TWI230115B - A substrate transport apparatus having an edge grip end effector - Google Patents

Abstract

A substrate transport apparatus comprising: a drive section; an articulated arm connected to the drive section, the articulated arm having an end effector for transporting a substrate; and a gripper connected to the end effector for holding the substrate on the end effector, the gripper having at two actuated contact pads for gripping the substrate, the at least two actuated contact pads being disposed on the end effector so that when actuated to grip the substrate the at least two pads center the substrate on the end effector.

Description

經濟部智慧財產局員工消費合作社印製Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

1230115 本發明偽關於一種基板處理裝置，更詳細而言，偽關 於一種備有夾持邊部用端末動作髏之基板移送裝置。 諸如用以移送半導體晶圓或平面顯示屏等之基板移送 裝置一般具有一端末動作體，在移送裝置移動時用以支持 基板。端末動作體之例子包括使用真空夾盤將基板抓持於 端末動作體者。此項措施可導致基板與端末動作體接觭之 一面受到污染。另一端末動作體之例子僳利用夾持邊部將 基板抓持於端末動作髏者。大部份夾持邊部用端末動作體 具有一夾鉗使基板偏移至一邊。即將晶圓從一邊推向固定 硬止動部。此舉並非真正對準基板中心，而是對向基板邊 部。於是，該端末動作體之對中準確度將因基板直徑容許 偏差而受基板直徑之變化所影響。由於該端末動作體必須 以基板於支持上之最少量滑動之方式抓持及置放基板所需 之附加動作，此種夾持邊部用端末動作體比离空夾盤端末 動作體具有更低之處理量。該附加動作亦避免將基板推入 背倒基板支持。本發明提供一種具有自動對中特性之夾持 邊部用端末動作體，其處理量相當於真空型夾盤端末動作 體者，但沒有真空型夾盤端末動作體所衍生之污染間題。 本發明之上述及其他特擻將參照附圖予以說明。 第1圖係顯示本發明之基板移送裝置10之透視圖。雖 然本發明將根據附圖所示之單一實施例予以說明，但須知 本發明亦可呈現多種變更態樣。此外，任何適當之尺寸， 形狀或類型之構件或材料均可被採用。 在較可取之實施例中，該基板移送裝置一般具有一驅 -4- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公t)1230115 The present invention relates to a substrate processing apparatus. More specifically, the present invention relates to a substrate transfer apparatus provided with an end effector for holding edges. A substrate transfer device, such as a semiconductor wafer or a flat panel display, generally has a terminal end body for supporting the substrate when the transfer device is moved. Examples of the end effector include those who hold a substrate on the end effector using a vacuum chuck. This measure can cause contamination on the side where the substrate is connected to the end effector. An example of the other end effector: a person holding the substrate on the end effector by using a clamping edge. Most of the end effectors for holding the edge have a clamp to offset the substrate to one side. That is, push the wafer from one side to the fixed hard stop. This is not really aligning the center of the substrate, but facing the edges of the substrate. Therefore, the centering accuracy of the end effector will be affected by the variation of the substrate diameter due to the allowable deviation of the substrate diameter. Since the end effector must hold and place the substrate with the minimum amount of sliding movement of the substrate on the support, the additional action required for this edge end effector is lower than that of an empty chuck end effector. Of the processing capacity. This additional action also avoids pushing the substrate into the back-up substrate support. The present invention provides an end effector for edge clamping with automatic centering. The processing capacity is equivalent to the end effector of a vacuum type chuck, but there is no contamination problem derived from the end effector of a vacuum type chuck. The above and other features of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a substrate transfer apparatus 10 of the present invention. Although the present invention will be described with reference to a single embodiment shown in the drawings, it should be understood that the present invention can also take on various modifications. In addition, any suitable size, shape or type of component or material can be used. In a preferred embodiment, the substrate transfer device generally has one drive. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 g)

(請先閱讀背面之注意事項再填寫本頁) -MW----- 訂— 1230115 第91115657號專利申請案 補充、修正後無_之朗⑽換頁_式王份 ^^43及活節臂44。活節臂料係安裝在驅動單元43上。 SI:所示，該活節臂44包括有-上臂6〇, -前臂62及 作體64。上臂60，前臂62及端末動作體64係串列 起。上臂6〇係在肘關節74處鉸接前臂62。前臂62則在 腕關節％處鉸接端末動作體64。在第1圖所示之實施^在 ,活即臂44具有第二端末動作體66鉸接於前臂62。雖然本 發明將參照第1圖所示之基板移送裝置1〇予以說明，然而 本發明同樣適詩任何其他類型之基板移送裝置。 —在第1圖中，驅動單元43具有一箱罩46用以容納驅動 早=驅動器。該驅動單元43係三軸驅動器，可使活節臂^ /口著：軸方向移動。舉例而言，驅動單元可具有適當之驅動器 使活節臂44作垂直升降。驅動單元43另外包括—同軸驅動器 使活節臂沿著轉軸_(即Θ運動)及沿著徑向軸τ伸縮(即 T運動）。該驅動單元43之同軸驅動器與美國專利案第 5，。9,658號所揭述者大致相同，以下將援引作為本案參考。驅 動單元43之同軸驅動器可藉適當聯結或傳動系統予以連接以 旋轉活節臂上之端末動作體64,66。該聯結係㈣計使端末動 作體可在互不影響其他部份之情況下獨立旋轉，或該端末動作 體可與活節臂一致行動。 第2圖顯不-端末動作體64及該端末動作體所支持之 一基板s之平面圖。基板s係一 2〇〇/3〇〇mm之晶圓或平面 顯示屏。該端末動作體64 —般具有一基座12，一支持部14 ，及一夾持部16。該支持部14與夾持部16係依繫在基座12 -5- 1230115 93·仏 一 9 上 狀體所構成並1有二任何適當軸柄(例如六面體)之塊 > 具有適當介面可供安裝枢轴（未予圖示）於 鈿動作體上。支持部14具有二個抓指18,2〇。抓指I8, 2二大致彼此相似但呈對置。各個抓指18,2()係由諸如塑 膠或金屬等任何適當材料製成之扁平體。抓指係從基座之 前端懸臂出來。抓指可藉任何適當方式固定於基座。抓指 係充伤隔開以提供用以抓持基板s之適當支持面。該抓指 具有大致扁平之適當塗覆之上側面用以抓持基板s。各抓 指之上側面可突設有二個座部可供放置基板以_基板登 立並使抓指與基板S f轉持最小接觸面。該減之上側面 之-座部之位置經設計使基板被放置於座部時，該座部僅 接觸基板之上緣。如第2圖所示，各抓指Μ』具有_ 22用以映射基板S。該光纖22係沿著抓指之縱向延伸。光 纖設有適當之開口以連接光纖之適當光源（例如鐳射）。光 纖亦可與適當之感應器結合以進行映射。 參照第2圖，夾持部16最好具有—對對置之抓指桿^ ，26及引動機構28。該引動機構28操縱抓指桿24,26以失 持及釋放由端末動作體所運載之基板s，以下將有詳細說明 。抓指桿24, 26大致彼此相似但呈對置。於是，以下將以 抓指桿24加以說明。抓指桿24具有一橫向構件“及一長步 縱向構件30。縱向構件3〇係依繫自橫向構件32。如第2 / 所示，該抓指桿係位於相對應之抓指18之毗鄰處，而縱向圖 構件30係沿著抓指之邊緣延伸，而橫向構件32係沿著支°持 抓指之橫向延伸。抓指桿24係源自抓指18，或支持於端末 動作體之基座部。在較可取實施例中，一線性軸承部'34係 1230115 安裝在抓指18,20之下側。該線性軸承部係由任何適當之 條形材料所製成，並具有適當數目之軸承安裝在條形物之 外側。抓指之橫向構件3 2之内側端設有一套管或管座3 6。 該管座36具有内腔，其尺寸係經設計可緊密圍套在線性軸 承部上者。此舉將可使管座保持在線性軸承上，同時可供 管座可自由滑動，在沒有顯著之接觸面阻力下，可沿著線 性軸承作前後移動。利用管座36沿著橫向構件32滑動至線 性軸承部34之一端可將抓指桿24安裝在端末動作體上。該 線性軸承部34於是可垂直支持抓指桿24，同時可供抓指桿 對端末動作體中心線（第2圖之箭頭Ε方向）作橫向移動。對 向之抓指桿26係相似地安裝在線性軸承部之對向端上，於 是可沿著箭頭Ε之方向作進出移動。各個抓指桿上設有一 基板夾持構件40, 42。該夾持構件40、42可為接觸墊或縱 長之抓指桿24, 26向上突起之其他類似構件。在第2圖所 示之實施例中，該夾持構件係設於抓指桿24, 26之外側端 部。夾持構件40, 42最好係設在抓指桿上，當抓指桿位於 關閉位置（如第2圖所示）時，夾持構件係與端末動作體所 支持之基板S之外緣接觸。抓指桿24, 26係設在端末動 作體上使抓指桿在關閉狀態時，相對之夾持構件40,42可 以大致二點及十點時鐘位置接觸基板S之邊緣。該夾持構 件可具有與基板S外緣曲度相配合之曲形。 引動機構28係用以打開及關閉抓指桿24, 26。引動機 構28 —般係包括一引動器100及可作動的連接引動器之聯 結部102。引動器100係諸如彈簧加壓螺線管等任何類型者 1230115(Please read the precautions on the back before filling out this page) -MW ----- Order — 1230115 Patent No. 91115657 Patent Application Supplement and Amendment No _ ⑽ ⑽ ⑽ Page change _ Shiwangfen ^ 43 and live arm 44. The joint arm is mounted on the driving unit 43. SI: As shown, the articulated arm 44 includes an upper arm 60, a forearm 62, and a working body 64. The upper arm 60, the forearm 62 and the end effector 64 are arranged in series. The upper arm 60 is hinged to the forearm 62 at the elbow joint 74. The forearm 62 is articulated to the terminal action body 64 at the wrist joint%. In the implementation shown in FIG. 1, the arm 44 has a second end-action body 66 hinged to the forearm 62. Although the present invention will be described with reference to the substrate transfer apparatus 10 shown in FIG. 1, the present invention is equally applicable to any other type of substrate transfer apparatus. -In the first figure, the drive unit 43 has a case cover 46 for accommodating the drive. The driving unit 43 is a three-axis driver, which can move the joint arm ^: in the axial direction. For example, the driving unit may have a suitable driver for vertically lifting the joint arm 44. The driving unit 43 further includes a coaxial driver that moves the joint arm along the rotation axis _ (that is, Θ) and expands and contracts along the radial axis τ (that is, T movement). The coaxial driver of the driving unit 43 is the same as that of US Patent No. Those disclosed in No. 9,658 are roughly the same, which will be cited below for reference in this case. The coaxial driver of the driving unit 43 can be connected by a suitable coupling or transmission system to rotate the terminal action bodies 64, 66 on the joint arm. The connection system allows the end effector to rotate independently without affecting the other parts, or the end effector can act in concert with the joint arm. Fig. 2 shows a plan view of the end effector 64 and a substrate s supported by the end effector 64. The substrate s is a 200 / 300mm wafer or a flat screen. The end effector 64 generally has a base 12, a support portion 14, and a clamping portion 16. The supporting portion 14 and the clamping portion 16 are connected to the base 12 -5- 1230115 93 · 仏 9 and are composed of any suitable shafts (e.g., hexahedrons). The interface can be used to install a pivot (not shown) on the actuator. The support section 14 has two fingers 18,20. Fingers I8, 2 are roughly similar but opposite. Each finger 18,2 () is a flat body made of any suitable material such as plastic or metal. The fingers are cantilevered out of the front of the base. The fingers can be fixed to the base by any suitable means. The grasping fingers are isolated from each other to provide an appropriate support surface for grasping the substrate s. The gripper has a generally flat, suitably coated upper side for gripping the substrate s. Two grips may be provided on the upper side of each finger to allow the substrate to be placed so that the substrate can stand and minimize the contact surface between the finger and the substrate S f. The position of the minus side of the minus upper side is designed so that when the substrate is placed on the seat, the seat only contacts the upper edge of the substrate. As shown in FIG. 2, each finger M ′ has _ 22 to map the substrate S. The optical fiber 22 extends longitudinally along the fingers. The fiber is provided with appropriate openings to connect a suitable light source (such as laser) for the fiber. Fibers can also be combined with appropriate sensors for mapping. Referring to FIG. 2, the holding portion 16 preferably has opposite finger grips ^, 26 and an actuating mechanism 28. The actuating mechanism 28 operates the finger grips 24, 26 to lose and release the substrate s carried by the end effector, which will be described in detail below. The finger grips 24, 26 are approximately similar to each other but opposed. Therefore, the finger grip 24 will be described below. The finger grip 24 has a cross member "and a long step longitudinal member 30. The longitudinal member 30 is dependent on the cross member 32. As shown in Fig. 2 /, the finger grip is located adjacent to the corresponding finger 18 The longitudinal member 30 extends along the edge of the gripper, and the cross member 32 extends along the lateral direction that supports the gripper. The gripper rod 24 originates from the gripper 18, or is supported by the end effector. Base section. In a more preferred embodiment, a linear bearing section '34 series 1230115 is mounted under the fingers 18, 20. The linear bearing section is made of any suitable strip material and has an appropriate number The bearing is installed on the outer side of the bar. The inner end of the cross member 3 2 of the finger grip is provided with a set of pipes or sockets 36. The socket 36 has an internal cavity, and its size is designed to tightly enclose the linear bearing This will keep the tube seat on the linear bearing and allow the tube seat to slide freely. It can move forward and backward along the linear bearing without significant contact surface resistance. Use the tube seat 36 along The cross member 32 slides to one end of the linear bearing portion 34 to secure the finger grip 24 It is mounted on the end effector. The linear bearing portion 34 can support the finger grip 24 vertically, and at the same time, it can move the center line of the end effector (direction of arrow E in FIG. 2) laterally. The finger lever 26 is similarly mounted on the opposite end of the linear bearing portion, so that it can be moved in and out in the direction of the arrow E. Each finger gripper is provided with a substrate holding member 40, 42. The holding member 40, 42 may be a contact pad or other similar members that protrude upwardly from the finger grips 24, 26. In the embodiment shown in FIG. 2, the gripping member is provided at the outer end of the finger grips 24, 26 The clamping members 40, 42 are preferably provided on the finger grips. When the finger grips are in the closed position (as shown in Fig. 2), the clamping members are connected to the outer edge of the substrate S supported by the end effector. Contact. The finger grips 24 and 26 are provided on the end effector so that when the finger grip is closed, the clamping members 40 and 42 can contact the edge of the substrate S at approximately two o'clock and ten o'clock clock positions. The component may have a curved shape that matches the curvature of the outer edge of the substrate S. The actuating mechanism 28 is used to open Close grab fingers 24, 26. The lead brake mechanism 28 - 100 lines generally comprises a lead-based actuator 100 may be actuated and is connected with the junction of the lead portion actuator 102. Actuator solenoid or the like, such as a spring-loaded by any type 1230115

Μ 。引動器具有可作軸向進退（如箭頭Α所示方向）之轴部 在可取實施例中，引動器係設在支持抓指之中間。該引動 器係固定安裝於端末動作體之抓指桿或基座上。聯钟部 102—般包括一中央支架104,及從支架1〇4之對側延伸之 相對聯桿106,108。該中央支架1〇4具有一橫 '、4田，矛丨】用任 何適當方式連接至引動器100之軸部使中央支架ι〇4與引 動器軸一體移動。中央支架1〇4之橫擋具有第三基板夾持 構件41(見第2圖）。於是在關閉狀態（如第2圖所示）時 支架上之夾持構件41係與基板s之外緣接觸。夾持構件Μ 係设置以大致十二點方位與基板邊緣接觸。中央支加之 :設…夾之相對端。其中一聯結體係銷針於各：u形 ^上使騎可相對Μ形夾旋轉。各個聯結體之另一端係 減桿24,26之相對插座36。於是如第2圖所示，” :前進通L及斷電時，中央支架1〇4係沿著箭頭Α方 於户π/ J員運動係由聯結部轉移至橫向運動，使抓 曰才干沿著線性軸承作箭頭E方尚 長，故抓指桿之移動大致等量向移動。該聯結部係大致等 64之桿⑽在開放狀態下之端末動作體 之十面圖。在開放狀態下，引 當抓指桿向外移料中央及抓指桿。 二4:= 體了向下移動及離開基板s。抓指桿係作足量之橫 1230115 向移動以提供垂直抓取或釋脫時基板周圍之空間。欲抓取基 板S時，端末動作體64係垂直移動於基板下方，直至基板 接觸抓指桿之座部。可利用光感應器以輔助將基板S就座於 抓指桿上。就座後引動器1 〇〇將***縱使抓指桿24，26向 後移動至第2圖所示之關閉狀態。於是，根據上述開啟抓指 桿之逆向方式將使夾持構件40，42及中央夾持構件41(位於 引動機構之中央支架）回復接觸基板邊緣。第4圖顯示抓指桿 開關時該抓指桿與引動機構聯結部之位置。在關閉狀態下， 相對之抓指桿之大致等量及相反之移動將使基板S對中進 入端末動作體。基板S與端末動作體之接觸係被限制於支持 座之内，並沿著夾持構件40，41，42之外緣與其接觸。夾 持構件係以足以避免基板在高加速運動時移動之預定作用力 接觸基板邊緣。當基板S被抓取，活節臂可移動運送基板S。 在一變更態樣中，可使用一種具有任何適當數目之抓 指及夾持構件以抓取基板邊緣之雙面夾端末動作體。在另 一變更態樣中，用以橫向移動抓指桿之引動機構係任何適 當類型者。其中一種該機構係列示於附件II中作為參考。 本發明提供一種可將基板有效抓持於端末動作體上， 在整個高加速程序中不會產生後侧接觸之端末動作體基板 夾持系統。本發明之夾持邊部端末動作體可減少與真空夾 持端末動作體相比較下基板背面之損壞程度。本發明之夾 持邊部端末動作體亦可使基板對準中央，使基板之各項特 徵之定位（例如半導體晶圓之晶圓截痕等）簡化。本發明之 A7 B7Μ. The actuator has a shaft portion capable of axial advancement and retraction (in the direction shown by arrow A). In a preferred embodiment, the actuator is arranged in the middle of the supporting fingers. The actuator is fixedly mounted on a finger grip or a base of an end effector. The bell section 102 generally includes a central bracket 104 and opposing links 106, 108 extending from opposite sides of the bracket 104. The central bracket 104 has a horizontal, horizontal, and vertical axis, and is connected to the shaft portion of the actuator 100 by any appropriate method so that the central bracket ι4 and the actuator shaft are moved integrally. The crosspiece of the center stand 104 has a third substrate holding member 41 (see Fig. 2). Therefore, in the closed state (as shown in FIG. 2), the holding member 41 on the holder is in contact with the outer edge of the substrate s. The holding member M is provided in contact with the edge of the substrate at an approximately twelve o'clock orientation. The central branch plus: the opposite ends of ... One of the coupling pins is attached to each of the U-shapes so that the rider can rotate relative to the M-clip. The other end of each coupling body is opposite sockets 36 of the reduction rods 24,26. Then, as shown in Figure 2, ": When the L is forwarded and the power is off, the central bracket 104 moves along the arrow A to the household π / J member's movement system from the joint to the lateral movement, so that the grasping ability is The arrow E on the linear bearing is still long, so the movement of the grasping finger rod is moved approximately in the same direction. The joint is a ten-face view of the end action body of the rod 64 in the open state. In the open state, the guide The finger grip moves the center of the material outwards and the finger grip. 2 4: = moves down and leaves the substrate s. The finger grip moves in a sufficient amount of 1230115 direction to provide vertical grip or release around the substrate. To grasp the substrate S, the end action body 64 moves vertically below the substrate until the substrate contacts the seat of the finger grip. A light sensor can be used to assist in seating the substrate S on the finger grip. The rear seat actuator 100 will be operated to move the finger grips 24, 26 backward to the closed state shown in Figure 2. Therefore, according to the above-mentioned reverse method of opening the finger grips, the clamping members 40, 42 and the center The clamping member 41 (located in the central support of the actuating mechanism) returns to the side of the substrate Figure 4 shows the position of the finger grip and the linkage of the actuating mechanism when the finger grip is switched. In the closed state, approximately the same amount and opposite movement of the finger grip will cause the substrate S to center into the end action. The contact system between the substrate S and the end effector is limited to the support seat and contacts it along the outer edges of the clamping members 40, 41, 42. The clamping member is sufficient to prevent the substrate from moving during high acceleration motion The predetermined force contacts the edge of the substrate. When the substrate S is grasped, the joint arm can move the substrate S. In a modified aspect, a substrate with any suitable number of fingers and clamping members can be used to grasp the edge of the substrate The double-sided clip end action body. In another modified aspect, the actuating mechanism for laterally moving the finger grip is any appropriate type. One of the series of the mechanism is shown in Annex II for reference. The present invention provides a The substrate is effectively held on the terminal action body, and the terminal action body substrate clamping system that does not cause rear contact during the entire high acceleration process. The clamping edge end action body of the present invention can reduce The degree of damage to the backside of the substrate is compared with the empty clamping end effector. The clamping end effector of the present invention can also align the substrate to the center to position the various features of the substrate (such as the wafer section of a semiconductor wafer Marks, etc.) Simplified. A7 B7 of the present invention

12301A 五、發明説明（） 四抓指構造可供所有支承機構被設置於腕關節之近處或其 上，並偏離端末動作髏上之基板S之毗鄰。於是任何可能 在産生微粒之摩擦組件均不在基板S近處。此外，本發明 之夾持邊部端末動作體與真空夾持端末動作體相比之下， 因前者不採用傳統夾持邊部端末動作體之額外蓮動，故可 以中性處理量抓放基板。 須知以上僅作為本發明之說明用途。精於此藝者可在 不脱離本發明之精神下作成各種變更態樣。因此所有變更 態樣應屬本發明申請專利範圍。 圖式之簡單說明 第1圖傺本發明之基板移送裝置之透視圖； 第2圖偽第1圖之基板移送裝置之端末動作體及一基 板之平面圖； 第3圖係第2圖之端末動作體之另一平面圖，其中該 端末動作髏偽位於第二位置；及 第4圖偽第2圖之端末動作體之示意平面圖，顯示該 端末動作體相對於第2-3圖之端末動作髖位置之關傜。 IL——.I — — If. (請先閱讀背面之注意事項再填寫本頁) 訂 線♦ 經濟部智慧財產局員工消費合作社印製 -10- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 1230115" 符號說明 10 -基板移送裝置 14 -支持部 18,20-抓指 24,26-抓指桿 30 -縱向構件 34 -線性軸承部 40,42-基板夾持構件 43 -驅動單元 46 -箱罩 62 -前臂 74 -肘關節 100-引動器 104-中央支架 S - 基板 12 -基座 16 -夾持部 22 -光纖 28 -引動機構 32 -橫向構件 36 -管座 41 -第三(或中央)夾持構件 44 -活節臂 60 -上臂 64 -端末動作體 7 6 -腕關節 102-聯結部 106, 108 -聯桿12301A V. Description of the invention (4) The four-finger gripping structure allows all supporting mechanisms to be placed near or on the wrist joint, and deviates from the abutment of the base plate S on the terminal action skeleton. Therefore, any frictional component that may be generating particles is not near the substrate S. In addition, compared with the vacuum clamping end-moving body of the present invention, since the former does not use the additional motion of the traditional clamping end-moving body, the substrate can be handled with a neutral processing amount. . It should be noted that the above is only for illustrative purposes of the present invention. A person skilled in the art can make various changes without departing from the spirit of the present invention. Therefore, all changes shall be within the scope of the present invention. Brief description of the drawings Fig. 1 is a perspective view of the substrate transfer device of the present invention; Fig. 2 is a plan view of the terminal action body and a substrate of the substrate transfer device of Fig. 1; Fig. 3 is the terminal action of Fig. 2 Another plan view of the body, in which the end action skeleton is located in the second position; and Fig. 4 is a schematic plan view of the end action body in Fig. 2 showing the position of the end action body relative to the end action hip in Figs. 2-3. Off. IL ——. I — — If. (Please read the notes on the back before filling out this page) Threading ♦ Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs -10- This paper size applies to China National Standard (CNS) A4 specifications (210X 297 mm) 1230115 " Explanation of Symbols 10-Substrate Transfer Device 14-Supporting Section 18, 20-Finger 24, 26-Finger Grip 30-Longitudinal Member 34-Linear Bearing Section 40, 42-Substrate Holding Member 43 -Drive unit 46-Case cover 62-Forearm 74-Elbow joint 100-Actuator 104-Central bracket S-Base plate 12-Base 16-Clamping portion 22-Optical fiber 28-Actuating mechanism 32-Cross member 36-Tube holder 41 -The third (or central) clamping member 44-the articulated arm 60-the upper arm 64-the terminal action body 7 6-the wrist joint 102-the joint 106, 108-the link

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Claims (1)

A8 B8 C8 D8 1230115 六、申請專利範圍 1. 一種基板移送裝置，包括： 一驅動部（43); 一連接至驅動部之活節臂，該活節臂具有用以移送基 板用之端末動作髏；及 一連接至端末動作髏用以將基板支持於端末動作龌上 之夾持部，該夾持部具有至少二個夾持構件用以夾持基板 ,該至少二個夾持構件傜設在端末動作體上，當引動該夾 持部夾持基板時，該至少二個夾持構件即向該端末動作體 内侧直線的移動偽使基板位置於端末動作髏上。 2. 如申請專利範圍第1項所述之裝置，其中該夾持 部具有三個或以上之夾持構件。 3. 如申讅專利範圍第1項所述之裝置，其中至少二 夾持構件傺設在端末動作髏之對向倒。 4. 如申讅專利範圍第3項所迷之裝置，其.中該夾持 持部上有一個第三夾持構件，該第三夾持構件偽設在端末 動作體上相對於該至少二夾持構件，當被引動時第三夾持 構件即與該至少二個夾持構件協動使基板定位於躅末動作 體之中央上。 5. 如申請專利範圍第1項所述之裝置，其中該夾持 部具有至少二個可動臂部延伸於端末動作體之對向侧，並 -12- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） I ^--I I I--I I - I I I---I ^ «full — — (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 1230115 A8 B8 C8 D8 9¾ 4.14 六、申請專利範圍 具有可操縱的連接於至少二個臂部之一引動器，用以使臂 部沿著端末動作體中心之方向移動。 - (請先閲讀背面之注意事項再填寫本頁) 6. 如申請專利範圍第5項所述之裝置，其中各該至 少二個夾持構件傜設於該至少二個臂部之對慝臂部。 7· 如申請專利範圍第6項所述之裝置，其中該端末 動作髏具有一基端部供端末動作體連接至活節臂之支持構 件，該至少二値可動臂部僳移動自如地安裝於端末動作體 之基端，而該至少二値夾持構件僳設在該至少二値臂部之 位於端末動作體之末端。 8· 如申請專利範圍第1項所述之裝置，其中該至少 二櫥夾持構件僳被定位使致動夾持基板時，該至少二個夾 持構件中之至少一锢將接觸基板之邊緣。 9· 如申請專利範圍第1項所述之裝置，另外包括一 用以感測基板特歡之感測器。 經濟部智慧財產局員工消費合作社印製 -13- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）A8 B8 C8 D8 1230115 6. Scope of patent application 1. A substrate transfer device, including: a driving part (43); a joint arm connected to the driving part, the joint arm has a terminal action skeleton for transferring the substrate ; And a clamping part connected to the terminal action skeleton for supporting the substrate on the terminal action pin, the clamping part has at least two clamping members for clamping the substrate, and the at least two clamping members are disposed on On the end effector, when the clamping portion is driven to clamp the substrate, the at least two clamping members move linearly toward the inside of the end effector, so that the substrate is positioned on the end effector. 2. The device according to item 1 of the patent application scope, wherein the clamping portion has three or more clamping members. 3. The device as described in item 1 of the patent application scope, wherein at least two clamping members are arranged opposite to the end of the action skull. 4. The device as described in item 3 of the patent application, wherein a third clamping member is provided on the clamping portion, and the third clamping member is pseudo-positioned on the terminal action body with respect to the at least two The clamping member, when actuated, cooperates with the at least two clamping members to position the substrate on the center of the end effector. 5. The device according to item 1 of the scope of patent application, wherein the clamping portion has at least two movable arm portions extending on the opposite sides of the end effector, and -12- This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) I ^-II I--II-II I --- I ^ full — (Please read the precautions on the back before filling out this page) Staff Consumption of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the cooperative 1230115 A8 B8 C8 D8 9¾ 4.14 6. The scope of the patent application has an actuator connected to one of the at least two arms to move the arm in the direction of the center of the end action body. -(Please read the precautions on the back before filling this page) 6. The device as described in item 5 of the scope of patent application, wherein each of the at least two clamping members is provided on the opposing arm of the at least two arms unit. 7. The device as described in item 6 of the scope of patent application, wherein the terminal action skeleton has a base end portion for the terminal action body to be connected to the support member of the joint arm, and the at least two movable arm portions are freely installed on The base end of the end effector, and the at least two arms holding members are disposed on the ends of the at least two arm arms at the ends of the end effectors. 8. The device according to item 1 of the scope of patent application, wherein the at least two cabinet clamping members 定位 are positioned so that when the substrate is actuated, at least one of the at least two clamping members will contact the edge of the substrate . 9. The device described in item 1 of the scope of the patent application, further comprising a sensor for detecting the substrate substrate. Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs -13- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)