TW478974B - Device for and method of producing/supplying dry ice snow, cleaning device and cleaning method - Google Patents

Device for and method of producing/supplying dry ice snow, cleaning device and cleaning method Download PDF

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Publication number
TW478974B
TW478974B TW89120754A TW89120754A TW478974B TW 478974 B TW478974 B TW 478974B TW 89120754 A TW89120754 A TW 89120754A TW 89120754 A TW89120754 A TW 89120754A TW 478974 B TW478974 B TW 478974B
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Taiwan
Prior art keywords
snow
dry ice
gas
spray
scope
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TW89120754A
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Chinese (zh)
Inventor
Shoji Sekihara
Hidetoshi Ota
Hironori Ooka
Kimiaki Yonetani
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Nippon Oxygen Co Ltd
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Priority claimed from JP29169699A external-priority patent/JP4414522B2/en
Priority claimed from JP36848799A external-priority patent/JP4376392B2/en
Priority claimed from JP2000077048A external-priority patent/JP3457616B2/en
Priority claimed from JP2000241622A external-priority patent/JP4578644B2/en
Application filed by Nippon Oxygen Co Ltd filed Critical Nippon Oxygen Co Ltd
Application granted granted Critical
Publication of TW478974B publication Critical patent/TW478974B/en

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Abstract

This invention provides a device and method for producing/supplying dry ice capable of producing and supplying dry ice snow in a stable state. This method for supplying dry ice snow is to connect a high pressure gas vessel filled with a booster gas to a liquefied carbon dioxide storage vessel, install a temperature controlling device, maintain a constant pressure by raising pressure to a predetermined pressure with the booster gas, control the storage vessel in a temperature for keeping carbon dioxide under the constant pressure to be in a liquid state, feed the liquefied carbon dioxide in the storage vessel to a throttle nozzle unit through a shut off valve and generate and supply dry ice snow through adiabatic expansion at the throttle nozzle unit. Moreover, adjusting pipe length, concurrently injecting booster gas dry ice injection flow surrounding area and having conical shape injection nozzle and also flat side gap recess, flow rate and pressure of the injection gas can be altered. Intermittent or continuous supply of heated and ionized dry ice is provided to the injection nozzle to clean the target article.

Description

478974 6425pif.d〇c/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（(） 發盟領域 本發明是關於雪狀乾冰（以下稱之爲乾冰雪）之製造方 法’且特別是有關於一種乾冰雪產生供給裝置與產生供，給 方法以及洗淨裝置與洗淨方法。 關於本發明所使用之乾冰雪洗淨方法以及乾冰_丨先、淨 裝置，使液化碳酸氣絕熱膨脹產生乾冰雪，並且有效率的 開始使用安定供給之乾冰雪。爲了除去例如複印機之循環 零件、半導體晶圓（蝕刻時之殘渣）、半導體檢查裝置以及 其零件、電路板、MR頭（光碟讀取裝置）' 塑化成形之殘 渣以及精密零件等所附著之有機物、酸、碳化氫、金屬薄 膜或微粒子。而提出一種噴射乾冰雪洗淨方法以及此洗淨 方法所使用之洗淨裝置。 發明背景 爲了除去半導體晶圓、電路板、MR頭、塑化成形之 殘渣以及精密零件等所附著之有機物、酸、碳化氫以及微 粒子，進行朝向欲處理之表面噴射乾冰雪之乾冰雪噴射式 洗淨方法，或更進一步壓縮乾冰雪而形成小球狀之球狀乾 冰（以下稱爲乾冰球），並且廣泛的利用這種彈九材料作爲 乾冰式噴九處理。上述之乾冰雪或乾冰球也可當作冷凍劑 而有效的活用。 習知乾冰雪1^之生產裝置如第18圖中所圖示，先把 加壓塡充於液化碳酸氣儲藏容器51中之液化碳酸氣TY經 由導管52導出，接著通過原料閥V!以及可以適時的開關 例如是電磁閥之開關閥V2，最後供給至例如針形閥之節流 4 -----N------裝 (請先閱讀背面之注意事項再填寫本頁)478974 6425pif.d〇c / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (() Alliance Field The present invention relates to a method for manufacturing snow-like dry ice (hereinafter referred to as dry ice and snow). In particular, it relates to a dry ice and snow generating and supplying device, a generating and supplying method, and a washing device and a washing method. About the dry ice and snow washing method and dry ice used in the present invention, the liquefied carbonic acid gas is absolutely eliminated. Thermal expansion produces dry ice and snow, and the stable supply of dry ice and snow is used efficiently. In order to remove circulating parts such as photocopiers, semiconductor wafers (residues during etching), semiconductor inspection devices and their parts, circuit boards, MR heads (CD-ROM reading (Take device) 'Plasticized residues and organic matter, acids, hydrocarbons, metal films, or fine particles attached to precision parts, etc., and a method for cleaning by spraying dry ice and snow, and a cleaning device used in this method are proposed. Background In order to remove semiconductor wafers, circuit boards, MR heads, plasticized residues, and precision parts, etc. Organic matter, acids, hydrocarbons, and fine particles are subjected to a dry ice and snow spray type washing method that sprays dry ice and snow toward the surface to be treated, or further compresses dry ice and snow to form small spherical dry ice (hereinafter referred to as dry ice ball), And this bomb material is widely used as a dry ice spray nine treatment. The above dry ice snow or dry ice ball can also be effectively used as a refrigerant. Known dry ice snow 1 ^ production equipment is shown in Figure 18, The liquefied carbon dioxide gas TY charged in the liquefied carbon dioxide gas storage container 51 is first led out through the conduit 52, then passed through the raw material valve V! And the on-off valve V2, which can be opened and closed in time, for example, a solenoid valve, and finally supplied to, for example, a needle shape. Valve Throttling 4 ----- N ------ Installation (Please read the precautions on the back before filling this page)

•B I MB Μ·· I 訂--------- > (210x297 公釐） 478974 B7 6425pif.doc/008 五、發明說明（>/) (請先閱讀背面之注意事項再填寫本頁) 噴頭機構53，在節流噴頭機構53之液化碳酸氣因爲絕 熱膨脹而形成乾冰雪Ts，並經由管54導出而開始供給使 用乾冰雪Ts。此時液化狀態之液化碳酸氣供給至上述 之節流噴頭機構53。但是在節流噴頭機構53中，因爲液 化碳酸氣1^絕熱膨脹生成乾冰雪Ts而使得壓力下降，使 液化碳酸氣TY無法在較高壓力之狀態下維持供給，能夠 生成乾冰雪Ts。 例如2MPa壓力之液化碳酸氣ΊΥ在節流噴頭裝置53 中絕熱膨脹至OMPa(大氣壓)壓力，乾冰雪Ts生產率爲40% 左右。而6MPa壓力之液化碳酸氣TY在節流噴頭裝置53 中絕熱膨脹至〇 MPa之壓力，乾冰雪Ts生產率爲30%左 右。此外，在上述之壓力下保持液化碳酸氣IY爲液化狀 態，2MPa壓力必須要以-20°C之溫度冷卻，6MPa壓力必 須要保持20°C以下之溫度。而且一定要保持液化碳酸氣ΐγ 爲液化狀態。 經濟部智慧財產局員工消費合作社印製 因此，爲了提高被洗淨物之洗淨效率，而採用例如約 6MPa之壓力以及保持溫度在20°C左右。然而壓力與溫度 狀態是在能夠保持液化碳酸氣爲液化狀態之範圍中，採用 適當之選擇。又較佳的是常溫的近似値爲20°C之溫度。 如此，乾冰雪Ts是在節流噴頭機構53中，以高壓液 化碳酸氣ΊΥ絕熱膨脹至大氣壓下（OMPa)而產生的。然而， 在進行持續生產供給乾冰雪Ts期間，液化碳酸氣儲藏容 器51中之壓力逐漸降低，造成乾冰雪1^噴射至被洗淨物 之噴射力降低，而使洗淨效果降低。 5 ^紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐1 ' 478974 A7 B7 6425pif.doc/008 五、發明說明（弋） 同時，例如實開平第3-7984號公報所揭露之洗淨裝 置爲使液化碳酸氣絕熱膨脹而產生乾冰雪，並把乾冰雪噴 射至被洗淨面上，用以除去被洗淨面上之有機物、酸、碳 化氫以及其他不純物之裝置。在此裝置中，爲了防止洗淨 時乾冰雪冷卻被洗淨面而形成水分、有機物之凝縮液，使 用紅外線燈#裝置進行加熱，維持被洗淨面在例如20°C左 右之溫度下，進行有效率的洗淨作業。 但是於此裝置中，節流機構之針形閥與洗淨噴頭（或 噴出口）附近之洗淨力較差。 因爲液化碳酸氣具有約-80°C之溫度，所以在上述之 洗淨裝置中進行連續洗淨之情況下，會降低洗淨周圍大氣 之溫度，同時也會降低被洗淨物之溫度，造成空氣中之水 分結露而附著或酸化被洗淨物之結果，並使被洗淨物造成 損壞而可能無法使用。其結果揭示在實開平第3-7948號 之微影片中，必需對被洗淨物進行處理，而在被洗淨物附 近控制被洗淨物之溫度。亦即被洗淨物附近需要設置幾種 溫度控制設備，而限制洗淨作業場所，洗淨作業須配置於 限制特定場所才適合。 關於使用乾冰雪除去或洗淨鋼板之尺度以及使用乾冰 球噴射槍之設計，揭示在例如實開平第5-49258號公報中。 在液化碳酸氣與噴射槍之間配置微小之銳孔，使液化碳酸 氣在通過此微小之銳孔時產生絕熱膨脹，而形成乾冰雪生 成系統。此乾冰雪生成系統並包括其他系統，例如是在噴 射槍中之二重管構造供給氮氣而配置之氮氣系統。由此氮 6 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) !-訂·！ ί ! ! · 經濟部智慧財產局員工消费合作社印製 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消费合作社印製 五、發明說明（W) 氣之壓力，使上述之乾冰雪生成系統經由控制壓力而加速 產生之乾冰雪，作爲乾冰雪噴射被洗淨面之構造。 但是，乾冰雪生成系統、氮氣供給系統是個別配置噴 射槍，因此形成噴射槍配置於兩個系統之構造，而造成洗 淨作業上維持適當噴射狀態之運轉等操作性之問題。 此外洗淨所使用之乾冰雪以及噴射用所使用之氣體爲 乾燥的。這種流體在配管中流通的情況下，容易與管摩擦 而產生靜電，特別是乾冰雪最大可帶電20000V。例如以 此帶電之乾冰雪進行洗淨時，特別是洗淨物爲1C等精密 半導體零件之情況下，會造成破損等問題產生。 另外在關於噴射槍前端噴出口之形狀，亦揭示噴射槍 需配合被洗淨物所形成之形狀來使用。例如爲了對應寬幅 的被洗淨物，噴射槍之前端噴出口形狀也要爲細縫狀之寬 幅形狀。由於乾冰雪與同時噴射之噴射用氣體之噴射擴大 幅度是取決於噴射用氣體之擴大，而有一定之限度。特別 是噴射用氣體之流量很少時，根本不會有效果。造成噴出 乾冰雪的洗淨幅度之寬幅和噴射槍前端噴出口的開口幅度 之寬幅相同之問題。 而且此時噴射用氣體之擴大，需要維持噴射用氣體在 一定之壓力下，才能維持寬幅形狀。但是製造精密且具有 一定寬幅形狀之噴射槍是非常的困難。因爲製造再現性良 好、便宜、又保持一定寬幅精確度之噴射槍是很困難的， 所以製造時成本會提高。 此外，在塑化成形時，爲了除去成形用脫模鉗上所附 7 (請先閱讀背面之注意事項再填寫本頁) 裝 丨丨_丨訂丨丨I丨丨— 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（t) 著之熱可塑性樹脂片、熱硬化性樹脂片以及上述樹脂所包 含之各種添加劑（可塑劑、安定劑、強化劑、難燃劑、帶 電防止劑等）。習知是經由塑化移除樹脂片，實際的射出 成形洗淨樹脂，由此進行脫模鉗之洗淨。 然而洗淨樹脂在用於脫模鉗洗淨時，爲使用與量產時 之樹脂不同之洗淨樹脂。更換洗淨開始時或量產開始時之 洗淨樹脂或量產時所使用之樹脂需要很多的時間。一日1 至2回，再根據作業者之熟練度，一回洗淨需要1至2小 時之洗淨時間，作業者容易因爲不同之脫模紺洗淨度而產 生不均一性，造成每一台成形機平均生產效率非常差之問 題。 總之，例如上述之洗淨作業中，希望能夠有效率具有 良好洗淨力之方法出現。 發明槪沭 本發明之主要目的即爲提供一種在安定之狀態下能夠 供給精製乾冰雪之乾冰雪生產供給裝置以及生產供給方 法。以解決上述之過去之問題點或不適當，使乾冰雪能夠 經常在安定之狀態下生產供給，而有效率的洗淨被洗淨 物。使在節流噴頭絕熱膨脹的液化碳酸氣之壓力維持在一 定之狀態下，而且液化碳酸氣儲藏容器所儲藏之液化碳酸 氣以維持溫度-壓力而經常維持在液化狀態。 此外調整雪狀乾冰經過之節流裝置機構出口附近之管 路長，而能夠具有物理的充分洗淨力。而且更加對於被洗 淨物低溫化之問題，直接控制被洗淨物之溫度而解決低溫 8 (請先閱讀背面之注意事項再填寫本頁) 0 裝 • ϋ ϋ !-訂--------- > 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 X 297公釐） 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（6 ) 化之問題，在連續洗淨的情況下也不會產生結露。另外乾 冰雪帶電，特別是可能造成被洗淨物損傷之情況下，將所 生成之靜電除電。在上述之情況下，可能作到確實的洗淨 被洗淨物，並且使用洗淨噴頭噴出乾冰雪，達到操作性上 升之目的。 此外洗淨被洗淨物時，必須在被洗淨物附近準備特別 之裝置。因此提供一種乾冰雪生產裝置，在特定的場所能 夠有便利性之洗淨方法，以及爲了實行此方法所提供之洗 淨裝置。 本發明之一目的爲提供具有噴射槍（以下稱爲噴射噴 頭）的乾冰雪噴射裝置，而可經常廣角的噴出乾冰雪。所 提供具備噴射噴頭之乾冰雪噴射裝置，在噴射用氣體之壓 力降低時，噴射乾冰雪仍具有一定噴射幅度與噴射高度之 噴射。 本發明之另一目的爲提供一種乾冰雪噴射裝置，對應 被洗淨物污染之程度而交換噴射噴頭，可自由改變一定噴 射幅度中之乾冰雪密度。對應被洗淨物之污染度，也可以 自由改變洗淨之速度。 本發明之再一目的爲提供一種容易的洗淨作業，並且 具有方便的乾冰雪噴射洗淨裝置以及其洗淨方法。因此和 作業者之热練度無關’能夠作到均一性的洗淨並可縮短時 間進而提局生產效率。而且和刷洗並用時，可以達到更有 效果之洗淨。 爲了解決上述之習知技藝之問題點或不適當^ |果胃，胃 9 (請先閱讀背面之注意事項再填寫本頁) 裝 ----訂--- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明q ) 提出下列之解決方法。 與申請專利範圍第1項相關之發明，爲一種乾冰雪生 產供給裝置，包括儲藏液化碳酸氣之液化碳酸氣儲藏容 器、連結儲藏容器的導出管、以及使液化碳酸氣儲藏容器 之液化碳酸氣絕熱膨脹的節流噴頭裝置。 此乾冰雪產生供給裝置之特徵爲在液化碳酸氣儲藏容 器內設置控制液化碳酸氣溫度之溫度控制手段與溫度檢測 手段。 與申請專利範圍第2項相關之發明，爲申請專利範圍 第1項所記載之乾冰雪產生供給裝置，液化碳酸氣儲藏容 器之特徵爲使用虹吸管當作該導出管之虹吸管式液化碳酸 氣儲藏容器。 與申請專利範圍第3項相關之發明，爲申請專利範圍 第1項所記載之乾冰雪產生供給裝置，液化碳酸氣儲藏容 器之特徵爲兩口式儲藏容器，儲藏容器一邊的出入口連接 設置升壓用之氣體來源。 與申請專利範圍第4項相關之發明，爲申請專利範圍 第3項所記載之乾冰雪產生供給裝置，乾冰雪產生供給裝 置之特徵爲連結液化碳酸氣儲藏容器與升壓用氣體源之管 分歧連接至液化碳酸氣補給用容器。 與申請專利範圍第5項相關之發明，爲申請專利範圍 第3項或第4項所記載之乾冰雪產生供給裝置，其特徵爲 升壓用氣體源爲酸热。 與申請專利範圍第6項相關之發明，爲一種乾冰雪生 10 ^紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱) ^ _ (請先閱讀背面之注意事項再填寫本頁) .0 裝• BI MB Μ ·· I order --------- > (210x297 mm) 478974 B7 6425pif.doc / 008 V. Description of the invention (> /) (Please read the notes on the back before filling This page) Nozzle mechanism 53. The liquefied carbonic acid gas at the throttle nozzle mechanism 53 is adiabaticly expanded to form dry ice and snow Ts, which is led out through the pipe 54 to supply dry ice and snow Ts. The liquefied carbon dioxide gas in the liquefied state at this time is supplied to the above-mentioned throttle head mechanism 53. However, in the throttling nozzle mechanism 53, the liquefied carbonic acid gas 1 ^ adiabaticly expands to generate dry ice and snow Ts, which reduces the pressure, so that the liquefied carbonic acid gas TY cannot maintain a supply at a high pressure state, and can generate dry ice and snow Ts. For example, liquefied carbon dioxide gas at a pressure of 2 MPa adiabaticly expands to a pressure of 0 MPa (atmospheric pressure) in the throttle nozzle device 53, and the dry ice snow Ts productivity is about 40%. On the other hand, the liquefied carbon dioxide gas TY having a pressure of 6 MPa adiabaticly expands to a pressure of 0 MPa in the throttle nozzle device 53, and the dry ice snow Ts productivity is about 30%. In addition, keep the liquefied carbon dioxide gas IY in the liquefied state under the above pressure. The pressure of 2MPa must be cooled at a temperature of -20 ° C, and the pressure of 6MPa must be maintained at a temperature below 20 ° C. Also, it is necessary to keep the liquefied carbon dioxide gas γ in a liquefied state. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Therefore, in order to improve the washing efficiency of the articles to be washed, a pressure of about 6 MPa and a temperature of about 20 ° C are used. However, the pressure and temperature conditions are appropriately selected within a range capable of keeping the liquefied carbon dioxide gas in a liquefied state. It is also preferred that the normal temperature is approximately -20 ° C. In this way, the dry ice and snow Ts is generated in the throttling nozzle mechanism 53 by adiabatic expansion with high pressure liquefied carbon dioxide gas to atmospheric pressure (OMPa). However, during the continuous production and supply of dry ice and snow Ts, the pressure in the liquefied carbon dioxide gas storage container 51 gradually decreases, causing the spraying force of the dry ice and snow 1 ^ to be washed to be reduced, thereby reducing the cleaning effect. 5 ^ The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm 1 '478974 A7 B7 6425pif.doc / 008 V. Description of the invention (弋) At the same time, for example, as disclosed in Shi Kaiping No. 3-7984 The washing device is a device for adiabatic expansion of liquefied carbonic acid gas to produce dry ice and snow, and spraying the dry ice and snow onto the surface to be cleaned to remove organic matter, acids, hydrocarbons and other impurities from the cleaned surface. Here In the device, in order to prevent dry ice and snow from cooling the surface to be washed to form a condensate of moisture and organic matter during the washing, the infrared lamp # device is used to heat and maintain the surface to be cleaned at a temperature of, for example, about 20 ° C, which is efficient. However, in this device, the cleaning force near the needle valve of the throttle mechanism and the cleaning nozzle (or the spray outlet) is poor. Because the liquefied carbonic acid gas has a temperature of about -80 ° C, so the above In the case of continuous cleaning in the cleaning device, the temperature of the surrounding atmosphere will be reduced, and the temperature of the object to be cleaned will also be lowered, causing moisture in the air to condense and attach or acidify the object to be cleaned. Results and damage to the washed object may make it unusable. The results reveal that in the micro-film of Shikaihei No. 3-7948, it is necessary to treat the washed object and control the washed object near the washed object. The temperature of the net. That is, several temperature control devices need to be installed near the object to be cleaned, and the cleaning operation is restricted. The cleaning operation must be configured to limit the specific place. About the standard for removing or cleaning steel plates using dry ice and snow And the design using a dry ice ball spray gun is disclosed in, for example, Shikaihei No. 5-49258. A small sharp hole is arranged between the liquefied carbonic acid gas and the spray gun, so that the liquefied carbonic acid gas is generated when passing through the small sharp hole. Adiabatic expansion to form a dry ice and snow generation system. This dry ice and snow generation system includes other systems, such as a nitrogen system configured by supplying nitrogen in a double tube structure in a spray gun. From this, the nitrogen 6 paper size applies to Chinese national standards (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling out this page)! -Order ·! Ί!! Printed by 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (W) The pressure of gas, so that the dry ice and snow generated by the above-mentioned dry ice and snow generation system is accelerated by controlling the pressure. The structure of the dry ice and snow sprayed cleaned surface. However, the dry ice and snow generation system and nitrogen supply system are individually equipped with spray guns, so the spray gun is configured in two systems, which causes the operation to maintain an appropriate spray state during cleaning operations. Operational problems. In addition, the dry ice and snow used for cleaning and the gas used for spraying are dry. When this fluid circulates in the pipe, it is easy to rub against the pipe to generate static electricity, especially the dry ice and snow can be the largest. Live 20000V. For example, when the charged dry ice and snow are used for cleaning, especially when the cleaned material is 1C or other precision semiconductor parts, problems such as breakage may occur. In addition, the shape of the ejection outlet at the front end of the spray gun also revealed that the spray gun needs to be used in accordance with the shape formed by the object to be cleaned. For example, in order to correspond to a wide range of objects to be cleaned, the shape of the ejection outlet at the front end of the spray gun must also be a wide slit shape. Because the expansion range of dry ice and snow and the simultaneous spraying gas depends on the expansion of the spraying gas, there is a certain limit. Especially when the flow rate of the injection gas is small, it is not effective at all. The problem is that the width of the cleaning width of the sprayed dry ice and snow is the same as the width of the opening of the ejection outlet at the front of the spray gun. At this time, the expansion of the ejection gas requires maintaining the ejection gas under a certain pressure to maintain a wide shape. However, it is very difficult to manufacture a precise spray gun with a certain wide shape. Because it is difficult to manufacture a spray gun with good reproducibility, cheapness, and maintaining a certain wide accuracy, the cost will increase during manufacture. In addition, during plastic forming, in order to remove the attachment 7 of the mold release pliers (please read the precautions on the back before filling in this page). 丨 丨 丨 Order 丨 丨 I 丨 丨 — This paper size applies to China Standard (CNS) A4 specification (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (t) Thermoplastic resin sheet, thermosetting resin sheet And various additives (plasticizers, stabilizers, reinforcing agents, flame retardants, antistatic agents, etc.) contained in the above resins. Conventionally, the resin sheet is removed by plasticizing, and the actual injection molding is performed to clean the resin, thereby cleaning the mold tongs. However, when the cleaning resin is used for cleaning the release tongs, the cleaning resin is different from the resin used in mass production. It takes much time to replace the resin at the beginning of washing or mass production. 1 to 2 times a day, and then according to the proficiency of the operator, 1 to 2 hours of washing time is required for one wash. The operator is prone to non-uniformity due to different release and cleaning degrees, resulting in each The problem is that the average production efficiency of the forming machine is very poor. In short, for example, in the above-mentioned cleaning operation, a method capable of efficiently and having a good cleaning power is desired. Invention 槪 沭 The main object of the present invention is to provide a dry ice and snow production and supply device and a production and supply method capable of supplying refined dry ice and snow in a stable state. In order to solve the above-mentioned problems or improper problems, dry ice and snow can always be produced and supplied in a stable state, and the washed objects can be efficiently washed. The pressure of the liquefied carbonic acid gas expanded adiabatically at the throttle nozzle is maintained under a certain state, and the liquefied carbonic acid gas stored in the liquefied carbonic acid gas storage container is constantly maintained in a liquefied state to maintain temperature-pressure. In addition, the length of the pipe near the outlet of the throttling device mechanism through which snow-like dry ice passes can be adjusted to have a sufficient physical cleaning power. Moreover, for the problem of lowering the temperature of the object to be cleaned, directly control the temperature of the object to be cleaned to solve the low temperature 8 (Please read the precautions on the back before filling this page) 0 Loading • ϋ ϋ! -Order ----- ---- > This paper size applies the Chinese National Standard (CNS) A4 specification (21 × 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs ), It will not cause dew condensation even under continuous cleaning. In addition, dry ice and snow are charged, especially in the case of damage to the cleaned material, and the static electricity generated is removed. In the above case, it is possible to clean the object to be cleaned, and use the cleaning nozzle to spray dry ice and snow, so as to improve the operability. In addition, when cleaning the object to be cleaned, a special device must be prepared near the object to be cleaned. Therefore, there is provided a dry ice and snow production device capable of a convenient cleaning method in a specific place, and a cleaning device provided for implementing the method. An object of the present invention is to provide a dry ice and snow spraying device having a spray gun (hereinafter referred to as a spray nozzle), which can often spray dry ice and snow at a wide angle. The provided dry ice and snow spraying device provided with a spray nozzle, when the pressure of the spraying gas is reduced, the spraying of dry ice and snow still has a certain spraying width and spraying height. Another object of the present invention is to provide a dry ice and snow spraying device, which can exchange the spray nozzles according to the degree of contamination by the washings, and can freely change the density of dry ice and snow in a certain spraying width. Corresponding to the pollution degree of the objects to be cleaned, the washing speed can be freely changed. Another object of the present invention is to provide an easy cleaning operation, and a convenient dry ice and snow spray cleaning device and a cleaning method thereof. Therefore, it has nothing to do with the operator's degree of training, and it can achieve uniform washing and shorten the time to improve the production efficiency. And when combined with brushing, more effective washing can be achieved. In order to solve the problems of the above-mentioned conventional skills, or inappropriate ^ | fruit stomach, stomach 9 (Please read the precautions on the back before filling out this page) Binding --- --- This paper size applies Chinese national standards ( CNS) A4 specification (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention q) The following solutions are proposed. The invention related to the first scope of the patent application is a dry ice and snow production and supply device, which includes a liquefied carbonated gas storage container for storing liquefied carbonic acid gas, an outlet pipe connected to the storage container, and a liquefied carbonated gas storage device for liquefied carbonic acid gas storage container. Thermal expansion throttling nozzle device. The dry ice and snow generating and supplying device is characterized in that a temperature control means and a temperature detection means for controlling the temperature of the liquefied carbon dioxide gas are provided in the liquefied carbon dioxide gas storage container. The invention related to the second scope of the patent application is the dry ice and snow generating and supplying device described in the first scope of the patent application. The liquefied carbonic acid gas storage container is characterized by a siphon type liquefied carbonic acid gas storage container using a siphon as the outlet tube. . The invention related to the third scope of the patent application is the dry ice and snow generating and supplying device described in the first scope of the patent application. The liquefied carbonic acid gas storage container is characterized by a two-port storage container. Gas source. The invention related to the fourth scope of the patent application is the dry ice and snow generating and supplying device described in the third scope of the patenting application. The dry ice and snow generating and supplying device is characterized in that the pipe connecting the liquefied carbon dioxide gas storage container and the pressure-increasing gas source is divided. Connect to a container for liquefied carbonate gas supply. The invention related to item 5 of the scope of patent application is the dry ice and snow generating and supplying device described in item 3 or 4 of the scope of patent application, which is characterized in that the gas source for pressurization is acid heat. The invention related to item 6 of the scope of patent application is a kind of dry ice and snow 10 ^ paper size applicable to China National Standard (CNS) A4 specifications (210 X 297 public love) ^ _ (Please read the precautions on the back before filling this page ) .0 pack

I ϋ 1 n 一： 口， Μ· I Μ·· I I 478974 A7 B7 經濟部智慧財產局員工消费合作社印製 6425pif.doc/008 五、發明說明（？） 產供給方法，其特徵爲控制液化碳酸氣儲藏容器之溫度， 使容器內之壓力爲一定壓力而保持液化碳酸氣，供給一定 壓力之液化碳酸氣至節流噴頭裝置，生產供給絕熱膨脹之 乾冰雪。 與申請專利範圍第7項相關之發明，爲申請專利範圍 第6項所記載之乾冰雪生產供給方法，維持液化碳酸氣儲 藏容器內爲一定壓力之特徵使以其他用途之升壓用氣體源 供給氣體至液化碳酸氣儲藏容器中而補充壓力。 與申請專利範圍第8項·相關之發明，爲申請專利範圍 第7項所記載之乾冰雪生產供給方法，其特徵爲使升壓用 氣體源之氣體供給至昇壓手段中昇壓。 與申請專利範圍第9項相關之發明，爲申請專利範圍 第7項或申請專利範圍第8項所記載之乾冰雪生產供給方 法，其特徵爲升壓用氣體源爲碳酸氣。 與申請專利範圍第1〇項柑關之發明，爲一種乾冰雪 生產供給裝置，包括儲藏液化碳酸氣之液化碳酸氣儲藏容 器、通過與儲藏容器連接設置之絕熱膨脹節流機構，到達 噴射乾冰雪之洗淨噴頭而形成流通管路之乾冰雪供給系統 以及與噴射用氣體源容器連接設置到達該洗淨噴頭之外圍 部分所設置噴射用氣體噴射口而形成流通管路之噴射用氣 體供給系統，所形成之乾冰雪洗淨裝置。乾冰雪供給系統 從節流機構到達洗淨噴頭之特徵爲設置可調節流通管路長 之管路長調整機構。噴射用氣體供給系統之洗淨噴頭之外 圍部分所設置噴射口之特徵爲形成與乾冰雪噴射方向並行 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -* - % c - V -----------裝 i — — ·丨丨訂 ί - -------------- (請先閱讀背面之注意事項再填寫本頁) 478974 A7 B7 6425pif.doc/008 五、發明說明（q) 之噴射氣k噴出口。 與申請專利範圍第11項相關之發明，爲一種乾冰雪 洗淨方法，其特徵爲加壓液化碳酸氣在節流機構膨脹形成 乾冰雪，由噴出口朝向被洗淨物噴出，而作爲洗淨方法。 在乾冰雪噴出流之周圍部分同時噴射出並行之噴射用氣 體。調整節流機構至噴射口之流通管路長度而噴射乾冰雪 以及洗淨被洗淨物。 與申請專利範圍第12項相關之發明，爲一種乾冰雪 洗淨裝置，其特徵爲使用乾冰雪洗淨被洗淨物之乾冰雪噴 射裝置，碳酸氣體源配置在所連接設置噴射乾冰雪之乾冰 雪噴射噴頭之中心，同時沿著其外周圍略爲同軸的配置噴 射用氣體源所連接設置之外筒。外筒之前端形成噴出噴射 用氣體之噴射用氣體噴出口。 與申請專利範圍第13項相關之發明，爲申請專利範 圍第12項所記載之乾冰雪洗淨裝置，乾冰雪噴射噴頭之 特徵爲噴出口前端爲扁平形狀，同時具有逐漸張大之圓錐 形狀。前端扁平形狀之噴出口設有側邊間隙缺口。 與申請專利範圍第14項相關之發明，爲申請專利範 圍第13項所記載之乾冰雪洗淨裝置，前端扁平形狀噴出 口之特徵爲前端噴出口部之短邊部設有側邊間隙缺口。 與申請專利範圍第15項相關之發明，爲申請專利範 圍第13項或第14項所記載之乾冰雪洗淨裝置，前端扁平 形狀噴出口之特徵爲前端噴出口部之長邊部之限制部具有 略爲矩形之形狀。 12 本紙張尺度適用中國國家標準（CNS)A4規i (21G X 297公爱) " -------------------tr (請先閱讀背面之注意事項再填寫本頁) % 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.doc/008 五、發明說明（β) 與申請專利範圍第16項相關之發明，爲申請專利範 圍第13項或第14項所記載之乾冰雪洗淨裝置，噴射用^ 體噴出口之前端形狀之特徵爲細長形狀，與乾冰雪噴射口貴 頭之前端噴出口部所設置側邊間隙缺口連結線略爲平行。~ 與申請專利範圍第17項相關之發明，爲申請專利範 圍第16項所記載之乾冰雪洗淨裝置，噴射用氣體噴出口 之前端形狀之特徵爲細長形狀，與乾冰雪噴射噴頭之前端 噴出口部所設置側邊間隙缺口連結線略爲平行。 與申請專利範圍第18項相關之發明，爲一種乾冰雪 洗淨方法，其特徵爲從乾冰雪噴射噴頭噴射乾冰雪與從、沿 著乾冰雪噴射噴頭之外周圍所配置之噴射用氣體噴出□噴 射噴射用氣體，藉此洗淨被洗淨物，作爲用於洗淨之洗淨 用乾冰雪噴射裝置。改變調整噴射用氣體之流量或壓力， 而變動調整由乾冰雪噴射噴頭之噴出口所噴出乾冰雪之噴 射洗淨範圍。 與申請專利範圍第19項相關之發明，爲一種乾冰雪 洗淨裝置，其特徵爲乾冰雪洗淨裝置是由噴射乾冰雪之噴 射洗淨噴頭、儲藏液化碳酸氣之液化碳酸氣容器、液化碳 酸氣容器至噴射洗淨噴頭之乾冰雪生產供給系統、噴射用 氣體源以及噴射用氣體源至噴射洗淨噴頭之噴射用氣體供 給系統構成。在液化碳酸氣絕熱膨脹生成乾冰雪之乾冰雪 噴射洗淨裝置中，乾冰雪生產供給系統爲了間歇的供給液 化碳酸氣設置開關手段。 與申請專利範圍第20項相關之發明，爲申請專利範 13 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -----------·裝--------訂--- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（u) 圍第19項所記載之乾冰雪洗淨裝置，其特徵爲噴射用氣 體源爲使用乾燥氣體。 與申請專利範圍第21項相關之發明，爲申請專利範 圍第19項或第20項所記載之乾冰雪洗淨裝置，噴射用氣 體供給系統之特徵爲具備有可加溫噴射用氣體之加熱控制 手段。 與申請專利範圍第22項或第23項相關之發明，爲申 請專利範圍第19項、第20項或第21項所記載之乾冰雪 洗淨裝置，噴射用氣體供給系統以及乾冰雪生產供給裝置 之特徵爲兩系統其中之一至少具備有使氣體離子化之離子 化手段。 與申請專利範圍第24項相關之發明，爲申請專利範 圍第19項所記載之乾冰雪洗淨裝置，噴射洗淨噴頭連接 噴射用氣體供給系統以及乾冰雪生產供給裝置之特徵爲其 中一方之配管與另一方具有柔軟性之配管形成略爲同軸的 一重営。 與申請專利範圍第25項相關之發明，爲申請專利範 圍第24項所記載之乾冰雪洗淨裝置，噴射洗淨噴頭連接 之二重配管之特徵爲噴射用氣體供給系統之配管與乾冰雪 生產供給裝置之配管形成包括同軸的二重配管’同時噴射 洗淨噴頭之前端形成尖細之形狀。 與申請專利範圍第26項相關之發明，爲申請專利範 圍第24項所記載之乾冰雪洗淨裝置，噴射洗淨噴頭連接 之二重配管之特徵爲噴射用氣體供給系統之配管與乾冰雪 (請先閱讀背面之注意事項再填寫本頁) « 裝 訂--------1 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 經濟部智慧財產局員工消費合作社印製 6425pif.doc/〇〇8 五、發明說明（（V) 生產供給裝置之配管形成包括同軸的二重配管，同時噴射 洗淨噴頭通過節流裝置朝向前端形成圓錐狀擴張之形狀。 與申請專利範圍第27項、第28項或第29項相關之 發明，爲申請專利範圍第19項、第20項 '第21項、第22 項、第23項、第24項、第25項或第26項所記載之乾冰 雪洗淨裝置，其特徵爲噴射洗淨噴頭可設置於上下方向、 左右方向至少有一方向可自由滑動之支持架台上。 與申請專利範圍第30項或第31項相關之發明，爲申 請專利範圍第27項、第28項或第29項所記載之乾冰雪 洗淨裝置，其特徵爲在噴射洗淨噴頭所設置之上下方向、 橫向方向至少有一方向可自由滑動之支持架台上裝設移動 用車輪。 與申請專利範圍第32項相關之發明，爲一種乾冰雪 洗淨方法，其特徵爲乾冰雪噴吹被洗淨物之洗淨方法，間 歇的供給乾冰雪，連續的供給噴射氣體。 與申請專利範圍第33項相關之發明，爲申請專利範 圍第32項所記載之乾冰雪洗淨方法，其特徵爲乾冰雪生 產供給裝置流通離子化碳酸氣。 與申請專利範圍第34項相關之發明，爲申請專利範 圍第32項或申請專利範圍第33項所記載之乾冰雪洗淨方 法，使用之乾冰雪洗淨方法的特徵爲以溫度控制噴射用氣 體。 與申請專利範圍第35項或第36項相關之發明，爲申 請專利範圍第32項、第33項或第34項所記載之乾冰雪 -----------裝--------訂--------- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（（4 ) 洗淨方法，使用之乾冰雪洗淨方法之特徵爲離子化噴射用 氣體。 與申請專利範圍第37項、第38項或第39項相關之 發明，爲申請專利範圍第32項、第33項、第34項、第35 項或第36項所記載之乾冰雪洗淨方法，噴射洗淨噴頭所 設置之上下方向、橫向方向至少有一方向可自由滑動之支 持架台之特徵爲噴射洗淨噴頭與被洗淨物可保持一定之距 離，噴射乾冰雪進行洗淨。 與申請專利範圍第40項、第41項、第42項或第43 項相關之發明，爲申請專利範圍第32項、第33項、第34 項、第35項、第36項、第37項、第38項或第39項所 記載之乾冰雪洗淨方法，乾冰雪洗淨方法之特徵爲可與刷 洗並用而洗淨被洗淨物。 本發明之乾冰雪生產供給裝置是由儲藏液化碳酸氣之 液化碳酸氣儲藏容器以及通過導出管所連結之使液化碳酸 氣絕熱膨脹之節流噴頭裝置構成。在乾冰雪產生供給裝置 中，上述之液化碳酸氣儲藏容器內設置控制液化碳酸氣溫 度之溫度控制手段與溫度檢測手段，因此液化碳酸氣儲藏 容器可維持在一定之壓力與一定之溫度下。 而且液化碳酸氣儲藏容器可使用具備有兩個連通口之 兩口式液化碳酸氣儲藏容器。兩口式液化碳酸氣儲藏容器 一邊的出入口配設可使儲藏容器升壓至所定壓力之升壓用 氣體源。 連結上述之液化碳酸氣儲藏容器與升壓用氣體源之管 16 (請先閱讀背面之注意事項再填寫本頁) «I ϋ 1 n ：: M, I M ·· II 478974 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy 6425pif.doc / 008 V. Description of the invention (?) Production and supply method, which is characterized by controlling liquefied carbonic acid The temperature of the gas storage container keeps the pressure of the container at a certain pressure to maintain the liquefied carbon dioxide gas, and supplies the liquefied carbon dioxide gas at a certain pressure to the throttling nozzle device to produce dry ice and snow for adiabatic expansion. The invention related to item 7 of the scope of patent application is the dry ice and snow production and supply method described in item 6 of the scope of patent application. It maintains a certain pressure in the liquefied carbon dioxide gas storage container and supplies it with a pressure source for other purposes. The gas is added to the liquefied carbon dioxide gas storage container to supplement the pressure. The invention related to item 8 of the scope of patent application is the dry ice and snow production and supply method described in item 7 of the scope of patent application, which is characterized in that the gas from the gas source for boosting is supplied to the boosting means to boost the pressure. The invention related to item 9 of the patent application scope is the dry ice and snow production and supply method described in item 7 of the patent application scope or item 8 of the patent application scope, which is characterized in that the gas source for pressurization is carbon dioxide gas. The invention related to the 10th invention of the scope of patent application is a dry ice and snow production and supply device, which includes a liquefied carbonic acid gas storage container for storing liquefied carbonic acid gas, and an adiabatic expansion throttling mechanism connected to the storage container to reach dry ice and snow. The dry ice and snow supply system that cleans the spray head to form a circulation pipeline, and the spray gas supply system that is connected to the spray gas source container and reaches the spray gas injection port provided at the peripheral part of the cleaning spray nozzle to form a circulation pipeline. The formed dry ice and snow washing device. The dry ice and snow supply system from the throttling mechanism to the cleaning nozzle is characterized by a pipe length adjustment mechanism that can adjust the length of the circulation pipe. The jet nozzles provided on the outer part of the cleaning nozzle of the jetting gas supply system are formed in parallel with the direction of spraying of dry ice and snow. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm)-*-% c -V ----------- install i — — · 丨 丨 Order ί--------------- (Please read the precautions on the back before filling this page) 478974 A7 B7 6425pif.doc / 008 V. Description of the Invention (q) The jet gas k jet outlet. The invention related to item 11 of the scope of patent application is a dry ice and snow washing method, which is characterized in that pressurized liquefied carbonic acid gas expands in a throttling mechanism to form dry ice and snow, and is ejected from the ejection outlet toward the object to be cleaned for cleaning. method. The parallel jet gas is simultaneously sprayed around the dry ice and snow jet stream. Adjust the length of the flow path from the throttling mechanism to the injection port to spray dry ice and snow and wash the objects to be washed. The invention related to the 12th scope of the patent application is a dry ice and snow cleaning device, which is characterized by a dry ice and snow spraying device that uses dry ice and snow to clean the object to be washed. The carbon dioxide gas source is arranged on the connected device to spray dry ice and snow. The outer cylinder is connected to the center of the ice and snow spray nozzle, and the spray gas source is arranged along the outer periphery of the ice cone. The front end of the outer cylinder is formed with a gas ejection port for ejecting the gas. The invention related to the thirteenth patent application scope is the dry ice and snow cleaning device described in the twelfth patent scope application. The dry ice and snow spray nozzle is characterized by a flat shape at the front end of the spray outlet and a gradually conical shape. The flat-shaped ejection outlet at the front end is provided with a side gap notch. The invention related to item 14 of the scope of patent application is the dry ice and snow cleaning device described in item 13 of the scope of patent application. The flat front-end spray outlet is characterized in that the short edge of the front spray outlet is provided with a side gap notch. The invention related to item 15 of the scope of patent application is the dry ice and snow washing device described in item 13 or 14 of the scope of patent application. The flat front-end spray outlet is characterized by the restricted portion of the long side of the front spray outlet. Has a slightly rectangular shape. 12 This paper size applies to China National Standard (CNS) A4 Regulation i (21G X 297 public love) " ------------------- tr (Please read the note on the back first Please fill in this page again)% Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of Invention (β) The invention related to the 16th scope of the patent application is the 13th scope of the patent application Or the dry ice and snow cleaning device described in item 14, the shape of the front end of the spraying body ^ is characterized by a slender shape, and the connection line with the side gap notch provided at the front end of the dry head of the dry ice and snow spraying port is slightly parallel. ~ The invention related to item 17 of the scope of patent application is the dry ice and snow cleaning device described in item 16 of the scope of patent application. The shape of the front end of the jetting gas jet is characterized by a slender shape and the front end of the dry ice and snow spraying nozzle. The side gap gap connecting line provided at the exit portion is slightly parallel. The invention related to the 18th scope of the patent application is a dry ice and snow cleaning method, which is characterized by spraying dry ice and snow from the dry ice and snow spray nozzle and spraying gas from the spraying gas arranged around and outside the dry ice and snow spray nozzle □ The spraying gas is sprayed to wash the object to be cleaned, and is used as a dry ice and snow spraying device for cleaning. The flow rate or pressure of the spraying gas is changed and adjusted, and the spray cleaning range of the dry ice and snow sprayed from the spray outlet of the dry ice and snow spray nozzle is changed and adjusted. The invention related to item 19 of the scope of patent application is a dry ice and snow washing device, which is characterized in that the dry ice and snow washing device is a jet washing nozzle spraying dry ice and snow, a liquefied carbon dioxide gas container for storing liquefied carbon dioxide gas, and liquefied carbonic acid A dry ice and snow production and supply system from an air container to a jet cleaning nozzle, a jet gas source, and a jet gas supply system from the jet gas source to the jet cleaning nozzle. In the dry ice and snow spray cleaning device that generates adiabatic expansion of liquefied carbon dioxide gas, the dry ice and snow production and supply system sets switching means for intermittently supplying liquefied carbon dioxide gas. The invention related to the 20th patent application scope is the patent application scope 13 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ----------- · install- ------ Order --- (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 A7 B7 System V. Description of the Invention (u) The dry ice and snow cleaning device described in item 19, characterized in that the gas source for spraying uses dry gas. The invention related to the scope of patent application No. 21 is the dry ice and snow washing device described in the scope of patent application No. 19 or 20, and the gas supply system for spraying is characterized by having heating control for heating the spraying gas means. The invention related to the 22nd or 23rd patent application scope is the dry ice and snow washing device, the spray gas supply system, and the dry ice and snow production and supply device described in the 19th, 20th, or 21st patent application scope. It is characterized in that one of the two systems is provided with at least an ionizing means for ionizing the gas. The invention related to the 24th scope of the patent application is the dry ice and snow cleaning device described in the 19th scope of the patent application. The jet cleaning nozzle is connected to the gas supply system for spraying and the dry ice and snow production and supply device. It forms a slightly concentric layer with the other flexible pipe. The invention related to the 25th scope of the patent application is the dry ice and snow cleaning device described in the 24th scope of the patent application. The double piping connected to the jet cleaning nozzle is characterized by the piping of the jet gas supply system and dry ice and snow production. The piping of the supply device includes a coaxial double pipe, and the front end of the simultaneous jet cleaning nozzle is formed into a tapered shape. The invention related to the 26th scope of the patent application is the dry ice and snow cleaning device described in the 24th scope of the patent application. The double piping connected to the jet cleaning nozzle is characterized by the piping of the gas supply system for spraying and the dry ice and snow ( Please read the precautions on the back before filling in this page) «Binding -------- 1 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 478974 Staff Consumption of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the cooperative 6425pif.doc / 〇〇 5. Description of the invention ((V) The piping of the production and supply device includes a coaxial double piping, and the jet cleaning nozzle is formed into a conical expansion shape by the throttle device toward the front end. The inventions related to the 27th, 28th, or 29th scope of the patent application are the 19th, 20th, 21st, 22nd, 23rd, 24th, 25th or 25th The dry ice and snow cleaning device described in item 26 is characterized in that the spray cleaning nozzle can be arranged on a support stand that can slide freely in at least one of the up and down direction and the left and right direction. It is the same as the item 30 or 31 of the scope of patent application. The related invention is a dry ice and snow cleaning device described in the 27th, 28th, or 29th patent application scope, which is characterized in that at least one of the vertical and horizontal directions provided by the jet cleaning nozzle can slide freely A supporting wheel is provided with moving wheels. The invention related to the 32nd patent application scope is a dry ice and snow cleaning method, which is characterized in that the dry ice and snow is sprayed on the object to be washed and intermittently supplies dry ice and snow. The continuous supply of jet gas. The invention related to the 33rd patent application scope is the dry ice and snow washing method described in the 32nd patent scope, which is characterized in that the dry ice and snow production and supply device circulates ionized carbon dioxide gas. The invention related to the 34th patent scope is the dry ice and snow washing method described in the 32nd patent scope or the 33rd patent scope, and the dry ice and snow washing method used is characterized by temperature-controlled jet gas. The inventions related to the 35th or 36th scope of the patent application are the dry ice and snow recorded in the 32nd, 33rd or 34th scope of the patent application -------------- ------ Order --------- (Please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 478974 6425pif .doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention ((4) Washing method. The dry ice and snow washing method used is characterized by ionized jet gas. The scope of patent application is 37 The inventions related to Item No. 38, or No. 39 are the dry ice and snow washing methods described in the patent application scope Nos. 32, 33, 34, 35, or 36. The support stand which can be slid freely in at least one of the upper and lower directions and the lateral direction is characterized in that the spray cleaning nozzle and the object to be cleaned can be kept at a certain distance, and dry ice and snow are sprayed for cleaning. Inventions related to the 40th, 41st, 42nd, or 43rd scope of the patent application are the 32nd, 33rd, 34th, 35th, 36th, or 37th scope of the patent application The dry ice and snow washing method described in item 38 or 39. The dry ice and snow washing method is characterized in that it can be used in combination with brushing to wash the object to be washed. The dry ice and snow production and supply device of the present invention is composed of a liquefied carbonic acid gas storage container for storing liquefied carbonic acid gas, and a throttling nozzle device for adiabatic expansion of liquefied carbonic acid gas connected by an outlet pipe. In the dry ice and snow generating and supplying device, the above-mentioned liquefied carbon dioxide gas storage container is provided with temperature control means and temperature detection means for controlling the temperature of the liquefied carbon dioxide gas, so the liquefied carbon dioxide gas storage container can be maintained at a certain pressure and a certain temperature. As the liquefied carbon dioxide gas storage container, a two-port liquefied carbon dioxide gas storage container having two communication ports can be used. Two-port liquefied carbon dioxide gas storage container One side inlet and outlet are equipped with a gas source for boosting the storage container to a predetermined pressure. Pipe connecting the above-mentioned liquefied carbon dioxide gas storage container with the gas source for boosting pressure 16 (Please read the precautions on the back before filling this page) «

V irl裝 • n an ϋ --— 丨訂---I----- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 6425pif.d〇c/00R A7 6425pif.d〇c/00R A7V irl installation • n an 订 --- 丨 order --- I ----- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 6425pif.d〇c / 00R A7 6425pif. doc / 00R A7

發明說明（β 中有分歧’更連接至碳酸氣補給用容器。 # =此外，本發明之乾冰雪生產供給方法，控制液化碳酸 氣儲藏容器之壓力-溫度，保持液化碳酸氣爲液化狀態。 因此供給一定壓力之液化碳酸氣至節流噴頭裝置，生產供 給絕熱膨脹之乾冰雪。 在上述之液化碳酸氣儲藏容器內維持一定壓力，是以 其他用途之升壓用氣體源供給氣體至液化碳酸氣儲藏容器 中而補充壓力，進而維持液化碳酸氣儲藏容器在一定壓 力。因此上述之升壓用氣體源之氣體至昇壓手段中進行昇 壓’此外使用碳酸氣作爲升壓用氣體源。 圖·式之簡單證明 讓本發明之上述和其他目的、特徵、和優點能更明顯 易懂，並進一步提供發明專利範圍之解釋，下文特舉一較 佳實施例，並配合所附圖式，作詳細說明如下： 第1圖爲本發明第一實施例之乾冰雪產生供給裝置之 系統槪略圖。 第2圖爲本發朋第二實施例之乾冰雪產生供給裝置之 系統槪略圖。 第3圖爲本發明第一乾冰雪洗淨裝置所揭示之一例之 系統槪略圖。 第4圖爲本發明第一乾冰雪洗淨裝置所使用之流通管 路長調整機構所揭示之一例之系統槪略圖。 第5圖爲三重管構造噴頭之部份剖面圖。 第6圖爲本發明第二乾冰雪產生供給裝置所包含乾冰 17 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -----------·裝--------訂------- (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.doc/008 五、發明說明（（〇 雪噴射裝置上裝設之第一實施形態之乾冰雪噴射噴頭所揭 示之一例之說明剖面圖。 第7圖爲本發明第6圖之乾冰雪噴射洗淨裝置的正面 圖。 第8圖爲本發明第二乾冰雪產生供給裝置所包含乾冰 雪噴射裝置上裝設之第二實施形態之乾冰雪噴射噴頭之槪 略剖面圖。 第9圖爲本發明第二乾冰雪產生供給裝置所包含乾冰 雪噴射裝置上裝設之第三實施形態之乾冰雪噴射噴頭之槪 略剖面圖。 第10圖爲實驗所使用之第二乾冰雪洗淨裝置的槪略 系統圖。 第11圖爲用於比較之乾冰雪洗淨裝置的乾冰雪噴射 噴頭之槪略剖面圖。 第12圖爲本發明第三乾冰雪洗淨裝置所揭示之一例 之系統槪略圖。 第13圖爲本發明第三乾冰雪洗淨裝置所使用之噴射 洗淨噴頭之噴射用配管配置剖面圖。 第14圖爲本發明第三乾冰雪洗淨裝置所使用之尖細 型噴射洗淨噴頭之重點部位槪略剖面圖。 第15圖爲本發明之乾冰雪洗淨裝置所使用之圓錐狀 擴張型噴射洗淨噴頭之重要部位槪略剖面圖 第16圖爲本發明第三乾冰雪洗淨裝置之噴射洗淨噴 頭裝設之自由滑動架台狀態槪略圖。 18 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------------裝 ---I---訂--- C請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.doc/008 五、發明說明（（t) 第17圖爲各種噴射洗淨噴頭的節流裝置之流速（m/sec) 與洗淨壓力（MPa)之關係圖。 第18圖爲傳統之乾冰雪生產供給裝置之系統槪略圖。 圖式之標記說明： ΙΑ、1B :虹吸管式液化碳酸氣儲藏容器 2 :虹吸管 3、4 :導出管 5、9、24、25、54、242、244、248、254、256、302、 304 、 312 、 315 :管 6:溫度控制手段 7、 22 :氣體容器 8、 23 :壓力調整器 21 :兩口式液化碳酸氣儲藏容器 21a、21b :連通口 53 :節流噴頭裝置Description of the invention (There is a difference in β. It is more connected to the carbon dioxide gas supply container. # = In addition, the dry ice and snow production and supply method of the present invention controls the pressure-temperature of the liquefied carbon dioxide gas storage container to maintain the liquefied carbon dioxide gas in a liquefied state. Therefore Supply a certain pressure of liquefied carbonic acid gas to the throttling nozzle device to produce adiabatic expansion of dry ice and snow. Maintain a certain pressure in the above liquefied carbonic acid gas storage container, and supply gas to the liquefied carbonic acid gas from a pressure-increasing gas source for other purposes. The pressure in the storage container is replenished, and the pressure of the liquefied carbon dioxide gas storage container is maintained at a certain pressure. Therefore, the gas from the pressure-generating gas source to the pressure-increasing means is used to increase the pressure. In addition, carbonic acid gas is used as the pressure-generating gas source. Figure · The simple proof of the formula makes the above and other objects, features, and advantages of the present invention more obvious and easier to understand, and further provides an explanation of the scope of the invention patent. A preferred embodiment is given below in conjunction with the accompanying drawings for details The description is as follows: FIG. 1 is a schematic diagram of a system of the dry ice and snow generating and supplying device according to the first embodiment of the present invention. FIG. 2 is a schematic diagram of a system of a dry ice and snow generating and supplying device according to a second embodiment of the present invention. FIG. 3 is a schematic diagram of an example of a system disclosed by the first dry ice and snow washing device of the present invention. A schematic diagram of a system disclosed by an example of a circulation pipe length adjusting mechanism used in a dry ice and snow washing device. Fig. 5 is a partial cross-sectional view of a triple tube structure sprinkler. Fig. 6 is a second dry ice and snow generating supply of the present invention. Dry ice contained in the device 17 This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) ----------- · Installation -------- Order ---- --- (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention ((〇 Snow spraying device installed first An explanatory cross-sectional view of an example disclosed by the dry ice and snow spray nozzle according to the embodiment. FIG. 7 is a front view of the dry ice and snow spray cleaning device of FIG. 6 of the present invention. FIG. 8 is the second dry ice and snow generation and supply apparatus of the present invention. Contains the dry ice of the second embodiment installed on the dry ice snow spraying device Fig. 9 is a schematic sectional view of a spray nozzle. Fig. 9 is a schematic sectional view of a dry ice and snow spray nozzle of a third embodiment installed on the dry ice and snow spray device included in the second dry ice and snow generating and supplying device of the present invention. The schematic system diagram of the second dry ice and snow cleaning device used in the experiment. Figure 11 is a schematic cross-sectional view of the dry ice and snow spray nozzle of the dry ice and snow cleaning device for comparison. A schematic diagram of an example of the system disclosed by the ice and snow washing device. FIG. 13 is a sectional view of the piping arrangement of the jet cleaning nozzle used in the third dry ice and snow washing device of the present invention. Figure 15 is a schematic cross-sectional view of the key parts of a pointed spray cleaning nozzle used in the ice and snow cleaning device. Figure 15 is a schematic cross-sectional view of the important parts of a conical expansion type spray cleaning head used in the dry ice and snow cleaning device of the present invention. FIG. 16 is a schematic view showing a state of a free sliding rack installed with a jet cleaning nozzle of a third dry ice and snow cleaning device of the present invention. 18 This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) ------------ install --- I --- order --- C Please read the Please fill in this page again) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention ((t) Figure 17 shows the flow rate of the throttling device of various jet cleaning nozzles (m / sec) and washing pressure (MPa). Figure 18 is a schematic diagram of the traditional dry ice and snow production and supply system. Symbols of the drawings: IA, 1B: siphon type liquefied carbon dioxide gas storage container 2: siphon 3, 4: Outlet tubes 5, 9, 24, 25, 54, 242, 244, 248, 254, 256, 302, 304, 312, 315: Tube 6: Temperature control means 7, 22: Gas container 8, 23: Pressure regulator 21: Two-port liquefied carbonic acid gas storage container 21a, 21b: Communication port 53: Throttle nozzle device

Vt :進料閥 V2、313 :開關閥 V5、V6 :排出閥 V3、V4、V21、V22、V101、V102、V103 :閥Vt: feed valve V2, 313: on-off valve V5, V6: discharge valve V3, V4, V21, V22, V101, V102, V103: valve

Tc :碳酸氣 T〆·液化碳酸氣Tc: Carbon dioxide gas T〆Liquefied carbon dioxide gas

Ts :乾冰雪 Τ。：溫度控制器 P:淸洗用氣體 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ---------------訂---I----- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 經濟部智慧財產局員工消費合作社印製 6425pif.doc/008 _B7_ 五、發明說明（〇) G:升壓用氣體 110 :第一乾冰雪洗淨裝置 101、251、301 :液化碳酸氣容器 103 :開關手段 105 ·卽流機構 107 :流通管路 107a :中心管 107b、108b、204、322 :外管 107c、108c、128c :流路 108:洗淨噴頭 108a :中心噴出管 108d :乾冰雪噴出口 108g、213 :噴射用氣體噴出口 109、308 :乾冰雪供給系統 111、241、311 :噴射用氣體源容器 114、243、314 :壓力調整器 116、246、316 :離子化手段 118、 318 :噴射用氣體供給系統 119、 245、319 :加熱控制手段 120、 320 :控制箱 121 :連結具 122 :分配管 125 :流通管路長調整機構 127 :三重管構造之流通管 (請先閱讀背面之注意事項再填寫本頁) -裝 ----訂--- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 6425pif.doc/008 _B7_ 五、發明說明（（Γ) 127b、128b :排氣管 128 :三重管構造之洗淨噴頭 129 :集塵罩 (請先閱讀背面之注意事項再填寫本頁) 102、104、106、112、115、117 :管路 G、2G :噴射用氣體 250 :第二乾冰雪洗淨裝置 201 :乾冰雪噴射裝置 202、321 :內管 203 :間隙 205 :外筒 205a :前端面 206 :套子 207 :擴張圓錐型乾冰雪噴射噴頭 207a :連接側近面 207b、221b、231b、261b :噴出口 208 卽流裝置 209 圓錐形狀 210 扁平形狀 211 側邊間隙之凹口 經濟部智慧財產局員工消費合作社印製 212、222 :限制裝置 221 :端部彎曲型乾冰雪噴射噴頭 231 :扁平型乾冰雪噴射噴頭 261 :比較例之乾冰雪噴射噴頭 259 :接合構件 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 經濟部智慧財產局員工消費合作社印製 6425pif.doc/008 _B7_ 五、發明說明（丨1 ) 249 :噴射用氣體供給線 253、303 :開關手段 255、305 :節流手段 257 :液化碳酸氣供給線 300 :第三乾冰雪洗淨裝置 306 :乾冰雪供給管 307 :噴射用配管 317 :噴射用氣體供給管 323 :噴射洗淨噴頭 323A :尖細型噴射洗淨噴頭 323B :圓錐狀擴張型噴射洗淨噴頭 324 :乾冰導入口 325 :噴射用氣體導入口 326 :導入連結具 327、328、329 :袋狀螺帽 330 :架台 331 :橫向滑行軌道 331a :左右方向滑行軌道 331b :前後方向滑行軌道 332 :上下方向滑行軌道 333 :滑動結合構件 334 :移動用車輪 0:尖細型噴頭之圓錐狀角度 α:圓錐狀擴張型噴頭之擴張角度 (請先閱讀背面之注意事項再填寫本頁) 裝 !丨丨訂1丨！丨—丨· 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（>。） 召：圓錐狀擴張型噴頭之節流裝置角度 較佳實施例之詳細說里· 關於本發明所述之乾冰雪生產供給裝置之實施例依序 參照圖形來說明。 第一實施例 第1圖爲本發明第一實施例所述之乾冰雪產生供給裝 置之一說明例的系統槪略圖。而且第1圖與第18圖所顯 示之機器對照，有一些共通之機器。與第18圖相同的機 器，省略其詳細之說明。第一實施例之虹吸管式液化碳酸 氣儲藏容器1裝置是由液化碳酸氣儲藏容器1以及設置於 容器中用於導出液化碳酸氣之虹吸管2所組成。而且第1 圖所顯示之虹吸管式液化碳酸氣儲藏容器1可以替換使 用，因此虹吸管式液化碳酸氣儲藏容器1可以準備複數個， 例如第1圖所示配置兩個虹吸管式液化碳酸氣儲藏容器 ΙΑ、1B。然後配置虹吸管2，在虹吸管2頂部管端分別連 接導出管3、導出管4。導出管3及導出管4分別通過原 料閥VlA與原料閥V1B後並與管5集合連接在一起。然後 管5經過例如是電磁閥之開關閥V2後，連接至節流噴頭 裝置53 〇 並且希望上述之虹吸管式液化碳酸氣儲藏容器1A及 1B能夠保持一定之溫度，而設置具備加熱手段之溫度控 制手段6。利用溫度控制手段6控制虹吸管式液化碳酸氣 儲藏容器1 A及1B的液化碳酸氣ΊΥ之溫度，使碳酸氣能 夠保持在液體的狀態。 23 (請先閱讀背面之注意事項再填寫本頁) .· 裝Ts: dry ice and snow. : Temperature controller P: Gas for cleaning. The paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) --------------- Order --- I- ---- (Please read the notes on the back before filling out this page) Printed by the Employees 'Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 6425pif.doc / 008 _B7_ V. Description of Invention (〇 ) G: Pressurizing gas 110: First dry ice and snow washing device 101, 251, 301: Liquefied carbon dioxide gas container 103: Switching means 105 · Flow mechanism 107: Circulation pipeline 107a: Central pipe 107b, 108b, 204, 322: Outer tubes 107c, 108c, and 128c: Flow path 108: Wash nozzle 108a: Central discharge pipe 108d: Dry ice and snow spray outlet 108g, 213: Spray gas outlets 109 and 308: Dry ice and snow supply systems 111, 241, and 311 : Gas source containers for injection 114, 243, 314: Pressure regulators 116, 246, 316: Ionization means 118, 318: Gas supply systems for injection 119, 245, 319: Heating control means 120, 320: Control box 121: Connector 122: distribution pipe 125: circulation pipe length adjustment mechanism 127: flow of triple pipe structure Tube (please read the precautions on the back before filling out this page)-binding ---- stapling --- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 478974 6425pif.doc / 008 _B7_ V. Description of the invention ((Γ) 127b, 128b: Exhaust pipe 128: Cleaning nozzle with triple pipe structure 129: Dust collecting cover (please read the precautions on the back before filling this page) 102, 104, 106, 112 115, 117: Pipeline G, 2G: Gas for spraying 250: Second dry ice and snow cleaning device 201: Dry ice and snow spraying device 202, 321: Inner tube 203: Clearance 205: Outer tube 205a: Front end surface 206: Cover 207 : Expansion cone-shaped dry ice and snow spray nozzle 207a: Connection side near surface 207b, 221b, 231b, 261b: Discharge port 208 Flow device 209 Conical shape 210 Flat shape 211 Side gap notch Printed by the Ministry of Economic Affairs Intellectual Property Bureau employee consumer cooperative 212, 222: Restriction device 221: End-curved dry ice and snow spray head 231: Flat dry ice and snow spray head 261: Comparative example of dry ice and snow spray head 259: Joining member This paper size applies the Chinese National Standard (CNS) A4 specification ( 210 X 297 mm) 47897 4 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy 6425pif.doc / 008 _B7_ V. Description of the invention (丨 1) 249: Gas supply line for injection 253, 303: Switching means 255, 305: Throttling means 257: Liquefied carbon dioxide gas Supply line 300: the third dry ice and snow cleaning device 306: dry ice and snow supply pipe 307: spraying pipe 317: spraying gas supply pipe 323: spraying and cleaning nozzle 323A: tapered spraying and cleaning nozzle 323B: conical expansion type spraying Cleaning nozzle 324: Dry ice inlet 325: Spray gas inlet 326: Introduction couplings 327, 328, 329: Bag-shaped nut 330: Stand 331: Lateral sliding rail 331a: Left-right sliding rail 331b: Front-back sliding rail 332: Up and down sliding rails 333: Sliding coupling member 334: Moving wheels 0: Conical angle of the tapered nozzle α: Expansion angle of the conical expansion nozzle (please read the precautions on the back before filling this page) Install!丨 丨 Order 1 丨!丨 — 丨 · This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of Invention (>) Call: The detailed description of the preferred embodiment of the throttling device angle of the conical expansion nozzle · The embodiment of the dry ice and snow production and supply device according to the present invention will be described with reference to the drawings in order. First Embodiment FIG. 1 is a schematic diagram of a system for explaining an example of the dry ice and snow generating and supplying device according to the first embodiment of the present invention. In contrast, the machines shown in Figure 1 and Figure 18 have some common machines. The same machine as in Fig. 18 will be omitted from the detailed description. The siphon-type liquefied carbonic acid gas storage container 1 device of the first embodiment is composed of a liquefied carbonic acid gas storage container 1 and a siphon 2 provided in the container for discharging liquefied carbonic acid gas. Moreover, the siphon-type liquefied carbonic acid gas storage container 1 shown in FIG. 1 can be used interchangeably. Therefore, a plurality of siphon-type liquefied carbonic acid gas storage containers 1 can be prepared. For example, two siphon-type liquefied carbonic acid gas storage containers 1 shown in FIG. 1 are configured. , 1B. Then, the siphon tube 2 is configured, and the outlet tube 3 and the outlet tube 4 are connected to the top tube ends of the siphon tube 2, respectively. The lead-out pipe 3 and the lead-out pipe 4 pass through the raw material valve V1A and the raw material valve V1B, respectively, and are collectively connected to the pipe 5. Then, the tube 5 is connected to the throttling nozzle device 53 after passing through the on-off valve V2 such as a solenoid valve. It is hoped that the above-mentioned siphon-type liquefied carbon dioxide gas storage containers 1A and 1B can maintain a certain temperature, and a temperature control with heating means is provided. Means 6. Temperature control means 6 is used to control the temperature of the liquefied carbon dioxide gas in the siphon-type liquefied carbon dioxide gas storage containers 1 A and 1B so that the carbon dioxide gas can be kept in a liquid state. 23 (Please read the notes on the back before filling out this page).

« — — — — I 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 A7 B7 6425pif.doc/008 五、發明說明（d ) (請先閱讀背面之注意事項再填寫本頁) 另外，虹吸管式液化碳酸氣儲藏容器1A及1B之個 別導出管3及導出管4通過氣體容器7以及壓力調整器8 並與管9連通，在通過閥V3、閥V4後連接在一起。氣體 容器7中塡充例如碳酸氣或氮氣等不活潑、露點低以及包 含較少微粒子之氣體所形成淸洗用氣體P。壓力調整器8 則可維持所希望之供給壓力。另外上述之導出管3以及導 出管4在進行淸洗以及去除微粒子時，可使用所設置之排 出閥V5及排出閥V6。 上述爲第一實施例之乾冰雪生產供給裝置之構造組 成，接著說明運轉操作。兩個虹吸管式液化碳酸氣儲藏容 器1A及1B。一個容器進行乾冰雪生產供給製程，另一個 容器進行液態碳酸氣補充製程，爲產生供給製程之下一製 程作準備。在此以虹吸管式液化碳酸氣儲藏容器1A進行 乾冰雪生產供給製程，以及虹吸管式液化碳酸氣儲藏容器 1B進行液態碳酸氣補充製程之情況下進行說明。 經濟部智慧財產局員工消費合作社印製 虹吸管式液化碳酸氣儲藏容器1A，因爲前製程的補 充塡充製程而塡充液化碳酸氣τγ，在淸洗以及粒子去除工 作結束後，在淸洗用氣體Ρ爲碳酸氣之情況下，可預先使 氣體容器7中之淸洗用氣體Ρ塡充至虹吸管式液化碳酸氣 儲藏容器1Α中，並使虹吸管式液化碳酸氣儲藏容器1Α 內壓力昇壓到例如6MPa的壓力。同時對應6MPa的壓力， 而以溫度控制手段6控制溫度，使液化碳酸氣ΐγ之液化 狀態維持溫度在20°C以上的溫度。然後，閥V3、閥V5以 及閥V1B爲關閉狀態而且原料閥v1A爲打開狀態，使液化 24 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 6425pif.doc/008 A7 B7 — 經濟部智慧財產局員工消費合作社印製 五、發明說明（ 碳酸氣通過虹吸管2由導出管3導出。接著開關閥v2 必須要對應適當之開關操作，使6MPa以上之壓力、溫度 2(TC以上之液化碳酸氣供給至節流噴頭裝置53。之後， 供給至節流噴頭裝置53之液化碳酸氣1\絕熱膨脹到達大 氣壓之程度而形成乾冰雪Ts，並且可由管54採取到所形 成之乾冰雪Ts。 此時液化碳酸氣儲藏容器1A之壓力減少了，可利用 溫度控制手段6，經由加熱使液化碳酸氣儲藏容器1A之 壓力保持在6MPa以上，如此液化碳酸氣儲藏容器1A之 壓力經常保持在6MPa以上。保持一定之壓力供給液化碳 酸氣1^至節流噴頭裝置53，使乾冰雪Ts在穩定的狀態下 生產供給。但是上述之溫度控制手段6，因爲在一定壓力 下控制液化碳酸氣TY之液化狀態維持溫度，不會浪費液 化碳酸氣ΤΥ，直接以液化狀態之液化碳酸氣供給至節 流噴頭裝置53而生成乾冰雪Ts，使洗淨被洗淨物之效率 較好。 另一個虹吸管式液化碳酸氣儲藏容器1B進行液態碳 酸氣1Y之塡充補給。首先閥V4以及閥V5爲打開狀態，由 氣體容器7將淸洗用氣體P，以壓力調整器8調整所希望 之壓力，例如調整壓力至〇.3MPa，通過管9後供給至導 出管4，最後由排出閥V5排出，而淸洗導出管4使導出管 4內部存在之粒子或水份等異物排出。在淸洗用氣體P爲 碳酸氣之情況下，淸洗後將排出閥V5關閉，液化碳酸氣 儲藏容器1B內也可預先以淸洗用氣體p升壓到運轉壓力 25 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） •••V I -----------裝-------訂--------- (請先閱讀背面之注意事項再填寫本頁) 478974 B7 6425pif.doc/008 五、發明說明（4) 6MPa以上，並且之後要將閥v4關閉，等待下一次之製程 的乾冰雪產生供給製程來臨。同樣的在這期間，在6MPa 以上的壓力下，當然必須利用溫度控制手段6控制溫度， 維持碳酸氣之液化狀態溫度在20°C以上之溫度。 如此在液化碳酸氣儲藏容器1A內的液化碳酸氣TY即 將用完之前，接著將上述處於補給塡充待機狀態之另一個 液化碳酸氣儲藏容器1Β的原料閥V1B打開，同時將液化 碳酸氣儲藏容器1A的原料閥vlA關閉。此時液化碳酸氣 儲藏容器1B進行乾冰雪產生供給製程，而液化碳酸氣儲 藏容器1A進行補給塡充製程。接著開關閥V2必須適當的 控制開關將液化碳酸氣儲藏容器1B儲藏之6MPa以上之 壓力、溫度在20°C以上之液化碳酸氣ΊΥ供給至節流噴頭 裝置53。並可在管54採取到由節流噴頭裝置53絕熱膨脹 所形成的乾冰雪Ts。在這期間當然溫度控制手段6持續動 作，控制溫度維持在20°C以上，使碳酸氣保持在液化之狀 態下。此結果在維持一定之壓力下，供給液化碳酸氣τγ 至節流噴頭裝置53,使乾冰雪Ts在穩定的狀態下生產供 給。但是上述之溫度控制手段6，因爲是在一定壓力下控 制液化碳酸氣之液化狀態保持溫度，因此不會浪費液 化碳酸氣ΤΥ，直接使液化狀態之液化碳酸氣Τί供給至節 流噴頭裝置53而生成乾冰雪Ts，且可穩定的洗淨被洗淨 物。 一方面進入補給塡充製程之虹吸管式液化碳酸氣儲藏 容器1A塡充補給液態碳酸氣ΐγ。首先，閥V3以及排出 26 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） I I I I I I I I I I I ---II---^>11111111 ^_MW. (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 6425pif.doc/008 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明) 閥V6爲打開狀乾’由氣體谷器7將淸洗用氣體p，以壓力 調整器8調整壓力至0.3MPa，通過管9後供給至導出管3， 並由排出閥V6排出，而淸洗導出管3使導出管3內部存 在之粒子或水份等異物排出。在淸洗用氣體P爲碳酸氣之 情況下，淸洗後將排出閥V6關閉，液化碳酸氣儲藏容器1A 內也可預先以淸洗用氣體P升壓到運轉壓力6MPa以上， 之後將閥V3關閉，等待下一次之製程的乾冰雪產生供給 製程來臨。同樣的在這期間，在6MPa以上的壓力下，當 然利用溫度控制手段6控制溫度，維持碳酸氣之液化狀態 溫度在20°C以上之溫度。 因此，第一實施例的乾冰雪生產供給裝置，由兩個虹 吸管式液化碳酸氣儲藏容器ΙΑ、1B依序反覆切換運轉， 進行乾冰雪生產供給製程以及補給塡充製程等製程。所以 在液化碳酸氣儲藏容器設置溫度控制手段，藉由溫度的控 制，使液化碳酸氣TY維持液體狀態，進而可以完成在有 效率以及安定的狀態下產生供給乾冰雪，並且在安定之狀 態下進行洗淨。 而且上述實施例爲設置一到兩個的虹吸管式液化碳酸 氣儲藏容器，由此說明切換運轉操作的方法，必要時可以 應用三個以上之複數個，當然只有設置一個也可進行。而 且淸洗用氣體Ρ主要是用來洗淨導出管3或導出管4。 第二實施例 關於本發明之乾冰雪產生供給裝置之第二實施例，由 27 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 先 閱 讀 背 意 事 項 再丨 寫 本 頁 裝 訂 478974 A7 B7 6425pif.doc/008 五、發明說明) 第2圖之第二乾冰雪產生供給裝置爲例示說明。第2圖中 和第一實施例的第1圖所顯示之機器，有一些共通之機器， 對於相同的機器，省略其詳細之說明。此第二實施例之乾 冰雪產生供給裝置之特徵在於液化碳酸氣儲藏容器。係使 用兩口式液化碳酸氣儲藏容器21，分別在容器內上方以及 下方設置用於連通的連通口 21a與連通口 21b。上方之連 通口 21a通過昇壓用氣體G例如碳酸氣等不活潑氣體所塡 充之氣體容器22、閥V21、壓力調整器23以及閥V22後， 並與管24連接在一起。另一方面下方之連通口 21b通過 閥V23、管25以及可以適當開關操作例如是電磁閥之閥' 後，並與節流噴頭裝置53連接在一起。另外此兩口式液 化碳酸氣儲藏容器21，爲了使容器中之液化碳酸氣ΐγ維 持液化之狀態，而設置可控制溫度之溫度控制手段6。 上述說明第二實施例之乾冰雪生產供給裝置之組成， 接著說明運轉操作。首先閥V23爲關閉狀態且閥V21以及 閥V22爲打開狀態，由氣體容器22將升壓用氣體G通過 閥V21導出，並由壓力調整器23調整所希望之壓力例如至 調整至6MPa以上之壓力，之後由管24經過閥V22供給至 兩口式液化碳酸氣儲藏容器21。因此兩口式液化碳酸氣儲 藏容器21內之壓力維持在6MPa以上之壓力。同樣的在 這期間，爲了使上述之6MPa以上的壓力下之液化碳酸氣 TlJ隹持在液化狀態，使溫度控制手段6動作，而控制兩口 式液化碳酸氣儲藏容器21內之溫度維持在20°C以上之溫 度。接著打開閥V23，由管25導出液化碳酸氣TY，並且 28 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） "~ ----- - --ml裝s — i丨訂丨 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.doc/008 五、發明說明（允） (請先閱讀背面之注意事項再填寫本頁) 適當的開關操作開關閥V2將6MPa以上壓力之液化碳酸氣 八供給至節流噴頭裝置53。供給至節流噴頭裝置53之 6MPa以上壓力之液化碳酸氣TL，在節流噴頭裝置53絕熱 膨脹到達大氣壓之程度形成乾冰雪Ts，並經由管54供給 所形成之乾冰雪Ts。 因此，由例如是電磁閥之閥V2的開關操作，使液化 碳酸氣TY在節流噴頭裝置.53絕熱膨脹形成乾冰雪Ts。此 時利用升壓用氣體G經常調整兩口式液化碳酸氣儲藏容器 21內之壓力在6MPa以上壓力，在極穩定的狀態下，供給 節流噴頭裝置53所生成之乾冰雪，可安定的洗淨被洗淨 物。 上述之爲本發明第一實施例以及第二實施例個別的乾 冰雪產生供給方法，利用液化碳酸氣儲藏容器內之壓力控 制在6MPa以上以及對應控制溫度須維持在20°C以上爲說 明例，此並非用於限定本發明。碳酸氣之液化狀態保持壓 力與其所對應之溫度，較佳之壓力與溫度由洗淨效率的觀 點來看，合乎理想之壓力是越高越好，至少在6MPa或6MPa 以上壓力是合乎理想的，控制溫度是以對應壓力使碳酸氣 保持液化狀態之溫度就好。 經濟部智慧財產局員工消費合作社印製 因此加熱控制液化碳酸氣溫度之溫度控制手段，並非 用於限定設置在個別的儲藏容器。在此所用的儲藏容器或 氣體容器，可收藏在例如是圓筒室備有排氣手段與溫度控 制手段之密閉室中。在此密閉室內可控制液化碳酸氣至例 如上述之適宜溫度，當然到達所希望之溫度也需要加壓。 29 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 A7 B7 6425pif.doc/008 五、發明說明（θ) 接著’請參照圖形說明關於本發明之乾冰雪洗淨裝 置。 第3圖爲說明本發明第一乾冰雪洗淨裝置之系統槪略 圖。第4圖爲第一乾冰雪洗淨裝置所使用之流通管路長調 整機構所揭7K之一例之系統槪略圖。 請參照第3圖，其中本發明第一乾冰雪洗淨裝置 是由乾冰雪供給系統109以及噴射用氣體供給系統118所 構成。乾冰雪供給系統109是將儲藏液化碳酸氣TL之液 化碳酸氣容器101內之液化碳酸氣TL生成乾冰雪Ts，供 給至洗淨噴頭108而組成。噴射用氣體供給系統118是爲 增進從上述之洗淨噴頭108噴出之乾冰雪Ts之噴射，塡 充例如氮氣之高壓氣體當作噴射用氣體源，由噴射用氣體 源容器111將噴射用氣體沿著上述之洗淨噴頭108與上述 之乾冰雪Ts之噴出口 l〇8d之外圍噴射口 l〇8g連通，而 連接設置所組成。 上述之乾冰雪供給系統109是由液化碳酸氣容器101 通過管路102，連結例如電磁閥可控制液化碳酸氣供給 量之開關手段103，接著通過管路104，連結例如針形閥 或銳孔使液化碳酸氣ΤΥ變成乾冰雪.Ts之節流機構105， 而且節流機構105通過管路106並與控制箱120壁上所配 設之連接具121連結。因此連接具121連結由可撓性之中 心管l〇7a與外管107b組成之略爲同心的二重管，並且形 成流通管路107。上述配置管路106與中心管l〇7a連通。 此外，流通管路107之前端略爲中心之位置上配置將乾冰 30 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ----丨丨丨丨丨！丨裝！丨丨丨丨訂-丨---丨丨！ C請先閱讀背面之注意事項再填寫本頁} 經濟部智慧財產局員工消費合作社印製 478974 6425pif.doc/008 ______ 五、發明說明（) 雪Ts噴出具有中心噴出管l〇8a之洗淨噴頭108。上述流 通管路107之中心管107a與中心噴出管108a連通並連結 在一起。 (請先閱讀背面之注意事項再填寫本頁) 另一方面上述之爲了增進乾冰雪Ts噴射之噴射用氣 體供給系統118是由塡充氮氣等之高壓氣體1G之噴射用 氣體源容器111通過管路112 ’而連接所設置之開關閥113 以及壓力調整器114,接著通過管路115,連接所設置之 離子化手段116，而且離子化手段116通過管路117與連 結具121連結。此外經由離子化手段116所噴射出之噴射 用氣體1G，可將帶電之乾冰雪Ts在噴出時進行除電。因 此上述連接具121所連接之管路117與上述之流通管路1〇7 中外管107b之流路107c連通。接著與流通管路107之前 端所連接之洗淨噴頭1〇8之外管l〇8b內部之流路l〇8c連 通。然後沿著上述使乾冰雪Ts噴出之中心管l〇8a之噴出 口 108d之外圍與所配置之噴射口 l〇8g連通。 經濟部智慧財產局員工消費合作社印製 此外上述之離子化手段116包含在噴射用氣體供給系 統118中。爲了使噴射用氣體1G可加溫至一定之溫度， 而設置加熱控制手段Π9。然後以加過溫之噴射用氣體1G 經由洗淨噴頭108噴射到被洗淨物上，抑制被洗淨物之低 溫化，防止被洗淨物之表面生成結露。 而且加熱控制手段119與上述之乾冰雪供給裝置1〇9 之開關手段103以及節流機構105，全部收藏在控制箱120 內。使用時將液化碳酸氣容器101和噴射用氣體源容器111 連結直接形成乾冰雪洗淨裝置，而進行洗淨處理作業。 31 ^紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） " 478974 6425pif.doc/008 _B7_ 五、發明說明（4) (請先閱讀背面之注意事項再填寫本頁) 然而，本發明之乾冰雪洗淨裝置中，上述連接具121、 洗淨噴頭108以及流通管路107如第4圖所示。可設置管 路長不同之管107-1、107-2以及107-3…等，以適宜的操 作閥V1Q1、閥V1Q2以及閥Vm…等使乾冰雪Ts流通，而 形成可調整管路長度之流通管路長度調整機構125。亦即 第4圖爲本發明之乾冰雪洗淨裝置所使用之流通管路長調 整機構所揭示之一例之系統槪略圖。在第4圖中與第3圖 名稱相似與功用相似者爲同一構造之機器，在此省略其詳 細之說明。 第4圖所示本發明之流通管路長調整機構125是由連 接具121連接所設置之分配管122，然後由分配管122設 置個別分歧長度不同之複數個流通管路107-1、107-2、 107-3···等。然後個別的流通管路107-1、107-2、107-3 — 等，個別通過閥Vm、閥V1()2以及閥V1()3…等，再個別連 結洗淨噴頭108-1、108-2、108-3…等。接著由上述之閥 V1()1、閥V1()2以及閥V1()3…等選擇適當之一個打開操作。 在上述流通管路之內閥打開操作一個流通管路中流通乾冰 雪Ts。在經過特定長度之流通管路後，乾冰雪Ts供給至 洗淨噴頭108而噴出。 經濟部智慧財產局員工消費合作社印製 此時本發明之乾冰雪洗淨裝置可由適合的閥V1(n、閥 V1()2以及閥V1Q3…等，由其中之一個打開操作，可變化調 整所希望之流通管路長而噴射乾冰雪Ts。對應被洗淨物髒 污的情況，能夠選擇適當之噴射狀態而噴射乾冰雪Ts。此 外，上述之閥V1Q1、閥V1Q2以及閥V1Q3…等，其中之一個 32 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) 478974«— — — — I The paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (d) (Please read the notes on the back before filling (This page) In addition, the individual outlet pipes 3 and 4 of the siphon type liquefied carbon dioxide gas storage containers 1A and 1B pass through the gas container 7 and the pressure regulator 8 and communicate with the pipe 9 and are connected together after passing through the valves V3 and V4. . The gas container 7 is filled with a gas P for cleaning which is formed by inert gas such as carbonic acid gas or nitrogen gas, a low dew point, and a gas containing less particles. The pressure regulator 8 can maintain a desired supply pressure. In addition, the above-mentioned outlet pipe 3 and outlet pipe 4 may be provided with a discharge valve V5 and a discharge valve V6 when performing rinsing and removing fine particles. The above is the constitutional composition of the dry ice and snow production and supply device of the first embodiment, and the operation is explained next. Two siphon-type liquefied carbonate gas storage containers 1A and 1B. One container performs the dry ice production and supply process, and the other container performs the liquid carbon dioxide gas replenishment process to prepare for the next process in the production supply process. Here, the case where the siphon-type liquefied carbonic acid gas storage container 1A is used for the dry ice and snow production and supply process, and the siphon-type liquefied carbonic acid gas storage container 1B is used for the liquid carbon dioxide gas replenishment process will be described. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed a siphon-type liquefied carbonic acid gas storage container 1A. The liquefied carbonic acid gas τγ was filled because of the supplementary filling process of the previous process. After the cleaning and particle removal work was completed, the cleaning gas was used. In the case where P is carbonic acid gas, the cleaning gas P 塡 in the gas container 7 can be charged into the siphon-type liquefied carbon dioxide gas storage container 1A in advance, and the internal pressure of the siphon-type liquefied carbon dioxide gas storage container 1A can be increased to, for example, 6MPa pressure. At the same time, corresponding to a pressure of 6 MPa, the temperature is controlled by the temperature control means 6 to maintain the liquefied state of the liquefied carbon dioxide gas γ at a temperature of 20 ° C or more. Then, the valve V3, valve V5 and valve V1B are closed and the raw material valve v1A is opened, so that the liquefaction is 24. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 — Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (Carbon dioxide gas is exported through the siphon tube 2 and the outlet tube 3. Then the on-off valve v2 must correspond to the appropriate switching operation, so that the pressure above 6MPa and temperature 2 (TC The above liquefied carbon dioxide gas is supplied to the throttle nozzle device 53. After that, the liquefied carbon dioxide gas supplied to the throttle nozzle device 53 adiabaticly expands to atmospheric pressure to form dry ice and snow Ts, and can be taken by the pipe 54 to the formed dry gas. Snow and ice Ts. At this time, the pressure of the liquefied carbon dioxide gas storage container 1A has been reduced, and the temperature of the temperature control means 6 can be used to maintain the pressure of the liquefied carbonic acid gas storage container 1A above 6 MPa through heating. Above 6 MPa. Supply liquefied carbon dioxide gas 1 ^ to the throttling nozzle device 53 while maintaining a certain pressure, so that the dry ice and snow Ts is generated in a stable state. Supply. However, because the temperature control means 6 described above controls the temperature of the liquefied carbon dioxide gas TY under a certain pressure to maintain the temperature, the liquefied carbon dioxide gas is not wasted, and the liquefied carbon dioxide gas in the liquefied state is directly supplied to the throttling nozzle device 53. Generates dry ice and snow Ts, which makes the washing of objects more efficient. Another siphon-type liquefied carbonic acid gas storage container 1B is filled with liquid carbonic acid gas 1Y. First, the valves V4 and V5 are opened, and the gas container is opened. 7 The cleaning gas P is adjusted by the pressure regulator 8 to the desired pressure, for example, the pressure is adjusted to 0.3 MPa, and then the tube 9 is supplied to the outlet pipe 4 and finally discharged by the discharge valve V5. Foreign particles such as particles or water inside the outlet pipe 4 are discharged. In the case where the cleaning gas P is carbon dioxide, the discharge valve V5 is closed after the cleaning, and the liquefied carbon dioxide gas storage container 1B can also be washed in advance. Use gas p to increase the operating pressure to 25. This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ••• VI ----------- install ------ -Order --------- (Please read the back first Please fill in this page again for attention) 478974 B7 6425pif.doc / 008 V. Description of the invention (4) Above 6MPa, and then the valve v4 should be closed, waiting for the next dry ice and snow production supply process to come. Also during this period At a pressure of 6 MPa or higher, it is of course necessary to control the temperature by using the temperature control means 6 to maintain the temperature of the liquefied carbon dioxide gas above 20 ° C. Thus, the liquefied carbonic acid gas TY in the liquefied carbonic acid gas storage container 1A is about to be used up. Previously, the raw material valve V1B of the other liquefied carbon dioxide gas storage container 1B in the above-mentioned recharging standby state was then opened, and at the same time, the raw material valve v1A of the liquefied carbon dioxide gas storage container 1A was closed. At this time, the liquefied carbon dioxide gas storage container 1B is subjected to a dry ice and snow production supply process, and the liquefied carbon dioxide gas storage container 1A is subjected to a replenishment / charging process. Then, the on-off valve V2 must be appropriately controlled to supply the liquefied carbon dioxide gas having a pressure of 6 MPa or more and a temperature of 20 ° C or more stored in the liquefied carbon dioxide gas storage container 1B to the throttling nozzle device 53. The dry ice and snow Ts formed by the adiabatic expansion of the throttling nozzle device 53 can be taken at the pipe 54. During this period, of course, the temperature control means 6 continues to operate, and the control temperature is maintained above 20 ° C to keep the carbon dioxide gas in a liquefied state. As a result, the liquefied carbon dioxide gas τγ is supplied to the throttling nozzle device 53 while maintaining a constant pressure, so that the dry ice snow Ts is produced and supplied in a stable state. However, the temperature control means 6 described above controls the temperature of the liquefied carbon dioxide gas under a certain pressure to maintain the temperature. Therefore, the liquefied carbon dioxide gas is not wasted, and the liquefied carbon dioxide gas in the liquefied state is directly supplied to the throttling nozzle device 53. Dry ice and snow Ts are generated and the objects to be washed can be stably washed. On the one hand, the siphon-type liquefied carbon dioxide gas storage container 1A, which enters the replenishment process, is replenished with liquid carbonate gas γ. First of all, the valve V3 and the discharge size of 26 paper are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) IIIIIIIIIII --- II --- ^ > 11111111 ^ _MW. (Please read the precautions on the back before (Fill in this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention) The valve V6 is open and dry. The washing gas p is adjusted to a pressure of 0.3 MPa by the pressure regulator 8 and is supplied to the outlet pipe 3 after passing through the pipe 9 and discharged by the discharge valve V6. The particles or water existing in the outlet pipe 3 are rinsed by the cleaning pipe 3 Wait for foreign matter to be discharged. In the case where the cleaning gas P is carbon dioxide, the discharge valve V6 is closed after the cleaning, and the liquefied carbonic acid gas storage container 1A can also be pre-pressurized with the cleaning gas P to an operating pressure of 6 MPa or higher, and then the valve V3 Shut down and wait for the next dry ice and snow production supply process to come. Similarly, during this period, under a pressure of 6 MPa or more, the temperature control means 6 was used to control the temperature to maintain the liquefied state of the carbon dioxide gas at a temperature of 20 ° C or more. Therefore, in the dry ice and snow production and supply device of the first embodiment, two siphon-type liquefied carbon dioxide gas storage containers 1A and 1B are sequentially switched and operated sequentially to perform processes such as a dry ice and snow production and supply process and a replenishment / charging process. Therefore, a temperature control means is provided in the liquefied carbonic acid gas storage container, and the liquefied carbonic acid gas TY is maintained in a liquid state by the temperature control, and then the supply of dry ice and snow can be completed in an efficient and stable state, and performed in a stable state. Wash. Moreover, the above embodiment is provided with one to two siphon-type liquefied carbonic acid gas storage containers, thereby explaining the method of switching the operation operation. If necessary, a plurality of three or more can be applied, and of course only one can be used. The cleaning gas P is mainly used to clean the outlet pipe 3 or the outlet pipe 4. Second Embodiment As for the second embodiment of the dry ice and snow generating and supplying device of the present invention, the 27 paper sizes are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). Binding 478974 A7 B7 6425pif.doc / 008 V. Description of the invention) The second dry ice and snow generating and supplying device of Fig. 2 is taken as an example for illustration. The machine shown in Fig. 2 and that shown in Fig. 1 of the first embodiment have some common machines. For the same machine, detailed description is omitted. The dry ice and snow generating and supplying device of this second embodiment is characterized by a liquefied carbon dioxide gas storage container. A two-port liquefied carbon dioxide gas storage container 21 is used, and a communication port 21a and a communication port 21b for communication are provided above and below the container, respectively. The upper connection port 21a is connected to the pipe 24 by a gas container 22, a valve V21, a pressure regulator 23, and a valve V22 filled with an inert gas such as a boosting gas G such as carbonic acid gas. On the other hand, the lower communication port 21b passes through the valve V23, the pipe 25, and a valve that can be appropriately opened and closed, such as a solenoid valve, and is connected to the throttle head device 53. In addition, this two-neck liquefied carbon dioxide gas storage container 21 is provided with a temperature control means 6 capable of controlling the temperature in order to maintain the liquefied carbon dioxide gas γ in the container in a liquefied state. The composition of the dry ice and snow production and supply device according to the second embodiment is explained above, and the operation is explained next. First, the valve V23 is closed, and the valves V21 and V22 are opened. The gas container 22 leads the pressure-increasing gas G through the valve V21, and the desired pressure is adjusted by the pressure regulator 23, for example, to a pressure of 6 MPa or more. Then, it is supplied from the pipe 24 to the two-port liquefied carbon dioxide gas storage container 21 through the valve V22. Therefore, the pressure in the two-port liquefied carbon dioxide gas storage container 21 is maintained at a pressure of 6 MPa or more. Similarly, during this period, in order to hold the liquefied carbon dioxide gas TlJ at a pressure of 6 MPa or more in the liquefied state, the temperature control means 6 is operated, and the temperature in the two-port liquefied carbon dioxide gas storage container 21 is controlled to be maintained at 20 ° Temperature above C. Then the valve V23 is opened, and the liquefied carbonic acid gas TY is led out by the tube 25, and the paper size of this paper applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) " ~ --------ml packs — i 丨 Order 丨 (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (permit) (Please read the notes on the back first (Fill in this page again) Properly open and close the on-off valve V2 to supply the liquefied carbon dioxide gas with a pressure of 6 MPa or more to the throttle nozzle device 53. The liquefied carbon dioxide gas TL having a pressure of 6 MPa or more supplied to the throttle head device 53 forms dry ice and snow Ts to the extent that the throttle head device 53 adiabaticly expands to atmospheric pressure, and supplies the formed dry ice snow Ts through the pipe 54. Therefore, by opening and closing the valve V2, which is a solenoid valve, for example, the liquefied carbon dioxide gas TY is adiabaticly expanded at the throttle head device .53 to form dry ice Ts. At this time, the pressure in the two-port liquefied carbonic acid gas storage container 21 is often adjusted by using the pressure-increasing gas G to a pressure of 6 MPa or more. In a very stable state, the dry ice and snow generated by the throttle nozzle device 53 can be cleaned stably. Washed. The above are the individual dry ice and snow generating and supplying methods of the first embodiment and the second embodiment of the present invention. The pressure in the liquefied carbon dioxide gas storage container is controlled to be above 6 MPa and the corresponding control temperature must be maintained above 20 ° C as an example. This is not intended to limit the invention. Carbon dioxide gas in the liquefied state maintains the pressure and its corresponding temperature. The preferred pressure and temperature are from the viewpoint of cleaning efficiency. The higher the ideal pressure, the better. At least 6 MPa or more is desirable. The temperature is the temperature at which the carbon dioxide gas is kept in a liquefied state at a corresponding pressure. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Therefore, the temperature control means for heating and controlling the temperature of the liquefied carbon dioxide gas is not used to limit the installation in individual storage containers. The storage container or the gas container used herein can be stored in a closed room, for example, a cylindrical chamber equipped with a venting means and a temperature control means. In this closed room, the liquefied carbon dioxide gas can be controlled to a suitable temperature such as the above, and of course, pressurization is required to reach the desired temperature. 29 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (θ) Then 'Please refer to the graphic description for the dry ice and snow washing device of the present invention . Fig. 3 is a schematic diagram illustrating the system of the first dry ice and snow washing device of the present invention. FIG. 4 is a schematic diagram of an example of a 7K system disclosed by a circulation pipe length adjusting mechanism used in the first dry ice and snow washing device. Referring to Fig. 3, the first dry ice and snow washing device of the present invention is composed of a dry ice and snow supply system 109 and a jet gas supply system 118. The dry ice and snow supply system 109 is composed of the liquefied carbon dioxide gas TL in the liquefied carbon dioxide gas container 101 storing the liquefied carbon dioxide gas TL, and generates dry ice and snow Ts, which is supplied to the cleaning nozzle 108. The spraying gas supply system 118 is for enhancing the spraying of the dry ice and snow Ts sprayed from the cleaning nozzle 108 described above. A high-pressure gas such as nitrogen is filled as the spraying gas source, and the spraying gas source container 111 passes the spraying gas along the spraying gas source container 111. The above-mentioned cleaning spray head 108 communicates with the peripheral spray port 108g of the spray port 108d of the dry ice snow Ts described above, and is connected and arranged. The above-mentioned dry ice and snow supply system 109 is a liquefied carbon dioxide gas container 101 connected to a switching means 103 such as a solenoid valve that can control the supply of liquefied carbon dioxide gas through a pipe 102, and then connected to a needle valve or an acute hole through a pipe 104, for example. The liquefied carbon dioxide gas becomes a throttling mechanism 105 of dry ice and snow. Ts, and the throttling mechanism 105 is connected to a connecting device 121 provided on the wall of the control box 120 through a pipe 106. Therefore, the connector 121 connects a slightly concentric double tube composed of the flexible central tube 107a and the outer tube 107b, and forms a circulation line 107. The above-mentioned arrangement pipeline 106 communicates with the central tube 107a. In addition, dry ice will be placed at the center of the front end of the circulation pipe 107. The paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) ---- 丨 丨 丨 丨!丨 Install!丨 丨 丨 丨 Order- 丨 --- 丨 丨! C Please read the notes on the back before filling in this page} Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 ______ 5. Description of the invention () Snow Ts sprays the cleaning nozzle with a central spray tube 108a 108. The center pipe 107a of the above-mentioned flow path 107 communicates with the center discharge pipe 108a and is connected together. (Please read the precautions on the back before filling this page.) On the other hand, the above-mentioned injection gas supply system 118 for enhancing the Ts injection of dry ice and snow is a gas source container 111 for injection, which is filled with a high-pressure gas such as nitrogen. The opening and closing valve 113 and the pressure regulator 114 are connected to the circuit 112 ′, and then the ionizing means 116 provided is connected to the ionizing means 116 through the line 115, and the ionizing means 116 is connected to the link 121 through the line 117. In addition, the spraying gas 1G sprayed by the ionizing means 116 can remove the charged dry ice and snow Ts when spraying. Therefore, the pipeline 117 connected to the connector 121 is in communication with the flow path 107c of the outer tube 107b in the above-mentioned circulation pipeline 107. Next, it communicates with the flow path 108c inside the outer tube 108b of the cleaning nozzle 108 connected to the front end of the circulation pipe 107. Then, the periphery of the discharge port 108d of the central tube 108a for spraying dry ice and snow Ts is communicated with the configured spray port 108g. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The ionization means 116 described above is included in the injection gas supply system 118. In order to heat the injection gas 1G to a certain temperature, a heating control means Π9 is provided. Then, the overheated spray gas 1G is sprayed onto the object to be cleaned through the cleaning nozzle 108, thereby suppressing the temperature of the object to be cleaned and preventing condensation on the surface of the object to be cleaned. In addition, the heating control means 119, the above-mentioned switching means 103 and the throttle mechanism 105 of the dry ice and snow supply device 109 are all stored in the control box 120. When in use, the liquefied carbonic acid gas container 101 and the spraying gas source container 111 are connected to directly form a dry ice and snow washing device, and a washing treatment operation is performed. 31 ^ The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) " 478974 6425pif.doc / 008 _B7_ V. Description of the invention (4) (Please read the precautions on the back before filling this page) However In the dry ice and snow cleaning device of the present invention, the connector 121, the cleaning nozzle 108, and the circulation pipe 107 are as shown in FIG. Pipes 107-1, 107-2, 107-3, etc. with different pipeline lengths can be set. The appropriate operation of valve V1Q1, valve V1Q2, and valve Vm, etc. allows the dry ice and snow Ts to circulate to form an adjustable pipeline length. Circulation pipeline length adjustment mechanism 125. That is, FIG. 4 is a schematic diagram of a system disclosed by an example of a circulation pipe length adjusting mechanism used in the dry ice and snow cleaning device of the present invention. In Fig. 4 and Fig. 3, the names and functions are similar. The detailed description is omitted here. The circulation pipe length adjusting mechanism 125 of the present invention shown in FIG. 4 is connected to the distribution pipe 122 provided by the connecting device 121, and then the distribution pipe 122 is provided with a plurality of circulation pipes 107-1, 107- 2, 107-3 ... etc. Then the individual circulation lines 107-1, 107-2, 107-3 — etc., each pass through the valve Vm, valve V1 () 2, valve V1 () 3, etc., and then the cleaning nozzles 108-1, 108 are individually connected. -2, 108-3 ... etc. Then, an appropriate one of the opening operations is selected by the above-mentioned valve V1 () 1, valve V1 () 2, valve V1 () 3, etc. The valve is opened in the above-mentioned circulation pipeline to operate dry ice and snow Ts in a circulation pipeline. After passing through the circulation pipe of a specific length, the dry ice and snow Ts is supplied to the cleaning nozzle 108 and sprayed. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs at this time, the dry ice and snow washing device of the present invention can be opened by one of the appropriate valves V1 (n, V1 () 2, V1Q3, etc., etc., and can be adjusted by changing The desired circulation pipeline is long and sprays dry ice and snow Ts. Corresponding to the situation where the washings are dirty, the appropriate spray state can be selected to spray dry ice and snow Ts. In addition, the above-mentioned valves V1Q1, V1Q2, and V1Q3, etc. One of 32 paper sizes is applicable to China National Standard (CNS) A4 (210 X 297 mm) 478974

6425pif.doc/008 五、發明說明（补） 爲打開操作，流通管路長不同之流通管路1〇7_1、107-2、 (請先閱讀背面之注意事項再填寫本頁) 107- 3…等之中可使用複數個不同流通管路長之流通管 路，並且配置在噴出乾冰雪Ts之洗淨噴頭108-1、108-2、 108- 3…等上。例如爲了對應大量洗淨處理而作爲個別的 配置固定住之洗淨線，被洗淨物經由洗淨線自動輸送，不 同長度之流通管路對應之洗淨位置爲不同之特定位置，因 此可在短時間內進行大量被洗淨物之洗淨處理。 此外，上述之閥V1Q1、閥V1()2以及閥V1G3…等可使用 例如爲迴轉切換閥之集合化閥使得操作上較方便。而且上 述之長度不同之流通管路1〇7·1、107-2、107-3…等和在 第五圖說明之通管路107爲相同構造之物品，是由可流通 乾冰雪1^之中心管107a、包圍中心管107a並且與中心管 107a同軸而配置之外管107b以及包圍中心管107a之外管 l〇7b內部可流通噴射用氣體1G之流路107c所組成。 經濟部智慧財產局員工消费合作社印製 另外，洗淨噴頭108-1、108_2、108-3…等之構造也 和上述之第五圖中心之中心噴出管l〇8a相同。是由中心 噴出管108a、配置與中心噴出管l〇8a同軸之外管l〇8b以 及沿著中心噴出管l〇8a之外圍在外管108b內部之流路 l〇8c所組成。其前端連通沿著乾冰雪噴出口 l〇8d之外圍 所配置之噴射口 108g。 因此，由噴出噴射用氣體1G之噴射口 108g與噴出乾 冰雪之噴出口 108d之構成，而使噴射用氣體1G與乾冰雪1 Ts之噴出流形成並行流。此結果使噴射用氣體1G伴隨車乞 冰雪Ts而噴射至被洗淨物，而可增進洗淨效果。 33 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（Μ ) 第三實施例 接著第三實施例爲說明上述之本發明之乾冰雪洗淨裝 置所使用之洗淨方法。 在6Mpa左右壓力之液化碳酸氣τγ，由液化碳酸氣容 器101通過管102而導出，在開關手段1〇3爲打開之狀態 下連續供給至節流機構105。然後在節流機構105絕熱膨 脹形成乾冰雪Ts。之後所生成之乾冰雪Ts通過管路1〇6 到達連結具121，接著乾冰雪Ts經由如第4圖所示之分配 管122流入管路長不同之流通管路1〇7·1、107-2、107-3… 等之中心管l〇7a。然後通過沿著所配置之各流通管路上爲 打開狀態之閥Vm、閥Vl()2以及閥VlQ3…等。在打開狀態 之流通管路107-1、107-2、107-3…等之中，至少有一個 的管路和中心管l〇7a相通。在所通過之洗淨噴頭108-1、 108_2、108-3…等之中，至少有一個通過中心噴出管l〇8a 經由噴出口 l〇8d向被洗淨物噴出乾冰雪Ts。 另一方面，同時由乾燥、低露點之氮氣等形成之噴射 用氣體1G，由噴射用氣體源容器111通過管路Π2導出， 經過開關閥Π3後並利用壓力調整器114調整壓力爲一定 之壓力在〇.2MPa左右，而通過管路115導入離子化手段 116。之後，經由離子化手段116離子化後，噴射用氣體1G 由管路117流入連結具121，接著到達第4圖所示之分配 管 122。 接著噴射用氣體1G由如第4圖所示之分配管122流 34 «裝 (請先閲讀背面之注意事項再填寫本頁) •MB I aw ----訂--- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 A7 B7 6425pif.doc/008 五、發明說明（β) 入管路長不同之流通管路107-1、107-2、107-3…等之外 管107b內之流路l〇7c。然後通過沿著所配置之各流通管 路上爲打開狀態之閥V1Q1、閥V1()2以及閥V1()3…等。在此 打開狀態之流通管路107-1、107-2、107-3…等之中，至 少有一個的管路和外管107b內之流路107c相通。在通過 洗淨噴頭108-1、108-2、108-3…等之中，至少有一個導 入洗淨噴頭108。然後由與外管107b內之流路107c相通 之噴射用氣體1G之噴出口 108g向被洗淨物噴出與乾冰雪 Ts噴出流並行之氣流。6425pif.doc / 008 V. Description of the Invention (Supplement) For the opening operation, the circulation pipelines with different lengths of circulation pipelines 107-7_1, 107-2, (Please read the precautions on the back before filling this page) 107- 3 ... Among them, a plurality of circulation pipelines with different circulation pipeline lengths can be used, and they are arranged on the cleaning nozzles 108-1, 108-2, 108-3, etc. that spray dry snow and snow Ts. For example, in order to deal with a large number of washing treatments, the washing line is fixed as an individual configuration. The objects to be washed are automatically conveyed through the washing line. The washing positions corresponding to the circulation pipes of different lengths are different specific positions. A large number of objects to be washed are cleaned in a short time. In addition, the above-mentioned valves V1Q1, V1 () 2, and V1G3, etc. can be used. For example, a collective valve such as a rotary switching valve makes operation easier. In addition, the circulation pipes 107, 1, 107-2, 107-3, etc. of different lengths described above have the same structure as the passage 107 described in the fifth figure, and are made of dry ice and snow. The central tube 107a, an outer tube 107b surrounding the central tube 107a and disposed coaxially with the central tube 107a, and a flow path 107c through which the injection gas 1G can flow inside the outer tube 107b surrounding the central tube 107a. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs In addition, the structure of the cleaning nozzles 108-1, 108_2, 108-3, etc. is also the same as that of the central discharge pipe 108a in the center of the fifth figure above. It is composed of a central ejection tube 108a, an outer tube 108b arranged coaxially with the central ejection tube 108a, and a flow path 108c inside the outer tube 108b along the periphery of the central ejection tube 108a. Its front end communicates with 108 g of spray ports arranged along the periphery of the dry ice and snow spray port 108d. Therefore, the ejection gas 108G for ejecting the ejection gas 1G and the ejection outlet 108d for ejecting the dry ice and snow are configured to form a parallel flow between the ejection gas 1G and the ejection flow of 1 Ts of dry ice and snow. As a result, the spraying gas 1G is sprayed onto the object to be cleaned along with the snow and ice Ts, and the cleaning effect can be improved. 33 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of Invention (M) The third embodiment is to explain the cleaning method used in the dry ice and snow cleaning device of the present invention. The liquefied carbon dioxide gas τγ at a pressure of about 6 MPa is derived from the liquefied carbon dioxide gas container 101 through the tube 102 and is continuously supplied to the throttle mechanism 105 with the switch means 103 turned on. Then it expands adiabatically at the throttle mechanism 105 to form dry ice and snow Ts. The generated dry ice and snow Ts reaches the connecting device 121 through the pipeline 106, and then the dry ice and snow Ts flows into the circulation pipelines 107 · 1 and 107- of different lengths through the distribution pipe 122 shown in FIG. 4. 2, 107-3 ... etc. of the central tube 107a. Then, the valves Vm, Vl () 2, VlQ3, etc., which are in an open state are arranged along each of the flow lines arranged. Among the open circulation pipes 107-1, 107-2, 107-3, etc., at least one of the pipes communicates with the central pipe 107a. Among the passing cleaning nozzles 108-1, 108_2, 108-3, etc., at least one sprays dry ice and snow Ts to the object to be cleaned through the central spray pipe 108a through the spray outlet 108d. On the other hand, the spraying gas 1G formed from dry, low-dew-point nitrogen at the same time is derived from the spraying gas source container 111 through the pipeline Π2, and after the valve Π3 is opened and closed, the pressure is adjusted to a constant pressure by the pressure regulator 114 At about 0.2 MPa, the ionization means 116 is introduced through the pipeline 115. After that, after being ionized by the ionizing means 116, the jetting gas 1G flows into the coupling 121 from the pipe 117, and then reaches the distribution pipe 122 shown in Fig. 4. Then the spraying gas 1G flows from the distribution pipe 122 shown in Figure 4 to 34 «pack (please read the precautions on the back before filling this page) • MB I aw ---- order --- This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (β) Circulation pipelines 107-1, 107-2, 107-3, etc. with different inlet pipeline lengths The flow path 107c in the outer tube 107b. Then, the valves V1Q1, V1 () 2, V1 () 3, etc., which are in an open state along each of the flow pipe lines arranged are passed. Among the open flow channels 107-1, 107-2, 107-3, etc., at least one of them is connected to the flow path 107c in the outer tube 107b. Among the cleaning nozzles 108-1, 108-2, 108-3, etc., at least one is introduced into the cleaning nozzle 108. Then, from the outlet 108g of the spraying gas 1G communicating with the flow path 107c in the outer tube 107b, a stream of air flowing in parallel with the dry ice and snow Ts spray stream is sprayed to the object to be cleaned.

此時，從噴射用氣體源容器111出來之噴射用氣體1G 以壓力調整器114之調整壓力在0.2Mpa左右後，以加熱 控制手段119加熱升溫至50°C甚至到90°C的溫度，而供 給至洗淨噴頭108。然後以乾冰雪Ts與加熱後之噴射用氣 體1G噴射被洗淨物。因爲洗淨噴頭108與被洗淨物非常 的接近，因此維持高溫之噴射用氣體1G也不會使乾冰雪 Ts昇華。此結果由噴射用氣體1G之加溫，使被洗淨物形 成低溫而不易凝結之狀態，可做到較好之洗淨效率。而且 使用之噴射用氣體1G爲乾燥（低露點）之氣體，可使被洗 淨物維持在乾燥之狀態，因此可防止被洗淨物結露，而得 到較佳之效果，在進行短時間的洗淨處理具有特別之效 而且加熱控制手段，具體的是由加熱器、感測器與控 制器構成，而有較好的加熱升溫控制效果。 此外，噴射用氣體1G經由離子化手段116離子化， 35 -----------·裝--------訂--------- (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐1 478974 A7 B7 6425pif.doc/008 五、發明說明（补） 而除去流體在管路中流通時，因爲流體與管路磨擦所生成 的電荷。其中所發揮之最大效果是可防止乾冰雪Ts帶電 時，因爲乾冰雪結塊而在噴洗時，所造成之被洗淨物損壞。 特別是洗淨物爲半導體接觸點表面時，在乾冰雪帶電時可 能造成被洗淨物損傷的情況下，去除乾冰雪所帶靜電可達 到非常顯著之效果。 離子化手段116,並不是只限定設置在噴射用氣體供 給系統中，而使噴射用氣體1G離子化。也可以爲了直接 使乾冰雪Ts離子化而設置在乾冰雪Ts供給系統中，不論 設置在哪一邊之供給系統都可發揮功效。 而且，離子化手段116有各式各樣之手段，例如在管 路中配置電極產生電漿，而作爲配管中流動之流體離子化 之方式的情況下。在乾冰雪Ts供給系統109中安裝電極， 因爲電極會造成乾冰雪Ts附著、堆積、阻塞等現象。所 以在此情況下，安裝在乾冰雪Ts之供給系統109是不恰 當的，而希望安裝在噴射用氣體供給系統118。此時要考 慮較適合設置之離子化手段型式，並且也要考慮周圍大氣 之離子化。此外還有其他作爲離子化之手段，例如使用電 漿放電型或軟X射線型等形式。因此並不是用以限制上述 之構件，而是有較好之適宜選擇。 而且作爲噴射用氣體所使用之氣體例如是氮氣、碳酸 氣、乾空氣等，在此是使用由高壓容器供給氣體之方式。 在使用乾空氣的情況下，較佳是利用壓縮機等機器。 液化碳酸氣容器，較佳是使用所謂之高壓氣體容器。 36 本紙張尺度適用中國國家標準(CNS)A4規格（210 X 297公釐） ' 一 ---I--丨丨丨丨丨裝i丨—丨丨丨丨訂------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.doc/008 五、發明說明（科） (請先閱讀背面之注意事項再填寫本頁) 高壓氣體容器是由金屬製的內外容器構成’在內外容器間 有真空層，並且在真空絕熱容器裡面塡充液化碳酸氣，不 過使用大型真空絕熱容器亦可。 接著爲了證明本發明之乾冰雪洗淨方法之效果而進行 下列之實驗。 實驗1 實驗1爲使用第3圖所示之系統，作爲本發明之乾冰 雪洗淨裝置。以半導體檢查裝置的一部份作爲被洗淨物， 將老化測試基板或探針卡上所附著之油份 '樹脂片、銲錫 屑、鋁、矽、銅等去除洗淨。 本發明以針型閥作爲節流機構105,以加熱器與PID(比 例、積分、微分）控制器作爲加熱控制手段、使用電漿放 電方式離子化手段、並將離子化手段設置於噴射用氣體供 給系統118。 由乾冰雪供給裝置109中之節流機構105出口附近到 洗淨噴頭108形成長度500mm之流通管路。使用第4圖 所示之流通管路調整機構，選擇流通管路107，並固定使 用配管之材質爲鐵弗龍製之中心管l〇7a。 實驗條件與實驗內容如下： 經濟部智慧財產局員工消費合作社印製 實驗條件 •噴射用氣體1G:使用公稱露點爲65°C之氮氣作爲 高壓氣體(供給壓力：0.2MPa〜0.78MPa，常溫、65NL/min)。 •液化碳酸氣：（供給壓力：6Mpa左右，常溫）。 •週邊溫度：室溫。 37 ^紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱1 478974 A7 6425pif.d〇c/008 五、發明說明（3) 實驗內容 實驗設定乾冰雪Ts之供給時間爲2.0秒，連續的使乾 冰雪Ts由洗淨噴頭1〇8之噴出口 l〇8d噴出。一方面以〇.2 MPa氮氣作爲噴射用氣體1G，經由加熱控制手段升溫至60 。(：後，連續的使噴射用氣體1G由洗淨噴頭108之噴出口 108d噴出。之後，在此狀態下，確認探針卡凝結的發生狀 態與附著之銲錫屑的除去狀態。 然後，以此作爲第一段處理，由第一段處理確認上述 之狀態〔檢查1〕。繼續重複操作一^次同樣之處理，並由 第二段處理確認上述之狀態〔檢查2〕，接著繼續加[人_ 段處理，並由第三段處理確認上述之狀態〔檢查3〕，由 三個處理依序進行檢查。 此貫驗之結果如表一所示。而且銲錫屑之除去狀能是 由接觸電阻來確認’必須低於0.5以下才合格。此外了關 於凝結’因爲生成之水滴蒸發後會形成污染而殘留，可以 由目視來確認有沒有凝結。 -----------·裝--------訂------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 8 3 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公楚1---- 478974 6425pif.doc/008 A7 B7 五、發明說明（功) 經濟部智慧財產局員工消費合作社印製 表一 有無 凝結 摧 m 摧 接觸 電阻 (0.5 以 下合格） 一部分 大於0.5 一^區塊 大於0.5 全部在 0.5以下 液化碳 酸氣噴 射停止 時間 (sec) 〇 (N 〇 (N 液化碳 酸氣噴 射時間 (sec) 2+2 ! 2+2+2 噴射用 氣體設 定溫度 (°C) 液化碳 酸氣供 給量 (kg/min) 0.13 0.13 0.13 節流機構 洗淨噴頭 流通管路 長(mm) 500 500 500 處理 內容 第一段 處理 第二段 處理 第三段 處理 檢查 號碼 (N 39 -----------·裝--------訂-------丨 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 A7 B7 6425pif.doc/008 五、發明說明（1) 首先，經由檢查1在被處理物爲探針卡之情況下，確 認被處理物沒有凝結之發生。而且確認銲錫屑之除去狀態 爲90%(部分之接觸電阻大於0.5)。 接著，經由檢查2在被處理物爲探針卡之情況下，確 認被處理物沒有凝結之發生。因此銲錫屑之除去狀態，認 出一個銲錫屑之痕跡（一個地區接觸電阻大於0.5)。 最後，經由檢查3在被處理物爲探針卡之情況下，確 認被處理物沒有凝結之發生。因此證明全部之銲錫屑爲完 全除去之狀態（接觸電阻小於0.5)。認爲洗淨步驟進行的很 好。 此外，噴射用氣體1G可根據附著物之種類、污染度 以及附著力之強度，經由改變噴射壓力而改變洗淨特性。 實驗2 接著實驗2爲改變節流機構105至洗淨噴頭108之流 通管路長，在流通管路長爲45mm、200mm、500mm、 1000mm、1500mm以及2000mm之情況下，確認洗淨之效 果。 流通管路長之設定是由第4圖之流通管路長調整機構 上所整合之流通管路107-1、107-2、107-3…等之中，配 置所需要之管路長度之管路，所使用之中心管l〇7a ’其配 管材質爲可撓式之不鏽鋼，並進行閥V1Q1、閥V1Q2以及閥 V1()3…等之切換操作。 被洗淨物使用老化測試基板，進行老化測試基板之附 著之油份、樹脂片、銲錫屑、鋁、矽、銅等之去除。 40 ------------·裝---- (請先閱讀背面之注意事項再填寫本頁) 訂------- 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 B7 6425pif.doc/008 五、發明說明（β) 實驗條件與實驗1相同如下： 實驗條件 •噴射用氣體1G:使用公稱露點爲65°c之氮氣作爲 高壓氣體（供給壓力·· 〇.2MPa〜〇.78MPa，常溫、65NL/min)。 •液化碳酸氣··（供給壓力·· 6Mpa左右，常溫）。 •週邊溫度：室溫。 實驗內容 實驗設定乾冰雪Ts供給時間爲120秒，連續的使乾 冰雪Ts由洗淨噴頭108之噴出口 108d噴出。一方面以0.2 MPa氮氣作爲噴射用氣體1G經由加熱控制手段升溫至60 度，連續的使噴射用氣體1G由洗淨噴頭108之噴出口 108d 噴出。之後，在此狀態下，經由流通管路長之差異，確認 以老化測試基板作爲被洗淨物之洗淨狀態。以及確認噴射 到被洗淨物上，乾冰雪Ts之噴出壓力（MPa)。此結果以表 二表示 此外，噴出壓力是以壓力測定膜（富士軟片製，商品 名稱：富士壓力裝置）進行測試。 ----------!^ιι·裝 ----—訂 i — (請先閱讀背面之注意事項再填寫本頁) # 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 A7 6425pif.doc/008 五、發明說明（β ) 表二 節流機構之洗淨 噴頭之長度(mm) 洗淨時之壓力 (MPa) 老化測試基板之洗 淨性 45 105 洗淨不良 200 10 良好 500 19.5 良好 1000 22 良好 1500 25 良好 2000 33 良好 從實驗2之結果，關於本發明之乾冰雪Ts洗淨裝置， 從節流機構105到洗淨噴頭1〇8之流通管路長之長度分別 爲 45mm、200mm、500mm、1000mm、1500mm 以及 2000mm。 連續的噴射乾冰雪Ts，同時連續的流通噴射用氣體1G， 以除去附著在被洗淨物上之金屬粒子，而且證明被洗淨物 不會發生凝結。因此證明節流機構1〇5出口附近之流通管 路長度，在200mm以上時，洗淨被洗淨物之效果十分顯 著。此外由配管之材質也可看出洗淨性之差異，由材質之 方面來看，不鏽鋼管不如鐵弗龍管洗淨力好。而且證明伴 隨流量之增加洗淨力也會增加。 此外，上述從節流機構1〇5到洗淨噴頭108之流通管 路長之長度，形成之每個長度都以壓力測定膜測試。而證 明流通管路長之長度越長，洗淨時之壓力會上升。因此對 42 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -----------裝-------—訂----- (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.doc/008 五、發明說明（U〇 ^ 於除去對象物之附著狀態或被洗淨物之耐壓強度’經由調 整流通管路之長度，進行適當之洗淨處理同時’ ϋ可證 明洗淨效率會上升。 (請先閱讀背面之注意事項再填寫本頁) 於上述實驗中，將被洗淨物配置在密閉空間而進行洗 淨，被洗淨物在例如是球狀箱等密閉空間中，昇華之碳酸 氣或噴射用氣體由抽風機吸引，使保持在密閉空間中之流 體離子化，經由除電而可進行較佳之洗淨效率。 此外在洗淨時，爲了收集由洗淨所除去之油份、樹脂 片、銲錫屑、鋁、矽、銅等之除去物，在略爲密閉空間進 行洗淨，並從略爲密閉空間的一部份進行排氣。 而且，在進行洗淨時，洗淨場所的淸潔性也是問題， 例如在ΗΕΡΑ過濾器、具備有過濾器之淸潔作業台或通風 室進行洗淨，就不會造成環境的污染。 經濟部智慧財產局員工消費合作社印數 此外，洗淨噴頭與所裝配之流通管路如第5圖所示， 乾冰雪％之噴出管108a與在噴出管108a周圍所配置略爲 同軸之外管l〇8b形成二重管，接著在二重管的最外側配 置略爲同軸之排氣管128b，此排氣管128b整個包覆住二 重管而形成三重管構造之洗淨噴頭128。以三重管構造之 洗淨噴頭128最外管之排氣管128b .內形成之流路128c開 始吸引。利用洗淨噴頭128前端所配置之集塵罩129吸引 經由洗淨而除去之除去物，而將除去物集塵，，並在洗淨 的同時儘可能的排除。 而且，洗淨噴頭128所接的可撓性流通管路127亦可 在能夠整合洗淨噴頭128管路之中心管107a之外側配置 43 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公楚1 " 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明） 略爲同軸之外管107b °此外’當然亦可在最外側配置略爲 同軸之排氣管127b而形成三重管構造之流通管路127。 於上述之實驗中，被洗淨物是以影印機之循環零件、 半導體晶圓、半導體檢查裝置以及其零件、電路板、MR 頭、塑化成形之殘渣以及精密零件爲示範對象。當然本發 明並不只限定在這些物品’也可適用在香瓜、橘子、西瓜 等水果、蔬菜等食物之洗淨。 此外，關於本發明知第二乾冰雪洗淨裝置所用之乾冰 雪噴射裝置之實施型態可參照圖示加以說明。第6圖爲本 發明第二乾冰雪產生供給裝置之乾冰雪噴射裝置說明剖面 圖。第7圖爲乾冰雪噴射裝置的正面圖。於第6圖與第7 圖中，本發明之乾冰雪噴射裝置201是由液化碳酸氣供給 線257之管256、連接之內管202以及沿著內管202外圍 配置保持圍繞之間隙203，連接噴射用氣體供給線249之 管248與外筒205所配設之外管204而構成之，而且外筒 205圍繞內管202形成略爲同軸之二重管。 內管202 —端貫通外筒205之一邊的筒端部面，接著 通過接合構件259，並連接上述相通之液化碳酸氣供給線 之管256。內管202之另一端202b通過外筒205內部之套 子206,在前端配設可延伸到外部之連接圓錐狀擴張型乾 冰雪噴射噴頭207。接著內管202與外管205形成略爲同 軸之二重管，由於各個塞子206所阻塞之區域爲密封的， 所以內管202中所流動之液化碳酸氣與外管205中流動之 噴射用氣體不會混合。 44 (請先閲讀背面之注意事項再填寫本頁) ·1 a··· ----訂--- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 A7 B7 6425pif.doc/008 五、發明說明（眇） (請先閱讀背面之注意事項再填寫本頁) 在圓錐狀擴張型乾冰雪噴射噴頭207與內管202間之 圓錐狀擴張型乾冰雪噴射噴頭207的液化碳酸氣（乾冰雪) 流路。由連接側近面207a前端具有較小口徑狀態之節流 裝置208朝向前端噴出口 207b方向緩慢擴大口徑而形成 圓錐狀209。此外前端噴出口 207b漸漸形成扁平形狀210 之狀態，而且扁平形狀210之短邊部分有側邊間隙之凹口 211，長邊部分有限制裝置212。噴出口 207b之正面形成 像「=」文字形狀之開口。因此在噴出口 207b因爲噴射噴 頭前端形成側邊間隙之凹口 211以及兩個限制裝置212, 不會形成矩形之形狀，而大致形成平行。於是將液化碳酸 氣h導入乾冰雪噴出噴頭，在通過節流裝置時，液化碳 酸氣TY絕熱膨脹形成乾冰雪Ts，並從限制裝置212與側 邊縱切之凹口 211所形成之前端噴出口 207b噴射乾冰雪 Ts ° 經濟部智慧財產局員工消费合作社印製 另一方面，外筒205是設置在沿著擴張圓錐狀乾冰雪 噴射噴頭207之外圍，外筒205之前端面205a設置爲了 使噴射用氣體2G噴出之噴射用氣體噴出口 213。此噴射 用氣體噴出口 213之形狀爲細長之形狀。因此配置噴射用 氣體噴出口 213與配置在上述之擴張圓錐狀乾冰雪噴射噴 頭207之前端噴出口 207b所連結兩個限制裝置212之管 線略爲平行。較佳的是在連結兩個限制裝置212之管線中 心至少對稱管線而配置兩個噴射用氣體噴出□ 213。因此 噴射用氣體噴出口 213之位置，較佳的是與連結兩個限制 裝置212之管線平行之關係。所配置之噴射用氣體噴出口 45 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 B7 6425pifd〇c/008 五、發明說明（) (請先閲讀背面之注意事項再填寫本頁) 213並沒有特定限制配置之數目，可依照適用狀態而適宜 的選擇配置。而且這樣的構造使噴射用氣體之噴出方向與 從擴張圓錐狀乾冰雪噴射噴頭207內噴射乾冰雪Ts流動 方向大致上並行。此外側邊間隙之凹口 211只有在短邊部 分才具備。 而且關於上述之第二乾冰雪洗淨裝置實施之型態，如 第6圖以及第7圖所示之擴張圓錐狀乾冰雪噴射噴頭207 之流路向噴出方向慢慢擴大形成圓錐狀209,在其前端噴 出口 207b設置側邊縱切之凹口 211而形成扁平形狀。本 發明之擴張圓錐狀乾冰雪噴射噴頭207並不是只限制在第 6圖所示的形狀，如第8圖所示之關於第二乾冰雪洗淨裝 置前端部彎曲型乾冰雪噴射噴頭221也很好。第8圖爲本 發明第二乾冰雪產生供給裝置所使用乾冰雪噴射裝置之端 部彎曲型乾冰雪噴射噴頭之重點部位放大圖。此端部彎曲 型乾冰雪噴射噴頭亦可替換第6圖所圖示之乾冰雪噴射裝 置201所包括之擴張圓錐狀乾冰雪噴射噴頭207而使用。 經濟部智慧財產局員工消費合作社印製 關於第8圖所示之第二乾冰雪洗淨裝置之端部彎曲型 乾冰雪噴射噴頭221之特徵。因爲在其前端噴出口 221b 之前端部有彎曲部而形成彎曲形狀之限制裝置222。其他 之組成和第6圖以及第7圖所圖示之第2乾冰雪洗裝置所 包括之擴張圓錐狀乾冰雪噴射噴頭207爲相同之組成。因 此將液化碳酸氣導入端部彎曲型乾冰雪噴射噴頭221， 和先前使用之擴張圓錐狀乾冰雪噴射噴頭207實施之形態 相同。在液化碳酸氣通過節流裝置208時，液化碳酸 46 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱Ί — - 478974 A7 B7 6425pif.doc/008 五、發明說明（_ ) 氣1\絕熱膨脹形成乾冰雪Ts，經由像「=」文字形狀之側 邊間隙之凹口 211所形成之前端噴出口 207b噴出乾冰雪 Ts。 (請先閱讀背面之注意事項再填寫本頁) 此外第9圖爲關於本發明第二乾冰雪洗淨裝置所包含 扁平型乾冰雪噴射噴頭231之槪略剖面圖。第9圖顯示之 扁平型乾冰雪噴射噴頭231和第8圖所示端部彎曲型乾冰 雪噴射噴頭221同樣的可替換第6圖所圖示之第2乾冰雪 噴射裝置201所包括之擴張圓錐狀乾冰雪噴射噴頭207而 接上使用。 經濟部智慧財產局員工消费合作社印製 關於第9圖所示之第二乾冰雪洗淨裝置之扁平型乾冰 雪噴射噴頭231之特徵。此噴頭231之前端噴出口 231b 爲扁平形狀並沒有側邊間隙之凹口，噴出口 231b之縱切 面的正面具有「口」文字形狀之特徵。因此由節流裝置208 朝向噴出口 231b緩慢的擴大口徑而形成圓錐狀209之氣 體流路。與先前兩種形態之擴張圓錐狀乾冰雪噴射噴頭207 與端部彎曲型乾冰雪噴射噴頭221有共通之構造。因此， 與這兩個擴張圓錐狀乾冰雪噴射噴頭207與端部彎曲型乾 冰雪噴射噴頭221同樣的，將液化碳酸氣導入扁平型 乾冰雪噴射噴頭231，液化碳酸氣τγ通過節流裝置208時， 絕熱膨脹形成乾冰雪Ts，經由像「口」文字形狀之噴出口 231b噴出乾冰雪Ts。 第四實施例 以本發明之乾冰雪洗淨裝置使用之乾冰雪噴射裝置 47 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 x 297公釐） 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（4 ) 201進行效果確認實驗。此實驗所使用之乾冰雪洗淨裝置 由第10圖之槪略系統圖來說明。 在第10圖中，乾冰雪洗淨裝置205是由液化碳酸氣 供給線257與噴射用氣體供給線249構成。儲藏液化碳酸 氣之液化碳酸氣容器251與所連接之管252、可以適宜 開關操作電磁閥等之開關手段253、以及由開關手段253 連結管254，經過例如銳孔流口節流手段255，由管256 連結乾冰雪噴射裝置201而組成液化碳酸氣供給線257。 而且液化碳酸氣供給線257上具有一 ΡΙ壓力計， 另一方面，儲藏低露點之氮氣等形成之噴射用氣體2G 之噴射用氣體源容器241經由管242，連結壓力調整器 243，接著由管244經過離子化手段246通過閥247，經由 管248與上述之乾冰雪噴射裝置201連接，而組成噴射用 氣體供給線249。而且上述之噴射用氣體供給線249爲了 使噴射用氣體保持適當之溫度，而設置例如加熱控制手段 245在管244上。 而且，再本確認實驗中所包括之開關手段253是使用 球形閥。同時上述之節流手段256是使用針形閥等，對應 洗淨對象物或使用環境，例如調整液化碳酸氣1Υ之流量 以適宜的調整乾冰雪八之生成量。此外加熱控制手段245 是由加熱器、感測器以及控制器構成。 此外，離子化手段246，是在各種之電離器中選擇適 合的使用。液化碳酸氣容器251爲了對應所希望壓力而使 用高壓氣體容器（氣體鋼瓶），噴射用氣體2G爲使用低露 48 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐厂 (請先閱讀背面之注意事項再填寫本頁) · 裝 訂--- 478974 A7 B7 6425pif.doc/008 五、發明說明（Μ) 點之氮氣。 於本實施例中，上述所記載之使用機器及零件，在使 用之氣體之形式，使用的方法也要視當之選擇，開關手段 253爲使用組合空氣動作閥與電磁閥取代電磁閥。節流手 段255最好有銳孔之形狀，液化碳酸容器251使用低溫液 化氣體用絕熱容器(儲槽也可以），必要時對液化碳酸氣 加壓而可以使用所希望的壓力。 噴射用氣體2G除了上述氮氣之外，也可使用碳酸氣、 氬氣或壓縮空氣。使用高壓氣體容器（氣體鋼瓶）作爲噴射 用氣體源容器而加壓塡充氣體，如果是空氣之情況下，也 可以使用壓縮機來加壓供給。在此情況下，因爲氣體之露 點高，在乾冰雪噴射時，會冷卻凝結成水分而妨礙噴射。 在露點高之情況下’另一方法是使用乾燥器或除濕機，一 定要以乾燥使露點降下來。 實驗3 例如上述之第10圖所示之關於本發明第二乾冰雪洗 淨裝置250爲使甩本發明之乾冰雪噴射裝置2〇1，將第6 圖、第8圖以及第9圖所圖示各種形狀之乾冰雪噴射噴頭 207、221以及231分別裝上所組成之乾冰雪噴射裝置2〇7。 依序以各個乾冰雪噴射噴頭廣泛的噴出乾冰雪Ts，依序確 認評價噴射形狀之狀態。 實驗條件 •供給之液化碳酸氣：溫度約20°C，壓力約6 MPa 之狀態，供給流量1 kg/min。 49 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) ' --- -----------裝--------訂--------- (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.d〇c/QQg 五、發明說明（vt〇 ) Φ噴射用氣體2G:持續流動（只是爲了由不同形狀之 噴射噴頭確認噴射之狀態）。 乾冰雪噴射噴頭之設計規格因素： •流路圓錐狀角度：5度。 •節流裝置208之內徑：（D=1.4mm。 •從節流裝置2〇8至噴出口前端之長度：40mm。 •側邊細縫之缺口 211之長度（擴張型圓錐狀以及端 部彎曲型之噴射噴頭）：5mm。 •限制器212間之噴出口之間隙：〇.8mm。 由上述之實驗條件，在第二乾冰雪洗淨裝置中以各種 形狀乾冰雪噴射噴頭之實施型態，在距離各個擴張錐形乾 冰雪噴射噴頭207、221以及231之噴出口 15mm之位置 上觀察乾冰雪Ts之噴射形狀、測定其尺寸以及確認噴射 密度。在調查噴射形狀時，在矽晶片上黏貼鋁製膠帶，並 以乾冰雪Ts噴射。從鋁製膠帶之變形痕跡，測定乾冰雪Ts 之槪略噴射面形狀以及尺寸。此結果如表三所示。 比較例 爲了確認本發明之乾冰雪噴射裝置之效果，以第11 圖所示之噴射噴頭作爲比較例。第11圖所示之乾冰雪噴 射噴頭261具有朝向噴出口 261b緩慢擴張之錐形209，其 前端部位之互相關係爲180度之位置上形成具有側邊間隙 缺口 211，利用乾冰雪噴射噴頭261組成作爲乾冰雪噴射 裝置進行比較實驗。此外，實驗條件、乾冰雪噴射噴頭之 設計規格因素以及噴射形狀之觀察與尺寸之測定、以及噴 50 ^紙張尺度適用^國家標準（CNS)A4規格（210 X 297公釐） ---I----丨丨裝·---！丨丨訂-丨丨 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 6425pif.doc/008 _B7_ 五、發明說明⑽） 射密度之確認。上述實驗1以共通之狀態進行，其結果同 樣的一起記載在表一。 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 6425pif.doc/008 A7 B7 五、發明說明（的） 經濟部智慧財產局員工消費合作社印製 次勝 -迄審（ _ 1輕；^ s (N 卜 (N 卜 Φ Φ N/O •Wn tin 诔醒 本發明乾冰雪噴射裝置 扁平型 噴射噴頭231 (第9圖） 橢圓 (N tn 铂握 Φ Φ -Wn -Ηπ 择：醒 ΰ- w 端部彎曲型 噴射噴頭221 (第· 8圖). 近似矩形 之橢圓 Ό m 锲渥 Φ Φ fc£L tn. ϋπ m 诔醒 is： 擴張圓錐型 噴射噴頭207 (第6圖） 橢圓 vo m 铂嬸 甶Φ 來醒 Ss! 實驗確認 事項 噴射形狀 ! 長邊 (mm) 短邊 (mm) 噴射密度 從噴射 口之噴 射面之 距離 (mm) 52 (請先閱讀背面之注意事項再填寫本頁) _裝 —丨訂-------- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 A7 B7 6425pif.doc/008 五、發明說明（叫） 由表三可明顯的看出第11圖所圖示之比較例的乾冰 雪噴射噴頭261之噴出口具有張開成圓錐狀209，噴射形 狀爲略爲圓形，在中央部份之乾冰雪Ts密度爲疏鬆之狀 態，而在周圍部份之乾冰雪Ts密度爲緊密之狀態。 另一方面’第6圖、第8圖以及第9圖所示前端爲扁 平形狀之第二乾冰雪洗淨裝置在使用各個乾冰雪噴射噴頭 207、221以及231之情況下，其噴射形狀略爲橢圓形，證 明爲扁平形狀210之噴射噴頭之前端噴出口 207b以及231b 之開口的長邊相當於橢圓形之長邊。此外使噴頭前端之噴 出口形狀增加扁平形狀，而在扁平形狀之短邊部分設置側 邊間隙缺口 211，使噴射之乾冰雪Ts從橢握形狀之長邊側 邊，形成更長之噴射。由此來確認比較擴張圓錐形乾冰雪 噴射噴頭207與扁平形乾冰雪噴射噴頭231。 此外，噴射乾冰雪Ts之噴射密度與比較例之乾冰雪 噴射噴頭261不同，擴張圓錐型乾冰雪噴射噴頭207(第6 圖）、端部彎曲型乾冰雪噴射噴頭221(第8圖）與扁平型乾 冰雪噴射噴頭231(第9圖）在橢圓形周圍部份之乾冰雪Ts 爲疏鬆之狀態，而在中央部份爲緊密之狀態。 而且，第8圖所示使用在其前端噴出口 221b之限制 器222前端具有彎曲的曲面部位，而形成之端部彎曲形乾 冰雪噴射噴頭221。噴射形狀爲近似矩形之橢圓形’證明 乾冰雪爲均一的噴射。 實驗4 接著進行實驗4,在第二乾冰雪洗淨裝置之乾冰雪噴射裝 53 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -----------裝--------訂--------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（u) _ 置201，使用擴張圓錐形乾冰雪噴射噴頭207(第6圖）。確 認乾冰雪Ts與在外筒205之前端設置之噴射用氣體噴出 口 213所噴出之射噴用氣體2G—起噴射時之效果。 實驗條件 •噴射用氣體2G :供給壓力〇·45 MPa使常溫之低露 點氮氣噴出。 •供給之液化碳酸氣：與實驗1相同溫度約20°C，壓 力約6 MPa之狀態，供給流量1 kg/min。 乾冰雪噴射噴頭之設計規格因素： •噴射用氣體噴射口 213 :以設置在噴射噴頭前端噴 出口 207b之側邊間隙缺口 211連接管線作爲軸，從上下 噴射噴頭中心至噴射用氣體噴射口 213之距離配置爲11.5 mm。噴射用氣體噴射口 213之形狀爲長邊5.8 mm、短邊 1.6 mm之細長形狀。配置與側邊間隙缺口 211連結管線平 行。 其他設計規格因素與實驗1爲共通之設計規格。 由上述之實驗.條件，由擴張圓錐型乾冰雪噴射噴頭 207，是否有使用噴射用氣體2G，在距離噴出口 15 mm之 位置上觀察乾冰雪Ts之噴射形狀、.測定其尺寸以及確認 噴射密度。在調查噴射形狀時，與實驗3相同，在矽晶片 上黏貼鋁製膠帶，並以乾冰雪Ts噴射。從鋁製膠帶之變 形痕跡，測定乾冰雪Ts之槪略噴射面形狀以及尺寸。此 結果如表四所示。 54 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 裝 I I ϋ !—訂 il! 478974 6425pif.doc/008 五、發明說明（P ) 表四 A7 B7 經濟部智慧財產局員工消費合作社印製 無噴射用 氣體2G 近似矩形 m cn 1 <Ν 像煊 φ Φ. NO ·9π 哨 π 咏Η W 有噴射用 .氣體2G 橢圓 m ㊣嬉 Φ Φ m -ηπ 咏醒 w .芨 m ? 搠？ m * 瞰旦 魃曰 <TS 、―j B 他皿（躂 徴 m -----------·裝--------訂------- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 6425pif.doc/008 五 經濟部智慧財產局員工消費合作社印製 _B7_____ 發明說明（W) 此結果可由表四可明顯的看出，使用噴射用氣體噴出 口 213噴射之噴射用氣體2G時，乾冰雪Ts之噴射形狀近 似爲橢圓形其長邊尺寸沒有變化，短邊尺寸因爲噴射用氣 體2G之影響，抑制了乾冰雪Ts之短邊方向之擴張，而更 短只有2 mm〜3 mm。而且沒有使用噴射用氣體2G時，乾 冰雪Ts之噴射密度同樣的在中央部份爲緊密之狀態，周 圍部份爲疏鬆之狀態。由於乾冰雪Ts之噴射量爲一定的， 證明每單位面積之乾冰雪Ts之密度大約爲2倍。由此結 果，可證明從噴射用氣體噴出口 213噴射之噴射用氣體 2G，對被洗淨物之對準地方保持一定方向之幅度而進行洗 淨。此外噴射用氣體2G之流量會因壓力而變化，所以乾 雪Ts之噴射形狀之短邊方向之寬度可能在2mm至5mm 之間變： 於上述實驗中，在乾冰雪噴射裝置201之擴張圓錐型 乾冰雪噴射噴頭207、221以及231上設置節流裝置208。 設置節流裝置208之位置，並不是只限定在乾冰雪噴射噴 頭部位。例如也可以設置在液化氣體供給線257之管256， 當然可以得到相同之效果。 此外由調整側邊間隙缺口 211之長度，可以得到所希 望噴出乾冰雪Ts之幅度。 接著以圖形說明本發明之第三乾冰雪洗淨裝置之實施 型態。第12圖爲說明本發明第三乾冰雪洗淨裝置所揭示 之一例之系統槪略圖。第13圖爲此乾冰雪洗淨裝置所使 用之在前端之噴射洗淨噴頭之噴射用配管剖面圖。第14At this time, the spraying gas 1G from the spraying gas source container 111 is adjusted to a pressure of about 0.2 MPa by the pressure regulator 114, and then heated to a temperature of 50 ° C or even 90 ° C by the heating control means 119, and It is supplied to the cleaning nozzle 108. Then, the object to be cleaned is sprayed with dry ice and snow Ts and the heated spray gas 1G. Because the cleaning nozzle 108 is very close to the object to be cleaned, the spray gas 1G that maintains a high temperature does not cause dry ice and snow Ts to sublimate. As a result, by heating the spraying gas 1G, the object to be cleaned is formed at a low temperature and is not easily condensed, and a good cleaning efficiency can be achieved. In addition, the spraying gas 1G is a dry (low dew point) gas, which can keep the cleaned matter in a dry state, so it can prevent the cleaned matter from dew condensation, and obtain better results. In a short time of cleaning The treatment has a special effect and a heating control means, which is specifically composed of a heater, a sensor, and a controller, and has a good heating temperature control effect. In addition, the spraying gas 1G is ionized by ionizing means 116, 35 ----------- · installation -------- order --------- (Please read first Note on the back, please fill out this page again) Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is printed in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm 1 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (Supplement) And when the fluid is flowing in the pipeline, the electric charge generated by friction between the fluid and the pipeline is removed. The biggest effect of this is to prevent the dry ice and snow Ts from being charged, and because of the dry ice and snow agglomeration during spray washing, The damage caused by the cleaned material. Especially when the cleaned material is the surface of the semiconductor contact point, when the dry ice and snow are charged, the cleaned material may be damaged. Removing the static electricity from the dry ice and snow can achieve a very significant effect. The ionization means 116 is not limited to be provided in the injection gas supply system, and ionizes the injection gas 1G. It can also be installed in the dry ice snow Ts supply system to directly ionize the dry ice snow Ts, regardless of the installation Either side of the supply system can work In addition, the ionization means 116 has various methods, for example, when electrodes are arranged in the pipeline to generate plasma, and the method is used to ionize the fluid flowing in the pipe. In the dry ice and snow Ts supply system 109 The electrode is installed because the electrode may cause the phenomenon of dry ice and snow Ts attachment, accumulation, blockage, etc. In this case, it is inappropriate to install the dry ice and snow Ts supply system 109, and it is desirable to install the gas supply system 118 for injection. When considering the type of ionization means that is more suitable for setting, and also the ionization of the surrounding atmosphere, there are other means of ionization, such as the use of plasma discharge type or soft X-ray type. Therefore, it is not used In order to limit the above-mentioned components, there are better suitable choices. In addition, the gas used as the gas for injection is, for example, nitrogen, carbon dioxide, dry air, etc. Here, the method of supplying gas from a high-pressure container is used. In the case of air, it is preferable to use a machine such as a compressor. It is preferable to use a so-called high-pressure gas container for a liquefied carbon dioxide gas container. Paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 一一 --- I-- 丨 丨 丨 丨 丨 Installation i 丨-丨 丨 丨 丨 Order ------- (please first Read the notes on the back and fill in this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (section) (Please read the notes on the back before filling this page) High pressure gas The container is made of metal inner and outer containers. 'There is a vacuum layer between the inner and outer containers, and the vacuum insulation container is filled with liquefied carbon dioxide gas, but a large vacuum insulation container can also be used. Next, to prove the dry ice and snow cleaning method of the present invention, Effect, the following experiments were performed. Experiment 1 Experiment 1 uses the system shown in Fig. 3 as the dry ice and snow washing device of the present invention. Using a part of the semiconductor inspection device as the object to be cleaned, remove and clean the oil 'resin sheets, solder chips, aluminum, silicon, copper, etc. attached to the aging test substrate or probe card. In the present invention, a needle valve is used as the throttle mechanism 105, a heater and a PID (proportional, integral, and differential) controller are used as heating control means, a plasma discharge method ionization method is used, and the ionization method is set to the injection gas Supply system 118. A 500-mm-long circulation line is formed from the vicinity of the outlet of the throttle mechanism 105 in the dry ice and snow supply device 109 to the cleaning nozzle 108. Using the circulation pipe adjustment mechanism shown in Fig. 4, the circulation pipe 107 is selected, and the material of the piping is a central pipe made of Teflon 107a. The experimental conditions and contents are as follows: Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. • Gas for injection 1G: Use nitrogen gas with a nominal dew point of 65 ° C as a high-pressure gas (supply pressure: 0.2MPa ~ 0.78MPa, room temperature, 65NL / min). • Liquefied carbon dioxide gas: (supply pressure: about 6Mpa, normal temperature). • Ambient temperature: room temperature. 37 ^ The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 Public Love 1 478974 A7 6425pif.d0c / 008 V. Description of the invention (3) Experimental content The experiment set the supply time of dry ice and snow Ts to 2.0 seconds, The dry ice and snow Ts was continuously ejected from the nozzle 108 of the cleaning nozzle 108. On the one hand, 0.2 MPa nitrogen was used as the injection gas 1G, and the temperature was raised to 60 by heating control means. The spraying gas 1G is ejected from the nozzle 108d of the cleaning nozzle 108. After that, in this state, confirm the occurrence of the condensation of the probe card and the removal of the attached solder shavings. Then, take this as the first stage treatment, and The first stage of processing confirms the above-mentioned state [Check 1]. Continue to repeat the same process once more ^ times, and the second stage of processing confirms the above-mentioned state [Check 2], and then continue to add [person_stage processing, and Three stages of processing confirm the above-mentioned state [Inspection 3], and the inspection is performed sequentially by the three processes. The results of this inspection are shown in Table 1. In addition, the removal of solder chips can be confirmed by contact resistance. 'Must be less than 0.5 Only qualified below. This About Condensation ', because the generated water droplets will evaporate after being contaminated and remain, you can confirm visually whether there is condensation. ----------- · Installation -------- Order-- ----- (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 8 3 This paper size applies to China National Standard (CNS) A4 (210 X 297 public Chu 1- --- 478974 6425pif.doc / 008 A7 B7 V. Description of the invention (function) Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs with or without condensation. Destruction of contact resistance (passed below 0.5). Part of the block is larger than 0.5. Block is larger than 0.5 All liquefied carbon dioxide gas injection stop time (sec) below 0.5 (N 〇 (N liquefied carbon dioxide gas injection time (sec) 2 + 2! 2 + 2 + 2 Injection gas setting temperature (° C) Liquefied carbon dioxide gas supply Volume (kg / min) 0.13 0.13 0.13 Throttle mechanism cleaning nozzle circulation pipe length (mm) 500 500 500 Processing content First stage processing Second stage processing Third stage processing inspection number (N 39 ------ ----- · Install -------- Order ------- 丨 (Please read the note on the back first Please fill in this page again.) This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 5. Description of the invention (1) First, after inspection 1 In the case of a probe card, confirm that the object to be treated does not condense. In addition, it was confirmed that the removal status of the solder swarf was 90% (the contact resistance of a part was greater than 0.5). Next, if the object to be processed is a probe card through inspection 2, it is confirmed that the object to be processed has not coagulated. Therefore, the removal status of the solder chip, a trace of the solder chip (a region with a contact resistance greater than 0.5) was recognized. Finally, if the object to be processed is a probe card through inspection 3, it is confirmed that the object to be processed does not coagulate. Therefore, it is proved that all the solder chips are completely removed (the contact resistance is less than 0.5). The washing step was considered to be working well. In addition, the spraying gas 1G can change the cleaning characteristics by changing the spray pressure according to the type of attachment, the degree of pollution, and the strength of the adhesion. Experiment 2 The next experiment 2 was to change the length of the flow passage from the throttle mechanism 105 to the cleaning nozzle 108. When the length of the flow passage was 45 mm, 200 mm, 500 mm, 1000 mm, 1500 mm, and 2000 mm, the cleaning effect was confirmed. The length of the flow pipe is set by the required length of the pipe among the flow pipes 107-1, 107-2, 107-3, etc. integrated on the flow pipe length adjustment mechanism of Fig. 4. Circuit, the central pipe 107a 'used for its piping material is flexible stainless steel, and the valve V1Q1, valve V1Q2, valve V1 () 3, etc. are switched. The substrate to be cleaned was subjected to an aging test substrate, and oil, resin chips, solder chips, aluminum, silicon, copper, etc. attached to the aging test substrate were removed. 40 ------------ · install ---- (Please read the precautions on the back before filling out this page) Order ------- Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 B7 6425pif.doc / 008 V. Description of the invention (β) The experimental conditions are the same as those in Experiment 1: Experimental conditions • Gas for spraying 1G: Use Nitrogen with a nominal dew point of 65 ° C is used as a high-pressure gas (supply pressure: 0.2MPa to 0.78MPa, normal temperature, 65NL / min). • Liquefied carbon dioxide gas (supply pressure ... about 6Mpa, normal temperature). • Ambient temperature: room temperature. Experimental content The experiment set the supply time of dry ice and snow Ts to 120 seconds. The dry ice and snow Ts was continuously ejected from the spray outlet 108d of the cleaning nozzle 108. On the one hand, using 0.2 MPa nitrogen as the spraying gas 1G to raise the temperature to 60 degrees through heating control means, and continuously spraying the spraying gas 1G from the nozzle 108d of the cleaning nozzle 108. Then, in this state, it is confirmed that the aged state of the substrate to be cleaned is determined by the difference in the length of the flow path. And confirm that the spray pressure (MPa) of dry ice and snow Ts when sprayed on the object to be cleaned. The results are shown in Table 2. In addition, the discharge pressure was measured using a pressure measuring film (manufactured by Fuji Film, trade name: Fuji Pressure Device). ----------! ^ ιι · 装 ----— Order i — (Please read the notes on the back before filling out this page) # Printed on paper by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Applicable to China National Standard (CNS) A4 (210 X 297 mm) 478974 A7 6425pif.doc / 008 V. Description of the invention (β) Table 2 Length of the cleaning nozzle of the throttle mechanism (mm) Pressure during cleaning ( MPa) Aging test substrate cleanability 45 105 Poor cleaning 200 10 Good 500 19.5 Good 1000 22 Good 1500 25 Good 2000 33 Good From the result of Experiment 2, regarding the dry ice and snow Ts cleaning device of the present invention, from the throttling mechanism The length of the circulation pipe from 105 to the cleaning nozzle 108 is 45mm, 200mm, 500mm, 1000mm, 1500mm, and 2000mm. Continuous spraying of dry ice and snow Ts and continuous flow of spraying gas 1G at the same time to remove metal particles attached to the object to be cleaned, and prove that the object to be cleaned does not condense. Therefore, it is proved that when the length of the circulation pipe near the outlet of the throttle mechanism 105 is more than 200 mm, the effect of washing the object to be washed is very significant. In addition, the difference in cleaning performance can be seen from the material of the piping. From the perspective of the material, the cleaning power of the stainless steel pipe is not as good as that of the Teflon pipe. It also proves that the cleaning power increases with the increase of flow. In addition, each of the lengths of the flow path length from the throttle mechanism 105 to the cleaning nozzle 108 described above is tested with a pressure measurement membrane. It is proved that the longer the length of the circulation pipe, the higher the pressure during washing. Therefore, China National Standard (CNS) A4 specification (210 X 297 mm) is applicable to 42 paper sizes. ----------- Installation --------- Order ----- (Please (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (U〇 ^ In the state of removing the attached object or the object being washed Compressive strength 'by adjusting the length of the circulation pipeline and performing appropriate cleaning treatment' ϋ can prove that the cleaning efficiency will increase. (Please read the precautions on the back before filling this page) In the above experiment, it will be washed The cleaned matter is placed in a closed space for washing, and the cleaned matter is in a closed space such as a spherical box. The sublimated carbon dioxide gas or jet gas is attracted by the exhaust fan to ionize the fluid held in the closed space. Better cleaning efficiency can be achieved by removing electricity. In addition, during cleaning, in order to collect the removed oil, resin flakes, solder filings, aluminum, silicon, copper, etc., which are removed by the cleaning, perform in a slightly enclosed space. Wash and drain from a part of the slightly enclosed space In addition, when cleaning, the cleanliness of the cleaning place is also a problem. For example, cleaning in a EPA filter, a cleaning workbench equipped with a filter, or a ventilation chamber will not cause environmental pollution. Economy Ministry of Intellectual Property Bureau, Consumer Cooperative Cooperatives In addition, as shown in Figure 5, the cleaning nozzle and the assembled pipeline are shown in Figure 5. Dry ice and snow% of the discharge pipe 108a and a slightly coaxial outer pipe are arranged around the discharge pipe 108a. 〇8b forms a double pipe, and then a slightly coaxial exhaust pipe 128b is arranged at the outermost side of the double pipe, and this exhaust pipe 128b covers the double pipe as a whole to form a triple nozzle cleaning nozzle 128. The exhaust pipe 128b of the outermost pipe of the cleaning nozzle 128 of the pipe structure starts to attract. The dust collecting cover 129 arranged at the front end of the cleaning nozzle 128 attracts the removed matter by washing, and Remove dust and remove as much as possible while cleaning. In addition, the flexible flow line 127 connected to the cleaning nozzle 128 can also be outside the central tube 107a that can integrate the cleaning nozzle 128 pipeline. Configure 43 paper rulers Applicable to China National Standard (CNS) A4 specification (210 X 297 Gongchu 1 " 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention) Slightly coaxial outer tube 107b ° In addition 'Of course, it is also possible to arrange a slightly coaxial exhaust pipe 127b on the outermost side to form a triple-pipe structured circulation pipe 127. In the above experiment, the material to be cleaned was the circulating parts of a photocopier, a semiconductor wafer, and a semiconductor. The inspection device and its parts, circuit board, MR head, plasticized residue and precision parts are the demonstration objects. Of course, the present invention is not limited to these items, and it can also be applied to the washing of fruits and vegetables such as melon, orange, and watermelon. In addition, the implementation form of the dry ice and snow spraying device used in the second dry ice and snow cleaning device of the present invention can be described with reference to the drawings. Fig. 6 is an explanatory sectional view of the dry ice and snow spraying device of the second dry ice and snow generating and supplying device of the present invention. Fig. 7 is a front view of the dry ice and snow spraying device. In Figs. 6 and 7, the dry ice and snow spraying device 201 of the present invention is connected by a liquefied carbon dioxide gas supply line 257, a pipe 256, a connected inner pipe 202, and a gap 203 which is arranged to surround the outer pipe 202 and is connected. The pipe 248 of the gas supply line 249 for injection and the outer pipe 204 provided with the outer tube 205 are configured, and the outer tube 205 forms a slightly coaxial double tube surrounding the inner tube 202. The inner tube 202 is connected to the tube end surface of one side of the outer tube 205 at one end, and then connected to the above-mentioned communicating liquefied carbon dioxide gas supply tube 256 through a joint member 259. The other end 202b of the inner tube 202 passes through a sleeve 206 inside the outer tube 205, and is provided at the front end with a connection cone-shaped expansion type dry ice and snow spray nozzle 207 that can be extended to the outside. Then the inner tube 202 and the outer tube 205 form a slightly coaxial double tube. Since the area blocked by each plug 206 is sealed, the liquefied carbon dioxide gas flowing in the inner tube 202 and the jetting gas flowing in the outer tube 205 are sealed. Does not mix. 44 (Please read the precautions on the back before filling out this page) · 1 a ··· ---- Order --- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (眇) (Please read the precautions on the back before filling this page) Conical Expansion Dry Ice and Snow Spray Nozzle 207 between Conical Expansion Dry Ice and Snow Spray Nozzle 207 and Inner Tube 202 Liquefied carbonated gas (dry ice and snow) flow path. The constriction device 208 having a smaller diameter at the tip end of the connection-side near surface 207a gradually expands the diameter toward the tip ejection port 207b to form a conical shape 209. In addition, the front end ejection port 207b is gradually formed into a flat shape 210, and a short side portion of the flat shape 210 has a notch 211 of a side gap, and a long side portion is provided with a restriction device 212. An opening shaped like a character "=" is formed on the front side of the ejection port 207b. Therefore, at the ejection port 207b, the recess 211 and the two restricting devices 212 forming the side gap at the front end of the ejection head will not form a rectangular shape, but will be approximately parallel. The liquefied carbon dioxide gas is then introduced into the dry ice and snow ejection nozzle. When passing through the throttling device, the liquefied carbonic acid gas TY adiabatically expands to form dry ice and snow Ts, and is formed from the front end ejection port formed by the restriction device 212 and the longitudinal slit 211 207b Spray dry ice and snow Ts ° Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs On the other hand, the outer tube 205 is arranged along the periphery of the expanded cone-shaped dry ice and snow spray nozzle 207, and the front end face 205a of the outer tube 205 is set for spraying The gas ejection port 213 for ejecting the gas 2G. The shape of the ejection gas ejection port 213 is an elongated shape. Therefore, the pipelines of the gas ejection outlet 213 for ejection and the two restricting devices 212 connected to the ejection outlet 207b at the front end of the expanded cone-shaped dry ice and snow ejection head 207 are slightly parallel. It is preferable to arrange two injection gas jets □ 213 at least symmetrically in the pipeline center connecting the two restriction devices 212. Therefore, it is preferable that the position of the ejection gas ejection port 213 is parallel to the line connecting the two restricting devices 212. The configured gas outlet for spraying 45 The paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) 478974 B7 6425pifd〇c / 008 V. Description of the invention () (Please read the precautions on the back before (Fill in this page) 213 There is no specific limit on the number of configurations, which can be appropriately selected according to the applicable status. Further, such a structure makes the ejection direction of the ejection gas substantially parallel to the direction in which the dry ice and snow Ts flows from the inside of the expanded conical dry ice and snow ejection head 207. In addition, the notch 211 of the side gap is provided only at the short side portion. In addition, regarding the implementation form of the second dry ice and snow washing device described above, as shown in FIG. 6 and FIG. 7, the flow path of the expanded conical dry ice and snow spray nozzle 207 gradually expands in the discharge direction to form a cone shape 209. The front-end ejection port 207b is provided with a notch 211 having a side slit, and is formed into a flat shape. The expanded conical dry ice and snow spray nozzle 207 of the present invention is not limited to the shape shown in FIG. 6, and the curved dry ice and snow spray nozzle 221 on the front end of the second dry ice and snow cleaning device as shown in FIG. 8 is also very it is good. Fig. 8 is an enlarged view of the key parts of the curved curved dry ice and snow spray head of the dry ice and snow spray device used in the second dry ice and snow generation and supply device of the present invention. This curved curved dry ice and snow spray head can also be used in place of the expanded conical dry ice and snow spray head 207 included in the dry ice and snow spray device 201 shown in FIG. 6. Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs About the characteristics of the curved curved dry ice and snow spray nozzle 221 of the second dry ice and snow washing device shown in Figure 8. A curving-shaped restricting device 222 is formed because a curved portion is formed at the front end of the front-end ejection port 221b. The other components are the same as the expanded cone-shaped dry ice and snow spray head 207 included in the second dry ice and snow washing device shown in Figs. 6 and 7. Therefore, the liquefied carbon dioxide gas is introduced into the curved end-type dry ice and snow spray head 221 in the same manner as the previously implemented expanded cone-shaped dry ice and snow spray head 207. When the liquefied carbonic acid gas passes through the throttling device 208, the liquefied carbonic acid 46 paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 public love Ί —-478974 A7 B7 6425pif.doc / 008 5. Description of the invention (_) Gas 1 \ adiabatic expansion forms dry ice and snow Ts, and sprays dry ice and snow Ts through the front nozzle 207b formed by the notch 211 of the side gap like "=" character. (Please read the precautions on the back before filling this page) In addition, FIG. 9 is a schematic cross-sectional view of the flat dry ice and snow spray head 231 included in the second dry ice and snow washing device of the present invention. The flat dry ice and snow spray head 231 shown in FIG. 9 and the ends shown in FIG. 8 The curved dry ice and snow spray nozzle 221 can also be used instead of the expanded cone-shaped dry ice and snow spray nozzle 207 included in the second dry ice and snow spray device 201 shown in Fig. 6. The characteristics of the flat dry ice and snow spray nozzle 231 of the second dry ice and snow washing device shown in FIG. 9 are produced. The front nozzle 231b of this nozzle 231 has a flat notch and has no side gap, and sprays out. The front surface of the longitudinal section of the port 231b has the character of "mouth". Therefore, the throttle device 208 gradually expands the diameter toward the ejection port 231b to form a conical 209 gas flow path. It is similar to the expansion cones of the previous two forms. The snow spray nozzle 207 has the same structure as the curved end-type dry ice and snow spray nozzle 221. Therefore, similar to the two expanded cone-shaped dry ice and snow spray nozzles 207 and the curved end dry ice and snow spray nozzle 221, the liquefied carbon dioxide gas is liquefied. The flat-type dry ice and snow spray nozzle 231 is introduced, and when the liquefied carbonic acid gas τγ passes through the throttle device 208, adiabatic expansion forms dry ice and snow Ts, and the dry ice and snow Ts is ejected through a nozzle 231b shaped like a mouth. Dry ice and snow spraying device used in the dry ice and snow cleaning device 47 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (21 × 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Preparation of the fifth, description of the invention (4) 201 The effect confirmation experiment is performed. The dry ice and snow washing device used in this experiment is shown in the schematic system diagram of FIG. In Fig. 10, the dry ice and snow washing device 205 is composed of a liquefied carbon dioxide gas supply line 257 and a spray gas supply line 249. A liquefied carbonic acid gas container 251 for storing liquefied carbonic acid gas and a connected tube 252 may be suitable. The liquefied carbon dioxide gas supply line 257 is connected to the switching means 253 for opening and closing the solenoid valve, and the connecting pipe 254 by the switching means 253, for example, through the orifice orifice orifice throttling means 255, and the dry ice and snow spraying device 201 by the pipe 256. The carbon dioxide gas supply line 257 has a PI pressure gauge. On the other hand, a gas source container 241 for injection, which stores the injection gas 2G formed by nitrogen with a low dew point, is connected to a pressure regulator 243 through a tube 242, and then passed through a tube 244. The ionizing means 246 is connected to the above-mentioned dry ice and snow spraying device 201 through a valve 247 and a pipe 248 to form a gas supply line 249 for spraying. The above-mentioned injection gas supply line 249 is provided with, for example, a heating control means 245 on the pipe 244 in order to keep the injection gas at an appropriate temperature. In addition, the switching means 253 included in the reconfirmation experiment uses a ball valve. At the same time, the above-mentioned throttling means 256 uses a needle valve or the like, corresponding to the object to be cleaned or the use environment, for example, adjusting the flow rate of liquefied carbon dioxide gas 1Υ to appropriately adjust the amount of dry ice and snow. The heating control means 245 is composed of a heater, a sensor, and a controller. In addition, the ionization means 246 is selected and used suitably in various ionizers. The liquefied carbon dioxide gas container 251 uses a high-pressure gas container (gas cylinder) to meet the desired pressure, and the spray gas 2G uses low dew 48. This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm factory (please Read the precautions on the back before filling in this page) · Binding --- 478974 A7 B7 6425pif.doc / 008 5. Nitrogen at the point of the invention description (M). In this embodiment, the above-mentioned machines and parts are used, In the form of the gas to be used, the method used should also be selected. The switching means 253 is a combination of an air operated valve and a solenoid valve instead of the solenoid valve. The throttling means 255 preferably has a sharp hole shape. Insulated container for low temperature liquefied gas (may also be a storage tank), if necessary, pressurize the liquefied carbon dioxide gas and use the desired pressure. In addition to the nitrogen gas described above, carbon dioxide gas, argon gas or compressed air can also be used. .Use high pressure gas container (gas cylinder) as the gas source container for injection to pressurize the inflatable body. If it is air, you can also use a compressor Pressurized supply. In this case, because the dew point of the gas is high, it will cool and condense into moisture during the spray of dry ice and snow, which will prevent the spray. In the case of high dew point, the other method is to use a dryer or a dehumidifier. The dew point is lowered by drying. Experiment 3 For example, the second dry ice and snow washing device 250 of the present invention shown in FIG. 10 above is shown in FIG. The dry ice and snow spray nozzles 207, 221, and 231 of various shapes shown in FIG. 9 and FIG. 9 are respectively equipped with a dry ice and snow spray device 207. The dry ice and snow spray nozzles are sequentially sprayed with a wide range of dry ice and snow spray nozzles Ts. The condition of the spray shape was confirmed and evaluated in sequence. Experimental conditions • Supply liquefied carbon dioxide gas: At a temperature of about 20 ° C and a pressure of about 6 MPa, the supply flow rate was 1 kg / min. 49 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) '--- ----------- install -------- order --------- (Please read the precautions on the back before (Fill in this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.d〇c / QQ g V. Description of the invention (vt〇) ΦInjection gas 2G: Continuous flow (only for confirming the state of the spray from different shapes of spray nozzles). Design specifications of dry ice and snow spray nozzles: • Conical angle of the flow path: 5 degrees • The inside diameter of the throttle device 208: (D = 1.4mm. • The length from the throttle device 208 to the front end of the nozzle: 40mm. • The length of the notch 211 on the side slit (expanded cone shape and end Bending type spray nozzle): 5mm. • Gap of spray outlet between limiter 212: 0.8mm. According to the above experimental conditions, in the second dry ice and snow cleaning device, the implementation forms of dry ice and snow spray nozzles of various shapes are observed at a position 15 mm away from the nozzles 207, 221, and 231 of each expanded cone dry ice and snow spray nozzle Spray shape of dry ice and snow Ts, measure its size, and confirm the spray density. When investigating the spray pattern, an aluminum tape was stuck on a silicon wafer and sprayed with dry ice and snow Ts. From the traces of deformation of the aluminum tape, determine the shape and size of the rough spray surface of the dry ice and snow Ts. The results are shown in Table III. Comparative Example In order to confirm the effect of the dry ice and snow spraying device of the present invention, a spraying nozzle shown in Fig. 11 was used as a comparative example. The dry ice and snow spray nozzle 261 shown in FIG. 11 has a tapered 209 that slowly expands toward the discharge port 261b. The front-end position is 180 degrees with a side gap notch 211 formed by the dry ice and snow spray nozzle 261. Comparative experiments were performed as a dry ice and snow spraying device. In addition, the experimental conditions, the design specifications of the dry ice and snow spray nozzles, the observation and measurement of the spray shape, and the spray 50 ^ Paper size applies ^ National Standard (CNS) A4 specification (210 X 297 mm) --- I- --- 丨 丨 Loading ---!丨 丨 Order- 丨 丨 (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 _B7_ V. Description of the invention ⑽) Confirmation of the radiation density. The above experiment 1 was performed in a common state, and the results are also described in Table 1. Printed by the Consumers Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 V. Description of the invention (of the employee) Consumption cooperative prints second win-to date (_ 1 light; ^ s (N 卜 (N 卜 Φ Φ N / O • Wn tin 诔 awakens the flat ice spray nozzle 231 (Figure 9) of the dry ice and snow spraying device of the present invention, ellipse ( N tn Platinum grip Φ Φ -Wn -Ηπ Choice: Awake ΰ- w Curved end jet nozzle 221 (Fig. 8). Ellipse with approximate rectangular shape Ό m 锲 Φ Φ fc £ L tn. Ϋπ m 诔 醒 is : Expanded conical jet nozzle 207 (Figure 6) Elliptical vom platinum 婶 甶 Φ wake up Ss! Experimental confirmation items Spray shape! Long side (mm) Short side (mm) The distance of the spray density from the spray surface of the spray port ( mm) 52 (Please read the precautions on the back before filling out this page) _Packing— 丨 Order -------- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Explanation of the invention (called) Figure 11 can be clearly seen from Table 3 The ejection outlet of the dry ice and snow spray head 261 of the comparative example shown in the figure has a conical shape 209, the spray shape is slightly circular, the density of dry ice and snow Ts in the central part is loose, and the dry ice and snow in the surrounding part Ts density is tight. On the other hand, when the second dry ice and snow cleaning device with flat front ends shown in Figures 6, 8, and 9 is used, each of the dry ice and snow spray nozzles 207, 221, and 231 is used. Below, the spray shape is slightly elliptical, which proves that the long sides of the openings 207b and 231b of the front end of the spray head of the flat shape 210 are equivalent to the long sides of the ellipse. In addition, the shape of the discharge port at the front end of the spray head is increased to a flat shape. On the short side of the flat shape, a side gap notch 211 is provided, so that the sprayed dry ice and snow Ts forms a longer spray from the long side of the elliptical grip shape. From this, it is confirmed that the relatively expanded conical dry ice and snow spray nozzle 207 It is different from the flat dry ice and snow spray head 231. In addition, the spray density of dry ice and snow spray Ts is different from the dry ice and snow spray head 261 of the comparative example, and the extended cone dry ice and snow spray head 2 07 (picture 6), dry ice and snow spray nozzles 221 (figure 8) with curved ends and flat dry ice and snow spray nozzles 231 (figure 9) have a dry ice and snow Ts in a loose shape around the ellipse, and The central part is in a tight state. In addition, as shown in FIG. 8, the front end of the stopper 222 having a curved ejection port 221 b has a curved curved surface portion, and the formed dry curved snow and ice spray head 221 is formed at the curved end. The spray shape is an approximately rectangular ellipse ', which proves that the dry ice and snow are uniform sprays. Experiment 4 Then proceed to Experiment 4, and install the dry ice and snow spray in the second dry ice and snow cleaning device. 53 This paper size is in accordance with the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ---------- -Install -------- Order --------- (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (u) _ Set 201, using an extended conical dry ice and snow spray nozzle 207 (Figure 6). It is confirmed that the dry ice and snow Ts and the injection gas 2G ejected from the injection gas ejection port 213 provided at the front end of the outer cylinder 205 are effective at the time of injection. Experimental conditions • Gas 2G for injection: The supply pressure is 0.45 MPa, and nitrogen at a low dew point at room temperature is ejected. • Supply liquefied carbon dioxide gas: The same temperature as in Experiment 1 at a temperature of about 20 ° C and a pressure of about 6 MPa, and the supply flow rate is 1 kg / min. The design specifications of the dry ice and snow spray nozzle: • Gas injection port 213 for injection: Use the gap gap 211 connecting line at the front end of the nozzle 207b of the spray nozzle as the axis, from the center of the upper and lower spray nozzles to the gas injection port 213 The distance configuration is 11.5 mm. The shape of the gas injection port 213 for spraying is a slender shape with a long side of 5.8 mm and a short side of 1.6 mm. Arrange parallel to the side gap notch 211 connecting pipeline. Other design specifications and experiment 1 are common design specifications. From the above experiments and conditions, from the extended conical dry ice and snow spray nozzle 207, whether the spray gas 2G is used, observe the spray shape of the dry ice and snow Ts at a position 15 mm from the spray outlet, measure its size, and confirm the spray density. . When investigating the spray shape, as in Experiment 3, an aluminum tape was stuck on a silicon wafer and sprayed with dry ice and snow Ts. From the deformation marks of the aluminum tape, the shape and size of the rough spray surface of dry ice and snow Ts were measured. The results are shown in Table IV. 54 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling out this page) Pack II ϋ! —Order il! 478974 6425pif.doc / 008 V. Invention Explanation (P) Table 4 A7 B7 Printed non-ejecting gas 2G by the consumer co-operatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, approximately rectangular m cn 1 < N like 煊 φ Φ. NO · 9π whistle π Wing Η W for spraying. Gas 2G ellipse m ㊣ Φ Φ m -ηπ Wake up w. 芨 m? 搠? m * bird's eye view < TS, ―j B other dishes (跶 徴 m ----------- · equipment -------- order ------- (Please read the precautions on the back first (Fill in this page again) This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 478974 6425pif.doc / 008 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs _B7_____ Description of the invention (W) This result It can be clearly seen from Table 4 that when the spray gas 2G sprayed by the spray gas outlet 213 is used, the spray shape of the dry ice Ts is approximately oval, and the long side size does not change. The short side size is because of the spray gas 2G. The effect is to suppress the expansion in the short side direction of the dry ice and snow Ts, and it is only 2 mm to 3 mm shorter. And when the spray gas 2G is not used, the spray density of the dry ice and snow Ts is also tight in the center. The surrounding area is in a loose state. Since the spray amount of dry ice and snow Ts is constant, it is proved that the density of dry ice and snow Ts per unit area is about 2 times. From this result, it can be proved that the spray is sprayed from the gas outlet 213 for spraying. Use gas 2G to keep the alignment of the object to be cleaned. The width of the spray gas 2G will change due to pressure, so the width of the short side direction of the spray shape of the dry snow Ts may vary between 2mm and 5mm: In the above experiment, the dry Throttle device 208 is provided on the expanded cone-shaped dry ice and snow spray heads 207, 221, and 231 of the snow and ice spray device 201. The position of the throttle device 208 is not limited to the dry ice and snow spray head position. For example, it may be provided on a liquefied gas The pipe 256 of the supply line 257 can of course obtain the same effect. In addition, by adjusting the length of the side gap gap 211, the desired magnitude of the dry ice and snow Ts can be obtained. Next, the third dry ice and snow washing device of the present invention is illustrated graphically. Fig. 12 is a schematic diagram illustrating an example of a system disclosed by the third dry ice and snow washing device of the present invention. Fig. 13 is a spray of the front-end jet cleaning nozzle used by this dry ice and snow washing device. Sectional view with piping. 14

56 (請先閱讀背面之注意事項再填寫本頁) 裝 訂--- 著丨 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 A7 B7 6425pif.doc/008 五、發明說明（姊） (請先閱讀背面之注意事項再填寫本頁) 圖爲適合此乾冰雪洗淨裝置的尖細型噴射洗淨噴頭之重點 部位槪略剖面圖。问樣的第15圖爲適合此乾冰雪洗淨裝 置之圓錐狀擴張型噴射洗淨噴頭之重要部位槪略剖面圖。 而第16圖爲此乾冰雪洗淨裝置之噴射洗淨噴頭裝設之自 由滑動台架狀態之說明槪略圖。 關於本發明之第三乾冰雪洗淨裝置300如第12圖所 示。是由乾冰雪生產供給系統308與噴射用氣體供給系統 318組成。儲藏液化碳酸氣τγ之液化碳酸氣容器301與所 連接之管302,通過可以適宜開關操作電磁閥等之開關手 段303接著經由開關手段303之連結管304，通過例如銳 孔流口節流手段305，經由乾冰雪供給管306，連接其前 端配置之噴射洗淨噴頭，連結噴射用配管307，而形成乾 冰雪生產供給系統308。 經濟部智慧財產局貝工消費合作社印製 另一方面，儲藏氮氣等之噴射用氣體源容器311與所 連接之管312，通過開關閥313以及壓力調整器314，接 著經由管315通過離子化手段316，經由噴射用氣體供給 管317,連接在前端配置噴射洗淨噴頭323之噴射用配管， 設置爲噴射用氣體供給系統318。此外上述之噴射用氣體 供給系統318爲了使噴射用氣體3G保持適當之溫度，設 置例如加熱控制手段319於管315上。 此外’設置上述之乾冰雪產生供給系統308所裝置之 開關手段303或節流手段305之機器以及噴射用氣體供給 系統所裝置之離子化手段316或加熱控制手段319等機器 設備，全部集合收納在控制箱320中，進行運轉操作之操 57 本紙張尺度適用中國國豕標準（CNS)A4規格（210 X 297公爱） 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明) 作方法是很便利。因此從乾冰雪產生供給系統308延伸出 之乾冰雪供給管306，以及噴射用氣體供給系統318延伸 出之噴射用氣體供給管317,個別的連接噴射用配管307 中之噴射洗淨噴頭323,成爲略爲同軸之二重管與小盒子。 此外由於使用具有柔軟性之可撓管，使處理作業之操作性 提升。亦即，以手握住所配置之噴射洗淨噴頭323之噴射 用配管307,可由設定改變噴射洗淨噴頭323之適合方向， 將被洗淨物之洗淨部分做到準確的洗淨。此外，只有二重 管之內管爲可撓性管也可以。 配置噴射洗淨噴頭323之噴射用配管307，例如第13 圖所示之構造。即噴射用配管307是由內管321、內管321 之外側與所配置之外管322間之間隙，形成略爲同心之 二重管。因此在其前端設置開口將噴射洗淨噴頭323緊密 的結合。另一端是連通上述之內管321所連接之乾冰雪導 入口 324以及連通上述之外管322所連接之噴射用氣體導 入口 325所配設之導入連結具326，並以袋狀螺帽327密 封連結。因此上述之乾冰雪導入口 324以袋狀螺帽328將 上述之乾冰雪產生供給系統308之乾冰雪供給管306密封 連結。上述之噴射用氣體導入口 325以袋狀螺帽329將上 述之噴射用氣體供給系統318之噴射用氣體供給管317密 封連結。因此，配置噴射洗淨噴頭323之噴射用配管307 較佳是由適用於低溫之不鏽鋼所形成。 此外，噴射洗淨噴頭323，例如第13圖所示，其前端 有直線狀之開口。除了直線形之噴射洗淨噴頭外，如第14 58 本^張尺度適用中國國家標準（CNS)A4規格（210 X 297公ϋ "~' (請先閱讀背面之注意事項再填寫本頁) 裝 ----訂--- ♦ 478974 A7 B7 6425pif.doc/008 五、發明說明（ς4 ) 圖中所示之重要部位槪略剖面圖，使用朝向噴頭前端以一 圓錐角度0逐漸收縮形成之開口 323a之尖細型噴射洗淨 噴頭323A。如第15圖中所示之重要部位槪略剖面圖，使 用通過節流角度/5之節流器，朝向前端以一圓錐狀擴張角 度α逐漸擴張形成之擴張開口 323b之圓錐擴張型噴射洗 淨噴頭323B等。 此外，開關手段303是由電磁閥、計時器、以及其控 制器等所構成。也可以用空氣動作閥與電磁閥之組合取代 電磁閥。 而且上述之節流手段305較佳是具有銳孔形狀，使用 針形閥等，對應洗淨對象物或使用環境，調整液化碳酸氣 A之流量以適宜的調整乾冰雪Ts之生成量。此外加熱控 制手段319具體的是由加熱器319a、感測器319b以及控 制器3 19c構成。 而且，離子化手段246，是在各種之電離器中選擇適 合的使用。 液化碳酸氣TY容器較佳是使用高壓氣體容器(氣體鋼 瓶）。另外也可使用低溫液化氣體用絕熱容器(儲槽）。必要 時對液化碳酸氣加壓，可以使用所希望的壓力。 噴射用氣體3G除了上述氮氣之外，也可使用碳酸氣、 氬氣或壓縮空氣。使用高壓氣體容器（氣體鋼瓶）作爲噴射 用氣體源容器311而加壓塡充氣體。如果是空氣之情況下， 也可以使用壓縮機來加壓供給。在此情況下，因爲氣體之 露點高，在乾冰雪噴射時，會冷卻凝結成水分而妨礙噴射。 59 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -------!4予----ίγ-----!# (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.doc/008 五、發明說明（q) 在露點高之情況下，另一方法是使用乾燥器或除濕機（圖 示），一定要以乾燥使露點降下來。 (請先閲讀背面之注意事項再填寫本頁) 本發明並不限定於上述之各種機器或零件，於上述只 是限於維持本發明之主旨，而適宜的選擇使用。 上述爲關於本發明之第三乾冰雪洗淨裝置300,以下 由第12圖來說明操作運轉。 首先將液化碳酸氣容器301內維持液化狀態，保持約 6 MPa壓力之液化碳酸氣tl，經過管302而導出。適宜的 操作例如電磁閥之開關手段303，使液化碳酸氣Ίγ間歇的 通過管304而供給至節流手段305。上述之開關手段303 爲打開之狀態並且以節流手段305之銳孔調節液化碳酸氣 TL流量，同時在大氣壓下（約〇MPa)絕熱膨脹形成乾冰雪 Ts。之後，所生成之乾冰雪Ts經過乾冰雪供給管路306， 供給至噴射用配管307中所設置之導入連結具326之乾冰 雪導入口 324，然後由噴射洗淨噴頭323噴射。此時，乾 冰雪Ts由上述之開關手段303對應適宜之間隔開關操作， 維持間歇之噴射。 經濟部智慧財產局員工消費合作社印製 另一方面，噴射用氣體3G例如氮氣約15MPa塡充至 噴射用氣體源容器311。打開開關閥313,將噴射用氣體3G 通過管路312送至壓力調整器314，利用壓力調整器314 調整壓力至1 MPa以下後，通過管315至離子化手段316。 之後，必須以離子化手段316將噴射用氣體3G進行對應 適宜離子化後，通過噴射用氣體供給管317。供給至噴射 用配管307中所設置之導入連結具326之噴射用氣體導入 60 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） — 478974 A7 B7 6425pif.doc/008 五、發明說明（沾） □ 325。 此外，供給之噴射用氣體3G在供給至管315途中手[j 用加熱控制手段319適宜的加熱升溫50°(：至70°(：的溫度。 而且此溫度可視洗淨時乾冰雪Ts之噴射時間適當的選擇 調整。亦即在洗淨時間較短的情況下，需要較低之溫度。 在洗淨時間較長的情況下，需要較高之溫度。在者爲了提 高洗淨效果，可視被洗淨物沾汙物之種類或狀態，適當的 選擇調整設定溫度。 因此供給至噴射用配管307之乾冰雪Ts與噴射用氣 體3G如第13圖所示，噴射用氣體3G通過噴射用配管307 之外管322,供給至其前端部位所配設之噴射洗淨噴頭 323，沿著其前端之開口內緣使大氣壓壓力下降而噴射。 乾冰雪Ts通過噴射用配管307之內管321，從其前端部位 所配設之噴射洗淨噴頭323的略中央位置，與上述之噴射 用氣體3G略爲同軸的噴射。接著向被洗淨物噴射，使被 洗淨物得到適當之洗淨處理。 本發明是由上述之狀態進行洗淨，此外以本發明上述 之洗淨裝置，配合下述之運轉操作之狀態，可得到較佳之 洗淨效果。 亦即，乾冰雪Ts之供給，以開關手段303進行間歇 的開關操作。此時在另一邊連續的供給噴射用氣體3G。 如此爲了使乾冰雪Ts不會連續的供給，在沒有供給乾冰 雪Ts之期間，噴射用氣體3G可加溫被洗淨物。此結果不 會引起被洗淨物急速的溫度降低，由於被洗淨物不會維持 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------------;·裝--------訂 C請先閱讀背面之注意事項再填寫本頁)56 (Please read the notes on the back before filling out this page) Binding --- 丨 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Invention Explanation (sister) (Please read the precautions on the back before filling out this page) The figure is a schematic cross-sectional view of the key parts of a pointed spray cleaning nozzle suitable for this dry ice and snow cleaning device. Fig. 15 is a schematic cross-sectional view of important parts of a conical expansion type spray cleaning nozzle suitable for the dry ice and snow cleaning device. Fig. 16 is a schematic diagram illustrating the state of the free sliding stage of the spray cleaning nozzle of the dry ice and snow cleaning device. The third dry ice and snow washing device 300 according to the present invention is shown in FIG. It consists of a dry ice and snow production supply system 308 and a jet gas supply system 318. The liquefied carbonic acid gas container 301 storing the liquefied carbon dioxide gas τγ and the connected pipe 302 can be opened and closed by means of a switching means 303 which can appropriately open and close the solenoid valve, etc., and then through the connecting pipe 304 of the switching means 303, for example, by means of an orifice orifice throttle means 305 The dry ice and snow supply pipe 306 is connected to the spray cleaning nozzle disposed at the front end thereof, and the spraying pipe 307 is connected to form a dry ice and snow production and supply system 308. Printed by Shelley Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs On the other hand, the gas source container 311 for storing nitrogen and the like is connected to the pipe 312 through the on-off valve 313 and the pressure regulator 314, and then through the pipe 315 through ionization means 316 is connected to an injection piping in which an injection cleaning nozzle 323 is arranged at the front end via an injection gas supply pipe 317, and is provided as an injection gas supply system 318. In addition, in order to keep the injection gas 3G at an appropriate temperature, the above-mentioned injection gas supply system 318 is provided with a heating control means 319 on the pipe 315, for example. In addition, the equipment such as the above-mentioned dry ice and snow generation and supply system 308 equipped with the switching means 303 or the throttling means 305 and the injection gas supply system with the ionization means 316 or heating control means 319 are all collected and stored in Operation in the control box 320 57 The paper size is in accordance with China National Standard (CNS) A4 (210 X 297 public love) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 2. Description of the invention) It is very convenient. Therefore, the dry ice and snow supply pipe 306 extended from the dry ice and snow generation supply system 308 and the injection gas supply pipe 317 extended from the injection gas supply system 318 are individually connected to the injection cleaning nozzle 323 in the injection pipe 307, and become Slightly coaxial double tube and small box. In addition, the use of flexible flexible tubes improves the operability of processing operations. That is, by holding the spraying piping 307 of the spray cleaning nozzle 323 with a hand, the appropriate direction of the spray cleaning nozzle 323 can be changed by setting, and the washed part of the object to be cleaned can be accurately cleaned. In addition, only the inner tube of the double tube may be a flexible tube. The spraying pipe 307 in which the spray cleaning head 323 is arranged has a structure as shown in FIG. 13, for example. That is, the injection pipe 307 is formed by a gap between the inner pipe 321, the outer side of the inner pipe 321, and the arranged outer pipe 322 to form a slightly concentric double pipe. Therefore, an opening is provided at the front end to tightly combine the spray cleaning nozzle 323. The other end is an introduction coupling 326 configured to communicate with the dry ice and snow introduction port 324 connected to the inner pipe 321 and the injection gas introduction port 325 connected to the outer pipe 322 and sealed with a bag nut 327. link. Therefore, the above-mentioned dry ice and snow introduction port 324 seals and connects the dry ice and snow supply pipe 306 of the above dry ice and snow generation supply system 308 with a bag nut 328. The above-mentioned injection gas introduction port 325 seals and connects the injection gas supply pipe 317 of the above-mentioned injection gas supply system 318 with a bag nut 329. Therefore, the spraying pipe 307 in which the spray cleaning head 323 is arranged is preferably formed of stainless steel suitable for low temperature. The jet cleaning head 323 has a linear opening at its tip, as shown in Fig. 13, for example. Except for the linear jet cleaning nozzle, such as the 14th and 58th scales are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm " ~ '(Please read the precautions on the back before filling this page) Binding ---- order ---- 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (ς4) The important section shown in the figure is a schematic cross-sectional view, which is formed by gradually shrinking toward the front end of the nozzle at a cone angle 0. The thin-shaped jet cleaning nozzle 323A of the opening 323a. As shown in FIG. 15, a schematic cross-sectional view of the important part is formed by gradually expanding toward the front end with a conical expansion angle α using a throttle passing through a throttle angle of / 5. Cone-expanded spray cleaning nozzle 323B, etc. of the expansion opening 323b. In addition, the switching means 303 is composed of a solenoid valve, a timer, and a controller thereof. The solenoid valve can also be replaced by a combination of an air operated valve and a solenoid valve Moreover, the above-mentioned throttling means 305 preferably has a sharp hole shape, and a needle valve or the like is used to adjust the flow of liquefied carbonic acid A to appropriately adjust the amount of dry ice and snow Ts corresponding to the object to be cleaned or the use environment. The heating control means 319 is specifically composed of a heater 319a, a sensor 319b, and a controller 3 19c. In addition, the ionization means 246 is appropriately selected for use in various ionizers. The liquefied carbon dioxide gas TY container is preferably Use high-pressure gas containers (gas cylinders). In addition, low-temperature liquefied gas insulation containers (storage tanks) can also be used. If necessary, pressurize the liquefied carbon dioxide gas and use the desired pressure. In addition to the nitrogen gas described above, Carbon dioxide gas, argon gas, or compressed air can also be used. The high-pressure gas container (gas cylinder) is used as the injection gas source container 311 to pressurize the aerated body. In the case of air, a compressor can also be used to pressurize the supply. In this case, because the dew point of the gas is high, it will cool and condense into moisture during the spraying of dry ice and snow, preventing the spraying. 59 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) --- ----! 4 予 ---- ίγ -----! # (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif .doc / 008 5. Description of the invention (q) In the case of high dew point, another method is to use a dryer or dehumidifier (pictured), and the dew point must be lowered by drying. (Please read the precautions on the back first (Please fill in this page again) The present invention is not limited to the above-mentioned various machines or parts. The above is only limited to maintain the gist of the present invention, and is appropriately selected for use. The above is the third dry ice and snow washing device 300 of the present invention, the following The operation is described with reference to Fig. 12. First, the liquefied carbonic acid gas container 301 is maintained in a liquefied state, and the liquefied carbonic acid gas t1 maintained at a pressure of about 6 MPa is led out through a pipe 302. A suitable operation is, for example, the switching means 303 of the solenoid valve, so that the liquefied carbon dioxide gas γ is intermittently supplied to the throttling means 305 through the pipe 304. The above-mentioned switching means 303 is in an open state, and the liquefied carbon dioxide gas TL flow rate is adjusted by the sharp holes of the throttling means 305, and at the same time, the adiabatic expansion under atmospheric pressure (about 0 MPa) forms dry ice and snow Ts. Thereafter, the generated dry ice and snow Ts passes through the dry ice and snow supply pipe 306, is supplied to the dry ice and snow inlet 324 of the introduction coupling 326 provided in the spraying pipe 307, and is sprayed by the spray cleaning nozzle 323. At this time, the dry ice and snow Ts is operated by the above-mentioned switching means 303 at appropriate intervals to maintain intermittent spraying. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs On the other hand, the injection gas source container 311 is filled with 3G of injection gas such as about 15 MPa of nitrogen. The on-off valve 313 is opened, and the injection gas 3G is sent to the pressure regulator 314 through the pipeline 312. After the pressure is adjusted to less than 1 MPa by the pressure regulator 314, the gas is passed through the pipeline 315 to the ionization means 316. After that, the injection gas 3G must be appropriately ionized by the ionizing means 316, and then passed through the injection gas supply pipe 317. The injection gas supplied to the introduction connection 326 provided in the injection pipe 307 is introduced into the 60 paper size applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) — 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (stain) 325. In addition, the supplied spraying gas 3G is supplied to the pipe 315 on the way [j. The temperature of the heating control means 319 is appropriate to increase the temperature by 50 ° (: to 70 ° (:). Moreover, this temperature can be seen from the spray of dry ice and snow Ts during washing. The time is appropriately selected and adjusted. That is, when the cleaning time is short, a lower temperature is required. When the cleaning time is longer, a higher temperature is required. In order to improve the cleaning effect, the person can be seen The type or state of the contaminated cleaning substance is appropriately selected to adjust the set temperature. Therefore, the dry ice and snow Ts and the injection gas 3G supplied to the injection pipe 307 are shown in FIG. 13, and the injection gas 3G passes through the injection pipe 307 The outer tube 322 is supplied to the spray cleaning nozzle 323 provided at the front end portion thereof, and the atmospheric pressure is lowered along the inner edge of the opening at the front end to spray. The dry ice Ts passes through the inner tube 321 of the spraying pipe 307, from which The spray cleaning nozzle 323 provided at the front end is located at a slightly central position, and is sprayed coaxially with the above-mentioned spray gas 3G. Then, the spray is sprayed on the object to be cleaned, so that the object to be cleaned can be properly cleaned. It is clear that the cleaning is performed in the above state, and in addition, the above-mentioned cleaning device of the present invention can be used in conjunction with the following operating conditions to obtain a better cleaning effect. That is, the supply of dry ice and snow Ts is switched on and off by means of 303 Perform intermittent switching operation. At this time, continuously supply the spraying gas 3G on the other side. In order to prevent the continuous supply of dry ice and snow Ts, the spraying gas 3G can be heated and washed during the period when dry ice and snow Ts is not supplied. This result will not cause the temperature of the object to be washed to drop sharply, because the object to be cleaned will not maintain the paper size. Applicable to China National Standard (CNS) A4 (210 X 297 mm) ------- -----; · Install -------- Order C, please read the notes on the back before filling this page)

• ϋ ϋ I I an ϋ I 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.doc/008 五、發明說明（θ ) 在低溫狀態，而形成不易結露之狀態。 在此情況下，由噴射用氣體源容器311減壓之噴射用 氣體3G，利用溫度控制手段319昇溫，連續的供給至噴 射洗淨噴頭323。另一邊乾冰雪Ts以開關手段303打開， 通過噴射洗淨噴頭323噴出乾冰雪Ts至被洗淨物上。乾 冰雪Ts衝撞被洗淨物而達到洗淨之效果。 此時由乾冰雪Ts之低溫冷源使被洗淨物之溫度緩慢 的降下來，但是開關手段303由開變成關而使乾冰雪Ts 停止供給，只有加溫之噴射用氣體3G連續的供給，而使 被洗淨物到達近似常溫之狀態下。因此由噴射用氣體3G 之昇溫，開關手段303短時間的關閉，而進行較佳效率之 洗淨。此外噴射用氣體3G爲使用乾燥(低露點）之氣體， 因此被洗淨物可維持在乾燥之狀態，可以防止被洗淨物上 結露之生成。 在被洗淨物爲半導體晶片可能因爲靜電造成損壞之情 況下，可以利用噴射用氣體供給系統318所設置之離子化 手段316。液化碳酸氣在節流手段305膨脹後，由於將 乾冰雪Ts與管路磨擦所生成的電荷除電，而不會造成因 帶電所產生之放電破壞或結塊化之問題，經常可做到良好 之洗淨。此外因爲乾冰雪Ts與噴射用氣體3G在噴射時混 合，可經由一方之離子化，而作到使帶電之乾冰雪Ts也 能夠確實的除電。因此離子化手段316也可設置在噴射用 氣體供給系統318與乾冰雪生成供給系統308兩者之系統 上，但是並不需要兩個系統都設置離子化手段316，只要 62 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------裝·-----丨丨訂-------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消费合作社印製 478974 A7 B7 6425pif.doc/008 五、發明說明（“，） 有一個系統設置離子化手段316就可發揮十分顯著之效 果。此外上述例子是將離子化手段316設置在氣體供給系 統318，當然也可以設置在乾冰雪生成供給系統308。 而且，離子化手段316有各式各樣之手段，例如在管 路中配置電極產生電漿，作爲在配管中流動之流體離子化 之方式之情況下。在乾冰雪Ts之供給系統308中安裝電 極，因爲電極爲造成乾冰雪Ts附著、堆積、阻塞等之原 因，在設置這種方式之離子化手段316的情況下，安裝在 乾冰雪Ts供給系統109是不恰當的，而希望安裝在噴射 用氣體供給系統118。這時所採用之離子化手段316以及 其他不同之方式，最好要考慮每一個方式所具有之特殊性 而討論所適合設置之系統。而且其他離子化手段316，爲 使用軟X射線照射式等方式之裝置。此外洗淨室之大氣也 可由所希望之離子化手段進行除電。 此外，在洗淨被洗淨物之任意部份上之汙點的情況 下，噴射洗淨噴頭323具有便利的可自由的變化適合之方 向的裝置。此情況下，如上所述，由控制箱320延伸出之 乾冰雪生成供給管306與噴射用氣體供給管317連接噴射 洗淨噴頭323，略爲同軸之內管321與外管322之二重管 所形成之噴射用配管307較佳的是具有自在性之可撓性 管。 而且爲了使被洗淨物與洗淨噴頭323保持一定之間 隔，裝設如第16圖所示支撐洗淨噴頭323能夠上下方向 以及橫向（前後方向、左右方向）自由滑動的架台。 63 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------------裝 ------"訂i (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 6425pif.doc/008 A7 _ B7 五、發明說明（Μ ) 第16圖所示之架台303，例如是由三腳330b所支撐 之基盤330a或由如角鋼架台等安定之架台所形成。在基 盤330a上裝設延伸左右方向滑行軌道331a以及延伸前後 方向滑行軌道331b所組成之橫向滑行軌道331。於第16 圖中爲裝設左右方向滑行軌道331a。 因此，在橫向滑行軌道331的左右方向滑行軌道331a 上設置可沿著上述之左右方向滑行軌道331a上下滑動之 上下方向滑行軌道332。而且上下方向滑行軌道332通過 滑動結合構件333與上述之橫向滑行軌道331之中的前後 方向滑行軌道331b配置在一起。因此滑動結合構件333 之上下方向滑行軌道上之滑動是由滑動結合構件333所接 合之前後方向滑行軌道331b沿著上下方向滑行軌道332 上下移動。而且前後方向滑行軌道331b以滑動結合構件 333爲支點，給予前後方向的力，使前後方向滑行軌道33 lb 前後移動。 因此，使所設置之乾冰雪洗淨噴頭323固定在所架設 之前後方向滑行軌道331b，乾冰雪洗淨噴頭323可以前後 上下左右自由的適宜滑動，並與被洗淨物保持一定之距 離，由此可以有效的洗淨脫膜鉗之沾污物。 此外所配置之橫向滑行軌道331中，在第16圖中所 配置之左右方向滑行軌道331a與前後方向滑行軌道331b 當然也可以配置在相反的位置，可視使用方便而適宜的選 擇配置。 而且在三腳330b之足部可設置例如腳輪之具有固定 64 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁)• ϋ ϋ I I an ϋ I Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 5. The description of the invention (θ) is in a low temperature state, and it is difficult to form a condensation state. In this case, the injection gas 3G decompressed from the injection gas source container 311 is heated up by the temperature control means 319, and is continuously supplied to the injection cleaning nozzle 323. On the other side, the dry ice and snow Ts is opened by the switching means 303, and the dry ice and snow Ts is sprayed onto the object to be cleaned by the spray cleaning nozzle 323. Dry ice and snow Ts collides with the object to be washed to achieve the effect of washing. At this time, the temperature of the object to be cleaned is slowly lowered by the low-temperature cold source of dry ice and snow Ts, but the switching means 303 is changed from on to off to stop the supply of dry ice and snow Ts, and only the heating gas 3G is continuously supplied. The object to be cleaned is brought to a state close to normal temperature. Therefore, the temperature of the injection gas 3G is raised, and the switching means 303 is turned off for a short period of time to perform cleaning with better efficiency. In addition, the spraying gas 3G uses a dry (low dew point) gas, so the object to be cleaned can be maintained in a dry state, and the formation of dew on the object to be cleaned can be prevented. In the case where the object to be cleaned is a semiconductor wafer which may be damaged due to static electricity, an ionizing means 316 provided in the gas supply system 318 for ejection may be used. After the expansion of the liquefied carbonic acid gas by the throttling means 305, the charge generated by friction between the dry ice and snow Ts and the pipeline is removed, which does not cause the problem of discharge destruction or agglomeration caused by the charging, which is often good. Wash. In addition, because the dry ice and snow Ts is mixed with the injection gas 3G during injection, one ionization can be performed, and the charged dry ice and snow Ts can be reliably removed. Therefore, the ionization means 316 can also be installed on both the jet gas supply system 318 and the dry ice and snow generation supply system 308, but it is not necessary to set the ionization means 316 for both systems, as long as the 62 paper standards are applicable to the Chinese country Standard (CNS) A4 specification (210 X 297 mm) -------- install · ----- 丨 丨 Order -------- (Please read the precautions on the back before filling in this Page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the Invention ("," A system with ionization means 316 can play a very significant effect. In addition to the above example, the ionization The ionizing means 316 is provided in the gas supply system 318, and of course, it can also be installed in the dry ice and snow generating and supplying system 308. In addition, the ionizing means 316 has various methods, such as placing electrodes in a pipeline to generate plasma, and In the case of the ionization method of the flowing fluid. Install electrodes in the dry ice and snow Ts supply system 308, because the electrodes are caused to cause the dry ice and snow Ts to attach, accumulate, and block. In the case of the ionization means 316, it is inappropriate to install the Ts supply system 109 in the dry ice and snow, but it is desirable to install it in the gas supply system 118 for injection. At this time, the ionization means 316 and other different methods should be considered. The particularity of one method is discussed in terms of a suitable system. In addition, other ionization means 316 is a device using a soft X-ray irradiation method. In addition, the atmosphere of the cleaning room can be destaticized by the desired ionization means. In addition, in the case of cleaning the stain on any part of the object to be cleaned, the spray cleaning nozzle 323 has a convenient and freely changeable suitable direction device. In this case, as described above, the control box The dry ice and snow generating supply pipe 306 extended from 320 is connected to the spray cleaning nozzle 323 of the spray gas supply pipe 317. The spray pipe 307 formed by the inner tube 321 and the outer pipe 322 which are slightly coaxial is preferably the spray pipe 307. A flexible tube with flexibility. In addition, in order to maintain a certain distance between the object to be cleaned and the cleaning nozzle 323, a supporting cleaning nozzle 323 can be installed as shown in FIG. 16 Orientation and horizontal (front-rear direction, left-right direction) freely sliding stand. 63 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ------------ installation-- ---- & quoti (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 A7 _ B7 V. Description of Invention (Μ) Figure 16 The frame 303 shown is, for example, a base plate 330a supported by three legs 330b or a stable frame such as an angle steel frame. The base plate 330a is provided with a lateral sliding rail 331 composed of an extended left-right sliding rail 331a and an extended front-back sliding rail 331b. In Fig. 16, a left-right sliding rail 331a is installed. Therefore, an up-down sliding track 332 is provided on the left-right sliding track 331a of the horizontal-moving sliding track 331 so as to slide up and down along the above-mentioned left-right sliding track 331a. Further, the up-down sliding track 332 and the forward-backward sliding track 331b of the above-mentioned lateral sliding track 331 are arranged together by a sliding coupling member 333. Therefore, the sliding on the sliding rail in the up-down direction by the sliding coupling member 333 is moved up and down along the sliding rail 332 in the up-and-down direction by the sliding coupling member 333. Further, the forward-backward sliding rail 331b uses the sliding coupling member 333 as a fulcrum, and a force in the forward-backward direction is given to cause the forward-backward sliding rail 33 lb to move forward and backward. Therefore, the installed dry ice and snow washing nozzle 323 is fixed on the sliding track 331b before and after the installation. The dry ice and snow washing nozzle 323 can freely slide up and down, left and right, and maintain a certain distance from the object to be cleaned. This can effectively clean the contamination of the stripper. In addition, of the lateral taxiing rails 331 arranged in FIG. 16, the lateral taxiing rails 331a and the forward and backward taxiing rails 331b arranged in FIG. 16 may of course be arranged at opposite positions, and it is convenient and suitable to choose a configuration. Moreover, the foot of the three-legged 330b can be provided with a fixed caster, for example. The paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page)

·1111111 I I I I # 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.d〇c/〇〇8 五、發明說明（έ>) 停止機構之移動用車輪334,可以容易的調整距離增加作 業性。 於第16圖中，被洗淨物爲成形用脫膜鉗，是以上下 打開之類型之脫膜鉗作爲洗淨對象爲例，也可以是左右打 開之類型之脫膜鉗作爲洗淨被洗物，噴射洗淨噴頭之開始 方向（乾冰雪之噴出方向）近可能的對應略爲水平之方向。 此外於第16圖中，使用具有兩個噴出方向之噴頭， 在同一方向也可能有複數個噴出方向。因此噴射洗淨噴頭 323使乾冰雪由兩方向噴出，但是此噴射洗淨噴頭之主體 綜合成爲一個。 而且在洗淨時，爲了知道上述之各個滑動軌道之移動 量而設置刻度，以及視需要而設置自動移行機構，而可能 使作業更加容易。 並且爲了對應處理量產物品，乾冰雪生產供給系統308 以及噴射用氣體供給系統318可以配置複數個。固定所配 置之複數個洗淨噴頭323，進行自動搬送被洗淨物，可在 短時間內進行大量之洗淨。 此外，因粒子等廢棄物侵入所造成零件洗淨之問題， 可視需要而使用金屬製之二重管，到達所希望大氣之方 法’可利用例如淸洗作業台等而維持較佳之洗淨度 65 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -----------UP 裝·-------訂--------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（G) 第五實施例 以第12圖所圖示之系統，利用下列之設計規格因素 所製作之乾冰雪洗淨裝置作爲第五實施例。在此使用附著 潤滑脂之玻璃板當作被洗淨物進行洗淨處理，接著進行例 如下列性能之確認實驗。 實驗1 :由間歇供給乾冰雪Ts，進行洗淨效果之確認 實驗。 實驗2 :由離子化手段之設置，進行除電效果之確認 實驗。 所製作之乾冰雪洗淨裝置之設計規格因素： 液化碳酸氣生產供給系統308 : •液化碳酸氣容器301 :高壓氣體鋼瓶。 •液化碳酸氣塡充壓力·· 6 Mpa左右。 •開關手段303 :附設開關間隔計時器之電磁閥。 •節流手段305 :針形閥。 噴射用氣體供給系統318 : •噴射用氣體源容器311 :高壓氣體鋼瓶。 •噴射用氣體3G :露點-65°C之氮氣，所塡充之壓力 1.5MPa 左右。 •壓力調整器314 :在常溫下調整壓力爲一定之壓力 0.7 MPa左右連續的供給至噴射洗淨噴頭323。 •離子化手段316:電漿放電方式（美國離子系統公 司製）。 •溫度控制手段319:附設比例-積分-微分（PID)控制 66 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱) """"" (請先閱讀背面之注意事項再填寫本頁) 裝 ·11111 % 478974 A7 B7 6425pif.doc/008 五、發明說明（β ) 之電熱器。 噴射洗淨噴頭323 : •噴射構造：直線形噴頭，與噴射用氣體3G以及乾 冰雪Ts之同軸噴射方式。 實驗1 實驗1爲使用上述第五實施例所製作之裝置，洗淨附 著潤滑脂之玻璃板。指定實驗爲： •進行實驗之實驗室溫度爲15〜2(TC。 •所供給之噴射用氣體之溫度由溫度控制手段319控 制在定溫60°C 〇 •周圍濕度（相對濕度：％RH)在一般濕氣多容易結露 之條件下，在相對濕度70〜73%RH左右。 基準樣品：以上述之條件，周圍濕度70%RH。首先， 設定乾冰雪Ts產生供給系統308中開關手段303之電磁 閥打開噴射乾冰雪Ts之噴射時間爲〇·25秒，以及電磁閥 關上停止噴射乾冰雪Ts之停止時間爲2.0秒。間歇的噴射 乾冰雪，供給l.Okg/min之液化碳酸氣。另一方面由噴射 用氣體供給系統318,以60°C之氮氣作爲噴射用氣體3G 留過洗淨噴頭323。此狀態之洗淨不會在玻璃板上產生結 露，證明可除去潤滑脂。以此狀態作爲基準樣品。 接著進行樣品1以及樣品2，開關手段303之電磁閥 之開關間隔與基準樣品相同，電磁閥爲打開狀態之噴射時 間爲0.25秒，以及關上狀態之停止時間爲2 〇秒。周圍濕 度以及液化碳酸氣TL之供給量如下列而改變進行洗淨處 67 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） —丨—丨丨！裝i丨—丨丨丨—訂·ί (請先閱讀背面之注意事項再填寫本頁) #· 經濟部智慧財產局員工消費合作社印製 478974 6425pifdoc/008 B7__ 五、發明說明（β ) 理，確認作爲被洗淨物之玻璃板上是否產生結露。 樣品1 ·周圍濕度72%RH ’液化碳酸氣之供給量 0.5kg/min。 (請先閱讀背面之注意事項再填寫本頁) 樣品2 :周圍濕度73%RH，液化碳酸氣之供給量 0.2kg/min。 此外樣品3以及樣品4，周圍濕度以及液化碳酸氣τγ 之供給量與基準樣品相同周圍濕度爲70%RH，液化碳酸氣 TL之供給量爲l.Okg/min。開關手段303之電磁閥之開關 間隔如下列而改變間歇的噴射乾冰雪！^進行洗淨處理， 確認作爲被洗淨物之玻璃板上是否產生結露。 樣品3 :打開狀態之噴射時間爲0.25秒，關上狀態之 停止時間爲1.5秒。 樣品4 :打開狀態之噴射時間爲0.25秒，關上狀態之 停止時間爲1.0秒。 樣品5 :周圍濕度爲低濕度50%RH，在此狀態下開關 手段303之電磁閥保持打開狀態，液化碳酸氣ΐγ之供給 量爲l.Okg/min，連續的供給乾冰雪Ts而連續的噴射洗淨 之情況下。確認作爲被洗淨物之玻璃板上是否產生結露。 經濟部智慧財產局員工消費合作社印製 在此樣品1〜5之實驗結果以及基準樣品一起由表五來 表示。 68 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 6425pif.doc/008 A7 B7· 1111111 IIII # Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.d〇c / 〇〇8 V. Description of the invention (Handling) The wheel 334 of the stop mechanism can be easily adjusted to increase the workability . In Fig. 16, the object to be cleaned is a stripping pliers for molding. The stripping pliers of the type opened above and below are taken as an example for cleaning, and the stripping pliers of the type opened left and right may be washed and washed. The starting direction of the spray cleaning nozzle (the direction of spraying of dry ice and snow) is almost horizontally corresponding. In addition, in Fig. 16, a nozzle having two ejection directions is used, and there may be a plurality of ejection directions in the same direction. Therefore, the spray cleaning nozzle 323 sprays dry ice and snow from two directions, but the main body of the spray cleaning nozzle is integrated into one. In addition, when cleaning, setting a scale to know the moving amount of each of the above-mentioned slide rails, and an automatic travel mechanism as necessary, may make the work easier. In addition, a plurality of dry ice and snow production and supply systems 308 and injection gas supply systems 318 may be provided in order to cope with the processed products. A plurality of cleaning nozzles 323 are fixedly arranged to automatically convey the objects to be cleaned, and a large amount of cleaning can be performed in a short time. In addition, due to the intrusion of particles and other wastes, the use of metal double tubes can be used to reach the desired atmosphere according to the need. 'For example, a cleaning table can be used to maintain a good cleaning degree 65 This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) ----------- UP Packing ----------- Order --------- (Please read the notes on the back before filling out this page) Printed by the Employees 'Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 A7 B7 Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of Invention (G) Fifth The embodiment uses the system shown in FIG. 12 as the fifth embodiment by using a dry ice and snow washing device made by the following design specifications. Here, a glass plate with grease is used as the object to be cleaned, and then a confirmation test such as the following performance is performed. Experiment 1: The dry ice and snow Ts were intermittently supplied to confirm the cleaning effect. Experiment 2: The experiment of confirming the effect of static elimination was performed by the setting of ionization means. Design specifications of the dry ice and snow washing device produced: Liquefied carbonic acid gas production and supply system 308: • Liquefied carbonic acid gas container 301: High-pressure gas steel cylinder. • Charging pressure of liquefied carbon dioxide gas: · About 6 Mpa. • Switching means 303: a solenoid valve with a switch interval timer. • Throttling means 305: needle valve. Gas supply system for injection 318: • Gas source container for injection 311: High-pressure gas cylinder. • Jet gas 3G: nitrogen gas with dew point of -65 ° C, the pressure charged is about 1.5MPa. • Pressure regulator 314: The pressure is adjusted to a constant pressure at room temperature and is continuously supplied to the jet cleaning nozzle 323 at about 0.7 MPa. • Ionization method 316: Plasma discharge method (made by American Ion System). • Temperature control means 319: with proportional-integral-derivative (PID) control 66 This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 public love) " " " " " (Please read first Note on the back, please fill out this page again) Install · 11111% 478974 A7 B7 6425pif.doc / 008 5. Electric heater of invention description (β). Spray cleaning nozzle 323: • Spray structure: linear spray nozzle, coaxial spray method with spraying gas 3G and dry ice snow Ts. Experiment 1 Experiment 1 was performed using a device manufactured in the fifth embodiment described above, and the glass plate with grease was washed. The specified experiment is: • The laboratory temperature for the experiment is 15 ~ 2 (TC.) • The temperature of the supplied injection gas is controlled by the temperature control means 319 at a fixed temperature of 60 ° C. ○ Ambient humidity (relative humidity:% RH) Under the condition that the humidity is generally easy to dew, the relative humidity is about 70 ~ 73% RH. The reference sample: the above conditions, the ambient humidity is 70% RH. First, set the switching means 303 in the dry ice and snow Ts generation and supply system 308 The solenoid valve is opened to spray dry ice and snow Ts with a spray time of 0.25 seconds, and the solenoid valve is closed to stop spraying dry ice and snow Ts with a stop time of 2.0 seconds. It sprays dry ice and snow intermittently to supply liquefied carbon dioxide gas at 1.0 kg / min. On the one hand, the gas supply system 318 for injection uses nitrogen gas at 60 ° C as the injection gas 3G to pass through the cleaning nozzle 323. Cleaning in this state will not cause condensation on the glass plate, which proves that grease can be removed. The state is used as the reference sample. Samples 1 and 2 are performed next. The switching interval of the solenoid valve of the switching means 303 is the same as that of the reference sample. The injection time of the solenoid valve in the open state is 0.25 seconds, and the closed state. The stop time is 20 seconds. The ambient humidity and the supply of liquefied carbon dioxide gas TL are changed as follows to clean the place. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) — 丨 —丨 丨! Install i 丨 — 丨 丨 丨 —Order · ί (Please read the precautions on the back before filling this page) # · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pifdoc / 008 B7__ V. Description of the invention (β ) Check to see if condensation has formed on the glass plate as the object to be cleaned. Sample 1 · Ambient humidity 72% RH 'The supply of liquefied carbon dioxide is 0.5kg / min. (Please read the precautions on the back before filling this page) Sample 2: Ambient humidity of 73% RH, and the supply of liquefied carbon dioxide gas is 0.2 kg / min. In addition, samples 3 and 4, the supply of ambient humidity and liquefied carbon dioxide gas τγ are the same as those of the reference sample. The ambient humidity is 70% RH, and liquefied carbonic acid is supplied. The supply amount of gas TL is 1.0 kg / min. The switching interval of the solenoid valve of the switching means 303 is changed as follows to intermittently spray dry ice and snow! ^ Perform cleaning treatment to confirm whether dew condensation occurs on the glass plate as the object to be cleaned . Sample 3: Spray time in open state is 0.25 seconds, Stop time in closed state is 1.5 seconds. Sample 4: Spray time in open state is 0.25 seconds, Stop time in closed state is 1.0 seconds. Sample 5: Low ambient humidity 50% RH, in this state, the solenoid valve of the switching means 303 is kept open, the supply of liquefied carbon dioxide gas γ is 1.0 kg / min, and the continuous supply of dry ice and snow Ts and continuous spray cleaning are confirmed. Whether there is condensation on the glass plate of the object to be cleaned. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. The experimental results of samples 1 to 5 and the reference samples are shown in Table 5. 68 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7

五、發明說明（έέ 表五 樣品 號碼 周圍 濕度 (%RH) 变化碳酸氣 噴射用 氣體溫度 (°C) 結露 之 有無 供給量 (kg/min) 噴射時間 (sec) 停止時間 (sec) 基準 70 1.0 0.25 2.0 60 >fnr 無 1 72 0.5 0.25 2.0 60 Μ J\\\ 2 73 0.2 0.25 2.0 60 並 J\\\ 3 70 1.0 0.25 1.5 60 dnt. Μ 4 70 1.0 0.25 1.0 60 Μ j\\\ 5 50 1.0 連續 ifrpl 60 dniL INI -----------•裝 ----- (請先閱讀背面之注意事項再填寫本頁) 由表五可明白的看出，樣品1與樣品2之噴射液化碳 酸氣TY供給量較基準樣品少。在噴射之乾冰雪Ts量減少 之情況下，以及在周圍濕度較高而容易生成結露之狀態 下，作爲被洗淨物之玻璃板上沒有結露，表示所進行之洗 淨狀態與基準狀態一樣好。 而且如樣品3與樣品4，在周圍濕度與基準樣品相同 之狀態下，在相同之噴射時間以相同之乾冰雪Ts量噴射 冷卻後，爲了使被洗淨物冷卻程度沒有超過，而縮短復元 時間。開關手段3〇3之電磁閥保持關上狀態，縮短停止噴 射之停止時間爲I·5秒（樣品3)、1·0秒（樣品4)。作爲被洗 淨物之玻璃板上沒有結露，表示所進行之洗淨狀態與基準 狀態一樣好。 十 此外，如樣品5降低周圍濕度至5〇%rh形成乾燥之狀 69 訂 # 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 X 297公爱） 4.78974 A7 B7 6425pif.doc/008 五、發明說明（6)) 態並且很難結露之狀態下，開關手段303之電磁閥保持打 開狀態，連續的供給乾冰雪Ts進行洗淨處理，由洗淨開 始至結束確認是否產生結露。 由此開始乾冰雪Ts之噴射洗淨，間歇的操作乾冰雪Ts 之噴射，連續的流動噴射用氣體3G，以上可證明進行洗 淨之效果是如何重要。 於上述之實驗1中，周圍濕度約爲50%RH、噴射用氣 體3G之溫度爲60°C之情況下，乾冰雪Ts之噴射時間爲0.25 秒，停止時間爲1秒以上，證明進行之洗淨沒有結露。 但是實驗1只是本發明所揭示之一例，例如周圍濕度 相較於實驗1爲高濕度條件之情況下，可以控制噴射用氣 體3G之溫度或者停止供給乾冰雪Ts，使開關手段303爲 關上狀態且停止時間在1秒以上，可以容易理解所進行之 洗淨處理沒有產生結露。 實驗2 實驗2爲使用上述第五實施例所製作之乾冰雪Ts洗 淨裝置，確認噴射用氣體供給系統318所設置離子化手段 316之效果。 噴射用氣體3G、乾冰雪Ts之供給條件與實驗1之基 準樣品相同。亦即，供給乾冰雪Ts之開關手段303之開 關時間，打開時間爲0.25秒，關上時間爲2.0秒。噴射用 氣體爲60°C。此外離子化手段316爲使用美國離子系統公 司所製造電漿放電離子化裝置。 首先爲了確認乾冰雪Ts生產供給系統308所產生之 70 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------丨丨丨丨—lm^裝i丨-——訂·-------- 着丨 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.doc/008 五、發明說明（θ ) 靜電發生量，而不運轉使用氣體供給系統318。乾冰雪Ts 生產供給系統308中流通與上述實驗1之基準樣品相同狀 態之液化碳酸氣TY，測定噴射洗淨噴頭323之前端附近之 乾冰雪1^的靜電量。結果靜電約爲3300V。 接著運轉操作氣體供給系統318，噴射用氣體3G升 溫至60°C，流量約70〜225L/min。此時噴射洗淨噴頭323 之前端附近之靜電量約爲1600V。 此時利用噴射用氣體供給系統318所設置之離子化手 段316之電漿放電裝置開始動作，噴射用氣體3G升溫至 60°C，流量約70〜225L/min。此時噴射洗淨噴頭323之前 端附近之靜電量約爲〇V。 如此，使用電漿放電裝置等之離子化手段316，使乾 冰雪Ts的所帶之電荷約爲0V。證明電漿放電裝置等之離 子化手段316之設備是有效的。 於上述第五實施例之實驗1與實驗2中，被洗淨物不 是設置於密閉空間。對於洗淨之周圍環境，被洗淨物配置 於例如通風室或淸潔作業台等之密閉空間，並在密閉空間 中設置離子化手段，使離子化流體保持在密閉空間中，使 除電之效率更好。 此外上述之密閉空間中低露點氣體（乾燥氣體）保持淨 化之狀態，使被洗淨物不會結露可良好之洗淨。 71 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------------裝--------訂 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 6425pif.doc/〇〇8 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（Μ) 第六實施例 第六實施例爲以第16圖所圖示之噴射洗淨噴頭323 配設在架台330上所製作之乾冰雪洗淨裝置。在此使用熱 硬化樹脂成形用之脫模鉗當作被洗淨物進行洗淨處理。 所製作之乾冰雪洗淨裝置之設計規格因素： 液化碳酸氣生產供給系統308 : •液化碳酸氣容器301 :高壓氣體鋼瓶。 •液化碳酸氣塡充壓力：6MPa左右。 •開關手段303 :手動是球形閥。 •節流手段305 :針形閥。 噴射用氣體供給系統318 : •噴射用氣體源容器311 :高壓氣體鋼瓶。 •噴射用氣體3G :露點-65°C之氮氣，塡充壓力在 1.5MPa 左右。 •壓力調整器314:在常溫下調整氮氣供給壓力爲一 定之壓力在0.1〜0.9MPa左右，或是不使用氮氣，連續的 供給至噴射洗淨噴頭323。 •離子化手段316:電漿放電方式（MEISEI公司製電 離器或春日電機（股）製噴頭型除電裝置）。 •溫度控制手段319 :附設比例-積分-微分（PID)控制 之電熱器。 噴射洗淨噴頭323 : •噴射構造：直線形噴頭，與噴射用氣體3G以及乾 冰雪Ts之同軸噴射方式。 72 (請先閲讀背面之注意事項再填寫本頁) 裝 • I I I Μ·* 訂----V. Description of the invention (Handed Table 5 Sample No. Humidity around the sample number (% RH) Variation of carbon dioxide gas temperature (° C) Presence or absence of condensation (kg / min) Spray time (sec) Stop time (sec) Reference 70 1.0 0.25 2.0 60 > fnr None 1 72 0.5 0.25 2.0 60 Μ J \\\ 2 73 0.2 0.25 2.0 60 and J \\\ 3 70 1.0 0.25 1.5 60 dnt. Μ 4 70 1.0 0.25 1.0 60 Μ j \\\ 5 50 1.0 continuous ifrpl 60 dniL INI ----------- • install ----- (Please read the precautions on the back before filling this page) It can be clearly seen from Table 5 that samples 1 and The supply of sprayed liquefied carbon dioxide gas TY in sample 2 is less than that in the reference sample. When the amount of sprayed dry ice and snow Ts is reduced, and in a state where the surrounding humidity is high and dew condensation is likely to occur, the glass plate to be washed is There is no condensation, which indicates that the washing state is as good as the reference state. Also, as in samples 3 and 4, the same humidity and the same amount of dry ice and snow Ts are sprayed and cooled at the same spraying time under the same ambient humidity as the reference sample. In order to reduce the degree of cooling of the objects to be washed, the recovery is shortened. The solenoid valve of the switching means 303 is kept closed, and the stopping time for shortening the injection stop time is 1.5 seconds (sample 3) and 1.0 seconds (sample 4). There is no condensation on the glass plate as the object to be cleaned. , Indicating that the washing condition is as good as the reference state. In addition, if sample 5 reduces the surrounding humidity to 50% rh to form a dry state 69 Order # Printed by the Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperatives This paper is suitable for China National Standard (CNS) A4 Specification (21〇X 297 public love) 4.78974 A7 B7 6425pif.doc / 008 V. Description of Invention (6)) In a state where it is difficult to dew, the solenoid valve of the switching means 303 remains open. Dry ice and snow Ts are continuously supplied for washing treatment, and it is confirmed whether dew condensation occurs from the beginning to the end of washing. This starts the spray cleaning of dry ice and snow Ts, intermittently operates the spray of dry ice and snow Ts, and continuously flows the spraying gas 3G. The above can prove how important the cleaning effect is. In the above experiment 1, when the ambient humidity is about 50% RH and the temperature of the spraying gas 3G is 60 ° C, the spray time of the dry ice and snow Ts is 0.25 seconds and the stop time is more than 1 second. There is no condensation. However, Experiment 1 is only an example disclosed by the present invention. For example, when the ambient humidity is higher than that of Experiment 1, the temperature of the injection gas 3G can be controlled or the supply of dry ice and snow Ts can be stopped, so that the switching means 303 is closed and The stop time is 1 second or longer, and it can be easily understood that dew condensation does not occur in the cleaning process. Experiment 2 Experiment 2 was performed using the dry ice and snow Ts cleaning device manufactured in the fifth embodiment, and the effect of the ionization means 316 provided in the injection gas supply system 318 was confirmed. The supply conditions of the injection gas 3G and dry ice snow Ts were the same as those of the reference sample of Experiment 1. That is, the opening and closing time of the switching means 303 for supplying the dry ice and snow Ts is 0.25 seconds and the closing time is 2.0 seconds. The spray gas is 60 ° C. The ionization means 316 is a plasma discharge ionization device manufactured by American Ion Systems. First, in order to confirm the 70 paper produced by the dry ice and snow Ts production and supply system 308, the paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ------ 丨 丨 丨 --lm ^ 装 i 丨- ——Order · ———— Author 丨 (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention ( θ) The amount of static electricity generated without using the gas supply system 318. The dry ice and snow Ts production and supply system 308 circulates liquefied carbon dioxide gas TY in the same state as the reference sample of the above experiment 1, and measures the static electricity of the dry ice and snow 1 ^ near the front end of the jet cleaning nozzle 323. As a result, the static electricity was about 3300V. Next, the operating gas supply system 318 was operated, the temperature of the injection gas 3G was raised to 60 ° C, and the flow rate was about 70 to 225 L / min. At this time, the static electricity amount near the front end of the jet cleaning nozzle 323 is about 1600V. At this time, the plasma discharge device using the ionization means 316 provided in the injection gas supply system 318 starts to operate, the injection gas 3G is heated to 60 ° C, and the flow rate is about 70 to 225 L / min. At this time, the amount of static electricity near the front end of the spray cleaning nozzle 323 is about 0V. In this way, the ionization means 316 such as a plasma discharge device is used to make the charge of the dry ice Ts approximately 0V. It has been proved that the equipment of the ionizing means 316 such as a plasma discharge device is effective. In Experiments 1 and 2 of the fifth embodiment described above, the object to be cleaned was not placed in a closed space. For the surrounding environment to be cleaned, the object to be cleaned is placed in a closed space such as a ventilated room or a clean bench, and ionizing means are provided in the closed space to keep the ionized fluid in the closed space, so that the efficiency of removing electricity better. In addition, the low dew point gas (dry gas) in the above-mentioned closed space is kept clean, so that the object to be cleaned can be cleaned without dew condensation. 71 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ------------ Installation -------- Order (Please read the precautions on the back first) (Fill in this page again) Printed by the Employees 'Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 〇〇8 A7 B7 Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This is a dry ice and snow cleaning device manufactured by arranging the spray cleaning nozzle 323 shown in FIG. 16 on the stand 330. Here, the mold release pliers for molding the thermosetting resin are used as the object to be cleaned. Design specifications of the dry ice and snow washing device produced: Liquefied carbonic acid gas production and supply system 308: • Liquefied carbonic acid gas container 301: High-pressure gas steel cylinder. • Charging pressure of liquefied carbon dioxide gas: about 6MPa. • Switching means 303: Manual is a ball valve. • Throttling means 305: needle valve. Gas supply system for injection 318: • Gas source container for injection 311: High-pressure gas cylinder. • Jet gas 3G: nitrogen gas with dew point of -65 ° C, filling pressure is about 1.5MPa. • Pressure regulator 314: adjust the nitrogen supply pressure at a normal temperature to a certain pressure of about 0.1 to 0.9 MPa, or continuously supply the spray cleaning nozzle 323 without using nitrogen. • Ionization method 316: Plasma discharge method (ionizer made by MEISEI or nozzle-type static elimination device made by Kasuga Electric Co., Ltd.). • Temperature control means 319: Equipped with electric heater with proportional-integral-derivative (PID) control. Spray cleaning nozzle 323: • Spray structure: linear spray nozzle, coaxial spray method with spraying gas 3G and dry ice snow Ts. 72 (Please read the notes on the back before filling out this page) 装 • I I I Μ · * Order ----

Mm. 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（> ) 使用上述之第六實施例所製作之裝置。以熱硬化樹脂 成形用之脫模鉗當作被洗淨物，在以下列條件中進行洗淨 處理。 •在室溫爲15〜20°C進行。 •所供給之噴射用氣體之溫度由溫度控制手段319控 制在定溫20〜60°C。 •周圍濕度（相對濕度：％RH)在一般濕氣多，容易結 露之條件下，在相對濕度40〜70%RH。 以上述之條件，周圍濕度爲40%RH。首先，以刷洗將 脫模鉗上殘留之樹脂片除去後，打開乾冰雪Ts產生供給 系統308所包括之開關手段303之手動式球型閥而供給 O.lkg/min之液化碳酸氣。另一方面打開噴射用氣體供給 系統318所包括之開關閥，並以20°C之氮氣作爲噴射用氣 體3G流過洗淨噴頭323。因此連續的噴射乾冰雪Ts以及 氮氣，於上述範圍之洗淨條件中，進行熱硬化樹脂成形用 之脫模鉗之洗淨。此結果洗淨性非常良好。此外本發明洗 淨試驗所要求之時間爲5分鐘。 如上所述於第六實施例中，對於本發明作之乾冰雪洗 淨裝置所洗淨之脫模鉗。首先以刷洗除去脫模鉗內所殘留 之樹脂片（以及上述之各種添加劑）。較佳之刷洗方式爲往 返重複以及旋轉等方式進行刷洗。接著爲了除去上述之各 種添加劑，液化碳酸氣容器301內維持液化狀態、保持約 6 MPa壓力之液化碳酸氣乙經由配管而導出。之後，適宜 之操作手動式開關手段303(也可以爲電磁閥）使液化碳酸 73 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 一裝 • ϋ ϋ nMm. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (>) Use the above The device made in the sixth embodiment. The mold-removing pliers used for molding the thermosetting resin were regarded as the object to be cleaned, and the cleaning process was performed under the following conditions. • Performed at room temperature of 15 ~ 20 ° C. • The temperature of the supplied injection gas is controlled by temperature control means 319 at a fixed temperature of 20 ~ 60 ° C. • Ambient humidity (relative humidity:% RH) is usually in the condition of high humidity and easy to dew, and the relative humidity is 40 ~ 70% RH. Under the above conditions, the ambient humidity is 40% RH. First, the resin sheet remaining on the demolding tongs is removed by brushing, and the manual ball valve of the switching means 303 included in the dry ice and snow Ts generation and supply system 308 is opened to supply 0.1 kg / min of liquefied carbon dioxide gas. On the other hand, the on-off valve included in the injection gas supply system 318 was opened, and nitrogen gas at 20 ° C was used as the injection gas 3G to flow through the cleaning nozzle 323. Therefore, the dry ice and snow Ts and nitrogen are continuously sprayed, and the cleaning tongs for molding the thermosetting resin are cleaned under the cleaning conditions in the above range. As a result, the detergency was very good. In addition, the time required for the cleaning test of the present invention is 5 minutes. As described above, in the sixth embodiment, the demolding tongs cleaned by the dry ice and snow cleaning device of the present invention are used. First, the resin sheet (and various additives mentioned above) remaining in the demolding tongs is removed by brushing. The preferred brushing method is brushing by repeating and rotating. In order to remove the above-mentioned various additives, the liquefied carbon dioxide gas in the liquefied carbon dioxide gas container 301 is maintained in a liquefied state, and the liquefied carbon dioxide gas B maintained at a pressure of about 6 MPa is led out through a pipe. After that, it is suitable to operate the manual switch means 303 (also can be a solenoid valve) to make the liquefied carbonic acid 73 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling (This page) One outfit • ϋ ϋ n

MM I I I^· ϋ 1 ϋ ϋ I 478974 A7 B7 6425pif.doc/008 五、發明說明（0丨） 氣TL，間歇的通過配管供給至節流手段3〇5。開關手段3〇3 爲打開之狀態並且以節流手段305之銳孔調節流；s，胃日寺 在大氣壓下（約0 MPa)使液化碳酸氣TL絕熱膨膜形成乾 冰雪Ts。之後生成之乾冰雪Ts經過配管由噴射洗淨噴頭 323噴出。因此上述之各種添加劑之種類，較佳的也可使 用-20°C、2 MPa之液化碳酸氣TL以及氣液分離器。 此外並沒有特別限定刷洗之材質’只要以不會損害作 爲被洗淨物之脫模鉗表面之材質所做的刷子，由此適當的 選擇使用。 第七實施例 第七實施例爲證明所使用之不同洗淨噴頭之洗淨力之 效果。 ， 使用之洗淨噴頭爲（1)直線型噴頭(參照第13圖之噴射 洗淨噴頭323)、（2)尖細型噴頭(參照第14圖之噴射洗淨噴 頭323A)、（3)圓錐狀擴張型噴頭(參照第15圖之噴射洗淨 噴頭323B)等三種。 因此上述之各種噴射噴頭之設計規格因素爲下列： (1) 直線型噴頭 •外管之內徑：4mm。 •內管之外徑：3.2mm。 •內管之內徑：1.2mm。 (2) 尖細型噴頭 •外管之內徑：4mm。 74 紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公f I---------裝i丨丨丨丨丨丨訂- (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.doc/008 五、發明說明 •內管之外徑：3.2mm。 •內管之內徑：1.2mm。 •外管前端形狀：扁平（長邊：6mm，短邊：〇_9mm) 無側邊間隙。 •從節流裝置至噴頭前端之長度：4Gmm ° •節流裝置上之圓錐狀角度（Θ) : 35度。 (3)圓錐狀擴張型噴頭 •外管之內徑：4mm。 •內管之外徑：3.2mm。 •內管之內徑：1.6mm。 •節流裝置內徑：Φ3.4ηπη。 •節流裝置長度：5mm。 •從節流裝置至噴頭前端之長度：6.8mm。 •節流裝置角度（/3) : 90度。 •節流裝置上之錐狀擴張角度（α ) : 5度。 使用上述之各種噴頭（1)、（2)、（3)進行以下之實驗。 實驗3 使用第12圖所圖示之裝置，液化碳酸氣1^之流量爲 77·8 g/min，以氮氣作爲噴射用氣體3G，噴射用氣體3G 之流量爲180 L/min，在同一條件下供給至上述之洗淨噴 頭，在距噴出口 15 mm之位置上測定從各種洗淨噴頭之噴 射口噴射到被洗淨物時瞬間之衝撞壓力（以下稱爲洗淨壓 力）(MPa)。此外到噴射洗淨噴頭之噴射用氣體3G之供給 壓力調整爲一定之壓力爲0.7 MPa。此外測定噴出之壓力 75 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） " ---------裝—! 訂·-- (請先閲讀背面之注意事項再填寫本頁) # 經濟部智慧財產局員工消費合作社印製 478974 6425pif.doc/008 A7 B7 五、發明說明〇) 爲使用富士軟片（股）公司製造之壓力測定膜（商品名稱：富 士壓力裝置）。 其結果列於表六 表六 噴頭之種類 內管 材質 外管 材質 液化 碳酸氣 流量 (g/min) 噴射用 氣體 流量 (L/min) 洗淨 壓力 (MPa) (1)直線型 鐵弗龍 鐵弗龍 77.8 180 47.5 (2)尖細型 鐵弗龍 鐵弗龍 77.8 180 60 〜75 (2)尖細型 不鏽鋼 不鏽鋼 77.8 180 12.5 (3)錐狀擴張型 鐵弗龍 鐵弗龍 77.8 180 76.0 ----------- (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 由表六明白確認（2)直線型噴頭較（2)尖細型噴頭以及 (3)圓錐狀擴張型噴頭之洗淨壓力低。而且（2)尖細型噴頭 較（3)圓錐狀擴張型噴頭之洗淨壓力低。但是（2)尖細型噴 頭在節流裝置下流側之管之材質爲不鏽鋼製之情況下，所 得到之洗淨壓力較低。使用鐵弗龍製作節流裝置出口附近 之管所得到洗淨壓力較高，證明是合乎理想的。 實驗4 接著實驗4是以氮氣作爲噴射用氣體3 G，固定噴射 用氣體3G之流量爲180L/min，改變液化碳酸氣ΐγ之流量。 以上述之洗淨噴頭，確認得到最大之洗淨壓力（MPa)時， 76MM I I ^ · ϋ 1 ϋ ϋ I 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (0 丨) The gas TL is intermittently supplied to the throttling means 305 through a pipe. The switching means 30 is in an open state and the flow is adjusted by the sharp holes of the throttling means 305; s, Wei Ri Temple makes the liquefied carbon dioxide TL adiabatic expansion film to form dry ice and snow Ts under atmospheric pressure (about 0 MPa). The dry ice and snow Ts generated thereafter is sprayed from the jet cleaning nozzle 323 through a pipe. Therefore, it is preferable to use a liquefied carbonic acid gas TL at -20 ° C and 2 MPa and a gas-liquid separator for the various types of additives mentioned above. In addition, the material for brushing is not particularly limited, as long as it is a brush made of a material that does not damage the surface of the release pliers as the object to be cleaned, and is appropriately selected for use. Seventh Embodiment The seventh embodiment demonstrates the effect of the cleaning power of different cleaning nozzles used. The cleaning nozzles used are (1) linear nozzles (refer to the spray cleaning nozzle 323 in Fig. 13), (2) sharp nozzles (refer to the spray cleaning nozzle 323A in Figure 14), and (3) conical shape There are three types of expansion nozzles (see jet cleaning nozzle 323B in Figure 15). Therefore, the design specifications of the various spray nozzles mentioned above are as follows: (1) Linear nozzle • Inner diameter of outer tube: 4mm. • Outer diameter of inner tube: 3.2mm. • Inner diameter of the inner tube: 1.2mm. (2) Slim nozzle • Inner diameter of outer tube: 4mm. 74 Paper size applies to China National Standard (CNS) A4 specification (210 X 297 male f I --------- install i 丨 丨 丨 丨 丨 丨 order-(Please read the precautions on the back before filling this page ) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention • Outer diameter of the inner tube: 3.2mm. • Inner diameter of the inner tube: 1.2mm. • Front tube shape: flat (Long side: 6mm, short side: 〇_9mm) No side gap. • Length from the throttle to the front end of the nozzle: 4Gmm ° • Conical angle (Θ) on the throttle: 35 degrees. (3) Conical expansion nozzle • Inner diameter of outer tube: 4mm. • Outer diameter of inner tube: 3.2mm. • Inner diameter of inner tube: 1.6mm. • Inner diameter of throttle device: Φ3.4ηπη. • Length of throttle device : 5mm. • Length from throttle device to nozzle front: 6.8mm. • Throttle device angle (/ 3): 90 degrees. • Conical expansion angle (α) on throttle device: 5 degrees. Use the above The following experiments were performed for various nozzles (1), (2), and (3). Experiment 3 Using the device shown in Fig. 12, the flow rate of liquefied carbonic acid gas 1 ^ was 77 · 8 g / min. Nitrogen was used as the spraying gas 3G, and the flow rate of the spraying gas 3G was 180 L / min. Under the same conditions, it was supplied to the above-mentioned cleaning nozzle, and the cleaning nozzle was measured at a position 15 mm from the nozzle. The instantaneous impact pressure (hereinafter referred to as the cleaning pressure) (MPa) when the spray port sprays the object to be cleaned. In addition, the supply pressure of the 3G spray gas to the spray cleaning nozzle is adjusted to a constant pressure of 0.7 MPa. Determining the pressure of ejection 75 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) " --------- install —! Order ·-(Please read the precautions on the back first (Fill in this page again) # Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 A7 B7 V. Description of the invention 0) A pressure measuring film made by Fujifilm (Stock) Co., Ltd. (Product name: Fuji Pressure Device ). The results are listed in Table 6 and Table 6. Types of nozzles: Inner tube material Outer tube material Liquefied carbon dioxide gas flow rate (g / min) Gas flow rate for injection (L / min) Washing pressure (MPa) (1) Linear Teflon iron Fron 77.8 180 47.5 (2) Slim thin iron Fron iron Fron 77.8 180 60 ~ 75 (2) Slim thin stainless steel 77.8 180 12.5 (3) Conical expansion iron Fron iron Fron 77.8 180 76.0 --- -------- (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, and confirmed by Table 6 (2) Linear nozzles are better than (2) Slim nozzles and (3) The cleaning pressure of the conical expansion nozzle is low. And (2) the cleaning pressure of the tip nozzle is lower than that of the (3) conical expansion nozzle. However, (2) when the material of the pipe on the downstream side of the throttling device is made of stainless steel, the cleaning pressure obtained is low. The high cleaning pressure obtained by using Teflon to make pipes near the outlet of the throttling device proves to be ideal. Experiment 4 Following experiment 4, nitrogen gas was used as the injection gas 3 G, and the flow rate of the fixed injection gas 3 G was 180 L / min, and the flow rate of the liquefied carbon dioxide gas γ was changed. With the above cleaning nozzle, it is confirmed that the maximum cleaning pressure (MPa) is obtained. 76

• I I I Μ· I 訂 者· 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 6425pif.doc/008 A7 B7 五、發明說明（？Ψ) 液化碳酸氣TL之流量（g/min)。 此外，裝置和實驗3相同，爲使用第12圖所圖示之 裝置。在距噴出口 15mm之位置上測定噴射之洗淨壓力 (MPa)。而且到噴射洗淨噴頭之噴射用氣體3G之供給壓力 與實驗3相同調整爲一定之壓力爲〇.7MPa。測定噴出之 壓力（洗淨壓力）爲使用富士軟片（股）公司製造之壓力測定 膜(商品名稱：富士壓力裝置）。 其結果顯示在表七 表七— _ 噴頭之種類 內管 材質 外管 材質 液化 碳酸氣 流量 (g/min) 噴射用 氣體 流量 (L/min) 洗淨 壓力 (MPa) (1)直線型 鐵弗龍 鐵弗龍 295.9 180 47.5 (2)尖細型 鐵弗龍 鐵弗龍 202.0 180 60 〜75 (2)尖細型 不鏽鋼 不鏽鋼 202.0 180 33.0 (3)錐狀擴張型 鐵弗龍 鐵弗龍 236.5 180 104 (請先閱讀背面之注意事項再填寫本頁) 裝 ----訂--- 禮- 經濟部智慧財產局員工消費合作社印製 由表七明白顯示（3)圓錐狀擴張型噴頭所得到洗淨壓力 之最大値爲l〇4.〇MPa之壓力，此時供給之液化碳酸氣之 流量爲236.5g/min。接著(2)尖細型噴頭在節流裝置出口附 近之管的材質爲鐵弗龍製作’所得到最大洗淨壓力爲 60〜75MPa，此時供給之液化碳酸氣之流量爲202.0g/min。 77 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 A7 B7 6425pif.doc/008 五、發明說明（γ/) 但是（2)尖細型噴頭在節流裝置出口附近之管的材質爲不鏽 鋼製作，洗淨壓力爲33.OMPa，此時供給之液化碳酸氣之 流量爲 295.5g/min。 由以上之實驗3與實驗4所得到之結果’可得到下列 事實。 •洗淨壓力之大小爲〔（3)圓錐狀擴張型噴頭〕>〔（2) 尖細型噴頭〕〉〔（1)直線型噴頭〕 •節流裝置出口附近之管的材質不鏽鋼較鐵弗龍差。 •圓錐狀擴張型噴頭所得到最大洗淨壓力’最大洗淨 壓力値爲104.0MPa之壓力。因此使用圓錐狀擴張型噴頭， 可以進行效率良好之洗淨。 •直線型噴頭與尖細型噴頭之最大洗淨壓力隨液化碳 酸氣TY之流量增加到達頂點。之後最大洗淨壓力隨著液 化碳酸氣流量之增加，不會增大反而有降低之傾向。 所以，這種噴頭在頂點操作可以得到較高之洗淨效率。 •使用圓錐狀擴張型噴頭可進行濾色片基板製造工程 之硏磨製程後之微細的纖維屑去除。液化碳酸氣ΤΥ之供 給流量爲120g/min，以氮氣作爲噴射用氣體3G之供給流 量爲220L/min至30L/min，一樣也可以進行良好之洗淨。 實驗5 接著實驗5爲在(1)直線型噴頭(2)尖細型噴頭（3)圓錐 狀擴張型噴頭各種噴頭之中，改變節流裝置之[噴射用氣 體3G+液化碳酸氣之計算上的流速(m/sec)而確認洗淨 壓力之改變。 78 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------•丨丨丨丨丨丨丨訂·! !_1 *^11^ · (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.doc/008 五、發明說明（乂） 此外，使用氮氣作爲噴射用氣體3G，假設液化碳酸 氣70%氣化，節流裝置之流速可以下式求出： 流速（m/seC)=[氮氣之流量+液化碳酸氣供給量χ 0.506(m3/kg)x 0.7]/噴頭截面積 此結果圖示在第17圖各種洗淨噴頭之節流裝置流速 (m/sec)-洗淨壓力（MPa)之關係圖。 實驗5可由第17圖之關係圖可明白的證明下列結果。 •直線型噴頭之節流裝置流速在275m/Sec時可得到 最大洗淨壓力47.5MPa，在275m/Sec以上之流速洗淨壓力 不會上升反而下降，無法使洗淨力提升。 •證明尖細型噴頭與圓錐狀擴張型噴頭洗淨壓力隨著 節流裝置流速增加而提高，但是圓錐狀擴張型噴頭與尖細 型噴頭相比較，洗淨壓力之上升度極爲顯著，洗淨力較高。 •特別是節流裝置流速超過音速（〇°C，1大氣壓下約 爲331m/Sec)之流速時，圓錐狀擴張型噴頭洗淨壓力之上 升度極高，洗淨效果更加顯著。 此外上述之實施例，圓錐狀擴張型噴頭323B之節流 裝置角度沒爲90度，圓錐狀擴張型噴頭323B之擴張角度 α爲5度。此並不是用於限定本發明，節流裝置角度冷可 爲30度至90度，圓錐狀擴張角度α可爲5度至25度， 一樣可得到相同之效果。 由上述說明，本發明之乾冰雪生產供給裝置與生產供 給手段’由控制溫度與壓力使液化碳酸氣儲藏容器中之液 化碳酸氣維持液化狀態。一般在安定之壓力下液化碳酸氣 79 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） I n ϋ n n I ϋ -ϋ ϋ I n I· ϋ ϋ l ml ϋ n ϋ 一 δ、 ·1 I 1 ϋ I 〈請先閱讀背面之注意事項再填寫本頁) % 經濟部智慧財產局員工消費合作社印製 478974 6425pif.doc/008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明Ολ) 能夠絕熱膨脹供給至節流裝置，節流裝置在安定之狀態下 生產供給乾冰雪。因此乾冰雪能夠安定的供給，洗淨作業 可以確實的進行，被洗淨物之洗淨良率可以提高。 而且本發明之第一乾冰雪洗淨裝置與洗淨手段可以達 到如下列記載之效果。 根據本發明之乾冰雪洗淨裝置從節流機構至洗淨噴頭 之乾冰雪之流通管路長度爲45mm、200mm、500mm、 1000mm、1500mm以及2000mm。連續的噴射乾冰雪，同 時連續的流出另一邊噴射用氣體，除去附著在被洗淨物上 之金屬粒子，而且確認洗淨不會發生凝結。因此到達節流 機構出口附近之洗淨噴頭流通管路長度，由被洗淨物可看 出，流通管路長度在200mm以上，可證明洗淨效果十分 顯著。 而且，上述從節流機構到洗淨噴頭之流通管路之長 度，證明長度越長洗淨時壓力會上升。由此對於除去對象 物之附著狀態或被洗淨物之耐壓強度，經由調整流通管路 之長度，同時避免損傷以及進行適當之洗淨處理，都可使 洗淨效率向上提升。 此外，可變化調整流通管路長而噴射乾冰雪，對應被 洗淨物髒污的情況，選擇適當噴射乾冰雪之噴出狀態而使 洗淨效率向上提升。特別是流通管路長不同之流通管路， 同時爲了對應大量洗淨處理之洗淨狀態，將洗淨線個別的 配置固定住，使被洗淨物由此洗淨線自動輸送，不同管路 長所對應之洗淨位置爲不同之位置，連續的輸送被洗淨物 80 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) (請先閲讀背面之注意事項再填寫本頁) 裝 ----訂--- % 478974 6425pif.doc/008 經濟部智慧財產局員工消費合作社印製 五、發明說明（％ ) 通過已固定住之洗淨噴頭位置上，個別的洗淨噴頭依序洗 淨不同之洗淨位置，因此在短時間內大量之被洗淨物可有 效率進行洗淨處理。 而且，爲了使洗淨效果上升，連續的流通增加噴射用 氣體之流量是有效的。也證明從65NL/min至270NL/min 能夠縮短洗淨時間。並且證明由極細針狀之觸針所構成之 老化測試基板或探針卡等，只要65NL/min之氮氣流量就 可洗淨。 一方面被洗淨物因爲帶有電荷，可能發生不良之情況 下’噴射用氣體供給系統或乾冰雪供給系統可設置離子化 手段，也證明因爲離子化流體，使得在洗淨噴頭混合乾冰 雪之電荷約爲0V。 因此，對應被洗淨物之特性由此進行洗淨，不會造成 被洗淨物損傷而確實的洗淨。使容易再生之檢查工具製品 可以再利用，而且例如探針卡就可省略爲了再生之硏磨製 程。 關於本發明之第二乾冰雪洗淨裝置，乾冰雪噴射噴頭 之周圍部份設置噴射用氣體噴出口，使噴射用氣體噴出。 由調整噴射用氣體之流量或壓力，能夠調整乾冰雪之噴射 領域範圍到達所希望適當的範圍，而可以適當自由的改變 至被洗淨物之噴射密度。因此，對應被洗淨物之污染狀態、 乾冰雪之噴射領域或乾冰雪噴射密度之大小，能夠利用交 換洗淨噴頭而容易的調整而使作業性向上提升。 並且本發明之乾冰雪噴射裝置，因爲噴射噴頭之噴出 81 (請先閱讀背面之注意事項再填寫本頁) 裝 • ϋ ϋ ϋ ----訂--- # 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） 478974 A7 B7 6425pif.doc/008 五、發明說明（Μ ) 口前端形成扁平形狀，其噴射形狀擴張形成橢圓形狀，而 具有一面積可達到平面洗淨之效果。因爲中央部份乾冰雪 噴射密度較密，由此可得到洗淨位置之適當射程，能夠達 到確實的洗淨效果。 此外，扁平型狀之噴出口短邊部分設置側邊間隙缺 口，乾冰雪之噴射形狀因此而擴張形成略爲矩形之形狀。 因爲沿著矩形形狀之中央部份乾冰雪之噴射爲略爲均一之 面密度，洗淨時可維持被洗淨物之平面洗淨，而使洗淨效 率良好。特別是被洗淨物爲矩形形狀之情況下洗淨較有效 果。 另外噴射用氣體噴出口與乾冰雪噴射噴頭之噴出口部 所設置細長形狀之側邊間隙缺口連結線平行，而且設置在 上述之側邊間隙缺口連結線之軸線對稱之位置上。調整由 噴射用氣體噴出口噴出之噴射用氣體流量或壓力，可改變 矩形形狀之噴射形狀短邊附近之尺寸，更可以改變乾冰雪 之噴射密度。配合被洗淨物之污染程度，可有效率的調整 至適當所希望之噴射狀態。 本發明之第三乾冰雪洗淨裝置，一方面進行乾冰雪間 歇運轉，另一方面連續的流動做爲.推進氣體之噴射用氣 體。因此洗淨時不會使被洗淨物冷卻，並且被洗淨物不會 產生結露而可進行均一的良好洗淨。 此外提高連續流動之噴射用氣體溫度，不會產生結 露，可在短時間發揮較高效率之洗淨效果。另外提高連續 的流動噴射用氣體之溫度，促進防止結露，可達到短時間 82 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -----------,φέ (請先閱讀背面之注意事項再填寫本頁)• III Μ · I Subscriber · This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 V. Description of the invention (?) The flow of liquefied carbon dioxide gas TL ( g / min). In addition, the device was the same as in Experiment 3, and the device shown in Fig. 12 was used. The cleaning pressure (MPa) of the spray was measured at a position 15 mm from the spray outlet. In addition, the supply pressure of the spray gas 3G to the spray cleaning nozzle was adjusted in the same manner as in Experiment 3 so that the constant pressure was 0.7 MPa. The pressure (washing pressure) for measuring the discharge was measured using a pressure measuring film (trade name: Fuji Pressure Device) manufactured by Fuji Film (Stock) Co., Ltd. The results are shown in Table 7. Table 7 — Types of nozzles Inner tube material Outer tube material Liquefied carbon dioxide gas flow (g / min) Gas flow for injection (L / min) Washing pressure (MPa) (1) Linear Teflon Long Tiefulong 295.9 180 47.5 (2) Slim and thin Tiefulong Tiefulong 202.0 180 60 ~ 75 (2) Slim and thin stainless steel 202.0 180 33.0 (3) Tapered extension Tiefulong Tiefulong 236.5 180 104 ( Please read the precautions on the back before filling in this page.) ---- Order --- Etiquette-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. The maximum pressure is 104.0 MPa, and the flow rate of the liquefied carbon dioxide gas supplied at this time is 236.5 g / min. (2) The material of the pipe near the outlet of the throttling nozzle is made of Teflon. The maximum cleaning pressure is 60 to 75 MPa. At this time, the flow rate of the liquefied carbon dioxide gas supplied is 202.0 g / min. 77 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (γ /) But (2) The tip of the thin nozzle is near the outlet of the throttling device. The material of the tube is made of stainless steel, the cleaning pressure is 33.0 MPa, and the flow rate of the liquefied carbon dioxide gas supplied at this time is 295.5 g / min. From the results obtained in Experiments 3 and 4 above, the following facts can be obtained. • The size of the cleaning pressure is [(3) conical expansion nozzles] > [(2) tapered nozzles]> [(1) linear nozzles] • The material of the pipe near the outlet of the throttle device is stainless steel. Long poor. • The maximum cleaning pressure obtained by the cone-shaped expansion nozzle ’The maximum cleaning pressure 値 is a pressure of 104.0 MPa. Therefore, the cone-shaped expansion nozzle can be used for efficient cleaning. • The maximum cleaning pressure of the linear nozzle and the tip nozzle is reached with the increase of the flow of liquefied carbon acid gas TY. After that, the maximum cleaning pressure tends to decrease as the liquefied carbon dioxide gas flow increases. Therefore, this nozzle can achieve higher cleaning efficiency at the vertex operation. • The use of cone-shaped expansion nozzles can remove fine fiber debris after the honing process of the color filter substrate manufacturing process. The supply flow of liquefied carbon dioxide gas is 120g / min, and the supply flow of 3G with nitrogen as the spray gas is 220L / min to 30L / min. It can also be washed well. Experiment 5 followed by Experiment 5 was to change the calculated flow rate of the [injection gas 3G + liquefied carbon dioxide gas] of the throttling device among (1) linear nozzles, (2) tapered nozzles, and (3) conical expansion nozzles. (m / sec) and confirm the change in the cleaning pressure. 78 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ------ • 丨 丨 丨 丨 丨 丨 丨 Order!! _1 * ^ 11 ^ · (Please read the first Note: Please fill in this page again.) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (乂) In addition, nitrogen is used as the spray gas 3G, assuming that liquefied carbon dioxide gas is 70% gasified The flow rate of the throttling device can be obtained by the following formula: Flow rate (m / seC) = [flow rate of nitrogen + supply of liquefied carbon dioxide gas × 0.506 (m3 / kg) x 0.7] / nozzle cross-sectional area This result is shown in Figure 17 The relationship between the flow rate (m / sec) and the cleaning pressure (MPa) of the throttling device of various cleaning nozzles. Experiment 5 can clearly prove the following results from the relationship diagram of FIG. 17. • The linear nozzle's throttling device can obtain a maximum cleaning pressure of 47.5MPa when the flow rate is 275m / Sec, and the cleaning pressure will not increase but will decrease, and the cleaning force cannot be increased. • It is proved that the cleaning pressure of the tapered nozzle and the conical expansion nozzle increases with the increase of the flow rate of the throttling device. However, compared with the tapered nozzle, the conical expansion nozzle has a significantly higher cleaning pressure and a higher cleaning force. high. • Especially when the flow rate of the throttle device exceeds the speed of sound (0 ° C, about 331m / Sec at 1 atmosphere), the conical expansion nozzle has a very high lift above the cleaning pressure, and the cleaning effect is more significant. In addition, in the above embodiment, the angle of the throttle device of the conical expansion nozzle 323B is not 90 degrees, and the expansion angle α of the conical expansion nozzle 323B is 5 degrees. This is not intended to limit the present invention. The angle cooling of the throttling device can be 30 degrees to 90 degrees, and the conical expansion angle α can be 5 degrees to 25 degrees. The same effect can be obtained. From the above description, the dry ice and snow production supply device and production supply means of the present invention 'maintain the liquefied carbon dioxide gas in the liquefied carbon dioxide gas storage container by controlling the temperature and pressure. Generally liquefied carbon dioxide gas under stable pressure 79 This paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) I n ϋ nn I ϋ -ϋ ϋ I n I · ϋ ϋ l ml ϋ n ϋ 1 δ, · 1 I 1 ϋ I (Please read the notes on the back before filling out this page)% Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 A7 B7 Printed by the Employee Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention Ολ) It can supply adiabatic expansion to the throttling device, and the throttling device produces and supplies dry ice and snow in a stable state. Therefore, the dry ice and snow can be supplied stably, the washing operation can be carried out reliably, and the washing yield of the articles to be washed can be improved. In addition, the first dry ice and snow washing device and washing means of the present invention can achieve the effects described below. The dry ice and snow washing device according to the present invention has a length of dry ice and snow circulation pipes from the throttling mechanism to the cleaning nozzle of 45 mm, 200 mm, 500 mm, 1000 mm, 1500 mm, and 2000 mm. Continuously spray dry ice and snow, while continuously flowing out the other side of the spray gas to remove metal particles adhering to the object to be cleaned, and confirm that no condensation will occur during cleaning. Therefore, the length of the circulation pipe of the cleaning nozzle near the exit of the throttling mechanism can be seen from the object to be cleaned. The length of the circulation pipe is more than 200mm, which proves that the cleaning effect is very significant. In addition, the length of the above-mentioned flow line from the throttle mechanism to the cleaning nozzle proves that the longer the length is, the higher the pressure will be when cleaning. As a result, the cleaning efficiency can be improved by removing the adhered state of the object or the compressive strength of the object to be cleaned by adjusting the length of the circulation pipeline while avoiding damage and performing appropriate cleaning treatment. In addition, the length of the circulation pipeline can be adjusted to spray dry ice and snow. Corresponding to the situation that the cleansed material is dirty, choose the proper spraying state of dry ice and snow to increase the cleaning efficiency. In particular, the circulation pipelines with different lengths of circulation pipelines, and at the same time, in order to correspond to the cleaning state of a large number of cleaning treatments, the individual configuration of the cleaning lines is fixed, so that the objects to be washed are automatically conveyed by the cleaning pipelines. The washing position corresponding to the length is different, and the articles to be cleaned are continuously conveyed. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm). (Please read the precautions on the back before filling this page. ) Assembly ---- Order ---% 478974 6425pif.doc / 008 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (%) Through the fixed cleaning nozzle position, individual cleaning nozzles Different washing positions are sequentially washed, so a large amount of objects to be washed can be efficiently washed in a short time. In order to increase the cleaning effect, it is effective to increase the flow rate of the ejection gas by continuous flow. It has also been proven that from 65NL / min to 270NL / min can shorten the cleaning time. And it is proved that the aging test substrate or probe card made of ultra-fine needle-like stylus can be cleaned as long as the nitrogen flow rate is 65NL / min. On the one hand, because the object to be cleaned is charged, it may be defective. The ionizing means can be set in the gas supply system for spraying or the dry ice and snow supply system. It has also been proved that the ionizing fluid makes it possible to mix dry ice and snow in the cleaning nozzle The charge is approximately 0V. Therefore, washing is performed in accordance with the characteristics of the object to be cleaned, and it is possible to perform the cleaning without causing damage to the object. The reproducible inspection tool product can be reused, and, for example, the probe card can be omitted from the honing process for regeneration. With regard to the second dry ice and snow cleaning device of the present invention, a spray gas outlet is provided around the dry ice and snow spray nozzle to spray the spray gas. By adjusting the flow rate or pressure of the spraying gas, the spraying range of dry ice and snow can be adjusted to the desired appropriate range, and the spraying density of the object to be cleaned can be freely changed appropriately. Therefore, in accordance with the contaminated state of the object to be cleaned, the spraying area of dry ice and snow, or the size of the spraying density of dry ice and snow, the workability can be easily improved by changing the cleaning nozzles and easily adjusting. And the dry ice and snow spraying device of the present invention, because the spraying nozzle sprays out 81 (please read the precautions on the back before filling this page). Installation • ϋ ϋ ϋ ---- order --- # This paper size applies to Chinese national standards ( CNS) A4 specification (210 X 297 public love) 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (M) The front end of the mouth is formed into a flat shape, and its spray shape is expanded to form an oval shape, and it has an area that can achieve flat cleaning effect. Because the spray density of dry ice and snow in the central part is relatively dense, the proper range of the cleaning position can be obtained, and a reliable cleaning effect can be achieved. In addition, the short-side part of the flat-shaped ejection outlet is provided with a side gap notch, so the spray shape of dry ice and snow is expanded to form a slightly rectangular shape. Because the spray of dry ice and snow along the central part of the rectangular shape has a slightly uniform areal density, the surface of the object to be cleaned can be maintained during washing, so that the washing efficiency is good. In particular, when the object to be cleaned has a rectangular shape, washing is effective. In addition, the ejection gas ejection port is parallel to the elongated side gap gap connecting line provided at the ejection port portion of the dry ice and snow jet nozzle, and is provided at a position where the axis of the above side gap gap connecting line is symmetrical. Adjusting the flow rate or pressure of the jetting gas from the jetting gas ejection port can change the size of the rectangular shape near the short side of the jet shape, and it can also change the spray density of dry ice and snow. Depending on the degree of contamination of the object being cleaned, it can be efficiently adjusted to the appropriate desired spraying state. The third dry ice and snow washing device of the present invention performs dry ice and snow intermittent operation on the one hand, and continuous flow as a gas for the propelling gas injection. Therefore, the object to be cleaned is not cooled during washing, and no dew condensation is generated on the object to be cleaned, and uniform and good washing can be performed. In addition, increasing the temperature of the continuously flowing jet gas will not cause dew condensation, which can exert a high-efficiency cleaning effect in a short time. In addition, the temperature of continuous flowing jet gas is increased to prevent dew condensation, which can reach 82 in a short time. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ----------- , φέ (Please read the notes on the back before filling this page)

• IB-1 al·— ϋ 11 n n I 』 、· 1 1 1 ml ϋ i^i I 經濟部智慧財產局員工消費合作社印製 478974 A7 B7 6425pif.doc/008 五、發明說明（加） 洗淨之效果。 (請先閱讀背面之注意事項再填寫本頁) 因爲被洗淨物帶有電荷，在可能造成被洗淨物發生破 損等之不良情況下，噴射用氣體供給系統或乾冰雪供給系 統可設置離子化手段。利用噴射用氣體或乾冰雪之流體離 子化，使得在洗淨噴頭混合乾冰雪之電荷約爲0伏特。可 降低破損等之不良品之發生而提高良率，而且可避免靜電 集塵，達到防止異物混入之效果。 此外可對應被洗淨物之特質，必須熟練的調整噴射用 氣體之溫度、調整開關手段之開關時間以及操作離子化手 段之運轉，而進行洗淨處理。因此不會造成被洗淨物之損 傷，可有效率的進行確實良好的洗淨，而使提升作業效率。 此外使用滑行軌道，維持被洗淨物與噴射洗淨噴頭之 間隔爲一定，可以洗淨的較均勻。而且與刷洗並用可使所 進行之脫模鉗洗淨更有效果。 另外使用尖細型噴頭或圓錐狀擴張型噴頭當作洗淨噴 頭，可得到更高之洗淨力，特別是適用於剝離除去強固粘 著之粘著物可發揮較大之效果，尤其是使用圓錐狀擴張型 噴頭洗淨效果極爲顯著。 經濟部智慧財產局員工消費合作社印製 雖然本發明已以一較佳實施例揭露如上，然其並非用 以限定本發明，任何熟習此技藝者，在不脫離本發明之精 神和範圍內，當可作各種之更動與潤飾，因此本發明之保 護範圍當視後附之申請專利範圍所界定者爲準。 83 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）• IB-1 al · — ϋ 11 nn I 』, · 1 11 ml The effect. (Please read the precautions on the back before filling in this page.) Because the object to be cleaned has a charge, in the case of damage that may cause the object to be cleaned, the injection gas supply system or dry ice and snow supply system can be set with ions. The means. The ionization of the spraying gas or the fluid of dry ice and snow makes the charge of mixing dry ice and snow in the cleaning nozzle about 0 volts. It can reduce the occurrence of defective products such as breakage and improve the yield, and can avoid electrostatic dust collection and prevent foreign matter from entering. In addition, according to the characteristics of the object to be cleaned, it is necessary to skillfully adjust the temperature of the spraying gas, adjust the switching time of the switching means, and operate the ionizing means to perform the cleaning process. Therefore, it does not cause damage to the objects to be cleaned, and it is possible to efficiently and surely perform cleaning, thereby improving the working efficiency. In addition, the sliding track is used to maintain a constant interval between the object to be cleaned and the jet cleaning nozzle, which can be cleaned more uniformly. Moreover, it can be more effective to clean the demolding tongs with brushing. In addition, the use of a pointed nozzle or a cone-shaped expansion nozzle as a cleaning nozzle can obtain a higher cleaning force, especially suitable for peeling and removing strong adherents, which can exert a larger effect, especially using a cone The cleaning effect of the shape-expanding nozzle is extremely remarkable. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Although the present invention has been disclosed above in a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art will not depart from the spirit and scope of the present invention. Various modifications and retouching can be made, so the protection scope of the present invention shall be determined by the scope of the attached patent application. 83 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

478974 A8 B8 C8 D8 6425pif.d〇c/〇〇8 /、、申明專利範圍 I 一種乾冰雪生產供給裝置，該裝置包括： 一液化碳酸氣儲藏容器，該液化碳酸氣儲藏容器儲藏 液化碳酸氣； 一導出管，該導出管連結該液化碳酸氣儲藏容器； 一節流噴頭裝置，該節流噴頭裝置使該液化碳酸氣儲 藏容器之液化碳酸氣絕熱膨脹；以及， 一溫度控制手段與一溫度檢測手段，該溫度控制手段 與該溫度檢測手段設置於該液化碳酸氣儲藏容器中，用以 控制液化碳酸氣溫度之溫度。 2.如申請專利範圍第1項所述之乾冰雪產生供給裝 置，其中該液化碳酸氣儲藏容器包括使用虹吸管當作該導 出管之虹吸管式液化碳酸氣儲藏容器。 3·如申請專利範圍第1項所述之乾冰雪產生供給裝 置，其中該液化碳酸氣儲藏容器包括兩口式儲藏容器，該 兩口式儲藏容器一邊的出入口連接所設置之升壓用氣體 源。 4. 如申請專利範圍第3項所述之乾冰雪產生供給裝 置，其中該乾冰雪產生供給裝置包括在該液化碳酸氣儲藏 容器與該升壓用氣體源之連接管分歧連接至液化碳酸氣補 給用容器。 5. 如申請專利範圍第3項或申請專利範圍第4項所 述之乾冰雪產生供給裝置，其中該升壓用氣體源包括碳酸 氣。 6. —種乾冰雪生產供給方法，該方法包括： 84 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -------------% (請先閱讀背面之注意事項再填寫本頁) 訂---------線- 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 478974 A8 B8 6425pif.d〇c/〇〇8 /、、申叫專利範圍 控制液化碳酸氣儲藏容器之溫度，維持該液化碳酸氣 儲藏容器內爲一定壓力，而保持液化碳酸氣；以及 供給液化碳酸氣至節流噴頭裝置，生產供給絕熱膨脹 之乾冰雪。 7·如申請專利範圍第6項所述之乾冰雪生產供給方 法’其中維持該液化碳酸氣儲藏容器內爲一定壓力之方法 包括以其他用途之升壓用氣體源供給氣體至該液化碳酸氣 儲藏容器中而補充壓力。 8·如申請專利範圍第7項所述之乾冰雪生產供給方 法’其中該升壓用氣體源之氣體包括供給至昇壓手段中而 昇壓。 9·如申請專利範圍第7項或申請專利範圍第8項所 述之乾冰雪生產供給方法，其中該升壓用氣體源包括碳酸 氣。 10· —種乾冰雪生產供給裝置，該裝置包括： 一乾冰雪供給系統，該乾冰雪供給系統是由儲藏液化 碳酸氣之液化碳酸氣儲藏容器、通過與該儲藏容器連接設 置之絕熱膨脹節流機構以及到達爲了噴射乾冰雪之洗淨噴 頭所形成。該乾冰雪供給系統從該節流機構到達該洗淨噴 頭之包括設置可調節流通管路長之管路長調整機構。 一噴射用氣體供給系統，該噴射用氣體供給系統是由 噴射用氣體源容器、到達該噴射乾冰雪之洗淨噴頭之外圍 部分所設置噴射用氣體噴射口所形成。該噴射用氣體供給 系統之該洗淨噴頭之外圍部分所設置該噴射口包括形成與 85 1本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） --------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 478974 A8 B8 C8 6425pif.doc/008 D8 六、申請專利範圍 乾冰雪噴射方向並行之噴射氣流噴出口。 11. 一種乾冰雪洗淨方法，該方法包括： 加壓液化碳酸氣在節流機構膨脹形成乾冰雪，由噴出 口朝向被洗淨物噴出形成乾冰雪噴出流，而作爲洗淨方 法；以及 在該乾冰雪噴出流之周圍部分同時噴射出並行之噴射 ， 用氣體。調整該節流機構至該噴射口之流通管路長度而噴 射乾冰雪，進行洗淨被洗淨物。 12. —種乾冰雪洗淨裝置，該裝置包括： 一乾冰雪噴射裝置，該乾冰雪噴射裝置設置用於噴射 乾冰雪之乾冰雪噴射噴頭，而洗淨被洗淨物； 一碳酸氣體源，該碳酸氣體源連接用於噴射乾冰雪之 該乾冰雪噴射噴頭； 一外筒，該外筒設置在沿著該乾冰雪噴射噴頭中心外 圍略爲同軸的位置上，用於連接所配置之該噴射用氣體 源；以及， 一噴射用氣體噴出口，該噴射用氣體噴出口位於外筒 之前端，用於噴出噴射用氣體。 13. 如申請專利範圍第12項所述之乾冰雪洗淨裝置， 其中該乾冰雪噴射噴頭包括具有前端朝向噴出口逐漸擴張 圓錐形狀之扁平形狀噴出口，該前端扁平形狀噴出口設有 側邊間隙缺口。 14. 如申請專利範圍第13項所述之乾冰雪洗淨裝置， 其中該前端扁平形狀噴出口包括前端噴出口部之短邊部設 86 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -------------# (請先閱讀背面之注意事項再填寫本頁) 訂---------線· 經濟部智慧財產局員工消費合作社印製 478974 A8 B8 C8 6425pif.doc/008 D8 、申請專利範圍 有側邊間隙缺口。 15·如申請專利範圍第13項或申請專利範圍第14項 所述之乾冰雪洗淨裝置，其中該前端扁平形狀噴出口包括 前端噴出口部之長邊部之限制部具有略爲矩形之形狀。 16. 如申請專利範圍第13項或申請專利範圍第14項 所述之乾冰雪洗淨裝置，其中該噴射用氣體噴出口之前端 形狀包括細長形狀，與乾冰雪噴射噴頭之前端噴出口部所 設置側邊間隙缺口連結線略爲平行。 17. 如申請專利範圍第15項所述之乾冰雪洗淨裝置， 其中該噴射用氣體噴出口之前端形狀包括細長形狀，與乾 冰雪噴射噴頭之前端噴出口部所設置側邊間隙缺口連結線 略爲平行。 18. —種乾冰雪洗淨方法，該方法包括： 由乾冰雪噴射噴頭噴射乾冰雪與從沿著該乾冰雪噴射 噴頭之外周圍所配置之噴射用氣體噴出口噴射噴射用氣 體，藉此洗淨被洗淨物，作爲用於洗淨之洗淨用乾冰雪噴 射裝置。 改變調整該噴射用氣體之流量或壓力，而變動調整由 該乾冰雪噴射噴頭之噴出口所噴出乾冰雪之噴射洗淨範 圍。 19. 一種乾冰雪洗淨裝置，該裝置包括： 一噴射洗淨噴頭，該噴射洗淨噴頭用於噴射乾冰雪； 一液化碳酸氣儲藏容器，該液化碳酸氣儲藏容器用於 儲藏液化碳酸氣； 87 --------------------訂---------線-^11· (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 478974 A8 B8 C8 D8 6425pif.d〇c/〇〇8 /、、申明專利範圍 一乾冰雪生產供給系統，該乾冰雪生產供給系統設置 於該液化碳酸氣儲藏容器至該噴射洗淨噴頭之間，用於生 產供給乾冰雪； 一噴射用氣體源，該噴射用氣體源用於噴射氣體； 一噴射用氣體供給系統，該噴射用氣體供給系統設置 於該噴射用氣體源至該噴射洗淨噴頭之間，用於供給噴射 用氣體；以及， 一開關手段，該開關手段設置於該乾冰雪生產供給系 統中’用於間歇的供給液化碳酸氣。 2〇·如申請專利範圍第19項所述之乾冰雪洗淨裝置， 其中該噴射用氣體源包括使用乾燥氣體。 21·如申請專利範圍第19項或申請專利範圍第20項 所述之乾冰雪洗淨裝置，其中該噴射用氣體供給系統包括 具有可加溫噴射用氣體之加熱控制手段。 22·如申請專利範圍第19項或申請專利範圍第20項 所述之乾冰雪洗淨裝置，其中該噴射用氣體供給系統以及 乾冰雪生產供給裝置包括至少可在兩系統之其中之一，設 置可使氣體離子化之離子化手段。 23·如申請專利範圍第21項所述之乾冰雪洗淨裝置， 其中該噴射用氣體供給系統以及乾冰雪生產供給裝置包括 至少可在兩系統其中之一，設置使氣體離子化之離子化手 段。 24·如申請專利範圍第19項所述之乾冰雪洗淨裝置， 其中連接該噴射用氣體供給系統以及乾冰雪生產供給系統 88 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ---------€--------^---------線. (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 4/8974 經濟部智慧財產局員工消費合作社印製 A8 B8 —6425Pif.doc/〇〇8__Qg____ 、申請專利範圍 之該噴射洗淨噴頭包括其中一方之配管與另一方具有柔軟 个生之配管形成略爲同軸的二重管。 25·如申請專利範圍第24項所述之乾冰雪洗淨裝置， 其中該噴射洗淨噴頭所連接之二重管包括該噴射用氣體供 給系統之配管與乾冰雪生產供給系統之配管形成包括同軸 的二重管，同時該噴射洗淨噴頭之前端形成尖細之形狀。 26_如申請專利範圍第24項所述之乾冰雪洗淨裝置， 其中該噴射洗淨噴頭連接之二重配管包括該噴射用氣體供 給系統之配管與乾冰雪生產供給系統之配管形成包括同軸 的二重管，同時該噴射洗淨噴頭通過節流裝置朝向前端形 成圓錐狀擴張之形狀。 27·如申請專利範圍第19項、第20項、第24項、 第25項或第26項所述之乾冰雪洗淨裝置，其中該噴射洗 淨噴頭包括可設置於上下方向、左右方向至少有一方向可 自由滑動之支持架台上。 28·如申請專利範圍第21項所述之乾冰雪洗淨裝置， 其中該噴射洗淨噴頭包括可設置於上下方向、橫向方向至 少有一方向可自由滑動之支持架台上。 29·如申請專利範圍第22項所述之乾冰雪洗淨裝置， 其中該噴射洗淨噴頭包括可設置於上下方向、橫向方向至 少有一方向可自由滑動之支持架台上。 30.如申請專利範圍第28項所述之乾冰雪洗淨裝置， 其中該噴射洗淨噴頭所設置之上下方向、橫向方向至少有 一方向可自由滑動之支持架台包括裝設移動用車輪。 89 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注音？事項再填寫本頁)478974 A8 B8 C8 D8 6425pif.doc / 〇〇8 /, declared patent scope I A dry ice and snow production and supply device, the device includes: a liquefied carbon dioxide gas storage container, the liquefied carbon dioxide gas storage container stores liquefied carbon dioxide gas; A lead-out pipe connected to the liquefied carbonic acid gas storage container; a throttling nozzle device which adiabaticly expands the liquefied carbonic acid gas of the liquefied carbonic acid gas storage container; and, a temperature control means and a temperature detection means The temperature control means and the temperature detection means are arranged in the liquefied carbon dioxide gas storage container to control the temperature of the temperature of the liquefied carbon dioxide gas. 2. The dry ice and snow generating and supplying device according to item 1 of the scope of patent application, wherein the liquefied carbon dioxide gas storage container includes a siphon-type liquefied carbon dioxide gas storage container using a siphon as the outlet tube. 3. The dry ice and snow generating and supplying device according to item 1 of the scope of the patent application, wherein the liquefied carbon dioxide gas storage container includes a two-port storage container, and an inlet and an outlet on one side of the two-port storage container are connected to a gas source for pressure increase provided. 4. The dry ice and snow generating and supplying device according to item 3 of the scope of the patent application, wherein the dry ice and snow generating and supplying device includes a connection between the liquefied carbon dioxide gas storage container and the pressure source gas source to be connected to the liquefied carbon dioxide gas supply. With container. 5. The dry ice and snow generating and supplying device as described in claim 3 or claim 4, wherein the pressure-generating gas source includes carbon dioxide gas. 6. — A dry ice and snow production and supply method, the method includes: 84 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -------------% (Please (Please read the notes on the back before filling out this page) Order --------- Line-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Employee Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by 478974 A8 B8 6425pif.d. c / 〇〇 //, the scope of the patent application is to control the temperature of the liquefied carbon dioxide gas storage container, maintain a certain pressure in the liquefied carbon dioxide gas storage container, and maintain the liquefied carbon dioxide gas; and supply the liquefied carbon dioxide gas to the throttling nozzle device, Production supplies adiabatic dry ice and snow. 7. The method for producing and supplying dry ice and snow as described in item 6 of the scope of the patent application, wherein the method for maintaining a certain pressure in the liquefied carbon dioxide gas storage container includes supplying gas to the liquefied carbonic acid gas storage from a pressure source gas source for other purposes Pressure in the container. 8. The dry ice and snow production and supply method according to item 7 of the scope of the patent application, wherein the gas of the pressure-generating gas source is supplied to a pressure-increasing means to increase the pressure. 9. The dry ice and snow production and supply method according to item 7 of the scope of patent application or item 8 of the scope of patent application, wherein the pressure source gas source includes carbon dioxide gas. 10 · A dry ice and snow production and supply device, the device includes: a dry ice and snow supply system, the dry ice and snow supply system is a liquefied carbon dioxide gas storage container for storing liquefied carbon dioxide gas, and an adiabatic expansion throttling mechanism provided by being connected to the storage container And formed by washing nozzles for spraying dry ice and snow. The dry ice and snow supply system from the throttling mechanism to the cleaning nozzle includes a pipe length adjusting mechanism provided with an adjustable flow pipe length. A spraying gas supply system is formed by a spraying gas source container and a spraying gas spraying port provided at a peripheral portion of the cleaning nozzle which reaches the spraying dry ice and snow. The ejection port provided on the peripheral part of the cleaning nozzle of the gas supply system for ejection includes forming and 85 1 paper standards applicable to China National Standard (CNS) A4 specifications (210 X 297 public love) ------- ------------- Order --------- line (please read the notes on the back before filling this page) 478974 A8 B8 C8 6425pif.doc / 008 D8 VI. Application Patent range Dry ice and snow spray direction parallel jet air jet outlet. 11. A method for washing dry ice and snow, the method comprising: expanding liquefied carbonic acid gas at a throttle mechanism to form dry ice and snow, and ejecting the dry ice and snow from a jet port toward the object to be cleaned as a washing method; and The surrounding portion of the dry ice and snow jet stream simultaneously ejects parallel jets with gas. Adjust the length of the flow path of the throttling mechanism to the spray port to spray dry ice and snow to wash the objects to be washed. 12. A dry ice and snow washing device, the device comprising: a dry ice and snow spray device, the dry ice and snow spray device is provided with a dry ice and snow spray nozzle for spraying dry ice and snow, and cleans the object to be washed; a carbonic acid gas source, the The carbon dioxide gas source is connected to the dry ice and snow spray nozzle for spraying dry ice and snow; an outer cylinder is arranged at a position slightly coaxial with the periphery of the center of the dry ice and snow spray nozzle, and is used to connect the configured spraying nozzle. A gas source; and a gas ejection port for ejection, the ejection gas ejection port being located at the front end of the outer cylinder for ejecting the ejection gas. 13. The dry ice and snow washing device according to item 12 of the scope of the patent application, wherein the dry ice and snow spray nozzle includes a flat shape spray outlet with a front end gradually expanding toward the spray outlet, and the front flat spray outlet is provided with side edges. Clearance gap. 14. The dry ice and snow washing device as described in item 13 of the scope of the patent application, wherein the flat front-end ejection opening includes the short-side portion of the front-end ejection opening, and the paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) ------------- # (Please read the notes on the back before filling in this page) Order --------- line · Staff of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the Consumer Cooperative 478974 A8 B8 C8 6425pif.doc / 008 D8. There is a gap in the side gap in the scope of patent application. 15. The dry ice and snow washing device according to item 13 of the scope of patent application or item 14 of the scope of patent application, wherein the flat end of the front-end ejection opening includes a restricting portion of the long side portion of the front-end ejection opening portion having a slightly rectangular shape. . 16. The dry ice and snow washing device according to item 13 of the application scope or item 14 of the application scope, wherein the shape of the front end of the spraying gas outlet includes an elongated shape, and the front end of the dry ice and snow spraying nozzle Set the side gap gap connection lines slightly parallel. 17. The dry ice and snow washing device according to item 15 of the scope of the patent application, wherein the shape of the front end of the spray gas ejection opening includes an elongated shape, and the side gap gap connection line provided with the front end ejection outlet of the dry ice and snow spray nozzle Slightly parallel. 18. —A method for cleaning dry ice and snow, the method comprising: spraying dry ice and snow from a dry ice and snow spray nozzle and spraying a spray gas from a spray gas outlet disposed along the periphery of the dry ice and snow spray nozzle, thereby washing The cleaned object is used as a dry ice and snow spraying device for washing. The flow rate or pressure of the spraying gas is changed and adjusted, and the spray cleaning range of the dry ice and snow sprayed from the spray outlet of the dry ice and snow spray nozzle is changed and adjusted. 19. A dry ice and snow washing device, the device comprising: a spray washing nozzle for spraying dry ice and snow; a liquefied carbon dioxide gas storage container, the liquefied carbon dioxide gas storage container being used for storing liquefied carbon dioxide gas; 87 -------------------- Order --------- line- ^ 11 · (Please read the precautions on the back before filling this page) Economy The paper size printed by the Ministry of Intellectual Property Bureau's Consumer Cooperatives applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 A8 B8 C8 D8 6425pif.d〇c / 〇〇8 /, declares that the scope of patents is dry ice and snow A production and supply system, the dry ice and snow production and supply system is arranged between the liquefied carbon dioxide gas storage container and the jet cleaning nozzle, and is used to produce and supply dry ice and snow; a jet gas source, and the jet gas source is used to jet gas; A gas supply system for spraying, the gas supply system for spraying is disposed between the gas source for spraying and the spray cleaning nozzle for supplying gas for spraying; and a switch means is provided on the dry ice and snow Production Supply System 'For intermittently supplying liquefied carbon dioxide gas is. 20. The dry ice and snow washing device according to item 19 of the scope of the patent application, wherein the gas source for spraying comprises using a dry gas. 21. The dry ice and snow washing device according to item 19 of the patent application scope or item 20 of the patent application scope, wherein the spraying gas supply system includes a heating control means having a heating spraying gas. 22. The dry ice and snow washing device according to item 19 of the scope of patent application or item 20 of the scope of patent application, wherein the gas supply system for spraying and the dry ice and snow production and supply device include at least one of two systems. Ionization means capable of ionizing gas. 23. The dry ice and snow washing device according to item 21 of the scope of application for a patent, wherein the spray gas supply system and dry ice and snow production and supply device include at least one of two systems, and an ionization means for ionizing gas is provided. . 24. The dry ice and snow washing device as described in item 19 of the scope of application for a patent, in which the gas supply system for spraying and the dry ice and snow production and supply system are connected. 88 This paper size is in accordance with China National Standard (CNS) A4 (210 X 297). Li) --------- € -------- ^ --------- line. (Please read the notes on the back before filling this page) Intellectual Property Bureau of the Ministry of Economic Affairs Printed by employee consumer cooperative 4/8974 Printed by employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A8 B8 —6425Pif.doc / 〇〇8__Qg ____ The patent application scope of this spray cleaning nozzle includes the piping of one side and the other with a soft life. The piping forms a slightly coaxial double pipe. 25. The dry ice and snow washing device as described in item 24 of the scope of application for a patent, wherein the double pipe connected to the jet cleaning nozzle includes a pipe for the gas supply system for the jet and a pipe for the dry ice and snow production and supply system. At the same time, the front end of the jet cleaning nozzle has a sharp shape. 26_ The dry ice and snow washing device according to item 24 of the scope of the patent application, wherein the double piping connected to the jet cleaning nozzle includes the piping of the gas supply system for injection and the piping of the dry ice and snow production and supply system. The double tube, meanwhile, the spray cleaning nozzle is formed into a conical expansion shape toward the front end through a throttling device. 27. The dry ice and snow washing device as described in item 19, 20, 24, 25, or 26 of the scope of patent application, wherein the jet cleaning nozzle includes at least one which can be arranged in the up-down direction and the left-right direction. There is a support frame that can slide freely in one direction. 28. The dry ice and snow washing device as described in item 21 of the scope of application for a patent, wherein the spray cleaning nozzle includes a support stand that can be freely slidable in at least one of the vertical direction and the horizontal direction. 29. The dry ice and snow washing device according to item 22 of the scope of application for a patent, wherein the spray cleaning nozzle includes a support stand which can be freely slidable in at least one of the vertical direction and the horizontal direction. 30. The dry ice and snow washing device according to item 28 of the scope of application for a patent, wherein the support stand on which the spray washing nozzle is arranged to be freely slidable in at least one of the up-down direction and the transverse direction includes a wheel for moving. 89 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the note on the back? Matters before filling out this page) 478974 A8 B8 C8 D8 6425pif.doc/008 六、申請專利範圍 31. 如申請專利範圍第28項所述之乾冰雪洗淨裝置， 其中該噴射洗淨噴頭所設置之上下方向、橫向方向至少有 一方向可自由滑動之支持架台包括裝設移動用車輪。 32. —種乾冰雪洗淨方法，該方法包括； 利用乾冰雪噴吹被洗淨物之洗淨方法； 間歇的供給乾冰雪；以及， 連續的供給噴射氣體。， 33. 如申請專利範圍第32項所述之乾冰雪洗淨方法， 其中該乾冰雪生產供給裝置包括流通離子化碳酸氣。 34·如申請專利範圍第32項或申請專利範圍第33項 所述之乾冰雪洗淨方法，其中使用之乾冰雪洗淨方法包括 以溫度控制噴射用氣體。 35.如申請專利範圍第32項或申請專利範圍第33項 所述之乾冰雪洗淨方法，其中使用之乾冰雪洗淨方法包括 離子化噴射用氣體。 36·如申請專利範圍第34項所述之乾冰雪洗淨方法， 其中使用之乾冰雪洗淨方法包括離子化噴射用氣體。 37.如申請專利範圍第32項或申請專利範圍第33項 所述之乾冰雪洗淨方法，其中該噴射洗淨噴頭包括設置在 上下方向、橫向方向至少有一方向可自由滑動之支持架 台，使該噴射洗淨噴頭與被洗淨物保持一定之距離，而噴 射乾冰雪進行洗淨。 38·如申請專利範圍第34項所述之乾冰雪洗淨方法， 其中該噴射洗淨噴頭包括設置在上下方向、橫向方向至少 90 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） LL-------¾ (請先閱讀背面之注意事項再填寫本頁) 訂---------線 經濟部智慧財產局員工消費合作社印製 478974 A8 B8 C8 6425pif.doc/008 D8 六、申請專利範圍 有一方向可自由滑動之支持架台，使該噴射洗淨噴頭與被 洗淨物保持一定之距離，而噴射乾冰雪進行洗淨。 (請先閱讀背面之注意事項再填寫本頁) 39.如申請專利範圍第35項所述之乾冰雪洗淨方法， 其中該噴射洗淨噴頭包括設置在上下方向、橫向方向至少 有一方向可自由滑動之支持架台，使該噴射洗淨噴頭與被 洗淨物保持一定之距離，而噴射乾冰雪進行洗淨。 40·如申請專利範圍第32項或申請專利範圍第33項 所述之乾冰雪洗淨方法，其中該乾冰雪洗淨方法包括與刷 洗並用而洗淨被洗淨物。 41.如申請專利範圍第34項所述之乾冰雪洗淨方法， 其中該乾冰雪洗淨方法包括與刷洗並用而洗淨被洗淨物。 42·如申請專利範圍第35項所述之乾冰雪洗淨方法， 其中該乾冰雪洗淨方法包括與刷洗並用而洗淨被洗淨物。 43·如申請專利範圍第37項所述之乾冰雪洗淨方法， 其中該乾冰雪洗淨方法包括與刷洗並用而洗淨被洗淨物。 44·如申請專利範圍第29項所述之乾冰雪洗淨裝置， 其中該噴射洗淨噴頭所設置之上下方向、橫向方向至少有 一方向可自由滑動之支持架台包括裝設移動用車輪。 經濟部智慧財產局員工消費合作社印製 91 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297478974 A8 B8 C8 D8 6425pif.doc / 008 6. Scope of patent application 31. The dry ice and snow cleaning device described in item 28 of the scope of application for patent, wherein the jet cleaning nozzle is provided with at least one of a vertical direction and a horizontal direction The freely sliding support stand includes moving wheels. 32. A method for washing dry ice and snow, the method comprising: a method for washing dry objects with dry ice and snow; intermittently supplying dry ice and snow; and continuously supplying spray gas. 33. The dry ice and snow washing method as described in item 32 of the scope of the patent application, wherein the dry ice and snow production and supply device includes circulating ionized carbon dioxide gas. 34. The dry ice and snow washing method according to item 32 of the scope of patent application or item 33 of the scope of patent application, wherein the dry ice and snow washing method used includes controlling the spraying gas with temperature. 35. The dry ice and snow washing method according to item 32 of the patent application scope or item 33 of the patent application scope, wherein the dry ice and snow washing method used includes an ionized spray gas. 36. The dry ice and snow washing method according to item 34 of the scope of application for a patent, wherein the dry ice and snow washing method used includes an ionized spray gas. 37. The dry ice and snow washing method according to item 32 of the scope of patent application or item 33 of the scope of patent application, wherein the jet cleaning nozzle includes a support stand provided in the up-down direction and at least one direction that can be slid freely so that The spray cleaning nozzle keeps a certain distance from the object to be cleaned, and sprays dry ice and snow for cleaning. 38. The dry ice and snow washing method as described in item 34 of the scope of the patent application, wherein the jet cleaning nozzle includes at least 90 horizontal and vertical directions. The paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297). Mm) LL ------- ¾ (Please read the precautions on the back before filling out this page) Order --------- Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economics 478974 A8 B8 C8 6425pif.doc / 008 D8 6. The scope of the patent application There is a support stand that can slide freely in the direction, so that the spray cleaning nozzle keeps a certain distance from the object to be cleaned, and dry ice and snow are sprayed for cleaning. (Please read the precautions on the back before filling this page) 39. The dry ice and snow cleaning method as described in item 35 of the scope of patent application, wherein the spray cleaning nozzle includes at least one direction which can be set freely in the up-down direction and the transverse direction. The sliding support frame keeps the spray cleaning nozzle and the object to be cleaned at a certain distance, and sprays dry ice and snow for cleaning. 40. The dry ice and snow washing method as described in item 32 of the scope of patent application or item 33 of the scope of patent application, wherein the dry ice and snow washing method comprises washing with washing together with washing. 41. The dry ice and snow washing method according to item 34 of the scope of application for a patent, wherein the dry ice and snow washing method comprises washing with washing together with brushing. 42. The dry ice and snow washing method according to item 35 of the scope of application for a patent, wherein the dry ice and snow washing method includes washing with the brush and washing the object to be washed. 43. The dry ice and snow washing method as described in item 37 of the scope of application for a patent, wherein the dry ice and snow washing method includes washing with washing together with brushing. 44. The dry ice and snow washing device according to item 29 of the scope of application for a patent, wherein the support stand on which the spray washing nozzle is arranged to be freely slidable in at least one of the up-down direction and the transverse direction includes a wheel for moving. Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 91 This paper is sized to the Chinese National Standard (CNS) A4 (210 X 297)
TW89120754A 1999-10-13 2000-10-05 Device for and method of producing/supplying dry ice snow, cleaning device and cleaning method TW478974B (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP29169699A JP4414522B2 (en) 1999-10-13 1999-10-13 Dry ice snow generating and supplying apparatus and generating and supplying method
JP36848799A JP4376392B2 (en) 1999-12-24 1999-12-24 Dry ice snow spraying device for cleaning and cleaning method using the same
JP2000016337 2000-01-25
JP2000077048A JP3457616B2 (en) 2000-03-17 2000-03-17 Dry ice snow cleaning method and apparatus
JP2000241622A JP4578644B2 (en) 1999-10-13 2000-08-09 Dry ice snow jet cleaning device and cleaning method

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111218801A (en) * 2018-11-26 2020-06-02 青岛海尔滚筒洗衣机有限公司 Washing device and washing method
CN108188112B (en) * 2018-01-08 2020-10-30 迪普干冰制造(大连)有限公司 Liquid carbon dioxide cleaning system
CN112452936A (en) * 2020-12-15 2021-03-09 中国电子科技集团公司第九研究所 Method for cleaning and processing metal film circuit on ferrite substrate before electroplating
CN114011805A (en) * 2021-11-15 2022-02-08 上海德卫氪自动化工程有限公司 Snowflake cleaning machine and cleaning method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108188112B (en) * 2018-01-08 2020-10-30 迪普干冰制造(大连)有限公司 Liquid carbon dioxide cleaning system
CN111218801A (en) * 2018-11-26 2020-06-02 青岛海尔滚筒洗衣机有限公司 Washing device and washing method
CN112452936A (en) * 2020-12-15 2021-03-09 中国电子科技集团公司第九研究所 Method for cleaning and processing metal film circuit on ferrite substrate before electroplating
CN114011805A (en) * 2021-11-15 2022-02-08 上海德卫氪自动化工程有限公司 Snowflake cleaning machine and cleaning method thereof

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