經濟部智慧財產局員工消費合作社印製 f 442 35 6_ 五、發明說明（1 ) (發明所屬之技術領域） 本發明有關於將前步驟所投入之印刷基板等的扳狀工 件依據設於該板狀工件上之導標（Guide Mark)予以定位 後供給至後步驟加工裝置之板狀工件之搬運裝置。 (先前技術） 以往在電路基板的製作上係採用在一張大面積的基板 (原板）上印刷多數電路圖案之後，切斷·分離成各電路 圖樣1以獲得多數之電路基板的方法。於此切斷時，在基 板上設置至少一對導孔，使該一對導孔裝置於設在加工裝 置的導銷等予以定位，依序進行切斷者。因此一對導孔係 構成決定切斷位置之基礎，而要求必需設於正確的位置上 。而爲了設置此一對導孔用之開孔裝置有預先以攝影機構 攝影預先設置之一對導標，影像處理該攝影數據後，依據 其結果而定位開孔爲一般所熟知者。 習用之開孔裝置之印刷基板的定位，例如日本專利公 報特開平9 一 1 8 3 0 9 7號公報所記載，由前步驟投入 印刷基板之後，利用一對攝影機構攝影設於印刷基扳的一 對導標，以影像處理裝置影像處理該影像數據以獲得兩導 標的位置數據，而以載置印刷基板之定位裝置進行印刷基 板之定位者。又此裝置中，爲因應各種尺寸之印刷基板’ 一對攝影機構的其中之一的攝影機構是利用移動機構可移 動地設置可變更與位在另一側之固定位置之攝影機構間的 間隔。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -------^------裝--------訂---------線 {請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消费合作社印製 1 4 4235 6 a? -----_B7___ 五、發明說明g ) 再者，如印刷基板爲多層基板，該設置之一對導標不 在表面而係設於內層部時，攝影機構爲照射X線之X線產 生裝置及攝影導標之穿透像的X線檢測器所構成。 (發明所欲解決之問題） 習用者係使用一對攝影機構攝影設於板狀工件之一對 導標’因此需要設置一對（2台）攝影機構，又爲了對應 如一對導標不同間隔等種種尺寸的板狀工件，因此必須有 移動攝影機構之配置間隔的構成，此乃構成板狀工件之搬 運裝置上造成成本昂貴的原因。又板狀工件之定位裝置及 搬運裝置係分別構成，所以相對增加其構成要件，使裝置 整體增大者。 於是本發明乃以一個攝影機構攝影一對導標，可減少 高價之零件件數，又以同一裝置進行板狀工件之搬運及定 位，以獲得整體裝置之小型化者。 (解決問題之手段） ^ 爲達成上述目的，本發明係於設置一對導標之板狀工 件的定位及搬運（供給至下步驟）中，藉單一之攝影機構 依序攝影各導標而獲得該位置數據，並據此移動於ΧΥ Θ 方向使定位板狀工件定位後，藉同一機構維持著定位的狀 態下搬蓮到下一步驟所構成。 (發明之實施形態） 本紙張尺度適用中國國家標準（CNS)A4規格（210x297公芨） -5- I--I — I ------ I · I---r I--訂- !11!1· ^^ 《請先閱讀背面之注意事項再硪寫本頁-· 經濟部智慧財產局員工消費合作社印製 A7 f 442 3 5 6 B7 五、發明說明c ) 本發明係將由前步驟所投入之板狀工件，依據設於其 搬運方向之一對導標予以定位，而供給至下一步驟之板狀 工件之搬運裝置，其特徵爲：支持板狀工件予以搬運的同 時，可使板狀工件朝著XY 0方向移動之搬運機構：將一 對導標依序以形成上述工件之搬運方向的下游測之第1導 標，及上游側之第2導標分別攝影之攝影機構；影像處理 上述攝影機構所獲得之攝影數據以獲得上述導標之位置數 據的影像處理裝置；及，依據上述影像處理裝置所獲得之 上述導標的位置數據來控制上述搬運機構的動作*使上述 板狀工件定位之控制裝置所構成。 上述板狀工件之搬運裝置中，板狀工件爲多層基板而 一對導標設置於內部層時，攝影機構爲於板狀工件上照射 X線之X線產生裝置，及攝影一對導標之穿透影像的X線 檢測器構成即可。 (實施例） 下面依圖說明本發明之實施例如下。又在本實施例中 ，板狀工件乃外形形狀不定之多層基板w，以設於內部層 之多層基板W之一對導標Μ的場合說明之。 圖1是表示顯示使用本發明板狀工件之搬運裝置而構 成導標開孔系統構成之整體前視圖。依序配置供給多層基 板W用之投入單元A;將投入之多層基板定位而搬運至下 —步驟之開孔單元之定位單元B :及於多層基板之預定位 置開孔之開孔單元C。本發明板狀工件之搬運裝置係可運 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -6 · ---—---! l· ! I β ! I I — I (請先閱讀背面之注意事項再块寫本頁) 經濟部智慧財產局員工消費合作社印製 I 442 3 5 6 A7 __B7____ 五、發明說明θ ) 用於定位單元B。而投入單元A及開孔單元C之詳細說明 與本發明之要旨無關，因此省略其說明。 於圖2顯示定位單元B之整體前視圖，圖3爲同整體 側視面圖，圖4爲同整體俯視圖。於定位單元B之上游側 即投入單元A側，設置載置由投入單元A所投入之多層基 板W的運送機1 (參閱圖1)。於運送機1之下游側設置 頂接運送機1搬運而來之多層基板W的外邊，使多層基板 停止於預定之位置用之檔止器2。該檔止器2係可突出· 收入於運送機1之搬運面者。（參閱圖4)。 圖5係表示設置檔止器2之部份R的放大圖。如圖5 所示，頂接檔止器2之多層基板W側的附近設置不致妨礙 多層基板W搬運狀態之可確認多層基板有無存在用之感測 器3。 由運送機1搬運而以檔止器2停止於預定位置之多層 基板W的上下設置攝影機構4，形成多層基板W之一對導 標Μ中的多層基板W之搬運方向下游側的第1導標Μ 1係 進入攝影機構4之視野。攝影機構4爲對多層基板W照射 X線之X線產生裝置4 a ，及X線之投影輸入影像處理裝 置（未圖示）用之X線檢測器4 b所構成。本發明之板狀 工件之搬運裝置中只有設置一個攝影機構4。由於本實施 例之攝影裝置4係使用X線，因此設於多層基板W之導標 Μ雖爲內部層，即使導標未露出於多層基板W的表面仍可 以攝影導標Μ的位置。多層基板W之一對導標Μ中的多層 基板Μ中，位於多層基板W之搬運方向上游側的第2導標 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -------^-----I * I---^---—訂· I I J I — I I (靖先閲讀背面之注意事項再填寫本I> 經濟部智慧財產局員工消費合作社印製 r 44235 6 A7 _____B7__ 五、發明說明自) M2之攝影係如後述，從預先輸入之多層基板W的第1導 標Ml與第2導標M2的間隔，藉搬送多層基扳進行以搬 運機構Η使第2導標M2進入攝影機構4的視野爲止。 如圖3所示，X線產生裝置4 a的下方設有防止X線 之洩漏用防護管4 c及X線防護簾4 d。X線防護簾4 d 係可藉氣缸4 e而上下者，X線爲X線檔門4 f所遮斷時 朝著上方上昇以避免造成多層基板W搬運的妨礙。又本實 施例之多層基板W爲不定形外觀形狀，多層基板W之外形 基準的定位係屬槪略的程度，因此X線檢測器4 b可採用 較廣範圍約5 Ο X 5 Omm的攝影。所以多層基板W即使 爲檔止器2停止的程度的精度時，仍可測定導標Μ的位置 。又以攝影機構4之攝影狀況係可經由監視器3 5形成作 業員可以目視者。 圖6係表示保持多層基板W而可朝著ΧΥ Θ方向移動 之搬運機構的俯視圖，圖7爲同側視圓，圖8爲同前視。 其中，X方向係表示多層基板W之搬運方向，Υ方向係表 示與多層基板W之搬運方向成直角方向，0方向係於 χγ平面中使多層基板w水平旋轉的方向。 舖設於X方向之直接作用導軌5上，藉直接作用導向 螺帽6而可往復移動地設置X方向滑件7。X方向滑件7 係固定於掛設在一對帶輪8a ，8b上之確動皮帶9的一 部份上，帶輪8 a係可藉伺服馬達1 〇自由旋轉控制者。 所以X方向滑件7係形成可於帶輪8 a ，8 b間的任意位 置上移動者。（參閱圖2)。 本紙張尺度適用令國國家標準（CNS)A4規格（210 X 297公釐） -8- ϋ ϋ i It I n I 訂--- If n n n ( (請先閱讀背面之注意事項再J/寫本頁i 經濟部智慧財產局員工消費合作杜印製 f 4 4235 6 A7 ____B7____ 五、發明說明@ ) 如圖6所示，X方向滑件7上固定一對直接作用導向 螺帽11a ，lib。在直接作用導向螺帽11a ’ 11 b上支持可朝著Y方向移動之一對直接作用導軌1 2 a ’ 12b。直接作用導軌12a ，12b上固定Y方向滑件 13。又一對直接作用導軌12a ，12b上分別藉直接 作用導向螺帽14a ，14b設置可自由移動之連結構件 15a ，15b。兩連結構件15a ，15b係具有段差 的形狀（參閱圖8)，與固定在直動導向螺帽14a ，1 4 b的部份之相反端上藉托架1 6 a ，1 6 b固定有滾珠 絲桿用螺帽1 7 a ，1 7 b，兩滾珠絲桿用螺帽1 7 a ， 1 7 b係栓緊於滾珠絲桿1 8 a ，1 8 b上。滾珠絲桿一 端係藉軸承1 9 a，1 9 b自由旋轉地支持著。其端部是 藉聯結器22 a，221)連結於以馬達托架 20a ，20b固定於X方向滑件7之伺服馬達21a ， 2 1 b的驅動軸上。再者連結構件1 5 a，1 5b上固定 有形成長孔23c，23d之桿23a，24b，桿23 a ，23b之長孔23c，23d中插置有固定於後述旋 轉板26之凸輪從動件24a ，24b的從動軸部24c ，2 4 c之狀態。 在X方向滑件1 3下方藉軸承2 5設置可自由轉動之 旋轉板2 6 (參閱圖8)。又旋轉板2 6下方設有卡盤板 27，卡盤板27上，豎立設置一對直接作用導軸28a ，28b，該直接作用導向軸28a ，28b係形成支撐 於設旋轉板2 6之直接作用導向螺帽2 9 a，2 9 b的狀 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -9- I I I 1-------- - - I I I l· 11 酵,^ (請先閱讀背面之注意事項再硪寫本頁) 經濟部智慧財產局員工消費合作社印製 ，442356 _B7____ 五、發明說明《) 態。又直接作用導軸2 8上端係藉著連結構件3 0連結於 設置Y方向滑件7上之氣缸31的驅動軸上。 因此，當伺服馬達2 1 a ，2 1 b以同方向同脈衝量 旋轉時，固定於兩連結構件15a ，15b之兩桿 2 3 a ，2 3 b朝著Y方向移動，使利用著凸輪從動件 24a ，24b連結之旋轉板26及卡盤板27同時可朝 著Y方向移動。又當伺服馬達2 1 a ，2 1 b同時以同脈 衝量朝著反方向轉動時，可使固定於連結構件 1 5 a之兩桿2 3 a朝著Y方向移動，使固定於連結構件 1 5 b之桿2 3 b朝著與桿2 3 a的反方向移動，藉兩凸 輪從動件24a，24b連結之旋轉板26及卡盤板27 不致朝著Y方向移動而以氣缸31的驅動軸爲旋轉中心形 成可左·右旋轉者。 又驅動氣缸3 1驅動，使連結於連結構件3 0之兩直 接作用導軸28a ，28b朝上下方向移動，旋轉板26 與卡盤板2 7係以不能旋轉形成支持著平行狀態可接觸· 離開者。 在卡盤板2 7設有複數個真空墊3 2，由連接於未圖 示之真空產生裝置的空氣軟管3 2產生負壓形成可吸附多 層基板W。 (動作之說明） 疊載於未圖示之推疊機（配置於圖1之投入單元的左 側）之多層基板W係藉投入單元A之卡盤機構3 4 (參閱 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐〉 -10- HI —-----I I-- ---l· I I I 訂·!--I I (請先閲讀背面之注意事項再填寫本頁> f 4 42 35 6 A7 __B7__ 五、發明說明@ ) 圖1 )載置於定位單元B之運送機1的上游側。其中，於 加工之多層基板W預先設定一對導標 Μ 1，Μ 2的間隔等。預先設定係以連接導孔開孔系統之 電腦（未圖示）進行。 定位單元Β—旦接受來自投入單元Α之多層基板W的 投入完成訊號時，使運送機，啓動以至使多層基板W頂接 從搬運面突出狀態的檔止器2 (圖4之R部，詳細參閱圖 5 )爲止，多層基板W —旦頂接檔止器2停止時，感測器 3可檢測出多層基板W，停止運送機1的動作。多層基板 W爲檔止器2所停止的位置是形成使設於多層基板W之一 對導標Μ中的下游側之第1導標Μ 1進入定位單元B之攝 影機構4之視野的狀態。 於由圖6至圖8所示之多層基板W上方形成待機狀態 之卡盤板2 7是利用氣缸3 1下降，使多層基板W藉真空 墊3 2支持於卡盤板2 7上。將多層基板W支持在卡盤板 2 7的同時，藉氣缸4 e使圖3表示之攝影機構4之X線 防護簾4 d下降使多層基板W接地。一旦確認X線防護簾 4 d之下降，可解除X線產生裝置4 a之X線檔門4 ί的 遮斷，使X線照射於多層基板W。 穿透多層基板W之X線係將第1導標Μ 1的影像投影 在X線檢測器4b (參閱圖2)的攝影面上。以此影像爲 攝影數據影像處理，可獲得第1導標Ml的位置數據。影 像處理完成時後，可以X線檔門4 f遮斷X線，接著X線 防護簾4 d上昇1使多層基板W形成可搬運的狀態。 本紙張尺度適用+國國家標準（CNS)A4規格（210 X 297公釐） .---------------I I l· I I I ------I n^. ί請先閱讀背面之注意事項再i:..\本頁) 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 ，4 42 35 6 A7 _ B7 五、發明說明I?) 當第1導標Ml之攝影完成，多層基板W形成爲可移 動的狀態時，使氣缸3 1動作使卡盤板2 7支持著多層基 板W的狀態地上昇，接著設於多層基板W之一對導標μ中 上游側之第2導標M2係搬運多層基板W進入攝影機構視 野的位置。此搬運係依據預先預設定之多層基板W的一對 導標Μ的間隔，轉動圖2所示之伺服馬達1 〇而藉著確動 皮帶9的驅動使滑件7朝著X方向移動來進行。第2導標 M2 —旦進入攝影機構視野而定位時，與第1導標Μ 1同 樣地進行第2導標M2的攝影而可獲得第2導標M2的位 置數據。 分別攝影第1導標Μ 1及第2導標M2而經影像處理 獲得位置數據時後，計算其兩位置數據及伺服馬達1 〇的 轉動量計算多層基板W之的置姿態，依據該計算結果，多 層基板W搬運至開孔單元C (參閱圖1 )處之間，對X方 向決定伺服馬達1 0的旋轉量，對Υ及Θ方向決定伺服馬 達21a ，21b (參閱圖6)的轉動量，多層基板W係 於ΧΥ β方向定位的狀態下，搬運至開孔單元C。 即如圖6所示，支持多層基板W之卡盤板2 7於Υ方 向定位時，使伺服馬達21a ，21b同時朝著同方向以 同脈衝量轉動，使固定於兩連結構件3 0上之兩桿2 3 a ，2 3 b朝著同Y方向移動，而藉凸輪從動件 24a ，24b將所連結之旋轉板26朝著Y方向移動τ 使卡盤板2 7朝著Y方向移動進行Y方向的定位。又定位 於Θ方向時，令伺服馬達2 1 a ，2 1 b同時以同脈衝量 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公芨） -12- .----------裝-----；----訂---------線 (請先閲讀背面之注意事項再填寫本ΐ A7 442356 ____B7__ 五、發明說明（10 ) 朝著相反方向轉動，使固定於兩連結構件1 5 a ，1 5 b 之兩桿2 3 a ，2 3 b朝著相反之Y方向移動，使桿2 3 a與桿2 3 b朝著相反Υ方向移動，使藉著凸輪從動件2 4a ’ 24b連結之旋轉板26朝著Θ方向轉動，將卡盤 板2 7朝（9方向移動而進行0方向的定位。並且於X方向 ’使伺服馬達1 0轉動而朝X方向移動滑件7，於Y方向 及0方向進行定位狀態之多層基板之X方向的移動，定位 〇 定位單元B之搬運機構Η (參閱圖1，圖2 )係於定 位的狀態下將多層基板W移動至開孔單元C的開孔位置， 以氣缸3 1使卡盤板2 7下降將多層基板W設定於開孔單 元C的台面上。於是定位單元Β對開孔單元C輸出設定完 成訊號。且定位單元Β之搬運機構Η接受來自開孔單元C 之接收完成訊號時，釋放由真空墊3 2對多層基板W的支 持（吸著），且爲了定位及搬運下一多層基板W而恢復至 原位。 如上所述，依據設於板狀工件之一對導標使前步驟投 入之板狀工件（多層基板W)定位，可以供給下一步驟之 加工裝置。 又本實施例雖已說明該板狀工件係於其內部層設有一 對導標Μ之多層基板W，而攝影機構係採用X線產生裝置 4 a及X線檢測器4 b，惟對於板狀工件之表面露出一對 導標者，或運用一般可視光線攝影機作爲攝影機構等皆可 ----—!llt!_ 裝 i!J---—訂---------線 (請先閱讀背面之注意事項再楨寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -13- 經濟部智慧財產局員工消费合作社印製 Τ 44235 6 A7 ______B7 五、發明說明Ο1 ) (發明效果） 依本發明之構成，該搬運板狀工件之搬運機構係包括 板狀工件之定位機構地等被構成，因此可以一台攝影機構 分別攝影板狀工作定位用之一對導標所獲得的位置數據進 行板狀工件之定位，可以使板狀工件搬送·定位的裝置之 構成簡化，小巧化。又由於只需一台單品成本昂貴之攝影 機構即可，而可以降低成本。 又板狀工件爲多層基板，而設於多層基板之一對導標 係設置於內層部時’以X線照射板狀工件之X線產生裝置 ，及攝影一對導標之穿透像的X線檢測器構成之攝影機構 ，攝影一對導標而可獲得該導標之位置數據。 圖式之簡單說明 第1圖係表示使用本發明板狀工件之搬運裝置所構成 的導孔開孔系統構成之整體前視圖。 第2圖係表示使用本發明板狀工件之搬運裝置所構成 的定位單元之整體前視圖。 第3圖係表示使用本發明板狀工件之搬運裝置所構成 定位單元之整體側視圖。 第4圖係表示使用本發明板狀工件之搬運裝置所構成 定位單元之整體上視圖。 第5圖爲第4圖表示之檔止部的放大圖。 第6圖爲板狀工件之搬運裝置的上視圖。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） • 14 - — — — — —--—— — — —— -ml· — — — ^ ·1111111> (請先閱讀背面之没意事項再瑣寫本頁〕 經濟部智慧財產局員工消費合作社印製 Γ 442 35 6 A7 B7 五、發明說明Ο2 ) 第7圖係板狀工件之搬運裝置的側視圖。 第8圖係板狀工件之搬運裝置之前視圖。 C 符 號說明〕 A 投 入 單 元 B 定位 單 元 W 多 層 基 板 ( 板狀 工件） Μ 1 對 導 標 Μ 1 第 1 導 標 Μ 2 第 2 導 標 Η 搬 送 機 構 1 運 送 機 2 檔 止 器 3 感 測 器 4 攝 影 機 構 4 a X 線 產 生 裝 置 4 b X 線 產 生 裝 置 4 c 防 護 管 4 d X 線 防 護 簾 4 e 氣 缸 4 f X 線 檔 門 5 直 接 作 用 導 軌 6 直 接 作 用 導 向螺 帽 7 滑件 (請先閱讀背面之注咅？事項再扩為本頁> 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） Γ 442356 Α7 Β7 五、發明說明〇3 ) 8 a - 8 b 帶輪 確動皮動 9 0 伺服馬達 lb 直接作用導向螺帽 直接作用導軌 經濟部智慧財產局員工消費合作社印製 14a 15a 16a 17a 18a 19a 2 0 a 2 1a 2 2a 2 3a 2 3 c 2 4a 2 4c 2 5 2 6 12b 滑件 14b 15b 1 6 b 1 7 b 18b 19b 2 0b 2 1 b 2 2b 2 3b 2 3d 2 4b 2 7 2 8a 、2 8 b 2 9a ,29b 直接作用導向螺帽 連結構件 托架 螺帽 滾珠絲桿 軸承 馬達托架 伺服馬達 聯結器 桿 長孔 凸輪從動件 從動軸部 軸承 旋轉板 卡盤板 {請先閱讀背面之注意事項再矿烏本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 ί 442 35 6 Β7 五、發明說明〇4 ) 3 0 連 結 構 件 3 1 Tr^t 缸 3 2 空 氣 軟 管 3 4 卡 盤 機 構 3 5 監 視 器 ------------I -----..----訂.！ ------ {請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張又度適用中國國家標準（CNS)A4規格（210 X 297公釐）Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs f 442 35 6_ V. Description of the invention (1) (Technical field to which the invention belongs) The present invention relates to a plate-shaped work piece such as a printed circuit board put in the previous step. The guide mark on the workpiece is positioned and supplied to the conveying device of the plate-shaped workpiece in the processing device of the subsequent step. (Prior art) Conventionally, the circuit board is produced by printing a large number of circuit patterns on a large-area substrate (original board) and then cutting and separating them into circuit patterns 1 to obtain a plurality of circuit boards. At this time, at least one pair of guide holes is provided on the base plate, and the pair of guide hole devices are positioned on guide pins or the like provided on the processing device, and the cutting is performed in order. Therefore, a pair of guide holes form the basis for determining the cutting position, and it is required to be set in the correct position. In order to set the opening device for the pair of guide holes, a pair of guide marks set in advance by a photographing mechanism is used for photography. After the image data is processed by the image, the positioning holes are generally known based on the results. The positioning of the printed circuit board of the conventional hole-opening device is described in, for example, Japanese Patent Laid-Open No. 9-1 8 3 0 97. After the printed circuit board is put in the previous step, a pair of photographing mechanisms are used to photograph the printed circuit board. For a pair of guides, the image data is image-processed by an image processing device to obtain position data of the two guides, and the positioning of the printed substrate is performed by a positioning device on which the printed substrate is placed. In this device, one of a pair of photographing mechanisms corresponding to printed substrates of various sizes is a photographing mechanism in which a distance between the photographing mechanism and a photographing mechanism at a fixed position on the other side is movably set by a moving mechanism. This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) ------- ^ ------ installation -------- order --------- --Line {Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1 4 4235 6 a? -----_ B7___ V. Description of the invention g) Furthermore, such as printed circuit boards It is a multi-layer substrate. When one pair of guides is not on the surface and is set in the inner layer, the imaging mechanism is composed of an X-ray generating device that irradiates X-rays and an X-ray detector that penetrates the image of the guide. (Problems to be Solved by the Invention) A user uses a pair of photographing mechanisms to photograph a pair of guides provided on one of the plate-shaped workpieces. Therefore, a pair of (two) photographing mechanisms are required, and in order to correspond to a pair of guides with different intervals, etc. Plate-shaped workpieces of various sizes must have a configuration of the arrangement interval of the moving photographing mechanism. This is the reason for the high cost of the conveying device that constitutes the plate-shaped workpiece. Since the positioning device and the conveying device of the plate-shaped workpiece are separately configured, the constituent elements are relatively increased to increase the overall size of the device. Therefore, the present invention uses a photographing mechanism to photograph a pair of guides, which can reduce the number of high-priced parts, and also carry and position the plate-shaped workpiece in the same device to obtain a miniaturized device. (Means for Solving the Problem) ^ In order to achieve the above-mentioned object, the present invention is obtained by positioning and transporting a plate-shaped workpiece provided with a pair of guides (supplied to the next step) by sequentially photographing each guide in a single photography mechanism. This position data is moved in the XYZ direction to position the positioning plate-like workpiece, and then moved to the next step while maintaining the positioning by the same mechanism. (Implementation form of the invention) This paper size applies the Chinese National Standard (CNS) A4 specification (210x297 cm) -5- I--I — I ------ I · I --- r I--Order- ! 11! 1 · ^^ "Please read the precautions on the back before writing this page-· Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 f 442 3 5 6 B7 V. Description of the invention c) The present invention is based on the previous The plate-shaped workpiece input in the step positions the guide according to one of its conveying directions and supplies the plate-shaped workpiece conveying device to the next step, which is characterized in that while supporting the plate-shaped workpiece, it can Conveying mechanism for moving a plate-shaped workpiece toward the XY 0 direction: a photographing mechanism for sequentially photographing a pair of guides to form a first guide for downstream measurement and a second guide for upstream detection ; An image processing device that image-processes the photographic data obtained by the photographing mechanism to obtain the position data of the guide; and controls the operation of the conveying mechanism according to the position data of the guide obtained by the image processing device Control device for positioning workpiece Constitution. In the above-mentioned plate-shaped workpiece conveying device, when the plate-shaped workpiece is a multi-layer substrate and a pair of guides is provided on the inner layer, the photographing mechanism is an X-ray generating device for irradiating X-rays on the plate-shaped workpiece and photographing a pair of guides. The X-ray detector that penetrates the image can be configured. (Embodiment) An embodiment of the present invention will be described below with reference to the drawings. Also in this embodiment, the plate-shaped workpiece is a multilayer substrate w having an indefinite shape, and the case where one of the multilayer substrates W provided on the inner layer is used as a guide M will be described. Fig. 1 is an overall front view showing the construction of a guide hole forming system using a conveying device for a plate-like workpiece according to the present invention. The input unit A for supplying the multi-layer substrate W is sequentially arranged; the positioning unit B of the hole-opening unit in the step of positioning the multi-layer substrate that is put in and carrying it down; and the hole-opening unit C that makes holes at a predetermined position of the multi-layer substrate. The conveying device of the plate-shaped workpiece according to the present invention can be transported. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). -6 · --------! L ·! I β! II — I (Please read the precautions on the back before writing this page) I 442 3 5 6 A7 __B7____ Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention θ) Used for positioning unit B. The detailed description of the input unit A and the opening unit C is irrelevant to the gist of the present invention, and therefore descriptions thereof are omitted. An overall front view of the positioning unit B is shown in FIG. 2, FIG. 3 is a side view of the same body, and FIG. 4 is a top view of the same body. On the upstream side of the positioning unit B, that is, the side of the input unit A, a conveyor 1 (see Fig. 1) for placing the multi-layer substrate W input by the input unit A is provided. A stopper 2 for stopping the multilayer substrate at a predetermined position is provided on the downstream side of the conveyor 1 so as to contact the outer side of the multilayer substrate W carried by the conveyor 1 and stop the multilayer substrate at a predetermined position. This stopper 2 is a person that can protrude and collect on the carrying surface of the conveyor 1. (See Figure 4). FIG. 5 is an enlarged view showing a portion R in which the stopper 2 is provided. As shown in Fig. 5, a sensor 3 is provided near the side of the multilayer substrate W of the top stopper 2 so as to prevent the presence of the multilayer substrate W from interfering with the transport state of the multilayer substrate W. A photographing mechanism 4 is provided above and below the multilayer substrate W transported by the conveyor 1 and stopped by the stopper 2 at a predetermined position to form a first guide of one of the multilayer substrates W on the downstream side in the transport direction of the multilayer substrate W in the guide M. The standard M 1 enters the field of view of the photographing agency 4. The photographing mechanism 4 is composed of an X-ray generating device 4 a that irradiates X-rays to the multilayer substrate W, and an X-ray detector 4 b for an X-ray projection input image processing device (not shown). The plate-like workpiece conveying device of the present invention is provided with only one photographing mechanism 4. Since the photographing device 4 of the present embodiment uses X-rays, although the guide M provided on the multilayer substrate W is an internal layer, the position of the guide M can be photographed even if the guide is not exposed on the surface of the multilayer substrate W. Among the multi-layer substrates M, one of the multi-layer substrates W, the second guide specimen on the upstream side of the multi-layer substrate W in the conveying direction paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm)- ----- ^ ----- I * I --- ^ ---— Order · IIJI — II (Jing first read the notes on the back before filling in this I > Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs r 44235 6 A7 _____B7__ 5. The description of the invention) The photography of M2 is described later. The distance between the first guide M1 and the second guide M2 of the multi-layer substrate W input in advance is used to carry the multi-layer substrate to carry the mechanism. The second guide M2 is brought into the field of view of the imaging mechanism 4. As shown in FIG. 3, a protective tube 4c for preventing X-ray leakage and an X-ray protective curtain 4d are provided below the X-ray generating device 4a. The X-ray protective curtain 4 d can be moved up and down by the air cylinder 4 e. When the X-ray is blocked by the X-ray shutter 4 f, it rises upward to prevent the multilayer substrate W from being interfered with. In addition, the multilayer substrate W of this embodiment has an irregular appearance shape, and the positioning of the outer shape of the multilayer substrate W is based on a rough degree. Therefore, the X-ray detector 4b can take a wide range of photography of about 50 × 50 mm. Therefore, even when the multilayer substrate W has a degree of accuracy at which the stopper 2 stops, the position of the guide M can be measured. In addition, the photographing status of the photography agency 4 can be formed by the monitors 35 and the operators can see. FIG. 6 is a plan view showing a conveying mechanism that holds the multilayer substrate W and can move in the XYZ direction. FIG. 7 is a circle on the same side, and FIG. 8 is a front view. Among them, the X direction indicates the conveyance direction of the multilayer substrate W, the Υ direction indicates a right-angle direction with the conveyance direction of the multilayer substrate W, and the 0 direction is a direction in which the multilayer substrate w is horizontally rotated in the χγ plane. It is laid on the direct acting guide rail 5 in the X direction, and the X direction sliding member 7 is reciprocally movable by the direct acting guide nut 6. The X-direction slider 7 is fixed on a part of the moving belt 9 which is hung on a pair of pulleys 8a, 8b. The pulley 8a can be controlled by the servo motor 10 to rotate freely. Therefore, the X-direction slider 7 is formed to be able to move at any position between the pulleys 8a, 8b. (See Figure 2). This paper size is applicable to the national standard (CNS) A4 specification (210 X 297 mm) -8- ϋ ϋ i It I n I Order --- If nnn ((Please read the precautions on the back before J / write Page i Consumption cooperation of employees of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed by Du F 4 4235 6 A7 ____B7____ V. Description of the invention @) As shown in FIG. 6, a pair of direct-acting guide nuts 11 a and lib are fixed on the X-direction sliding member 7. A pair of direct-acting guide rails 1 2 a '12b that can be moved in the Y direction are supported on the direct-acting guide nuts 11a' 11b. The Y-direction slide 13 is fixed on the direct-acting rails 12a, 12b. Another pair of direct-acting guide rails 12a 12b are provided with freely movable connecting members 15a and 15b by direct acting guide nuts 14a and 14b, respectively. The two connecting members 15a and 15b have stepped shapes (see FIG. 8), and are fixed to the direct-acting guide nuts 14a. On the opposite end of the part of 1 4 b, the nuts 1 7 a and 1 7 b for the ball screw are fixed to the brackets 16 a and 1 6 b. The nuts for the two ball screws 1 7 a and 1 7 b is bolted to the ball screw 1 8 a, 1 8 b. One end of the ball screw is supported freely by bearings 1 9 a, 1 9 b With its end portions by a coupling 22 a, 221) connected to a motor bracket 20a, 20b is fixed to the X direction the slider 7 of the servo motor on the drive shaft 21a, 2 1 b of. Further, rods 23a and 24b forming long holes 23c and 23d are fixed to the connecting members 15a and 15b, and cam followers fixed to the rotation plate 26 described later are inserted into the holes 23c and 23d of the rods 23a and 23b. The states of the driven shaft portions 24c, 2c of 24a, 24b. A rotating plate 2 6 (refer to FIG. 8) is provided below the X-direction slider 1 3 via a bearing 2 5 to rotate freely. A chuck plate 27 is arranged below the rotating plate 26, and a pair of direct acting guide shafts 28a, 28b are erected on the chuck plate 27. The direct acting guide shafts 28a, 28b are formed to support the direct rotation of the rotating plate 26. The shape of the action guide nut 2 9 a, 2 9 b The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) -9- III 1 ----------III l · 11 Yeast, ^ (Please read the notes on the back before writing this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, 442356 _B7____ V. Description of the invention "). The upper end of the direct-acting guide shaft 28 is directly connected to the drive shaft of the air cylinder 31 provided on the Y-direction slider 7 through a connecting member 30. Therefore, when the servo motors 2 1 a and 2 1 b rotate in the same direction and with the same pulse amount, the two rods 2 3 a and 2 3 b fixed to the two connecting members 15a and 15b move in the Y direction, so that the cams are driven from the The rotating plate 26 and the chuck plate 27 connected by the moving members 24a and 24b can move in the Y direction at the same time. When the servo motors 2 1 a and 2 1 b are simultaneously turned in the opposite direction with the same pulse amount, the two rods 2 3 a fixed to the connecting member 1 5 a can be moved in the Y direction, and the fixed to the connecting member 1 The rod 2 3 b of 5 b moves in the opposite direction to the rod 2 3 a. The rotary plate 26 and the chuck plate 27 connected by the two cam followers 24a and 24b do not move in the Y direction and are driven by the cylinder 31. The axis is the center of rotation and can be rotated left and right. The air cylinder 31 is driven to move the two direct-acting guide shafts 28a and 28b connected to the connecting member 30 to the up-and-down direction. The rotating plate 26 and the chuck plate 27 are in a non-rotatable state and can be contacted and separated in a parallel state. By. A plurality of vacuum pads 32 are provided on the chuck plate 27, and a negative pressure is generated by an air hose 32 connected to a vacuum generating device (not shown) to form a multi-layered substrate W. (Description of action) The multilayer substrate W stacked on the pusher (not shown on the left of the input unit in Figure 1), which is not shown in the figure, is a chuck mechanism 3 of the input unit A (see this paper for the application of Chinese national standards) (CNS) A4 specification (210 X 297 mm) -10- HI —----- I I-- --- l · III Order ·!-II (Please read the precautions on the back before filling this page > f 4 42 35 6 A7 __B7__ V. Description of the invention @) Figure 1) The upstream side of the conveyor 1 placed on the positioning unit B. Among them, a pair of guides M 1, M are set in advance on the processed multilayer substrate W Intervals such as 2 are set in advance by a computer (not shown) connected to the pilot hole opening system. Positioning unit B—When the input completion signal from the multi-layer substrate W of the input unit A is received, the conveyor is started up to When the multilayer substrate W is brought into contact with the stopper 2 (part R in FIG. 4, see FIG. 5 in detail) protruding from the conveying surface, the sensor 3 can detect when the multilayer substrate W is stopped with the stopper 2 stopped. The multi-layer substrate W is stopped, and the operation of the conveyor 1 is stopped. The multi-layer substrate W is a position where the stopper 2 is stopped. One of the substrates W is in a state where the first guide M1 on the downstream side of the guides M enters the field of view of the photographing mechanism 4 of the positioning unit B. A standby state is formed above the multilayer substrate W shown in FIGS. 6 to 8. The chuck plate 27 is lowered by the air cylinder 31, so that the multilayer substrate W is supported on the chuck plate 27 by the vacuum pad 32. While the multilayer substrate W is supported on the chuck plate 27, the cylinder 4e is used to make the figure The X-ray protective curtain 4 d of the photographing mechanism 4 indicated by 3 is lowered to ground the multi-layer substrate W. Once the X-ray protective curtain 4 d is confirmed to be lowered, the X-ray door 4 of the X-ray generating device 4 a can be lifted off, The X-rays are irradiated on the multilayer substrate W. The X-rays penetrating the multilayer substrate W project the image of the first guide M 1 on the photographic surface of the X-ray detector 4b (see FIG. 2). This image is used as photographic data. The image processing can obtain the position data of the first guide M1. After the image processing is completed, the X-ray door 4 f can be used to block the X-rays, and then the X-ray protective curtain 4 d is raised 1 to make the multilayer substrate W into a transportable state. . This paper size is applicable to + national standard (CNS) A4 specification (210 X 297 mm) ....... II l · III ------ I n ^ ί Please read the notes on the back before i: .. \ this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed by the Consumer Cooperatives of the Ministry of Economic Affairs, Intellectual Property Bureau, 4 42 35 6 A7 _ B7 V. Description of Invention I? ) When the photography of the first guide M1 is completed and the multilayer substrate W is formed in a movable state, the air cylinder 31 is moved to raise the chuck plate 27 to support the multilayer substrate W, and is then set on the multilayer substrate W. The second guide M2 on the upstream side of the pair of guides μ is a position where the multilayer substrate W is carried into the field of view of the imaging mechanism. This conveyance is performed according to a preset interval of a pair of guide marks M of the multilayer substrate W, and the servo motor 10 shown in FIG. 2 is rotated to move the slider 7 in the X direction by the drive of the assured belt 9. . Second guide M2 —When the camera enters the field of vision to locate the camera, the second guide M2 is photographed in the same manner as the first guide M1 to obtain the position data of the second guide M2. When the first guide M1 and the second guide M2 are photographed and the position data is obtained through image processing, the two position data and the rotation amount of the servo motor 10 are calculated, and the position of the multilayer substrate W is calculated. Based on the calculation results The multi-layer substrate W is transported between the opening unit C (see FIG. 1), and the rotation amount of the servo motor 10 is determined for the X direction, and the rotation amounts of the servo motors 21a, 21b (see FIG. 6) are determined for the Υ and θ directions. The multilayer substrate W is transported to the opening unit C in a state where the multilayer substrate W is positioned in the XYZ β direction. That is, as shown in FIG. 6, when the chuck plate 27 supporting the multi-layer substrate W is positioned in the Υ direction, the servo motors 21a, 21b are simultaneously rotated in the same direction with the same pulse amount, so as to be fixed on the two connecting members 30. The two levers 2 3 a and 2 3 b move in the same Y direction, and by the cam followers 24a and 24b, the connected rotating plate 26 is moved in the Y direction and the chuck plate 2 7 is moved in the Y direction. Positioning in the Y direction. When it is positioned in the direction of Θ, the servo motors 2 1 a and 2 1 b are applied to the same pulse size at the same time. The paper size applies the Chinese National Standard (CNS) A4 (210 X 297 cm) -12- .----- ----- Equipment -----; ---- Order --------- line (please read the notes on the back before filling in this ΐ A7 442356 ____B7__ V. Description of the invention (10) Turn in the opposite direction so that the two rods 2 3 a and 2 3 b fixed to the two connecting members 1 5 a and 1 5 b move in the opposite Y direction so that the rod 2 3 a and the rod 2 3 b face the opposite. Direction, so that the rotating plate 26 connected by the cam follower 2 4a '24b rotates in the direction of Θ, and the chuck plate 27 is moved in the 9 direction to perform the 0 direction positioning. The motor 10 rotates to move the slider 7 in the X direction, and moves the multilayer substrate in the X direction in the Y direction and the 0 direction. The positioning mechanism B of the positioning unit B (see FIG. 1, FIG. 2) is In the state of positioning, the multilayer substrate W is moved to the opening position of the opening unit C, and the chuck plate 27 is lowered by the air cylinder 31, and the multilayer substrate W is set on the table surface of the opening unit C. The bit unit B outputs the setting completion signal to the opening unit C. When the transporting mechanism Η of the positioning unit B receives the reception completion signal from the opening unit C, the support (suction) of the multilayer substrate W by the vacuum pad 32 is released, and In order to position and transport the next multilayer substrate W, it is returned to its original position. As mentioned above, the positioning of the plate-shaped workpiece (multilayer substrate W) put in the previous step according to a pair of guides provided on the plate-shaped workpiece can provide the next The processing device of the step. Although this embodiment has explained that the plate-shaped workpiece is a multilayer substrate W provided with a pair of guides M on its inner layer, and the photographing mechanism uses an X-ray generating device 4 a and an X-ray detector 4 b , But for those who have a pair of guides exposed on the surface of the plate-shaped workpiece, or use a general visible light camera as a photography mechanism, etc. ------! Llt! _ 装 i! J ----- Order ----- ---- Line (Please read the notes on the back before writing this page) Printed on the paper by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) -13 -Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Τ 44235 6 A7 ______B7 V. Description of the invention 〇1) (Inventive effect) According to the structure of the present invention, the conveying mechanism for conveying plate-shaped workpieces is composed of a positioning mechanism for plate-shaped workpieces. Therefore, a single imaging mechanism can photograph the plate-shaped One of the work positioning is used to position the plate-shaped workpiece on the position data obtained by the guide, which can simplify the structure of the device for transporting and positioning the plate-shaped workpiece and reduce the size. Also, because only a single unit is required, the photography mechanism is expensive. That's it, and you can reduce costs. The plate-shaped workpiece is a multi-layer substrate, and when a pair of guides provided on the multi-layer substrate is provided in the inner layer, an X-ray generating device for irradiating the plate-shaped workpiece with X-rays, and a photograph of a penetrating image of a pair of guides An imaging mechanism composed of an X-ray detector can photograph a pair of guides to obtain position data of the guides. Brief Description of the Drawings Fig. 1 is an overall front view showing the structure of a pilot hole opening system using a conveying device for a plate-like workpiece according to the present invention. Fig. 2 is an overall front view of a positioning unit constituted by a conveying device for a plate-like workpiece according to the present invention. Fig. 3 is an overall side view showing a positioning unit constituted by a conveying device using a plate-like workpiece according to the present invention. Fig. 4 is an overall top view showing a positioning unit constituted by a conveying device using a plate-like workpiece according to the present invention. Fig. 5 is an enlarged view of the stopper portion shown in Fig. 4. Fig. 6 is a top view of a conveying device for a plate-like workpiece. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) • 14-— — — — ————— — — — -ml · — — — ^ · 1111111 > (Please read the back first Please write this page again and again.] Printed by the Consumers' Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs Γ 442 35 6 A7 B7 V. Description of the invention 〇2) Figure 7 is a side view of the conveying device for plate-shaped workpieces. Fig. 8 is a front view of a conveying device for a plate-like workpiece. C Symbol description] A Input unit B Positioning unit W Multi-layer substrate (plate-like workpiece) Μ 1 Pair of guides M 1 First guide M 2 Second guide Η Transport mechanism 1 Conveyor 2 Stopper 3 Sensor 4 Photographic mechanism 4 a X-ray generating device 4 b X-ray generating device 4 c Protective tube 4 d X-ray protective curtain 4 e Cylinder 4 f X-ray door 5 Direct acting guide 6 Direct acting guide nut 7 Slider (please read first Note on the back? Matters are re-expanded to this page> This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) Γ 442356 Α7 Β7 V. Description of the invention 〇 3) 8 a-8 b Pulley Really move 9 0 Servo motor lb Direct action Guide nut Direct action Rail Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy 14a 15a 16a 17a 18a 19a 2 0 a 2 1a 2 2a 2 3a 2 3 c 2 4a 2 4c 2 5 2 6 12b Slider 14b 15b 1 6 b 1 7 b 18b 19b 2 0b 2 1 b 2 2b 2 3b 2 3d 2 4b 2 7 2 8a, 2 8 b 2 9a, 29b directly The guide nut is used to connect the component bracket nut ball screw bearing motor bracket servo motor coupler rod long hole cam follower follower shaft bearing rotating plate chuck plate {Please read the precautions on the back first and then mine Ubon Page) This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) A7 ί 442 35 6 Β7 V. Description of the invention 0 4) 3 0 Linking member 3 1 Tr ^ t cylinder 3 2 Air hose 3 4 Chuck mechanism 3 5 Monitor ------------ I -----..---- Order.! ------ {Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is again applicable to China National Standard (CNS) A4 (210 X 297 mm)