TWI234097B - Quality improvement team knowledge base system and the operation procedures thereof - Google Patents
Quality improvement team knowledge base system and the operation procedures thereof Download PDFInfo
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1234097 五、發明說明（1) 【發明所屬之技術領域】 本發明係有關於一種知識基礎系統，且特別有關於一 種品質改善協同知識基礎系統及其作業程序。 【先前技術】 B i 1 1 G a t e s在《數位神經系統》書中強調的「你收 集、管理和使用資訊的方式，決定了輸赢」。在知識經濟 的時代’科技的運用與企業經營的創新是企業與國家經濟 成長的兩大主要動力。我國行政院經建會於去年提出之知 識經濟方案中，提出所謂的知識經濟就是「直接建立在知 識與資訊的激發、擴散和應用之上的經濟，創造知識和廉 用知識的能力與效率，凌駕於土地、資金等傳統生產要^ 之上，成為支持經濟不斷發展動力。」，所以資訊與知識 的生產、分配與使用便成為國家經濟發展的核心觀念。”曰 一個 滿競爭與 制扮演愈 育機制的 萊斯特梭 出，創意 養，獎勵 管理 導：「知 此，知識 政府或企 知識經濟的 挑戰的二十 來愈重要的 靈魂。被譽 羅(Lester 是知識經濟 創意’並提 大師彼得杜 識工作者是 工作者生產 業的知識工 〜w %凡 一世紀，人才培育以及知識學習的機 角色’而創意與冒險精神則是成功教 為二十世紀末最具影響力的經濟學家 Thurow)日前應邀來我國演說時指^ 的成功秘訣，政府必須致力於人9 供研發方向。 ° 拉克在1 999年加州管理評論中亦倡 未來一十一世紀最重要的資產，因 力將是未來管理上的極大挑戰，不乾 作者將快速增加’如何強化知識工：1234097 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a knowledge-based system, and in particular, to a quality-improved collaborative knowledge-based system and its operation program. [Previous Technology] B i 1 1 G a t e s emphasized in the book "Digital Nervous System" that "the way you collect, manage, and use information determines your winning or losing." In the era of the knowledge economy, the use of technology and the innovation of business operations are the two main driving forces for the economic growth of enterprises and the country. In the knowledge economy plan proposed by the Economic and Construction Commission of the Executive Yuan of China last year, the so-called knowledge economy is "an economy directly based on the stimulation, diffusion, and application of knowledge and information, the ability and efficiency to create knowledge and use it cheaply. Above the traditional production requirements such as land and capital, it has become a driving force for the continuous development of the economy. "Therefore, the production, distribution, and use of information and knowledge have become the core concepts of national economic development. "Lester, who is full of competition and system play a more and more mature mechanism, creative, reward management guide:" Knowing this, the knowledge of the government or the challenge of the knowledge economy of the twenty important soul. Yu Luo ( Lester is the creative of the knowledge economy, and the master Peter Du is a knowledge worker in the production industry ~ w% In the first century, the role of talent cultivation and knowledge learning is the role of the creative and adventurous spirit is successfully taught for twenty (Thurow, the most influential economist at the end of the century) was invited to come to our country to give the secret of success ^, the government must be committed to the direction of R & D. ° Lack also advocated the future of the 11th century in the California Management Review in 1999 The most important asset, the power will be a great challenge in the future management, and unauthorised authors will quickly increase 'how to strengthen knowledge workers:
j234097 & '發明說明（2) 者生產力’才是政府與 導入知識經濟將是台灣可f麩昇競爭力的利基。能否順利 的關鍵，而受限於台灣 在二十一世紀維繫競爭力 路走恐怕會力有未逮； 、貝源與人力，往研發創新的 灣從代工製造開始，逐漸=展，^同過去的發展歷程，台 件的設計能力，雖然我2 =技術與部份代工組 領導者，但是透過對^ /又有成為創新技術與知識的 道。在新經濟時代，「士丄 ’走出一條康莊大 台灣若能把握蔣并、ά 1 」的遊戲規則儘管不同’作Η 4右此把握將精神放在創新知識運仁疋 相信我們仍會是新世紀的赢家。 &式坆個層面， 舉Ρ度&展軟體產業的例子來說明。 呆護國内市場及政府的種種管制，使經濟；；=過 ，，但是十年來的努力以使印度成為： = 沒有 ,生產國。印度軟體產業的發展並非利用其便；的 政：的結果。台灣軟體產業近幾年來也有 幾年來台灣的資訊軟體業無論是企業 產值、出口及就業人數均有二位數以上的成長率了 i:”；；= 0 0 0年企業家數從-千六百七十二家 五家’就業人數自—萬六千人增為二萬 腦2的發展將無可限量。從印度成功發展電 恥軚體的例子及台灣過去五年的發展經驗，可知 產業發展必須朝向知識經濟產業轉型，不执θ :二 外投資’均不能再依賴便宜勞力，作d ^=海 要建立良好的知識經濟環境’教育機制的改革最為優 0492-7642TWF(nl);90-149;EDWARD.ptd 第8頁 1234097 五、發明說明（3) 先，因為人類知識累接 方法，無法教育優J = ”即是教育。缺乏優質的教育 家經濟競爭力。「=:下：：’也無法創新知識，強化國 習的能力和效益。一門學科，旨在提升學 教育將更重視思考性；二將：母個人必備的基本技能。 分析、診斷、計晝力的培養’如：創新、解決問題、 在知識經濟的時代， 企業與國家經濟成長的A丄士亦 /、杲丄呂的創新疋 於去年提出之知識Cf力。我國行政院經建會 「直接建立在知識盘=:膝提出所謂的知識經濟就是 濟，創造知識和應用和用之上的經 金等傳統生產要素之上nm駕於土地、資 力。」，所以資訊持經濟不斷發展動 經濟發展的核心觀念。 為國豕 知識在人的構思中可分為顯性 邏輯或是直覺’其實是無法用文字或圖形來表 改善協同知識基礎工具（Quality Improvement Te㈣口口貝 (QIT) Knowledge Base工具）是希望藉由較—般的格 經驗和直覺仍有其無法取代的地位。程；；自:的 的記錄並保留下來建立"品質改善協同知識基礎系%驗逐— 統籌保存資料，並供所有工程人員作查詢。去二^來 被建構完成後，可預期未來在整個生產管理運"^系統 以下的實質的效益： F上將得到j234097 & 'Explanation of the invention (2) Productive forces' is the government and the introduction of a knowledge economy will be a niche for Taiwan to increase its competitiveness. The key to success is that Taiwan's ability to maintain its competitiveness in the 21st century will not be able to achieve its goals; 源源 and human resources, to the bay of R & D and innovation, start with foundry manufacturing, and gradually develop. Same as the past development process, although Taiwan's design capabilities, although I 2 = technology and part of the foundry team leader, but through the ^ / has become a way of innovative technology and knowledge. In the new economic era, the rules of the game of "Shi Jie's coming out of a large and healthy Taiwan if he can grasp Jiang Bing and bian 1" are different, although they are different. 4 This grasps the spirit of innovation and knowledge. I believe we will still be Winner of the new century. Let's take this as an example. Take care of the domestic market and the government's various controls to make the economy; = Passed, but ten years of efforts to make India: = No, producing country. The development of the Indian software industry is not a matter of taking advantage of it; In recent years, the Taiwan software industry has had a growth rate of more than double-digits in terms of both the output value, exports, and employment of the information software industry in Taiwan in recent years. One hundred and seventy-two households' employment will increase from 6,000 to 20,000 brains. 2 The development of electric carcasses in India and the development experience of Taiwan over the past five years can be seen as unlimited. Development must shift towards a knowledge-based economy, and irrespective of θ: Second foreign investment can no longer rely on cheap labor, d ^ = Hai wants to establish a good knowledge-based economic environment. The reform of the education mechanism is the best. 0492-7642TWF (nl); 90 -149; EDWARD.ptd Page 8 1234097 V. Description of the invention (3) First, because of the accumulation of human knowledge, it is impossible to educate. J = "is education. Lack of quality educators' economic competitiveness. "=: Next :: 'It is not possible to innovate knowledge and strengthen the ability and effectiveness of national studies. One subject is designed to enhance academic education and pay more attention to thinking; the second is: basic skills necessary for mothers. Analysis, diagnosis, and day counting "Cultivation of power" such as: innovation, problem solving, in the era of knowledge-based economy, the company's economic growth and the country's economic growth, and the innovation of Chong Lu, the knowledge Cf force proposed last year. Built directly on the knowledge plate =: The so-called knowledge economy is economic, and the traditional production factors such as the creation of knowledge and applications and the use of gold are driven by land and capital. ”Therefore, the information economy continues to develop and move the economy. Core concepts of development. Knowledge in the country can be divided into explicit logic or intuition in the human conception. Actually, text or graphics cannot be used to improve the collaborative knowledge base tool (Quality Improvement Te Qiao Knowledge Base Tool). The comparative experience and intuition still have its irreplaceable status. Process; since the record and keep it to establish "Quality Improvement Collaborative Knowledge Basis System"% Verification — to save the data as a whole and make it available to all engineers for inquiries. After the construction is completed, the following substantial benefits in the entire production management operation system can be expected in the future: F will get
1234097 五、發明說明（4) 1 ·工程處理經驗將被有系統的被保留下來，以電 系統來取代原先紙張的存檔作業。而以系統化來取代句 :書面資料，更方便於人員的查詢動作4此工程 = 驗的資料才能展現其功效。 ‘ 2 .新進的工程人員可利用此系統查詢某機台異常 教二前的工程師所留下的寶貴處理經驗，作為其訓練的 理π可將機台異常原因之範圍縮小，引導工： 能縮短:的方向’使新進的卫程師在整個學習曲線 藉由3此系\藉看 由到該統作到跨模組的交流’所有的人員可 程師來說可ί t其他模組的處理經驗與結果，相對的對工 知識工作去1子到別的工程領域的經驗與知識，對於一個 作考而言相當有幫助。 師對的報+止，而系充上的作業，以”Q1 τ摘要表，，來取代工程 告格式可藉此作統一χ。/、、、、σ果。且工程人員對其主管的報 【發明内容】 為達成上述之目的， 識基礎系統，適用於u ^ 出—種品質改善協同知 4工· 喝用於以一製程在一機Α μ L 。 括.一電腦主機。一終端機， D上生產之產。口，包 機，用以輸入—特 、.周路連接此電腦主 流’於此電腦主機中執行，此整 ^。以及-整合糸 一 I、吊型品質改善協同處1234097 V. Description of the invention (4) 1 · Engineering processing experience will be systematically retained, and the original paper archiving operation will be replaced by the electrical system. Systematically replace the sentence: written information, which is more convenient for personnel's query action. 4 This project = verified data can show its effectiveness. '2. Newly-entered engineers can use this system to inquire about the valuable processing experience left by the engineers before the abnormal teaching of a machine. As a training principle, it can narrow the scope of the machine's abnormal causes and guide workers: : The direction 'makes the newly-advanced health engineers in the entire learning curve through 3 departments \ by borrowing from the system to cross-module communication' all personnel can be processed by other engineers and the processing experience of other modules As a result, the relative experience and knowledge of going to work in one of the other engineering fields is quite helpful for a test. The report of the teacher + stop, but the assignments are replaced by the "Q1 τ summary table" instead of the engineering report format, which can be used to unify the χ. / ,,,, σ results. And the report of the engineer to his supervisor [Summary of the Invention] In order to achieve the above-mentioned purpose, a basic system is suitable for the production of a kind of quality improvement cooperative process. It is used for one process A μ L in one process. Including a computer host. A terminal ， Products produced on D. Ports, charter planes, for input—special,. ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,-,-,-,-,-,-,-,-,-,-,-,-,-,,-,-,-,-,-,-,,-Integrate-I, Hang-type-quality-improvement-coordination
0492-7642TWF(η 1)；9〇.149；EDWARD Ptd 第10頁 品質改善協同處 $ & 先包含—曰管異常型 心迎早兀、一查核德里 1234097 五、發明說明（5) 理單元、一改善型品質改善協同處理單元、一異常重工型 品質改善協同處理單元以及複數工具，用以分析此製程或 此機台異常狀況以改善此產品之品質。 本發明另提出一種品質改善協同知識基礎系統之作業 程序，適用於以一製程在一機台上生產之產品，首先提供 一系統，此系統包含一電腦主機、經由一網路連接此電腦 主機之終端機、和於此電腦主機中執行之一整合系統，此 整合系統包含一曰管異常型品質改善協同處理單元、一查 核後異常型品質改善協同處理單元、一改善型品質改善協 同處理單元、一異常重工型品質改善協同處理單元以及複 數工具。當發現此製程或此機台上的一異常問題時，進入 此整合系統，依據此異常問題之情況，選擇此整合系統中 之一子系統。最後，根據此異常問題及此子系統使用此工 具以分析此製程或此機台異常狀況以改善此產品之品質。 【實施方式】 第1圖顯示本實施例中品質改善協同知識基礎系統之 方塊圖。此品質改善協同知識基礎系統所使用之裝置包 括：電腦主機1 0、數個部門終端機2 0、3 0、4 0。電腦主機 1 0可以是任何型式之電腦主機系統，亦或是多種型式之電 腦主機或伺服器串聯而成，電腦主機1 0同時兼具網路伺服 器1 2之功能。電腦主機1 0與終端機2 0、3 0、4 0之間係透過 網路90加以連結，例如網際網路（Internet )、區域網路 (local area network，LAN)、廣域網路（wide area network，WAN)或是其他類型的網路。0492-7642TWF (η 1); 9.10.149; EDWARD Ptd Page 10 Quality Improvement Coordination Office $ & Include first-the abnormal heart shape is welcomed early, check the Delhi 1234097 V. Description of the invention (5) Management unit An improved quality improvement collaborative processing unit, an abnormal heavy industry quality improvement collaborative processing unit, and a plurality of tools are used to analyze the abnormality of the process or the machine to improve the quality of the product. The present invention further provides an operating procedure of a quality improvement collaborative knowledge base system, which is applicable to products produced on a machine by a process. First, a system is provided. The system includes a computer host, and the computer host is connected to the computer host via a network. A terminal, and an integrated system implemented in the host computer, the integrated system includes an abnormal quality improvement cooperative processing unit, an abnormal quality improvement cooperative processing unit after checking, an improved quality improvement cooperative processing unit, An abnormal heavy industry type quality improvement cooperative processing unit and plural tools. When an abnormal problem is found in this process or on this machine, the integrated system is entered, and one of the subsystems in the integrated system is selected according to the abnormal problem. Finally, according to the abnormal problem and the subsystem, this tool is used to analyze the process or the abnormal condition of the machine to improve the quality of the product. [Embodiment] Fig. 1 shows a block diagram of a quality improvement collaborative knowledge base system in this embodiment. The devices used in this quality improvement collaborative knowledge base system include: computer host 10, several department terminals 20, 30, 40. The computer host 10 can be any type of computer host system, or multiple types of computer hosts or servers are connected in series. The computer host 10 also functions as a network server 12 at the same time. The host computer 10 and the terminals 20, 30, and 40 are connected through a network 90, such as the Internet, a local area network (LAN), and a wide area network. , WAN) or other types of networks.
0492- 764 2TWF(η 1);90-149;EDWARD.ρ t d 第11頁 12340970492- 764 2TWF (η 1); 90-149; EDWARD.ρ t d p. 11 1234097
五、發明說明（6) ,本實施例之電腦主機10具有一軟體元件（子系統）整合 糸統50，此整合系統5〇包含一日管異常型品質改善協同處 理單元52、一後顯影查核（After Devei〇pmentV. Description of the invention (6), the host computer 10 of this embodiment has a software component (subsystem) integration system 50. This integration system 50 includes a day-to-day abnormal quality improvement cooperative processing unit 52, and a post-development check (After Devei〇pment
Inspection， ADI)異常型品質改善協同處理單元54、一改 善型品^改善協同處理單元56、一異常重工型品質改善協 同處理單元58、一系統維護單元6〇、以及複數個使用之工 具70。以^說明各軟體元件（子系統）之操作内容。 一 s 1 ·曰官異常型品質改善協同處理單元5 2 :此處理單 兀疋用以提供給設備或製程工程師，針對曰常中機台或製 程所發生異常事件，主管所分派任務或規格管控異常，且 處理時效為5天以内之異常事件的登錄，維護及查詢。 f日管異常登入後，除了基本資料外，尚有分析結果 的正常組及異常組，用來說明正常情況下及異常情況的不 同’以及在真因未明情況下的緊急處理對策。當真因已明 後’便可在系統中輸入真因，處理的對策以及處理後的效 果’並且說明為了防止再度發生可以採取什麼對策，是否 要建立標準操作程序（SO P )及水平展開到其他機台。 2 ·後顯影查核（AD I )異常型品質改善協同處理單元 54 :此處理單元是用以提供給微影設備或製程工程師，針 對後顯景> 查核（After Development Inspection，ADI)時 所發現異常事件或規格管控異常所影響的機台，產品，批 號’站別且處理時效為五天以内之異常事件的登錄，維護 及查詢。 在查核後異常登入後，可輸入異常的產品型號，批Inspection, ADI) abnormal quality improvement cooperative processing unit 54, an improved product ^ improved collaborative processing unit 56, an abnormal heavy industry type quality improvement coordinated processing unit 58, a system maintenance unit 60, and a plurality of tools 70 used. Use ^ to explain the operation content of each software component (subsystem). 1 s 1 · Official abnormal quality improvement collaborative processing unit 5 2: This processing unit is used to provide equipment or process engineers with regard to abnormal events that occur in the machine or process in Changzhong. The supervisor assigns tasks or specifications for control. It is abnormal, and the processing time is within 5 days for the registration, maintenance and inquiry of abnormal events. f After the abnormal login of the day management, in addition to the basic data, there are normal groups and abnormal groups with analysis results, which are used to explain the differences between normal conditions and abnormal conditions' and emergency measures in cases where the true cause is unknown. When the true cause is known, 'it is possible to enter the true cause, the countermeasures for the process, and the effect after the process' and explain what countermeasures can be taken to prevent recurrence, whether to establish a standard operating procedure (SO P) and expand to other levels. Machine. 2 · AD I abnormal quality improvement collaborative processing unit 54: This processing unit is provided to the lithographic equipment or process engineer and is found during the after development inspection (ADI) The registration, maintenance and inquiry of abnormal events or specifications that affect the machine, product, batch number 'station and processing time within five days. After checking the abnormal login, you can enter the abnormal product model, batch
0492-7642TWF(η 1);90-149;EDWARD.p t d 第12頁 1234097 五、發明說明⑺ 站別，及分析結果的正 情況下Λ s A冰 吊、、且及異常組，用來說明|T太 —化卜及異常情況的不闾，* a咖丄— 个& Θ正常 號 況 巧况下及異常情況的$固 ^ 八六ΦW求坭明正 及杳挾# 的不同’並勾選真因已明戈夫明认β 策查核後異常發生在前一層或是這一層及=以 以及i m:ϊ ’：可在系統中輸入真®，處理的對策 什麼f+ M a 月為了防止再度發生可以浐ι 乾對朿，是否要建立標準摔 J 取 其他機台。 千杯作桎序（S0P)及水平展開到 改善型口口質改善協同處 口口 :…製程或機台所發現重大/二.此/二'元係 解決，處理時效在/、吊事件“須跨部門 指押（· η 。主題的來源如規格、不良品 善二xrr，)、部門方針改善、成本降低改 登錄，維護及查；：生產力提升、減廢汙染改善等課題之 產品4發生異里常當重工Λ品質。改善協同處理單元58:其係針對 的姦σ ^ 但經工程師判斷無須報廢，僅須重新處理 WAT #進/丁登錄及追蹤，並且依重工的程度或需求在 對於：玄電性及良率的分析’以進-步釐清，重工的產品 對於良率，否有造成重大影響。 在異吊重工登入後，先輸入異常的產品路徑 route)，型號，批號，正常及異常的製程等基本資料， 以說明^那些產品發生異常需要重工。 ” $ 重工' '、、° 果分析是在WAT(wafer acceptance test ing)進仃電性分析及良率分析以便了解在重工之後是0492-7642TWF (η 1); 90-149; EDWARD.ptd Page 12 1234097 V. Description of the invention ⑺ The station type, and the analysis results are positive Λ s A ice hoist, and and anomaly group, used to explain | T 太 —the inferiority of the situation and the abnormal situation, * aCa 丄 — a & Θ under the normal condition and the abnormal situation $ solid ^ eight six ΦW find the difference between 坭 明 正 and 杳 挟 # 'and check The truth is that Goff has clearly identified that the abnormality occurred in the previous layer or this layer after the check of the β policy and = and and im: ϊ ': You can enter true ® in the system, what countermeasures are processed f + M a month In order to prevent recurrence You can do the opposite, whether you want to establish a standard drop J to take other machines. Thousand cups of order (S0P) and horizontal expansion to improve the mouth quality improvement collaboration mouth: ... process or machine found significant / two. This / two 'element system is resolved, the time limit for processing in the /, hanging events "must Cross-department allegations (· η. Theme sources such as specifications, defective products xrr,), departmental policy improvement, cost reduction, change registration, maintenance, and inspection ;: Productivity issues such as productivity improvement, waste reduction and pollution improvement 4 vary Li Changdang heavy industry Λ quality. Improved collaborative processing unit 58: it is targeted at 奸 σ ^ but it is not required to be scrapped by the engineer, only re-processing WAT # in / D registration and tracking, and depending on the degree or demand of heavy industry: The analysis of the electrical properties and yields' is to clarify step by step whether the heavy products have a significant impact on the yield. After the different cranes are logged in, enter the abnormal product route (route), model, batch number, normal and The basic information such as abnormal manufacturing processes are used to explain ^ those products that need to be reworked if they are abnormal. ”$ 重工 '' 、、 ° The results are analyzed by electrical analysis and yield analysis in WAT (wafer acceptance test ing) in order to understand After heavy industry is
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五、發明說明（8) -________ 否對良率有什麼影響，並且說明結果 方式，最後回到整合工程部做出結論及日後處理的標 5 ·系統維護單元60 :提供專責两建議。 資料、異常項目、異常原因、異常對笛位a針對工程師基本 系統運作順暢。 作維護，以使整個 另外，根據常用的Q I T分析手法，敕人 Γ0, t輔助工程師詳實的分析及記錄?供/ 產口口異常的處理狀況，以便能、 機口 '衣 驗’做為曰後查詢及訓練新進工程師的保留這些經 所收iC來源主要分為幾類，第：類是機… 所收集的資料，第二 禾頦疋機台連線 測試廠的傳檔資料T員疋？輸入的資肖’第三類是WAT或 工程師自行的判斷輪入：程數據’第五類是 相或掃描圖形。、、， 第，、類疋機台或產品的昭 介紹： 以下針對工具70之每一種工具進行詳纟 1 ·趨勢圖71 :诱、 台連線或人工輸入所過F1圖形系統’提供使用者針對機 或RTC管制項目的集的貢料顯示趨勢圖，以觀察EDc 工程師在輸入所要’並進-步判讀。 將顯示的趨勢圖貼的時間區間及參數•，系統可 進一步的說明。 件或文件中，讓工程師在系統中可 2·要因分析圖72· ^ -的輸入介面，系統’俗稱魚骨圖，提供使用者-個統 用要因分析圖，一牛動產生要因分析圖，讓工程師能μV. Description of the invention (8) -________ Does it have any impact on the yield, and explains the method of the result, and finally returns to the integration engineering department to make conclusions and future processing standards 5 · System maintenance unit 60: Provide two special recommendations. The data, abnormal items, abnormal causes, and abnormal pair flutes a are aimed at the basic system operation of the engineer. Maintenance, so that in addition, according to common QIT analysis methods, Γ0, t assists the engineer to analyze and record the detailed information of the supply / portion abnormality, so that the machine can be used as a “clothing inspection”. After querying and training new engineers, the retention of these received iC sources is mainly divided into several categories. The first category is the machine ... the collected data, and the second one is the transfer data of the machine connection test factory. The third type of input asset is WAT or engineer's own judgment turn: the fifth type is phase or scan pattern. The introduction of the machine or product of the following types, types, and types: The following is a detailed description of each tool of the tool 70 1 Trend chart 71: F1 graphic system through the connection of manual or manual input Display trend graphs for sets of machine or RTC regulated items to watch Edc engineers enter what they want 'parallel-by-step interpretation. The time interval and parameters of the trend graph will be displayed. The system can further explain. In the document or file, the engineer can input the factor analysis diagram 72 · ^-in the system, the system 'commonly known as the fishbone diagram, provides the user with a common factor analysis diagram, and a factor analysis diagram is generated by a cow. Let engineers be able to μ
0492-7642TW(nl);90-l49；EDWARD.ptd 第14頁 步—步的t清問題的所在，系統= 1234097 五、發明說明（9) 供標示的功能，讓工程師能標示出最重要的因子，也有修 改的功能，讓工程師在分析時，若發現有新的因子或錯誤 的因子可以更簡易的修改。 3 ·掃瞄圖形7 3 :讓工程師能附加從機台或產品拍下 或掃瞄下來的異常狀況圖形，以做為正常或異常下的印證 或做為未來參考。 4 ·迴歸分析7 4 :工程師在針對自變數及應變數進行 實驗或觀察所得的數值，在輸入系統後，系統自動產生圖 形，並算出一次迴歸方程式及相關係數，以了解自變數及 應變數的相關性。 5 · AN0VA分析75 : AN0VA分析是將樣本總變異分解成 已知因素所造成的變異及未解釋的變異，用F右尾檢定來 判斷母體間的平均數是否一樣，系統提供一次因及二次因 AN0VA分析，在使用者輸入相對應的數值及選擇顯著水準 後，系統自動算出其F值及其顯著情況，用來檢定母體間 的平均數是否一樣，例如工程師要驗證爐管溫度是否會影 響氧化層的厚度，所觀察到的資料，在將下列值輸入系統 後，系統會帶出F值9. 50 4大於F(0. 0503. 24，表示有顯著 的差異度。 6 ·估計檢定7 6 :針對一個未知的參數給予假定的數 值，再從母體中隨機抽出樣本利用機率的原理去檢定此一 假設是否成立，使用者針對有疑點的參數進行實驗或觀 察，所獲得的數值輸入系統並選擇顯著水準後，系統自動 算出其Z值，並判定是否顯著，以檢定對母體的假設是否0492-7642TW (nl); 90-l49; EDWARD.ptd Step 14—step t clear the problem, system = 1234097 V. Description of the invention (9) The function for marking allows engineers to mark the most important Factors also have the ability to modify, so that engineers can more easily modify if they find new factors or wrong factors during analysis. 3 · Scanning pattern 7 3: Allows the engineer to attach the abnormal condition image captured or scanned from the machine or product, as a proof of normal or abnormal conditions or as a future reference. 4 · Regression analysis 7 4: The engineer performs experiments or observes the values on the independent variables and strain numbers. After entering the system, the system automatically generates graphics and calculates the regression equation and correlation coefficient once to understand the independent variables and strain numbers. Correlation. 5 · AN0VA analysis 75: AN0VA analysis is to decompose the total sample variation into known and unexplained variation, and use F right-tail test to determine whether the average between mothers is the same. The system provides one factor and two factors. Due to AN0VA analysis, after the user enters the corresponding value and selects a significant level, the system automatically calculates its F value and its significant condition, which is used to check whether the average number between the parents is the same. For example, the engineer wants to verify whether the furnace tube temperature will affect the The thickness of the oxide layer, the observed data, after entering the following values into the system, the system will bring out the F value 9. 50 4 greater than F (0.503.24, indicating a significant degree of difference. 6 · Estimated verification 7 6: Give a hypothetical value for an unknown parameter, and then randomly sample a sample from the parent to use the principle of probability to test whether this hypothesis holds. The user performs experiments or observations on the parameters of the suspect point, and the obtained value is entered into the system and After selecting a significant level, the system automatically calculates its Z value and determines whether it is significant in order to test whether the hypothesis of the parent is
0492-7642TWF(η 1);90-149;EDWARD.ptd 第15頁 12340970492-7642TWF (η 1); 90-149; EDWARD.ptd Page 15 1234097
成立，例如工程師稱氧化層 掉，由產品中隨機取出1 6片 系統算出z值=4 · 5 8 1 7，在0 . 顯著的差異。 平均厚度為4 3 0，今懷疑已偏 得到下列的值，帶入系統後， 〇 5 k賴區間下的雙尾檢定下有 7 .直方圖77 :直方圖可用來判斷母體是否成常能分 配，以及層別兩個直方圖之間是否有差異，系統提供吏用 者選擇CP產量值’EDC ’RTC或WAT模組畫出直方圖/這些 值是由機台連線，人工輸入以及測試廠的資料轉換到資一料 庫的工程資料，以次數分配圖形化的方式提供給工程師做 判斷，並更進一步去層別機台間是否有差異。 8 ·晶圓圖譜7 8 ··利用測試廠所傳回的晶圓圖譜資 料，針對使用者選擇的批號畫出晶圓圖譜以及光罩的範 圍’可^供工程師層別晶圓圖譜上CP產量值是否有一定的 趨勢’以進一步判斷是機台或光罩所造成的影響，例2在 光罩的外圍若產量偏低，表示在光罩對準時可能有此異 常’可以再進一步董清。 9 ·ΚΤ工具79 :提供一個固定的輸入格式，讓使用者 使用簡易的Κ Τ手法去釐清問題點，工程師層別這個異常的 機台或製程發生了什麼（Wha t)問題，但在相似的機/台卻？ 有問題，在什麼地方（wh e r e )發生這個問題，其他地方？有 發生，在什麼時候（When)發生的異常事件，在什麼時候之 前沒有相同的異常事件，以及其他延伸的問題（Extent) 後，在輸入系統，做為對照，以找出問題點。 1 0 ·附加0 f f i c e檔案8 0 :提供使用者在系統内附加It is true, for example, the engineer claims that the oxide layer has fallen off, and randomly removes 16 pieces from the product. The system calculates z value = 4 · 5 8 1 7, which is a significant difference at 0. The average thickness is 4 3 0. It is suspected that the following values have been obtained. After being brought into the system, the two-tailed test in the 〇5 k Lai interval has 7. Histogram 77: The histogram can be used to determine whether the mother can be assigned normally. , And whether there is a difference between the two histograms of the level, the system provides users to choose the CP output value 'EDC' RTC or WAT module to draw the histogram / these values are connected by the machine, manually entered and tested by the factory The data of the project is converted to the engineering data of the material library, which is provided to the engineers for judgment in a graphical manner of frequency distribution, and whether there is a difference between the different machines. 8 · Wafer Map 7 8 ·· Use the wafer map data returned by the test factory to draw the wafer map and the range of the mask for the batch number selected by the user. 'It can be used for engineers to produce CP on the wafer map. Whether there is a certain trend in the value 'to further judge the impact caused by the machine or the mask. For example, if the output of the mask is low on the periphery, it indicates that there may be an abnormality when the mask is aligned. 9 · KT tool 79: Provide a fixed input format for users to use simple KT method to clarify the problem. The engineer level identified this abnormal machine or process (what) problem, but in a similar Machine / table? There is a problem, where (wh e r e) does this occur, elsewhere? There are abnormal events that occurred, when did they occur, when did they not have the same abnormal events, and other extended problems (Extent), then enter the system as a control to find the problem point. 1 0 · Attach 0 f f i c e file 8 0: Provide users to attach in the system
1234097 五、發明說明（11)1234097 V. Description of Invention (11)
Microsoft Office 的檔案，包括 Word，Excel，Power po i n t等以方便使用者更有彈性及完整的保留所有資料， 當工程師有之前保留的檔案匣或是文件用0 f f i ce存檔，若 有需要參考到這一文件，便可附加這一份文件做為未來 的參考。 除了有系統的儲存工程師的工程經驗，為了使品質改 善協同知識基礎系統，能更有效的運用這些知識，品質改 善協同知識基礎系統強化了查詢的功能，提供下列的功 1. 關鍵字 可搜尋，顯示 搜尋方式外， 2. 統計資 π異常項目π柏 π真因π的柏拉 使工程師可清 目，真因及對 3. 工程師 出所有工程師 況，可提供給 本實施例 明如后。電腦 一使用者介面 機1 0。一軟體 查詢：在輸入要尋找的關鍵字之後，系統便 相關已登錄的資料如，讓工程師除了 一般的 可以用更便利的方式找到自己要找的資料。 料查詢：單一機台查詢：列出在單一機台下的 拉圖’並可對單一的異常項目再往下查詢其 圖，再針對同一真因，顯示”對策"柏拉圖， 楚的了解在這一機台下最常發生的異常項 策。 處理次數查詢：依模組（By Module)查詢，列 的處理次數分配圖，並可往下查詢其結案狀 各工程師及主管參考比較。 之品質改善協同知識基礎系統之作業程序說 主機10與部門終端機20、30、40，用以提供 以讓使用者輸入及輪出一相關資訊至電腦主 凡件（子系統）整合系統50設置且於電腦主Microsoft Office files, including Word, Excel, Power Po int, etc. for the convenience of users to retain all data more flexibly and completely. When the engineer has a previously saved file box or document, save it with 0 ffi ce, if you need to refer to This document can be attached as a future reference. In addition to the engineering experience of a systematic storage engineer, in order to make the quality improvement collaborative knowledge base system more effective use of this knowledge, the quality improvement collaborative knowledge base system strengthens the query function and provides the following functions: 1. Keyword searchable, In addition to displaying the search method, 2. The statistics of the abnormal item π, π, π, π, and π of the true cause π allow the engineer to clear his eyes, the true cause, and 3. The engineer's status of all engineers can be provided to this embodiment as described later. Computer-user interface machine 10. A software query: After entering the keywords you are looking for, the system will have related registered information, such as allowing engineers to find the information they are looking for in a more convenient way, in addition to the normal ones. Material query: Single machine query: List the pull charts under a single machine, and then query the map of a single abnormal item, and then display "Countermeasures" for the same true cause. The most frequently occurring abnormal items under this machine. Query of processing times: query by module, the distribution chart of processing times in the column, and the query and comparison of each case's engineers and supervisors can be checked down. Improve the operating procedures of the collaborative knowledge-based system. The host 10 and department terminals 20, 30, and 40 are provided to allow users to enter and rotate out relevant information to the computer main component (subsystem) integration system 50 settings and Computer owner
$ 17頁 1234097 五、發明說明（12) 機1 0中執行，用以根據上述輪入及輸出資訊產生一對應資 訊。 ， 第2圖顯示本實施例之品質改善協同知識基礎系統之 作業程序之流稃圖。首先’如步驟S 3 0 0所示，提供一系 統，包含一電腦主機1 0、經由一網路9 0連接電腦主機1 0之 終端機20、30、40 ’和於電腦主機1 〇中執行之一軟體元件 (子系統）整合系，统5(3 °$ 17 pages 1234097 V. Description of the invention (12) Implemented in machine 10 to generate a corresponding message based on the above-mentioned rotation and output information. Figure 2 shows the flow chart of the operation procedure of the quality improvement collaborative knowledge base system of this embodiment. First, as shown in step S 300, a system is provided, including a computer host 10, terminals 20, 30, and 40 connected to the computer host 10 via a network 90, and executed in the computer host 100. One software component (subsystem) integration system, system 5 (3 °
然後，如夕驟“ 1 0所示，當人工輸入、機台連線或 CP、WAT測試發現製程或機台上的異常問題時，工程師進 入系統5 0，在判斷其可能處理的時間或異常的嚴重性之 後，選擇適當的子系統，包含曰管異常型品質改善協同處 理單元52、後顯影查核異常型品質改善協同處理單元5 4、 改善型品質改善協同處理單元5 6、異常重工型品質改善協 同處理單元5 8、糸統維護單元6 0以及複數工具7 〇。 之後，如步驟S32 0所示，選擇異常機台及異常的項 目’若異常的項目冒經發生過，便沿用舊的異常項目，否 則便輸入一個新的異常項目，在十個分析工具7 〇協助分析 下，逐漸去髮清真因的部分，若真因仍未明，則可先暫 存0Then, as shown in the step "10, when the manual input, machine connection or CP, WAT test finds an abnormal problem in the process or machine, the engineer enters the system 50, and judges the time or abnormality that it may handle. After seriousness, select appropriate subsystems, including tube abnormal quality improvement collaborative processing unit 52, post-development check abnormal quality improvement collaborative processing unit 5 4, improved quality improvement collaborative processing unit 5 6, abnormal heavy industry quality Improve the collaborative processing unit 58, system maintenance unit 60, and plural tools 7. After that, as shown in step S320, select the abnormal machine and the abnormal item. If the abnormal item has experienced a warp, use the old one. Abnormal items, otherwise enter a new abnormal item, with the help of ten analysis tools 7 〇, gradually send out the part of the true cause, if the true cause is still unknown, you can temporarily store 0
最後，如步驟S330所示，再經過進—步的觀察或實驗 後’若發現真因已明’工程師在輪入所有相對的資料後進 入初步結案，系統便主動發電子郵件通知豆主管，在主管 進入系統内簽核，若發現仍有疑點須复清時，可退回這一 個案子，系統會通知原處理之工裎師並將這一案子改為未Finally, as shown in step S330, after further observation or experimentation, 'if the cause is found', the engineer enters the preliminary settlement after turning in all the relative information, and the system actively sends an email to the bean supervisor to notify The supervisor enters the system to sign, and if there is still any doubt that needs to be cleared up, he can return the case, and the system will notify the original processing engineer and change the case to
1234097 五、發明說明（13) 結案，若主管核可後，系統也會通知工程師，這一案子便 進入正式結案。 根據以上所述，本發明具有以下之優點： 1 ·新進人員的學習曲線將縮短； 2 ·機台當機，00C等處理時間縮短（MTTR)，機台當機 處理時間計可縮短約1 0%，RTC 00C處理時間計可縮短約 5%，總生產時間約可提升2%，晶圓產出量約可增加548 PCS ° 3 ·減少工程人員工程報告的紙張使用量。 4 ·工程人員查詢機台處理資料時間縮短。 本發明雖已藉較佳實施例的說明揭露如上，然其並非 用以限定本發明，任何熟習此技藝者，在不脫離本發明之 精神和範圍内，當可作些許之更動與潤飾，因此本發明之 保護範圍當視後附之申請專利範圍所界定者為準。1234097 V. Description of Invention (13) The case is closed. If the supervisor approves, the system will also notify the engineer, and the case will enter the formal close. According to the above, the present invention has the following advantages: 1 · The learning curve of new hires will be shortened; 2 · Machine crashes, 00C and other processing time reduction (MTTR), machine crash processing time meter can be reduced by about 10 %, The RTC 00C processing time meter can be shortened by about 5%, the total production time can be increased by about 2%, and the wafer output can be increased by about 548 PCS ° 3 · Reduce the paper usage of engineering reports by engineers. 4 · Engineering personnel query machine processing time is shortened. Although the present invention has been disclosed as above by the description of the preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can make some changes and decorations without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the attached patent application.
0492-7642TWFC η 1);90-149;EDWARD.p t d 第19頁 1234097_ 圖式簡單說明 第1圖係顯示本實施例中品質改善協同知識基礎系統 之方塊圖。 第2圖係顯示本實施例之品質改善協同知識基礎系統 之作業程序之流程圖。 【符號說明】 1 0〜電腦主機； 1 2〜網路伺服器； 2 0、3 0、4 0〜終端機； 9 0〜網路； 5 0〜軟體元件整合系統； 5 2〜曰管異常型品質改善協同處理單元； 5 4〜後顯影查核異常型品質改善協同處理單元； 5 6〜改善型品質改善協同處理單元； 5 8〜異常重工型品質改善協同處理單元； 6 0〜系統維護單元； 70〜工具； 71〜趨勢圖； 72〜要因分析圖； 7 3〜掃瞄圖形； 7 4〜迴歸分析； 75〜AN0VA分析； 76〜估計檢定； 77〜直方圖； 78〜晶圓圖譜；0492-7642TWFC η 1); 90-149; EDWARD.p t d page 19 1234097_ Brief description of the diagram The first diagram is a block diagram showing a quality improvement collaborative knowledge base system in this embodiment. FIG. 2 is a flowchart showing the operation procedure of the quality improvement collaborative knowledge base system of this embodiment. [Symbols] 10 to computer host; 12 to network server; 20, 30, 40 to terminal; 90 to network; 50 to software component integration system; 5 to 2 exception Type quality improvement collaborative processing unit; 5 4 ~ post development check abnormal quality improvement collaborative processing unit; 5 6 ~ improved quality improvement collaborative processing unit; 5 8 ~ abnormal heavy industry type quality improvement collaborative processing unit; 6 0 ~ system maintenance unit 70 ~ tools 71 ~ trend diagram 72 ~ factor analysis diagram 7 3 ~ scanning graph 7 7 ~ regression analysis 75 ~ AN0VA analysis 76 ~ estimation verification 77 ~ histogram 78 ~ wafer map
0492-7642TWF(η 1);90-149;EDWARD.p t d 第20頁 1234097 圖式簡單說明 79〜KT工具； 80〜附加Office槽案。 第頁 0492-7642TWF(η 1);90-149;EDWARD.p t d0492-7642TWF (η 1); 90-149; EDWARD.p t d p. 20 1234097 Schematic illustration 79 ~ KT tool; 80 ~ additional Office slot case. Page 0492-7642TWF (η 1); 90-149; EDWARD.p t d
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| TW91137659A TWI234097B (en) | 2002-12-27 | 2002-12-27 | Quality improvement team knowledge base system and the operation procedures thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI417715B (en) * | 2005-08-18 | 2013-12-01 | Brooks Automation Inc | System and method for electronic diagnostics of a process vacuum environment |
| CN109426890A (en) * | 2017-08-28 | 2019-03-05 | 力晶科技股份有限公司 | Method for calculating productivity, scheduling priority and optimizing configuration from multidimensional variables |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI417715B (en) * | 2005-08-18 | 2013-12-01 | Brooks Automation Inc | System and method for electronic diagnostics of a process vacuum environment |
| CN109426890A (en) * | 2017-08-28 | 2019-03-05 | 力晶科技股份有限公司 | Method for calculating productivity, scheduling priority and optimizing configuration from multidimensional variables |
| CN109426890B (en) * | 2017-08-28 | 2021-09-07 | 力晶积成电子制造股份有限公司 | Method for calculating productivity, scheduling priority and optimizing configuration from multidimensional variables |
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