TW505995B - A method to form transistors with multiple threshold voltages (VT) using a combination of different work function gate materials - Google Patents
A method to form transistors with multiple threshold voltages (VT) using a combination of different work function gate materials Download PDFInfo
- Publication number
- TW505995B TW505995B TW090111538A TW90111538A TW505995B TW 505995 B TW505995 B TW 505995B TW 090111538 A TW090111538 A TW 090111538A TW 90111538 A TW90111538 A TW 90111538A TW 505995 B TW505995 B TW 505995B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- gate electrode
- group
- scribed
- angstroms thick
- Prior art date
Links
- 239000000463 material Substances 0.000 title claims abstract description 51
- 238000000034 method Methods 0.000 title claims abstract description 31
- 125000006850 spacer group Chemical group 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 239000004065 semiconductor Substances 0.000 claims abstract description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 210000004185 liver Anatomy 0.000 claims description 8
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 238000002955 isolation Methods 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 229910019044 CoSix Inorganic materials 0.000 claims description 3
- 229910010421 TiNx Inorganic materials 0.000 claims description 3
- 229910008479 TiSi2 Inorganic materials 0.000 claims description 3
- DFJQEGUNXWZVAH-UHFFFAOYSA-N bis($l^{2}-silanylidene)titanium Chemical compound [Si]=[Ti]=[Si] DFJQEGUNXWZVAH-UHFFFAOYSA-N 0.000 claims description 3
- 239000010410 layer Substances 0.000 claims 55
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 5
- 239000001301 oxygen Substances 0.000 claims 5
- 229910052760 oxygen Inorganic materials 0.000 claims 5
- 229910052750 molybdenum Inorganic materials 0.000 claims 4
- 229910052759 nickel Inorganic materials 0.000 claims 3
- 229910052715 tantalum Inorganic materials 0.000 claims 3
- 229910019001 CoSi Inorganic materials 0.000 claims 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 2
- -1 nitride nitride Chemical class 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- 229910015861 MSix Inorganic materials 0.000 claims 1
- 229910005883 NiSi Inorganic materials 0.000 claims 1
- 229910004166 TaN Inorganic materials 0.000 claims 1
- 241000776233 Tisis Species 0.000 claims 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 239000011229 interlayer Substances 0.000 claims 1
- 238000006396 nitration reaction Methods 0.000 claims 1
- 238000005121 nitriding Methods 0.000 claims 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 229910052702 rhenium Inorganic materials 0.000 claims 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 claims 1
- 239000002689 soil Substances 0.000 claims 1
- 229910052716 thallium Inorganic materials 0.000 claims 1
- 229910052725 zinc Inorganic materials 0.000 claims 1
- 239000011701 zinc Substances 0.000 claims 1
- 239000007943 implant Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 241001674048 Phthiraptera Species 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823437—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
- H01L21/82345—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes gate conductors with different gate conductor materials or different gate conductor implants, e.g. dual gate structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28105—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor next to the insulator having a lateral composition or doping variation, or being formed laterally by more than one deposition step
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/495—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a simple metal, e.g. W, Mo
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4966—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4983—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET with a lateral structure, e.g. a Polysilicon gate with a lateral doping variation or with a lateral composition variation or characterised by the sidewalls being composed of conductive, resistive or dielectric material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
- H01L29/66583—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate with initial gate mask or masking layer complementary to the prospective gate location, e.g. with dummy source and drain contacts
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Description
505995 五、發明說明(1) 【發明之領域 本發明一般而言係有關於形成積體電路電晶體,並且 更特別地是有關一種用於形成控制短通道效應之積體電路 電晶體閘極的方法。 【發明之背景】 深次微米電晶體需要諸如口袋植入(parket implant )等特別的植入,以便控制短通道效應。 美國專利第5,960,270號(Misra等人)說明一種具有
氮化矽間隔物2 3之閘極以及一種諸如金屬之肝J閘極。 天國專利第5,447,874號(Grivna等人)說明一種雙 金屬閘極。 美國專利第5,776,823號(Agnelio等人)說明一 層(WF )閘極 國專利第5,9 6 6,5 9 7號(W r i g h t )以及美國專利| 5,965,911號(j〇〇等人)說明雙材料閘極。 美國專利第6, 05 1,470號(An等人)說明一種雙閘右 電極)其具有一個側邊導電部分、一個中心導電部分, 及形攻於該側邊導電部分與中心導電部分之間的介電質 滿物= 、 【發明之概要】
第8頁 505995 五、發明說明(2) 本發明 閘極材料組 壓之閘極的 其他的 現已發 成。特別地 板部分以及 被形成於該 之部分的經 弟一功函數 形成於該經 鄰接。該閘 成。該内間 其他目 具有暴 個上覆 邊緣上 方。該 > 一個矣 餘部分 一功函 形成閘 藉由使用相異功函數 以製造具肴多重閥電 之另一目的在於提 合(而避免特殊植 方法。 目的將表示如下。 現本發明的上述及 是,一半導體基板 經刻劃層開口的一 經刻劃層所暴露之 暴露基板部分的上 的WF1材料所組成< 刻劃薄層開口之其 電極由一個具有第 隔物與該閘電極將 的可以下列方法完 路出主動區中之該基 經刻劃層。内間隔物 的该經刻劃層開口中 内間隔物由一個具有 1平坦化的閘電極被 中’並與該内間隔物 數的WF2材料所組 電極。 【圖號對照說明】 10 半導體基板 12 淺溝渠隔離(STI ) 14 主動區 16 犧牲氧化層 18 經刻劃層 20 矽基板部分 22 閘極氧化層 24 内間隔物 26 氮化層開口 第9頁 505995 五、發明說明(3) 2 7 暴露邊緣 28肝2閘電極體 3 0 閘電極 【較佳貫施例之細節說明】 習知ϊ ί t別地說明’否則所有的結肖、薄層等皆可藉由 S技*中所熟知的傳統方法被形成或完成。 初始結構 井^^第1圖所示’初始半導體基板1Q可為石夕基板。 1定用开與p井遮罩進行。 3渠隔離(STI)12被形成於石夕基板 主動區1 4於其間。 里η/取 犧=被形成於碎基板10與淺溝渠隔離Κ上。 犧在虱化層16偏好約100至30〇埃的厚度。 經刻劃層的形成 如第2圖所示,犧牲氧化層16被移除。 經刻劃層18被形成於矽基板1〇與 · :約_至3000埃的厚度。經刻劃層以偏: 二戈: 化石夕所組成,ϋ為偏好由氮切所組成。由減石夕或亂 經刻劃層1 8具有暴露出主動區丨4 的開口26。經刻劃層18亦具有位於開,中
閘極氧化層的形成 如第3圖所不,閘極氧化層2 2被形成於開口 2 基板10部分20上。闡炻ft儿^“ 7 閘極虱化物22偏好約1〇至50埃厚,且鉍 為偏好約1 5至2 5埃厚。 車乂 WF1内間隔物的形成 如第3圖所不,呈右笛 ,. -’弟一功函數的一個WF 1材料声 積於經刻劃的氮化声間σ士 啊竹增破沈 ^ 層開口26中,並被蝕刻而形成WF1内門 隔物24於該經刻書ij氮化#! /战”丄円間 ^ a ^ L化層18的暴露邊緣27上。WF1内間隘 物24偏妤具有約2〇〇至i2nn祕隔 μ王ιζυυ埃厚的基座宽廑?7, 好約20 0至40 0埃厚。 !見沒」 且议為偏 F 2閘電極體的形成 户二%二所示有第二功函數的-麵材料層被、'尤 接;以及接著被平坦:(偏:夢:fF1内間隔物24鄰 )’而形成WF2閘電極體28。功曰函干機械拋先(CMP) 名詞=其係為將位於材料之f 為tF'用的半導體物理 或無能量能階所需的能^費“階的-個電子帶至真空 厚,極體28偏好具有約1_至3。。〇埃 烊且丁乂马偏好約1D00至2500埃厚
Ml内間議侧閉電極體2; 一同組成間電極。
505995 五、發明說明(5) ' W F1内間隔物2 4與W F 2閘電極體的組成 PMOS _S WF1 —— IWF2 WF1 WF2 !TaN w Ru〇2 Co !Ti Co Pt Ni_ iTa Ki T[Si2 !Mo TiSi2 丨A1 WSix ilSix i KiSix ! CoSix WN a ! TiNx 下表I說明形成PM0S與NM0S裝置用之閘電極30的該WF1 内間隔物24與WF2閘電極體28的較佳WF1/WF2材料組合。表 I說明組成閘電極30之較佳的WF1/WF2材料組合,其中更為 較佳的材料以(,,_,,)標示。PMOS WF1攔中的任何PM〇s 、,1材料叮被選擇,而與PMqs肝2搁中的任何pmqs肝2材 料結合;以及NMOS WF1攔中的任何NM0S評1材料可被選 擇而與N Μ 〇 S丨丨F 2攔中的任何n Μ 0 S F 2材料結合。 傳统技術可接著被使用於形成整合有根據本發明所製 造之閘電極30的半導體電晶體。
505995 五、發明說明(6) 閘電極30將控制短通道效應,無須形成諸如口袋植入 等特殊的植入,因為該在邊緣附近的相異功函叙將給予一 個較高的局部閥電壓。 本發明的優點包含有: 1. 其與先進的金屬閘極製程相容;以及 2. 其為無須口袋植入的較簡易製程。 雖然本發明的特定實施例已被舉例並說明,但並不希 冀本發明僅被限制於其,而應如下列申請專利範圍所定 義0
第13頁 505995 圖式簡單說明 本發明的特徵及優點將由下列配合附圖的說明而更清 楚地被瞭解,其中相同的參考數字代表相似或相當的元 件、區域與部分,以及其中: 第1圖至第4圖為示意說明本發明之較佳實施例的剖面
Claims (1)
- 5059951 一種用於形成閘電極的 a)提供一半導體基板, 部分以及經刻劃層開 劃層具有暴露的邊緣 方法,包含的步驟有: 其具有暴露出主動區中之該基板 口的一個上覆經刻劃層;該經刻 b)形成内間隔物於該經刻劃層所暴露之邊緣上之該經刻 劃層開口中之部分的經暴露基板部分的上方;該内間 隔物由一個具有第一功函數的WF1材料所組成;以及 c)形成一個經平坦化的間電極於該經刻劃薄層開口之其餘 部分中,並與該内間隔物鄰接;該閘電極由一個具有第 二功函數的W F 2材料所细士、.分&日日u ^ 7、、且成,該内間隔物與該閘電極將 形成該閘電極。 2.如申請 主動區 3·如申請 矽與氮 材料係 CoSix、 TaN、T 4.如申請 矽與氮 材料係 CoSix ^ 含 Ru02 2 ίΐ第1項之方法’其中該基板包含形成該 的淺溝渠隔離。 專利範圍第1項之古、土 ^ ^ 7 、之方法,其中该經刻劃層由氧化 化石夕組成的族群中;登掘^ μ ^ 砰甲&擇的一薄層所組成;該WF1 ㈣、及TiN的έ日游· X Ni bix u x的組群,以及該WF2材料係選自於 Ta、Mo、及A1的組群。 專利範圍第1項之太、土 # rh ^ 化石夕細成的始、方法,其中该經刻劃層由氧化 且成的族群中選擇的一薄層 :及K 有/、。。,,“二、 、及Pt的組群群;以及讎材料係選自於包 5 ·如申請專利範圍第1項之方法 其中該經刻劃層由氧化i號 9Π1Π538 六、申請專利範圍 曰 修正 石夕與氮化矽組成的族群 ^ m ^ ^ 材料係選自於包含有w Λ擇的一薄層所組成;該WF1 C〇Si、WN …、…“、WSix、MSix、 ^Ta; T. fTlNx的組群;以及該WF2材料係選自於包 3TaN、Tl、Ta、M〇、及A1 的組群。 如申請專利範圍第1項之f 甘士 e W & 以及該WF2材料為TaN 其中該經刻劃層由氮化 以及該WF2材料為ru〇2 包含在該内間隔物形成 ^ ,, 貝之方法,其中该經刻劃層由氮化 8 石夕所組成;該WF1材料為TiNx 如申請專利範圍第1項之方丄 矽所組成;該WF1材料為TiSis 如申請專利範圍第1項之方法‘ 牛驟々兑 ^ W. (HJ (m WJ ρχ : 刖,形成一個閘極氧化層於該經刻劃層開口中之 二,板暴露部分上方的步驟;該閘極氧化層具有約丨0至 50埃的厚度。 如申請專利範圍第1項之方法,其中該經刻劃層約1〇〇〇 至3〇 〇〇埃厚,並由氮化矽所組成;該内間隔物24具有約 200至1200埃厚的基座寬度;以及該閘電極體約至 3 0 0 0埃厚。 1〇·如申請專利範圍第1項之方法,其中該經刻劃層約1000 至30 00埃厚,並由氮化矽所組成;該内間隔物24具有約 200至400埃厚的基座寬度;以及該閘電極體約1500至 2500埃厚。 •一種用於形成閘電極的方法,包含的步驟有: a),,一半導體基板,其具有暴露出主動區中之該基板 4刀以及經刻劃層開口的一個上覆經刻劃層;該經刻 層具有暴露的邊緣;505995 i號 90111538六、申請專利範圍 b)形成一個閘極氧化層於該被暴露的基板部分; C )形成内間隔物於該經刻劃層所暴露之邊緣上之节鋅 劃層開口中之部分的該閘極氧化層的上方;該::: 物由一個具有第一功函數的肝1材料所組成;以及0 d)形成一個經平坦化的閘電極體於該經刻劃薄層 J餘:分中之該間極氧化層上方,並與該内;;物: 该閘電極由一個具有第二功函數的WF2材料 ,該内間隔物與該閘電極將形成該閘電極。'、 Λ申^厂專利範圍第11項之方法’其中該基板包含形成 4主動區的淺溝渠隔離。 战 13.二請專利範圍第11項之方法,其中該經刻割層由氧 wf材Λ切組成的族群中選擇的—薄層所組成;該 肝1材枓係選自於包含有w、c〇、Ni、Tisi2、、仙 x CoSl 、WN、及TiN 的 έ日魏· 包含W、Ti、、M〇U及該肝2材料係選自於 丄a ίο、及Ai的組群。 化石夕^專利範圍第11項之方法,#中該經刻劃層由氧 WF1材料W組成的族群中選擇的一薄層所組成;該 包人右1χ 、及ΤΐΝχ的組群;以及該WF2材料係選自於 巴3有Ru〇2、及pt的組群。 化石/所^s第11項之方法’其中該經刻劃層由氮 。、、、’該WF1材料為ΠΝΧ ;以及該WF2材料為TaN 16·如申請專利範圍第11項之方法,其中該經刻劃層由氮ΙΡ®ι im 第17頁 505995 - -塞建一 90111538 车月 日 鉻γρ 六、申請專利範圍 "―"' ~' 化矽所組成;該ffF1材料為TiSi2 ;以及該WF2材料為Ru〇 2 ° 17·、如申請專利範圍第u項之方法,其中該閘極氧化層約 為10至50埃厚;該經刻劃層約1 00 0至3000埃厚,並由氮 $石夕所組成;該内間隔物具有約2〇〇至12〇〇埃厚的基座 寬度;以及該閘電極體約1〇〇〇至3〇〇〇埃厚。 1 8 ·、如申請專利範圍第11項之方法,其中該閘極氧化層約 為15至25埃厚;該經刻劃層約1 00 0至3000埃厚,並由氮 化石夕所組成;該内間隔物具有約2〇〇至4〇〇埃厚的基座寬 度;以及該閘電極體約1 5 0 0至2 5 0 0埃厚。 1 9 · 一種用於形成閘電極的方法,包含的步驟有: a) 提供一半導體基板,其具有暴露出主動區中之該基板 部分以及經刻劃層開口的一個上覆經刻劃層;該經刻 wj層具有暴4的邊緣,該基板包含定義該主動區的淺 溝渠隔離; / b) 形成一個閘極氧化層於該被暴露的基板部分; c) 形成内間隔物於該經刻劃層所暴露之邊緣上之該經刻 劃層開口中之部分的該閘極氧化層的上方·,該内間隔 物由一個具有第一功函數的WF 1材料所組成;以及 e)形成一個經平坦化的閘電極體於該經刻劃薄層開口之 其餘部分中之該閘極氧化層上方,並與該内間隔物鄰 接;該閘電極由一個具有第二功函數的評2材料所組 成;該内間隔物與該閘電極將形成該閘電極。 2〇·如申請專利範圍第1 9項之方法,其中該經刻劃層由氧505995 i 號 901六、申請專利範圍 化矽與氮化矽組成的族 WF1材料係選自於包含中選擇的一薄層所組成;該 x、c〇Six,LW C〇、Ni、TlSl2、C 包含TaN、Ti、Ta、MX〇、、,、且群,以及該肝2材料係選自於 2 1.如申請專利範圍第1 9項之方^ ’、且^ 化石夕與氮化♦組成的族群選’-中^刻劃層由氧 WF1材料係選自於 中選。擇的-二層所組成;該 X、CoSi、WN、;5TiM 沾 Co、Nl、TlSl2、WSix、NiSi 包含杨g2、及Pt的組群組群;以及該WF2材料係選自於 22·如申請專利籠圜第iq /1 ^ 項之方法,其中該經刻劃層由氧 wn材料ϋ夕白組成^群中選擇的一薄層所組成;該 =包含有W、C〇、Ni、TiSi2HNiSi x包人τΛχ τ及^比的組群;以及該wf2材料係選自於 包含TaN、Ti、Ta、M〇、及八丨的組群。 化如石夕申利範圍第19項之方法,其中該經刻劃層由氮 化矽所組成;該wn材料為TiNx ;以及該WF2材料為TaN 24‘广中請專利範圍第19項之方法,&中該經刻割層由氮 化矽所組成;該WF1材料為TiSi2 ;以及該WF2材料為Ru〇 2 0 •如申凊專利範圍第1 9項之方法,其中該閘極氧化層約 .、、、10至50埃厚;該經刻劃層約1 00 0至3000埃厚,並由氮 化石夕所組成;該内間隔物具有約2〇〇至12〇〇埃厚的基座 寬度;以及該閘電極體約1 000至3 〇〇〇埃厚。第19頁 505995第20頁
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/768,488 US6300177B1 (en) | 2001-01-25 | 2001-01-25 | Method to form transistors with multiple threshold voltages (VT) using a combination of different work function gate materials |
Publications (1)
Publication Number | Publication Date |
---|---|
TW505995B true TW505995B (en) | 2002-10-11 |
Family
ID=25082636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW090111538A TW505995B (en) | 2001-01-25 | 2001-05-15 | A method to form transistors with multiple threshold voltages (VT) using a combination of different work function gate materials |
Country Status (5)
Country | Link |
---|---|
US (1) | US6300177B1 (zh) |
EP (1) | EP1227521A3 (zh) |
JP (1) | JP2002289852A (zh) |
SG (1) | SG114518A1 (zh) |
TW (1) | TW505995B (zh) |
Families Citing this family (80)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6888198B1 (en) | 2001-06-04 | 2005-05-03 | Advanced Micro Devices, Inc. | Straddled gate FDSOI device |
US6630720B1 (en) * | 2001-12-26 | 2003-10-07 | Advanced Micro Devices, Inc. | Asymmetric semiconductor device having dual work function gate and method of fabrication |
US6664153B2 (en) * | 2002-02-08 | 2003-12-16 | Chartered Semiconductor Manufacturing Ltd. | Method to fabricate a single gate with dual work-functions |
JP2003249647A (ja) * | 2002-02-25 | 2003-09-05 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
US6586808B1 (en) | 2002-06-06 | 2003-07-01 | Advanced Micro Devices, Inc. | Semiconductor device having multi-work function gate electrode and multi-segment gate dielectric |
US7285829B2 (en) * | 2004-03-31 | 2007-10-23 | Intel Corporation | Semiconductor device having a laterally modulated gate workfunction and method of fabrication |
US7547945B2 (en) | 2004-09-01 | 2009-06-16 | Micron Technology, Inc. | Transistor devices, transistor structures and semiconductor constructions |
US7384849B2 (en) | 2005-03-25 | 2008-06-10 | Micron Technology, Inc. | Methods of forming recessed access devices associated with semiconductor constructions |
KR100724563B1 (ko) | 2005-04-29 | 2007-06-04 | 삼성전자주식회사 | 다중 일함수 금속 질화물 게이트 전극을 갖는 모스트랜지스터들, 이를 채택하는 씨모스 집적회로 소자들 및그 제조방법들 |
US7282401B2 (en) | 2005-07-08 | 2007-10-16 | Micron Technology, Inc. | Method and apparatus for a self-aligned recessed access device (RAD) transistor gate |
US7545007B2 (en) | 2005-08-08 | 2009-06-09 | International Business Machines Corporation | MOS varactor with segmented gate doping |
US7867851B2 (en) | 2005-08-30 | 2011-01-11 | Micron Technology, Inc. | Methods of forming field effect transistors on substrates |
US7700441B2 (en) | 2006-02-02 | 2010-04-20 | Micron Technology, Inc. | Methods of forming field effect transistors, methods of forming field effect transistor gates, methods of forming integrated circuitry comprising a transistor gate array and circuitry peripheral to the gate array, and methods of forming integrated circuitry comprising a transistor gate array including first gates and second grounded isolation gates |
US8860174B2 (en) * | 2006-05-11 | 2014-10-14 | Micron Technology, Inc. | Recessed antifuse structures and methods of making the same |
US8008144B2 (en) * | 2006-05-11 | 2011-08-30 | Micron Technology, Inc. | Dual work function recessed access device and methods of forming |
US20070262395A1 (en) | 2006-05-11 | 2007-11-15 | Gibbons Jasper S | Memory cell access devices and methods of making the same |
US7602001B2 (en) | 2006-07-17 | 2009-10-13 | Micron Technology, Inc. | Capacitorless one transistor DRAM cell, integrated circuitry comprising an array of capacitorless one transistor DRAM cells, and method of forming lines of capacitorless one transistor DRAM cells |
US7772632B2 (en) | 2006-08-21 | 2010-08-10 | Micron Technology, Inc. | Memory arrays and methods of fabricating memory arrays |
US7589995B2 (en) | 2006-09-07 | 2009-09-15 | Micron Technology, Inc. | One-transistor memory cell with bias gate |
EP2089898A1 (en) * | 2006-11-06 | 2009-08-19 | Nxp B.V. | Method of manufacturing a fet gate |
US7781288B2 (en) * | 2007-02-21 | 2010-08-24 | International Business Machines Corporation | Semiconductor structure including gate electrode having laterally variable work function |
US7923373B2 (en) | 2007-06-04 | 2011-04-12 | Micron Technology, Inc. | Pitch multiplication using self-assembling materials |
US8003463B2 (en) * | 2008-08-15 | 2011-08-23 | International Business Machines Corporation | Structure, design structure and method of manufacturing dual metal gate Vt roll-up structure |
US7824986B2 (en) * | 2008-11-05 | 2010-11-02 | Micron Technology, Inc. | Methods of forming a plurality of transistor gates, and methods of forming a plurality of transistor gates having at least two different work functions |
US8421162B2 (en) | 2009-09-30 | 2013-04-16 | Suvolta, Inc. | Advanced transistors with punch through suppression |
US8273617B2 (en) | 2009-09-30 | 2012-09-25 | Suvolta, Inc. | Electronic devices and systems, and methods for making and using the same |
US8530286B2 (en) | 2010-04-12 | 2013-09-10 | Suvolta, Inc. | Low power semiconductor transistor structure and method of fabrication thereof |
US8569128B2 (en) | 2010-06-21 | 2013-10-29 | Suvolta, Inc. | Semiconductor structure and method of fabrication thereof with mixed metal types |
US8759872B2 (en) | 2010-06-22 | 2014-06-24 | Suvolta, Inc. | Transistor with threshold voltage set notch and method of fabrication thereof |
US8377783B2 (en) | 2010-09-30 | 2013-02-19 | Suvolta, Inc. | Method for reducing punch-through in a transistor device |
US20120112256A1 (en) * | 2010-11-04 | 2012-05-10 | Globalfoundries Singapore PTE, LTD. | Control gate structure and method of forming a control gate structure |
US8404551B2 (en) | 2010-12-03 | 2013-03-26 | Suvolta, Inc. | Source/drain extension control for advanced transistors |
US8461875B1 (en) | 2011-02-18 | 2013-06-11 | Suvolta, Inc. | Digital circuits having improved transistors, and methods therefor |
US8525271B2 (en) | 2011-03-03 | 2013-09-03 | Suvolta, Inc. | Semiconductor structure with improved channel stack and method for fabrication thereof |
US8400219B2 (en) | 2011-03-24 | 2013-03-19 | Suvolta, Inc. | Analog circuits having improved transistors, and methods therefor |
US8748270B1 (en) | 2011-03-30 | 2014-06-10 | Suvolta, Inc. | Process for manufacturing an improved analog transistor |
US8796048B1 (en) | 2011-05-11 | 2014-08-05 | Suvolta, Inc. | Monitoring and measurement of thin film layers |
US8999861B1 (en) | 2011-05-11 | 2015-04-07 | Suvolta, Inc. | Semiconductor structure with substitutional boron and method for fabrication thereof |
US8811068B1 (en) | 2011-05-13 | 2014-08-19 | Suvolta, Inc. | Integrated circuit devices and methods |
US8569156B1 (en) | 2011-05-16 | 2013-10-29 | Suvolta, Inc. | Reducing or eliminating pre-amorphization in transistor manufacture |
US8735987B1 (en) | 2011-06-06 | 2014-05-27 | Suvolta, Inc. | CMOS gate stack structures and processes |
US8995204B2 (en) | 2011-06-23 | 2015-03-31 | Suvolta, Inc. | Circuit devices and methods having adjustable transistor body bias |
US8629016B1 (en) | 2011-07-26 | 2014-01-14 | Suvolta, Inc. | Multiple transistor types formed in a common epitaxial layer by differential out-diffusion from a doped underlayer |
US8748986B1 (en) | 2011-08-05 | 2014-06-10 | Suvolta, Inc. | Electronic device with controlled threshold voltage |
KR101891373B1 (ko) | 2011-08-05 | 2018-08-24 | 엠아이이 후지쯔 세미컨덕터 리미티드 | 핀 구조물을 갖는 반도체 디바이스 및 그 제조 방법 |
US8614128B1 (en) | 2011-08-23 | 2013-12-24 | Suvolta, Inc. | CMOS structures and processes based on selective thinning |
US8645878B1 (en) | 2011-08-23 | 2014-02-04 | Suvolta, Inc. | Porting a circuit design from a first semiconductor process to a second semiconductor process |
US8713511B1 (en) | 2011-09-16 | 2014-04-29 | Suvolta, Inc. | Tools and methods for yield-aware semiconductor manufacturing process target generation |
US9236466B1 (en) | 2011-10-07 | 2016-01-12 | Mie Fujitsu Semiconductor Limited | Analog circuits having improved insulated gate transistors, and methods therefor |
US8895327B1 (en) | 2011-12-09 | 2014-11-25 | Suvolta, Inc. | Tipless transistors, short-tip transistors, and methods and circuits therefor |
US8819603B1 (en) | 2011-12-15 | 2014-08-26 | Suvolta, Inc. | Memory circuits and methods of making and designing the same |
US8883600B1 (en) | 2011-12-22 | 2014-11-11 | Suvolta, Inc. | Transistor having reduced junction leakage and methods of forming thereof |
US8599623B1 (en) | 2011-12-23 | 2013-12-03 | Suvolta, Inc. | Circuits and methods for measuring circuit elements in an integrated circuit device |
US8877619B1 (en) | 2012-01-23 | 2014-11-04 | Suvolta, Inc. | Process for manufacture of integrated circuits with different channel doping transistor architectures and devices therefrom |
US8970289B1 (en) | 2012-01-23 | 2015-03-03 | Suvolta, Inc. | Circuits and devices for generating bi-directional body bias voltages, and methods therefor |
US9093550B1 (en) | 2012-01-31 | 2015-07-28 | Mie Fujitsu Semiconductor Limited | Integrated circuits having a plurality of high-K metal gate FETs with various combinations of channel foundation structure and gate stack structure and methods of making same |
US9406567B1 (en) | 2012-02-28 | 2016-08-02 | Mie Fujitsu Semiconductor Limited | Method for fabricating multiple transistor devices on a substrate with varying threshold voltages |
US8863064B1 (en) | 2012-03-23 | 2014-10-14 | Suvolta, Inc. | SRAM cell layout structure and devices therefrom |
US9299698B2 (en) | 2012-06-27 | 2016-03-29 | Mie Fujitsu Semiconductor Limited | Semiconductor structure with multiple transistors having various threshold voltages |
US8637955B1 (en) | 2012-08-31 | 2014-01-28 | Suvolta, Inc. | Semiconductor structure with reduced junction leakage and method of fabrication thereof |
US9112057B1 (en) | 2012-09-18 | 2015-08-18 | Mie Fujitsu Semiconductor Limited | Semiconductor devices with dopant migration suppression and method of fabrication thereof |
US9041126B2 (en) | 2012-09-21 | 2015-05-26 | Mie Fujitsu Semiconductor Limited | Deeply depleted MOS transistors having a screening layer and methods thereof |
JP2016500927A (ja) | 2012-10-31 | 2016-01-14 | 三重富士通セミコンダクター株式会社 | 低変動トランジスタ・ペリフェラル回路を備えるdram型デバイス、及び関連する方法 |
US8816754B1 (en) | 2012-11-02 | 2014-08-26 | Suvolta, Inc. | Body bias circuits and methods |
US9093997B1 (en) | 2012-11-15 | 2015-07-28 | Mie Fujitsu Semiconductor Limited | Slew based process and bias monitors and related methods |
US9070477B1 (en) | 2012-12-12 | 2015-06-30 | Mie Fujitsu Semiconductor Limited | Bit interleaved low voltage static random access memory (SRAM) and related methods |
US9568362B2 (en) * | 2012-12-19 | 2017-02-14 | Viavi Solutions Inc. | Spectroscopic assembly and method |
US9112484B1 (en) | 2012-12-20 | 2015-08-18 | Mie Fujitsu Semiconductor Limited | Integrated circuit process and bias monitors and related methods |
US9268885B1 (en) | 2013-02-28 | 2016-02-23 | Mie Fujitsu Semiconductor Limited | Integrated circuit device methods and models with predicted device metric variations |
US8994415B1 (en) | 2013-03-01 | 2015-03-31 | Suvolta, Inc. | Multiple VDD clock buffer |
US8988153B1 (en) | 2013-03-09 | 2015-03-24 | Suvolta, Inc. | Ring oscillator with NMOS or PMOS variation insensitivity |
US9299801B1 (en) | 2013-03-14 | 2016-03-29 | Mie Fujitsu Semiconductor Limited | Method for fabricating a transistor device with a tuned dopant profile |
US9449967B1 (en) | 2013-03-15 | 2016-09-20 | Fujitsu Semiconductor Limited | Transistor array structure |
US9112495B1 (en) | 2013-03-15 | 2015-08-18 | Mie Fujitsu Semiconductor Limited | Integrated circuit device body bias circuits and methods |
US9478571B1 (en) | 2013-05-24 | 2016-10-25 | Mie Fujitsu Semiconductor Limited | Buried channel deeply depleted channel transistor |
US9041060B2 (en) | 2013-07-25 | 2015-05-26 | International Business Machines Corporation | III-V FET device with overlapped extension regions using gate last |
US8976575B1 (en) | 2013-08-29 | 2015-03-10 | Suvolta, Inc. | SRAM performance monitor |
US9710006B2 (en) | 2014-07-25 | 2017-07-18 | Mie Fujitsu Semiconductor Limited | Power up body bias circuits and methods |
US9319013B2 (en) | 2014-08-19 | 2016-04-19 | Mie Fujitsu Semiconductor Limited | Operational amplifier input offset correction with transistor threshold voltage adjustment |
US10037919B1 (en) | 2017-05-31 | 2018-07-31 | Globalfoundries Inc. | Integrated single-gated vertical field effect transistor (VFET) and independent double-gated VFET |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05243564A (ja) * | 1992-02-28 | 1993-09-21 | Sharp Corp | Mosトランジスタ及びその製造方法 |
US5356833A (en) * | 1993-04-05 | 1994-10-18 | Motorola, Inc. | Process for forming an intermetallic member on a semiconductor substrate |
US5447874A (en) | 1994-07-29 | 1995-09-05 | Grivna; Gordon | Method for making a semiconductor device comprising a dual metal gate using a chemical mechanical polish |
JPH08153700A (ja) * | 1994-11-25 | 1996-06-11 | Semiconductor Energy Lab Co Ltd | 導電性被膜の異方性エッチング方法 |
US5576579A (en) | 1995-01-12 | 1996-11-19 | International Business Machines Corporation | Tasin oxygen diffusion barrier in multilayer structures |
KR0147626B1 (ko) | 1995-03-30 | 1998-11-02 | 김광호 | 타이타늄 카본 나이트라이드 게이트전극 형성방법 |
GB9515090D0 (en) * | 1995-07-21 | 1995-09-20 | Applied Materials Inc | An ion beam apparatus |
US5686329A (en) * | 1995-12-29 | 1997-11-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for forming a metal oxide semiconductor field effect transistor (MOSFET) having improved hot carrier immunity |
US5960270A (en) | 1997-08-11 | 1999-09-28 | Motorola, Inc. | Method for forming an MOS transistor having a metallic gate electrode that is formed after the formation of self-aligned source and drain regions |
US5966597A (en) | 1998-01-06 | 1999-10-12 | Altera Corporation | Method of forming low resistance gate electrodes |
KR100273273B1 (ko) * | 1998-01-19 | 2001-02-01 | 김영환 | 반도체소자의배선,반도체소자및그제조방법 |
US6051470A (en) | 1999-01-15 | 2000-04-18 | Advanced Micro Devices, Inc. | Dual-gate MOSFET with channel potential engineering |
TW495980B (en) * | 1999-06-11 | 2002-07-21 | Koninkl Philips Electronics Nv | A method of manufacturing a semiconductor device |
-
2001
- 2001-01-25 US US09/768,488 patent/US6300177B1/en not_active Expired - Lifetime
- 2001-05-15 TW TW090111538A patent/TW505995B/zh not_active IP Right Cessation
-
2002
- 2002-01-08 SG SG200200109A patent/SG114518A1/en unknown
- 2002-01-24 EP EP02368009A patent/EP1227521A3/en not_active Withdrawn
- 2002-01-25 JP JP2002016632A patent/JP2002289852A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2002289852A (ja) | 2002-10-04 |
EP1227521A2 (en) | 2002-07-31 |
SG114518A1 (en) | 2005-09-28 |
EP1227521A3 (en) | 2007-01-24 |
US6300177B1 (en) | 2001-10-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW505995B (en) | A method to form transistors with multiple threshold voltages (VT) using a combination of different work function gate materials | |
TWI252539B (en) | Semiconductor device and manufacturing method therefor | |
KR100515182B1 (ko) | 1t1r 저항성 메모리 어레이의 제조 방법 | |
TWI296831B (en) | Semiconductor devices having nitrogen-incorporated active region and methods of fabricating the same | |
US6770521B2 (en) | Method of making multiple work function gates by implanting metals with metallic alloying additives | |
TW516232B (en) | Structure and process integration for producing transistors having independently adjustable parameters | |
TW201019380A (en) | A novel device scheme of HKMG gate-last process | |
TW200935589A (en) | CMOS semiconductor device and method of manufacturing the same | |
CN101304031B (zh) | 电路结构及其制造方法 | |
JP2009278083A (ja) | 二重仕事関数半導体デバイスの製造方法及びそのデバイス | |
JP2008198935A (ja) | 絶縁ゲート電界効果トランジスタの製造方法。 | |
TW200826169A (en) | Semiconductor device and method for manufacturing same | |
JP2011509523A (ja) | 半導体デバイスを形成する方法 | |
TW201005808A (en) | Structure and method to control oxidation in high-k gate structures | |
TW200935561A (en) | Dual work function semiconductor device and method for manufacturing the same | |
TWI229443B (en) | Semiconductor device with dummy structure | |
TW201013847A (en) | Method of manufacturing semiconductor device and semiconductor device | |
TW200913229A (en) | Semiconductor device and method of manufacturing the same | |
TW201001626A (en) | Semiconductor device and manufacturing method of the same | |
TW201005923A (en) | Dual metal gate structures and methods | |
JP2008124393A (ja) | 半導体装置の製造方法 | |
US8269286B2 (en) | Complementary semiconductor device with a metal oxide layer exclusive to one conductivity type | |
TW201013896A (en) | Semiconductor integrated circuit device | |
TW200847293A (en) | High-k metal gate devices and methods for making the same | |
KR20090042282A (ko) | 반도체 장치 및 그 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4A | Issue of patent certificate for granted invention patent | ||
MM4A | Annulment or lapse of patent due to non-payment of fees |