TW557346B - Method and device for disposing of exhaust gas - Google Patents

Description

557346 ★ A7 B7 五、發明説明（1 ) 技術區域 本發明係與廢氣之處理方法及處理裝置有關，其適用於 例如為了使製造半導體時在化學氣相沈積（Chemical Vapor Deposition，CVD)工序中排出包含全氟化碳之廢氣變成無 害而進行之燃燒處理。 技術背景 在製造半導體之CVD工序中，排出包含甲矽烷（SiH4)、 乙矽烷（Si2H6)、二氯甲矽烷（SiH2Cl2)、乙硼烷（B2H6)、氫化 磷（PH3)等之金屬氫化物，或氨（NH3)、一氧化二氮（N20)、 氧氣（〇2)等含氮或含氧之化合物的廢氣。再者，在CVD工 序中，每隔固定期間會進行反應爐的潔淨。在潔淨時，會 排出以全氟甲烷（CF4)、六氟乙烷（C2F6)、八氟丙烷（C3F8)、 三氟甲烷（CHF3)、三氟化氮（NF3)等全氟化碳為首之含氟化 合物廢氣。因為該等CVD廢氣有害，故將之處理變為無害 後才排出。為了處理該廢氣，在半導體工廠之無塵室中， 生產半導體之裝置附近設有燃燒式之廢氣處理裝置，在 CVD工序中由多個反應爐送至一個廢氣處理裝置的廢氣在 燃燒爐形成火焰燃燒。 在該等廢氣中，矽烷等金屬氫化物為可燃性；一氧化二 氮與PFC等含氟化合物為助燃性。為了不定期將該等性質 相異之廢氣導入廢氣處理裝置内，在廢氣處理裝置中將廢 氣完全燃燒，以空氣比在超過1 ·2使氧氣過量的條件下燃燒 分解較佳。但相反地，分解熱、化學安定之PFC，尤其非 常安定之四氟化碳（CF4)，因為需要超過1300°C的高溫，尤 -4 - 本紙張尺度適用中國國家標準(CNS) A4規格(210X297公釐） 557346 A7 B7 五、發明説明（2 ) 其以超過1500°C較佳，故為了有效地提高溫度，以控制造 成溫度降低原因之過量空氣的導入較理想。 再者，因為在氧氣過量的情形下容易生成在高溫燃燒時 所產生之熱NOx或因含氮化合物的燃燒所產生之燃料 NOx，故以控制過量空氣的導入較佳。亦即，在高溫下燃 燒分解包含PFC之廢氣，且同時必須抑制一氧化碳（CO)或 NOx等副產氣體的產生，難以藉由訂定空氣比等燃燒條件 來控制燃燒。因此，本發明之目的在於提供一種廢氣之處 理方法，使需要在高溫下才能分解之包含PFC的廢氣處 理，可在不產生CO等副產物、不需進行複雜的燃燒控制且 不受廢氣成分改變的影響下進行。 發明揭示 本發明之廢氣處理方法，以在燃燒爐之一次燃燒區域中 導入燃料氣體、助燃性氣體與至少包含全氟化碳之廢氣， 在該一次燃燒區域中，使燃料氣體與助燃性氣體在助燃性 氣體存在下，燃燒焰變為還原焰而不完全燃燒，在該燃燒 爐中，將助燃性氣體導入在燃燒氣體氣流位置較一次燃燒 區域下游處之二次燃燒區域中，在該二次燃燒區域中，因 該不完全燃燒而產生之燃燒氣體，在該助燃性氣體之存在 下，使包含一氧化碳之燃燒氣體氧化燃燒，使在該一次燃 燒區域之燃燒空氣比比該一次燃燒區域與二次燃燒區域之 燃燒整體空氣比低為其特徵。作為全氟化碳以含四氟化 碳，在該一次燃燒區域之燃燒溫度以超過1300°C為佳，又 以超過1 500°C較理想。再者，考慮燃燒爐之耐火性，此燃 -5 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐） 557346 A7 B7 五、發明説明（3 ) 燒溫度之上限以1700°C較佳。將包含氮化合物之廢氣導入 該一次燃燒區域較佳。在該一次燃燒區域中，燃燒焰整體 為還原焰較佳。因該二次燃燒區域之燃燒為完全燃燒而將 該一次燃燒區域中不完全燃燒所產生之一氧化碳氧化較理 想。以將該二次燃燒區域之燃燒氣體冷卻較佳。該一次燃 燒區域中之燃燒空氣比以0.8〜1.05較佳。 根據本發明之方法，在該一次燃燒區域中可促進廢氣中 所包含之PFC的分解。因為在一次燃燒區域中，在助燃性 氣體的存在下使廢氣與燃料氣體不完全燃燒，故該燃燒所 形成之火焰，其還原焰比例較完全燃燒者大，或者火焰整 體為還原焰。亦即，雖然燃燒溫度對PFC的分解影響很大， 但即使在相同燃燒溫度下，可發現在氧氣不足之還原焰的 情形下較易分解。例如，PFC中安定的CF4之基本分解反 應，其第一個步驟中切斷C、F之鍵結為速率決定反應，此 乃因在高溫下氫自由基之各種還原性活性物質有助於此速 率決定反應之故。 即，分解CF4之速率決定反應如下所示。又，·表示自 由基。557346 ★ A7 B7 V. Description of the invention (1) Technical area The present invention relates to a method and a device for treating exhaust gas, and is suitable for, for example, discharging in a chemical vapor deposition (CVD) process when manufacturing semiconductors The exhaust gas containing the perfluorocarbon becomes a harmless combustion treatment. Technical background In the CVD process for manufacturing semiconductors, metal hydrides including silane (SiH4), disilane (Si2H6), dichlorosilane (SiH2Cl2), diborane (B2H6), and phosphorus hydride (PH3) are discharged. Or exhaust gas containing nitrogen or oxygen-containing compounds such as ammonia (NH3), nitrous oxide (N20), and oxygen (〇2). In the CVD process, the reaction furnace is cleaned at regular intervals. When clean, perfluorocarbons such as perfluoromethane (CF4), hexafluoroethane (C2F6), octafluoropropane (C3F8), trifluoromethane (CHF3), and nitrogen trifluoride (NF3) are emitted. Exhaust of fluorinated compounds. Because these CVD exhaust gases are harmful, they should be treated to be harmless before being discharged. In order to process this exhaust gas, a combustion type exhaust gas treatment device is provided near the semiconductor production equipment in the clean room of the semiconductor factory. In the CVD process, the exhaust gas sent from multiple reaction furnaces to one exhaust gas treatment device forms a flame in the combustion furnace. combustion. Among these exhaust gases, metal hydrides such as silane are flammable; nitrous oxide and fluorine-containing compounds such as PFC are combustion-supporting. In order to introduce the exhaust gas with different properties into the exhaust gas treatment device from time to time, the exhaust gas is completely burned in the exhaust gas treatment device, and it is better to decompose under the condition that the air ratio exceeds 1.2 when the oxygen is excessive. On the contrary, thermal decomposition and chemically stable PFC, especially the very stable carbon tetrafluoride (CF4), require a high temperature of more than 1300 ° C, especially -4-This paper size applies the Chinese National Standard (CNS) A4 specification ( 210X297 mm) 557346 A7 B7 V. Description of the invention (2) It is better to exceed 1500 ° C, so in order to effectively increase the temperature, it is ideal to control the introduction of excess air that causes the temperature drop. In addition, since in the case of excessive oxygen, it is easy to generate thermal NOx generated during high-temperature combustion or fuel NOx generated by combustion of nitrogen-containing compounds, it is preferable to control the introduction of excess air. That is, the exhaust gas containing PFC is combusted and decomposed at a high temperature, and by-product gas such as carbon monoxide (CO) or NOx must be suppressed. It is difficult to control combustion by setting combustion conditions such as air ratio. Therefore, the object of the present invention is to provide a method for treating exhaust gas, so that the exhaust gas containing PFC which needs to be decomposed at high temperature can be treated without generating by-products such as CO, without complicated combustion control, and without being changed by the composition of the exhaust gas Under the influence of. The invention discloses a method for treating exhaust gas according to the present invention, in which a fuel gas, a combustion-supporting gas, and an exhaust gas containing at least perfluorocarbon are introduced into a primary combustion zone of a combustion furnace. In the presence of the combustion-supporting gas, the combustion flame becomes a reducing flame and is not completely burned. In the combustion furnace, the combustion-supporting gas is introduced into the secondary combustion area downstream of the primary combustion area in the position of the combustion gas flow, and in the secondary combustion area, In the combustion area, the combustion gas generated by the incomplete combustion, in the presence of the combustion-supporting gas, oxidizes and combusts the combustion gas containing carbon monoxide, so that the combustion air ratio in the primary combustion area is greater than the primary combustion area and secondary It is characterized by a low overall air ratio in the combustion zone. As the perfluorocarbon, carbon tetrafluoride is contained, and the combustion temperature in the primary combustion region is preferably more than 1300 ° C, and more preferably more than 1,500 ° C. Furthermore, considering the fire resistance of the burning furnace, this burning -5-This paper size applies Chinese National Standard (CNS) A4 (210 X 297 mm) 557346 A7 B7 V. Description of the invention (3) The upper limit of the burning temperature is 1700 ° C is preferred. It is preferable to introduce an exhaust gas containing nitrogen compounds into the primary combustion region. In this primary combustion region, it is preferable that the entire combustion flame is a reducing flame. Since the combustion in the secondary combustion area is complete combustion, it is desirable to oxidize carbon monoxide generated by incomplete combustion in the primary combustion area. It is preferable to cool the combustion gas in the secondary combustion area. The combustion air ratio in the primary combustion region is preferably 0.8 to 1.05. According to the method of the present invention, the decomposition of PFC contained in the exhaust gas can be promoted in the primary combustion region. Because in the primary combustion zone, the exhaust gas and fuel gas are not completely burned in the presence of combustion-supporting gases, the flame formed by the combustion has a larger proportion of reducing flames than a complete burner, or the flame as a whole is a reducing flame. That is, although the combustion temperature has a great influence on the decomposition of PFC, even at the same combustion temperature, it is found that it is easier to decompose in the case of a reducing flame lacking oxygen. For example, in the basic decomposition reaction of stable CF4 in PFC, the first step is to cut the bond between C and F to determine the rate. This is because various reducing active substances of hydrogen radicals at high temperatures help this. The rate determines the response. That is, the reaction that determines the rate of decomposition of CF4 is as follows. Also, · represents a free radical.

CF4 + Η · 一 CF3 · + HF 由於因立體對稱而安定之CF4氟原子被氫自由基奪走， 形成如CF3 ·般不安定的分子，故容易進行之後的分解反 應。因此，以使用做為燃料氣體之丙烷氣體為例，丙烷焰 之總分解反應式如下所示，CF4被分解成C02、HF及H20。 CH4 + C3H8 + 502 — 4C02 + 4HF + 2H20 -6 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 557346 A7 B7 五、發明説明（4 ) 因為在一次燃燒區域中所形成之火焰為還原焰的範圍 變大，或火焰整體均為還原焰，因此，廢氣在還原焰的停 留時間變長，而分解cf4時，與還原焰有足夠的時間接 觸。當該火焰整體為還原焰時，可確保CF4在還原焰下的 停留時間約為0.4秒，而提高其分解率。 又，在空氣等含氧之助燃性氣體存在下，因為燃燒廢氣 與燃料氣體時在一次燃燒區域燃燒之空氣比（實際燃燒之 氧氣量/理論燃燒之氧氣量）較該一次燃燒區域與二次燃燒 區域之燃燒整體的空氣比低，一次燃燒區域之燃燒溫度可 比二次燃燒區域之燃燒溫度高《藉此，可獲得在一次燃燒 區域中分解包含安定的PFC等廢氣所需要的高溫。且，因 為在一次燃燒區域之氧氣亦較二次燃燒區域少，即使在 1300°C高溫下使CF4燃燒分解，亦可抑制熱NOx的生成。再 者’即使導入NH3、N2〇等含氮化合物之廢氣，亦可使氮氣 易於還原分解，使其轉化成NOx的比例變低，可抑制燃料 NOx的生成。 另一方面，因為一次燃燒區域之燃燒空氣比降低而不完 全燃燒，使得在一次燃燒區域中容易生成CO等副產物。根 據本發明，在二次燃燒區域中導入助燃性氣體，使該一次 燃燒區域所產生之燃燒氣體中所包含的CO進行氧化。因為 在該二次燃燒區域中進行完全燃燒，故在該一次燃燒區域 中因不完全燃燒所生成之CO可全部氧化《而因為該CO之 氧化在900°C以上容易進行，故即使因在二次燃燒區域中導 入助燃性氣體使得溫度下降，亦不會造成影響。再者，在 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐） 557346 A7 B7 五、發明説明（5 ) 該二次燃燒區域中燃燒氣體的冷卻方面，燃燒爐中排出燃 燒氣體的冷卻部分材質或冷卻方法的選擇很多。且，因為 導入燃燒爐之廢氣在一次燃燒區域不需完全燃燒，爐内空 氣比的界限範圍變大，可藉二次燃燒區域中導入之助燃性 氣體調整空氣比，故可控制降低燃燒廢氣中的C0及NOx。 本發明之廢氣處理裝置以包含燃燒爐、在該燃燒爐中通 往一次燃燒區域之廢氣導入管、通往該一次燃燒區域之燃 料氣體導入管、通往該一次燃燒區域之助燃性氣體導入管 以及通往該燃燒爐中比一次燃燒區域之燃燒氣體氣流位置 下游之二次燃燒區域的助燃性氣體導入管，而可調節各燃 燒區域之氣體導入量，在具有導入該一次燃燒區域之助燃 性氣體存在下，導入該一次燃燒區域之廢氣及燃料氣體在 一次燃燒區域燃燒生成燃燒氣體，此燃燒氣體在具有導入 二次燃燒區域之助燃性氣體存在下，在該二次燃燒區域燃 燒，在該一次燃燒區域之燃燒空氣比被設定為使該燃燒焰 成為還原焰為其特徵。而以具備在該二次燃燒區域之燃燒 氣體之冷卻手段較佳。 根據本發明之裝置可實施本發明之方法。 根據本發明之方法，可提供一種廢氣之處理方法及處理 裝置，其在燃燒爐之一次燃燒區域中，藉著抑制空氣過量 比例之燃燒條件以提升PFC的分解效率，且藉由在二次燃 燒區域中進行C0的氧化及燃燒氣體的冷卻，使需要在高溫 下才能分解的含PFC之廢氣處理，可在不產生C0等副產 物、不需進行複雜的燃燒控制且不受廢氣成分改變的影響 -8 - 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) 裝 訂CF4 + 一 ·-CF3 · + HF Because the stable CF4 fluorine atom is taken away by hydrogen radicals due to stereo symmetry, it forms unstable molecules like CF3 ·, so it is easy to carry out subsequent decomposition reactions. Therefore, taking propane gas as a fuel gas as an example, the total decomposition reaction formula of propane flame is shown below, and CF4 is decomposed into CO2, HF, and H20. CH4 + C3H8 + 502 — 4C02 + 4HF + 2H20 -6-This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) 557346 A7 B7 V. Description of the invention (4) The range of the flame formed by the reduction flame becomes larger, or the entire flame is a reduction flame. Therefore, the residence time of the exhaust gas in the reduction flame becomes longer, and when the cf4 is decomposed, it has sufficient time to contact the reduction flame. When the flame is a reducing flame as a whole, the residence time of CF4 under the reducing flame is ensured to be about 0.4 seconds, and the decomposition rate of CF4 is improved. In addition, in the presence of oxygen-containing combustion-supporting gases such as air, the ratio of air (the actual amount of oxygen burned / theoretical amount of oxygen burned) in the primary combustion area when burning exhaust gas and fuel gas is higher than that in the primary combustion area. The overall air ratio of the combustion in the combustion zone is low, and the combustion temperature in the primary combustion zone can be higher than the combustion temperature in the secondary combustion zone. Thus, the high temperature required to decompose exhaust gas including stable PFC in the primary combustion zone can be obtained. In addition, because the primary combustion area has less oxygen than the secondary combustion area, even if CF4 is combusted and decomposed at a high temperature of 1300 ° C, the generation of thermal NOx can be suppressed. Furthermore, even if an exhaust gas of a nitrogen-containing compound such as NH3, N2O is introduced, nitrogen can be easily reduced and decomposed, the ratio of conversion to NOx can be reduced, and the generation of fuel NOx can be suppressed. On the other hand, because the combustion air ratio in the primary combustion zone is reduced and the combustion is not complete, it is easy to generate by-products such as CO in the primary combustion zone. According to the present invention, a combustion-supporting gas is introduced into the secondary combustion region, and CO contained in the combustion gas generated in the primary combustion region is oxidized. Because the complete combustion is performed in the secondary combustion region, the CO generated by the incomplete combustion in the primary combustion region can be completely oxidized, and because the oxidation of the CO is easily performed above 900 ° C, The introduction of combustion-supporting gases into the secondary combustion area reduces the temperature without causing any impact. Furthermore, the Chinese paper standard (CNS) A4 (210 X 297 mm) 557346 A7 B7 is applicable to this paper scale. 5. Description of the invention (5) In terms of cooling the combustion gas in this secondary combustion zone, the combustion is discharged from the combustion furnace. There are many choices for the material or cooling method of the gas cooling part. In addition, because the exhaust gas introduced into the combustion furnace does not need to be completely burned in the primary combustion area, the limit range of the air ratio in the furnace becomes larger. The air ratio can be adjusted by the combustion-supporting gas introduced in the secondary combustion area, so the reduction in the combustion exhaust gas can be controlled. C0 and NOx. The exhaust gas treatment device of the present invention includes a combustion furnace, an exhaust gas introduction pipe leading to the primary combustion zone in the combustion furnace, a fuel gas introduction pipe leading to the primary combustion zone, and a combustion-supporting gas introduction pipe leading to the primary combustion zone. And a combustion-supporting gas introduction pipe leading to the secondary combustion area downstream of the combustion gas flow position of the primary combustion area in the combustion furnace, and the amount of gas introduced into each combustion area can be adjusted to have the combustion-assistance introduced into the primary combustion area In the presence of gas, the exhaust gas and fuel gas introduced into the primary combustion zone are burned in the primary combustion zone to generate a combustion gas. This combustion gas is burned in the secondary combustion zone in the presence of a combustion-supporting gas having a secondary combustion zone. It is characteristic that the combustion air ratio of the primary combustion region is set such that the combustion flame becomes a reducing flame. It is more preferable to use a means for cooling the combustion gas in the secondary combustion region. The device according to the invention can carry out the method of the invention. According to the method of the present invention, a method and a device for treating exhaust gas can be provided, which can improve the decomposition efficiency of PFC by suppressing the combustion condition of excessive air proportion in the primary combustion zone of the combustion furnace, and by The oxidation of C0 and the cooling of combustion gases in the area enable the treatment of PFC-containing exhaust gas that needs to be decomposed at high temperatures. No by-products such as C0 are generated, no complicated combustion control is required, and it is not affected by changes in the composition of the exhaust gas. -8-This paper size applies to China National Standard (CNS) A4 (210X 297mm) binding

線 557346Line 557346

A7 B7 五、發明説明（6 ) 下進行，且可降低熱ΝΟχ或燃料ΝΟχ的產生，同時有助於 燃燒氣體的冷卻。 為了實施本發明之最佳形態 如圖1所示之廢氣處理裝置i，其包含燃燒爐2，用來處 理至少包含如CF4、C：2F6、C3F8等全氟化碳之廢氣，且亦可 用來處理包含SiH4、ShH6、SiH2Ch、B#6、PH3等之金屬氫 化物，NH3、N20、〇2等含氮或含氧化合物；或cHF3、Nf3 等含氟化合物的廢氣。該燃燒爐2包含箱型主體2a、在該主 體2a上面一端向上突出之導入筒2b、在該主體〜上面另一 端向上突出之排出筒2c以及裝在該導入筒2b上之引導噴嘴 2d。該主體2a其不銹鋼外壁2a’之内側具有氧化鋁系之可鑄 塑性耐熱材料2,結構。該導入筒2b其圓筒狀不銹鋼外壁2b， 之内側具有氧化鋁系之可鑄塑性耐熱材料2,結構。該排出 筒2c具有以圓筒狀不銹鋼外壁2c，包圍圓筒狀不銹鋼内壁 2cn之雙重管狀冷卻套管2e之結構，在該内壁2C”之内側具 有氧化鋁系之可鑄塑性耐熱材料2,結構。 在該燃燒爐2内部之導入筒2b與主體2a之邊界區域附近 為一次燃燒區域。又設有從燃料氣體源F導入燃料氣體之 燃料氣體導入管線3、從多個CVD反應爐Rl、R2導入排出 的廢氣之廢氣導入管線4以及從助燃性氣體源a導入助燃 性氣體之助燃性氣體導入管線5通往該一次燃燒區域。從各 CVD反應爐Rl、R2排出的廢氣可在互相不接觸的情形下由 廢氣導入管線4導入一次燃燒區域。部份助燃性氣體與部份 燃料氣體藉由引導噴嘴2d導入一次燃燒區域，由該引導噴 -9 - 本紙張尺度適用中國國家標準(CNS) A4规格(210 X 297公釐) 557346 A7 B7 五、發明説明（7 ) 嘴2d使燃料氣體著火，在一次燃燒區域形成火焰。該助燃 性氣體之剩餘部分，由導入筒2b周圍導入一次燃燒區域。 該燃料氣體之剩餘部分與廢氣在導入一次燃燒區域前預先 充分混和。 該排出筒2c内部經由主體2a到達一次燃燒區域，在燃燒 氣體氣流位置較該一次燃燒區域下游處為二次燃燒區域。 又設有導入助燃性氣體之助燃性氣體導入管線6通往該二 次燃燒區域。在包圍該排出筒2c内之二次燃燒區域的上述 冷卻套管2e連接冷卻水供給管線7與冷卻水排出管線8。藉 此冷卻二次燃燒區域的燃燒氣體。而可使用如液化石油氣 體（LPG)、液化天然氣體（LNG)、氫氣或該等混和氣體等做 為該燃料氣體。又，可使用空氣、必要時在空氣中加入氧 氣的氧加成空氣等做為該助燃性氣體。通往該一次燃燒區 域的廢氣、燃料氣體、助燃性氣體之導入量，及通往二次 燃燒區域的助燃性氣體之導入量可藉由圖未標出之控制閥 來調整。在該排出筒2c上面連接燃燒氣體之排氣導管9，透 過該排氣導管9將燃燒氣體送至圖未標示的後續處理裝 置，經過冷卻、潔淨、除掉固體物質、稀釋等後續處理後 將氣體排出。 在上述處理裝置1中，燃燒爐2之一次燃燒區域中的廢氣 及燃料氣體在助燃性氣體的存在下，燃燒焰變為還原焰而 進行不完全燃燒，生成包含C0之燃燒氣體。該一次燃燒區 域中的廢氣在主體2a内繼續燃燒，因該燃燒所產生之燃燒 氣體到達排出筒2c之二次燃燒區域。在該二次燃燒區域 -10 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐） 557346 A7 B7 五、發明説明（8 ) 中，在導入該二次燃燒區域之助燃性氣體存在下，使該燃 燒氣體所包含之C0氧化而燃燒。此時，當廢氣為cf4時， 該一次燃燒區域及主體2a之燃燒溫度在1300°c以上使之燃 燒，又以1400°C以上較佳，尤其以1500°C以上更理想；該 二次燃燒區域燃燒溫度以在900°C以上較佳。又使該一次燃 燒區域之燃燒空氣比較該一次燃燒區域與二次燃燒區域燃 燒整體空氣比低。該一次燃燒區域之燃燒空氣比以0.8〜1.05 較佳。在本實施形態中，設定一燃燒條件，其在一次燃燒 區域以引導噴嘴2d使燃料氣體燃燒，形成的火焰整體為還 原焰。若該空氣比低於0.8，則會產生煤灰且難以將溫度完 全升高；若超過1.05，則PFC的分解率會降低，且無法完 全抑制NOx的生成。又，在本發明之實施形態中，因該二 次燃燒區域之燃燒為完全燃燒，使該一次燃燒區域不完全 燃燒所生成的C Ο氧化。該一次燃燒區域與二次燃燒區域燃 燒整體之空氣比以超過1.1者較佳，又以1.1〜1.5更理想。當 該空氣比低於1 · 1時，難以使CO完全燃燒；又，超過1.5時， 必須導入超過需要量的助燃性氣體。 根據上述實施形態，在空氣等含氧之助燃性氣體存在 下，因為燃燒廢氣與燃料氣體時在一次燃燒區域燃燒之空 氣比較該一次燃燒區域與二次燃燒區域之燃燒整體之空氣 比低，故在一次燃燒區域之燃燒溫度可比二次燃燒區域之 燃燒溫度高。因此，可獲得在一次燃燒區域中分解安定的 含PFC等廢氣所需要的高溫。且，因為在一次燃燒區域之 氧氣亦較二次燃燒區域少，即使在1300°C高溫下使CF4燃 -11 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐） 裝 訂A7 B7 V. Invention description (6), which can reduce the generation of heat NOx or fuel NOx, and at the same time help to cool the combustion gas. The best form for implementing the present invention is shown in the exhaust gas treatment device i shown in FIG. 1, which includes a combustion furnace 2 for treating exhaust gas containing at least perfluorinated carbon such as CF4, C: 2F6, C3F8, etc., and can also be used for Treatment of metal hydrides containing SiH4, ShH6, SiH2Ch, B # 6, PH3, etc .; nitrogen or oxygen-containing compounds such as NH3, N20, O2; or fluorine-containing compounds such as cHF3, Nf3. The combustion furnace 2 includes a box-shaped main body 2a, an introduction cylinder 2b protruding upward from one end of the upper surface of the main body 2a, a discharge cylinder 2c protruding upward from the other end of the main body to the upper surface, and a guide nozzle 2d attached to the introduction cylinder 2b. The main body 2a has a structure made of an alumina-based castable plastic heat-resistant material 2 inside a stainless steel outer wall 2a '. The introduction tube 2b has a cylindrical stainless steel outer wall 2b, and has an alumina-based castable plastic heat-resistant material 2 inside. The discharge cylinder 2c has a structure of a double-tube cooling jacket 2e with a cylindrical stainless steel outer wall 2c and a cylindrical stainless steel inner wall 2cn. Inside the inner wall 2C ", there is a castable plastic heat-resistant material 2 of alumina type. The primary combustion area is near the boundary area between the introduction tube 2b and the main body 2a inside the combustion furnace 2. A fuel gas introduction line 3 for introducing fuel gas from a fuel gas source F, and a plurality of CVD reaction furnaces R1, R2 are also provided. The exhaust gas introduction line 4 for introducing the exhaust gas and the combustion gas introduction line 5 for introducing the combustion gas from the combustion gas source a lead to the primary combustion area. The exhaust gas discharged from the CVD reaction furnaces R1 and R2 can be kept out of contact with each other. In the case, the exhaust gas introduction line 4 is introduced into the primary combustion area. Part of the combustion-supporting gas and part of the fuel gas are introduced into the primary combustion area through the pilot nozzle 2d, and the pilot spray -9-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 557346 A7 B7 V. Description of the invention (7) The nozzle 2d ignites the fuel gas and forms a flame in the primary combustion area. The remainder of the combustion-supporting gas The remaining part is introduced into the primary combustion area around the introduction cylinder 2b. The remaining part of the fuel gas and the exhaust gas are sufficiently mixed in advance before being introduced into the primary combustion area. The interior of the exhaust cylinder 2c reaches the primary combustion area via the main body 2a, and the combustion gas flow position is relatively The secondary combustion area is downstream of the primary combustion area. A combustion-supporting gas introduction line 6 for introducing a combustion-supporting gas is provided to the secondary combustion area. The above-mentioned cooling jacket surrounds the secondary combustion area in the discharge cylinder 2c. The pipe 2e connects the cooling water supply line 7 and the cooling water discharge line 8. Thereby, the combustion gas in the secondary combustion zone is cooled. For example, liquefied petroleum gas (LPG), liquefied natural gas (LNG), hydrogen, or a mixed gas thereof may be used. As the fuel gas. In addition, air, and oxygen-added air with oxygen added to the air as necessary, can be used as the combustion-supporting gas. The exhaust gas, fuel gas, and combustion-supporting gas leading to the primary combustion zone can be introduced. The amount of the combustion gas and the introduction of the combustion-supporting gas to the secondary combustion area can be adjusted by the control valve not shown in the figure. The cylinder 2c is connected with an exhaust gas pipe 9 for combustion gas, and the combustion gas is sent to a subsequent processing device not shown in the figure through the exhaust gas pipe 9, and the gas is discharged after subsequent processing such as cooling, cleaning, removing solid matter, and dilution. In the processing device 1 described above, the exhaust gas and fuel gas in the primary combustion zone of the combustion furnace 2 are in the presence of a combustion-supporting gas, and the combustion flame becomes a reducing flame to perform incomplete combustion to generate a combustion gas containing CO. This primary combustion The exhaust gas in the area continues to burn in the main body 2a, and the combustion gas generated by the combustion reaches the secondary combustion area of the exhaust cylinder 2c. In the secondary combustion area -10-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 557346 A7 B7 5. In the description of the invention (8), in the presence of a combustion-supporting gas introduced into the secondary combustion region, CO contained in the combustion gas is oxidized and combusted. At this time, when the exhaust gas is cf4, the combustion temperature of the primary combustion area and the main body 2a is above 1300 ° c to make it burn, and more preferably above 1400 ° C, especially more than 1500 ° C; this secondary combustion The regional combustion temperature is preferably above 900 ° C. In addition, the combustion air in the primary combustion area is made lower than the overall air ratio in the primary combustion area and the secondary combustion area. The combustion air ratio in the primary combustion zone is preferably 0.8 to 1.05. In this embodiment, a combustion condition is set, which guides the nozzle 2d to burn the fuel gas in the primary combustion area, and the entire flame formed is a reducing flame. If the air ratio is less than 0.8, coal ash is generated and it is difficult to raise the temperature completely; if it exceeds 1.05, the decomposition rate of PFC is reduced, and NOx generation cannot be completely suppressed. Further, in the embodiment of the present invention, since the combustion in the secondary combustion region is complete combustion, the CO generated by the incomplete combustion in the primary combustion region is oxidized. The air ratio of the entire combustion in the primary combustion area and the secondary combustion area is preferably more than 1.1, and more preferably 1.1 to 1.5. When the air ratio is less than 1.1, it is difficult to completely burn CO. When it exceeds 1.5, it is necessary to introduce more than a required amount of a combustion-supporting gas. According to the above embodiment, in the presence of an oxygen-containing combustion-supporting gas such as air, the air ratio of the combustion in the primary combustion area and the combustion in the primary combustion area is lower than that of the combustion air in the primary combustion area when the exhaust gas and the fuel gas are burned. The combustion temperature in the primary combustion region may be higher than the combustion temperature in the secondary combustion region. Therefore, it is possible to obtain the high temperature required to decompose the stable exhaust gas including PFC in the primary combustion zone. And, because the primary combustion area has less oxygen than the secondary combustion area, CF4 is burned even at a high temperature of 1300 ° C. -11-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm). Binding

線 557346 A7 -—-____Β7 五、發明説明（9 ) k刀％，亦可抑制熱Ν〇χ的生成。再者，即使導入、 N2〇等含氮化合物之廢氣，亦可使氮氣易於還原分解，使 其轉化成ΝΟχ的比例變低，可抑制燃料Ν〇χ的生成。再者， 在一次燃燒區域中，因為在助燃性氣體的存在下，廢氣與 燃料氣體不完全燃燒，故該燃燒所形成之火焰整體為還原 心’因此’氫自由基之各種還原性活性物質可促進一次燃 燒區域中PFC的分解。另一方面，因為一次燃燒區域之燃 燒芝氣比降低而不完全燃燒，使得在一次燃燒區域中容易 生成C0等副產物；在二次燃燒區域中導入助燃性氣體使其 %全燃燒，可將該C0全部氧化。因為該C0之氧化在900°C 以上容易進行，故即使因為在二次燃燒區域中導入助燃性 氣fla而使彳于溫度下降，亦不會造成影響。再者，在該二次 燃燒區域中燃燒氣體的冷卻方面，燃燒爐2中排出燃燒氣體 的冷卻部分材質及冷卻方法的選擇很多。且，因為廢氣在 一次燃燒區域不需完全燃燒，燃燒爐2内空氣比的界限範圍 變大’可藉二次燃燒區域中導入之助燃性氣體調整空氣 比’故可控制降低燃燒廢氣中的C0及ΝΟχ。 本發明並不只限於上述之實施形態。廢氣處理裝置之形 態並不限定於如上述包含在主體2a上突出之導入筒2b與排 出筒2c ’例如亦可為一筒狀主體，在該筒狀主體之一側内 部做為一次燃燒區域；在另一側内部做為二次燃燒區域。 實施例 以上述實施形態之廢氣處理裝置i進行廢氣燃燒實驗。 在該處理裝置1之主體2a其外壁2a，為長600 mmx高500 -12 - 本纸張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) 裝 訂Line 557346 A7 ----- ____ Β7 V. Description of the invention (9) k knife% can also inhibit the generation of heat NOx. In addition, even if an exhaust gas containing a nitrogen-containing compound such as N2O is introduced, the nitrogen gas can be easily reduced and decomposed, the ratio of converting it into NOx can be reduced, and the generation of fuel NOx can be suppressed. Furthermore, in the primary combustion zone, because the exhaust gas and the fuel gas are not completely combusted in the presence of the combustion-supporting gas, the flame formed by the combustion as a whole is the reducing center. Therefore, various reducing active materials of hydrogen radicals may be used. Promote decomposition of PFC in the primary combustion zone. On the other hand, because the ratio of combustion gas in the primary combustion area is reduced and incompletely burned, by-products such as C0 are easily generated in the primary combustion area; the introduction of a combustion-supporting gas in the secondary combustion area to make it fully combusted can reduce This CO is completely oxidized. Since the oxidation of C0 is easy to be performed at a temperature of 900 ° C or more, even if the combustion temperature is lowered by introducing a combustion-supporting gas fla in the secondary combustion region, it will not affect the temperature. Furthermore, in terms of cooling the combustion gas in this secondary combustion region, there are many choices of the material and cooling method of the cooling portion which discharges the combustion gas in the combustion furnace 2. Moreover, because the exhaust gas does not need to be completely burned in the primary combustion zone, the limit range of the air ratio in the combustion furnace 2 becomes larger. 'The air ratio can be adjusted by the combustion-supporting gas introduced in the secondary combustion zone', so that C0 in the combustion exhaust gas can be controlled and reduced. And NOx. The present invention is not limited to the embodiments described above. The form of the exhaust gas treatment device is not limited to the introduction cylinder 2b and the discharge cylinder 2c 'protruding from the main body 2a as described above. For example, the main body 2a and the exhaust cylinder 2c may be a cylindrical body, and the primary combustion area may be used as a primary combustion area inside one side of the cylindrical body; The inside of the other side is used as a secondary combustion zone. Example An exhaust gas combustion experiment was performed using the exhaust gas treatment device i of the above embodiment. The outer wall 2a of the main body 2a of the processing device 1 is 600 mm in length x 500 -12 in height-this paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) binding

線 557346 A7 B7 五、發明説明（1〇 ) mmx寬350 mm，可鑄塑材2’厚度為100 mm;導入筒2b之外 壁2b1之内徑為200 mm、高為250 mm，可鑄塑材2,厚度為50 mm ;排出筒2c之外壁2c·之内徑為300 mm、高為300 mm， 内壁2c”之内徑為250 mm、高為300 mm，可鑄塑材2,厚度 為 50 mm 〇 在比較例1-1中，導入做為燃料氣體之丙烷氣體10 L/min ;做為廢氣之氮氣 1〇〇 L/min、CF4 1 L/min。以 5 L/min 將冷卻水導入冷卻套管2e中。又，僅在一次燃燒區域中以 240 L/min導入空氣比ι·〇ι、做為助燃性氣體之空氣；在二 次燃燒區域中並未導入空氣。在燃燒爐2之主體2a其溫度為 1550°C ;在排出筒2c其出口溫度為700°C。此時，在排出筒 2c出口以傅立葉轉換式紅外線分光法（FT-IR)等測定CF4、 CO及NOx ’ 其結果為：cf4 45 ppm、CO 100 ppm、NOx 50 ppm。在此’將燃燒氣體之風流率增加列入考慮計算出cf4 之分解率為98.5 %。 在實施例1 -2中，相對於比較例1 -1，在二次燃燒區域中 以20 L/min導入做為助燃性氣體之空氣，在一次燃燒區域 與二次燃燒區域燃燒整體之空氣比為丨·丨〇，且進行相同之 測疋。其結果 ’ CF4為 45 ppm、CO為 25 ppm、NOx為 50 ppm， CF4之分解率為98.5%。 在比較例1中，相對於比較例1 -1，在一次燃燒區域中 增加助燃性氣體的導入量使一次燃燒區域之空氣比為 i·10 ’進行相同之測定。其結果，CF4為150 ppm、CO為23 ppm、N0x為 7〇 ppm，CF4之分解率為 95.0%。 -13 - 本紙張尺度適财國S家標準(CNS) A4規格(21()><297公董) 装 訂Line 557346 A7 B7 V. Description of the invention (10) mmx width 350 mm, thickness of castable material 2 'is 100 mm; inner diameter of outer wall 2b1 of introduction tube 2b is 200 mm, height of 250 mm, castable material 2, the thickness is 50 mm; the outer wall 2c of the discharge tube 2c has an inner diameter of 300 mm and a height of 300 mm, and an inner wall 2c ”has an inner diameter of 250 mm and a height of 300 mm. The castable material 2 has a thickness of 50 mm 〇 In Comparative Example 1-1, 10 L / min of propane gas as a fuel gas; 100 L / min of nitrogen gas and 1 L / min of CF4 were introduced. Cooling water was introduced at 5 L / min. In the cooling jacket 2e. In addition, air is introduced as the combustion-supporting gas at 240 L / min only in the primary combustion area; air is not introduced in the secondary combustion area. In the combustion furnace 2 The temperature of the main body 2a is 1550 ° C; the exit temperature of the discharge tube 2c is 700 ° C. At this time, the CF4, CO, and NOx are measured at the exit of the discharge tube 2c by Fourier transform infrared spectroscopy (FT-IR). The results were: cf4 45 ppm, CO 100 ppm, and NOx 50 ppm. Here, taking into account the increase in the air flow rate of the combustion gas, the decomposition rate of cf4 was calculated to be 98.5%. In 1-2, compared with Comparative Example 1 -1, the air as the combustion-supporting gas was introduced at 20 L / min in the secondary combustion region, and the air ratio of the entire combustion in the primary combustion region and the secondary combustion region was 丨 · The same measurement was performed. As a result, CF4 was 45 ppm, CO was 25 ppm, NOx was 50 ppm, and the decomposition rate of CF4 was 98.5%. In Comparative Example 1, compared with Comparative Example 1 -1, The same amount of combustion-supporting gas was introduced in the primary combustion zone so that the air ratio in the primary combustion zone was i · 10 '. The same measurement was performed. As a result, CF4 was 150 ppm, CO was 23 ppm, NOx was 70 ppm, and CF4 was Decomposition rate is 95.0%. -13-This paper is suitable for SSC Standard (CNS) A4 specification (21 () > < 297 public directors) binding

線 557346 A7 B7_ __ 五、發明説明（11 ) 在比較例2-2中，相對於比較例1 -1，在一次燃燒區域中 減少助燃性氣體的導入量使一次燃燒區域之空氣比為 0.98，進行相同之測定。其結果，CF4為38 ppm、C0為650 ppm、NOx為 43 ppm，CF4之分解率為 98.7%。 在實施例2-3中，相對於比較例1-1，在一次燃燒區域中 減少助燃性氣體的導入量使一次燃燒區域之空氣比為 0·98 ;在二次燃燒區域中導入做為助燃性氣體之空氣，使 一次燃燒區域與二次燃燒區域燃燒整體之空氣比為1.10， 進行相同之測定。其結果，CF4為37 ppm、CO為20 ppm、 NOx為45 ppm，CF4之分解率為98.7 %。 在比較例2-4中，相對於比較例1 -1，在一次燃燒區域中 減少助燃性氣體的導入量使一次燃燒區域之空氣比為 0.95，進行相同之測定。其結果，CF4為25 ppm、CO為3200 ppm、NOx為 33 ppm，CF4之分解率為 99.1%。 在實施例2-5中，相對於比較例1 -1，在一次燃燒區域中 減少助燃性氣體的導入量使一次燃燒區域之空氣比為 0·95 ;在二次燃燒區域中導入做為助燃性氣體之空氣，使 一次燃燒區域與二次燃燒區域燃燒整體之空氣比為1.10， 進行相同之測定。其結果，CF4為25 ppm、CO為20 ppm、 NOx為32 ppm，CF4之分解率為99.1 %。 在實施例2-6中，相對於比較例1 -1，減少燃料氣體的導 入量，使在一次燃燒區域中燃燒爐2之主體2 a其溫度為 15 00°C ;在一次燃燒區域中減少助燃性氣體的導入量使一 次燃燒區域之空氣比為0.95 ;在二次燃燒區域中導入做為 -14 - 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐） 557346 A7 B7 五、發明説明（12 ) 助燃性氣體之空氣，使一次燃燒區域與二次燃燒區域燃燒 整體之空氣比為1.10，進行相同之測定。其結果，CF4為85 ppm、CO 為 21 ppm、NOx為 28 ppm，CF4之分解率為 97.1 %。 在實施例2-7中，相對於比較例1 -1，減少燃料氣體的導 入量，使在一次燃燒區域中燃燒爐2之主體2a其溫度為 1450°C ;在一次燃燒區域中減少助燃性氣體的導入量使一 次燃燒區域之空氣比為1 ·00;在二次燃燒區域中導入做為 助燃性氣體之空氣，使一次燃燒區域與二次燃燒區域燃燒 整體之空氣比為1.10，進行相同之測定。其結果，CF4為440 ppm、CO 為 1 5 ppm、NOx為 28 ppm，CF4之分解率為 85.0%。 在實施例2-8中，相對於比較例1 -1，減少燃料氣體的導 入量，使在一次燃燒區域中燃燒爐2之主體2a其溫度為 1450°C ;在一次燃燒區域中減少助燃性氣體的導入量使一 次燃燒區域之空氣比為0·95 ;在二次燃燒區域中導入做為 助燃性氣體之空氣，使一次燃燒區域與二次燃燒區域燃燒 整體之空氣比為1.10，進行相同之測定。其結果，CF4為290 ppm、CO為 18 ppm、NOx 為 25 ppm，CF4之分解率為 90.1 %。 在實施例2-9中，相對於比較例1 -1，減少燃料氣體的導 入量，使在一次燃燒區域中燃燒爐2之主體2 a其溫度為 1450°C ;在一次燃燒區域中減少助燃性氣體的導入量使一 次燃燒區域之空氣比為0.90 ;在二次燃燒區域中導入做為 助燃性氣體之空氣，使一次燃燒區域與二次燃燒區域燃燒 整體之空氣比為1.10，進行相同之測定。其結果，CF4為210 ppm、CO為 24 ppm、NOx為 23 ppm，CF4之分解率為 92.9% 〇 -15 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐） 557346 A7 B7 五、發明説明（13 ) 在比較例2-10中，相對於比較例1-1，減少燃料氣體的導 入量，使在一次燃燒區域中燃燒爐2之主體2 a其溫度為 1200°C ;在一次燃燒區域中減少助燃性氣體的導入量使一 次燃燒區域之空氣比為0.95，進行相同之測定。其結果， CF4 為 4200 ppm、CO 為 3500 ppm、NOx 為 15 ppm，CF4 之分 解率不到10%。 裝 在比較例2-11中，相對於比較例1-1，減少燃料氣體的導 入量，使在一次燃燒區域中燃燒爐2之主體2a其溫度為 1200°C ;在一次燃燒區域中減少助燃性氣體的導入量使一 次燃燒區域之空氣比為0.95 ;在二次燃燒區域中導入做為 助燃性氣體之空氣，使一次燃燒區域與二次燃燒區域燃燒 整體之空氣比為1.10,進行相同之測定。其結果，CF4為4130 ppm、CO為 20 ppm、NOx為 15 ppm，CF4之分解率不到 10%。 上述實施例與比較例之實驗結果如以下之表1所示。 訂Line 557346 A7 B7_ __ V. Description of the invention (11) In Comparative Example 2-2, compared to Comparative Example 1 -1, the amount of combustion-supporting gas introduced in the primary combustion region was reduced so that the air ratio in the primary combustion region was 0.98. The same measurement was performed. As a result, CF4 was 38 ppm, CO was 650 ppm, NOx was 43 ppm, and the decomposition rate of CF4 was 98.7%. In Example 2-3, compared with Comparative Example 1-1, the introduction amount of the combustion-supporting gas was reduced in the primary combustion region so that the air ratio in the primary combustion region was 0 · 98; The same measurement was carried out with air of a neutral gas such that the air ratio of the entire combustion in the primary combustion zone and the secondary combustion zone was 1.10. As a result, CF4 was 37 ppm, CO was 20 ppm, NOx was 45 ppm, and the decomposition rate of CF4 was 98.7%. In Comparative Example 2-4, the amount of the combustion-supporting gas introduced in the primary combustion region was reduced in comparison with Comparative Example 1-1 so that the air ratio in the primary combustion region was 0.95, and the same measurement was performed. As a result, CF4 was 25 ppm, CO was 3200 ppm, NOx was 33 ppm, and the decomposition rate of CF4 was 99.1%. In Example 2-5, compared with Comparative Example 1 -1, the introduction amount of the combustion-supporting gas was reduced in the primary combustion region so that the air ratio in the primary combustion region was 0.95; the introduction in the secondary combustion region was used as the combustion assistance The same measurement was carried out with air of a neutral gas such that the air ratio of the entire combustion in the primary combustion zone and the secondary combustion zone was 1.10. As a result, CF4 was 25 ppm, CO was 20 ppm, NOx was 32 ppm, and the decomposition rate of CF4 was 99.1%. In Example 2-6, compared with Comparative Example 1 -1, the introduction amount of the fuel gas was reduced, so that the temperature of the main body 2a of the combustion furnace 2 in the primary combustion zone was 15 00 ° C; the reduction in the primary combustion zone The introduction amount of combustion-supporting gas makes the air ratio in the primary combustion area to be 0.95; the introduction in the secondary combustion area is -14-This paper size applies to China National Standard (CNS) A4 (210X 297 mm) 557346 A7 B7 5 Explanation of the invention (12) The air of the combustion-supporting gas is made to have the air ratio of the entire combustion in the primary combustion region and the secondary combustion region to 1.10, and the same measurement is performed. As a result, CF4 was 85 ppm, CO was 21 ppm, NOx was 28 ppm, and the decomposition rate of CF4 was 97.1%. In Example 2-7, compared with Comparative Example 1 -1, the introduction amount of fuel gas was reduced so that the temperature of the main body 2a of the combustion furnace 2 in the primary combustion zone was 1450 ° C; and the combustion-supporting ability was reduced in the primary combustion zone The amount of gas introduced is such that the air ratio in the primary combustion zone is 1.00; the air as the combustion-supporting gas is introduced in the secondary combustion zone, and the overall air ratio in the primary combustion zone and the secondary combustion zone is 1.10. Its determination. As a result, CF4 was 440 ppm, CO was 15 ppm, NOx was 28 ppm, and the decomposition rate of CF4 was 85.0%. In Example 2-8, compared with Comparative Example 1-1, the introduction amount of fuel gas was reduced, so that the temperature of the main body 2a of the combustion furnace 2 in the primary combustion zone was 1450 ° C; and the combustion assisting ability was reduced in the primary combustion zone The amount of gas introduced is such that the air ratio in the primary combustion zone is 0.95; the air as the combustion-supporting gas is introduced in the secondary combustion zone, so that the overall air ratio in the primary combustion zone and the secondary combustion zone is 1.10. Its determination. As a result, CF4 was 290 ppm, CO was 18 ppm, NOx was 25 ppm, and the decomposition rate of CF4 was 90.1%. In Example 2-9, compared with Comparative Example 1 -1, the introduction amount of the fuel gas was reduced, so that the temperature of the main body 2a of the combustion furnace 2 in the primary combustion zone was 1450 ° C; the combustion assisting was reduced in the primary combustion zone The introduction amount of the neutral gas is such that the air ratio in the primary combustion zone is 0.90; the air as the combustion-supporting gas is introduced in the secondary combustion zone, and the overall air ratio in the primary combustion zone and the secondary combustion zone is 1.10. Determination. As a result, CF4 was 210 ppm, CO was 24 ppm, NOx was 23 ppm, and the decomposition rate of CF4 was 92.9%. 〇-15-This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 557346 A7 B7 V. Description of the invention (13) In Comparative Example 2-10, the introduction amount of fuel gas is reduced compared to Comparative Example 1-1, so that the main body 2a of the combustion furnace 2 in the primary combustion zone has a temperature of 1200 ° C ; Reduce the introduction of combustion-supporting gas in the primary combustion area so that the air ratio in the primary combustion area is 0.95, and perform the same measurement. As a result, CF4 was 4200 ppm, CO was 3500 ppm, and NOx was 15 ppm. The resolution of CF4 was less than 10%. Installed in Comparative Example 2-11, compared with Comparative Example 1-1, reducing the amount of fuel gas introduced, so that the temperature of the main body 2a of the combustion furnace 2 in the primary combustion zone is 1200 ° C; reducing the combustion assistance in the primary combustion zone The introduction amount of air is to make the air ratio in the primary combustion zone to be 0.95; to introduce the air as the combustion-supporting gas in the secondary combustion zone, and to make the air ratio of the entire combustion in the primary combustion zone and the secondary combustion zone to 1.10. Determination. As a result, CF4 was 4130 ppm, CO was 20 ppm, NOx was 15 ppm, and the decomposition rate of CF4 was less than 10%. The experimental results of the above examples and comparative examples are shown in Table 1 below. Order

線 -16 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 557346 A7 B7 五、發明説明（14 ) rrb^±l_l 畸詻窆1—2 rrtl^J:2—2 衅誃窆2丨3 #萘±2-5 #誃窆2_6 碲萘±2—9ss?s 碲萘窆2—11 濟莽1¾^re) 1550 1550 1550 1550 1550 1550 1550 1500 1450 1450 1450 Π00 1200 is^0p^ 濟雜¢^5丨) 101 101 L10 P98 P900 P95 0.95 P95 100 P95 P90 0.95 P95 • 10 -s -s .no 33吟 U0 & 呤 l·;^^^ 33卟 U0 U0 Μ0 150 300 37 25 25 005 to 290 210 払200 私130 nF4 (PP3) 私5 仁5 (％) 98·5 98·5 950 98·7 98·7 99·1 99·1 97」 850 9Ρ1 92·9 As 〈10 no(ppm) 100 25 23 650 20 3200 20 21 15 100 24 3500 20 NOx (PP3) 50 50 70 仁3 私5 33 32 200 200 25 23 15 15 本紙張尺度適用中國國家標準(CNS) A4規格(210 x 297公釐) 557346 A7 B7 五、發明説明（15 ) 在比較例3-1、實施例3-2、比較例3-3、實施例3-4、比 較例3-5中，相對於比較例1-1，將廢氣換成氨氣2 L/min及 氮氣 100 L/min。 在比較例3-1中，相對於比較例1-1，在一次燃燒區域中 減少助燃性氣體的導入量使一次燃燒區域之空氣比為 0.95，進行相同之測定。其結果，CO為9500 ppm、NOx為 430 ppm ° 在實施例3-2中，相對於比較例3-1，在二次燃燒區域中 導入做為助燃性氣體之空氣，使一次燃燒區域與二次燃燒 區域燃燒整體之空氣比為1.10，進行相同之測定。其結果， CO為 25 ppm、NOx為 450 ppm。 在比較例3 - 3中，相對於比較例3 -1，在一次燃燒區域中 增加助燃性氣體的導入量使一次燃燒區域之空氣比為 1.00，進行相同之測定。其結果，CO為730 ppm、NOx為600 ppm 〇 在實施例3-4中，相對於比較例3-1，在一次燃燒區域中 增加助燃性氣體的導入量使一次燃燒區域之空氣比為 1 ·00;在二次燃燒區域中導入做為助燃性氣體之空氣，使 一次燃燒區域與二次燃燒區域燃燒整體之空氣比為1 · 10， 進行相同之測定。其結果，CO為25 ppm、NOx為580 ppm。 在比較例3 - 5中，相對於比較例3 -1，在一次燃燒區域中 增加助燃性氣體的導入量使一次燃燒區域之空氣比為 1·20，進行相同之測定。其結果，CO為15 ppm、NOx為1400 ppm 〇 -18 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐） 557346 A7 B7 五、發明説明（16 ) 上述實施例與比較例之實驗結果如以下之表2所示。 又，氨氣在任何條件下均低於5 ppm。 表2 燃燒溫度 CC) 一次燃燒區域之 燃燒空氣比(一） 包含二次空 氣之空氣比 CO (ppm) Nox (ppm) 比較例3-1 1550 0.95 同左 9500 430 實施例3-2 1550 0.95 1.10 25 450 比較例3-3 1550 1.00 同左 7300 600 實施例3-4 1550 1.00 1.10 25 580 比較例3-5 1550 1.20 同左 15 1400 在比較例4-1、比較例4-2、實施例4-3中，相對於比較例 1-1，將廢氣換成一氧化二氮1 L/min及氮氣100 L/min ;在 比較例4-4、實施例4_5、比較例4-6中，相對於比較例1 · 1， 將廢氣換成三氟化氮（NF3)1 L/min及氮氣100 L/min。 在比較例4-1中，相對於比較例1 -1，在一次燃燒區域中 減少助燃性氣體的導入量使一次燃燒區域之空氣比為 1 ·00，進行相同之測定。其結果，CO為55 ppm、NOx為750 ppm 〇 在比較例4-2中，相對於比較例4-1，在一次燃燒區域中 減少助燃性氣體的導入量使一次燃燒區域之空氣比為 0.95，進行相同之測定。其結果，CO為3200 ppm、NOx為 250 ppm 〇 在實施例4-3中，相對於比較例4-1，在一次燃燒區域中 減少助燃性氣體的導入量使一次燃燒區域之空氣比為 -19 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐） 裝 訂Line-16-This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297mm) 557346 A7 B7 V. Description of the invention (14) rrb ^ ± l_l Distortion 1-2 rrtl ^ J: 2-2誃 窆 2 丨 3 # naphthalene ± 2-5 # 誃 窆 2_6 tellurium naphthalene ± 2-9ss? S tellurium naphthalene 2-11 reckless 1¾ ^ re) 1550 1550 1550 1550 1550 1550 1550 1500 1450 1450 1450 Π00 1200 is ^ 0p ^ Economic miscellaneous ¢ ^ 5 丨) 101 101 L10 P98 P900 P95 0.95 P95 100 P95 P90 0.95 P95 • 10 -s -s .no 33 Yin U0 & Purine l ;; ^^ 33 33 U0 U0 Μ0 150 300 37 25 25 005 to 290 210 払 200 Private 130 nF4 (PP3) Private 5 Ren 5 (%) 98 · 5 98 · 5 950 98 · 7 98 · 7 99 · 1 99 · 1 97 ″ 850 9P1 92 · 9 As 〈 10 no (ppm) 100 25 23 650 20 3200 20 21 15 100 24 3500 20 NOx (PP3) 50 50 70 Ren3 Private 5 33 32 200 200 25 23 15 15 This paper size applies to China National Standard (CNS) A4 specifications ( (210 x 297 mm) 557346 A7 B7 V. Description of the invention (15) In Comparative Example 3-1, Example 3-2, Comparative Example 3-3, Example 3-4, Comparative Example 3-5, In Comparative Example 1-1, the exhaust gas was replaced with 2 L / min of ammonia gas and 100 L / min of nitrogen gas. In Comparative Example 3-1, as compared with Comparative Example 1-1, the introduction amount of the combustion-supporting gas was reduced in the primary combustion region so that the air ratio in the primary combustion region was 0.95, and the same measurement was performed. As a result, CO was 9500 ppm and NOx was 430 ppm. In Example 3-2, compared with Comparative Example 3-1, air was introduced as a combustion-supporting gas in the secondary combustion region, and the primary combustion region was separated from the secondary combustion region. The air ratio of the entire combustion in the secondary combustion zone was 1.10, and the same measurement was performed. As a result, CO was 25 ppm and NOx was 450 ppm. In Comparative Example 3-3, the same measurement was performed by increasing the introduction amount of the combustion-supporting gas in the primary combustion region so that the air ratio in the primary combustion region was 1.00 compared with Comparative Example 3 -1. As a result, CO was 730 ppm and NOx was 600 ppm. In Example 3-4, compared with Comparative Example 3-1, the introduction amount of the combustion-supporting gas was increased in the primary combustion region so that the air ratio in the primary combustion region was 1 · 00; Introduce air as a combustion-supporting gas in the secondary combustion area, and make the air ratio of the entire combustion in the primary combustion area and the secondary combustion area to 1 · 10, and perform the same measurement. As a result, CO was 25 ppm and NOx was 580 ppm. In Comparative Examples 3 to 5, as compared with Comparative Example 3 to 1, the amount of the combustion-supporting gas introduced in the primary combustion region was increased so that the air ratio in the primary combustion region was 1.20, and the same measurement was performed. As a result, CO was 15 ppm and NOx was 1400 ppm. 〇-18-This paper is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 557346 A7 B7 V. Description of the invention (16) The above examples and comparisons The experimental results of the examples are shown in Table 2 below. In addition, ammonia gas was lower than 5 ppm under any conditions. Table 2 Combustion temperature CC) Combustion air ratio in primary combustion zone (1) Air ratio including secondary air CO (ppm) Nox (ppm) Comparative Example 3-1 1550 0.95 Same as left 9500 430 Example 3-2 1550 0.95 1.10 25 450 Comparative Example 3-3 1550 1.00 Same as left 7300 600 Example 3-4 1550 1.00 1.10 25 580 Comparative Example 3-5 1550 1.20 Same as left 15 1400 In Comparative Example 4-1, Comparative Example 4-2, Example 4-3 Relative to Comparative Example 1-1, the exhaust gas was replaced with 1 L / min of nitrogen monoxide and 100 L / min of nitrogen; in Comparative Example 4-4, Example 4-5, and Comparative Example 4-6, compared to Comparative Example 1 · 1. Replace the exhaust gas with nitrogen trifluoride (NF3) 1 L / min and nitrogen 100 L / min. In Comparative Example 4-1, the same measurement was performed by reducing the introduction amount of the combustion-supporting gas in the primary combustion region so that the air ratio in the primary combustion region was 1.00 compared to Comparative Example 1-1. As a result, CO was 55 ppm and NOx was 750 ppm. In Comparative Example 4-2, compared with Comparative Example 4-1, the introduction amount of the combustion-supporting gas was reduced in the primary combustion region so that the air ratio in the primary combustion region was 0.95. Perform the same measurement. As a result, CO was 3200 ppm and NOx was 250 ppm. In Example 4-3, compared with Comparative Example 4-1, the introduction amount of the combustion-supporting gas was reduced in the primary combustion region so that the air ratio in the primary combustion region was − 19-This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) binding

線 557346 A7 B7 五、發明説明（17 ) 0.95 ;在二次燃燒區域中導入做為助燃性氣體之空氣，使 一次燃燒區域與二次燃燒區域燃燒整體之空氣比為1.10， 進行相同之測定。其結果，CO為30 ppm、NOx為270 ppm。 在比較例4-4中，相對於比較例1 -1，在一次燃燒區域中 減少助燃性氣體的導入量使一次燃燒區域之空氣比為 0.98，進行相同之測定。其結果，CO為4200 ppm、NOx為 350 ppm 〇 在實施例4-5中，相對於比較例4-4，在二次燃燒區域中 導入做為助燃性氣體之空氣，使一次燃燒區域與二次燃燒 區域燃燒整體之空氣比為1 · 10，進行相同之測定。其結果， CO為 25 ppm、NOx為 370 ppm 〇 在比較例4-6中，相對於比較例1 -1，減少燃料氣體的導 入量，使在一次燃燒區域中燃燒爐2之主體2a其溫度為 900°C ;在一次燃燒區域中增加助燃性氣體的導入量使一次 燃燒區域之空氣比為1.50，進行相同之測定。其結果，CO 為 15 ppm、NOx為 900 ppm 〇 上述實施例與比較例之實驗結果如以下之表3所示。 又，NF3、N20在任何條件下均低於1〇 ppm。 -20 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 557346 A7 B7 五、發明説明（18 ) ♦3 ♦ 0L 雲 β CO ΜΟχ (00) 滨雜阱^茯(丨)^^ILH: CPP3(ppm) $ψί Ζ02/Ν2 1550 10033知 55 750 202/N2 1550 0.9553知 §οto50 N02/N2 1550 0·95 rs 30 270 ssi NF3/N2 1550 — 习知 4200 350 畸詻窆4-5 NF3/N2 1550 0.98 1·10 25 370 sss NF3/N2 900 1·50 习知 15 900Line 557346 A7 B7 V. Description of the invention (17) 0.95; Introduce air as a combustion-supporting gas in the secondary combustion area, and make the air ratio of the entire combustion in the primary combustion area and the secondary combustion area to 1.10. Perform the same measurement. As a result, CO was 30 ppm and NOx was 270 ppm. In Comparative Example 4-4, the same measurement was performed as compared with Comparative Example 1-1, by reducing the introduction amount of the combustion-supporting gas in the primary combustion region so that the air ratio in the primary combustion region was 0.98. As a result, CO was 4200 ppm and NOx was 350 ppm. In Example 4-5, compared with Comparative Example 4-4, air was introduced as a combustion-supporting gas in the secondary combustion region, and the primary combustion region was separated from the secondary combustion region. The air ratio of the entire combustion in the secondary combustion zone was 1 · 10, and the same measurement was performed. As a result, CO was 25 ppm and NOx was 370 ppm. In Comparative Examples 4 to 6, the introduction amount of fuel gas was reduced compared to Comparative Example 1 to 1, and the temperature of the main body 2a of the combustion furnace 2 in the primary combustion zone was reduced. It is 900 ° C; increase the introduction amount of combustion-supporting gas in the primary combustion area so that the air ratio in the primary combustion area is 1.50, and the same measurement is performed. As a result, CO was 15 ppm and NOx was 900 ppm. The experimental results of the above examples and comparative examples are shown in Table 3 below. In addition, NF3 and N20 are lower than 10 ppm under any conditions. -20-This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 557346 A7 B7 V. Description of the invention (18) ♦ 3 ♦ 0L Cloud β CO ΜΟχ (00) ) ^^ ILH: CPP3 (ppm) $ ψί ZZ02 / Ν2 1550 10033 Know 55 750 202 / N2 1550 0.9553 Know §οto50 N02 / N2 1550 0 · 95 rs 30 270 ssi NF3 / N2 1550 — custom 4200 350 4-5 NF3 / N2 1550 0.98 1.10 25 370 sss NF3 / N2 900 1.50 custom 15 900

本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 557346 A7 B7 五、發明説明（19 ) 從上述之實施例與比較例可知：在一次燃燒區域中 CF4、NOx隨空氣減少而減少；在二次燃燒區域中，c〇隨 空氣增加而減少；在燃燒分解CF4方面之燃燒溫度以超過 1500°C較理想。 圖式簡單說明 圖1係本發明實施形態之廢氣處理裝置其結構說明圖。 -22 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) 557346 A7 B7 V. Description of the invention (19) From the above examples and comparative examples, it can be seen that CF4 and NOx decrease with air in the primary combustion zone However, it decreases; in the secondary combustion region, co decreases with increasing air; the combustion temperature in the decomposition of CF4 is more than 1500 ° C. Brief Description of the Drawings Fig. 1 is an explanatory diagram of the structure of an exhaust gas treatment device according to an embodiment of the present invention. -22-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

557346 A BCD 、申請專利範圍 1. 一種廢氣之處理方法，其特徵在於： 在燃燒爐之一次燃燒區域中導入燃料氣體、助燃性 氣體與至少包含全氟化碳之廢氣， 在該一次燃燒區域中，使燃料氣體與廢氣在助燃性 氣體之存在下，以燃燒焰成為還原焰之方式作不完全 燃燒， 在該燃燒爐之較一次燃燒區域在燃燒氣體氣流下游 處之二次燃燒區域導入助燃性氣體， 在該二次燃燒區域，將不完全燃燒所產生之燃燒氣 體，在該助燃性氣體之存在下，以使燃燒氣體所包含 之一氧化碳氧化之方式燃燒， 使在該一次燃燒區域之燃燒的空氣比，較該一次燃 燒區域與二次燃燒區域之燃燒整體的空氣比為低。 2. 如申請專利範圍第1項之廢氣處理方法，其中包含作為 該全氟化碳之四氟化碳，在該一次燃燒區域之燃燒溫 度係在1300°C以上。 3. 如申請專利範圍第1或2項之廢氣處理方法，其中在該 一次燃燒區域導入包含氮化合物之廢氣。 4. 如申請專利範圍第1或2項之廢氣處理方法，其中在該 一次燃燒區域中使燃燒焰整體成為還原焰。 5. 如申請專利範圍第1或2項之廢氣處理方法，其中藉由 使在該二次燃燒區域之燃燒為完全燃燒，使在該一次 燃燒區域因不完全燃燒所產生之一氧化碳氧化。 6. 如申請專利範圍第1或2項之廢氣處理方法，其中在該 -23 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 557346 A BCD 六、申請專利範圍 二次燃燒區域冷卻燃燒氣體。 7·如申請專利範圍第1或2項之廢氣處理方法，其中在該 一次燃燒區域中燃燒之空氣比為0.8〜1.05。 8. —種廢氣之處理裝置，其特徵在於具有： 燃燒爐； 通往該燃燒爐之一次燃燒區域之廢氣導入管線； 通往該一次燃燒區域之燃料氣體導入管線； 通往該一次燃燒區域之助燃性氣體導入管線；及 通往該燃燒爐中較一次燃燒區域為燃燒氣體氣流下 游處之二次燃燒區域之助燃性氣體導入管線； 其中可調節通往各燃燒區域之氣體導入量； 藉由導入該一次燃燒區域之廢氣與燃料氣體，在導 入該一次燃燒區域之助燃性氣體存在下，在一次燃燒 區域燃燒而產生燃燒氣體，該燃燒氣體在導入該二次 燃燒區域之助燃性氣體存在下，在二次燃燒區域燃燒； 將在該一次燃燒區域之燃燒空氣比設定為使該燃燒 焰成為還原焰。 9·如申請專利範圍第8項之廢氣處理裝置，其中在該二次 燃燒區域設有燃燒氣體之冷卻手段。 -24 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)557346 A BCD, patent application scope 1. A method for treating exhaust gas, characterized in that: a fuel gas, a combustion-supporting gas and an exhaust gas containing at least perfluorocarbon are introduced into a primary combustion zone of a combustion furnace, and in the primary combustion zone The fuel gas and the exhaust gas are incompletely burned in the presence of a combustion-supporting gas in such a manner that the combustion flame becomes a reducing flame, and the secondary combustion area of the combustion furnace in the primary combustion area downstream of the combustion gas stream is introduced into the combustion-supporting property The gas, in the secondary combustion area, burns the combustion gas generated by incomplete combustion in the presence of the combustion-supporting gas, oxidizes the carbon monoxide contained in the combustion gas, and causes the combustion in the primary combustion area to burn. The air ratio is lower than the overall air ratio of the combustion in the primary combustion area and the secondary combustion area. 2. The exhaust gas treatment method according to item 1 of the patent application scope, which includes carbon tetrafluoride as the perfluorocarbon, and the combustion temperature in the primary combustion zone is above 1300 ° C. 3. The exhaust gas treatment method according to item 1 or 2 of the patent application scope, wherein an exhaust gas containing nitrogen compounds is introduced into the primary combustion area. 4. The exhaust gas treatment method according to item 1 or 2 of the patent application scope, wherein the combustion flame as a whole is reduced in the primary combustion area. 5. The exhaust gas treatment method according to item 1 or 2 of the patent application scope, wherein the carbon monoxide generated by the incomplete combustion in the primary combustion region is oxidized by making the combustion in the secondary combustion region to be complete combustion. 6. If the exhaust gas treatment method of item 1 or 2 of the scope of patent application, in which -23-this paper size applies Chinese National Standard (CNS) A4 specifications (210 X 297 mm) 557346 A BCD The secondary combustion zone cools the combustion gases. 7. The exhaust gas treatment method according to item 1 or 2 of the scope of application for a patent, wherein an air ratio of combustion in the primary combustion region is 0.8 to 1.05. 8. An exhaust gas treatment device, comprising: a combustion furnace; an exhaust gas introduction line leading to a primary combustion zone of the combustion furnace; a fuel gas introduction line leading to the primary combustion zone; Combustion gas introduction line; and the combustion gas introduction line to the secondary combustion area downstream of the combustion gas flow in the primary combustion area of the combustion furnace; the gas introduction volume to each combustion area can be adjusted; Exhaust gas and fuel gas introduced into the primary combustion zone are combusted in the primary combustion zone to generate combustion gas in the presence of the combustion-supporting gas introduced into the primary-combustion zone, and the combustion gas is in the presence of the combustion-supporting gas introduced into the secondary-combustion zone. , Burning in the secondary combustion region; setting the combustion air ratio in the primary combustion region so that the combustion flame becomes a reducing flame. 9. The exhaust gas treatment device according to item 8 of the patent application scope, wherein a cooling means for the combustion gas is provided in the secondary combustion area. -24-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)