550632 8527pif·d( / 0 0 9 A7 137 經濟部智慧財產局員工消費合作社印製 五、發明說明（/ ) 發明盤篮 本發明是關於一種可將化學藥液等的液體依所定量吐 出的化學藥液供給裝置，特別是關於用以將光阻（ph〇t〇 resist)液塗佈於半導體晶圓（wafer)之表面上的化學藥液供 給裝置。 發明背量 在從半導體晶圓製造技術開始至液晶基板製造技術、 磁碟（disk)製造技術及多層接線基板製造技術等的種種技 術領域之製程（process)中，常使用光阻液、旋塗式玻璃 (spin-on glass)液、聚亞胺(p〇lyimide)樹脂液、純水、顯影 液、蝕刻（etching)液、有機溶劑等的化學藥液。 例如當將光阻液塗佈於半導體晶圓之表面之際，係在 半導體晶圓在水平面內旋轉之狀態下，再將光阻液滴落於 半導體晶圓之表面上。此時，用以進行光阻液塗佈的化學 藥液供給裝置係使用具有粟(pump)功能之可自由彈性變形 的軟管(tube)或呈蛇腹形狀的波紋管(bellows)。 習知使用具有栗功能之波紋管的化學藥液供給裝置， 如第8A圖至第8B圖所揭露之裝置。第8A圖之化學藥液 供給裝置，係於波紋管50之外側形成泵室51，藉由編於 波紋管5〇內部的驅動桿(r〇d)52使波紋管50膨脹收縮， 以使化學藥液槽(tank)53內的化學藥液導入泵室51內，再 從塗佈噴嘴(nozzle)54噴出。又，第8B圖之化學藥液供給 裝置，係於化學藥液槽53與塗佈噴嘴54之間的部分流路 上，設置也可自由膨脹收縮的可撓性軟管55，並於此可燒 --------------------訂·丨—丨丨丨丨丨線 (請先閱讀背面之注意事項再填寫本頁) 3550632 8527pif · d (/ 0 0 9 A7 137 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (/) Invention of the basket The invention relates to a chemical that can spit out a liquid such as a chemical liquid medicine according to a predetermined quantity. Chemical solution supply device, in particular, a chemical solution supply device for applying a photoresist solution on the surface of a semiconductor wafer. The invention is based on the technology of manufacturing semiconductor wafers. Beginning in processes in various technical fields such as liquid crystal substrate manufacturing technology, disk manufacturing technology, and multilayer wiring substrate manufacturing technology, photoresist liquids, spin-on glass liquids, Polyimide resin solution, pure water, developing solution, etching solution, organic solvent, etc. For example, when a photoresist solution is applied to the surface of a semiconductor wafer, While the semiconductor wafer is rotating in the horizontal plane, the photoresist liquid is dropped on the surface of the semiconductor wafer. At this time, the chemical liquid supply device for coating the photoresist liquid uses a pump Free function Elastically deformed tubes or bellows in the shape of a bellows. It is known to use a chemical liquid supply device with a bellows-shaped bellows function, as disclosed in FIGS. 8A to 8B. The chemical medicinal solution supply device shown in FIG. 8A is formed outside the bellows 50 to form a pump chamber 51. The driving rod (rod) 52 arranged inside the bellows 50 expands and contracts the bellows 50 to make the chemical medicine The chemical solution in the tank 53 is introduced into the pump chamber 51, and then sprayed from the coating nozzle 54. The chemical solution supply device shown in FIG. 8B is connected to the chemical solution tank 53 and the coating device. A part of the flow path between the nozzles 54 is provided with a flexible hose 55 that can also expand and contract freely, and can be burned here.丨 — 丨 丨 丨 丨 丨 Line (Please read the notes on the back before filling this page) 3
550632 8 5 2 7pif φ doc/009 A7 B7 五、發明説明（y) 性軟管55之外側配置有筒體內與波紋管5〇外側之泵室5 J 相連接的加壓室56。 在日本專利特開平5-29207號公報中所揭露之化學藥 液供給裝置’係使用與第8B圖相同之可撓性軟管或可撓 性膜塗佈化學藥液。在此裝置中，係藉由位於可撓性膜之 外側的非壓縮性流體的g周節而引發之抽吸(pumping)動作， 而將化學藥液導入可撓性膜之內側。 然而，在記載於此公報之敘述中可知，在可擦性膜所 離開之位置上，設置有波紋管式的調節器，在利用此調節 器供給位於可撓性膜之外側的非壓縮性流體之情形下，會 導致裝置全體之尺寸變大。而且由於此裝置之結構複雜， 因此難以輕易地進行化學藥液與接觸部份之部件之間的交 換’且不易進行使裝置內之非壓縮性流體的充塡作業變得 容易的製造作業。又，在非壓縮性流體的管理上難以避免 其發生洩漏的情形下，無法輕易地檢測出拽漏，因而有裝 置信賴性不足之問題存在。 經濟部中央標準局員工消費合作社印製 又，請參照第8A圖所示，於呈蛇腹形狀的波紋管中， 直接進行化學藥液之泵動作，會發生化學藥液流入波紋管 5〇之後端側，且，由於波紋管50之外面係爲凹凸形狀， 因此也有使化學藥液滯留於泵室之可能性，當滯留的化學 藥液發生變質時即爲塗佈時發生粉末之原因。 本發明之目的係提供一種化學藥液供給裝置，以藉由 簡單的結構提供較佳之信賴性。 又，在本發明之前述中，未提及之其他目的與新的特 83. 3. 10,000 (請先閲讀背面之注意事項再填寫本頁} 經濟部中央標準局員工消費合作社印製 550632 8527pif.doc/〇〇9 八7 — ____B7 五、發明説明Οι ) 徵，係配合所附圖式而詳細說明於本說明書之敘述中。 發明槪述 在本發明所揭露之發明中，以代表性的槪要簡單地敘 述如下。 即，本發明提出一種化學藥液供給裝置，係由波紋管、 供給側流路、吐出側流路、以及驅動手段所構成。其中波 紋管可於軸承方向上自由彈性變形，且波紋管具有由彈性 材料所形成之小型波紋管，以及由彈性材料所形成且於軸 承方向之每單位變位量之容積變化大於小型波紋管的大型 波紋管。供給側流路係連接於波紋管之一端與化學藥液收 容部之間，且供給側流路上設有供給側開關閥。吐出側流 路係連接於波紋管之另一端與化學藥液吐出部之間，且吐 出側流路上設有吐出側開關閥。驅動手段係在波紋管於軸 承方向上彈性變形之際，當小型波紋管收縮時，會使大型 波紋管膨脹，當小型波紋管膨脹時，會使大型波紋管收縮。 即，本發明另提出一種化學藥液供給裝置，係由可撓 性軟管、波紋管、供給側流路、吐出側流路、非壓縮性媒 介物、以及驅動手段所構成。其中可撓性軟管係由彈性材 料所形成，且可撓性軟管於內徑方向上可自由彈性膨脹收 縮。供給側流路係連接於可撓性軟管之一端與化學藥液收 容部之間，且供給側流路上設有供給側開關閥。吐出側流 路係連接於可撓性軟管之另一端與化學藥液吐出部之間， 且吐出側流路上設有吐出側開關閥。波紋管係配置於可撓 性軟管之外側，且波紋管可於軸承方向上自由彈性變形， 5 本紙張尺度適财酬家辟（CNS ) A4· ( 210X297公83. 3. 10,000 -------— (請先閲讀背面之注意事項再填寫本頁) -訂 經濟部中央標準局員工消費合作社印製 550632 8527pif.doc/009 A7 ______B7_ 五、發明説明（今） 波紋管具有由彈性材料所形成之小型波紋管，以及由彈性 材料所形成且於軸承方向之每單位變位量之容積變化大於 小型波紋管的大型波紋管。非壓縮性媒介物係封於可撓性 軟管與波紋管之間。驅動手段係於波紋管於軸承方向上彈 性變形之際，當小型波紋管收縮且大型波紋管膨脹時，可 使可撓性軟管於內徑方向上彈性膨脹，當小型波紋管膨脹 且大型波紋管收縮時，可使可撓性軟管於內徑方向上彈性 收縮。 另外前述之波紋管也可改設成相互平行之第一波紋管 與第二波紋管，其中第一波紋管之小型波紋管與第二波紋 管之大型波紋管配置成相互鄰接，且第一波紋管之大型波 紋管與第二波紋管之小型波紋管配置成相互鄰接 本發明之化學藥液供給裝置，係將化學藥液導入具有 小型波紋部與大型波紋部的波紋部中，藉由波紋管之軸承 方向的膨脹收縮以進行泵動作，在化學藥液貫流於波紋管 內之際，由於在波紋管之內面上有凹凸存在，因而可以防 止化學藥液滯留之情形發生。 本發明之化學藥液供給裝置，係於具有小型波紋部與 大型波紋部的波紋部內配置可撓性軟管，波紋管之膨脹收 縮動作藉由塡充於波紋管與可撓性軟管之間的非壓縮性媒 介物以使可撓性軟管發生彈性變形，並將波紋管之泵動作 迅速地傳達至可撓性軟管，以得到具有較佳之應答特性的 化學藥液供給裝置。藉由將化學藥液導入內面爲平面的可 撓性軟管中，以防止在可撓性軟管內滯留化學藥液之發 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 83· 3· 10,000 ----------ΑΨII (請先閲讀背面之注意事項再填寫本頁) 訂 550632 8527pif.doc/009 A7 ___B7 五、發明説明（f ) 生。 爲讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂，下文特舉較佳實施例，並配合所附圖式，作詳細 說明如下： 圖式之簡單說明 第1圖所示爲本發明之一較佳實施例之化學藥液供給 裝置之局部正面圖。 第2圖所示爲沿第1圖之2-2線的剖面圖。 第3A圖至第3B圖所示爲第1圖之波紋管之泵動作 的剖面圖。 第4圖所示爲本發明之另一較佳實施例之化學藥液供 給裝置之局部正面圖。 第5A圖所示爲本發明之另一較佳實施例之化學藥液 供給裝置之局部剖面圖。 第5B圖所示爲第5A圖之可撓性軟管的剖面圖。 第5C圖所示爲可撓性軟管朝內徑方向收縮的剖面 圖。 第6A圖所示爲可撓性軟管之變形例的局部斜視圖。 經濟部中央標準局員工消費合作社印製 第6B圖所示爲第6A圖之可撓性軟管的剖面圖。 第6C圖所不爲可撓性軟管朝內徑方向收縮的剖面 圖。 第7圖所示爲本發明之另一較佳實施例之化學藥液供 給裝置之局部正面圖。 第8A圖所示爲習知之化學藥液供給裝置之槪略結構 7 83. 3. !〇,〇〇〇 ------------ (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家榡準（CNS ) A4規格（210X297公釐） 550632 A7 B7 8527pif.doc/009 五、發明説明（b ) 的槪略剖面圖。 (請先閲讀背面之注意事項再填寫本頁) 第8B圖所示爲習知之化學藥液供給裝置之槪略結構 的槪略剖面圖。 圖式之標記說明： 11 :泵部 12 :泵驅動部 13，13a，13b，55 :可撓性軟管 14，14a，14b，50 ··波紋管 15，16 :接合部 17 :供給側流路 18，53 :化學藥液槽 19 :吐出側流路 20，54 :塗佈噴嘴 21 :供給側開關閥 22 :吐出側開關閥 經濟部中央標準局員工消費合作社印製 23，23a，23b :動作碟片部 24，24a，24b ··小型波紋管 25，25a，25b :大型波紋管 26，27 :固定碟片部 28 :支撐台 31，32 :固定托架 33 :動作托架 34 :貝爾螺紋軸 35 :貝爾螺帽 8 83. 3. 10,000 本紙張尺度適用中國國家標準（CNS ) A4規格（210X29：7公釐） 經濟部中央標準局員工消費合作社印製 550632 8 5 2 7 p i f . d 〇 c / 0 0 9 A 7 B7 五、發明説明Q ) 36 :導軌 37 :發動機 38，39 :皮帶輪 41 :皮帶 42，51 :泵室 43 :非壓縮性媒介物 46 :檔板 47 :突出部 52 :驅動桿 56 :加壓室 d，D :有效內徑 鮫佳實施例之詳細說明 以下，以所附圖示所示之本發明之較佳實施例爲基 礎，進行詳細的說明。 第1圖至第3B圖所示係爲本發明之一較佳實施例之 化學藥液供給裝置之示意圖。此化學藥液供給裝置係具有 泵部Π與泵驅動部12。其中泵部11係具有由彈性材料所 形成且可於內徑方向自由地彈性膨脹收縮的可撓性軟管 13,以及配置於可撓性軟管13之外側且由彈性材料所形 成並可於軸承方向自由彈性變形的波紋管14。 在可撓性軟管13之兩端部上分別安裝接合（adapter)部 15、16，一邊的接合部15係連接於供給側流路17上，且 此供給側流路17係連接於用以作爲化學藥液收容部的化 學藥液槽18上。另一邊的接合部16係連接於吐出側流路 9 本紙張尺度適用中國國家榡準（CNS ) A4現格（210X297公釐） 83. 3. 10,000 ----------- (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印裝 550632 8527pif.doc/009 A/ B7 五、發明説明（S ) 19上，且此吐出側流路19係連接於用以作爲化學藥液吐 出部的塗佈噴嘴20上。在供給側流路17上設有用以開關 的供給側開關閥21，在吐出側流路19上設有用以開關的 吐出側開關閥22。各個開關閥21、22較佳係使用以電氣 訊號動作的螺線管閥（solenoid valve)或以空氣壓力動作的 空氣操作閥，更甚之，也可以使用逆止閥或抑制（check)閥。 波紋管14係由於軸承方向中央部位上之動作碟片部 23、具有如第1圖所示之有效半徑d的小型波紋管24、藉 由前述動作碟片部23而與前述小型波紋管24 —體成形且 具有內徑大於小型波紋管24之有效半徑d之有效半徑D 的大型波紋管25所一體成形而成的。即，大型波紋管25 之截面積大於小型波紋管24之截面積。在此，有效內徑d、 D意指在小型波紋管24與大型波紋管25之膨脹收縮過程 中，各個波紋管24、25之平均內徑。於波紋管14之兩端 部上一體成形有固定碟片部26、27，且大型波紋管25側 之固定碟片部26係藉由可撓性軟管13而固定於接合部15 上，小型波紋管24側之固定碟片部27係藉由可撓性軟管 13而固定於接合部16上。 爲防止此可撓性軟管13與來自圖示之情形下之所提 供之含光阻液之化學藥液進行反應，此可撓性軟管13係 由具有氟樹脂之四氟乙烯全氟代烷基乙烯醚（tetrafluoro ethylene perfluoro-alkyl vinyl ether)共聚合體（PFA)所形 成，且接合部15、16也使用相同之材料所形成。又，波 紋管14也可以在與前述相同之樹脂材料下，與碟片部23、 10 本紙張尺度適用中國國家標準（CNS ) A4現格（210 X 297公釐） 83. 3. 10,000 ----------一餐！ (請先閲讀背面之注意事項再填寫本頁) -訂 550632 8527pif.d〇c/009 A/ B7 五、發明説明（6() 26、27、波紋管部24、25 —體成形。然此樹脂材料並不 以PF A爲限，也可以改用其他可以彈性變形之材料，例女口 可撓性軟管13及波紋管14也可以使用其他樹脂材料。又， 可撓性軟管13及波紋管14也可以一體成形，在此情形下， 則不需接合部1 5、16。更甚之，波紋管14也可以由金屬 所製成。 波紋管14係於各個固定碟片26、27之部分上安裝支 撐台28，於固定碟片26上嵌入安裝於支撐台28上之固定 托架(bracket)31，於固定碟片27上嵌入安裝於支撐台28 上之固定托架32。 經濟部中央標準局員工消費合作社印製 ----------- (請先閲讀背面之注意事項再填寫本頁} 波綾管14係受到其軸呈方向中央部位之動作碟片部 23在軸呈方向上的變位，而進行泵動作。又，在動作碟片 部23上所嵌入之動作托架33係連結於貝爾螺帽（ball nut)35上，貝爾螺帽35係與貝爾螺紋軸34之螺紋結合， 貝爾螺紋軸34係安裝於支撐台28上且其與波紋管14平 行並可旋轉自如。貝爾螺帽35係與設於支撐台28上導軌 (guide rail)36以摺動自如的方式相接觸，以在貝爾螺紋軸 34之旋轉時可在軸承方向上運動。爲驅動貝爾螺紋軸34 進行旋轉，而於固定於安裝於支撐台28上之發動機 (motor)37之旋轉軸（shaft)上之皮帶輪（pulley)38，以及固 定於貝爾螺紋軸34上之皮帶輪39之間安裝皮帶(belt)41。 位於可撓性軟管13與配置於其外側之波紋管14之間 的空間係爲泵室42，在此泵室42內係充塡有例如是液體 等非壓縮性媒介物43。當波紋管14受到其中央部位之動 11 本紙張尺度適用中國國家榡準（CNS ) A4規格（210X297公釐） 83. 3. 10,〇〇〇 經濟部中央標準局貝工消費合作社印装 550632 8527pif.doc/009 A7 B7 五、發明説明（) 作碟片部23在軸承方向上之彈性變形而改變波紋管14之 全長之際，小型波紋管24與大型波紋管25之內側之容積 發生變化。此時，藉由非壓縮性媒介物43之壓迫而使可 撓性軟管13朝內徑方向甚至橫方向上進行膨脹收縮，進 而使可撓性軟管13發生泵動作。 請參照第2圖所示，可撓性軟管13之截面形狀例如 是具有圓弧狀與平坦部之截面的橢圓形，當泵室42之容 積發生變化時，可撓性軟管13以對應波紋管14之內側容 積之變化量爲所定之量而進行以平坦部之彈性變形爲主的 彈性變形。然可撓性軟管13之截面形狀並不限於此，其 截面形狀也可以爲圓形或其他相異形狀。 第3A圖至第3B圖所示係爲動作碟片部在軸承方向 上進行變位而發生之泵動作的示意圖。在第1圖中動作碟 片部23之中立狀態係爲位於波紋管14之軸承方向之約略 中央的位置之際的狀態，從此狀態下受到發動機37之帶 動而使動作碟片部23朝小型波紋管24側進行變位，對波 紋管14之全體而言，係藉由小內徑部位之變短與大內徑 部位之變長，以使波紋管14之內側容積變大。即，對大 型波紋管25而言，當波紋管14內之容積發生變化時，小 型波紋管25在軸承方向上之每單位變位量之容積變化較 大。此時，可撓性軟管13朝內徑方向膨脹而使其內部之 容積變大，進而將化學藥液槽18內之化學藥液吸入可撓 性軟管13內。在此情形下，供給側開關閥21之動作係爲 打開供給側流路17之流路，同時吐出側開關閥22之動作 12 本紙張尺度適用中國國家榡準（CNS ) A4規格（210 X 297公釐） 83. 3. 10,000 ---------噢 II (請先閲讀背面之注意事項再填寫本頁) -訂- 550632 8527pif.doc/009 A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明（v\ ) 係爲關閉吐出側流路19之流路。 另一方面動作碟片部23朝大型波紋管25側進行變形 時，對波紋管14之全體而言，係藉由大內徑部位之變短 與小內徑部位之變長，以使波紋管14之內側容積變小。 此時，可撓性軟管13朝內徑方向收縮而使其內部之容積 變小，進而將可撓性軟管13內之化學藥液朝塗佈噴嘴20 吐出。在此情形下，供給側開關閥21之動作係爲關閉供 給側流路17之流路，同時吐出側開關閥22之動作係爲打 開吐出側流路19之流路。 在上述泵動作之際，於可撓性軟管Π之外側上，藉 由配置於波紋管14內之非壓縮性媒介物43，而將波紋管 14之容積變化傳達至應答性佳的可撓性軟管13上。請參 照第8B圖所示，在可撓性軟管55之外側的加壓室56藉 由細小的流路而對來自泵室51之媒介物進行引導之情形 下，由於有集中的部分存在，因此傳達到可撓性軟管55 之泵動作有延遲時間，如圖示之情形下，由於延遲時間之 關係因而無法迅速地進行泵動作。 當自塗佈噴嘴20吐出所定之量的化學藥液之後，爲 防止來自塗佈噴嘴20之化學藥液發生液垂現象，因而必 須進行回吸（sack back)動作。在此情形下，係爲關閉供給 側開關閥21，打開吐出側開關閥22之狀態，藉由動作碟 片部23朝小型波紋管24側進行變位，以使可撓性軟管13 膨脹。其中，在進行回吸動作之際，各個開關閥21、22 不應使用逆止閥，而應使用藉由外部信號進行開關的型式 13 ----------— (請先聞讀背面之注意事項再填寫本頁) 訂- 本紙張尺度適用中國國家橾準（CNS ) A4規格（210X297公釐） 83. 3. 10,000 550632 8527pif.d〇c/009 A7 B7 經濟部中央標準局貝工消費合作社印裝 五、發明説明（V) 的電磁閥或空氣操作閥。 此時，在圖示之化學藥液供給裝置中’由於波紋管14 係配置在可撓性軟管之外側，因此可以得到簡單且小型化 的裝置，且部件點數也變少。又，非壓縮性媒介物43係 塡充於可撓性軟管13與波紋管14之間的泵室42之空間 內，因此可大幅減少此非壓縮性媒介物43之量° 當此非壓縮性媒介物43塡充於泵室42內時’非壓_ 性媒介物43所充塡之空間形狀係爲單純的形狀’且由方令 將媒介物存在之位置集中於一起，因此可以輕易地進行媒 介物之充塡作業。在前述公報或第8B圖所示之習知化學 藥液供給裝置中，由於可撓性軟管之外側的加壓室與'波糸文 管之外側的泵室之間係以細小的流路連接，因而其流路複 雜，在未注入空氣之情況下進行媒介物之注入係爲非常困 難的作業，相較之下，則本發明可以非常輕易地注入塡充 媒介物。假如有空氣進入媒介物中，則不會對波紋管14 之伸縮與可撓性軟管13之膨脹收縮等所對應之高精確度 造成影響，因而在本發明中，可以確保此對應關係之高精 確度，故具有較高之吐出精確度。 當泵室42爲具有複雜形狀之充塡空間時，由於媒介 物之塡充位置係爲集中式的，因此非壓縮性媒介物43之 可能發生洩漏之危險場所變少，即使萬一媒介物43發生 洩漏時，也可以輕易地檢測出其洩漏位置，而使液體洩漏 之管理變的很容易。甚至，可以降低洩漏之危險性，且其 發生洩漏時也可以輕易地發現。然而在習知之裝置中，當 14 -----------赛-- (請先閲讀背面之注意事項再ImN:頁) ,tr 鯓- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 83. 3. 10,000 經濟部中央標準局員工消費合作社印裝 550632 8527pif.d〇c/〇〇9 A7 _B7 五、發明説明（q ) 媒介物充塡於具有複雜形狀之空間時，由於其用以形成此 空間的各部件之間係具有多個相互連結之場所，因而，當 發生媒介物洩漏之情形時，無法輕易地判斷出其洩漏位 置，所以使用本發明之裝置可以大幅提高裝置之信賴性。 當可撓性軟管13與波紋管14 一體成形之際，可將泵 驅動部12輕易地分離開來，而容易進行更換。甚至在圖 示之化學藥液供給裝置吐出光阻液之情形下，在可撓性軟 管13之內面上附著變質的光阻液，此係爲發生粉末之原 因。因此必須定期的對可撓性軟管13等之中與液體接觸 之部分進行替換，在此情形下，由於習知裝置之可撓性軟 管與調節器並未分離配置，因而無法輕易地進行可撓性軟 管的替換’又在本發明圖示之情形下，此作業可以變的容 易進行。 第4圖所示爲本發明之另一較佳實施例之化學藥液供 給裝置之示意圖。在此情形下，泵部11係由相互平行的2 個可撓性軟管13a、13b，且於其各自的外側上分別配置之 波紋管14a、14b所形成。換言之，一邊的波紋管14a之 小型波紋管24a與另一邊波紋管14b之大型波紋管2Sb係 位於供給側流路17側之位置上，而一邊的波紋管14a之 大型波紋管與另一邊波紋管14b之小型波紋管24b係 位於吐出側流路19側之位置上。其中，除了 2個相互逆 向配置的波紋管14a、14b之外，泵驅動部12之結構係與 前述較佳實施例相同。 在此情形下，以發動機37使各自的動作碟片部23a、 15 本紙張尺度適财關家縣（CNS ) A4^^21QX297公瘦；' 一~83. 3.10,000 ---------Φ------tr---------· (請先閲讀背面之注意事項再填寫本頁) 550632 A7 B7 8 52 7pi f. doc/0 09 五、發明説明（w) (請先閲讀背面之注意事項再填寫本頁) 23b朝第4圖之上方變位，以使一邊的波紋管14a之大型 波紋管25a收縮、小型波紋管24a膨脹，以及使另一邊的 波紋管14b之小型波紋管24b收縮、大型波紋管25b膨脹， 如此即可使一邊的可撓性軟管13a朝內徑方向收縮’而另 一邊的可撓性軟管13b則膨脹。此時，由於貝爾螺帽35 係在直線方向上之一邊與另一邊之間進行反覆地移動’以 在此兩邊之間進行泵動作，而連續地將化學藥液自塗佈噴 嘴20吐出。 第5A圖至第5C圖所示係爲第1圖所示之可撓性軟 管13的變形例之示意圖。此可撓性軟管13係爲在其內部 配置有由與可撓性軟管13同一材料所構成之帶狀的檔 (stopper)板46。在此縮小栗室42之容積的情形下，請參 照第5C圖所示，可撓性軟管13之平坦部與檔板46相接 觸，如此可以防止可撓性軟管13之圓弧狀部受到超過承 受度之壓迫而發生崩潰之情形，進而可以防止圓弧狀部產 生折痕。其中，檔板46之材質係對應可撓性軟管Π之材 質而設。 經濟部中央標準局員工消費合作社印装 第6A圖至第6C圖所示係爲可撓性軟管13的變形例 的示意圖。於此可撓性軟管13之平坦部上，形成有朝內 側方向突出之突出部47。當可撓性軟管13在中立狀態之 際，其橫截面爲如第6B圖所示之形狀，當其朝內徑方向 收縮之情形下，則其橫截面爲如第6C圖所示之形狀。藉 由突出部47之相互接觸，可以有效地防止可撓性軟管13 之圓弧狀部崩潰。 16 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 83. 3. 10,000 經濟部中央標準局員工消費合作社印製 550632 8 5 2 7 p i f · d 〇 c / 0 0 9 A 7 r—___ B7 五、發明説明（6 第5A圖至第6C圖所示之可撓性軟管13也可以適用550632 8 5 2 7pif φ doc / 009 A7 B7 V. Description of the invention (y) The outside of the flexible tube 55 is provided with a pressurizing chamber 56 connected to the pump chamber 5 J outside the bellows 50 in the cylinder. The chemical liquid supply device 'disclosed in Japanese Patent Laid-Open No. 5-29207 discloses a chemical liquid that is coated with a flexible hose or a flexible film similar to that shown in Fig. 8B. In this device, a chemical action is introduced to the inside of the flexible membrane by a pumping operation caused by the g-period of the non-compressible fluid located outside the flexible membrane. However, it is known from the description in this publication that a corrugated tube type regulator is provided at a position where the erasable film leaves, and this regulator is used to supply a non-compressible fluid located outside the flexible film. In this case, the size of the entire device may increase. Moreover, because the structure of the device is complicated, it is difficult to easily exchange the chemical liquid and the parts in contact with it, and it is not easy to perform a manufacturing operation that makes the filling operation of the non-compressible fluid in the device easy. In addition, in the case where it is difficult to prevent leakage of the non-compressible fluid, the leakage cannot be easily detected, and thus there is a problem that the reliability of the device is insufficient. Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs, please refer to Figure 8A. In the bellows shape of the bellows, the chemical liquid pump is directly operated, and the chemical liquid will flow into the back of the bellows. Since the outer surface of the corrugated tube 50 has a concave-convex shape, there is also a possibility that the chemical solution is retained in the pump chamber. When the retained chemical solution is degraded, it is a cause of powder generation during coating. The object of the present invention is to provide a chemical liquid supply device to provide better reliability with a simple structure. Also, in the foregoing of the present invention, other purposes not mentioned and the new special 83. 3. 10,000 (Please read the precautions on the back before filling out this page} Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 550632 8527pif. doc / 〇〇9 8 7 — ____B7 V. Description of the invention The features are described in detail in the description of this specification in accordance with the drawings. SUMMARY OF THE INVENTION Among the inventions disclosed in the present invention, the representative ones are briefly described as follows. That is, the present invention proposes a chemical liquid supply device including a bellows, a supply-side flow path, a discharge-side flow path, and a driving means. The bellows can be freely elastically deformed in the bearing direction, and the bellows has a small bellows formed of an elastic material, and a volume change per unit displacement amount of the bellows formed of the elastic material is larger than that of the small bellows. Large bellows. The supply-side flow path is connected between one end of the bellows and the chemical liquid storage portion, and a supply-side on-off valve is provided on the supply-side flow path. The discharge-side flow path is connected between the other end of the bellows and the chemical solution discharge portion, and a discharge-side on-off valve is provided on the discharge-side flow path. The driving means is when the bellows is elastically deformed in the bearing direction. When the small bellows is contracted, the large bellows is expanded. When the small bellows is expanded, the large bellows is contracted. That is, the present invention provides another chemical liquid supply device, which is composed of a flexible hose, a bellows, a supply-side flow path, a discharge-side flow path, a non-compressible medium, and a driving means. The flexible hose is formed of an elastic material, and the flexible hose can freely expand and contract in the inner diameter direction. The supply-side flow path is connected between one end of the flexible hose and the chemical liquid storage portion, and a supply-side on-off valve is provided on the supply-side flow path. The discharge-side flow path is connected between the other end of the flexible hose and the chemical solution discharge portion, and a discharge-side on-off valve is provided on the discharge-side flow path. The bellows is arranged on the outside of the flexible hose, and the bellows can be deformed freely and elastically in the direction of the bearing. 5 paper sizes (CNS) A4 · (210X297 male 83. 3. 10,000 --- ----— (Please read the notes on the back before filling this page)-Order printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 550632 8527pif.doc / 009 A7 ______B7_ 5. Description of the invention (now) The bellows has flexibility Small bellows made of materials, and large bellows made of elastic material and having a larger volume change per unit displacement in the bearing direction than small bellows. Non-compressible media is sealed between flexible hoses and Between bellows. The driving means is when the bellows is elastically deformed in the bearing direction. When the small bellows shrinks and the large bellows expands, the flexible hose can expand elastically in the inner diameter direction. When the tube expands and the large bellows shrinks, the flexible hose can be elastically contracted in the inner diameter direction. In addition, the aforementioned bellows can also be changed into a first bellows and a second bellows which are parallel to each other, where A small bellows of a bellows and a large bellows of a second bellows are arranged adjacent to each other, and a large bellows of a first bellows and a small bellows of a second bellows are arranged adjacent to each other in the chemical liquid supply of the present invention The device is used to introduce the chemical liquid into the corrugated part with small corrugated part and large corrugated part. The pump is operated by expansion and contraction in the bearing direction of the corrugated tube. When the chemical liquid flows through the corrugated tube, The inner surface of the corrugated tube has unevenness, so that the chemical liquid can be prevented from staying. The chemical liquid supply device of the present invention is arranged in a flexible hose with a small corrugated portion and a large corrugated portion. The expansion and contraction action of the bellows is to fill the non-compressible medium between the bellows and the flexible hose to elastically deform the flexible hose, and quickly convey the pump action of the bellows to the Flexible hose in order to obtain a chemical liquid supply device with better response characteristics. By introducing the chemical liquid into a flexible hose with a flat inner surface to prevent Retaining the chemical solution in the flexible hose The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 83 · 3 · 10,000 ---------- ΑΨII (Please read first Note on the back, please fill in this page again) Order 550632 8527pif.doc / 009 A7 ___B7 V. Description of the invention (f) In order to make the above and other objects, features, and advantages of the present invention more obvious and easy to understand, the following is enumerated The preferred embodiment is described in detail with the accompanying drawings as follows: Brief description of the drawings Figure 1 shows a partial front view of a chemical liquid supply device according to a preferred embodiment of the present invention. Figure 2 Shown is a sectional view taken along line 2-2 of Fig. 1. Figures 3A to 3B are sectional views showing the pump operation of the bellows of Figure 1. Fig. 4 is a partial front view of a chemical liquid supply device according to another preferred embodiment of the present invention. Fig. 5A is a partial cross-sectional view of a chemical liquid supply device according to another preferred embodiment of the present invention. Figure 5B is a cross-sectional view of the flexible hose of Figure 5A. Fig. 5C is a cross-sectional view showing that the flexible hose is contracted in the inner diameter direction. Fig. 6A is a partial perspective view showing a modified example of the flexible hose. Printed by the Employees' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. Figure 6B is a cross-sectional view of the flexible hose shown in Figure 6A. Figure 6C is not a cross-sectional view of the flexible hose contracting in the inner diameter direction. Fig. 7 is a partial front view of a chemical liquid supply device according to another preferred embodiment of the present invention. Figure 8A shows the schematic structure of a conventional chemical liquid supply device 7 83. 3.! 〇, 〇〇〇 ------------ (Please read the precautions on the back before filling (This page) The dimensions of this paper are applicable to China National Standard (CNS) A4 (210X297 mm) 550632 A7 B7 8527pif.doc / 009 5. The schematic cross-section of the description of the invention (b). (Please read the precautions on the back before filling out this page.) Figure 8B shows a schematic cross-sectional view of the general structure of a conventional chemical liquid supply device. Explanation of drawing symbols: 11: Pump section 12: Pump drive sections 13, 13a, 13b, 55: Flexible hoses 14, 14a, 14b, 50 ·· Bellows 15, 16: Joint 17: Supply side flow Roads 18, 53: Chemical tank 19: Discharge-side flow path 20, 54: Coating nozzle 21: Supply-side on-off valve 22: Discharge-side on-off valve Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 23, 23a, 23b: Action disc sections 24, 24a, 24b ·· Small bellows 25, 25a, 25b: Large bellows 26, 27: Fixed disc section 28: Support stand 31, 32: Fixed bracket 33: Action bracket 34: Bell Threaded shaft 35: Bell nut 8 83. 3. 10,000 This paper size applies to China National Standard (CNS) A4 (210X29: 7 mm) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 550632 8 5 2 7 pif. D 〇c / 0 0 9 A 7 B7 V. Description of the invention Q) 36: guide rail 37: engine 38, 39: pulley 41: belt 42, 51: pump chamber 43: non-compressible medium 46: baffle 47: protrusion 52: driving rod 56: pressurizing chamber d, D: detailed description of a preferred embodiment of effective inner diameter The preferred embodiment is based on the detailed description. Figures 1 to 3B are schematic diagrams of a chemical liquid supply device according to a preferred embodiment of the present invention. This chemical liquid supply device includes a pump section Π and a pump driving section 12. The pump portion 11 includes a flexible hose 13 formed of an elastic material and capable of elastic expansion and contraction freely in the inner diameter direction, and a flexible hose 13 disposed outside the flexible hose 13 and formed of an elastic material. The bellows 14 is elastically deformed freely in the bearing direction. On both ends of the flexible hose 13, adapter portions 15 and 16 are respectively installed, and one side of the junction portion 15 is connected to the supply-side flow path 17, and the supply-side flow path 17 is connected to A chemical solution tank 18 serving as a chemical solution storage portion is provided. The joint 16 on the other side is connected to the discharge side flow path 9 This paper size is applicable to China National Standard (CNS) A4 (210X297 mm) 83. 3. 10,000 ----------- ( Please read the notes on the back before filling this page) Order printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 550632 8527pif.doc / 009 A / B7 V. Description of the invention (S) 19, and this spit side flow path 19 series It is connected to the coating nozzle 20 used as a chemical | medical solution discharge part. The supply-side flow path 17 is provided with a supply-side on-off valve 21 for opening and closing, and the discharge-side flow path 19 is provided with a discharge-side on-off valve 22 for opening and closing. Each of the on-off valves 21 and 22 is preferably a solenoid valve operated by an electric signal or an air-operated valve operated by air pressure. Furthermore, a check valve or a check valve may be used. The bellows 14 is formed by the action disk portion 23 at the center portion in the bearing direction, the small bellows 24 having an effective radius d as shown in FIG. 1, and the aforementioned small bellows 24 through the action disk portion 23 — The large-sized corrugated tube 25 having a body shape and having an effective radius D larger than the effective radius d of the small-sized corrugated tube 24 is integrally formed. That is, the cross-sectional area of the large-sized bellows 25 is larger than that of the small-sized bellows 24. Here, the effective inner diameters d and D mean the average inner diameters of the respective bellows 24 and 25 during the expansion and contraction of the small bellows 24 and the large bellows 25. Fixed disk portions 26 and 27 are integrally formed on both ends of the bellows 14, and the fixed disk portion 26 on the large bellows 25 side is fixed to the joint portion 15 by a flexible hose 13. The fixed disk portion 27 on the bellows 24 side is fixed to the joint portion 16 by a flexible hose 13. In order to prevent the flexible hose 13 from reacting with the chemical solution containing the photoresist liquid provided in the situation shown in the figure, the flexible hose 13 is made of tetrafluoroethylene perfluoro Alkyl vinyl ether (tetrafluoro ethylene perfluoro-alkyl vinyl ether) copolymer (PFA) is formed, and the joints 15, 16 are also formed using the same material. In addition, the bellows 14 can also be made of the same resin material as the foregoing, and the disc section 23, 10 This paper size applies the Chinese National Standard (CNS) A4 (210 X 297 mm) 83. 3. 10,000- --------A meal! (Please read the notes on the back before filling out this page)-Order 550632 8527pif.doc / 009 A / B7 V. Description of the invention (6 () 26, 27, bellows 24, 25-body forming. Then this The resin material is not limited to PFA, and other materials that can be elastically deformed can be used instead. For example, the flexible hose 13 and the bellows 14 can also use other resin materials. Also, the flexible hose 13 and The bellows 14 can also be integrally formed. In this case, the joints 15 and 16 are not required. Furthermore, the bellows 14 can also be made of metal. The bellows 14 is attached to each of the fixed plates 26 and 27. A support base 28 is installed on the part, a fixed bracket 31 mounted on the support plate 28 is embedded on the fixed disk 26, and a fixed bracket 32 is mounted on the support plate 28 on the fixed disk 27. Economy Printed by the Ministry of Standards and Staff ’s Consumer Cooperatives ----------- (Please read the precautions on the back before filling out this page) Wave tube 14 is the action disc department that is subject to the central part of its axis 23 is displaced in the direction of the shaft to perform a pump operation. The operation embedded in the operation disc portion 23 is also performed. The frame 33 is connected to a ball nut 35. The bell nut 35 is screwed with the Bell screw shaft 34. The Bell screw shaft 34 is installed on the support table 28 and is parallel to the bellows 14 and can be rotated. Freely. The Bell nut 35 is in contact with a guide rail 36 provided on the support table 28 in a freely movable manner so as to be able to move in the bearing direction when the Bell screw shaft 34 is rotated. For driving the Bell screw shaft 34 is rotated, and a belt 38 is installed between a pulley 38 fixed on a shaft of a motor 37 mounted on a support table 28 and a pulley 39 fixed on a Bell screw shaft 34 belt) 41. The space between the flexible hose 13 and the bellows 14 disposed on the outer side thereof is a pump chamber 42, and the pump chamber 42 is filled with a non-compressible medium such as a liquid 43 When the bellows 14 is moved by its central part 11 This paper size is applicable to China National Standard (CNS) A4 (210X297 mm) 83. 3. 10, 000 Printed by the Shelling Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 550632 8527pif.doc / 009 A7 B7 V. Description of the invention ) When the elastic deformation of the disc portion 23 in the bearing direction changes the full length of the bellows 14, the volume inside the small bellows 24 and the large bellows 25 changes. At this time, the non-compressible medium 43 The compression causes the flexible hose 13 to expand and contract in the inner diameter direction or even in the horizontal direction, thereby causing the flexible hose 13 to pump. Please refer to FIG. 2 for a cross section of the flexible hose 13 The shape is, for example, an ellipse with a circular arc shape and a flat cross section. When the volume of the pump chamber 42 is changed, the flexible hose 13 is adjusted in accordance with the amount of change in the volume of the inner side of the bellows 14 as a predetermined amount. The elastic deformation of the flat portion is mainly elastic deformation. However, the cross-sectional shape of the flexible hose 13 is not limited to this, and the cross-sectional shape may be circular or other different shapes. Figures 3A to 3B are schematic diagrams of the pump operation that occurs when the moving disc portion is displaced in the bearing direction. In FIG. 1, the neutral state of the moving disc portion 23 is a state at a position approximately at the center of the bearing direction of the bellows 14. From this state, the moving disc portion 23 is driven toward the small corrugations by the engine 37. The tube 24 is displaced, and for the whole of the corrugated tube 14, the inner diameter of the corrugated tube 14 is increased by shortening the small inner diameter portion and increasing the large inner diameter portion. That is, for the large bellows 25, when the volume in the bellows 14 changes, the volume of the small bellows 25 per unit displacement in the bearing direction changes greatly. At this time, the flexible hose 13 expands in the inner diameter direction to increase its internal volume, and the chemical liquid in the chemical liquid tank 18 is sucked into the flexible hose 13. In this case, the action of the supply-side on-off valve 21 is to open the flow path of the supply-side flow path 17 and the action of the discharge-side on-off valve 22 at the same time. This paper size applies to China National Standard (CNS) A4 (210 X 297). 83. 3. 10,000 --------- Oh II (Please read the precautions on the back before filling out this page)-Order-550632 8527pif.doc / 009 A7 B7 Staff Consumption of Central Standards Bureau, Ministry of Economic Affairs Printed by the cooperative V. Invention description (v \) is to close the flow path of the discharge side flow path 19. On the other hand, when the moving disc portion 23 is deformed toward the large-sized corrugated tube 25, for the entire corrugated tube 14, the large inner diameter portion becomes shorter and the small inner diameter portion becomes longer to make the corrugated tube The inside volume of 14 becomes smaller. At this time, the flexible hose 13 is contracted in the inner diameter direction to reduce its internal volume, and the chemical solution in the flexible hose 13 is discharged toward the coating nozzle 20. In this case, the operation of the supply-side on-off valve 21 is to close the flow path of the supply-side flow path 17, and the operation of the discharge-side on-off valve 22 is to open the flow path of the discharge-side flow path 19. At the time of the above-mentioned pump operation, a non-compressible medium 43 disposed in the bellows 14 is used to communicate the volume change of the bellows 14 to a flexible responsive body on the outside of the flexible hose Π. Sex hose 13 on. Referring to FIG. 8B, in the case where the pressurizing chamber 56 on the outer side of the flexible hose 55 guides the medium from the pump chamber 51 through a small flow path, since there is a concentrated portion, Therefore, the pump operation transmitted to the flexible hose 55 has a delay time. As shown in the figure, the pump operation cannot be performed quickly due to the delay time. After a predetermined amount of the chemical liquid is discharged from the coating nozzle 20, in order to prevent the chemical liquid from the coating nozzle 20 from sagging, it is necessary to perform a sack back operation. In this case, the supply-side on-off valve 21 is closed and the discharge-side on-off valve 22 is opened, and the operating disc portion 23 is displaced toward the small bellows 24 side to expand the flexible hose 13. Among them, when performing the suction action, each of the on-off valves 21 and 22 should not use a check valve, but should use a type 13 that is opened and closed by an external signal. Read the notes on the reverse side and fill in this page) Order-This paper size applies to China National Standard (CNS) A4 (210X297 mm) 83. 3. 10,000 550632 8527pif.d〇c / 009 A7 B7 Central Bureau of Standards, Ministry of Economic Affairs Printed by Pui Gong Consumer Cooperative 5. Solenoid valve or air operated valve of invention description (V). In this case, since the bellows 14 is disposed on the outside of the flexible hose in the chemical liquid supply device shown in the figure, a simple and compact device can be obtained with fewer parts. In addition, the non-compressible medium 43 is filled in the space of the pump chamber 42 between the flexible hose 13 and the bellows 14, so the amount of the non-compressible medium 43 can be greatly reduced. When the sexual medium 43 is filled in the pump chamber 42, the shape of the space filled with the sexual medium 43 is a simple shape, and the locations where the medium exists are concentrated by the order, so it can be easily Carry out the filling operation of the medium. In the conventional chemical liquid supply device shown in the aforementioned publication or FIG. 8B, a small flow path is formed between the pressurizing chamber on the outside of the flexible hose and the pump chamber on the outside of the corrugated tube. The connection is complicated, and the flow path is complicated. It is a very difficult operation to perform the injection of the medium without injecting air. In contrast, the present invention can inject the filling medium very easily. If air enters the medium, it will not affect the high accuracy corresponding to the expansion and contraction of the bellows 14 and the expansion and contraction of the flexible hose 13. Therefore, in the present invention, this correspondence relationship can be ensured to a high degree. Accuracy, so it has higher discharge accuracy. When the pump chamber 42 is a filling space with a complex shape, since the filling position of the medium is centralized, there are fewer dangerous places where the non-compressible medium 43 may leak, even if the medium 43 is In the event of a leak, the location of the leak can also be easily detected, making management of liquid leaks easy. Furthermore, the risk of leaks can be reduced and they can be easily detected when they occur. However, in the known device, when 14 ----------- 赛-(Please read the precautions on the back before ImN: page), tr 鯓-This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) 83. 3. 10,000 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 550632 8527pif.d〇c / 〇〇9 A7 _B7 V. Description of the invention (q) The medium is filled with a complex shape In the case of space, there are multiple interconnected places between the components used to form the space. Therefore, when a medium leak occurs, the leakage position cannot be easily determined, so the device of the present invention is used. Can greatly improve the reliability of the device. When the flexible hose 13 and the bellows 14 are integrally formed, the pump driving portion 12 can be easily separated and easily replaced. Even in the case where the illustrated chemical liquid supply device dispenses the photoresist liquid, the deteriorated photoresist liquid adheres to the inner surface of the flexible flexible tube 13, which is the reason for the occurrence of powder. Therefore, it is necessary to periodically replace the portion of the flexible hose 13 that is in contact with the liquid. In this case, since the flexible hose and the regulator of the conventional device are not separately arranged, it cannot be easily performed. The replacement of the flexible hose 'is also easy to perform in the situation illustrated in the present invention. Fig. 4 is a schematic diagram of a chemical liquid supply device according to another preferred embodiment of the present invention. In this case, the pump portion 11 is formed of two flexible hoses 13a and 13b which are parallel to each other and corrugated tubes 14a and 14b arranged on their respective outer sides. In other words, the small bellows 24a on one side of the bellows 14a and the large bellows 2Sb on the other side of the bellows 14b are located at the supply-side flow path 17 side, and the large bellows on one side of the bellows 14a and the other side of the bellows 14a The small-sized bellows 24b of 14b is located at the discharge-side flow path 19 side. Among them, the structure of the pump driving section 12 is the same as that of the aforementioned preferred embodiment except that the two bellows 14a and 14b are arranged in opposite directions to each other. In this case, use the engine 37 to make the respective operating disc sections 23a, 15 paper size suitable for Guancai County (CNS) A4 ^^ 21QX297 male thin; 'a ~ 83. 3.10,000 ------ --- Φ ------ tr --------- · (Please read the precautions on the back before filling this page) 550632 A7 B7 8 52 7pi f. Doc / 0 09 V. Description of the invention (W) (Please read the precautions on the back before filling this page) 23b is shifted to the top of Figure 4 to shrink the large bellows 25a on one side of the bellows 14a, expand the small bellows 24a, and make the other side The small bellows 24b of the bellows 14b is contracted, and the large bellows 25b is expanded, so that the flexible hose 13a on one side is contracted toward the inner diameter direction, and the flexible hose 13b on the other side is expanded. At this time, since the Bell nut 35 is repeatedly moved between one side and the other side in the linear direction 'to perform a pump operation between the two sides, the chemical liquid is continuously discharged from the coating nozzle 20. Figs. 5A to 5C are schematic diagrams showing modifications of the flexible hose 13 shown in Fig. 1. Figs. The flexible hose 13 is provided with a belt-shaped stopper plate 46 made of the same material as the flexible hose 13 inside. In the case of reducing the volume of the chestnut chamber 42 as shown in FIG. 5C, the flat portion of the flexible hose 13 is in contact with the baffle plate 46, so that the arc-shaped portion of the flexible hose 13 can be prevented A collapse caused by pressure exceeding the tolerance can prevent creases in the arc-shaped portion. The material of the baffle plate 46 is provided corresponding to the material of the flexible hose Π. Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Figs. 6A to 6C are schematic diagrams showing modifications of the flexible hose 13. A protrusion 47 is formed on the flat portion of the flexible hose 13 so as to protrude inward. When the flexible hose 13 is in a neutral state, its cross section is shaped as shown in FIG. 6B, and when it is contracted in the inner diameter direction, its cross section is shaped as shown in FIG. 6C . By the contact of the protrusions 47 with each other, the arc-shaped portion of the flexible hose 13 can be effectively prevented from collapsing. 16 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 83. 3. 10,000 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 550632 8 5 2 7 pif · d 〇c / 0 0 9 A 7 r —___ B7 V. Description of the invention (6 The flexible hose 13 shown in Figures 5A to 6C can also be applied.
於第1圖所示之型式的化學藥液供給裝置或第4圖所示之 型式的化學藥液供給裝置。 /N 第7圖所不爲本發明之另一較佳實施例之化學藥液供 給裝置之示意圖。此裝置係與第丨圖所示之化學 裝置去除可擦性軟管13之後的裝置相當。此=== 管14之固定碟片部26係與泵室42連通，並與供給側流 路17相連接，而固定碟片部27則與泵室42連通，並與 吐出側流路19相連接，以使化學藥液直接貫穿流過於波 紋管14內。 其中，當波紋管14內之化學藥液從一端貫穿流至另 一 $而時’由於波紋管14之內面係爲凹凸狀，會減少化學 藥液滯留部之發生，進而防止化學藥液變質之發生。 此型式之化學藥液供給裝置也可以如第4圖所示，設 有2個相互逆向之波紋管。 雖然本發明已以較佳實施例揭露如上，然其並非用以 限定本發明，任何熟習此技藝者，在不脫離本發明之精神 和範圍內，當可作各種之更動與潤飾。 例如，除圖示之光阻液之塗佈之外，本發明也可以適 用於供給各種液體的藥液供給裝置。又，也可以在不改變 波紋管之全長的情形下，將小型波紋管與大型波紋管之長 度相互交換變位的情形，或是將固定動作碟片部23固定， 再將固定碟片部26、27同時朝軸承方向變位而進行泵動 作之情形。更甚之，在圖示之較佳實施例中，也可以直接 ---------— (請先閲讀背面之注意事項再填寫本頁) -訂· 本紙張尺度適用中國國家標準（CNS)A4規格（210X297公釐） 83. 3. 10,000 經濟部中央標準局員工消費合作社印製 550632 8527pif.d〇c/009 A7 __ B7 五、發明説明（\W ) 利用發動機37藉由貝爾螺紋部34而使動作碟片部23朝 軸承方向驅動’或是改用例如是空氣汽缸（air cylinder)等 的其他驅動手段。另外，非壓縮性媒介物不僅可以使用水、 油等液體，也可以改用水、油等的液體以外之粉體或顆粒 狀的凝膠（gel)等。 發明的效果 在本發明所揭露之發明中，將所得之代表性的效果簡 單地敘述如下。 (1) 在具有小型波紋部與大型波紋部的波紋部中，藉由 小型波紋部與大型波紋部在軸承方向上的變位，以使波紋 部內側之容積膨脹收縮而進行泵動作，進而得到結構簡單 的化學藥液供給裝置。 (2) 在化學藥液貫流於泵室之際，由於在波紋管之內面 上有凹凸存在，因而可以減少於波紋管內之化學藥液的滯 留，進而防止起因於滞留的化學藥液變質之發生。 (3) 在波紋管之泵室內配置有可撓性軟管時，可藉由可 撓性軟管之膨脹收縮而進行泵動作，再由波紋管之軸承方 向上的變位，使其內側之容積的膨脹收縮而使可撓性軟管 藉著非壓縮性媒介物之作用而進行迅速地動作，而得到應 答性較佳之化學藥液供給裝置。 (4) 由於泵部係爲由可撓性軟管與其外側之波紋管所構 成之內外雙重結構，因此可以簡化結構而使裝置全體之尺 寸小型化，進而提高裝置之信賴性。 (5) 由於可以輕易地進行可撓性軟管之替換，因而可以 容易地進行裝置之保養維修（maintenance)。 18 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） 83. 3. 10,000 (請先閲讀背面之注意事項再填寫本頁) ΓThe chemical liquid supply device of the type shown in FIG. 1 or the chemical liquid supply device of the type shown in FIG. 4. / N Figure 7 is not a schematic view of a chemical liquid supply device according to another preferred embodiment of the present invention. This device is equivalent to the chemical device shown in Fig. 丨 after the erasable hose 13 is removed. This === The fixed disc portion 26 of the pipe 14 is in communication with the pump chamber 42 and is connected to the supply-side flow path 17, and the fixed disc portion 27 is in communication with the pump chamber 42 and is connected to the discharge-side flow path 19 It is connected so that the chemical liquid flows directly through the bellows 14. Among them, when the chemical liquid in the corrugated tube 14 flows through from one end to another, 'the inner surface of the corrugated tube 14 is uneven, which will reduce the occurrence of the chemical liquid stagnant part, thereby preventing the chemical liquid from deteriorating. It happened. This type of chemical liquid supply device can also be provided with two bellows which are opposite to each other, as shown in FIG. Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make various modifications and retouching without departing from the spirit and scope of the present invention. For example, in addition to the application of the photoresist liquid shown in the figure, the present invention can also be applied to a chemical liquid supply device that supplies various liquids. In addition, the length of the small bellows and the large bellows can be exchanged and changed without changing the full length of the bellows, or the fixed disk portion 23 can be fixed, and then the fixed disk portion 26 can be fixed. , 27 When the pump is displaced in the direction of the bearing at the same time. What's more, in the preferred embodiment shown in the figure, you can also directly ---------- (Please read the precautions on the back before filling out this page)-Order · This paper size applies Chinese national standards (CNS) A4 specification (210X297 mm) 83. 3. 10,000 Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 550632 8527pif.d〇c / 009 A7 __ B7 V. Description of the invention (\ W) Use engine 37 by Bell The screw portion 34 drives the operating disc portion 23 in the direction of the bearing, or uses another driving means such as an air cylinder. In addition, as the incompressible medium, not only liquids such as water and oil can be used, but powders or granular gels other than liquids such as water and oil can also be used. Effects of the Invention In the invention disclosed in the present invention, the representative effects obtained are briefly described as follows. (1) In a corrugated portion having a small corrugated portion and a large corrugated portion, the small corrugated portion and the large corrugated portion are displaced in the bearing direction to expand and contract the volume inside the corrugated portion to perform a pump operation, thereby obtaining Chemical medicinal solution supply device with simple structure. (2) When the chemical solution flows through the pump chamber, there are irregularities on the inner surface of the bellows, so that the retention of the chemical solution in the bellows can be reduced, and the deterioration of the chemical solution caused by the retention can be prevented. It happened. (3) When a flexible hose is arranged in the pump chamber of the bellows, the pump can be operated by the expansion and contraction of the flexible hose, and then the inner side of the bellows can be displaced by the displacement of the bearing of the bellows. The expansion and contraction of the volume causes the flexible hose to move quickly by the action of a non-compressible medium, thereby obtaining a chemical liquid supply device with better response. (4) Since the pump unit has an internal and external double structure composed of a flexible hose and a bellows on the outside, the structure can be simplified and the overall size of the device can be reduced, thereby increasing the reliability of the device. (5) Since the flexible hose can be easily replaced, maintenance of the device can be easily performed. 18 This paper size applies Chinese National Standard (CNS) A4 (210 X 297 mm) 83. 3. 10,000 (Please read the precautions on the back before filling this page) Γ