TWI228641B - Color resist by chemical amplify compositions - Google Patents
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1228641 五、發明說明（1) 發明領域： 本發明係關於一種改良之彩色光阻，及依此彩色光阻 所製成之彩色濾光片與彩色薄膜電晶體液晶顯示器。 發明背景： ^ 液晶顯示器（Liquid Crystal Display:LCD)因有著較1228641 V. Description of the invention (1) Field of the invention: The present invention relates to an improved color photoresist, and a color filter and a color thin-film transistor liquid crystal display manufactured by the color photoresist. Background of the Invention: ^ Liquid crystal display (LCD)
陰極射線管體積小，低幅射及低消粍電力等優點，已成為 顯示器產業中最重要產品，而其中主動矩陣型（Active Matrix:AM) LCD具有高晝質、高顯示容量、彩色化等特 點，為LCD之主流產品。一 AMLCD通常有複數個水平與垂直 的趨動線’形成複數個交錯點（crossover point)，於每 一個交錯點旁，連接一薄膜電晶電（Thin Fi lmThe advantages of small size, low radiation, and low power consumption of cathode ray tubes have become the most important products in the display industry. Among them, Active Matrix: AM LCD has high day quality, high display capacity, colorization, etc. Features are the mainstream products of LCD. An AMLCD usually has a plurality of horizontal and vertical actuation lines ’to form a plurality of crossover points. Next to each of the crossover points, a thin film transistor (Thin Film) is connected.
TranSlstor:TFT)，可各別施加電壓，趨動開關TFT，以達 到液晶顯示之效果。 们T F T包含一對同平面的源極（s 〇 u r c e )及沒極 半、’ 一半導體薄膜批覆於source及drain電極間，y ) 體薄膜+上依次有一間極（gate)絕緣層及一間極（gate ' ° 。將電壓加在gate電極上，控制流經S0UrCe及dr a i 黾極間丁F T > % ^ 一曲w %、抓，以達到將晝素（P i x e 1 )開或關的目的 素透光 里素開口率（aperture ratio)大約為50%，為晝TranSlstor: TFT), which can be applied with voltage to actuate the TFT switch, to achieve the effect of liquid crystal display. Our TFT includes a pair of coplanar source (source) and half electrode, a semiconductor thin film is coated between the source and drain electrodes, and y) a body film + a gate insulation layer and a Gate (° '. Apply voltage to the gate electrode, control the flow through S0UrCe and dr ai 黾 between the electrodes FT >% ^ a song w%, grasp, to achieve the day element (P ixe 1) on or off The aperture ratio (aperture ratio) of the target element is about 50%.
低=面積和被TFT遮蓋面積之比，使得顯示器的亮度降 +哭味1 九元件的耗電量。為了延長電池壽命，提高！ 不器透光遂 t 一、午’如何提高畫素開口率為重要課題。 β念私^用之彩色濾光片（color filter)有好的光穿透J 及色飽合户， X ’此二性質和顏料的顆粒及分散均勻度密切；)Low = The ratio of the area to the area covered by the TFT, which reduces the brightness of the display + the power consumption of the nine components. To extend battery life, improve! No light transmission then t. How to increase the pixel aperture ratio at noon is an important issue. The color filter used by β Nianyi ^ has a good light penetration J and color saturation, X ’these two properties are closely related to the particle and dispersion uniformity of the pigment;)
1228641 五、發明說明〇 ^ °過去彩色濾光片中使用染料，可達到光穿透度及色飽 口度的要求，但染料的耐光性與耐熱性差，不符AMLCD的 規，。為克服此一問題，顏料已取代染料成為彩色濾光片 的著色劑。但為了滿足光穿透度及色飽合度的要求，顏料 必需微粒化，並均勻分散於高分子接著劑中。根據光學原 理’顏料平均粒徑必需小於顏色光波長的一半，才會有良 —的透光度及高色飽合度。對光三原色而言，紅、藍、、綠 _色之波長分別為610nm、450nm及540nm，即紅、藍、綠 〇顏料之平均粒徑必需分別低於0 · 3 um、〇 · 2 3 um及 ~ 护27um ’方可得到良好透光度及色飽合度。由於顏料（尤 曰有機顏料）之表面極性偏低且分子量大，故不易與具才^ 性之聚合物或溶媒親和，使顏料粒子昜成串聚集成大顆 粒，造成色飽和度不足、光澤度低及透光度差。 發明楙要 本發明的目的在提供一種改良的彩色光阻，具有古、 光率、高色飽和度、高解析度、低介電性及長期使用=透 化性與熱安定性。利用本發明之彩色光阻而製得之彩耐 光片，巧*進一步應用於薄膜電晶體液晶顯示器，具有古二 穿透性與高開口率之優點。 而光 槔據本發明之彩色光阻，其至少包含：（a) 一透明 力聚舍物，其中該壓克力聚合物至少含有卜15莫耳百2克 之羥基、1 — 15莫耳百分比之羧基、30-50莫耳百分比刀一比 級丁基酯基及5-20莫耳百分比之苯基；（b) 一有機顏料^三 (c)〆光酸產生劑。其他添加劑如光增感劑及表面活'性，1228641 V. Description of the invention 0 ^ ° In the past, the use of dyes in color filters can meet the requirements of light transmittance and color saturation, but the light fastness and heat resistance of the dyes are poor, which does not meet the AMLCD specifications. To overcome this problem, pigments have replaced dyes as colorants for color filters. However, in order to meet the requirements of light transmittance and color saturation, the pigment must be micronized and uniformly dispersed in the polymer adhesive. According to the optical principle, the average particle diameter of the pigment must be less than half of the wavelength of the color light in order to have good light transmittance and high color saturation. For the three primary colors of light, the wavelengths of red, blue, and green are respectively 610nm, 450nm, and 540nm, that is, the average particle diameters of the red, blue, and green pigments must be less than 0.3 μm and 0.23 μm, respectively. And ~ 27um 'to get good light transmittance and color saturation. Because the surface polarity of pigments (especially organic pigments) is low and the molecular weight is large, it is not easy to be compatible with talented polymers or solvents, and the pigment particles are clustered into large particles, resulting in insufficient color saturation and gloss. Low and poor light transmission. Summary of the Invention The object of the present invention is to provide an improved color photoresist having ancient, photometric, high color saturation, high resolution, low dielectric properties, and long-term use = permeability and thermal stability. The color light-resistant sheet obtained by using the color photoresist of the present invention is further applied to a thin film transistor liquid crystal display, and has the advantages of ancient II penetrability and high aperture ratio. The photoresist according to the present invention includes at least: (a) a transparent polymer aggregate, wherein the acrylic polymer contains at least 15 moles of 100 grams of hydroxyl groups, 1-15 moles of Carboxylic acid, 30-50 mole percent of butyl ester and 5-20 mole percent of phenyl; (b) an organic pigment ^ tri (c) phosphoric acid generator. Other additives such as photosensitizers and surface activity,
1228641 五、發明說明（3) 亦可加入本發明之彩色光阻中。光增感劑可吸收光能量， 並將能量移轉至光酸產生劑，進而加速光成像工程。 本發明之透明壓克力聚合物係由卜1 5莫耳百分比之含 羥基單體、至少卜15莫耳百分比之含羧基單體、30-50莫 耳百分比之含三級丁基酯基單體及5-20莫耳百分比之含苯 基單體及差額之其他合宜不飽和單體之單體混合物共聚合 而得。適用本發明之羥基單體可以為任何含羥基之不飽合 單體，較佳之含羥基單體係選自羥基取代之丙烯酸酯及烷 基丙烯酸酯，更佳之含羥基單體係選自2 -羥基乙基丙酸 酯、2 -羥基乙基甲基丙烯酸酯、羥基丙基丙烯酸酯、羥基 丙基甲基丙烯酸酯、羥基丁基丙烯酸酯、及羥基丁基甲基 丙稀酸S旨。 適用本發明之羧基單體可以為任何含羧基之不飽合單 體，較佳之含羧基單體係選自丙烯酸、甲基丙烯酸、順丁 烯二酸、巴豆酸、亞曱基丁二酸、鈦酸甲基丙烯酸酯、丁 二酸甲基丙烯酸酯、及/3 -羧乙基甲基丙烯酸酯。 適用本發明之三級丁酯基單體可以為任何含三級丁酯 基之不飽合單體，較佳之三級丁酯基單體係選自三級丁基 丙烯酸酯、三級丁基甲基丙烯酸酯、三級丁基丙烯醚酸 酯、三級丁基曱基丙烯醚酸酯、三級丁氧基羰基氧苯乙 烯、三級丁氧基羰基氧曱苯乙烯、三級丁氧基羰基氧烯丙 基醚、及三級丁氧基羰基氧烯乙基醚。 適用本發明之苯基單體可以為任何含苯基之不飽合單 體，較佳之含苯基體係選自苄基丙烯酸酯、苄基甲基丙烯1228641 V. Description of the invention (3) It can also be added to the color photoresist of the present invention. The light sensitizer can absorb light energy and transfer the energy to the photoacid generator, thereby accelerating the light imaging process. The transparent acrylic polymer of the present invention is composed of 15 moles of hydroxyl-containing monomers, at least 15 moles of carboxyl-containing monomers, and 30-50 moles of tertiary butyl ester-containing monomers. It is obtained by copolymerizing a monomer mixture containing 5 to 20 mole percent of a phenyl-containing monomer and a balance of other suitable unsaturated monomers. The hydroxyl monomer suitable for use in the present invention may be any unsaturated monomer containing a hydroxyl group. A preferred hydroxyl-containing monosystem is selected from the group consisting of hydroxyl-substituted acrylates and alkyl acrylates, and a more preferred hydroxyl-containing monosystem is selected from 2- Hydroxyethyl propionate, 2-hydroxyethyl methacrylate, hydroxypropyl acrylate, hydroxypropyl methacrylate, hydroxybutyl acrylate, and hydroxybutyl methyl acrylate. The carboxyl monomer suitable for the present invention may be any unsaturated monomer containing a carboxyl group. A preferred carboxyl-containing monosystem is selected from the group consisting of acrylic acid, methacrylic acid, maleic acid, crotonic acid, arylene succinic acid, Titanate methacrylate, succinate methacrylate, and / 3-carboxyethyl methacrylate. The tertiary butyl ester-based monomer suitable for the present invention may be any unsaturated monomer containing a tertiary butyl ester group, and a preferred tertiary butyl ester-based mono system is selected from tertiary butyl acrylate, tertiary butyl methyl Acrylate, tertiary butyl acrylate ether, tertiary butyl fluorenyl acrylate, tertiary butyloxycarbonyloxystyrene, tertiary butyloxycarbonyloxy styrene, tertiary butyloxycarbonyl Oxyallyl ether, and tertiary butoxycarbonyloxy allyl ether. The phenyl monomer suitable for the present invention may be any unsaturated monomer containing a phenyl group, and a preferred phenyl-containing system is selected from benzyl acrylate and benzyl methacryl
1228641 五、發明說明（4)1228641 V. Description of Invention (4)
酸§旨 ' 茉A T X 力承基丙烯酸酯、及苯基甲基丙烯酸g旨。 、用本發明之其他合宜不飽合單體，塞 + 為丙稀酸翻0口祕 土 ，上 乂心 牛例e之’可以 _、甲體’較佳之丙嫦酸類單體係選自甲基丙烯酸 s旨、丙i:烯酸醋、乙基丙烯酸醋、乙基甲基丙烯酸 稀酸_ 丁醋、正丁基甲基丙稀酸醋、2-乙基已基丙 之聚人士其類似物。所需用之單體經混合後，利用已知 聚合；方:ί ’如陰離子聚合、陽離子聚合、或自由基加成 寻方法’得本發明之透明壓克力聚合物。 助於ΐίΓ之透明壓克力聚合物’因具有麵基，該基團有 子ι δ物分鏈於溶媒中延展開而形成立體障礙，使顏料 綠G處易再聚集沉澱，且可於濾光片材料硬化時參與交 ； …。若羥基含量過低，會造成交鏈不足，使塗膜硬产 :不耐化學侵蝕。若含量過高，則使聚合物包覆顏料 ^ 不良，致使分散之顏料顆粒不約小。除經基外本 物协f透明壓克力聚合物另具有羧基官能基，以助於聚合 声妊7^中分散乳化。含有苯基官能基，該基團與顏料具有 ^ ^子親和力，能促使聚合物快速潤濕顏料表面，使經 $ Hi散之顏料更易與聚合物吸附，產生穩定化功能，避 益肩7粒子再聚集成乂顆粒。若聚合物之苯基含量過低， 有效分散顏料，但若其含量過高，則聚合物會過於親 〜頭料，而使聚合物分子鍵無法延展開，失去安定化功 月匕’導至顏料沉澱。 本發明之彩色光阻，可用習知之顏料，其中較佳的為 4々員料如偶氮糸（azo)、蒽醌型（anthraquinone)、苯Acid § Purpose '' Moss A T X Li Cheng acrylate, and phenyl methacrylic acid g. Using other suitable unsaturated monomers of the present invention, the plug + is acrylic acid, which can be turned into a secret soil, and the preferred single-system of malonic acid in the example of the above can be selected from the group A Acrylic acid, acrylic acid: acrylic acid vinegar, ethyl acrylic acid vinegar, ethyl methacrylic acid butyl acetate, n-butyl methyl acrylic acid vinegar, 2-ethylhexyl propylene polymer and the like. After the monomers to be used are mixed, the known polymerization is used; the formula: ‘such as anionic polymerization, cationic polymerization, or radical addition method’ to obtain the transparent acrylic polymer of the present invention. The transparent acrylic polymer that helps ΐΓΓ has a surface group, and the group has a branch of δ δ, which is extended in the solvent to form a steric obstacle, which makes the pigment green G easy to re-aggregate and precipitate, and can be filtered. Participate in the sheet material when it hardens;…. If the hydroxyl content is too low, it will cause insufficient cross-linking and make the coating film hard: not resistant to chemical attack. If the content is too high, the polymer-coated pigment is not good, and the dispersed pigment particles are not about small. In addition to the base group, the transparent acrylic polymer has a carboxyl functional group to help the polymerization and dispersion emulsification. Contains phenyl functional group, this group has ^ ^ affinity for the pigment, can prompt the polymer to quickly wet the pigment surface, make the pigment dispersed by $ Hi more easily adsorbed with the polymer, and produce a stabilizing function, avoiding 7 particles Re-aggregate into thorium particles. If the phenyl content of the polymer is too low, the pigment will be effectively dispersed, but if the content is too high, the polymer will be too close to the top material, so that the molecular bond of the polymer cannot be extended, and the stability will be lost. Pigment precipitation. The color photoresist of the present invention may be a conventional pigment, and among them, a 4-member material such as azo, anthraquinone, and benzene is preferred.
第7頁 1228641 五、發明說明（5) 二曱基藍型（phthalocyanine)、口比略啉（perylene)、硫石定 系（thioindigo)、鹵化苯二甲基藍型（halohenatyed phthalocyanine)、及其衍生物等有機系顏料。依（Color Index)編號，有紅色顏料9、122、123、147、155、168、 177 、 180 、 217 、 220 、 224 、 254;黃色顏料20 、 24 、 83 、 93 、 1〇9 、 110 、 117 、 125 、 138 、 139 、 147 、 150 、 154;綠 色顏料7、36;藍色顏料 15、15:3、15:4、15:6、22 6、； ，色顏料1 9、2 3、2 9、3 7、5 0等。黃色顏料可用作紅色及 、、彔色感光組成物之調色，其比例為黃色與紅色或黃色與綠Page 7 1228641 V. Description of the invention (5) Diophthalocyanine, perylene, thioindigo, halohennatyed phthalocyanine, and the like Derivatives and other organic pigments. According to the (Color Index) number, there are red pigments 9, 122, 123, 147, 155, 168, 177, 180, 217, 220, 224, 254; yellow pigments 20, 24, 83, 93, 1109, 110, 117, 125, 138, 139, 147, 150, 154; green pigment 7, 36; blue pigment 15, 15: 3, 15: 4, 15: 6, 22 6, 6 ,; color pigment 1 9, 2 3, 2 9, 3 7, 50 and so on. The yellow pigment can be used as a tint for red, and ochre photosensitive compositions, and its ratio is yellow and red or yellow and green
色彥員料總量之5 0重量百分比以下。同樣的，紫色顏料可用 作&色感光組成物之調色，其比例為紫色與藍色顏料總量 之50重量百分比以下。 程，製 色光阻 加入光 氟銻酸 氟碟酸 基環已 本 酮、乙 乙酸酯 酯、3-本 色光阻 作輪廓 亦包含 增感劑 鹽、三 鹽。適 烷苯基 發明之 二醇曱 、丙二 乙氧基 發明之 另一重要特性為顯 清晰的 光聚合 。適用 芳香基 用之光 酮、及 彩色光 醚、乙 醇甲醚 丙酸丁 彩色光 彩色晝素， 起始劑，為 之光酸起始 硫化六氟錄 增感劑係選 其衍生物。 阻，其適用 二醇***、 乙酸自旨、乙 酯、及3-甲 阻可視需要 影性質，利用光蝕刻製 為此目地，本發明之彩 光酸起始劑或光酸起始劑 劑係選自二芳香基碘化六 酸鹽、及三芳香基硫化六 自惠、惠的衍生物、1 -經 之有機溶劑係選自環已 乙二醇丁醚、整儿醇單醚 基乙氧基乙醇乙酸 氧基丁基乙酸酯。 包含其他組成，如填充Less than 50% by weight of the total color materials. Similarly, the purple pigment can be used as a color tone for & color photosensitive composition, and the proportion is less than 50% by weight of the total amount of the purple and blue pigments. Process, color-making photoresist Add photo fluoroantimonic acid, fluoric acid, cyclohexyl ketone, ethyl acetate, 3-naphthalene photoresist for contouring. It also contains sensitizer salt and trisalt. Another important characteristic of the diol and propylene glycol ethoxylate invention is the clear photopolymerization. Applicable for aromatic groups. Ketones, and colored light ethers, ethyl glycol ethers, butyl propionate, colored light, color day pigments, and initiators. The photoacid starting hexafluorosulfide sensitizers are selected as their derivatives. It is suitable for glycol ether, acetic acid, ethyl ester, and 3-methyl-resistance depending on the required properties. For this purpose, the photochromic acid initiator or photoacid initiator of the present invention is prepared by photolithography. It is selected from the group consisting of diaryl iodide hexanate, triaryl sulfide hexazene, hexadeuterium derivatives, and 1-pass organic solvents which are selected from cyclohexylene glycol butyl ether, and holanol monoether ethoxylate. Ethyl ethanol acetate oxybutyl acetate. Contains other components such as padding
12286411228641
平坦劑、消泡劑、 物、界面活性劑、顏料分散劑 增進劑、及料光吸收劑等。 本發明之前述多计 、 施例的敘述將更為龜2他目的及特徵經由以下針對較佳實 以例示說明本發明理應了解的是’料敘述僅係用 之對發明範圍作任何：2狀況下的操作結果，而非企圖以 之修飾及纟H^制，其他在不脫離發明精神下所作 實施例一 白屬本發明意圖保護者。 於反應瓶中，將下列壓克力單體：5份之2 -羥基乙美甲 基丙卸酸酉旨、1 〇份之甲装 /分r Λ yv .Leveling agent, defoaming agent, substance, surfactant, pigment dispersant enhancer, and light absorber. The foregoing descriptions of the present invention with multiple plans and embodiments will be more detailed. The purpose and characteristics of the present invention should be understood by exemplifying the present invention through the following for better practice: 'The material description is only used to make any scope of the invention: 2 conditions The results of the following operations are not intended to be modified or modified. Other embodiments made without departing from the spirit of the invention are intended to be protected by the present invention. In the reaction flask, put the following acrylic monomers: 5 parts of 2-hydroxyethmethylene propionate, 10 parts of nails / min r Λ yv.
^ 基丙烯酸、50份之三級丁基甲基丙 烯酸酯、及35份之苄基甲基丙烯酸酯混合，加入40份之丙 二醇曱醚乙酸酯溶劑溶解，在氮氣中加入重量百分比為〇· 2 5 =光聚合起始劑偶氮二異丁腈，於8 〇它下反應五小時， 得壓克力共聚合物，以丙二醇甲醚乙酸溶劑稀釋至共聚物 濃度為2 0 %。 ^ 取合成之共聚物9 2克、紅色顏料1 7 7 5克、黃色顏料 1 5 0 1克、及分散劑BYK 1 6 1 2克置於研磨機中完全混合。 取研磨混合液1 0 0克，加入5克之二芳香基碘化六氟銻酸鹽 及2克之1 -經基環己烧苯基酮，得紅色光阻液。^ Acrylic acid, 50 parts of tertiary butyl methacrylate, and 35 parts of benzyl methacrylate were mixed, 40 parts of propylene glycol ether ether acetate solvent was added to dissolve, and a weight percentage of 0.25 was added in nitrogen. = Azobisisobutyronitrile, a photopolymerization initiator, was reacted at 80 ° C for five hours to obtain an acrylic copolymer, which was diluted with propylene glycol methyl ether acetic acid solvent to a copolymer concentration of 20%. ^ Take 92 g of the synthesized copolymer, 175 g of the red pigment, 501 g of the yellow pigment, and 1 2 g of the dispersant BYK 1 6 1 2 and mix thoroughly in a mill. Take 100 grams of the grinding mixture, add 5 grams of the diaryl iodide hexafluoroantimonate and 2 grams of 1-cyclohexanyl phenyl ketone to obtain a red photoresist solution.
實施例二 如實施例一之方法，但其中改用綠色顏料3 6 4. 8克及 黃色顏料150 1.2克，分散劑為Solsperse 2400 0及 Solsperse 5000，得綠色光阻液。 實施例三Example 2 The method is the same as in Example 1, except that the green pigment 3 6 4. 8 g and the yellow pigment 150 1.2 g are used instead. The dispersants are Solsperse 2400 0 and Solsperse 5000, and a green photoresist is obtained. Example three
第9頁 1228641 發明說明（7) 如實施例二之方法，但其中改用藍色顏料丨5 ·· 6 5 · 6克 及紫色顏料2 3 0· 4克，得藍色光阻液。 實施例四Page 9 1228641 Description of the invention (7) As in the second embodiment, the blue pigment 5 ·· 6 5 · 6 g and the purple pigment 2 3 0 · 4 g are used instead to obtain a blue photoresist solution. Example 4
利用旋轉塗佈的方式，將紅色光阻液在8 〇 〇 rpm下旋轉 塗佈30秒在TFT玻璃基板上，於9〇它中烘烤1〇分鐘。將一 個具有許多不同解析度圖的測試光罩放在塗佈的紅色光阻 層上，以超高壓水銀燈作為光源，在曝光密度8〇〇m j/cm2 下，透過照相型板上的開孔，進行選擇性曝光，於丨3 〇它 烘烤10分鐘硬化。以2· 5wt%氫氧化四曱銨為化學蝕刻劑， 進行顯像工程，用去離子水清洗基板，旋轉乾燥，在2 〇 〇 艺烘烤40分鐘，得重覆但不連續的紅色濾光區。重覆上述 步驟，在基板上不同位置分別製作綠色濾光區及藍色濾光 區’得彩色慮光片。 將％色濾光片進行測試，顯示其可耐2 5 〇的溫度5 〇 分鐘，且其介電常數⑽<3· 5，解析度可達5um以下。厚度 2um的紅、綠、藍濾光層的穿透率分別為95%、8〇%、及 80% 。 實施例五 於反應瓶中，將下列壓克力單體：1〇份之2—羥基乙基 甲基丙烯酸酯、20份之丙烯酸、4〇份之三級丁基甲基丙烯 酸酯、及30份之苄基甲基丙烯酸酯混合，加入4〇份之丙二 醇甲醚乙酸酯溶劑溶解，在氮氣中加入重量百分比為〇.25 的光聚合，始劑偶氮二異丁腈，於8〇它下反應五小時，得 壓克力共聚合物，以丙二醇甲醚乙酸溶劑稀釋至共聚物濃Using a spin coating method, a red photoresist solution was spin-coated at 800 rpm for 30 seconds on a TFT glass substrate, and baked in 90 minutes for 10 minutes. A test mask with many different resolution maps was placed on the coated red photoresist layer, and an ultra-high pressure mercury lamp was used as the light source, and the exposure density was 800 mj / cm2 through the openings in the phototype plate. Selective exposure is performed, and it is baked for 10 minutes to harden. 2.5 wt% tetraammonium hydroxide was used as a chemical etchant to carry out the development process. The substrate was washed with deionized water, spin-dried, and baked at 2000 for 40 minutes to obtain a repeated but discontinuous red filter. Area. By repeating the above steps, a green filter region and a blue filter region 'are respectively prepared at different positions on the substrate to obtain a color filter. The% color filter was tested to show that it can withstand a temperature of 250 for 50 minutes, and its dielectric constant ⑽ < 3.5, with a resolution of up to 5um. The transmittances of the red, green, and blue filter layers with a thickness of 2um are 95%, 80%, and 80%, respectively. Example 5 In a reaction bottle, the following acrylic monomers were used: 10 parts of 2-hydroxyethyl methacrylate, 20 parts of acrylic acid, 40 parts of tertiary butyl methacrylate, and 30 parts of Benzyl methacrylate was mixed, 40 parts of propylene glycol methyl ether acetate solvent was added to dissolve, and photopolymerization with a weight percentage of 0.25 was added in nitrogen. The starting agent was azobisisobutyronitrile. After reacting for five hours, acrylic copolymer was obtained and diluted with propylene glycol methyl ether acetic acid solvent until the copolymer was concentrated.
第10頁 1228641 五、發明說明（8) 度為20%。 取合成之共聚物92克、紅色顏料1 77 5· 8克、黃色顏 料150 1· 2克、及分散劑BYK161 1克置於研磨機中完全混 合。取研磨混合液1 〇 0克，加入5克之三芳香基硫化六氟璘 酸鹽、2克之1-羥基環己烷苯基酮、及〇·3克蒽，完全授 拌，得紅色光阻液。 實施例六 如實施例一之方法，但其中改用綠色顏料3 6 5 · 6克及 頁色顏料150 1·4克’分散劑為Solsperse 24000及 Solsperse 5000，得綠色光阻液。 實施例七 如實施例二之方法，但其中改用藍色顏料丨5 : 6 6 . 5 3 克及紫色顏料23 0· 47克，得藍色光阻液。 實施例八 如實施例四之方法，將實施例五〜七所得之紅、綠 藍光阻液製作彩色濾光片。 將彩色濾光片進行測試，顯示其可耐2 5 的溫声π 分鐘’且其介電常數Μ<3.5，㈣度可達5um以的下。度厂】0度 2um的紅、綠、藍濾光層的穿透率分別為“％、、及 雖然本發明已以較佳實 限定本發明，任何熟習此項 神和範圍内，當可作更動與 當視後附之申請專利範圍所 施例揭露如上，然其並非用以 技藝者，在不脫離本發明之精 潤飾’因此本發明之保護範圍 界定者為準。Page 10 1228641 V. Description of the invention (8) The degree is 20%. Take 92 g of the synthesized copolymer, 1 77 5 · 8 g of red pigment, 150 1 · 2 g of yellow pigment, and 1 g of dispersant BYK161 in a mill and mix thoroughly. Take 1000 grams of the grinding mixture, add 5 grams of triarylsulfide hexafluorosulfonate, 2 grams of 1-hydroxycyclohexane phenyl ketone, and 0.3 grams of anthracene, mix thoroughly to obtain a red photoresist solution . Example 6 The method of Example 1 was used, but the green pigment 3 6 5 · 6 and the page pigment 150 1 · 4 g were used as the dispersant Solsperse 24000 and Solsperse 5000 to obtain a green photoresist. Example 7 The method of Example 2 was used, but a blue pigment 5: 6 6 .53 g and a purple pigment 23 0. 47 g were used instead to obtain a blue photoresist solution. Embodiment 8 As the method of Embodiment 4, the red, green, and blue photoresist liquids obtained in Examples 5 to 7 are used to make a color filter. The color filter was tested to show that it can withstand a temperature sound of 2 5 π minutes', and its dielectric constant M < 3.5, and the degree of chirp can be less than 5um. Degree factory] The transmittance of the red, green, and blue filter layers at 0 degrees and 2um is "%," and although the present invention has been defined with a better sense of the invention, anyone familiar with this god and scope can be used as Modifications and examples of the scope of the patent application attached below are disclosed as above, but they are not intended to be used by artists, without departing from the refined decoration of the present invention. Therefore, the scope of protection of the present invention shall prevail.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8383303B2 (en) | 2010-12-10 | 2013-02-26 | Chunghwa Picture Tubes, Ltd. | Color filter plate |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8383303B2 (en) | 2010-12-10 | 2013-02-26 | Chunghwa Picture Tubes, Ltd. | Color filter plate |
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