 -24- (21) 1244649, the exposure in the first and second recessed track formation areas is set to a low level (hereinafter referred to as the recessed track level). In the chaos, the exposure intensity when the pits in the pits are formed in the pit formation area is set (hereinafter referred to as the pit level in the pits), and the exposure intensity of the other pit portions is the pit position. quasi. Further, a region formed by pits corresponding to a track (hereinafter referred to as a pit formation region) is provided at a boundary portion of the pit formation region of the first and second recessed track formation regions. This boundary pit formation area corresponds to the boundary pit areas 72 and 74 of the plate 1 of FIG. 7. The exposure intensity at the time of pits in the pit forming the boundary pit is set to the middle level (at the pit level), and the exposure intensity of the other pit portions other than the pit level is set at the pit level. In this embodiment, when the pit level in the recessed rail is at the level, the boundary pit level is 90% and the recessed rail level is 55%. The pits in each pit formed in the boundary pit formation area are formed in the recording direction with a channel-bit length of 3T to ΠT or 14T (T: clock period). The pattern formed in the trajectory pit may be a random pattern (random-patrern). The shortest channel bit length may be integrated with the reproduction device used. Further, in this embodiment, when the exposure is made during the exposure, as shown in FIG. 3, each time the exposure intensity is switched, the period during which the exposure intensity of the laser is made 0 is set. Thereby, the machining accuracy of the concave portions in the pit formation area and the boundary pit formation area in the glass concave track is improved. The intensity is set to the inner pit shape to be set to a high level, and the trajectory inside the concave track is set to be a boundary. The base formation area shown below is called the edge is set to 100%, and within the channel of the sidewalk The border. In addition, the intensity change is adjusted to set a temporary pit in the rail of the glass master disk. -25- (22) 1244649 Next, the glass master disk on which the photoresist has been photosensitive is taken out from the cutting device for development processing. Thereby, as shown in Figs. 4 (a) and 4 (b), a recessed track forming portion 40, a boundary pit forming portion 42 and a recessed pit forming portion 44 are formed on the glass master 50. The concave rail forming portion 40 is formed in a groove shape having a V-shaped cross section. Further, in the boundary pit forming portion 42 and the in-track pit forming portion 44, the photoresist 5 2 on the glass master 50 is removed by a development process, as shown in FIG. 4 (b). The surface 50a of the original plate 50 is shown as an exposed portion 42a and an exposed portion 44a, respectively. The width of the exposed portion 42a in the radial direction of the glass master is narrower than the width of the exposed portion 44a of the pit formation portion 44 in the recessed rail. Next, as shown in FIG. 5 (a), a photoresist 5 formed on a glass master 50 is etched in a gas atmosphere of C2F6 using an R1E (reactive ion etching) device (not shown). 2 surface. As a result, the pit formation portion 44 and the boundary pit formation portion 42 in the recessed rail are etched to a depth of 9 nm from the surface 50a of the glass master 50, respectively. Next, as shown in FIG. 5 (b), in order to expose the surface 50 a of the glass master 50 in the recessed rail forming portion 40, a resist polishing (resist- ashin) device to cut the photoresist 52 to a predetermined thickness. Thereby, the glass master surface 50a of the recessed rail forming portion 40 is exposed. Then, as shown in FIG. 5 (c), the surface of the photoresist 52 of the glass master 50 was formed, and R1E was performed again in a C2F6 gas atmosphere. Thereby, the recessed rail forming portion 40 is etched from the glass master surface 50a to a depth of 17 Onm. At the same time, the pit formation portion 44 and the boundary pit formation portion 42 in the recessed track are etched from the glass master surface 50a to a depth of 26 nm (26) (23) 1244649 degrees. Next, as shown in FIG. 5 (d), the photoresist on the glass master 50 is removed again using a light-resistant device (not shown). This gives a glass master that forms a desired pattern on the surface. The pattern forming surface of the glass master 50 is subjected to electroless plating as a plating process. Furthermore, by using the electroplated film and the electric film, a Ni layer having a thickness of 0.29 mm was formed by an electroforming method. The surface of the Ni layer formed on the glass master plate 50 was honed, and the Ni layer was peeled from the plate, thereby obtaining a stamper. In addition, a conductive film is formed before and after the above-mentioned electroplating by a sputtering method (s p u 11 e r) and a vapor deposition method. [Manufacturing method of information recording medium] The above-mentioned stamper was incorporated into a conventional injection molding apparatus, and the substrate 1 was obtained by spraying. The substrate 1 is a poly-carbonate substrate having a diameter of 120 mm and a thickness of 0.6 mm. As shown in FIG. 6, a pattern having the same shape as the concave-convex pattern formed on the glass master is formed on one side of the substrate 1. As described above, the dimple rail region 71, the boundary dimple region 72, the dimple rail region 73, the boundary dimple region 74, and the dimple rail region are formed on the substrate 1 as shown in the drawing (user data 75. On the substrate 1) On the pattern forming surface, a azo-based coloring solution having a concentration of 1% by weight and represented by the chemical formula (1) was applied by a spin coating method. At this time, the above solution was applied to the recessed rail portion so that it was 10 nm. In addition, when the pigment solution is applied, tetra-fluoro-propanol is used as the solvent of the azo pigment, and the etchant is 52. From the initial stage of 50 ° as a guide, the glass raw material can be used to process the injection-molded polymer. Carbon sample, and inner pit area shown in Transferred 7) The impurity of the following element was filtered with a filter 1254649 (24) (filter) for fluoropropanol. Next, the substrate 1 coated with the pigment material was dried at 70 □ for 1 hour, and then cooled at room temperature for 1 hour. In this way, the recording layer 2 is formed on the substrate 1 (see FIG. 8 (b)). [Chemical Formula 1]
而且，如圖8 ( b )所示的那樣，使用濺射法在記錄 層2上形成厚度160nm的Ag合金作爲反射層3。接著， 在反射層3上藉由旋塗法塗布UV樹脂材料，接著，在其 上放置厚 〇.6mm的聚碳酸脂製基板（假（dummy )基 板）。在此狀態下，藉由在形成了各層的基板上進行UV 照射，各層與所形成的基板和隔離基板進行貼合，得到光 資訊記錄媒體。 對於這樣得到的光資訊記錄媒體，使用數位化設備 (Digital Instruments)公司製AFM來測定凹軌內凹坑區 域73的凹軌內凹坑部分、邊界凹坑區域74的邊界凹坑部 分和凹軌區域7 5的凹軌部分的最大深度。這些深度如圖 8 ( b )所示，被設定爲距基板的凸軌8 0的表面的深度。 -28- (25) 1244649Further, as shown in FIG. 8 (b), an Ag alloy having a thickness of 160 nm was formed on the recording layer 2 as the reflective layer 3 by a sputtering method. Next, a UV resin material was applied to the reflective layer 3 by a spin coating method, and then a polycarbonate substrate (dummy substrate) having a thickness of 0.6 mm was placed thereon. In this state, UV irradiation is performed on the substrate on which each layer is formed, and each layer is bonded to the formed substrate and the isolation substrate to obtain an optical information recording medium. With respect to the optical information recording medium thus obtained, AFM manufactured by Digital Instruments Corporation was used to measure the pit portion in the pit region 73 in the pit region, the pit portion in the boundary pit region 74, and the pit rail. The maximum depth of the concave rail portion of the area 75. These depths are set to a depth from the surface of the convex track 80 of the substrate as shown in FIG. 8 (b). -28- (25) 1244649
凹軌部分的最大深度dg爲1 70nm。邊界凹坑部分的最大 深度dpb爲2 6 0nm。而且，凹軌內凹坑部分的最大深度 dp爲2 00nm。爲了得到良好的信號調變度和抖動等記錄 再生信號特性，凹軌部分的最大深度d g和凹軌內凹坑部 分的最大深度dp最好滿足1.4 $ dp/dgS 1.7的條件。這是 根據本發明者們的實驗而得到的條件，在本實施例中的光 資訊記錄媒體中，也滿足該條件。而且，把凸軌8 0的表 面作爲基準，使用數位化設備公司製AFM 來分別測定凹軌內凹坑區域73的凹軌內凹坑部分的 半寬値Wp、邊界凹坑區域74的邊界凹坑部分的半寬値 Wpb及凹軌區域75的凹軌部分的半寬値Wg，在此，所謂 半寬値是指以凸軌8 0的表面作爲基準面，各部分的最大 深度的二分之一的深度位置上的媒體的半徑方向的槽寬或 孔寬。半寬値Wg爲320nm，半寬値Wpb爲350nm，半寬 値Wp爲400nm。由此可以看出，WgSWpb<Wp的關係成 立。而且，半寬値 Wp 與半寬値 Wpb 之比 Wp/Wpb=1.14，滿足 1.05[]Wp/Wpb!D1.15 的條件。 而且，如圖8 ( b )所示的那樣，使用數位化設備公 司製AFM來測定所得到的光資訊記錄媒體的凹軌內凹坑 區域7 3的凹軌內凹坑部分、邊界凹坑區域7 4的邊界凹坑 部分和凹軌區域7 5的凹軌部分的記錄層的凹陷深度。在 此’所g胃s3錄層凹陷涂度是指以形成在凸軌8 0上的以g己 錄層2的表面2a爲基準時的記錄層2的最大凹陷量。凹 軌內凹坑區域73中的記錄層凹陷深度Tp是1 70nm。邊界 -29- (26) 1244649 凹坑區域74中的記錄層凹陷深度Tpb是135nm。而且， 凹軌區域75的記錄層凹陷深度Tg爲100nm。爲了得到良 好的信號調變度和抖動等的記錄再生信號特性，記錄層凹 陷深度Tp和記錄層凹陷深度Tg最好滿足1.6STP/Tgg 2 . 〇的條件。這是根據本發明人的實驗而得到的條件，在 本實施例中的光資訊記錄媒體中，也滿足該條件。而且， 對於邊界凹坑區域74的記錄層凹陷深度Tpb、凹軌內凹 坑區域73的記錄層凹陷深度Tp、凹軌區域75的記錄層 凹陷深度Tg的條件，邊界凹坑區域74的記錄層凹陷深度 Tpb降低了凹軌區域7 5的記錄層凹陷深度Tg和凹軌內凹 坑區域73的記錄層凹陷深度Tp之差，因此，成爲 Tg<Tpb<Tp。而且，凹軌部分的最大深度dg對凹軌內凹 坑部分的最大深度dp的比率和記錄層凹陷深度Tg對記錄 層凹陷深度T p的比率最好滿足d p / d g < T p / T g的條件。即 使在凹軌內凹坑部分的最大深度dp對於凹軌部分的最大 深度d g不是在能夠得到足夠的信號調變度和徑向推挽信 號的條件下，藉由在基板上塗布色素材料來作爲記錄層， 能夠在記錄資訊再生時擴大凹軌部分的雷射的光程長度和 凹軌內凹坑部分中的激 光的光程長度之差，而加大光程長度差。由此，能夠 得到足夠的信號調變度和徑向推挽信號。 使用具有波長65 Onm的雷射和數値孔徑〇.6之透鏡的 光拾取器來對上述實施例中所得到的光資訊記錄媒體進行 凹軌內凹坑區域的記錄信號的再生。信號的檢測和再生能 -30- 1244649 (27) 夠穩定進行，.而且，此時的再生信號的信號調變度爲 6 1 %，抖動爲7.2 %，皆能得到良好的結果。 而且，在本實施例中，如圖8 ( a )所示的那樣，對 於凹軌內凹坑73a與邊界凹坑74a相鄰的區域進行了描 述，但是，即使在凹軌內凹坑與邊界凹坑中的凹軌部分相 鄰的區城中進行尋軌時，因以下原因而不會産生尋軌錯 誤。在光點具有某個程度的點尺寸（size )的基礎上，在 實際尋軌時，光點不是在與尋軌方向垂直而是成鈍角的方 向上進行掃描，因此，在尋軌邊界凹坑區域時，任一個邊 界凹坑部分都會進入光點內。由此，從邊界凹坑區域所得 到的徑向推挽信號被平均化，與僅形成凹軌和凹軌內凹坑 的光資訊記錄媒體相比，能夠抑制尋軌時的凹軌內凹坑區 域與凹軌區域之間的徑向推挽信號的失真。 〔比較例1〕 下面描述由上述實施例製作的光資訊記錄媒體的徑向 推挽信號輸出與具有現有的凹軌內凹坑的光資訊記錄媒體 的徑向推挽信號輸出的比較結果。圖9 ( a )表示由上述 實施例製作的光資訊記錄媒體的檢測結果，在上段表示搜 索（seek )時的來自光拾取器的兩分段檢測器 (detector )的和信號sa的輸出，在下段表示差信號（徑 向推挽信號）P P a的輸出。圖9 ( b )表示現有的具有凹軌 內凹坑的光資訊記錄媒體的檢測結果，在上段表示搜索時 的和信號sb的輸出，在下段表示差信號（徑向推挽信 -31 ~ (28) 1244649 號）ppb的輸出。圖g ( a )、圖g ( b )中和信號sa、sb 的振幅位準較大地變化的部分（用圖9 ( a )中的標號9a 和圖9 ( b )中的標號9b分別表示）是凹軌內凹坑區域與 凹軌區域的邊界部。 在與圖9 ( a )的標號9a相對應的位置，即上述實施 例的光資訊記錄媒體中的凹軌內凹坑區域與凹軌區域的邊 界部上，幾乎沒有見到下段所示的差信號（徑向推挽信 號）ppa的失真。另一方面，在與圖9(a)的標號9b相 對應的位置，即具有現有的凹軌內凹坑的光資訊記錄媒體 中的凹軌內凹坑區域與凹軌區域的邊界部上，能夠確認下 段所示的差信號（徑向推挽信號）ppa的失真較大。如上 述那樣，在DVD-R和DVD-RW中，利用該徑向推挽信號 進行尋軌，在凹軌內凹坑區域與凹軌區域的邊界部上，徑 向推挽信號的振幅的會失去平衡，即振幅的中心錯位，由 此，容易産生尋軌錯誤。 而且，在上述實施例中製作的光資訊記錄媒體中，凹 軌部的徑向推挽信號與凹軌內凹坑部的徑向推挽信號之間 的變動量，在將正常狀態下的徑向推挽信號的振幅作爲 1 〇〇%時，爲36%。在DVD-R標準中，雖然沒有特別規 定，但是，在DVD-RW標準中’規定了：凹軌部的徑向 推挽信號與預刻凹坑部的徑向推挽信號的變動量爲20%以 上。因此，上述實施例的光資訊記錄媒體足以滿足該標 準，不會引起尋軌失敗（尋軌錯誤）。與此相對，在現有 的具有凹軌內凹坑的光資訊記錄媒體中，上述變動量爲 -32- (29) 1244649 1 8 0%程度。因此，現有的具有凹軌內凹坑的光資訊記錄 媒體爲DVD· RW標準的下限値或其以下，容易發生尋軌 失敗（尋軌錯誤）。 在上述實施例的光資訊記錄媒體中，使用聚碳酸脂作 爲基板，但是，也可以使用聚甲基丙烯酸甲醋（P〇ly_ methyl-meta-acrylate)和非晶態聚烯烴（am〇ph〇u卜p〇ly- olefin )等。而且，在上述實施例的光資訊記錄媒體中， 在基板上按記錄層、反射層的順序來形成各層，但是，也 可以首先在基板上的圖形形成面上形成反射層，接著，在 該反射層上形成記錄層，由此，來形成各層。在用這樣的 層結構來製作光資訊記錄媒體時，能夠得到與上述實施例 相同的效果。 〔實施例2〕 使用圖1 〇來說明本發明的光資訊記錄媒體的另一個 實施例。本實施例中的光資訊記錄媒體，除了使用金屬材 料碎（L )作爲記錄層之外，與實施例1相同。該記錄層 藉由A曰nSbTe來進行資訊的記錄和再生。如圖10所示 的那樣’在形成凸軌、凹軌以及凹軌內凹坑的基板；1，表面 上，使用濺射法來形成厚1 5 I n m的含T e的金屬材料作爲 記錄層2’。而且，與實施例丨相同，在記錄層2’上，使用 縣射法，來形成厚1 6 0 n m的A g合金。由此，得到反射層 3’。藉由使用 AglnSbTe作爲記錄層2’的材料，層疊在基 板Γ的圖形形成面上的記錄層2'的厚度ίι*2也與場所無關 (30) 1244649 而大致爲一定的。並且，層積在記錄層2’上的反射層3’的 »度tr3也與場所無關而大致爲一定的。因此，能夠容易 J:也把握每個的各個區域中的記錄層及反射層的厚度，據 此’可控制層疊的層的厚度。由此，在光資訊記錄媒體 中’能夠形成更穩定的層。 〔實施例3〕 使用圖1 1及圖1 2來說明本發明的另一個實施例。在 該實施例中，在用於光資訊記錄媒體的基板的凹軌區域與 邊界凹坑區域之間，形成一條資訊道的寬度比凹軌區域中 的凹軌寬的凹軌（以下稱爲邊界凹軌），除此之外，與實 施例 1相同。以下對在上述基板的製作中使用的原盤、 壓模及光資訊記錄媒體的製作方法進行說明。 在本實施例中，與實施nm相同，一邊使雷射在玻璃 原盤上移動，一邊使用上述光調變器來使照射到玻璃原盤 上的雷射的曝光強度變化。在本實施例中，如圖1 1所示 的那樣，使雷射的曝光強度按從低到高的順序，分位準 1、位準2、位準3、位準4這樣的4級來變化。本實施例 中的各位準之比被設定爲：當位準4爲100%時，位準3 爲9 0 % ’位準2爲6 0 %，位準1爲5 5 %。如圖1 1所示的 那樣，第一及第二凹軌形成區域中的曝光強度設定爲位準 1。而且，凹軌內凹坑形成區域中的凹軌內凹坑形成部分 的曝光強度設定爲位準4，除此之外的凹軌部分的曝光強 度設定爲位準1。邊界凹坑形成區域中的凹軌內凹坑形成 -34 - (31) 1244649 部分的曝光強度設定爲位準3，除此之外的凹軌部分的曝 光強度設定爲位準1。在本實施例的光資訊記錄媒體中’ 藉由設置邊界凹軌，與實施例1的情況相比’即使較大 地形成在邊界凹坑中所形成的凹坑’由於從邊界凹軌區域 向邊界凹坑區域的凹軌寬度的變化緩慢’因此’難於發生 徑向推挽信號的偏移和失真。由此’即使在邊界凹坑中所 形成的凹軌內凹坑中，也能得到足夠的調變度。因此’形 成在邊界凹坑中的凹軌內凹坑的圖形並不僅限於虛擬的隨 機圖形，也可以是用戶資訊的記錄信號圖形。由此’原盤 的邊界凹坑形成區域中的凹軌內凹坑形成部分的圖形也形 成與上述凹軌內凹坑相對應的圖形。 接著，與實施例1相同，對光阻劑被感光的玻璃原盤 進行顯影處理，按照殘留的光阻劑的圖形，使用RIE裝置 來蝕刻玻璃原盤。由此，在表面上得到形成所希望的凹凸 圖形的玻璃原盤。而且，在本實施例中，凹軌形成部及邊 界凹軌形成部腐鈾距玻璃原盤表面的深度爲1 7 Onm，凹軌 內凹坑形成部及邊界凹坑形成部腐蝕成距玻璃原盤表面的 深度爲260nm。而且，邊界凹軌形成部形成爲比凹軌形成 部寬。 在本實施例中，與實施例1相同，當在曝光中使曝光 強度變化時，每當切換曝光強度時，設置暫時使雷射的曝 光強度爲〇的期間。而且，在本實施例中，在凹軌內凹坑 形成區城中，按以下這樣來控制具有所定凹坑長度的各個 凹軌內凹坑形成部分的曝光強度，同時進行原盤曝光：如 -35- (32) 1244649 圖1 1所示的那樣，從曝光開始的1T〜1·5Τ ( T :時脈周 期）期間以位準4進行曝光，接著，在所定期間·把曝光 強度降低爲位準4的70%的位準（位準A )來進行曝光。 接著，在到凹軌內凹坑形成部分的結束爲止的1T〜1 . 5 τ 之間，再次使曝光強度返回位準4來進行曝光。由此，阻 止了各個凹軌內凹坑形成部分的原盤半徑方向的寬度在凹 軌內凹坑形成部分的記錄道方向的中間部分附近變寬。而 且，對於邊界凹坑形成區域的凹軌內凹坑形成部分的曝光 強度也可以同樣進行曝光強度的控制。 使用這樣得到的原盤來製作壓模，與實施例1相同， 使用射出成型法來製作基板。接著，如圖1 2 ( b )所示的 那樣，與實施例1相同，形成記錄層2和反射層3。在所 得到的基板上經過光固性樹脂來粘貼隔離基板，由此，得 到光資訊記錄媒體。 對於這樣得到的光資訊記錄媒體，與實施例1相同， 使用數位化設備公司製AFM來測定凹軌內凹坑區域73的 凹軌內凹坑部分、邊界凹坑區域74的邊界凹坑部分、邊 界凹軌區域7 6的凹軌部分、凹軌區域7 5的凹軌部分的最 大深度。如圖1 2 ( b )所示的那樣，凹軌部分的最大深度 dg爲170nm。邊界凹軌部分的最大深度dgb爲170nm。 邊界凹坑部分的最大深度dpb爲260nm。凹軌內凹坑部分 的最大深度dp爲260ηηι。而且，爲了得到良好的信號調 變度和抖動等記錄再生信號特性，凹軌部分的最大深度 dg和凹軌內凹坑部分的最大深度dp最好滿足1.4$dp/dg -〇δ - 1244649 (33) S 1 . 7的條件。 而且’把凸軌8 0的表面作爲基準，使用數位化設備 公司製AFM來分別測定凹軌內凹坑區域73的凹軌內凹坑 部分的半寬値Wp、邊界凹坑區域74的邊界凹坑部分的半 寬値Wpb、邊界凹軌區域76的凹軌部分的半寬値Wgb、 凹軌區域75的凹軌部分的半寬値 Wg。半寬値Wg爲 3 20nm，半寬値Wgb爲3 3 Onm，半寬値Wpb爲3 60nm， 半寬値 Wp 爲 400nm。由此，可以看出 Wg S Wgb $ Wpb<Wp的關係成立。而且，半寬値Wp與半寬値Wpb之 比 Wp/Wpb = l.l 1，滿足 1.05 S Wp/Wpb$ 1.15 的條件。而 且，半寬値Wgb與半寬値Wg之比Wgb/Wg = 1.03，滿足 1 .03 € Wgb/Wg $ 1 . 1 5 的條件。 而且，在本實施例中得到的光資訊記錄媒體中，如圖 1 2 ( a )所示的那樣，按上述那樣的曝光時間表 (schedule )進行曝光的結果，抑制了在凹軌內凹坑區域 7 3的凹軌內凹坑7 3 a的記錄道方向中間部附近處的基板 半徑方向的寬度變寬。由此，即使在與凹軌內凹坑相鄰的 凸軌部分77中，也能確保足夠面積的凸軌面。這樣，能 夠從該光資訊記錄媒體得到穩定的徑向推挽信號。 而且，爲了調整凹軌內凹坑7 3 a的寬度的抑制效果， 在凹軌內凹坑區域7 3中，使用數位化設備公司製的掃描 型探針（probe )顯微鏡來分別測定具有最短頻道位元長 度3 T的凹軌內凹坑的基板半徑方向的寬度，和具有比其 更長的頻道位元長度的凹軌內凹坑的基板半徑方向的寬 -37- (34) 1244649 度。具有最短頻道位元長度3T的凹軌內凹坑的最大寬度 爲0·3 4μηι。而且，具有頻道位元長度ητ的凹軌內凹坑 的最大寬度爲0·38 μιη，具有頻道位元長度14Τ的凹軌內 凹坑的最大寬度爲0 · 4 μηι。根據本發明人所做的實驗，具 有最短頻道位元長度3Τ的凹軌內凹坑的最大寬度同具有 比最短頻道位元長度3Τ長的頻道位元長度的凹軌內凹坑 的最大寬度的比例在1 1 2〜1 1 8 %的範圍內，可以看出， 在比最短頻道位元長度長的凹軌內凹坑中，基板半徑方向 的寬度變寬被抑制。 而且’與實施例1相同，使用數位化設備公司製 AFM來測定所得到的光資訊記錄媒體的凹軌內凹坑區域 7 3的凹軌內凹坑部分、邊界凹坑區域7 4的邊界凹坑部 分、邊界凹軌區域7 6及凹軌區域7 5的凹軌部分的記錄層 凹陷深度。如圖1 2 ( b )所示的那樣，凹軌內凹坑區域7 3 中的記錄層凹陷深度T p爲1 7 0 n m。邊界凹坑區域7 4中的 記錄層凹陷深度Tpb爲1 35nm。邊界凹軌區域76的記錄 層凹陷深度Tgb爲llOnm。而且，凹軌區域75的記錄層 凹陷深度T g爲1 〇 〇 nm。而且，爲了得到良好的信號調變 度和抖動等記錄再生信號特性，與實施例1相同，記錄層 凹陷深度Tp和記錄層凹陷深度Tg最好滿足；i.6sTp/Tg ^ 2 · 0的條件。 邊界凹坑區域74的記錄層凹陷深度Tpb、凹軌內凹 坑區域7 3的記錄層凹陷深度T p、邊界凹軌區域7 6的記 錄層凹陷深度Tgb、凹軌區域75的記錄層凹陷深度丁§的 -38 - 1244649 (35) 關係根據上述各區域的凹軌半寬値的關係，爲 Tg<Tgb<Tpb<Tp °. 使用波長65t)nm的雷射和數値孔徑0.6的透鏡的光拾 取器，來對上述實施例中得到的光資訊記錄媒體進行凹軌 內凹坑區域的記錄信號的重放。信號的檢測和再生能夠穩 定進行，而且，此時的再生信號的信號調變度爲6 1 %，抖 動爲7.2%，皆能得到良好的結果。 〔實施例4〕 使用圖1 3和圖1 4來說明本發明的另一個實施例。在 本實施例中，沒有設置用於光資訊記錄媒體的邊界凹坑區 域，在凹軌區域與凹軌內凹坑形成區域之間僅形成邊界凹 軌區域，除此之外與實施例3相同。以下對在上述基板的 製作中所使用的原盤、壓模及光資訊記錄媒體的製作方法 進行說明。 在本實施例中，如圖1 3所示的那樣，對於雷射的曝 光強度，使用在實施例3中所用的曝光強度中的位準1、 位準2、位準4的三級的位準來進行原盤曝光。本實施例 中的各位準之比，與實施例3相同，在位準4爲1 00%的 情況下，設定爲：位準2爲60%，位準1爲55%。如圖 1 3所示的那樣，第一及第二凹軌形成區域的曝光強度設 定爲位準1，並且，凹槽內凹坑形成區域的凹軌內凹坑形 成部分的曝光強度設定爲位準4，除此之外的凹軌部分的 曝光強度設定爲位準1。而且，邊界凹軌形成區域的凹槽 -39- (36) 1244649 形成部分的曝光強度設定爲位準2。 接著，對光阻劑被感光的玻璃原盤與實施例1相同地 進行顯影處理，藉由殘留的光阻劑的圖形’使用RIE裝置 來對玻璃原盤進行蝕刻。由此，在表面上得到形成所希望 的凹凸圖形的玻璃原盤。而且，在本實施例中，凹軌形成 部及邊界凹軌形成部從玻璃原盤表面蝕刻到1 7〇nm的深 度，凹軌內凹坑形成部從玻璃原盤表面蝕刻到2 6 0nm的 深度。而且，邊界凹軌形成部形成爲比凹軌形成部寬。 在本實施例中，與實施例3相同，當在曝光中使曝光 強度變化時，每當切換曝光強度時，設置暫時使雷射的曝 光強度爲〇的期間。而且，如圖1 3所示的那樣，在凹軌 內凹坑形成區城中，與實施例3相同地控制具有所定凹坑 長度的各個凹軌內凹坑形成部分的曝光強度，來進行原盤 曝光。 使用這樣得到的原盤，與實施例3相同地使用射出成 型法來製作基板。接著，如圖1 4 ( b )所示的那樣，與實 施例3相同，形成記錄層2和反射層3。在所得到的基板 上經過光固性樹脂來粘貼隔離基板，而得到光資訊記錄媒 體。 對於這樣得到的光資訊記錄媒體，與實施例3相同， 使用數位化設備公司製AFM來測定凹軌內凹坑區域73的 凹軌內凹坑部分、邊界凹軌區域7 6的凹軌部分、凹軌區 域75的凹軌部分的最大深度。如圖1 4 ( b )所示的那 樣，凹軌部分的最大深度d g爲1 7 0 n m。邊界凹軌部分的 -秦 1244649 (37) 最大深度dgb爲1 70nm。凹軌內凹坑部分的最大深度dp 爲2 6 Onm。而且，爲了得到良好的信號調變度和抖動等記 錄再生信號特性，凹軌部分的最大深度dg和凹軌·內凹坑 部分的最大深度dp最好滿足1 .4 S dp/dg ^ 1 .7的條件。 而且，把凸軌8 0的表面作爲基準，使用數位化設備 公司製A F Μ來分別測定凹軌內凹坑區域7 3的凹軌內凹坑 部分的半寬値Wp、邊界凹軌區域76的凹軌部分的半寬値 Wgb、凹軌區域75的凹軌部分的半寬値Wg。半寬値Wg M 320nm，半寬値Wgb爲350nm’半寬値Wp爲400nm。 由此，可以看出Wg<Wgb S Wp的關係成立。而且，半寬 値 Wgb與半寬値 Wg之比 Wgb/Wg = l.〇9，滿足 1.05 g Wgb/Wgg 1.15 的條件。 而且，如圖1 4 ( a )所示的那樣，按上述那樣的曝光 時間表進行曝光的結果，在凹軌內凹坑區域7 3的凹軌內 凹坑7 3 a的記錄道方向中間部附近，抑制了基板半徑方向 的寬度變寬。由此，即使在與凹軌內凹坑相鄰的凸軌部分 7 7 ’中，也能確保足夠面積的凸軌面。這樣，能夠從該光 資訊記錄媒體得到穩定的徑向推挽信號。 而且，爲了調整凹軌內凹坑7 3 a的寬度的抑制效果， 在凹軌內凹坑區域7 3中，使用數位化設備公司製的掃描 型探針顯微鏡來分別測定具有最短頻道位元長度3 T的凹 軌內凹坑的基板半徑方向的寬度和具有比其長的頻道位元 長度的凹軌內凹坑的基板半徑方向的寬度。具有最短頻道 位元長度3 T的凹軌內凹坑的最大寬度爲〇 · 3 4 μ1Ώ。而且， -41 _ 1244649 (38) 具有頻道位元長度11T的凹軌內凹坑的最大寬度爲 〇·38μιη。具有頻道位兀長度14T的凹軌內凹坑的最大寬度 爲〇 · 4 μηι。根據本發明人所做的實驗，具有最短頻道位元 長度3 Τ的凹軌內凹坑的最大寬度同具有比最短頻道位元 長度3 Τ長的頻道位元長度的凹軌內凹坑的最大寬度的比 例在1 0 0 %〜1 1 8 %的範圍內，最好在1 1 2〜1 1 8 %的範圍 內，在比最短頻道位元長度長的凹軌內凹坑中，基板半徑 方向的寬度變寬被抑制。 而且，與實施例3相同，使用數位化設備公司製 AF Μ來測定所得到的光資訊記錄媒體的凹軌內凹坑區域 73的凹軌內凹坑部分、邊界凹軌區域76及凹軌區域75 的凹軌部分的記錄層凹陷深度。如圖1 4 ( b )所示的那 樣，凹軌內凹坑區域73中的記錄層凹陷深度Τρ爲 I 7 0nm。邊界凹軌區域 76的記錄層凹陷深度 Tgb爲 12 0nm。而且，凹軌區域 75的記錄層凹陷深度 Tg爲 1 0 Onm。而且，爲了得到良好的信號調變度和抖動等記錄 再生信號特性，與實施例1相同，記錄層凹陷深度Τρ和 記錄層凹陷深度Tg最好滿足1 .6$ Tp/TgS 2.0的條件。 凹軌內凹坑區域7 3的記錄層凹陷深度Τρ、邊界凹軌 區域76的記錄層凹陷深度Tgb、凹軌區域75的記錄層凹 陷深度Tg的關係根據上述各區域的凹軌半寬値的關係， 爲 Tg<Tgb<Tp。 使用波長6 5 Onm的雷射和數値孔徑0.6的透鏡的光拾 取器，來對上述實施例中得到的光資訊記錄媒體進行凹軌 M2 - 1244649 1 (39) 內凹坑區域的記錄信號的再生。信號的檢測和再生能夠穩 定進行，而且’此時的再生信號的信號調制度爲6 1 %，抖 動爲7.2 %，都能得到良好的結果。 在實施例3和4的原盤曝光時，進行這樣的控制：使 凹軌內凹坑形成區域中的具有所定凹坑長度的凹軌內凹坑 形成部分的曝光強度首先爲第一曝光強度，接著，爲低於 第一曝光強度的第二曝光強度，然後變更爲第一曝光強 度，但是，在實施例1和2的原盤曝光時，也可以進行同 樣的曝光強度控制。 〔實施例5〕 使用圖16〜19來說明本發明的第五實施方式。在本 實施例中的光信息記錄媒體中，如圖1 6所示的那樣，在 基板1的凸軌部分中，在記錄軌方向上以所定間隔形成凸 軌預刻凹坑LPP，同時，除了邊界凹軌區域1 76外，形成 爲從基板的內周（內側）向外周（外側）連續變深和變寬 的凹軌，而且，除了凸軌預刻凹坑LPP從基板的內周向 外周連續變深和變寬之外，其他構成與實施例3相同。而 且，凸軌預刻凹坑LPP用於在光信息記錄媒體中預先記 錄媒體的位置資訊等。以下對在上述基板的製作中使用的 原盤、壓模及光資訊記錄媒體的製作方法進行說明。 圖1 7表示玻璃原盤的凹軌內凹坑形成區域附近的雷 射的曝光強度變化。圖1 8表示玻璃原盤全體的雷射的曝 光強度變化。在本實施例中，如圖1 7所示的那樣，對於 -Αό - 1244649 (40) 雷射的曝光強度，使用實施例3中所用的曝光強度位準 1、位準2、位準3、位準4這樣的4級，同時，如圖i 8 所示的那樣，使位準1即凹軌位準的曝光強度從玻璃原盤 的內周向外周的方向上連續變化，來進行原盤曝光。本實 施例中的各位準之比設定爲：當位準4爲100%時，位準 2爲6 0 %，位準3爲9 0 %。而且，如圖1 8所示的那樣， 位準1進行這樣的連續變化，使得在玻璃原盤的曝光開始 位置（距玻璃原盤中心的半徑19.0mm的位置）上爲 5 5 %，在曝光結束位置（距玻璃原盤中心的半徑 5 8.9mm 的位置）上爲6 0 %。這樣，藉由使凹軌位準的曝光強度連 續地變強，能夠在玻璃原盤上形成與凹軌相對應的圖形， 以使與凹軌相對應的圖形的寬度從玻璃原盤的內側向外側 連續變寬。 而且，如圖1 7所示的那樣，第一及第二凹軌形成區 域中的曝光強度分別設定爲位準1。凹軌內凹坑形成區域 中的凹軌內凹坑形成部分的曝光強度設定爲位準4，除此 之外的凹軌部分的曝光強度設定爲位準1。邊界凹軌形成 區域中的凹軌形成部分的曝光強度設定爲位準2。邊界凹 坑形成區域中的凹軌內凹坑形成部分的曝光強度設定爲位 準3，除此之外的凹軌部分的曝光強度設定爲位準1。而 且，在本實施例中’與實施例3相同’當在曝光中使曝光 強度變化時，進行這樣的控制：每當切換曝光強度時’設 置暫時使雷射的曝光強度爲〇的期間’同時’在凹軌內凹 坑形成區城中，使具有所定的凹坑長度的各個凹軌內凹坑 -44 - (41) 1244649 形成部分的曝光強度暫時降低（成爲位準A )，來進行原 盤曝光。而且，在本實施例中，與曝光強度位準 A之比 爲 7 5 %。 而且，雖然，末圖示，但在對與形成在基板的凸軌上的 凸軌預刻凹坑相對應的部分（以下稱爲凸軌預刻凹坑形成 部分）進行曝光時，與上述曝光強度的控制方法相同地調 整雷射的曝光強度，以使凸軌預刻凹坑的深度成爲與相鄰 的凹軌的深度大致相同，並且，從基板的內周向外周，溝 寬從基板的內周向外周連續變寬。而且，凸軌預刻凹坑形 成部分使用與在凹軌形成部分和凹軌內凹坑形成部分等的 曝光中使用的雷射不同的雷射來進行曝光。 接著，與實施例3相同，對光阻劑被感光的玻璃原盤 進行顯影處理，按照殘留的光阻劑的圖形，使用R1E裝置 和抛光（ashing)裝置來蝕刻玻璃原盤。由此，在表.面上 得到形成所希望的凹凸圖形的玻璃原盤（末圖示）。在本 實施例中，對R1E裝置進行以下的控制，以便於形成這樣 的溝··在記錄道方向上具有均勻的深度，從玻璃原盤的內 周向外周連續變深。 〔RIE裝置的控制方法〕 在圖19中表示了 R1E裝置的簡圖。RIE裝置200主 要由能夠密閉的密室（chamber) 201、陽極（anode) 2 03、陰極（cathode ) 204、RF電源 205、絕緣體部 2 〇 7、排氣管2 0 9，2〗0、氣體供給管2 1 1、冷卻水供給管 -45 - 1244649 (42) 2 1 3，2 1 4所構成。陽極2 Ο 3與氣體供給管2 1 1及冷 供給管213 —起設置在密室201內的上方。陰極204 絕緣體部20 7而設置在密室201的下方’在陰極204 表面上承載作爲蝕刻物件的原盤。排氣管2 0 9設置在 2 〇 1內的下表面上以便於與密室2 0 1內連通。排氣管 設置在密室2 0 1的側壁上以便於與密室2 0 1內連通’ 設在排氣管210的中途的閘門閥（gate valve ) 215能 行密室2 0 1內的壓力調節。 首先，從設置在R1E裝置200的陽極203側的末 的氣體供給部經過氣體供給管2 1 1向密室 2 0 1內供 定量的處理氣體（process gas) (C2F6)。此時’經 氣管2 0 9來排出多餘的處理氣體，以便密室2 0 1內的 始終爲一定。在密室2 0 1內被處理氣體塡充的狀態下 由從RF電源205向陰極204施加電壓，密室201內 電漿（plasma )狀態，來對在表面上形成了被： (p a 11 e r n i η g )的光阻劑層的玻璃原盤5 0進行餓刻。 一般，在 R1E 中，密室內的氣流加快則腐 (etching rate )提高是公知的。而且，本發明人在對 中氣流量、壓力及施加電壓的條件做了各種硏究的結 現，爲了在原盤的內側和外側分別形成的槽的深度上 別，與密室內的壓力有很大關係。隨著把密室內的壓 定爲較高，流過RIE裝置的密室內的氣體的流量也産 外差。由此，如果在密室內的中央附近，附近的氣體 量變小，即，氣流變慢，如果接近密室內壁，則附近 卻水 藉由 的上 密室 210 藉由 夠進 圖示 給所 過排 壓力 ，藉 成爲 刻圖 i虫率 RIE 果發 的差 力設 生內 的流 的氣 -46 - 1244649 (43) 體的流量變多，即，氣流變快。這樣， 附近的腐蝕率提高，形成爲從玻璃原盤 變深的溝。 在本實施例中，把RIE裝置的氣流 固定的，以現有的壓力（條件1 )作爲 進行各種變更··基以現有的2倍壓力（ 4倍壓力（條件3 )、現有的8倍壓力 的1 6倍壓力（條件 5 )，來蝕刻玻璃 玻璃原盤上的槽深度的內外差。在表1 而且，在表 1中對各條件中的電漿的 示。電漿的穩定性是：在腐蝕中分析電 有無。結果分別表示爲：表中的「0 . 準’ 「X」是放電的穩定性欠缺而難於 原盤加工的位準，「A」是其中間的位》 果，隨著把密室內的壓力設定得較高， 的槽深度之差變大，但是，與此同時， 定性惡化。爲了在保證電漿的穩定性的 量的槽深度之差，最好把密室內設定爲 有壓力的4倍。由此，能夠得到1 Onm 外差。 在玻瑀原盤的外側 的內碩向外/則連續 量和施加電壓作爲 基準，而僅使壓力 條件2)、現有的 (條件4 )、現有 原盤，比較形成在 中表不了其結果。 穩定性進行配合表 漿亮滅、放電等的 」是沒有問題的位 進行具有再現性的 算。根據表1的結 原盤的內側與外側 密室內的電漿的穩 狀態下來得到一定 條件3的壓力即現 左右的槽深度的內 1244649 (44) 表1 壓力 條件1 條件2 條件3 條件4 條件5 (現有） 槽深度差 1 .0 7.5 9.9 11.6 20.7 電漿穩定性 〇 〇 〇 □ □ 在本實施例中，邊界凹軌形成部蝕亥到距玻璃原盤表 面 1 7〇nm的深度，凹軌內凹坑形成部和邊界凹坑形成部 蝕刻到距玻璃原盤表面25 Onm的深度。而且，凹軌形成 都在玻璃原盤的內周部（半徑2 3 . Omm )蝕刻到距玻璃原 盤表面1 60nm的深度，在外周部（半徑58.7mm )蝕刻到 17 0nm的深度。而且，凸軌預刻凹坑（land pre-pti)形成 部分在玻璃原盤的內周部蝕刻到距玻璃原盤表面1 60nnm 的深度，在玻璃原盤的外周部蝕刻到距玻璃原盤表面 1 7 Onm的深度，以便於與同各凸軌預刻凹坑形成部分相鄰 的凹軌形成部的槽深度相同。 此時，凹軌形成部的深度半値的槽寬在玻璃原盤的內 周部（半徑 23.0mm )爲 3 1 0 n m,在外周部（半徑 58.7mm)爲 3 3 0 n m。而且，邊界凹軌形成部的半深値的 槽寬爲3 3 0m，與相鄰的凹軌形成部的寬度相比，形成得較 寬。而且，凸軌預刻凹坑形成部分的寬度在玻璃原盤的內 周部爲170nm，在外周部爲200nm。此時，內周部的凸軌 預刻凹坑形成部分時記錄道方向長度（凹坑長度）爲 -48 - 1244649 (45) 1 7 Onm，外周部的凸軌預刻凹坑形成部分的記錄道方向長 度（凹坑長度）爲200nm。 使用這樣得到的原盤，與實施例3相同地使用射出成 型法來製作基板。接著，與實施例3相同，如圖1 6 ( b ) 所示的那樣，形成記錄層2和反射層3。在所得到的基板 1上經過光固性樹脂來粘貼隔離基板，而得到光資訊記錄 媒體。 對於這樣得到的光資訊記錄媒體，使用數位化設備公 司製A F Μ來測定凹軌內凹坑區域的凹軌內凹坑部分、邊 界凹軌區域的邊界凹坑部分、邊界凹軌區域的凹軌部分距 基板表面（凸軌表面）的最大深度、凹軌區域的內周部 (半徑23.0mm)及外周部（半徑55.0mm)的凹軌部分距 基板表面的最大深度以及內周部（半徑23.0mm)及外周 部（半徑55.0mm )的凸軌預刻凹坑距基板表面的最大深 度。內周部的凹軌部分的最大深度d g i爲1 5 5 n m。外周部 的凹軌部分的最大深度dgo爲165n m。最大深度dgi與最 大深度 dgo 之比 dgo/dgi = 1.06，滿足 1.00<dgo/dgiS1.10 的條件。而且，邊界凹軌部分的最大深度d gb爲1 5 5 nm。 邊界凹坑部分的最大深度dpb爲245 nm。凹軌內凹坑部分 的最大深度dp爲2 4 5ηηι。而且，爲了得到良好的信號調 變度和抖動等記錄再生信號特性，凹軌部分的最大深度 dg ( dgi $ dg $ dgo )和凹軌內凹坑部分的最大深度如最好 滿足1 · 4 S dp / d g S 1 · 7的條件。而且，內周部的凸軌預 刻凹坑的最大深度dlpi爲1 55nm，外周部的凸軌預刻凹 -49- (46) 1244649 坑的最大深度dlpo爲165nm。分別具有與相鄰的凹軌部 分的槽深度大致相同的深度。凹軌部分和凸軌預刻凹坑， 與媒體的內周部相比，外周部一方的槽形成得較深。 而且，把凸軌的表面作爲基準，使用數位化設備公司 製AFM來分別測定凹軌內凹坑區域的凹軌內凹坑部分的 半寬値 Wp、邊界凹坑區域的邊界凹坑部分的半寬値 Wpb、邊界凹軌區域的凹軌部分的半寬値Wgb、凹軌區域 的內周部和外周部的凹軌部分的半寬値Wgi和Wgo、內 周部（半徑23.0mm)及外周部（半徑55.0mm)的凸軌預 刻凹坑的底部寬度Wlpi和Wlpo。半寬値Wgi爲3 2 5 nm， 半寬値 Wgo爲 3 45 nm，半寬値 Wgb爲3 4 5 nm，半寬値 Wpb 爲 3 5 0nm，半寬値 Wp 爲 400nm。由此，Wgi<Wgo S WgbS Wpb< Wp的關係成立。而且，半寬値Wp與半寬 値 Wpb 之比 Wp/Wpb=1.14，滿足 1.05$Wp/WpbS1.15 的 條件。半寬値Wgi與半寬値Wgo之比Wgo/Wgi=1.06，滿 足1.03SWgo/WgiS1.10的條件。底部寬度Wlpi和Wlpo 分別爲1 8 Onm、2 0 Onm，與媒體的內周部相比，外周部的 凸軌預刻凹坑的寬度形成得較寬。 而且，在本實施例所得到的光資訊記錄媒體中，按上 述那樣的曝光時間表進行曝光的結果，如圖1 6 ( a )所示 的那樣，在凹軌內凹坑區域1 7 3的凹軌內凹坑1 7 3 a的記 錄道方向中間部附近，抑制了基板半徑方向的寬度變寬。 由此，在與凹軌內凹坑相鄰的凸軌部分1 7 7的表面上’也 能確保足夠面積的凸軌面。由此，在該凸軌]7 7的表面 -50- 1244649 (47) 上，能夠形成穩定形狀的凸軌預刻凹坑LPP，同時，能夠 在穩定狀態下再生記錄在凸軌預置凹坑中的資料。 使用數位化設備公司製AFM來測定所得到的光資訊 記錄媒體的凹軌內凹坑區域1 7 3的凹軌內凹坑部分 1 73a、邊界凹坑區域1 74的邊界凹坑部分1 74a、邊界凹 軌區域1 7 6及凹軌區域1 7 5的凹軌部分的記錄層凹陷深 度，以及凸軌預刻凹坑的記錄層凹陷深度。如圖16(b) 所示的那樣，凹軌內凹坑區域1 73中的記錄層凹陷深度即 爲170nm。邊界凹坑區域174的記錄層凹陷深度Tpb爲 13 5nm。邊界凹軌區域176的記錄層凹陷深度Tgb爲 115nm。而且，凹軌區域175的內周部（半徑23.0mm) 的記錄層凹陷深度Tgi及外周部（半徑5 5.0mm)的記錄 層凹陷深度Tgo都爲l〇〇nm。而且，爲了得到良好的信號 調變度和抖動等記錄再生信號特性，記錄層凹陷深度Tp 和記錄層凹陷深度Tg ( =Tgi = Tgo )最好滿足1.6STp/Tg ^ 2·0的條件。而且，凸軌預刻凹坑Lpp的內周部（半徑 23.0mm )的記錄層凹陷深度 Tipi及外周部（半徑 55.0nm)的記錄層凹陷深度Tlpo都爲100nm。 邊界凹坑區域1 74的記錄層凹陷深度Tpb、凹軌內凹 坑部分173a的記錄層凹陷深度Tp、邊界凹軌區域176的 記錄層凹陷深度Tgb、凹軌區域1 75的內周部的記錄層凹 陷深度Tgi及外周部的記錄層凹陷深度Tgo的關係根據上 述各區域的凹軌半寬値的關係以及藉由旋塗所形成的記錄 層膜厚的內外周差，爲Tgi = Tgo<Tgb<Tpb<Tp。 -51 - (48) 1244649 使用波長6 5 Onm的雷射和數値孔徑〇 · 6的透鏡的光拾 取器，來進行凹軌內凹坑區域的記錄信號的再生。信號的 檢測和再生能夠穩定進行，而且，此時的再生信號的信號 調變度爲6 4〜6 5 5 %，抖動在7 . 8〜7.5 %附近推移，都能得 到良好的結果。而且，媒體的記錄再生區域中的內外周的 反射率變動不足2%，能夠抑制由上述反射率變動所引起 的推挽信號的變動和記錄再生信號的調變度變動。 〔比較例2〕 以下，在表2中表示了比較本實施例的光資訊記錄媒 體（以下稱爲媒體A )、僅凹軌的槽寬從光資訊記錄媒體 的內周向外周連續變寬而形成的光資訊記錄媒體（以下稱 爲媒體B )、凹軌的槽深度和槽寬度在媒體全體上都是均 一的而形成的光資訊記錄媒體（以下稱爲媒體C )的各特 性的結果。如從表2所看到的那樣，與媒體B和C相 比’在光資訊記錄媒體的各特性中，媒體A的內外周差 (內周與外周的變動量）都較小，即，與媒體的半徑位置 無關，得到了大致均等的特性。 1244649 (49) 表2 媒體A 媒體B 媒體c 半徑（m m ) 25 5 5 25 55 55 反射率（％ ) 46.8 46.8 46.3 48.9 43.7 49.6 記錄前推挽 0.37 0.34 0.325 0.254 0.35 0.246 記錄前凸軌預刻凹坑 0.23 0.25 0.294 0.253 0.283 0.246 記錄前推挽內外變動 4.2 12.3 17.4 在本實施例中，對形成邊界凹坑和邊界凹軌兩者的光 資訊記錄媒體進行說明，但是，也可以把本實施例中的光 資訊記錄媒體的製造方法用於僅形成邊界凹坑的光資訊記 錄媒體或者僅形成邊界凹軌的光資訊記錄媒體。由此，能 夠得到與本實施例相同的在媒體的內側和外側都具有均一 的特性的光資訊記錄媒體。 在本發明的光資訊記錄媒體中，藉由在凹軌內凹坑區 域與凹軌區域之間設置邊界凹坑區域，能夠抑制在凹軌內 凹坑區域與凹軌區域之間産生的尋軌錯誤。本發明的光資 訊記錄媒體的製造方法用於製造本發明的光資訊記錄媒 體。 藉由在凹軌形成區域與邊界凹坑形成區域之間設置的 寬度寬的凹軌（邊界凹軌），能夠一邊把邊界凹坑的調變 度維持在良好的狀態下，一邊得到良好的尋軌特性。而 且，即便在僅設置邊界凹軌來取代邊界凹坑形成區域的情 -53- 1244649 (50) 況下，也能進行穩定的伺服（servo )控制。 而且，在木發明中的形成了四槽內凹坑的同時，形成 了由有機色素材料所構成的記錄層的光資訊記錄媒體中’ 凹軌和凸軌預刻凹坑從媒體的內側（內周）向外側（外 周）連續變深和變寬來形成。由此，凹軌部分和凸軌預刻 凹坑部分中所形成的記錄層和反射層的介面高度不産生內 外差而爲一定的。由此’在媒體的內周到外周都能得到穩 定的推挽信號，同時’能夠穩定地再生記錄在凸軌預刻凹 坑中的資料。 【圖式簡單說明】 圖1 ( a )是表示先前之具有凹軌內凹坑的光資訊記錄 媒體的一部分的 簡要俯視圖； 圖1 ( b )是圖1 ( a )的A - A線剖面圖； 圖2是說明實施例1中的玻璃原盤的製作方法的圖； 圖3是表示照射在實施例1中的玻璃原盤上的雷射的 曝光強度的時間變化的圖； 圖4 ( a )是表示實施例1中光阻劑曝光·顯影之後 的玻璃原盤的一部分的簡要俯視圖； 圖4 ( b )是圖4 ( a )的A ’ - A ’線剖面圖； 圖5是說明實施例1中的玻璃原盤的製作方法的圖； 圖6是實施例1中所得到的基板的圖形形成面的簡要 透視圖； -54- (51) 1244649 圖7是實施例1中所得到的基板的簡圖； 圖8 ( a )表示實施例1中的.光資訊記錄媒體的邊界凹 坑區域附近的簡要俯視圖； 圖8 ( b )是表示圖8 ( a )的C - C線剖面圖； 圖9是表示凹軌內凹坑區域與凹軌區域的邊界部附近 的和信號及差信號（徑向推挽信號）的圖； 圖g ( a )是表示在實施例1中所製作的資訊記錄媒 體的各個信號的圖； 圖9 ( b )是表示現有的具有凹軌內凹坑的資訊記錄 媒體的各個信號的圖； 圖1 〇是實施例2中的光資訊記錄媒體的凹軌內凹坑 區域與凹軌區域的邊界部附近的簡要剖面圖； 圖1 1是表示照射在實施例3中的玻璃原盤上的雷射 的曝光強度的時間變化的圖； 圖1 2 ( a )表示實施例3中的光資訊記錄媒體的邊界 凹坑區域附近的簡要上面圖； 圖1 2 ( b )是表示圖1 2 ( a )的D - D線剖面圖； 圖1 3是表示在實施例4中的玻璃原盤上照射的雷射 的曝光強度的時間變化的圖； 圖1 4 ( a )表示實施例4中的光資訊記錄媒體的邊界 凹坑區域附近的簡要俯視圖； 圖1 4 ( b )是表示圖1 4 ( a )的E - E線剖面圖； 圖]5是對在凹軌形成區域與凹軌內凹坑形成區域的 邊界部引起的尋軌錯誤的發生原因進行說明的圖； -55- 1244649 (52) 圖1 6 ( a )表示實施例5中的光資訊記錄媒體的邊界 凹坑區域附近的簡要俯視圖； 圖1 6 ( b )是表示圖1 6 ( a )的F - F線剖面圖； 圖1 7是表示照射在實施例5中的玻璃原盤上的雷射 的凹軌內凹坑形成區域附近的曝光強度的時間變化的圖； ‘ 圖1 8是表不照射在貫施例5中的玻璃原盤上的雷射 · 的玻璃原盤全體的曝光強度的時間變化的圖； _ 圖1 9是在實施例5中使用的RIE裝置的簡圖。 〔符號說明〕 1，1 ’，1 0 1 基板 2 5 2 5，1 0 2記錄層 3，3 ’，1 0 3 反射層 4 0凹軌形成部 42邊界凹坑形成部 44凹軌內凹坑形成部 5 0玻璃原盤 ® 5 2光阻劑 - 71，75凹軌區域 集 73凹軌內凹坑區域 72, 74邊界凹坑區域 1 0 1 a凸軌表面 1 〇 5 凹軌 1 〇 7凹軌內凹坑 -56- (53) (53)1244649 sa，sb和信號 p p a , p p b差信號（徑向推挽信號 AX 中心軸 ΑΧ 中心軸The maximum depth dg of the recessed rail portion is 170 nm. The maximum depth dpb of the boundary pit portion is 260 nm. Further, the maximum depth dp of the pit portion in the concave track is 200 nm. In order to obtain good recording and reproduction signal characteristics such as signal modulation and jitter, the maximum depth d g of the groove portion and the maximum depth dp of the pit portion within the groove preferably satisfy the condition of 1.4 $ dp / dgS 1.7. This is a condition obtained through experiments by the inventors, and this condition is also satisfied in the optical information recording medium in this embodiment. Furthermore, using the surface of the raised rail 80 as a reference, the half width 値 Wp of the indented portion of the indented rail in the indented rail 73 and the indentation of the boundary indented region 74 were measured using AFM manufactured by Digitization Equipment Corporation. The half-width 値 Wpb of the pit portion and the half-width 値 Wg of the concave-rail portion of the recessed rail region 75. Here, the "half-width" refers to a half of the maximum depth of each part with the surface of the convex rail 80 as a reference plane. The groove width or hole width in the radial direction of the medium at one of the depth positions. The half-width 値 Wg is 320 nm, the half-width 値 Wpb is 350 nm, and the half-width 値 Wp is 400 nm. It can be seen that WgSWpb < Wp's relationship is established. Moreover, the ratio of half-width 値 Wp to half-width 値 Wpb Wp / Wpb = 1.14 satisfies the condition of 1.05 [] Wp / Wpb! D1.15. Then, as shown in FIG. 8 (b), the in-track pit area 73 and the in-track pit area of the obtained optical information recording medium were measured using AFM manufactured by Digitization Equipment Co., Ltd. The depression depth of the recording layer in the boundary pit portion of 7 4 and the groove portion of the concave track area 75. Here, the "stomach s3 recording layer depression coating degree" refers to the maximum depression amount of the recording layer 2 based on the surface 2a of the g recording layer 2 formed on the convex track 80. The recording layer pit depth Tp in the pit area 73 within the pits is 170 nm. Boundary -29- (26) 1244649 The pit depth Tpb of the recording layer in the pit region 74 is 135 nm. The recording layer depression depth Tg of the depression track area 75 is 100 nm. In order to obtain good recording and reproduction signal characteristics such as signal modulation, jitter, and the like, the recording layer pit depth Tp and the recording layer pit depth Tg preferably satisfy the condition of 1.6 STP / Tgg 2.0. This is a condition obtained based on experiments by the present inventors, and this condition is also satisfied in the optical information recording medium in this embodiment. The recording layer depression depth Tpb of the boundary pit region 74, the recording layer depression depth Tp of the in-track pit region 73, and the recording layer depression depth Tg of the indent track region 75 are the conditions for the recording layer of the boundary pit region 74. The depression depth Tpb reduces the difference between the recording layer depression depth Tg of the recessed track region 75 and the recording layer depression depth Tp of the recessed track pit region 73, and thus becomes Tg < Tpb < Tp. Further, the ratio of the maximum depth dg of the recessed track portion to the maximum depth dp of the pit portion in the recessed track and the ratio of the recording layer recess depth Tg to the recording layer recess depth T p preferably satisfy d p / d g < T p / T g conditions. Even if the maximum depth dp of the pit portion in the recessed rail is not sufficient for the maximum depth dg of the recessed rail portion under the condition that sufficient signal modulation and radial push-pull signals can be obtained, the pigment material is coated on the substrate as The recording layer can increase the difference between the optical path length of the laser in the recessed track portion and the optical path length of the laser in the pit portion in the recessed track during recording information reproduction, and increase the optical path length difference. As a result, sufficient signal modulation and radial push-pull signals can be obtained. An optical pickup having a laser with a wavelength of 65 Onm and a lens with a numerical aperture of 0.6 was used to reproduce the recorded signals in the pit area within the pit track of the optical information recording medium obtained in the above embodiment. The detection and regeneration of the signal -30-1244649 (27) is stable enough. Moreover, the signal modulation degree of the reproduced signal at this time is 61%, and the jitter is 7.2%, and good results can be obtained. Moreover, in this embodiment, as shown in FIG. 8 (a), the area adjacent to the in-recess pit 73 a and the boundary pit 74 a has been described. However, even in the in-track pit and the boundary, When tracking is performed in a city adjacent to a recessed rail portion in a pit, a tracking error does not occur for the following reasons. On the basis that the light spot has a certain point size, in actual tracking, the light spot is scanned in a direction that is not perpendicular to the tracking direction but at an obtuse angle. Therefore, the pits at the tracking boundary In the area, any boundary pit part will enter the light spot. As a result, the radial push-pull signals obtained from the boundary pit area are averaged, and compared with an optical information recording medium in which only pits and pits in the pits are formed, it is possible to suppress pits in the pits during tracking. Distortion of the radial push-pull signal between the area and the concave track area. [Comparative Example 1] The following describes a comparison result of the radial push-pull signal output of the optical information recording medium produced by the above embodiment with the radial push-pull signal output of the existing optical information recording medium having pits in the track. FIG. 9 (a) shows the detection result of the optical information recording medium produced by the above embodiment. The upper section shows the output of the sum signal sa from the two-segment detector (detector) of the optical pickup at the time of seek. The lower section shows the output of the difference signal (radial push-pull signal) PP a. Figure 9 (b) shows the detection results of a conventional optical information recording medium with pits in the track. The upper section shows the output of the sum signal sb during the search, and the lower section shows the difference signal (radial push-pull letter -31 ~ ( 28) No. 1244649) ppb output. The parts where the amplitude levels of the neutralization signals sa and sb in the graphs g (a) and g (b) change greatly (represented by reference numeral 9a in FIG. 9 (a) and reference numeral 9b in FIG. 9 (b), respectively) It is the boundary between the pit region and the recessed rail region in the recessed rail. At the position corresponding to the reference numeral 9a in FIG. 9 (a), that is, at the boundary between the pit area and the pit area in the pit track in the optical information recording medium of the above embodiment, almost no difference shown in the next paragraph is seen. Distortion of the signal (radial push-pull signal) ppa. On the other hand, at a position corresponding to the reference numeral 9b of FIG. 9 (a), that is, at the boundary between the pit area in the pit and the pit area in the optical information recording medium having the existing pit in the track, It can be confirmed that the distortion of the difference signal (radial push-pull signal) ppa shown in the next paragraph is large. As described above, in the DVD-R and the DVD-RW, tracking is performed by using the radial push-pull signal. At the boundary between the pit area and the recessed track area in the recessed track, the amplitude of the amplitude of the radial push-pull signal is reduced. Loss of balance, that is, the misalignment of the center of the amplitude, is prone to tracking errors. Furthermore, in the optical information recording medium produced in the above embodiment, the amount of variation between the radial push-pull signal of the recessed rail portion and the radial push-pull signal of the pit portion in the recessed rail is obtained by changing the diameter in the normal state. When the amplitude of the push-pull signal is 100%, it is 36%. In the DVD-R standard, although there is no special stipulation, in the DVD-RW standard, it is specified that the amount of change in the radial push-pull signal of the recessed track portion and the radial push-pull signal of the pre-pitted portion is 20 %the above. Therefore, the optical information recording medium of the above-mentioned embodiment is sufficient to meet the standard without causing tracking failure (tracking error). In contrast, in the conventional optical information recording medium having pits inside the track, the above-mentioned variation amount is about -32- (29) 1244649 1 80%. Therefore, conventional optical information recording media with pits in the tracks are at or below the lower limit of the DVD · RW standard, and tracking failures (tracking errors) are likely to occur. In the optical information recording medium of the above embodiment, polycarbonate is used as the substrate. However, polymethyl methacrylate (Poly_methyl-meta-acrylate) and amorphous polyolefin (amoph) may also be used. u Β〇ly-olefin) and so on. Furthermore, in the optical information recording medium of the above embodiment, each layer is formed in the order of a recording layer and a reflective layer on a substrate. However, a reflective layer may be formed on the pattern forming surface on the substrate first, and then, the reflective layer Each layer is formed by forming a recording layer on the layer. When an optical information recording medium is produced using such a layer structure, the same effects as those of the above embodiment can be obtained. [Embodiment 2] Another embodiment of the optical information recording medium of the present invention will be described with reference to Fig. 10. The optical information recording medium in this embodiment is the same as that in Embodiment 1 except that the metal material chip (L) is used as the recording layer. This recording layer records and reproduces information by means of nSbTe. As shown in FIG. 10, 'on the substrate on which the convex track, the concave track, and the pits in the concave track are formed; 1. On the surface, a sputtering method is used to form a metal material containing T e with a thickness of 15 I nm as a recording layer. 2'. Further, as in Example 丨, a Ag alloy having a thickness of 160 nm was formed on the recording layer 2 'by using a shot method. Thus, a reflective layer 3 'is obtained. By using AglnSbTe as the material of the recording layer 2 ', the thickness of the recording layer 2' laminated on the pattern formation surface of the substrate Γ * 2 is also approximately constant regardless of the location (30) 1244649. The degree tr3 of the reflective layer 3 'laminated on the recording layer 2' is also substantially constant regardless of the location. Therefore, it is easy to J: The thickness of the recording layer and the reflection layer in each of the regions can also be grasped, and the thickness of the stacked layers can be controlled based on this. Thereby, a more stable layer can be formed in the optical information recording medium. [Embodiment 3] Another embodiment of the present invention will be described with reference to Figs. 11 and 12. In this embodiment, a recessed track (hereinafter referred to as a boundary hereinafter) having a width wider than that of the recessed track in the recessed track region is formed between the recessed track region of the substrate for the optical information recording medium and the boundary pit region. Except for the concave rail), it is the same as the first embodiment. Hereinafter, a method for producing a master disk, a stamper, and an optical information recording medium used for producing the substrate will be described. In the present embodiment, the exposure intensity of the laser irradiated on the glass master is changed by using the above-mentioned optical modulator while moving the laser on the glass master as in the case of nm. In this embodiment, as shown in FIG. 11, the exposure intensity of the laser is made in the order of low to high, and is divided into 4 levels: level 1, level 2, level 3, and level 4. Variety. In this embodiment, the ratio of the bit levels is set as follows: when level 4 is 100%, level 3 is 90%, level 2 is 60%, and level 1 is 55%. As shown in FIG. 11, the exposure intensity in the first and second concave track formation regions is set to level 1. In addition, the exposure intensity of the pit formation portion in the pit formation area in the pit formation area is set to level 4, and the exposure intensity of the other pit formation portions is set to level 1. In-pit formation in the indentation rail in the boundary indent formation region -34-(31) 1244649 The exposure intensity is set to level 3, and the other indentation rails are set to level 1. In the optical information recording medium of the present embodiment, 'by providing a boundary recess track, compared with the case of the embodiment 1,' even if a pit formed in the boundary recess is formed larger ', the distance from the boundary recess track area to the boundary is reduced. The width of the dimple track in the dimple region is changed slowly, and thus it is difficult for offset and distortion of the radial push-pull signal to occur. As a result, a sufficient degree of modulation can be obtained even in the in-track pits formed in the boundary pits. Therefore, the pattern of the pits in the pits formed in the boundary pits is not limited to a virtual random pattern, but may also be a pattern of recorded signals of user information. As a result, the pattern of the pit-forming portion in the groove in the boundary pit-forming region of the 'master disk' also forms a pattern corresponding to the pit in the groove. Next, in the same manner as in Example 1, the glass master disk on which the photoresist was photosensitive was developed, and the glass master disk was etched using a RIE apparatus according to the pattern of the remaining photoresist. As a result, a glass master having a desired uneven pattern formed on the surface is obtained. Moreover, in this embodiment, the depth of the rotten uranium of the recessed rail formation portion and the boundary recessed rail formation portion from the surface of the glass original disk is 17 Onm, and the pit formation portion and the boundary pit formation portion in the recessed rail are corroded from the glass original disk surface The depth is 260nm. The boundary recessed rail forming portion is formed wider than the recessed rail forming portion. In this embodiment, as in Embodiment 1, when the exposure intensity is changed during exposure, a period for temporarily setting the exposure intensity of the laser to 0 is set whenever the exposure intensity is switched. Moreover, in this embodiment, in the pit formation area within the recessed track, the exposure intensity of the pit formation portion in each recessed track having a predetermined pit length is controlled as follows, and the original disk exposure is performed at the same time: eg -35- (32) 1244649 As shown in Figure 11, exposure is performed at level 4 from 1T to 1.5T (T: clock cycle) from the beginning of exposure, and then the exposure intensity is reduced to level 4 during the predetermined period 70% level (level A) for exposure. Next, between 1T and 1.5 τ until the end of the pit formation portion in the concave track, the exposure intensity is returned to level 4 again to perform exposure. This prevents the width in the radial direction of the original disk of the pit formation portion in each groove from being widened near the middle portion in the track direction of the pit formation portion in the groove. In addition, the exposure intensity can also be controlled in the same way with respect to the exposure intensity of the pit-forming portion in the groove of the boundary pit formation region. A stamper was produced using the thus obtained master disk, and a substrate was produced using an injection molding method in the same manner as in Example 1. Next, as shown in FIG. 12 (b), as in Example 1, a recording layer 2 and a reflective layer 3 are formed. An isolation substrate was pasted on the obtained substrate through a photocurable resin, thereby obtaining an optical information recording medium. The optical information recording medium thus obtained was measured in the same manner as in Example 1. AFM manufactured by Digitization Equipment Co., Ltd. was used to measure the in-track pit portion of the in-track pit area 73, the boundary pit portion of the boundary pit area 74, The maximum depth of the recessed rail portion of the boundary recessed rail region 76 and the recessed rail portion of the recessed rail region 75. As shown in FIG. 12 (b), the maximum depth dg of the recessed rail portion is 170 nm. The maximum depth dgb of the boundary concave track portion is 170 nm. The maximum depth dpb of the boundary pit portion is 260 nm. The maximum depth dp of the pit portion in the recessed rail is 260 nm. In addition, in order to obtain good recording and reproduction signal characteristics such as signal modulation and jitter, the maximum depth dg of the groove portion and the maximum depth dp of the pit portion within the groove preferably satisfy 1.4 $ dp / dg -0δ-1244649 ( 33) Conditions of S1.7. Furthermore, using the surface of the raised rail 80 as a reference, the full width 値 Wp of the recessed portion of the recessed portion of the recessed portion 73 in the recessed portion of the recessed portion of the recessed portion of the recessed portion by using AFM manufactured by Digitization Equipment Co., Ltd., and the boundary recessed portion of the recessed portion of the recessed portion 74 The half width 値 Wpb of the pit portion, the half width 値 Wgb of the concave track portion of the boundary recessed rail area 76, and the half width 値 Wg of the concave track portion of the recessed rail area 75. Half-width 値 Wg is 3 20nm, half-width 値 Wgb is 3 3 Onm, half-width 値 Wpb is 3 60nm, and half-width 値 Wp is 400nm. From this, we can see that Wg S Wgb $ Wpb < Wp's relationship holds. Furthermore, the ratio of half-width 値 Wp to half-width 値 Wpb Wp / Wpb = l.l 1 satisfies the condition of 1.05 S Wp / Wpb $ 1.15. Furthermore, the ratio of half-width 値 Wgb to half-width 値 Wg Wgb / Wg = 1.03, which satisfies the condition of 1.03 € Wgb / Wg $ 1. 15. Furthermore, in the optical information recording medium obtained in this embodiment, as shown in FIG. 12 (a), as a result of exposure according to the above-mentioned exposure schedule, pits in the grooves were suppressed. The width in the radial direction of the substrate at the vicinity of the middle in the track direction of the in-recess pit 7 3 a of the area 7 3 becomes wider. Thereby, even in the convex rail portion 77 adjacent to the pit in the concave rail, a sufficient rail surface can be secured. Thus, a stable radial push-pull signal can be obtained from the optical information recording medium. In addition, in order to adjust the suppression effect of the width of the pits 7 3 a in the recessed rails, in the pits in the recessed rails 7 3, a scanning probe microscope manufactured by Digitization Equipment Co., Ltd. was used to measure the channels with the shortest channels. The width in the radial direction of the substrate in the recessed pits with a bit length of 3 T, and the width in the radial direction of the substrate in the recessed pits with a longer channel bit length is -37- (34) 1244649 degrees. The maximum width of the pit in the recessed track having the shortest channel bit length of 3T is 0.34 μm. Moreover, the maximum width of the pits in the recessed track with the channel bit length ητ is 0.38 μm, and the maximum width of the pits in the recessed track with the channel bit length 14T is 0.4 μm. According to an experiment made by the present inventor, the maximum width of the pit in the recess with the shortest channel bit length 3T is the same as the maximum width of the pit in the recess with the channel bit length longer than the shortest channel bit length 3T. When the ratio is in the range of 1 12 to 118%, it can be seen that in the pits in the groove longer than the shortest channel bit length, the width in the radial direction of the substrate is suppressed from being widened. Furthermore, as in Example 1, the in-track pit area 7 3 and the in-track pit area 74 of the obtained optical information recording medium were measured using AFM manufactured by Digital Equipment Corporation. The depth of the recording layer in the pit portion, the groove portion of the boundary groove portion 76, and the groove portion of the groove portion 75 is reduced. As shown in FIG. 12 (b), the recording layer depression depth Tp in the pit area 73 in the groove track is 17 0 nm. The recording layer recess depth Tpb in the boundary pit region 74 is 1 35 nm. The recording layer depression depth Tgb of the boundary depression track area 76 is 110 nm. Further, the recording layer pit depth T g of the pit track region 75 was 100 nm. In addition, in order to obtain good recording and reproduction signal characteristics such as signal modulation and jitter, as in Example 1, the recording layer depression depth Tp and the recording layer depression depth Tg are preferably satisfied; the condition of i.6sTp / Tg ^ 2 · 0 . Depth Tpb of the recording layer in the boundary pit area 74, Depth Tp of the recording layer in the pit area 73 of the indented track, Depth Tgb of the recording layer in the boundary pit area 76, and Depth of the recording layer in the indented track area 75 The relationship of -38-1244649 (35) in Ding § is Tg according to the relationship of the half-width width of the concave rails in the above areas. < Tgb < Tpb < Tp °. An optical pickup using a laser with a wavelength of 65 t) nm and a lens with a aperture of 0.6 is used to reproduce the recorded signals in the pit area in the groove on the optical information recording medium obtained in the above embodiment. . Signal detection and regeneration can be performed stably, and at this time, the signal modulation degree of the reproduced signal is 61%, and the jitter is 7.2%, and good results can be obtained. [Embodiment 4] Another embodiment of the present invention will be described using Figs. 13 and 14. In this embodiment, a boundary pit area for an optical information recording medium is not provided, and only a boundary pit area is formed between the pit area and the pit formation area within the pit, except that it is the same as the embodiment 3 . Hereinafter, a method for producing a master disk, a stamper, and an optical information recording medium used for producing the substrate will be described. In this embodiment, as shown in FIG. 13, for the exposure intensity of the laser, three levels of level 1, level 2, and level 4 in the exposure intensity used in Example 3 are used. Be sure to perform the original exposure. The ratio of the bits in this embodiment is the same as that in the embodiment 3. When the level 4 is 100%, the settings are as follows: the level 2 is 60% and the level 1 is 55%. As shown in FIG. 13, the exposure intensities of the first and second recessed track formation regions are set to level 1, and the exposure intensity of the pit-formed portions in the recessed track formation regions in the grooves are set to level 1. Level 4, the exposure intensity of the other recessed track portions is set to Level 1. Also, the exposure intensity of the groove -39- (36) 1244649 forming part of the boundary groove forming area is set to level 2. Next, the glass master disk on which the photoresist was photosensitized was developed in the same manner as in Example 1. The glass master disk was etched using the pattern of the remaining photoresist using a RIE apparatus. Thereby, a glass master having a desired uneven pattern formed on the surface is obtained. Further, in this embodiment, the recessed rail formation portion and the boundary recessed rail formation portion are etched from the surface of the glass master to a depth of 170 nm, and the pit formation portions in the recessed rail are etched from the surface of the glass master to a depth of 260 nm. The boundary recessed rail forming portion is formed wider than the recessed rail forming portion. In this embodiment, as in Example 3, when the exposure intensity is changed during the exposure, a period for temporarily setting the exposure intensity of the laser to 0 is set whenever the exposure intensity is switched. Further, as shown in FIG. 13, in the pit formation area within the groove, the exposure intensity of the pit formation portion in each pit having a predetermined pit length is controlled in the same manner as in Example 3 to perform the original disc exposure. . Using the thus obtained master disk, a substrate was produced using an injection molding method in the same manner as in Example 3. Next, as shown in FIG. 14 (b), the recording layer 2 and the reflective layer 3 are formed in the same manner as in the third embodiment. An isolation substrate was pasted on the obtained substrate through a photocurable resin to obtain an optical information recording medium. The optical information recording medium thus obtained was measured in the same manner as in Example 3. AFM manufactured by Digitization Equipment Co., Ltd. was used to measure the pit portion in the pit region 73 in the pit region, the dent portion in the boundary pit region 76, The maximum depth of the concave rail portion of the concave rail region 75. As shown in Fig. 14 (b), the maximum depth d g of the recessed rail portion is 170 nm. The maximum depth dgb of Qin 1244649 (37) on the concave part of the boundary is 1 70nm. The maximum depth dp of the dimples in the dimple rail is 2 6 Onm. In addition, in order to obtain good signal modulation and jitter recording and reproduction signal characteristics, the maximum depth dg of the groove portion and the maximum depth dp of the groove and inner pit portion should preferably satisfy 1.4 S dp / dg ^ 1. 7 conditions. Furthermore, using the surface of the raised rail 80 as a reference, the half width 値 Wp of the recessed portion in the recessed track of the recessed track 73 in the recessed track was measured using AFM manufactured by Digitization Equipment Co., Ltd., and the width of the boundary recessed track region 76 was measured. The half-width 値 Wgb of the concave rail portion and the half-width 値 Wg of the concave rail portion of the concave rail region 75. Half-width 値 Wg M 320nm, half-width 値 Wgb is 350nm 'and half-width 値 Wp is 400nm. From this, we can see that Wg < Wgb S Wp relationship. Moreover, the ratio of half-width 値 Wgb to half-width 値 Wg Wgb / Wg = 1.09, which satisfies the condition of 1.05 g Wgb / Wgg 1.15. Further, as shown in FIG. 14 (a), as a result of performing the exposure according to the exposure schedule as described above, the middle portion of the track direction of the in-track pit 7 3a in the in-track pit area 73 is in the track direction. In the vicinity, the width in the radial direction of the substrate is suppressed from becoming wider. Thereby, a sufficient rail surface can be ensured even in the convex rail portion 7 7 'adjacent to the pits in the concave rail. Thus, a stable radial push-pull signal can be obtained from the optical information recording medium. In addition, in order to adjust the suppression effect of the width of the pits 7 3 a in the recessed track, the scanning type probe microscope manufactured by Digitization Equipment Co., Ltd. was used to measure the length of the shortest channel bit in each of the pits in the recessed track 73. The width in the radial direction of the substrate of the pit in the recessed rail of 3 T and the width in the radial direction of the substrate in the pit of the recessed rail having a longer channel bit length. The maximum width of the pits in the groove with the shortest channel bit length 3 T is 0.34 μ1 μ. Moreover, -41 _ 1244649 (38) the maximum width of the pits in the dimple track having a channel bit length of 11T is 0.38 μm. The maximum width of the pit in the recessed track having a channel length of 14T is 0.4 μm. According to an experiment made by the present inventor, the maximum width of the pit in the recessed track having the shortest channel bit length of 3 T is the same as the maximum of the pit in the recessed track having a channel bit length longer than the shortest channel bit length of 3 T. The ratio of the width is in the range of 100% to 118%, preferably in the range of 11-2 to 118%. In the pits of the groove longer than the shortest channel bit length, the substrate radius The widening in the direction is suppressed. Further, in the same manner as in Example 3, the in-track pit area 73, the in-track pit area 76, and the in-track area of the in-track in-pit area 73 of the obtained optical information recording medium were measured using AFM manufactured by Digital Equipment Corporation. The recess depth of the recording layer of the groove portion of 75. As shown in FIG. 14 (b), the recording layer recess depth Tp in the pit region 73 within the recess track is I 7 0 nm. The recording layer recess depth Tgb of the boundary recess track region 76 is 120 nm. Further, the recording layer recess depth Tg of the recessed track area 75 is 10 Onm. Furthermore, in order to obtain good recording and reproduction signal characteristics such as signal modulation and jitter, as in Example 1, it is preferable that the recording layer depression depth Tp and the recording layer depression depth Tg satisfy the condition of 1.6 $ Tp / TgS 2.0. The relationship between the recording layer depression depth Tp in the pit area 73 of the recessed track, the recording layer depression depth Tgb of the boundary recessed track area 76, and the recording layer recessed depth Tg of the recessed track area 75 is based on Relationship for Tg < Tgb < Tp. An optical pickup using a laser with a wavelength of 6 Onm and a lens with a number aperture of 0.6 is used to perform the groove M2-1244649 1 (39) for recording signals in the pit area of the optical information recording medium obtained in the above embodiment. regeneration. The detection and reproduction of the signal can be performed stably, and the signal modulation degree of the reproduced signal at this time is 61% and the jitter is 7.2%, and good results can be obtained. When the original discs of Examples 3 and 4 were exposed, the control was performed such that the exposure intensity of the pit formation portion in the pit formation area with a predetermined pit length in the pit formation area within the pits was first the first exposure intensity, and then Is the second exposure intensity lower than the first exposure intensity, and then changed to the first exposure intensity. However, the same exposure intensity control can also be performed during the original disc exposure in Examples 1 and 2. [Example 5] A fifth embodiment of the present invention will be described with reference to Figs. 16 to 19. In the optical information recording medium in this embodiment, as shown in FIG. 16, in the convex track portion of the substrate 1, the convex track pre-etched pits LPP are formed at predetermined intervals in the recording track direction. Boundary recessed rail region 1 76 is formed as a recessed rail that continuously deepens and widens from the inner periphery (inside) to the outer periphery (outside) of the substrate, and in addition to the pre-etched pits LPP from the inner periphery to the outer periphery of the substrate Except for continuous deepening and widening, the other configurations are the same as those of the third embodiment. In addition, the pre-pit pit LPP is used for pre-recording the position information and the like of the medium in the optical information recording medium. Hereinafter, a method for producing a master disk, a stamper, and an optical information recording medium used in the production of the substrate will be described. Fig. 17 shows changes in the exposure intensity of the laser in the vicinity of the pit formation area in the concave tracks of the glass master. Fig. 18 shows the change in the exposure intensity of the laser of the entire glass master. In this embodiment, as shown in FIG. 17, for the exposure intensity of -Αό-1244649 (40) laser, the exposure intensity level 1, level 2, level 3, At level 4 such as level 4, at the same time, as shown in FIG. 8, the exposure intensity of level 1 or the concave track level is continuously changed from the inner periphery to the outer periphery of the glass master to perform the master exposure. In this embodiment, the ratio of the bits is set as follows: when level 4 is 100%, level 2 is 60%, and level 3 is 90%. Moreover, as shown in FIG. 18, the level 1 is continuously changed such that the exposure start position (a position with a radius of 19.0 mm from the center of the glass master disc) of the glass master disc is 55%, and at the exposure end position (At a radius of 58.9mm from the center of the glass master) is 60%. In this way, by continuously increasing the exposure intensity of the recessed track level, a pattern corresponding to the recessed track can be formed on the glass master so that the width of the pattern corresponding to the recessed track is continuous from the inside to the outside of the glass master. Widen. Further, as shown in FIG. 17, the exposure intensities in the first and second concave track formation regions are set to level 1, respectively. The exposure intensity of the pit formation portion in the pit formation in the pit formation area is set to level 4, and the exposure intensity of the other pit formation portions is set to level 1. The exposure intensity of the recessed track formation portion in the boundary recessed track formation area is set to level 2. The exposure intensity of the pit-forming portion in the recessed track in the boundary pit formation area is set to level 3, and the exposure intensity of the other recessed track portions is set to level 1. Further, in the present embodiment, 'the same as in Example 3', when the exposure intensity is changed during exposure, such control is performed: whenever the exposure intensity is switched, 'the period in which the exposure intensity of the laser is temporarily set to 0 is set at the same time' 'In the pit formation area within the recessed track, the exposure intensity of the formation of the recessed pits -44-(41) 1244649 in each recessed track having a predetermined pit length is temporarily reduced (becoming level A) for the original disc exposure . Further, in this embodiment, the ratio to the exposure intensity level A is 75%. In addition, although not shown in the figure, when exposing a portion corresponding to the pre-pit embossed grooves (hereinafter referred to as a pre-pit pit forming portion) formed on the convex tracks of the substrate, it is the same as the above-mentioned exposure. The intensity control method adjusts the exposure intensity of the laser in the same way so that the depth of the pre-etched pits of the convex track is approximately the same as the depth of the adjacent concave track, and from the inner periphery to the outer periphery of the substrate, the groove width is from the substrate's The inner periphery continuously widens toward the outer periphery. Further, the convex-track pre-etched pit-forming portion is exposed using a laser that is different from the laser used in the exposure of the concave-rail forming portion, the pit-forming portion in the concave rail, and the like. Next, in the same manner as in Example 3, the glass master disk on which the photoresist was photosensitive was developed, and the glass master disk was etched using an R1E apparatus and a polishing apparatus in accordance with the pattern of the remaining photoresist. As a result, a glass master (not shown) having a desired uneven pattern formed on the surface is obtained. In this embodiment, the following control is performed on the R1E device so as to form such grooves ... having a uniform depth in the track direction and continuously deepening from the inner periphery to the outer periphery of the glass master. [Control Method of RIE Device] A schematic diagram of the R1E device is shown in FIG. 19. The RIE device 200 is mainly composed of a chamber 201, an anode 2 03, a cathode 204, an RF power source 205, an insulator 207, an exhaust pipe 2 0 9, 2 and 0, and a gas supply. Pipe 2 1 1 and cooling water supply pipe -45-1244649 (42) 2 1 3, 2 1 4 constitute. The anode 2 0 3 is provided above the inside of the dense chamber 201 together with the gas supply pipe 2 1 1 and the cold supply pipe 213. The cathode 204 insulator portion 20 7 is provided below the sealed chamber 201 ', and a master plate serving as an etched object is carried on the surface of the cathode 204. The exhaust pipe 209 is provided on the lower surface of the inside of the 001 so as to communicate with the inside of the closet 201. An exhaust pipe is provided on the side wall of the close room 201 to facilitate communication with the inside of the close room 210. A gate valve 215 provided in the middle of the exhaust pipe 210 can perform pressure adjustment in the close room 201. First, a predetermined amount of process gas (C2F6) is supplied from a gas supply section provided on the anode 203 side of the R1E device 200 through the gas supply pipe 2 1 1 into the dense chamber 2 0 1. At this time, the excess processing gas is exhausted through the air pipe 209, so that the inside of the dense room 211 is always constant. In the state where the processing gas is charged in the closed chamber 201, a voltage is applied from the RF power source 205 to the cathode 204, and a plasma state in the closed chamber 201 forms a blanket on the surface: (pa 11 erni η g The glass master 50 of the photoresist layer was engraved. Generally, in R1E, it is known that an accelerated airflow in an enclosed room increases the etching rate. In addition, the inventors made various researches on the conditions of the gas flow rate, pressure, and applied voltage. In order to distinguish the depth of the grooves formed on the inner and outer sides of the original disk, the pressure in the dense chamber is very large. relationship. As the pressure in the dense chamber is set to be high, the flow rate of the gas flowing through the dense chamber of the RIE apparatus is also different. Therefore, if the amount of gas in the vicinity of the center of the dense chamber becomes small, that is, the airflow becomes slow, and if it is close to the inner wall of the dense chamber, the upper dense chamber 210 through which the nearby water passes will give sufficient pressure to the exhaust pressure as shown in the figure. The flow rate of Qi-46-1244649 (43), which becomes the flow of the differential force generated by the engraved figure RIE, increases, that is, the airflow becomes faster. In this way, the corrosion rate in the vicinity increases, and grooves that become deeper from the glass master are formed. In this embodiment, the air flow of the RIE device is fixed, and various changes are made based on the existing pressure (condition 1). Based on the existing double pressure (4 times the pressure (condition 3) and the existing 8 times pressure) 16 times the pressure (Condition 5) to etch the difference between the inside and outside of the groove depth on the glass-glass master. Table 1 and Table 1 show the plasma in each condition. The stability of the plasma is: in corrosion The results are shown in the table as follows: "0. quasi" "X" in the table is the level of the discharge that lacks stability and is difficult to process on the original disk, and "A" is the middle position. The pressure in the chamber is set higher, and the difference in groove depth becomes larger, but at the same time, the qualitative deteriorates. In order to ensure the difference in groove depth in the amount that guarantees the stability of the plasma, it is best to set the dense chamber to have pressure 4 times. Therefore, 1 Onm heterodyne can be obtained. The internal and external outward / then continuous amount and applied voltage on the outside of the glass cylinder are used as the reference, and only the pressure condition 2), the existing (condition 4), The comparison of the existing original discs cannot be shown in the comparison. The combination of stability and brightness, discharge, discharge, etc. is a problem-free position. Reproducible calculations are performed. According to the steady state of the plasma in the inner and outer dense chambers of the primordial disk in Table 1, a certain condition 3 pressure is obtained, that is, the inner depth of the current left and right groove depths 1244649 (44) Table 1 Pressure condition 1 Condition 2 Condition 3 Condition 4 Condition 5 (Existing) Difference in groove depth 1.0 7.5 9.9 11.6 20.7 Plasma stability 〇〇〇 □□ In this embodiment, the boundary recessed track formation portion is etched to a depth of 170 nm from the surface of the glass original disk, and the inside of the recessed track The pit formation portion and the boundary pit formation portion are etched to a depth of 25 nm from the surface of the glass master. In addition, the recessed tracks are etched to a depth of 160 nm from the surface of the glass master on the inner periphery (radius 2.3 mm) of the glass master, and to a depth of 170 nm on the outer periphery (radius 58.7 mm). Furthermore, the land pre-pti formation portion is etched on the inner periphery of the glass master to a depth of 60 nm from the surface of the glass master, and the outer periphery of the glass master is etched to a distance of 17 nm from the surface of the glass master. The depth is such that the groove depth of the recessed rail forming portion adjacent to the embossed pit forming portion of each raised rail is the same. At this time, the groove width of the half-depth of the recessed rail forming portion is 3 1 0 n m on the inner peripheral portion (radius 23.0 mm) of the glass master, and 3 3 0 n m on the outer peripheral portion (radius 58.7 mm). Further, the half-deep groove width of the boundary recessed rail forming portion is 330 m, which is wider than the width of the adjacent recessed rail forming portion. Further, the width of the bump pre-etched pit formation portion was 170 nm on the inner peripheral portion of the glass master and 200 nm on the outer peripheral portion. At this time, the length of the track direction (pit length) when the pre-pit pit formation portion of the inner track portion is -48-1244649 (45) 1 7 Onm, and the record of the pre-pit formation portion of the outer track portion is recorded. The track direction length (pit length) is 200 nm. Using the thus obtained master disk, a substrate was produced using an injection molding method in the same manner as in Example 3. Next, as in Example 3, as shown in FIG. 16 (b), a recording layer 2 and a reflective layer 3 are formed. An isolation substrate was pasted on the obtained substrate 1 through a photocurable resin to obtain an optical information recording medium. With respect to the optical information recording medium thus obtained, AFM manufactured by Digitization Equipment Co., Ltd. was used to measure the pit portion in the pit region in the pit region, the pit portion in the boundary pit region, and the dent track in the boundary pit region. Maximum depth from the surface of the substrate (the surface of the raised rail), the maximum depth from the surface of the substrate to the inner surface (radius 23.0mm) of the recessed rail area and the inner surface (radius 23.0) mm) and the outer track (radius 55.0mm) the maximum depth of the pre-etched pits from the substrate surface. The maximum depth d g i of the concave rail portion in the inner peripheral portion is 1 5 5 n m. The maximum depth dgo of the recessed rail portion of the outer peripheral portion is 165 nm. The ratio of maximum depth dgi to maximum depth dgo dgo / dgi = 1.06, satisfying 1.00 < dgo / dgiS1.10. Moreover, the maximum depth d gb of the boundary recessed rail portion is 1 5 5 nm. The maximum depth dpb of the boundary pit portion is 245 nm. The maximum depth dp of the pit portion in the concave rail is 2 4 5ηη. In addition, in order to obtain good signal modulation and jitter recording and reproduction signal characteristics, the maximum depth dg (dgi $ dg $ dgo) of the concave track portion and the maximum depth of the pit portion within the concave track preferably satisfy 1 · 4 S. dp / dg S 1 · 7 conditions. Further, the maximum depth dlpi of the pre-pit pits on the inner peripheral portion is 1 55 nm, and the maximum depth dlpo of the pits on the outer-ring portion pre-pit -49- (46) 1244649 is 165 nm. Each has a depth substantially the same as the groove depth of the adjacent recessed rail portion. The concave rail portion and the convex rail are pre-engraved with pits, and the groove on the outer peripheral portion is formed deeper than the inner peripheral portion of the medium. Furthermore, using the surface of the raised rail as a reference, the half width 数 Wp of the indented portion of the indented rail in the indented region of the indented rail was measured using AFM manufactured by Digitization Equipment Co., Ltd., and the half of the indented portion of the indented boundary region. Width Wpb, half-width 凹 Wgb of the recessed rail portion in the boundary recessed rail region, Wgi and Wgo, the inner width (radius 23.0mm), and outer perimeter of the recessed rail portion of the recessed rail region The bottom widths Wlpi and Wlpo of the pre-pits of the convex tracks of the inner part (radius 55.0mm). Half-width 値 Wgi is 3 2 5 nm, half-width 値 Wgo is 3 45 nm, half-width 値 Wgb is 3 4 5 nm, half-width 値 Wpb is 350 nm, and half-width 値 Wp is 400nm. From this, Wgi < Wgo S WgbS Wpb < Wp's relationship holds. Moreover, the ratio of half-width 値 Wp to half-width 値 Wpb Wp / Wpb = 1.14 satisfies the condition of 1.05 $ Wp / WpbS1.15. The ratio of half width 値 Wgi to half width 値 Wgo Wgo / Wgi = 1.06, which satisfies the condition of 1.03SWgo / WgiS1.10. The bottom widths Wlpi and Wlpo are 18 Onm and 20 Onm, respectively. Compared with the inner peripheral portion of the media, the width of the pre-etched pits on the outer peripheral portion is formed wider. Furthermore, in the optical information recording medium obtained in this embodiment, as a result of exposure according to the exposure schedule as described above, as shown in FIG. 16 (a), the The inner pits of the pits 17 3 a near the middle in the track direction suppress the widening of the width in the radial direction of the substrate. Thereby, a sufficient rail area can be ensured on the surface of the convex rail portion 177 adjacent to the pit in the concave rail. As a result, on the surface of this track] 7 -50-1244649 (47), a stable shape of the track pre-pit pit LPP can be formed, and at the same time, the track preset pit can be reproduced and recorded in a stable state. Data. AFM manufactured by Digitizer Co., Ltd. was used to measure the in-track pit area 1 73a of the in-track pit area 1 73a of the optical information recording medium, the boundary pit portion 1 74a of the boundary pit area 1 74, Depression depth of the recording layer in the concave track portion of the boundary concave track area 176 and the concave track area 175, and the recording layer depression depth of the convex track pre-etched pits. As shown in FIG. 16 (b), the pit depth of the recording layer in the pit region 1 73 in the groove is 170 nm. The recording layer depression depth Tpb of the boundary pit area 174 is 135 nm. The recording layer recess depth Tgb of the boundary recessed track region 176 is 115 nm. Further, both the recording layer depression depth Tgi in the inner peripheral portion (radius 23.0 mm) of the recessed track region 175 and the recording layer depression depth Tgo in the outer peripheral portion (radius 5 5.0 mm) were 100 nm. In addition, in order to obtain good recording and reproduction signal characteristics such as signal modulation and jitter, the recording layer depression depth Tp and the recording layer depression depth Tg (= Tgi = Tgo) should preferably satisfy the condition of 1.6 STp / Tg ^ 2 · 0. In addition, the recording layer recess depth Tipi of the inner peripheral portion (radius 23.0 mm) of the pre-pit pit Lpp and the recording layer recess depth Tlpo of the outer peripheral portion (radius 55.0 nm) were both 100 nm. Depth Tpb of the recording layer in the boundary pit area 1 74, Depth Tp of the recording layer in the pit portion 173a of the concave track, Depth Tgb of the recording layer in the boundary pit area 176, and recording of the inner periphery of the dimple area 1 75 The relationship between the depth of the layer depression Tgi and the depth of the recording layer depression Tgo in the outer periphery is based on the relationship between the half width of the depression track in each region and the difference between the inner and outer circumferences of the recording layer film thickness formed by spin coating, which is Tgi = Tgo < Tgb < Tpb < Tp. -51-(48) 1244649 An optical pickup using a laser with a wavelength of 6 5 Onm and a lens with an aperture of 0.6 is used to reproduce the recorded signal in the pit area in the groove. Signal detection and reproduction can be performed stably. At this time, the signal modulation of the reproduced signal at this time is 64 to 65.5%, and the jitter is shifted around 7.8 to 7.5%, and good results can be obtained. In addition, the change in reflectance on the inner and outer circumferences in the recording / reproducing area of the medium is less than 2%, and it is possible to suppress the change in the push-pull signal and the change in the modulation degree of the recording / reproducing signal caused by the change in the reflectance. [Comparative Example 2] Table 2 below shows the comparison of the optical information recording medium (hereinafter referred to as Media A) of the present embodiment. The groove width of only the concave track continuously widens from the inner periphery to the outer periphery of the optical information recording medium. The formed optical information recording medium (hereinafter referred to as the medium B), the groove depth and groove width of the recessed track are uniform throughout the medium, and are the results of various characteristics of the optical information recording medium (hereinafter referred to as the medium C). As can be seen from Table 2, compared with the media B and C ', in each characteristic of the optical information recording medium, the difference between the inner and outer circumferences of the media A (the variation amount of the inner and outer circumferences) is smaller, that is, Regardless of the radial position of the media, approximately uniform characteristics were obtained. 1244649 (49) Table 2 Media A Media B Media c Radius (mm) 25 5 5 25 55 55 Reflectance (%) 46.8 46.8 46.3 48.9 43.7 49.6 Push-pull before recording 0.37 0.34 0.325 0.254 0.35 0.246 Pre-groove before recording Pit 0.23 0.25 0.294 0.253 0.283 0.246 Push-pull internal and external changes before recording 4.2 12.3 17.4 In this embodiment, an optical information recording medium that forms both a boundary pit and a boundary concave track will be described, but it is also possible to use this embodiment The manufacturing method of the optical information recording medium is used for an optical information recording medium forming only a boundary pit or an optical information recording medium forming only a boundary concave track. As a result, it is possible to obtain an optical information recording medium having uniform characteristics on both the inside and the outside of the medium as in the present embodiment. In the optical information recording medium of the present invention, by setting a boundary pit region between the pit region and the recessed track region within the recessed track, it is possible to suppress tracking that occurs between the pit region and the recessed track region within the recessed track. error. The manufacturing method of the optical information recording medium of the present invention is used for manufacturing the optical information recording medium of the present invention. With a wide recess (boundary recessed rail) provided between the recessed rail formation region and the boundary pit formation region, it is possible to obtain a good search while maintaining the modulation degree of the boundary pit in a good state. Rail characteristics. Moreover, even in the case where only a boundary recess rail is provided instead of the boundary pit formation area -53-1244649 (50), stable servo control can be performed. Furthermore, in the invention of wood, the four-slot inner pits were formed, and in the optical information recording medium in which a recording layer composed of an organic pigment material was formed, the pits and convex tracks were pre-etched from the inside of the medium (inside It is formed by continuously deepening and widening outward (peripheral). Thereby, the height of the interface between the recording layer and the reflective layer formed in the concave track portion and the convex track pre-etched pit portion is constant without causing internal and external differences. As a result, a stable push-pull signal can be obtained from the inner periphery to the outer periphery of the medium, and at the same time, the data recorded in the pre-pits of the track can be stably reproduced. [Brief description of the drawings] FIG. 1 (a) is a schematic plan view showing a part of a conventional optical information recording medium having pits in a concave track; FIG. 1 (b) is a sectional view taken along line A-A of FIG. 1 (a) FIG. 2 is a diagram illustrating a method for manufacturing a glass master in Example 1; FIG. 3 is a diagram showing a time change of exposure intensity of laser light irradiated on the glass master in Example 1; FIG. 4 (a) is A schematic plan view showing a part of the glass master disk after the photoresist is exposed and developed in Example 1. FIG. 4 (b) is a cross-sectional view taken along the line A ′-A ′ of FIG. 4 (a). FIG. 6 is a schematic perspective view of a pattern forming surface of a substrate obtained in Example 1. FIG. 6 is a schematic view of a substrate obtained in Example 1. -54- (51) 1244649 8 (a) is a schematic plan view of the vicinity of the boundary pit region of the optical information recording medium in Embodiment 1; FIG. 8 (b) is a sectional view taken along the line C-C of FIG. 8 (a); FIG. 9 is Shows the sum and difference signals (radial push-pull signals) near the boundary between the pit area and the concave track area in the concave track ); FIG. G (a) is a diagram showing each signal of the information recording medium produced in Example 1. FIG. 9 (b) is a diagram showing each signal of a conventional information recording medium having pits in a track. FIG. 10 is a schematic cross-sectional view near a boundary portion between a pit region and a recessed track region of an optical information recording medium in Example 2; and FIG. 11 is a view showing a glass master disc irradiated in Example 3 FIG. 12 (a) is a schematic top view of the vicinity of a boundary pit region of an optical information recording medium in Example 3; FIG. 12 (b) is a view showing FIG. 1 2 (a) is a cross-sectional view taken along the line D-D; FIG. 13 is a graph showing the temporal change in the exposure intensity of a laser irradiated on a glass master in Example 4; and FIG. 14 (a) is a view showing Example 4 A schematic plan view of the vicinity of the boundary pit area of the optical information recording medium; FIG. 14 (b) is a sectional view taken along line E-E of FIG. 14 (a); FIG. The figure explaining the cause of the tracking error caused by the boundary part of the inner pit formation area; -55- 1244649 (52) FIG. 16 (a) is a schematic plan view showing the vicinity of the boundary pit region of the optical information recording medium in Embodiment 5. FIG. 16 (b) is a cross-sectional view taken along line F-F of FIG. 16 (a) FIG. 17 is a graph showing the temporal change of the exposure intensity in the vicinity of the pit-forming area of the laser recessed groove on the glass master in Example 5; FIG. 18 is a table showing the irradiation in the embodiment Laser on the glass master in FIG. 5 is a graph showing a temporal change in exposure intensity of the entire glass master. FIG. 19 is a schematic diagram of an RIE apparatus used in Example 5. FIG. [Description of Symbols] 1, 1 ′, 1 0 1 Substrate 2 5 2 5, 1 2 2 Recording layer 3, 3 ′, 1 0 3 Reflective layer 4 0 Concave track forming portion 42 Boundary pit forming portion 44 Concave track concave Pit forming section 50 0 Glass master ® 5 2 Photoresist-71, 75 Recessed track area set 73 Recessed pit area 72, 74 Boundary pit area 1 0 1 a Convex track surface 1 〇5 Recessed track 1 〇7 -56- (53) (53) 1244649 sa, sb and signal ppa, ppb difference signal (radial push-pull signal AX center axis AX center axis
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