TW571328B

TW571328B - Getter assembly applied in vacuum display panel

Info

Publication number: TW571328B
Application number: TW89124030A
Authority: TW
Inventors: Cheng-Chung Lee; Ruey-Feng Jean
Original assignee: Ind Tech Res Inst
Priority date: 2000-11-14
Filing date: 2000-11-14
Publication date: 2004-01-11

Abstract

A getter assembly applied in vacuum display panel is disclosed. The getter assembly comprises a non-evaporate getter assembly and an evaporative getter, which is characterized in that the getter is arranged in parallel together. Thus, the material emitted after the evaporative getter functions generates a shield for the non-evaporative getter. The gas generated by the non-evaporative getter does not affect the vacuum state in the vacuum display panel. In the preferred embodiment, the thickness of the vacuum display panel can accommodate the getter. If the vacuum display panel is too thin, a modified embodiment can be applied, i.e., the getter assembly can be adjusted to connect to the vacuum display panel, and generate the induction current for functioning by electromagnetic wave in radio frequency, so as to feed-through the electrode. Using the getter assembly at a specific position, the vacuum display panel can maintain and achieve the high-vacuum state at 10-6 to 10-7 torr.

Description

571328 _案號89124030_年月曰修正_ 五、發明說明（1) 【發明所屬之技術領域】本發明一般是有關於用在真空顯示面板之一組吸氣劑總成，特別是有關於此一真空顯示面板之吸氣劑總成含有並排的非汽化吸氣劑及汽化吸氣劑，藉此，使得汽化吸氣劑作用後所放射之物質對非汽化吸氣劑產生障蔽，及非汽化吸氣劑作用所產生之氣體不影響真空顯示面板内之真空狀態。【先前技術】對於一些真空顯示面板；如場發射裝置FED ( field emission display)、電漿顯示裝置 PDP( plasma display panel)及真空螢光顯示器 VFD( vacuum fluorescence display)等，其高真空要求，將直接影響此類裝置之品質及壽命。也因此達到高真空度將是裝配此類裝置之品質及可靠度之最重要條件。換句話說，達到此一高真空度最有效的方式是降低或是去除此類裝置真空腔内之殘餘氣體（ res i dua 1 gases)。此類氣體可能包含Η 2、C0 2、C0，此類殘餘氣體可能是由於在封止（tip-off)玻璃抽氣管的過程中，逸入真空腔所產生或是經由化學吸附而存在於真空腔表面。571328 _Case No. 89124030_ Modification of Year and Month_ V. Description of the Invention (1) [Technical Field to which the Invention belongs] The present invention generally relates to a group of getter assemblies used in vacuum display panels, and more particularly to this The getter assembly of a vacuum display panel contains side by side non-vaporized getter and vaporized getter, thereby making the material emitted after the action of the vaporized getter block the non-vaporized getter, and non-vaporized The gas generated by the getter does not affect the vacuum state in the vacuum display panel. [Previous technology] For some vacuum display panels, such as field emission display (FED), plasma display panel (PDP), and vacuum fluorescent display (VFD), the high vacuum requirements will be It directly affects the quality and life of such devices. Therefore, achieving high vacuum will be the most important condition for the quality and reliability of assembling such devices. In other words, the most effective way to achieve this high degree of vacuum is to reduce or remove res i dua 1 gases in the vacuum chamber of such devices. This kind of gas may contain krypton 2, C0 2, C0. This kind of residual gas may be generated in the process of tip-off glass extraction pipe, escape into the vacuum cavity or exist in vacuum through chemical adsorption. Cavity surface.

571328 五、發明說明（2) 絕大多數的真空顯示面板，電子皆由電子放射源所產生，如場發射裝置FED中之微尖端（micr〇tips)產生電子以顯像。當此類裝置之真空腔内存有殘餘氣㈣，放射源不僅會將殘餘氣體離子化而降低效率，且有電弧（arc丨ng )問題的產生而造成一系列之裝置毁損。 1 0 - 6到如，場螢光物多重電由一側真空泵中，必持續的腔内的強的物許氣體造成裝。例塗佈側由板藉孑L以過程時，真空質較成些，將 1 〇 - 7托為一般真空顯示面板操作時的基本要求 ^射裝置其内含兩個平面玻璃板；一個為内面質（fluorescent)之上層玻璃板及另一個於内子發射源組成之下層玻璃板，而上下兩層玻璃玻璃邊條使用玻璃膠焊結連結，最後留一玻璃 (pump)抽取真空腔内的空氣及氣體。於抽氣須將裝置維持在3 0 0〜40(TC的溫度下烘乾數小' 以雨真空泵抽氣。此一烘乾抽氣過程乃為除去 ^體，然而，於此一高溫之下仍有部分吸附特質吸附於裝置上。於封止玻璃抽氣孔時，會^ 之殘留，此一殘餘氣體若遭電子撞擊而離 ^ 置之嚴重毁損。於場= 内殘餘氣體之來源及起因已有詳述探討。不易釋放吸=殘：氣體之另一主要來源為微尖端之成分過程中，益、!氧體。由於隔離空氣之封止玻璃管抽氣孔，為解決除真空顯示面板内真空腔殘留之氣體、曼餘氣體存在問題之方法及裝置也就應運而571328 V. Description of the invention (2) In most vacuum display panels, electrons are generated by electron emission sources, such as microtips in the field emission device FED, which generate electrons for display. When there is residual gas in the vacuum cavity of such a device, the radiation source not only ionizes the residual gas and reduces the efficiency, but also causes arc (ng) problems to cause a series of device damage. 1 0-6 to, for example, the field phosphors are multi-charged by a strong vacuum in the vacuum pump on one side, which is caused by strong substances in the cavity. For example, when the coating side is borrowed from the plate, the vacuum quality is better. 10-7 brackets are the basic requirements when operating a general vacuum display panel. The projection device contains two flat glass plates; one is the inner surface. The upper glass plate and the lower glass plate are composed of an inner electron emission source, and the upper and lower glass glass edges are connected by a glass glue joint. Finally, a pump is left to extract the air in the vacuum chamber and gas. The device must be maintained at a temperature of 300 ~ 40 ° C for extraction. The extraction is performed by a rain vacuum pump. This drying and extraction process is to remove the body. However, under this high temperature, Some adsorption characteristics are still adsorbed on the device. When the glass suction hole is sealed, it will remain, and this residual gas will be severely damaged if it is dislodged by the impact of electrons. In the field = the source and cause of the residual gas in the field It has been discussed in detail. Difficult to release Suction = residue: Another major source of gas is the micro-tip component process, which is beneficial to oxygen. Because the air-tightness of the glass tube is blocked by the isolation of air, in order to solve the vacuum in the display panel The method and device that have problems with the residual gas in the cavity and the residual gas have also come into being.

第6頁正 571328 1 號 89124030 五、發明說明（3) 生。多年前，首先發展的便是一種於高直处 J丹a過程中明質的電子管。首開先例的便是使用鋇元素（ba . τ & (iron)或鎳（nickel)封於小直徑的坡璃管aF1Um> |使用鋇及敍（thorium)所合成之化合物為吸二物=期 1，吸收物質之發展，可區分為汽化吸氣劑及非汽^吸。鋇及鈦（titanium)為汽化吸氣劑較常使用=物"質 |好像鋇常使用於電子學上的應用如陰極射線管（crt)、鋇與紹也常形成金屬化合物如B a A 1 γ此一典型且商業用之鋇/鋁化合物可由義大利米蘭的SAES&司購得。” 咼功率、高操作溫度以及高電壓為近來電子裝置 I展趨勢’也因為此一發展趨勢，使得鋇較不易應用於吸氣劑。是以，發展應用於非汽化吸氣劑的物質也越重要。一種最典型的非汽化吸氣劑便是使用一層薄薄 |狀鍅（zirconium)或鈦粉末沉積於陽極上。而包含鍅的金屬合金便常使用於非汽化吸氣劑上，如锆及鋁所 |之金屬合金。通常使用電流活化吸氣劑上的物質，使其有如氣收裝置一樣的作用。經活化後之未飽和的吸氣劑表面，迅速的與真空顯示裝置中的Η2、Ηβ、CO、C〇2、N及殘餘氣體作用。當汽化吸氣劑運作時’吸氣劑表面上收物及鐵也曾近來氣劑〇就 ° 而上常的發離子顯得的帶或敛形成體吸物質〇# 的物 571328 _案號89124030_年月曰修正_ 五、發明說明（4) 質被活化且產生新的未飽合金屬層，迅速的吸收氣體與氣體產生化學作用。而非汽化吸氣劑的作用則更為複雜，除了適當的加熱吸氣劑表面上的物質之外，更須將擴散於表面上之惰性氧化物徹底清除以吸收真空腔内撞擊之氣體。汽化吸氣劑之物質通常使用含鋇之化合物，而且操作之溫度範圍介於8 0 0〜1 2 0 0°C，此一溫度範圍亦是吸氣劑上合金汽化的溫度。由於非汽化吸氣劑上之合金為鈦或锆，是以其操作之溫度範圍並不相同。汽化吸氣劑及非汽化吸氣劑上之化合物各有其特性及優點並且無法相互取代。也因此汽化吸氣劑及非汽化吸氣劑之組合裝置也承繼了彼此獨特之優點。雖然，以往有人企圖使用此一組合，但並未應用到此一相對位置，而無法使此一裝置達到現今充分吸收殘餘氣體之效能。【發明内容】本發明之主要目的為，提供一使用於真空顯示面板之吸氣劑總成，而有別於以往傳統之吸氣劑總成之缺點及缺陷。本發明之另一目的為，提供一使用於真空顯示面板之吸氣劑總成，其内含汽化吸氣劑及非汽化吸氣劑於特定之位置，且能個別作用達到最佳結果。Page 6 Zheng 571328 No. 1 89124030 V. Description of the invention (3) Health. Many years ago, the first development was a clear tube in the process of Gao Zhi J Dana. The first precedent is the use of barium (ba. Τ & (iron) or nickel (seal) in a small diameter sloped glass tube aF1Um > | The compound synthesized using barium and thorium is an absorbent = period 1. The development of absorbent materials can be divided into vaporized getter and non-vaporized getter. Barium and titanium (titanium) are more commonly used as vaporized getter = substance " quality | It seems that barium is often used in electronic applications For example, cathode ray tubes (crt), barium and shaw also often form metal compounds such as B a A 1 γ. A typical and commercial barium / aluminum compound is commercially available from SAES &, Milan, Italy. Temperature and high voltage are the recent trends of electronic devices. Also because of this development trend, barium is less likely to be used in getters. Therefore, it is more important to develop materials used in non-vaporized getters. One of the most typical Non-vaporized getters are deposited on the anode using a thin layer of zirconium or titanium powder. Metal alloys containing rhenium are often used on non-vaporized getters, such as zirconium and aluminum. Alloys, usually using a current-activated getter Quality, so that it has the same effect as the gas collection device. After activation, the surface of the unsaturated getter quickly reacts with Η2, Ηβ, CO, Co2, N and residual gas in the vacuum display device. When vaporized When the getter is in operation, the product and iron on the surface of the getter have also recently been used as a getter. On the other hand, the usual hair ions appear to be banded or converged to form a body getter. # 的物 571328 _ Case No. 89124030_year month Revision _ V. Description of the invention (4) The substance is activated and generates a new unsaturated metal layer, which quickly absorbs the gas and produces a chemical effect. The effect of the non-vaporized getter is more complicated, except for proper heating In addition to the material on the getter surface, the inert oxide diffused on the surface must be completely removed to absorb the impinging gas in the vacuum chamber. Barium-containing compounds are usually used as the material for vaporizing the getter, and the operating temperature range Between 8 0 ~ 1 2 0 ° C, this temperature range is also the temperature of the vaporization of the alloy on the getter. Since the alloy on the non-vaporized getter is titanium or zirconium, it is based on its operating temperature range and Not the same. The compounds on getter and non-vaporized getter each have their own characteristics and advantages and cannot be replaced with each other. Therefore, the combined device of vaporized getter and non-vaporized getter also inherits the unique advantages of each other. Although, in the past, some people An attempt was made to use this combination, but it was not applied to this relative position, so that this device could not achieve the current efficiency of fully absorbing residual gas. [Summary of the Invention] The main object of the present invention is to provide a vacuum display panel. The getter assembly is different from the disadvantages and shortcomings of the traditional getter assembly in the past. Another object of the present invention is to provide a getter assembly for a vacuum display panel, which contains a vaporized getter assembly. Aerosols and non-vaporized getters are in specific locations and can act individually to achieve the best results.

第8頁 571328 _案號89124030_年月曰修正_ 五、發明說明（5) ，本發明之更進一步之目的為，提供一使用於真空顯示面板之吸氣劑總成，其汽化吸氣劑並列於非汽化吸氣劑之旁的相對位置。本發明還有另一目的為，提供一使用於真空顯示面板之吸氣劑總成，其汽化吸氣劑並列於非汽化吸氣劑之旁的相對位置，而且各自連結電極經由電流活化。本發明還有另一目的為，提供一使用於真空顯示面板之吸氣劑總成，其汽化吸氣劑並列於非汽化吸氣劑之旁的相對位置，且安裝於内部。本發明還有另一目的為，提供一使用於真空顯示面板之吸氣劑總成，其汽化吸氣劑並列於非汽化吸氣劑之旁的相對位置，亦可隨形狀改變而安裝於外側。本發明還有另一目的為，提供一使用於真空顯示面板之吸氣劑總成，真空顯示面板中之非汽化吸氣劑可由電極活化，而汽化吸收器可由無線電波產生之感應電流而活化本發明仍有另一目的為，提供一使用於真空顯示面板之吸氣劑總成，本真空顯示面板之吸氣劑總成含有非汽化吸氣劑和汽化吸氣劑並列在一起為其主要之特點，藉此，汽化吸氣劑作用後所放射之物質對非汽化吸氣劑產生障蔽Page 8571328 _Case No. 89124030_ Year and Month Amendment _ 5. Description of the invention (5), a further object of the present invention is to provide a getter assembly for use in a vacuum display panel, and its vaporized getter It is juxtaposed with the relative position beside the non-vaporized getter. Still another object of the present invention is to provide a getter assembly for a vacuum display panel, in which a vaporized getter is juxtaposed at a relative position beside a non-vaporized getter, and respective connecting electrodes are activated by a current. Still another object of the present invention is to provide a getter assembly for use in a vacuum display panel. The vaporized getter is juxtaposed at a relative position beside the non-vaporized getter, and is installed inside. Yet another object of the present invention is to provide a getter assembly for a vacuum display panel. The vaporized getter is juxtaposed at a relative position beside the non-vaporized getter, and can be installed on the outside as the shape changes. . It is still another object of the present invention to provide a getter assembly for a vacuum display panel. The non-vaporized getter in the vacuum display panel can be activated by an electrode, and the vaporized absorber can be activated by an induced current generated by a radio wave. It is still another object of the present invention to provide a getter assembly for a vacuum display panel. The getter assembly of the vacuum display panel contains a non-vaporized getter and a vaporized getter side by side. With this feature, the material emitted by the vaporized getter blocks the non-vaporized getter.

第9頁 571328 _案號89124030_年月曰修正_ 五、發明說明（6) ，且使得非汽化吸氣劑作用所產生之氣體不影響真空屏顯示面板内之真空狀態。根據目前之發明，提供了一使用於真空顯示面板之吸氣劑總成。於最佳實施例中，提供一使用於真空顯示面板之吸氣劑總成，本真空顯示面板中，第一吸氣劑連結電極經由電流作用，為非汽化吸氣劑，第二吸氣劑連結電極經由電流作用，為汽化吸氣劑，第二吸氣劑和第一吸氣劑並列，藉此，汽化吸氣劑作用後所放射之物質對非汽化吸收器產生障蔽，及非汽化吸氣劑作用所產生之氣體不影響真空顯示面板内之真空狀態。本真空顯示面板内，第二吸氣劑和第一個吸氣劑並列。第二汽化吸氣劑作用時，將使得真空顯示面板之上下兩層玻璃板内側塗佈一層物質。第二汽化吸氣劑安裝於第二電極之上。第一及第二吸氣劑安裝於由兩層玻璃板所形成之真空顯示器内。第一非汽化吸氣劑安裝於第一電極之上。第一及第二吸氣劑分別受到第一及第二電極之作用，其使用之電流小於1 0安培。第一非汽化吸氣劑使用之物質為鈦或鍅。第二汽化吸氣劑使用之物質為鋇。當第一及第二吸氣劑作用時將使真空顯示面板至少維持在1 0 - 6托的真空狀態。Page 9 571328 _Case No. 89124030_ Year Month Revision _ V. Description of the invention (6), and the gas generated by the action of the non-vaporized getter will not affect the vacuum state in the display panel of the vacuum screen. According to the present invention, a getter assembly for a vacuum display panel is provided. In a preferred embodiment, a getter assembly for a vacuum display panel is provided. In this vacuum display panel, a first getter connecting electrode is a non-vaporized getter and a second getter is acted upon by an electric current. The connecting electrode acts as a vaporized getter, and the second getter and the first getter are juxtaposed by the action of current, whereby the material emitted by the vaporized getter acts to block the non-vaporized absorber and the non-vaporized getter. The gas generated by the aerosol does not affect the vacuum state in the vacuum display panel. In this vacuum display panel, the second getter and the first getter are juxtaposed. When the second vaporized getter acts, a layer of substance is coated on the inside of the two glass plates above and below the vacuum display panel. A second vaporized getter is mounted on the second electrode. The first and second getters are installed in a vacuum display formed of two glass plates. The first non-vaporized getter is mounted on the first electrode. The first and second getters are acted on by the first and second electrodes, respectively, and they use less than 10 amps of current. The first non-vaporized getter uses titanium or hafnium. The substance used for the second vaporized getter is barium. When the first and second getters act, the vacuum display panel is maintained at a vacuum state of at least 10-6 Torr.

第10頁 571328 _案號89124030_年月曰修正_ 五、發明說明（7) 於另一實施例中，乃使用於平面顯示面板（f 1 a t p a n e 1 d i s p 1 a y )，第一非汽化吸氣劑置放於絕緣外殼之中，連結於電極用以通電產生作用，第二汽化吸氣劑經由連結於絕緣外殼之無線電波電極線圈感應產生作用，第二吸氣劑並列在第一吸氣劑之旁，藉此，由第二吸氣劑作用後所放射之物質對第一吸氣劑產生障蔽，使得第一吸氣劑作用所產生之氣體，影響因素少於兩個級數，也因此並不影響平面顯示面板内之真空狀態，其中絕緣的外殼附加於平面顯示面板上而且形狀不拘並連通。於平面顯示面板之吸氣劑總成，絕緣玻璃外殼若為鐘罩形狀。絕緣的外殼内之第一非汽化吸氣劑懸浮於平面顯示面板裝置之上。第二汽化吸氣劑作用時將使得絕緣的外殼内側鍍上一層物質。於絕緣的外殼内，第二汽化吸氣劑懸浮於第一非汽化吸氣劑之上。絕緣的外殼使用玻璃膠焊結連結於平面顯示面板之上。絕緣的外殼附加於平面顯示面板上層而且不拘於形狀。本發明更進一步指出，真空顯示面板包含一個為内面塗佈螢光物質之上層玻璃板及另一個由能產生多重電子發射源於内侧表面之下層玻璃板，上下兩層玻璃板藉由侧玻璃形成真空腔，絕緣的外殼附加於上層玻璃板，上層玻璃板有一孔隙與絕緣外殼連通且形成真空氣密，絕緣的外殼内含一組吸氣劑總成，第一個非汽化吸氣劑及第二汽化吸氣劑，第一非汽化吸氣劑，連結於第一電極用以通電產生Page 10 571328 _ Case No. 89124030 _ year month and month amendment _ V. Description of the invention (7) In another embodiment, it is used in a flat display panel (f 1 atpane 1 disp 1 ay), the first non-vaporized suction The agent is placed in an insulating case, and is connected to the electrode to generate electricity. The second vaporized getter is induced by the radio wave electrode coil connected to the insulated case. The second getter is juxtaposed with the first getter. By this, the first getter is blocked by the material radiated by the action of the second getter, so that the gas generated by the action of the first getter has less than two factors, and therefore It does not affect the vacuum state in the flat display panel, in which an insulated casing is attached to the flat display panel and the shape is free and connected. The getter assembly for the flat display panel, if the insulating glass case is in the shape of a bell jar. The first non-vaporized getter in the insulated casing is suspended above the flat display panel device. When the second vaporized getter is applied, the inside of the insulating shell is plated with a substance. The second vaporized getter is suspended above the first non-vaporized getter in an insulated casing. The insulated case is connected to the flat display panel with a glass glue joint. The insulating case is attached to the upper layer of the flat display panel and is not limited to the shape. The invention further indicates that the vacuum display panel includes an upper glass plate coated with a fluorescent substance on the inner surface and another lower glass plate that generates multiple electron emission sources from the inner surface. The upper and lower glass plates are formed by side glass. In the vacuum chamber, the insulated shell is attached to the upper glass plate. The upper glass plate has a hole communicating with the insulated shell and forms a vacuum airtight. The insulated shell contains a set of getter assembly, the first non-vaporized getter and the first Two vaporized getter, the first non-vaporized getter, connected to the first electrode to generate electricity

第11頁 571328 _案號89124030_年月曰修正_ 五、發明說明（8) 作用，第二汽化吸氣劑，連結於第二電極用以通電產生作用，第二吸氣劑並列在第一吸氣劑之旁，藉此，第二吸收器作用後所放射之物質對第一吸收器產生障蔽，及第一吸氣劑作用所產生之氣體不影響真空顯示面板内之真空狀態於真空顯示面板中，第二汽化吸氣劑和第一非汽化吸氣劑並列，由第二吸氣劑作用後所放射之物質圍繞著第一吸氣劑。第二汽化吸氣劑作用時，將使得真空顯示面板之上下兩層玻璃板内側塗佈一層物質。第二汽化吸氣劑安裝於第二電極之上以利接電。第一非汽化吸氣劑安裝於第一電極之上。第二汽化吸氣劑使用之物質為鋇。第一非汽化吸氣劑使用之物質為鈦或锆。當第一及第二吸氣劑作用時將使真空顯示面板至少維持在1 0 - 6托的真空狀態。【實施方式】本發明為揭露用在真空顯示面板之吸氣劑總成，例如為場發射裝置、電漿顯示裝置或真空螢光顯示器等。此一新的吸氣劑總成包含一非汽化吸氣劑及一汽化吸氣劑且位於同一真空顯示面板中，更進一步的說其於特定之位置，藉此，汽化吸氣劑活化所放射之金屬對非汽化吸氣劑產生障蔽，使得非汽化吸氣劑活化所產生之氣體不影響真空顯示面板内之真空狀態。當此一吸氣劑總成作用時，將使真空顯示面板達到並且維持在1 0 - 6托的真空狀態。Page 11 571328 _Case No. 89124030 _ year and month amended _ V. Description of the invention (8) Function, the second vaporized getter is connected to the second electrode for electricity to generate the effect, and the second getter is tied in the first Next to the getter, the material emitted by the second absorber blocks the first absorber, and the gas generated by the first getter does not affect the vacuum state in the vacuum display panel. In the panel, the second vaporized getter and the first non-vaporized getter are juxtaposed, and the material radiated by the action of the second getter surrounds the first getter. When the second vaporized getter acts, a layer of substance is coated on the inside of the two glass plates above and below the vacuum display panel. The second vaporized getter is installed on the second electrode to facilitate the connection. A first non-vaporized getter is mounted on the first electrode. The substance used for the second vaporized getter is barium. The first non-vaporized getter is titanium or zirconium. When the first and second getters act, the vacuum display panel is maintained at a vacuum state of at least 10-6 Torr. [Embodiment] The present invention discloses a getter assembly used in a vacuum display panel, such as a field emission device, a plasma display device, or a vacuum fluorescent display. This new getter assembly contains a non-vaporized getter and a vaporized getter, and is located in the same vacuum display panel, and further, it is in a specific position, whereby the vaporized getter activates the emitted radiation. The metal blocks the non-vaporized getter, so that the gas generated by the activation of the non-vaporized getter does not affect the vacuum state in the vacuum display panel. When this getter assembly acts, the vacuum display panel will reach and maintain a vacuum state of 10-6 Torr.

第12頁 571328 _案號89124030_年月日_魅_ 五、發明說明（9) 本發明之吸氣劑總成提供了各式各樣的組態。在此闡述了最佳實施例及變型實施例兩種組態，但本發明應不僅止於此兩種組態。任何組態也都是利用汽化吸氣劑作用時使周圍產生一層薄膜，非汽化吸氣劑作用時將吸收周遭及其自生所產生之氣體。汽化吸氣劑可使用含鋇之化合物，當通電後吸氣劑將放出鋇離子。非汽化吸氣劑使用之物質為含鈦、锆或其他適合金屬之化合物。如圖一所示，為此一組吸氣劑總成使用於平面顯示面板之裝置，各以鐵、鎳及鉻之金屬合金電極接通非汽化吸氣劑及汽化吸氣劑。這些金屬合金具有與玻璃相同之熱膨脹係數（coefficient of thermal expansion)，而且適用於寬的溫度範圍可用於真空顯示面板。於變型實施例中可將此一組吸氣劑總成外接於平面顯示面板之裝置。於變型實施例中，絕緣鐘罩形狀外殼外接於平面顯示面板之上。鐘罩形絕緣外殼之真空腔與真空平面顯示面板真空腔之上層玻璃板有一孔隙連通。於此一組態，非汽化吸氣劑連結於電極用以通電產生作用，汽化吸氣劑經由連結於絕緣外殼之無線電波線圈感應產生感應電流而作用。本發明之吸氣劑總成可藉由電流或無線電波感應電流而作用。於非汽化吸氣劑，其吸氣劑上是使用含鈦或鍅粉末於其上而作用，此粉末吸收真空平面顯示面板真Page 12 571328 _Case No. 89124030_Year Month Day_Charm_ V. Description of the invention (9) The getter assembly of the present invention provides various configurations. Two configurations of the preferred embodiment and the modified embodiment are explained here, but the present invention should not be limited to these two configurations. Any configuration also uses a vaporized getter to create a thin film around it, and a non-vaporized getter to absorb surrounding and self-generated gas. Barium-containing compounds can be used as the vaporized getter. When the current is applied, the getter will release barium ions. Non-vaporized getter materials are compounds containing titanium, zirconium or other suitable metals. As shown in Fig. 1, for this set of getter assembly, a device for a flat display panel is connected to a non-vaporized getter and a vaporized getter by metal alloy electrodes of iron, nickel and chromium. These metal alloys have the same coefficient of thermal expansion as glass, and are suitable for a wide temperature range and can be used in vacuum display panels. In a modified embodiment, this set of getter assembly can be connected to a device of a flat display panel. In a modified embodiment, the insulating bell-shaped housing is externally attached to the flat display panel. The vacuum cavity of the bell-shaped insulation case communicates with the upper glass plate of the vacuum cavity of the vacuum flat display panel. In this set of states, the non-vaporized getter is connected to the electrode to generate electricity, and the vaporized getter acts through the induction wave generated by the radio wave coil connected to the insulating case. The getter assembly of the present invention can function by current or radio wave induced current. For non-vaporized getter, the getter uses titanium or hafnium powder on it. This powder absorbs the vacuum flat display panel.

第13頁 ^/1328Page 13 ^ / 1328

空腔内之殘餘氣體於其表層粉末 — 氣劑上便是使用鋇/鋁化合物，三於n化吸氣劑，其吸薄膜以吸收真空腔内殘餘氣體。i虽的加熱將產生鋇金屬往於真空裝置中未強調此一相對本發明化吸氣成中，汽化吸所獨見，劑粉末表單獨作用氣劑及非劑總成，吸氣劑總位置且彼平面顯示刳，並用亦為非汽氣劑總體，或射裝置唯有此氣劑於除存在之吸氣一創新特定之於真空位置。由於殘面積較汽化吸汽化吸均不易成’能此遮叙面板内而鋇離餘氣體大吸收氣劑或氣劑分 ill 日士敌幵真夠使汽 ’才能之殘餘化吸氣劑子於吸收必須接近效率較高非汽化吸置兩端，空腔内之化吸氣劑有效的降氣體。及汽化吸氣時之被動作鋇金屬薄膜。典型的吸氣劑排除氣以作為場發真空度。也及非汽化吸低或完全去參照如圖。真空顯側破璃邊條 2 〇之一端側汽化吸氣劑 3 2。汽化吸培，而介於薄膜2 8產生壁2 6且環繞鋇金屬且為第：圖所示，為本發明真空顯示面板1〇之剖面不面板1〇由上層玻域士 ,^ 0敬禹板1 2、下層玻璃板i 4、及 16所構成且使用玻填膠焊結玻璃邊條16有電極^ 0Λ 卞’电往Μ及24。在電極22之頂端為 # 。同樣的，在電極2 4之頂端為非汽化吸氣劑乳劑30及非汽化吸氣劑32使用之電流少於1 〇安 1到1 〇安培。當汽化吸氣劑3〇作用時，將有一於上層玻璃板1 2之内壁2 6及下層玻璃板丨6之内，非汽化吸氣劑32周圍。此一薄膜28大部分為 π化吸氣劑3 0上之鋇化合物所形成。電極2 2及The residual gas in the cavity is a powder on the surface of the cavity, which is a barium / aluminum compound, which is a thin film that absorbs the residual gas in the vacuum cavity. Although the heating will produce barium metal in the vacuum device, this is not emphasized. This is relative to the present invention. The vaporization suction is unique. The powder powder table acts independently of the aerosol and non-agent assemblies, and the total position of the getter. In addition, the plane shows radon, and the combination is also a non-aerobic agent, or the ejection device has only this aerosol in addition to the existing aspirator, which is innovatively specific to the vacuum position. Because the residual area is less than that of vaporization, vaporization and absorption are not easy to form. It can cover the panel and the barium residual gas has a large getter or aerosol. The absorption must be close to the two ends of the non-vaporized suction with high efficiency, and the gaseous getter in the cavity can effectively reduce the gas. And the action when vaporizing and inhaling barium metal film. A typical getter removes gas as a field vacuum. Also the non-vaporized absorption is low or completely depleted as shown in the figure. The vacuum display side breaks the glass edge 20 and one end side vaporizes the getter 3 2. Vaporization and absorption, while the wall 26 is formed between the film 28 and surrounds the barium metal and is the first: as shown in the figure, the cross-section of the vacuum display panel 10 of the present invention is not a panel 10, which is provided by the upper glass maker, ^ 0 Jing Yu Plate 1 2, lower glass plates i 4, and 16 and glass frit welded glass edge strip 16 has electrodes ^ 0Λ 卞 'to M and 24. On the top of electrode 22 is #. Similarly, the non-vaporized getter emulsion 30 and the non-vaporized getter 32 on the top of the electrode 24 use less than 10 amperes and 1 to 10 amperes. When the vaporized getter 30 acts, there will be one inside the inner wall 26 of the upper glass plate 12 and the lower glass plate 6 and around the non-vaporized getter 32. This thin film 28 is mostly formed of a barium compound on a π-type getter 30. Electrode 2 2 and

571328 _案號89124030_年月曰修正_ 五、發明說明（11) 2 4以鐵、錄及鉻之金屬合金形成。第一圖的吸氣劑總成為本發明之最佳實施例，當封止密封真空顯示面板1 0中之真空腔2 0時，如第三圖點6 2及6 4 所示。僅使用非汽化吸氣劑之傳統總成，其真空度馬上由點6 4上升至點6 6。此時，由於發生釋氣過程以致使真空度下降。相對於傳統總成，目前之總成於封止密封之點6 2，由於非汽化吸氣劑同時作用點7 0之真空度並無明顯之變化。點6 6及7 0為傳統及目前之吸氣劑總成中，非汽化吸氣劑開始作用之時。含非汽化吸氣劑之傳統總成真空腔之真空度最後提昇至點68，且其壓力略高於點64。於目前之吸氣劑總成，非汽化吸氣劑開始作用後，真空度由點7 0提昇至點7 2，此乃由於非汽化吸氣劑發揮有效吸收作用之故。第二圖所不為短時間運轉之顯不圖’即點7 0提幵至點 7 2約1到3分鐘。點6 6及7 0所示為傳統及目前之總成中約以 5安培開始啟動非汽化吸氣劑作用結果。由第三圖可看出本發明之吸氣劑總成之效果。本發明之吸氣劑總成，真空腔之真空度僅有微小或不明顯之變化。相對於僅含非汽化吸氣劑之傳統總成，大伏變動之壓力將無可避免的影響真空平面顯示器之性能。點6 4、6 6及6 8為傳統總成之·數據，在此可藉由本發明看出傳統總成中之非汽化吸氣劑若不是單獨作用就是位置不恰當。第四圖為本發明之吸氣劑總成於長時間運轉之顯示圖571328 _Case No. 89124030_ Year Month Amendment _ V. Description of the invention (11) 2 4 It is formed of metal alloys of iron, iron and chromium. The getter of the first figure is always the preferred embodiment of the present invention. When the vacuum cavity 20 in the hermetically sealed vacuum display panel 10 is sealed, it is shown as points 6 2 and 6 4 in the third figure. For a conventional assembly using only a non-vaporized getter, the vacuum level immediately rose from point 64 to point 66. At this time, the degree of vacuum is reduced due to the outgassing process. Compared with the traditional assembly, the current assembly is at the point of sealing 6 2, because the vacuum degree of the non-vaporized getter at the same time, the point 70 has no significant change. Points 6 6 and 70 are the time when the non-vaporized getter starts to work in the traditional and current getter assemblies. The vacuum of the traditional assembly vacuum chamber containing non-vaporized getter was finally raised to point 68, and its pressure was slightly higher than point 64. After the current getter assembly, the non-vaporized getter started to work, the vacuum degree increased from 70 to 72, which is because the non-vaporized getter exerts effective absorption. The second picture is not a short-term running display diagram, that is, the time from point 70 to point 7 2 is about 1 to 3 minutes. Points 6 6 and 70 show the results of starting the non-vaporized getter at about 5 amps in conventional and current assemblies. The effect of the getter assembly of the present invention can be seen from the third figure. In the getter assembly of the present invention, the degree of vacuum in the vacuum chamber has only slight or insignificant changes. Compared with the traditional assembly containing only non-vaporized getter, the pressure of large fluctuations will inevitably affect the performance of the vacuum flat panel display. Points 6 4, 6, 6 and 6 8 are the data of the traditional assembly. Here, it can be seen from the present invention that the non-vaporized getter in the traditional assembly is either improperly or improperly located. The fourth figure is a display diagram of the getter assembly of the present invention in a long time operation

第15頁 571328 _案號五、發明說明（12) ^24030 修正我們同樣的將真空平面顯示面板中傳統吸氣劑總成及本 ”月亏吸氣;!悤成於相同狀態下比較。點8 〇時，開始將真玉顯示面板内之真空腔抽真空，直至有四個級數差之點W 及84。點82及84時，開始將真空平面顯示面板之真空腔封止始、封’傳統裝置真空腔之真空度增進至點8 6。傳統裝置真空腔之真空度經過八個月之後增進至點88，真空平面顯不面板之真空度有明顯下降之表現。與含非汽化吸氣劑之傳統總成比較’本發明之吸氣劑總成能夠發揮顯著效果而有效吸收真空腔内殘餘氣體，點8 2為封止點，點g 〇吸氣劑總成開始作用。經過八個月之後，點9 〇至點9 2之真空度僅有些許下降之現象。經長時間運轉可由圖四發現本發明之吸氣劑總成之優異表現。. 第二圖所不為另一實施例，本發明之真空顯示面板 4 0。真空顯示面板4 0與第一圖結構相同，上層玻璃板1 2、下層玻璃板1 4、及側玻璃邊條1 6形成真空腔2 〇。相較於第一圖之真空顯示面板10’真空顯示面板4 0所示之真空腔2 〇較小，即上下兩層玻璃板1 2及1 4距離變窄。由第二圖所示真空腔2 0較小，以致無法放置吸氣劑總成4 2。因此吸氣劑總成4 2置於上層玻璃板1 2之上，於真空顯示面板4 0的外部。吸氣劑總成4 2可置於玻璃製的絕緣外殼4 4之内。非汽化吸氣劑4 6懸浮於玻璃製的絕緣外殼4 4之内真空腔3 8。非汽化吸氣劑4 6連結於電極4 8以通電產生作用。使用絕緣線5 2將汽化吸氣劑5 0懸浮於非汽化吸氣劑4 6Page 15 571328 _ Case No. V. Description of the invention (12) ^ 24030 Amend our same method to get the traditional monthly getter assembly in the vacuum flat display panel and this month's "defective inhalation;! 悤 Comparison under the same state. Point At 8 o’clock, the vacuum cavity in the real jade display panel was evacuated until there were four stages with points W and 84. At points 82 and 84, the vacuum cavity of the vacuum flat display panel was sealed and sealed. The vacuum degree of the vacuum chamber of the conventional device is increased to point 8. The vacuum degree of the vacuum chamber of the conventional device is increased to point 88 after eight months. The vacuum degree of the vacuum plane display panel has significantly decreased. With non-vaporized suction Comparison of the traditional assembly of the agent 'The getter assembly of the present invention can exert significant effects and effectively absorb the residual gas in the vacuum chamber. Point 8 2 is the sealing point, and point g. The getter assembly starts to function. After eight After a month, the degree of vacuum from point 90 to point 92 is only slightly reduced. After a long period of operation, the excellent performance of the getter assembly of the present invention can be found from Figure 4 .. The second figure is not another implementation Example, the vacuum display panel of the present invention 40. The vacuum display panel 40 has the same structure as the first figure, and the upper glass plate 1 2, the lower glass plate 1 4 and the side glass edge 16 form a vacuum cavity 2 0. Compared with the vacuum display panel of the first figure The vacuum cavity 20 shown in the 10 'vacuum display panel 40 is smaller, that is, the distance between the upper and lower glass plates 12 and 14 is narrowed. The vacuum cavity 20 shown in the second figure is so small that it is impossible to place a suction air Agent assembly 4 2. So the getter assembly 4 2 is placed on the upper glass plate 12 and outside the vacuum display panel 40 0. The getter assembly 4 2 can be placed in a glass insulation case 4 4 Inside. Non-vaporized getter 4 6 is suspended in a glass-made insulating case 4 4 inside the vacuum chamber 3 8. Non-vaporized getter 4 6 is connected to the electrode 4 8 to generate electricity. Use insulated wire 5 2 to vaporize Getter 5 0 suspended in non-vaporized getter 4 6

第16頁 571328 五、發明說明（13) 之上。η化吸氣劑5 0難以傳統之電極方式通以電流產生作用，疋以使用連結於絕緣外殼4 4之無線電波電極線圈5 4感應產生作用。為精簡之故，所示之無線電波電極線圈5 4之電路連結並未示出。上層玻璃板1 2有一孔隙5 6使絕緣外殼4 4之内真空腔3 8 與真空顯示面板4 0之真空腔2 〇連通。吸氣劑總成4 2之汽化吸氣劑50啟動時，將使得絕緣外殼44内層鍍上一層物質58 。當汽化吸氣劑5 0所使用之物質為鋇之化合物時，内層鍍上之物質為鋇金屬。由第二圖所示將不僅在絕緣外殼4 4内層塗佈一層物質5 8，也將鍍在接觸到孔隙5 6之絕緣外殼4 4 玻璃板上。鍍層5 8圍繞在非汽化吸氣劑4 6周圍，有效的吸收由非汽化吸氣劑4 6及電極4 8於通電產生作用後釋放之多餘氣體。吸氣劑總成4 2如第二圖所示為本發明之另一實施例，與本發明之最佳實施例第一圖具有相同之作用及效果。為適用於具有較薄及較窄之真空腔所設計。於真空顯示面板 4 〇裝配吸氣劑總成4 2時，真空顯示面板4 0上須有一空間以容納絕緣外殼4 4。於真空顯示面板4 0中絕緣的外殼4 4使用玻螭膠焊結連結於上層玻璃板1 2之上，以提高真空度。以上，圖一、二、三及四為本發明最佳及變塑實施例的詳細說明及附圖。Page 16 571328 V. Description of the invention (13). It is difficult for the conventional getter 50 to generate electric current through the conventional electrode method, so that the use of a radio wave electrode coil 54 connected to the insulating case 44 is effective. For simplicity, the circuit connection of the radio wave electrode coil 54 is not shown. The upper glass plate 12 has a hole 5 6 to communicate the vacuum cavity 3 8 inside the insulating casing 4 4 with the vacuum cavity 2 0 of the vacuum display panel 40. Evaporation of getter assembly 4 2 When the getter 50 starts, it will cause the inner layer of the insulating shell 44 to be coated with a layer 58. When the substance used for the vaporized getter 50 is a barium compound, the substance to be plated on the inner layer is barium metal. As shown in the second figure, not only a layer of material 5 8 is coated on the inner layer of the insulating case 4 4, but also a glass plate of the insulating case 4 4 that is in contact with the pores 56. The plating layer 5 8 surrounds the non-vaporized getter 46 and effectively absorbs the excess gas released by the non-vaporized getter 4 6 and the electrode 4 8 after the current is applied. The getter assembly 4 2 is another embodiment of the present invention as shown in the second figure, and has the same function and effect as the first figure of the preferred embodiment of the present invention. Designed for use with thinner and narrower vacuum chambers. When the getter assembly 42 is assembled in the vacuum display panel 40, there must be a space on the vacuum display panel 40 to accommodate the insulating case 44. The outer case 4 4 insulated in the vacuum display panel 40 is connected to the upper glass plate 12 with a glass frit glued joint to improve the degree of vacuum. Above, Figures 1, 2, 3 and 4 are detailed descriptions and drawings of the preferred and modified embodiment of the present invention.

第17頁 571328 _案號89124030_年月曰修正_ 五、發明說明（14) 以上為針對本發明的詳細說明，為充分了解而使用自然的文字來解釋術語，而不應局限於文字字義。再者，除了本發明最佳及變型實施例的詳細說明之外，所更應被重視的是，本技術的技巧可輕易的應用於其他可能的不同發明上。以上所述僅為本發明之較佳實施例而已，並非用以限定本發明之申請專利範圍，凡其他未脫離本發明所揭示之精神下所完成之等效改變或修飾，均應包含在下述之申請專利範圍内。Page 17 571328 _Case No. 89124030_ Year Month Amendment _ V. Description of the Invention (14) The above is a detailed description of the present invention. For full understanding, natural words are used to explain terms, and should not be limited to the literal meaning. Furthermore, in addition to the detailed description of the preferred and modified embodiments of the present invention, what should be more important is that the techniques of this technology can be easily applied to other possible different inventions. The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of patent application of the present invention. Any equivalent changes or modifications made without departing from the spirit disclosed by the present invention shall be included in the following Within the scope of patent application.

第18頁 571328 _案號89124030_年月曰修正_ 圖式簡單說明圖式簡單說明：本發明之實體、零件、及優點，可藉由下列之細節詳細描述及所繪之附件予以實現：第一圖為本發明之最佳實施例剖面圖，為用在真空顯示面板的吸氣劑總成；第二圖為本發明之變型實施例剖面圖，即絕緣外殼内含一組吸氣劑總成，且絕緣的外殼附加於真空顯示面板外側；第三圖為本發明之吸氣劑總成於短時間運轉之顯示圖；以及第四圖為本發明之吸氣劑總成於長時間運轉之顯示圖。主要部分之代表符號 10 真空顯示面板 12 上層玻璃板 14 下層玻璃板 16 側玻璃邊條 20 真空腔Page 18 571328 _Case No. 89124030_ Year and Month Amendment _ Brief description of the drawings Brief description of the entities, parts, and advantages of the present invention can be achieved by the following detailed description and attached drawings: One figure is a cross-sectional view of the preferred embodiment of the present invention, which is a getter assembly used in a vacuum display panel; the second figure is a cross-sectional view of a modified embodiment of the present invention, that is, a set of getter And the insulating case is attached to the outside of the vacuum display panel; the third figure is a display diagram of the getter assembly of the present invention operating in a short time; and the fourth figure is a getter assembly of the present invention operating for a long time The display diagram. Representative symbols of the main part 10 Vacuum display panel 12 Upper glass plate 14 Lower glass plate 16 Side glass edge strips 20 Vacuum cavity

第19頁 571328 _案號89124030_年月曰修毛Page 19 571328 _ Case No. 89124030 _ year and month

第20頁圖式簡單說明 2 2及 2 4 電極 26 側壁 28 塗佈層 30 汽化吸氣劑 32 非汽化吸氣劑 38 真空腔 40 真空顯示面板 42 吸氣劑總成 44 絕緣外殼 46 非汽化吸收器 48 電極 50 汽化吸氣劑 52 絕緣線 54 無線電波電極線圈 56 孔隙 58 塗佈層Brief description of drawings on page 20 2 2 and 2 4 Electrode 26 Side wall 28 Coating layer 30 Vaporized getter 32 Non-vaporized getter 38 Vacuum chamber 40 Vacuum display panel 42 Getter assembly 44 Insulating case 46 Non-vaporized absorption Device 48 electrode 50 vaporized getter 52 insulated wire 54 radio wave electrode coil 56 aperture 58 coating layer

Claims

571328 _案號89124030_年月曰修正_ 六、申請專利範圍 1. 一種用在真空顯示面板之吸氣劑總成，該吸氣劑總成至少包含：一第一非汽化吸氣劑連結至一第一電極，用來作用該第一吸氣劑；以及一第二汽化吸氣劑連結至一第二電極，用來作用該第二吸氣劑，該第二吸氣劑和該第一吸氣劑並列，藉此，該第二吸氣劑作用後所放射之物質對該第一吸氣劑產生障蔽，及該第一吸氣劑作用時所產生之氣體不影響該真空顯示面板内之真空狀態。 2. 如申請專利範圍第1項之吸氣劑總成，其中該第二吸氣劑和該第一吸氣劑並列，第二吸氣劑作用後將放射物質，所產生之物質會圍繞著該第一吸氣劑。 3. 如申請專利範圍第1項之吸氣劑總成，其中上述之第二汽化吸氣劑作用時，將使得真空顯示面板之上下兩層玻璃板内側塗佈一層物質。 4. 如申請專利範圍第1項之吸氣劑總成，其中上述之第二汽化吸氣劑安裝於該第二電極之上以利接電流。 5. 如申請專利範圍第1項之吸氣劑總成，其中上述之第一及該第二吸氣劑，安裝於由兩層玻璃板所形成之該真空顯示面板的真空腔内。571328 _Case No. 89124030_Amendment of the month of the year _ 6. Application for patent scope 1. A getter assembly for a vacuum display panel, the getter assembly contains at least: a first non-vaporized getter connected to A first electrode for acting the first getter; and a second vaporized getter connected to a second electrode for acting the second getter, the second getter and the first getter The getters are juxtaposed, whereby the material emitted by the second getter blocks the first getter, and the gas generated when the first getter acts does not affect the inside of the vacuum display panel. Vacuum state. 2. If the getter assembly of item 1 of the patent application scope, wherein the second getter and the first getter are juxtaposed, the second getter will act as a radioactive substance and the generated substance will surround the getter The first getter. 3. If the getter assembly of item 1 of the patent application scope, wherein the second vaporized getter acts, it will cause a layer of substance to be coated on the inside of the two glass plates above and below the vacuum display panel. 4. If the getter assembly of item 1 of the patent application scope, wherein the above-mentioned second vaporized getter is installed on the second electrode to facilitate the connection of current. 5. The getter assembly of item 1 of the patent application scope, wherein the first and second getters described above are installed in the vacuum cavity of the vacuum display panel formed by two glass plates.

第21頁 571328 _案號89124030_年月曰修正_ 六、申請專利範圍 6. 如申請專利範圍第1項之吸氣劑總成，其中上述之第一非汽化吸氣劑連結於該第一電極用以通電流產生作用。 7. 如申請專利範圍第1項之吸氣劑總成，其中上述之第一及該第二吸氣劑分別受到該第一及該第二電極之作用，其使用之電流小於1 0安培。 8. 如申請專利範圍第1項之吸氣劑總成，其中上述之第一非汽化吸氣劑使用之物質包含鈦或锆。 9. 如申請專利範圍第1項之吸氣劑總成，其中上述之第二汽化吸氣劑使用之物質包含鋇。 1 0 .如申請專利範圍第1項之吸氣劑總成，其中上述之第一及該第二吸收器作用時，將使該真空顯示面板至少維持在1 0 - 6托的真空狀態。 11. 一種用在平面顯示面板（FPD)的吸氣劑總成，該吸氣劑總成至少包含：第一非汽化吸氣劑置放於該絕緣外殼之中，連結至電極用以通電流產生作用；以及第二汽化吸氣劑經由連結於絕緣外殼之無線電波電極線圈感應產生作用，該第二個吸氣劑和該第一吸氣劑並Page 21 571328 _ Case No. 89124030 _ year month and month amendment _ 6. Patent application scope 6. For the getter assembly of the first patent application scope, in which the first non-vaporized getter is connected to the first The electrodes are used to effect the current flow. 7. If the getter assembly of item 1 of the patent application scope, wherein the first and second getters described above are subjected to the action of the first and second electrodes, respectively, the current used is less than 10 amps. 8. The getter assembly of item 1 in the scope of the patent application, wherein the above-mentioned first non-vaporized getter uses titanium or zirconium. 9. If the getter assembly of item 1 of the patent application scope, wherein the substance used in the second vaporized getter described above contains barium. 10. The getter assembly according to item 1 of the scope of patent application, wherein the first and the second absorbers described above will maintain the vacuum display panel at a vacuum state of at least 10-6 Torr. 11. A getter assembly used in a flat display panel (FPD), the getter assembly comprising at least: a first non-vaporized getter placed in the insulating case, connected to an electrode for passing current And a second vaporized getter is induced by a radio wave electrode coil connected to an insulating case, and the second getter and the first getter are combined

第22頁 571328 _案號89124030_年月曰修正_ 六、申請專利範圍列，藉此，該第二吸氣劑作用後所放射之物質對該第一個吸氣劑產生障蔽，及該第一吸氣劑作用所產生之氣體，影響之因素少於兩個級數，也因此並不影響平面顯示面板内之真空狀態，絕緣的外殼附加於平面顯示面板上，而且形狀不拘且連通。 1 2 ·如申請專利範圍第1 1項之吸氣劑總成，其中上述之該絕緣玻璃外殼為鐘罩形狀。 1 3 ·如申請專利範圍第1 1項之吸氣劑總成，其中上述之絕緣的外殼内之該第一非汽化吸氣劑懸浮於該平面顯示面板裝置之上。 1 4.如申請專利範圍第11項之吸氣劑總成，其中上述該第二汽化吸氣劑作用時將使得絕緣的外殼内侧塗佈一層物質。 1 5.如申請專利範圍第11項之吸氣劑總成，其中上述之於絕緣的外殼内，該第二汽化吸氣劑懸浮於該第一非汽化吸氣劑之上。 1 6.如申請專利範圍第1 1項之吸氣劑總成，其中上述之絕緣的外殼使用玻璃膠焊結連結於該平面顯示面板之上。Page 22 571328 _ Case No. 89124030 _ year month and month amendment _ Six, the scope of the patent application, thereby, the material radiated by the second getter acts to block the first getter, and the first The gas produced by a getter has less than two factors, and therefore does not affect the vacuum state in the flat display panel. The insulating shell is attached to the flat display panel, and the shape is free and connected. 1 2 · The getter assembly according to item 11 of the scope of patent application, wherein the insulating glass case described above is in the shape of a bell jar. 1 3 · The getter assembly according to item 11 of the scope of patent application, wherein the first non-vaporized getter in the aforementioned insulated case is suspended on the flat display panel device. 1 4. The getter assembly according to item 11 of the scope of patent application, wherein the second vaporized getter described above will cause a layer of material to be coated on the inside of the insulating shell. 1 5. The getter assembly according to item 11 of the scope of patent application, wherein the second vaporized getter is suspended on the first non-vaporized getter in the insulated casing as described above. 16. The getter assembly according to item 11 of the scope of the patent application, wherein the aforementioned insulated casing is connected to the flat display panel with a glass glue joint.

第23頁 571328 _案號89124030_年月曰修正_ 六、申請專利範圍 1 7.如申請專利範圍第1 1項之吸氣劑總成，其中上述之絕緣的外殼附加於該平面顯示面板上層，而且上層玻璃板有一孔隙與絕緣外殼連通。 18.—種真空顯示面板至少包含：一個為内面塗佈螢光物質之上層玻璃板；一個為能產生多重電子發射源於内侧表面之下層玻璃板；側壁板連接上下兩層玻璃板形成一真空腔；一絕緣的外殼連接該上層玻璃板，在該上層玻璃板有一孔隙與絕緣外殼連通且形成真空氣密；以及該絕緣的外殼至少包含：一吸氣劑總成包含第一非汽化吸氣劑及第二汽化吸氣劑，該第一非汽化吸氣劑連結於一第一電極用以通電流產生作用，該第二汽化吸氣劑連結於一第二電極用以通電流產生作用，該第二吸氣劑和第一個吸氣劑並列，藉此，該第二吸氣劑作用後放射之物質對該第一吸氣劑產生障蔽，及該第一吸氣劑作用所產生之氣體不影響該真空顯示面板内之真空狀態。 1 9 .如申請專利範圍第1 8項之真空顯示面板，其中上述之第二汽化吸氣劑和第一非汽化吸氣劑並列，致使第二吸氣劑作用後將放射物質，所產生之物質會圍繞著該第一吸氣劑。Page 23 571328 _ Case No. 89124030 _ year month and month amendment _ 6, the scope of the patent application 1 7. If you apply for the getter assembly of item 11 of the patent scope, wherein the above-mentioned insulating shell is attached to the upper layer of the flat display panel And, the upper glass plate has a hole communicating with the insulating shell. 18. A vacuum display panel includes at least: an upper glass plate coated with a fluorescent substance on the inner surface; a glass plate under the inner surface capable of generating multiple electron emission sources; a side wall plate connected to the upper and lower glass plates to form a vacuum A cavity; an insulating shell connected to the upper glass plate, a hole in the upper glass plate communicating with the insulating shell and forming a vacuum airtight; and the insulating shell at least comprising: a getter assembly containing a first non-vaporized getter Agent and a second vaporized getter, the first non-vaporized getter is connected to a first electrode to generate a current, and the second vaporized getter is connected to a second electrode to generate a current, The second getter is juxtaposed with the first getter, whereby the material radiated by the second getter acts as a barrier to the first getter and the effects of the first getter The gas does not affect the vacuum state in the vacuum display panel. 19. The vacuum display panel according to item 18 of the scope of patent application, wherein the above-mentioned second vaporized getter and the first non-vaporized getter are juxtaposed, so that after the second getter acts, the radioactive material will be generated. A substance will surround the first getter.

第24頁 571328 _案號89124030_年月曰修正_ 六、申請專利範圍 2 0 ·如申請專利範圍第1 8項之真空顯示面板，其中上述之第二汽化吸氣劑作用時，將使得真空顯示面板之上下兩層玻璃板内侧鍍上一層物質。 2 1.如申請專利範圍第1 8項之真空顯示面板，其中上述之第二汽化吸氣劑鑲嵌於第二電極的頂端部分以利接電。 2 2 .如申請專利範圍第1 8項之真空顯示面板，其中上述之第一非汽化吸氣劑鑲嵌於第一電極的頂端部分。 2 3 .如申請專利範圍第1 8項之真空顯示面板，其中上述之第二汽化吸氣劑使用之材料包含鋇。 2 4.如申請專利範圍第1 8項之真空顯示面板，其中上述之第一非汽化吸氣劑使用之材料包含鈦或锆。 2 5 ·如申請專利範圍第1 8項之真空顯示面板，其中上述之第一及該第二吸氣劑作用時，將使該真空顯示面板至少維持在1 0 - 6托的真空狀態。Page 24 571328 _ Case No. 89124030 _ year month and month amendment_ VI. Patent application scope 20 · If you apply for a vacuum display panel with the patent scope item 18, where the second vaporized getter acts, it will make a vacuum A layer of material is plated on the inside of the two glass plates above and below the display panel. 2 1. The vacuum display panel according to item 18 of the scope of patent application, wherein the second vaporized getter is inlaid on the top portion of the second electrode to facilitate electrical connection. 22. The vacuum display panel according to item 18 of the scope of patent application, wherein the first non-vaporized getter is embedded in the top portion of the first electrode. 2 3. The vacuum display panel according to item 18 of the scope of patent application, wherein the material used for the second vaporized getter described above includes barium. 2 4. The vacuum display panel according to item 18 of the patent application scope, wherein the material used for the first non-vaporized getter described above comprises titanium or zirconium. 25. If the vacuum display panel according to item 18 of the patent application scope, wherein the first and the second getters described above, the vacuum display panel will be maintained at a vacuum state of at least 10-6 Torr.

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