TW466320B - Microcombustor and combustion-based thermoelectric microgenerator - Google Patents

Abstract

A generally toroidal counterflow heat exchanger is the main element of a combustor that operates at a micro scale. The combustor includes a central combustion region with openings to a reactant gas channel and an exhaust gas channel. The reactant channel and exhaust channels are coiled around each other in a spiral configuration that reduces heat loss. An electric current microgenerator is similar and also includes a thermoelectric active wall composed of n-type and p-type thermoelectric elements as part of a channel wall of the microcombustor. The thermoelectric active wall includes fins configured to increase the temperature differential across the thermoelectric elements relative to the temperature difference between the thermoelectric elements and the reactant and exhaust gases. A method of monolithically fabricating such microdevices by electrodepositing multiple layers of material is also provided.

Description

46 63 2 〇 五、發明說明（I ) 第90100330號修正頁 修正日期：90年8月 B7 相關申請案 本案請求美國臨時專利申請案第6〇/175s 154申請曰 2000年1月7曰之優先申請權，其揭示併述於此以供參考。 發明領域 概略而言本發明係有關以極小規模發電之裝置，特別 係有關以逆流熱交換器燃燒器為基礎之熱電發電氣。 背景 眾所週知使用燃燒過程用於發電可獲得比較使用電池 之無數優點，此等優點係就每單位質量之能量儲存以及就 每單位容積之發電量而言，即使考慮於燃燒過程由熱能換 成電能之換能效益亦較優異》例如碳氯燃料提供能量儲存 密度為40至50百萬焦耳/公斤，而即使近代離子電池也僅能 提供0.4百萬焦耳/公斤。如此即使於由熱能至電能之換能 效率為5% ，碳氩燃料仍可提供比電池高5倍的能量儲存密 度。又廢物主要為二氧化碳及水’相較於電池的廢物為毒 性金屬。此外，燃燒裝置之每單位質量或容積之發電率比 較其他使用化學反應例如燃料電池之奇數高數次冪幅度。 又石反氫燃料相對廉仏、易得、容易儲存，且比較電池具有 更長的儲存壽命。此外，燃燒驅動裝置可使用多種習知碳 氫燃料而無需做任何前處理。 儘管有此等優點’將燃料能轉成電能的燃燒過程尚未 重視可貫際用於小型裝置例如峰巢式電話以及其他目前仰 賴電池之可攜式電子設備供電為實際可行。大半小規模燃 燒之辦法係使用大型燃燒引擎縮小規模的小型引擎，如 本紙張尺度適用中國13家標準(CNS)八丨規格（210 ^ 297公爱厂 '一' --- -4 - --------------^衣---------訂*---I ---1 I - * * (請先satt背面之注意事項再堉莴本頁) 經濟部智慧財產局員工消費合作社印制^ 經-即^殳^產局t ..費- A 7 _ B7_ 五、發明說明（2 ) 微型旋轉式；王寇（Wankd )引擎、自甴活塞引擎及為燃氣輪 機引擎。俚當以微型規模利用時，此等辦法有多項困難= 其中一項最根本的限制以微型規模燃燒的問題為當燃燒室 的維度過+時甴於熱喪失造成焰淬熄=用於大氣壓下之化 學計算量的烴-空氣混合物，可存在的燃燒罜最小維度於燃 燒室壁處於大氣壓丁時估計為約2毫米=此外即使不會發生 焰之淬熄，於較小型規模下煞損失及摩擦耗損逐漸變重 要.原因在於燃燒放熱如此功孟的輸出隨著？：擎容楕^ 照比例縮小，但熱損失及摩擦耗損係隨表面積而成比例變 V-=46 63 2 05. Description of the invention (I) No. 90100330 Amendment page Revision date: August 1990 B7 Related applications This application requests US Provisional Patent Application No. 60 / 175s 154 Application priority January 7, 2000 The right to apply is disclosed and described here for reference. FIELD OF THE INVENTION The present invention relates generally to a device for generating electricity on a very small scale, and more particularly to a thermoelectric generator based on a countercurrent heat exchanger burner. Background It is well known that the use of combustion processes for power generation can obtain the numerous advantages of using batteries in comparison. These advantages are in terms of energy storage per unit mass and power generation per unit volume, even considering the conversion of thermal energy to electrical energy in the combustion process. The energy conversion efficiency is also excellent. For example, chlorofuel provides energy storage density of 40 to 50 million joules / kg, and even modern ion batteries can only provide 0.4 million joules / kg. Thus, even if the conversion efficiency from thermal energy to electrical energy is 5%, carbon-argon fuel can still provide 5 times higher energy storage density than batteries. The waste is mainly carbon dioxide and water. Compared to the waste of batteries, it is a toxic metal. In addition, the power generation rate per unit mass or volume of the combustion device is higher by an order of magnitude than other odd numbers using chemical reactions such as fuel cells. The anti-hydrogen fuel is relatively cheap, easy to obtain, and easy to store, and has a longer storage life than batteries. In addition, the combustion drive can use a variety of conventional hydrocarbon fuels without any pretreatment. Notwithstanding these advantages, the combustion process that converts fuel energy into electrical energy has not paid much attention to the practicality of powering small devices such as Peak Nest phones and other portable electronic devices that currently rely on batteries. Most of the small-scale combustion methods are to use large combustion engines to reduce the size of small engines. If this paper is scaled to 13 Chinese Standards (CNS) eight 丨 specifications (210 ^ 297 Gongai Factory 'One') --- -4-- ------------ ^ 衣 --------- Order * --- I --- 1 I-* * (please note the precautions on the back of satt before you lick this page) ) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs ^ Jing-namely ^ 殳 ^ Production Bureau t .. Fees-A 7 _ B7_ V. Description of the invention (2) Miniature rotary type; Wangkd engine, self-propelled piston The engine is a gas turbine engine. 俚 When used on a micro scale, these methods have multiple difficulties = one of the most fundamental limitations is the problem of micro scale combustion as flame quenching when the dimensions of the combustion chamber are over + due to heat loss Extinguish = Stoichiometric amount of hydrocarbon-air mixture used at atmospheric pressure. The smallest dimension of combustible gas that can exist is estimated to be about 2 mm when the combustion chamber wall is at atmospheric pressure. Also, even if flame quenching does not occur, it is smaller Under the scale, the braking loss and friction loss become more and more important. The reason is that the combustion exotherm so the output of work and energy follows ?: Reduced, but heat loss and friction loss based with a surface area varying in proportion V- =

I W 如此仍然需要一種有效的微型規糢燃燒器‘其可在燃 燒過程周於微型規模低功率系統例π微電機系統（MEMS) 裝置以及可攜式電子裝置倒如個人组織器、膝上型電腦、 及無線電話發電。 概述 概略複盎面逆流熱交換器構成以微型規模操作的燃燒 器的基礎。微發電器以頮似旦包括一甴熱電元件組成的熱 電活性璧作為微燃堍g之通道璧之部件=熱交換器係配置 成平行複*面轉軸的殽面·有一命央燃燒區附有反應氣體 通道及廢棄通道的開口。反應物通道及廢棄通道係彼此盤 棬且由通道壁隔開因此當發電氣#作時，於熱交換器之 3部之通道璧之一面係接钥反應物氣玆 '而另—面係接觸 廢氣' 排¢ : 避免惮燒器之熱耗損旦可預熱反應物f 體微喚項器具右發電以妗的用ί£巧谨需要極+量熱量 ^.-¾11貨--.-¾5.項再填 本百 > -V ---IW still needs an effective micro-scale burner, which can be better than the micro-scale low-power system during the combustion process, such as micro-electromechanical system (MEMS) devices and portable electronic devices such as personal organizers, laptops, etc. Computers and wireless phones generate electricity. Overview A rough-faced countercurrent heat exchanger forms the basis of a burner that operates on a microscale. The micro-generator uses a thermoelectric activity consisting of a thermoelectric element as a channel for micro-combustion. The component of the heat exchanger is a convoluted surface arranged in parallel with a complex surface and a rotating shaft. There is a life-center combustion zone attached Openings for reaction gas channels and waste channels. The reactant channel and the waste channel are intertwined with each other and separated by the channel wall. Therefore, when the electrical operation is performed, one side of the channel in the three parts of the heat exchanger is connected to the reactant gas, and the other is in contact with the other side. Exhaust gas exhaust: Avoid the heat loss of the burner. You can pre-heat the reactant f body micro-calling device to generate electricity for the use of it. Coincidentally, it requires extreme + amount of heat ^ .- ¾11 goods --.- ¾-5. Refill the hundred items > -V ---

46 63 2 Ο 五、發明說明（3 ) 微發電器包括一反應物氣體入口於熱交換器外部且於 反應物氣體通道連通’以及一廢氣埠口於熱交換器外部且 與廢氣通道連通。一點火器***括於熱交換器内部。熱電 材料係電連結至微發電器外部。微發電器之組成結構材料 為導電金屬。電沉積鉑為有用的結構材料。若干配置中， 微發電器之結構材料提供熱電元件與微發電器外部間的電 連接。 熱電活性壁係由η-型導電熱電材料及p-型導電熱電材 料以及導熱及導電材料組成的散熱片組成。散熱片係配置 成相較於熱電元件與反應物及廢氣氣體間之溫差'提高跨 熱％元件之溫差。散熱片可為T-型’具有一底部及一頂部 且係配置成各頂部分隔n-型元件及厂型元件，而頂部係延 伸入反應物通道及廢氣通道。 微發電器可交替包括一分隔璧緊鄰配置於熱交換器之 二複區面半部間。若干配置中，熱交換器内部之點火器包 括電阻元件’其係經由分隔壁之導體而連結至外部電源。 根據本發明之另一特徵方面，提供一種製造以電沉積 多層材料為基礎之熱電微發電器或微燃燒器之方法。該方 法包括使用包含彈性體附著固定於電極之罩蓋而以電化學 方式沉積保護性材料，使用包含彈性體附著固定於撐體及 一分開電極之罩蓋而以電化學方式沉積結構材料，以及未 使用罩蓋而全面使電沉積熱電材料。於沉積各層後，結構 材料被去除而形成發電器。另外，結構材料及熱電材料沉 積順序可顛倒。本發明也包括選擇性電沉積材料用之無陽 本纸張財目目家榫；MCNS)A4規格（21G X 297 --------------裝--- (請先«讀背面之;!*事項再瑱寫本頁) 訂- ，線 經-部智慧財產局員工消費合作社印製 五、發明說明（ A； B； 極革蓋，罩蓋包A k 。圖k化体性體附著固定於穿孔非電 體。 β 圖式之簡蕈說明 第i a圖為根據承發明之一具體實施例之複區面然燒器 除，見圖以及第〖b團為通過平行複區面輯軸平面之燃 燒器之剖面圏。 τ _ ϋ為根據本發明之―具體實施例之辨燒器之頂視 圖= 第3圖為含括於根據本發明之-具趙實 施例之如第2圖 之轉’埯器之分隔壁： 器 第4a圖為根據本發明 之一具體實施例包括一環形點火 (請先閔汶背面之注惠事項再填寫本頁) ,*"?5"智慧^"^員二"货合.n"i:^; 夂發包為之剖面圖：第4b圖為第4a圖之發電器之示意佈 線_ : ♦弟5圖為根據本發明之一具體實施例之含括於發電器 _ , T -子形散熱片之熱電活性壁之剖面圖。 第6a-6i囫顯示根據本發明之具體實施例製造發電器 <過程。 第.圊為用於第6a-6il]之無陽極革蓋。 詳鲕說明 _成 複區面—逆-煞交椟ϋ可讓终料—空氣混合物以微型 ％燒；經由含括煞電發電元件作為熱交換器璧之一部 # 4全部.可獲得挺發電器裝置。激型裝置係藉彡維微型 衣4技術於輩晶t法形成.. 複®择燒，器KU)之.d.疤圖顯示於莫丨a圖.以及第丨Λ _ £iT~77^ ---4¾^------^----- ^ 46 63 2 0 A7 B746 63 2 〇 5. Description of the invention (3) The micro-generator includes a reactant gas inlet outside the heat exchanger and communicating with the reactant gas channel 'and an exhaust port outside the heat exchanger and communicating with the exhaust gas channel. An igniter port is included inside the heat exchanger. The thermoelectric material is electrically connected to the outside of the micro-generator. The constituent material of the micro-generator is a conductive metal. Electrodeposited platinum is a useful structural material. In some configurations, the structural material of the micro-generator provides an electrical connection between the thermoelectric element and the exterior of the micro-generator. The thermoelectric active wall is composed of a η-type conductive thermoelectric material, a p-type conductive thermoelectric material, and a heat sink composed of a heat conductive and conductive material. The heat sink is configured to increase the temperature difference across the thermal% element compared to the temperature difference between the thermoelectric element and the reactant and the exhaust gas. The heat sink can be T-type 'with a bottom and a top, and each top is configured to separate the n-type component and the factory-type component, and the top extends into the reactant channel and the exhaust gas channel. The micro-generator may alternately include a partition, which is arranged immediately between the two half halves of the heat exchanger. In several configurations, the igniter inside the heat exchanger includes a resistive element ' which is connected to an external power source via a conductor of the partition wall. According to another characteristic aspect of the present invention, a method of manufacturing a thermoelectric micro-generator or micro-burner based on an electrodeposited multilayer material is provided. The method includes electrochemically depositing a protective material using a cover including an elastomer attached to an electrode, electrochemically depositing a structural material using a cover including an elastomer attached to a support and a separate electrode, and Without using a cover, the electrodeposition of the thermoelectric material is fully performed. After the layers are deposited, the structural material is removed to form a power generator. In addition, the deposition order of structural materials and thermoelectric materials can be reversed. The present invention also includes non-manufactured papers for non-positive paper used in selective electrodeposition materials; MCNS) A4 size (21G X 297 -------------- install --- (please first « Read the back of the page;! * Matters and then write this page) Order-, Printed by the Ministry of Intellectual Property Bureau, Printed by the Consumer Cooperatives of the V. Invention Description (A; B; Polar Leather Cover, Cover Bag Ak. The body is attached and fixed to the perforated non-electric body. The simple diagram of the β pattern is shown in Figure ia, which is a complex area burner according to a specific embodiment of the invention. See the figure and Figure b. The cross section 圏 of the burner in the area plane axis plane. Τ _ ϋ is a top view of the burner according to the specific embodiment of the present invention = FIG. 3 is a diagram included in the embodiment of the present invention. The partition wall of the turning device in Figure 2: The device Figure 4a shows a ring ignition according to a specific embodiment of the present invention (please fill out this page before the note on the back of Min Wen), * "? 5 " Wisdom ^ " ^ 员 二 " 货 合 .n " i: ^; Sectional drawing of a hair bag: Figure 4b is the schematic wiring of the generator shown in Figure 4a _: Figure 5 is based on the present A specific embodiment includes a cross-sectional view of a thermoelectric active wall included in a generator _, T-sub-shaped heat sink. Sections 6a-6i 囫 show a process of manufacturing a generator according to a specific embodiment of the present invention < It is used for the anodeless leather cover of No. 6a-6il]. Detailed description _Into the complex area surface-inverse-sacrifice can make the final material-air mixture burned in micro%; through the inclusion of brake power generation elements as heat One part of the exchanger # 4. All of the generators can be obtained. The exciter type device is formed by the dimensional crystal t-method by using the dimensional micro-coating 4 technology.... Shown in Mo 丨 a. And 丨 Λ _ £ iT ~ 77 ^ --- 4¾ ^ ------ ^ ----- ^ 46 63 2 0 A7 B7

經濟部智慧財產局員工消費合作社印製 五、發明說明（5 ) 圖之暴露截面顯示於第lb圖。燃燒器100之輪廓外型以一般 術語表示稱作為複區面°俗稱為圏餅形的複區面正式定義 為經由一平面封閉曲線以位在曲線之相同平面但未交又曲 線之線為軸旋轉所產生的表面。如此燃燒器丨〇〇通過平行轉 韩平面之截面係由兩部分10a及1 〇b組成，二部分大致彼此 呈鏡像°雖然燃燒器100於第la及lb圖顯示為圓柱想對稱， 換言之於頂視圖’燃燒器丨00顯然為圓形，但此種對稱性及 形狀並非必要。例如燃燒器100之外壁12可非圓形而可有小 平面。如此燃燒器1可於頂視圖呈多種封閉形狀包括印型或 封閉多角形例如三角形、四角形或六角形。外側形狀選擇 係依據製造上的考量決定=燃繞器較佳係由電沉積金屬製 成，容後詳述。因此燃燒器壁為導電性。 燃燒器100包括一中區20 ’其典型係作為燃燒器。反應 物氣體經由反應物氣體埠口 30進入燃燒器100以及流經螺 旋形反應物通道32 ’經由開口 34流入燃燒區2〇 β廢氣經由 開口 36離開燃燒區20且流經螺旋形廢氣通道38至廢氣淳口 40。於燃燒器100之雙重螺旋或所謂的「瑞士捲」構型，各 内部通道壁例如通道壁4 2係接觸於一側於一方向顯示為方 向32a流動的冷反應物氣體以及於另—側接觸於反向38&流 動的熱廢氣。燃燒器100之螺旋型逆流熱交換器配置可有效 免除熱耗損至周圍大氣’熱耗損至周圍大氣對於具有筆直 通道的微燃燒裝置造成嚴重限制《進一步於複區面形狀， 並無暴露的通道末端，暴露的通道末端可能構呈其他幾何 的熱耗損位置。允許如第lb圖所示，進接觸最外匝的撐 本紙張尺度適用中國國家標準（CNS)A·!規格（2】0 X 297公爱） 丨丨 ---------------t--Ϊ ---- ---- I I - --- (請先閲讀背而之沒意事項再填蔦本頁) 8 .^-¾^¾ .^' 產-員 1.:-3. f-,ι!ΐ社 A7 B： 五、發明說明（6 ) 基材15保持充分冷卻而避免受燃燒溫度所傷害。裝置可選 擇性包括隔熱支柱14而進一步將裝置與周圍環境絕緣。 一具截實施例中’微燃燒器係由二類似或完全相同的 —複a: 2 0 5組成其各自類似第丨a圖所示之裁面部分。二部 分組裝在一起、選擇性之分隅壁:no係介於兩半間，如第2 圖之燃燒器200之頂視圖所見。分隔壁主要係由熱及電絕緣 材料製成=使用絕緣分隔’兩丰可電獨立而無需彼此完美 對正=由於兩丰可保持彼此溫暖.故於懋燒器2〇〇之構型之 熱耗損可減至最低’如同完堅360度複區面構型之熱耗損 般。用於此處.概略複區面構造包括具有部分複區面截斷 緊鄰分隔壁之構造、如第2圖所示= 當燃燒器如同燃燒器200包括分隔壁時，分隔壁本身可 用於輔助點火。於一具體實施例中，電阻元件2丨5以及連結 至電阻元件之電引線2 1 6係失置於構成分隔壁2丨〇之一部份 之電絕緣材料2 1 8間，如第3圖所示。電絕緣材料有開口？ 2 〇 對正燃燒區20而將燃燒區暴露於電阻元件，另一項辦法 中’電阻元件包括於任一惻的凸起，火星塞，凸起延伸入 複區面燃燒容積的丰途而輔助點火。 第4 a圊顯示類似第丨b圖之剖面圖.但為另一種點火燃 燒之替代之道。兩度電阻材料例如錄_絡係以半環型形式以 截面22顯示於苐4a圖較诖電阻材料22之整個頂面接觸燃 燒器的導電結構金屬提供點火電流的返回路徑。電阻材 料的反面塗覆有結搆金屬2 3薄層其接觸位於分隔壁的導 體：經此導體艳扣好郜電流..使丐電阻材料丰環圈..可 ---------------裝·--------訂--------- 線 (請-"讀背面之注竟事項再填寫本1>Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (5) The exposed section of the figure is shown in Figure lb. The outline shape of the burner 100 is expressed in general terms and is called a complex area surface. A complex area surface commonly known as a pie cake is formally defined as an axis that lies on the same plane of the curve but does not intersect with the curve through a plane. Rotate the resulting surface. In this way, the cross section of the burner through parallel to the Korean plane is composed of two parts 10a and 10b, and the two parts are approximately mirror images of each other. Although the burner 100 is shown in the la and lb diagrams as a cylinder, it is symmetrical, in other words, at the top The view 'burner' 00 is clearly circular, but such symmetry and shape are not necessary. For example, the outer wall 12 of the burner 100 may be non-circular and may have a facet. In this way, the burner 1 can have a variety of closed shapes including a printed shape or a closed polygon such as a triangle, a quadrangle or a hexagon in a top view. The selection of the outer shape is determined based on manufacturing considerations. The burner is preferably made of electrodeposited metal, which will be described in detail later. The burner wall is therefore conductive. The burner 100 includes a middle zone 20 'which is typically used as a burner. The reactant gas enters the burner 100 through the reactant gas port 30 and flows through the spiral reactant channel 32 ′ into the combustion zone via the opening 34. The exhaust gas leaves the combustion zone 20 via the opening 36 and flows through the spiral exhaust passage 38 to Exhaust Chunkou 40. In the double spiral or so-called "Swiss roll" configuration of the burner 100, each internal channel wall, such as the channel wall 4 2 is in contact with one side of the cold reactant gas flowing in one direction and shown as direction 32a, and in contact with the other side In the reverse 38 & flowing hot exhaust gas. The spiral counter-current heat exchanger configuration of the burner 100 can effectively avoid heat loss to the surrounding atmosphere. The heat loss to the surrounding atmosphere severely limits the micro-combustion device with straight channels. Further to the shape of the complex area, there is no exposed channel end The end of the exposed channel may constitute a location of heat loss in other geometries. As shown in Figure lb, the size of the paper supporting the outermost turns is applicable to the Chinese National Standard (CNS) A ·! Specifications (2) 0 X 297 public love) 丨 丨 ---------- ----- t--Ϊ ---- ---- II---- (Please read the unintentional matter before filling out this page) 8. ^-¾ ^ ¾. ^ 'PRODUCT- Member 1 ::-3. F-, ι! Ϊ́ 社 A7 B: 5. Description of the invention (6) The base material 15 is kept sufficiently cooled to avoid being hurt by the combustion temperature. The device optionally includes thermally insulating posts 14 to further insulate the device from the surrounding environment. In one embodiment, the 'micro-burner' is composed of two similar or identical-complex a: 2 05, each of which is similar to the cutting part shown in Fig. 丨 a. The two parts are assembled together and the selective dividing wall: no is between the two halves, as seen in the top view of the burner 200 in FIG. 2. The partition wall is mainly made of thermal and electrical insulation materials = using insulation to separate the two yoyo can be electrically independent without perfect alignment with each other = because the yoyo can keep each other warm. Therefore, the heat of the configuration of the burner 2000 The loss can be reduced to the lowest level, just like the heat loss of a complete 360-degree multi-area surface configuration. Used here. The outline multi-zone surface structure includes a structure with partial multi-zone surface cut off immediately adjacent to the partition wall, as shown in Figure 2 = When the burner includes a partition wall like the burner 200, the partition wall itself can be used to assist ignition. In a specific embodiment, the resistive elements 2 and 5 and the electrical leads 2 1 6 connected to the resistive elements are lost between the electrically insulating materials 2 1 8 forming a part of the partition wall 2 1, as shown in FIG. 3. As shown. Are there openings in the electrically insulating material? 〇 Exposing the combustion zone to the resistive element against the positive combustion zone 20, in another approach, the 'resistive element includes any bumps, spark plugs, bumps that extend into the rich area of the complex area and assist in the combustion process. ignition. Figure 4a 圊 shows a cross-section similar to Figure 丨 b, but it is another alternative to ignition combustion. A two-degree resistance material, such as a recording system, is shown in a half-ring shape in section 22 as shown in Figure 4a. The entire top surface of the resistance material 22 contacts the conductive structure metal of the burner to provide a return path for the ignition current. The reverse side of the resistance material is coated with a thin layer of structural metal 2 and it contacts the conductor located on the partition wall: the conductor is brightly buckled and the current is turned on. ------ Equipment ---------- Order --------- Line (Please-" Read the notes on the back side and fill in this 1 >

46 63 2 Ο A7 B7 五、發明說明（7 ) 熱整個半複區面燃燒容積而引發點火。 市售碳氩燃料可用於本微燃燒器。於相對低儲存壓力 及室溫，燃料為液體，但於大氣壓及室溫以氣態為較佳因 而無須進行氣化3有用碳氩燃料例如包括但非限於丁淀、 丙炫及f基乙炔3熱循環燃燒設計可使罔於燃燒器外側不 可燃的反應物昆合物，例如以二氣化碳“釋的丁，院。 典型應用用途中’微燃燒器g己備有微型燃料槽，其中 經由習知閩例如香煙打火機使用之玆類型閥而由大型燃料 褚填裝燃料。典型燃燒之氧化劑為空氣，但其他氧化劑例 如氧氣及氧-空氣品合物也可使用。用於加壓健存之燃料， 未加壓空氣由燃料槽中逸出的氣態燃料之流動量所夾帶， 因此燃料的餹存壓力足夠提供流經微燃燒器所需氣流，此 種配置中’燃料及氧化劑典型於兩種反應物到達燃燒腔室 時單獨藉擴散而徹底浥合a另外特殊設計的構造例如燃料 射出喷嘴也可用於增加混合。 根據本發明之另一特徵方面，經由含括熱電發電元件 作為熱乂換35壁之一部份或全部而形成一種熱電「活性壁」 而形成一種微發電器。熱電活性璧50構成通道壁之一部份 且含括於第4a圖之範例微發電器剖面圖。第4a圖所示熱電 活性壁50係置於第1 a囿標示為6〇的通道璧部分而形成微發 電器。如此直立取向之活性璧元件形狀為筒形或半筒形， 此處直立係由第4 a圖顯示之取向定義。使用此種設計，感 溫熱電材料可經由限制熱電活性壁於較冷的最外通道壁而 用於熱電元件。如第4a圖所示1同時允許夠高溫供於中央 本纸張&度適用中S國家標準（CNS)A4規恪（2】0 X 297公餐} ▼---------------*-- (請先5?頊背*之ds事項再域、芎本頁> -SJ· •線 烴-郜智慧財產局員工消費合作社印^ 10 蹲".-智慧財產局員二消費含^;-;:1夂46 63 2 〇 A7 B7 V. Description of the invention (7) The entire semi-multi-zone surface combustion volume is heated to cause ignition. Commercially available argon fuel can be used in this micro-burner. At relatively low storage pressure and room temperature, the fuel is liquid, but gaseous at atmospheric pressure and room temperature is preferred so no gasification is required. 3 Useful carbon argon fuels include, but are not limited to, butyl butadiene, propane and f-acetylacetylene. The cyclic combustion design can make non-combustible reactant compounds on the outside of the burner, such as Ding, released by carbon dioxide. In typical applications, the 'micro-burner g' has been equipped with a micro-fuel tank, where It is known that, for example, the type of valve used in cigarette lighters is filled with large fuels. The oxidant for typical combustion is air, but other oxidants such as oxygen and oxygen-air compounds can also be used. Fuel for pressurized storage, Unpressurized air is entrained by the flow of gaseous fuel that escapes from the fuel tank, so the fuel storage pressure is sufficient to provide the required gas flow through the micro-burner. In this configuration, 'fuel and oxidant are typically two reactants When it reaches the combustion chamber, it is fully coupled by diffusion alone, and a specially designed structure such as a fuel injection nozzle can also be used to increase mixing. According to another characteristic aspect of the present invention Qe one heat exchange part or all of the wall 35 to form a thermoelectric "reactive walls" A micro power generator to form the thermoelectric generation element as a via encompasses. Thermoelectrically active rhenium 50 forms part of the channel wall and includes a cross-sectional view of an exemplary micro-generator included in Figure 4a. The thermoelectrically active wall 50 shown in Fig. 4a is placed on the part of the channel 囿 marked as 60 in section 1a to form a micro-electric generator. The shape of the active plutonium element in such an upright orientation is cylindrical or semi-cylindrical. Here, the upright system is defined by the orientation shown in Figure 4a. With this design, thermosensitive thermoelectric materials can be used for thermoelectric elements by limiting the thermoelectrically active wall to the colder outermost channel wall. As shown in Figure 4a1, at the same time, allow high temperature for central paper & degree Applicable Chinese National Standard (CNS) A4 regulations (2) 0 X 297 public meal} ▼ --------- ------ *-(please refer to the ds issue of 5 顼 顼 * before the domain, 芎 this page > -SJ · • Hydrocarbons-郜 Intellectual Property Bureau employee consumer cooperative printed ^ 10 squatting " .- Intellectual Property Bureau Member II Consumption Including ^;-;: 1 夂

A/ __ΒΓ___ 五、發明說明（8 ) 第90100330號修正頁 燃燒區燃燒之用3修正日期：9〇年S月 由於螺旋型熱交換器設計，熱電活性壁之一面暴露於 冷反應物氣體流，而另一面暴露於熱廢氣流如第5圖之細 節顯示，熱電活性壁包括η-型導電性熱電材料5 1元件.以 及ρ·型導電性熱電材料52元件以及導熱散熱片53，各活性 壁包括多對Φ聯連結的成對η-型及ρ-型元件。可電沉積之 熱電材料較佳形成為熱電元件例如砝化鉛或二元碲化鉍： 散熱X 5 3係甴金屬製成且用於相對於熱電元件與反應 物及廢氣氣體間的溫差’提高跨熱電元件的溫差3第5圖所 » 示金屬散熱片之概略Τ-字型係由Jean-Pierre Heunai& S η). d e r發展，二人皆屬於噴射推道實驗室員工。Γ -字型散 熱片包括一底部53b及頂部53t，頂部實質上垂直於底部， 底部插置於熱電元件間’而頂部係伸展入一側的反應物通 道，因此反應物於方向3 2a流過頂部。T-字型散熱片頂部5 31 伸至廢氣通道内部ί第5圖右侧）’故廢氣係於方向3 8a流經 頂部。頂部係於實質上平行流動方向3 2 a及3 8a之方向而於 流通的定向3活性壁構型提供一種亊聯連結n _型及P-型熱 電元件之手段，而其極性適當對正因而提供跨各元件之電 壓增高，如此讓裝置之總電壓輸出增至最大。 散熱片含括於熱電活性壁係作為數種用途1第一 ’Γ、 字型金屬散熱片底部作為部不相似的熱電材料間的擴散障 壁以防熱電效率隨時間之經過而劣化’第二且主要.散焦 相對於齊氣與.熱電；rL ’午間之―溫差 從A碎熱 (-先閱-背δ之-.意事項再填寫"頁) ΐ衣------- -線 經濟部智慧財產局員工消費合作社印*'办 46 63 2 0 A7 ---------B7__ 五、發明說明（9 ) 第9〇10〇33〇號修正頁 修正曰期：9〇年8月 維持熱電元件間之高溫差對於整合熱電裝置與微燃燒 而S相當重要。不欲受任何操作理論所限，以下就以傳導 為主控的傳熱而解釋熱電活性壁的構型考量。跨熱電元件 ‘准持*溫差△ τ之問題出現原因在於熱電元件之導熱率. ΚΤΕ典型為約1瓦/米訊氏溫標（w/mK)，該導熱率係遠高於 反應物及廢氣的導熱率’後者典型約為0.03 w/mK。 用於以傳導為主控的傳熱，於低雷諾值操作的微型裝置之 特徵，△丁係與X/kA成比例，此處X為傳導距離以及八為暴 露於傳熱的面積。結果， ^ ΧτΕ^ΚχςΑχΕ 傳導長度以X*w~W以及χτε〜η表示；而暴露於傳熱的 面積係以Aft »片〜Η、Aw〜Y和ATE〜W表示。由於散熱片典 型具有極高導電率，依據金屬而定約為20至100 W/mk，故 以及如此 △ Τα.散*片：△IVu.te: △TtcXu/KuH'-O-.H/KteW， 此處跨散熱片間空氣間隙的傳導可忽略。結果△ Tuft* 片/Δ ΤτΕ〜Χ“ W/H2 。 由 於需要 △丁“肚“/八丁丁石 之值 小，換言之介於氣體與電熱元件間之溫差相對於熱電元件 間之溫差小，故經由增加元件高度Η以及減少元件厚度w 可讓活性壁設計變成最理想化。如此以H : w之筆值大較 為有利。 第4a圖之微發電器設計中’活性壁5〇係垂直取向。較 本紙張尺度通用中@國私標準（CNS)A4規格（2】0 X 297公髮） -------------裝·-------訂--------*線 (請先閱讀背面之注意事項再&寫本頁) . 12 A7 B7 五、發明說明（10 ) 佳用於微發電器之製造技術（容後詳述），係逐層積層裝 置=此點對於減少需沉積於各層上的不同材料數目高度所 需結果導致假設各層為水孕時僅使用電熱材料於垂直璧 面上或使用多片垂直壁’則各壁靣上的η-型及p-型材料的 相對位置需經調整而讓各層僅含有一型材料= 根據本發明之另一特徵方面，熱電材料為複合材料1 包括甴具有低導電率之粒子組成（絕緣）=為了提供最低導 煞至.赴子為多孔或士空：甴於存在有第二項，故煞電元 件具有較低總導熱率' 結果導致跨熱電元件之溫差△ ΤΤΞ 較高3如前文t寸論’需要高值Τ τ Ε _3當絕緣粒子含括於熱 電枯料時也會降低導電孟，此又為使用複合熱電材料之淨 玟益3 撖發電器之電互聯包括連结至裝置外部，係利用由導 電材料構成的發電器以防需要額外的導韹，額外導體難以 於微小規模時整合一體=電互連配置之一例顯示於第4a圖 其包括一負端子1 ί 〇及正端子丨丨5 3經由位於分隔壁2 1 0之電 導體而與正端子i丨5倣接觸：實質上可於暴露於發電器外側 的任何位置與負端子11 0做接觸。 利用第4a圖之丰環型電阻材料22繞線點火器也利用導 電結構壁。如第4b圖之示竟圖所示，外部電源供應器1 20(以 直流電源供應器說明.但可為直流或交流供應器）係連結至 結構金屬23薄層 '於此處接觸分隔璧：此種配置中，部分 發電器結構係作苎發電及點犬3¾電流路徑， 於连士锩5: Μ燒器力 氏通道么可選擇設置架橋1 ρ 裝 ___丁___ 言 智 ir 1 局 費 4、· ::r Μ.. •η , ½ 經濟部智慧財產局員工消費合作社印^4 46632 Ο λ： ---------------- 五、發明說明（ι】） 俾提供機械支撐。架橋元件無法由導電材製成，但可用於 第4a圊配置之發電器。 於絕緣分隔壁分開之二複區面半部組成的微發電器 中，各半部可電獨立。此種配置允許各部分為串聯或並聯 佈線俾視預定用适而訂獲得最大電流或電壓。 於替代具體實施例中，微發電器係由二複區面半部藉 —多孔分隔壁隔開所組成，此處不具有電熱元件之—部份 係用於燃燒，而包括電熱元件之另一部分係用於發電。部 为係排列成來自燃燒器熱廢氣產物被導引跨發電器部分的 電熱元件。 為了獲得比單一微發電器更高的功率位準，可於一共 用基材上製造多部發電器β基材可設置有傳導線跡’其允 許發電器陣列係以電性串聯或並聯配置而調整陣列之輸出 電流及電壓。 本發明之微裝置於若干具體實施例較佳係藉電化學製 法使用預先形成的等形罩蓋由多層薄層材料基層裝置製 造。罩蓋允許選擇性鍍敷結構材料（例如金屬）及稱體或保 護性材料。保護性材料係沉積於結搆元件中間空間以及隨 後被去除。由複區面半栽段製造微發電器有助於去除保護 性材料。用於本微裝置’鉑乃有用電沉積結構金屬，而銅 為有用的保護性材料’其可由鉑結構被選擇性去除。沉積 i白之電化學浴係由日本電鍍工程公司製造且由伊斯恩頌 (Enthone)-OMI以普拉庭納特（P|atina⑴1〇0之商品名出 售’可有利地形成低應力鉑作為結構金屬。其他結構金屬 本纸張又度適用中S國家標準（CNS)A4規格（210 X 297公楚〉 14 . r ^--------^---------^ (請先閱讀背面之注t事項再本頁) 五、發明說明（12 Λ7 B7 ：& 智 it 產 局 "。用於裝置之遠離摔燒區部分.塗覆有防蝕材料如鉑 ”層，鎳w及:其义保護性材料包括鉻、鐵及鋅》 為了形成包括熱電元件组成的活性壁之微發電器，需 ，1積3至：>'三種W4之各層1即结搆金屬、保護性材 =、及Π 土 X ρ·型熱電何料等材料。根據本發明之另一特 徵方面三種料於單層要求使用二H _者為標 準覃蓋由圖樣化彈性體”於陽極組成以及一者為此處所 返之無暘極睡間置蓋_ iAIM)e 使用Amu —層包括三種材料之處理流程顯示於 6a 6h圖〜’印圖.送寺圖說明微發電器於一活性壁附近 一小部份第6a圖包括沉積保護性村料之標準罩蓋壓逗背 基相* 2 5 0，；玄 W 字传 rb 1¾ ιν ,, _βο 革I么、由圖払化怿性體25 2附著於陽極254組 成=於處理泣程中，其G主-4 、 土、何表不疋前沉積之各層=壓迫背向 基材250之等形彈性趙⑸可防止冗積於隨後步驟中結構材 料以及熱電材料_的該等區域：第6b圖中，保護性村 料2 5 6由沉積；’谷嫌π ϋ 、 _ .曰-一〜磧，產生某6c圖所示沉精後的保護 性材料。 其-入結構金屬使用每陽極睡間罩蓋沉積。包括圈 樣化彈性扯262(茶考第ό圖,豈蓋：卜步驟欲沉積熱電材料 位置。圖樣化彈性體巧著於非電極㈣加撐體可如示 •^穿礼„6 w。丁改良.人楕於基枒的均勻度如第圖所， .:冗積浴槽265填補基衫與分㈣極叫間之空間，也填 Α ί Μί若設置時丨的穿j， 花.·.—. . ' '〜忒冱负發電器之主複區面部 穿子L AJM顯十.於ηΐ .…④ ^ k.丨、边说圖·此褸aim將用於製造僅 第 之 向 穿 示 分之 <if.>v>Mi»背面之.ii *事項再填¢:本頁) ^1 €1 11 - i n ^^1 II --A / __ΒΓ ___ V. Description of the invention (8) No. 90100330 Amendment page Combustion zone combustion 3 Amendment date: September 1990 Due to the design of the spiral heat exchanger, one side of the thermoelectric active wall was exposed to the cold reactant gas flow, While the other side is exposed to the flow of hot exhaust gas as shown in detail in Fig. 5, the thermoelectric active wall includes η-type conductive thermoelectric material 51 elements, and ρ · type conductive thermoelectric material 52 elements and heat conducting fins 53, each active wall. Including multiple pairs of Φ-connected pairs of η-type and ρ-type elements. The electrodepositable thermoelectric material is preferably formed as a thermoelectric element such as lead lead or binary bismuth telluride: a heat-dissipating X 5 3 series rhenium metal and is used to increase the temperature difference between the thermoelectric element and the reactant and exhaust gas. The temperature difference across the thermoelectric element 3 Figure 5 »The schematic T-shape of the metal heat sink is developed by Jean-Pierre Heunai & S der.der, both of them are employees of the Jet Tunnel Lab. The Γ-shaped heat sink includes a bottom 53b and a top 53t. The top is substantially perpendicular to the bottom. The bottom is inserted between the thermoelectric elements and the top is extended into one side of the reactant channel. Therefore, the reactants flow in the direction 3 2a. top. The top of the T-shaped heat sink 5 31 extends to the inside of the exhaust gas channel (right side of Fig. 5) 'so the exhaust gas flows through the top in the direction 3 8a. The top is in the direction of substantially parallel flow directions 3 2 a and 3 8 a, and the directional 3 active wall configuration provides a means to couple the n_-type and P-type thermoelectric elements, and its polarity is properly aligned. Provides increased voltage across components, which maximizes the total voltage output of the device. The heat sink contains the thermoelectric active wall system for several purposes. 1st 'Γ, the bottom of the metal metal heat sink is used as a diffusion barrier between different thermoelectric materials to prevent thermoelectric efficiency from deteriorating over time. Mainly, defocusing is relative to Qi and thermoelectricity; rL 'Midday's-the temperature difference is broken from A (-read first-back δ of-. Italian matter, then fill in " page) ΐ 衣 -------- Printed by the Consumers 'Cooperatives of the Intellectual Property Bureau of the Ministry of Online Economy *' Office 46 63 2 0 A7 --------- B7__ V. Description of the Invention (9) Amendment No. 901000330 Date: 9 Maintaining the high temperature difference between the thermoelectric elements in August 〇 is very important for integrating thermoelectric devices and micro-combustion. Without intending to be bound by any theory of operation, the following considers the configuration considerations of thermoelectrically active walls with conduction as the main control of heat transfer. The problem of the cross-thermoelectric element 'quasi-holding * temperature difference △ τ arises from the thermal conductivity of the thermoelectric element. ΚΤΕ is typically about 1 watt / meter temperature scale (w / mK), which is much higher than that of reactants and exhaust gas. The thermal conductivity 'the latter is typically about 0.03 w / mK. The characteristics of micro-devices that are mainly used for conduction-controlled heat transfer and operate at low Reynolds values. The delta system is proportional to X / kA, where X is the conduction distance and eight is the area exposed to heat transfer. As a result, ^ χτΕ ^ ΚχςΑχΕ conduction length is represented by X * w ~ W and χτε ~ η; and the area exposed to heat transfer is represented by Aft »sheet ~ Η, Aw ~ Y, and ATE ~ W. Since the heat sink typically has a very high electrical conductivity, depending on the metal, it is about 20 to 100 W / mk, so and so △ Τα. Scatter: △ IVu.te: △ TtcXu / KuH'-O-.H / KteW Here, the conduction across the air gap between the heat sinks is negligible. Results △ Tuft * sheet / Δ ΤτΕ ～ χ "W / H2. Because the value of △ 丁" / 八 丁丁 石 is small, in other words, the temperature difference between the gas and the heating element is small compared to the temperature difference between the thermoelectric elements, so By increasing the element height 最 and reducing the element thickness w, the active wall design can be optimized. Thus, a large H: w value is more advantageous. In the micro-generator design in Figure 4a, the 'active wall 50' is vertically oriented. Compared with the standard of this paper, it is common in China National Standards (CNS) A4 specifications (2) 0 X 297 public) ------------- install · ------- order --- ----- * line (please read the precautions on the back before & write this page). 12 A7 B7 V. Description of the invention (10) Manufacturing technology for micro-generators (detailed later). Layer-by-layer layering device = this point reduces the number of different materials that need to be deposited on each layer. The required result leads to the assumption that each layer is hydrolyzed using only electric heating materials on the vertical surface or multiple vertical walls. The relative positions of the η-type and p-type materials need to be adjusted so that each layer contains only one type of material = according to another feature of the present invention The thermoelectric material is a composite material. 1 Including 甴 particles with low conductivity (insulation) = in order to provide the lowest conductivity. Go to the hole is porous or Shi Kong: there is a second item in the existence, so the brake element has a lower 'Thermal thermal conductivity' results in a temperature difference across the thermoelectric element △ ΤΤΞ higher 3 as in the previous t inch theory 'requires a high value τ τ _ _3 when the insulating particles are included in the thermoelectric dry material, it will reduce the conductivity, this is the use of composite The net benefit of thermoelectric materials 3 The electrical interconnection of generators includes connection to the outside of the device. A generator made of conductive materials is used to prevent the need for additional conduction. It is difficult to integrate additional conductors at a small scale = electrical interconnection An example of the configuration is shown in Figure 4a, which includes a negative terminal 1 ί 0 and a positive terminal 丨 5 3 through the electrical conductor located at the partition wall 2 1 0 and imitation contact with the positive terminal i 丨 5: can be substantially exposed to power generation Any position on the outside of the device is in contact with the negative terminal 110. The wire wound igniter using the ring-shaped resistive material 22 of Fig. 4a also uses the conductive structure wall. As shown in the diagram of Fig. 4b, the external power supply 1 20 (at DC Supply description. But it can be DC or AC supply) is connected to the thin layer of structural metal 23 'here to contact and separate 璧: In this configuration, part of the generator structure is used to generate electricity and point dogs 3¾ current path, in Lian Shihuan 5: Can you choose to set up a bridge for the LM burner's channel? Ρ Installation ___ Ding ___ Intelligence ir 1 Bureau fee 4, · :: r Μ .. • •, ½ Staff of Intellectual Property Bureau, Ministry of Economic Affairs Consumption cooperative seal ^ 4 46632 Ο λ: ---------------- 5. Description of the invention (ι)) 俾 Provide mechanical support. Bridge elements cannot be made of conductive materials, but can be used for 4a 圊 Configuration of the generator. In a micro-generator composed of two halves of a double partition surface separated by an insulating partition wall, each half can be electrically independent. This configuration allows the sections to be wired in series or in parallel, depending on the intended use, to obtain the maximum current or voltage. In an alternative embodiment, the micro-generator is composed of a two-fold area and a half-area separated by a porous partition wall. Here, the electric heating element is not used. The part is used for combustion and includes another part of the electric heating element. Used for power generation. The section is an electric heating element arranged so that the hot exhaust gas products from the burner are directed across the generator section. In order to obtain a higher power level than a single micro-generator, multiple generators can be manufactured on a common substrate. The β substrate can be provided with conductive traces' which allows the generator array to be electrically connected in series or in parallel. Adjust the output current and voltage of the array. In some embodiments, the microdevice of the present invention is preferably manufactured from a multilayer thin-layer material-based device by using an electrochemical method and a pre-formed cover. The cover allows selective plating of structural materials (such as metal) and scale or protective materials. Protective materials are deposited in the middle space of the structural elements and subsequently removed. Manufacture of micro-generators from a multi-layered surface can help remove protective materials. For this microdevice, 'platinum is a useful electrodeposited structural metal, and copper is a useful protective material', which can be selectively removed from the platinum structure. The electrochemical baths for the deposition of white are manufactured by the Japan Electroplating Engineering Corporation and sold by Enthone-OMI under the trade name Platinat (Patina 100), which can advantageously form low-stress platinum as Structural metals. Other structural metals. This paper is also suitable for China National Standards (CNS) A4 specifications (210 X 297 Gongchu) 14. R ^ -------- ^ --------- ^ (Please read the note on the back, and then this page) 5. Description of the invention (12 Λ7 B7: & Intellectual Property Bureau). It is used for the part of the device away from the burn-in area. It is coated with anti-corrosive material such as platinum " Layer, nickel, and its protective materials include chromium, iron, and zinc. In order to form a micro-generator that includes an active wall composed of thermoelectric elements, it is necessary to have a product of 3 to: > Metal, protective material =, and Π soil X ρ · type thermoelectric materials and other materials. According to another characteristic aspect of the present invention, three materials in a single layer require the use of two H _ as the standard. The composition of the anode and one of the non-poleless sleeping compartment lids returned here_ iAIM) e Using Amu-The processing flow of the layer including three materials is shown in 6a 6h Figure ~ 'print. Send a temple to illustrate the micro-generator near a small part of the active wall Figure 6a includes the standard cover of the protective protective material pressed on the back of the base phase * 2 5 0, Xuan W rb 1¾ ιν ,, _βο leather I, consisting of a graphitized body 25 2 attached to the anode 254 = in the process of processing, its G main -4, soil, and surface are not previously deposited layers = compression back The isotropic elasticity of the base material 250 can prevent these areas from accumulating in the structural materials and thermoelectric materials in the subsequent steps: in Figure 6b, the protective village material 2 5 6 is deposited by; '谷 疑 π 、, _. Said-one ~ 碛, produces a protective material after intensive as shown in Figure 6c. Its-structure metal is deposited using each anode sleeper cover. Including ring-like elastic spring 262 (Tea test figure, Qi Gai: The step is to deposit the thermoelectric material. The patterned elastomer is cleverly placed on the non-electrode. The supporting body can be shown as follows. ^ Dressing „6 w. Ding improved. The uniformity of people on the base is as shown in the figure. ,.: The redundant bath 265 fills the space between the base shirt and the furry pole, and also fills Α ί Μί if you wear it, wear flowers, .....-.. '' ~ 忒 冱 negative hair The face of the main and complex area of the device is L AJM. Ten in η ΐ... ④ ^ k. 丨, the side picture. This 褛 aim will be used to make only the first direction of the display < if. ≫ v > Mi »on the back.ii * Fill in the matter ¢: this page) ^ 1 € 1 11-in ^^ 1 II-

I n I < n ii J~ ί n n n^-eJ» n i n n I n 1 I -¾ 經-部智婪財產局員工消費合作社印製 4 6 63 2 0 a； ______Β7 五、發明說明（13 ) 有單一垂直活性壁的微發電器，而帶有多個圖樣化弹性體 環的AIMs可用於欲製造多面垂直活性壁或一面水平活性 壁而帶有多對熱電元件時。第6d圖之剖面圖含括部分以裁 線S _ S指示。 返回參考流程圖，結構材料如第6e圖所示藉A:[M^ 敷，沉積於表面各區，但由彈性體262保護之中區除外俾製 la第6f圖之包括保護性材料256及結構材料266之構造。最 後熱包材料未使用罩蓋，而於第6g圊使用陽極由沉積 /谷槽2 7:> ,儿積於第6f圖之全體結構上而形成第仙圊之圊 樣=依據特定層而定，將沉積〇_型或p.型熱電材料但較佳 非沉積力型材汁斗’否貝需要頭外的罩蓋步银。然後進行平 面化去除過量結構及熱電材料而製造第6!圖之包括保護性 材料256、結構材料266以及熱電材料276之該層。 另外可變更二種材料的沉積順序。例如於替代方案 中’使用標準罩蓋沉積保護性材料，接著藉AIM革蓋沉積 熱電材料，AIM罩蓋經圖樣化而遮蓋由結構金屬占據位 置，接著為全面性沉積熱電材料。 為了製造如第4a圖所示之包括半環型電組材料22之點 火器，組合前述處理與半導體製造過程。例如已經電沉積 適《層數之後部分保護性材料使用圓樣化抗光蝕劑選擇性 蝕刻去除而界疋經蝕刻的腔穴。電阻材料沉積於蝕刻後之 空腔内且選擇性平面化。然後恢復逐層電沉積處理。 複合熱電材料可用於此處所述全部製造過程。為了製 U複σ熱電材料，第二相之低導電型粒子可於熱材料之 本紙張尺度剌中B S家標準（CNS)A4規格UQ χ孤公爱） 裝---------訂---------線 <請-Mif背面之;ii事項再Ji寫本頁) 16 A7 _ B：_ 五、發明說明（14 ) 電沉積期間共同沉積= 雖然已經就特定材料及結構說明本發明，但此處說明 僅為本發明之應用例。可於如下申請專利範圍界定之本發 明之範圍内對揭示結構及方法（故έ多項調整適應及修改。 請先^tr背*t/;it事項再填芎本頁) 丨裝·-------訂i 11 --1 ^^1 j - 4 1^1 ••Α 智 U 產 局 fI n I < n ii J ~ ί nnn ^ -eJ »ninn I n 1 I -¾ Printed by the Consumers' Cooperatives of the Ministry of Economic Affairs and Intellectual Property Bureau 4 6 63 2 0 a; ______ Β7 V. Description of the invention (13) Yes A micro-generator with a single vertical active wall, and AIMs with multiple patterned elastomeric rings can be used when manufacturing multiple vertical active walls or one horizontal active wall with multiple pairs of thermoelectric elements. The cross-sectional view of Fig. 6d includes the part indicated by the cutting line S_S. Returning to the reference flow chart, the structural materials are deposited by A: [M ^ as shown in Figure 6e and deposited on various areas of the surface, except for the middle area protected by the elastomer 262. The protective materials la and 6f are included in Figure 6f. Construction of structural material 266. Finally, no cover is used for the heat-packing material, but the anode is used for deposition / valley 2 7: > on the 6th layer, and the product is formed on the entire structure of FIG. 6f to form the first sample of the fairy. According to the specific layer, It is determined that a 0-type or p.-type thermoelectric material is to be deposited, but a non-depositing force profile is preferred. A cup of silver outside the head is required. Planarization is then performed to remove excess structure and thermoelectric material to produce the layer in FIG. 6A, which includes protective material 256, structural material 266, and thermoelectric material 276. In addition, the deposition order of the two materials can be changed. For example, in the alternative solution, a standard cover is used to deposit protective material, and then the AIM cover is used to deposit the thermoelectric material. The AIM cover is patterned to cover the position occupied by the structural metal, and then the thermoelectric material is completely deposited. In order to manufacture a lighter including a semi-ring type electric group material 22 as shown in Fig. 4a, the foregoing processing and semiconductor manufacturing processes are combined. For example, some protective materials have been electrodeposited. After the number of layers, some protective materials are selectively etched away using a circular photoresist and the etched cavities are bounded. The resistive material is deposited in the etched cavity and is selectively planarized. The layer-by-layer electrodeposition process is then resumed. Composite thermoelectric materials can be used in all manufacturing processes described herein. In order to make U complex σ thermoelectric materials, the second-phase low-conductivity type particles can be installed in the paper size of the thermal material (in the BS family standard (CNS) A4 specification UQ χ Solitary Love) --------- Order --------- line < please-Mif on the back; ii matters and write this page again) 16 A7 _ B: _ V. Description of the invention (14) Co-deposition during electrodeposition = Although specific The material and structure illustrate the present invention, but the description here is only an application example of the present invention. The disclosure structure and method can be adjusted within the scope of the present invention as defined by the following patent application (so many adjustments are adapted and modified. Please ^ tr back * t /; it matter and then fill in this page) 丨 Installation · --- ---- Order i 11 --1 ^^ 1 j-4 1 ^ 1 •• Α Zhi U Industry Bureau f

J 'Kg?蛘:..隹 規格 46 63 2 0 A7 B7 五、發明說明（15 元件標號對照 烴-部智慧財產局員工"-費合作社印製 l〇a-b.，，部分 12…外側壁 14·..隔熱支桂 15...支撐基材 20...燃燒區 二…電阻材料 23…結構金屬 30…反應物氣體埠t •5 2…反應物通道 32a...方向 34-6...開 口 38…廢氣通道 3 8a...方向 40…廢氣i阜口 50…熱電活性壁 5 1…η型導電性熱電 52…p型導電性熱電材料 53…散熱片 5 3 b. ^.底部 53t···頂部 60…微發電器 100..·燃燒器 11 〇…負端子 Π5·，.正端子 120…外部電源供應器 2 00...燃燒器 2 0 5…半複曲面 2 1 5...電阻元件 21 6…電引線 218·.·電絕緣材料 220”.開口 250...基材 252...圖樣化彈性體 2 5 4...陽極 255…沈積浴槽 2 5 6...保護性材料 262...圖樣化彈性體 263..·非電極撐體 263a...穿孔 264 _ .陽極 265…沈積浴槽 266...結構材料 274...陽極 275...沈積浴槽 276..,熱電材料 本纸張夂度適用中國國家標準（CNS)A4規格（210 * 297公釐） --------------裝--------訂---------線 • - < f Jif先閱項背面之;!.意事項再填驾太頁) 18J 'Kg? 蛘: .. 隹 Specification 46 63 2 0 A7 B7 V. Description of the invention (15 component numbers refer to hydrocarbons-employees of the Ministry of Intellectual Property Bureau " -Fei Cooperative printed 10ab., Part 12 ... outer wall 14 .. Insulation support 15 ... Supporting substrate 20 ... Combustion zone 2 ... Resistive material 23 ... Structural metal 30 ... Reactant gas port t • 5 2 ... Reactant channel 32a ... Direction 34- 6 ... opening 38 ... exhaust channel 3 8a ... direction 40 ... exhaust ifu port 50 ... thermoelectric active wall 5 1 ... n-type conductive thermoelectric 52 ... p-type conductive thermoelectric material 53 ... radiating fin 5 3 b. ^. Bottom 53t ... top 60 ... micro-generator 100 ... burner 11 〇 ... negative terminal Π5 ..., positive terminal 120 ... external power supply 2 00 ... burner 2 0 5 ... half toric 2 1 5 ... resistance element 21 6 ... electrical lead 218 ... electrical insulation material 220 ". Opening 250 ... substrate 252 ... patterned elastomer 2 5 4 ... anode 255 ... deposition bath 2 5 6 ... protective material 262 ... patterned elastomer 263 .. · non-electrode support 263a ... perforated 264 _. Anode 265 ... deposition bath 266 ... structure material 274 ... anode 275. : Deposition bath 276 .. The paper of thermoelectric material is suitable for Chinese National Standard (CNS) A4 specification (210 * 297 mm) -------------- installation -------- order ---- ----- line •-&f; f Jif first read the back of the item;!. And then fill in the page too) 18

Claims (1)

Is 46 63 2 0 夂、申請專利範圍 L 一種微型發電器，包含： 一逆流熱交換器，具有概略複區面外表面以及界定 中區帶有開口至一反應物氣體通道及一廢氣通道，其中 該反應物氣體通道及廢氣通道彼此盤捲且由通道壁隔 開’其中至少部分通道壁包含熱電材料以及導熱散熱 片； 一反應物氣體入口，位於熱交換器之外表面上且與 反應物氣體通道連通； 一廢氣埠口，位於熱交換器外表面上且與廢氣通道 連通：以及 一電連結，係介於熱電材料與發電器外表面間β 2.如申請專利範圍第】項之發電器，其中該熱電材料包含 η-型導電性熱電材料元件以及ρ_型導電性熱電材料元 件。 3 ‘如申請專利範圍第1項之發電器，其中通道壁係由導電 材料組成a 4·如申請專利範圍第3項之發電器，其中導電材料為鉑。 5. 如申請專利範圍第1項之發電器，進一步包含一分隔壁 毗鄰設置於熱交換器之二複區面半部間。 6. 如申請專利範圍第5項之發電器，其中各複區面半部係 彼此電獨立以及二部分係電耦合。 7. 如申請專利範圍苐5項之發電器，進一步包含一點火器 於該發電器内部。 8，如申請專利範圍第7項之發電器，進一步包含一包含 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公芨） -I 11 I 1 I-----裝 _ I--— I I I 訂·------ -- 先閱躓背面之注意事項再填寫本頁) 經濟部智慧財產扃員工消費合作社印ϊ取 19 —D8 經浯部智慧財產局員工消費合作社印欠 六、申請專利範圍 阻元件之點火器於發電器内部'其由該等電阻元件係於 外部電源經由位於分塥壁的導體連結。 9.如申請專利範圍第2項之發電器，其中電沉積η-型導電 性熱電材料元件以及Ρ-型導電性熱電材料元件= 】〇.如申請專利範圍第2項之發電器，其中η-型導電性熱電 材料元件以及ρ-型導電性煞電材料元件進一步包含低 導熱材料顆粒= 1 1,如申請專利範圍第1項之發電器，進一步包含架橋元件 連結通道壁： 12, —種製造一微型裝置之方法 '係經由藉一種方法沉積多 層材料於先前沉積之各層上，該方法包含下列步驟： 提供一第一罩蓋其包含以圖樣化彈性體附著固定 於一電極： 以電化學方式使用第一罩蓋沉積保護性材料； 提供一第二罩蓋包含圖樣化彈性體咐著固定於一 撐體： 以電化學方式使用第二罩蓋以及與第二罩蓋分開 的電極沉積一結構材料：以及 未使用罩蓋而全面性電化學沉積熱電材料。 i 3 .如申請專利範团第丨2項之方法.進一步包含於沉積各層 後去除保護性材料。 如申請專利範圍第！2項之万法，其中保護性材料為銅· 以及結搆材料包含鉑+. ! 5 .…楂經由π ®讀專K Η E第丨：^頊之方法製遌的微型转 規格（21^*297 公釐 Γ „,Λ Γ ~ 1 ------ -----fit ------ ---- I 訂 *------- I <請先閔»背面之注意事項再填寫本頁> 46 63 2 Ο六、申請專利範圍 A8BSC8D8 經濟部智慧財產局員工消費合作社印製 置’其中該微型裝置包含： _逆流熱交換器，具有概略複區面外表面以及界定 中區帶有開口至一反應物氣體通道及一廢氣通道，其中 該反應物氣體通道及廢氣通道彼此盤捲且由通道壁隔 開’其中至少部分通道壁包含熱電材料以及導熱散熱 片； 一反應物氣體入口，位於熱交換器之外表面上且與 反應物氣體通道連通； 一廢氣埠口，位於熱交換器外表面上且與廢氣通道 連通；以及 一電連結’係介於熱電材料與發電器外表面間。 16. 如申請專利範圍苐15項之發電器，其中通道壁之包含熱 電材料及導熱散熱片部分係垂直各層平面取向。 17. 如申請專利範圍苐〗5項之發電器，其中熱電材料元件係 排列成各沉積層 '含有僅具有η_型導電性或僅具有型 導電性之熱電材料元件。 18. —種選擇性電沉積材料之罩蓋，該罩蓋包含一圖樣化彈 性體材料附著固定於一非電極撐體，其中該撐體係經穿 I I I I I I — I 1 — · — ----— — > 1 I------ (請先聞讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 21Is 46 63 2 0 夂, patent application scope L A miniature power generator, comprising: a countercurrent heat exchanger with a rough outer surface of the complex zone and defining a central zone with an opening to a reactant gas passage and an exhaust passage, where The reactant gas channel and the exhaust gas channel are coiled with each other and separated by a channel wall, wherein at least part of the channel wall contains a thermoelectric material and a thermally conductive fin; a reactant gas inlet is located on the outer surface of the heat exchanger and is in contact with the reactant gas. The channel is connected; an exhaust port is located on the outer surface of the heat exchanger and communicates with the exhaust channel: and an electrical connection is between the thermoelectric material and the external surface of the generator β 2. The generator as described in the scope of the patent application] The thermoelectric material includes an n-type conductive thermoelectric material element and a p-type conductive thermoelectric material element. 3 ‘If the generator in the scope of the patent application item 1, the channel wall is composed of a conductive material a 4. If the generator in the scope of the patent application item 3, the conductive material is platinum. 5. For example, the power generator of the first patent application scope further includes a partition wall which is arranged adjacent to the surface of the second half of the heat exchanger. 6. For the generator in the scope of patent application No. 5, wherein the half of each complex area is electrically independent of each other and the two parts are electrically coupled. 7. For a generator with a scope of 5 as claimed in the patent application, further comprising an igniter inside the generator. 8. If the generator of item 7 in the scope of the patent application, it further includes a paper standard applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 cm) -I 11 I 1 I ----- installation_ I --- Order III --------Read the notes on the back of the page before filling out this page) Intellectual Property of the Ministry of Economy 扃 Stamp of Consumer Cooperative Cooperatives ϊ19-D8 Seal of the Employee ’s Cooperative Cooperative of the Ministry of Economic Affairs Intellectual Property Less than six, the patent application scope of the igniter of the resistance element is inside the generator, which is connected by these resistance elements to an external power source through a conductor located on the dividing wall. 9. The power generator according to item 2 of the patent application, wherein the electrodeposited η-type conductive thermoelectric material element and the P-type conductive thermoelectric material element =]. 0. The power generator according to item 2 of the patent application, wherein η The -type conductive thermoelectric material element and the ρ-type conductive brake material element further include particles of low thermal conductivity = 1 1, such as the generator of the patent application item 1, further comprising a bridge element connection channel wall: 12,- The method of manufacturing a micro-device is by depositing multiple layers of material on previously deposited layers by a method that includes the following steps: providing a first cover that includes a patterned elastomer attached and fixed to an electrode: electrochemically The first cover is used to deposit protective material; a second cover is provided that contains a patterned elastomer and is fixed to a support: electrochemically using the second cover and an electrode separate from the second cover to deposit a Structural materials: and comprehensive electrochemical deposition of thermoelectric materials without cover. i 3. The method according to item 2 of the patent application group, further comprising removing the protective material after depositing each layer. Such as the scope of patent application! Two methods, in which the protective material is copper · and the structural material contains platinum +.! 5... The hawthorn is manufactured by the method of π ® reading special K 第 E Article 丨: 顼 遌 micro-turn specifications (21 ^ * 297 mm Γ „, Λ Γ ~ 1 ------ ----- fit ------ ---- I Order * ------- I < Please Min Min» Back Please pay attention to this page and fill in this page > 46 63 2 〇 Six, the scope of patent application A8BSC8D8 printed by the Intellectual Property Bureau of the Ministry of Economic Affairs of the consumer consumer cooperatives, where the micro-device contains: _ counter current heat exchanger, with a rough surface And defining the middle zone with an opening to a reactant gas channel and an exhaust gas channel, wherein the reactant gas channel and the exhaust gas channel are coiled with each other and separated by a channel wall, wherein at least a part of the channel wall contains a thermoelectric material and a heat conducting fin; A reactant gas inlet on the outer surface of the heat exchanger and communicating with the reactant gas channel; an exhaust gas port on the outer surface of the heat exchanger and communicating with the exhaust gas channel; and an electrical connection is between thermoelectric materials Between the generator and the outer surface of the generator. For electrical appliances, the part of the channel wall containing thermoelectric material and the heat-conducting heat sink is oriented in the vertical plane of each layer. 17. For the generator of item 5 of the patent application, the thermoelectric material elements are arranged in each deposition layer. A thermoelectric material element of type conductivity or only type conductivity. 18. A cover of a selective electrodeposition material, the cover comprising a patterned elastomeric material attached and fixed to a non-electrode support, wherein the support system Warp IIIIII — I 1 — · — ----— — &1; 1 I ------ (Please read the precautions on the back before filling out this page) This paper size applies to China National Standard (CNS) A4 Specifications (210 X 297 mm) 21