TWI226870B

TWI226870B - Transfer apparatus

Info

Publication number: TWI226870B
Application number: TW92127270A
Authority: TW
Inventors: Tsung-Lin Lu; Ying-Chi Chen; Shiang-Chiang Liu
Original assignee: Au Optronics Corp
Priority date: 2003-10-02
Filing date: 2003-10-02
Publication date: 2005-01-21
Also published as: TW200513422A

Abstract

A transfer apparatus includes a first supporting unit. The first supporting unit has a first supporting pin set and a second supporting pin set. Both supporting pin sets simultaneously support a substrate, and the top end of the first supporting pin set is higher than that of the second supporting pin set.

Description

1226870 發明說明（1) 【1¾明所屬之技術領域】十I本發!!係有闕於一種搬移裝置，特別有關於一種藉由是丈支撐單元對於放置在卡匣内之複數物件進行搬移且確，物件在搬移的過程中不會與卡匣產生碰撞之搬移裝置。【先前技術】 ^ ί《電子產品之面板具有一玻璃基板，在目前發展的 ΐ 此？璃基板厚度愈來愈薄，藉此降低產品的尺寸 ^以薄膜電晶體液晶顯示器（TFT-LCD )之製造過 t. ^ ^面板用之破璃基板或其他板狀物件係放置於承載卡匣中’進而再利用機械手臂來搬運或存取基板。圖2”’複數玻璃基板⑷咖Subst_) 一框加l〇V冉及：係收容於一卡EC之中。+ 包括有 /木及禝數個支撐部101，、102，，其中，框架100，係為一矩型構件，複數j ^ y ’、内側壁u(r、120’之上，而將框竿 w r j/刀成稷數隔層105，每一隔層105呈古声、1226870 Description of the invention (1) [1¾ The technical field to which the Ming belongs] The tenth issue !! It is related to a moving device, and particularly relates to a method for moving a plurality of objects placed in a cassette by a support unit and Indeed, the moving device does not collide with the cassette during the moving process. [Previous technology] ^ "The panel of electronic products has a glass substrate. What is the current development? The thickness of the glass substrate is getting thinner and thinner, thereby reducing the size of the product. ^ Manufactured with a thin-film transistor liquid crystal display (TFT-LCD). Medium 'and then use the robotic arm to carry or access the substrate. Figure 2 "'Multiple glass substrates Subst_) A frame plus 10V and: It is housed in a card EC. + Including / wood and several support parts 101, 102, of which frame 100 Is a rectangular member with a plurality of j ^ y ′ and inner walls u (r, 120 ′), and the frame rod wrj / knife is divided into a number of interlayers 105, each of which has an ancient sound,

Hp(cassette pitch)。 ’ 间度每一基板&係由高度相同之支撐部ι〇ι，古撐。為了避免基板&於搬運過程 2所支必需要適當之設計以配人卡匣^ 1卡匣c ,機械手臂镇1R岡鏃-竑山卡内之各隔層105的高度Η 。乐1Β圖顯不猎由習用機械手臂 ^Ηρ 板^進行搬移時之前視圖。機、 c内之破璃基 ^ ^ ^ ^ ^ -之間相隔一既定距離W，。第一 # ，、乐一支撐單元6 弟支撐早元5包括有_第_主Hp (cassette pitch). ’Interval Each substrate & is supported by the same height of the support section, ancient. In order to avoid the substrate & supporting in the transportation process 2, an appropriate design must be provided to match the cassette ^ 1 cassette c, the height of each compartment 105 in the robot arm 1R Gang 镞-竑山 card. The front view of Le 1B is not shown when it is moved by the conventional robotic arm ^ Ηρ plate ^. Machine, c, the broken glass base ^ ^ ^ ^ ^-separated by a predetermined distance W ,. The first #, Leyi support unit 6 brother support early yuan 5 includes _ 第 _ 主

0632-10387TWf(nl) ； AU0305001 ： YUCHIA.ptd 12268700632-10387TWf (nl); AU0305001: YUCHIA.ptd 1226870

五、發明說明（2) 體50與兩組支撐銷51、52，V. Description of the invention (2) The body 50 and two sets of support pins 51, 52,

Pins)5l、52係以相互古、、中，支撐銷（supporting 第二組支撐單元6包二μ式凸設於第一主體50之上。 ’其中，支撐銷61、62係二主體60與兩支撐銷61、62 60之上。一般而言，第一、支間隔方式凸設於第二主體相同的結構，第一、望-姜單元5與第二支撐單元6具有於同-水平面的方式進J單^5、6係以互相平行且位、62均採用等高度、等長；之設J且各支撐銷51、52、61 元5Λ#Λ機Λ手於基“進行搬移時，第一支標單 (重量、;間心離，根據基板之幾何結構 ^ S -, η ^ \ ，、疋，於此將第一支撐單元5與第二支撑早7L 6之間的距離定義為w，。臂在至的存放作業時，載運著基板S1的機械手 /達私足之隔層105後即伸入於卡匣c，然後將基板s 放置於支撐部101’ 、1〇2’之上，如此便完成存放作業。反之田欲由卡匣c中取出基板S!時，機械手臂將伸入卡匣〔内之指定基板S!的正下方，進而利用第一支撐單元5、第二支撐單元6.上的支撐銷51、52、61、62將基板Si撐起，再& 基板S!移出卡匣C外。然而，由於基板Si係藉由卡匣c兩内側壁丨丨〇，、i 2 〇，上之支撐部101’ 、102’來支撑，在自身重力的作用下，基板Pins) 5l, 52 are mutually ancient, middle, and supporting pins (supporting the second group of supporting units 6 packs of two μ-type protruding on the first body 50. 'Among them, the supporting pins 61, 62 are two bodies 60 and 60 The two support pins 61, 62 and 60. Generally speaking, the first and the branch spaces are convexly arranged on the same structure of the second body, and the first and the second-supporting units 5 and 6 have the same-horizontal structure. The way to enter J ^ 5 and 6 are parallel to each other and the position, 62 are of equal height and equal length; the setting is J and each support pin 51, 52, 61 yuan 5Λ # Λ 机 ΛHands on the base, The first order (weight, center distance, according to the geometric structure of the substrate ^ S-, η ^ \ ,, 疋, here is the distance between the first support unit 5 and the second support 7L 6 as When the arm is in the storage operation, the manipulator carrying the substrate S1 / the compartment 105 reaching the private foot is inserted into the cassette c, and then the substrate s is placed on the supporting portions 101 ′ and 102 ′. Then, the storage operation is completed. On the other hand, when Tian wants to take out the substrate S! From the cassette c, the robot arm will extend directly below the designated substrate S! In the cassette [ Furthermore, the supporting pins 51, 52, 61, 62 on the first supporting unit 5 and the second supporting unit 6 are used to support the substrate Si, and the substrate S! Is removed from the cassette C. However, since the substrate Si is borrowed Supported by the support portions 101 ', 102' on the two inner side walls of the cassette c 丨丨, i 2 〇, under the action of its own gravity, the substrate

Si中央位置部分會略微向下凹陷。此外，由於近年來玻璃基板的尺寸從第2 · 5代（3 7 0 mm X 4 7 0 mm )、第三代（5 5 〇 _ X 6 5 0 mm )、第 3 · 5 代（6 6 0 mmThe central part of Si will be slightly depressed. In addition, in recent years, the size of glass substrates has changed from the second and fifth generations (370 mm X 470 mm), the third generation (55 0 mm

0632-10387TWf(nl) : AU0305001 : YUCHIA‘ptd0632-10387TWf (nl): AU0305001: YUCHIA‘ptd

1226870 五、發明說明（3) X 7 2 0 mm )、*** rKQn1226870 V. Description of the invention (3) X 7 2 0 mm), the fourth generation rKQn

Cl 100 mix 1 2 5 0 mm )，8 8 0咖）到現在的第五代為變到現在的0 . 4 mm。卷+璃基板的厚度由早期的0 · 7 mm演玻璃基板之中間部位田。㈤基板尺寸越大、厚度越薄時，由此可知，當:垂比例會愈來愈大。時，基板S]的兩端段;手大且薄之I板\進行托舉知，IU系定義為基dm彎曲：由第K圖中可在搬移過程中可以农 1垂的距離。為使得基板SiCl 100 mix 1 2 5 0 mm), 8 8 0 coffee) to the current fifth generation is changed to the current 0.4 mm. The thickness of the roll + glass substrate was calculated from the early 0.7 mm in the middle of the glass substrate.越大 The larger the substrate size and the thinner the thickness, it can be seen that the ratio: At the same time, the two end sections of the substrate S]; the large and thin I-plate \ lifting. It is known that IU is defined as the base dm bending: from Figure K, it can be used for a vertical distance during the moving process. To make the substrate Si

Hc。唯有加大卡^之全久地5脫思離卡Μ，則距離Hp必須大於之各層1 〇 5的間隔冥；# ff , Λ. 地使基板&之段部Ε丨、Ε2移出卡£C。口又。才此女全 si'另方式疋加大第一支樓單元5盥第罝一 β 之，的距離W’ ’使基板^之合、支：：：6 但是如果加大距離w，，匕2不㈢嚴重向下穹曲，間的中間段部下垂更A ::支：早元5與第二支撐單元6之 Hp或是增加距離^ ’不論是加大間隔高度卡匣C之重量。 θ a力卡匣C之尺寸，同時也提高整體反之’如果不增加卡匣c的高度戋宽璃基板\之兩端衮g| 次見度則又會有玻玻璃美板S 的支撐部101，、102’使得玻之兩端段部E1、心容易破碎，造成生產良率降低亚且/良費材料以及延遲製程時間的問題。【發明内容】單元本發明搬移裝置之目的在於藉由複數支樓早兀對於放置在卡g内之複數物件進行搬移，i且確保物Hc. Only if the card is enlarged for 5 minutes, the distance Hp must be greater than the interval of each layer of 105; # ff, Λ. Ground the substrate & sections Ε 丨, Ε2 to remove the card. C. Mouth again. In this way, the women ’s all-rounder si’another way to increase the distance W ′ of the first branch unit 5 to the first β, so that the base plate ^ is combined and supported :: 6 But if the distance w is increased, dagger 2 Without serious downward curvature, the middle part of the sagging is more A :: Support: Hp of the early element 5 and the second support unit 6 or increase the distance ^ 'Whether it increases the weight of the cassette height C. θ a force of the size of the cassette C, and at the same time improve the overall converse 'If you do not increase the height of the cassette c 戋 wide glass substrate \ both ends 衮 g | visibility, there will be a glass glass US plate S support 101 , 102 'makes the ends E1 and E of the two ends of the glass easy to break, resulting in lower production yields and / or good materials and delays in processing time. [Summary of the Invention] The purpose of the moving device of the present invention is to move a plurality of objects placed in the card g by a plurality of branches, i, and secure the objects.

0632-10387Wf(nl) : AU0305001 ; TOCHlA.ptcl 第7頁 1226870 五、發明說明（4) 件在搬移的過程中不會與卡匣產生碰撞。本發明搬移裝置之另一目的係在於改變被承載的物件之形狀，使物件的兩端段部減少向下彎曲，盡量接近水平，使承載在搬移裝置上的物件與放置於卡匣上的物件形狀盡量接近。本發明之另一目的在於可以縮短卡匣之隔層高度，進而降低卡匣整體高度及減輕重量。本發明之又一目的在於增加卡匣之隔層數量，進而增加可容納之物件片數。本發明之又一目的在於使物件之兩端的變形量減少，進而減少搬運時的震動量，有助於增加承受力。為達成上述目的，本發明提供一種搬移裝置，用以搬移一物件，包括複數第一支撐單元，各第一支撐單元具有一第一主體、一第一組支撐銷及一第二組支撐銷，且第一組、第二組支撐銷由第一主體延伸而出，以支撐物件，且第一組支撐銷之頂面較第二組支撐銷為高。又，第一組支撐銷及第二組支撐銷具有相同長度，第一主體傾斜一既定角度，使得第一組支撐銷之頂面較該第二組支撐銷為高。此既定角度係根據物件的長度、厚度、重量及材料而決定。在上述實施例中，藉由改變搬移裝置之第一、第二支撐單元，使第一、第二支撐單元向卡匣中間傾斜至一既定角度，可以使搬移裝置上之物件的中心點下垂更少，物件兩端侧向上提高，使形狀更接近於放置於卡匣上的基板物0632-10387Wf (nl): AU0305001; TOCHlA.ptcl Page 7 1226870 V. Description of the invention (4) The item will not collide with the cassette during the moving process. Another purpose of the moving device of the present invention is to change the shape of the object being carried, reduce the downward bending of the two end sections of the object, and try to be as close as possible to the level of the object carried on the moving device and the item placed on the cassette. The shapes are as close as possible. Another object of the present invention is to shorten the height of the compartment of the cassette, thereby reducing the overall height of the cassette and reducing the weight. Another object of the present invention is to increase the number of compartments of the cassette, thereby increasing the number of objects that can be accommodated. Another object of the present invention is to reduce the amount of deformation at both ends of the object, thereby reducing the amount of vibration during transportation, and helping to increase the bearing capacity. To achieve the above object, the present invention provides a moving device for moving an object, including a plurality of first support units, each of which has a first body, a first group of support pins, and a second group of support pins, The first group and the second group of support pins extend from the first body to support the object, and the top surface of the first group of support pins is higher than the second group of support pins. In addition, the first group of support pins and the second group of support pins have the same length, and the first body is inclined at a predetermined angle, so that the top surface of the first group of support pins is higher than the second group of support pins. The predetermined angle is determined according to the length, thickness, weight and material of the object. In the above embodiment, by changing the first and second supporting units of the moving device, the first and second supporting units are inclined toward the middle of the cassette to a predetermined angle, so that the center point of the object on the moving device can be drooped more Less, both ends of the object are raised upwards, making the shape closer to the substrate object placed on the cassette

0632-10387TvVf(nl) ： AU0305001 ： TOCHIA.ptcl 第8頁 1226870_ 五、發明說明（5) 件之形狀。在一較佳實施例中，本發明提供一種搬移裝置，用以搬移一物件，包括至少一第一支撐單元，第一支撐單元具有一第一主體、一第一組支撐銷及一第二組支撐銷，且第一組、第二組支撐銷由第一主體延伸而出，以支撐物件，第一組支撐銷之長度較該第二組支撐銷為長，使第一組支撐銷之頂面較第二組支撐銷為高。第一組支撐銷與第二組支撐銷之長度差距係根據物件的長度、厚度、重量及材料而決定。在上述實施例中，使搬移裝置上之第一組、第二組支撐銷之長度不同，位於外侧之第一組支撐銷較為高，内側之第二組支撐銷較低，達到如同上述第一實施例之效果。在另一較佳實施例中，本發明提供一種搬移裝置，用以搬移一物件，包含至少一第一支撐單元，第一支撐單元包括一第一主體、一第一組支撐銷及一第二組支撐銷，第一組、第二組支撐銷由第一主體延伸而出，以支撐物件，第一組支撐銷之一部分連結在第一主體的正上方，其他部分則懸空。又，第一組支撐銷之寬度大於第二組支撐銷之寬度。第一支撐銷之寬度係根據物件的長度、厚度、重量及材料而決定。在上述實施例中，伴隨著加大第一支撐銷之寬度或直徑，使物件之支撐點向外端兩侧延伸，物件之兩端的變形量減少，進而減少搬運時的震動量，有助於增加承受力。0632-10387TvVf (nl): AU0305001: TOCHIA.ptcl Page 8 1226870_ 5. Description of the invention (5) Shape of the piece. In a preferred embodiment, the present invention provides a moving device for moving an object, including at least a first supporting unit, the first supporting unit having a first body, a first group of supporting pins, and a second group Support pins, and the first and second sets of support pins extend from the first body to support the object. The length of the first set of support pins is longer than the second set of support pins, so that the top of the first set of support pins The surface is higher than the second group of support pins. The length difference between the first group of support pins and the second group of support pins is determined based on the length, thickness, weight and material of the object. In the above embodiment, the lengths of the first group and the second group of support pins on the moving device are different. The first group of support pins located on the outer side is higher, and the second group of support pins on the inner side is lower, as in the first group. Effect of the embodiment. In another preferred embodiment, the present invention provides a moving device for moving an object, including at least a first support unit. The first support unit includes a first body, a first set of support pins, and a second The first group and the second group of support pins extend from the first body to support the object. One part of the first group of support pins is connected directly above the first body, and the other parts are suspended. Also, the width of the first group of support pins is greater than the width of the second group of support pins. The width of the first support pin is determined according to the length, thickness, weight and material of the object. In the above embodiment, as the width or diameter of the first support pin is increased, the support points of the object are extended to both sides of the outer end, the amount of deformation at both ends of the object is reduced, thereby reducing the amount of vibration during transportation, which helps Increase bearing capacity.

0632-10387TWf(nl) ： AU0305001 ： YUCHIA.ptd 第9頁 1226870 五、發明說明（6)0632-10387TWf (nl): AU0305001: YUCHIA.ptd Page 9 1226870 V. Description of the invention (6)

為使本發明之上述及A 易懂，下文特舉數個具體特徵和優點能更明顯做詳細說明。較^貫施例，並配合所附圖式【實施方式】於以下本發明之各徐 ^ 液晶顯示器（TFT-LCD )的主要是應用在薄膜電晶體分別對於各卡匣（c 、C 、衣化過程，藉由各搬移裝置以In order to make the above and A of the present invention easy to understand, several specific features and advantages will be more clearly described in detail below. The following examples are given in conjunction with the accompanying drawings. [Embodiment] The following liquid crystal displays (TFT-LCD) of the present invention are mainly applied to thin film transistors for each cassette (c, C, and clothing). Process, with each moving device to

板或其它類似之板件)進行2 :之物件S(例如：玻璃基 A、C2、C3)内部進行上下【承各搬移裝置係可在卡E 進扞在取水平移動，如此以對於物件s 進订存取。搬移裝置係為機械手臂。狀婦以下以具體之實施例，士 ^ 以詳細說明。、對本鲞明揭示之各形態内容加第一實施例 3〇第2A圖’搬移裝置正位於卡㈣内的其中一隔層 ::巧卡二'内的其中-物件S。搬移裝置包括至少- 一二支撐單元2，第-支樓單元1包括- _ D 弟、，且支撐銷1 1及一第二組支撐銷1 2。第撐Γ:2則包括：第二主體2〇、-第三組支撐鎖21及弟:’、且支撐銷2 2。第二組支撐銷丨2及第四組支撐銷2 2曰位於第一組支撐銷11及第三組支撐銷2 1之間。換言之，^ 一組支撐銷1 1較靠近卡匣Ci的内侧壁丨丨〇，而第三缸 21較靠近内側壁丨20。第一組支撐單元1與第二組支撐單牙元 2之間的距離為w。目前之搬運裝置的支撐單元之間的距= W 可為620mm 、 600mm 、 640mm 。Board or other similar plates) to perform 2: up and down inside the object S (for example: glass-based A, C2, C3) [the moving devices can be moved horizontally in the card E, so as to the object s Subscription access. The moving device is a robot arm. The following examples will be described in detail below. 1. Add the contents of the various forms disclosed in the present invention to the first embodiment 30. FIG. 2A FIG. 2 'The moving device is located in one of the compartments inside the card: :: Qiao card two'-the object S. The moving device includes at least-one or two support units 2, and the first branch unit 1 includes-D brothers, and support pins 11 and a second group of support pins 12. The first support Γ: 2 includes: the second body 20, the third group of support locks 21, and the younger: ', and the support pin 22. The second group of support pins 丨 2 and the fourth group of support pins 22 are located between the first group of support pins 11 and the third group of support pins 21. In other words, a set of support pins 11 is closer to the inner side wall of the cassette Ci, and the third cylinder 21 is closer to the inner side wall. The distance between the first group of supporting units 1 and the second group of supporting single teeth 2 is w. The distance between the supporting units of the current handling devices = W can be 620mm, 600mm, 640mm.

0632-10387T\Vf(nl) ； AU0305001 : YUCHlA.ptd 第10頁 12268700632-10387T \ Vf (nl); AU0305001: YUCHlA.ptd page 10 1226870

五、發明說明（7) 第四組:二 A及⑼圖。第—組、第二組、第三組及物件s的币牙/11、12、21及22具有相同長度h。為了減少一端ρ Λ 部ElA向下彎曲的#呈度（也就是使物件S的接=到Γ組支樓單元1之頂面13之垂直距離^實質ΐ 物isVJ 在搬移裝置上的物件s與放置於卡畔上的 ;ΐ二盡量接近)，本… 二支定角度Θ:使得卜樓銷u之頂面較第，傾斜一既定角度Θ，使得第三J2;;= 的中V. Explanation of the invention (7) The fourth group: two A and the figure. The teeth of the first group, the second group, the third group and the object s / 11, 12, 21 and 22 have the same length h. In order to reduce the #degree of the downward bending of ElA at one end ρ Λ (that is, make the connection of the object S = the vertical distance to the top surface 13 of the branch unit 1 of the Γ group ^ substantially) the object isVJ and the object s on the moving device and Placed on the card side; ΐ 二 is as close as possible), this ... Two fixed angles Θ: make the top surface of the pin b u more inclined than the first, tilt a predetermined angle Θ, so that the third J2 ;; = of the middle

r組支撐銷22為高。本發明經過實驗以：I 之=角度θ，此既定角度㈣根據物件s的十長TV；同 Μ ^、卜材料及第一支撐單元1舆第二支撑單元2之間的距 :w而決定。詳而言之，W長度之載重、物1白”上 ^兀1及2之支承位置、段部Ει及匕的長度及重量等夂芽 W長度之載重平衡下可使得物件3的二末趨於水平。因此，此實施方式可適用種2/、撓角可格。 I用於各種破螭基板規總之，第一實施例是藉由改變搬移裝置的第一、^ 一主體10、20的傾斜角度，可以使物件s的兩端段乐、、:了上提高接近水平狀態，並且使位於第一、第- 1 2在 ^ _ φ ^ 1 (1 v 〇 Π 之間的物件S的中間段部也不會嚴重下垂。如此，^ 物件s與其正下方物件s的距離會增加，因此片 u J以备百小卡臣The r-group support pins 22 are high. The experiment of the present invention is based on: I = angle θ, the predetermined angle ㈣ is determined according to the ten long TVs of the object s; the distance between the first support unit 1 and the second support unit 2 and the second support unit 2: w . To put it in detail, the load of W length, the weight of object 1 is white, the support position of Wu 1 and 2, the length and weight of segment E and the length and weight of the sprocket, and the weight of W length can make object 3 the second trend. It is horizontal. Therefore, this embodiment is applicable to a variety of 2 /, deflection angle is acceptable. I is used for various broken substrates. In short, the first embodiment is to change the first, main body 10, 20 of the moving device. The inclination angle can make the two ends of the object s close to the horizontal state, and make it located in the middle of the object S between the first and the first-1 2 between ^ _ φ ^ 1 (1 v 〇Π The section will not sag seriously. In this way, the distance between the object s and the object s directly below it will increase, so the film u J is prepared for a hundred small cards

1226870 五、發明說明（8) Cl内各層之間的隔層弟一貫施例參見第3A及3B圖之搬移裝置。其中與號並省略說明。如圖同之處在於改變支撐，仍保持第一、第二、第二主體1 〇、2 〇傾第二支撐銷之頂面1 4 第一支撐銷1 1之長度 11與第二支撐銷1 2之、重量及材料而決定同樣的，為使第之頂面1 6為高，第三。第三支撐銷2 1與第的長度、厚度、重量單元2之間的距離w而因此，在第二實第二支撐銷1 1、1 2之撐銷11、2 1較為高， ’同樣能達到如同上第三實施例參見第4A及4B圖之搬移裝置。其中與南度Hp。，詳細說明依據本發明之第二也第一實施例相同的元件給予施例所示，第二實施例與第一實施^的標翁11、12、21、22之長度 k不主體1 0、2 0在水平狀態，不㊉方面斜。為了使第一支撐銷11之:罘〜為咼而達到如同第一實施例、▲ 1 3較較該第二支撐銷丨2為長。第〜攻果，長度差距Η係根據物件s的支撐餚。〜、厚度 f支撐銷21之頂面15較第 ”銷之長度較第四支樓以：22 四支撐銷22之長度差距H # 2為長、好树η μ n V、根據物件ς 材枓及弟一支撐單元丨盥決定。〃弟一支撐 =例中’藉由使搬移裝置上之第一、 ^度不同，位於外側之第一、第四支、)f，之第二、第四支撐銷1 2、2 2較低 A弟—實施例之效果。二說明依據本發明之第三實施例弟一實施例相同的元件給予相同的標1226870 V. Description of the invention (8) The interlayer between the layers in Cl. The conventional example is shown in Figure 3A and 3B. Among them, the explanation is omitted. As shown in the same figure, the support is changed, and the first, second, and second bodies 10, 20 are still tilted to the top surface of the second support pin 1 4 the length 11 of the first support pin 11 and the second support pin 1 2) The weight and material are the same, so that the top surface 16 is high, and the third. The distance w between the third support pin 21 and the first length, thickness, and weight unit 2 is therefore higher than that of the second support pins 11 and 12 of the second support pin 11 and 12. A transfer device as shown in the third embodiment above is shown in Figs. 4A and 4B. Which is related to South Hp. In detail, according to the second and first embodiments of the present invention, the same components are given as shown in the embodiment. The length k of the labels 11, 12, 21, 22 of the second embodiment and the first embodiment is not the main body 10, 2 0 is slanted in a horizontal state. In order to make the first support pin 11: 罘 to 咼 as in the first embodiment, ▲ 1 3 is longer than the second support pin 丨 2. In the first attack, the difference in length is based on the support of the object s. The thickness f of the top surface 15 of the supporting pin 21 is longer than the length of the first pin: 22 The length difference between the four supporting pins 22 H # 2 is long, good tree η μ n V, according to the material ς And the first support unit 丨 the decision is made. The second support = in the example, by making the first and fourth degrees on the moving device different, the first and fourth branches on the outside, f), the second and fourth Support pins 1 2, 2 2 Lower A—the effect of the embodiment. 2 Explain that according to the third embodiment of the present invention, the same components are given the same reference numerals.

12268701226870

五、發明說明（9) 號並省略說明。如圖所示，第一結在第-主體10的正上方， =之;12連向懸空。並且’第—支撑銷内側壁U0方之寬度A。第一支撐銷n之寬 %垆、=了支撐銷12 度、重量及材料而決定。-趣據物件的長度、厚 W2同ΐί的:第二支撐單元2的第二主體2。上，第：支按銷21之一部分連結在第二主弟一叉向内側壁120方向縣空。並i ?〇的正上方’其他部分則第四支樓銷22之寬抑。、第_ ’上三支撐銷21之寬度h大於件的長f J度:重量及‘支而IT之寬度Dl係根據物 i ^^ # 1 ^ χ ^ ^ 兩端的變形量減少，進而、：二兩端Pl 4延伸’使物件S之加承受力。進而減少搬運時的震動量，有助於增另夕卜，加大第一、箓二+ ，其效果是相同於將支；銷、21之寬度或直徑裝置上之支撐點向外延伸夕向外鈿己、h，因此使搬移度可提高接近水平，同坪二：此物件s的兩端側IW2之高效果。有助於減低卡£内各昂 f一貝施例之增加卡匣可容納之基板片數7 θ 〇隔層咼度Ηρ ’並且因此，本發明之優％進而降低卡昆整體高度及減_ ^縮短卡Ε之隔層高度，層數量，且增加可容納之粍重置。亚且能增加卡匣之隔的變形量減少，而減少| $片數。再者，使物件之兩端日可的震動量，有助於增加承受V. Invention Description (9) and description is omitted. As shown in the figure, the first knot is directly above the -body 10, = 12; And, the width A of the inner wall U0 of the first support pin. The width% 垆 of the first support pin n is determined by the support pin's 12 degrees, weight, and material. -The length and thickness of the interesting object W2 are the same: the second body 2 of the second support unit 2. On, the first: the support part 21 is connected to the second primary brother one fork to the inner side wall 120. The other part directly above i? 〇 is the relaxation of the fourth branch pin 22. The width h of the first three support pins 21 is greater than the length of the piece f J degrees: the weight and the width of the support D1 are reduced according to the object i ^^ # 1 ^ χ ^ ^, and then: The two ends Pl 4 extend to make the object S add a bearing force. Further reducing the amount of vibration during transportation will help to increase the number of the first and second +, the effect is the same as the support; the width of the pin, the width of the 21, or the support point on the diameter device extends outward. The sibling, h, so that the degree of transfer can be increased to close to the level, the same as the two: the high effect of IW2 on both ends of this object s. It helps to reduce the number of cards in each case. The number of substrates that can be accommodated in the cassette is increased by 7 θ 〇 The interlayer degree 咼 ρ ', and therefore the superiority of the present invention further reduces the overall height of Ka Kun and reduces _ ^ Reduce the height and number of compartments of the card E, and increase the capacity to reset. The amount of deformation that can increase the gap between the cassettes is reduced, and the number of pieces is reduced. In addition, the amount of vibration that can be made at both ends of the object can help increase the load.

0632-10387TWf(nl) ： AU0305001 ; YUCHIA.ptd 第13頁 1226870 五、發明說明（ίο) 力。雖然本發明已以數個較佳實施例揭露如上，然其並非用以限定本發明，任何熟習此項技藝者，在不脫離本發明之精神和範圍内，仍可作些許的更動與潤飾，因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。0632-10387TWf (nl): AU0305001; YUCHIA.ptd Page 13 1226870 V. Description of the invention (ίο) Force. Although the present invention has been disclosed as above with several preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can still make some changes and decorations without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the scope of the appended patent application.

0632-10387Wf(nl) ； AU0305001 ； YUCHIA.ptd 第14頁 1226870 圖式簡單說明第1 A圖係顯示習知之承載卡匣及其内部之複數個物件 S示意圖；第1 B圖係顯示習知之承載卡匣及搬移裝置前視圖；第1 C圖係顯示習知之搬移裝置局部放大圖；第2 A圖係顯示本發明之第一實施例之搬移裝置示意圖；第2 B圖係顯示本發明之第一實施例之搬移裝置之第一支撐單元示意圖；第3 A圖係顯示本發明之第二實施例之搬移裝置示意圖；第3B圖係顯示本發明之第二實施例之搬移裝置之第一支撐單元示意圖；第4 A圖係顯示本發明之第三實施例之搬移裝置示意圖；以及第4B圖係顯示本發明之第三實施例之搬移裝置之第一支撐單元示意圖。【符號說明】 1〜第一支撐單元； 10〜第一主體； 11〜第一組支撐銷； 11 1〜第一組支撐銷1 1之懸空部分； 11 2〜第一組支撐銷1 1之正上方部分； 1 2〜第二組支撐銷；0632-10387Wf (nl); AU0305001; YUCHIA.ptd Page 14 1226870 Brief description of the diagram 1 A is a schematic diagram showing a conventional carrier cassette and a plurality of objects S inside it; FIG. 1 B is a conventional carrier Front view of the cassette and the moving device; FIG. 1C is a partially enlarged view showing a conventional moving device; FIG. 2A is a schematic view showing a moving device according to the first embodiment of the present invention; FIG. 2B is a view showing the first Schematic diagram of the first support unit of the moving device of an embodiment; FIG. 3A shows the schematic diagram of the moving device of the second embodiment of the present invention; FIG. 3B shows the first support of the moving apparatus of the second embodiment of the present invention Unit schematic diagram; FIG. 4A is a schematic diagram showing a moving device of a third embodiment of the present invention; and FIG. 4B is a schematic diagram showing a first supporting unit of the moving device of the third embodiment of the present invention. [Symbol description] 1 ~ 1st support unit; 10 ~ 1st body; 11 ~ 1st group of support pins; 11 1 ~ 1st group of support pins 1 1 suspended portion; 11 2 ~ 1st group of support pins 1 1 of Directly above; 1 2 ~ the second group of support pins;

0632-10387TWf(nl) ： AU0305001 ： YUCHIA.ptd 第15頁 1226870 圖式簡單說明 1 3〜第一組支撐銷之頂面； 1 4〜第二組支撐銷之頂面； 1 5〜第三組支撐銷之頂面； 1 6〜第四組支撐銷之頂面； 2〜第二支撐單元； 20〜第二主體； 2 1〜第三組支撐銷； 2 2〜第四組支撐銷； 3 0〜隔層； 5、6〜第一、二支撐單元； 50〜第一主體； 5 1、5 2〜第一組、第二組支撐銷； 6 0〜第二主體； 6 1、6 2〜第三組及第四組支撐銷； 10 0 ’〜框架； 1 0 0〜框架； 1 0 Γ 、1 0 2 ’〜支撐部； 1 0 1、1 0 2〜支撐部； I 0 5〜隔層； 11 0 ’、1 2 0 ’〜内侧壁； II 0、1 2 0〜内侧壁； C、q、C2、C3〜卡匣；0632-10387TWf (nl): AU0305001: YUCHIA.ptd Page 15 1226870 Brief description of the drawings 1 3 ~ the top surface of the first group of support pins; 1 4 ~ the top surface of the second group of support pins; 1 5 ~ the third group The top surface of the support pin; 16 to the top surface of the fourth group of support pins; 2 to the second support unit; 20 to the second body; 2 1 to the third group of support pins; 2 2 to the fourth group of support pins; 3 0 ~ compartments; 5, 6 ~ first and second support units; 50 ~ first body; 5 1, 5 2 ~ first group and second group of support pins; 6 0 ~ second body; 6 1, 6 2 ~ The third and fourth sets of support pins; 10 0 '~ frame; 1 0 0 ~ frame; 1 0 Γ, 10 2' ~ support part; 1 0 1, 10 2 ~ support part; I 0 5 ~ Compartment; 11 0 ', 1 2 0' ~ inner side wall; II 0, 1 2 0 ~ inner side wall; C, q, C2, C3 ~ cassette;

Di〜第一組、第三組支撐銷11、2 1之寬度； D2〜第二組、第四組支撐銷1 2、2 2之寬度；Di ~ the width of the first and third groups of support pins 11, 2 1; D2 ~ the width of the second and fourth groups of support pins 1 2, 2 2;

0632-103B7TWf(nl) ； AU0305001 ； YUCHIA.ptd 第16頁 12268700632-103B7TWf (nl); AU0305001; YUCHIA.ptd page 16 1226870

0632-10387TWf(nl) ： AU0305001 ； YUCHIA.ptd0632-10387TWf (nl): AU0305001; YUCHIA.ptd

Claims

1226870 六、申請專利範圍 1. 一種搬移裝置，用以搬移一物件，包括：一第一支撐單元，具有一第一組支撐銷以及一第二組支撐銷，該第一組支撐銷以及該第二組支撐銷支撐該物件，且該第一組支撐銷之頂面較該第二組支撐銷為高。 2 .如申請專利範圍第1項所述之搬移裝置，其更包括一第一主體，且該第一組、第二組支撐銷由該第一主體延伸而出，以支撐該物件。 3. 如申請專利範圍第2項所述之搬移裝置，其中該第一組支撐銷以及該第二組支撐銷具有相同長度，該第一主體傾斜一既定角度，使得該第一組支撐銷之頂面較該第二組支樓銷為南。 4. 如申請專利範圍第2項所述之搬移裝置，其中該既定角度係根據該物件的長度、厚度、重量以及材料而決定。 5. 如申請專利範圍第2項所述之搬移裝置，其中，該第一組支撐銷之長度較該第二組支撐銷為長。 6. 如申請專利範圍第5項所述之搬移裝置，其中，該第一組支撐銷與第二組支撐鎖之長度差距係根據該物件的長度、厚度、重量以及材料而決定。 7. 如申請專利範圍第1項所述之搬移裝置，其更包括一第二支撐單元，該第二支撐單元具有一第三組支撐銷以及一第四組支撐銷，該第三組支撐銷以及該第四組支撐銷支撐該物件，且該第三組支撐銷之頂面較該第四組支撐銷為高，該第二組、第四組支撐銷係位於該第一組、第三組1226870 VI. Scope of patent application 1. A moving device for moving an object includes: a first supporting unit having a first group of supporting pins and a second group of supporting pins, the first group of supporting pins and the first group of supporting pins Two sets of support pins support the object, and the top surface of the first set of support pins is higher than the second set of support pins. 2. The moving device according to item 1 of the scope of patent application, further comprising a first body, and the first group and the second group of supporting pins are extended from the first body to support the object. 3. The moving device according to item 2 of the scope of patent application, wherein the first group of support pins and the second group of support pins have the same length, and the first body is inclined at a predetermined angle, so that the first group of support pins The top surface is souther than the second group of branches. 4. The moving device according to item 2 of the scope of patent application, wherein the predetermined angle is determined according to the length, thickness, weight and material of the object. 5. The moving device according to item 2 of the scope of patent application, wherein the length of the first group of support pins is longer than that of the second group of support pins. 6. The moving device according to item 5 of the scope of patent application, wherein the length difference between the first group of support pins and the second group of support locks is determined according to the length, thickness, weight and material of the object. 7. The moving device according to item 1 of the scope of patent application, further comprising a second support unit having a third group of support pins and a fourth group of support pins, the third group of support pins And the fourth group of support pins supports the object, and the top surface of the third group of support pins is higher than the fourth group of support pins. The second and fourth groups of support pins are located in the first and third groups. group

0632-10387TWf(nl) ； AU0305001 ； YUCHIA.ptd 第18頁 1226870 ^、申請專利範圍支撐銷之間。 8. 如申請專利範圍第7項所述之搬移裝置，其更包括一第二主體，且該第三組、第四組支撐銷由該第二主體延伸而出，以支撐該物件。 9. 如申請專利範圍第7項所述之搬移裝置，該第三組支撐銷以及該第四支撐銷具有相同長度，該第二主體傾斜一既定角度，使得該第三組支撐銷之頂面較該第四組支撐鎖為南 ° I 0 .如申請專利範圍第7項所述之搬移裝置，其中，該既定角度係由該第一支撐單元以及該第二支撐單元之間的距離而決定。 II .如申請專利範圍第7項所述之搬移裝置，其中，該第三組支撐銷之長度較該第四組支撐銷為長。 1 2 .如申請專利範圍第1 1項所述之搬移裝置，其中，該第三組支撐銷與第四組支撐銷之長度差距係根據該物件的長度、厚度、重量以及材料而決定。 1 3.如申請專利範圍第1項所述之搬移裝置，其中該物件為玻璃基板。 14. 一種搬移裝置，用以搬移一物件，包含：一第一支撐單元，包括一第一主體、一第一組支撐銷以及一第二組支撐銷，該第一組、第二組支撐銷由該第一主體延伸而出，以支撐該物件，該第一支撐銷之一部分連結在該第一主體的正上方，其他部分則懸空。 1 5 .如申請專利範圍第1 4項所述之搬移裝置，其中，0632-10387TWf (nl); AU0305001; YUCHIA.ptd Page 18 1226870 ^ Patent application range Between support pins. 8. The moving device according to item 7 of the scope of patent application, further comprising a second body, and the third group and the fourth group of supporting pins are extended from the second body to support the object. 9. According to the moving device described in item 7 of the scope of patent application, the third group of supporting pins and the fourth group of supporting pins have the same length, and the second body is inclined at a predetermined angle so that the top surface of the third group of supporting pins Compared to the fourth group of support locks, it is south ° I 0. The moving device as described in item 7 of the scope of patent application, wherein the predetermined angle is determined by the distance between the first support unit and the second support unit . II. The moving device according to item 7 of the scope of patent application, wherein the length of the third group of supporting pins is longer than that of the fourth group of supporting pins. 12. The moving device according to item 11 of the scope of patent application, wherein the length difference between the third group of support pins and the fourth group of support pins is determined according to the length, thickness, weight, and material of the object. 1 3. The moving device according to item 1 of the scope of patent application, wherein the object is a glass substrate. 14. A moving device for moving an object, comprising: a first support unit including a first body, a first group of support pins and a second group of support pins, the first group and the second group of support pins Extending from the first body to support the object, a part of the first support pin is connected directly above the first body, and other parts are suspended. 1 5. The moving device according to item 14 of the scope of patent application, wherein:

0632-103S7TWf(nl) ： AU0305001 ： YUCHIA.ptd 第19頁 1226870 六、申請專利範圍該第一組支撐銷之寬度大於該第二組支撐銷之寬度。 1 6 .如申請專利範圍第1 4項所述之搬移裝置，其中，該第一支撐銷之寬度係根據該物件的長度、厚度、重量以及材料而決定。 1 7 .如申請專利範圍第1 4項所述之搬移裝置，其中該物件為玻璃基板。 1 8 .如申請專利範圍第1 4項所述之搬移裝置，其更包括一第二支撐單元，包括一第二主體、一第三組支撐銷以及一第四組支撐銷，該第三組、第四組支撐銷由該第二主體延伸而出，以支撐該物件，該第三組支撐銷之一部分連結在該第二主體的正上方，其他部分則懸空，該第二組、第四組支撐銷係位於該第一組、第三組支撐銷之間。 1 9 .如申請專利範圍第1 8項所述之搬移裝置，其中，該第三支撐銷之寬度大於該第四支撐銷之寬度。 2 0 .如申請專利範圍第1 9項所述之搬移裝置，其中，該第三支撐銷之寬度係根據該物件的長度、厚度、重量以及材料而決定。 2 1 .如申請專利範圍第1 9項所述之搬移裝置，其中，該第一組、第三組支撐銷之寬度係由該第一組支撐單元以及該第二組支撐單元之間的距離而決定。0632-103S7TWf (nl): AU0305001: YUCHIA.ptd Page 19 1226870 6. Scope of patent application The width of the first group of support pins is greater than the width of the second group of support pins. 16. The moving device according to item 14 of the scope of patent application, wherein the width of the first support pin is determined according to the length, thickness, weight, and material of the object. 17. The moving device according to item 14 of the scope of patent application, wherein the object is a glass substrate. 18. The moving device according to item 14 of the scope of patent application, further comprising a second support unit including a second body, a third group of support pins, and a fourth group of support pins, the third group The fourth group of support pins extends from the second body to support the object. One part of the third group of support pins is connected directly above the second body, and the other part is suspended. The set of support pins is located between the first and third sets of support pins. 19. The moving device according to item 18 of the scope of patent application, wherein a width of the third support pin is greater than a width of the fourth support pin. 20. The moving device according to item 19 of the scope of patent application, wherein the width of the third support pin is determined according to the length, thickness, weight, and material of the object. 2 1. The moving device according to item 19 of the scope of patent application, wherein the width of the first group and the third group of support pins is determined by the distance between the first group of support units and the second group of support units. And decide.

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