TW542049U - Apparatus for preventing CMP polishing slurry from scraping wafer - Google Patents

Apparatus for preventing CMP polishing slurry from scraping wafer

Info

Publication number
TW542049U
TW542049U TW90212177U TW90212177U TW542049U TW 542049 U TW542049 U TW 542049U TW 90212177 U TW90212177 U TW 90212177U TW 90212177 U TW90212177 U TW 90212177U TW 542049 U TW542049 U TW 542049U
Authority
TW
Taiwan
Prior art keywords
scraping
wafer
polishing slurry
cmp polishing
preventing
Prior art date
Application number
TW90212177U
Other languages
Chinese (zh)
Inventor
Ji-Wen Liou
Ying-Lang Wang
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW90212177U priority Critical patent/TW542049U/en
Publication of TW542049U publication Critical patent/TW542049U/en

Links

TW90212177U 2001-07-18 2001-07-18 Apparatus for preventing CMP polishing slurry from scraping wafer TW542049U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW90212177U TW542049U (en) 2001-07-18 2001-07-18 Apparatus for preventing CMP polishing slurry from scraping wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW90212177U TW542049U (en) 2001-07-18 2001-07-18 Apparatus for preventing CMP polishing slurry from scraping wafer

Publications (1)

Publication Number Publication Date
TW542049U true TW542049U (en) 2003-07-11

Family

ID=29580460

Family Applications (1)

Application Number Title Priority Date Filing Date
TW90212177U TW542049U (en) 2001-07-18 2001-07-18 Apparatus for preventing CMP polishing slurry from scraping wafer

Country Status (1)

Country Link
TW (1) TW542049U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI694893B (en) * 2015-09-03 2020-06-01 日商信越半導體股份有限公司 Grinding method and grinding device
CN114699941A (en) * 2022-03-14 2022-07-05 长鑫存储技术有限公司 Liquid mixing device, supply system and supply method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI694893B (en) * 2015-09-03 2020-06-01 日商信越半導體股份有限公司 Grinding method and grinding device
CN114699941A (en) * 2022-03-14 2022-07-05 长鑫存储技术有限公司 Liquid mixing device, supply system and supply method

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model