464540 A7 B7 經濟部智慧財產局貝工消费合作社印製 五、發明說明（1) (發明所屬之技術領域） 本發明係關於一種糊狀物塗布機：將基板載置於工作 台上成爲相對向於噴嘴之吐出口，在垂直於基板主面之方 向的該噴嘴與該基板之間具有任意（所期盼）之距離，一 面將塡充於糊狀物收納筒之糊狀物從該吐出口吐出於該基 板上，一面變化該基板及與該噴嘴之主面平行方向的相對 位置關係，俾在該基板上塗布所期望之糊狀物圖案。 (以往之技術） 在以往糊狀物塗布機，爲了調節塗布量，調節成一面 將塡充於收納筒之糊狀物從噴嘴吐出於基板上* 一面垂直 於基板主面之方向的該噴嘴與該基板之相對距離不管基扳 主面之起伏仍維持在所定（所期望値），經由調整塗布糊 狀物圖案時之速度（以下，稱爲塗布速度），或諷整施加 於決定來自噴嘴之糊狀物吐出量之糊狀物收納筒的壓力（ 以下，稱爲塗布壓力），以實行塗布量之調節。 例如|塗布速度一定時，若欲增加糊狀物之吐出量， 則加大塗布壓力。相反地，欲減少糊狀物之吐出量，則藉 由減少塗布壓力即可調整吐出量。又，塗布壓力一定時， 若欲增加糊狀物之吐出量，則將塗布速度成爲低速。相反 地，欲減少糊狀物之吐出量，則藉由將塗布速度成爲高速 即可調整吐出量。 (發明欲解決之課題） C請先閲讀背面之注意事項再填寫本頁) 裝 訂· •髮· 未紙張尺度適用中0國家標準（CNS>A4規格（210 X 297公釐） · 4 · 4 6 454 0 A7 _B7_ 五、發明說明（2 ) (請先《讀背面之注意事項再填寫本頁) 在以往之糊狀物塗布機，垂直於基板主面之方向的噴 嘴與基板之相對距離，不管基板主面之起伏，調節成維持 在所定作爲前提，成爲藉由調整塗布壓力或塗布速度來實 行塗布量之調節。 藉由塗布壓力欲實行糊狀物塗布量之調整時，則塗布 壓力之調整結果需要經糊狀物收納筒反映至來自噴嘴前端 之吐出量爲止之傳播時間，而在該期間，糊狀物圖案塗布 動作係僅進行隨著塗布速度之分量。所以急峻之塗布量調 整極困難。 對於依塗布速度的糊狀物塗布量之調整，作爲用以提 升生產性之手段大都已經調整成極高速之情形。若再成爲 高速化，則僅減少糊狀物塗布量.，不可能不變更每一單位 距離之塗布量而提高塗布速度。 本發明之目的係在於解決此種問題，提供一種可容易 迅速地調整塗布量，並可形成所期望形狀之糊狀物圖案的 糊狀物塗布機。 (解決課題所用之手段） 經濟部智慧財產局貝工消t合作社印製 爲了達成上述目的，依本發明之糊狀物塗布機•屬於 將基板載置於工作台上成爲相對向於噴嘴之吐出口，垂直 於該基板之主面之方向的該噴嘴與該基板之間具有所期望 之距離，一面將塡充於糊狀物收納筒的糊狀物從該吐出口 吐出在該基板上，一面經由變化該基板及該噴嘴與該基板 之主面平行之方向的相對位置關*在該基板上描畫所期望 本紙張又度適用中困0家標準（CNS)A4規格（210 X 297公釐）-5 - 4 6 4 5 4 0 A7 B7 五、發明說明（3) 形狀之糊狀物圖案的糊狀物塗布機，其特徵爲i備：記憶 表示垂直於相對應於糊狀物圖案之塗布量的該基板之主面 的方向的該噴嘴與該基板之距離，及變更糊狀物圖案之塗 布量的該基板及該噴嘴與該基板之主面平行之方向的相對 應位置之關係之資料的記憶手段，及檢出描畫中之糊狀物 圖案的該基板及與該噴嘴之該基板之主面平行之方向的相 對應位置的檢出手段，及在該檢出手段所檢出之與該噴嘴 之該基板之主面平行之方向的相對應位置爲變更糊狀物圖 案之塗布量的相對應位置時，從被記憶於該記憶手段之該 資料變更成垂直於相對應於該相對位置所對應之糊狀物圖 案之塗布量的該基板之主面之方向的該噴嘴及該基板之距 離的變更距離手段。 爲了達成上述目的，依本發明之糊狀物塗布機，具備 在塡充於糊狀物收納筒之糊狀物施加所期望之一定塗布壓 力的手段，又具備變更該基板及該噴嘴與該基板之主面平 行之方向的相對應位置關係之每一單位時間之變化量的變 更變化量手段； 變更該基板及該噴嘴與該基板主面平行之方向的相對 應位置關係之每一單位時間的變化量時，比例於該變化量 之變更來變更垂直於該基板主面之方向之該噴嘴與該基板 之距離•或是 仍維持該基板及該噴嘴與該基板主面平行之方向的相 對應位置關係之每一單位時間的變化量時’增大或減小垂 直於該基板主面之方向之該噴嘴與該基板之距離。 本紙張尺度適用中國國家標準（CNS>A4規格（210 * 297公釐） -6- ϋ 1_ I b I (锖先閱讀背面之注意事項再填寫本頁) =* 經濟部智慧財產局貝工消费合作社印製 46454 0 A7 B7 五、發明說明（4) (發明之實施形態） 以下依據圖式說明本發明之一實施形態。 第1圖係表示依本發明之糊狀物塗布機之一實施形態 的斜視圖；1係架台，2a，2b係基板運送機，3係支 持台，4係基板吸附盤，5係Θ軸移動台，6a，6b係 X軸移動台，7係y軸移動台，8 a，8 b係伺服電動機 ，9係z軸移動台，10係伺服電動機，1 1係球形螺旋 ，1 2係伺服電動機，1 3係糊狀物收納筒（注射器）， 1 4係距離計，1 5係支持板，1 6 a，1 6 b係認識畫 像攝影機，1 7係控制部，1 8係監測器，1 9係鍵盤， 2 ◦係具備外部記憶裝置的個人電腦本體，2 1係電纜。 經濟部智慧財產局具工消费合作社印製 在同圖中，在架台1上，設有平行於X軸方向且可昇 降之兩台基板運送機2a，2b，將未圖示之基板從圖式 之內深部側運送至正前方側|亦即朝X軸方向水平地運送 。又在架台1上設有支持台3，基板吸附盤4經由0軸移 動台5載置於該支持台3上。該0軸移動台5係朝ζ軸周 圍之Θ方向旋轉基板吸附盤4者。 在架台1上，比基板運送機2a，2b更外側設置平 行於X軸的X軸移動台6a，6b，跨越此等X軸移動台 6a，6b間地設置y軸移動台7。該y軸移動台7係藉 設於X軸移動台6a ’ 6b的伺服馬達8a，8b之正轉 或逆轉之旋轉（正逆轉）朝X軸方向水平地被運送。在y 軸移動台上，設有藉由依伺服電動機1 〇之驅動的球形螺 -7- — — — — — — I I -II C請先閱讀背面之注$項再填寫本頁) ;-袁、. 本紙張尺度適用中囲國家標準<CNS)A4規格（210 X 297公釐） 經濟部智慧財產局興工消t合作杜印製 4 6 4 5 4 Ο Α7 _____Β7_ 五、發明說明（5 ) 旋1 1之正逆轉朝y軸方向移動的Z軸移動台9。在該Z 軸移動台9，設有支持固定糊狀物收納筒1 3或距離計 1 4的支持板1 5，伺服電動機1 2經由設於該支持板 1 5之未圖示之線導件之活動部朝乙軸方向移動此等糊狀 物收納筒1 3或距離計1 4。糊狀物收納筒1 3係裝卸自 如地安裝於該線導件之活動部》在架台之頂板，朝上方向 設有爲了未圖示之基板之對位等的認識畫像攝影機1 6 a ，1 6 b 〇 在架台1之內部，設置控制伺服電動機8a，8b， 10，12，24 (未圖示）等的控制部17，該控制部 1 7係經由電纜2 1與監測器1 8或鍵盤1 0，個人電腦 本體2 0，此等控制部1 7用以各種處理的資料從鍵盤 1 9被輸入，以認識畫像攝影機1 6 a，1 6 b所攝得之 畫像或控制部1 7之處理狀況在監測器2 8被顯示。 從鍵盤1 0所輸入之資料等，係以個人電腦本體2 0 之外部記憶裝置被記憶保管在軟碟等之記憶媒體。 第2圖係放大表示圖示於第1圖之糊狀物收納筒13 與距離計1 4之部分的斜視圖；1 3 a係噴嘴，2 2係基 板| 2 3係糊狀物圖案，在相對應於第1圖之部分賦予相 同記號。 在同圖中，距離計1 4係有三角形缺口部於其下端部 ，而發光元件與複數受光元件設於該缺口部。噴嘴1 3 a 係位於距離計1 4之缺口部下部。距離計1 4係以非接觸 之三角測法計測從噴嘴1 3 a之前端部一直到基板2 2之 (請先閱讀背面之注意事項再填寫本頁) 裝 '9 本紙張尺度適用中國國家櫟準<CNS)A4規格（210 X 297公釐） -8- 464540 A7 ___B7__ 五、發明說明（6 ) C锖先閱讀背面之注意Ϋ項再填寫本頁} 表面（上面）爲止之距離。亦即，發光元件設於上述三角 形之缺口部的一邊斜面，從該發光元件所放射之電射光L 係在基板2 2上之計測點S反射，而以設在上述缺口部的 另一邊斜面的複數受光元件之任一受光元件受光》因此， 雷射光L係不會被糊狀物收納筒1 3或噴嘴1 3 a所遮住464540 A7 B7 Printed by Shelley Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (1) (Technical field to which the invention belongs) The present invention relates to a paste coating machine: the substrate is placed on a workbench and becomes opposed. At the nozzle outlet, there is an arbitrary (expected) distance between the nozzle and the substrate in a direction perpendicular to the main surface of the substrate, and the paste filled in the paste storage tube is discharged from the outlet. The relative positional relationship of the substrate and the direction parallel to the main surface of the nozzle is changed while being ejected from the substrate, and a desired paste pattern is coated on the substrate. (Conventional technology) In the past paste coating machine, in order to adjust the coating amount, it is adjusted to discharge the paste filled in the storage tube from the nozzle onto the substrate while the nozzle is perpendicular to the main surface of the substrate. The relative distance of the substrate is maintained at a predetermined level (desired) regardless of the fluctuation of the main surface of the substrate. The speed of the paste pattern is adjusted (hereinafter, referred to as the coating speed), or the iron is applied to determine the distance from the nozzle. The pressure (hereinafter, referred to as the coating pressure) of the paste storage cylinder of the paste discharge amount is used to adjust the coating amount. For example, when the coating speed is constant, if you want to increase the discharge amount of the paste, increase the coating pressure. Conversely, if the amount of paste to be discharged is reduced, the amount of discharge can be adjusted by reducing the application pressure. When the application pressure is constant, if the discharge amount of the paste is to be increased, the application speed is set to a low speed. Conversely, if the amount of paste to be discharged is reduced, the amount of discharge can be adjusted by setting the application speed to a high speed. (Problems to be Solved by the Invention) C Please read the notes on the back before filling in this page.) Binding · • Send · No paper size Applicable to 0 National Standards (CNS > A4 Specifications (210 X 297 mm) · 4 · 4 6 454 0 A7 _B7_ V. Description of the invention (2) (Please read the “Notes on the back side before filling in this page”) In the past paste coating machine, the relative distance between the nozzle and the substrate perpendicular to the main surface of the substrate, regardless of The fluctuation of the main surface of the substrate is adjusted to maintain a predetermined level, and the coating amount is adjusted by adjusting the coating pressure or the coating speed. When the paste coating amount is to be adjusted by the coating pressure, the coating pressure is adjusted. As a result, it is necessary to reflect the propagation time until the discharge amount from the front end of the nozzle is reflected through the paste storage tube, and during this period, the paste pattern coating operation is performed only in accordance with the coating speed. Therefore, it is extremely difficult to adjust the sharp coating amount. The adjustment of the coating amount of the paste according to the coating speed has been adjusted to a very high speed as a means to improve productivity. If the speed is further increased, then It is only possible to reduce the coating amount of the paste. It is not possible to increase the coating speed without changing the coating amount per unit distance. The object of the present invention is to solve such a problem, and to provide a method for easily and quickly adjusting the coating amount and forming a coating layer. A paste coating machine with a paste pattern of the desired shape. (Means used to solve the problem) Printed by the Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. To achieve the above purpose, the paste coating machine according to the present invention belongs to the The substrate is placed on the workbench and becomes a discharge opening opposite to the nozzle. The nozzle and the substrate have a desired distance from the direction perpendicular to the main surface of the substrate. The paste is discharged from the discharge port on the substrate, and the relative position of the substrate and the nozzle parallel to the main surface of the substrate is changed by changing the relative position of the substrate. Draw the desired paper on the substrate. Standard (CNS) A4 (210 X 297 mm)-5-4 6 4 5 4 0 A7 B7 V. Description of the invention (3) Paste coating machine with shaped paste pattern, which is characterized by: : Memory Table The distance between the nozzle and the substrate showing the direction perpendicular to the main surface of the substrate corresponding to the coating amount of the paste pattern, and the substrate and the nozzle and the main body of the substrate that change the coating amount of the paste pattern Means for memorizing the data of the relationship between the corresponding positions in the direction parallel to the plane, and detection means for detecting the corresponding position in the direction parallel to the main surface of the substrate of the nozzle and the paste pattern in the drawing And when the corresponding position in the direction parallel to the main surface of the substrate of the nozzle detected by the detection means is the corresponding position where the coating amount of the paste pattern is changed, it is memorized from the memory means The data is changed to a distance changing means for the distance between the nozzle and the substrate perpendicular to the direction of the main surface of the substrate corresponding to the coating amount of the paste pattern corresponding to the relative position. In order to achieve the above-mentioned object, the paste coating machine according to the present invention includes a means for applying a desired constant application pressure to the paste filled in the paste storage tube, and further includes changing the substrate, the nozzle, and the substrate. Means for changing the amount of change per unit time of the corresponding positional relationship in a direction parallel to the principal surface of the substrate; for each unit time of changing the corresponding positional relationship of the substrate and the nozzle in a direction parallel to the main surface of the substrate When the amount of change is proportional to the change of the change amount to change the distance between the nozzle and the substrate in a direction perpendicular to the main surface of the substrate or to maintain the correspondence between the substrate and the direction in which the nozzle is parallel to the main surface of the substrate The amount of change in the positional relationship per unit time 'increases or decreases the distance between the nozzle and the substrate in a direction perpendicular to the main surface of the substrate. This paper size applies Chinese national standard (CNS > A4 specification (210 * 297 mm) -6- ϋ 1_ I b I (锖 Please read the notes on the back before filling this page) = * Shellfish Consumption of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the cooperative 46454 0 A7 B7 V. Description of the invention (4) (Inventive embodiment) The following describes one embodiment of the present invention with reference to the drawings. Figure 1 shows an embodiment of the paste coating machine according to the present invention. Perspective view; 1 series stand, 2a, 2b series substrate conveyor, 3 series support table, 4 series substrate suction plate, 5 series Θ axis moving table, 6a, 6b series X axis moving table, 7 series y axis moving table, 8 a, 8 b series servo motors, 9 series z-axis moving tables, 10 series servo motors, 1 1 series spherical spirals, 1 2 series servo motors, 1 3 series paste storage cylinders (syringes), 1 4 series distance meters , 1 5 series support board, 1 6 a, 16 b series recognition camera, 17 series control unit, 18 series monitor, 19 series keyboard, 2 ◦ personal computer body with external memory device, 2 1 The cable is printed by the Consumer Goods Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs on the same figure. There are two substrate conveyors 2a, 2b that are parallel to the X-axis direction and can be raised and lowered, and transport the unillustrated substrates from the inner deep side to the front side | that is, horizontally toward the X-axis direction. A support table 3 is provided on the pedestal 1, and the substrate suction plate 4 is placed on the support table 3 via a 0-axis moving table 5. The 0-axis moving table 5 rotates the substrate suction plate 4 in the direction Θ around the ζ axis. On the gantry 1, X-axis moving tables 6a, 6b parallel to the X-axis are provided outside the substrate carriers 2a, 2b, and a y-axis moving table 7 is provided across these X-axis moving tables 6a, 6b. The y-axis movement The stage 7 is transported horizontally in the X-axis direction by the servo motors 8a and 8b provided in the X-axis moving stage 6a '6b. The forward or reverse rotation (forward and reverse rotation) is carried in the X-axis direction. Servo motor 1 〇 Driven spherical screw -7- — — — — — — II -II C Please read the note on the back before filling in this page); -Yuan. CNS) A4 size (210 X 297 mm) Cooperative production and printing by the Intellectual Property Bureau of the Ministry of Economic Affairs 4 6 4 5 4 〇 Α7 _____ Β7_ V. Invention Ming (5) of rotation 11 is reversed to move toward the y-axis direction Z-axis moving table 9. The Z-axis moving table 9 is provided with a support plate 15 that supports a fixed paste storage tube 13 or a distance gauge 14 and a servo motor 12 through a wire guide (not shown) provided on the support plate 15 The movable part moves these paste storage cylinders 13 or distance gauges 14 in the direction of the B axis. The paste storage tube 1 3 is detachably mounted on the movable part of the wire guide. On the top plate of the stand, an awareness portrait camera 16 6 is provided for the alignment of a substrate (not shown). 6 b 〇 Inside the gantry 1, a control unit 17 for controlling the servo motors 8a, 8b, 10, 12, 24 (not shown) is provided. The control unit 17 is connected to the monitor 18 or the keyboard via a cable 21 10, personal computer body 20, these control sections 17 are input from the keyboard 19 with various processed data to recognize the portraits taken by the portrait cameras 16a, 16b or the control section 17 The processing status is displayed on the monitor 2 8. The data input from the keyboard 10 is stored in a storage medium such as a floppy disk using an external memory device of the personal computer body 20. Figure 2 is an enlarged perspective view showing the portion of the paste storage tube 13 and the distance meter 14 shown in Figure 1; 1 3 a nozzle, 2 2 substrate | 2 3 paste pattern, The same symbols are assigned to portions corresponding to FIG. 1. In the same figure, the distance meter 14 has a triangular notch at its lower end, and a light emitting element and a plurality of light receiving elements are provided at the notch. The nozzle 1 3 a is located below the notch of the distance meter 14. The distance gauge 1 4 is a non-contact triangulation measurement from the front end of the nozzle 1 3 a to the substrate 2 2 (please read the precautions on the back before filling this page). The size of this paper is applicable to Chinese oak Standard < CNS) A4 size (210 X 297 mm) -8- 464540 A7 ___B7__ V. Description of the invention (6) C 锖 Read the note on the back side before filling in this page} The distance to the surface (top). That is, the light-emitting element is provided on one inclined surface of the notch portion of the triangle, and the radioactive light L radiated from the light-emitting element is reflected from the measurement point S on the substrate 22, and is formed on the other side of the notched portion. Any one of the plurality of light receiving elements receives light. Therefore, the laser light L will not be blocked by the paste storage tube 1 3 or the nozzle 1 3 a.
Q 基板2 2上之雷射光L的計測點S與噴嘴1 3 a之正 下方位置係在基板2 2上偏些微距離Δχ，Ay，但是由 於在該些微距離Δχ，Ay偏離之位置間，在基板2 2表 面之起伏（凹凸）沒有相差，因此距離計1 4之計測結果 與從噴嘴1 3 a前端部至基板2 2之表面的距離間幾乎沒 有相差。因此依據該距離計1 4之測定結果經由控制伺服 電動機12，配合基板22表面之起伏，將從噴嘴13a 之前端部至基板2 2表面之距離維持在所期望値 經濟部智慧財產局員工消费合作社印製 第3圖係表示圖示於第1圖之控制部17之構成或糊 狀物收納筒1 3之空氣壓力控制，基板2 2之控制的方塊 圖：17a係微電腦，17b係電動機控制器，17cl ，17c2係xl，x2軸驅動器’ 17d係y軸驅動器 ，17e係0軸驅動器，17f係z軸驅動器’ 17g係 資料通信匯流排，17 h係外部介面’ 2 4係驅動0軸移 動台5 (第1圖的伺服電動機’ 2 5至2 9係編碼器， 3 0係正壓源，3 0 a係正壓調整器’ 3 1係負壓源’ 3 1.a係負壓調整器’ 3 2係閥單元’在相對應於第1圖 及第2圖之部分賦予相同記號。 本紙張尺度適用t國a家楳準（CNS〉A4規格（210 X 297公釐） -9 - 464540 A7 B7 五、發明說明（7) 在同圖中，控制部1 7係內設微電腦1 7 a或電動機 控制器17b ’ X，y，z，0之各軸驅動器17c 1至 1 7 ί ’處理以認識畫像攝影機1 6 a ，1 6 b所得到影 像信號的畫像處理裝置1 7 i ，以及進行鍵盤1 9等之間 之信號傳送的外部介面1 7 h。控制部1 7係又包含基板 運送機2 a，2 b之驅動控制系統，但是在此省圖略示。 微電腦1 7 a係未圖示，但是具備：儲存主運算部或 用以實行下述之糊狀物之塗布描畫之處理程式的ROM， 儲存在主運算部之處理結果或來自外部介面1 7 h及電動 機控制器1 7 b之輸入資料的RAM，以及與外部介面 1 7 h或電動機控制器1 7 b存取資料的輸入輸出部等。 在各伺服電動機8a ，8b，1〇，12，24，設置檢 出旋轉量的編碼器2 5〜2 9，並將檢出結果回流至X， y，ζ，Θ之各軸驅動器I7cl〜17f俾實行位置控 制。 伺服電動機8a，8b，1〇係依據從鍵盤1〇所輸 入而被儲存於微電腦1 7 a之RAM的資料施以正逆旋轉 ，對於藉由從負壓源131所分配之負壓真空吸附於基板 吸附盤4 (第1圖）的基板22，噴嘴13a (第2圖） 經由乙軸移動台9 (第1圖），朝X，y軸方向移動任意 距離，該移動中，微電腦1 7 a藉控制閥單元3 2，經由 正壓調整器3 0 a與閥單元3 2，些微空氣壓力施加於糊 狀物收納筒1 3，糊狀物從噴嘴1 3 a之前端部之之吐出 口被吐出，而糊狀物以所期望之圖案塗布於基板2 2。在 (請先閱讀f-面之注意事項再填寫本頁) 上B. -_^r. 經濟部智慧財產局貝工消t合作社印製 本紙張尺度適用中圉國家標準（CNS>A4規格（210 X 297公釐） -10 - 4 6 454 0 A7 B7___ 五、發明說明（8 ) {請先閲讀背面之沒意事項再填寫本頁) 該z軸移動台9朝X，y軸方向之水平移動中’距離計 1 4係計測噴嘴1 3 a與基板2 2之間的距離’且伺服電 動機1 2以z軸驅動器1 7 f控制成將該距離經常保持在 —定。 在未進行糊狀物塗布之待命狀態，藉微電腦1 7 3控 制閥單元3 2，負壓源3 1經由負壓調整器3 1 a及閥單 元3 2連通於糊狀物收納筒1 3，俾將從噴嘴1 3 a之吐 出口下垂的糊狀物拉回至糊狀物收納筒1 3內。由此，可 防止來自該吐出口之糊狀物的液下垂。以未圖示之認識畫 像攝影機來藍視該噴嘴1 3 a之吐出口，僅在發生液下垂 時，將負壓源3 1連通於糊狀物收納筒1 3也可以。 第4圖係表示圖示於第1圖之糊狀物塗布機之依本發 明的糊狀物塗布方法之一實施形態的流程圖。 在同圖中，首先電源被投入糊狀物塗布機時（Γ步驟 10 0)，實行其初期設定（步驟200)。 在第1圖中，在該初期設定係藉伺服電動機8 a ， 經濟部智慧财產局興工消费合作社印製 8b，1〇，將z軸移動台9朝X，y方向移動俾定位在 所定之基準位置，並將噴嘴13 a (第2圖）設定在所定 之原點位置•俾使該糊狀物吐出口位於開始吐出糊狀物之 位置（亦即，開始塗布糊狀物點），又，在作爲糊狀物圖 案描畫之基板（以下，稱爲實基板）輸入欲塗布描畫之一 以上之每一糊狀物圖案的資料（以下，稱爲糊狀物圖案資 料）Λ此乃由構成塗布形成於實基板之糊狀物圖案的一連 串位置資料所構成），及該每一糊狀物圖案之塗布條件的 本紙張尺度適財國0家標準（CNS)A4規格（210 * 297公» ) ΠΉ Α7 46454 Ο ___Β7___ 五、發明說明（9) 資料。此等資料之輸入係由鍵盤19(第1圖）‘實行，而 被輸入之此等資料係被儲存於內設於微電腦17 a (第3 圖）的R A Μ。 該塗布條件係若塗布描畫於一實基板之糊狀物圖案有 m個（但是，m係1以上之整數）時，如第5圖所示，將 此等糊狀物圖案作爲圖案No . 1，2 ........ m之糊狀 物圖案，在各該每一糊狀物圖案，將糊狀物實際地塗布於 實基板時之該實基板與噴嘴之間的相對連度（將此稱爲塗 布速度，惟特別是，將此時之塗布速度稱爲初期設定塗布 速度），及施加於決定來自噴嘴之糊狀物吐出量之糊狀物 收納筒1 3的壓力（將此稱爲塗布壓力，但特別是，將此 時之塗布壓力稱爲初期設定塗布壓力），及來自基板表面 之噴嘴的高度（將此稱爲塗布高度，但特別是，將此時之 塗布高度稱爲初期設定塗布高度），及表示欲變更糊狀物 吐出量之位置（點）的變更點等之各資料所構成。作爲變 更點，係例如爲了比其他部分增加（或減少）糊狀物塗布 量而增高（或降低）塗布圖案之高度，或是如圖案之折曲 部，塗布糊狀物成與直線部相同高度，以變化糊狀物之每 一單位時間之吐出量的點等》 在各糊狀物圖案若有η個（但是，η係0或1以上之 整數）變更點）者，將各該變更點作爲變更點1，2 ’… …，η。此時，此等變更點之實基板上之位置，對於圖案 號碼j (但是i = 1，2 ...... ’ m )之糊狀物圖案，係 變更點 1= (xi 1，y i 1) ’ 變更點2 = (xi 2， 參紙張尺度適用中國國家標準（CNS)A4規格（210 χ 297公釐> -12 - (請先Μ讀背面之注意事項再填寫本頁) 裝 經濟部智慧财產局貝工消费合作杜印製Q The measurement point S of the laser light L on the substrate 22 and the position directly below the nozzle 1 3 a are slightly offset by the distance Δχ, Ay on the substrate 22, but between the positions where the slight distances Δχ and Ay deviate, between There is no difference in the undulations (concavities and convexities) on the surface of the substrate 22, so there is almost no difference between the measurement result of the distance meter 14 and the distance from the front end of the nozzle 1a to the surface of the substrate 22. Therefore, according to the measurement results of the distance meter 14, the distance from the front end of the nozzle 13a to the surface of the substrate 22 is maintained at the desired distance through the control servo motor 12 and the fluctuation of the surface of the substrate 22. The Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The third drawing is a block diagram showing the structure of the control unit 17 shown in FIG. 1 or the air pressure control of the paste storage tube 13 and the control of the substrate 22: 17a microcomputer, 17b motor controller , 17cl, 17c2 series xl, x2 axis driver '17d series y-axis driver, 17e series 0-axis driver, 17f series z-axis driver' 17g series data communication bus, 17h series external interface '2 4 series drive 0-axis mobile stage 5 (Servo motor in Fig. 1 '2 5 to 2 9 series encoder, 30 series positive pressure source, 30 series positive pressure regulator' 3 series 1 negative pressure source 3 1 series negative pressure regulator The “3 2 series valve unit” is given the same mark in the parts corresponding to Figure 1 and Figure 2. This paper size is applicable to the standard of a country (CNS> A4 (210 X 297 mm) -9-464540 A7 B7 V. Description of the invention (7) In the same figure, the control unit 1 7 has a microcomputer 1 7 a or motor controller 17b 'X, y, z, 0 each of the axis drivers 17c 1 to 1 7 ′' image processing device 1 7 i that processes the image signals obtained by the image cameras 16 a, 16 b, and The external interface 17 h for signal transmission between keyboards 19 and so on. The control unit 17 also includes the drive control system of the substrate conveyors 2 a and 2 b, but is not shown here. The microcomputer 17 a Not shown, but equipped with: ROM that stores the main calculation unit or a processing program for coating and drawing of the following paste, the processing result stored in the main calculation unit or from an external interface 17 h and the motor controller 1 7 b RAM for input data, and I / O unit for accessing data with external interface 17 h or motor controller 17 b. Set the detection rotation for each servo motor 8a, 8b, 10, 12, 24 The number of encoders 2 5 to 2 9 and the detection results are returned to the X, y, ζ, Θ axis drives I7cl to 17f 俾 to implement position control. The servo motors 8a, 8b, 10 are based on the keyboard 1〇 The data entered and stored in the RAM of the microcomputer 17 a are rotated forward and backward For the substrate 22 which is vacuum-adsorbed on the substrate adsorption tray 4 (FIG. 1) by the negative pressure distributed from the negative pressure source 131, the nozzle 13a (FIG. 2) passes through the B-axis moving stage 9 (FIG. 1) toward The X and y axes move at any distance. During this movement, the microcomputer 17 a controls the valve unit 3 2 and passes the positive pressure regulator 3 0 a and the valve unit 3 2. Some slight air pressure is applied to the paste storage cylinder 1 3 , The paste is discharged from the discharge port at the front end of the nozzle 1 a, and the paste is coated on the substrate 22 in a desired pattern. On (Please read the precautions on f-page before filling out this page) B. -_ ^ r. The paper size printed by the Beige Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs applies the China National Standard (CNS > A4 Specification ( 210 X 297 mm) -10-4 6 454 0 A7 B7___ V. Description of the invention (8) {Please read the unintentional matter on the back before filling in this page) The level of the z-axis mobile stage 9 toward the X and y axes The “distance meter 1 4 system measures the distance between the nozzle 1 3 a and the substrate 22 2” during the movement, and the servo motor 12 is controlled by the z-axis driver 17 f so that the distance is always kept constant. In the standby state without paste coating, the microcomputer 1 7 3 controls the valve unit 3 2, and the negative pressure source 3 1 communicates with the paste storage cylinder 1 3 through the negative pressure regulator 3 1 a and the valve unit 3 2.俾 Pull the slump drooping from the outlet of the nozzle 1 3 a back into the scum container 13. Thereby, the sag of the paste from the discharge port can be prevented. The spout of the nozzle 1 a is viewed from the viewpoint of an unillustrated camera, and the negative pressure source 3 1 may be connected to the paste container 13 only when liquid sagging occurs. Fig. 4 is a flowchart showing an embodiment of a paste coating method according to the present invention shown in the paste coating machine of Fig. 1; In the figure, when the power is first supplied to the paste coating machine (Γ step 100), the initial setting is performed (step 200). In the first figure, in this initial setting, the servo motor 8 a is used, and the Industrial Property Consumer Cooperative of the Ministry of Economic Affairs and the Ministry of Economic Affairs prints 8b and 10 to move the z-axis mobile station 9 in the X and y directions. The reference position, and set the nozzle 13 a (Figure 2) to the predetermined origin position. • Set the paste outlet to the position where the paste starts to be discharged (that is, the point where the paste starts to be applied), and On the substrate (hereinafter, referred to as a solid substrate) for drawing the pasty pattern, input the data of each pasty pattern (hereinafter, referred to as the pasty pattern data) to be coated and painted. Λ This is composed of Consisting of a series of position data on the pasty pattern formed on the solid substrate), and the coating conditions of each pasty pattern are in accordance with this paper's standard (CNS) A4 specification (210 * 297) » ) ΠΉ Α7 46454 Ο ___ Β7 ___ 5. Description of the invention (9) Information. The input of these data is performed by the keyboard 19 (Fig. 1), and the inputted data is stored in the RAM which is built in the microcomputer 17a (Fig. 3). The coating conditions are such that if there are m paste patterns drawn on a solid substrate (but m is an integer of 1 or more), as shown in FIG. 5, these paste patterns are designated as pattern No. 1 , 2 ........ m paste patterns, the relative degree of connection between the actual substrate and the nozzle when the paste is actually applied to the actual substrate for each paste pattern (This is referred to as the coating speed, but in particular, the coating speed at this time is referred to as the initial setting coating speed), and the pressure applied to the paste storage tube 13 that determines the amount of paste to be discharged from the nozzle (will be This is called the coating pressure, but in particular, the coating pressure at this time is referred to as the initial setting coating pressure), and the height of the nozzle from the substrate surface (this is called the coating height, but in particular, the coating height at this time) It is called the initial setting coating height), and each piece of data indicates a position (point) at which the paste discharge amount is to be changed. As a change point, for example, to increase (or decrease) the coating amount of the paste to increase (or decrease) the height of the coating pattern, or to apply the paste to the same height as the straight portion, such as the bent portion of the pattern In order to change the discharge amount of the paste per unit time, etc. "If there are η (however, η is an integer of 0 or 1 or more) change points in each paste pattern, the change points will be changed. As change points 1, 2 '..., η. At this time, the positions on the real substrate of these change points are the change points 1 = (xi 1, yi) for the paste pattern of the pattern number j (but i = 1, 2 ... 'm). 1) 'Change point 2 = (xi 2, the paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm > -12-(Please read the precautions on the back before filling this page)) Printed by the Intellectual Property Bureau of the Ministry of Intellectual Property
Mfirtito.·、·.·. 46454 0 A7 B7 經濟部智慧財產局貝工消f合作社印製 五、發明說明（ίο) Υ i 2) ’ ......變更點n= (X i n，y i η)。例如圖 案號碼1之糊狀物圖案時，各該之變更點係變更點1 =( xil’yil)，變更點2=(xl2，yl2)，… …，變更點n=(xln，yln)。 塗布高度之資料係分別設定在變更點及其以外之位置 者’在第5圖中，設定塗布高度1，2，塗布高度2係規 定變更點1〜η的塗布高度者，而塗布高度1係作爲規定 其以外之位置的塗布高度者。當然，在變更點間塗布高度 維持不相同時，亦即，在從某一變更點至下一變更點維持 相同塗布高度時，各該每一變更點間的塗布高度被設定。 該變更點1〜η之位置資料係上述糊狀物圖案資料之任一 資料，在是有糊狀物圖案上之某一長度的所定領域欲變更 塗布高度時，則其領域之所有位置資料作爲變更點被設定 在塗布條件。 ' 雖未圖示於第5圖，但是在塗布條件，也設定塗布圖 案移動資料或開始點座標，終點座標，塗布之糊狀物圖案 的計測位置資料*袋回壓等》 終了以上之初期設定（步驟2 0 0 )之後’則將實基 板搭載於基板吸附盤4 (第1圖）而被吸附保持（步驟 300)。在該基板搭載。藉由基板運送機2a ’ 2b ( 第1圖），實基板朝x軸方向被運送至基板吸附盤4之上 方，並藉由未圖示之昇降手段來下降此等基板運送機2 a ，2 ，俾將實基板載置於基板吸附盤4。 之後，實行基板預備定位（步驟4 〇 0 ) °在該處理 <靖先«讀背面之注$項再填寫本頁) 裝 訂： V®·. 本紙張尺度適用中國國家標準<CNS)A4規格（210 * 297公釐） -13- 4 b 454 0 A7 B7 五、發明說明（11) 中，在第1圖，經未圖示之定位夾，實行該實基板之X， y方向之對位。又，在認識畫像攝影機16a，16b攝 影被載置於基板吸附盤4之實基板之定位用標記，並以畫 像處理求出定位用標記之重心位置又檢出實基板之0方向 之傾斜，對應於此，驅動伺服電動機24(第3圖），也 修正該Θ方向之傾斜。 又，糊狀物收納筒1 3內之糊狀物殘量變少，而在糊 狀物圖案之塗布動作中有糊狀物中斷之可能性時，事先與 噴嘴1 3 a —起更換糊狀物收納筒1 3，但是更換噴嘴時 ，與該更換前相比較，也有產生安裝位置之偏位而損及再 現性之情形。如此，爲了確保再現性，使用經更換之新噴 嘴1 3 a，將糊狀物十字狀地塗布於實基板上之未塗布糊 狀物之部位，以畫像處理求出該十字塗布圖案之交點的重 心位置，算出該重心位置與實基板上之定位用標記之重心 位置間的距離，將此作爲噴嘴1 3 a之糊狀物吐出口的偏 位置dx，dy (第2圖），並儲存於內設在微電腦 1 7 a 之 R A Μ。 以上爲對於實基板之基板預備定位（步驟4 0 0 )， 使用該噴嘴13 a之偏位量dx，dy，來修正以後所實 行之糊狀物圖案之塗布描畫時之噴嘴13 a之偏位。 然後，從圖案No.1之糊狀物圖案資料依次地實行 糊狀物之圖案塗布（步驟5 0 0 )。藉由第6圖詳述這些 〇 在同圖中，首先實行塗布條件之設定（步驟5 0 1 ) 本紙張尺度適用中國國家櫟準（CNS)A4規格（210 X 297公釐） -14- -----------t __ . — I <請先M讀背面之注意事項再填寫本頁) 訂- -Μ, 經濟部智慧財產局具工消费合作社印製 464540 A7 B7 五、發明說明（12) .n n n k I I (請先閲讀背面之注意事項再填寫本頁) -=«·_ «在此，在微電腦17a (第3圖）之RAM，設置儲存 各糊狀物圖案之糊狀物圖案資料與如第5圖所示之塗布條 件的記憶表，但是該步驟5 0 1，係從記憶表讀出欲塗布 描畫之糊狀物圖案之糊狀物圖案資料與塗布條件，並以微 電腦1 7 a可使用地被保存於上述RAM之所定領域。在 此，首先，由於塗布描畫圖案No.1之糊狀物圖案，因 此此時之塗布條件係經由第5圖，從記憶表讀出塗布速度 =V1，塗布壓力=P1 *塗布高度1=H11，塗布高 度2 = H12,變更點座標l=(xll，yll)，變 更點座標2=(xl2，yl2)........變更點座標η =(xln，yln)，以微電腦17a可使用地保存於 上述RAM之所定領域。 經濟部智慧財產局具工消费合作社印製 終了此等塗布條件之設定之後，驅動伺服電動機8 a ，8b，10 (第1圖），在描畫（塗布）開始點上移動 噴嘴13 a (步驟5 0 2 )。由於在該開始塗布位置對位 噴嘴13 a之吐出口，移動z軸移動表9 (第1圖），實 行噴嘴位置之比較與調整移動，爲了此，實行在先前之基 板預備定位（第4圖之步驟4 0 0 )所得到而被儲存於微 電腦1 7 a之RAM的噴嘴1 3 a之偏位量dx ’ dy ’ 是否在表示於第2圖之噴嘴1 3 a之偏位量的容許範圍 △ X，Ay內之判斷。若該偏位量dx，dy在容許範圔 內（亦即，Λχ之dx及Aygdy)時，則仍維持該狀 態，若在容許範圍外（亦即’ Axf d x或是Ay〈 d y )時，則以該偏位量〇 x ’ d y爲依據’移動2軸移動表 本纸張尺度遘用尹國國家楳準（CNS)A4規格（210 X 297公釐） -15 - 46454 0 A7 B7 五、發明說明（13) 9，而藉調整糊狀物收納筒1 3 *來解決噴嘴1 3 a之糊 狀物吐出口與實基板之所期望位置間之偏位1俾將噴嘴 1 3 a初期定位於所期望位置。 然後，驅動伺服馬達12(第1圖），實行噴嘴 13a之高度的設定（步驟503)。該設定之高度係設 定在已經從上述RAM之記憶表所讀出的圖案No . 1之 塗布條件的塗布高度1 (具體而言，爲第5圖之高度11 )，從噴嘴13 a之吐出口至實基板之表面的距離被設定 在該塗布高度11。 終了以上之處理之後，依據被儲存於微電腦1 7 a之 RAM的糊狀物圖案資料來驅動伺服電動機8a，8b， 經濟部智慧財產局員工消t合作社印製 ----------(!裝--------訂. (請先閱讀背面之注意事項再填窝本頁) 1 0 (第1圖），由此，噴嘴1 3 a之糊狀物吐出口以相 對向於實基板之狀態下，隨著該糊狀物圖案資料朝X，y 方向移動（步驟504)。又經由閥單元32 (第3圖） 從正壓源30(第3圖），藉由正壓調整器30a (第3 圖）被調整成上述圖案N 〇 . 1之塗布條件之塗布壓力 P 1的空氣壓力施加於糊狀物收納筒1 3，而從噴嘴 13 a之糊狀物吐出口開始吐出糊狀物（步驟5 0 5 )。 此時，糊狀物在剛吐出前經由閥單元32 (第3圖）從負 壓源3 1 (第3圖）將藉由負壓調整器3 la (第3圖） 經調整成袋回壓之負壓施加於糊狀物收納筒13些微時間 ，當吸入滞留於噴嘴1 3 a之糊狀物吐出口的糊狀物時， 在起端部，糊狀物不會滯留地可塗布。 開始此種塗布描畫動作之同時，微電腦1 7 a係從距 本紙張尺度適用中國國家#準（CNSU4規格（210 X 297公釐） -16 - 464540 A7 B7 經濟部智慧财產局貝工消费合作社印製 五、發明說明（14) 離計1 4存取噴嘴1 3 a之糊狀物吐出口與實基板之表面 間之距離的實測資料並測定實基板之表面起伏|經由隨著 該測定値來驅動伺服電動機1 2，如第7 ( a )圖所示， 實行糊狀物圖案之塗布描畫（步驟5 0 6 )，使來自實基 板之表面的噴嘴1 3 a之設定高度維持一定，亦即維持成 上述圖案No.1之塗布條件的塗布高度1。 微電腦1 7 a係從電動機控制器1 7 b讀取實基板上 之糊狀物圖案之塗布位置（座標）（步驟507)，判定 是否到達上述圖案No . 1 ，之塗布條件的變更點1 ( X11·y11)(步驟508)。 當到達該變更點1時|則將實基板之糊狀物塗布面與 噴嘴間之間隔從上述圖案N 〇 . 1之塗布條件的塗布壓力 1二日11變更成塗布高度2 = 1112(步驟509)。 該變更係藉由驅動伺服電動機1 2來實行。第7 Γϊ))圖 係表示該變更點1之狀態，在該狀態係作爲Η 1 1 > HI 2 »繼續變更點1，2，……時，在該期間，一面設 定塗布高度2 = H 1 2，一面繼續實行糊狀物圖案之塗布 描畫。 如第7 ( b )圖所示，在塗布高度變低之變更點，若 未變更塗布速度及塗布壓力，由於從噴嘴1 3 a所吐出的 糊狀物係受到來自實基板之反作用力而使吐出阻力變大， 因此不容易從噴嘴1 3 a吐出，成爲糊狀物之塗布量會減 少降低塗布高度之份量。相反地’塗布高度2 = H 1 2成 爲比塗布高度1 =H 1 1高時’由於噴嘴1 3 a從實基板 (請先閱讀背面之注意事項再填寫本頁) 裝 訂. --髮· 本紙張尺度適用中國画家標準（CNS)A4规格（210 X 297公釐） -17 4 6 4 5 4 〇 經濟部智慧財產局貝工消f合作杜印製 A7 B7 五、發明說明< 15) 遠離，因此，來自該實基板之反作用力變小使吐出阻力變 小，所以，糊狀物容易從噴嘴1 3 a噴出，成爲增大糊狀 物之塗布量。因此將塗布速度或塗布壓力，塗布高度1， 塗布高度2等之數値與變更點之位置座標關係設定作爲表 示於第5圖之塗布條件，經由儲存於微電腦1 7 a之 RAM的記憶表，成爲可調節糊狀物圖案之任意位置的糊 狀物之塗布高度，並可調節實基板上的糊狀物之塗布量。 如此地進行糊狀物圖案之塗布描畫，但是判定是否繼 續或終了糊狀物圖案之塗布描畫動作，塗布點是否爲藉由 糊狀物圖案資料所決定的須塗布之糊狀物圖案之終點的判 斷來決定（步驟5 1 0 )，若不是終點，則再回到實基板 之表面起伏之測定處理，亦即，回到控制塗布高度（步驟 506)，之後實行座標確認（步驟507)。如此，每 當到達變更點則實行塗布高度之變更，一直到變更點η仍 實行塗布高度之變更。 以下，重複上述之各過程，當到達糊狀物圖案之塗布 終端時，經由閥單元32 (第3圖）從正壓源30 (第3 圖），停止藉由正壓調整器3 0 a (第3圖）調整成塗布 壓力P 1之空氣壓力施加於糊狀物收納筒1 3，俾停止來 自噴嘴1 3 a之糊狀物吐出口之糊狀物吐出（步驟5 1 1 )0 此種糊狀物圖案之塗布動作，係所設定m個所有糊狀 物圖案資料一直到終了仍實行（步驟5 1 2 )，當到達最 後之圖案N 〇 . m的糊狀物圖案之終端時，則驅動伺服電 (請先«讀背面之注§項再填寫本頁) !裝 訂· 本紙張尺度適用中國圉家標準（CNS>A4規格（210 X 297公釐） -18- A7 B7 五、發明說明（16) 動機1 2俾上昇噴嘴1 3 a，終了圖案描畫動作，亦即終 了圖案塗布（步驟500)° 然後，在第4圖中，進行基板排出（步驟600)， 在第1圖中，解除實基板對於基板吸附盤4之吸附，上昇 基板運送機2a，2b俾載置實基板2 2，在該狀態下經 該基板運送機2 a，2 b被排出至裝置外，之後，判定是 否終了全過程（步驟700)。在複數枚之實基板使用相 同之糊狀物圖案資料塗布描畫糊狀物圖案時•對於各該實 基板從基板搭載（步驟3 0 0 )重複。然後，對於所有實 基板終了此等一連串之處理時，成爲所有作業終了（步驟 8 0 0 ) ° 以上，說明本發明之一實施形態，但是本發明係並不 被僅限定於此種實施形態。 亦即，在上述實施形態中，將噴嘴作爲活動，'並將基 板作爲固定，但是將噴嘴作爲固定並將基板作爲活動也可 以。 在糊狀物圖案之曲線部，即使將塗布速度變慢時，在 慢範圍內降低塗布高度也可減少糊狀物塗布量，而在整體 糊狀物圖案全面也可將每一單位時間之糊狀物塗布量成爲 一定，成爲也可以用高精度塗布形成所期望形狀之糊狀物 圖案。 又，將塗布壓力作爲一定並增加塗布高度，配合此而 加快塗布速度時’由於每一單位距離之糊狀物塗布量並未 變化，且所形成之糊狀物圖案之線寬係一定’因此，在描 ill-------{ __f---- <請先W讀背面之注意事項再填寫本頁) 灯- 經濟部智慧財產局員工消费合作社印製 本紙張尺度適用中國困家標準（CNS)A4規格（210 * 297公釐） -19 - 4 b 4 5 4 Ο A7 _B7_ 五、發明說明（17 ) (請先閱讀背面之注意事項再填寫本頁) 畫途中不必實行應答性不好之塗布壓力之調整，由組合塗 布高度與塗布速度，在維持高可靠性下，可縮短所期望之 糊狀物圖案之塗布描畫時間而可提高生產性。 又，若將塗布壓力作爲一定且仍將塗布速度維持在一 定之狀態下，增加或減低塗布高度時，由於每一單位距離 之糊狀物塗布量係成爲增加或減少，因此在描畫中不必實 行應答性不好之塗布壓力之調整，可得到在所期望之位置 變更線寬的糊狀物圖案。 (發明之效果） 如上所述，依照本發明，調整急峻之塗布量成爲容易 ，精度優異地可形成所期望之形狀。 (圖式之簡單說明） 胃 第1圖係表示依本發明之糊狀物塗布機之一實施形態 的斜視圖。 第2圖係放大表示圖示於第1圖之糊狀物收納筒與距 離計之部分的斜視圖。 經濟部智慧財產局貝工滴t合作社印製 第3圖係表示圖示於第1圖之控制部之構成或糊狀物 收納筒之空氣壓力控制部及基板控制部之構成的方塊圖。 第4圖係表示圖示於第1圖之糊狀物塗布機之依本發、 明之糊狀物塗布方法之一實施形態的流程圖。 第5圖係表示在第4圖之步驟2 0 0所設定之塗布條 件之一具體例的圖式。 本紙張尺度適用中困國家樑準（CNS)A4規格（210 X 297公釐） -20- 4 〇 4 5 4· 0 A7 B7 五、發明說明（18〉 第6圖係詳示在第4圖之步驟5 0 0的流程圖。 第7圖係表示將塗布壓力作爲相同時之塗布高度之變 化與糊狀物塗布量之變化的圖式。 (記號之說明） 13a :噴嘴，22 :基板，23 :糊狀物圖案 {請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局貝工消费合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 * 297公釐） -21 -Mfirtito .., ... 46454 0 A7 B7 Printed by the Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, F. Cooperatives. 5. Description of Invention (ίο) Υ i 2) '... Change point n = (X in, yi η). For example, in the case of the paste pattern of pattern number 1, the respective change points are change point 1 = (xil'yil), change point 2 = (xl2, yl2), ..., and change point n = (xln, yln). The data of the coating height are respectively set at the change point and beyond. In the fifth figure, the coating height is set to 1, 2 and the coating height 2 is to specify the coating height of the change point 1 to η, and the coating height is 1 Those who specify the coating height at other locations. Of course, when the coating height is maintained different between the change points, that is, when the same coating height is maintained from one change point to the next change point, the coating height between each change point is set. The position data of the change point 1 to η is any of the above-mentioned paste pattern data. When the coating height is to be changed in a predetermined area with a certain length on the paste pattern, all the position data of the area is used as The change point is set to the coating conditions. 'Although it is not shown in FIG. 5, the coating pattern movement data or starting point coordinates, end point coordinates, and measurement position data of the coated paste pattern are also set under the coating conditions. * The initial setting of the above is completed. (Step 2 0 0) After that, the solid substrate is mounted on the substrate suction plate 4 (FIG. 1) and is held by suction (Step 300). Mounted on this substrate. With the substrate conveyors 2a '2b (Fig. 1), the solid substrates are conveyed above the substrate suction tray 4 in the x-axis direction, and the substrate conveyors 2a, 2 are lowered by lifting means (not shown). Then, the solid substrate is placed on the substrate adsorption tray 4. After that, perform preliminary positioning of the substrate (step 4 0) ° In this process < Jingxian «read the note on the back side and then fill out this page) Binding: V® .. This paper size applies the Chinese national standard < CNS) A4 Specifications (210 * 297 mm) -13- 4 b 454 0 A7 B7 5. In the description of the invention (11), in the first figure, through the positioning clips not shown in the figure, the X and y directions of the real substrate are aligned. Bit. The recognition cameras 16a and 16b photographed the positioning marks of the solid substrate placed on the substrate adsorption tray 4 and determined the position of the center of gravity of the positioning marks by image processing and detected the inclination of the zero direction of the solid substrate. Here, driving the servo motor 24 (FIG. 3) also corrects the tilt in the θ direction. In addition, the remaining amount of the paste in the paste storage tube 1 3 is reduced, and if there is a possibility that the paste is interrupted during the application of the paste pattern, the paste is replaced with the nozzle 1 3 a in advance. The storage tube 1 3, but when the nozzle is replaced, there may be a case where the mounting position is deviated and the reproducibility is impaired compared with that before the replacement. In this way, in order to ensure reproducibility, the paste was applied in a cross shape to the uncoated part of the solid substrate using a new nozzle 1 3 a, and the intersection of the cross-coated pattern was determined by image processing. Center of gravity position. Calculate the distance between the center of gravity position and the center of gravity position of the positioning mark on the solid substrate. Use this as the offset position dx, dy of the paste outlet of the nozzle 1 3 a (Figure 2) and store it in Built-in RA Μ of microcomputer 17 a. The above is the preliminary positioning of the substrate for the real substrate (step 400). The offset amount dx, dy of the nozzle 13a is used to correct the offset of the nozzle 13a when the coating pattern of the paste pattern is implemented later. . Then, the pattern coating of the paste is sequentially performed from the paste pattern data of the pattern No. 1 (step 500). These are described in detail in Figure 6. In the same figure, the setting of the coating conditions is first implemented (step 5 0 1). This paper size applies to China National Oak Standard (CNS) A4 (210 X 297 mm) -14-- ---------- t __. — I < Please read the notes on the back before filling in this page) Order--M, printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Industrial Cooperatives 464540 A7 B7 5 、 Explanation of invention (12) .nnnk II (Please read the precautions on the back before filling this page)-= «· _« Here, in the RAM of the microcomputer 17a (Figure 3), set the storage of each paste pattern Paste pattern data and a memory table of the coating conditions as shown in FIG. 5, but this step 501 reads the paste pattern data and the application conditions of the paste pattern to be painted from the memory table. And the microcomputer 17 a is usable and stored in the predetermined area of the RAM. Here, first, because the paste pattern of the drawing pattern No. 1 is applied, the coating conditions at this time are read from the memory table via the fifth chart, and the coating speed = V1, the coating pressure = P1, and the coating height 1 = H11. , Coating height 2 = H12, change point coordinate l = (xll, yll), change point coordinate 2 = (xl2, yl2) ........ change point coordinate η = (xln, yln), using microcomputer 17a It can be used in the specified area of the RAM. After finishing the setting of these coating conditions, the Intellectual Property Bureau of the Ministry of Economic Affairs and the Industrial Cooperative Cooperative printed the driving motors 8a, 8b, 10 (Figure 1), and moved the nozzle 13a at the drawing (coating) starting point (step 5 0 2). In this coating start position, the nozzle 13 a is aligned with the ejection port of the nozzle, and the z-axis movement table 9 (Fig. 1) is moved to perform the comparison and adjustment of the nozzle position. Step 4 0 0) and whether the offset amount dx 'dy' of the nozzle 1 3 a stored in the RAM of the microcomputer 17 a is within the allowable range of the offset amount of the nozzle 1 3 a shown in FIG. 2 △ X, Judgment in Ay. If the offset amount dx, dy is within the allowable range (ie, dx and Aygdy of Λχ), the state is still maintained. If it is outside the allowable range (ie, 'Axf dx or Ay <dy), Based on the offset amount of 0x 'dy', the paper size of the 2-axis moving sheet is adjusted to the Yin National Standard (CNS) A4 (210 X 297 mm) -15-46454 0 A7 B7 V. Description of the invention (13) 9, and by adjusting the paste storage tube 1 3 * to solve the misalignment between the paste discharge port of the nozzle 1 3 a and the desired position of the solid substrate 1 俾 initial positioning of the nozzle 1 3 a At the desired position. Then, the servo motor 12 (Fig. 1) is driven to set the height of the nozzle 13a (step 503). The set height is the coating height 1 (specifically, the height 11 in FIG. 5) of the coating conditions of the pattern No. 1 which has been read from the memory table of the above RAM, and is discharged from the nozzle 13a. The distance to the surface of the solid substrate is set at the coating height 11. After finishing the above processing, the servo motors 8a, 8b are driven based on the pasty pattern data stored in the RAM of the microcomputer 17a, printed by the cooperative of the staff of the Intellectual Property Bureau of the Ministry of Economic Affairs --------- -(! 装 -------- Order. (Please read the precautions on the back before filling in this page) 1 0 (Figure 1), so that the paste from the nozzle 1 3 a spit out to In a state facing the solid substrate, as the paste pattern data moves in the X and y directions (step 504). Then, from the positive pressure source 30 (FIG. 3) via the valve unit 32 (FIG. 3), The air pressure of the coating pressure P 1 adjusted to the coating conditions of the above pattern N 0.1 by the positive pressure regulator 30 a (FIG. 3) is applied to the paste storage cylinder 13 and the paste from the nozzle 13 a is applied. The discharge outlet starts to spit out the paste (step 5 05). At this time, immediately before the spit is discharged from the negative pressure source 3 1 (picture 3) via the valve unit 32 (picture 3), it will be adjusted by the negative pressure. Device 3 la (Figure 3) The negative pressure adjusted to the back pressure of the bag is applied to the paste storage tube for 13 minutes. When the paste remaining in the paste outlet of the nozzle 1 3 a is sucked in, the end The paste can be applied without stagnation. At the same time when this coating and drawing operation is started, the microcomputer 1 7 a is from the standard of the paper in China. The standard # CNSU4 (210 X 297 mm) -16-464540 A7 B7 Printed by Shelley Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (14) The measured data of the distance between the paste outlet of the nozzle 1 3 a and the surface of the solid substrate from the meter 14 and the nozzle Substrate surface undulation | After driving the servo motor 12 with this measurement, as shown in FIG. 7 (a), the coating pattern of the paste pattern is performed (step 5 0), so that the The set height of the nozzle 1 3 a is maintained constant, that is, the coating height 1 maintained at the coating conditions of the above-mentioned pattern No. 1. The microcomputer 17 a reads the paste pattern on the solid substrate from the motor controller 17 b. The coating position (coordinates) (step 507) determines whether or not the change point 1 (X11 · y11) of the coating conditions of the above pattern No. 1 has been reached (step 508). When the change point 1 is reached | The distance between the object coating surface and the nozzle is from the above pattern The coating pressure of the coating conditions of N.1 was changed to coating height 2 = 1112 on the 11th (step 509). This change was implemented by driving the servo motor 12. (7th Γϊ)) The figure shows the change point The state of 1 is Η 1 1 > HI 2 »When changing points 1, 2, ..., continue, during this period, while setting the coating height 2 = H 1 2, continue to implement the paste pattern Coating drawing. As shown in Figure 7 (b), at the point where the coating height becomes lower, if the coating speed and pressure are not changed, the paste discharged from the nozzle 13a receives a reaction force from the solid substrate and causes The discharge resistance becomes large, so it is not easy to discharge from the nozzle 1 a, and the amount of coating to be applied as a paste is reduced to reduce the amount of coating height. Conversely, when the coating height 2 = H 1 2 becomes higher than the coating height 1 = H 1 1 ', the nozzle 1 3 a is bound from the solid substrate (please read the precautions on the back before filling this page). --Send this paper The scale is applicable to the Chinese Painter Standard (CNS) A4 specification (210 X 297 mm) -17 4 6 4 5 4 〇 Intellectual Property Bureau of the Ministry of Economic Affairs, cooperating with Du Du printed A7 B7 V. Description of the invention < 15) Keep away, Therefore, the reaction force from the solid substrate becomes smaller and the discharge resistance becomes smaller. Therefore, the paste is easily ejected from the nozzles 1 a and the application amount of the paste is increased. Therefore, set the coating speed or pressure, coating height 1, coating height 2 and other numbers 値 and the position coordinate relationship of the change point as the coating conditions shown in Figure 5, through the memory table stored in the RAM of the microcomputer 17a, The coating height of the paste can be adjusted at any position of the paste pattern, and the coating amount of the paste on the solid substrate can be adjusted. In this way, the painting and drawing of the paste pattern is performed, but it is determined whether the painting and drawing operation of the paste pattern is continued or terminated, and whether the application point is the end point of the paste pattern to be coated determined by the paste pattern data. It is determined by decision (step 5 1 0), and if it is not the end point, it returns to the measurement processing of the surface undulation of the real substrate, that is, returns to the control coating height (step 506), and then performs coordinate confirmation (step 507). In this way, the coating height is changed every time the change point is reached, and the coating height is changed until the change point η. Hereinafter, the above-mentioned processes are repeated. When the coating end of the paste pattern is reached, the positive pressure source 30 (FIG. 3) is stopped through the valve unit 32 (FIG. 3) by the positive pressure regulator 3 0 a ( (Figure 3) The air pressure adjusted to the application pressure P 1 is applied to the paste storage cylinder 1 3, and the paste from the paste discharge port of the nozzle 1 3 a is stopped (step 5 1 1). The application operation of the paste pattern is all the m paste pattern data set until the end (step 5 1 2). When the end of the paste pattern of the last pattern N 〇m is reached, then Drive Servo Motor (please «read the note § on the back side before filling this page)! Binding · This paper size is in accordance with the Chinese standard (CNS > A4 specification (210 X 297 mm) -18- A7 B7 V. Description of the invention (16) The motive force 1 2 俾 raises the nozzle 1 3 a, and the pattern drawing operation is terminated, that is, the pattern coating is terminated (step 500) ° Then, in FIG. 4, the substrate is discharged (step 600). In the first image, The solid substrate is desorbed from the substrate suction plate 4 and the substrate conveyors 2a, 2b are raised to place the solid substrate 2 2. In this state, the substrate conveyors 2 a and 2 b are discharged to the outside of the device, and then it is determined whether or not the entire process is completed (step 700). The same paste pattern data is used for coating and drawing on a plurality of solid substrates. In the case of a paste pattern • Repeat for each of the real substrates from the substrate mounting (step 3 0 0). Then, when the series of processing is completed for all the solid substrates, all operations are completed (step 8 0 0) ° or more An embodiment of the present invention, but the present invention is not limited to such an embodiment. That is, in the above-mentioned embodiment, the nozzle is used as a movable, and the substrate is fixed, but the nozzle is fixed and fixed. The substrate can also be used as an activity. In the curved portion of the paste pattern, even when the coating speed is slowed, reducing the coating height in a slow range can reduce the amount of paste application, and the entire paste pattern can be applied across the entire surface. The amount of paste applied per unit time becomes constant, and a paste pattern of a desired shape can be formed by high-precision application. Also, the application pressure is kept constant and Increasing the coating height and speeding up the coating speed in conjunction with this 'because the coating amount of the paste per unit distance has not changed, and the line width of the formed paste pattern is constant', so in the description ill ---- --- {__f ---- < Please read the precautions on the back before filling out this page) Lights-Printed on the paper of the Intellectual Property Bureau Employees Consumer Cooperatives of the Ministry of Economic Affairs, the paper size is applicable to the Chinese Standard for Crisis (CNS) A4 ( 210 * 297 mm) -19-4 b 4 5 4 〇 A7 _B7_ V. Description of the invention (17) (Please read the precautions on the back before filling this page) It is not necessary to adjust the coating pressure during the drawing process when it is not responsive. By combining the coating height and the coating speed, while maintaining high reliability, the coating drawing time of the desired paste pattern can be shortened and productivity can be improved. In addition, if the coating pressure is constant and the coating speed is maintained at a constant state, when the coating height is increased or decreased, the coating amount of the paste per unit distance is increased or decreased, so it is not necessary to perform the drawing. Adjustment of the coating pressure with poor responsiveness can obtain a paste pattern in which the line width is changed at a desired position. (Effects of the Invention) As described above, according to the present invention, it is easy to adjust a sharp coating amount, and a desired shape can be formed with excellent accuracy. (Brief description of the drawings) Stomach FIG. 1 is a perspective view showing an embodiment of a paste coating machine according to the present invention. Fig. 2 is an enlarged perspective view showing a portion of the paste container and the distance gauge shown in Fig. 1; Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Shelley Co., Ltd. Figure 3 is a block diagram showing the structure of the control section shown in Figure 1 or the structure of the air pressure control section and the substrate control section of the paste container. Fig. 4 is a flowchart showing an embodiment of the paste coating method according to the present invention and the paste coating machine shown in Fig. 1; Fig. 5 is a diagram showing a specific example of the coating conditions set in step 200 of Fig. 4. This paper size is applicable to the standard of the National Standard for the Distressed Countries (CNS) A4 (210 X 297 mm) -20- 4 〇 4 5 4 · 0 A7 B7 V. Description of the invention (18) Figure 6 is shown in detail in Figure 4 The flow chart of step 5 0 0. Fig. 7 is a diagram showing a change in the coating height and a change in the amount of paste coating when the coating pressure is the same. (Description of symbols) 13a: nozzle, 22: substrate, 23: Paste pattern (Please read the precautions on the back before filling out this page) Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperative, this paper is printed in accordance with China National Standard (CNS) A4 (210 * 297 mm)- twenty one -