TWD193459S - Portion of control valve - Google Patents
Portion of control valveInfo
- Publication number
- TWD193459S TWD193459S TW107301088F TW107301088F TWD193459S TW D193459 S TWD193459 S TW D193459S TW 107301088 F TW107301088 F TW 107301088F TW 107301088 F TW107301088 F TW 107301088F TW D193459 S TWD193459 S TW D193459S
- Authority
- TW
- Taiwan
- Prior art keywords
- main body
- control valve
- design
- air
- flow path
- Prior art date
Links
- 239000012530 fluid Substances 0.000 abstract description 8
- 239000007789 gas Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 238000009434 installation Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 230000000903 blocking effect Effects 0.000 abstract 2
- 238000005192 partition Methods 0.000 abstract 1
- 238000000926 separation method Methods 0.000 description 1
Abstract
【物品用途】;本物品為一種控制閥，係例如控制半導體製造裝置等所使用之製程氣體等各種流體的流通/隔斷。;在使用時，首先，將螺栓安裝於螺栓安裝孔，將本物品固定於預定的設置場所。接著，將流體供給用及排出用的軟管(tube)或硬管(pipe)連結於輸入輸出通口，並將引導空氣(pilot air)供給用的軟管或硬管連結於空氣導入通口。然後，藉由對來自空氣導入通口之引導空氣的導入進行控制，閥體即會在主體的內部移位，而控制輸入輸出通口間之流體的流通/隔斷。;【設計說明】;本設計物品之控制閥係具有主體、及設在該主體上側之氣壓致動器部(參照顯示各部名稱之參考立體圖1及顯示各部名稱之參考立體圖2)。;主體在內部具有：未圖示的流路；未圖示的閥座，設在該流路的中途；未圖示的閥體，藉由相對於該閥座歸位或分離，切換製程氣體等流體的流通/隔斷。在主體的左右兩側面突出設置有接頭。在該接頭設有與主體內部的流路連通的輸入輸出通口。在主體的底面設有螺栓安裝孔，用以安裝未圖示的螺栓。在氣壓致動器部的上表面，係設有用以導入引導空氣的空氣導入通口。;圖式所揭露之實線係本案欲主張設計之部分，圖式所揭露之虛線係本案不主張設計之部分。;本創作之特徵在於控制閥中以實線所呈現之部分的形狀。[Use of article] This article is a control valve that controls the flow/blocking of various fluids such as process gases used in semiconductor manufacturing equipment. ;When in use, first install the bolts in the bolt mounting holes and fix the item at the predetermined installation location. Next, connect the hose (tube) or hard pipe (pipe) for fluid supply and discharge to the input and output ports, and connect the hose or hard pipe for pilot air supply to the air inlet port. . Then, by controlling the introduction of the guide air from the air introduction port, the valve body is displaced inside the main body, thereby controlling the flow/blocking of the fluid between the input and output ports. ;[Design Description];The control valve of this design article has a main body and a pneumatic actuator part located on the upper side of the main body (refer to the reference perspective view 1 showing the names of each part and the reference perspective view 2 showing the names of each part). ;The main body has inside: a flow path (not shown); a valve seat (not shown), located in the middle of the flow path; a valve body (not shown), which switches the process gas by returning or separating relative to the valve seat. The circulation/partition of other fluids. Joints are protrudingly provided on the left and right sides of the main body. The connector is provided with an input/output port that communicates with the flow path inside the main body. The bottom surface of the main body is provided with bolt mounting holes for installing bolts not shown in the figure. An air introduction port for introducing guide air is provided on the upper surface of the pneumatic actuator part. ; The solid lines disclosed in the drawing are the parts of the case where the design is intended to be claimed, and the dotted lines revealed in the drawing are the parts of the case where the design is not claimed. ;This creation is characterized by the shape of the portion of the control valve represented by solid lines.
Description
本物品為一種控制閥，係例如控制半導體製造裝置等所使用之製程氣體等各種流體的流通/隔斷。 This article is a control valve that regulates the flow/disconnection of various fluids such as process gases used in semiconductor manufacturing equipment.
在使用時，首先，將螺栓安裝於螺栓安裝孔，將本物品固定於預定的設置場所。接著，將流體供給用及排出用的軟管(tube)或硬管(pipe)連結於輸入輸出通口，並將引導空氣(pilot air)供給用的軟管或硬管連結於空氣導入通口。然後，藉由對來自空氣導入通口之引導空氣的導入進行控制，閥體即會在主體的內部移位，而控制輸入輸出通口間之流體的流通/隔斷。 In use, first, attach the bolt to the bolt mounting hole to fix the item to a predetermined installation location. Next, a tube or a pipe for fluid supply and discharge is connected to the input/output port, and a hose or tube for supplying pilot air is connected to the air introduction port. . Then, by introducing the introduction of the pilot air from the air introduction port, the valve body is displaced inside the main body to control the flow/disconnection of the fluid between the input and output ports.
本設計物品之控制閥係具有主體、及設在該主體上側之氣壓致動器部(參照顯示各部名稱之參考立體圖1及顯示各部名稱之參考立體圖2)。 The control valve of the present article has a main body and a pneumatic actuator unit provided on the upper side of the main body (refer to the reference perspective view 1 showing the names of the respective parts and a reference perspective view 2 showing the names of the respective parts).
主體在內部具有：未圖示的流路；未圖示的閥座，設在該流路的中途；未圖示的閥體，藉由相對於該閥座歸位或分離，切換製程氣體等流體的流通/隔斷。在主體的左右兩側面突出設置有接頭。在該接頭設有與主體內部的流路連通的輸入輸出通口。在主體的底面設有螺栓安裝孔，用 以安裝未圖示的螺栓。在氣壓致動器部的上表面，係設有用以導入引導空氣的空氣導入通口。 The main body has a flow path (not shown) inside; a valve seat (not shown) is provided in the middle of the flow path; a valve body (not shown) is switched or separated from the valve seat to switch process gas, etc. Circulation/separation of fluids. A joint is protruded from the left and right sides of the main body. The joint is provided with an input/output port that communicates with a flow path inside the main body. a bolt mounting hole is provided on the bottom surface of the main body, Install bolts (not shown). An air introduction port for introducing the pilot air is provided on the upper surface of the air pressure actuator portion.
圖式所揭露之實線係本案欲主張設計之部分，圖式所揭露之虛線係本案不主張設計之部分。 The solid line disclosed in the figure is the part of the design that is intended to be claimed in the present case. The dotted line disclosed in the drawing is not part of the design.
本創作之特徵在於控制閥中以實線所呈現之部分的形狀。 This creation is characterized by the shape of the portion of the control valve that is presented in solid lines.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2017-19545F JP1613697S (en) | 2017-09-08 | 2017-09-08 | |
| JP2017-019545 | 2017-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD193459S true TWD193459S (en) | 2018-10-11 |
Family
ID=63525137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107301088F TWD193459S (en) | 2017-09-08 | 2018-02-26 | Portion of control valve |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP1613697S (en) |
| TW (1) | TWD193459S (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD609307S1 (en) | 2008-11-18 | 2010-02-02 | Smc Corporation | Diaphragm valve |
| USD699815S1 (en) | 2012-02-24 | 2014-02-18 | Danfoss A/S | Expansion valve |
-
2017
- 2017-09-08 JP JPD2017-19545F patent/JP1613697S/ja active Active
-
2018
- 2018-02-26 TW TW107301088F patent/TWD193459S/en unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD609307S1 (en) | 2008-11-18 | 2010-02-02 | Smc Corporation | Diaphragm valve |
| USD699815S1 (en) | 2012-02-24 | 2014-02-18 | Danfoss A/S | Expansion valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JP1613697S (en) | 2018-09-18 |
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