1234181 五、發明說明（1) 發明所屬技術領域 本發明係有關於缺陷修正妒 係有關於修正在液晶面板之色、：：正方法’尤其 混入或在電浆顯示面板之背板上發生之異物 陷之缺陷修正裝置及缺陷修正方法。y成之電極圖案之缺 習知技術 ' 在PDP(Plasma Display Pan i、々/r 面某板所开彡忐夕φ把 y Panel)專平面顯示面板之背 面基板所形成之電#，尤其在烘 情況，或在分成RGB(紅、綠、藍）3 按此了 -物之 物膏之一部發生混色之情況，後充填於肋間之螢光 號公報記載般，提議使 發明要解決之課題 缺卩曰邛之方法。 刮針之前端進行平坦或珑壯 處理微細之圖案，小到約 力口工，#直徑為了也可 之約數〜數十g之負荷（自，重）十二。f而’即使承受微小 狀態令在橫向Ϊ動=去：：部而在令針接觸玻璃面之 著惡化之問題點隋况’玻璃面受冑’有令修正品質顯 因而，本發明之主i 及缺陷修正方法，可不在於提供一種缺陷修正裝置 解決課題之手段 貝G正面的進行高品質之修正。 本發明係一種缺p々欲τ # 或異物混人等缺陷，、f置，修正基板上之圖案不良 動裝置，控制該針之古έ j j用以除去該缺陷；及針驅 |心呵度後除去該缺陷。 2075-4295-PF ； ahddub.ptd 第4頁 1234181 〜---- 因此’若依據本發明，Μ σ ς板適當之高度後在；：將針尖端之高度控制成距 叩質之修正。 ’、移動’可不損傷基板的進行高 件，ί °亥針驅動裝置包括··保拄# ，在卜上下方向可移動該保持裝置·、置’保持該針；移動 ^下方向驅動該移動件。、，以及移動件驅動裝置 動穿:t括感測器’量測該移動件之銘叙曰 軔裝置令移動件動件之移動量，·該移動件驅 既定量之值。7降以該感测器之輪出為基準後再加上 之彩a #別的發明係一種缺陷修正方、表女 之f色據光器基板上發生之異;;f方法，修正在液晶面板 利用移動件令針:/吧入之缺陷，其特徵在於 物。 而將該針設為既定之高度後除去該異 另外之發明係一種缺陷修正方 面面板所形成之電極圖索之：陷修：在電聚顯示面 ::件令針上而將該針設為既定之声徵在於：利 茶之缺陷。 阿度後修正該電極圖 發明之實施例 圖1係表示本發明之缺 缺陷修正裝置本體由主要由 之構造圖。在m， z轴工作台3組成之定位= 軸及工:二2工作台2以及 。在X軸工作Μ襞载用以除去缺陷；八：(圖上未示)構成 二除去之部分充填膏之塗 5、。刀之雷射4、用以在 CCD照相機6以及到針機構7等。用以觀察修正對象之1234181 V. Description of the Invention (1) Technical Field of the Invention The present invention relates to defect correction and jealousy to correction of color on a liquid crystal panel :: positive method 'especially mixed with or occurring on the back panel of a plasma display panel. Pitted defect correction device and defect correction method. The lack of know-how for electrode patterns of Y-types' The electricity formed on the back substrate of a PDP (Plasma Display Pan i, 々 / r panel opening panel φ Panel y panel), especially in the If it is baked, or when it is divided into RGB (red, green, and blue) 3, the color of one part of the paste is mixed, and then it is filled in the intercostal fluorescein bulletin. It is proposed that the problem to be solved by the invention The lack of the method of saying 卩 邛. The front end of the scraping needle is flat or strong. The fine pattern is treated as small as about 2,000 mm. The diameter of the needle is about tens of grams of load (self-weight). f 'Even if it is subjected to a small state, it will move in the horizontal direction = go :: The problem that the work of the needle contacting the glass surface is deteriorated. The condition of the glass surface is affected, so the quality of the correction is obvious. And the defect correction method is not to provide a means for solving the problem of the defect correction device, and to perform high-quality correction on the front side. The invention relates to a defect such as lack of p々 desire τ # or mixed with foreign objects, a f device, a device for correcting a pattern on the substrate, and controlling the needle of the needle to remove the defect; and a needle drive | hearth degree Then remove the defect. 2075-4295-PF; ahddub.ptd Page 4 1234181 ~ ---- Therefore, ‘if according to the present invention, the appropriate height of the σ σ plate is located behind; ', Move' can advance the high piece without damaging the substrate. The needle driving device includes ·· 保 拄 #, which can be moved in the up and down direction of the holding device, and the 'hold' the needle; move the down direction to drive the moving piece. . , And the driving device of the moving part: The sensor is used to measure the inscription of the moving part. 轫 The device moves the moving part of the moving part, and the moving part drives the predetermined value. 7Following the sensor's wheel out as a reference, plus the color a #Other inventions are a defect correction method, the appearance of the f-color light detector substrate; the f method, correction in the liquid crystal The panel makes use of moving parts to make the needle: / bar into the defect, which is characterized by objects. After the needle is set to a predetermined height, the difference is removed. Another invention is an electrode pattern formed by a defect correction panel: trapping: on the electro-condensation display surface :: place the needle on the needle and set the needle to The established signs are: the shortcomings of Licha. Modification of the electrode diagram after Ado's embodiment of the invention Fig. 1 shows the structure of the main body of the defect correction device of the present invention. Positioning in m, z-axis table 3 = axis and work: 2 2 table 2 and. Work on the X-axis to load defects to remove; eight: (not shown in the figure) the coating of the filling paste that constitutes the two removed 5. The laser of the knife 4 is used for the CCD camera 6 and the needle mechanism 7 and so on. Used to observe the correction object
V1H 2075-4295-PF ； ahddub.ptd 1234181 五、發明說明（3) 轴工攄光器基板等修正對象基板8裝載於γ 用除去塗抹v正依^缺陷位置資訊之任意位置後，利 射或YLF雷射切割、—般常使用YAG雷 去埋沒於液晶私辛清/，但疋例如如圖2(a)所示，在除 = 用針掃描圖2⑻所示之某範圍可比較確實 = ί?:電;12=a):示，在形靡基板之圖案 3(b)所示之某範園丑β缺陷13之情況，使用針掃描圖 且飛散物少^修正/行比利用雷射之方法更高效率 :4係表示圖1所示之刮針機構7之圖。 針機構二參= ^ :作台3。在Z轴安裝板14固定氣壓缸15裝在圖^ =之Z軸 在Z軸方向（上下方向）移動，在 二孔壓為驅動源 件保持部16。在移動件保持部16經H5之别端—具有移動 和保持該針之針保持器18。移動件17 4 17安裝刮針19 和移動件載具m構成，移動件導牛7丄移動，導引件"a 持部1 6側，移動件載具丨7b固定於 a固定於移動件保 卡止之止動器2〇。 秒動件載具17b之下端 圖4 (a)表示開始劃痕前之狀 基板之狀態，圖4(c)表示將Z軸工W圖4(b)表示令針接觸 關係。 〇 3移向上方時之位置 2075-4295-PF ； ahddub.ptd 1234181 五、發明說明（4) 接網所不’氣壓缸15位於上升端’刮針19處於未 3 3 221之電極圖案22之狀態。移動件載具17b位 將利用感測器（圖上止動器20接觸之位置， 件保之相對位置之值設為距離η。 動 "心二ί圖4(b)所示，令刮針19接觸玻璃基板21，但 疋百先使氣壓缸 .,0 0 . ^ 移至下降端為止後，以低速驅動Z軸工 著用==r速軸移工:Λ3之雙方下降之理由在 Z軸低速驅動，防止刮二:：程縮短動作時間，藉著在 ^^,ρ/Λ IIΛ Λ3"/;1 ^^ ° ^ 刮針η也確實接觸玻璃基Π起之尺寸變化， 璃美柘？ 1赖,m 7 . 之任思之里。刮針1 9接觸破 =板21後’也因z軸繼續下降，移動件17移到上 此時之針保持㈣和移動件保持部16之距離設為Μ。 如圖4(c)所不，依據在圖4(a)及圖4(b)所得 ，表：Z軸工作台3移到上方時之位置關係，： 19之劃痕動作開作之狀態。在氣壓缸15位於下降端Π Ζ軸工作台3只上升距離5丨和距離5 2之差值時， 7 尖變成和圖4(b)所示之狀態相同之位置。即，移十^針 觸止動器2 0，回到距離5 1。 牛1 7接 在此狀態，驅動X軸工作台丨軸工作么2，八 方向操作刮針19時，刮針19之針尖在和玻璃口基板心目：：V1H 2075-4295-PF; ahddub.ptd 1234181 V. Description of the invention (3) Axle-worker substrates and other correction target substrates 8 are loaded at any position after removal of smear v positive dependence ^ defect position information. YLF laser cutting—YAG lasers are often used to be buried in liquid crystals, but, for example, as shown in Figure 2 (a), it can be more sure when dividing = scanning a range shown in Figure 2 with a needle = ί ?: Electricity; 12 = a): Shows that in the case of certain Fanyuan ugly β defect 13 shown in the pattern 3 (b) of the substrate, the needle is used to scan the map and there are fewer scattered objects. ^ Correction / line ratio using laser The method is more efficient: 4 is a diagram showing the needle scraping mechanism 7 shown in FIG. 1. Needle mechanism two parameters = ^: made in Taiwan 3. The pneumatic cylinder 15 is fixed on the Z-axis mounting plate 14 and is mounted on the Z-axis of the figure ^ =. The Z-axis is moved in the Z-axis direction (up and down direction), and the driving source holding section 16 is pressed at two holes. At the other end of the moving member holding portion 16 via H5-there is a needle holder 18 which moves and holds the needle. The moving part 17 4 17 is constituted by the mounting scraper 19 and the moving part carrier m. The moving part guides the cow 7 丄 to move, the guide part "a holding part 1 6 side, the moving part carrier 丨 7b is fixed to a and fixed to the moving part. Guaranteed stopper 20. The lower end of the second-movement carrier 17b. Fig. 4 (a) shows the state of the substrate before the scratch is started, and Fig. 4 (c) shows the Z-axis operation. Fig. 4 (b) shows the needle contact relationship. 〇3 position 2075-4295-PF when moving upwards; ahddub.ptd 1234181 V. Description of the invention (4) The pneumatic cylinder 15 is located at the ascending end of the network connection. The scraper 19 is located at the electrode pattern 22 of 3 3 221. status. The 17b position of the moving part carrier will use the sensor (the position where the stopper 20 contacts in the figure, and the value of the relative position of the piece warranty is set to the distance η.) As shown in Figure 4 (b), let the scrape The needle 19 contacts the glass substrate 21, but after moving the cylinder to the lower end, 疋 100 first moves the Z-axis at a low speed to drive the Z-axis to work. The Z axis is driven at a low speed to prevent scratching 2 :: shortens the action time. By ^^, ρ / Λ IIΛ Λ3 "/; 1 ^^ ° ^ The scraper η does come in contact with the glass substrate. Dimension changes柘? 1 赖, m 7. Any thought of the. The scraper 1 9 contact breaks = the board 21 'also continues to descend because of the z-axis, and the moving member 17 moves to the needle holding pin 移动 and the moving member holding portion 16 at this time. The distance is set to M. As shown in Fig. 4 (c), based on the results obtained in Fig. 4 (a) and Fig. 4 (b), the table shows the positional relationship of the Z-axis table 3 when it moves to the top, and the score of 19 When the air cylinder 15 is positioned at the lower end of the Π-axis table 3, the difference between the ascending distance 5 丨 and the distance 5 2 is, the 7-tip becomes the same position as the state shown in FIG. 4 (b). That is, move the ten pin to touch the stopper 2 0, return to distance 5 1. Cattle 1 7 connection In this state, drive the X-axis table 丨 the axis works 2, 8 When the wiper 19 is operated in the eighth direction, the tip of the wiper 19 is on the center of the glass port substrate ::
2075-4295-PF ϊ ahddub.ptd IHi 1234181 五、發明說明（5) _ 兩度劃痕。依據修正之對象物 未必位於玻璃基板21上。2 =度’在圖4(b)之針位置 量後，補償z軸工作台3之移動f况’需要依據實驗等求其 ，針位於玻璃基板21之面上動在量測距離“時 要修正為比玻璃面上稍微向上劃痕之情況，也有需 量設為(5 3，Z軸之移動量變成占i二占。將攻些補償 在量測距離（J之感測器上右一 ° 電容式等非接觸式位移感测$ 4 ^ 、渦電流式、靜 移感測器，但是使用其。型線性尺等接觸式位 又，在上述之說明，使得杳 z轴工作台3輸入與其相配之感測” 距離51時可輸出位置信號(1個 呵：只當 :rz軸…3停止，也可令保❹心 用丄二表:’广;是 專利範圍表示，包括和申請專利：：月，巾利用申請 範圍内之所有之變更。^圍具有相同之意義及在 發明之效果 如以上之說明所示，若依據本發明 陷之針之高度控制為修正面戋令卜 夺用乂除去缺 後除去缺陷，不會損損修 圖式簡單說明 貝見同口口質之修正。 圖1係表示本發明之缺陷修正裝置之構造圖。2075-4295-PF ϊ ahddub.ptd IHi 1234181 V. Description of the invention (5) _ Two scratches. The object to be corrected is not necessarily located on the glass substrate 21. 2 = Degree 'After the needle position in Figure 4 (b), the movement of the z-axis table 3 is compensated'. It needs to be calculated based on experiments. When the needle is located on the surface of the glass substrate 21, the measurement distance is required. Corrected the case of scratching slightly upwards than the glass surface, and the demand is set to (5 3, the Z axis movement amount becomes i 2 account. Will compensate for some measurement at the measurement distance (1 right of the J sensor) ° Capacitive and other non-contact displacement sensing $ 4 ^, eddy current type, static motion sensor, but use it. Contact type such as linear ruler, etc. In the above description, 杳 z-axis table 3 input It can output the position signal when the distance is 51. (1: only when: rz axis ... 3 stops, you can also make Baoxin heart use two tables: 'wide; is the scope of patents, including and applying for patents ：： Month, all changes within the scope of the application. ^ Wai has the same meaning and the effect of the invention as shown in the above description. If the height of the needle trapped in accordance with the present invention is controlled by the correction surface, it will be used.除去 Remove the defect after removing the defect, it will not damage the repair scheme . Figure 1 is a structural diagram of the apparatus according to the present invention the defect correction.
2075-4295-PF ; ahddub.ptd 第8頁 1234181 五、發明說明（6) 圖2係表示應用本發明之彩色濾光器基板和異物之 圖。 圖3係表示應用本發明之PDP基板和電極缺陷之 。圖4係表示本發明之一實施例之刮針機構之動回之 圖。 < 符號說明 2〜Y軸工作台； 4〜雷射； 6〜CCD照相機； 8〜修正對象基板； 1 5〜氣壓缸； 1 7〜移動件； ;1 7b〜移動件載具； 1 9〜刮針； 21〜玻璃基板； 1〜X軸工作台； 3〜Z軸工作台； 5〜塗抹機構； 7〜刮針機構； 14〜Z轴安裝板； I6〜移動件保持部； 〜移動件導引件 18〜針保持器； 2 〇〜止動器； 22〜電極圖案。2075-4295-PF; ahddub.ptd Page 8 1234181 V. Description of the invention (6) Fig. 2 is a diagram showing a color filter substrate and a foreign object to which the present invention is applied. FIG. 3 shows the PDP substrate and electrode defects to which the present invention is applied. Fig. 4 is a diagram showing the movement of a needle scraper mechanism according to an embodiment of the present invention. < Symbol description 2 to Y-axis table; 4 to laser; 6 to CCD camera; 8 to correction target substrate; 15 to pneumatic cylinder; 17 to moving parts; 17b to moving part carrier; 1 9 ~ Scraper; 21 ~ Glass substrate; 1 ~ X-axis table; 3 ~ Z-axis table; 5 ~ Smearing mechanism; 7 ~ Scraper mechanism; 14 ~ Z-axis mounting plate; I6 ~ Moving part holding part; ~ Movement Piece guide 18 ~ needle holder; 20 ~ stopper; 22 ~ electrode pattern.