TW562236U - Vertical furnace tube with an anti-vibration design - Google Patents
Vertical furnace tube with an anti-vibration designInfo
- Publication number
- TW562236U TW562236U TW92202547U TW92202547U TW562236U TW 562236 U TW562236 U TW 562236U TW 92202547 U TW92202547 U TW 92202547U TW 92202547 U TW92202547 U TW 92202547U TW 562236 U TW562236 U TW 562236U
- Authority
- TW
- Taiwan
- Prior art keywords
- furnace tube
- vertical furnace
- vibration design
- vibration
- design
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92202547U TW562236U (en) | 2003-02-18 | 2003-02-18 | Vertical furnace tube with an anti-vibration design |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92202547U TW562236U (en) | 2003-02-18 | 2003-02-18 | Vertical furnace tube with an anti-vibration design |
Publications (1)
Publication Number | Publication Date |
---|---|
TW562236U true TW562236U (en) | 2003-11-11 |
Family
ID=32466939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW92202547U TW562236U (en) | 2003-02-18 | 2003-02-18 | Vertical furnace tube with an anti-vibration design |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW562236U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112254536A (en) * | 2020-10-16 | 2021-01-22 | 北京北方华创微电子装备有限公司 | Support heat preservation device and vertical furnace |
CN113088935A (en) * | 2021-03-30 | 2021-07-09 | 上海华力微电子有限公司 | Fixed base, LPCVD boiler tube and LPCVD equipment |
-
2003
- 2003-02-18 TW TW92202547U patent/TW562236U/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112254536A (en) * | 2020-10-16 | 2021-01-22 | 北京北方华创微电子装备有限公司 | Support heat preservation device and vertical furnace |
CN113088935A (en) * | 2021-03-30 | 2021-07-09 | 上海华力微电子有限公司 | Fixed base, LPCVD boiler tube and LPCVD equipment |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4K | Issue of patent certificate for granted utility model filed before june 30, 2004 | ||
MK4K | Expiration of patent term of a granted utility model |