TW468033B - Microscope inspection system - Google Patents

Microscope inspection system Download PDF

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Publication number
TW468033B
TW468033B TW089110322A TW89110322A TW468033B TW 468033 B TW468033 B TW 468033B TW 089110322 A TW089110322 A TW 089110322A TW 89110322 A TW89110322 A TW 89110322A TW 468033 B TW468033 B TW 468033B
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TW
Taiwan
Prior art keywords
circuit
inspection system
lens
patent application
interest
Prior art date
Application number
TW089110322A
Other languages
Chinese (zh)
Inventor
Yigal Katzir
Demitry Gorlik
Original Assignee
Orbotech Ltd
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Publication of TW468033B publication Critical patent/TW468033B/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/0016Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361Optical details, e.g. image relay to the camera or image sensor

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

An electrical circuit inspection system including an eyepiece operative to collimate light received from a portion of interest in an electrical circuit, a zoom and/or automatic focus video camera assembly receiving collimated light from the eyepiece and a display operative to receive a video output from the zoom video camera and to display a magnified image of the portion of interest.

Description

4 6 8033 經濟部智慧財產局員工消費合作社印製 A7 -------— B7__ 五、發明說明(1 ) 發明領域 概略而ΐ:本發明係關於電路檢視系統以及特別係關於具 有自動對焦及變焦功能之電路撿視系統。 發明背景 各種類型的電路撿視系統爲業界已知。通常不含自動對 焦及變焦功能。具有自動對焦及變焦功能的放大視訊攝影 機系統爲業界已知。習知此等類型系統採用具有此種功能 的顯微鏡於目鏡上游。此種顯微鏡複雜且價格極爲昂貴。 隨著製造技術的進展電路的線寬逐漸縮窄,檢視系統中 精密對焦的重要性也逐漸增高。 發明概述 本發明尋求提供一種電路檢視系統其具有變焦及/或自動 對焦功能且採用標準光學組件以及實質上比先前技術系統 更爲廉價。 如此根據本發明之較佳具體實施例提供一種電路檢視系 統包含一透鏡較佳可操作而實質上無限地將接收自電路感 興趣部份之光成像;一變焦視訊攝影機總成接收實質上無' 限地得自透鏡之成像光;以及一顯示器較佳可操作而接收 由變焦視訊攝影機總成輸出的視訊且顯示感興趣部份之放 大影像。 根據本發明之較佳具體實施例,電路檢視系統也包括一 第一級透鏡較佳可操作而觀視感興趣部份以及聚焦來自該 部fe之光至透鏡的焦面。 此外’根據本發明之較佳具體實施例,第一級透鏡爲一 -4- 本紙張尺度剌t關家辟(CNS)A4規格(210 X 297公爱) (請先閲讀背面之注意事項再填窝本頁)4 6 8033 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 --------- B7__ V. Description of the invention (1) The field of invention is broad and simple: the present invention relates to a circuit inspection system and in particular to an autofocus system. And zoom function circuit inspection system. BACKGROUND OF THE INVENTION Various types of circuit viewing systems are known in the industry. Usually does not include auto focus and zoom functions. Magnified video camera systems with autofocus and zoom are known in the industry. It is known that these types of systems use a microscope with this function upstream of the eyepiece. Such microscopes are complex and extremely expensive. As manufacturing technology progresses, the line width of the circuit is gradually narrowing, and the importance of precise focusing in the viewing system is gradually increasing. SUMMARY OF THE INVENTION The present invention seeks to provide a circuit inspection system that has zoom and / or autofocus functions, uses standard optical components, and is substantially cheaper than prior art systems. Thus, a circuit inspection system according to a preferred embodiment of the present invention includes a lens that is preferably operable to substantially infinitely image light received from a portion of interest of the circuit; a zoom video camera assembly receives substantially no ' The imaging light obtained from the lens is limited; and a display is preferably operable to receive the video output from the zoom video camera assembly and display an enlarged image of the portion of interest. According to a preferred embodiment of the present invention, the circuit inspection system also includes a first-stage lens which is preferably operable to view the portion of interest and focus the light from the portion fe to the focal plane of the lens. In addition, according to a preferred embodiment of the present invention, the first-level lens is a -4- paper size 剌 Guan Jia Pi (CNS) A4 specification (210 X 297 public love) (Please read the precautions on the back before (Filling page)

五、發明說明(2 經濟部智慧財產局員工消費合作社印製 468033 可操作而提供電路的感興趣部份之—未放大 另卜第級透鏡爲物鏡較佳可操作而提供電路的感 興趣郅份之一放大影像。. 根::心明(較佳具體實施例’電路檢视系統包括一定 ^較佳可操ϋ而定位電路,因此經由透鏡觀視感興趣部 、及較佳疋仫器可由自動化光學檢視系統接收的輸出 操作’琢自動化光學檢視系統辨識電路中被認爲可能涵括 瑕的區域。 另一 :’?。艮據本發明之較佳具體實施例,電路檢視系統包 疋位器,較佳可操作而定位電路, 由第一級透鏡觀視,以及舻祛令户π丄 工 /优以及較佳***可由接收自自動化光 子$先之輸出其辨識可能涵括瑕疫之電路區域操作。 另夕上、?據本發明之較佳具體實施例,電路檢視*** 括一足位器’較佳可操作而定位電路,故感興趣部份可 經由中繼透鏡觀視,以及較佳***可由接收自自動化光 學撿視系統(輸出其辨識可能涵括瑕之電路區域操作。 如此根據本發明之較佳具體實施例提供—種電路檢視系 統,包括-透鏡較佳可操作而實質上無限成像接 踗 的感興趣邵份之光;一自動對焦視訊攝影機總成接 透:之實質上無限成像光;以及一顯示器較佳可操作而 收仔自自動對焦視訊攝影機之視訊輸出,以及顯示電 興趣部份之自動對焦影像。 根據本發明之較佳具體實施例,電路檢視系統也包捂— 第一級透鏡較佳可操作而觀視電路《感興趣部份以及聚焦 5- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐 (請先閱讀背面之注意事項再填寫本頁)V. Description of the invention (2 Printed by the Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs 468033 Operable and provide interesting parts of the circuit-not magnified. The second-level lens provides the circuit with the objective lens for better operation. One of the images is enlarged. Root: Xinming (the preferred embodiment 'the circuit inspection system includes a certain ^ better operable and positioning circuit, so viewing the part of interest through the lens, and The output operation received by the automated optical inspection system is to identify an area in the automated optical inspection system that may be considered to contain defects. Another: '?. According to a preferred embodiment of the present invention, the circuit inspection system includes a bit Device, preferably operable and positioning circuit, viewed by the first-level lens, and can be used by the user to obtain the output from the automated photon $. Its identification may include defects. Circuit area operation. In addition, according to a preferred embodiment of the present invention, the circuit inspection system includes a foot positioner, which is preferably operable to locate the circuit, so the portion of interest can be passed through. Following lens viewing, and the preferred positioner can be operated from an automated optical viewing system (outputting circuit regions whose identification may include flaws). Thus, a circuit inspection system is provided according to a preferred embodiment of the present invention, including- The lens is preferably operable and substantially infinite imaging is connected to the light of interest; an autofocus video camera assembly is penetrated: substantially infinite imaging light; and a display is preferably operable to receive autofocus According to the preferred embodiment of the present invention, the circuit inspection system also covers the video output of the video camera and the auto-focus image of the electrical interest portion. The first-level lens is preferably operable while viewing the circuit. Copy and Focus 5- This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm (please read the precautions on the back before filling this page)

468033 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(3 來自其中的光至透鏡焦面上。 此外根據本發明之妒# H 1 . 較佳’、fla貫她例,第一級透鏡爲一中 繼透鏡: '佳可操作而提供電路感興趣部份的未放大影 像另 帛級透鏡爲物鏡,較佳可操作而提供電路感 興趣部份之放大影像。 =j據本發明之較佳具體實施例,電路檢視系統包 括未疋::益,較佳可操作而定位電路,使感興趣部份可經 ^ '抓山甘...杈佳疋位4可由接收自自動光學檢視系 統之·輸出其辨識電路被滿良可Α11,τ Λ 电峪被:視爲可此涵括瑕疵區的輸出操作。 此外’根據本發明之較佳且體音+办丨 权住,、姐實犯例,電路檢視系統包 括一疋位器’較佳可極价工—厂Α 吐 了铋作而疋位電路,使感興趣部份可經 由第一級透鏡德(滿,,v ^ + 及較佳疋位器可由接收自自動光學 檢視系統·^輸出其辨输兩0 ,日& 、.:电路被視爲可能涵括瑕疫區的輸出 操作。 據本發明之較佳具體實施例,電路檢視系統 匕 疋上益,較佳可操作而定位電路,使感興趣部份可 經由中繼透鏡觀視,以及較佳***可由接收自自動光學 檢視系統之輸出JL躲喝φ J w /、辨硪電路被視爲可能涵括瑕疵區的 操作。 如此根據本發明之較佳具體實施例提供—種電路檢視系 統包括-透鏡較佳可操作而實質上無限成像接收自電路感 興趣邛伤之光;一變焦與自動對焦視訊攝影機總成: 自透鏡之實質上無限成像 g§ _ ^ ^ 木 • . 巩爆尤,以及一顯不較佳可操作而 接收一由變焦與自動對焦視訊攝影機輸出的視訊以及顯示 --------------------!.,裝-----ί f靖先閱讀背面之注項再填寫本頁)468033 Printed by A7 B7, Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (3 Light from it to the focal plane of the lens. In addition, according to the present invention jealousy # H 1. A grade lens is a relay lens: 'Jia can be operated to provide an unenlarged image of the circuit's interesting portion, and a grade lens is an objective lens, which is preferably operable to provide an enlarged image of the circuit's interesting portion. = J According to the present invention In a preferred embodiment, the circuit inspection system includes the following :: 益, it is better to operate and locate the circuit, so that the part of interest can be received by ^ 'Grasp Shangan ... The output of the inspection system is identified by Man Liang Ke A11, and τ Λ is regarded as an output operation that can include the defective area. In addition, 'Better according to the present invention and body sound + office rights ,, In the case of a real crime, the circuit inspection system includes a positioner 'better can be extremely expensive-factory A spit out bismuth and bit the circuit, so that the part of interest can be passed through the first-level lens De (man ,, v ^ + And better positioners can be received from the automatic optical inspection system It discriminates two zero, Japanese &,.: Circuits are considered to be possible to cover the output operation of the defective area. According to a preferred embodiment of the present invention, the circuit inspection system is more efficient, and is preferably operable for positioning. Circuit, so that the part of interest can be viewed through the relay lens, and a better locator can be received from the output of the automatic optical inspection system JL to avoid drinking φ J w /, the circuit is regarded as an operation that may include defective areas According to a preferred embodiment of the present invention, a circuit inspection system is provided including: a lens is preferably operable and substantially infinite imaging is received from the circuit of light of interest; a zoom and autofocus video camera assembly: since Lens's virtually infinite imaging g§ _ ^ ^ Wood •. Gong Baoyou, and a poorly operable display to receive a video and display output from a zoom and autofocus video camera --------- -----------!., Install ----- ί fjing first read the note on the back before filling out this page)

I ·_I · _

4 6 8033 A7 五、發明說明( -感興趣部份之放大且自動對焦影像。 月之較佳具體實施例,電路檢視系統也包括一 可操作而觀视感興趣部份以及聚焦得自其 先至透鏡之焦面上。 繼=:4:據^發明之較佳具體實拖例,第-級透鏡爲中 另外策二可鉍作而提供電路感興趣部份之未放大影像。 '級透鏡爲物鏡,較佳可操作而提供電 份之·放大影像。 …^根據本I明之較佳具體實施例,電路檢視包括一定 .二較4可钇作而定位電路,使感興趣部份可經由透鏡觀 視以及較佳疋位器可由接收自—自動光學檢視系統之賴 出操作,該輪出可辨識電路中被認爲可能涵括瑕疵之區 域。 另卜根據本發明之較佳具體實施例,電路檢視包括一定 位器較佳可操作而定位電路,使感興趣部份可經由第一紹 透鏡觀視’以及較佳***可由接收自一自動光學檢視系 統之輸出操作,該輸出可辨識電路中被認爲可能涵括瑕痛 之區域。 又另外根據本發明之較佳具體實施例,電路檢視包括一 ***較佳可操作而定位電路,使感興趣部份可經由中繼 透鏡觀視,以及較佳***可由接收自—自動光學檢視系 統之輸出操作,該輸出可辨識電路中被認爲可能涵括瑕病 之區域。 如此根據本發明之較佳具體實施例提供一種檢視系統包 本紙張尺度迥用1f圏_冢標準(CNS)A4規格(21〇 χ 297公釐) (請先閱讀背面之注意事項再填窝本頁) "i---ΓΙ1 訂----I---錄,4 6 8033 A7 V. Description of the invention (-The magnified and auto-focused image of the part of interest. The preferred embodiment of the month, the circuit inspection system also includes an operable to view the part of interest and focus on it first. To the focal plane of the lens. Following =: 4: According to the preferred embodiment of the invention, the first-stage lens is an unenlarged image of the circuit's interesting part. For the objective lens, it is better to operate and provide electrical and magnified images. ^^ According to the preferred embodiment of the present invention, the circuit inspection includes a certain amount. Two or four yttrium can be used to locate the circuit so that the part of interest can be passed The lens viewing and the preferred positioner can be operated by receiving from an automatic optical inspection system, which can identify areas in the circuit that may be considered to contain defects. Also according to a preferred embodiment of the present invention The circuit inspection includes a locator which is better operable and a locating circuit, so that the part of interest can be viewed through the first lens, and the preferred locator can be operated by an output received from an automatic optical inspection system, the output can be identified Electricity It is considered that the road may contain sore areas. In addition, according to a preferred embodiment of the present invention, the circuit inspection includes a locator which is preferably operable to locate the circuit, so that the part of interest can be viewed through the relay lens. The video and the preferred locator can be operated from the output of the automatic optical inspection system, which can identify the area in the circuit that may be considered to include defects. Thus, an inspection system is provided according to a preferred embodiment of the present invention. The size of this paper is 1f 圏 _tsuka standard (CNS) A4 specification (21〇χ 297 mm) (Please read the precautions on the back before filling this page) " i --- ΓΙ1 Order ---- I --- record,

V 經濟部智慧財產局員工消費合作社印製 46 B033 第89110322號專利申請案 中文說明書修正頁(89年11月) A7 五、發明説明(5 ί修 :補充 Ά Β 括一透鏡’較佳可操作而實晳μ . ^ΓΊΓΤΤ^ , 々為上,,.'限成像接收自感興趣區 之光’-變焦及/或自動對焦視訊攝影機總成接收得 之實質上無限成像光,以及—顯示器較佳可操作而接 自變焦及/或自動對焦視訊攝影機輸出的视訊以及顯示感興 趣區之放大影像。 ~ 〃 圖式之簡單說明 由後文詳細說明連同附圖將更完整了解本發明,附圖 中: 圖1為根據本發明之較佳具體實施例組構及操作之一種電 路檢視系統之簡化圖解; 圖2 Α及2 Β為圖1系統之二具體實施例之簡化說明圖;以 及 圖3A及3B分別為第2A及2B圖之具體實施例之簡化光學 說明圖。 主要元件之代表符號 /10 自動光學檢视站 12 *** y 14 印刷電路板 y 16顯微鏡 17 印刷電路板14之部份 / 18 攝影機總成 19 觀视光學裝置 20 顯示器 8- 本紙張尺度適用中國國家標準(CNS ) A4規格(2!0X297公釐) f請先閱讀背面之注意事項再填寫本頁〕 訂 經濟部中央標準局員工消费合作社印製 46 8033 A7 -------B7___ 五、發明說明(6 ) '-- -顯微鏡16之透鏡形成部件接收來自印刷電路㈣ ㈣之光,經由來自自動光學檢視站1〇之輸出將操作員的 注意力導向該部份,自動光學檢視站適當定位該部份於顯 微鏡1 6的視野。根據本發明之較佳且吨 心敉住具禮實施例,形成顯微 鏡⑽份之變焦及Q自動對焦視訊攝影機總成^設置於 透鏡下游來接收來自透鏡之光,該光實質上無限成像因而 實質上平行。一顯示器20接收由攝影機總成18輸出的視 訊,以及顯示印刷電路板丨4之相信可能存在有瑕疵該部份 1 7炙放大影像,因此操作員可決定該瑕疵爲實際瑕疵或爲 假警報。 根據本發明之較佳具體實拖例,攝影機總成18較佳爲新 力型號FCB-1X47P其提供變焦與自.動對氣功能。顯示器2〇 可爲任何適當咼解像度顯示器例如型號pVM— 14Μ4Ε 14"新 力彩色視訊監視器。 現在參照圖2 Α及2 Β,其爲圖1系統之二具體實施例之簡 化説明圖。如圖2 A所示’印刷電路板1 4之感興趣部份1 7 係透過透鏡觀視’透鏡較佳爲第一級透鏡或中繼物鏡2 2, 以及隨後透過目鏡2 4觀視。來自目鏡2 4之光由攝影機總成 18接收’攝影機典型包括其本身的觀視光學裝置19其包括 輸出至顯示器20。 較佳中繼物鏡2 2爲卡爾蔡司(Carl Zeiss) S -平面7 4毫米 f/4透鏡及較佳目鏡爲雷茲威茲勒(Leitz Wetzlar)伯利磐 (Periplan) GW 6.3 X 3 9·7毫米透鏡。 圖2 Β舉例説明本發明之替代具體實施例,其中可免除中 * 9 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 2耵公釐) (諝先閲讀背面之注意事項再填寫本頁) \ 裝!Τ'訂--------故- 經濟部智慧財產局員工消費合作社印製 A7 B7 468033 第8911〇322號專利申請案 中文說明書修正頁(89年11月) 五、發明説明(7 ) 轉 二·」· 繼物鏡2 2而採用無限校正物鏡3 4。印刷電路板1 4實質上 置於無限校正物鏡34之焦面而形成實質上無限影像^由無 限校正物鏡3 4形成的影像可直接藉攝影機總成1 8觀視,但 須採用觀視光學裝置1 9。圖2 Β之具體實施例中,由於不存 在有中繼物鏡2 2,顯微鏡1 6比較圖2 Α之具體實施例須放 置遠更接近印刷電路板1 4。 現在參照圖3 A及3 B ’其分別為圖2 A及2 B之具體實施例 之簡化光學說明圖。參照圖3 A可知中繼物鏡2 2其焦點指 示為F 1,較佳與印刷電路板丨4隔開約1 4 8毫米距離。目鏡 24較佳與中繼物鏡22隔開187.7毫米,其焦點指示為F2。 注意中繼物鏡2 2較隹位在距印刷電路板丨4之觀視平面2 X FI距離’ w比鄰中繼物鏡2 2之目鏡2 4之焦點F 2係位在距中 繼物鏡22 2 X F i距離。須了解中繼物鏡2 2可以任何適當物 鏡取代’該物鏡可操作而形成中間影像於目鏡2 4之焦面f 2 附近’以及此種中間影像可有或無放大。 圖3 A也舉例說明攝影機總成1 8之觀視光學裝置1 9及 CCD焦面28 (圖2A)。觀視光學裝置19之焦距表示為F3。 較佳觀视光學裝置1 9與目鏡2 4之焦距比為於焦面2 8產生 2 - 3倍故大。 參照圖3 B,可知無限校正物鏡3 4其焦點示於ρ· 4,較佳 與印刷電路板1 4分開焦距f 4距離= 圖3 B也舉例說明攝影機總成丨8之觀視光學裝置3 6及 CCD焦面3 8。較佳觀視光學裝置3 6與物鏡3 4間之焦距比為 於焦面38產生放大倍數之2至3倍放大。 -10- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公楚) <請先閲讀背面之注意事項再填寫本頁)V Printed by the Consumers 'Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 46 B033 Patent Application No. 89110322 Patent Document Correction Sheet (November 89) A7 V. Description of the Invention (5 Revision: Supplement Ά Β Include a lens' preferable operation The actual μ. ^ ΓΊΓΤΤ ^, 々 is above, .'Limit imaging to receive light from the area of interest '-zoom and / or autofocus video camera assembly receives substantially infinite imaging light, and-the display is more It can be operated by connecting the video output from the zoom and / or autofocus video camera and displaying the enlarged image of the area of interest. ~ 简单 Brief description of the drawings The detailed description will be described later together with the accompanying drawings to better understand the present invention. In the drawings: FIG. 1 is a simplified diagram of a circuit inspection system structured and operated according to a preferred embodiment of the present invention; FIGS. 2A and 2B are simplified explanatory diagrams of the second embodiment of the system of FIG. 1; 3A and 3B are simplified optical illustrations of the specific embodiments of Figs. 2A and 2B, respectively. Representative symbols of main components / 10 Automatic optical inspection station 12 Positioner 14 Printed circuit board 16 Microscope 17 Print Part of the circuit board 14/18 Camera assembly 19 Viewing optical device 20 Display 8-This paper size applies to Chinese National Standard (CNS) A4 specification (2! 0X297 mm) f Please read the precautions on the back before filling in this Page] Order printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 46 8033 A7 ------- B7___ 5. Description of the invention (6) '--The lens forming part of the microscope 16 receives light from the printed circuit ㈣ ㈣, The operator's attention is directed to the part through the output from the automatic optical inspection station 10, and the automatic optical inspection station appropriately positions the part in the field of view of the microscope 16. According to the present invention, it is better and more convenient In the embodiment, a zoom and Q autofocus video camera assembly ^ forming a microscope component is arranged downstream of the lens to receive light from the lens, and the light is substantially infinitely imaged and thus substantially parallel. A display 20 receives the output from the camera assembly 18 Video, as well as the display of the printed circuit board, which is believed to be defective, and the part is enlarged. Therefore, the operator can decide whether the defect is an actual defect or a false alarm. According to a preferred embodiment of the present invention, the camera assembly 18 is preferably a new force model FCB-1X47P which provides zoom and auto-air function. The display 20 may be any suitable resolution display such as model pVM-14M4E 14 & quot Xinli color video monitor. Now refer to FIGS. 2A and 2B, which are simplified explanatory diagrams of the specific embodiment of the system of FIG. 1. As shown in FIG. 2A, the printed circuit board 1 4 of interest 1 7 The 'view through lens' lens is preferably a first stage lens or relay objective lens 22, and then viewed through the eyepiece 24. The light from the eyepiece 24 is received by the camera assembly 18. The camera typically includes its own viewing optics 19 which includes output to a display 20. The preferred relay objective 22 is Carl Zeiss S-plane 74 mm f / 4 lens and the preferred eyepiece is Leitz Wetzlar Periplan GW 6.3 X 3 9 · 7 mm lens. Figure 2B illustrates an alternative embodiment of the present invention, which can be waived * 9-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 2 mm) (谞 Please read the notes on the back before filling This page) \ Install! Τ'Order -------- Therefore-Printed A7 B7 468033 Patent Application No. 8911〇322 by the Consumer Cooperatives of the Ministry of Economy Intellectual Property Co., Ltd. Revised Chinese Manual (November 89) V. Description of Invention (7 ) Turn to "2" and follow the objective lens 2 2 and use the infinite correction objective lens 3 4. The printed circuit board 14 is substantially placed on the focal plane of the infinity-corrected objective lens 34 to form a substantially infinite image ^ The image formed by the infinity-corrected objective lens 34 can be viewed directly by the camera assembly 18, but viewing optics must be used 1 9. In the specific embodiment of FIG. 2B, since there is no relay objective lens 22, the microscope 16 needs to be placed far closer to the printed circuit board 14 than the specific embodiment of FIG. 2A. Reference is now made to Figs. 3A and 3B 'which are simplified optical illustrations of the specific embodiment of Figs. 2A and 2B, respectively. Referring to FIG. 3A, it can be seen that the focal point of the relay objective lens 2 2 is F 1, and it is preferably separated from the printed circuit board 4 by a distance of about 148 mm. The eyepiece 24 is preferably spaced 187.7 mm from the relay objective lens 22, and its focus indication is F2. Note that the relay objective 2 2 is located at a distance of 2 X FI from the viewing plane 2 of the printed circuit board. 4 The focus F 2 of the eyepiece 2 4 adjacent to the relay objective 2 2 is located at 22 2 XF from the relay objective. i distance. It should be understood that the relay objective lens 22 may be replaced with any suitable objective lens ‘the objective lens is operable to form an intermediate image near the focal plane f 2 of the eyepiece 24’ and whether such intermediate image may be magnified. Figure 3A also illustrates the viewing optics 19 and the CCD focal plane 28 of the camera assembly 18 (Figure 2A). The focal length of the viewing optical device 19 is denoted as F3. The focal length ratio of the viewing optics 19 and the eyepiece 24 is preferably 2-3 times larger than the focal plane 28. Referring to FIG. 3B, it can be seen that the infinity-corrected objective lens 3 4 has its focus shown at ρ · 4, and is preferably separated from the printed circuit board 1 4 by the focal length f 4 distance = FIG. 3 B also illustrates the viewing optics 3 of the camera assembly 丨 8 as an example. 6 and CCD focal plane 3 8. It is preferable that the focal distance ratio between the viewing optical device 36 and the objective lens 34 is 2 to 3 times the magnification at the focal plane 38. -10- This paper size applies to China National Standard (CNS) A4 (210X297). ≪ Please read the precautions on the back before filling this page)

-—^1 ^^^1 —— - , r HI n^i ^^^1 Hi ' ^^^1 1 - - I ir------1^1. 經濟部中央標準局男工消費合作社印製-— ^ 1 ^^^ 1 ——-, r HI n ^ i ^^^ 1 Hi '^^^ 1 1--I ir ------ 1 ^ 1. Consumption by Male Workers, Central Bureau of Standards, Ministry of Economic Affairs Printed by a cooperative

d68〇33 五、發明說明(8 ) 須了解雖然已經特別就電路檢視装置内容説明本發明’ 但本發明同等可應用至任何其它類型之視訊顯微鏡用途、 系統及方法。 業界人士 了解本發明非僅限於前文特別顯示及説明。反 而本發明之範圍包括前述各種特色之組合及次組合以及業 界人士研讀本説明書時顯然“非屬先前技術的多種修改 及變化。 <請先閲讀背面之注意事項再填寫本頁) 裝-----.---訂----- 線, 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用t國國家標準(CNS)A4規格(210 X 297公釐)d68〇33 V. Description of the invention (8) It should be understood that although the present invention has been described specifically with regard to the contents of the circuit inspection device, the present invention is equally applicable to any other types of video microscope uses, systems, and methods. Those skilled in the art understand that the present invention is not limited to the foregoing special display and description. Instead, the scope of the present invention includes the combinations and sub-combinations of the aforementioned various features, and apparently "a variety of modifications and changes that are not part of the prior art." Please read the precautions on the back before filling out this page). ----.--- Order ----- Online, printed by the Consumers' Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs, this paper is printed in accordance with National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

A8B8C8D8 4 6 8 〇 3 3 六、申請專利範圍 1 · 一種電路檢視系統,包含: 一透鏡可操作而實質上A 、 ‘·,、限成像接收自一電路咸J01趣 部份之光; ^ -變焦視訊攝影機總成可接收來自透鏡 成像之光;以及 、顯V S可_作而接收由該變焦視訊攝影機總成輸出 之一視訊以及顯示—感興趣部份之纟大影像。 2.如申凊專利範圍第i項之電路檢視系統,也包含—第一 級透知可操作而觀視該感興趣部份以及聚焦纟自該部份 之光至.該透鏡之焦面。 3·如申#青專利範圍第2項之電路檢視***,其中該第_級 透鏡爲一中繼透鏡可操作而提供一電路之感興趣部份之 未放大影像。 4.如申凊專利範圍第2項之電路檢視系統,其中該第—級 透1¾爲一物鏡可操作而提供一電路之感興趣部份之放大 影像。 5‘如申請專利範圍第丨項之電路檢視系統,也包含—定位 器"T知作而疋位該電路使感興趣部份可經由該透鏡觀 視。 6. 如申請專利範圍第5項之電路檢視系統,其中該*** 可由接收自一自動光學檢視系統之辨識認爲可能涵括瑕 戚之該電路區的輸出操作。 7. 如申請專利範圍第2項之電路檢視系統,也包含〜定位 器可操作而定位該電路,因此感興趣部份可經由該第— -12 本紙張尺錢財國國家規格(21〇 _χ·297公爱) (請先閱讀背面之注意事項再填寫本頁) ,^------ΓII..訂---------線, 經濟部智慧財產局員工消費合作社印製 46Θ033 B8 Cfi 一 --------- 六、申請專利範圍 --- 級透鏡觀視。 8_如申叫專利範圍第7项之電路檢視系統,其中該定 可由接收自—自動光學檢視系統之辨識認爲瑕 疵之該電路區的輸出操作。 括瑕 9.如申:專利範圍第3項之電路檢視系統,也包含〜定位 器可4果作而定位^ζτ v* , 心u邊电路,因此感興趣部份可經由該中繼 透鏡觀視。 ' 10.,申凊專利範圍第9項之電路檢視系統,其中該*** 可由接收自一自動光學檢視系統之辨識認爲可能涵括瑕 疫之該電路區的輸出操作。 11. 一種電路檢視系統,包含: 一透鏡可操作而實質上無限成像接收自一電路感興趣 部份之光; 自動對焦視訊攝影機總成可接收來自透鏡之實質上 無限成像之光;以及 -顯示器可操作而接收由該自動對焦視訊攝影機輸出 的視訊以及顯示電路感興趣部份之自動對焦影像。 12. 如申請專利範圍第1丨項之電路檢视***,也包含一第一 級透鏡可操作而觀視該電路感興趣部份以及聚焦來自該 邵份之光至該透鏡之焦面。 13. 如申請專利範圍第1 2項之電路檢视系統,其中該第一級 透鏡爲一中繼透鏡可操作而提供一電路之感興趣部份之 参放大影像。 14. 如申請專利範圍第1 2項之電路檢视***,其中該第—級 -13- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) I〆.-' -----.1----訂------- -— . f靖先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 Α8 Β8 C8 D8 六、申請專利範圍 級透鏡為一物鏡可操作而提供一電路之感興趣部份之放 大影像。 15.如申請專利範圍第11項之電路檢視系統,也包含一定 位益可操作而定位該電路使感興趣部份可經由該透鏡觀 視。 16·,申請專利範圍第15項之電路檢視系統,其中該定位 器可由接收自一自動光學檢视系統之辨識認為可能涵括 瑕疵之該電路區的輸出操作。 17.如申請專利範圍第丨2項之電路檢视系統,也包含一定 位器可操作而定位該電路,因此感興趣部份可經由該第 一級透鏡觀視。 申請專利範園第17項之電路檢視系統,其中該定位 器可由接收自一自動光學檢视系統之辨識認為可能涵括 瑕疵之該電路區的輸出操作。 19. 如申請專利範園第丨3項之電路檢视系統,也包含一定 位器可操作而疋位該電路,因此感興趣部份可經由該中 繼透鏡觀視。 20. =申請專利範圍第19項之電路檢视系統,其中該定位 器可由接收自自動光學檢视系統之辨識認為可能涵括 瑕疵之該電路區的輸出操作。 21. —種電路檢視系統,包含: 一透鏡可操作而實質上無限成像接收自一電路感興趣 部份之光; 一變焦與自動對焦视訊攝影機總成可接收來自透鏡之 -14- (請先閱讀背面之注意事項再填寫本頁) 取_丨--------'•訂----I !線 T 經濟部智慧財產局員工消費合作社印製 Μ 公 7 9 2 X ο ΙΑ f\ T r: yΊ, J \ 丁 I I 【 468033 A8 B8 C8 ___ D8六、申請專利範圍 經濟部智慧財產局員工消費合作社印製 實質上無限成像之光;以及 一顯示器可操作而接收由該變焦與自動對焦視訊攝影 機輸出炙一視訊以及顯示感興趣部份之放大影像且經 動對焦影像。 < 及如申請專利範圍第2 1項之電路檢视系統,也包含—第 —級透鏡可操作而觀視該感興趣部份以及聚焦來自該部 份之光至該透鏡之焦面。 23·如申請專利範圍第2 2項之電路檢視系統,其中該第一 級透鏡為一中繼透鏡可操作而提供一電路之感興趣部份 之未放大影像。 24. 如申請專利範圍第2 2項之電路檢视系統,其中該第一 級透鏡為一物鏡可操作而提供—電路之感興趣部份之放 大影像。 25. 如申請專利範園第2 i項之電路檢视系統,也包含一定 位器可操作而定位該電路使感興趣部份可經由該透鏡觀 视。 沉如申請專利範園第25項之電路檢視系統,其中該定位 器可由接收自一自動光學檢视系統之辨識認為可能涵括 瑕施之該電路區的輸出操作5 27.如申請專利範園第22項之電路檢視系統,也包含—定 仫器可操作而定位該電路,因此感興趣部份可經由該第 一級透鏡觀視。 申請專利·範圍第27項之電路檢視系統,其中該定位 器可由接收自一自動光學檢视系統之辨識認為可能涵括 -15-A8B8C8D8 4 6 8 〇3 3 6. Scope of patent application1. A circuit inspection system, including: a lens operable to substantially A, ',, and limit imaging received from the interesting part of a circuit J01; ^- The zoom video camera assembly can receive light from the lens for imaging; and, the display VS can work to receive one of the videos and displays output by the zoom video camera assembly—a large image of the part of interest. 2. If the circuit inspection system of item i of the patent application scope also includes-the first-level transparent operation is available to view the part of interest and focus the light from that part to the focal plane of the lens. 3. The circuit inspection system of item 2 of the patent scope of Rushen #qing, wherein the _ stage lens is an relay lens operable to provide an unmagnified image of an interesting part of the circuit. 4. The circuit inspection system according to item 2 of the patent application, wherein the first stage lens is operable to provide an enlarged image of an interesting part of the circuit. 5 ‘The circuit inspection system of item 丨 of the scope of patent application also includes a locator " T known operation, and the circuit is positioned so that the part of interest can be viewed through the lens. 6. If the circuit inspection system of item 5 of the patent application scope, wherein the positioner can be recognized by an automatic optical inspection system, it is considered that the output operation of the circuit area may include defects. 7. If the circuit inspection system of the second item of the scope of the patent application also contains ~ the positioner can be operated to locate the circuit, so the part of interest can be passed through the first -12 paper rule of the country of wealth (21〇_χ · 297 public love) (Please read the precautions on the back before filling out this page), ^ ------ ΓII .. Order --------- line, printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs System 46Θ033 B8 Cfi I --------- 6. Scope of patent application --- Class lens viewing. 8_ If the application is called the circuit inspection system of item 7 of the patent scope, which can be received by the automatic optical inspection system to identify the output operation of the circuit area that is considered to be defective. Included flaws 9. If applied: The circuit inspection system of item 3 of the patent scope also includes a locator that can be positioned for 4 results ^ ζτ v *, the heart u side circuit, so the part of interest can be viewed through the relay lens See. '10. The circuit inspection system of claim 9 in the patent scope, wherein the positioner can be operated by the output of the circuit area identified by an automatic optical inspection system as being likely to include defects. 11. A circuit inspection system comprising: a lens operable for substantially infinite imaging receiving light from a portion of interest of a circuit; an autofocus video camera assembly capable of receiving substantially infinite imaging light from a lens; and a display It is operable to receive the video output by the autofocus video camera and the autofocus image of a portion of interest of the display circuit. 12. For example, the circuit inspection system for patent application No. 1 丨 also includes a first-level lens that can be operated to view the interested part of the circuit and focus the light from the Shao Fen to the focal plane of the lens. 13. For the circuit inspection system according to item 12 of the patent application scope, wherein the first-level lens is a relay lens operable to provide a reference magnified image of an interesting portion of the circuit. 14. If you apply for the circuit inspection system of item 12 in the scope of patent application, where the level-13-this paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) I〆.- '- ---. 1 ---- Order ------- ---. F Jing first read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Α8 Β8 C8 D8 VI. Application The patent range lens is an objective lens that can be operated to provide a magnified image of an interesting portion of a circuit. 15. If the circuit inspection system of item 11 of the patent application scope also includes a certain position, the circuit can be positioned so that the part of interest can be viewed through the lens. 16. The circuit inspection system according to item 15 of the patent application scope, wherein the positioner can be operated by an output of the circuit area identified by an automatic optical inspection system as being likely to include a defect. 17. For example, the circuit inspection system for item 2 of the patent application scope also includes a certain positioner that can be operated to locate the circuit, so the part of interest can be viewed through the first-level lens. The circuit inspection system of the patent application No. 17 in which the positioner can be operated by the output of the circuit area identified by an automatic optical inspection system that may be considered to include defects. 19. For example, the circuit inspection system of Item 3 of the patent application park also contains a certain bit that can be operated to position the circuit, so the interested part can be viewed through the relay lens. 20. = Circuit inspection system of the scope of application for patent No. 19, wherein the positioner can be operated by the output of the circuit area recognized by the automatic optical inspection system as being likely to include defects. 21. —A circuit inspection system comprising: a lens operable for virtually infinite imaging to receive light from a portion of interest of a circuit; a zoom and autofocus video camera assembly capable of receiving -14 from the lens (please (Please read the notes on the back before filling this page) Take _ 丨 -------- '• Order ---- I! Line T Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs Consumer Cooperatives M Public 7 9 2 X ο ΙΑ f \ T r: yΊ, J \ 丁 II [468033 A8 B8 C8 ___ D8 VI. Patent application scope Intellectual Property Bureau of the Ministry of Economic Affairs employee consumer cooperative prints virtually unlimited imaging light; and a display is operable to receive the light from the The zoom and autofocus video camera outputs a superb video and displays an enlarged image of the part of interest and moves the focused image. < and the circuit inspection system of item 21 of the scope of patent application, which also includes a first-order lens operable to view the portion of interest and focus the light from the portion to the focal plane of the lens. 23. The circuit inspection system according to item 22 of the patent application scope, wherein the first-stage lens is a relay lens operable to provide an unmagnified image of an interesting portion of the circuit. 24. For example, the circuit inspection system of the 22nd patent application scope, wherein the first-level lens is an objective lens operable to provide an enlarged image of an interesting part of the circuit. 25. If the circuit inspection system of item 2 i of the patent application park also includes a certain positioner that can be operated to locate the circuit so that the part of interest can be viewed through the lens. Shen Ru's patent application for the circuit inspection system of the Fanyuan Item 25, wherein the positioner can be recognized by an automatic optical inspection system that the output operation of the circuit area that may include flaws 5 27. Such as the patent application Fanyuan The circuit inspection system of item 22 also includes-the fixer can be operated to locate the circuit, so the part of interest can be viewed through the first stage lens. Patent application · Scope 27 circuit inspection system, in which the positioner can be recognized by the identification received from an automatic optical inspection system and may include -15- (請先閱讀背面之注意事項再填寫本頁) '-^---------^訂· 4' 4 6 8033 A8B8C8D8 六、申請專利範圍 瑕郵之該電路區的輸出操作。 29. 如申請專利範圍第23項之電路檢视系統,也包含—定 位器可操作而定位該電路,因此感興趣部份可經由該中 繼透鏡觀視。 30. 如申請專利範園第29項之電路檢視系統,其中該定位 器可由接收自-自動光學檢視系統之辨識認為可能涵括 取麻之#亥電路區的輸出操作。 31. -種檢m包括-透鏡可操作而實質±無限成像接 收自-感興趣區之光變焦及/或自動斜焦視訊攝影 機總成接收來自該透鏡之實質上無限成像之光’及一顯 示器可操作而接收一由該變焦及/或自動對焦视訊攝影 機輸出的视訊以及顯示一感興趣區之放大影像。 (請先閱讀背面之注意事項再填寫本頁) :._.',衣--------訂---------綠 Ji_ 經濟部智慧財產局員工消費合作杜印製 -16- 本纸張义度適用中國囤家標準(CNS)A4規格(210 X 297公釐)(Please read the precautions on the back before filling this page) '-^ --------- ^ Order · 4' 4 6 8033 A8B8C8D8 VI. Patent Application Scope The output operation of this circuit area. 29. For example, the circuit inspection system of the scope of application for patent No. 23 also includes-the positioner can be operated to locate the circuit, so the interested part can be viewed through the relay lens. 30. For example, the circuit inspection system of the patent application No. 29, wherein the positioner can be recognized by the automatic optical inspection system that it may include the output operation of fetching the line of #HI circuit area. 31.-Specimen inspection includes-lens operable with substantial ± infinity imaging received from-zoom and / or autofocus video camera assembly of the region of interest receiving substantially infinite imaging light from the lens' and a display Operated to receive a video output from the zoom and / or autofocus video camera and display an enlarged image of a region of interest. (Please read the precautions on the back before filling out this page): ._. ', Clothing -------- order --------- Green Ji_ Intellectual Property Office of the Ministry of Economic Affairs, Consumer Consumption Du Yin -16- The meaning of this paper is applicable to China Store Standard (CNS) A4 (210 X 297 mm)
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US6781687B2 (en) 2002-09-26 2004-08-24 Orbotech Ltd. Illumination and image acquisition system
US7203355B2 (en) 2002-12-24 2007-04-10 Orbotech Ltd. Automatic optical inspection system and method
US7355692B2 (en) 2004-03-05 2008-04-08 Orbotech Ltd System and method for inspecting electrical circuits utilizing reflective and fluorescent imagery
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US5741171A (en) * 1996-08-19 1998-04-21 Sagitta Engineering Solutions, Ltd. Precision polishing system
US5966677A (en) * 1997-02-28 1999-10-12 Fiekowsky; Peter J. High accuracy particle dimension measurement system
US5912735A (en) * 1997-07-29 1999-06-15 Kla-Tencor Corporation Laser/white light viewing laser imaging system
US6292306B1 (en) * 1999-05-19 2001-09-18 Optical Gaging Products, Inc. Telecentric zoom lens system for video based inspection system

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