TW571080B

TW571080B - Fiber array test apparatus

Info

Publication number: TW571080B
Application number: TW91137988A
Authority: TW
Inventors: Shau-Wei Hsu; Yuh-Der Jiaan; Mau-Sheng Huang
Original assignee: Ind Tech Res Inst
Priority date: 2002-12-31
Filing date: 2002-12-31
Publication date: 2004-01-11
Also published as: TW200411158A

Abstract

A fiber array test apparatus for detecting the two-dimensional positions of individual fibers within a fiber array on the front face of the fiber array, whereby a predetermined scale plate as a mask precisely produced and aligned is utilized for masking on top of the front face of the fiber array. An upwardly-projected light source directs beams of light through the core of each fiber, whereas a downwardly-projected light source directs a beam of light through the mask, thus forming a combined image, which, via a lens system, is amplified by an optical array sensor. By applying the image processing technology, the combined image being amplified is utilized for comparing with the predetermined scale plate, thus the relative position coefficients (e.g., distance between fibers and center deviation) between each two-dimensional coordinate of the cores and the cores are calculated so as to improve the quality of optic communication.

Description

571080 五、發明說明（1) 【發明所屬之技術領域】本發明係有關於一種光指，本發明是一種應用於光確保影像處理技術獲知光纖參數，以改善製程成本及光【先前技術】由於光通訊元件之尺寸對地，其光通訊品質之要求元件之需求更是大量增加，道積體光學元件（例如DWDM 的組合配線，而不必花費時良好的光纖連接，必須滿足件，以一個V槽連接器為例列，經加工之後，則必須確定尺寸公差内，用以儘量降耗。例如，橫向偏準如達纖 0 . 1 d B的損耗。故針對此類尺寸檢測，確保如光纖間距達到光通訊使用者所設定之訊品質之提昇。針對上述需求，習知之位，順序取得陣列上每一光距，以求出相關尺寸參數。位置感測器法（美國申請案纖陣列尺寸測試裝置，特別是纖陣列元件之測試裝置，藉由間距（橫向）及或偏差（縱向）等通訊之品質。日益縮小且密度日益提高，相亦隨之提高，其中，光纖陣列例如，以快速連接光纖與多通、AWG等），藉由此方式可重覆間於熔接試誤上。然而，一個低損耗、可靠度高等基本條，其端面係配置有多個光纖陣保其端面光纖之分布必須在一低因為對準偏差所帶來的損核直徑之百分之二，則將造成產品，必須進行其端面的輪廓 (橫向）、偏差（縱向）等參數能規格，以促進製程改善及光通商用量測技術，多以精密定纖的影像，再使用干涉式測先前技術主要有兩種：光學式序號5 9 8 0 1 2 0 ) 或陣列式光感571080 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to an optical finger. The present invention is applied to light to ensure that image processing technology acquires optical fiber parameters to improve process cost and light. [Previous technology] The size of the optical communication components is related to the ground, and the requirements for the optical communication quality are increasing. The component optical components (such as the DWDM combination wiring) do not need to spend a good optical fiber connection. Slot connectors are an example. After processing, the dimensional tolerance must be determined to reduce the consumption as much as possible. For example, the lateral misalignment is such as the loss of 0.1 d B of the fiber. Therefore, for such size detection, ensure The pitch achieves the improvement of the quality set by the user of the optical communication. In response to the above requirements, the position is known to sequentially obtain each optical distance on the array to obtain the relevant size parameters. Position sensor method (U.S. application fiber array size Test equipment, especially for fiber array components, communication products such as pitch (horizontal) and or deviation (longitudinal) It is becoming smaller and denser, and the density is increasing. The fiber arrays, for example, are used to quickly connect optical fibers to multi-pass, AWG, etc.). In this way, it is possible to repeat the splicing trial and error. However, a low Basic strips such as loss and high reliability. The end face is equipped with multiple fiber arrays. The distribution of the end face fiber must be at a low level of 2% of the core diameter caused by misalignment. The parameters of the profile (horizontal) and deviation (longitudinal) of the end face are used to promote the improvement of the process and the commercial measurement technology of the luminous flux. Most of them use precise fixed-fibre images, and then use the interferometric measurement. Optical serial number 5 9 8 0 1 2 0) or array light sensor

第6頁 571080 五、發明說明（2) . 測器法（美國申請案序號5 2 6 4 9 0 9 )、雷射尺或干涉儀測距法。上述方法皆使用單一光源，經由光纖陣列上之每一纖核透光，再以光學感測器量測透出影像。其中，第一種方法係利用與位置相關之光感測器來形成陣列或位移，並感測每一纖核之影惊，再計算其座標、及相關的位置參數； - 第二種方法則以雷射尺或干涉儀，逐步量測每一纖核影像之座標，再計算其相關的位置參數。兩種方法皆可輔以影 ' 像處理與自動定位技術，以促進其量測精度與效率【發明内容】有鑒於先前技術中，前述第一種方法之限制為：光感H 測器的位置須先校正，否則量測結果會影響正確性，且該H 校正需與光學顯微系統同時進行；而第二種方法則須先定 - 位每一纖核之影像，再量測其位移，且為避免定位系統之位移所造成的振動，量測時會有其速度限制，且成本亦較 ~ 第一種方法昂貴許多。因此，在先前技術中，平台移動之長行程精度必須很高，且防震設計必須相當嚴格，而所使用之干涉式測距價格昂貴、又須經當維護，對使用者來說並不符合經濟性及方便性。因此需要有一種檢測技術，能提供更簡便、快速、堅固的方式，來達成光纖陣列尺寸量測。 4 本發明較先前技術之功效為：以陣列式光學感測器同時取得遮罩反光與纖核透光之影像，再藉由一已經由線刻度校正之遮罩參考片，可精密且簡便的界定出每一光纖之Page 6 571080 V. Description of the invention (2). Measuring method (US application number 5 2 6 4 9 0 9), laser ruler or interferometer ranging method. The above methods all use a single light source to transmit light through each fiber core on the fiber array, and then measure out the image with an optical sensor. Among them, the first method uses a position-dependent light sensor to form an array or displacement, and senses the shock of each fiber core, and then calculates its coordinates and related position parameters;-the second method is Use a laser ruler or interferometer to measure the coordinates of each core image step by step, and then calculate the relevant position parameters. Both methods can be supplemented by image processing and automatic positioning technology to promote its measurement accuracy and efficiency. [Summary of the Invention] In view of the previous technology, the limitation of the aforementioned first method is: the position of the light sensor H sensor It must be calibrated first, otherwise the measurement results will affect the accuracy, and the H calibration needs to be performed at the same time as the optical microscopy system; while the second method must first locate-position the image of each fiber core, and then measure its displacement, And in order to avoid the vibration caused by the displacement of the positioning system, there will be a speed limit during the measurement, and the cost is much more expensive than the first method. Therefore, in the prior art, the long stroke accuracy of the platform movement must be very high, and the seismic design must be quite strict, and the interferometric ranging used is expensive and must be maintained, which is not economical for the user. And convenience. Therefore, there is a need for a detection technology that can provide a simpler, faster, and more robust way to achieve fiber array size measurement. 4 The effect of the present invention compared with the prior art is that: using the array optical sensor to simultaneously obtain the mask reflection and fiber core light transmission images, and then using a mask reference sheet that has been corrected by the line scale, it can be precise and simple. Define each fiber

第7頁 571080 五、發明說明（3) . 中心座標與纖核直徑；不需藉由干涉儀等昂貴、敏感儀器即可獲得測試結果，可適應條件較差的測試環境；且測試時，遮罩參考片係與待測件一起移動且同時取像，不須嚴格之定位與防震；僅針對關鍵的圖樣做影像處理，可省去大量的複雜運算，提昇量測速度。因此，本發明之目的在提供一種遮罩式光纖陣列尺寸量測裝置，利用已校正之線刻度參考片，以遮罩方式置於光纖陣列上方同時取像，再以影像處理求出陣列端面每一纖核之正確座標，進而獲得纖核間相對尺寸。 · 本發明光纖陣列尺寸測試裝置之參考片與待測件係設置於同一機構上，使得外界的振動干擾得以減除，故該驅H 動定位可配合使用快速之裝置，以提高量測的速度。 · 【實施方式】請參閱第一圖，係顯示本發明光纖陣列尺寸測試裝置 ’ 之實施架構圖。如第一圖所示，本發明之光纖陣列尺寸測試裝置，至少包含：一導引光源1 ，用以提供光線引入一待測光纖陣列5之光纖尾端，使光纖陣列端面的纖核透光；一遮罩參考片6 ，具有校準刻晝之遮罩圖案，係用以遮罩於該待測光纖陣列5之陣列端面上；一落射光源7，投射光線於該遮罩參考片6，用以形成反射與不反射區域，當落射光源7經過該遮罩參考片6及待測光纖陣列5時，將 $ 形成一複合影像；一顯微鏡組8，用以將前述複合影像顯微放大；一陣列式光學感測器9 ，用以感測前述複合影像；一影像擷取及處理電路1 0，用以取得前述陣列式光學Page 7 571080 V. Description of the invention (3). Center coordinates and core diameter; test results can be obtained without using expensive and sensitive instruments such as interferometers, which can adapt to poor test environments; The reference film is moved together with the DUT and taken at the same time, without strict positioning and anti-vibration; only image processing for key patterns can save a lot of complicated calculations and improve measurement speed. Therefore, the object of the present invention is to provide a mask-type optical fiber array size measurement device, which uses a calibrated linear scale reference sheet to cover the optical fiber array while taking a picture in a mask manner, and then uses image processing to obtain each The correct coordinates of a fiber core, so as to obtain the relative size between the fiber cores. · The reference piece of the optical fiber array size testing device and the device under test of the present invention are arranged on the same mechanism, so that external vibration interference can be reduced. Therefore, the drive H positioning can be used with a fast device to increase the measurement speed. . · [Embodiment] Please refer to the first figure, which is a diagram showing the implementation architecture of the optical fiber array size test device according to the present invention. As shown in the first figure, the optical fiber array size testing device of the present invention includes at least: a guiding light source 1 for providing light to be introduced into a fiber tail end of an optical fiber array 5 to be tested so as to transmit light to the core of the end face of the fiber array. ; A mask reference sheet 6 with a mask pattern calibrated to the day and time, is used to mask on the array end face of the fiber array 5 to be tested; an epi-emission light source 7 projects light onto the mask reference sheet 6, To form reflective and non-reflective regions, when the epi-emission light source 7 passes through the mask reference sheet 6 and the optical fiber array 5 to be tested, a composite image is formed; a microscope group 8 is used to micro-magnify the composite image; Array optical sensor 9 for sensing the aforementioned composite image; an image capture and processing circuit 10 for obtaining the aforementioned array optical

第8頁 571080 五、發明說明（4) 感測器9所感測之影像資料，並做初步影像處理如二元化；及一控制器1 1 ，用以處理前述複合影像，並計算纖核所在二維座標及纖核間之相關位置尺寸。其中，前述光纖陣列尺寸測試裝置進一步包含一分光元件3 0 ，用以導引該落射光源7，投射光線於該遮罩參考片6上。請繼續參閱第一圖，待測光纖陣列5之陣列端面係與遮罩參考片6相互對準貼近，並藉由一承座及定位裝置4來支撐固定兩者位置，使光纖3穿過遮光板2，並藉由位於遮光板2下方之導引光源1發出光線導入光纖3之纖核，而於遮罩參考片6上形成包含纖核位置之複合影像。落射光源 7由上方落射於遮罩參考片6上，然後形成反射影像以顯影遮罩圖案，此兩種影像複合，透過顯微鏡組8放大後，再經由陣列式光學感測器9與擷取及處理電路1 0做進一步的感測與影像擷取，最後送至控制器1 1做進一步處理與運算。此外，本發明光纖陣列尺寸測試裝置尚包含一位移裝置（未顯示），連結該承座及定位裝置，以位移該待測光纖陣列與遮罩參考片，俾使該光學感測器準確抓取光纖陣列上每一纖核的複合影像。請參閱第二圖，係顯示本發明光纖陣列尺寸測試裝置之遮罩參考片與光纖陣列之示意圖。如第二圖所示，其中遮罩圖案1 3係製作於透光基板1 2上，而待測光纖陣列5之陣列端面係貼近及對位於遮罩圖案1 3之下方，將導引光源 1引入之光線通過光纖3的纖核，再穿透至遮罩圖案1 3之透明區。Page 8 571080 V. Description of the invention (4) The image data sensed by the sensor 9 and do preliminary image processing such as binary; and a controller 1 1 for processing the aforementioned composite image and calculating the fiber core location The two-dimensional coordinates and the relevant position dimensions between the cores. The aforementioned optical fiber array size test apparatus further includes a light splitting element 30 for guiding the epitaxial light source 7 and projecting light on the mask reference sheet 6. Please continue to refer to the first figure. The array end face of the optical fiber array 5 to be tested and the mask reference sheet 6 are aligned and close to each other, and a support and a positioning device 4 are used to support and fix the positions of the two, so that the optical fiber 3 passes through the light shielding. The plate 2 emits light to the core of the optical fiber 3 by the guiding light source 1 located under the light shielding plate 2 to form a composite image including the position of the core on the mask reference sheet 6. The epi-illumination light source 7 is incident on the mask reference sheet 6 from above, and then forms a reflection image to develop the mask pattern. These two images are compounded, enlarged through the microscope group 8, and then passed through the array optical sensor 9 and capture and The processing circuit 10 performs further sensing and image capture, and finally sends it to the controller 11 for further processing and calculation. In addition, the optical fiber array size testing device of the present invention further includes a displacement device (not shown), which is connected to the holder and the positioning device to displace the optical fiber array to be tested and the reference mask of the mask, so as to accurately grasp the optical sensor. Composite image of each fiber core on the fiber array. Please refer to the second figure, which is a schematic diagram showing a mask reference sheet and an optical fiber array of the optical fiber array size testing device of the present invention. As shown in the second figure, the mask pattern 1 3 is fabricated on the light-transmitting substrate 12, and the end face of the array of the optical fiber array 5 to be tested is close to and opposite to the mask pattern 13, and the light source 1 is guided. The introduced light passes through the core of the optical fiber 3 and then penetrates to the transparent area of the mask pattern 13.

第9頁 571080 五、發明說明（5) — 請參閱第三圖，並請配合參閱第二圖，係顯示為本發明光纖陣列尺寸測試裝置之遮罩參考片之陣列示意圖。如第三圖所示，該透光基板1 2係以光罩製程製作經設計之幾何圖案，其中遮罩暗區1 4不反射亦不透射光線，遮罩明區 1 5則可供經過纖核之光線透過，該遮罩參考片6之校準刻畫區1 6為縱向與橫向校準刻畫，用以反射從落射光源7引來之同軸光線，平行刻晝間之距離為先經量測校正。本發明應用同軸光照射至光纖端面上、於同軸方向不反射之原理，故遮罩參考片6之纖核光線透光區1 5係設計為比纖核 · 大、比纖殼小即可。請參閱第四圖，並請配合參閱第一圖、第二圖及第三圖，係顯示本發明光纖陣列尺寸測試裝置之測試複合影像之示意圖。如第四圖所示，係顯示複合影像經顯微鏡組8 投射至陣列式光學感測器9所取得的最終影像，其中不透 ‘ 光區係分為遮罩不透光區17與纖殼不透光區19 ’而透光區則分為校準刻晝透光區1 8與纖核透光區2 0，應用影像處理技術，將不透光區與透光區予以明暗對比強化，再求出纖核中心與校準刻晝交叉點之像素座標分別為（pc，qc)、（ P 1，Qi)、（P2, Q2)、（P3, Q3)、（P4, Q4)，校準刻畫交叉點的尺寸座標可由先前校正得知為（Xi，y丨）、（x2，y2)、（x3，y3)、 (x4, y4)，係與各像素座標（Pn qi)、（P2, cu)、（P3, Q3)、（P4，φ q4)相對應。前述尺寸座標（X!，y丨）、（x2, y2)、（x3, y3)、（x4, y4)可以其中一點來作為參考點，例如，（x i，y丨）=(0，0 )，而推知Page 9 571080 V. Description of the invention (5) — Please refer to the third figure, and please refer to the second figure, which is a schematic diagram showing the array of the mask reference sheet of the optical fiber array size test device of the present invention. As shown in the third figure, the light-transmitting substrate 12 is a designed geometric pattern made by a photomask process, wherein the dark area 14 does not reflect or transmit light, and the bright area 15 covers the fiber. The light from the core passes through, and the calibration profile area 16 of the mask reference sheet 6 is a longitudinal and lateral calibration profile, used to reflect the coaxial light from the epi-emission light source 7, and the distance between the parallel engraving days is measured and corrected first. The present invention applies the principle that coaxial light is irradiated onto the end face of the optical fiber and is not reflected in the coaxial direction. Therefore, the fiber core light transmitting area 15 of the mask reference sheet 6 is designed to be larger than the fiber core and smaller than the fiber shell. Please refer to the fourth figure, and please refer to the first figure, the second figure, and the third figure together, which are schematic diagrams showing the composite image of the optical fiber array size testing device of the present invention. As shown in the fourth figure, it shows the final image obtained by projecting the composite image through the microscope group 8 to the array optical sensor 9. The opaque light region is divided into a mask opaque region 17 and a fiber-shell opaque region. The light-transmitting area is 19 ′, and the light-transmitting area is divided into a calibrated daytime light-transmitting area 18 and a fiber core light-transmitting area 20. The image processing technology is used to enhance the light-dark contrast between the opaque area and the light-transmitting area. The pixel coordinates of the center of the fiber core and the intersection point at the calibration moment are (pc, qc), (P 1, Qi), (P2, Q2), (P3, Q3), (P4, Q4), and the calibration depicts the intersection point. The size coordinates of can be known from the previous corrections as (Xi, y 丨), (x2, y2), (x3, y3), (x4, y4), which are related to the pixel coordinates (Pn qi), (P2, cu), (P3, Q3), (P4, φ q4) correspond. One of the aforementioned size coordinates (X !, y 丨), (x2, y2), (x3, y3), (x4, y4) can be used as a reference point, for example, (xi, y 丨) = (0,0) And inferred

第10頁 571080 五、發明說明（6) , 遮罩參考片6之陣列的各刻畫交叉點之尺寸座標。光纖陣列中每一纖核單位的像素座標係個別對應該遮罩參考片6 之各單元刻晝交叉點之尺寸座標，其申相鄰單元的刻晝交叉點之尺寸座標係相同的。光纖陣列中每一纖核單位的纖核之尺寸座標係利用線性迴歸分析法計算獲得。在每一纖核單位的影像中，四個端點的像素座標（pM q〖）、（p2, q2)、（p3, q3)、（p4, q4)及纖核之像素座標（p。，Q。）可藉由影像分析得知，且像素座標 (Pi，Qi)、（P2, Q2)、（P3, Q3)、（P4, Q4)係對應已知的尺寸座 · 標（Xi, yj、（x2, y2)、（x3, y3)、（x4, y4)，則可透過下列式❶ (1)及式（2)即可求出係數m!、m2、ai&a2。 x 二 nij p + ai …（1 ) Y 二 m2q + a2 …（2 ) 因此，將已知的像素座標（pc，qc)及係數nh、m2、ai及 a2帶入式（1 )及式（2 )之相對係數即可得下列式（3 )及式（4 ) xc 二、爪 + …（3 ) yc= m2qc + a2 …（4 ) 而計算式（3 )及式（4 )之結果則可進一步獲得光纖陣列中該纖核單位的纖核之尺寸座標（xc，yc)。藉由上述方法，逐一由左而右或由右而左實施即可得到光纖陣列中每一纖核的尺寸座標，進而得以導出待測光纖陣列5之光纖間距 $ (橫向）、偏差（縱向）等參數。 _ 其中，根據本發明的測量方法，所測得各纖核中心點之尺寸座標（xc，y。）之光纖間距（橫向）與偏差（縱向）等參數Page 10 571080 V. Description of the invention (6), the coordinates of the dimensions of the crossing points of the array of the mask reference sheet 6. The pixel coordinates of each fiber core unit in the fiber array are individually corresponding to the dimensions of the time-day intersection of each unit of the mask reference sheet 6, and the dimensions of the time-day intersection of adjacent units are the same. The size coordinates of the core of each core unit in the fiber array are calculated by linear regression analysis. In the image of each core unit, the pixel coordinates of the four endpoints (pM q 〖), (p2, q2), (p3, q3), (p4, q4), and the pixel coordinates of the core (p. ,, Q.) It can be learned from image analysis, and the pixel coordinates (Pi, Qi), (P2, Q2), (P3, Q3), (P4, Q4) correspond to known size coordinates · (Xi, yj , (X2, y2), (x3, y3), (x4, y4), the coefficients m !, m2, ai & a2 can be obtained by the following formula (1) and formula (2). X 二 nij p + ai… (1) Y two m2q + a2… (2) Therefore, the known pixel coordinates (pc, qc) and coefficients nh, m2, ai, and a2 are taken into the equations (1) and (2). The relative coefficient can be obtained the following formula (3) and formula (4) xc Second, claw +… (3) yc = m2qc + a2… (4) and the results of formula (3) and formula (4) can be further obtained The size coordinates (xc, yc) of the core of the core unit in the fiber array. With the above method, the size coordinates of each core in the fiber array can be obtained one by one from left to right or from right to left, and then The fiber spacing $ (horizontal), deviation (longitudinal) of the fiber array 5 to be tested can be derived Other parameters. _ Wherein measurement method according to the present invention, each of the measured size of the fiber core center point coordinates (xc, y.) The fiber pitch (horizontal) and the deviation (vertical) parameters

第11頁 571080 五、發明說明（7) 可作為產品良率之篩選依據，除了可設定相鄰之兩纖核之光纖間距與偏差參數的公差範圍，亦可限制光纖陣列中由左而右或由右而左相鄰之纖核所累計之光纖間距與偏差參數的公差範圍。在詳細說明本發明的較佳實施例之後，熟悉該項技術人士可清楚的瞭解，在不脫離下述申請專利範圍與精神下可進行各種變化與修改，且本發明亦不受限於說明書中所舉實施例的實施方式。Page 11 571080 V. Description of the invention (7) It can be used as the basis for screening the product yield. In addition to setting the tolerance range of the fiber spacing and deviation parameters of two adjacent fiber cores, it can also limit the left to right or The tolerance range of the fiber spacing and deviation parameters accumulated from right to left adjacent cores. After explaining the preferred embodiments of the present invention in detail, those skilled in the art can clearly understand that various changes and modifications can be made without departing from the scope and spirit of the patent application described below, and the present invention is not limited to the description Implementation of the illustrated embodiment.

第12頁 571080 圖式簡單說明第一圖為本發明光纖陣列尺寸測試裝置之實施架構圖。第二圖為本發明光纖陣列尺寸測試裝置之遮罩參考片與光纖陣列示意圖。第三圖為本發明光纖陣列尺寸測試裝置之遮罩參考片陣列示意圖。第四圖為本發明光纖陣列尺寸測試裝置之測試複合影像示意圖。 [主要元件符號對照說明] 1 2 導引光源 -遮光板 3——光纖 4 5 6 承座及定位裝置待測光纖陣列遮罩參考片 7 ---落射光源 8 ---顯微鏡組陣列式光學感測器 10——影像擷取及處理電路 1 1 ---控制器 12---透光基板 1 3---遮罩圖案· 14——遮罩暗區 15---遮罩之纖核光線透光區571080 Brief Description of Drawings The first drawing is the implementation structure diagram of the fiber array size testing device of the present invention. The second figure is a schematic diagram of a mask reference sheet and an optical fiber array of the optical fiber array size testing device of the present invention. The third figure is a schematic diagram of a mask reference sheet array of the optical fiber array size testing device of the present invention. The fourth figure is a schematic diagram of the test composite image of the optical fiber array size test device of the present invention. [Comparison of main component symbols] 1 2 Guiding light source-Shading plate 3-Optical fiber 4 5 6 Bearing and positioning device Optical fiber array mask reference piece 7 --- Epi-radiation light source 8 --- Microscope array array Sensor 10-image capture and processing circuit 1 1 --- controller 12 --- transparent substrate 1 3-mask pattern 14-mask dark area 15-mask fiber Nuclear light transmission

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Claims

571080 六、申請專利範圍 1. 一種光纖陣列尺寸測一遮罩參考片’ 罩於一待測光纖陣列一承座及定位裝罩參考片之間的位置一影像擷取及處該待測光纖陣列之陣與遮罩參考片之複合一控制器，接收的像素座標與尺寸座核的尺寸座標，以量 2. 如申請專利範圍第1 一導引光源，用以將引入纖核，再透射於 3. 如申請專利範圍第1 一落射光源，投射光 4. 如申請專利範圍第1 前述遮罩參考片的遮刻晝，且刻晝間之距區，用以對準該待測 5. 如申請專利範圍第1 裝置，其中該第一遮光線至前述光學感測 6. 如申請專利範圍第1 試裝置，至少包含：具有校準刻畫之遮罩圖案，用以遮之陣列端面上；置，用以界定該待測光纖陣列與遮，理電路，包含一光學感測器，設於列端面上方，用以抓取該陣列端面影像，並執行影像處理；該影像處理之結果，根據遮罩圖案標，計算該待測光纖陣列中每一纖測光纖間距與偏差參數。項之光纖陣列尺寸測試裝置，包含光線由該待測光纖陣列的光纖尾端光纖陣列端面。項之光纖陣列尺寸測試裝置，包含線於該遮罩參考片上。項之光纖陣列尺寸測試裝置，其中罩圖案包含：第一遮罩明區為校準離先經量測校正；以及第二遮罩明光纖陣列的纖核。或2或3或4項之光纖陣列尺寸測試罩明區用以反射該落射光源所投射或2或3或4項之光纖陣列尺寸測試571080 VI. Scope of patent application 1. A fiber array size measurement and a mask reference sheet 'Covering a position between a fiber array under test and a holder and positioning the reference mask for an optical mask An image capture and positioning of the fiber array under test The array and mask reference film are combined with a controller that receives the pixel coordinates and the size coordinates of the nucleus in two. For example, if the scope of the patent application is the first, a guiding light source is used to introduce the fiber core and transmit it to the nucleus. 3. If the scope of the patent application is the first epi-emissive light source, the projected light 4. If the scope of the patent application scope is the masking day of the aforementioned mask reference film, and the distance between the day and day is used to align the test object. The first device of the patent scope, wherein the first light-shielding line to the aforementioned optical sensing 6. If the first test device of the patent scope is applied, it includes at least: a mask pattern with a calibration profile for covering the end face of the array; In order to define the optical fiber array to be tested and the shielding circuit, an optical sensor is included above the end face of the column to capture the image of the end face of the array and perform image processing; the result of the image processing is based on The mask pattern mark is used to calculate the distance and deviation parameters of each fiber in the fiber array under test. The optical fiber array size test device of the item includes light from the fiber tail end of the fiber array to be tested and the end face of the fiber array. The optical fiber array size test device of the item includes a wire on the mask reference sheet. The optical fiber array size testing device of the item, wherein the mask pattern includes: the first mask bright area is calibrated and measured and corrected first; and the second mask bright fiber core is used. Or 2 or 3 or 4 fiber optic array size test The exposed area is used to reflect the projection of the epi-emission light source or 2 or 3 or 4 fiber optic array size test

第15頁 571080 六 8. 申請專利範圍裝置，其中該纖核將區。如申請專利範圍第1 裝置，其中該第一遮光線至前述光學感測射於第二遮罩明區，如申請專利範圍第7 該影像擷取及處理電將第一遮罩明區的校器。 9. 如申請專利範圍第1 一位移裝置，連結該纖陣列與遮罩參考片上每一纖核的複合影 10. 如申請專利範圍第含一顯微鏡組，用以器。 11. 如申請專利範圍第置，其中該遮罩參考為同車由。 12. 如申請專利範圍第中，該控制器進一步光纖陣列相關二維尺導引光源的光線透射於第二遮罩明或2或3或4項之光纖陣列尺寸測試罩明區用以反射該落射光源所投射器，且該纖核將導引光源的光線透而顯影於前述複合影像。項之光纖陣列尺寸測試裝置，其中路執行前述複合影像的影像處理，準刻畫之像素座標輸出給該控制項之光纖陣列尺寸測試裝置，包含承座及定位裝置，以位移該待測光，俾使該光學感測器抓取光纖陣列 1項之光纖陣列尺寸測試裝置，包將前述複合影像顯影至該光學感測 3或1 0項之光纖陣列尺寸測試裝片的反射光線係與顯微鏡組之光路 1項之光纖陣列尺寸測試裝置，其包含影像處理程式，並計算該待測寸參數。Page 15 571080 VI 8. Patent application device, in which the fiber core will be zoned. For example, the first scope of the patent application device, wherein the first shading line to the aforementioned optical sensing is shot on the second bright area of the mask. For the seventh scope of the patent application, the image capture and processing process Device. 9. If the scope of the first patent application is the first displacement device, connect the fiber array with the composite image of each core on the mask reference sheet. 10. If the scope of the patent application contains a microscope set, it is a device. 11. As set in the scope of patent application, the mask reference is the same vehicle. 12. As described in the patent application, the controller further transmits the light of the two-dimensional ruler-guided light source related to the fiber array to the second mask or the 2 or 3 or 4 fiber array size test mask bright area to reflect the light. The epitaxial light source is a projector, and the fiber core transmits the light guided by the light source to the composite image. The optical fiber array size test device of the item performs the image processing of the aforementioned composite image, and the quasi-characterized pixel coordinates are output to the optical fiber array size test device of the control item, which includes a holder and a positioning device to shift the light to be measured, so that The optical sensor captures an optical fiber array size testing device for item 1 of the optical fiber array, including developing the aforementioned composite image to the optical sensing array of 3 or 10 optical fiber size measurement test pieces, and the reflected light system and the optical path of the microscope group The fiber optic array size test device of item 1 includes an image processing program and calculates the parameters to be measured.

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