TW481352U - Pressure control device of manufacturing chamber - Google Patents

Pressure control device of manufacturing chamber

Info

Publication number
TW481352U
TW481352U TW89222781U TW89222781U TW481352U TW 481352 U TW481352 U TW 481352U TW 89222781 U TW89222781 U TW 89222781U TW 89222781 U TW89222781 U TW 89222781U TW 481352 U TW481352 U TW 481352U
Authority
TW
Taiwan
Prior art keywords
control device
pressure control
manufacturing chamber
chamber
manufacturing
Prior art date
Application number
TW89222781U
Other languages
Chinese (zh)
Inventor
Kuen-Sz Lin
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW89222781U priority Critical patent/TW481352U/en
Publication of TW481352U publication Critical patent/TW481352U/en

Links

TW89222781U 2000-12-29 2000-12-29 Pressure control device of manufacturing chamber TW481352U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW89222781U TW481352U (en) 2000-12-29 2000-12-29 Pressure control device of manufacturing chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW89222781U TW481352U (en) 2000-12-29 2000-12-29 Pressure control device of manufacturing chamber

Publications (1)

Publication Number Publication Date
TW481352U true TW481352U (en) 2002-03-21

Family

ID=21676692

Family Applications (1)

Application Number Title Priority Date Filing Date
TW89222781U TW481352U (en) 2000-12-29 2000-12-29 Pressure control device of manufacturing chamber

Country Status (1)

Country Link
TW (1) TW481352U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108493089A (en) * 2018-05-23 2018-09-04 武汉华星光电技术有限公司 Flow distributor and dry etching apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108493089A (en) * 2018-05-23 2018-09-04 武汉华星光电技术有限公司 Flow distributor and dry etching apparatus

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004