TW562236U - Vertical furnace tube with an anti-vibration design - Google Patents

Vertical furnace tube with an anti-vibration design

Info

Publication number
TW562236U
TW562236U TW92202547U TW92202547U TW562236U TW 562236 U TW562236 U TW 562236U TW 92202547 U TW92202547 U TW 92202547U TW 92202547 U TW92202547 U TW 92202547U TW 562236 U TW562236 U TW 562236U
Authority
TW
Taiwan
Prior art keywords
furnace tube
vertical furnace
vibration design
vibration
design
Prior art date
Application number
TW92202547U
Other languages
Chinese (zh)
Inventor
Tai-Shuo Liou
Jin-Tsai Dai
Original Assignee
Nanya Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanya Technology Corp filed Critical Nanya Technology Corp
Priority to TW92202547U priority Critical patent/TW562236U/en
Publication of TW562236U publication Critical patent/TW562236U/en

Links

TW92202547U 2003-02-18 2003-02-18 Vertical furnace tube with an anti-vibration design TW562236U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92202547U TW562236U (en) 2003-02-18 2003-02-18 Vertical furnace tube with an anti-vibration design

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92202547U TW562236U (en) 2003-02-18 2003-02-18 Vertical furnace tube with an anti-vibration design

Publications (1)

Publication Number Publication Date
TW562236U true TW562236U (en) 2003-11-11

Family

ID=32466939

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92202547U TW562236U (en) 2003-02-18 2003-02-18 Vertical furnace tube with an anti-vibration design

Country Status (1)

Country Link
TW (1) TW562236U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112254536A (en) * 2020-10-16 2021-01-22 北京北方华创微电子装备有限公司 Support heat preservation device and vertical furnace
CN113088935A (en) * 2021-03-30 2021-07-09 上海华力微电子有限公司 Fixed base, LPCVD boiler tube and LPCVD equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112254536A (en) * 2020-10-16 2021-01-22 北京北方华创微电子装备有限公司 Support heat preservation device and vertical furnace
CN113088935A (en) * 2021-03-30 2021-07-09 上海华力微电子有限公司 Fixed base, LPCVD boiler tube and LPCVD equipment

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model