TW488094B

TW488094B - Manufacturing method and structure of OLED display panel

Info

Publication number: TW488094B
Application number: TW90114594A
Authority: TW
Inventors: Hung-Yi Lin; Tung-Chuan Wu; Bao-Hong Chen
Original assignee: Ind Tech Res Inst
Priority date: 2001-06-15
Filing date: 2001-06-15
Publication date: 2002-05-21

Abstract

There is provided a manufacturing method and structure of OLED display panel, capable of precisely controlling the position, shape and thickness of the organic light emitting layer of each pixel, thereby eliminating the crosstalk problem and increasing the quality and lifetime of OLED display panel. The method comprises forming a plurality of a long-stripe parallel grooves in a substrate by digging, and then filling and plating conductive material in the plurality of grooves to form a plurality of first electrode stripes; forming a recessed matrix on the plurality of first electrode stripes by digging, each recess of the recessed matrix corresponding to a pixel of the display panel; then, filling an organic light emitting layer in the recess to obtain an organic light emitting matrix, wherein the above steps can be repeated three times to obtain red, green and blue organic light emitting matrices, respectively; then, forming a plurality of second electrode stripes on the substrate and the organic light emitting layer, wherein the plurality of second electrode stripes are parallel with a lateral direction for connecting to the organic light emitting layer on the same row, thereby completing a full color OLED display panel.

Description

【發明之應用領域】本舍明係關於一種有機方法，特別是關於一種具有之有機發光二極體顯示面板【發明背景】發光二極體顯示面板及其製造 3-D( 3-dimentionai)微結構 __ t著電子產品不斷朝輕薄短小的趨勢發展，各種平面 ^ =器已逐著取代傳統陰極射線管（CRT)顯示器，而被、甬^在各種領域的顯示裝置上。特別是各種攜帶型的、汛或資訊產品，平面顯示器更是人機溝通不可或缺的介[Application Field of the Invention] The present invention relates to an organic method, and in particular, to an organic light emitting diode display panel having the same. [Background of the Invention] Light emitting diode display panel and its manufacturing 3-D (3-dimentionai) micro Structure __ t electronic products continue to develop toward the trend of light, thin and short. Various flat panel devices have replaced traditional cathode ray tube (CRT) displays one by one, and are used in display devices in various fields. Especially for all kinds of portable, flood or information products, the flat display is an indispensable medium for human-computer communication.

、有機Ιχ光一極體顯示器乃為一種平面顯示器，其具有低壓直流驅動、高應答速度、省電、無視角限制、可全彩 w 芒/乏的使用温度等優點。近年來，有機發光二極顯示為已逐漸成為各大型企業與研究機構競相研究發展的重點之一、。有機發光二極體顯示器乃是直接利用有機發光二極體作為顯示器之每一圖素的發光源，由於有機發光二極體之驅動電壓低、發光電流小故可達到省電的效果。有機發，，極體（〇LED)的基本結構如「第1圖」所示，包括一陽極，’例如I τ 0 ( I n d i u m - T i η - 0 X i d e)透明電極膜，以濺錢或洛鑛方式附著於一玻璃基板1 (或透明塑膠基板）The organic Ιχ light-polarity display is a flat display, which has the advantages of low-voltage DC drive, high response speed, power saving, no viewing angle limitation, full-color w / use temperature, etc. In recent years, organic light-emitting diodes have gradually become one of the focal points for research and development of large enterprises and research institutions. The organic light emitting diode display directly uses the organic light emitting diode as a light source for each pixel of the display. Because the organic light emitting diode has a low driving voltage and a small light emitting current, it can achieve power saving effects. Organic hair, the basic structure of the polar body (〇LED) as shown in "Figure 1", including an anode, 'such as I τ 0 (I ndium-T i η-0 X ide) transparent electrode film to splash money Or luoxite attached to a glass substrate 1 (or transparent plastic substrate)

上。该陽極2上則依序形成有一有機發光層3以及一陰極，^機發光二極體的發光原理，乃是由該陽極2與該陰極、，e 〃、門及電子分別注入該兩電極之間的該有機發光層3，並利用有機分子的激發，而達到發光的功能。其中該有機發光展〇 — 曰由一層以上的有機薄膜所組成，例如可由一電on. An organic light-emitting layer 3 and a cathode are sequentially formed on the anode 2. The light-emitting principle of the organic light-emitting diode is that the anode 2 and the cathode, e 〃, a gate, and electrons are injected into the two electrodes respectively. This organic light-emitting layer 3 uses the excitation of organic molecules to achieve the function of emitting light. The organic light-emitting display is composed of more than one layer of organic thin film.

第5頁 488094 五、發明說明（2) 洞注入層（Hole Injection Layer; HIL)，一電洞傳遞層（Hole Transport Layer; HTL)，一發光層 (Emitting Layer; EL)以及一電子傳遞層（Electr〇nPage 5 488094 V. Description of the Invention (2) Hole Injection Layer (HIL), Hole Transport Layer (HTL), Emitting Layer (EL), and Electron Transfer Layer ( Electr〇n

Transport Layer ; ETL)所組成。除上述膜層外，該有機發光層3亦可視需要包含其它功能的薄膜。一般所習知的有機發光二極體顯示面板的製作方式，是先在一透明美上濺鍍或蒸鍍上一 ιτο薄膜。接著於該IT0薄膜上，二屬遮罩（mask)或微影、蝕刻等製程，將多姑ς铜於該IΤ0薄膜卜，畀你® — μ 句域材料鍍 r 0 取後再条鍍上金屬電極。以此種21 板^二61^10113^)製程所獲得的有機發光二極體干δ 反，例如，PM0LED (靜態矩陣有機發體g、、員不面 =叫不易精確控制每個晝素久：二)顯二面枓層的厚度，而影響到每個晝素的發）、,中有機材漏電流而產生串話（cross ^ 亚且容易因之顯示面板的製程中須的，，。亚且在全彩化為複雜。疋夕-人的育先微影製程，使得製程亦較據此，仍有需要摇Ψ — Ο 的製造方法與結構，以:，新的有機發光二極體面板【發明之目的及概述】决上达問題。本發明的目的，在於揾的製造方法與結構，以解、扣有機發光二極體顯示面顯示面板的串話_ = !統靜態矩陣有機發光二極體本發明的另-個目的程簡單化。、疋k出一種有機發光二極體Transport Layer; ETL). In addition to the above-mentioned film layers, the organic light-emitting layer 3 may also include films having other functions as needed. A conventionally known method of manufacturing an organic light emitting diode display panel is to first sputter or vapor-deposit a thin film on a transparent substrate. Next, on the IT0 film, two processes of masking or lithography, etching, etc. will be used to deposit copper on the ITO film, and you will be plated with r 0 — μ domain material and then plated. Metal electrode. The organic light-emitting diode stem δ inverse obtained by this 21-plate ^ 2 61 ^ 10 113 ^) process, for example, PM0LED (static matrix organic hair body g, face, face = face) is not easy to accurately control each day prime : 2) It shows the thickness of the two-sided sacral layer, which affects the development of each day element.), Cross-talk generated by the leakage of organic materials (cross ^ and easy to be required in the process of display panel manufacturing), And full-color is becoming complicated. Xi Xi-human ancestral lithography process, so that the process is also based on this, there is still a need to shake Ψ 〇 manufacturing methods and structures to :, new organic light-emitting diode panels [Objective and Summary of the Invention] The problem is solved. The purpose of the present invention is to manufacture a method and a structure for tritium, in order to solve the problem of cross-talk of organic light-emitting diode display panel display panel. Polar body Another object of the present invention is to simplify the process. An organic light emitting diode is produced.

第6胃 488094 五、發明說明（3) 顯示面板的製造方法與結構，可精確地控 ;發光層的位置、形狀與厚[以獲得最佳化：二有顯干= :個"，則是提出-種有機發光二極體 ί與結構，可減少有機發光二極體後續 ^ ^的問碭，栓南有機發光二極體顯示面板之良率與使用哥命。為達上述目的，本發明在一基板上（如破璃基板或透明塑膠基板）形成三度空間（3_D)之凹槽結構，例如，、準刀子给射在該基板上挖馨出長條狀之複數個平行溝槽’然後在該複數個溝槽内填鍍導電材料（例如銦錫氧； I T0)而形成複數個第一電極長條。在該複數個第一電極長條上可利用準分子雷射挖鑿出一凹槽矩陣（cavity matrix) ’該凹槽矩陣中的每一凹槽可對應顯示面板之一晝素（p i X e 1 )，如此即在該基板上得三度空間之凹槽結構。然後在該凹槽内填入一有機發光層。藉由在挖鑿該凹槽矩陣的過程中，精確地控製該凹槽矩陣中每一該凹槽的位置、形狀與深度，而可進而精確控制每一晝素之該有機 =光層的位置、形狀與厚度，以滿足所需之最佳條件。利用此方法，不但可獨立區隔每個晝素之有機發光層 =剛LED顯示面板的串話問題，並且由於在有機發光二極體封裝後，佐^ κ 曰「大Ί u^ 傻係破埋於該凹槽内，故可降低因封裝不良所產生的問題，知… _ 他 ^ k幵良率，增加使用壽命。八No. 6 stomach 488094 5. Description of the invention (3) The manufacturing method and structure of the display panel can be accurately controlled; the position, shape and thickness of the light-emitting layer [to obtain the optimization: two have significant dryness =: a ", then It is proposed that a kind of organic light-emitting diode and structure can reduce the subsequent problems of organic light-emitting diodes, and the yield and use of the organic light-emitting diode display panel in the south. In order to achieve the above object, the present invention forms a three-dimensional space (3D) groove structure on a substrate (such as a broken glass substrate or a transparent plastic substrate). The plurality of parallel trenches' are then filled with a conductive material (such as indium tin oxide; I T0) in the plurality of trenches to form a plurality of first electrode strips. A cavity matrix can be excavated on the plurality of first electrode strips by excimer laser excavation. 'Each groove in the groove matrix can correspond to one of the display panels (pi X e 1) In this way, a three-dimensional groove structure is obtained on the substrate. An organic light emitting layer is then filled in the groove. By precisely controlling the position, shape, and depth of each groove in the groove matrix during the process of digging the groove matrix, the position of the organic = light layer of each day element can be accurately controlled. , Shape and thickness to meet the best conditions required. Using this method, not only can the organic light-emitting layer of each day element be separated from the crosstalk problem of the LED display panel, but also because the organic light-emitting diode package, It is buried in the groove, so it can reduce the problems caused by poor packaging, and know that the yield rate is increased and the service life is increased.

488094488094

根板的製發光矩板上，據本發造方法陣，其該複數極長條於該複明所揭露之一 —基板出一凹槽矩陣層，以獲得一以分另j 個第二二電極光層。，係在可包括下列之個溝槽平行於數個溝槽内； ;在該凹槽矩有機發光矩陣形成紅綠藍三色之有電極長條於該基板與長條平行一橫方向，種全彩有上形成紅步驟：形機發光藍綠三成複數一縱方向；形成在該複數陣的凹槽 ;重覆實機發光矩該有機發用以連接個第一内填入施上述陣；以光層上在同~ 種顏色個溝槽複數個電極長一有機諸步驟及’形 ’該複列之該顯示面之有機在該基第一電條上挖發光三次，成複數數個第有機發According to the method of the present invention, the light-emitting rectangular plate of the root plate has a plurality of extremely long strips on one of the substrates disclosed in the Fuming—a groove matrix layer is formed on the substrate to obtain one second j two electrodes. Light layer. The grooves may include the following grooves parallel to a plurality of grooves; an organic light emitting matrix in the grooves forming red, green and blue three-colored electrode strips on the substrate parallel to the strips in a horizontal direction; The steps of forming a red color on the full color are: the shape machine emits blue and green three into a plurality of vertical directions; the grooves formed in the plurality of arrays; the light emitting moment of the solid machine is repeated; ; The organic layer is formed on the light layer with a plurality of electrodes of the same color, a plurality of electrodes, and the organics of the display surface of the plurality of rows are dug and lighted three times on the first electric strip of the base to form a plurality First organic hair

上述方法中形成該複數個溝槽的步驟，槽矩陣的步驟，皆可利用準分子雷射製程及形成該凹數個第一電極長條可由I T0薄膜所構成，其A達成。而該複濺鍍或蒸鍍在該基板上沉積一 IT〇薄膜，再f法上可利用研磨（Chemical Mechanical polishing;施以化學機械該有機發光層可包含複數層之有機材料薄膜CMP)而得。而印刷法（I n k j e t P r i n t i n g)均勻形成於兮、並可利喷墨利用熱蒸鍍法（Thermal Evaporation)再凹槽内，或是In the above method, the steps of forming the plurality of grooves and the steps of the groove matrix can be performed by an excimer laser process and forming the plurality of concave first electrode strips by the I T0 film, which is achieved by A. The multiple sputtering or evaporation deposition of an IT0 film on the substrate, and then f method can be obtained by using chemical mechanical polishing (chemical mechanical polishing; the organic light-emitting layer may include a plurality of layers of organic material film CMP) . The printing method (I n k j e t P r i n t i n g) is uniformly formed on the substrate and can be used to facilitate inkjet printing. The thermal evaporation method is used in the groove, or

研磨（CMP)以形成於該凹槽内。由於本發日配合化學機械需使用製程較為複雜的遮罩對準或是多次的一方法可不程，故可降低製程的複雜性。、汽光微影製 7其它特徵與、π羊細說明。為使對上述本發明的特徵，以及本發明優點有更清楚的暸解，接下來將配合圖示加 488094Grinding (CMP) to form in the groove. As the chemical machinery is required to be used today, a more complex mask alignment process or multiple methods may not be used, so the complexity of the process can be reduced. 、 Vapor lithography system 7 Other features and π sheep detailed description. In order to have a clearer understanding of the features of the present invention and the advantages of the present invention, 488094

五、發明說明（5) 之貫施例外，仍然可不一定完全依實際比但必須先說明的是’本發明除了下述以有其它的實施例，且以下之圖示並例繪製。【實施例詳細說明】根據本發明所揭露的-種全彩有機發光二極體顯示面板的製造方法，可由「第2 A〜2 G」圖來加以說明，其中該全彩有機發光二極體顯示面板含有紅綠藍三色之發光顯^ 陣列。、首先如「弟2 A圖」所示，備妥_其士 j π 」丨用文 I板1 〇，該基板較佳來說可為一透明玻璃基板或是透明塑膠基板。然後如「第 2Β圖」所示，在該基板1 0上挖出長條狀之複數個溝槽1 2。該複數個溝槽1 2皆平行於一縱方向，並且彼此相隔一固定之間距，其中該溝槽1 2之深度例如為3 〇〇〇 X。該複數個溝槽1 2可利用準分子雷射鑿刻之方式來形成。接著，如「第2 C圖」所示，在該複數個溝槽丨2内填滿I Τ 0 ( I n d i u m - T i η - 0 X i d e)透明導電材料，以形成複數個I T 0電極長條1 4。較佳來說，要在該複數個溝槽1 2内填充IΤ 0透明導電材料’可先以錢鑛（Sputtering)或蒸鑛 (Vapor Deposition)法在該基板1〇上沉積一 ΙΤ0膜層，使該I T 0膜層填滿該複數個溝槽1 2。接著再利用化學機械研磨（Chemical Mechanical Polishing; CMP)，將該基板1 0上以及該溝槽丨2頂部多餘的I τ〇膜層磨去。如此，即可在該複數個溝槽1 2内形成該複數個I T0電極長條1 4。接著，如「第2 D圖」所示，形成一凹槽矩陣（c a v i t yV. Explanation of the invention (5) The exceptions to this rule are still not necessarily based on actual ratios, but it must be explained first that the present invention has other embodiments besides the following, and the following diagrams and examples are drawn. [Detailed description of the embodiment] A method for manufacturing a full-color organic light-emitting diode display panel disclosed in accordance with the present invention can be described with reference to the "2A ~ 2G" diagram, in which the full-color organic light-emitting diode The display panel contains red, green and blue light emitting display arrays. First, as shown in "Picture 2 A", prepare _ Qi Shi j π "丨 Article I board 1 〇, the substrate is preferably a transparent glass substrate or a transparent plastic substrate. Then, as shown in FIG. 2B, a plurality of long trenches 12 are dug out from the substrate 10. The plurality of grooves 12 are parallel to a longitudinal direction and are spaced apart from each other by a fixed distance, wherein the depth of the grooves 12 is, for example, 3000 ×. The plurality of grooves 12 can be formed by excimer laser chiseling. Next, as shown in "Figure 2C", the plurality of trenches 2 are filled with I T 0 (I ndium-T i η-0 X ide) transparent conductive material to form a plurality of IT 0 electrode lengths. Article 1 4. Preferably, to fill the plurality of trenches 12 with the ITO 0 transparent conductive material ', a ITO film layer may be deposited on the substrate 10 by a sputtering or vapor deposition method. The IT 0 film layer is filled with the plurality of trenches 12. Then, chemical mechanical polishing (CMP) is used to grind away the excess I το film on the substrate 10 and the top of the grooves 2. In this way, the plurality of I T0 electrode strips 14 can be formed in the plurality of trenches 12. Next, as shown in "Figure 2D", a groove matrix (c a v i t y

488094 五、發明說明（6) mat ix)於該複個17〇電極長條14上。該凹槽矩陣包括尺寸相同的複數個凹槽1 6，以一定之次序規則排列於該複數個 I T 0電極長條1 4上。該凹槽矩陣可利用準分子雷射挖鑿該 I T0電極長條之表面而得。由於準分子雷射鑿刻具有極高的精確性，因而可在挖鑿該I 了〇電極長條1 4以形成該凹槽 1 6的過程中，精確地控制該凹槽丨6的位置、形狀與深度，以滿足最佳化的條件要求。其中該凹槽1 6的深度例如可控制為1 5 0 0 A。然後，如「第2E圖」所示，例如可利用喷墨印刷法、：Inkjet Printing)將一有機發光層20a(例如，紅光有機發光層）均勻地沉積於每一該凹槽1 6内。該有機發光層 2 0並不限定由單一膜層所構成，可依產品的實際需求沉積多層之有機材料薄膜，例如，電洞注入層（ΗIL)、電洞傳遞層（HTL)、發光層（EL)、電子傳遞層（ETL)或其它功能之薄膜。根據本發明亦可利用真空熱蒸鍍 (Thermal evaporation)配合化學機械研磨（CMP)在該凹槽1 6内形成該有機發光層2 0 a。其做法是先以蒸鍍方式在該基板1 0上以及該凹槽丨6同時形成該有機發光層2 0 a，然後再利用化學機械研磨將該基板1 〇上以及該凹槽丨6頂部多餘的有機發光層磨除。於是，即在該基板1 〇上形成一紅光有機發光矩陣。接著，如「第2F圖」所示，藉由重覆上述之諸步驟，熟習該項技術者，當可在該基板1 〇上再分別形成含有綠光有機發光層2 0 b之一綠光有機發光矩陣，以及含有藍光有488094 V. Description of the invention (6) mat ix) On the plurality of 170-electrode strips 14. The groove matrix includes a plurality of grooves 16 of the same size, which are regularly arranged on the plurality of I T 0 electrode strips 14 in a certain order. The groove matrix can be obtained by excavating the surface of the I T0 electrode strip with excimer laser. Since excimer laser chiseling has extremely high accuracy, it is possible to precisely control the position of the groove 6 in the process of digging the electrode strip 14 to form the groove 16 Shape and depth to meet optimal conditions. The depth of the groove 16 can be controlled to be 150 A, for example. Then, as shown in FIG. 2E, an organic light emitting layer 20a (for example, a red organic light emitting layer) can be uniformly deposited in each of the grooves 16 using, for example, inkjet printing: Inkjet Printing. . The organic light emitting layer 20 is not limited to be composed of a single film layer. Multiple layers of organic material films can be deposited according to the actual needs of the product, such as hole injection layer (ΗIL), hole transfer layer (HTL), and light emitting layer ( EL), electron transfer layer (ETL) or other functional thin films. According to the present invention, the organic light emitting layer 20 a can also be formed in the groove 16 by using vacuum thermal evaporation (CMP) and chemical mechanical polishing (CMP). The method is to first form the organic light-emitting layer 20 a on the substrate 10 and the groove 6 by evaporation, and then use chemical mechanical polishing to superimpose the substrate 10 and the groove 6 on the top. The organic light emitting layer was removed. Thus, a red organic light emitting matrix is formed on the substrate 10. Next, as shown in "Figure 2F", by repeating the above steps, those skilled in the art can form a green light containing one of the green light-emitting organic light-emitting layers 2 0 b on the substrate 10 separately. Organic light emitting matrix, as well as containing blue light there

第]0頁根據本發明結構，不但可避 PMOLED)因平 crosstalk) < 而以較為簡單化置、形狀與深度置、形狀與厚度該有機發光層是 -光二極體在封有機發光二極體以上所述者非用來限定本發本發明之精神下不僅限於全彩之用於單色或多彩明申請專利範圍範圍所涵蓋。 488094 五、發明說明（7) 機發光層2 0 c之一藍光有機發光矩陣。然後’如「第2 G圖」所示，形成複數個金屬電極長條 2 2於該基板1 0與該有機發光層2 〇 a、2 0 b、2 0 c上。該複數個金屬電極長條2 2平行一橫方向，用以連接同一列之該有機發光層20a、20b、20e。【達成之功效】之有機發光二極體顯示面板的製造方法與免傳統靜態矩陣有機發光二極體顯示器面有機發光層漏電而產生的串話問題並且可免除複雜的遮罩（mask)製程，的製程方式，藉由精確控制該凹槽的位進而控制每一晝素之該有機發光層的位而彳于到高品質的顯示效果。另外，由於被形成於該凹槽内，如此有利於降低有梢裝f的問題’可達到較佳的封裝效果提高之品質與壽命。 ’僅為本發明其中的較佳實施例而已，里 I施範圍，熟習該項技術者在不脫_ 當可做適當之修改與潤飾，例如本發明孟有機發光二極體顯示面板，本發明亦可塌有機發光二極體顯示面板；故凡依本潑所作的均等變化與修飾，皆為本發明專禾Page] 0 According to the structure of the present invention, not only PMOLED can be avoided because of flat crosstalk) < but in a relatively simple arrangement, shape and depth, shape and thickness, the organic light emitting layer is a photodiode sealing organic light emitting diode The above is not intended to limit the spirit of the present invention and is not limited to the scope of patent application for full color for single color or colorful application. 488094 V. Description of the invention (7) One of the organic light emitting layers 20 c of blue light organic light emitting matrix. Then, as shown in the "2G drawing", a plurality of metal electrode strips 22 are formed on the substrate 10 and the organic light-emitting layers 20a, 20b, and 20c. The plurality of metal electrode strips 22 are parallel to a horizontal direction and are used to connect the organic light emitting layers 20a, 20b, 20e in the same row. [Achieved effect] The manufacturing method of the organic light emitting diode display panel and the crosstalk problem caused by the leakage of the organic light emitting layer of the traditional static matrix organic light emitting diode display surface can be avoided, and the complicated mask process can be eliminated. In the manufacturing method, high-quality display effects are achieved by precisely controlling the positions of the grooves and thus the positions of the organic light-emitting layer of each day element. In addition, since it is formed in the groove, it is advantageous to reduce the problem of the pin mounting f ', and it is possible to achieve better quality and longer life of the package. 'It is only the preferred embodiment of the present invention. The scope of the present invention is not limited to those skilled in the art. When appropriate modifications and retouching can be made, such as the organic light-emitting diode display panel of the present invention, the present invention Organic light-emitting diode display panels can also be collapsed; therefore, all equal changes and modifications made according to the present invention are the subject of this invention.

488094 圖式簡單說明【圖式簡單說明】第1圖，為習知之有機發光二極體之基本結構的剖面圖。第2 A〜2 G圖，繪示根據本發明之一種有機發光二極體顯示面板製造方法實施例之流程圖，其中：第2A圖，繪示一基板。第2 B圖，繪示該基板上形成有複數個溝槽。第2 C圖，繪示複數個第一電極長條形成於該複數個溝槽内。第2 D圖，包括該基板之立體圖以及一 A-A ’方向之剖面圖’ 該基板上形成有一凹槽矩陣。第2 E圖，繪示在該凹槽矩陣之每一凹槽内形成有一有機發光層。第2 F圖，繪示在該基板上形成有三種不同顏色之有機發光矩陣。第2 G圖，繪示在該基板以及該有機發光層上形成有複數個第二電極長條，以連接在同一列之該有機發光〇【圖式符號說明】 1 玻璃基板 2 陽極 3 有機發光層 4 陰極 10 基板 12 溝槽488094 Schematic illustration [Schematic description] Figure 1 is a cross-sectional view of the basic structure of a conventional organic light emitting diode. Figures 2A to 2G show a flowchart of an embodiment of a method for manufacturing an organic light emitting diode display panel according to the present invention, wherein: Figure 2A shows a substrate. FIG. 2B shows a plurality of trenches formed on the substrate. Fig. 2C shows that a plurality of first electrode strips are formed in the plurality of grooves. Figure 2D includes a perspective view of the substrate and a cross-sectional view in the direction of A-A '. The substrate is formed with a matrix of grooves. FIG. 2E shows that an organic light emitting layer is formed in each groove of the groove matrix. Figure 2F shows organic light-emitting matrices of three different colors formed on the substrate. Figure 2G shows that a plurality of second electrode strips are formed on the substrate and the organic light-emitting layer to connect the organic light emission in the same column. [Illustration of Symbols] 1 Glass substrate 2 Anode 3 Organic light emission Layer 4 cathode 10 substrate 12 groove

第12頁 488094 圖式簡單說明 14 I TO電極長條 16 凹槽 2 0a 紅光有機發光層 2 0b 綠光有機發光層 2 0c 藍光有機發光層 2 2 金屬電極長條Page 12 488094 Brief description of drawings 14 I TO electrode strip 16 Groove 2 0a Red organic light emitting layer 2 0b Green organic light emitting layer 2 0c Blue organic light emitting layer 2 2 Metal electrode long strip

I ΛI Λ

第13頁Page 13

Claims

^〇〇uy4 1 — /種有機發光二極體顯示面板的製造方法，在一基板上形成一發光顯示陣列至少包含下列步驟：形成複數個溝槽在該基板上，該複數個溝槽平行於一縱方向；形成複數個第一電極長條於該複數個溝槽内；在該複數個第一電極長條上挖出一凹槽矩陣；在該凹槽矩陣的凹槽内填入一有機發光層，以形成一有機發光矩陣；以及形成複數個第二電極長條於該基板與該有機發光層上’該複數個第二電極長條平行一橫方向，用以連 4 接同一列之該有機發光層。 2 ·如申请專利範圍第1項所述之有機發光二極體顯示面板的製造方法，其中該基板為透明塑膠基板。 3 ·如申請專利範圍第1項所述之有機發光二極體顯示面板的製造方法，其中該基板為玻璃基板。 4 ·如申請專利範圍第1項所述之有機發光二極體顯示面板的製造方法，其中該第一電極長條由丨τ〇 (Indium-Tin-Oxide)薄膜所構成。 5 ·如申請專利範圍第1項所述之有機發光二極體顯示面板的製造方法，係利用準分子電射在該基板上挖出該個溝槽。夂莜-隊 6·如申請專利範圍第1項所述之有機發光二極體顯示面的製造方去，係利用準分子電射在該複數個第一電極條上挖出該凹槽矩陣。 °長^ 〇〇uy4 1 — / A method for manufacturing an organic light emitting diode display panel, forming a light emitting display array on a substrate includes at least the following steps: forming a plurality of grooves on the substrate, the plurality of grooves parallel to A longitudinal direction; forming a plurality of first electrode strips in the plurality of grooves; digging out a groove matrix on the plurality of first electrode strips; filling an organic in the grooves of the groove matrix A light-emitting layer to form an organic light-emitting matrix; and forming a plurality of second electrode strips on the substrate and the organic light-emitting layer. The plurality of second electrode strips are parallel to a horizontal direction for connecting 4 to the same row. The organic light emitting layer. 2. The method for manufacturing an organic light emitting diode display panel according to item 1 of the scope of patent application, wherein the substrate is a transparent plastic substrate. 3. The method for manufacturing an organic light emitting diode display panel according to item 1 of the scope of patent application, wherein the substrate is a glass substrate. 4. The method for manufacturing an organic light emitting diode display panel according to item 1 of the scope of the patent application, wherein the first electrode strip is composed of a ττ (Indium-Tin-Oxide) film. 5. The method for manufacturing an organic light emitting diode display panel according to item 1 of the scope of patent application, wherein excavation of the groove on the substrate is performed by excimer electron beam.夂莜 -Team 6. The manufacturing method of the organic light-emitting diode display surface described in item 1 of the scope of the patent application is to excavate the groove matrix on the plurality of first electrode bars by using excimer electron beams. ° Long

488094 六、申請專利範圍 7 ·如申請專利範圍第1項所述之有機發光二極體顯示面板的製ie方法，其中該第二電極長條由金屬膜層所構成。 8 ·如申請專利範圍第1項所述之有機發光二極體顯示面板的製造方法’其中該有機發光層包括複數層有機薄膜。 9 ·如申請專利範圍第1項所述之有機發光二極體顯示面板的製造方法’其中該形成複數個第一電極長條於該複數 ’ 個溝槽内的步驟，包括： - 沉積一 IT0( Lndium-Tin-Oxide)薄膜在該基板上，該I T0薄膜並填滿該複數個溝槽；以及利用化學機械研磨（CMP)將該基板表面以及超出該 | 溝槽頂部的I T0薄膜去除。 1 0 .如申請專利範圍第1項所述之有機發光二極體顯示面板的製造方法’係利用喷墨印刷法（ink printing) 在每一該凹槽内形成該有機發光層。 1 1 ·如申請專利範圍第1項所述之有機發光二極體顯示面板的‘ie方法其中該在每一該凹槽内形成有機發光層的步驟，包括：以熱蒸鏡法（thermal evap〇rati〇n)在該基板上形成一有機發光層，該有機發光層旅填滿該凹槽；以及 * 利用化學機械研磨（CMP)將該基板表面以及超出該凹槽頂部的有機發光層去除。 1 2 · —種有機發光二極體顯示面板的製造方法，在一基板上形成一全彩之發光顯示陣列至少包含下列步驟··488094 6. Scope of patent application 7 · The method for manufacturing an organic light emitting diode display panel as described in item 1 of the scope of patent application, wherein the second electrode strip is composed of a metal film layer. 8. The method of manufacturing an organic light emitting diode display panel according to item 1 of the scope of patent application, wherein the organic light emitting layer includes a plurality of organic thin films. 9 · The method for manufacturing an organic light emitting diode display panel according to item 1 of the scope of the patent application, wherein the step of forming a plurality of first electrode strips in the plurality of grooves includes:-depositing an IT0 (Lndium-Tin-Oxide) film on the substrate, the I T0 film and filling the plurality of trenches; and removing the surface of the substrate and the I T0 film beyond the top of the trench by chemical mechanical polishing (CMP) . 10. The method for manufacturing an organic light emitting diode display panel according to item 1 of the scope of the patent application is to use ink printing to form the organic light emitting layer in each of the grooves. 1 1 The 'ie method of an organic light emitting diode display panel according to item 1 of the scope of patent application, wherein the step of forming an organic light emitting layer in each of the grooves includes: using a thermal evap method 〇rati〇n) forming an organic light-emitting layer on the substrate, the organic light-emitting layer filling the groove; and * removing the surface of the substrate and the organic light-emitting layer beyond the top of the groove by chemical mechanical polishing (CMP) . 1 2 · A method for manufacturing an organic light emitting diode display panel, forming a full-color light emitting display array on a substrate includes at least the following steps ··

第15頁 488094 六、申請專利範圍形成複數個溝槽在該基板上，該複數個溝槽平行於一縱方向；形成複數個第一電極長條於該複數個溝槽内；在該複數個第一電極長條上挖出一凹槽矩陣；在該凹槽矩陣的凹槽内填入一有機發光層，以獲得一有機發光矩陣； - 重覆實施上述諸步驟三次，以分別形成紅綠藍三色之有機發光矩陣；以及形成複數個第二電極長條於該基板與該有機發光層上，該複數個第二電極長條平行一橫方向，用以連接在同一列之該有機發光層。 Μ 1 3 .如申請專利範圍第1 2項所述之有機發光二極體顯示面板的製造方法，其中該基板為透明塑膠基板。 1 4 .如申請專利範圍第1 2項所述之有機發光二極體顯示面板的製造方法，其中該基板為玻璃基板。 1 5 .如申請專利範圍第1 2項所述之有機發光二極體顯示面板的製造方法，其中該第一電極長條由ΙΤ0 (Indium-Tin-Oxide)薄膜所構成。 1 6 .如申請專利範圍第1 2項所述之有機發光二極體顯示面板的製造方法，係利用準分子電射在該基板上挖出該複 __ 數個溝槽。 1 7.如申請專利範圍第1 2項所述之有機發光二極體顯示面板的製造方法，係利用準分子電射在該複數個第一電極長條上挖出該凹槽矩陣。Page 15 488094 VI. The scope of the patent application forms a plurality of grooves on the substrate, the plurality of grooves are parallel to a longitudinal direction; a plurality of first electrode strips are formed in the plurality of grooves; in the plurality of A groove matrix is dug out from the first electrode strip; an organic light emitting layer is filled in the grooves of the groove matrix to obtain an organic light emitting matrix;-the above steps are repeated three times to form red and green, respectively An organic light emitting matrix of three blue colors; and forming a plurality of second electrode strips on the substrate and the organic light emitting layer, the plurality of second electrode strips being parallel to a horizontal direction for connecting the organic light emitting elements in the same row Floor. M 1 3. The method for manufacturing an organic light emitting diode display panel as described in item 12 of the scope of patent application, wherein the substrate is a transparent plastic substrate. 14. The method for manufacturing an organic light emitting diode display panel according to item 12 of the scope of patent application, wherein the substrate is a glass substrate. 1 5. The method for manufacturing an organic light emitting diode display panel according to item 12 of the scope of patent application, wherein the first electrode strip is composed of an ITO (Indium-Tin-Oxide) film. 16. The method for manufacturing an organic light emitting diode display panel as described in item 12 of the scope of the patent application, wherein excavation of the plurality of grooves on the substrate by excimer electron beams is performed. 1 7. The method for manufacturing an organic light emitting diode display panel as described in item 12 of the scope of the patent application, wherein excavation of the groove matrix is performed on the plurality of first electrode strips by excimer electron beams.

第16頁 "+〇δϋ^4 、申請專利範丨 1 8 由 •曱請專利範圍第1 2項所述之有機發光二極體顯示面板的製造方法，其中該第二電極長條由金屬膜層所構成。 1 9 · ^申請專利範圍第1 2項所述之有機發光二極體顯示面板的製造方法，其中該有機發光層包括複數層有機薄 2 Q · %申請專利範圍第1 2項所述之有機發光二極體顯示面板的製造方法，其中該形成複數個第一電極長條於該複數個溝槽内的步驟，包括；Page 16 " + 〇δϋ ^ 4, patent application range 1 1 8 The manufacturing method of the organic light emitting diode display panel described in item 12 of the patent scope, wherein the second electrode strip is made of metal Film layer. 1 9 · ^ The method for manufacturing an organic light emitting diode display panel described in item 12 of the scope of patent application, wherein the organic light emitting layer includes a plurality of organic thin layers 2 Q ·% The method for manufacturing a light emitting diode display panel, wherein the step of forming a plurality of first electrode strips in the plurality of grooves includes:

〉儿積一 ITO( Indium-Tin-Oxide)薄膜在該基板上，該I TO薄膜並填滿該複數個溝槽；以及利用化學機械研磨（CMP)將該基板表面以及超出該溝槽頂部的IT0薄膜去除。 Ο 1 •如申請專利範圍第1 2項所述之有機發光二極體顯示面板的製造方法，係利用喷墨印刷法（i n k j e t p r i n t i n g ^在每一該凹槽内形成該有機發光層。 2 2 ·如申請專利範圍第1 2項所述之有機發光二極體顯示面才反的製造方法，其中該在每一該凹槽内形成有機發光層的步驟，包括：〉 An ITO (Indium-Tin-Oxide) film is on the substrate, the I TO film fills the plurality of trenches; and the surface of the substrate and the top of the trenches are topped by chemical mechanical polishing (CMP). IT0 film removed. Ο 1 • The method for manufacturing an organic light emitting diode display panel as described in item 12 of the scope of patent application, which uses inkjet printing (inkjetprinting) to form the organic light emitting layer in each of the grooves. 2 2 · The manufacturing method of the organic light-emitting diode display surface described in item 12 of the scope of patent application, wherein the step of forming an organic light-emitting layer in each of the grooves includes:

以熱蒸鍍法（thermal evaporation)在該基板上形成一有機發光層，該有機發光層並填滿該凹槽；以及利用化學機械研磨（CMP)將該基板表面以及超出該凹槽頂部的有機發光層去除。An organic light-emitting layer is formed on the substrate by thermal evaporation, and the organic light-emitting layer fills the groove; and the surface of the substrate and organics beyond the top of the groove are formed by chemical mechanical polishing (CMP). The luminescent layer is removed.

第17頁 488094 六、申請專利範圍 2 3. —種有機發光二極體顯示面板的結構，至少包含：一基板，其上形成有複數個溝槽，該複數個溝槽平行於一縱方向；複數個第一電極長條，填充於該複數個溝槽内；一凹槽矩陣，形成於該複數個第一電極長條上，該凹槽矩陣的凹槽内並填充有一有機發光層；以及複數個第二電極長條’形成於該基板與該有機發光層上，該複數個第二電極長條平行一橫方向，用以連接在同一列之該有機發光層。 2 4.如申請專利範圍第2 3項所述之有機發光二極體顯示面板的結構，其中該基板為透明塑膠基板。 2 5 .如申請專利範圍第2 3項所述之有機發光二極體顯示面板的結構，其中該基板為玻璃基板。 2 6 .如申請專利範圍第2 3項所述之有機發光二極體顯示面板的結構，其中該第一電極長條由I T0 (Indium-Tin-Oxide)薄膜所構成。 2 7 .如申請專利範圍第2 3項所述之有機發光二極體顯示面板的結構，其中該第二電極長條由金屬膜層所構成。 2 8 .如申請專利範圍第2 3項所述之有機發光二極體顯示面板的結構，其中該有機發光層包括複數層有機薄膜。Page 17 488094 VI. Patent application scope 2 3. A structure of an organic light-emitting diode display panel, at least comprising: a substrate having a plurality of grooves formed thereon, the plurality of grooves being parallel to a longitudinal direction; A plurality of first electrode strips are filled in the plurality of grooves; a groove matrix is formed on the plurality of first electrode strips, and the grooves of the groove matrix are filled with an organic light emitting layer; and A plurality of second electrode strips are formed on the substrate and the organic light-emitting layer, and the plurality of second electrode strips are parallel to a horizontal direction for connecting the organic light-emitting layers in the same row. 2 4. The structure of the organic light emitting diode display panel according to item 23 of the scope of patent application, wherein the substrate is a transparent plastic substrate. 25. The structure of the organic light emitting diode display panel according to item 23 of the scope of patent application, wherein the substrate is a glass substrate. 26. The structure of the organic light emitting diode display panel according to item 23 of the scope of patent application, wherein the first electrode strip is composed of an I T0 (Indium-Tin-Oxide) film. 27. The structure of the organic light emitting diode display panel according to item 23 of the scope of patent application, wherein the second electrode strip is composed of a metal film layer. 28. The structure of the organic light emitting diode display panel according to item 23 of the scope of patent application, wherein the organic light emitting layer includes a plurality of organic thin films.

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