1221465 A7 B7 五、發明說明（ 本發明係為一種高精密度鑽石管的製造方法及其產品 ，其是在氧化物〔如：石英（Si〇2)〕、碳化物〔如··碳化矽 (SiC)〕或氮化物〔如··氮化鋁（A1N)〕等陶瓷材料之圓形或 多邊形（如方形）的線、棒、中空管的基材表面沉積一層 至多層且均勻的金屬膜層，該金屬膜層可由耐溫金屬〔如 •鉬（Molybdenum)、鎢（Tungsten)、鈕（Tantalum)、鈦 (TUanium)等構成；經過適當的熱處理後在陶基材與金屬層 的界面反應形成化合物中間層，該中間層可以有效地吸收 並降低不同材料之間咼溫膨脹所產生的應力及其破裂問題 ，使鑽石可以穩定、均勻地沉積在基材表面之金屬膜層外 側，然後再將基材與金屬膜層去除，留下鑽石膜層構成之 鑽石官產品；利用此種方法所製造的鑽石管的内徑不需特 別加工（如··拋光）而具有高真圓度、高真直度、低表面 粗糙度。 基於工業運用的需求，鑽石管的生產製造已成為相關 嚴商研究開發的重要項目，因為鑽石本身高硬度（高耐磨 度）之物理特性，使得其可被運用在水刀喷嘴、砂刀噴嘴 、抽線眼膜、散熱導管……等方面，而能夠提供適切的耐 磨功效，惟如何能夠製造出具有高真圓度、高真直度、低 表面粗糙度之内徑的鑽石管，則確實是一項相當大的挑戰 以 目前鑽石管的製造方法是在金屬鉬、鎢、鈕，石墨， 矽材質所製成的線、棒、管材基材表面直接鍍上一層鑽石 膜，然後再以腐蝕液將内側之金屬材料基材溶解去除， 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） -、發明說明（又） 製成中二之鑽石官成品，這幾種方法所用的金屬材料基材 本2表面具有許多在經過抽拉製程所造成的刮痕，並且容 易k叉外力而產生表面缺陷、變形、腐蝕等現象，所以利 用真空鍍膜法製造的鑽石管在腐蝕掉内部金屬基材後，該 鑽石管内徑表面相當粗糖，要維持高真直度及高真圓度相 當困難。 一般石墨材料製成之基材表面也容易遭受外力而產生 J傷而且本身具有迕多孔隙容易吸收大量水份及雜質等 缺點；如果使用熱壓法製成的石墨材料基材，在一般沉積 鑽石的真空氣氛中其表面也容易被氫離子（HydiOgen !㈣侵 蝕而產生許多的孔洞，所以利用真空制法製造的鑽石管 内徑表面相當粗糙，要維持低表面粗糙度是相當困難（如 美國第6,〇51，152號發明專利案）。 矽材質所製成的線、棒、管材基材價袼高昂；由於沉 積在矽線、棒、管材基材表面的鑽石管的附著性良好，所 以必需大量使用矽腐蝕溶液將矽線、棒、管材腐蝕去除才 可取下，谷易殘留大量有毒廢液，而且腐钱時間長，所以 並不符合經濟效益（如：美國第5,374,414號發明專利案） 故而已知之鑽石管製造方法均無法製造出内徑真圓度 佳、真直度佳且低表面粗糙度之鑽石管產品，使用者亦= 能夠在現有之產品之中擇優選用，此顯有加以改良之必要 本發明之主要目的在於··提供一種高精密度鑽石管 Χ^1465 Α7 Β7 五、發明說明（ 製造方法及其產品，其以適當的方法在石英、二氧化矽、 碳化矽之圓線、棒、中空管狀及方型線、棒、中空管狀材 料構成之基材表面沉積一層至多層且均勻的金屬膜層，再 以化學氣相沉積（CherniCal Vapor Dep〇siti〇n或CVD曰)技術 在金屬膜層表面沉積一層鑽石膜層，然後將金屬膜層及基 材予以去除，即形成由鑽石膜層構成之鑽石管。 、，由上述方法製造完成之鑽石中空圓管，方形管可使用 適當的方法加以固定，利用此種方法所製造的鑽石管產。 的内徑具有高真圓度、高真直度、低表面粗糙度的效果。°口 ^為使#審查委員進一步瞭解前述目的及本發明之特 徵’茲附以圖式詳細說明如后： (一）圖式部份： :-圖：係為實施本發明方法之步驟(一)及結構示意圖。 圖：係為實施本發明方法之步驟㈡及結構示意圖。 =三圖：係為實施本發明方法之步驟㈢及結構示 第四圖：係為實施本發明方法之步驟㈤及“ --------β----- (請先閱讀背面之注意事項再填寫本頁) •韓- (一）圖號部份 (1 〇 )基材 (3 0)鑽石膜層 (2 0)金屬膜層 (4 0)包覆體 本發明主要係選用具有光滑表石 碳切錢切之_或多邊形（如：方:=化石夕、 中空官狀材料製成的基材（1 〇 )，利用 ' 棒、 、丄U 利用適當的沉積方法 -n n n n n n n - 297公釐） 本纸張尺度 (eNSM4 五、發明說明（令） ^ 鉬t鈦、錯、鉻或鈔等熱膨脹係數較低的金屬 "匕積在该基材（1 〇 )外表以形成金屬膜層（2 ◦)，並 經過適當㈣溫熱處理使構成基材（1 〇 )之石英、—氧化梦、碳化石夕、氮化石夕與金屬膜層（2 0)的界面反應形成化合物中間層’可以有效地吸收並降 低不，材料之間高溫膨脹所產生的應力破裂問題；再利用 化學氣相沉積法使鑽石膜層（3 〇 )可以穩定沉積附 金屬膜層（2 〇)表面。 在本發明之方法中金屬膜層（2〇)沉積方法包括： 電化學鐘膜方式，真空蒸鑛方式，真空物理濺鍵方式，直 空化學氣相沉積薄膜方式······等。 一 、化^氣相沉積法是藉由加入適當的能量將含碳氣體（如 甲烷）分子及大量的氫氣（如94%〜99%)激發、解離形成氣 體離子及原子，經過連續反應後在基材表面沉積鑽石膜。 在則述本發明之方法中加入適當的能量形式包括：電 2方式，火㈣燒方式，雷射光方式，微波方式， 熱方式······等。 於第一圖中所示者，係為基材（1 0)表面沉積-層 至多層的金屬膜層（2 〇 ) 。 g 於第二圖中所示者，係為金屬膜層（2 〇 )表面沉積 一層鑽石膜層（3 〇 )。 、 /於第三圖中所示者，係為完成鑽石膜層（3 0 )沉積 ，後，以適當的方法將金屬膜層（2 Q )或基材（工〇 ) 等物質加以去除，即可取下鑽石中空圓管，方形管。 A7 B7 五、發明說明（匕 :第：圖中所示者，係在鑽石膜層（3 ◦)構成之中 二形管外徑包覆—適當尺寸的包覆體（4〇)， 已覆體（4 0)材料可為金屬’陶竟，塑 1 二等’再以適當的方法使包覆體"〇)材料= 屬H究燒結，塑膠或高分子硬化 撐及固定由鑽石膜層（3〇)構成之鑽石管。係用以支 如，式中所示，本發明之方法製成之產品可為一種鑽 石圓形官’該鑽石管内徑之表面粗趟度⑸值〈⑽㈣，真 直度 <6〇_/mm，真圓度<50jLim/mm。 、 或如圖式中所示，本發明之方法製成之產品可為一種 鑽石方形管，該鑽石管内徑之表面粗糙度Ra值< 1卿m， 真直度< 60μιη / mm。 同時本♦明之方法製成之產品的鑽石管的管壁厚度為 〜2麵，且該鑽石管可作為水刀噴嘴、抽線眼模或散 熱導管......等來使用。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）1221465 A7 B7 V. Description of the invention (The present invention is a method for manufacturing a high-precision diamond tube and its product, which is made of oxide [such as: quartz (Si〇2)], carbide [such as silicon carbide ( SiC)] or nitride [such as aluminum nitride (A1N)] and other ceramic materials such as round or polygonal (such as square) wire, rod, hollow tube substrate surface deposition of one to multiple and uniform metal film Layer, the metal film layer can be composed of temperature-resistant metal [such as • molybdenum, tungsten (tungsten), tungsten (Tantalum), titanium (TUanium), etc .; after appropriate heat treatment at the interface between the ceramic substrate and the metal layer to form a compound Intermediate layer, which can effectively absorb and reduce the stress and fracture problems caused by the temperature expansion between different materials, so that the diamond can be stably and uniformly deposited on the outside of the metal film layer on the surface of the substrate, and then the substrate Materials and metal film layers are removed, leaving diamond official products consisting of diamond film layers; the inner diameter of the diamond tube manufactured by this method does not require special processing (such as polishing) and has high true roundness and high straightness , Surface roughness. Based on the needs of industrial applications, the production of diamond tubes has become an important item for research and development by relevant companies, because the diamond's high hardness (high wear resistance) physical properties make it applicable to waterjet nozzles. , Abrasive knife nozzles, eye-drawing eye masks, cooling ducts, etc., and can provide appropriate wear resistance, but how can we produce diamonds with high true roundness, high straightness, and low surface roughness inside diameter? Tubes are indeed a considerable challenge. The current manufacturing method of diamond tubes is to directly coat a layer of diamond film on the surface of wires, rods, and tube substrates made of metal molybdenum, tungsten, buttons, graphite, and silicon. Then use the corrosive solution to dissolve and remove the inner metal material substrate. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love). The metal material substrate used in these methods has many scratches on the surface of the substrate, and it is easy to produce surface defects, deformation, and corrosion due to the external force of the fork. Phenomenon, so after the diamond tube manufactured by vacuum coating method erodes the inner metal substrate, the inner diameter surface of the diamond tube is quite coarse sugar, it is very difficult to maintain high straightness and high roundness. The surface of the substrate made of general graphite material It is also susceptible to external injuries and J injuries, and has the disadvantages of being porous and easily absorbing a large amount of water and impurities; if a graphite material substrate made by hot pressing is used, its surface is also easily damaged in a vacuum atmosphere where diamonds are generally deposited. Hydrogen ions (HydiOgen! ㈣ erode and many holes are produced, so the inner diameter surface of the diamond tube manufactured by the vacuum method is quite rough, and it is very difficult to maintain low surface roughness (such as US Patent No. 6,051,152) ). Silicon, wire, rod, and tube substrates are expensive; due to the good adhesion of diamond tubes deposited on the surface of silicon wires, rods, and tube substrates, it is necessary to use a large amount of silicon corrosion solution to silicon, It can be removed only by removing the rods and pipes. Guyi has a lot of toxic waste liquid, and it takes a long time to rot, so it is not economical ( : U.S. Patent No. 5,374,414) Therefore, all known diamond tube manufacturing methods cannot produce diamond tube products with good inner diameter, roundness, straightness, and low surface roughness. Users can also use the existing products It is preferred to use it, which obviously needs to be improved. The main purpose of the present invention is to provide a high-precision diamond tube X ^ 1465 A7 B7 V. Description of the invention (Manufacturing method and its products, which are suitably used in quartz, Silicon dioxide, silicon carbide round wires, rods, hollow tubular and square wires, rods, hollow tubular materials are deposited on the surface of the substrate consisting of one to multiple and uniform metal film layers, and then chemical vapor deposition (CherniCal Vapor Dep 〇sition or CVD technology) deposits a diamond film layer on the surface of the metal film layer, and then removes the metal film layer and the substrate to form a diamond tube composed of the diamond film layer. For the diamond hollow round tube manufactured by the above method, the square tube can be fixed by an appropriate method, and the diamond tube manufactured by this method can be used. The inner diameter has the effects of high true roundness, high straightness, and low surface roughness. ° 口 ^ In order to make the #examiners further understand the foregoing objects and the features of the present invention, a detailed description is attached as follows: (一) Schematic part::-Figure: It is a step for implementing the method of the present invention (a ) And structure diagram. Figure: is a schematic diagram of the steps and structure of the method of the present invention. = Three pictures: shows the steps and structure of the method of the present invention. The fourth picture: shows the steps of the method of the present invention and "-------- β ----- (Please read the back first Please pay attention to this page before filling in this page) • Han-(1) Drawing No. (10) Substrate (3 0) Diamond film layer (2 0) Metal film layer (40) Covering body The present invention is mainly selected With smooth surface stone carbon cut money cut _ or polygon (such as: square: = fossil eve, hollow official material made of a substrate (10), using the 'rod ,, 丄 U using an appropriate deposition method -nnnnnnn- 297 mm) Paper size (eNSM4 V. Description of the invention (order) ^ Molybdenum t titanium, copper, chromium or banknotes with low thermal expansion coefficient metals " daggers are deposited on the surface of the substrate (1 0) to form metals The film layer (2 ◦) is subjected to an appropriate incubation temperature heat treatment so that the interface between the quartz, -oxidation dream, carbonized carbide, and nitride stone and the metal film (20) constituting the substrate (100) reacts to form a compound intermediate. Layer 'can effectively absorb and reduce the problem of stress cracking caused by high temperature expansion between materials; then use chemical vapor deposition to make diamonds The film layer (30) can stably deposit the surface of the metal film layer (20). In the method of the present invention, the method of depositing the metal film layer (20) includes: an electrochemical clock film method, a vacuum evaporation method, and a vacuum physical sputtering method. Bonding method, direct chemical vapor deposition thin film method, etc. I. Chemical vapor deposition method is to add carbon-containing gas (such as methane) molecules and a large amount of hydrogen (such as 94 by adding appropriate energy) % ~ 99%) are excited and dissociated to form gas ions and atoms, and a diamond film is deposited on the surface of the substrate after continuous reaction. In the method of the present invention, adding appropriate energy forms includes: electricity 2 method, fire burn method, Laser method, microwave method, thermal method, etc. As shown in the first figure, it is a layer to a multilayer metal film layer (20) deposited on the surface of the substrate (10). G As shown in the second figure, a diamond film layer (30) is deposited on the surface of the metal film layer (20). / As shown in the third figure, the diamond film layer (30) is completed After deposition, the metal film layer (2 Q) or the substrate (work 0) and the like are deposited by an appropriate method. Remove the material, you can remove the diamond hollow tube, square tube. A7 B7 V. Description of the invention (dagger: the first: the one shown in the figure, is in the diamond film layer (3 ◦) outer diameter package Covering—Appropriate size of the covering body (40). The material of the covering body (40) may be metal 'Tao Jing, plastic 1 second-class', and then the covering body " 〇) material by appropriate methods = belongs to H The sintering, plastic or polymer hardening support and fixation of the diamond tube composed of diamond film layer (30). It is used to support, as shown in the formula, the product made by the method of the present invention can be a diamond round official 'The surface roughness of the inner diameter of the diamond tube is ⑸ value <⑽㈣, true straightness < 60% / mm, true roundness < 50jLim / mm. Or, as shown in the figure, the product made by the method of the present invention can be a diamond square tube, the surface roughness Ra value of the diamond tube inner diameter < 1 m, true straightness < 60 μm / mm. At the same time, the thickness of the wall of the diamond tube of the product made by the method of this method is ~ 2 sides, and the diamond tube can be used as a water jet nozzle, a suction eye mold or a heat pipe ... This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)
丨-------- (請先g讀背面之注意事項寫表良一丨 -------- (Please read the precautions on the back and write the table first.