TW481352U - Pressure control device of manufacturing chamber - Google Patents
Pressure control device of manufacturing chamberInfo
- Publication number
- TW481352U TW481352U TW89222781U TW89222781U TW481352U TW 481352 U TW481352 U TW 481352U TW 89222781 U TW89222781 U TW 89222781U TW 89222781 U TW89222781 U TW 89222781U TW 481352 U TW481352 U TW 481352U
- Authority
- TW
- Taiwan
- Prior art keywords
- control device
- pressure control
- manufacturing chamber
- chamber
- manufacturing
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW89222781U TW481352U (en) | 2000-12-29 | 2000-12-29 | Pressure control device of manufacturing chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW89222781U TW481352U (en) | 2000-12-29 | 2000-12-29 | Pressure control device of manufacturing chamber |
Publications (1)
Publication Number | Publication Date |
---|---|
TW481352U true TW481352U (en) | 2002-03-21 |
Family
ID=21676692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW89222781U TW481352U (en) | 2000-12-29 | 2000-12-29 | Pressure control device of manufacturing chamber |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW481352U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108493089A (en) * | 2018-05-23 | 2018-09-04 | 武汉华星光电技术有限公司 | Flow distributor and dry etching apparatus |
-
2000
- 2000-12-29 TW TW89222781U patent/TW481352U/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108493089A (en) * | 2018-05-23 | 2018-09-04 | 武汉华星光电技术有限公司 | Flow distributor and dry etching apparatus |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4K | Issue of patent certificate for granted utility model filed before june 30, 2004 |