TW567288B - Throttle valve having multi-servo regions - Google Patents
Throttle valve having multi-servo regions Download PDFInfo
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Description
567288 五、發明說明（1) 發明所屬之技術領域： 本發明係有關於一種節流閥，特別是有關於一種將節流閥 片（Throttle Valve Blade)之一端設計成曲面結構，而具 有多重伺服區域（Servo Regions)的節流閥。 先前技術： 壓力是半導體製程（如乾蝕刻等）的重要參數之一。先進的 半導體製程設備中係使用節流閥的閥位調整，來進行反應 室壓力的調整和控制。 〜 當製程在進行時，反應室的壓力係由節流閥和節流閥控制 器所組成之壓力自動控制裝置來控制。節流閥控制器比較 所測得之壓力與壓力設定值（Set p〇int)後，產生一伺服步 驟值（Servo Step)，來控制節流閥之驅動裝置（如伺服馬 達），以調整節流閥的閥位，而決定通過節流閥之流體的流 量’其中閥位的大小即為節流閥片與閥外殼間的間隙大 小，間隙愈大則通過節流閥之流體的流量亦愈大。伺服步 驟值，大，則節流閥片的轉動愈大，節流閥片與閥外殼間 的間隙亦愈大。一般而言，節流閥係用來控制抽離反應室 之流體的流量大小，當節流閥片與閥外殼間的間隙愈大， 愈多之流體會被抽離反應室，使反應室的壓力降低；反 之，當間隙愈小，則愈少之流體會被抽離反應室，使反應 室的壓力升高。因此，藉由節流閥片的開關位置，可以控 制反應室的壓力於壓力設定值。 1 請參照第1A圖和第1B圖，第丨A圖為繪示習知之節流閥位於 全關位置的示意圖，第1B圖為繪示習知之節流閥位於開啟567288 V. Description of the invention (1) The technical field to which the invention belongs: The present invention relates to a throttle valve, and in particular to a method in which one end of a throttle valve blade is designed into a curved surface structure and has multiple servos. Throttles for Servo Regions. Prior technology: Pressure is one of the important parameters of semiconductor processes such as dry etching. In advanced semiconductor process equipment, the position of the throttle valve is used to adjust and control the pressure in the reaction chamber. ~ When the process is in progress, the pressure in the reaction chamber is controlled by a pressure automatic control device composed of a throttle valve and a throttle controller. After the throttle controller compares the measured pressure with the pressure set value (Set point), it generates a servo step value (Servo Step) to control the drive device (such as a servo motor) of the throttle valve to adjust the throttle. The position of the throttle valve determines the flow of fluid through the throttle valve. The size of the valve position is the gap between the throttle plate and the valve housing. The larger the gap, the more fluid flow through the throttle valve. Big. The larger the servo step value, the greater the rotation of the throttle plate, and the larger the gap between the throttle plate and the valve housing. Generally speaking, the throttle valve is used to control the flow rate of the fluid extracted from the reaction chamber. When the gap between the throttle plate and the valve housing is larger, the more fluid will be extracted from the reaction chamber, making the reaction chamber The pressure decreases; conversely, the smaller the gap, the less fluid will be pumped out of the reaction chamber, causing the pressure in the reaction chamber to increase. Therefore, it is possible to control the pressure of the reaction chamber to the pressure set value by the opening and closing position of the throttle plate. 1 Please refer to Figure 1A and Figure 1B. Figure 丨 A shows the conventional throttle valve in the fully closed position. Figure 1B shows the conventional throttle valve in the open position.
第5頁 567288 五、發明說明（2) 位置的示意圖。其中此習知之節流閥為兩片式節流閥，至 少包括：閥外殼1 0，閥外殼1 〇具有空洞4 〇 ;節流閥片2 〇 ; % 以及節流閥片30。節流閥片20(或30)係由重疊構件22(或 32)和曲面構件24(或34)所組成，其中重疊構件22(或32)和 曲面構件24(或34)之間係以連接元件26 (或36)結合在一 起，並連接至空洞40的側壁。節流閥片20和節流閥片30的 開關位置係由伺服步驟值的大小來決定，即當飼服步驟值 為零時’重疊構件22和重疊構件32會重疊在一起，使曲面 構件24和曲面構件34完全密封住空洞4〇(如第1A圖所示）； 而當伺服步驟值大於零時，節流閥片2〇和30會開始偏離閥 | 外殼10(如第1B圖所示），節流閥片20和30與閥外殼1〇間便 會產生間隙，使流體得以流過。 明參照第2 A圖和第2 B圖’第2 A圖為緣示習知之節流閥片的 結構示意圖，第2B圖為繪示使用習知之節流閥片的反應室 麼力控制曲線圖。由於節流閥片20之曲面構件24和節流閥 片30之曲面構件34的形狀係互為鏡射（Mirror Reflected)，故以下僅以曲面構件34來代表說明。 如第2A圖所示，習知之節流閥片30之曲面構件34為一平板 結構，其一端有連接部分34a，藉以透過連接元件（未繪示） 而與重疊部分（未繪示）結合。由於曲面構件34的厚度相當響 小’只要稍微轉動節流閥片3 0 (如伺服步驟值為1步），節 流閥片30之曲面構件34便無法封閉閥外殼的孔洞，因此，P 如第2B圖所示，在伺服步驟值靠近〇時，反應室之壓力便會 有所變化’而節流閥的工作區域係位於1 〇步至4 5步之Page 5 567288 V. Description of the invention (2) Schematic diagram of location. Among them, the conventional throttle valve is a two-piece throttle valve, which includes at least: a valve housing 10, a valve housing 10 having a cavity 40, a throttle plate 20, and a throttle plate 30. The throttle plate 20 (or 30) is composed of an overlapping member 22 (or 32) and a curved member 24 (or 34). The overlapping member 22 (or 32) and the curved member 24 (or 34) are connected to each other. The elements 26 (or 36) are bonded together and connected to the side walls of the cavity 40. The switching position of the throttle plate 20 and the throttle plate 30 is determined by the value of the servo step value, that is, when the feeding step value is zero, the 'overlapping member 22 and the overlapping member 32 will overlap together, so that the curved member 24 And curved member 34 completely seals the cavity 40 (as shown in Fig. 1A); and when the servo step value is greater than zero, the throttle plates 20 and 30 will start to deviate from the valve | housing 10 (as shown in Fig. 1B) ), There will be a gap between the throttle plates 20 and 30 and the valve housing 10, so that the fluid can flow through. Refer to Figure 2A and Figure 2B. Figure 2A is a schematic diagram showing the structure of a conventional throttle plate, and Figure 2B is a graph showing the force control curve of a reaction chamber using a conventional throttle plate. . Since the shape of the curved surface member 24 of the throttle plate 20 and the curved surface member 34 of the throttle plate 30 are mirror-reflected with each other, only the curved surface member 34 will be described below. As shown in FIG. 2A, the curved member 34 of the conventional throttle plate 30 is a flat plate structure, and a connecting portion 34a is formed at one end thereof so as to be combined with an overlapping portion (not shown) through a connecting element (not shown). Because the thickness of the curved member 34 is relatively small, as long as the throttle plate 30 is rotated slightly (eg, the servo step value is 1 step), the curved member 34 of the throttle plate 30 cannot close the hole of the valve housing. As shown in Figure 2B, when the value of the servo step is close to 0, the pressure in the reaction chamber will change ', and the working area of the throttle valve is between 10 and 45 steps.
第6頁 567288 五、發明說明（3) 其中，當伺服步驟值等於80 0步時，節流閥係處於全開的狀 態。習知之節流閥的工作區域（1 0步至45之間）之範圍相 當小（僅35步）’故節流閥控制的解析度（Resolution)低， 即伺服步驟值每變化一步，所造成的壓力差太大，使得壓 力控制不穩，且不易達到壓力設定值。特別是在高壓力低 流量的情況下，由於壓力控制不穩，控制器的比例積分 (PI 〖Proportional Integral)參數值無法保持在較進取 (Aggressive)的數值，故需耗費較多的時間，方能操控到 壓力設定值，因而使產能降低。另一方面，若欲全關習知 之節流閥，只能令伺服步驟值等於〇步，以使節流閥片3 〇全 與閥外殼之空洞貼合。然而，當節流閥片3〇的底部接近閥 外设時’節流閥片3 0之曲面構件3 4容易會碰撞到閥外殼， ，此’若此動作的執行過於頻繁，會使節流閥易於受到損 壞。由於習知之節流閥的工作區域相當靠近伺服步驟值等 於〇步時的位置，故如前所述，節流閥片3〇之曲面構件34因 撞到閥外殼而受損的機率便相對增加許多，因而造成生產 成本的增加。 / =此’非常迫切需要發展出一具有多重伺服區域的節流 、藉以使節流閥的工作區域加大，並遠離伺服步驟值等 步時的位置，而提高控制解析度，更能保持進取的比例 定il參數值。因而大幅縮短控制壓力所需的時間，且可穩 二i控制壓力，更可避免節流閥片撞到閥外殼，延 閥的硬體壽命。 發明内容：Page 6 567288 V. Explanation of the invention (3) Among them, when the servo step value is equal to 800 steps, the throttle valve system is in the fully open state. The range of the working area of the throttle (between 10 steps and 45) is quite small (only 35 steps). Therefore, the resolution of the throttle control is low, that is, each time the servo step value changes by one step, The pressure difference is too large, making the pressure control unstable and difficult to reach the pressure set value. Especially in the case of high pressure and low flow, due to the unstable pressure control, the controller's proportional integral (PI 〖Proportional Integral) parameter value cannot be maintained at an aggressive value, so it takes a lot of time. Can control the pressure setpoint, thus reducing the productivity. On the other hand, if you want to fully close the conventional throttle valve, you can only make the servo step value equal to 0 step, so that the throttle valve plate 3 O all fits with the cavity of the valve housing. However, when the bottom of the throttle plate 30 is close to the valve peripherals, the curved member 34 of the throttle plate 30 is likely to collide with the valve housing. If this action is performed too frequently, the throttle valve will be affected. Vulnerable to damage. Since the working area of the conventional throttle valve is quite close to the position where the servo step value is equal to 0 step, as described above, the probability of damage to the curved member 34 of the throttle plate 30 due to hitting the valve housing is relatively increased. Many, resulting in an increase in production costs. / = This is very urgent to develop a throttling with multiple servo areas, so that the working area of the throttle valve is enlarged, and away from the position of the servo step value, etc., to improve the control resolution and be more aggressive Set the il parameter value proportionally. Therefore, the time required to control the pressure is greatly shortened, and the pressure can be controlled stably, which can also prevent the throttle plate from hitting the valve housing and prolong the valve's hardware life. Summary of the invention:
567288 五、發明說明（4) 蓉於上述習知之節流閥有下列之缺點··其工作區域太靠近 f服步驟值等於〇步時的位置，使節流閥片容易撞到閥外 殼；其工作區域太窄，造成控制解析度太小，以及壓力控 制不穩，而無法保持進取的比例積分參數值。 因此’本發明的主要目的為提供一種具有多重伺服區域的 筇流閥’以使節流閥之工作區域遠離伺服步驟值等於〇步時 的位置，來避免節流閥片撞到閥外殼；其工作區域範圍加 大’來提高控制的解析度和增加可壓力控制的穩定度，以 保持進取的比例積分參數值，而大幅縮短到達欲控制之壓 力所需的時間。 根據以上所述之目的，本發明更提供了一種具有多重祠服 區域的節流閥，至少包括：閥外殼，其中閥外殼具有一空 洞；以及至少一個節流閥片，安裝於空洞的側壁上，此至 少一個節流閥片的結合可完全密封空洞，其中此至少一個 節流閥片係依照驅動裝置之伺服步驟值的大小來轉動，每 一個節流閥片至少包括：曲面構件，其中於曲面構件於與 閥外殼相對之一端具有曲面結構，此曲面結構係由同_中 心點之複數個曲面半徑所產生，曲面結構之第一端可與空 洞完全密合，且曲面結構具有一預設曲面寬度，此預設= 面寬度係由前述之第一端起測量至曲面結構之第二端而 得0 實施方式： 本發明揭露一種具有多重伺服區域的節流閥。本發明係將 節流閥片之與閥外殼相對的一端，設計成一曲面結構，藉567288 V. Description of the invention (4) Rong Yu has the following shortcomings in the conventional valve. Its working area is too close to the position where the step value of the service is equal to 0, which makes the throttle plate easily hit the valve housing; its work The area is too narrow, resulting in too small a control resolution and unstable pressure control, which cannot maintain an aggressive value of the proportional integral parameter. Therefore, 'the main object of the present invention is to provide a flow control valve with multiple servo regions' so that the working area of the throttle valve is far from the position where the servo step value is equal to 0 step, so as to avoid the throttle plate from hitting the valve housing; its operation Increase the area 'to increase the resolution of the control and increase the stability of the pressure control, in order to maintain the aggressive proportional integral parameter value, and greatly reduce the time required to reach the pressure to be controlled. According to the above-mentioned object, the present invention further provides a throttle valve with multiple temple service areas, at least comprising: a valve housing, wherein the valve housing has a cavity; and at least one throttle valve plate, which is installed on the cavity sidewall. The combination of the at least one throttle plate can completely seal the cavity. The at least one throttle plate rotates according to the value of the servo step of the driving device. Each throttle plate includes at least: a curved member, where The curved surface member has a curved surface structure at one end opposite to the valve housing. This curved surface structure is generated by a plurality of curved surface radii at the same center point. The first end of the curved surface structure can completely fit the cavity, and the curved surface structure has a preset. The width of the curved surface, this preset = the width of the surface is measured from the aforementioned first end to the second end of the curved structure. Implementation: The present invention discloses a throttle valve with multiple servo regions. The present invention is to design a curved surface structure of the end of the throttle valve plate opposite to the valve housing.
第8頁 567288Page 8 567288
五、發明說明（5) 以調整伺服步驟值與通過節流閥之流量的對應關係。 以下係以如第1 A圖和第1 B圖所示之兩片式節流閥來舉例說 明本發明。然而，本發明亦適用於由其他任意數目之節流 閥片組合而成的郎流閥’故本發明並不在此限。另外，下 列所舉之實施例的節流閥片，其曲面構件的形狀係互為鏡 射’故僅需以其中之一卽流閥片的曲面構件說明。又了以 下之說明係以如實施例所示之節流閥片的曲面構件來取代 如第1A圖和第1B圖所示之曲面構件34和24，而重昼構件22 和重疊構件32的尺寸和形狀亦需與實施例所示之曲面構件 的曲面結構密切配合。 請參照第3A圖，第3A圖為繪示本發明之第一較佳實施例之 卽流閥片的結構示意圖。本發明之第一較佳實施例係將如 第2A圖所示之習知的節流閥片30之曲面構件34，設計成為 如第3A圖所示之曲面構件134。如第3A圖所示，於節流閥”片 130中，其曲面構件134之一端有連接部分134a，藉以透過 連接元件（未繪示）而與節流閥片之重疊部分（未繪示）結 合。曲面構件134之另一端具有曲面結構15〇，曲面結構15〇 係由同一中心點之同一曲面半徑所產生，即曲面結構丨5〇的 形狀為一部分球面，此曲面半徑的大小，使曲面構件丨34與 閥外殼之空洞完全密合。當伺服步驟為介於〇步至預設伺服 步驟值（例如1 0 0步）之間時，具有曲面寬度1 6 6之曲面結構 1 5 0仍與閥外殼之空洞完全密合’因而無流體可通過節流 閥。 請參照第3B圖，第3B圖為繪示使用第一較佳實施例之節流V. Description of the invention (5) To adjust the correspondence between the servo step value and the flow rate through the throttle valve. In the following, the present invention is illustrated by a two-piece throttle valve as shown in Figs. 1A and 1B. However, the present invention is also applicable to a Lang flow valve 'composed of any other number of throttle plates, so the present invention is not limited thereto. In addition, the shape of the curved surface members of the throttle valve of the following embodiments is mirrored with each other ', so only one of the curved surface members of the throttle valve plate needs to be described. The following description is based on replacing the curved members 34 and 24 shown in FIGS. 1A and 1B with the curved members of the throttle plate as shown in the embodiment, and the dimensions of the heavy member 22 and the overlapping member 32 The shape and shape also need to cooperate closely with the curved structure of the curved member shown in the embodiment. Please refer to FIG. 3A, which is a schematic diagram showing the structure of the flow control valve plate according to the first preferred embodiment of the present invention. The first preferred embodiment of the present invention is a curved member 34 of the conventional throttle plate 30 shown in Fig. 2A, which is designed as a curved member 134 shown in Fig. 3A. As shown in FIG. 3A, in the throttle valve sheet 130, one end of the curved member 134 is provided with a connecting portion 134a, so as to pass through a connecting element (not shown) and overlap with the throttle valve sheet (not shown). The other end of the curved member 134 has a curved surface structure 150. The curved surface structure 150 is generated by the same curved surface radius at the same center point, that is, the shape of the curved surface structure 50 is a part of a spherical surface. The size of the curved surface radius makes the curved surface The component 丨 34 is completely in close contact with the cavity of the valve housing. When the servo step is between 0 and a preset servo step value (for example, 100 steps), a curved surface structure with a curved surface width of 1 6 6 still remains. It is completely in tight contact with the cavity of the valve casing, so no fluid can pass through the throttle valve. Please refer to FIG. 3B, which shows the throttling using the first preferred embodiment
第9頁 567288Page 9 567288
閥片的反應室壓力控制曲線圖。當伺服步驟為〇步至ι〇〇步 時，反應室壓力P絲毫不受影響。直到伺服步驟大於丨〇〇步 時，反應室壓力P才開始減少（P的倒數增加）。與習知之節 流閥片（如第2A圖和第2B圖所示）相較，本第一較佳實施例 可使節流閥之工作區域遠離伺服步驟為〇步時的位置，如 110步至145步，以避免節流閥片撞到閥外殼。然而，第一 較佳實施例之節流閥工作區域的範圍仍與習知之節流閥相 同（均為35步）’故亦有工作區域太窄，控制解析度太小； 以及壓力控制不穩，無法保持進取的比例積分參數值的缺 5月參照第4 A圖’第4 A圖為緣示本發明之第二較佳實施例之 郎流閥片的結構示意圖。如第4 A圖所示，於節流閥片2 3 〇 中’其曲面構件234之一端有一連接部分234a，藉以透過連 接元件（未繪示）而與節流閥片之重疊部分（未繪示）結合。 本第二較佳實施例之具有曲面寬度2 6 6之曲面結構2 5 0係# 同一中心點之同一曲面半徑（與第一較佳實施例相同）所 產生，並在其上設置至少一個凹槽252，而凹槽252在曲面 結構2 5 0的部分表面形成具有開口長度2 7 7之至少一個開口 (未標示），此開口的形狀可為例如：矩形齒狀，其面積 為曲面結構250上具有開口之部分的1/3。如第4A圖所示， 在伺服步驟為0至100步之間，曲面結構2 50的形狀係與前述 之第一較佳實施例的曲面結構150相同（即其寬度為如第3A 圓所示之曲面寬度166);然後，在伺服步驟為1〇〇至300步 之間的形狀設置凹槽252 ’並使凹槽252的總面積為此區域Pressure control curve of the reaction chamber of the valve disc. When the servo step is from 0 to 100, the reaction chamber pressure P is not affected at all. It is not until the servo step is greater than the step 00 that the reaction chamber pressure P starts to decrease (the inverse of P increases). Compared with the conventional throttle plate (as shown in FIG. 2A and FIG. 2B), the first preferred embodiment can keep the working area of the throttle valve away from the position where the servo step is 0 steps, such as 110 steps to Step 145 to prevent the throttle disc from hitting the valve housing. However, the range of the working area of the throttle valve of the first preferred embodiment is still the same as that of the conventional throttle valve (both are 35 steps). Therefore, the working area is too narrow and the control resolution is too small; and the pressure control is unstable. The lack of a progressive proportional integral parameter value that cannot be maintained may refer to FIG. 4A. FIG. 4A is a schematic diagram illustrating the structure of a Lang flow valve disc according to a second preferred embodiment of the present invention. As shown in FIG. 4A, a connecting portion 234a is provided at one end of the curved surface member 234 in the throttle plate 2 3 0, so as to pass through a connecting element (not shown) to overlap with the throttle plate (not shown) Show) combined. The second preferred embodiment of the present invention has a curved surface structure with a curved surface width of 2 6 2 5 0 series. The same curved surface radius at the same center point (same as the first preferred embodiment) is generated, and at least one recess is provided thereon. The groove 252 and the groove 252 form at least one opening (not labeled) with an opening length of 2 7 7 on a part of the surface of the curved structure 2 50. The shape of the opening may be, for example, a rectangular tooth shape, and its area is the curved structure 250. 1/3 of the part with openings on it. As shown in FIG. 4A, between the servo steps of 0 to 100, the shape of the curved surface structure 2 50 is the same as the curved surface structure 150 of the first preferred embodiment (that is, its width is as shown in the 3A circle). (The surface width is 166); then, the grooves 252 'are set in a shape between the servo steps of 100 to 300 steps and the total area of the grooves 252 is this area
567288 五、發明說明（7) (伺服步驟為100至300步之間）面積的之例如約1/3，藉以 使伺服步驟為100至300步之間時，通過節流閥之流體的流 量減少，而減少每一步祠服步驟值之變化所造成的壓力 差’來提南卽流閥控制的解析度’並增加壓力控制的穩定 度，且可保持進取的比例積分參數值，而快速地控制到壓 力設定值。另外，曲面結構2 50的底端亦可具有一凸緣 21 0，藉以防止節流閥片過度旋轉。 請參照第4B圖，第4B圖為繪示使用第二較佳實施例之節流 閥片的反應室壓力控制曲線圖。與第一較佳實施例之節流 閥片（如第3A圖和第3B圖所示）相較，本第二較佳實施例不 但可使節流閥之工作區域遠離伺服步驟為〇步時的位置，以 避免節流閥片撞到閥外殼，更可擴大節流閥之工作區域的 範圍，如100步至300步。由於有工作區域的範圍由35步增 加至2 0 0步，因此控制解析度增加，每一步伺服步驟值之變 化所造成的壓力變化較小，故可克服壓力控制不穩，無法 保持進取的比例積分參數值的缺點。 本發明之凹槽於曲面結構上之開口形狀亦可為其他形狀， 例如V形齒狀。請參照第5A圖和第5B圖，第5A圖和第5B圖為 繪示本發明之第三較佳實施例之節流閥片的結構示意圖/ 於節流閥片330中，其曲面構件334之一端有一連接部分 334a，藉以透過連接元件（未繪示）而與節流閥片之重整部 分（未緣示）結合。本第三較佳實施例之具有曲面寬度之 曲面結構3 5 0係由同一中心點之同一曲面半徑（與第二較佳 實施例相同）所產生，並在其上設置至少一個凹槽M2 ,而567288 V. Description of the invention (7) (Servo step is between 100 and 300 steps) For example, about 1/3 of the area, so that when the servo step is between 100 and 300 steps, the flow rate of the fluid passing through the throttle valve is reduced. , While reducing the pressure difference caused by the change in the value of each step of the temple service 'to improve the resolution of the south stream valve control' and increase the stability of the pressure control, and can maintain the aggressive proportional integral parameter value, and quickly control To the pressure setpoint. In addition, the bottom end of the curved surface structure 2 50 may also have a flange 2 10 to prevent the throttle plate from excessively rotating. Please refer to FIG. 4B, which is a graph showing the pressure control curve of the reaction chamber using the throttle valve plate of the second preferred embodiment. Compared with the throttle plate of the first preferred embodiment (as shown in FIG. 3A and FIG. 3B), the second preferred embodiment can not only keep the working area of the throttle valve away from the servo step when the step is zero. Position to prevent the throttle plate from hitting the valve housing, and the working area of the throttle valve can be expanded, such as 100 steps to 300 steps. Since the range of the working area is increased from 35 to 200 steps, the control resolution is increased, and the pressure change caused by the change in the value of the servo step at each step is small, so it can overcome the instability of the pressure control and cannot maintain the aggressive proportion Disadvantages of integration parameter values. The shape of the opening of the groove on the curved structure of the present invention may also be other shapes, such as V-shaped teeth. Please refer to FIG. 5A and FIG. 5B. FIG. 5A and FIG. 5B are schematic diagrams showing the structure of a throttle plate according to the third preferred embodiment of the present invention. One end has a connecting portion 334a, which is combined with a reforming portion (not shown) of the throttle plate through a connecting element (not shown). The curved surface structure 3 50 with a curved surface width in the third preferred embodiment is generated by the same curved surface radius (same as the second preferred embodiment) at the same center point, and at least one groove M2 is provided thereon. and
第11頁 567288 五、發明說明（8) 凹槽352在曲面結構35 0的部分表面形成且士 ea 至少-個開口（未標示），此開口的；；=口長度m之 狀。另外，曲面結構250的底端亦可具有如.V形齒 奸L… 韦一凸緣31 〇，蕤以 防止節流閥片過度旋轉。 #以 藉由調整前述之凹槽和開口的數目、形狀和尺寸 ::結構的寬度，可有效地調整飼服步驟值與通過節流閥 之乂量的對應關係，以克服習知之節流閥的缺點。 二外、本發明之曲面結構亦可為具有可變半徑（Variable Radlus)的曲面。請參照第^圖，第6A圖為繪示本發明之第 :較，實施例之節流閥片的結構示意圖。於節流閥片43〇 ^其曲面構件434之—端有一連接部分434a，藉以透過連 ^件（未緣示）而與節流閥片之重養部分（未紛示）結合。 本第四較佳實施例之曲面結構450係由同一中心點之複數個 =冋大小之曲面半徑所產生。這些曲面半徑由位於曲面結 構450之底端的最大曲面半㈣。，逐漸變小至曲面結構45〇 之頂端的最小曲面半徑心。最大曲面半#R。的大小可使曲 面構件434之底部與閥外殼之空洞完全密合。另外，曲面結 =0的底端亦可具有一凸糊，藉以防止 片過度 旋轉。 :參照第6B圖和第6C圖，第6B圓為繪示第四較佳實施例之 於ί關位置的剖面不意圖，第6C圖為繪示第四較 佳實施例之郎流閥位於開啟位置的剖面示意圖。本第四較 佳實施例之節巧閥閥至少包括：間外殼ι〇，其中閥外殼1〇 具有工洞40 ’節流閥片42〇 ;以及節流閥片。節流閥片Page 11 567288 V. Description of the invention (8) The groove 352 is formed on a part of the surface of the curved structure 350, and there are at least one opening (not labeled) in the opening ea, and the opening length is m; In addition, the bottom end of the curved surface structure 250 may also have, for example, a V-shaped tooth ridge L ... a flange 31 o, to prevent the throttle plate from rotating excessively. #Through adjusting the number, shape and size of the aforementioned grooves and openings :: the width of the structure, the correspondence between the feeding step value and the amount of throttling through the throttle can be effectively adjusted to overcome the conventional throttle Shortcomings. Second, the curved surface structure of the present invention may also be a curved surface with a variable radius. Please refer to FIG. ^, And FIG. 6A is a schematic diagram showing the structure of a throttle valve sheet according to the first, comparative, and embodiment of the present invention. A connection portion 434a is provided at the end of the curved surface member 434 of the throttle plate 43. The connection portion 434a is connected to the recultivation portion (not shown) of the throttle plate through a connecting piece (not shown). The curved surface structure 450 of the fourth preferred embodiment is generated by a plurality of curved surface radii having a size equal to 冋 at the same center point. These surface radii are defined by the largest curved surface halves at the bottom end of the curved structure 450. , Which gradually decreases to the minimum surface radius center of the top of the surface structure 45 °. Maximum surface half #R. The size is such that the bottom of the curved member 434 and the cavity of the valve housing completely fit. In addition, the bottom end of the curved knot = 0 can also have a bump to prevent the sheet from rotating excessively. : Referring to Figures 6B and 6C, circle 6B is not intended to show the cross section of the fourth preferred embodiment at the Guan position, and Figure 6C is a fourth preferred embodiment showing the Lang flow valve is opened A schematic cross-sectional view of the location. The throttle valve of the fourth preferred embodiment includes at least: an intermediate casing ι〇, wherein the valve casing 10 has an orifice 40 'throttle valve plate 42; and a throttle valve plate. Throttle valve
ιι^ι ιη 第12頁 567288ιι ^ ι ιη Page 12 567288
420 (或430 )係由重疊構件422(或43 2)和曲面構件424(或 434)所組成，其中重疊構件422(或432)和曲面構件42/(或 434)之連接部分424a(或434a)之間係以連接元件426 (或 436)結合在一起，並連接至空洞4〇的側壁，·曲面構件 424(或434)的底端亦有凸緣421 (或431)，藉以防止節流閥 片420 (或430)過度旋轉。另外，重疊構件422和重疊構件 432的尺寸和形狀需與曲面構件424和曲面構件434的曲面結 構密切配合。 如第6B圖所示，當伺服步驟值為零時，重疊構件422和重疊 構件4 3 2會重疊在一起，使曲面構件424和曲面構件434之底 部（其曲面半徑為最大曲面半徑rq)完全密封住空洞4〇，•而 如第6C圖所示，當伺服步驟值大於零時，節流閥片42〇和節 流閥片430開始偏離閥外殼1 〇，由於曲面構件424和曲面構 件434之曲面半徑變小，於是節流閥片42〇和節流閥片430與 閥外殼1 0間便會分別產生間隙，使流體得以流過。曲面構 件之曲面半徑的大小與變化決定伺服步驟與流量的關係， 而決定節流閥之工作區域的範圍與位置。因此，調整本第 四實施例之曲面半徑的大小與變化，可精確地調整反應室 壓力的控制曲線。 值得一提的是，應用本發明之第二實施例於一#刻製程 時，可將壓力控制的偏移因素（Shi ft Factor)自0. 353大幅 降低至0· 0097，而且製程時間亦由70. 5秒減少至64· 5秒。 因此，本發明的優點為提供另外一種具有多重伺服區域的 節流閥，其工作區域不但可遠離伺服步驟值等於0步時的位420 (or 430) is composed of overlapping member 422 (or 43 2) and curved member 424 (or 434), where the connecting portion 424a (or 434a) of overlapping member 422 (or 432) and curved member 42 / (or 434) ) Are connected together by a connecting element 426 (or 436) and connected to the side wall of the cavity 40. The bottom end of the curved member 424 (or 434) also has a flange 421 (or 431) to prevent throttling. Valve disc 420 (or 430) is over-rotated. In addition, the size and shape of the overlapping member 422 and the overlapping member 432 need to closely match the curved structure of the curved member 424 and the curved member 434. As shown in FIG. 6B, when the servo step value is zero, the overlapping member 422 and the overlapping member 4 3 2 will overlap together, so that the bottom of the curved member 424 and the curved member 434 (the curved surface radius is the maximum curved surface radius rq) is completely Seal the cavity 40, and as shown in FIG. 6C, when the servo step value is greater than zero, the throttle plate 42 and the throttle plate 430 start to deviate from the valve housing 10, because the curved surface member 424 and the curved surface member 434 The radius of the curved surface becomes smaller, so that a gap is created between the throttle plate 42 and the throttle plate 430 and the valve housing 10, so that the fluid can flow through. The size and change of the surface radius of the surface member determine the relationship between the servo step and the flow rate, and determine the range and position of the working area of the throttle. Therefore, by adjusting the size and change of the radius of the curved surface of the fourth embodiment, the control curve of the pressure in the reaction chamber can be accurately adjusted. It is worth mentioning that, when the second embodiment of the present invention is applied to a # engraving process, the Shi ft Factor of the pressure control can be greatly reduced from 0.353 to 0.097, and the process time is also changed from 70. 5 seconds reduced to 64.5 seconds. Therefore, an advantage of the present invention is to provide another type of throttle valve with multiple servo regions, whose working area can not only be far from the position when the servo step value is equal to 0 steps.
第13頁 567288 五、發明說明（ίο) 置，而避免節流閥片撞到閥外殼；更可適度地擴大，而提 高控制的解析度和增加壓力控制的穩定度，故可保持進取 的比例積分參數值，來大幅縮短控制壓力所需的時間。 如熟悉此技術之人員所瞭解的’以上所述僅為本發明之較 佳實施例而已，ϋ #用以限定本發明之申請專利範圍；凡 其它未脫離本發明所揭示，精神下所完成之等效改變或修 飾，均應包含在τ述之申請專利範圍内。Page 13 567288 V. Description of the invention (ίο) to prevent the throttle plate from hitting the valve housing; it can be expanded moderately to improve the resolution of the control and increase the stability of the pressure control, so the aggressive ratio can be maintained Integrate parameter values to greatly reduce the time required to control pressure. As the person familiar with this technology understands, 'The above description is only a preferred embodiment of the present invention, and # is used to limit the scope of patent application for the present invention; all others that have been completed in the spirit without departing from the disclosure of this invention Equivalent changes or modifications should be included in the scope of patent application mentioned in τ.
第14頁 567288 圖式簡單說明 本發明的較佳實施例已於前述之說明文字中輔以下列圖形 做更詳細的闡述，其中： 第1A圖為繪示習知之節流閥位於全關位置的示意圖； 第1B圖為繪示習知之節流閥位於開啟位置的示意圖； 第2 A圖為繪示習知之節流閥片的結構示意圖； 第2 B圖為繪示使用習知之節流閥片的反應室壓力控制曲線 圖； 第3 A圖為繪示本發明之第一較佳實施例之節流閥片的結構 示意圖； 第3B圖為繪示使用第一較佳實施例之節流閥片的反應室壓 力控制曲線圖； 第4 A圖為繪示本發明之第二較佳實施例之節流閥片的結構 示意圖； 第4B圖為繪示使用第二較佳實施例之節流閥片的反應室壓 力控制曲線圖； 第5A圖和第5B圖為繪示本發明之第三較佳實施例之節流閥 片的結構示意圖； 第6 A圖為繪示本發明之第四較佳實施例之節流閥片的結構 示意圓； 第6B圖為繪示第四較佳實施例之節流閥位於全關位置的剖 面示意圖；以及 ° 第6C圖為纷不第四較佳實施例之節流閥位於開啟位置的剖 面示意圖。· 圖號對照說明：Page 567288 Brief description of the preferred embodiment of the present invention has been described in more detail in the preceding explanatory text with the following figures, where: Figure 1A shows the conventional throttle valve in the fully closed position Schematic diagram; Figure 1B is a schematic diagram showing a conventional throttle valve in an open position; Figure 2A is a schematic diagram showing a conventional throttle valve plate; Figure 2B is a conventional throttle valve plate. Figure 3A shows the pressure control curve of the reaction chamber; Figure 3A is a schematic diagram showing the structure of a throttle plate of the first preferred embodiment of the present invention; Figure 3B is a diagram showing the throttle valve of the first preferred embodiment Pressure control curve of the reaction chamber of the sheet; FIG. 4A is a schematic diagram showing the structure of a throttle valve sheet according to the second preferred embodiment of the present invention; FIG. 4B is a diagram illustrating the throttle using the second preferred embodiment Pressure control curve diagram of the reaction chamber of the valve plate; Figures 5A and 5B are schematic diagrams showing the structure of a throttle valve plate according to the third preferred embodiment of the present invention; Figure 6A is a fourth diagram showing the fourth aspect of the present invention The structure of the throttle plate of the preferred embodiment is shown in a schematic circle; FIG. 6B is Cross-sectional diagram of a fourth preferred embodiment of a throttle valve at its fully closed position; and FIG cross-sectional schematic view of an open position and a second 6C ° Pictured not divergent fourth preferred embodiment of a throttle valve is located. · Drawing number comparison description:
567288 圖式簡單說明 1 0閥外殼 2 0、3 0節流閥片 2 2、3 2重疊構件 24、34曲面構件 34a連接部分 2 6、3 6連接元件 40空洞 130節流閥片 134曲面構件 134a連接部分 1 5 0曲面結構 1 6 6曲面寬度 21 0凸緣 230節流閥片 234曲面構件 234a連接部分 250曲面結構 252凹槽 2 6 6曲面寬度 277開口長度 31 0凸緣 330節流閥片 334曲面構件 334a連接部分 3 5 0曲面結構 352凹槽 366曲面寬度 377開口長度 420節流閥片 421凸緣 422重疊構件 424曲面構件 424a連接部分 426連接元件 430節流閥片 431凸緣 432重疊構件 434曲面構件 434a連接部分 436連接元件 4 50曲面結構 P 反應室壓力 R〇最大曲面半徑 Ri最小曲面半徑567288 Brief description of the drawing 1 0 valve housing 2 0, 30 throttle plate 2 2, 3 2 overlapping member 24, 34 curved member 34a connecting portion 2 6, 3 6 connecting element 40 cavity 130 throttle valve 134 curved member 134a connecting part 1 5 0 curved structure 1 6 6 curved surface width 21 0 flange 230 throttle piece 234 curved member 234a connecting part 250 curved structure 252 groove 2 6 6 curved surface width 277 opening length 31 0 flange 330 throttle valve Piece 334 curved surface member 334a connecting portion 3 5 0 curved surface structure 352 groove 366 curved surface width 377 opening length 420 throttle plate 421 flange 422 overlapping member 424 curved surface member 424a connecting portion 426 connecting element 430 throttle plate 431 flange 432 Overlapping member 434 curved member 434a connecting portion 436 connecting element 4 50 curved structure P reaction chamber pressure R0 maximum curved surface radius Ri minimum curved surface radius
第16頁Page 16
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW92101515A TW567288B (en) | 2003-01-23 | 2003-01-23 | Throttle valve having multi-servo regions |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW92101515A TW567288B (en) | 2003-01-23 | 2003-01-23 | Throttle valve having multi-servo regions |
Publications (2)
| Publication Number | Publication Date |
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| TW567288B true TW567288B (en) | 2003-12-21 |
| TW200413659A TW200413659A (en) | 2004-08-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW92101515A TW567288B (en) | 2003-01-23 | 2003-01-23 | Throttle valve having multi-servo regions |
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| TW (1) | TW567288B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI468888B (en) * | 2009-12-09 | 2015-01-11 | Hon Hai Prec Ind Co Ltd | Throttle valve |
| CN108505579A (en) * | 2018-04-25 | 2018-09-07 | 山东临工工程机械有限公司 | Excavate Electrical Control open type throttling hydraulic system |
-
2003
- 2003-01-23 TW TW92101515A patent/TW567288B/en not_active IP Right Cessation
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI468888B (en) * | 2009-12-09 | 2015-01-11 | Hon Hai Prec Ind Co Ltd | Throttle valve |
| CN108505579A (en) * | 2018-04-25 | 2018-09-07 | 山东临工工程机械有限公司 | Excavate Electrical Control open type throttling hydraulic system |
| CN108505579B (en) * | 2018-04-25 | 2023-08-18 | 山东临工工程机械有限公司 | Electric control open type throttling hydraulic system of excavator |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200413659A (en) | 2004-08-01 |
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