TWD174090S - Part of the air inlet for substrate processing equipment - Google Patents

Abstract

【物品用途】;本設計的物品是基板處理裝置用進氣口，是在用來處理晶圓的基板處理裝置中，安裝在反應管的下端，是用來將反應氣體流入到反應管的反應室內的進氣口，其材質是金屬。;【設計說明】;在以虛線所示的本體的外周，形成有連接氣體導入接頭和氣體導入管的管類，而本設計的創作特徵在於：設有用來設置為了抑制副生成物附著在其內徑部的零件之突起部。;圖式所揭露之實線部分，為本案主張設計之部分；圖式所揭露之虛線部分，為本案不主張設計之部分；圖式中一點鏈線所圍繞者，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。[Use of article]; The article designed in this design is an air inlet for a substrate processing device. It is installed at the lower end of the reaction tube in the substrate processing device used to process wafers. It is used to flow the reaction gas into the reaction tube. The indoor air inlet is made of metal. ;[Design description];On the outer periphery of the body shown in dotted lines, there are pipes connecting the gas inlet joint and the gas inlet pipe. The creative feature of this design is that it is provided with a device to prevent by-products from adhering to it. The protruding part of the inner diameter part. ; The solid line part disclosed in the drawing is the part of the proposed design of this case; the dotted line part disclosed in the drawing is the part of this case not advocated for design; the area surrounded by a dotted chain line in the drawing defines the intended claim of this case Within the scope, the one-point chain line itself is a part of the design that is not claimed in this case.