TW576127B

TW576127B - Organic electroluminescence device and manufacturing method thereof

Info

Publication number: TW576127B
Application number: TW91122707A
Authority: TW
Inventors: Mao-Kuo Wei
Original assignee: Ritek Display Technology Corp
Priority date: 2002-10-02
Filing date: 2002-10-02
Publication date: 2004-02-11

Abstract

An organic electroluminescence device comprises a substrate, a quantum efficiency enhancement structure located on the substrate, an anode layer located on the quantum efficiency enhancement structure, at least one organic functional layer located on the anode layer; and a cathode layer located on the organic functional layer. The quantum efficiency enhancement structure comprises at least one high refraction films and at least one low refraction films that are interlace location to form the multi-layers structure. Besides, the device further comprises an insulating layer located between the anode layer and the functional layer to define a pixel structure.

Description

576127 _案號 91122707_年月日__ 五、發明說明（1) 本發明是有關於一種平面發光元件（Flat Panel Lighting Device)及其製造方法，且特別是有關於一種具有外部量子效率促進結構之有機電激發光元件（〇 r g a n i c electroluminescence ， OEL)及其製造方法 ° 所有可自體發光的各種材料中，有機電激發光材料係為近幾年開發出來極具潛力的材料之一。而且有機電激發光元件非但具有簡單的製程結構及低驅動電壓等優點，更重要的是其除了可使用玻璃基板之外，還可使用於塑膠 (Rigid Plastic)基板和可撓式（Flexible)基板，因此有機電激發光元件可更廣泛的應用於光電產品上。而對於所有應用在照明的發光元件而言，除了高亮度和高電光轉換效率的要求外，近年來更是朝向節能、省電以及環保的方向發展。有機電激發光元件一方面可以符合發光元件的節能、省電、環保的要求，另一方面亦可達到照明的均勻性、平面化、以及大面積化的要求，因此對於未來平面發光元件而言，有機電激發光元件將會是最佳的選擇。然而，對於傳統的有機電激發光元件而言，如何將内部所產生的光線有效的導出元件之外部，是目前所遭遇最重要且最需要突破的課題之一。由於有機電激發光元件結構中，陽極層和有機官能層之材料的折射率皆大於基板，因此當光線入射角大於臨界角時，將會在陽極層和有機官能層之間形成全反射，而導致陽極層/有機官能層有波導 (W a v e G u i d e )現象產生。意即大於臨界角之光線將會侷限在陽極層和有機官能層之間反射，而無法入射進入基板。576127 _Case No. 91122707_ Year Month Date__ V. Description of the invention (1) The present invention relates to a flat panel lighting device (Flat Panel Lighting Device) and a method for manufacturing the same, and more particularly, to a structure having an external quantum efficiency promoting structure Organic electroluminescence (OEL) and its manufacturing method ° Among all materials that can emit light by themselves, organic electroluminescence is one of the materials with great potential developed in recent years. In addition, the organic electroluminescent device has advantages such as a simple process structure and a low driving voltage, and more importantly, in addition to glass substrates, it can also be used for Rigid Plastic substrates and flexible substrates. Therefore, the organic electro-optical light emitting element can be more widely used in optoelectronic products. For all light-emitting elements used in lighting, in addition to the requirements of high brightness and high electro-optical conversion efficiency, in recent years, it has also developed in the direction of energy saving, power saving and environmental protection. Organic electrical excitation light elements can meet the requirements of energy saving, power saving, and environmental protection of light emitting elements on the one hand, and can also meet the requirements of uniformity, planarization, and large area of the lighting. Therefore, for future flat light emitting elements , Organic electro-excitation light element will be the best choice. However, for the traditional organic electro-optical light-emitting device, how to effectively guide the light generated from the inside to the outside of the device is one of the most important issues that need to be overcome. Since the refractive index of the material of the anode layer and the organic functional layer is larger than that of the substrate in the structure of the organic electroluminescent device, when the incident angle of the light is larger than the critical angle, total reflection will be formed between the anode layer and the organic functional layer, and As a result, the anode layer / organic functional layer has a waveguide phenomenon. This means that light that is greater than the critical angle will be limited to reflect between the anode layer and the organic functional layer, and cannot enter the substrate.

9472twfl.pt c 第5頁 576127 _案號91122707_年月曰修正_ 五、發明說明（2) 依據相同的原理，由於基板的折射率係大於空氣的折射率，因此當光線入射角大於臨界角時，將會在基板形成全反射，而導致基板之波導現象。為了促進有機電激發光元件外部量子效率，數種方法已被提出。其中，在（G. Gu etc, Opt. Lett· 22 ( 1 9 9 7 ) p · 3 9 6 )所揭露之方法中，其係在陽極導線的側面和其餘區域鍍上一層金屬反射層，以使有機電激發光元件的外部量子效率提升一至二倍。然而，此種方法必須增加金屬鑛膜和金屬微影製程，因此會大幅增加元件的製造成本。另外，在（H. Yokogawa etc，SID’0 1 ( 2 0 0 1 ) ρ·4 0 5 ) 所揭露之方法中，係利用於陽極層和基板之間形成一層氣凝膠厚膜，以使有機電激發光元件的外部量子效率提升約一倍左右。然而，由於氣凝膠取得不易，且塗佈製作方法非常複雜，因此此種方法不適用於元件之量產。再者，在（IEDM’94(1994) p.571， J. Appl. Phys. 80 (1996) p.207, J.Appl. Phys. 85 (1996) p.3032, J. Appl. Phys. 8 (1999) p·2407)等許多文獻中，其係使用微腔（Micro-cavity)原理之多層介電質鍵膜以減低入射光與反射光的干涉以及增加穿透率的原理，藉以增進元件的外部量子效率。但是由於多層介電層因製程因素容易產生有裂痕（Crack)或針孔（Pin-Hole)之問題，因此濕氣與氣體容易經由裂痕或針孔路徑而滲入擴散至元件中，而導致元件使用壽命縮短。另夕卜，Lu 等人（IDEM，0 0 ( 2 0 0 0 ), p · 6 0 7 )以及M a d i g a η9472twfl.pt c Page 5 576127 _Case No. 91122707_Year Month Amendment_ V. Description of the invention (2) According to the same principle, because the refractive index of the substrate is greater than the refractive index of air, when the incident angle of light is greater than the critical angle At this time, total reflection will be formed on the substrate, resulting in the waveguide phenomenon of the substrate. In order to promote the external quantum efficiency of organic electro-excitation light elements, several methods have been proposed. Among them, in the method disclosed in (G. Gu etc, Opt. Lett · 22 (1 9 9 7) p · 3 9 6), it is plated with a metal reflective layer on the side of the anode wire and the remaining area to One to two times the external quantum efficiency of organic electro-excitation light elements. However, this method must increase the metal ore film and metal lithography process, and therefore will significantly increase the manufacturing cost of the component. In addition, in the method disclosed in (H. Yokogawa etc, SID'0 1 (2 0 0 1) ρ · 4 0 5), a thick aerogel film is formed between the anode layer and the substrate so that The external quantum efficiency of the organic electro-excitation light element is approximately doubled. However, because aerogels are not easy to obtain and the coating production method is very complicated, this method is not suitable for mass production of components. Furthermore, in (IEDM'94 (1994) p.571, J. Appl. Phys. 80 (1996) p.207, J.Appl. Phys. 85 (1996) p.3032, J. Appl. Phys. 8 (1999) p. 2407) and many other literatures, which are based on the principle of using a multilayer dielectric bond film based on the principle of micro-cavity to reduce the interference of incident light and reflected light and increase the transmittance to enhance the device External quantum efficiency. However, because multilayer dielectric layers are prone to crack or pin-hole problems due to process factors, moisture and gas easily penetrate and diffuse into the device through the cracks or pin-hole path, which leads to the use of the device. Shortened life. In addition, Lu et al. (IDEM, 0 0 (2 0 0 0), p · 6 0 7) and M a d i g a η

9472twfl.pt c 第6頁 576127 案號 91122707 年月曰修正五、發明說明（3) 等人（Appl· Phys· Lett. 7 6 ( 2 0 0 0 ) ρ·1 6 5 0 )係使用較高折射率的基板，以及在發光面上貼附凸透鏡以增加外部量子效率之方法，以使外部量子效率增加。然而，此種方法無法提供元件長久的使用，而且所貼附的透鏡直徑太大且厚度太厚，因此有違電子元件微小化的趨勢。在美國專利U S 5 9 3 6 3 4 7和U S 6 0 8 0 0 3 0中，係以熱壓方式在玻璃基板上直接製造出半凸透鏡或半凹透鏡的幾何形狀，藉以增加元件的外部量子效率。然而，由於玻璃的熱壓不僅溫度高，而且容易造成玻璃局部翹曲，且耗時（升溫和冷卻），因此並非適合於元件量產。 ilt 夕卜，Moller 等人（J· Appl. Phys. 91(2002), P.3324)提出，將微透鏡陣列（Micro-lens Arrays)製作於玻璃基板上，可使其外部量子效率增加0 . 5倍。然而，以此種方法製作微透鏡結構並非真正的微透鏡，且其在製程上非但過於耗時，而且微透鏡的尺寸將隨製程方式而有所限制，且隨著透鏡尺寸的增加也將影響元件結構，因此勢必會增加元件的厚度。另外，特別值得一提的是，對於使用塑膠基板或可撓式基板的有機電激發光元件而言，由於濕氣與氣體非常容易滲入與擴散至元件中，而影響元件之使用壽命。因此，如何有效的防止濕氣與氣體滲入擴散至塑膠基板或可撓式基板之有機電激發光元件中以提高元件之壽命也是重要的課題之一。因此，本發明的目的就是在提供一種有機電激發光元件及其製造方法，以有效的提高有機電激發光元件外部量9472twfl.pt c Page 6 576127 Case No. 91122707 Amendment V. Description of the Invention (3) et al. (Appl. Phys. Lett. 7 6 (2 0 0 0) ρ · 1 6 5 0) are relatively high A substrate with a refractive index, and a method of attaching a convex lens on a light emitting surface to increase external quantum efficiency, so as to increase external quantum efficiency. However, this method cannot provide long-term use of the component, and the attached lens has a diameter that is too large and a thickness that is too thick, thus violating the trend of miniaturization of electronic components. In the US patents US 5 9 3 6 3 4 7 and US 6 0 8 0 0 3 0, the geometry of the semi-convex lens or semi-concave lens is directly manufactured on the glass substrate by hot pressing to increase the external quantum efficiency of the device. . However, the hot pressing of glass is not only high in temperature, but also easily causes local warpage of the glass and takes time (temperature rise and cooling), so it is not suitable for mass production of components. Ilt Xibu, Moller et al. (J. Appl. Phys. 91 (2002), P.3324) proposed that the fabrication of micro-lens arrays (Micro-lens Arrays) on a glass substrate can increase the external quantum efficiency of 0. 5 times. However, the microlens structure produced by this method is not a real microlens, and its manufacturing process is not only time-consuming, but the size of the microlens will be limited depending on the process method, and it will also affect the increase in lens size. Element structure, so the thickness of the element is bound to increase. In addition, it is particularly worth mentioning that, for organic electroluminescent devices using plastic substrates or flexible substrates, moisture and gases easily penetrate and diffuse into the components, which affects the service life of the components. Therefore, how to effectively prevent moisture and gas from penetrating and diffusing into an organic electro-optical light emitting element of a plastic substrate or a flexible substrate to improve the life of the element is also one of the important issues. Therefore, the object of the present invention is to provide an organic electro-optic excitation light element and a manufacturing method thereof, so as to effectively increase the external quantity of the organic electro-excitation light element.

9472twf1.pt c 第7頁 576127 _案號91122707_年月日__ 五、發明說明（4) 子效率。本發明的另一目的是提供一種有機電激發光元件及其製造方法，以解決習知各種改善元件外部量子效率的方法中會有無法量產、成本大幅提高以及限制元件縮小化之問題。本發明的再一目的是提供一種有機電激發光元件及其製造方法，以避免濕氣與氣體滲入擴散至塑膠基板或可撓式基板之有機電激發光元件中，進而提高元件之使用壽命0 本發明提出一種有機電激發光元件，此元件包括一基板、一外部量子效率促進結構、一透明陽極層、至少一有機官能層、一絕緣層以及一陰極層。其中，基板例如是一塑膠基板或一可撓式基板。而在基板上則是配置此外部量子效率促進結構，其中此外部量子效率促進結構係由一層以上之高折射率薄膜以及一層以上之低折射率薄膜彼此交錯配置所構成之複數層結構。在本發明中，外部量子效率促進結構中之高折射率薄膜與低折射率薄膜其中之一係為一有機高分子材料，而另一則是一無機介電材料。而且在外部量子效率促進結構之底層所配置的是高折射率薄膜。另外，透明陽極層係配置在外部量子效率促進結構上。有機官能層係配置在透明陽極層上。而絕緣層係配置在有機官能層與透明陽極層之間，用以定義出發光區域之位置。此外，陰極層係配置在有機官能層上，而構成一有機電激發光元件。本發明提出一種有機電激發光元件的製造方法，此方9472twf1.pt c page 7 576127 _ case number 91122707 _ year month day __ 5. Description of the invention (4) Sub-efficiency. Another object of the present invention is to provide an organic electroluminescent device and a method for manufacturing the same, in order to solve the problems in the conventional methods for improving the external quantum efficiency of the device, such as the problems of incapable mass production, greatly increased cost, and limiting the reduction of the device. Still another object of the present invention is to provide an organic electro-optic light emitting element and a manufacturing method thereof, so as to prevent moisture and gas from penetrating and diffusing into an organic electro-optical light emitting element of a plastic substrate or a flexible substrate, thereby improving the life of the element. The invention provides an organic electro-optical light-emitting element. The element includes a substrate, an external quantum efficiency promoting structure, a transparent anode layer, at least one organic functional layer, an insulating layer, and a cathode layer. The substrate is, for example, a plastic substrate or a flexible substrate. The external quantum efficiency promoting structure is arranged on the substrate. The external quantum efficiency promoting structure is a multiple layer structure composed of one or more high refractive index films and one or more low refractive index films interlaced with each other. In the present invention, one of the high refractive index film and the low refractive index film in the external quantum efficiency promoting structure is an organic polymer material, and the other is an inorganic dielectric material. Moreover, a high refractive index film is arranged on the bottom layer of the external quantum efficiency promoting structure. The transparent anode layer is disposed on the external quantum efficiency promoting structure. The organic functional layer is disposed on the transparent anode layer. The insulating layer is arranged between the organic functional layer and the transparent anode layer to define the position of the light emitting area. In addition, the cathode layer is disposed on the organic functional layer to constitute an organic electroluminescent device. The invention provides a method for manufacturing an organic electro-optical light element.

9472twfl.ptc 第8頁 576127 _案號 91122707_年月日__ 五、發明說明（5) 法係首先提供一基板，其中基板例如是一塑膠基板或一可挽式基板。之後，在基板上形成一外部量子效率促進結構，其中此外部量子效率促進結構係由一層以上之高折射率薄膜以及一層以上之低折射率薄膜交錯配置，而構成之複數層結構。在本發明中，外部量子效率促進結構中之高折射率薄膜與低折射率薄膜其中之一係為一有機高分子材料，而另一則是一無機介電材料。而且所形成之外部量子效率促進結構之底層是高折射率薄膜。之後，在外部量子效率促進結構上形成一透明陽極層。繼之，在透明陽極層上形成圖案化之一絕緣層，用以定義出發光區域之位置。接著，在透明陽極層與絕緣層上形成至少一有機官能層。最後，在有機官能層上形成一陰極層，以完成一有機電激發光元件之製作。本發明提出一種外部量子效率促進結構，其可應用於一有機電激發光元件中，此外部量子效率促進結構係由一層以上之高折射率薄膜以及一層以上之低折射率薄膜交錯配置所構成之複數層結構，其中高折射率薄膜以及低折射率薄膜之其中之一係為一有機高分子材料，而另一則是一無機介電材料。而且在外部量子效率促進結構之底層所配置的是高折射率薄膜。其中有機高分子材料例如是對二甲苯聚合物（P a r y 1 e n e )、金稀觸媒生產的環狀稀輕聚合物 (mCOC)、聚四氟乙稀（Polytetrafluorethylene ，PTFE)、聚四氟乙烤（polytetrafluoroethylene ，PCFE)、聚乙稀 (Polyethylene ，PE)、聚甲基丙稀酸甲酉旨（Poly( methyl methacrylate) ，PMMA)或感光型透明光阻。而無機介電材9472twfl.ptc Page 8 576127 _Case No. 91122707_Year Month__ V. Description of Invention (5) The law system first provides a substrate, where the substrate is, for example, a plastic substrate or a removable substrate. After that, an external quantum efficiency promoting structure is formed on the substrate, wherein the external quantum efficiency promoting structure is a plurality of layers composed of one or more high refractive index films and one or more low refractive index films arranged alternately. In the present invention, one of the high refractive index film and the low refractive index film in the external quantum efficiency promoting structure is an organic polymer material, and the other is an inorganic dielectric material. And the bottom layer of the external quantum efficiency promoting structure formed is a high refractive index thin film. Thereafter, a transparent anode layer is formed on the external quantum efficiency promoting structure. Next, a patterned insulating layer is formed on the transparent anode layer to define the position of the light emitting area. Then, at least one organic functional layer is formed on the transparent anode layer and the insulating layer. Finally, a cathode layer is formed on the organic functional layer to complete the fabrication of an organic electroluminescent device. The invention proposes an external quantum efficiency promoting structure, which can be applied to an organic electro-optical light-emitting device. The external quantum efficiency promoting structure is composed of more than one layer of high refractive index films and more than one layer of low refractive index films. In the multi-layer structure, one of the high refractive index film and the low refractive index film is an organic polymer material, and the other is an inorganic dielectric material. Moreover, a high-refractive-index thin film is arranged on the bottom layer of the external quantum efficiency promoting structure. The organic polymer materials are, for example, paraxylene polymer (P ary 1 ene), cyclic dilute light polymer (mCOC) produced by gold catalyst, polytetrafluoroethylene (PTFE), polytetrafluoroethylene Baked (polytetrafluoroethylene (PCFE), Polyethylene (PE), Poly (methyl methacrylate, PMMA) or photosensitive transparent photoresist. Inorganic dielectric

9472twfl.pt c 第9頁 576127 _案號 91122707__年月日___ 五、發明說明（6) 料例如是氮化石夕（S i N X )、氧化石夕（S i 〇 2 )、氧化石夕 (S i Ο X N Y )、硫化鋅和二氧化矽混合物（Z n S - S i 0 2 )、二氧化鈦（T i 0 2 )、鈦之氮化物（T i N X )、五氧化二钽（T a 2 0 5 )、鋁和紹合金之氧化物和氮化物（A 1 2 0 3、A 1 N )、砷化銦 (I n A s )、銻化銦（I n S b )、銦的氧化物（I n 2 〇 2 )、鎂的氧化物及氟化物（M g 0、M g F 2 )、氟化鈉（N a F )、鈥的氧化物及氟化物（N d 2 0 3、N d F、N d F 3 )、銻氧化物及硫化物（s b 2 0 3、 Sb2S3)、碳化矽（SiC)、氧化鋅（ZnO)、氧化錫（SnO)、氧化銦錫（I T 0 )、或溶膠凝膠（S ο 1 - g e 1 )。本發明之有機電激發光元件及其製造方法，其於基板與陽極層之間形成具有半透明反射膜性質之一外部量子效率促進結構’而本發明就是利用半透明反射膜與有機電激發光元件形成微腔結構的概念與作法，以造成多重反射的作用’使得大部分發射光子能以接近垂直的方向射出，避免因光子發射角大於臨界角而陷於元件内部無法放射出來，藉以增進有機電激發光元件之外部量子效率，並提高發光元件的整體效率。本發明之有機電激發光元件及其製造方法，不但可降低製程複雜度，適於量產製程，而且還可降低基板和元件之總厚度（小於2 m m )，進而達到元件輕、薄之要求。、本發明將外部量子效率促進結構配置在塑膠基板或可撓式基板上，除了可以增進元件之外部量子效率之外，還可有效的防止濕氣與氣體滲透擴散至元件内部，葬以拎加元件之壽命。 θ 曰為讓本發明之上述和其他目的、特徵、和優點能更明9472twfl.pt c Page 9 576127 _Case No. 91122707__Year Month Date ___ 5. Description of the invention (6) The materials are, for example, nitride nitride (S i NX), oxide oxide (S i 〇2), stone oxide (S i 〇 XNY), a mixture of zinc sulfide and silicon dioxide (Z n S-S i 0 2), titanium dioxide (T i 0 2), titanium nitride (T i NX), tantalum pentoxide (T a 2 0 5), oxides and nitrides of aluminum and alloys (A 12 0 3, A 1 N), indium arsenide (I n A s), indium antimonide (I n S b), indium oxidation (I n 2 0 2), magnesium oxides and fluorides (M g 0, M g F 2), sodium fluoride (N a F), oxides and fluorides (N d 2 0 3, N d F, N d F 3), antimony oxides and sulfides (sb 2 0 3, Sb2S3), silicon carbide (SiC), zinc oxide (ZnO), tin oxide (SnO), indium tin oxide (IT 0) , Or sol-gel (S ο 1-ge 1). According to the organic electroluminescent device of the present invention and a method for manufacturing the same, an external quantum efficiency-promoting structure having one of the properties of a translucent reflective film is formed between the substrate and the anode layer. The concept and method of the element forming a microcavity structure to cause multiple reflections' allows most of the emitted photons to be emitted in a nearly vertical direction, avoiding being trapped inside the element because the photon emission angle is greater than the critical angle, so as to promote organic electricity Excite the external quantum efficiency of the light element and improve the overall efficiency of the light emitting element. The organic electroluminescent device and the manufacturing method of the invention can not only reduce the complexity of the process and are suitable for mass production processes, but also reduce the total thickness of the substrate and the component (less than 2 mm), thereby achieving the requirements of light and thin components. . According to the present invention, the external quantum efficiency promoting structure is arranged on a plastic substrate or a flexible substrate. In addition to improving the external quantum efficiency of the element, it can also effectively prevent moisture and gas from penetrating and diffusing into the element. Component life. θ: To make the above and other objects, features, and advantages of the present invention clearer

9472twfl.ptc 第10頁 576127 _案號 91122707_年月日__ 五、發明說明（7) 顯易懂，下文特舉一較佳實施例，並配合所附圖式，作詳細說明如下：圖式之標示說明： 1 0 0 :基板 1 0 2 :外部量子效率促進結構 1 0 4 :陽極層 1 0 5 :絕緣層 1 0 6 :有機官能層 1 0 8 :陰極層 1 0 2 a :高折射率薄膜 1 0 2 b :低折射率薄膜實施例第1圖是依照本發明一較佳實施例之有機電激發光元件結構之剖面示意圖；第2圖是第1圖之有機電激發光元件中之一外部量子效率促進結構之示意圖。請參照第1圖，本發明之有機電激發光元件的製造方法係首先提供一基板1 0 0，在本發明中，基板1 0 0例如是一塑膠基板或一可撓式基板。其中，基板1 0 0之材質例如是 PMMA 、聚破酸脂（polycarbonate ， PC)、聚脂 (polyester，PET)、聚喊楓（口〇1丫61:116^1]11"〇116，PES)、聚丙稀S旨（polyarylate，PAR)、環狀稀輕聚合物（cyclic olefin copolymer，C0C)、金稀觸媒生產的COC (mCOC)或上述之混合物。之後，在基板1 0 0上形成一外部量子效率促進結構1 0 2，其中此外部量子效率促進結構1 0 2係由一層以上之高折射率薄膜以及一層以上之低折射率薄膜交錯配9472twfl.ptc Page 10 576127 _Case No. 91122707_ Year Month Date__ V. Description of the invention (7) It is easy to understand. The following is a detailed description of a preferred embodiment and the accompanying drawings for detailed explanations: Explanation of the formula: 1 0 0: substrate 1 0 2: external quantum efficiency promoting structure 1 0 4: anode layer 1 0 5: insulating layer 1 0 6: organic functional layer 1 0 8: cathode layer 1 0 2 a: high Refractive index film 1 0 2 b: Example of a low refractive index film FIG. 1 is a schematic cross-sectional view of the structure of an organic electroluminescent device according to a preferred embodiment of the present invention; FIG. 2 is an organic electroluminescent device of FIG. 1 Schematic of one of the external quantum efficiency promoting structures. Referring to FIG. 1, a method for manufacturing an organic electro-optical light emitting device according to the present invention is to first provide a substrate 100. In the present invention, the substrate 100 is, for example, a plastic substrate or a flexible substrate. Among them, the material of the substrate 100 is, for example, PMMA, polycarbonate (PC), polyester (PET), poly maple (口〇1 丫 61: 116 ^ 1] 11 " 〇116, PES ), Polypropylene S (polyarylate, PAR), cyclic olefin copolymer (C0C), COC (mCOC) produced by gold catalyst, or a mixture thereof. Thereafter, an external quantum efficiency promoting structure 102 is formed on the substrate 100, wherein the external quantum efficiency promoting structure 102 is staggered by one or more high refractive index films and one or more low refractive index films.

9472twfl.ptc 第11頁 576127 _案號91122707_年月日__ 五、發明說明（8) 置，而構成之複數層結構。而且所形成之外部量子效率促進結構1 0 2之底層是高折射率薄膜。關於外部量子效率促進結構1 0 2之詳細剖面圖示如第2 圖所示。第2圖所舉例之外部量子效率促進結構1 〇 2係為一 7層的結構，其包括四層高折射率薄膜1 0 2 a以及三層的低折射率薄膜1 0 2 b，且此四層高折射率薄膜1 0 2 a以及此三層的低折射率薄膜1 0 2 b係以交錯沈積而形成。值得注意的是，外部量子效率促進結構1 0 2之底層與頂層都是高折射率薄膜1 0 2 a。在本發明中，此外部量子效率促進結構1 0 2中之高折射率薄膜1 0 2 a與低折射率薄膜1 0 2 b之其中之一係為一有機高分子材料，而另一則是一無機介電材料。其中，有機高分子材料例如是Pary1ene 、mCOC 、PTFE 、PCFE 、PE 、PMMA 或感光型透明光阻。而無機介電材料例如是氮化矽、氧化矽或溶膠凝膠。而製作外部量子效率促進結構1 0 2之有機高分子材料層之方法例如是一藏鍍法或一化學氣相沈積法，或是一喷墨印刷法、一旋轉塗佈法或一浸潰塗佈法 (其中，在喷墨印刷、旋轉塗佈或浸潰塗佈之後，還必須進行一加熱固化步驟）。倘若有機高分子材料層是使用感光型透明光阻材質，則必須另外搭配一曝光製程。另外，製作外部量子效率促進結構1 0 2之無機介電材料層之方法例如是一濺鑛法或一蒸鑛法，或是一喷墨印刷法、一旋轉塗佈法或一浸潰塗佈法（其中，在喷墨印刷、旋轉塗佈或浸潰塗佈之後，還必須進行一加熱固化步驟）。在本發明之外部量子效率促進結構1 0 2中，無機介電9472twfl.ptc Page 11 576127 _Case No. 91122707_Year_Month__ V. Description of the invention (8) The structure of multiple layers. The bottom layer of the external quantum efficiency promoting structure 102 is a high refractive index thin film. A detailed cross-sectional view of the external quantum efficiency promoting structure 102 is shown in FIG. 2. The external quantum efficiency promoting structure 1 2 illustrated in FIG. 2 is a 7-layer structure, which includes four high-refractive-index films 1 0 2 a and three low-refractive-index films 1 0 2 b. The high-refractive-index thin films 1 0 2 a and the three low-refractive-index thin films 1 0 2 b are formed by staggered deposition. It is worth noting that both the bottom layer and the top layer of the external quantum efficiency promoting structure 102 are high refractive index films 102a. In the present invention, one of the high-refractive-index thin film 1 0 2 a and the low-refractive-index thin film 1 0 2 b in the external quantum efficiency promoting structure 10 is an organic polymer material, and the other is an organic polymer material. Inorganic dielectric materials. Among them, the organic high molecular material is, for example, Pary1ene, mCOC, PTFE, PCFE, PE, PMMA, or photosensitive transparent photoresist. The inorganic dielectric material is, for example, silicon nitride, silicon oxide, or sol-gel. The method for preparing the organic polymer material layer of the external quantum efficiency promoting structure 102 is, for example, a Tibetan plating method or a chemical vapor deposition method, or an inkjet printing method, a spin coating method, or a dip coating method. Cloth method (wherein a heat curing step must be performed after inkjet printing, spin coating or dip coating). If the organic polymer material layer is made of a photosensitive transparent photoresist material, it must be matched with an exposure process. In addition, the method for forming the inorganic dielectric material layer of the external quantum efficiency promoting structure 102 is, for example, a splatter method or a vaporization method, or an inkjet printing method, a spin coating method, or a dip coating method. Method (in which, after inkjet printing, spin coating or dip coating, a heat curing step must be performed). In the external quantum efficiency promoting structure 10 of the present invention, an inorganic dielectric

9472twf1.pt c 第12頁 576127 _案號 91122707_年月日__ 五、發明說明（9) 材料層除了具有促進外部量子效率的功能之外，還提供阻止濕氣和氣體的擴散與穿透的功能。然而，無機介電材料層之表面因製程因素容易有針孔或裂痕，而這些缺陷會提供濕氣與氣體擴散與穿透的途徑。因此，本發明利用有機高分子材料層與無機介電材料層交錯形成，可避免無機介電材料層之裂痕在不同膜層間的持績成長。而且，由於本發明之有機高分子材料層亦具有促進外部量子效率的功能以及阻止濕氣和氣體的擴散與穿透的功能，因此藉由無機介電材料層以及有機高分子材料層交錯配置所構成之多層結構，不僅具有促進外部量子效率之功能，而且還同時具有保護之功效。之後，請繼續參照第1圖，在外部量子效率促進結構 102上形成一透明陽極層104。其中，透明陽極層104之材質例如是銦錫氧化物（I T 0 )、銦鋅氧化物（I Z 0 )或鋁鋅氧化物（AZO)。且透明陽極層104之厚度例如為500埃至10000 埃。接著，在透明陽極層1 0 4上形成圖案化之一絕緣層 1 0 5 ，用以定義出元件中每一發光區域之位置。其中，絕緣層1 0 5之材質係為一感光型高分子或一非感光型高分子，其厚度例如是大於0 . 0 5微米，且此絕緣層1 0 5之一體電阻值例如是1 0 6 〇 h m - c m以上。繼之，在透明陽極層1 0 4與絕緣層1 0 5上形成至少一有機官能層1 0 6。其中，有機官能層1 0 6例如是具有發光特性的有機小分子或是高分子材料，係選自電洞注入層、電洞傳輸層、發光層、電子傳輸層與電子注入層，或上述之組9472twf1.pt c Page 12 576127 _ Case No. 91122707 _ month and day __ V. Description of the invention (9) In addition to the function of promoting external quantum efficiency, the material layer also provides resistance to the diffusion and penetration of moisture and gases Functions. However, the surface of the inorganic dielectric material layer is prone to pinholes or cracks due to process factors, and these defects provide a way for moisture and gas to diffuse and penetrate. Therefore, in the present invention, the organic polymer material layer and the inorganic dielectric material layer are alternately formed, which can avoid the sustained growth of cracks in the inorganic dielectric material layer between different film layers. In addition, since the organic polymer material layer of the present invention also has a function of promoting external quantum efficiency and a function of preventing diffusion and penetration of moisture and gas, the inorganic dielectric material layer and the organic polymer material layer are alternately arranged. The multilayer structure not only has the function of promoting external quantum efficiency, but also has the function of protection. After that, please continue to refer to FIG. 1 to form a transparent anode layer 104 on the external quantum efficiency promoting structure 102. The material of the transparent anode layer 104 is, for example, indium tin oxide (I T 0), indium zinc oxide (I Z 0), or aluminum zinc oxide (AZO). The thickness of the transparent anode layer 104 is, for example, 500 angstroms to 10,000 angstroms. Next, a patterned insulating layer 105 is formed on the transparent anode layer 104 to define the position of each light-emitting region in the device. The material of the insulating layer 105 is a photosensitive polymer or a non-photosensitive polymer, and its thickness is, for example, greater than 0.05 micrometers, and a bulk resistance value of the insulating layer 105 is, for example, 10 Above 60 hm-cm. Then, at least one organic functional layer 106 is formed on the transparent anode layer 104 and the insulating layer 105. The organic functional layer 106 is, for example, a small organic molecule or a polymer material having a light-emitting property, and is selected from a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, and an electron injection layer, or one of the foregoing. group

9472twfl .ptc 第13頁 576127 _案號 91122707_年月日__ 五、發明說明（10) 合，其所放射之光線例如是籃光、綠光、紅光、白光或其他單色光。且有機官能層106之厚度係為500埃至10000 埃。然後，在有機官能層1 0 6上形成一陰極層1 〇 8 ，以構成一有機電激發光元件。其中，陰極層1 0 8之材質例如是鋁、鋁/氟化鋰、鈣、鎂/銀或銀。且陰極層1 0 8之厚度例如是5 0 0埃至1 0 0 0 0埃。本發明之有機電激發光元件包括一基板1 〇〇、一外部量子效率促進結構1 0 2、一透明陽極層1 0 4、一絕緣層 105、至少一有機官能層106以及一陰極層108。其中，基板1 0 0例如是一塑膠基板或一可挽式基板。而在基板1 0 0上則是配置有外部量子效率促進結構1 0 2，且此外部量子效率促進結構1 0 2係由一層以上之高折射率薄膜以及一層以上之低折射率薄膜彼此交錯配置所構成的複數層結構。在本發明中，外部量子效率促進結構1 0 2中之高折射率薄膜與低折射率薄膜其中之一係為一有機高分子材料，而另一則係為一無機介電材料，而且在外部量子效率促進結構1 0 2之底層所配置的是高折射率薄膜。關於外部量子效率促進結構1 0 2之材質之說明已在先前詳述，在此不再贅述。另外，透明陽極層1 0 4係配置在外部量子效率促進結構1 0 2上。有機官能層1 0 6係配置在透明陽極層1 0 4上。而絕緣層1 0 5係配置在透明陽極1 0 4與有機官能層1 0 6之間，用以定義出每一發光區域之位置。而陰極層1 0 8係配置在有機官能層1 0 6上，以構成一有機電激發光元件。9472twfl .ptc Page 13 576127 _ Case No. 91122707 _ _____ Five, the description of the invention (10), the light emitted by it is, for example, basket light, green light, red light, white light or other monochromatic light. The thickness of the organic functional layer 106 is 500 Angstroms to 10,000 Angstroms. Then, a cathode layer 108 is formed on the organic functional layer 106 to form an organic electroluminescent element. The material of the cathode layer 108 is, for example, aluminum, aluminum / lithium fluoride, calcium, magnesium / silver, or silver. The thickness of the cathode layer 108 is, for example, 500 angstroms to 100 angstroms. The organic electroluminescent device of the present invention includes a substrate 100, an external quantum efficiency promoting structure 102, a transparent anode layer 104, an insulating layer 105, at least one organic functional layer 106, and a cathode layer 108. The substrate 100 is, for example, a plastic substrate or a pullable substrate. On the substrate 100, an external quantum efficiency promoting structure 102 is arranged. The external quantum efficiency promoting structure 102 is composed of one or more high-refractive index films and one or more low-refractive index films. The structure of a plurality of layers. In the present invention, one of the high-refractive index film and the low-refractive index film in the external quantum efficiency promoting structure 102 is an organic polymer material, and the other is an inorganic dielectric material. The bottom layer of the efficiency promoting structure 102 is configured with a high refractive index film. The description of the material of the external quantum efficiency promoting structure 102 has been described in detail previously, and will not be repeated here. The transparent anode layer 104 is arranged on the external quantum efficiency promoting structure 102. The organic functional layer 106 is disposed on the transparent anode layer 104. The insulating layer 105 is disposed between the transparent anode 104 and the organic functional layer 106 to define the position of each light-emitting area. The cathode layer 108 is disposed on the organic functional layer 106 to form an organic electro-optic light emitting element.

9472twfl.ptc 第14頁 576127 _案號 91122707_年月日__ 五、發明說明（11) 本發明之有機電激發光元件及其製造方法，由於其於基板1 0 0與陽極層1 0 4之間形成具有半透明反射膜功效之一外部量子效率促進結構1 0 2，也就是利用半透明反射膜與有機電激發光元件形成微腔結構的概念與作法，以造成多重反射的作用，而使得大部分發射光子能以接近垂直的方向射出，避免因光子發射角大於臨界角而陷於元件内部無法放射出來。因此，本發明可有效的增進有機電激發光元件之外部量子效率，進而提高發光元件的整體效率。綜合以上所述，本發明具有下列優點： 1 .本發明之有機電激發光元件及其製造方法，可有效的增進有機電激發光元件之外部量子效率，進而提高發光元件的整體效率。 2. 本發明之有機電激發光元件及其製造方法，不但可降低製程複雜度，適於量產製程，而且還可達到元件輕、薄化之要求。 3. 本發明將外部量子效率促進結構配置在塑膠基板或可撓式基板上，可有效的防止濕氣擴散滲透進入元件内部之功效，藉以增加元件之壽命。本發明外部量子效率促進結構不僅可應用於有機發光二極體元件，還可應用其他照明元件，例如無機電激發光元件等等。雖然本發明已以較佳實施例揭露如上，然其並非用以限定本發明，任何熟習此技藝者，在不脫離本發明之精神和範圍内，當可作些許之更動與潤飾，因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。9472twfl.ptc Page 14 576127 _Case No. 91122707_Year_Month__ V. Description of the invention (11) The organic electro-optical light-emitting element of the present invention and its manufacturing method, because it is on the substrate 1 0 0 and the anode layer 1 0 4 One of the functions of a semi-transparent reflective film is formed between the external quantum efficiency promoting structures 102, that is, the concept and method of forming a micro-cavity structure by using a semi-transparent reflective film and an organic electro-active light element to cause multiple reflections, and This allows most of the emitted photons to be emitted in a near-vertical direction, avoiding being trapped inside the element and not being emitted because the photon emission angle is greater than the critical angle. Therefore, the present invention can effectively improve the external quantum efficiency of the organic electro-excitation light element, thereby improving the overall efficiency of the light emitting element. To sum up, the present invention has the following advantages: 1. The organic electroluminescent device and the manufacturing method thereof according to the present invention can effectively improve the external quantum efficiency of the organic electroluminescent device, thereby improving the overall efficiency of the light emitting device. 2. The organic electroluminescent device and the manufacturing method thereof according to the present invention can not only reduce the complexity of the manufacturing process, are suitable for mass production processes, but also meet the requirements of lighter and thinner components. 3. In the present invention, the external quantum efficiency promoting structure is arranged on a plastic substrate or a flexible substrate, which can effectively prevent the moisture from diffusing and penetrating into the inside of the element, thereby increasing the life of the element. The external quantum efficiency promoting structure of the present invention can be applied not only to organic light emitting diode elements, but also other lighting elements, such as inorganic electro-excitation light elements and the like. Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications and retouching without departing from the spirit and scope of the present invention. The scope of protection shall be determined by the scope of the attached patent application.

9472twfl.pt c 第15頁 576127 案號 91122707 年月曰修正圖式簡單說明第1圖是依照本發明一較佳實施例之有機電激發光元件結構之剖面示意圖；以及第2圖是依照本發明一較佳實施例之應用於有機電激發光元件中之一外部量子效率促進結構之示意圖。9472twfl.pt c Page 15 576127 Case No. 91122707 Revised diagrams Brief description Figure 1 is a schematic cross-sectional view of the structure of an organic electro-optical excitation light element according to a preferred embodiment of the present invention; and Figure 2 is in accordance with the present invention A schematic diagram of an external quantum efficiency-promoting structure applied to an organic electro-excitation light device in a preferred embodiment.

9472twfl.pt c 第16頁9472twfl.pt c p. 16

Claims

576127 _案號 91122707_年月日__ 六、申請專利範圍 1 . 一種有機電激發光元件，包括：一基板；一外部量子效率促進結構，配置在該基板上，其中該外部量子效率促進結構係由一層以上高折射率薄膜以及一層以上之低折射率薄膜彼此交錯配置所構成的複數層結構；一透明陽極層，配置在該外部量子效率促進結構上；至少一有機官能層，配置在該透明陽極層上；以及一陰極層，配置在該有機官能層上。 2. 如申請專利範圍第1項所述之有機電激發光元件，其中該基板係為一塑膠基板或一可撓式基板。 3. 如申請專利範圍第1項所述之有機電激發光元件，其中該基板之材質包括PMMA、PC、PET、PES、PAR、COC、 mCOC或上述之混合物。 4. 如申請專利範圍第1項所述之有機電激發光元件，其中該外部量子效率促進結構之一底層係為高折射率薄膜。 5 .如申請專利範圍第1項所述之有機電激發光元件，其中該些高折射率薄膜與該些低折射率薄膜其中之一係為一有機高分子材料，而另一則是一無機介電材料。 6 .如申請專利範圍第5項所述之有機電激發光元件，其中該有機高分子材料包括parylene、mC0C、PTFE、 PCFE、PE 或PMMA 〇 7 .如申請專利範圍第5項所述之有機電激發光元件，576127 _Case No. 91122707_Year_Month__ VI. Application for patent scope 1. An organic electro-optic light element, comprising: a substrate; an external quantum efficiency promoting structure, arranged on the substrate, wherein the external quantum efficiency promoting structure It is a multiple-layer structure composed of one or more high-refractive-index films and one or more low-refractive-index films arranged alternately with each other; a transparent anode layer disposed on the external quantum efficiency promoting structure; at least one organic functional layer disposed on the A transparent anode layer; and a cathode layer disposed on the organic functional layer. 2. The organic electro-optic light-emitting device according to item 1 of the scope of patent application, wherein the substrate is a plastic substrate or a flexible substrate. 3. The organic electro-optic light-emitting device according to item 1 of the scope of patent application, wherein the material of the substrate includes PMMA, PC, PET, PES, PAR, COC, mCOC, or a mixture thereof. 4. The organic electro-optic light-emitting device according to item 1 of the scope of patent application, wherein one of the bottom layers of the external quantum efficiency promoting structure is a high refractive index thin film. 5. The organic electro-optic light-emitting device according to item 1 of the scope of patent application, wherein one of the high refractive index films and the low refractive index films is an organic polymer material, and the other is an inorganic medium电材料。 Electric materials. 6. The organic electro-optic light-emitting device according to item 5 in the scope of patent application, wherein the organic polymer material includes parylene, mC0C, PTFE, PCFE, PE or PMMA. 7 As described in item 5 of the scope of patent application, Electromechanical excitation light element,

9472twfl.ptc 第17頁 576127 _案號 91122707_年月日_fvi_ 六、申請專利範圍其中該有機高分子材料包括感光型透明光阻。 8 ·如申請專利範圍第5項所述之有機電激發光元件，其中該無機介電材料包括氮化矽、氧化矽、碳化矽、氮氧化矽、硫化鋅和二氧化矽混合物、二氧化鈦、鈦之氮化物、五氧化二组、紹和紹合金之氧化物和氮化物、珅化銦、銻化銦、銦的氧化物、鎂的氧化物及氟化物、氟化 φ 納、鈦的氧化物及氟化物、銻氧化物及硫化物、氧化鋅、氧化錫、氧化銦錫或溶膠凝膠。 9 .如申請專利範圍第1項所述之有機電激發光元件，其中該透明陽極層之材質包括銦錫氧化物、銦鋅氧化物或 ί呂鋅氧化物。 1 0 .如申請專利範圍第1項所述之有機電激發光元件，其中該透明陽極層之厚度係為5 0 0埃至1 0 0 0 0埃。 1 1 .如申請專利範圍第1項所述之有機電激發光元件，其中更包括一絕緣層，配置在該透明陽極層與該有機官能層之間，用以定義出一發光區域之位置。 1 2 .如申請專利範圍第1 1項所述之有機電激發光元件，其中該絕緣層之材質係為一感光型高分子或一非感光型高分子，且該絕緣層之厚度係大於0 . 0 5微米。 1 3 .如申請專利範圍第1 1項所述之有機電激發光元件，其中該絕緣層之一體電阻值係為1 0fi 〇 h m - c m以上。 1 4 .如申請專利範圍第1項所述之有機電激發光元件，其中該有機官能層所放射出之光線係為藍光、綠光、紅光、白光或其他單色光。9472twfl.ptc Page 17 576127 _ Case No. 91122707_ Month and Day _fvi_ VI. Scope of patent application The organic polymer material includes a photosensitive transparent photoresist. 8. The organic electro-optic light-emitting device according to item 5 of the scope of the patent application, wherein the inorganic dielectric material includes silicon nitride, silicon oxide, silicon carbide, silicon oxynitride, a mixture of zinc sulfide and silicon dioxide, titanium dioxide, titanium Nitrides, pentoxides, oxides and nitrides of Shaw and Shaw alloys, indium hafnium, indium antimonide, indium oxides, magnesium oxides and fluorides, fluorinated φ nano, titanium oxide And fluoride, antimony oxide and sulfide, zinc oxide, tin oxide, indium tin oxide or sol-gel. 9. The organic electro-optic light-emitting device according to item 1 of the scope of patent application, wherein the material of the transparent anode layer includes indium tin oxide, indium zinc oxide, or zinc oxide. 10. The organic electro-optic light-emitting device according to item 1 of the scope of the patent application, wherein the thickness of the transparent anode layer is 500 angstroms to 100 angstroms. 11. The organic electro-optic light-emitting device according to item 1 of the scope of patent application, further comprising an insulating layer disposed between the transparent anode layer and the organic functional layer to define a position of a light-emitting area. 1 2. The organic electro-optic light-emitting device according to item 11 of the scope of patent application, wherein the material of the insulating layer is a photosensitive polymer or a non-photosensitive polymer, and the thickness of the insulating layer is greater than 0. .5 5 microns. 13. The organic electro-optic light-emitting device according to item 11 of the scope of the patent application, wherein a bulk resistance value of one of the insulating layers is 10 fi 0 h m-c m or more. 14. The organic electro-optic light-emitting device according to item 1 of the scope of patent application, wherein the light emitted by the organic functional layer is blue light, green light, red light, white light, or other monochromatic light.

9472twfl.ptc 第18頁 576127 _案號 91122707_年月日__ 六、申請專利範圍 1 5 ·如申請專利範圍第1項所述之有機電激發光元件，其中該有機官能層之厚度係為5 0 0埃至1 0 0 0 0埃。 1 6 ·如申請專利範圍第1項所述之有機電激發光元件，其中該陰極層之材質包括鋁、鋁/氟化鋰、鈣、鎂/銀或銀。 1 7 ·如申請專利範圍第1項所述之有機電激發光元件，其中該陰極層之厚度係為5 0 0埃至1 0 0 0 0埃。 1 8 . —種有機電激發光元件的製造方法，包括：提供一基板；在該基板上形成一外部量子效率促進結構，其中該外部量子效率促進結構係由一層以上之高折射率薄膜以及一層以上之低折射率薄膜交錯配置，而構成之複數層結構；在該外部量子效率促進結構上形成一透明陽極層；在該透明陽極層上形成至少一有機官能層；以及在該有機官能層上形成一陰極層。 1 9 .如申請專利範圍第1 8項所述之有機電激發光元件的製造方法，其中該基板係為一塑膠基板或一可撓式基板。 2 0 .如申請專利範圍第1 8項所述之有機電激發光元件的製造方法，其中該外部量子效率促進結構之一底層係為高折射率薄膜。 2 1 .如申請專利範圍第1 8項所述之有機電激發光元件的製造方法，其中在該透明陽極層與該有機官能層之間更包括形成有一圖案化之絕緣層，用以定義出一發光區域之9472twfl.ptc Page 18 576127 _Case No. 91122707_Year_Month__ VI. Patent Application Range 1 5 · The organic electroluminescent device described in item 1 of the patent application range, wherein the thickness of the organic functional layer is 50 Angstroms to 100 Angstroms. 16 · The organic electro-optic light-emitting device according to item 1 of the scope of patent application, wherein the material of the cathode layer includes aluminum, aluminum / lithium fluoride, calcium, magnesium / silver, or silver. 17 · The organic electro-optic light-emitting device according to item 1 of the scope of the patent application, wherein the thickness of the cathode layer is 500 angstroms to 100 angstroms. 18. A method for manufacturing an organic electro-optic light-emitting device, comprising: providing a substrate; forming an external quantum efficiency promoting structure on the substrate, wherein the external quantum efficiency promoting structure is composed of more than one layer of high refractive index film and one layer The above low-refractive-index thin films are staggered to form a plurality of layers; a transparent anode layer is formed on the external quantum efficiency promoting structure; at least one organic functional layer is formed on the transparent anode layer; and on the organic functional layer A cathode layer is formed. 19. The method for manufacturing an organic electroluminescent device according to item 18 of the scope of patent application, wherein the substrate is a plastic substrate or a flexible substrate. 20. The method for manufacturing an organic electro-optical light-emitting device according to item 18 in the scope of the patent application, wherein one of the bottom layers of the external quantum efficiency promoting structure is a high refractive index film. 2 1. The method for manufacturing an organic electro-optical light-emitting device according to item 18 of the scope of patent application, wherein a patterned insulating layer is further formed between the transparent anode layer and the organic functional layer to define Of a light-emitting area

9472twfl.pt c 第19頁 576127 _案號 91122707_年月日__ 六、申請專利範圍. 位置。 2 2 ·如申請專利範圍第2 1項所述之有機電激發光元件的製造方法，其中該絕緣層之材料係為一感光型高分子或一非感光型高分子，且該絕緣層之厚度係大於0 . 0 5微米。 2 3 .如申請專利範圍第1 8項所述之有機電激發光元件的製造方法，其中該些高折射率薄膜與該些低折射率薄膜其中之一係為一有機高分子材料層，而另一則是一無機介電材料層。 2 4 .如申請專利範圍第2 3項所述之有機電激發光元件的製造方法，其中於製作該外部量子效率促進結構之該有機高分子材料層之方法包括一錢鑛法、一化學氣相沈積法、一喷墨印刷法、一旋轉塗佈法或一浸潰塗佈法。 2 5 .如申請專利範圍第2 3項所述之有機電激發光元件的製造方法，其中於製作該外部量子效率促進結構之該無機介電材料層之方法包括一錢鍵法、一蒸鍍法、一喷墨印刷法、一旋轉塗佈法或一浸潰塗佈法。 2 6 . —種外部量子效率促進結構，該結構係由一層以上之高折射率薄膜以及一層以上之低折射率薄膜交錯配置所構成的複數層結構，其中該些高折射率薄膜以及該些低折射率薄膜之其中之一係為一有機高分子材料，而另一則是一無機介電材料。 2 7.如申請專利範圍第2 6項所述之外部量子效率促進結構，其中該外部量子效率促進結構之一底層係為高折射率薄膜。9472twfl.pt c Page 19 576127 _ Case No. 91122707 _ Month and Day __ 6. Scope of patent application. Location. 2 2 · The method for manufacturing an organic electroluminescent device according to item 21 of the scope of the patent application, wherein the material of the insulating layer is a photosensitive polymer or a non-photosensitive polymer, and the thickness of the insulating layer Department is greater than 0.05 microns. 2 3. The method for manufacturing an organic electroluminescent device according to item 18 of the scope of the patent application, wherein one of the high refractive index films and the low refractive index films is an organic polymer material layer, and The other is an inorganic dielectric material layer. 24. The method for manufacturing an organic electro-optical light-emitting device according to item 23 of the scope of the patent application, wherein the method for fabricating the organic polymer material layer of the external quantum efficiency promoting structure includes a money mining method, a chemical gas A phase deposition method, an inkjet printing method, a spin coating method, or a dip coating method. 25. The method for manufacturing an organic electro-optic light-emitting device according to item 23 of the scope of the patent application, wherein the method of fabricating the inorganic dielectric material layer of the external quantum efficiency promoting structure includes a coin bond method, a vapor deposition method Method, an inkjet printing method, a spin coating method, or a dip coating method. 2 6. A kind of external quantum efficiency promoting structure, the structure is a multiple layer structure composed of more than one layer of high refractive index thin film and more than one layer of low refractive index thin film, wherein the high refractive index films and the low refractive index films One of the refractive index films is an organic polymer material, and the other is an inorganic dielectric material. 2 7. The external quantum efficiency promoting structure according to item 26 of the scope of the patent application, wherein one of the bottom layers of the external quantum efficiency promoting structure is a high refractive index thin film.

9472twfl.pt c 第20頁 576127 _案號 91122707_年月日__ 六、申請專利範圍 2 8 .如申請專利範圍第2 6項所述之外部量子效率促進結構，其中該有機高分子材料包括P a r y 1 e n e、in C 0 C、 PTFE ^ PCFE 〜PE 或PMMA ° 2 9 .如申請專利範圍第2 6項所述之外部量子效率促進結構，其中該有機高分子材料包括感光型透明光阻。 3 0 .如申請專利範圍第2 6項所述之外部量子效率促進結構，其中該無機介電材料包括氮化石夕、氧化石夕、碳化矽、氮氧化矽、硫化鋅和二氧化矽混合物、二氧化鈦、鈦之氮化物、五氧化二組、紹和铭合金之氧化物和氮化物、坤化銦、銻化钢、銦的氧化物、鎂的氧化物及氟化物、氟化鈉、鈦的氧化物及氟化物、錄氧化物及硫化物、氧化鋅、氧化錫、氧化銦錫或溶膠凝膠。9472twfl.pt c page 20 576127 _ case number 91122707 _ month and year __ VI. Patent application scope 2 8. The external quantum efficiency promotion structure as described in item 26 of the patent application scope, wherein the organic polymer material includes P ary 1 ene, in C 0 C, PTFE ^ PCFE ~ PE or PMMA ° 2 9. The external quantum efficiency promoting structure as described in item 26 of the patent application scope, wherein the organic polymer material includes a photosensitive transparent photoresist . 30. The external quantum efficiency promoting structure as described in item 26 of the scope of the patent application, wherein the inorganic dielectric material includes nitride nitride, oxidized silica, silicon carbide, silicon oxynitride, zinc sulfide, and a mixture of silicon dioxide, Titanium dioxide, titanium nitride, pentoxide, oxides and nitrides of Shaoheming alloy, indium oxide, antimony steel, indium oxide, magnesium oxide and fluoride, sodium fluoride, titanium Oxides and fluorides, oxides and sulfides, zinc oxide, tin oxide, indium tin oxide or sol-gel.

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