TW436459B - Storage apparatus having synchronously accessing ports and automatic conveying system - Google Patents

Abstract

Disclosed is an automatic conveying system, including at least one conveying cart, a conveying track, and a storage apparatus having synchronously accessing ports. The conveying track has a fixed conveying direction, and the conveying cart is for loading/unloading materials and supplies that travel along the conveying track. The storage apparatus includes a storage body, a first accessing port and a second accessing port, both being separated by a fixed distance and installed on the storage body. The foregoing fixed distance is sufficient to allow the two conveying carts to stop at the first and second accessing ports, respectively. According to the order of the conveying direction, the first accessing ports is intended for receiving the materials and supplies to be unloaded from the cart, and the second accessing ports is intended for exporting the materials and supplies to be loaded to the cart, such that not only may the storage apparatus utilize the first and second accessing ports simultaneously perform the accessing in order to unload/load the materials and supplies to two conveying carts, reducing the waiting time for the conveying cart, but the order of first-unloading/next-loading can allow the conveying carts match the conveying direction of the conveying track.

Description

A36A59 五、發明說明（l) 本發明係有關於一種搬送系統，特別有關於一種具有 同步存取埠之倉儲裝置及自動化搬送系統。 在目前所謂的8吋晶圓廠或更先進之1 2吋晶圓廠中， 主要係採用 AGV型（automatic guide vehicle)或 OHT 型 (overhead transportat ion)自動化搬送系統（AMHS : automatic material handling system)，如第1 至3 圖之 說明。 首先請參閱第1圖之的基本架構示意圖。其中，整個 廠房佈局係包括一中央走道丨00 ，在中央走道周圍則設置 有用來安裝機台之若干操作走道（〇pera1：ing bay)ii〇，當 機台對物料如整批（ΙοΟ之晶圓在製品（wafer in process)進行加工後，會送至前端之倉儲裝置 ljOUtocker)，再由倉儲裝置12〇輸出至令央走道1〇〇以傳 达至另一個倉儲裝置，以輸入至對應操作走道之機台，進 行下一個加工製程。 第2圖係顯示傳統AGV型自動化搬送系統之部分示童A36A59 V. Description of the invention (l) The present invention relates to a conveying system, and more particularly to a storage device with a synchronous access port and an automatic conveying system. In the so-called 8-inch fabs or more advanced 12-inch fabs, AGV (automatic guide vehicle) or OHT (overhead transport at ion) automatic handling systems (AMHS: automatic material handling system) are mainly used. , As illustrated in Figures 1 to 3. First, please refer to the basic architecture diagram in Figure 1. Among them, the entire plant layout includes a central aisle 丨 00, and around the central aisle are installed a number of operating aisles (〇pera: ing bay) ii〇, when the machine to the material such as the entire batch (Ιο〇 之 晶After processing the wafer in process, it will be sent to the front-end storage device (ljOUtocker), and then output from the storage device 120 to the Lingyang aisle 100 for transmission to another storage device for input to the corresponding operation. Aisle machine for next processing. Figure 2 shows part of a traditional AGV-type automated transfer system

d36A59 五、發明說明（2) -- 化搬運系統AMHS的瓶頸。此外’地面型台車142/144及存 取埠1 3 2接近地面之設計，使工作人員之操作空間相對縮 減而不敷使用。 一 第3圖係顯示另一種傳統OHT型自動化搬送系統之部分 示意圖。傳統OHT型自動化搬送系統係利用懸掛型搬送台 車來搬送物料，其中，配合第1圖之佈局，倉儲裝置15〇在 接近地面位置設置有一存取埠丨5 2，而懸掛型搬送台車 1 62/ 1 64則在中央走道丨00中沿軌道1γ〇行進以往來於各操 作走道11 0之間。當一載有物料之懸掛型台車丨62停靠於倉 儲裴置150旁時，會將載具163降下至存取埠152，以卸下 所載之物料供存取埠152輪入至倉儲裝置15〇内部’此時另 一部準備卸下或載入物料之懸掛型台車丨64，只能在一旁 =執道170上等待直到前一搬送台車162存取完成，此等待 ^間和載具1 63之升降時間即成為自動化搬運系統AMHS的 瓶頸。此外，存取埠1 5 2接近地面之設計，亦使工作人員 之操作空間相對縮減而不敷使用。 有鑑於此，為改善前述傳統搬送系統之缺失，本發明 提供一種自動化搬送系統，其包括至少一搬送台車，—搬 送轨道及一具有同步存取埠之倉儲裝置。其中搬送軌道具 有一既定搬送方向’搬送台車則用以載入/卸下物料並沿 搬送轨道行進，而倉儲裝置則包括一倉儲本體，一第一存 取埠及一第一存取埠，兩者相隔一既定距離而設置於倉儲〜 本體上，雨述既定距離係足以容許兩搬送台車各自停靠於、 第一、第—存取埠，且依據搬送方向之順序，第一存取埠d36A59 V. Description of the invention (2)-The bottleneck of AMHS of chemical handling system. In addition, the design of the ‘ground-type trolley 142/144 and access port 1 3 2 is close to the ground, so that the operating space of the staff is relatively reduced and inadequate. -Figure 3 is a schematic diagram showing part of another conventional OHT type automatic conveying system. The traditional OHT type automatic transfer system uses a suspension type transfer trolley to transfer materials. Among them, in accordance with the layout of Fig. 1, the storage device 15 has an access port 5 2 near the ground, and the suspension type transfer trolley 1 62 / 1 64 then travels along the track 1γ0 in the central aisle 丨 00, and has previously been between the operating aisles 110. When a suspended trolley with material 丨 62 is parked next to the storage Pei 150, the carrier 163 will be lowered to the access port 152, and the loaded material will be unloaded for the storage port 152 to be wheeled into the storage device 15 〇Internal 'At this time, another suspension trolley ready to be unloaded or loaded with materials 丨 64, can only wait on the side = the road 170 until the access of the previous transfer trolley 162 is completed, this waits for ^ and the carrier 1 The lifting time of 63 becomes the bottleneck of the automatic handling system AMHS. In addition, the design of the access port 15 2 close to the ground also makes the operating space of the staff relatively reduced and inadequate. In view of this, in order to improve the lack of the aforementioned traditional conveying system, the present invention provides an automated conveying system, which includes at least one conveying trolley, a conveying track, and a storage device having a synchronous access port. The transport track has a predetermined transport direction. The transport trolley is used to load / unload materials and travel along the transport track, and the storage device includes a storage body, a first access port and a first access port. It is located on the main body at a predetermined distance from each other. The predetermined distance in the rain is sufficient to allow the two transportation trolleys to be docked at the first, first, and access ports respectively, and according to the order of the transportation direction, the first access port

第5頁 436459 五、發明說明（3) 係用以接收台車 料以供台車載入 二存取蟑同時對 料’節省搬送台 可使搬送台車匹 一、第二存取埠 升降時間，另使 避免轨道如彎道 外’方便自動化 為讓本發明 顯易懂，下文特 細說明如下： 圖式'之簡單說明 卸下之 ，如此 兩輛搬 車之等 配搬送 之位置 第一、 部分突 搬送系 之上述 舉一較 物料， ’不僅 送台車 待時間 軌道之 提向至 第二存 出於中 統之隔 和其他 佳實施 而第二存取埠係用以輸出物 可使倉儲裝置利用第一、第 進行存取以卸下/載入物 ，且先卸下/再载入’之順序 搬送方向，此外，另可使第 轨道的高度，可節省存取之 取埠偏移一既定位置，可以 央走道（倉儲裝置侧壁）之 間佈局。 目的、特徵、和優點能更明 例’並配合所附圖式，作詳 第1圖係顯示自動化搬送系統之基本架構示意圖。 第2圖係顯示傳統AGV型自動化搬送系統部分示意圖、 第3圖係顯示另一種傳統H0T型自動化搬送系統分示 意圖。 第4A圖顯示本發明之一實施例中具有同步存取埠之倉 儲裝置示意圖。 第4B圖則顯示包含第4A圖之倉儲裝置之自動化搬送系 統橫剖面圖。 [符號說明] 100〜中央走道；110〜操作走道；120、130、150、 200〜倉儲；132、152~存取埠；142、144地面型台車；Page 5 436459 V. Description of the invention (3) It is used to receive the material of the trolley for loading by the trolley. Secondly, the cockroach can simultaneously control the material. 'Saving the transport platform can make the transport trolley 1 and the second access port rise and fall time, and Avoiding tracks such as out of the curve, 'convenient automation' To make the present invention easier to understand, the following detailed description is as follows: The simple description of the diagram 'removes it so that the two transport vehicles are equipped with the same transport position. The above mentioned materials are compared, 'not only sending the trolley to wait for the time track to the second storage in the middle of the system and other good implementation, and the second access port is used to output things that can make the storage device use the first, The first access is to unload / load items, and the unloading / reloading order first conveys the direction. In addition, the height of the first track can be saved, and the access port can be saved to offset a predetermined position. Layout between central walkways (side wall of storage device). The purpose, features, and advantages can be more clearly illustrated and detailed in conjunction with the attached drawings. Figure 1 is a schematic diagram showing the basic structure of an automated transfer system. Fig. 2 is a schematic diagram showing a part of a conventional AGV type automatic conveying system, and Fig. 3 is a schematic view showing another conventional H0T type automatic conveying system. FIG. 4A is a schematic diagram of a storage device having a synchronous access port according to an embodiment of the present invention. Figure 4B shows a cross-sectional view of the automated transfer system including the storage device of Figure 4A. [Symbol description] 100 ~ central aisle; 110 ~ operation aisle; 120, 130, 150, 200 ~ storage; 132, 152 ~ access port; 142, 144 ground type trolleys;

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162、164〜懸掛型台車；170、270〜轨道；163〜升降裝置； 202、202 ~輸入埠；204、204’〜輸出埠；210〜倉儲本體； 2 7 2 ~彎道。 實施例 請參閱第4A、4B圖，其中，第4A圖顯示本發明之一實 施例中具有同步存取埠之倉儲裝置示意圖。第4B圖則顯示 包含第4A圖之倉儲裝置之自動化搬送系統橫剖面圖。此 外’在本例中之自動化搬送系統係以〇HT型為例，但其不 應據此限制本發明，其他如A G V型或其他類型之自動化系 統亦可適用。 首先依據第4A、4B圖所示，並參考第1圖之佈局，自 動化搬送系統包括至少一搬送台車如懸掛型台車 262/264，一搬送軌道270，設置於中央走道1〇〇上，及一 具有同步存取埠202/204之倉儲裝置200。其中搬送軌道 270具有一既定搬送方向如逆時針搬送方向，搬送台車-2 6 2 / 2 6 4則用以載入/卸下物料如整批之晶圓在製品，其並 沿搬送軌道270行進。 而倉儲裝置20 0則包括一倉儲本體210，一第一存取璋 202及一第二存取埠204，其中’第二存取埠2〇4係向外延 伸’使兩者相隔一既定距離d3而設置於倉儲本體21〇之兩 側壁上，前述既定距離係足以容許兩搬送台車262/264各 自停靠於第一、第二存取埠20 2/2 0 4。另外，依據逆時針 c 搬送方向之順序’第一存取埠202係用以接收台車262卸下 之物料，而第二存取埠204係用以輸出物料以供台車264載162, 164 ~ suspension type trolley; 170, 270 ~ rail; 163 ~ lifting device; 202, 202 ~ input port; 204, 204 '~ output port; 210 ~ storage body; 2 7 2 ~ curve. Embodiments Please refer to Figs. 4A and 4B, wherein Fig. 4A shows a schematic diagram of a storage device having a synchronous access port according to an embodiment of the present invention. Figure 4B shows a cross-sectional view of the automated transfer system including the storage device of Figure 4A. In addition, the automatic conveying system in this example is an HT type as an example, but it should not limit the invention accordingly, and other automatic systems such as A G V type or other types can also be applied. First, according to Figures 4A and 4B, and referring to the layout of Figure 1, the automated transfer system includes at least one transfer trolley such as a suspension trolley 262/264, a transfer track 270, which is set on the central aisle 100, and one Storage device 200 with synchronous access ports 202/204. Among them, the conveying track 270 has a predetermined conveying direction such as a counterclockwise conveying direction, and the conveying trolley-2 6 2/2 64 is used to load / unload materials such as a whole batch of wafers in process, and travel along the conveying track 270 . The storage device 200 includes a storage body 210, a first access port 202, and a second access port 204. The 'second access port 204 extends outwards' to separate the two from each other by a predetermined distance. d3 is set on the two side walls of the storage body 21, the aforementioned predetermined distance is sufficient to allow the two transfer trolleys 262/264 to dock at the first and second access ports 20 2/2 0 4 respectively. In addition, according to the order of the counterclockwise c conveying direction ’, the first access port 202 is used to receive the material unloaded by the trolley 262, and the second access port 204 is used to output the material for loading by the trolley 264.

第7頁 436459 五、發明說明（5) 入’如此’不僅可使倉儲裝置2〇〇利用第一、第二存取蜂 202/204同時對兩輛搬送台車262/264進行存取以卸下/裁 入物料’節省搬送台車262之等待時間，且先卸下/再栽入 之順序可使搬送台車262/264匹配搬送執道270之搬送方 向。 此外’由於本實施例係應用於OHT系統，故可使第 一、第二存取埠202/204之位置提高至約與軌道270等高的 高度’可節省前述傳統自動化搬送系統中，將載具1 63升 降至存取埠之升降時間。 搬送軌道270更包括一彎道部分272，其藉彎道出口與 直線搬送軌道271連接，而為使搬送台車262能停靠於第一 存取埠20 2上，其中心點與彎道出口之相距距離d2，應恰 使搬送台車2 6 2尾端之停止點位於彎道出口處之後，如位 於直線軌道271上。 此外，使第一、第二存取璋202/204偏移倉儲裝置乏 本體2 1 0中心一既定位置，使軌道2 隨之偏移既定距離 dl ’可以避免彎道部分272突出於中央走道1〇〇末端即倉儲 裝置外侧壁之延伸線外，方便自動化搬送系統之隔間佈 局。 另外’本發明之實施例亦可於倉儲裝置2〇〇於接近地 面處之倉儲本體上設置存取琿202, /204，，以進行物料之 人工搬送’亦即’自動化搬送系統與人工搬送系統（pGV : personal guide vehicle)可同時存在而不互相衝突。 本發明之實施例亦可應用於A G V系統，此時只需將第Page 7 436459 V. Description of the invention (5) Entering 'this' not only allows the storage device 2000 to use the first and second access bees 202/204 to simultaneously access two transport trolleys 262/264 for unloading / Cut-in material 'saves the waiting time of the transfer trolley 262, and the order of unloading / re-planting can make the transfer trolley 262/264 match the transfer direction of the transfer lane 270. In addition, 'this embodiment is applied to the OHT system, so that the positions of the first and second access ports 202/204 can be increased to a height about the same as the track 270', which can save the aforementioned conventional automatic conveying system, With 1 63 rise and fall time to the access port. The transport track 270 further includes a curve section 272, which is connected to the linear transport track 271 by the exit of the curve, and in order for the transport trolley 262 to be docked on the first access port 202, the center point is away from the exit of the curve The distance d2 should be such that the stopping point at the end of the transport trolley 2 6 2 is behind the exit of the curve, such as on a straight track 271. In addition, offsetting the first and second access 璋 202/204 from the storage device ’s lack of body 2 1 0 to a predetermined position in the center and offsetting the track 2 with a predetermined distance dl ′ can prevent the curved portion 272 from protruding from the central aisle 1 〇〇The end is outside the extension line of the outer wall of the storage device, which facilitates the layout of the compartments of the automated transfer system. In addition, 'the embodiment of the present invention can also set the storage unit 200 on the storage body near the ground to store and store 202, / 204, to carry out the manual transfer of materials', that is, the "automatic transfer system and the manual transfer system" (PGV: personal guide vehicle) can exist simultaneously without conflicting with each other. The embodiment of the present invention can also be applied to the A G V system.

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=、第二存取埠20 2/204之設計移至地面即可，亦即若搬 送台車係沿一既定搬送方向於地面行進，則第一、第二存 取埠可設置於接近地面處之倉儲本體21〇上，以同時供兩 搬送台車各自停靠於該第…第二存取蟑。且若依據搬送 方向之順序’帛一存取埠可用以接收搬送台車卸下之物 料，=第二存取埠可用以輸出物料以供該搬送台車载入。 凊參閱表一，其顯示傳統〇HT自動搬送系統利用不同 台車數於軌道上每小時之平均搬送次數。 表一 台車數 1 2 3 4 5 6 Move/hour 35.9 71.9 108.0 132.0 144.1 144.2 # =傳統倉儲裝置並設置4部懸掛型搬送台車於軌道上 之》又疋為例，一部台車之每小時平均搬送次數為1 3 2次， 因此，平均每台車之每次搬送所需時間約為 (4*60*60/ 1 32 = 109·2)秒，而每次載入/卸下所需之存取 間约為20秒。若採用本實施例之倉儲裝置，則由於第一: 存取埠可以同時供兩部台車使用，所以每次搬送岣可 節省一次載入/卸下所需之存取時間2〇秒，此外，由於第 、第—存取埠之位置提高至與軌道高度相當，故.可節 載具之一次升降時間，約1 〇秒左右，如此，在平均每台 之每次搬送所需時間約為（4*60*60 / 1 32=1 ()9.2)秒的情〇死、 下’約可節省30秒’即達約27%( 30 / 1 0 9. 2 )之改善效果。=, The design of the second access port 20 2/204 can be moved to the ground, that is, if the transport trolley travels on the ground in a predetermined transport direction, the first and second access ports can be set near the ground The storage main body 21 is provided for the two transfer trolleys to be docked at the first ... second access roach at the same time. And if according to the order of the conveying direction ', one access port can be used to receive the material unloaded by the conveying trolley, = the second access port can be used to output the material for loading by the conveying trolley.凊 Refer to Table 1, which shows the average number of transfers per hour on the track by the traditional OHTS automatic transfer system using different numbers of cars. Table 1 Number of vehicles 1 2 3 4 5 6 Move / hour 35.9 71.9 108.0 132.0 144.1 144.2 # = Traditional storage device and setting 4 suspension-type transport trolleys on the track "Another example, the average hourly transport of a trolley The number of times is 1 3 2 times. Therefore, the average time required for each transfer of each vehicle is approximately (4 * 60 * 60/1 32 = 109.2) seconds, and the access required for each load / unload Time is about 20 seconds. If the storage device of this embodiment is used, since the first: the access port can be used by two trolleys at the same time, each transfer can save 20 seconds of access time required for loading / unloading. In addition, Because the position of the first and the first access port is increased to be equivalent to the track height, the time for one lift of the vehicle can be reduced to about 10 seconds. In this way, the average time required for each transfer is approximately ( 4 * 60 * 60/1 32 = 1 () 9.2) seconds of the situation 0 death, the next 'about 30 seconds can be saved' that is about 27% (30/1 0 9. 2) improvement effect.

第9頁 436459 . 五、發明說明（7) 下’約可節省3 0秒’即達約2 7% ( 3 0 /1 0 9. 2 )之改善效果。 換言之’使用本實施例之倉儲裝置，可在相同的台車數 增加自動化搬送系統約27%的效率，或者在相同的效 :相當於減少一部台車之使用，對於降低成本亦有所 以限ΠΐΓ'已以一較佳實施例揭露如了 ’然其並非用 二月，任何熟習此技藝者，在不脫離本發明之精 ^當可做些…動與潤飾，㈤此本發明之保 田見後附之申請專利範圍所界定者為準。Page 9 436459. V. Description of the invention (7) The improvement effect of “about 30 seconds saving” is about 2 7% (3 0/1 0 9. 2). In other words, 'using the storage device of this embodiment can increase the efficiency of the automatic conveying system by about 27% at the same number of trolleys, or at the same effect: equivalent to reducing the use of one trolley, and there are limits to reducing costs. ΠΐΓ' It has been disclosed in a preferred embodiment that it is not used in February. Anyone skilled in this art can do more without departing from the essence of the present invention.... The scope of the patent application shall prevail.

Claims (1)

43 6459 六、申請專利範圍 1. 一種自動 一搬送執道 至少一搬送 向沿該搬送執道 —具有同步 层儲本體 一第一存取 於該倉儲 停靠於該 二存取蟑 及輸入自 如申請專 據該搬送 車卸下之 送台車載 如申請專 第一、第 如申請專 第一、第 避免該搬 如申請專 搬送軌道 彎道出口 而設置 車各自 一 '第 載入，2. 中，依 搬送台 供該搬 3. 中，該 等高。 4. 中，該 置，以 5. 中，該 分藉一 化搬送 ’具有 台車， 行進； 存取埠 ，及 埠及一 本體上 第~、 以自該 該搬送 利範圍 方向之 物料， 入。 利範圍 一存取 系統’其包括： ' 既搬送方向； 用以载入/卸下物料並依該搬送方 及 之倉儲裝置，包括 第二存取埠，兩者相隔一既定距離' ，該既定距離係足以容許兩搬送台 第一存取埠，並且其係透過該第 倉儲本體輸出物料而供該搬送台車 台車卸下之物料至該倉儲本體: 第1項所述之自動化搬送系 順序，該第—存取料//接收該 而该第一存取埠係用以輪出物料以 第1項所述之自動化搬送系統，其 埠之位置大約與該搬送軌道的高度 利範圍 一存取 送轨道 利範圍 第1項所述之自動化搬送系 埠係偏移該倉儲本體中心 突出於該倉儲裝置之外。 第1項所述之自動化搬送 彎道部分及一直線部分 v 與該直線部分連接。 包括一 其 既定位 其 該彎道部43 6459 6. Scope of patent application 1. An automatic conveying lane at least one conveying direction along the conveying lane—has a synchronization layer storage body, a first access to the warehouse, a stop at the two access cockroaches, and a free input application. According to the unloading platform of the transport vehicle, if the application is for the first, the first application for the first, and the avoidance of the transportation, such as the application for the special transportation of the curve exit of the track, the vehicles will be installed separately. Transfer station for the move 3. Medium, such high. 4. In the middle, the unit is set in 5. In the unit, the unit is transported with a trolley and traveled; the access port, and the port and a body on the first ~, with the material from the direction of the transport scope. A profit range access system 'which includes:' both the transport direction; used to load / unload materials and according to the transporter and the storage device, including the second access port, the two are separated by a predetermined distance ', the predetermined The distance is sufficient to allow the first access port of the two transfer stations, and it is the output of the material through the first storage body for the material unloaded by the transfer cart to the storage body: the sequence of the automatic transfer system described in item 1, the The first—receive material // receive the material and the first access port is used to rotate the material to the automatic conveying system described in item 1. The position of the port is approximately the same as the height of the conveying track. The automatic transportation system described in item 1 of the track range is offset from the center of the storage body and protrudes outside the storage device. The automatic conveyance described in item 1 The curved part and the straight part v are connected to the straight part. Including one which both locates the curve portion 第11頁 43^459 六、申請專利範圍 6. 如 中 請 專 利範 圍 第5項所述之自動化搬送系絲， 中 ? 該 第 一 存 取 i皁之 中 心點與 該搬送軌道之彎道出口 距 距 離 9 係 使 該 搬送 台 車尾端 之停土點位於該彎道出 之 後 〇 中 7. 如 中 請 專 利範 圍 第1項所述之自動化搬送系絲， 9 該 倉儲 裝 置 於接 近 地面處 之倉儲本體上’更包括 _二_ 第 四 存 取 埠 ，以 進行物料 之人工搬送。 中 8 · 如 Ψ 請 專 利範 圍 第1項所述之自動化搬送系絲· 9 該 物 料 為 晶 圓在 製 品 。 第 v -·«-* OO u 9·—種具有同步存取琿之倉儲裝置’適用於〜 搬送系統’該自動化搬送***包括-搬送執道，具：動化 定搬送方向，至少一搬送U，用以載入/卸下物具钭有:既 忒搬送方向沿搬送軌道行進，該具有同步存取埠之 又 置，包括： 吨瑕 —倉儲本體；及 - 机"'第—存取埠及一第二存取埠，兩者相隔—既定距離 而D又置於該倉儲本體上，該既定距離係足以容許兩搬送台 車各自停靠於該第一、第二存取埠’其中，依據該搬送方 向之順序，該第一存取埠係用以操收該搬送台車卸下之物 料，而該第二存取埠係用以輸出物料以供該搬送台車載 入0 ι〇.如申請專利範圍第9項所述之倉儲裝置，其中，該 第一、第二存取埠之位置大約與該撇送轨道的高度等高。 436459 六、申請專利範圍 第一、第二存取埠係偏移 τ叩_以球言條个胳甲心一既贪 避免該搬送執道突出於該倉儲裝置之外。 ^ 12_如申請專利範圍第9虛斛述之^ 以 、八叫"、蝴居辟取I心外 0 、上 .如申請專利範圍第9項所述之 适轨道包括-彎道部分及- ’其 y刀藉該彎道出口與該直線部分連接，I該第一存二埠這部 t點與該搬送軌道之彎道出口之相距距離，係使諸=之中 車尾端之停止點位於該彎道出口處之後的i線部e二送台 1 3.如申請專利範圍第9項所述之 該倉儲裝置於接近地面處之倉儲本體上，’其 第四在而+έ ......…^ #〜第 中 中 第四存取埠，以進行物料之人工搬送> 14·如申請專利範圍第丨3所述之 該私7 Μ劣 « ^ . ··Page 11 43 ^ 459 6. Scope of patent application 6. The automatic transfer line described in item 5 of the patent scope, middle? The distance between the center point of the first access i soap and the exit of the curve of the transfer track Distance 9 means that the earthing point at the tail end of the transfer trolley is located after the exit of the curve. Middle 7. As described in item 1 of the patent application, the automatic transfer system wire, 9 The storage device is located near the ground. The above also includes a _two_ fourth access port for manual transfer of materials. Medium 8 · If Ψ please patent the automatic transfer system described in item 1 · 9 The material is a wafer-shaped product. Section v-· «-* OO u 9 · —A kind of storage device with synchronous access' 'Applicable to ~ Transfer System' This automated transfer system includes-transfer lanes, with: mobilization to determine the transfer direction, at least one transfer U For loading / unloading objects: both in the conveying direction and along the conveying track, the synchronous access ports are also included, including: ton defect—warehouse body; and-machine " '第 —access Port and a second access port, which are separated by a predetermined distance and D is placed on the storage body, the predetermined distance is sufficient to allow the two transfer trolleys to dock at the first and second access ports, respectively, according to In the order of the transport direction, the first access port is used to handle the materials unloaded by the transport trolley, and the second access port is used to output materials for the transport trolley to load 0 μm. The storage device according to item 9 of the patent, wherein the positions of the first and second access ports are approximately equal to the height of the skimming track. 436459 VI. Scope of patent application. The first and second access ports are offset. Τ 叩 _ Use the words to make sure that you are both greedy and avoid the removal of the transport sticking out of the storage device. ^ 12_ As described in the ninth virtual patent application scope of the patent application, "Yi, Bajiao", butterfly house I take the heart outside 0, up. The suitable track as described in the ninth scope of the patent application application includes-curve part and -'Its y knife is connected to the straight line by the exit of the curve, i the distance between the point t of the first storage and the second port and the exit of the curve of the transport track is to stop the middle end of the car The point is located at the i-line section e second delivery platform 1 after the exit of the curve. 3. As described in item 9 of the scope of the patent application, the storage device is located on the storage body near the ground, 'its fourth is ++. ........ ^ # ~ The fourth access port in the middle, middle, and middle for manual transfer of materials > 14 · The private 7 Μ inferior as described in the scope of patent application 丨 3 «^. ·· 其 該物料為晶圓在製品。 5* 種具有同步存取埠之倉健裝置’適用於具右 ν—搬送台車之自動化搬送系統，包括： 至 —倉儲本體；及 _ • 第—存取埠及一第二存取埠，兩者相隔一既定距 而設置於該倉儲本體上，該既定距離係足以容許兩搬送Α 車各自停靠於該第一、第二存取埠，並且其係透過該第Q 二、第二存取埠以自該倉儲本體輸出晶圓在製品而供該搬 送台車載入，及輸入自該搬送台卓卸下之晶圓在製品至 倉儲本體。 纟餽装μ 1 6.如申請專利範圍第丨5項所述之良， 其中〃’該搬送台車係一既定搬送方向於地面行進，且該第 —、第二存取埠係設置於接近地面處之倉儲本體上，以同The material is a wafer in process. 5 * warehouse equipment with synchronous access port 'suitable for automatic conveying system with right ν—carriage trolley, including: to—warehouse body; and _ • first access port and a second access port, two It is arranged on the storage body at a predetermined distance from each other, and the predetermined distance is sufficient to allow the two transportation A cars to stop at the first and second access ports respectively, and it is through the Q second and second access ports The wafer work-in-progress is output from the warehouse body for loading by the transfer cart, and the wafer work-in-process unloaded from the transport platform is input to the warehouse body.纟 Feeding μ 1 6. As good as described in item 丨 5 of the scope of patent application, where 〃'the transport trolley is traveling in a predetermined transport direction on the ground, and the first and second access ports are set close to the ground On the storage body, the same 第13貢 436459 六、申請專利範圍 第二存取埠 時供兩搬送台車各自停靠於該第 ， 1 7.如申請專利範圍第1 6項所述之倉儲裝置，直中， 存取蜂係用以接收該搬送 在衣°〇以供該搬送台車載入。 ’、用以輪出晶圓No. 13 tribute 436459 6. When the second access port of the patent application is applied, the two transportation trolleys can be docked at the first, 1 7. The storage device as described in item 16 of the patent application application, which can be used for direct access and bee access. In order to receive the carrying clothes, the loading trolley is loaded. ’, Used to roll out wafers 第14頁Page 14