528644 A7 .__B7_ 五、發明説明（彳） (發明所屬之技術領域） (請先閱讀背面之注意事項再填寫本頁) 本發明係關於一種用以硏磨板狀之硏磨對象物的硏磨 裝置。 (.習知技術及發明欲解決之課題） 近年來，經由絕緣材料形成配線圖案之配線晶片被組 裝於手機等之小型電子機器。該配線晶片係將所定形狀之 配線圖案藉由光罩法印刷於樹脂表面之後，一樣地形成絕 緣樹脂膜，製作以絕緣樹脂膜覆蓋配線之具可撓性的薄板 狀印刷基板，並重複進行硏磨該印刷基板之表面所需次數 的一連串過程之後，切斷該印刷基板所得到者。 印刷基板表面之硏磨係硏磨絕緣樹脂膜表面，將絕緣 樹脂膜與配線之高度成爲一致，並爲了將印刷基板表面成 爲平坦而進行，習知此種硏磨，係將於表面具有多數小孔 (孔徑5 0 #m)之硬質陶瓷薄膜配置於橡膠輥之周圍的 硏磨輥直接推壓於印刷基板表面而進行（將此稱爲「拋光 硏磨」）。 經濟部智慧財產局員工消費合作社印製 但是，在該拋光硏磨，係隨著硏磨時間之經過，硏磨 輥表面會有局部地或整體性劣化或堵塞，因而不但無法均 勻地硏磨硏磨對象物表面，而且若長時間連續地進行硏磨 ，則不但具有硏磨輥表面之劣化，同時有硏磨對象物表面 之精修會因各該硏磨對象物有所不同，而再現性變差的問 題，必須在短時間內更換硏磨輥，會降低生產量。 因此，本發明之目的係在於提供一種再現性良好地， 本紙浪尺度適用中國國家標準（CNS ) A4規格（21〇Χ297公釐） -4 - 528644 A7 B7 五、發明説明（2) 長時間連續地可進行硏磨的硏磨裝置。 (解決課題所用之手段） 爲了達成上述目的的本發明之硏磨裝置係由：用以硏 磨基板之硏磨部，及用以將基板搬入至硏磨部之搬入部， 及用以從硏磨部搬出基板之搬出部所構成。 硏磨部係由：用以送出硏磨帶之送出手段，及用以捲 取硏磨帶之捲取手段，及用以將從送出手段所送出之硏磨 帶推向基板之背托體’及用以將該背托體前後方向地往復 移動之往復移動手段分別所構成的第一及第二硏磨頭所構 成。 此些第一及第二硏磨頭係左右對稱構造，各該第一及 第二硏磨頭係相對向地對向排列；基板之硏磨係經由第一 及第二硏磨頭之各該背托體，在位於各該背托體之表面上 的硏磨帶與硏磨帶之間夾住基板，而前後方向地往復移動 各背托體進行硏磨。 各背托體係具有用以局部地變更推向基板的硏磨帶之 壓力的手段。該手段係由設於背托體之表面的複數凹部， 及用以噴出排列於各凹部內之噴嘴所構成。由各噴嘴所噴 出的壓縮空氣之量，係個別地被電子控制。 硏磨部係具有用以左右方向地移動各硏磨頭之移動手 段；藉由左右方向地移動各硏磨頭，成爲在此些硏磨頭之 各該背托體之間可夾住基板之狀態。 搬入部係由：用以移送基板之複數輥，及可旋轉地安 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） J---：-----_ 裝-- (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 -5 - 528644 A7 B7 五、發明説明（3 ) 裝此些輥之機框，及用以旋轉輥之驅動手段分別所構成的 第一及第二搬入體所構成。 (請先閱讀背面之注意事項再填寫本頁) 此些第一及第二搬入體係左右對稱構造，第一及第二 搬入體之各該輥對向排列成相對向之狀態；基板之搬入係 在相對向之輥與輥之間夾住基板，藉由驅動手段旋轉輥來 進行搬入。 搬入部係與上述硏磨部同樣地，具有用以左右方向地 移動各搬出體之移動手段，藉由左右方向地移動搬入體， 成爲在此些搬入體之各該輥之間或夾住基板之狀態。 搬入部係由：用以移送基板之複數輥，及可旋轉地安 裝此些輥之狀態，及用以旋轉輥之驅動手段分別所構成的 第一及第二搬出體所構成。 此些第一及第二搬出體係左右對稱構造，第一及第二 搬出體之各該輥對向排列成相對向之狀態，基板之搬出係 在相對向之輥與輥之間夾住基板，藉由驅動手段旋轉輥來 進行搬出。 經濟部智慧財產局員工消費合作社印製 搬出部係與上述硏磨部同樣地，具有用以左右方向地 移動各搬出體之移動手段，藉由左右方向地移動搬出體， 成爲在此些搬出體之各該輥之間可夾住基板之狀態。 首先基板之硏磨，係在第一及第二搬入體之間配置基 板，將各搬入體，硏磨頭及搬出體分別朝左右方向移動， 在第一及第二搬入體之間夾住基板，同時接近各搬入體及 搬出體之各該輥彼此間，及硏磨頭之各該背托體彼此間。 然後，旋轉搬入部之輥，一面朝上方移送基板，一面行走 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 528644 A7 ________B7_ 五、發明説明（4) (請先閱讀背面之注意事項再填寫本頁) 硏磨帶，朝前後方向往復移動背托體，並朝上方移送基板 俾硏磨基板之兩面。經硏磨之基板之上部夾在搬出部之輥 之間，藉由輥之旋轉使得基板更朝上方移動，終了基板之 硏磨。 (發明之實施形態） 如第1圖所示，本發明之硏磨裝置1 0係由：用以硏 磨基板之硏磨部3 0，及用以將基板搬入至硏磨部3 0之 搬入部2 0，及用以從硏磨部3 0搬出基板之搬出部所構 成；此些構成成分係被排列於機殼1 1內。 如第2圖所示，搬入部2 0係由：用以移送基板之複 數輥22a〜22g，22a >〜22g 一，及可旋轉地 安裝此些輥22a〜22g，22a /〜22g/_之機框 23，23> ，及用以旋轉輥22a〜22g，22a< 〜2 2 g >之驅動手段（未圖示）分別所構成的第一及第 二搬入體21，21>所構成。 經濟部智慧財產局員工消費合作社印製 此些第一及第二搬入體2 1，2 1 /係左右對稱構造 ;第一及第二搬入體21，21 >之各該輥22a〜22 g，2 2 a /〜2 2 g /對向排列成相對向之狀態，基板 之搬入係在相對向之輥2 2 a〜2 2 g與輥2 2 a —〜 2 2 g /之間夾住基板，並藉由驅動手段（未圖示）旋轉 輥22a〜22g，22a /〜來進行。 作爲該驅動手段（未圖示），例如可利用將垂直方向 地排列之滾珠螺旋扣合於設任各輥2 2 a〜2 2 g， 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ~ ' 528644 A7 __ B7_ 五、發明説明（5) 2 2 a —〜2 2 g /之端部的螺旋槽’並旋轉該滾珠螺旋 者。 搬入部2 0係具有用以左右方向地移動各搬入體2 1 ’ 2 1 /之移動手段，藉由朝左右方向地移動搬入體2 1 ，21 /，成爲可將基板夾在此些搬入體21 ’ 21 /之 各該輥22a〜22g，22a 一〜22g’之間。 該移動手段係由設於機框2 3，2 3 /之導部2 4， 2 4 >，及固定於機殼1 1之引動器2 6，2 6 /所構成 ;機框23，23 /之導部24，24 >係扣合於固定在 機框1 1之軌道25，25 /，當驅動引動器26， 26 /時，各搬入體21，1 >應答於引動器26， 2 6 >之伸縮，沿著軌道2 5，2 5 /朝左右方向移動。 硏磨部3 0係由：用以送出硏磨帶T，T /之送出手 段，及用以捲取硏磨帶T，T /之捲取手段，及用以將從 上述送出手段所送出之硏磨帶T，T >推向基板之背托體 4 0，4 0 /，及用以前後方向地往復移動該背托體4〇 ，4 0 /之往復移動手段分別所構成的第一及第二硏磨頭 3 1，3 1 >所構成。 此些第一及第二硏磨頭3 1，3 1 /係左右對稱構造 ，各該第一及第二硏磨頭3 1，3 1 /係相對向排列成對 向之狀態，基板之硏磨係經由第一及第二硏磨頭3 1， 3 1 /之各該背托體4 0，4 0 /，在位於各該背托體 4 0，4 0 /之表面上之硏磨帶T與硏磨帶T /之間夾住 基板，前後方向地往復移動各背托體4 0，4 0 >來進行 本紙張尺度適用中國國家標準（CNS)A4規格（210X297公釐） "" -8- (請先閱讀背面之注意事項再填寫本頁)528644 A7 .__ B7_ V. Description of the invention (彳) (Technical field to which the invention belongs) (Please read the precautions on the back before filling out this page) The present invention relates to a type of honing for honing objects in the form of plates Device. (Problems to be Solved by Conventional Technology and Invention) In recent years, a wiring chip for forming a wiring pattern via an insulating material has been mounted on a small electronic device such as a mobile phone. This wiring chip is formed by printing a wiring pattern of a predetermined shape on a resin surface by a mask method, and then forming an insulating resin film in the same manner, and manufacturing a flexible thin-plate-shaped printed substrate that covers the wiring with the insulating resin film, and repeats the process. After a series of processes of grinding the surface of the printed substrate as many times as necessary, the resulting printed substrate is cut. The honing of the surface of the printed circuit board is honing the surface of the insulating resin film, and the height of the insulating resin film and the wiring are adjusted to make the surface of the printed circuit board flat. This kind of honing is known to have a small amount on the surface. A hard ceramic film with a hole (aperture 50 #m) is placed around a rubber roller. A honing roller is directly pressed against the surface of a printed circuit board (this is called "polishing honing"). Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. However, in this polishing honing, the surface of the honing roller will be locally or wholly deteriorated or blocked with the passage of the honing time. Grinding the surface of the object, and if the honing is performed continuously for a long time, not only the deterioration of the surface of the honing roller, but also the finishing of the surface of the honing object will be different for each honing object, and the reproducibility The problem of deterioration, the honing roller must be replaced in a short time, which will reduce the throughput. Therefore, the object of the present invention is to provide a paper with good reproducibility. The paper scale is applicable to the Chinese National Standard (CNS) A4 specification (21〇 × 297 mm) -4-528644 A7 B7. 5. Description of the invention (2) Long time continuous A honing device capable of honing. (Means for solving the problem) The honing apparatus of the present invention for achieving the above-mentioned object is composed of a honing unit for honing a substrate, a carrying-in unit for carrying a substrate into the honing unit, and a honing unit for honing the substrate. The grinding unit is configured to carry out the substrate. The honing unit is composed of: a sending-out means for sending out the honing belt, a winding-up means for winding the honing belt, and a hoisting belt for pushing the honing belt sent from the sending-out means to the back support of the substrate. And the first and second honing heads respectively constituted by reciprocating means for reciprocating the back support body forward and backward. The first and second honing heads are symmetrically structured, and each of the first and second honing heads is arranged opposite to each other; the honing of the substrate is passed through each of the first and second honing heads. The back support body sandwiches the substrate between the honing belt and the honing belt located on the surface of each back support body, and moves each back support body back and forth to perform honing. Each backing system has a means for locally changing the pressure of the honing belt that is pushed toward the substrate. This method is composed of a plurality of concave portions provided on the surface of the back support body, and nozzles arranged to eject the concave portions. The amount of compressed air ejected from each nozzle is individually controlled electronically. The honing unit has a moving means for moving the honing heads in the left-right direction; by moving the honing heads in the left-right direction, the honing head can be used to sandwich the substrate between the backing bodies of the honing heads. status. The carrying-in department consists of: a plurality of rollers used to transfer the substrate, and the size of the paper that can be rotated to fit the national standard (CNS) A4 (210X297 mm) J ---: -----_ equipment-( Please read the precautions on the back before filling this page) Order printed by the Intellectual Property Bureau of the Ministry of Economic Affairs's Consumer Cooperatives-5-528644 A7 B7 V. Description of the invention (3) The frame for these rollers and the rollers for rotating the rollers The driving means is constituted by the first and second carry-in bodies, respectively. (Please read the precautions on the back before filling in this page) These first and second loading systems are symmetrically structured, and the rollers of the first and second loading bodies are aligned opposite each other; the board loading system The substrate is sandwiched between the opposing rollers and the rollers, and the rollers are rotated by the driving means to carry in. The carrying-in part has moving means for moving each carrying-out body in the left-right direction similarly to the honing part described above. By moving the carrying-in body in the left-right direction, the carrying-in part is sandwiched between the rollers of the carrying-in body or the substrate Of the state. The carrying-in section is composed of a plurality of rollers for transferring the substrate, a state in which these rollers are rotatably mounted, and first and second carrying-out bodies respectively constituted by driving means for rotating the rollers. These first and second carry-out systems are symmetrically structured. Each of the rollers of the first and second carry-out bodies is aligned in a facing state. The substrate is carried out by sandwiching the substrate between the opposed rolls and the rolls. The roll is rotated by a driving means to carry out. Similar to the honing section, the printed out department of the Intellectual Property Bureau of the Ministry of Economic Affairs' employee consumer cooperative has moving means for moving each body in the left-right direction. By moving the body in the left-right direction, it becomes these bodies. The substrate can be sandwiched between the rollers. First, the honing of the substrate is to arrange the substrate between the first and second carry-in bodies, move each of the carry-in bodies, the honing head and the carry-out body to the left and right directions, and sandwich the substrate between the first and second carry-in bodies. At the same time, each of the rollers approaching each of the carrying-in body and the carrying-out body is between each other, and each of the backing bodies of the honing head is between each other. Then, rotate the roller of the loading section, and move the substrate while facing upwards. While walking, the paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 528644 A7 ________B7_ V. Description of the invention (4) (Please read the Please fill in this page again for the matters needing attention) Honing belt, move the back support back and forth in the forward and backward direction, and move the substrate to both sides of the substrate. The upper part of the honing substrate is sandwiched between the rollers of the carrying-out part, and the substrate is moved upward by the rotation of the roller, which ends the honing of the substrate. (Embodiment of the invention) As shown in FIG. 1, the honing apparatus 10 of the present invention is composed of a honing unit 30 for honing a substrate and a carrying-in for carrying the substrate into the honing unit 30. The part 20 and the carrying-out part for carrying the substrate out of the honing part 30; these constituent components are arranged in the casing 11. As shown in FIG. 2, the carry-in section 20 is composed of a plurality of rollers 22a to 22g, 22a > to 22g for transferring the substrate, and the rollers 22a to 22g, 22a / ~ 22g / _ to be rotatably mounted. Frames 23, 23 > and first and second carry-in bodies 21, 21 > constituted by driving means (not shown) for rotating the rollers 22a to 22g, 22a < ~ 2 2g > . The consumer cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs printed these first and second moving bodies 2 1, 2 1 / which are symmetrical structures; the first and second moving bodies 21, 21 > each of the rollers 22a ~ 22 g , 2 2 a / ~ 2 2 g / opposite arranged in the opposite state, the substrate is carried in between the opposite roller 2 2 a ~ 2 2 g and the roller 2 2 a — ~ 2 2 g / The substrate is rotated by driving means (not shown) to rotate the rollers 22a to 22g, 22a / ~. As the driving means (not shown), for example, a ball arranged vertically can be screwed to each of the rollers 2 2 a to 2 2 g. This paper size is applicable to the Chinese National Standard (CNS) A4 standard ( 210X297 mm) ~ '528644 A7 __ B7_ V. Description of the invention (5) 2 2 a — ~ 2 2 g / spiral groove at the end' and rotate the ball spiral. The carry-in section 20 has moving means for moving each carry-in body 2 1 ′ 2 1 / in the left-right direction, and by moving the carry-in bodies 2 1, 21 / in the left-right direction, it becomes a carry-in body that can sandwich the substrates. 21 '21 / each of the rollers 22a ~ 22g, 22a ~ 22g'. The moving means is constituted by the guides 2 4, 2 4 > provided on the frame 2 3, 2 3 /, and the actuators 2 6, 2 6 / fixed on the case 1 1; the frames 23, 23 The guide portions 24, 24 are fastened to the rails 25, 25 fixed to the frame 11. When the actuators 26, 26 are driven, each of the moving bodies 21, 1 > responds to the actuator 26, 2 6 > expansion and contraction, moving along the track 2 5, 2 5 / to the left and right. The honing unit 30 is composed of: a feeding means for sending out the honing belt T, T /, and a winding means for winding the honing belt T, T /, and a means for sending out the above-mentioned sending means The honing belt T, T > the first and second means of the back support body 40, 40 / pushed to the substrate, and the back and forth means for back and forth movement of the back support body 40, 40 / And a second honing head 3 1, 3 1 >. The first and second honing heads 3 1, 3 1 / are symmetrically arranged in a left-right direction, and each of the first and second honing heads 3 1, 3 1 / are oppositely arranged in a state of being opposite to each other. The grinding is performed by a honing belt on the surface of each of the backing bodies 4 0, 4 0 / via the first and second honing heads 3 1, 3 1 / each of the backing body 40, 4 0 /. The substrate is clamped between T and honing belt T /, and each backing body is reciprocated back and forth 4 0, 4 0 > to carry out the paper size applicable to China National Standard (CNS) A4 (210X297 mm) " " -8- (Please read the notes on the back before filling this page)
、1T 經濟部智慧財產局員工消費合作社印製 528644 Α7 Β7 五、發明説明（6) 〇 (請先閱讀背面之注意事項再填寫本頁) 硏磨部3 0係具有用以將各硏磨頭3 1，3 1 /朝左 右方向移動之移動手段，藉由左右方向地移動硏磨頭3 1 ’ 31 /，成爲在此些硏磨頭31，31 /之各該背托體 4 0，4 0 >之間可夾住基板。 該移動手段係與上述搬入部2 0同樣地，由設於機框 34 ’ 34 —之導部35，35 —，及固定於機殻1 1之 引動器（在第6圖）中以記號3 7，3 7 >表示）所構成 :機框3 4，3 4之導部3 5，3 5…係扣合於固定在機 框11之軌道36，36<，當驅動引動器37，37一 時’各硏磨頭31，31 /應答於引動器37，37#之 伸縮’沿著軌道3 6，3 6 /左右方向地移動。 經濟部智慧財產局員工消費合作社印製 送出手段及捲取手段係分別由：可旋轉地安裝於機框 34，34 /之上部的帶輥32，32 /，及可旋轉地安 裝於機框34，34>之下部的捲取輥33，33，，及 用以旋轉帶輥3 2，3 2 /及捲取輥3 3，3 3 >的馬達 (在第5圖及第7圖中以記號3 8 >表示）所構成；藉由 調整帶輥32，32 >及捲取輥33，33 /之轉速，成 爲可適當地變更硏磨帶T，T >之行走速度。又，該各帶 輥32，32 /及捲取輥33，33 —係可裝卸地安裝於 機框34，34 >，當帶輥32，32 >之所有硏磨帶T ，T /捲取在捲取錕3 3，3 3 /時，則帶輥3 2， 3 2 /係與被捲有新硏磨帶之帶輥匣式地可更換，而捲取 使用過之硏磨帶T，的捲取輥33，33 >係被更換 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） 528644 A7 B7 五、發明説明（7) 成新捲取輥。 (請先閱讀背面之注意事項再填寫本頁) 作爲硏磨帶T，T /係使用將以樹脂黏接劑固定磨粒 之硏磨層形成於塑膠薄膜表面的硏磨帶，在塑膠薄膜表面 形成發泡體層的發泡體帶，在塑膠薄膜表面植毛塑膠纖維 的植毛帶，織布帶，不織布帶等之習知的硏磨帶。 如第6圖及第8圖所示，用以往復移動背托體4〇， 4 0 之往復移動手段係由：貫通機框3 4，3 4 /而可 旋轉地安裝，於前端具有從其軸線偏心之偏心部4 2， 42> ，44，44一的軸41 ，41>43，43> ， 及用以旋轉此些軸4 1，4 1 /，4 3，4 3 /的驅動手 段所構成；各該軸4 1，4 1 >，4 3，4 3 >之前端的 偏心部4 2，4 2 >，4 4，4 4 >係***在設於背托體 4〇，4〇之兩端部分之開口部45 ，45 / ，46 ， 46 /內，而背托體40，40>係藉由軸41，41 / 4 3，4 3 >之旋轉朝前後方向往復移動。 經濟部智慧財產局員工消費合作社印製 如第8圖所示，用以旋轉具有偏心部4 2，4 2 —， 44，44> 之軸 41，41>，43，43> 的驅動手 段5 0係由：固定於設在機殼1 1之棚架1 2上的馬達 5 1，及經由棚架1 2上之托架5 3而可旋轉地排列之斷 面多角形狀的軸5 2，及具有一致於該軸5 2之斷面形狀 之開口，經該開口而被通於軸5 2的帶軸5 4，5 5， 5 5 >所構成，當驅動馬達5 1時，則經由皮帶5 6使得 軸5 2旋轉，而藉由該軸5 2之旋轉，經由帶輪5 5， 55 '，皮帶57，57 一及固定於軸43，43 一之後 本紙張尺度適用中國國家標率（CNS ) A4規格（210X 297公釐） -10- 528644 A7 B7 經濟部智慧財產局工消費合作社印製 五、發明説明（8 ) 端的帶輪4 7，4 7 /，使得軸4 3，4 3 >旋轉，如上 述地，背托體4 0，4 0 /前後方向地往復移動（參照第 6圖至第8圖）。 又，軸5 2係與軌道3 6，3 6 >平行地排列，當驅 動引動器37，37—時，應答於引動器37，37<之 伸縮，各硏磨頭3 1，3 1 Μ系沿著軸5 2，如上述地， 左右方向地移動。 又，如第3圖所示，硏磨部3 0係具有用以防止依背 托體40，40 /之往復移動所產生之硏磨帶Τ，之 變形的變形防止手段6 0。該變形防止手段6 0係具有可 旋轉地排列於與背托體4 〇，4 0 / —起往復移動之背托 體40，40 一之上下兩側的輥6 1 a〜6 1 d， 61a>〜61(1一。如第3圖，第7圖及第8圖所示， 輥6 1 a〜6 1 d，6 1 a /〜6 1 d Μ系分別可旋轉地 安裝於平面〕狀之機框62，62 >，而在機框62， 6 2 開口 6 3，6 3 /設於其側面，於該開口 6 3， 6 3 /內，***有與可旋轉地安裝於機框6 2，6 2 >之 上述軸4 1，4 1 一，4 3，4 3 一相同形狀的軸6 4 a 〜6 4 d，6 4 a 一〜6 4 d '之前端的偏心部，與上述 背托體4 0，4 0 >，同樣地，藉由驅動馬達5 1，經由 皮帶57，57>及帶輪65，65 >而與背托體40， 4 0 / —起朝前後方向往復移動。 如第9 ( a ) ，（ b )圖所示，各背托體4 0， 4 0 /係於表面設有複數凹部4 8，在各凹部4 8內排列 (請先閱讀背面之注意事項再填寫本頁) -裝·Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 528644 Α7 Β7 V. Description of the invention (6) 〇 (Please read the precautions on the back before filling out this page) Honing Department 3 0 is equipped with a honing head 3 1,3 1 / The moving means for moving in the left-right direction, by moving the honing head 3 1 '31 / in the left-right direction, each of these honing heads 31, 31 / is the back support body 4 0, 4 The board can be clamped between 0 >. This moving means is the same as the above-mentioned carrying-in part 20, and the guide parts 35 and 35 provided in the housing 34'34 — and the actuator (in FIG. 6) fixed to the housing 11 are indicated by the symbol 3 7, 3 7 > display) Composition: Guides 3, 3, 3, 3, 3, 5 of the frame 3 are fastened to the rails 36, 36 & 36 fixed to the frame 11, when the actuators 37, 37 are driven At a time, 'the honing heads 31, 31 / respond to the expansion and contraction of the actuators 37, 37 #' are moved along the rails 3, 6, 3 / left and right. The printing and delivery means and the winding means of the employee's consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs are: rotatably mounted on the frame 34, 34 / upper belt rolls 32, 32 /, and rotatably mounted on the frame 34 , 34 > lower take-up rollers 33, 33, and motors for rotating the belt rollers 3 2, 3 2 / and the take-up rollers 3 3, 3 3 > (shown in FIGS. 5 and 7 as The symbol 3 8 > indicates that the walking speed of the honing belt T, T > can be appropriately changed by adjusting the rotation speeds of the belt rollers 32, 32 > and the take-up rollers 33, 33 /. The belt rolls 32, 32 and the take-up rolls 33, 33 are detachably mounted on the frame 34, 34 > when the belt rolls 32, 32 > all the honing belts T, T / roll When the reel 3 3, 3 3 / is taken, the belt roll 3 2, 3 2 / is replaced with a belt cassette with a new honing belt, and the used honing belt T is wound. The take-up rolls 33, 33 > are replaced. The paper size applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm) 528644 A7 B7. 5. Description of the invention (7) into a new take-up roll. (Please read the precautions on the back before filling in this page.) As the honing belt T, T / is a honing belt that uses a honing layer with resin adhesive to fix the abrasive particles on the surface of the plastic film. Foam belts forming a foam layer, hair-growing belts for planting plastic fibers on the surface of a plastic film, woven belts, non-woven belts, and the like are conventional honing belts. As shown in Fig. 6 and Fig. 8, the reciprocating means for reciprocating the backing body 40, 40 is rotatably installed through the frame 3 4, 3 4 /. The eccentric portion of the axis eccentricity 4 2, 42 >, 44, 44 is a shaft 41, 41 > 43, 43 >, and the driving means for rotating these shafts 4 1, 4 1 /, 4 3, 4 3 / Structure; each of the shafts 4 1, 4 1 >, 4 3, 4 3 > the eccentric portion 4 2, 4 2 >, 4 4, 4 4 > at the front end is inserted into the back support body 40, The openings 45, 45 /, 46, 46 / inside of both ends of 40, and the back support 40, 40 > are reciprocated in the forward and backward directions by the rotation of the shaft 41, 41/4 3, 4 3 > . The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the driving means for rotating the shaft 41, 41 >, 43, 43 > with an eccentric portion 4 2,4 2 —, 44, 44 > as shown in FIG. 5 0 By: a motor 5 1 fixed on a scaffold 12 provided on the casing 11, and a shaft 5 2 with a polygonal cross section that is rotatably arranged via a bracket 5 3 on the scaffold 12, and It has an opening conforming to the cross-sectional shape of the shaft 52, and is constituted by a belt shaft 5 4, 5, 5, 5 5 passing through the shaft 5 2 through the opening. When the motor 51 is driven, it passes through a belt 5 6 makes the shaft 5 2 rotate, and through the rotation of the shaft 5 2, through the belt wheels 5 5, 55 ′, the belts 57, 57 and the shafts 43, 43 are fixed to the Chinese national standard ( CNS) A4 specification (210X 297 mm) -10- 528644 A7 B7 Printed by the Industrial and Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy > Rotating, as described above, the back support body 40, 4 0 / reciprocally moves forward and backward (refer to FIGS. 6 to 8). In addition, the axis 5 2 is arranged in parallel with the tracks 3 6, 3 6 > When the actuators 37, 37 are driven, in response to the expansion and contraction of the actuators 37, 37 < each honing head 3 1, 3 1 Μ The system moves along the axis 52 in the left-right direction as described above. As shown in Fig. 3, the honing unit 30 has a deformation preventing means 60 for preventing deformation of the honing belt T caused by the back and forth movement of the supporting body 40, 40 /. This deformation preventing means 60 has rollers 6 1 a to 6 1 d, 61 a & rotatably arranged on the upper and lower sides of the back brackets 40, 40 which are reciprocated from the back brackets 40, 40. ~ 61 (1 a. As shown in Fig. 3, Fig. 7 and Fig. 8, the rollers 6 1 a to 6 1 d, 6 1 a / to 6 1 d are respectively rotatably mounted on a plane] shape Frame 62, 62 > and the frame 62, 6 2 has an opening 6 3, 6 3 / provided on the side thereof, and is inserted and rotatably mounted on the frame in the opening 6 3, 6 3 /. 6 2,6 2 > The above-mentioned shafts 4 1, 4 1 a, 4 3, 4 3 a shaft of the same shape 6 4 a ～ 6 4 d, 6 4 a ～ 6 4 d 'the eccentric part at the front end, and The above-mentioned back rest 40, 4 0 > is similar to the back rest 40, 4 0 / through the drive motor 51 through the belts 57, 57 > and the pulleys 65, 65 > Reciprocate in the direction. As shown in Figure 9 (a), (b), each back support body 40, 4 0 / is provided on the surface with a plurality of recesses 48, arranged in each recess 48 (please read the back first (Please fill in this page again)
、1T ip 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -11 - 528644 A7 B7 五、發明説明（9) ^ ~" (請先閲讀背面之注意事項再填寫本頁) 有用以噴出壓縮空氣的噴嘴4 9。從各噴嘴4 9所噴出的 壓縮空氣量，係個別地被電子控制，成爲可局部地變更推 向基板的硏磨帶T，T /之壓力。 如第4圖所示，搬出部7 0係由：用以移送基板之複 數輥72a〜72h，72a /〜72h’，及可旋轉地 安裝於此些_72a〜72h，72 a /〜之機 框73，73 一，及用以旋轉輥72a〜72h， 7 2 a /〜7 2 h /之驅動手段（未圖示）分別所構成的 第一及第二搬出體7 1，72 >所構成。 此些第一及第二搬出體7 1，7 1 /係左右對稱構造 :第一及第二搬出體7 1，71 /之各該輥72 a〜72 g，7 2 a >〜7 2 h >對向排列成相對向之狀態，基板 之搬出係在相對向之輥7 2 a〜7 2 h與輥7 2 a〃〜 7 2 h >之間夾住基板，並藉由驅動手段（未圖示）旋轉 輥72a〜72h，72a /〜72h^來進行。 經濟部智慧財產局員工消費合作社印製 作爲該驅動手段（未圖示），與上述搬入部2 0同樣 地例如可利用將垂直方向地排列之滾珠螺旋扣合於設任各 輥7 2 a〜7 2 h，7 2 a /〜7 2 h —之端部的螺旋槽 ，並旋轉該滾珠螺旋者。 搬出部7 0係具有用以左右方向地移動各搬入體2 1 ，2 1 /之移動手段，藉由朝左右方向地移動搬出體7 1 ，71 /，成爲可將基板夾在此些搬出體71，71 /之 各該輥72a〜72h，72a 一〜72h<之間。 該移動手段係由設於機框7 3，7 3 >之導部7 4， 本纸張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -12 - 528644 A7 ____ B7 五、發明説明（1〇) (請先閱讀背面之注意事項再填寫本頁) 74 / ，及固定於機殼1 1之引動器76，76 >所構成 ;機框7 3，7 3 /之導部7 4，7 4 /係扣合於固定在 機框1 1之軌道75，75 >，當驅動引動器76， 76 >時，各搬出體71，71 /應答於引動器76， 7 6 /之伸縮，沿著軌道7 5，7 5 /朝左右方向移動。 作爲基板之硏磨，固定磨粒硏磨或游離磨粒硏磨被利 用。固定磨粒硏磨係使用將磨粒固定於表面的硏磨帶來進 行，而游離磨粒硏磨係藉由將磨粒分散於水或水基之水溶 液中之硏磨淤漿供應於硏磨帶與基板之界面來進行。 首先，基板之硏磨係在前後方向地排列於機殻1 1之 底面的複數導輪1 3上配置基板，驅動引動器2 6， 經濟部智葸財產局員工消費合作社印製 26>，37，37一，76，76 —分別左右方向地移 動第一及第二搬入體21，21 /，第一及第二硏磨頭 31，31 >，以及第一及第二搬出體71，71 /，俾 將第一及第二搬入體2 1，2 1 /及第一及第二搬出體 71，71>之各該輥22a〜22g，22a /〜 22g / 及 72a 〜72h，72a 一 〜72hM皮此間 ，及第一及第二硏磨頭31，31 /之背托體，40， 4 0 /彼此間接近於導輥1 3上之垂直平面上。 然後，旋轉搬入部20之輥22a〜22g， 22a /〜22g /，俾將基板移送至上方，一面行走硏 磨帶T，T / 一面前後方向地往復移動背托體4 0， 4 0 /，將其移送至上方，俾硏磨基板之兩面。經硏磨之 基板上部被夾住在搬出部7 0之輥7 2 a〜7 2 h ’ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -13- 經濟部智慧財產局員工消費合作社、 1T ip This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X 297mm) -11-528644 A7 B7 V. Description of invention (9) ^ ~ " (Please read the precautions on the back before filling this page ) There are nozzles 4 9 for ejecting compressed air. The amount of compressed air ejected from each of the nozzles 49 and 9 is individually controlled electronically, so that the pressures of the honing belts T, T / which are pushed to the substrate can be locally changed. As shown in Fig. 4, the unloading section 70 is composed of a plurality of rollers 72a ~ 72h, 72a / ~ 72h 'for transferring the substrate, and a machine rotatably mounted on these _72a ~ 72h, 72a / ~ Frames 73, 73 a, and first and second carry-out bodies 7 1, 72 > constituted by driving means (not shown) for rotating the rollers 72a to 72h, 7 2 a / to 7 2 h / Make up. These first and second carry-out bodies 7 1, 7 1 / are symmetrically structured left and right: each of the first and second carry-out bodies 7 1, 71/72 rolls 72 a ~ 72 g, 7 2 a > ~ 7 2 h > Opposite arrangement, the substrate is carried out between the opposing rollers 7 2 a ~ 7 2 h and rollers 7 2 a〃 ~ 7 2 h > Means (not shown) are performed by rotating the rollers 72a ~ 72h, 72a / ~ 72h ^. As the driving means (not shown), the employee's consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs can be used to screw the rollers arranged vertically in the same way as in the above-mentioned carrying-in section 20 to each of the rollers 7 2 a ~ 7 2 h, 7 2 a / ~ 7 2 h — the spiral groove at the end, and rotate the ball spiral. The carry-out section 70 has moving means for moving each carry-in body 2 1, 2 1 / in the left-right direction, and by moving the carry-out bodies 7 1, 71 / in the left-right direction, it becomes a carry-out body that can hold the substrate there. 71, 71 / each of the rollers 72a to 72h, 72a to 72h <. The moving means is provided by the guide 7 4 in the frame 7 3, 7 3 > The paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) -12-528644 A7 ____ B7 V. Description of the invention (1〇) (Please read the precautions on the back before filling out this page) 74 /, and the actuator 76, 76 > fixed to the case 1 1; the frame 7 3, 7 3 / guide The parts 7 4, 7 4 / are fastened to the rails 75, 75 fixed to the chassis 11 and when the actuators 76, 76 are driven, each of the carry-out bodies 71, 71 / responds to the actuators 76, 7 6 / of extension and contraction, move along the track 7 5, 7, 5 / left and right. As a substrate honing, a fixed abrasive honing or a free abrasive honing is used. The fixed abrasive grain honing is performed using a honing belt which fixes the abrasive grains to the surface, while the free abrasive grain honing is supplied to the honing by a honing slurry in which the abrasive grains are dispersed in water or a water-based aqueous solution. The interface between the tape and the substrate is performed. First, the honing of the substrate is arranged on the plurality of guide wheels 13 arranged on the bottom surface of the casing 11 in the front-rear direction, and the actuator 26 is driven. Printed by the Consumer Cooperative of the Intellectual Property Office of the Ministry of Economic Affairs 26 >, 37 , 37, 76, 76 —The first and second carry-in bodies 21, 21 /, the first and second honing heads 31, 31 >, and the first and second carry-out bodies 71, 71 are moved left and right, respectively. /, 俾 The first and second carry-in bodies 2 1, 2 1 / and the first and second carry-out bodies 71, 71 > each of the rollers 22a ~ 22g, 22a / ~ 22g /, and 72a ~ 72h, 72a ~~ 72hM leather, and the first and second honing heads 31, 31 / back support body, 40, 4 0 / are close to each other on a vertical plane on the guide roller 13. Then, the rollers 22a ~ 22g, 22a / ~ 22g / of the loading section 20 are rotated, and the substrate is transferred to the upper side, while the honing belt T, T / is moved back and forth in the front and back direction 4, 4, 0, Move it to the top and hob both sides of the substrate. The upper part of the honed substrate is clamped by the roller 7 2 a ~ 7 2 h of the carrying section 70 ′ This paper size applies to China National Standard (CNS) A4 (210X 297 mm) -13- Intellectual Property Bureau Employee Consumer Cooperative
528644 A7 B7 五、發明説明（Μ) 72a >〜72b>之間，藉由輥72a〜27h， 72a >〜72h之旋轉使得基板移送至更上方，終了基 板之硏磨。 (發明之效果） 本發明之硏磨裝置如上所述地構成之故，因而新硏磨 帶連續地供應於硏磨對象物表面，隨著硏磨時間之經過也 不有硏磨帶表面局部地或整體地劣化或堵塞，而且可局部 地可變更推向硏磨對象物表面的硏磨帶表面之壓力，藉此 ，具有不僅可均勻地硏磨硏磨對象物表面，還使得硏磨對 象物表面之精修之再現性成爲良好，又，具有長時間連續 地可進行硏磨，而可提高生產量之效果。 (圖式之簡單說明） 第1圖係表示本發明之硏磨裝置的前視圖。 第2圖係表示圖示於第1圖之硏磨裝置之搬入部的前 視圖。 第3圖係表示圖示於第1圖之硏磨裝置之硏磨部的前 視圖。 第4圖係表示圖示於第1圖之硏磨裝置之搬出部的前 視圖。 第5圖係表示圖示於第1圖的A - A線剖視圖。 第6涵係表示圖示於第5圖的B - B線剖視圖。 桌7 ( a )圖係表不第3圖的E - E線剖視圖。 t度適用中國國家標準（CNS ) A4規格（210X 297公釐） — ^ 裝 ： 訂 (請先閱讀背面之注意事項再填寫本頁) -14- 528644 A7 B7 五、發明説明（12) 第7 ( b )圖係表示第3圖的D — D線剖視圖。 第8圖係表示第5圖的C 一 C線剖視圖。 第9圖（a )圖係表示背托體之表面的圖式。 第9圖（b )圖係表示背托體的局部剖視圖。 (記號之說明） 10 硏磨裝置 11 機殼 12 棚架 1 3 導輥 2 0 搬入部 2 1，2 1 / 搬入體 22 a 〜22g，22a> 〜22g 一 輥 (請先閲讀背面之注意事項再填寫本頁) •裝·528644 A7 B7 V. Description of the invention (M) Between 72a > ~ 72b >, by rotating the rollers 72a ~ 27h, 72a > ~ 72h, the substrate is moved to the upper side, and the honing of the substrate is ended. (Effects of the Invention) Since the honing device of the present invention is configured as described above, the new honing belt is continuously supplied to the surface of the honing object, and there is no localization of the honing belt surface as the honing time passes. It can deteriorate or block as a whole, and can locally change the pressure on the surface of the honing belt that is pushed to the surface of the honing object, thereby not only honing the surface of the honing object uniformly, but also making the honing object The surface refining has good reproducibility, and it has the effect that honing can be performed continuously for a long time, and the throughput can be improved. (Brief description of the drawings) Fig. 1 is a front view showing a honing apparatus of the present invention. Fig. 2 is a front view showing a carrying-in portion of the honing apparatus shown in Fig. 1; Fig. 3 is a front view of a honing section of the honing apparatus shown in Fig. 1; Fig. 4 is a front view showing a carrying-out portion of the honing apparatus shown in Fig. 1; Fig. 5 is a sectional view taken along the line A-A shown in Fig. 1. The sixth culvert is a cross-sectional view taken along line B-B shown in FIG. 5. Table 7 (a) is a sectional view taken along line E-E of FIG. 3. t degree applies Chinese National Standard (CNS) A4 specification (210X 297 mm) — ^ Pack: Order (please read the precautions on the back before filling out this page) -14- 528644 A7 B7 V. Description of Invention (12) No. 7 (b) The figure is a sectional view taken along the line D-D in FIG. 3. Fig. 8 is a sectional view taken along the line C-C in Fig. 5. FIG. 9 (a) is a diagram showing the surface of the back support body. FIG. 9 (b) is a partial cross-sectional view showing the back support body. (Explanation of symbols) 10 Honing device 11 Cabinet 12 Shelf 1 3 Guide roller 2 0 Carrying section 2 1, 2 1 / Carrying body 22 a ~ 22g, 22a > ~ 22g One roller (Please read the precautions on the back first (Fill in this page again)
、1T 經濟部智慧財產局員工消費合作社印製 2 3， 2 3 ^ 機框 2 4， 2 4 一 軌道 2 6 ’ 2 6 / 引動器 3 0 硏磨部 3 1， '3 r 硏磨頭 3 2 ' _ 3 2 一 帶輥 3 3 _ • 3 3 / 捲取輥 3 4 ^ ，3 4 ^ 機框 3 5 ，3 5 ^ 引導部 3 6 ’3 6 > 軌道 3 7 ，3 7 一 引動器 本纸張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -15- 528644 A7 B7 五、發明説明（13) 經濟部智慈財產局員工消費合作社印製 7 8 馬達 4 4 4 4 7 〇 ，4 〇 背托 體 1 ，4 1 ， 4 3 ， 4 3 - 2 ，4 2 ， 4 4 5 4 4 - 5 ，4 5 1 4 6 4 6 - 7 ，4 7 - 帶 輪 8 凹 部 9 噴 嘴 0 驅 動 手 段 1 馬 達 2 軸 3 托 架 4 ，5 5 5 5 5 - 帶 輪 6 ，5 7 5 7 - 皮 帶 〇 防止 變 形 手 段 1 a〜 6 1 d 6 1 a - 2 ，6 2 - 機 框 3 ，6 3 開 □ 4 ，6 4 - 軸 5 ，6 5 - 帶 輪 〇 搬 出 部 1 ，7 1 - 搬 入 體 2 a〜 7 2 h ， 7 2 a - 7 2 h 7 機框 軸 偏心部 開口部 d 輥 輥 (請先閱讀背面之注意事項再填寫本頁) 本纸張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -16- 528644 A7 B7 五、發明説明（ 14) 7 4 ，7 r 導部 7 5 ，了 5 ^ 軌道 7 6 ，7 6 ^ 引動器 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（2!0X297公釐） -17-, 1T Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 2 3, 2 3 ^ Frame 2 4, 2 4 One track 2 6 '2 6 / Actuator 3 0 Honing department 3 1,' 3 r Honing head 3 2 '_ 3 2 One belt roller 3 3 _ • 3 3 / Take-up roller 3 4 ^, 3 4 ^ Frame 3 5, 3 5 ^ Guide 3 6' 3 6 > Track 3 7, 3 7 an actuator This paper size applies to Chinese National Standard (CNS) A4 (210X 297 mm) -15- 528644 A7 B7 V. Description of the invention (13) Printed by the Consumer Cooperatives of the Intellectual Property Office of the Ministry of Economic Affairs 7 8 Motor 4 4 4 4 7 〇, 4 〇Back brackets 1, 4 1, 4 3, 4 3-2, 4 2, 4 4 5 4 4-5, 4 5 1 4 6 4 6-7, 4 7-pulley 8 recess 9 Nozzle 0 Driving means 1 Motor 2 Shaft 3 Bracket 4 5 5 5 5 5-Pulley 6 5 7 5 7-Belt 0 Deformation preventing means 1 a to 6 1 d 6 1 a-2, 6 2-Frame 3, 6 3 Open □ 4, 6 4-Shaft 5, 6 5-Pulley 〇 Unloading section 1, 7 1 -Carrying body 2 a ~ 7 2 h, 7 2 a-7 2 h 7 Frame shaft eccentric opening d Roller (Please read the precautions on the back before filling this page) This paper size applies to Chinese national standards ( CNS) A4 specifications (210X 297 mm) -16- 528644 A7 B7 V. Description of the invention (14) 7 4 ， 7 r guide 7 5 ， 5 ^ track 7 6 ， 7 6 ^ actuator (please read the back first) Please pay attention to this page, please fill in this page) The paper printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs applies the Chinese National Standard (CNS) A4 specification (2! 0X297 mm) -17-