TWI221520B

TWI221520B - Glass substrate inspection apparatus and its method

Info

Publication number: TWI221520B
Application number: TW92113956A
Authority: TW
Inventors: Yi-Bin Jang; Ching-Jin Juang
Original assignee: Picvue Optoelectornics Interna
Priority date: 2003-05-23
Filing date: 2003-05-23
Publication date: 2004-10-01
Also published as: TW200426359A

Abstract

The present invention provides a glass substrate inspection apparatus and its method. The glass substrate inspection apparatus is provided for inspecting the defects of a glass substrate. The glass substrate inspection apparatus includes a screen, a light source, a clamping device and a comparison module. The light source is provided to supply a visible light for illuminating the glass substrate. The visible light passes through the glass substrate for being projected on the surface of screen. The clamping device is provided to clamp the glass substrate and adjust the glass substrate to be in a predetermined angle with respect to the direction of the visible light, so that the visible light projects through the defects on the screen to form an image. The comparison module compares the image projected on the screen with a predetermined sample to detect the defects of the glass substrate.

Description

1221520 五、發明說明（1) 發明所屬技術領域：本發明係關於一種玻璃基板檢測設備以及方法，尤指利用一光源照射一玻璃基板，形成一影像並投射至一屏幕表面，以檢測該玻璃基板之玻璃基板檢測設備以及方法。先前技術：近乎光學等級的玻璃基板在目前已被廣泛地應用，如應用於平面顯示器、生物晶片、微機電、以及光通訊元件等領域中。玻璃基板在出廠時，為大片的玻璃基板，之後再因應各種用途而切割成適用的尺寸。但是在切割之前，由於玻璃基板需要符合光學等級的品質，需要先行檢測玻璃基板是否有氣泡、表面不平整、流紋等瑕疵，如圖一所示，圖一係習知技術玻璃基板檢測設備2之示意圖。習知技術係以強光，如鹵素燈4，照射在玻璃基板6表面，再由一檢測員8以目視的方式來檢測玻璃基板6，在強光的照射下，玻璃基板6若是有氣泡、表面不平整、流紋等瑕疵，將可以以目視的方式檢測出來。然而，如此僅能檢驗出較大之瑕疵，對於玻璃基板61221520 V. Description of the invention (1) Technical field of the invention: The present invention relates to a glass substrate detection device and method, and more particularly to irradiate a glass substrate with a light source to form an image and project it onto a screen surface to detect the glass substrate. Glass substrate testing equipment and method. Prior technology: Nearly optical-grade glass substrates have been widely used, such as in flat display, bio-chip, micro-electro-mechanical, and optical communication components. The glass substrate is a large glass substrate when it is shipped from the factory, and then cut to a suitable size for various purposes. However, before cutting, because the glass substrate needs to meet the optical grade quality, it is necessary to first detect whether the glass substrate has defects such as bubbles, uneven surfaces, and ripples. As shown in Figure 1, Figure 1 is a conventional glass substrate testing equipment 2 The schematic. Conventional technology uses strong light, such as a halogen lamp 4, to illuminate the surface of the glass substrate 6, and then an inspector 8 inspects the glass substrate 6 visually. Under strong light, if the glass substrate 6 has bubbles, Defects such as uneven surfaces and flow marks can be detected visually. However, this can only detect larger defects. For glass substrates 6

第5頁 1221520 五、發明說明（2) 的瑕疵，有時不易表面形狀不平整或材質不均勻由肉眼直接目視觀察瑕疵而得知。因此，本發明的主測設備以及方法，以解；提供-種玻璃基板檢發明内容：本發明之主要目的扃 ..^ _ 在^供一種玻璃基板檢測設備以及方法射-玻璃基板，形成-影像並投射至〆1 ^ ^由該影像與一預定樣本比對，以快速地、可義^ Μ坡項基板，是否有形狀不平整或材質不均勻的瑕/疵。本發明係關於了種破璃基板檢測設備以及方法，該玻璃基板檢測設備係用以檢測一玻璃基板之瑕疵。該玻璃基板檢測設備包含一屏幕、一光源、一夾具、以及一比對模組。該光源係用以供應一可見光，以照射該玻璃基板，該可見光會穿透該玻璃基板，並投射至該屏幕表面。該夾具係用以挾持該玻璃基板，並調整該玻璃基板與該可見光行進方向成一預定角度，以使該可見光投射經過該瑕疵，以投影至該屏幕形成一影像。該比對模組係用以將投影至該屏幕之影像與一預定樣本比對，以檢測該玻璃基板之瑕疵。Page 5 1221520 V. The defect of the description of the invention (2) is sometimes not easy The surface shape is uneven or the material is uneven The direct observation of the defect by naked eyes reveals it. Therefore, the main testing device and method of the present invention are to provide a solution for inspecting glass substrates. SUMMARY OF THE INVENTION The main purpose of the present invention is to provide a glass substrate testing device and method for shooting glass substrates, forming- The image is projected to 〆1 ^ ^ and the image is compared with a predetermined sample to quickly and meaningfully determine whether there are flaws / defects in uneven shape or uneven material. The present invention relates to a kind of glass-breaking substrate testing equipment and method. The glass substrate testing equipment is used to detect defects of a glass substrate. The glass substrate testing equipment includes a screen, a light source, a fixture, and a comparison module. The light source is used to supply a visible light to illuminate the glass substrate, and the visible light will penetrate the glass substrate and be projected onto the screen surface. The fixture is used for holding the glass substrate, and adjusting the glass substrate to a predetermined angle with the visible light traveling direction, so that the visible light is projected through the defect to be projected on the screen to form an image. The comparison module is used to compare the image projected onto the screen with a predetermined sample to detect defects of the glass substrate.

第6頁 1221520 五、發明說明（3) 因此，本發明之玻璃基板檢測設備以及方法，即利用一光源照射一玻璃基板，形成一影像並投射至一屏幕表面，藉由該影像與一預定樣本比對，以快速地、可靠地檢測該玻璃基板，是否有形狀不平整或材質不均勻等更為細微，且直接目視檢查而不易得知之瑕疵，並且由於該預定樣本可以量化，所以使比對的結果更客觀且準確。關於本發明之優點與精神可以藉由以下的發明詳述及所附圖式得到進一步的瞭解。實施方式：請參閱圖二a，圖二a係本發明玻璃基板檢測設備3 0 之第一具體實施例之示意圖。本發明係提供一種玻璃基板檢測設備3 0，係用以檢測一玻璃基板3 2之瑕疵。該玻璃基板檢測設備3 0包含一屏幕3 4、一光源3 6、一夾具 38、以及一比對模組40。屏幕34係用以呈現投影在屏幕34表面之影像44，任何被投影的物體表面皆可以稱為屏幕3 4，但為使檢測能更順利進行，屏幕3 4最好是白底的平整硬質表面。光源 3 6係用以供應一可見光，以照射玻璃基板3 2，該可見光Page 6 1221520 V. Description of the invention (3) Therefore, the glass substrate detection device and method of the present invention irradiate a glass substrate with a light source to form an image and project it onto a screen surface. The image and a predetermined sample are then used. The comparison is to more quickly and reliably detect whether the glass substrate has irregular shapes or uneven materials, etc., and it is difficult to know directly by visual inspection, and because the predetermined sample can be quantified, the comparison is made. Results are more objective and accurate. The advantages and spirit of the present invention can be further understood through the following detailed description of the invention and the accompanying drawings. Implementation manner: Please refer to FIG. 2a, which is a schematic diagram of the first specific embodiment of the glass substrate testing device 30 of the present invention. The present invention provides a glass substrate inspection device 30 for detecting defects of a glass substrate 32. The glass substrate inspection device 30 includes a screen 34, a light source 36, a fixture 38, and a comparison module 40. The screen 34 is used to present the image 44 projected on the surface of the screen 34. The surface of any projected object can be referred to as the screen 34. However, in order to facilitate the detection, the screen 34 is preferably a flat, hard surface with a white background. . The light source 3 6 is used to supply a visible light to illuminate the glass substrate 3 2, the visible light

第7頁 1221520Page 7 1221520

五、發明說明（4) 並會穿透玻璃基板32，並投射至屏幕34之表面。失具38 係用以挾持玻璃基板3 2，並可控制玻璃基板3 2與該&見光行進方向成一預定角度0 ，在第一具體實施例中係以固定的預定角度0來檢測玻璃基板3 2，以使該可見光投射經過該瑕疵，以投影至屏幕34之表面形成影像44，像44之圖像通常為平行之黑色條紋，係因為玻璃基板^ 材質分佈不均勻所致，譬如流紋，所以黑色條紋的方向通常與流紋相同，配合上述原因，以夾具3 8挾持並轉玻璃基板32來控制預定角度0時，一定會有一個不變的轉動軸’該轉動軸最好是與流紋方向一致，或是與流紋方向近似平行，所檢測玻璃基板3 2的效果才是最&的1、。 =對模組40係用以比對影像44，以檢測玻璃基板32是否圖。定樣類似比對的方量化像的得到圖像請參閱比對模本4 6比前述影影像4 4 式不夠的比對部分計一預定的部分圖二b 組4 0係對，以像4 4的與預定客觀，方式可算出面黑色圖之面積，圖二b 用以將檢測玻平行黑樣本4 6 以下舉以為：積，再像面積，除以係本發明投影至屏璃基板32 色條紋樣之間的差例敘述一首先，將除以預定比率。接影像4 4的比對模幕34之，預定本圖案異’但種量化預定樣樣本4 6 著，將總面積組4 0之示影像4 4與樣本4 6可，而以目是這種非的比對方本46上黑的總面積影像44之，形成影意一預以是視來量4匕式。色圖，係黑色像445. Description of the invention (4) It will penetrate the glass substrate 32 and project onto the surface of the screen 34. The fixture 38 is used to hold the glass substrate 32, and can control the glass substrate 32 to form a predetermined angle 0 with the & direction of light travel. In the first embodiment, the glass substrate is detected at a fixed predetermined angle 0. 32, so that the visible light is projected through the defect to form an image 44 on the surface of the screen 34. The image of image 44 is usually a parallel black stripe, which is caused by the uneven distribution of the glass substrate, such as a ripple. Therefore, the direction of the black stripe is usually the same as the flow pattern. For the above reasons, when the glass substrate 32 is held and rotated by the clamp 38 to control the predetermined angle 0, there must be a constant rotation axis. The direction of the flow pattern is the same, or is approximately parallel to the direction of the flow pattern, and the effect of the detected glass substrate 32 is the most & The comparison module 40 is used to compare the image 44 to detect whether the glass substrate 32 is in the figure. See the comparison template 4 6 for the image obtained from the quasi-quantitative image of the comparison. The comparison part is not enough compared with the previous shadow image 4 4. The comparison part counts a predetermined part. The method can be used to calculate the area of the black image on the surface in accordance with the predetermined 4 method. Figure 2b is used to detect the glass black parallel sample 4 6 as follows: product, reimage area, divided by 32 colors projected onto the glass substrate of the present invention. An example of the difference between the stripe patterns is described. First, it is divided by a predetermined ratio. The contrast pattern screen 34 connected to the image 4 4 is different from the original pattern, but it is quantified and predetermined sample 4 6. The total area group 40 of the image 4 4 and the sample 4 6 can be used, and this is the purpose. The total area of the image 44, which is blacker than the opponent 46, forms a shadow effect. Color chart, black like 44

第8 1 12215208th 1 1221520

;ί! ί ϊ ί率。若影像44黑色圖像面積比率大於該 :i: h像面積比率，則檢測玻璃基板32為不人格之 ’反之，則為合格之玻璃基板32== ^44上Ϊ Ζ ϋ將預定樣本46上黑色圖像之面積與影 i比較：i 2之面積比較’若影像44上黑色圖像之面基板32為ΐ Ϊ 1樣本46上黑色圖像之面積，則檢測玻璃 ^板3 2 :。彳。之玻璃基板3 2，反之，則為合格之玻璃ί! ί ϊ ί rate. If the black image area ratio of image 44 is greater than the: i: h image area ratio, the detection of glass substrate 32 is impersonal; otherwise, it is a qualified glass substrate 32 == ^ 44 on Ϊ Ζ ϋ will be on the predetermined sample 46 Comparison of the area of the black image and the shadow i: Comparison of the area of i 2 'If the surface substrate 32 of the black image on the image 44 is ΐ Ϊ 1 The area of the black image on the sample 46, the glass plate 3 2 is detected. Alas. Glass substrate 3 2, otherwise, it is qualified glass

坌-豆二〜^二’圖三係本發明玻璃基板檢測設備3 0之 151二二征5 ί例之示意圖。本發明之第二具體實施例也 " A = 一種如前述之玻璃基板檢測設備3 0，係用以檢 ^。苴+基板3 2之瑕疵，所需設備與第一具體實施例相 =°二中用以挾持玻璃基板32之夾具38係可以進一步改變預疋角度0 °第二具體實施例之玻璃基板檢測設備3 0 進一步還包含一轉動裝置48、以及一量角器50。 >轉動裝置4 8係用以轉動夾具3 8，以改變玻璃基板3 2 與該$見光行進方向所形成之預定角度β 。量角器5 〇係用以量測預定角度Θ 。其中，轉動裝置48改變預定角度 0 ’以使屏幕34上所呈現之影像44改變，藉由比對模組 40將改變中之影像44與預定樣本46比對，當影像44等同預定樣本46時，再接著比對預定角度0以及一合格預定角度’以檢測玻璃基板3 2是否合格。其中預定角度0大坌-豆二〜 ^ 二 ’FIG. 3 is a schematic diagram of an example of the glass substrate testing equipment 30 of the present invention. The second specific embodiment of the present invention also " A = a glass substrate testing device 30 as described above, which is used for testing.苴 + the defect of the substrate 32, the required equipment is the same as that of the first embodiment = ° The fixture 38 used to hold the glass substrate 32 in the second middle can further change the pre-angle 0 ° The glass substrate detection equipment of the second embodiment 3 0 further includes a rotating device 48 and a protractor 50. > The rotating device 48 is used to rotate the fixture 38 to change a predetermined angle β formed by the glass substrate 3 2 and the traveling direction of the light. The protractor 50 is used to measure a predetermined angle Θ. Among them, the rotating device 48 changes the predetermined angle 0 ′ to change the image 44 presented on the screen 34, and compares the changed image 44 with the predetermined sample 46 by the comparison module 40. When the image 44 is equal to the predetermined sample 46, Then, the predetermined angle 0 and a qualified predetermined angle are compared to check whether the glass substrate 32 is qualified. Where the predetermined angle is 0

第9頁 1221520Page 9 1221520

五、發明說明（6)V. Description of Invention (6)

於該合格預定角度時，則檢測玻璃基板3 2為不合格之璃基板3 2。比對的方式可以以第一具體實施例中所述之黑色圖像面積比率或是黑色圖像之面積來比對是否同。今請參閱圖四，圖四係本發明光源3 6之示意圖。如^ 述之玻璃基板檢測設備3 0，其中光源3 6進一步包含—g 向調整裝置52、以及一焦距調整裝置54。方向調整掌 5 2係用以控制該可見光的行進方向，其方法可以二^ 直接轉動光源36來調整可見光的行進方向，或是如圖1 藉由一反射鏡56反射來自光源36之光線，並進而調整四13 射鏡5 6，即可控制該可見光的行進方向。焦距調整事反 5 4係用以調整該可見光的焦距，藉此以調^照設$ ^ 3 基板32之光線強度。 i…^At the predetermined pass angle, the glass substrate 32 is detected as a failed glass substrate 32. The comparison may be performed by using the black image area ratio or the area of the black image as described in the first embodiment. Please refer to FIG. 4, which is a schematic diagram of the light source 36 of the present invention. The glass substrate detection device 30 described above, wherein the light source 36 further includes a -g direction adjustment device 52 and a focus adjustment device 54. The direction adjustment palm 5 2 is used to control the traveling direction of the visible light. The method can be adjusted by directly rotating the light source 36 to adjust the traveling direction of the visible light, or as shown in FIG. 1, the light from the light source 36 is reflected by a reflector 56, and Further adjusting the four 13 lens 5 6 can control the traveling direction of the visible light. The focal length adjustment 5 4 is used to adjust the focal length of the visible light, so as to adjust the light intensity of the light source 32 of the substrate 32. i ... ^

請參閱圖五’圖五係本發明第一具體實施例玻璃基板3 2檢測方法之流程圖。本發明也係—種玻璃基板3 2檢測方法’以檢查玻璃基板3 2之瑕窥，根據第一具體實施例，本發明之玻璃基板3 2檢測方法包含下列+驟·首先’以一可見光照射玻璃基板32，並穿透玻;^基板32，且投射至屏幕34(800。接著，調整破璃基板“與該可見光行進方向成一固定的預定角度p ，以使該可見光投射經過該瑕，，以投影至屏幕34形成—影像44(s〇2)。比對投影至屏幕34之影像44以及-預定樣本46，以檢測玻璃Please refer to FIG. 5 'FIG. 5 is a flowchart of a method for detecting a glass substrate 32 according to the first embodiment of the present invention. The present invention also relates to a method for detecting a glass substrate 3 2 'to inspect the defects of the glass substrate 32. According to a first specific embodiment, the method for detecting a glass substrate 32 2 of the present invention includes the following steps + first "irradiate with a visible light The glass substrate 32 penetrates the glass substrate 32 and is projected onto the screen 34 (800. Then, adjust the broken glass substrate to make a fixed predetermined angle p with the visible light traveling direction so that the visible light is projected through the defect, It is formed by projecting onto the screen 34-image 44 (s〇2). The image 44 projected on the screen 34 and-a predetermined sample 46 are compared to detect the glass

1221520 五、發明說明（7) 基板32是否合格。比對的方式如前述具體實施述’若影像44黑色圖像面積比率大於該預 g 積比率，則檢測玻璃基板32為不合格之破-=圖像= 是若影像44上黑色圖像之面積比較大於預定^ 上= 之面積，則檢測玻璃基板32為不合格之玻璃基板1221520 V. Description of the invention (7) Whether the substrate 32 is qualified. The method of comparison is as described in the foregoing specific implementation. 'If the area ratio of the black image of the image 44 is greater than the pre-product ratio, then the glass substrate 32 is detected as defective. == image = Yes if the area of the black image on the image 44 If the area is larger than the predetermined value, the glass substrate 32 is detected as a failed glass substrate.

請參閱圖六’圖六係本發明第二具體實施例玻璃基板32檢測方法之流程圖。根據第二具體實施例，本發明之玻璃基板3 2檢測方法包含下列步驟：首先，以一可見光照射玻璃基板3 2 ’並穿透玻璃基板3 2，且投射至屏幕 34(S11)。接著’轉動玻璃基板32，以改變玻璃基板32與該可見光行進方向所形成之預定角度0 ，並使屏幕34上所呈現之影像44改變（S1 2 )。比對投影至屏幕34之影像44 以及一預定樣本46(S1 3)。當影像44等同預定樣本46時，停止轉動玻璃基板3 2 ( S 1 4 )。量測預定角度0 ，比對預定角度0以及一合格預定角度，以檢測玻璃基板3 2是否合格。其中預定角度0大於該合格預定角度時，則檢測玻璃基板32為不合格之玻璃基板32(S15)。因此，本發明之玻璃基板檢測設備3 〇以及方法，即利用一光源36照射一玻璃基板32，形成一影像44並投射至一屏幕34表面，藉由影像44與一預定樣本46比對，以快速地、可靠地檢測玻璃基板3 2，是否有形狀不平整或Please refer to FIG. 6 'FIG. 6 is a flowchart of a method for detecting a glass substrate 32 according to a second embodiment of the present invention. According to a second embodiment, the glass substrate 32 detection method of the present invention includes the following steps: First, a glass substrate 3 2 ′ is irradiated with a visible light, penetrates the glass substrate 32, and is projected onto the screen 34 (S11). Next, the glass substrate 32 is rotated to change the predetermined angle 0 formed by the glass substrate 32 and the visible light traveling direction, and the image 44 presented on the screen 34 is changed (S1 2). The image 44 projected onto the screen 34 is compared with a predetermined sample 46 (S1 3). When the image 44 is equal to the predetermined sample 46, the rotation of the glass substrate 3 2 is stopped (S 1 4). Measure the predetermined angle 0, compare the predetermined angle 0 and a qualified predetermined angle to detect whether the glass substrate 32 is qualified. When the predetermined angle 0 is larger than the qualified predetermined angle, it is detected that the glass substrate 32 is a failed glass substrate 32 (S15). Therefore, the glass substrate detection device 30 and the method of the present invention irradiate a glass substrate 32 with a light source 36 to form an image 44 and project it onto the surface of a screen 34. The image 44 is compared with a predetermined sample 46 to Quickly and reliably detect the glass substrate 3 2 for irregular shapes or

第11頁 1221520 五、發明說明（8) 材質不均勻等更為細微，且直接目視檢查而不易得知之瑕疵，並且由於預定樣本4 6可以量化，所以使比對的結果更客觀且準確。藉由以上較佳具體實施例之詳述，係希望能更加清楚描述本發明之特徵與精神，而並非以上述所揭露的較佳具體實施例來對本發明之範疇加以限制。相反地，其目的是希望能涵蓋各種改變及具相等性的安排於本發明所欲申請之專利範圍的範疇内。Page 11 1221520 V. Description of the invention (8) The unevenness of the material is more subtle, and the flaws that are not easily known by direct visual inspection, and because the predetermined samples 4 and 6 can be quantified, the comparison result is more objective and accurate. With the above detailed description of the preferred embodiments, it is hoped that the features and spirit of the present invention may be more clearly described, rather than limiting the scope of the present invention with the preferred specific embodiments disclosed above. On the contrary, the intention is to cover various changes and equivalent arrangements within the scope of the patent application for which the present invention is intended.

第12頁 1221520 圖式簡單說明圖一係習知技術玻璃基板檢測設備之示意圖；圖二a 係本發明玻璃基板檢測設備之第一具體實施例之示意圖；圖二b 係本發明比對模組之示意圖；圖三係本發明玻璃基板檢測設備之第二具體實施例之示意圖；圖四a以及圖四b 係本發明光源之示意圖；圖五係本發明第一具體實施例玻璃基板檢測方法之流程圖；以及圖六係本發明第二具體實施例玻璃基板檢測方法之流程圖。圖式之符號說明： 4 :鹵素燈 8 :檢測員 2、3 0 :玻璃基板檢測設備 6、3 2 :玻璃基板 34 屏幕 36 :光源 38 夾具 40 :比對模組 Θ 預定角度 44 :影像 46 預定樣本 48 :轉動裝置 50 量角器 52 :方向調整裝置 54 焦距調整裝置 56 :反射鏡Page 1212220 Brief description of the diagram Figure 1 is a schematic diagram of a conventional glass substrate testing equipment; Figure 2a is a schematic diagram of a first specific embodiment of the glass substrate testing equipment of the present invention; Figure 2b is a comparison module of the present invention Schematic diagram; Figure 3 is a schematic diagram of the second specific embodiment of the glass substrate testing equipment of the present invention; Figures 4a and 4b are schematic diagrams of the light source of the present invention; Figure 5 is a glass substrate detection method of the first specific embodiment of the present invention A flowchart; and FIG. 6 is a flowchart of a glass substrate detection method according to a second embodiment of the present invention. Explanation of symbols of the drawings: 4: halogen lamp 8: inspector 2, 3 0: glass substrate inspection equipment 6, 3 2: glass substrate 34 screen 36: light source 38 fixture 40: comparison module Θ predetermined angle 44: image 46 Scheduled sample 48: Rotating device 50 Protractor 52: Direction adjusting device 54 Focal length adjusting device 56: Mirror

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Claims

1221520 六、申請專利範圍 1、一種玻璃基板檢測設備，係用以檢測一玻璃基板之瑕疵，該玻璃基板檢測設備包含：一屏幕；一光源，係用以供應一可見光，以照射該玻璃基板，該可見光會穿透該玻璃基板，並投射至該屏幕表面；一夾具，係用以挾持該玻璃基板，並調整該玻璃基板與該可見光行進方向成一預定角度，以使該可見光投射經過該瑕疵，以投影至該屏幕形成一影像；以及一比對模組，係用以將投影至該屏幕之影像與一預定樣本比對，以檢測該玻璃基板之瑕疵。 2、如申請專利範圍第1項所述之玻璃基板檢測設備，其中該預定樣本係為一預定黑色圖像面積比率，若該影像所形成之影像黑色圖像面積比率大於該預定黑色圖像面積比率，則檢測該玻璃基板為不合格之玻璃基板。 3、如申請專利範圍第1項所述之玻璃基板檢測設備，該玻璃基板檢測設備更包含：一轉動裝置，係用以轉動該夾具，以改變該玻璃基板與該可見光行進方向所形成之預定角度；以及一量角器，係用以量測該預定角度；其中，該轉動裝置改變該預定角度，以使該屏幕上所呈現之影像改變，藉由該比對模組將改變中之影像與1221520 VI. Application for Patent Scope 1. A glass substrate testing equipment for detecting defects of a glass substrate. The glass substrate testing equipment includes: a screen; a light source for supplying a visible light to illuminate the glass substrate, The visible light will penetrate the glass substrate and be projected onto the screen surface; a fixture is used to hold the glass substrate and adjust the glass substrate and the visible light traveling direction to a predetermined angle so that the visible light is projected through the defect, An image is formed by projecting onto the screen; and a comparison module is used to compare the image projected onto the screen with a predetermined sample to detect defects of the glass substrate. 2. The glass substrate testing equipment according to item 1 of the scope of patent application, wherein the predetermined sample is a predetermined black image area ratio, and if the image formed by the image has a black image area ratio greater than the predetermined black image area Ratio, the glass substrate is detected as a failed glass substrate. 3. The glass substrate testing equipment as described in item 1 of the scope of patent application, the glass substrate testing equipment further includes: a rotating device for rotating the fixture to change a predetermined plan formed by the glass substrate and the direction of travel of visible light An angle; and a protractor for measuring the predetermined angle; wherein the rotating device changes the predetermined angle so that the image displayed on the screen changes, and the changing image and

第14頁 1221520 六、申請專利範圍該預定樣本比對，當該影像等同該預定樣本時，比對該預定角度以及一合格預定角度，以檢測該玻璃基板之瑕 /疵。 4、如申請專利範圍第3項所述之玻璃基板檢測設備，其中該預定角度大於該合格預定角度時，則檢測該玻璃基板為不合格之玻璃基板。 5、如申請專利範圍第4項所述之玻璃基板檢測設備，其中該比對模組將改變中之影像與該預定樣本比對，係指比對該影像所形成之影像黑色圖像面積比率以及該預定樣本之預定黑色圖像面積比率，該影像等同該預定樣本係指，該影像所形成之影像黑色圖像面積比率等同該預定樣本之預定黑色圖像面積比率。 6、如申請專利範圍第1項所述之玻璃基板檢測設備，其中該光源更包含：一方向調整裝置，係用以控制該可見光的行進方向；以及一焦距調整裝置，係用以調整該可見光的焦距，藉此以調整照射至該玻璃基板之光線強度。 7、一種玻璃基板檢測方法，係用以檢測一玻璃基板之瑕疵，該玻璃基板檢測方法包含下列步驟：Page 14 1221520 6. Scope of patent application The predetermined sample is compared. When the image is equal to the predetermined sample, the predetermined angle and a qualified predetermined angle are compared to detect the flaw / defect of the glass substrate. 4. The glass substrate testing equipment described in item 3 of the scope of patent application, wherein when the predetermined angle is greater than the qualified predetermined angle, the glass substrate is detected as a failed glass substrate. 5. The glass substrate testing equipment as described in item 4 of the scope of patent application, wherein the comparison module compares the changing image with the predetermined sample, which refers to the ratio of the area of the black image formed by the image to the image And a predetermined black image area ratio of the predetermined sample, the image equivalent to the predetermined sample means that the black image area ratio of the image formed by the image is equal to the predetermined black image area ratio of the predetermined sample. 6. The glass substrate testing equipment according to item 1 of the scope of patent application, wherein the light source further comprises: a direction adjustment device for controlling the direction of travel of the visible light; and a focus adjustment device for adjusting the visible light To adjust the light intensity of the glass substrate. 7. A glass substrate detection method is used to detect defects of a glass substrate. The glass substrate detection method includes the following steps:

第15頁 1221520 六、申請專利範圍以一可見光照射該玻璃基板，並穿透該玻璃基板，且投射至該屏幕；調整該玻璃基板與該可見光行進方向成一預定角度，以使該可見光投射經過該瑕疵，以投影至該屏幕形成一影像；以及比對投影至該屏幕之影像以及一預定樣本，以檢測該玻璃基板之瑕疵。 8、如申請專利範圍第7項所述之玻璃基板檢測方法，其中該預定樣本係為一預定黑色圖像面積比率，若該影像所形成之影像黑色圖像面積比率大於該預定黑色圖像面積比率，則檢測該玻璃基板為不合格之玻璃基板。 9、如申請專利範圍第7項所述之玻璃基板檢測方法，該玻璃基板檢測方法更包含下列步驟：轉動該玻璃基板，以改變該玻璃基板與該可見光行進方向所形成之預定角度，並使該屏幕上所呈現之影像改變；比對投影至該屏幕之影像以及該預定樣本；當該影像等同該預定樣本時，停止轉動該玻璃基板；以及量測該預定角度，比對該預定角度以及一合格預定角度，以檢測該玻璃基板之瑕疵。Page 15 1221520 Sixth, the scope of the patent application irradiates the glass substrate with a visible light, penetrates the glass substrate, and projects to the screen; adjusts the glass substrate and the visible light traveling direction to a predetermined angle so that the visible light is projected through the Defects are formed by projecting onto the screen to form an image; and the images projected onto the screen and a predetermined sample are compared to detect defects on the glass substrate. 8. The glass substrate detection method according to item 7 of the scope of the patent application, wherein the predetermined sample is a predetermined black image area ratio, and if the image formed by the image has a black image area ratio greater than the predetermined black image area Ratio, the glass substrate is detected as a failed glass substrate. 9. The glass substrate detection method as described in item 7 of the scope of patent application, the glass substrate detection method further includes the following steps: rotating the glass substrate to change a predetermined angle formed by the glass substrate and the direction of travel of visible light, and making The image presented on the screen is changed; the image projected onto the screen and the predetermined sample are compared; when the image is equal to the predetermined sample, the glass substrate is stopped from being rotated; and the predetermined angle is measured, compared with the predetermined angle and A qualified predetermined angle to detect defects of the glass substrate.

第16頁 1221520 六、申請專利範圍 1 0、如申請專利範圍第9項所述之玻璃基板檢測方法，其中該預定角度大於該合格預定角度時，則檢測該玻璃基板為不合格之玻璃基板。 11其本該，樣法定方預測該檢及板以基像璃影玻之之幕述屏所該項至 10影第投圍對範比利述專所請法申，方如該、中及預以該率同比等積像面影像該圖，色率 ^-匕像積影面之像成圖形色所黑像定影預該之對本比樣係定，預等率比積面像一[§|一〇色率 0-匕像積影面之像成圖形色所黑像定影預該之，本指樣係定本預樣該定同其法方測檢板基璃玻之述所項 7 第圍範· · 利含專包請更申源如光、該 2中方進行的光見可該制控以用係置裝整同向方及一以向藉距 #uu'' 隹：的光見。可度該強整線調光以之用板係基，璃置玻裝該整至調射距照焦整一調以此Page 16 1221520 VI. Patent application scope 10. The glass substrate inspection method as described in item 9 of the patent application scope, wherein when the predetermined angle is greater than the qualified predetermined angle, the glass substrate is detected as an unqualified glass substrate. 11 As it should, the legal party predicts that the inspection and the board will be based on the screen and screen of the base image of glass and glass, and the 10th round will be submitted to Fan Bilishu and the law application will be requested. The image is imaged at the same rate as the same product image, the color ratio ^-the image of the product image surface is fixed into a graphic color, and the black image is fixed. | 10 Color ratio 0-Dagger image The image of the shadow surface is a graphic color. The black image is fixed. This sample should be set. The sample should be set in the same way as the method described in the test board. Fanfan · Contains a special package, please apply for the source, such as the light, the two Chinese parties can see the light can be controlled to use the system to install the same direction and one to borrow distance #uu 隹: the light of the . It can be used to adjust the intensity of the entire line. The board is used for dimming, and the glass is installed to adjust the distance to the focus.

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