1243886 九、發明說明： 【發明所屬之技術領域】 本發明係一種可檢測高速循軌性能裝置，特別指一種以 位置感測ϋ配合雷射建立_套量測裝置，可檢測機台在高速 運動時的性能’其可提供微米級解析度量測，屬於非接觸型 量測，可將機台運動的過程完整紀錄，更可進一步分析工具 機的循軌誤差，較一般常見的測量方式更具架設方便、高精 度優點的量測裝置。 【先前技術】 為加速加工之速度，業界對於高速工 但是，適合高速工具機之檢測裝置並 需要一套可檢測高速循轨性能裝置來 隨著時代的變遷， 具機之需求越來越多。 沒有隨之增加。因此， 檢測高速工具機。 由於工具機在高速時，i , 具工作性能與低速工作是不一樣 的，所以傳統在低速進行的測旦 # τ ★人 丁叼，則里方法，並不適合用於評估高 速工具機之性能。 目前-般的循軌性能檢測主要有雙磁座伸縮雙球桿測 試系統（Telescope Magnetic仙-如㈣及格子編 碼器（Grid Encoder)兩種： 1 ·雙磁座伸縮雙球桿測試获 ^〜A凌置，如圖一所示，為利用一 可伸縮内藏位移量測元件的罅 雙磁座球桿來量測進給循圓運 動之誤差。其安裝容易攜帶方 乃便且對於不同平面測試的安裝 !243886 不需重新設定，但只能量測工具機的圓形路徑且在量測的過 裎中需以接觸式的方法量測，並需預防灰塵等細屑吸附在磁 性座的接觸面上。一般的循圓結果表示如圖二目前球桿系 統是最常見的循轨裝置，可架設於車床、銑床等各式工具機 上，其優點在於價格便宜（約台幣15萬）、架設容易但缺 點為只能進行循圓量測及不適合高速循轨量測。 2·格子編碼器，如圖三所示，其是由格點盤ai及讀頭 2所”且成。其架设方法為在工具機平台上將格點盤固定鎖 緊，而量測的探頭是固定鎖緊在工具機的主軸上，在格點盤 上往I與Π的方向其格點的間距是4"m，因此，其解析度是 ±2⑽量測方式採用非接觸的方式讓平台循轨由主轴上 的探頭將訊號傳入電腦處理分析。對於循圓量測而言其循 執半徑從7〇mm至_，而平台的進給速率最大可至μ “其可做小半徑的循圓量測且為非接觸式量測。其缺 點在於，其讀頭之高度必須維持固定且垂直於格點盤，目前 市面上可購得之產品主要以⑽的格子編碼器最常 見。其缺點除了上述之高度限料，尚有只能儲存咖筆 資料料之限制及價錢昂貴（約台幣5〇帛）等缺點。 有鑑於此，本發明即為了克服以上兩量測方法之缺點， 以位置感測ϋ配合㈣建立 、'‘” 务里州放置，並以非接觸方式 來量測各式循軌路徑，且可將量測過程完整顯現出來。 1243886 【發明内容】 本發明為利用位置感測器及雷射所建 置，係採用-唯# 〜立之循執量測裝 置感測器放至卫且機床4 、原里為基礎，使用時將位 φ 口 雷射則固定於機台之上，並讓 雷射光點落於位置咸丨 艾讓 昧… …'之感測範圍内，當床台作高速運動 寺，床口與機台之間的相 ^對位移，可透過本發明將其完整紀 錄下來’並進行進-步之分析。 由於位置感測器之輸出為電氣訊號，因此在使用位置感 :器之前需先進行校正工作以求得校正參數。此系統的校正 是利用雷射干涉儀提供參考座標，再配合最小平方法計算位 置感測器的訊號與光點位置之校正參數。 ’ 本發明將位置感測H的訊號透過類比/數位訊號轉換 卡轉換成數位訊號，然後藉由個人電腦紀錄。本發明採用高 速類比/數位訊號轉換卡，其轉換頻寬可達3〇 MHz，因此本 發明能量測高速工具機之循軌。 【實施方式】 本發明之系統安裝方式如下·· (a) 將雷射頭（雷射光源）1透過夾冶具及磁性座6固定 在工具機上。 (b) 將位置感測器2固定在床台8上，並接訊號線出來 到訊號處理器以放大訊號。 1243886 (C )將訊號處理器輪屮 鞠出接到類比/數位訊號轉換卡，使訊 號處理器輸出的_ + % i a 匕汛唬轉成數位訊號，之後可儲存於電 腦 田雷射光源打在位置感測器上時，感測器會產生對應 的X、Y抽訊號’此訊辦g或 Λ唬即為雷射光在位置感測器上的位 置訊號，因此當工且機戌a从 〃機床口作循執運動時，在位置感測器 上曰感測到雷射光與機台作相對運動所得到的完整路徑 由於類比/數位訊號轉換卡㈣取的訊號為電壓訊號，因 此在做量測前需先進行位置感測器的校正，以求得電壓與 光點位置的關係式（校正曲線方程式）。校正曲線的求得 為’將雷射干涉儀所提供參考座標以及位置感測器’輸出的 電壓，利用最小平方差法計算而求得。 (一）二維位置感測器校正： 二維位置感測器用於量測前，必須先經過校正，如圖 六所示。將位置感測器2放置在微動平台5上，其上有雷 射光1打入，接著架設雷射干涉儀4，使雷射干涉儀4可 以量測微動平台5之移動量。最後將微動平台5每隔固定 距離定點來回移動數次，並且同步擷取位置感測器2訊號 與雷射千涉儀4之讀值，將此過程所擷取的資料，經過最 小平方法計算後，即可得到此組位置感測$ 2的校正曲 線。在圖八（a)當中，橫軸為雷射干涉儀4之讀值，縱軸 1243886 為位置感測器之輸出，將此圖中的資 料 法，求取其二元-曲線之校正參數 次方程式之參數， 此兩 點以最小平方差 項參數即為校正 一雒位置感測器的校正分 风λ軸杈正與Y軸校正兩 二人，在做X軸校正時，微動平 移動方式為，讓微動平台 之移動方向與位置感測器之X轴平行，然後在位置編 工作_内每隔固定距離來回移動數次；而Υ軸的校正則 是將位置感測器轉9〇度後，讀 、 反设讓撻動平台之移動方向與位 置感測器的Υ軸平行，接菩續 々 卞仃接者讓礒動平台在位置感測器工作 範圍内每隔固定距離來回 夕切要文-人將上述兩個動作過程 所摘取的資料經由#筲 軸及Υ軸校正曲線。 (二）循軌量測：1243886 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a device capable of detecting high-speed tracking performance, and particularly to a device for measuring and establishing high-speed movement by using position sensing and lasers to establish a set of measuring devices. Time performance 'It can provide micron-level analytical measurement, which is a non-contact measurement, which can completely record the process of the machine's movement, and can further analyze the tracking error of the machine, which is more than the common measurement methods. Easy to set up, high precision measuring device. [Previous technology] In order to accelerate the processing speed, the industry is for high-speed work. However, the detection device suitable for high-speed machine tools requires a set of devices that can detect high-speed tracking performance. As the times change, the demand for machine tools is increasing. There has been no increase. Therefore, high-speed machine tools are tested. Since the working performance of the machine tool at high speed is different from that of low-speed operation, the traditional measurement at low speed # τ ★ Ren Ding, the method is not suitable for evaluating the performance of high-speed machine tools. At present, the general tracking performance testing mainly includes the two-magnet telescopic dual-cylinder test system (Telescope Magnetic Xian-Rugao and Grid Encoder): 1 · Dual-magnet telescopic dual-cylinder test ^ ~ A Lingzhi, as shown in Figure 1, uses a telescopic double magnetic seat ball with a retractable built-in displacement measuring element to measure the error of the circular movement of the feed. Its installation is easy to carry, convenient and easy for different planes. Test installation! 243886 No need to reset, but only the circular path of the machine tool can be measured and the contact method should be used during the measurement process, and fine particles such as dust should not be adsorbed on the magnetic base. The contact surface. The general circular result indicates that the current club system is the most common tracking device as shown in Figure 2. It can be installed on various machine tools such as lathes and milling machines. The advantage is that it is cheap (about NT $ 150,000), It is easy to set up, but the disadvantage is that it can only perform circular measurement and is not suitable for high-speed tracking measurement. 2. The grid encoder, as shown in Figure 3, is composed of the grid point ai and the read head 2 ". The method is to fix the grid on the machine tool platform. Lock, and the measuring probe is fixed and locked on the main shaft of the machine tool. The distance between the grid points on the grid plate toward I and Π is 4 " m, so its resolution is ± 2⑽ The method uses a non-contact method to allow the platform to track the signal transmitted to the computer for processing and analysis by the probe on the spindle. For circular measurement, the compliance radius ranges from 70mm to _, and the maximum feed rate of the platform can reach μ “It can be used for circular measurement with small radius and non-contact measurement. The disadvantage is that the height of the read head must be kept fixed and perpendicular to the grid plate. The products currently available on the market are mainly Lattice encoders are the most common. In addition to the above-mentioned height limitation, there are also disadvantages such as the limitation of only storing pen data and the high price (about NT $ 50). In view of this, the present invention is to overcome the above. The shortcomings of the two measurement methods are position sensing, cooperation, establishment, and “Wulizhou” placement, and non-contact measurement of various tracking paths, and the measurement process can be fully revealed. 1243886 [ SUMMARY OF THE INVENTION The present invention is to utilize The sensor and laser are built using -Wei # ~ Lizhi's observing measuring device. The sensor is placed on Wei and machine tool 4, and the base is used. When used, the position φ mouth laser is fixed at Above the machine, and let the laser light point fall on the location. 丨 Arangang ... When the bed is used as a high-speed motion temple, the relative displacement between the bed entrance and the machine can be transmitted through. The present invention records it in its entirety and performs further analysis. Since the output of the position sensor is an electrical signal, it is necessary to perform a calibration work to obtain the calibration parameters before using the position sensor: The calibration of this system is The laser interferometer is used to provide the reference coordinates, and then the least square method is used to calculate the correction parameters of the signal of the position sensor and the position of the light spot. 'The present invention converts the signal of the position sensor H into a digital signal through an analog / digital signal conversion card. , And then record from your PC. The invention adopts a high-speed analog / digital signal conversion card, and its conversion bandwidth can reach 30 MHz. Therefore, the energy measurement of a high-speed machine tool according to the present invention follows the trajectory. [Embodiment] The system installation method of the present invention is as follows: (a) A laser head (laser light source) 1 is fixed on a machine tool through a clamping tool and a magnetic base 6. (b) Fix the position sensor 2 on the bed 8 and connect the signal line to the signal processor to amplify the signal. 1243886 (C) Connect the signal processor wheel to the analog / digital signal conversion card, so that the _ +% ia output from the signal processor is converted into a digital signal, which can then be stored in a computer. When the position sensor is on, the sensor will generate the corresponding X and Y pumping signals. This signal g or Λ is the position signal of the laser light on the position sensor. When the machine tool port is performing the observing movement, the complete path obtained by the relative movement of the laser light and the machine is sensed on the position sensor. Because the signal captured by the analog / digital signal conversion card is a voltage signal, Before the measurement, the position sensor must be calibrated to obtain the relationship between the voltage and the position of the light spot (correction curve equation). The calibration curve is obtained by calculating the voltage output from the reference coordinates provided by the laser interferometer and the position sensor using the least square difference method. (I) Two-dimensional position sensor calibration: Before the two-dimensional position sensor is used for measurement, it must be calibrated, as shown in Figure 6. The position sensor 2 is placed on the micro-motion platform 5 with laser light 1 driven on, and then a laser interferometer 4 is set up so that the laser interferometer 4 can measure the movement amount of the micro-motion platform 5. Finally, the micro-movement platform 5 is moved back and forth at a fixed point every fixed distance several times, and the readings of the position sensor 2 signal and the laser interferometer 4 are synchronously acquired. The data acquired in this process is calculated by the least square method After that, a calibration curve for position sensing $ 2 can be obtained. In Figure 8 (a), the horizontal axis is the reading value of the laser interferometer 4, and the vertical axis is 1243886 is the output of the position sensor. The data method in this figure is used to obtain the binary-curve correction parameters. The parameters of the equation, these two points are the parameters of the least square difference, which is the correction of the position sensor. The λ-axis branch and the Y-axis correction are two or two people. When doing X-axis correction, the mode of micro-motion and translation is , Make the movement direction of the micro-movement platform parallel to the X-axis of the position sensor, and then move back and forth every fixed distance several times within the position editing work; and the correction of the y-axis is after turning the position sensor by 90 degrees The reading and reverse settings allow the moving direction of the tart platform to be parallel to the axis of the position sensor, and then connect the continuous platform to the main platform to move back and forth every fixed distance within the working range of the position sensor. Wen-ren corrected the data extracted by the above two actions through the # 筲 -axis and Υ-axis calibration curves. (2) Tracking measurement:
由“，即可得到二維位置感測器的X 如圖七所示，雷射光源1利用磁性座6固定在機台上 不動’再將位置感測器2利用螺絲7固定在雷射光下方的 床台8,然後輸入程式到工具機的控制器，讓工具機床台 8能依事先規劃之路徑移動，在移動的過程争避免光點超 出位置感測器2的工作範圍，然後利用個人電腦透過類比 /數位訊號轉換卡的抓值程式將光點在位置感測器2上行 走的路徑記錄下來，接著將得到的數據利用位置感測器校 正時得到的校正曲線進行單位轉換，最後再利用電腦進行 1243886 更進一步之分析處理。類比/數位訊號轉換卡所讀到的值 並不是位置感測器2的實際位置’必須透過校正方程式的 計算將類比/數位訊號轉換卡的讀值轉換成轉換成光點在 位置感測器上面的位置。將經過處理過的資料，藉由繪圖 程式匯出’即可得到可評估卫具機巡執性能之圖表。 -般常見循軌量測路徑有循圓量測、猶方量測循圓 角量測、循斜線量測及任意路徑循軌量測等。㈣量測之 測試路徑如圖四（a)所示，其目的在測試工具機在作各 種速度運動時X軸及γ軸之控制匹配性。循方量測之測試 路徑如圖四⑻所示’ 1目的為測試卫具機行走直角路徑 是否有垂直度誤差。循圓角量測之測試路徑如圖四（c)所 示，其測試目的在於測試工具機從直線運動，突然轉為圓 弧運動’床台疋否能正確的依照數值控制⑽)程式運動。 循斜線量測之測試路徑如圖四⑷所示，其測試目的為測 試X軸及Y軸之控制匹配性。任意測試之路經如圖四⑷ 所示，其測試目的為使卫具機任意路徑運動，床台是否在 各種速度下亦能照數值控制（NC)程式運動。 以上這些量測路彳f在於測試卫具機在加王各種形狀 的加m有了上述測試，可以 使使用者在未進行加卫之前即可知道此卫具機的控制性 能。 1243886 當工具機處於低速運動（<1〇〇公釐/分鐘），其行走路 徑大多與數值控制（NC)碼的規劃的差異不大，但是當工具 機之運動速度逐漸加快之後，工具機的控制性能好壞即會 明顯影響量測結果。圖五為上述量測路徑在—般的工具機 之測試預期結果。本發明之最大功能在於測試工具機在各 種運動速度下之控制性能（循軌性能）。 循軌量測之優點，在於其能量測工具機加工時的移動 路徑，其量測結果對於評估卫具機之加卫性能比較直接。 本發明具有循軌量測之優點，並具有高速檢測之功能，因 此對於高速工具機之檢測更為有用。 (一） 單顆位置感測器校正： 在進行單顆位置感測器校正時，如圖六所示本發明 將雷射光1固定於工具機上’然後將雷射光i的光點，移 動到位置感測器2上，將微動平台延χ轴方向每隔固定距 離來回移動數次，並擁取位置感測器訊號與雷射干涉儀所 測之結果；將位置感測器轉9〇度後，再依此方法將微動 平台延位置感測器Υ軸每隔固定距離來回移動數次即可 求得位置感測器之X軸與Υ軸的校正曲線。其流程如圖九 (a)、（b)所示。 (二） 循軌量測： 如圖七所示，固定於機台上的雷射1將雷射光射入位 1243886 置感測ϋ 2，接著使卫具機床纟8依事先規劃之路徑移 動。在移動過程中，藉由位置感測器2將雷射光點行經之 軌跡紀錄於電腦之中，再經由電腦將循轨所紀錄的資料進 行處理與分析。其流程如圖十所示。 本發明所具之裝置原理簡述如下： 1 ·位置感測器：為二維位置感測器，當雷射光點打在 位置感測器上時，可透過訊號處理器可求得光點的位置變 化量。 2·雷射二極體（Laser Di〇de):其體積小，其光波具 有高度的指向性與同調性。 3·高速類比/數位訊號轉換卡（A/D卡）··其可高速的 將、’·至放大器後的類比訊號轉換成數位訊號，以便電腦處理； 為應付高速循執量測，類比/數位訊號轉換卡必須使用取 樣速率1MHZ以上之類比/數位訊號轉換卡。 4.高速循執：一般的工具機進給率最高約為6〇〇〇公 釐/分鐘，而高速工具機之進給率可達丨公尺/秒以上。 5·循軌量測：為利用二維位置感測器及雷射光源，當 床口作尚速運動時，床台與機台之間的相對位移，可透過 本1測系統將其完整紀錄下來，並進行進一步之分析。 上列洋細說明係針對本發明之一可行實施例之具體 說明，惟該實施例並非用以限制本發明之專利範圍，凡未From ", you can get the X of the two-dimensional position sensor. As shown in Figure 7, the laser light source 1 is fixed on the machine using the magnetic base 6 and then the position sensor 2 is fixed under the laser light with the screw 7. Bed 8 and then input the program to the controller of the machine tool, so that the machine tool table 8 can move according to the planned path, avoiding the light point beyond the working range of the position sensor 2 during the movement, and then using a personal computer Record the path of the light spot on the position sensor 2 through the capture program of the analog / digital signal conversion card, and then use the correction curve obtained when the position sensor is calibrated to perform unit conversion on the obtained data. The computer performs further analysis and processing of 1243886. The value read by the analog / digital signal conversion card is not the actual position of the position sensor 2. 'The reading of the analog / digital signal conversion card must be converted into a conversion by calculating the correction equation. The position of the light spot on the position sensor. The processed data can be exported through a drawing program to obtain a map that can evaluate the performance of the health machine. -Commonly-used tracking measurement paths include circular measurement, still square measurement, fillet measurement, oblique line measurement, and arbitrary path tracking measurement. The test path of the measurement is shown in Figure 4 (a) As shown in the figure, the purpose is to test the control compatibility of the X-axis and γ-axis when the machine tool performs various speed movements. The test path of the square measurement is shown in Fig. 4 '1 The purpose is to test whether the right-angle path of the health machine is walking There is a verticality error. The test path following the fillet measurement is shown in Figure 4 (c). The purpose of the test is to test whether the machine tool moves from a straight line to a circular arc. ⑽) Program motion. The test path measured by oblique lines is shown in Figure 4⑷. The test purpose is to test the control compatibility of the X and Y axes. The path of any test is shown in Figure 4⑷. The test purpose is Make the machine move in any path, and whether the bed can also move according to the numerical control (NC) program at various speeds. The above measurement paths 彳 f are for testing the machine in various shapes of the king. , Allowing users to You can know the control performance of this machine. 1243886 When the machine tool is in low-speed motion (<100mm / min), most of its walking path is not much different from the plan of numerical control (NC) code, but when After the speed of the machine tool is gradually accelerated, the control performance of the machine tool will obviously affect the measurement results. Figure 5 is the expected test result of the machine tool with the same measurement path. The biggest function of the present invention is the test tool. The control performance (tracking performance) of the machine at various speeds of movement. The advantage of tracking measurement is that its energy measures the movement path of the tool during machining. The measurement results are relatively direct to evaluate the performance of the health machine. The invention has the advantages of tracking measurement and the function of high-speed detection, so it is more useful for the detection of high-speed machine tools. (1) Single position sensor calibration: When performing single position sensor calibration As shown in FIG. 6, the present invention fixes the laser light 1 on the machine tool ', and then moves the light spot of the laser light i to the position sensor 2, and extends the micro-movement platform along the χ axis direction every Move back and forth several times at a fixed distance, and grab the signal from the position sensor and the results measured by the laser interferometer. After turning the position sensor by 90 degrees, follow this method to extend the micro-movement platform along the axis of the position sensor. The X-axis and Y-axis calibration curves of the position sensor can be obtained by moving back and forth several times every fixed distance. The process is shown in Figure 9 (a), (b). (2) Tracking measurement: As shown in Figure 7, the laser 1 fixed on the machine shoots the laser light into position 1243886 and sets the sensor ϋ2, and then moves the machine tool 纟 8 along the planned path. During the movement, the track of the laser beam point is recorded in the computer by the position sensor 2, and then the recorded data of the tracking is processed and analyzed by the computer. The process is shown in Figure 10. The device principle provided by the present invention is briefly described as follows: 1. Position sensor: It is a two-dimensional position sensor. When the laser light spot hits the position sensor, it can be obtained through the signal processor. Position change amount. 2. Laser diode: Its volume is small, and its light waves have a high degree of directivity and homology. 3. High-speed analog / digital signal conversion card (A / D card). It can convert the analog signal after the amplifier to digital signal at high speed for computer processing. To cope with high-speed measurement, the analog / The digital signal conversion card must use an analog / digital signal conversion card with a sampling rate of 1MHZ or higher. 4. High-speed follow-up: The feed rate of a general machine tool is up to about 6,000 mm / min, while the feed rate of a high-speed machine tool can reach 丨 meters / second or more. 5. Tracking measurement: In order to use the two-dimensional position sensor and laser light source, the relative displacement between the bed and the machine when the bed mouth is still moving at a high speed can be completely recorded by this 1 measurement system Go down and conduct further analysis. The above detailed description is a specific description of a feasible embodiment of the present invention, but this embodiment is not intended to limit the patent scope of the present invention.