TW509925B

TW509925B - Manufacture method of multi-layer optical recording medium using spin coating molding

Info

Publication number: TW509925B
Application number: TW89110351A
Authority: TW
Inventors: Der-Ray Huang
Original assignee: Ind Tech Res Inst
Priority date: 2000-05-29
Filing date: 2000-05-29
Publication date: 2002-11-11

Abstract

This invention provides a manufacture method of multi-layer optical recording medium using spin coating molding. The invention primarily utilizes a spin coating process to homogeneously coat a polymer solution onto a substrate and uses a stamper to impress the recorded information onto the polymer solution layer before the polymer solution is completely cured. Therefore, the recorded information on the stamper can be duplicated at room temperature and mild pressure and the multi-layered optical recording medium can be produced in a mass quantity and with high stability.

Description

五、發明說明（1) 發明的應用範圍本發明係有關一種光學記錄媒體的的製作方法，特別是一種利用旋鑛模壓之方式製作多層光學記錄媒體的方法。【發明背景】現今傳統CD系列光碟片均為單面單層之結構，以一片 12公分直徑的CD光碟片來說，其可使用容量約為65〇Μβ，而近兩年開始推出的DVD唯讀型光碟片則有單面單層结 2、單面雙層結構、雙面單層結構以及雙面雙層結構等四丄不=之規格。以一片12公分直徑的DVD一R〇M光碟片而二，單面單層結構可使用的基本容量為4.7GB(DVD-5)，面雙層為17GB (DVD-18 )，目前DVD —5 (4· 7GB )， (8.5GB)和DVD—1〇 (9 4GB)已有商品推出，而要口，8 i 1 ?GB )雖有規格，浴P尚無商品化產品出現，其主要疋在製作方法上有其瓶頸存在。，雙面雙層DVD —R〇M光碟片的規格是在單面〇.6_ 之二古I板（SUbStrate )上有兩層記錄層，兩層記錄層鍍全反射：,f J ’ SlN等）’广第二層記錄層上則、s (如A1專），再將兩個單面雙記錄芦的^ β 片的可能方法有三*種上要製作雙面雙層唯讀型DVD光碟接射(出n雙用面機雙械層射V. Description of the invention (1) Scope of application of the invention The present invention relates to a method for manufacturing an optical recording medium, in particular to a method for manufacturing a multilayer optical recording medium by means of spinning molding. [Background of the Invention] Today's traditional CD-series optical discs have a single-sided single-layer structure. For a 12-cm-diameter CD disc, its usable capacity is about 65 mM β. Readable optical discs have specifications such as single-sided single-layer junction 2, single-sided double-layer structure, double-sided single-layer structure, and double-sided double-layer structure. A 12-cm-diameter DVD-ROM disk is used. Two, the single-sided single-layer structure can be used with a basic capacity of 4.7GB (DVD-5), and the double-layered surface is 17GB (DVD-18). Currently, DVD-5 (4.7GB), (8.5GB) and DVD-10 (9 4GB) have been launched, but the main point, 8i 1? GB) Although there are specifications, bath P has not yet commercialized products, its main features are: There are bottlenecks in the production method. The specifications of double-sided double-layer DVD-ROM disks are two recording layers on a single-sided 0.6-second Ergo I plate (SUbStrate), and the two recording layers are plated with total reflection: f J 'SlN, etc. ) 'On the second recording layer, s (such as A1), and then there are three possible ways to record two single-sided double-recorded ^ β films: * To make a double-sided double-layer read-only DVD disc Shooting

第4頁 509925 五、發明說明（2) 此方法是將兩片刻有訊號的模板（stamper )分別放在射出模具的固定面與移動面，再以高溫高壓直接將塑料 (如Poly carbonate)壓入模具（Cavity)中，射出有雙面訊號的薄膜。這種作法因需高溫高壓，對模板的磨耗相當嚴重’另外，由模具中取出射出的塑膠成品時，其厚度又不能太薄’又由於熱應力或塑膠收縮不平均造成完成品的扭曲變形，常超出規格書的要求，因此，這種方法不太可行。 (2) 用 Photo - P〇lymer (2P)方法製作：此方法是先在已刻有訊號的模板上塗佈一層易於變形的南分子材料，利用高壓將這些高分子材料壓向模板，藉以轉印模板上的訊號，再利用紫外線（uv )照射使其硬化 (Cur i ng )，然後將此硬化後的薄層黏合在另一有記錄訊號並需鑛上半反射層的基板上，再以濺鍍（Sputtering) 方式於貼上的薄層上鍍全反射層，就形成了單面雙層的光碟片結構。將兩片〇· 6mm厚度的單面雙層的基板之全反射面黏合在一起’即可成為雙面雙層的DVD光碟片（如 D^VD 18 ) ’這種方法目前有日本的Hitachi及美國的— Mo 等一些公司積極進行試驗中，此方法有可能製作DVD-18等光碟片L但其缺點為需要用高壓方式來獲得良好的訊號轉印對模板的磨耗嚴重，另外在黏合的技術方面，需要控制高良率相當不容易。 (3) 用 Spin - On And Peel (SOAP)方法製作：此方法是美國PicoMedia公司所發明的Spin — 〇n AndPage 509925 V. Description of the invention (2) This method is to place two stampers with signals on the fixed and moving surfaces of the injection mold, and then press the plastic (such as Poly carbonate) directly into the mold with high temperature and pressure In the mold (Cavity), a film with a double-sided signal is emitted. This method requires high temperature and high pressure, which causes severe wear on the template. 'In addition, when the finished plastic product is taken out from the mold, its thickness must not be too thin.' Also, the distortion of the finished product is caused by thermal stress or uneven plastic shrinkage. It often exceeds the requirements of the specification, so this method is not feasible. (2) Manufactured by Photo-Polymer (2P) method: This method first coats a template with a signal that is easy to deform on the template that has been engraved with a signal, and then presses these polymer materials against the template with high pressure to transfer Print the signal on the template, and then use ultraviolet (UV) radiation to harden it (Cur ng), and then bond this hardened thin layer to another substrate that has a signal to record and needs a semi-reflective layer, and then The sputtering method is used to plate a total reflection layer on the pasted thin layer to form a single-sided double-layer optical disc structure. Glue the total reflection surfaces of two single-sided, double-layer substrates with a thickness of 0.6 mm. 'It can become a double-sided double-layer DVD disc (such as D ^ VD 18)' This method currently has Hitachi and In the United States — some companies such as Mo are actively conducting experiments. This method may produce DVD-18 discs such as DVD-18, but the disadvantage is that high pressure is required to obtain a good signal transfer. The abrasion of the template is serious. In addition, the bonding technology On the one hand, it is not easy to control high yields. (3) Produced by Spin-On And Peel (SOAP) method: This method is Spin — 〇n And

509925509925

Peel (SOAP)製作薄膜的方法，复脂溶液滴在旋轉中的模板上，接*，二金種：分子樹脂溶液覆蓋在整個模板上，a 疋’、佈此南分子樹化後，形成一層含有；i的2尚分子樹脂的溶劑揮發硬有記錄層並鑛有半反射；將此薄膜與另-層具 1 T入町續的基板黏合成具有碟片，在此貼上去的薄膜卜刹田A 又㈢Λ就的先 ,^ Λ, ^, 潯膜上利用濺鍍方法鍍上全反射声 4)’則成為真正的單面雙 s (如DVD-18 ) 。 υ尤石茱片由上$ 一種方法，我們可以看出第二與第三法有可能做出I面多層光碟片或雙方法車又 (_=)，但此兩種方法均有薄膜黏合在基板D上先的碟製片程，在衣=上易造成氣泡（Bubble)或皺紋（wrinkie) 等現象’造成製造良率不高的困$。因此，本發述方法的問題提出不需薄膜黏合製程的新方法，較製作出多層光碟片。平乂谷易【發明之目的及概述】Peel (SOAP) method for making a thin film, a compound solution is dropped on a rotating template, and then *, two kinds of gold: a molecular resin solution covers the entire template, a 疋 ′, and this molecular structure is formed into a layer The solvent containing 2 i molecular resin is hard and has a recording layer and is semi-reflective. This film is bonded to a substrate with another 1-layer continuous substrate to form a disc. The film is attached here. Tian A's first ^ Λ, ^ Λ, ^, the total reflection sound was plated on the film by sputtering method 4) ', which became a true single-sided double s (such as DVD-18). There is a method from the above example, we can see that the second and third methods are possible to make I-sided multilayer discs or dual-method cars (_ =), but both methods have thin film adhesion. The first disc manufacturing process on the substrate D is prone to cause bubbles or wrinkles on the garment ', which can cause difficulties in manufacturing yield. Therefore, the problem of the method of the present invention proposes a new method that does not require a thin film bonding process, rather than making a multilayer optical disc. Hirata Guyi [Objective and Summary of the Invention]

本發明主要的目的即是要提供一種避免薄膜與基板黏合製程，而達到高良率之製作多層光學記錄媒體的方法0 雖然前述2P法與SOAP法可能製作出單面多層或雙層等的光碟片，但此兩種方法均有薄膜基板膠合的製程步驟，容易造成氣泡（Bubble )或皺紋（Wrinkle )的現象，造成製作過程良率不易提升的問題，本發明所用的旋鍍模壓法（Spln Coating and Pressing，scp)，將避免The main object of the present invention is to provide a method for making a multilayer optical recording medium with a high yield by avoiding a film and substrate adhesion process. Although the aforementioned 2P method and the SOAP method may produce single-sided multilayer or double-layer optical discs, etc. However, these two methods have the manufacturing steps of thin film substrate gluing, which can easily cause bubbles or wrinkles, resulting in a problem that the yield rate of the manufacturing process cannot be easily improved. The spin plating method (Spln Coating) used in the present invention and Pressing, scp), will avoid

五、發明說明（4) __ 此薄膜膠合的製程，直接將高分子溶液覆在基材上，再藉著此高分子溶二丫布的叉式 0L . ^ _ 從禮尚未元全硬化的階又昂’皿下將具有^錄訊號的模板藉輕微的壓力直接壓合在此高分子溶液薄膜上，同時利用紫^線予以固化而產 ^，號層，此方法在多層光碟片量產的製穋中不必用到高溫高壓的製，，因此，不會造成氣泡或皺緣的現象，不但可使模板的壽命得以延長，且可達到較高的製造良率。本發明之第一實施例係在一空白平面基=上，以SCP法分記錄媒體在第二實施例中，係在一具有第_訊號層法製作第二訊號層，亦得—單面雙層如而第三實施例係將第一實施例與第二實施例所製作得 ^早面雙層光學記錄媒體，將其全反射厣面對面互相結 5 ’則?!成—雙面雙層之光學記錄媒體：又第四實施例係於第一實施例舆施例之製作過，QPD o-L· M ^ ^ 一尸、別製作第一訊號層及第二訊號層，而雙層之光學記錄媒體。之基材上之光學記錄 =二二以SCP法製作訊號層的步驟重複實施，藉此，可形車而層之光學記錄媒體，甚或可形成單面多層之光〇學記錄媒體。下 •有關本發明之詳細内容及技術，茲就配合圖式說明如發明之詳細說明】本lx月所揭路之製作多層光學記錄媒體的方法，係強 509925 五、發明說明（5) 調先用旋鍍（Spin Coating )的方法將高分子溶液，例如高分子樹脂（Polymer resien)類之Acrylic polymer、 Poly-Ether-Imide (PEI ) 、Photo Imide (PI )等，塗佈在基板上，藉著旋鍍的技術控制，如旋鍍速度與此高分子溶液之濃度等’使此高分子溶液層的厚度在約為1 〇 # m 〜1 0 0 // m厚度的範圍均勻分佈，再以帶有記錄訊號圖案的模板在常溫、用輕微的壓力壓印在未完全硬化的高分子溶液層上’使此高分子溶液層上產生記錄訊號，經紫外線硬化（UV Curing)的過程後將模板拿開，則可使這層經旋鍍的高分子溶液層變成一層具有記錄訊號的訊號層，如此多次重複SCP製程則可產生有多層訊號層的多層光學記錄媒體，依此SCP方法我們可以下列實施例之具體實施步驟作一說明。參閱「第1A〜1H圖」所示板（Mirror Substrate)上用記錄媒體的詳細實施步驟圖， 2mm (或〇· 6mm )的空白平面基 Coater )上（「第1 A圖」：層12於基板1〇 ( 「第1B圖」再用一具有記錄訊號之模板3 0 高分子溶液層12上（「第1 C 此高分子溶液層1 2硬化後，將第1 D圖【實施例一】首先，請在空白平面基單面雙層光學一個厚度為1. 塗佈機（Spin 一高分子溶液為 15〜25 ，此尚未硬化的將其固化，待即形成有訊息的第一訊號層1 3 ’係圖解說明 SCP方法製作此實施例是將板1 0放在旋轉 > ’旋轉塗佈 )，其厚度約將訊息壓印在圖」），同時模板3 0拿開，」），在此薄V. Description of the invention (4) __ This film bonding process directly coats the polymer solution on the substrate, and then uses this polymer-soluble diya cloth's fork-type 0L. ^ _ Congli has not fully cured the stage Under the condition of a plate, a template with a ^ recording signal is directly pressed on this polymer solution film with a slight pressure, and at the same time, it is cured by using a purple ^ line to produce a ^, number layer. It is not necessary to use high-temperature and high-pressure manufacturing in the system, so it does not cause bubbles or wrinkles, not only can extend the life of the template, and can achieve a higher manufacturing yield. The first embodiment of the present invention is based on a blank plane, and the recording medium is divided by the SCP method. In the second embodiment, the second signal layer is produced by a method with a signal layer. In the third embodiment, the first embodiment and the second embodiment are used to make an early-face double-layer optical recording medium, and the total reflection is formed face-to-face with each other 5 ′. Optical recording medium: The fourth embodiment is the production of the first embodiment. QPD oL · M ^ ^ One body, do not make the first signal layer and the second signal layer, and double-layer optical recording medium . Optical recording on the substrate = The steps of making the signal layer by the SCP method are repeated, whereby the optical recording medium can be formed into layers, or even a single-sided optical recording medium can be formed. Next • For the detailed content and technology of the present invention, I will explain the details of the invention in conjunction with the drawings.] The method of making a multilayer optical recording medium unveiled in this month is 509925. 5. Description of the invention (5) Tuning first A polymer solution such as Acrylic polymer, Poly-Ether-Imide (PEI), Photo Imide (PI), such as polymer resin (Polymer Resien), is coated on a substrate by a spin coating method. The technical control of spin plating, such as the spin plating speed and the concentration of the polymer solution, 'makes the thickness of this polymer solution layer uniformly distributed in the range of about 10 # m ~ 1 0 0 // m, and then A template with a recording signal pattern is embossed on an incompletely hardened polymer solution layer at room temperature with a slight pressure to make a recording signal on this polymer solution layer. After the UV curing process, the template is Take it away, the spin-coated polymer solution layer can be turned into a signal layer with a recording signal. Repeating the SCP process multiple times can produce a multilayer optical recording medium with multiple signal layers. Based on this SCP The following specific embodiments can we method of Example embodiment step follows. Refer to the detailed implementation steps of the recording medium on the board (Mirror Substrate) shown in "Figures 1A to 1H", on a 2mm (or 0.6mm) blank planar base Coater ("Figure 1A"): Layer 12 on Substrate 10 ("Fig. 1B") A template 3 0 with a recording signal is used on the polymer solution layer 12 ("1C, this polymer solution layer 12 is hardened, and then the 1D picture [Example 1] First, please apply a single layer of double-layer optics with a thickness of 1. Coating machine (Spin-Polymer solution is 15 ~ 25). If it is not hardened, it will be cured, and the first signal layer 1 with information will be formed. 3 'is a diagrammatic illustration of the SCP method for making this embodiment by placing plate 10 on a spin >' spin-coating ', the thickness of which is approximately embossed with the message' '), while template 30 is removed,' '), in This thin

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rE3i用mputtering)方法鑛上半反射層“（「第半反射，、中，半反射層14之厚度約為10〜3〇nm，而 ⑴Π 質為金屬或介電材料，例如金（⑷、銘 (SiN )及'?g )、石夕（Sl )、氮化1呂（Α1Ν )、氮化矽上另—Λ (Sic)等材質，再以scp方法旋轉塗佈之方法2Γ'子溶液層16 (「第1 F圖」），並如前户斤述 )，'i 17上汛唬，則產生第二訊號層17 ( 「第1 G圖」性餅在此第二訊號層1 7上利用濺鍍方法再鍍上一讨料rE3i uses a mputtering method to deposit a semi-reflective layer "(" The semi-reflective, medium, and semi-reflective layer 14 has a thickness of about 10 to 30 nm, and the substrate is a metal or dielectric material, such as gold (⑷, Ming (SiN) and '? G), Shi Xi (Sl), nitride 1 Lu (Α1Ν), silicon nitride on the other-Λ (Sic) and other materials, and then spin coating method 2 SCP' sub-solution layer 16 ("Figure 1 F"), and as described by the previous household), 'i 17 on the flood, a second signal layer 17 ("Figure 1 G" sex cake on this second signal layer 17) Sputtering method for another plating

貝人+反射層14相同之全反射層2〇 ( 「第丄如此即成為一單面雙層光碟片。 β」【實施例二】接者，如「第2 Α〜2 F圖」所示，係圖解說明在有纪錄訊息的基板40上用SCP方法製作單面雙層光學記錄媒體的詳細實施步驟圖，此方法是將一個厚度為l2mm (或〇· 6mm )的射出有記錄訊息的基板4〇 ( 「第2 A圖」），先用濺鍍方法鍍上一層半反射層42 ( 「第2 B圖」），再將此基板40放在旋轉塗佈機上，於半反射層乜上面塗怖高分子溶液層44( 「第2C圖」），其厚度約為然後用具有s己錄说號之模板6 〇將訊息壓印在此尚未破化的高分子溶液層44上（「第2 D圖」），待此高分子滲液層44硬化後，將模板60拿開，即形成具有訊息的第二訊號層45 ( 「第2 E圖」），然後用濺鍍方法在此第二訊據層 45上鍍上全反射層50 ( 「第2 F圖」），如此即成為二^ 面雙層光碟片。 _The Beiren + reflective layer 14 is the same as the total reflective layer 20 ("The second one becomes a single-sided double-layer optical disc. Β" [Embodiment 2] Then, as shown in the "Figure 2A ~ 2F" " , Which is a diagram illustrating the detailed implementation steps of making a single-sided double-layer optical recording medium by using the SCP method on a substrate 40 having recorded information. This method is to emit a substrate having a thickness of 12 mm (or 0.6 mm) with recorded information. 40 ("Fig. 2A"), first apply a semi-reflective layer 42 ("Fig. 2B") by sputtering, and then place this substrate 40 on a spin coater and place it on the semi-reflective layer. The polymer solution layer 44 ("Fig. 2C") is coated thereon, and its thickness is about 60 mm. Then the information is imprinted on the polymer solution layer 44 ("" "Figure 2D"), after the polymer liquid-permeable layer 44 is hardened, the template 60 is removed to form a second signal layer 45 ("Figure 2E") with a message, and then is sputtered here The second data layer 45 is plated with a total reflection layer 50 ("Fig. 2F"), so that it becomes a two-sided double-layer optical disc.

509925 五、發明說明（7) 〜- 【實施例三】請參考「第3圖」與「第4圖」，係為藉由本發明 SCP方法製作雙面雙層光碟片（如DVD-18 )之結構。其中’ 「第3圖」係在實施例一中最後得到的單面雙層光碟片，包括基板10a、l〇b，第一訊號層13a、13b，半反射層 14a、14b，第二訊號層17a、i7b及全反射層20a、20b，; 此兩片單面雙層光碟片的全反射層2〇a、2〇b面對面相互黎合在一起，即成為一完整的雙面雙層光碟片，如果所使用實施例一中所製作出的單面雙層光碟片的直徑為〇. 6mm，而所壓印的訊息為DVD的規格，則此兩片單面雙層的全反射層黏合在一起後則成為雙面雙層的])Vj)_l 8。而「第4圖」係在實施例二中最後所得到的單面雙層光碟片，包括基板4 0a、40b，半反射層42a、42b，第二訊號層45a、45b及全反射層50a、50b，將此兩片單面雙層光碟片的全反射層50a、50b面對面相互黏合在一起，即成為一完整的雙面雙層光碟片。【實施例四】又請參考「第5圖」，係為藉由本發明SCP方法製作單面三層光碟片之結構，其中，在實施例一中「第1 G 圖」所得的單面雙層光碟片，在尚未加全反射層2〇前，再經由實施例一中的「第i E圖」〜「第丄G圖」步驟的製程，於第二訊號層1 7上濺鍍上半反射層18，利用SCp法製作第三訊號層1 9，最後在濺鍍上全反射層2 〇，即可得到一單面三層光碟片。509925 V. Description of the Invention (7) ~-[Embodiment 3] Please refer to "Figure 3" and "Figure 4", which are used to make double-sided double-layer optical discs (such as DVD-18) by the SCP method of the present invention. structure. Wherein, "the third picture" is the single-sided double-layer optical disc finally obtained in the first embodiment, including the substrates 10a, 10b, the first signal layers 13a, 13b, the semi-reflective layers 14a, 14b, and the second signal layer 17a, i7b and total reflection layers 20a, 20b; The two reflection layers 20a, 20b of the two single-sided double-layer optical discs face each other to form a complete double-sided double-layer optical disc If the diameter of the single-sided double-layer optical disc produced in the first embodiment used is 0.6 mm, and the embossed information is the specification of the DVD, then the two single-sided double-layered total reflection layers are bonded on the When combined together, it becomes double-sided and double-layered]) Vj) _l 8. The "Figure 4" is a single-sided double-layer optical disc finally obtained in the second embodiment, which includes substrates 40a, 40b, semi-reflective layers 42a, 42b, second signal layers 45a, 45b, and total reflection layers 50a, 50b. The total reflection layers 50a and 50b of the two single-sided double-layer optical discs are bonded to each other face to face to form a complete double-sided double-layer optical disc. [Embodiment 4] Please also refer to "Figure 5", which is a structure for manufacturing a single-sided three-layer optical disc by the SCP method of the present invention. Among them, the single-sided double-layer obtained from "Figure 1G" in Example 1 The optical disc, before the total reflection layer 20 has been added, is further subjected to a semi-reflective coating on the second signal layer 17 through the process of the steps from "i E picture" to "「 G picture "in the first embodiment. In layer 18, a third signal layer 19 is produced by the SCp method, and finally a total reflection layer 20 is sputtered to obtain a single-sided three-layer optical disc.

第10頁 509925Page 10 509925

而「第Θ圖」亦為藉由本發明scp方法製作單面三声，碟!ί之另—例子，其中，纟實施例二中「第2 E圖」所付的單面雙層光碟片，在尚未加全反射層5〇前，再經由施例二中的「第2 Β圖」〜「第2 Ε圖」步驟的製程，於第二訊號層45上濺鍍上半反射層46，利用scp法製作第三訊號層47，最後再濺鍍±全反射㈣，亦可得到—單面一三反射層於反射層上層，且固此訊號層層之光學根據模板上的外，本發錄層薄膜再者型法需高所得的厚易的控制溫T%壓的 SOAP法舆【發明之，=實施例四可以看出，重複以下步驟：形成半先則之訊號層上，再旋轉塗佈高分子溶液層於半，接者，壓印模板於未完全硬化之高分子溶液化高分子溶液層成為另一訊號層，再剝離模板與，則可陸續形成複數層訊號層，可再製作出更多記錄媒體。本發明之SCP方法不像用2p方法需要高壓來複製。己錄Λ息，而容易造成模板較大磨耗之問題；另 =比起2Ρ與SOAP兩種方法在製程上則沒有黏合記日守’容易產生泡沫與皺紋的困擾。本^明車父射出成型方法的優點更多，因射出成溫高壓，因此模板的磨損嚴重，同時射出成型法，要控制在lOOvm以下並不容易，而本發明可容尚刀子δ己錄溥膜在1 〇〜1 0 0 // m之間，不必用到高過程。綜上所述，可以看出本發明比起計法、機械射出成型法具有相當大的優點。效果】The "picture Θ" is also a single-sided three-tone disc produced by the scp method of the present invention. Another is an example. Among them, the single-sided double-layer optical disc paid for "picture 2 E" in the second embodiment. Before the total reflection layer 50 has not been added, a semi-reflective layer 46 is sputtered on the second signal layer 45 through the process of the steps from "2B picture" to "2E picture" in the second embodiment, and the The third signal layer 47 is produced by the scp method, and then finally sputtered with ± total reflection, and it can also be obtained—one-sided, three-reflective layers on the reflective layer, and the optics of the signal layer are fixed according to the template on the template. The thin-film and thin-film method requires a high thickness and easy control of the temperature and T% pressure of the SOAP method. [Invention, = Example 4 As can be seen, repeat the following steps: form a semi-priority signal layer, then spin-coat The polymer solution layer is placed in half. Then, the imprinted template becomes another signal layer on the polymer solution layer of the polymer solution that has not been completely hardened. If the template is peeled off, multiple signal layers can be formed one after another, which can be remade. Release more recording media. The SCP method of the present invention does not require high pressure to replicate as with the 2p method. It has recorded Λ interest, which easily causes the problem of large abrasion of the template. In addition, compared with the 2P and SOAP methods, there is no adhesion in the manufacturing process. The present invention has more advantages in injection molding method. Because the injection temperature and pressure are high, the wear of the template is serious. At the same time, it is not easy to control the injection molding method below 100 vm, and the present invention can accommodate the knife δ. The membrane is between 1 〇 ~ 1 0 0 // m, no need to use high process. In summary, it can be seen that the present invention has considerable advantages over the counting method and the mechanical injection molding method. effect】

第11頁 509925Page 11 509925

其效果：本“所揭露之製作多層光學記錄媒體的方法，穩定度高 2 · 較小，可可在常溫及輕微壓力下，適合用以量產乡# # g β / 上的記錄訊息，里座夕層先學記錄媒體· 不必用到高溫高壓的過，延長模板的壽命；以及文挺板所遭受之磨耗了谷易的控制高分子溶液層所在〜100//m之間。之訊號層厚度雖然本發明以前述之較佳實施例揭露如、用以限定本發明，任何熟習此技藝者，在上’然其並非精神和範圍内，當可作些許之更動與潤飾，脫離本發明之保護範圍當視後附之申請專利範圍所界定因此本發明之為準。 ^U9925 _式簡單說明【圖式簡單說明】 =1 A〜1 Η圖，係為藉由本發明SCP方法在空白平面基板 ▲作單面雙層光學記錄媒體的實施步驟圖；第2 A〜2 F圖，係為藉由本發明scp方法在有記錄訊息的，板上製作單面雙層光學記錄媒體的實施步驟圖； $ 3圖，係為藉由本發明SCP法製作雙面雙層光碟片之結構示意圖；第4圖，係為藉由本發明SCP法製作雙面雙層光碟片之另一結構示意圖； =5圖，係為藉由本發明SCP法製作單面三層光碟片之結構示意圖；以及 ^ 6圖:係為藉由本發明SCP法製作單面三層光碟片之另一結構示意圖。【圖示符號說明】 10、10a、l〇b 基板 1 2高分子溶液層 13、 13a、13b第一訊號層 14、 14a、14b半反射層 1 6雨分子溶液層 17、17a、17b第二訊號層 1 8半反射層 1 9第三訊號層 20、20a、20b全反射層 3 〇模板The effect: The method disclosed in this article for making multi-layer optical recording media has a high degree of stability. 2 · Smaller, cocoa is suitable for mass production of recorded information on the ## g β / at room temperature and light pressure. Xi layer pre-learning recording medium · It is not necessary to use high temperature and high pressure to extend the life of the template; and the abrasion suffered by the Wenting plate is controlled by ~ 100 // m where the polymer solution layer is located. Signal layer thickness Although the present invention is disclosed in the foregoing preferred embodiments to limit the present invention, anyone skilled in the art is not in the spirit and scope above, but can make some modifications and retouches without departing from the protection of the present invention. The scope is subject to the scope of the attached patent application, so the present invention shall prevail. ^ U9925 _ Simple Description [Schematic Description] = 1 A ~ 1 Η The figure is a blank flat substrate by the SCP method of the present invention ▲ Figures 2A ~ 2F are steps for implementing single-sided double-layer optical recording media; Figures 2A ~ 2F are steps for preparing single-sided double-layer optical recording media on the board by using the scp method of the present invention; Figure 3 is a schematic diagram of the structure of a double-sided double-layer optical disc produced by the SCP method of the present invention; Figure 4 is a schematic diagram of another structure of a double-sided double-layer optical disc produced by the SCP method of the present invention; It is a schematic diagram of the structure of a single-sided three-layer optical disc produced by the SCP method of the present invention; and Figure 6: is another schematic diagram of the structure of a single-sided three-layer optical disc produced by the SCP method of the present invention. [Illustration of Symbols] 10 10a, 10b substrate 1 2 polymer solution layer 13, 13a, 13b first signal layer 14, 14a, 14b semi-reflective layer 16 rain molecular solution layer 17, 17a, 17b second signal layer 1 8 semi-reflective layer 1 9 Third signal layer 20, 20a, 20b Total reflection layer 3 〇 Template

第13頁 509925 圖式簡單說明 40、40a、40b 基板 42、42a、42b半反射層 · 44高分子溶液層 45、45a、45b第二訊號層 46半反射層 47第三訊號層 50、50a、50b全反射層 6 0模板參Page 509925 Simple illustration of 40, 40a, 40b substrates 42, 42a, 42b semi-reflective layers 44 polymer solution layers 45, 45a, 45b second signal layers 46 semi-reflective layers 47 third signal layers 50, 50a, 50b total reflection layer 6 0 template parameter

第14頁Page 14

Claims

1中請專利範圍法種以旋鍍模壓方式形成含有記錄訊息之記錄層的方該方法至少包含：利用旋轉塗佈的方式在光學記錄媒體之基材表面二句塗佈高分子樹脂溶液的手段；人在1^亥南为子樹脂溶液尚未完全硬化前，利用一包 3有C錄訊息之模板將訊息壓印在該高分子樹脂溶液的手段；以及固化該高分子樹脂溶液，並且將該模板與該固化之’分子樹脂溶液剝離，而使該固化之高分子樹脂溶 2 液成為記錄有該訊息之記錄層的手段。 •如申請專利範圍第1項所述以旋鍍模壓方式形成含有記錄訊息之記錄層的方法，其中該高分子樹脂溶液層之厚度係介於l〇#m〜l〇〇//ffl之間。 3 ·如申請專利範圍第1項所述以旋鍍模壓方式形成含有記錄訊息之記錄層的方法，其中該高分子樹脂係選自 Acrylic p〇lymer、p〇iy一Ether-Imide (PEI )、 Photo Imide (PI )所構成之族群。 4 ·如申請專利範圍第1項所述以旋鍍模壓方式形成含有吕己錄訊息之記錄層的方法’其中該南分子樹脂溶液可利用紫外線照射予以固化（UV Cur ing )。 5 ·如申請專利範圍第1項所述以旋鍍模壓方式形成含有吞己錄δίΐ息之記錄層的方法’其中该局The method of patent range 1 is to form a method for forming a recording layer containing recorded information by spin coating and molding. The method at least includes: a method of applying a polymer resin solution to the surface of the substrate of an optical recording medium by spin coating. A method of imprinting a message on the polymer resin solution with a package of 3 recorded messages before the resin solution is completely hardened; and curing the polymer resin solution, and The template is peeled off from the cured 'molecular resin solution, and the cured polymer resin solution becomes a means for recording the recording layer on which the message is recorded. • The method for forming a recording layer containing recorded information by spin plating and molding as described in item 1 of the scope of patent application, wherein the thickness of the polymer resin solution layer is between 10 # m ~ 100 // ffl . 3. The method for forming a recording layer containing recorded information by spin plating and embossing as described in item 1 of the scope of patent application, wherein the polymer resin is selected from Acrylic polymer, poiy-Ether-Imide (PEI), The group of Photo Imide (PI). 4 · A method for forming a recording layer containing Lü Jilu's information by spin plating and molding as described in item 1 of the scope of the patent application, wherein the southern molecular resin solution can be cured by ultraviolet irradiation (UV Curing). 5 · A method of forming a recording layer containing hexahedral δΐ interest by spin plating as described in item 1 of the scope of the patent application, where the bureau

第15頁六、申請專利範圍分子樹脂溶液可藉自然固化之方式予以固化。 6 · —種以旋鍍模壓方式製作多層光學記錄媒體的方法，其步驟包括：提供一具有第一訊號層之基材及一具有記錄訊息圖案的模板； ^ 形成一半反射層於該第一訊號層； ^轉塗佈一高分子樹脂溶液層於該半反射層；壓印該模板於該未完全硬化之高分子樹脂溶液層，且固化該高分子樹脂溶液層成為一第二訊號層；將該模板自該第二訊號層剝離；以及形成一全反射層於該第二訊號層，以形成一單面雙芦之光學記錄媒體。又曰 7 ·如Τ凊專利範圍第6項所述以旋鍍模壓方式製作多居光學記錄媒體的方法，其中該第一訊號層係形成於二基材之表面。 8 ·如申請專利範圍第6項所述以旋鍍模壓方式製作多屑光學圮錄媒體的方法，其中該具有第一訊號層二係藉由下列步驟製成·· 土材長1供一空白平面基板方疋轉塗佈该南分子樹脂溶液層於該基板；壓印该模板於該未完全硬化之高分子樹脂溶液層，固化該高分子樹脂溶液層成為該第一訊號^ · 及曰’ u 將該模板與該第一訊號層剝離。Page 15 6. Scope of Patent Application The molecular resin solution can be cured by natural curing. 6 · A method for manufacturing a multilayer optical recording medium by spin-plating molding, the steps include: providing a substrate having a first signal layer and a template having a recorded message pattern; ^ forming a semi-reflective layer on the first signal ^ Transfer coating a polymer resin solution layer on the semi-reflective layer; embossing the template on the incompletely hardened polymer resin solution layer, and curing the polymer resin solution layer into a second signal layer; The template is peeled from the second signal layer; and a total reflection layer is formed on the second signal layer to form a single-sided double-row optical recording medium. It is also said that the method of making a multi-layered optical recording medium by spin-plating molding as described in item 6 of the TJ patent scope, wherein the first signal layer is formed on the surface of two substrates. 8 · A method for making a multi-chip optical recording medium by spin plating and molding as described in item 6 of the scope of patent application, wherein the second signal layer with the first signal layer is made by the following steps: · Earth material length 1 for a blank A flat substrate is coated with the south molecular resin solution layer on the substrate; the template is imprinted on the incompletely hardened polymer resin solution layer, and the polymer resin solution layer is cured to become the first signal ^ and u Peel off the template from the first signal layer.

第16頁、申请專利範圍 9 ·如申請專利範圍第6項所述以旋鑛模壓方式製作多層光學記錄媒體的方法，其中於形成該全反射層步驟之别更包含藉由重複下列步驟以製成單面多層光學記錄媒體： ~ 形成一半反射層於前述之訊號層；旋轉塗佈該高分子樹脂溶液層於該半反射層；壓印該模板於該未完全硬化之高分子樹脂溶液層，且固化該高分子樹脂溶液層成為一訊號層；以及將該模板與該訊號層剝離，以陸續形成複數層該訊號層。 1 0 ·如申請專利範圍第9項所述以旋鍍模壓方式製作多層光學記錄媒體的方法，其中更包含將兩片具有複數層該訊號層之基板，以該全反射層面對面相結合形成一片雙面多層之光學記錄媒體。 1 1 ·如申請專利範圍第6項所述以旋鍵模壓方式製作多層光學記錄媒體的方法，其中更包含將兩片具有雙層該訊號層之基板，以該全反射層面對面相結合形成一片雙面雙層之光學記錄媒體。 1 2 ·如申請專利範圍第6項所述以旋鑛核麼方式製作多層光學記錄媒體的方法，矸藉由加紫外線以固化（UV Curing)該高分子樹脂溶液層。 1 3 ·如申請專利範圍第6項所述以旋鍍模壓方式製作多層光學記錄媒體的方法，其中該高分子樹脂溶液層可藉自然固化之方式使之固化。Page 16, Patent Application Range 9 · The method of making a multilayer optical recording medium by spin-on-molding as described in item 6 of the patent application range, wherein the step of forming the total reflection layer further includes repeating the following steps to make To form a single-sided multilayer optical recording medium: ~ forming a semi-reflective layer on the aforementioned signal layer; spin-coating the polymer resin solution layer on the semi-reflective layer; imprinting the template on the incompletely hardened polymer resin solution layer, And curing the polymer resin solution layer into a signal layer; and peeling the template from the signal layer to form a plurality of layers of the signal layer successively. 10 · The method for producing a multilayer optical recording medium by spin-plating molding as described in item 9 of the scope of the patent application, which further comprises combining two substrates having a plurality of layers of the signal layer and combining the two layers opposite to each other to form a sheet. Double-sided multilayer optical recording medium. 1 1 · The method for producing a multilayer optical recording medium by means of a rotary key molding method as described in item 6 of the scope of patent application, which further includes combining two substrates having two layers of the signal layer and combining the two layers opposite to each other to form one piece. Double-sided double-layer optical recording medium. 1 2 · The method for producing a multi-layer optical recording medium in a spinnerite core as described in item 6 of the scope of the patent application, by adding UV to cure the polymer resin solution layer. 1 3 · A method for manufacturing a multi-layer optical recording medium by spin plating and embossing as described in item 6 of the scope of patent application, wherein the polymer resin solution layer can be cured by natural curing.

多之多多為 4如中4專利粑圍第6項所述以旋鑛模壓方式製作 :光學記錄媒體的方法，其中該高分子樹脂溶液層厚度係介於10//Π1〜100/ζιη之間。曰 5 ·如申請專利範圍第6項所述以旋鍍模壓方式製作層光學記錄媒體的方法，其中該高分子樹脂係選自 Acrylic p〇lymer、p〇iy — Ei;her—Imide (ρΕί )、 Photo Imide (PI )所構成之族群。 6 ·如申請專利範圍第6項所述以旋鍍模壓方式製作層光學記錄媒體的方法，其中該半反射層之厚度約 10〜30nm 〇 7 ·如申请專利範圍第6項所述以旋鍍模壓方式製作多層光學記錄媒體的方法，其中該半反射層之材質為金屬或介電材料。 0 8 ·如申請專利範圍第1 7項所述以旋鍍模壓方式製作多層光學記錄媒體的方法，其中該半反射層之材質係選自於金（Au)、鋁（A1)、銀Ug)、矽（Si)、、氮化鋁（A1 N )、氮化石夕（S i N )及碳化矽（S i C )所構成之族群。 9 ·如申請專利範圍第6頊所述以旋鍍模壓方式製作多層光學記錄媒體的方法，其中該全反射層之材質為金屬或介電材料。 0 ·如申請專利範圍第1 g j員所述以旋鍍模壓方式製作多層光學記錄媒體的方法，其中該全反射層之材質係選自於金（Au)、鋁（Ai)、銀（Ag)、矽（Si)、 509925 六、申請專利範圍氮化鋁（A1 N )、氮化矽（S i N )及碳化矽（S i C )所構成之族群。Many are 4 as described in Item 6 of the Patent No. 4 of Zhong 4 Patent: Rotary molding method: an optical recording medium method, wherein the thickness of the polymer resin solution layer is between 10 // Π1 ~ 100 / ζιη . 5 · The method for producing a layer optical recording medium by spin-plating and compression molding as described in item 6 of the scope of patent application, wherein the polymer resin is selected from Acrylic p〇lymer, p〇iy — Ei; her—Imide (ρΕί) , Photo Imide (PI). 6 · The method for producing a layer optical recording medium by spin-plating and embossing as described in item 6 of the scope of patent application, wherein the thickness of the semi-reflective layer is about 10 ~ 30nm. A method for manufacturing a multilayer optical recording medium by a compression molding method, wherein a material of the semi-reflective layer is a metal or a dielectric material. 0 8 · A method for manufacturing a multilayer optical recording medium by spin plating and embossing as described in item 17 of the scope of patent application, wherein the material of the semi-reflective layer is selected from gold (Au), aluminum (A1), and silver Ug) , Silicon (Si), aluminum nitride (A1 N), nitride nitride (S i N), and silicon carbide (S i C). 9 · A method for manufacturing a multi-layer optical recording medium by spin plating and embossing as described in Patent Application Scope 6), wherein the material of the total reflection layer is a metal or a dielectric material. 0 · The method for producing a multilayer optical recording medium by spin plating and molding as described in the first gj member of the scope of patent application, wherein the material of the total reflection layer is selected from gold (Au), aluminum (Ai), and silver (Ag) , Silicon (Si), 509925 VI. Patent application scope The group consisting of aluminum nitride (A1 N), silicon nitride (S i N) and silicon carbide (S i C).